WO2023214470A1 - Dispositif de traitement de bord périphérique de partie revêtue - Google Patents

Dispositif de traitement de bord périphérique de partie revêtue Download PDF

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Publication number
WO2023214470A1
WO2023214470A1 PCT/JP2022/028318 JP2022028318W WO2023214470A1 WO 2023214470 A1 WO2023214470 A1 WO 2023214470A1 JP 2022028318 W JP2022028318 W JP 2022028318W WO 2023214470 A1 WO2023214470 A1 WO 2023214470A1
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WO
WIPO (PCT)
Prior art keywords
substrate
peripheral edge
coated
rotary table
coating
Prior art date
Application number
PCT/JP2022/028318
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English (en)
Japanese (ja)
Inventor
慎也 福井
貞雄 夏
一史 三浦
Original Assignee
中外炉工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
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Publication of WO2023214470A1 publication Critical patent/WO2023214470A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling

Definitions

  • the present invention relates to a coating area peripheral edge processing device that dries the peripheral edge area of a coating area on the surface of a substrate coated with a coating liquid.
  • a coating area peripheral edge processing device that dries the peripheral edge area of a coating area on the surface of a substrate coated with a coating liquid.
  • the peripheral edge of the coating portion on the surface of the substrate can be easily dried, and the coating on the surface of the substrate can be easily dried.
  • the feature is that even if the shape of the part is different and the position of the periphery of the coated part changes, the periphery of the coated part on the surface of the substrate can be easily dried by heating. be.
  • Patent Document 1 a heating contact member is adjusted to a shape along the peripheral edge of the coated portion on the surface of the substrate, and this heating contact member is brought into contact with the lower surface of the substrate. It has been proposed that this heating contact member heats and dries the entire periphery of the coated portion on the surface of the substrate, thereby suppressing the widening of the periphery where the film thickness has increased. There is.
  • the heating contact member is adjusted to a shape along the peripheral edge of the coated portion on the surface of the substrate, and this heating contact member is brought into contact with the lower surface of the substrate to perform heating. Because the contact member heats and dries the entire circumference of the coated area on the surface of the substrate, if the size or shape of the coated area on the surface of the substrate differs, the coated area may be It is necessary to prepare heating contact members of different sizes and shapes, and the cost of preparing a large number of heating contact members becomes extremely high. The operation of setting it in contact with the bottom surface of the substrate was also very troublesome and time consuming.
  • a heating contact member shaped along the peripheral edge of the coating portion on the surface of the substrate is provided on the surface of the holding portion that holds the substrate coated with the coating liquid, and the heating contact member is provided on the surface of the holding portion that holds the substrate coated with the coating liquid.
  • the heating contact member is adjusted to a shape along the peripheral edge of the coated portion on the surface of the substrate, as in the above-mentioned Patent Documents 1 and 2.
  • the contact member In order to provide the contact member on the surface of the holder that holds the substrate coated with the coating liquid, there are many holders equipped with heating contact members that correspond to the size and shape of the coating part applied to the surface of the substrate.
  • the cost of preparing such a holding part is very high, and the peripheral edge of the coated part of the substrate is placed on top of such a holding part due to heating contact on the surface of the holding part.
  • An object of the present invention is to solve the above-mentioned problems when drying the peripheral edge of a coated portion on the surface of a substrate coated with a coating liquid.
  • the substrate coated with the coating liquid when drying the peripheral edge of the coated portion on the surface of the substrate coated with the coating liquid, in particular, the substrate coated with the coating liquid is placed on a rotary table and rotated. This makes it possible to easily dry the peripheral edge of the coated area on the surface of the substrate coated with the coating liquid, and also because the shape of the coated area on the surface of the substrate is different.
  • An object of the present invention is to heat the peripheral edge of the coated portion on the surface of the substrate so that it can be easily dried even when the position changes.
  • the coating area peripheral edge processing apparatus dries the peripheral edge of the coating area on the surface of the substrate coated with the coating liquid.
  • the substrate is placed on the rotary table such that the peripheral edge of the coated part of the substrate is located on the outer circumferential side of the rotary table, and the substrate located on the outer circumferential side of the rotary table is A heating element that heats the peripheral edge of the coating section is placed at least under the substrate so as not to contact the substrate, and while the substrate is rotated by the rotary table, the heating element is positioned on the outer peripheral side of the rotary table. The peripheral edge of the coated portion of the substrate was heated and dried by the heating element.
