WO2023216739A1 - Multi-level staggered material box storage apparatus,material discharge and sorting device, and sorting system - Google Patents

Multi-level staggered material box storage apparatus,material discharge and sorting device, and sorting system Download PDF

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Publication number
WO2023216739A1
WO2023216739A1 PCT/CN2023/083871 CN2023083871W WO2023216739A1 WO 2023216739 A1 WO2023216739 A1 WO 2023216739A1 CN 2023083871 W CN2023083871 W CN 2023083871W WO 2023216739 A1 WO2023216739 A1 WO 2023216739A1
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WO
WIPO (PCT)
Prior art keywords
box
material box
assembly
slide rail
staggered
Prior art date
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PCT/CN2023/083871
Other languages
French (fr)
Chinese (zh)
Inventor
顾烨
庄再城
吴屹慧
熊勇
曹葵康
薛峰
Original Assignee
苏州天准科技股份有限公司
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Publication of WO2023216739A1 publication Critical patent/WO2023216739A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/38Collecting or arranging articles in groups
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • B07C5/362Separating or distributor mechanisms
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention belongs to the field of silicon wafer detection and sorting, and relates to blanking and storage technology. Specifically, it discloses a multi-layer staggered box storage device, blanking and sorting equipment and a sorting system.
  • Silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, such as the blanking disclosed in the patent applied for by our company (publication number CN112605010A) Sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracking and other items of the solar silicon wafers sliced and cleaned. Measurement and inspection, and according to the sorting menu, the silicon wafers are automatically sorted into different boxes according to quality grade requirements, fully meeting the quality control needs of the silicon wafer manufacturers, and is an indispensable link in production.
  • the existing silicon wafer storage box mechanism usually includes multiple storage boxes spaced up and down, or storage boxes spaced up and down to avoid vibration (such as our company's CN215390948U patent); however, the above-mentioned box structure limits the use of a single box. Capacity, and the replacement of the material box is time-consuming and laborious, and it is difficult to ensure that the working position of the material box is highly consistent after replacement.
  • the purpose of the present invention is to provide a multi-layer staggered box storage device, a blanking and sorting equipment and a sorting system, which can solve the above problems.
  • the material box storage device includes a material box slide rail assembly, a material box assembly, a staggered driving assembly, a vertical guide rail assembly, a vertical driving assembly, and a material changing warning button arranged on a storage rack.
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and A plurality of the material box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive the material box assemblies to slide along the material box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; except for the top layer of materials
  • the box assemblies are all connected to the box slide rail assembly through the vertical guide rail assembly;
  • the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down to facilitate Reach the preset material receiving height or exit and replace the material box; multiple of the material changing warning buttons are used to prompt whether the corresponding material box component is full of material and the empty box is in place, and are used to send a material box exit or loading signal to the material box controller ;
  • the staggered drive assembly, the vertical drive assembly and the material change warning button are
  • the storage rack includes a main storage vertical plate and a storage bottom plate for supporting the entire device.
  • the magazine slide rail assembly includes a magazine slide rail, a slide block, a magazine pad, an outer end buffer block and a slide block position sensor; multiple magazine slide rails are installed in parallel up and down to the main storage stand.
  • the slider On the storage surface of the board, the slider is slidably connected to the material box slide rail, and the material box assembly is installed on the slider through the material box pad; the outer end buffer block is installed on the material box slide rail. The outer end is used for buffering the end of the slider; multiple slider position sensors are installed on the main storage vertical plate and are arranged under the slide rail of the box.
  • the magazine assembly includes a magazine adapter, a magazine bracket, a magazine specification adjustment pad, a magazine guide stop column and a resin plate; wherein, the magazine adapter of the top magazine assembly Connect directly to all On the box pad, the box adapters of the lower box assemblies at each level pass through the vertical guide rail assembly and then are connected to the box pad; the box bracket is tilted toward the lower side of the outer end. is connected to the material box adapter, the position of the material box specification adjustment pad is adjustable and installed on the material box bracket, and the material box is set at the outer end of the material box specification adjustment pad
  • the guide stop column and the resin plate with optional specifications are laid on the specification adjustment pad of the material box to directly receive and support the blanking of silicon wafers.
  • the staggered drive assembly includes a box drive motor, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp; the box drive motor and synchronous wheel set are installed on the main storage vertical plate; the synchronous belt set The part parallel to the magazine slide rail is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps to realize the staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
  • the vertical guide rail assembly includes a lifting slide rail and a lifting slide block; the lifting slide block is connected to the magazine pad of the magazine slide rail assembly corresponding to the magazine assembly to be lifted, and the lifting slide rail is The upper part is connected to the magazine adapter of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
  • the vertical driving assembly includes a lifting cylinder, a lifting solenoid valve, a lifting bottom plate and a lifting bottom limit block.
  • the cylinder body of the lifting cylinder is fixed to the main storage vertical plate.
  • the bottom of the driving rod of the lifting cylinder Connected to the lifting base plate, when the vertical guide rail assembly moves to the lifting bottom limit block, the lifting solenoid valve is activated to drive the lifting base plate to move up and down to realize the lifting drive of the vertical guide rail assembly.
  • the vertical drive assembly includes a lifting cylinder and a lifting solenoid valve.
  • the cylinder body of the lifting cylinder is fixed to the main storage vertical plate.
  • the bottom of the driving rod of the lifting cylinder is connected to the lifting base plate.
  • the lifting and lowering drive of the vertical guide rail assembly is realized under the control of the lifting solenoid valve.
  • the invention also discloses a blanking and sorting equipment.
  • the blanking and sorting equipment includes a slicing device installed on the blanking frame, a material box storage device installed on both discharge ends of the slicing device, and a blanking central axis belt.
  • the top plate frame is arranged above the flow line of the unloading center axis belt; a plurality of slicing devices are arranged at intervals along the flow line of the unloading center axis belt, and their tops are connected to the lower surface of the top plate of the top plate frame.
  • a material box storage device is provided at the left and right ends of each slicing device; the tail material box is placed directly opposite the tail end of the unloading central axis belt streamline, and is used to carry miscellaneous silicon wafers or undetected silicon wafers. Silicon wafer; wherein, the box storage device adopts the aforementioned multi-layer staggered box storage device.
  • the invention also provides an intelligent silicon wafer sorting system.
  • the sorting system includes loading equipment, detection equipment and the aforementioned unloading and sorting equipment; a material type detection device is provided between the loading equipment and the detection equipment. And a debris removal device is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.
  • the beneficial effect of the present invention is that: compared with the previous generation or existing material boxes, the multi-layer staggered material box storage device of the present application adopts a staggered arrangement and integrates in-place detection and material full sensing. , the material boxes are staggered to supply and receive materials, which reduces the time caused by changing the material boxes, improves the operating efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.
  • Figures 1-3 are schematic views of the multi-layer staggered box storage device of the present invention from different perspectives;
  • Figure 4 is a schematic diagram of the blanking and sorting equipment
  • Figures 5 and 6 are schematic layout diagrams of the multi-layer staggered box storage device, blanking and sorting equipment, and the flow lines of the blanking axis belt;
  • Figure 7 is a schematic diagram of the intelligent silicon wafer sorting system.
  • Pulley protection cover 2501. Lifting slide rail; 2502. Lifting slide block; 2601. Lifting cylinder; 2602. Lifting solenoid valve; 2603. Lifting bottom plate; 2604. Lifting bottom limit block; 2605.
  • Material box position sensor assembly 2700. Material change warning button; 3000, blanking center axis belt streamline; 4000, tailing box; 5000, roof rack; 6000, blanking rack; 7000, blanking transition mechanism; 8000, emergency stop mechanism; 9000, buzzer; 20000, testing equipment; 30000, loading equipment; 40000, material type detection device; 50000, debris removal device.
  • the box storage device 2000 includes a box slide assembly, a box assembly, a staggered drive assembly, a vertical guide rail assembly, and a vertical rail assembly. Direct drive assembly, refueling warning button and magazine controller.
  • a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack.
  • the box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive two groups of adjacent upper and lower box assemblies to slide staggered along the box slide rail assembly to send the box assemblies to the material receiving position or the box changing position; except for the top layer
  • the material box components are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive component is drivingly connected to The vertical guide rail assembly is used to drive the vertical guide rail assembly to move up and down in order to reach the preset material receiving height or exit the replacement material box; a plurality of the material replacement warning buttons are used to prompt whether the corresponding material box assembly is full of material and The empty box is in place and used to send a box ejection or loading signal to the box controller.