  • the substrate coated with the coating liquid is rotated by a rotary table, and the peripheral edge of the coated part of the substrate located on the outer peripheral side of the rotary table is heated.
  • a heating contact member is prepared that contacts the entire periphery of the coated part coated on the surface of the substrate and has a size that matches the size of the coated part.
  • the substrate is rotated so as to correspond to the position of the peripheral edge of the coating part located on the outer peripheral side of the rotary table.
  • a moving device is provided for moving the heating body in a direction toward and away from the center of the rotary table.
  • the entire periphery of the coated area can be heated and dried simply by moving the heating body in the direction toward and away from the center of the rotary table.
  • the coated part coated on the surface of the board There is no need to prepare a number of heating contact members that match the size and shape of the peripheral edge and bring them into contact with the bottom surface of the substrate, and the substrate coated with the coating liquid can be heated by the above-mentioned moving device while being rotated by the rotary table.
  • the body can be moved according to the size and shape of the periphery of the coated part coated on the surface of the substrate, making it possible to easily adjust the periphery of coated parts of various sizes and shapes at low cost. It will be possible to dry it.
  • a position detection means for detecting the position of the peripheral edge of the coating part located on the outer peripheral side of the rotary table is provided, and the position detection means detects the position of the peripheral edge of the coating part located on the outer peripheral side of the rotary table. It is preferable that the heating body is moved by the moving device based on the position of the peripheral edge of the coated part. In this way, even if the peripheral edge of the coated part coated on the surface of the substrate differs not only in size but also in shape, the position detection means can detect the peripheral edge of the coated part on the surface of the substrate.
  • the heating element By accurately detecting the position, the heating element can be moved accurately according to the size and shape of the periphery of the coating part coated on the surface of the substrate using the above-mentioned moving device. This makes it possible to accurately dry the periphery of the coated area.
  • the second heating body that heats the peripheral edge of the coating section located on the outer peripheral side of the rotary table is placed above the substrate so that it does not come into contact with the substrate. It can also be arranged as follows. In this way, the peripheral edge of the coated portion of the substrate located on the outer peripheral side of the rotary table is heated by the second heating element in addition to the heating element described above, and can be dried more quickly.
  • this second heating body can be moved in the same manner as the heating body described above in accordance with the size and shape of the peripheral edge of the coating portion coated on the surface of the substrate, and furthermore, this second heating body can be moved It is also possible to move the body to a position slightly shifted from the heating body to efficiently heat and dry an appropriate position on the periphery of the coated area.
  • the substrate is rotated by the rotary table, and the peripheral edge of the coating part located on the outer peripheral side of the rotary table is heated by the heating body.
  • the operation of drying the peripheral portion of the coated portion of the substrate is performed in a reduced pressure chamber.
  • a plate-shaped heater may be provided at the upper or lower side of the vacuum chamber.
  • the substrate is placed on the rotary table so that the peripheral edge of the coated part of the substrate is located on the outer peripheral side of the rotary table, and the substrate is placed on the rotary table.
  • the substrate is rotated by a rotary table, and the peripheral edge of the coated part of the substrate located on the outer peripheral side of the rotary table is heated and dried by a heating element placed below the substrate so as not to come into contact with the substrate. Therefore, as in the past, a large number of heating contact members that match the size of the peripheral edge of the coated area coated on the surface of the substrate are prepared, and a number of heating contact members that match the size of the peripheral edge of the coated area are prepared.
  • FIG. 1 is a schematic cross-sectional explanatory diagram showing a state in which a coating section peripheral edge treatment device according to an embodiment of the present invention is used.
  • a coating section peripheral edge treatment device according to an embodiment of the present invention is used.
  • a rectangular substrate whose surface is coated with a coating liquid in a circular shape is arranged such that the peripheral edge of the coating part is located on the outer peripheral side of the rotary table.
  • FIG. 2 is a schematic plan explanatory view showing a state in which the substrate is placed on a rotary table and rotated, and the peripheral edge of the coated portion is heated and dried by a heating element provided under the substrate; .
  • FIG. 3 is a schematic plan view showing a state in which the substrate is moved in a direction of separation and the peripheral edge of the coated portion, which has become irregular on the surface of the substrate, is heated and dried by the heating element.
  • FIG. 1 It is a schematic cross-sectional explanatory view which showed the example of a change of the coating part peripheral edge processing device based on the said embodiment.
  • a circular substrate whose surface is coated with a coating liquid in a circular shape is arranged such that the peripheral edge of the coating part is located on the outer peripheral side of the rotary table.
  • a schematic diagram showing an example in which the substrate is placed on a rotary table and rotated, and the peripheral edge of the circular coated area is heated and dried by a heating element provided under the substrate.
  • coated part peripheral edge processing device according to an embodiment of the present invention will be specifically described based on the accompanying drawings. It should be noted that the coated part peripheral edge processing device according to the present invention is not limited to that shown in the embodiments below, and can be implemented with appropriate modifications within the scope of the gist of the invention.
  • the substrate 10 in drying the peripheral part 11a of the coating part 11 on the surface of the substrate 10 coated with the coating liquid, as shown in FIG. 20, the substrate 10 is placed on a rotary table 32 having an outer diameter smaller than the outer diameter of the coating section 11, which is provided at the tip of a rotating shaft 31 rotated by a rotating device 30.
  • the coating portion 11 is placed such that the peripheral edge portion 11a of the coating portion 11 on the surface of the rotary table 32 protrudes from the outer circumferential side of the rotary table 32.
  • the peripheral edge of the coating part 11 located on the outer peripheral side of the rotary table 32 is located on the lower side of the substrate 10 located on the outer peripheral side of the rotary table 32.
  • a rod-shaped heating body H for heating the rotary table 11a is arranged so as not to contact the substrate 10, and the heating body H is moved by a moving device 40 in a direction toward or away from the center 32 of the rotary table. ing.
  • the figure shows a rod-shaped heating element H, it may be of any shape as long as it can be heated at its tip.
  • a lower heater 21 is provided at the lower part of the reduced pressure chamber 20, and an upper heater 22 is provided at the upper part of the reduced pressure chamber 20, so that the inside of the reduced pressure chamber 20 is heated.
  • the pressure is reduced by a pressure reducing means (not shown), and the interior of the reduced pressure chamber 20 is heated by the lower heater 21 and the upper heater 22 to dry the coated portion 11 on the surface of the substrate 10 coated with the coating liquid. That's what I do.
  • a detection camera 41 is installed in the decompression chamber 20 as a position detection means 41 for detecting the position of the peripheral edge part 11a of the coating part 11 coated on the substrate 10.
  • the detection camera 41 detects the position of the peripheral edge part 11a of the coated part 11 coated on the substrate 10 through the cylindrical monitoring window 23a provided on the ceiling part 23. I have to.
  • a cutout 44 is provided in the upper heater 22 at a position where the upper heater 22 overlaps the monitoring window 23a.
  • the position of the peripheral edge part 11a of the coating part 11 detected by this detection camera 41 is output to the control device 42, and the control device 42
  • the moving device 40 is controlled to move the heating body H in a direction approaching or away from the center 32 of the rotary table, so that the heating body H corresponds to the peripheral edge 11a of the coating section 11. It is controlled so that it is located under the substrate 10.
  • a substrate 10 in which a coating liquid is circularly applied to the surface of a square substrate 10 to form a circular coating portion 11 on the surface is used.
  • the substrate 10 is placed on the rotary table 32 so that the entire peripheral edge 11a of the coating section 11 protrudes to the outer circumferential side of the rotary table 32, and the detection camera 41 detects the substrate 10.
  • the position of the peripheral edge 11a of the coating section 11 is detected, and based on the detection result, the control device 42 controls the moving device 40 to move the heating body H relative to the center 32 of the rotary table.
  • the heater H is moved toward and away from the substrate 10 so as to be positioned under the substrate 10 corresponding to the peripheral edge 11a of the circularly coated portion 11.
  • the rotating table 32 is rotated by the rotating device 30, and the peripheral edge 11a of the coating portion 11 on the substrate 10 is heated and dried from the lower side of the substrate 10 by the heating body H. Do it like this.
  • the peripheral edge 11a of the coating section 11 on the substrate 10 can be efficiently heated and dried by one rod-shaped heating element H, and the coating can be applied to the surface of the substrate as in the conventional method.