  • the staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the material receiving, full material withdrawal and replacement of multiple material box components. .
  • the box storage device 2000 uses a double-layer box, using two sets of box slide rail assemblies, two box assemblies, a staggered drive assembly, a vertical guide rail assembly, and a vertical drive. components and two refueling warning buttons.
  • the storage rack includes a main storage vertical plate 2101 and a storage bottom plate 2102, which are used to support the entire device.
  • the storage rack also includes an outer end vertical plate 2103, a main protective cover 2014 and a motor protective cover 2015.
  • the outer end vertical plate 2103 is provided at the outer end of the main storage vertical plate 2101.
  • the main protective cover 2014 is provided at the main storage vertical plate.
  • the motor protective cover 2015 is provided at the outer end vertical plate 2103.
  • the cartridge slide rail assembly includes a cartridge slide rail 2201, a slider 2202, a cartridge pad 2203, an outer end buffer block 2204 and a slider position sensor 2205.
  • a plurality of magazine slide rails 2201 are installed parallel to each other up and down on the storage surface of the main storage vertical plate 2101.
  • the slider 2202 is slidably sleeved on the magazine slide rails 2201.
  • the box assembly is installed on the slider 2202 through the box pad 2203; the outer end buffer block 2204 is installed on the outer end of the box slide rail 2201 for buffering the end of the slider 2202 in place;
  • a plurality of slider position sensors 2205 are installed on the main storage vertical plate 2101 and are arranged below the magazine slide rail 2201 .
  • the material box assembly includes a material box adapter 2301, a material box bracket 2302, a material box specification adjustment piece
  • the magazine adapter 2301 passes through the vertical guide rail assembly and then is connected to the magazine pad 2203; the magazine bracket 2302 is connected to the magazine adapter 2301 at an angle toward the lower side of the outer end.
  • the position of the box specification adjustment pad 2303 is adjustable and installed on the box bracket 2302, and the box guide stop post 2304 is provided at the outer end of the box specification adjustment pad 2303.
  • An optional resin board 2305 is laid on the box specification adjustment pad 2303 to directly receive and support silicon wafer blanking.
  • the lower level material box assemblies also include lifting top limiting blocks 2306, which are provided on the material box adapter 2301 and are arranged directly above the vertical guide rail assembly.
  • box bracket 2302 is L-shaped or concave, and is adjustable front and rear and/or left and right, wherein a long slot hole in the front and rear direction is opened on the bottom plate of the box bracket 2302 for Box specification adjustment pad 2303 position adjustment.
  • the staggered driving assembly includes a box driving motor 2401, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp 2402; the box driving motor 2401 and the synchronous wheel set are installed on the main storage vertical plate 2101.
  • the part of the synchronous belt group that is parallel to the magazine slide rail 2201 is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps 2402 to realize staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
  • the parallel-driven synchronous belt is connected to the slider 2202 or the magazine pad 2203 of the magazine slide rail assembly through two synchronous belt clamps 2402 to realize the staggered driving assembly to drive two adjacent magazine slide rail assemblies and The magazine components move staggered along the magazine slide rail 2201.
  • the synchronous wheel set includes a driving wheel 2403, a double-ended transmission wheel 2404 and a horizontal inner end transmission wheel 2405, wherein the horizontal inner end transmission wheel 2405 and the double-end transmission wheel 2404 have the same specifications and are arranged flush with each other horizontally.
  • the synchronous belt set includes a driving synchronous belt 2406 and a transmission synchronous belt 2407.
  • the driving synchronous belt 2406 is installed on one of the driving wheel 2403 and the double-ended transmission wheel 2404 to realize power input; the transmission
  • the synchronous belt 2407 is arranged on the wheel head of the horizontal inner end transmission wheel 2405 and the double-ended transmission wheel 2404 on the same side.
  • the motor and pulley can also be arranged on the same side, and the conveyor belt uses one belt for a group of box components. These can be arranged according to the actual installation space and scene.
  • a pulley protective cover 2408 is provided at the wheel head of the double-ended transmission wheel 2404 on the same side as the horizontal inner end transmission wheel 2405.
  • the vertical guide rail assembly includes a lifting slide rail 2501 and a lifting slide block 2502; the lifting slide block 2502 is connected with the cartridge pad 2203 of the cartridge slide rail assembly corresponding to the cartridge assembly to be lifted.
  • the upper part of the slide rail 2501 is connected to the magazine adapter 2301 of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
  • the vertical drive assembly includes a lifting cylinder 2601, a lifting solenoid valve 2602, a lifting bottom plate 2603 and a lifting bottom limit block 2604.
  • the cylinder body of the lifting cylinder 2601 is fixed to the main storage vertical plate 2101.
  • the lifting cylinder 2601 The bottom of the driving rod is connected to the lifting bottom plate 2603.
  • the lifting solenoid valve 2602 is activated to drive the lifting bottom plate 2603 to move up and down to realize the lifting drive of the vertical guide rail assembly. .
  • the vertical drive assembly also includes a material box in-position sensor component 2605.
  • the material box in-position sensor component 2605 is installed on the main storage vertical plate 2101 and is used to detect whether the corresponding material box component in the lower layer reaches the top material receiving position.
  • the number of the refueling warning buttons 2700 is equal to the number of the material box components. They are connected to the top of the main storage vertical plate 2101 through the bottom plate of the material box button.
  • the refueling warning buttons use different display colors to display the material. The box is in place, the box is full and the box is loaded, and press the button in the corresponding state. button to trigger the corresponding drive control signal.
  • the blanking and sorting equipment 10000 includes a slicing device 1000 installed on the blanking frame 6000, and a box storage device installed on both discharge ends of the slicing device 1000. 2000, 3000 for the blanking center axis belt streamline, 4000 for the tail material box and 5000 for the top plate frame.
  • the blanking central axis belt streamline 3000 is installed on the blanking frame 6000 along the central axis, and the top plate frame 5000 is arranged above the blanking central axis belt streamline 3000; multiple points The slicing devices 1000 are arranged at intervals along the cutting axis belt streamline 3000, and the top thereof is connected to the lower surface of the top plate of the top plate frame 5000; a material box is provided at both left and right ends of each slicing device 1000 Storage device 2000; the tail material box 4000 is placed directly opposite the tail end of the blanking axis belt streamline 3000, and is used to carry miscellaneous silicon wafers or untested silicon wafers; wherein, the material box storage device 2000 adopts The aforementioned multi-layer staggered box storage device.
  • the blanking and sorting equipment 10000 also includes a blanking transition mechanism 7000, an emergency stop mechanism 8000, and a buzzer 9000.
  • the blanking transition mechanism 7000 is provided at the front end of the blanking center axis belt streamline 3000 for connecting the upstream
  • the silicon wafers that have been inspected by the process are transitionally guided to the blanking center axis belt streamline 3000 with a flush top surface.
  • a plurality of the emergency stop mechanisms 8000 are arranged around the unloading frame 6000, so that workers can conveniently and quickly stop the machine when encountering an emergency.
  • the buzzer 9000 is installed on the outer periphery of the unloading frame 6000 . Not shown in the figure, alarms such as three-color lights can also be set at the unloading rack 6000.
  • two sets of symmetrically arranged box storage devices 2000 are arranged at the two discharging ends of a slicing device 1000.
  • the unloading central axis belt streamline 3000 transports the detected material from the bottom to the slicing device 1000.
  • silicon wafer The slicing device 1000 transfers silicon wafers according to different types of defects to both ends into the magazine assembly of the magazine storage device 2000, and directly drops onto the resin plate 2305 of the magazine assembly at the material receiving position.
  • the material change warning button 2700 issues a full material warning, and the staff presses the button as needed.
  • the material box assembly retreats to the outer end, and manual or mechanical arms carry the silicon wafers in the material box assembly back to the warehouse.
  • the lower material box assembly extends forward and rises to the material receiving position to continue receiving silicon wafers.
  • the sorting system includes a loading equipment 30000, a detection equipment 20000 and the aforementioned unloading and sorting equipment 10000; it is set between the loading equipment 30000 and the detection equipment 20000.
  • the material type detection device 40000 and the fragment removal device 50000 are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 20000.
  • the system's unloading and sorting equipment 10000 adopts a non-contact adsorption slicing device 1000, which improves the efficiency of sorting and slicing.