  • a heating contact member that matches the size of the periphery of the coated part is brought into contact with the bottom surface of the substrate to heat and dry the entire periphery of the coated part on the surface of the substrate, Less equipment is needed to heat and dry the entire circumference of the peripheral edge 11a of the coating section 11, and costs are also reduced.
  • the control device 42 controls the moving device 40 to move the heating body H toward and away from the center 32 of the rotary table.
  • the shape of the coating portion 11 to be coated on the surface of the substrate 10 is a shape other than a circle, for example, as shown in FIGS. 3(A) and 3(B), a square-shaped substrate In the substrate 10 in which a substantially rectangular coated portion 11 is formed on the surface of the substrate 10, in heating and drying the peripheral portion 11a of the substantially rectangular coated portion 11, the surface of the substrate 10 is heated and dried.
  • the substrate 10 is placed on the rotary table 32 so that the entire peripheral edge 11a of the approximately rectangular coating portion 11 protrudes to the outer circumferential side of the rotary table 32.
  • the detection camera 41 detects the position of the peripheral edge 11a of the approximately rectangular coating portion 11 on the surface of the substrate 10, and based on the detection result, the control device 42 controls the moving device 40.
  • the heating body H is controlled to move toward and away from the center 32 of the rotary table.
  • the moving device 40 is controlled by the control device 42 as described above, and the direction in which the heating body H approaches or moves away from the center 32 of the rotating table is controlled.
  • the heating body H is always guided to a position corresponding to the peripheral edge 11a of the approximately rectangular coating portion 11, and the heating body The peripheral edge portion 11a of the coated portion 11, which has a substantially rectangular shape, is heated and dried by H.
  • the detection camera 41 is used, but instead of using the detection camera 41, the shape of the peripheral edge 11a of the coating section 11 is programmed in the control device 42 in advance, Accordingly, the moving device 40 may be controlled by the control device 42.
  • the shape of the coating portion 11 to be coated on the surface of the substrate 10 may be a circular shape as shown in FIG. 2 or a substantially square shape as shown in FIGS. 3(A) and (B).
  • the present invention is not limited to this, and the coated portion 11 may be coated in various shapes.
  • the coating liquid is supplied from a coating nozzle to which the coating liquid is supplied.
  • a cylindrical coating liquid supply body having coating liquid storage recesses formed in a predetermined pattern on its outer circumferential surface is provided so as to be positioned above the slit-shaped discharge port, and this coating liquid supply body is rotated.
  • a coating device may be used in which the coating liquid is supplied from the coating liquid storage recess through the slit-shaped discharge port onto the surface of the object to be coated.
  • the outer circumferential side of the rotary table 32 when heating and drying the peripheral edge part 11a of the coated part 11 coated on the surface of the substrate 10, the outer circumferential side of the rotary table 32 is heated and dried.
  • the rod-shaped heating element H which heats the peripheral edge 11a of the coating section 11 located on the outer circumferential side of the rotary table 32, is placed on the lower side of the substrate 10 located at the bottom of the substrate 10 so as not to come into contact with the substrate 10.
  • the second heating element H2 that heats the peripheral edge 11a of the coating section 11 on the substrate 10 located on the outer peripheral side of the rotary table 32 is arranged so as not to come into contact with the substrate 10.
  • the peripheral edge 11a of the coating section 11 of the substrate 10 located on the outer circumferential side of the rotary table 32 is heated by this second heating element H2 in addition to the heating element H described above. It is possible to heat and dry from both sides.
  • the second heating body H2 is moved by the moving device 43 in the direction of approaching and away from the center 32 of the rotary table, and as in the case of the heating body H, the second heating body H2 is used for the detection.
  • the position of the peripheral edge 11a of the coating section 11 detected by the camera 41 is output to the control device 42, and the control device 42 controls the moving device 43, and the moving device 43 controls the second heating body H2.
  • the second heating element H2 may be moved to a position slightly shifted from the heating element H to efficiently heat the appropriate position of the peripheral edge 11a of the coating section 11. It is also possible to let it dry.
  • the coating liquid was applied to the surface of the rectangular substrate 10, but the shape of the substrate 10 is not particularly limited.
  • a circular substrate 10 is used in which a coating liquid is applied in a circular manner to the surface of the circular substrate 10 to form a circular coated portion 11 on the surface.
  • the substrate 10 is placed on the rotary table 32 such that the entire peripheral edge 11a of the circular coating portion 11 on the surface of the substrate 10 protrudes to the outer circumferential side of the rotary table 32.