  • the multi-layer staggered box storage device improves the efficiency of box replacement; the testing equipment 20000 integrates multiple tests. Including but not limited to the measurement and detection of thickness, TTV, line marks, resistivity, size, dirt, chipping, cracks and other items, the detection items can be modularized according to actual needs; the debris is removed in advance through the debris removal device 50000 Elimination improves the overall production capacity of the system.

Abstract

A multi-level staggered material box storage apparatus (2000), a material discharge and sorting device (10000), and a sorting system, which relate to material discharge and collection technology in the field of semiconductors or photovoltaics. The material box storage apparatus comprises material box slide rail assemblies, material box assemblies, a staggered driving assembly, a vertical guide rail assembly, a vertical driving assembly, material replacement warning buttons (2700), and a material box controller which are arranged on a storage rack; the staggered driving assembly is used for driving vertically adjacent material box assemblies to slide along the material box slide rail assemblies, so as to send the material box assemblies to a material reception site or a box replacement site. Compared to current or a previous generation of material boxes, the present multi-layer staggered material box storage apparatus utilizes a staggered configuration and integrates position detection, sensing for being completely filled, and staggered supply of material boxes for material reception; time spent for material box replacement is shortened, the operating efficiency and the production capacity are improved, and the present invention facilitates promotion and application in the fields of silicon wafers and PCBs among sheet material products.

Description

多层交错式料盒收纳装置、下料分选设备和分选系统Multi-layer staggered box storage device, blanking and sorting equipment and sorting system 技术领域Technical field
本发明属于硅片检测分选领域,涉及下料收纳技术,具体公开了一种多层交错式料盒收纳装置、下料分选设备和分选系统。The invention belongs to the field of silicon wafer detection and sorting, and relates to blanking and storage technology. Specifically, it discloses a multi-layer staggered box storage device, blanking and sorting equipment and a sorting system.
背景技术Background technique
硅片作为重要的工业原材料,被广泛用于太阳能电池、电路板等产品的生产制造中。因此,在硅片生产出厂之前需要对其质量进行严格的把控,以保证由硅片制造的太阳能电池、电路板等产品的质量。硅片分选机是一种集成自动化、测量、视觉瑕疵检测于一体的自动化检测、分选设备,应用在太阳能硅片生产流程中,如我司申请的专利(公开号CN112605010A)公开的下料分选装置及硅片智能分选机,分选机能够实现对太阳能硅片切片、清洗后的原片进行厚度、TTV、线痕、电阻率、尺寸、脏污、崩边、隐裂等项目的测量和检测,并根据分选菜单,自动将硅片按照质量等级要求分选到不同的盒子内,充分满足硅片使用厂家的质量管控的需求,是生产中不可缺少的一个环节。As an important industrial raw material, silicon wafers are widely used in the production and manufacturing of solar cells, circuit boards and other products. Therefore, the quality of silicon wafers needs to be strictly controlled before they are produced and shipped to ensure the quality of solar cells, circuit boards and other products made from silicon wafers. Silicon wafer sorting machine is an automated inspection and sorting equipment that integrates automation, measurement, and visual defect detection. It is used in the solar silicon wafer production process, such as the blanking disclosed in the patent applied for by our company (publication number CN112605010A) Sorting device and silicon wafer intelligent sorting machine, the sorting machine can realize the thickness, TTV, line marks, resistivity, size, dirt, edge chipping, cracking and other items of the solar silicon wafers sliced and cleaned. Measurement and inspection, and according to the sorting menu, the silicon wafers are automatically sorted into different boxes according to quality grade requirements, fully meeting the quality control needs of the silicon wafer manufacturers, and is an indispensable link in production.
随着碳中和的国家规划出台,属于新能源行业的太阳能行业将持续的发展并扩大光伏发电对整个国家发电量的占比。随着各硅片厂商的对自动上下料自动化要求的提高,使得设备的检测能力需求将要大大提升。With the introduction of the national plan for carbon neutrality, the solar energy industry, which is a new energy industry, will continue to develop and expand the proportion of photovoltaic power generation in the entire country's power generation. As various silicon wafer manufacturers increase their requirements for automatic loading and unloading automation, the demand for equipment detection capabilities will be greatly increased.
目前,在硅片检测之后,还需要完成硅片的分选,使硅片分类传送至对应的收纳盒中。现有的硅片收纳盒机构通常包括多个上下间隔设置的收纳盒,或者为避免震动设置的上下间隔的收纳盒(如我司的CN215390948U专利);然而上述料盒结构限制了单个料盒的容量,且料盒更换费时费力,且难以保证更换后料盒的工作位置高度一致。 At present, after the silicon wafers are inspected, the sorting of the silicon wafers still needs to be completed, so that the silicon wafers are sorted and transferred to the corresponding storage boxes. The existing silicon wafer storage box mechanism usually includes multiple storage boxes spaced up and down, or storage boxes spaced up and down to avoid vibration (such as our company's CN215390948U patent); however, the above-mentioned box structure limits the use of a single box. Capacity, and the replacement of the material box is time-consuming and laborious, and it is difficult to ensure that the working position of the material box is highly consistent after replacement.
发明内容Contents of the invention
为了克服现有技术的不足,本发明的目的在于提供一种多层交错式料盒收纳装置、下料分选设备和分选系统,其能解决上述问题。In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide a multi-layer staggered box storage device, a blanking and sorting equipment and a sorting system, which can solve the above problems.
一种多层交错式料盒收纳装置,料盒收纳装置包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器;其中,多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上;每个所述料盒滑轨组件上设置一个所述料盒组件,且多个所述料盒组件上下交错布置;交错驱动组件用于驱动料盒组件沿着所述料盒滑轨组件滑动,以将料盒组件送至接料位或换盒位;除顶层的料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件;所述竖直驱动组件驱动连接至所述竖直导轨组件,用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒;多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位,并用于向所述料盒控制器发出料盒退出或装载信号;所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接,通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。A multi-layer staggered material box storage device. The material box storage device includes a material box slide rail assembly, a material box assembly, a staggered driving assembly, a vertical guide rail assembly, a vertical driving assembly, and a material changing warning button arranged on a storage rack. and a material box controller; wherein, a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and A plurality of the material box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive the material box assemblies to slide along the material box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; except for the top layer of materials The box assemblies are all connected to the box slide rail assembly through the vertical guide rail assembly; the vertical drive assembly is drivingly connected to the vertical guide rail assembly and is used to drive the vertical guide rail assembly to move up and down to facilitate Reach the preset material receiving height or exit and replace the material box; multiple of the material changing warning buttons are used to prompt whether the corresponding material box component is full of material and the empty box is in place, and are used to send a material box exit or loading signal to the material box controller ; The staggered drive assembly, the vertical drive assembly and the material change warning button are electrically connected to the material box controller, and the material box controller controls the driving to realize the in-place material receiving, full material exit and discharge of multiple of the material box components. replace.
进一步的,所述收纳架包括收纳主立板和收纳底板,用于支撑整个装置。Further, the storage rack includes a main storage vertical plate and a storage bottom plate for supporting the entire device.
进一步的,所述料盒滑轨组件包括料盒滑轨、滑块、料盒垫块、外端缓冲块和滑块位置传感器;多个料盒滑轨上下平行的安装至所述收纳主立板的收纳面,滑块滑动套接在料盒滑轨上,所述料盒组件通过所述料盒垫块安装至所述滑块上;所述外端缓冲块安装至料盒滑轨的外端部,用于滑块的端部到位缓冲;多个滑块位置传感器安装至收纳主立板上并位于料盒滑轨下方布置。Further, the magazine slide rail assembly includes a magazine slide rail, a slide block, a magazine pad, an outer end buffer block and a slide block position sensor; multiple magazine slide rails are installed in parallel up and down to the main storage stand. On the storage surface of the board, the slider is slidably connected to the material box slide rail, and the material box assembly is installed on the slider through the material box pad; the outer end buffer block is installed on the material box slide rail. The outer end is used for buffering the end of the slider; multiple slider position sensors are installed on the main storage vertical plate and are arranged under the slide rail of the box.
进一步的,所述料盒组件包括料盒转接件、料盒托架、料盒规格调整垫板、料盒导向止挡柱和树脂板;其中,顶层的料盒组件的料盒转接件直接连接至所 述料盒垫块上,下层各级料盒组件的料盒转接件通过所述竖直导轨组件后再连接至所述料盒垫块上;所述料盒托架向外端下侧倾斜的连接至所述料盒转接件上,所述料盒规格调整垫板位置可调的安装至所述料盒托架上,并在料盒规格调整垫板的外端设置所述料盒导向止挡柱,规格可选的树脂板铺设在所述料盒规格调整垫板上,用以直接接收支撑硅片落料。Further, the magazine assembly includes a magazine adapter, a magazine bracket, a magazine specification adjustment pad, a magazine guide stop column and a resin plate; wherein, the magazine adapter of the top magazine assembly Connect directly to all On the box pad, the box adapters of the lower box assemblies at each level pass through the vertical guide rail assembly and then are connected to the box pad; the box bracket is tilted toward the lower side of the outer end. is connected to the material box adapter, the position of the material box specification adjustment pad is adjustable and installed on the material box bracket, and the material box is set at the outer end of the material box specification adjustment pad The guide stop column and the resin plate with optional specifications are laid on the specification adjustment pad of the material box to directly receive and support the blanking of silicon wafers.
进一步的,所述交错驱动组件包括料盒驱动电机、同步轮组、同步带组和同步带夹;所述料盒驱动电机和同步轮组安装于所述收纳主立板上;同步带组中与料盒滑轨平行的部分通过两个同步带夹与上下相邻的料盒滑轨组件连接,实现上下相邻两个料盒滑轨组件的交错驱动。Further, the staggered drive assembly includes a box drive motor, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp; the box drive motor and synchronous wheel set are installed on the main storage vertical plate; the synchronous belt set The part parallel to the magazine slide rail is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps to realize the staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
进一步的,所述竖直导轨组件包括升降滑轨和升降滑块;所述升降滑块与需升降的料盒组件对应的料盒滑轨组件的料盒垫块连接,所述升降滑轨的上部与需升降的料盒组件的料盒转接件连接,以此使得料盒组件沿竖直导轨组件上下滑动。Further, the vertical guide rail assembly includes a lifting slide rail and a lifting slide block; the lifting slide block is connected to the magazine pad of the magazine slide rail assembly corresponding to the magazine assembly to be lifted, and the lifting slide rail is The upper part is connected to the magazine adapter of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
进一步的,所述竖直驱动组件包括升降气缸、升降电磁阀、升降底板和升降底部限位块,所述升降气缸的缸体固定至所述收纳主立板,所述升降气缸的驱动杆底部连接至所述升降底板上,当竖直导轨组件运动至所述升降底部限位块时,升降电磁阀被激发驱动升降底板升降运动实现竖直导轨组件的升降驱动。Further, the vertical driving assembly includes a lifting cylinder, a lifting solenoid valve, a lifting bottom plate and a lifting bottom limit block. The cylinder body of the lifting cylinder is fixed to the main storage vertical plate. The bottom of the driving rod of the lifting cylinder Connected to the lifting base plate, when the vertical guide rail assembly moves to the lifting bottom limit block, the lifting solenoid valve is activated to drive the lifting base plate to move up and down to realize the lifting drive of the vertical guide rail assembly.
进一步的,所述竖直驱动组件包括升降气缸和升降电磁阀,所述升降气缸的缸体固定至所述收纳主立板,所述升降气缸的驱动杆底部连接至所述升降底板上,在升降电磁阀的控制下实现竖直导轨组件的升降驱动。Further, the vertical drive assembly includes a lifting cylinder and a lifting solenoid valve. The cylinder body of the lifting cylinder is fixed to the main storage vertical plate. The bottom of the driving rod of the lifting cylinder is connected to the lifting base plate. The lifting and lowering drive of the vertical guide rail assembly is realized under the control of the lifting solenoid valve.
本发明还公开了一种下料分选设备,下料分选设备包括安装于下料机架上的分片装置、安装在分片装置两出料端的料盒收纳装置、下料中轴皮带流线、尾料盒和顶板架;所述下料中轴皮带流线沿着中轴线安装至所述下料机架上, 所述顶板架设置在所述下料中轴皮带流线上方;多个分片装置沿着所述下料中轴皮带流线间隔的设置,并且其顶部连接至所述顶板架的顶板下表面上;每个分片装置的左右两端均设置一个料盒收纳装置;所述尾料盒正对所述下料中轴皮带流线的尾端设置,用于承载杂项硅片或未检测的硅片;其中,所述料盒收纳装置采用前述的多层交错式料盒收纳装置。The invention also discloses a blanking and sorting equipment. The blanking and sorting equipment includes a slicing device installed on the blanking frame, a material box storage device installed on both discharge ends of the slicing device, and a blanking central axis belt. Streamline, tail material box and top plate frame; the unloading central axis belt streamline is installed to the unloading frame along the central axis, The top plate frame is arranged above the flow line of the unloading center axis belt; a plurality of slicing devices are arranged at intervals along the flow line of the unloading center axis belt, and their tops are connected to the lower surface of the top plate of the top plate frame. Above; a material box storage device is provided at the left and right ends of each slicing device; the tail material box is placed directly opposite the tail end of the unloading central axis belt streamline, and is used to carry miscellaneous silicon wafers or undetected silicon wafers. Silicon wafer; wherein, the box storage device adopts the aforementioned multi-layer staggered box storage device.
本发明还提供了一种智能硅片分选系统,分选系统包括上料设备、检测设备和采用前述的下料分选设备;在所述上料设备和检测设备之间设置料型检测装置和碎片剔除装置,用于检测硅片型号以及是否发生破碎,并将破碎的硅片剔除,避免破碎硅片流入检测设备。The invention also provides an intelligent silicon wafer sorting system. The sorting system includes loading equipment, detection equipment and the aforementioned unloading and sorting equipment; a material type detection device is provided between the loading equipment and the detection equipment. And a debris removal device is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment.
相比现有技术,本发明的有益效果在于:通过本申请的多层交错式料盒收纳装置,相比于上一代或现有的料盒,采用交错布置,集成了到位检测、料满感知、料盒交错供给接料,减少了料盒更换带来的时间,提高了作业效率和产能,便于涉及片材产品的硅片、PCB领域推广应用。Compared with the existing technology, the beneficial effect of the present invention is that: compared with the previous generation or existing material boxes, the multi-layer staggered material box storage device of the present application adopts a staggered arrangement and integrates in-place detection and material full sensing. , the material boxes are staggered to supply and receive materials, which reduces the time caused by changing the material boxes, improves the operating efficiency and production capacity, and facilitates the promotion and application in the fields of silicon wafers and PCBs involving sheet products.
附图说明Description of the drawings
图1-图3为本发明多层交错式料盒收纳装置不同视角的示意图;Figures 1-3 are schematic views of the multi-layer staggered box storage device of the present invention from different perspectives;
图4为下料分选设备的示意图;Figure 4 is a schematic diagram of the blanking and sorting equipment;
图5和图6为多层交错式料盒收纳装置、下料分选设备和下料中轴皮带流线的布置示意图;Figures 5 and 6 are schematic layout diagrams of the multi-layer staggered box storage device, blanking and sorting equipment, and the flow lines of the blanking axis belt;
图7为智能硅片分选系统的示意图。Figure 7 is a schematic diagram of the intelligent silicon wafer sorting system.
图中:
10000、下料分选设备
1000、分片装置;
2000、料盒收纳装置;
2101、收纳主立板;2102、收纳底板;2103、外端立板;2014、主防护罩;
2015、电机防护罩;
2201、料盒滑轨;2202、滑块;2203、料盒垫块;2204、外端缓冲块;2205、
滑块位置传感器;
2301、料盒转接件;2302、料盒托架;2303、料盒规格调整垫板;2304、
料盒导向止挡柱;2305、树脂板;2306、升降顶部限位块;
2401、料盒驱动电机;2402、同步带夹;2403、驱动轮;2404、双头传动
轮;2405、水平内端传动轮;2406、驱动同步带;2407、传动同步带;2408、带轮防护罩;
2501、升降滑轨;2502、升降滑块;
2601、升降气缸;2602、升降电磁阀;2603、升降底板;2604、升降底部
限位块;2605、料盒到位传感器组件;
2700、换料警示按钮;
3000、下料中轴皮带流线;
4000、尾料盒;
5000、顶板架;
6000、下料机架;
7000、下料过渡机构;
8000、急停机构;
9000、蜂鸣器;
20000、检测设备;
30000、上料设备;
40000、料型检测装置;
50000、碎片剔除装置。
In the picture:
10000, blanking and sorting equipment
1000. Fragmentation device;
2000. Material box storage device;
2101. Storage main vertical plate; 2102. Storage bottom plate; 2103. Outer end vertical plate; 2014. Main protective cover;
2015. Motor protective cover;
2201. Material box slide rail; 2202. Slider; 2203. Material box pad; 2204. Outer end buffer block; 2205.
Slider position sensor;
2301. Material box adapter; 2302. Material box bracket; 2303. Material box specification adjustment pad; 2304.
Box guide stop column; 2305, resin plate; 2306, lifting top limit block;
2401. Material box driving motor; 2402. Synchronous belt clamp; 2403. Driving wheel; 2404. Double-ended transmission wheel; 2405. Horizontal inner end transmission wheel; 2406. Drive timing belt; 2407. Drive timing belt; 2408. Pulley protection cover;
2501. Lifting slide rail; 2502. Lifting slide block;
2601. Lifting cylinder; 2602. Lifting solenoid valve; 2603. Lifting bottom plate; 2604. Lifting bottom limit block; 2605. Material box position sensor assembly;
2700. Material change warning button;
3000, blanking center axis belt streamline;
4000, tailing box;
5000, roof rack;
6000, blanking rack;
7000, blanking transition mechanism;
8000, emergency stop mechanism;
9000, buzzer;
20000, testing equipment;
30000, loading equipment;
40000, material type detection device;
50000, debris removal device.
具体实施方式Detailed ways
为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明的一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments These are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without any creative work fall within the scope of protection of the present invention.
应当理解,本说明书中所使用的“系统”、“装置”、“机构”、“单元”和/或“模组”是用于区分不同级别的不同组件、元件、部件、部分或装配的一种方法。然而,如果其他词语可实现相同的目的,则可通过其他表达来替换所述词语。It should be understood that the "system", "device", "mechanism", "unit" and/or "module" used in this specification are used to distinguish different components, elements, parts, parts or assemblies at different levels. method. However, said words may be replaced by other expressions if they serve the same purpose.
多层交错式料盒收纳装置Multi-layer staggered box storage device
一种多层交错式料盒收纳装置,参见图1-图3,料盒收纳装置2000包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器。A multi-layer staggered box storage device. Refer to Figures 1 to 3. The box storage device 2000 includes a box slide assembly, a box assembly, a staggered drive assembly, a vertical guide rail assembly, and a vertical rail assembly. Direct drive assembly, refueling warning button and magazine controller.
布置关系:多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上;每个所述料盒滑轨组件上设置一个所述料盒组件,且多个所述料盒组件上下交错布置;交错驱动组件用于驱动上下相邻的两组料盒组件沿着所述料盒滑轨组件交错滑动,以将料盒组件送至接料位或换盒位;除顶层的料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件;所述竖直驱动组件驱动连接至 所述竖直导轨组件,用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒;多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位,并用于向所述料盒控制器发出料盒退出或装载信号。Arrangement relationship: a plurality of the material box slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; one of the material box slide rail assemblies is provided on each of the material box slide rail assemblies, and a plurality of the material box slide rail assemblies are arranged on the storage rack. The box assemblies are arranged staggered up and down; the staggered driving assembly is used to drive two groups of adjacent upper and lower box assemblies to slide staggered along the box slide rail assembly to send the box assemblies to the material receiving position or the box changing position; except for the top layer The material box components are all connected to the material box slide rail assembly through the vertical guide rail assembly; the vertical drive component is drivingly connected to The vertical guide rail assembly is used to drive the vertical guide rail assembly to move up and down in order to reach the preset material receiving height or exit the replacement material box; a plurality of the material replacement warning buttons are used to prompt whether the corresponding material box assembly is full of material and The empty box is in place and used to send a box ejection or loading signal to the box controller.
所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接,通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。The staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the material receiving, full material withdrawal and replacement of multiple material box components. .
如图1-3的示例中,料盒收纳装置2000采用双层料盒,采用两组料盒滑轨组件、两个料盒组件、一个交错驱动组件、一个竖直导轨组件、一个竖直驱动组件和两个换料警示按钮。As shown in the example of Figure 1-3, the box storage device 2000 uses a double-layer box, using two sets of box slide rail assemblies, two box assemblies, a staggered drive assembly, a vertical guide rail assembly, and a vertical drive. components and two refueling warning buttons.
其中,所述收纳架包括收纳主立板2101和收纳底板2102,用于支撑整个装置。The storage rack includes a main storage vertical plate 2101 and a storage bottom plate 2102, which are used to support the entire device.
收纳架还包括外端立板2103、主防护罩2014和电机防护罩2015,所述外端立板2103设置在所述收纳主立板2101外端,所述主防护罩2014设置在收纳主立板2101上与料盒组件相反的安装侧,所述电机防护罩2015设置在所述外端立板2103处。The storage rack also includes an outer end vertical plate 2103, a main protective cover 2014 and a motor protective cover 2015. The outer end vertical plate 2103 is provided at the outer end of the main storage vertical plate 2101. The main protective cover 2014 is provided at the main storage vertical plate. On the mounting side of the plate 2101 opposite to the cartridge assembly, the motor protective cover 2015 is provided at the outer end vertical plate 2103.
其中,所述料盒滑轨组件包括料盒滑轨2201、滑块2202、料盒垫块2203、外端缓冲块2204和滑块位置传感器2205。多个料盒滑轨2201(图1-3的示例为两个)上下平行的安装至所述收纳主立板2101的收纳面,滑块2202滑动套接在料盒滑轨2201上,所述料盒组件通过所述料盒垫块2203安装至所述滑块2202上;所述外端缓冲块2204安装至料盒滑轨2201的外端部,用于滑块2202的端部到位缓冲;多个滑块位置传感器2205安装至收纳主立板2101上并位于料盒滑轨2201下方布置。The cartridge slide rail assembly includes a cartridge slide rail 2201, a slider 2202, a cartridge pad 2203, an outer end buffer block 2204 and a slider position sensor 2205. A plurality of magazine slide rails 2201 (two in the example of Figures 1-3) are installed parallel to each other up and down on the storage surface of the main storage vertical plate 2101. The slider 2202 is slidably sleeved on the magazine slide rails 2201. The box assembly is installed on the slider 2202 through the box pad 2203; the outer end buffer block 2204 is installed on the outer end of the box slide rail 2201 for buffering the end of the slider 2202 in place; A plurality of slider position sensors 2205 are installed on the main storage vertical plate 2101 and are arranged below the magazine slide rail 2201 .
其中,所述料盒组件包括料盒转接件2301、料盒托架2302、料盒规格调 整垫板2303、料盒导向止挡柱2304和树脂板2305;其中,顶层的料盒组件的料盒转接件2301直接连接至所述料盒垫块2203上,下层各级料盒组件的料盒转接件2301通过所述竖直导轨组件后再连接至所述料盒垫块2203上;所述料盒托架2302向外端下侧倾斜的连接至所述料盒转接件2301上,所述料盒规格调整垫板2303位置可调的安装至所述料盒托架2302上,并在料盒规格调整垫板2303的外端设置所述料盒导向止挡柱2304,规格可选的树脂板2305铺设在所述料盒规格调整垫板2303上,用以直接接收支撑硅片落料。Wherein, the material box assembly includes a material box adapter 2301, a material box bracket 2302, a material box specification adjustment piece The whole pad plate 2303, the box guide and stop column 2304 and the resin plate 2305; among them, the box adapter 2301 of the top box assembly is directly connected to the box pad 2203, and the box components of the lower layers are The magazine adapter 2301 passes through the vertical guide rail assembly and then is connected to the magazine pad 2203; the magazine bracket 2302 is connected to the magazine adapter 2301 at an angle toward the lower side of the outer end. On the top, the position of the box specification adjustment pad 2303 is adjustable and installed on the box bracket 2302, and the box guide stop post 2304 is provided at the outer end of the box specification adjustment pad 2303. Specifications An optional resin board 2305 is laid on the box specification adjustment pad 2303 to directly receive and support silicon wafer blanking.
进一步的,下层各级料盒组件还包括升降顶部限位块2306,所述升降顶部限位块2306设置在所述料盒转接件2301上并位于所述竖直导轨组件正上方布置。Furthermore, the lower level material box assemblies also include lifting top limiting blocks 2306, which are provided on the material box adapter 2301 and are arranged directly above the vertical guide rail assembly.
进一步的,所述料盒托架2302呈L形或凹形,其前后和/或左右可调,其中,在所述料盒托架2302的底板上开设前后方向的长条槽孔,用于料盒规格调整垫板2303的位置调整。Further, the box bracket 2302 is L-shaped or concave, and is adjustable front and rear and/or left and right, wherein a long slot hole in the front and rear direction is opened on the bottom plate of the box bracket 2302 for Box specification adjustment pad 2303 position adjustment.
其中,所述交错驱动组件包括料盒驱动电机2401、同步轮组、同步带组和同步带夹2402;所述料盒驱动电机2401和同步轮组安装于所述收纳主立板2101上。同步带组中与料盒滑轨2201平行的部分通过两个同步带夹2402与上下相邻的料盒滑轨组件连接,实现上下相邻两个料盒滑轨组件的交错驱动。The staggered driving assembly includes a box driving motor 2401, a synchronous wheel set, a synchronous belt set and a synchronous belt clamp 2402; the box driving motor 2401 and the synchronous wheel set are installed on the main storage vertical plate 2101. The part of the synchronous belt group that is parallel to the magazine slide rail 2201 is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps 2402 to realize staggered driving of the two upper and lower adjacent magazine slide rail assemblies.
进一步的,平行传动的同步带通过两个同步带夹2402与所述料盒滑轨组件的滑块2202或料盒垫块2203连接,实现交错驱动组件驱动相邻两个料盒滑轨组件及料盒组件沿着料盒滑轨2201交错运动。Further, the parallel-driven synchronous belt is connected to the slider 2202 or the magazine pad 2203 of the magazine slide rail assembly through two synchronous belt clamps 2402 to realize the staggered driving assembly to drive two adjacent magazine slide rail assemblies and The magazine components move staggered along the magazine slide rail 2201.
进一步的,所述同步轮组包括驱动轮2403、双头传动轮2404和水平内端传动轮2405,其中所述水平内端传动轮2405与双头传动轮2404规格相同且水平平齐的设置。 Further, the synchronous wheel set includes a driving wheel 2403, a double-ended transmission wheel 2404 and a horizontal inner end transmission wheel 2405, wherein the horizontal inner end transmission wheel 2405 and the double-end transmission wheel 2404 have the same specifications and are arranged flush with each other horizontally.
一个示例中,所述同步带组包括驱动同步带2406和传动同步带2407,所述驱动同步带2406安装于驱动轮2403和双头传动轮2404中的一个轮头,实现动力输入;所述传动同步带2407设置于水平内端传动轮2405和与之同侧的双头传动轮2404的轮头。In one example, the synchronous belt set includes a driving synchronous belt 2406 and a transmission synchronous belt 2407. The driving synchronous belt 2406 is installed on one of the driving wheel 2403 and the double-ended transmission wheel 2404 to realize power input; the transmission The synchronous belt 2407 is arranged on the wheel head of the horizontal inner end transmission wheel 2405 and the double-ended transmission wheel 2404 on the same side.
当然也可以采用电机、带轮同侧设置,传送带对一组料盒组件采用一条带,这些可以根据实际安装空间和场景布置。Of course, the motor and pulley can also be arranged on the same side, and the conveyor belt uses one belt for a group of box components. These can be arranged according to the actual installation space and scene.
进一步的,在与水平内端传动轮2405同侧的双头传动轮2404的轮头处设置带轮防护罩2408。Further, a pulley protective cover 2408 is provided at the wheel head of the double-ended transmission wheel 2404 on the same side as the horizontal inner end transmission wheel 2405.
其中,所述竖直导轨组件包括升降滑轨2501和升降滑块2502;所述升降滑块2502与需升降的料盒组件对应的料盒滑轨组件的料盒垫块2203连接,所述升降滑轨2501的上部与需升降的料盒组件的料盒转接件2301连接,以此使得料盒组件沿竖直导轨组件上下滑动。Wherein, the vertical guide rail assembly includes a lifting slide rail 2501 and a lifting slide block 2502; the lifting slide block 2502 is connected with the cartridge pad 2203 of the cartridge slide rail assembly corresponding to the cartridge assembly to be lifted. The upper part of the slide rail 2501 is connected to the magazine adapter 2301 of the magazine assembly that needs to be lifted, so that the magazine assembly can slide up and down along the vertical guide rail assembly.
所述竖直驱动组件包括升降气缸2601、升降电磁阀2602、升降底板2603和升降底部限位块2604,所述升降气缸2601的缸体固定至所述收纳主立板2101,所述升降气缸2601的驱动杆底部连接至所述升降底板2603上,当竖直导轨组件运动至所述升降底部限位块2604时,升降电磁阀2602被激发驱动升降底板2603升降运动实现竖直导轨组件的升降驱动。The vertical drive assembly includes a lifting cylinder 2601, a lifting solenoid valve 2602, a lifting bottom plate 2603 and a lifting bottom limit block 2604. The cylinder body of the lifting cylinder 2601 is fixed to the main storage vertical plate 2101. The lifting cylinder 2601 The bottom of the driving rod is connected to the lifting bottom plate 2603. When the vertical guide rail assembly moves to the lifting bottom limit block 2604, the lifting solenoid valve 2602 is activated to drive the lifting bottom plate 2603 to move up and down to realize the lifting drive of the vertical guide rail assembly. .
进一步的,竖直驱动组件还包括一个料盒到位传感器组件2605,所述料盒到位传感器组件2605安装于收纳主立板2101上,用于检测下层对应料盒组件是否到达顶部接料位。Furthermore, the vertical drive assembly also includes a material box in-position sensor component 2605. The material box in-position sensor component 2605 is installed on the main storage vertical plate 2101 and is used to detect whether the corresponding material box component in the lower layer reaches the top material receiving position.
其中,所述换料警示按钮2700的个数与料盒组件的个数相等,通过料盒按钮底板连接至所述收纳主立板2101的顶部,所述换料警示按钮采用不同显示颜色显示料盒到位、料盒满料和料盒装载完成状态,并在相应状态下按下按 钮触发对应的驱控信号。Among them, the number of the refueling warning buttons 2700 is equal to the number of the material box components. They are connected to the top of the main storage vertical plate 2101 through the bottom plate of the material box button. The refueling warning buttons use different display colors to display the material. The box is in place, the box is full and the box is loaded, and press the button in the corresponding state. button to trigger the corresponding drive control signal.
下料分选设备Blanking and sorting equipment
一种下料分选设备,参见图4-图6,下料分选设备10000包括安装于下料机架6000上的分片装置1000、安装在分片装置1000两出料端的料盒收纳装置2000、下料中轴皮带流线3000、尾料盒4000和顶板架5000。A kind of blanking and sorting equipment, see Figure 4-Figure 6. The blanking and sorting equipment 10000 includes a slicing device 1000 installed on the blanking frame 6000, and a box storage device installed on both discharge ends of the slicing device 1000. 2000, 3000 for the blanking center axis belt streamline, 4000 for the tail material box and 5000 for the top plate frame.
布置关系:所述下料中轴皮带流线3000沿着中轴线安装至所述下料机架6000上,所述顶板架5000设置在所述下料中轴皮带流线3000上方;多个分片装置1000沿着所述下料中轴皮带流线3000间隔的设置,并且其顶部连接至所述顶板架5000的顶板下表面上;每个分片装置1000的左右两端均设置一个料盒收纳装置2000;所述尾料盒4000正对所述下料中轴皮带流线3000的尾端设置,用于承载杂项硅片或未检测的硅片;其中,所述料盒收纳装置2000采用前述的多层交错式料盒收纳装置。Arrangement relationship: the blanking central axis belt streamline 3000 is installed on the blanking frame 6000 along the central axis, and the top plate frame 5000 is arranged above the blanking central axis belt streamline 3000; multiple points The slicing devices 1000 are arranged at intervals along the cutting axis belt streamline 3000, and the top thereof is connected to the lower surface of the top plate of the top plate frame 5000; a material box is provided at both left and right ends of each slicing device 1000 Storage device 2000; the tail material box 4000 is placed directly opposite the tail end of the blanking axis belt streamline 3000, and is used to carry miscellaneous silicon wafers or untested silicon wafers; wherein, the material box storage device 2000 adopts The aforementioned multi-layer staggered box storage device.
进一步的,下料分选设备10000还包括下料过渡机构7000、急停机构8000和蜂鸣器9000,所述下料过渡机构7000设置在下料中轴皮带流线3000的前端,用于将上游流程检测完的硅片过渡引导至顶面平齐的下料中轴皮带流线3000。多个所述急停机构8000设置在所述下料机架6000的四周,便于工作人员在遇到紧急情况时便利快速的按下停机。所述蜂鸣器9000安装在下料机架6000的外周。图未示的,三色灯等报警器也可以设置在下料机架6000处。Further, the blanking and sorting equipment 10000 also includes a blanking transition mechanism 7000, an emergency stop mechanism 8000, and a buzzer 9000. The blanking transition mechanism 7000 is provided at the front end of the blanking center axis belt streamline 3000 for connecting the upstream The silicon wafers that have been inspected by the process are transitionally guided to the blanking center axis belt streamline 3000 with a flush top surface. A plurality of the emergency stop mechanisms 8000 are arranged around the unloading frame 6000, so that workers can conveniently and quickly stop the machine when encountering an emergency. The buzzer 9000 is installed on the outer periphery of the unloading frame 6000 . Not shown in the figure, alarms such as three-color lights can also be set at the unloading rack 6000.
参见图5和图6,两组对称设置的料盒收纳装置2000布置在一个分片装置1000的两个出料端,下料中轴皮带流线3000从底部向分片装置1000输送检测好的硅片。分片装置1000根据不同瑕疵类型的硅片向两端将硅片传输给料盒收纳装置2000的料盒组件内,直接落入接料位处的料盒组件的树脂板2305上。等满料后,换料警示按钮2700发出满料警示,工作人员按需按钮, 料盒组件退到外端,人工或机械臂将料盒组件内的硅片搬运归仓,同时下层的料盒组件向前伸出并升高至接料位,继续硅片接收。Referring to Figures 5 and 6, two sets of symmetrically arranged box storage devices 2000 are arranged at the two discharging ends of a slicing device 1000. The unloading central axis belt streamline 3000 transports the detected material from the bottom to the slicing device 1000. silicon wafer. The slicing device 1000 transfers silicon wafers according to different types of defects to both ends into the magazine assembly of the magazine storage device 2000, and directly drops onto the resin plate 2305 of the magazine assembly at the material receiving position. After the material is full, the material change warning button 2700 issues a full material warning, and the staff presses the button as needed. The material box assembly retreats to the outer end, and manual or mechanical arms carry the silicon wafers in the material box assembly back to the warehouse. At the same time, the lower material box assembly extends forward and rises to the material receiving position to continue receiving silicon wafers.
智能硅片分选系统Intelligent silicon wafer sorting system
一种智能硅片分选系统,参见图7,分选系统包括上料设备30000、检测设备20000和采用前述的下料分选设备10000;在所述上料设备30000和检测设备20000之间设置料型检测装置40000和碎片剔除装置50000,用于检测硅片型号以及是否发生破碎,并将破碎的硅片剔除,避免破碎硅片流入检测设备20000。An intelligent silicon wafer sorting system, see Figure 7. The sorting system includes a loading equipment 30000, a detection equipment 20000 and the aforementioned unloading and sorting equipment 10000; it is set between the loading equipment 30000 and the detection equipment 20000. The material type detection device 40000 and the fragment removal device 50000 are used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment 20000.
该系统的下料分选设备10000采用非接触吸附式分片装置1000,提高了分选流片效率,多层交错式料盒收纳装置提高了料盒更换效率;检测设备20000集成多项检测,包括但不限于厚度、TTV、线痕、电阻率、尺寸、脏污、崩边、隐裂等项目的测量和检测,可根据实际需求模块化增减检测项;通过碎片剔除装置50000提前将碎片剔除,提高了系统整体产能。The system's unloading and sorting equipment 10000 adopts a non-contact adsorption slicing device 1000, which improves the efficiency of sorting and slicing. The multi-layer staggered box storage device improves the efficiency of box replacement; the testing equipment 20000 integrates multiple tests. Including but not limited to the measurement and detection of thickness, TTV, line marks, resistivity, size, dirt, chipping, cracks and other items, the detection items can be modularized according to actual needs; the debris is removed in advance through the debris removal device 50000 Elimination improves the overall production capacity of the system.
最后应说明的是:以上实施例仅用以说明本发明的技术方案,而非对其限制;尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:其依然可以对前述各实施例所记载的技术方案进行修改,或者对其中部分技术特征进行等同替换;而这些修改或者替换,并不使相应技术方案的本质脱离本发明各实施例技术方案的精神和范围。 Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that it can still be used Modifications are made to the technical solutions described in the foregoing embodiments, or equivalent substitutions are made to some of the technical features; however, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims (7)

  1. 一种多层交错式料盒收纳装置,其特征在于:料盒收纳装置(2000)包括设置于收纳架上的料盒滑轨组件、料盒组件、交错驱动组件、竖直导轨组件、竖直驱动组件、换料警示按钮和料盒控制器,A multi-layer staggered box storage device, characterized in that: the box storage device (2000) includes a box slide assembly, a box assembly, a staggered drive assembly, a vertical guide rail assembly, and a vertical Drive components, material change warning button and material box controller,
    其中,所述收纳架包括收纳主立板(2101)和收纳底板(2102),用于支撑整个装置;Wherein, the storage rack includes a main storage vertical plate (2101) and a storage bottom plate (2102) for supporting the entire device;
    多个所述料盒滑轨组件水平的且上下平行的设置于所述收纳架上;所述料盒滑轨组件包括料盒滑轨(2201)、滑块(2202)、料盒垫块(2203)、外端缓冲块(2204)和滑块位置传感器(2205);多个料盒滑轨(2201)上下平行的安装至所述收纳主立板(2101)的收纳面,滑块(2202)滑动套接在料盒滑轨(2201)上,所述料盒组件通过所述料盒垫块(2203)安装至所述滑块(2202)上;所述外端缓冲块(2204)安装至料盒滑轨(2201)的外端部,用于滑块(2202)的端部到位缓冲;多个滑块位置传感器(2205)安装至收纳主立板(2101)上并位于料盒滑轨(2201)下方布置;A plurality of the magazine slide rail assemblies are arranged horizontally and parallel up and down on the storage rack; the magazine slide rail assembly includes a magazine slide rail (2201), a slide block (2202), and a magazine pad (2201). 2203), outer end buffer block (2204) and slider position sensor (2205); multiple box slide rails (2201) are installed in parallel up and down to the storage surface of the main storage vertical plate (2101), and the slider (2202) ) is slidably sleeved on the magazine slide rail (2201), and the magazine assembly is installed on the slider (2202) through the magazine pad (2203); the outer end buffer block (2204) is installed to the outer end of the material box slide rail (2201) for buffering the end of the slider (2202); multiple slider position sensors (2205) are installed on the main storage vertical plate (2101) and are located on the material box slide Arranged below the rail (2201);
    每个所述料盒滑轨组件上设置一个所述料盒组件,且多个所述料盒组件上下交错布置;One of the magazine assemblies is provided on each of the magazine slide rail assemblies, and a plurality of the magazine assemblies are arranged staggered up and down;
    交错驱动组件用于驱动上下相邻的两组料盒组件沿着所述料盒滑轨组件交错滑动,以将料盒组件送至接料位或换盒位;所述交错驱动组件包括料盒驱动电机(2401)、同步轮组、同步带组和同步带夹(2402);所述料盒驱动电机(2401)和同步轮组安装于所述收纳主立板(2101)上;同步带组中与料盒滑轨(2201)平行的部分通过两个同步带夹(2402)与上下相邻的料盒滑轨组件连接,实现上下相邻两个料盒滑轨组件的交错驱动;The staggered driving assembly is used to drive two groups of adjacent upper and lower material box assemblies to alternately slide along the box slide rail assembly to send the material box assemblies to the material receiving position or the box changing position; the staggered driving component includes a material box Driving motor (2401), synchronous wheel set, synchronous belt set and synchronous belt clamp (2402); the box driving motor (2401) and synchronous wheel set are installed on the main storage vertical plate (2101); synchronous belt set The middle part parallel to the magazine slide rail (2201) is connected to the upper and lower adjacent magazine slide rail assemblies through two synchronous belt clamps (2402) to realize the staggered driving of the two upper and lower adjacent magazine slide rail assemblies;
    除顶层的料盒组件,其余料盒组件均通过所述竖直导轨组件转接至所述料盒滑轨组件; Except for the top material box assembly, all other material box components are transferred to the material box slide rail assembly through the vertical guide rail assembly;
    所述竖直驱动组件连接至所述收纳架上,用于驱动所述竖直导轨组件上下移动以便于达到预设接料高度或退出更换料盒;The vertical drive assembly is connected to the storage rack and is used to drive the vertical guide rail assembly to move up and down to reach a preset material receiving height or to exit the replacement material box;
    多个所述换料警示按钮用于提示对应料盒组件是否满料及空盒到位,并用于向所述料盒控制器发出料盒退出或装载信号;A plurality of the refueling warning buttons are used to prompt whether the corresponding material box assembly is full of material and the empty box is in place, and are used to send a material box exit or loading signal to the material box controller;
    所述交错驱动组件、竖直驱动组件和换料警示按钮与所述料盒控制器电讯连接,通过料盒控制器控制驱动实现多个所述料盒组件的到位接料、满料退出和更换。The staggered drive component, the vertical drive component and the material change warning button are electrically connected to the material box controller, and the material box controller controls the drive to realize the material receiving, full material withdrawal and replacement of multiple material box components. .
  2. 根据权利要求1所述的料盒收纳装置,其特征在于:所述料盒组件包括料盒转接件(2301)、料盒托架(2302)、料盒规格调整垫板(2303)、料盒导向止挡柱(2304)和树脂板(2305);其中,顶层的料盒组件的料盒转接件(2301)直接连接至所述料盒垫块(2203)上,下层各级料盒组件的料盒转接件(2301)通过所述竖直导轨组件后再连接至所述料盒垫块(2203)上;所述料盒托架(2302)向外端下侧倾斜的连接至所述料盒转接件(2301)上,所述料盒规格调整垫板(2303)位置可调的安装至所述料盒托架(2302)上,并在料盒规格调整垫板(2303)的外端设置所述料盒导向止挡柱(2304),规格可选的树脂板(2305)铺设在所述料盒规格调整垫板(2303)上,用以直接接收支撑硅片落料。The material box storage device according to claim 1, characterized in that: the material box assembly includes a material box adapter (2301), a material box bracket (2302), a material box specification adjustment pad (2303), a material box The box guide stop column (2304) and the resin plate (2305); among them, the box adapter (2301) of the top-level box assembly is directly connected to the box pad (2203), and the lower-level boxes The box adapter (2301) of the assembly passes through the vertical guide rail assembly and is then connected to the box pad (2203); the box bracket (2302) is connected to the outer end of the lower side at an angle. On the material box adapter (2301), the material box specification adjustment pad (2303) is adjustable in position and installed on the material box bracket (2302), and on the material box specification adjustment pad (2303) ) is provided at the outer end of the box guide stop column (2304), and a resin plate (2305) of optional specifications is laid on the box specification adjustment pad (2303) to directly receive and support the silicon wafer blanking .
  3. 根据权利要求2所述的料盒收纳装置,其特征在于:所述竖直导轨组件包括升降滑轨(2501)和升降滑块(2502);所述升降滑块(2502)与需升降的料盒组件对应的料盒滑轨组件的料盒垫块(2203)连接,所述升降滑轨(2501)的上部与需升降的料盒组件的料盒转接件(2301)连接,以此使得料盒组件沿竖直导轨组件上下滑动。The material box storage device according to claim 2, characterized in that: the vertical guide rail assembly includes a lifting slide rail (2501) and a lifting slide block (2502); the lifting slide block (2502) and the material to be lifted are The box pad (2203) of the box slide rail assembly corresponding to the box assembly is connected, and the upper part of the lifting slide rail (2501) is connected to the box adapter (2301) of the box assembly that needs to be lifted, so that The material box assembly slides up and down along the vertical guide rail assembly.
  4. 根据权利要求1所述的料盒收纳装置,其特征在于:所述竖直驱动组件 包括升降气缸(2601)、升降电磁阀(2602)、升降底板(2603)和升降底部限位块(2604),所述升降气缸(2601)的缸体固定至所述收纳主立板(2101),所述升降气缸(2601)的驱动杆底部连接至所述升降底板(2603)上,当竖直导轨组件运动至所述升降底部限位块(2604)时,升降电磁阀(2602)被激发驱动升降底板(2603)升降运动实现竖直导轨组件的升降驱动。The material box storage device according to claim 1, characterized in that: the vertical driving assembly It includes a lifting cylinder (2601), a lifting solenoid valve (2602), a lifting bottom plate (2603) and a lifting bottom limit block (2604). The cylinder body of the lifting cylinder (2601) is fixed to the main storage vertical plate (2101). , the bottom of the driving rod of the lifting cylinder (2601) is connected to the lifting bottom plate (2603), when the vertical guide rail assembly moves to the lifting bottom limit block (2604), the lifting solenoid valve (2602) is activated The lifting movement of the driven lifting bottom plate (2603) realizes the lifting and lowering drive of the vertical guide rail assembly.
  5. 根据权利要求1所述的料盒收纳装置,其特征在于:所述换料警示按钮的个数与料盒组件的个数相等,通过料盒按钮底板连接至所述收纳主立板(2101)的顶部,所述换料警示按钮采用不同显示颜色显示料盒到位、料盒满料和料盒装载完成状态,并在相应状态下按下按钮触发对应的驱控信号。The material box storage device according to claim 1, characterized in that: the number of the material changing warning buttons is equal to the number of material box components, and is connected to the main storage vertical plate (2101) through the bottom plate of the material box buttons. On the top of the machine, the refueling warning button uses different display colors to display the status of the material box in place, the material box being full and the material box loading being completed, and pressing the button in the corresponding state triggers the corresponding drive control signal.
  6. 一种下料分选设备,其特征在于:下料分选设备(10000)包括安装于下料机架(6000)上的分片装置(1000)、安装在分片装置(1000)两出料端的料盒收纳装置(2000)、下料中轴皮带流线(3000)、尾料盒(4000)和顶板架(5000);所述下料中轴皮带流线(3000)沿着中轴线安装至所述下料机架(6000)上,所述顶板架(5000)设置在所述下料中轴皮带流线(3000)上方;多个分片装置(1000)沿着所述下料中轴皮带流线(3000)间隔的设置,并且其顶部连接至所述顶板架(5000)的顶板下表面上;每个分片装置(1000)的左右两端均设置一个料盒收纳装置(2000);所述尾料盒(4000)正对所述下料中轴皮带流线(3000)的尾端设置,用于承载杂项硅片或未检测的硅片;其中,所述料盒收纳装置(2000)采用权利要求1-5任一项所述的多层交错式料盒收纳装置。A kind of blanking and sorting equipment, characterized in that: the blanking and sorting equipment (10000) includes a slicing device (1000) installed on the blanking frame (6000), two discharging devices installed on the slicing device (1000) The material box storage device (2000), the blanking center axis belt streamline (3000), the tail material box (4000) and the top plate frame (5000) at the end; the blanking center axis belt streamline (3000) is installed along the central axis to the unloading frame (6000), the top plate frame (5000) is arranged above the unloading central axis belt streamline (3000); multiple slicing devices (1000) are installed along the unloading center The shaft belt streamlines (3000) are arranged at intervals, and their tops are connected to the lower surface of the top plate of the top plate frame (5000); a box storage device (2000) is provided at the left and right ends of each slicing device (1000) ); the tail material box (4000) is arranged opposite the tail end of the unloading center axis belt streamline (3000), and is used to carry miscellaneous silicon wafers or untested silicon wafers; wherein, the material box storage device (2000) Use the multi-layer staggered box storage device according to any one of claims 1-5.
  7. 一种智能硅片分选系统,其特征在于:分选系统包括上料设备(30000)、检测设备(20000)和采用权利要求6所述的下料分选设备(10000);在所述上料设备(30000)和检测设备(20000)之间设置料型检测装置(40000)和 碎片剔除装置(50000),用于检测硅片型号以及是否发生破碎,并将破碎的硅片剔除,避免破碎硅片流入检测设备(20000)。 An intelligent silicon wafer sorting system, characterized in that: the sorting system includes a loading device (30000), a detection device (20000), and a loading and sorting device (10000) as described in claim 6; on the Between the material equipment (30000) and the detection equipment (20000), the material type detection device (40000) and The fragment removal device (50000) is used to detect the silicon wafer model and whether it is broken, and remove the broken silicon wafers to prevent the broken silicon wafers from flowing into the detection equipment (20000).
PCT/CN2023/083871 2022-05-09 2023-03-24 Multi-level staggered material box storage apparatus,material discharge and sorting device, and sorting system WO2023216739A1 (en)

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