  • the heating element H is placed under the substrate 10 corresponding to the peripheral edge 11a of the coated portion 11 coated in a circular shape, and in this state, the rotary table 32 is rotated by the rotating device 30.
  • the peripheral edge portion 11a of the coating portion 11 on the substrate 10 may be heated from below the substrate 10 by the heating body H to dry it.
  • the peripheral edge 11a of the circular coated portion 11 is heated by the heating element H to form the substrate 10.
  • the heating body H can be provided at a fixed position without being moved, so the moving device 40 as described above, the detection camera 41, There is no need to provide the control device 42.
  • Substrate 11 Coating section 11a: Peripheral section 20: Decompression chamber 21: Lower heater 22: Upper heater 23: Ceiling section 23a: Monitoring window 30: Rotating device 31: Rotating shaft 32: Rotating table 40: Moving device 41: Detection camera (position detection means) 42: Control device 43: Moving device 44: Notch H: Heating body H2: Second heating body

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  • Coating Apparatus (AREA)
  • Drying Of Solid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Lors du séchage d'une partie bord périphérique (11a) d'une partie revêtue (11) sur la surface d'un substrat (10) sur lequel est appliqué un liquide de revêtement, le substrat est monté sur une table rotative de sorte que la partie bord périphérique de la partie revêtue du substrat soit positionnée au niveau du côté périphérique externe d'une table rotative (32), et qu'un élément chauffant (H) qui chauffe la partie bord périphérique de la partie revêtue du substrat qui est positionnée au niveau du côté périphérique externe de la table rotative soit disposé au-dessous du substrat pour ne pas entrer en contact avec celui-ci. Le substrat est mis en rotation par la table rotative, et la partie bord périphérique externe de la partie revêtue du substrat qui est positionnée au niveau du côté périphérique externe de la table rotative est séchée par chauffage au moyen de l'élément chauffant.
PCT/JP2022/028318 2022-05-02 2022-07-21 Dispositif de traitement de bord périphérique de partie revêtue WO2023214470A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022-075716 2022-05-02
JP2022075716A JP7220968B2 (ja) 2022-05-02 2022-05-02 塗工部周縁処理装置

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WO2023214470A1 true WO2023214470A1 (fr) 2023-11-09

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JP (1) JP7220968B2 (fr)
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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07135171A (ja) * 1993-05-20 1995-05-23 Tokyo Electron Ltd 塗膜の処理方法及び処理装置
JP2007275697A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp スピンコート装置およびスピンコート方法
JP2008282513A (ja) * 2007-04-11 2008-11-20 Ricoh Co Ltd スピンコート装置及びその温度制御方法、並びに光ディスク製造装置及び光ディスク製造方法
JP2011230051A (ja) * 2010-04-27 2011-11-17 Tokyo Electron Ltd レジスト塗布装置、これを備える塗布現像システム、およびレジスト塗布方法
JP2012227461A (ja) * 2011-04-22 2012-11-15 Tokyo Electron Ltd 塗布装置、塗布方法及び記憶媒体
JP2021084064A (ja) * 2019-11-27 2021-06-03 東レ株式会社 基板処理方法及び基板処理装置
JP6967637B1 (ja) * 2020-07-30 2021-11-17 中外炉工業株式会社 縁部平坦化デバイスおよび該デバイスを含む塗工乾燥システム

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07135171A (ja) * 1993-05-20 1995-05-23 Tokyo Electron Ltd 塗膜の処理方法及び処理装置
JP2007275697A (ja) * 2006-04-03 2007-10-25 Seiko Epson Corp スピンコート装置およびスピンコート方法
JP2008282513A (ja) * 2007-04-11 2008-11-20 Ricoh Co Ltd スピンコート装置及びその温度制御方法、並びに光ディスク製造装置及び光ディスク製造方法
JP2011230051A (ja) * 2010-04-27 2011-11-17 Tokyo Electron Ltd レジスト塗布装置、これを備える塗布現像システム、およびレジスト塗布方法
JP2012227461A (ja) * 2011-04-22 2012-11-15 Tokyo Electron Ltd 塗布装置、塗布方法及び記憶媒体
JP2021084064A (ja) * 2019-11-27 2021-06-03 東レ株式会社 基板処理方法及び基板処理装置
JP6967637B1 (ja) * 2020-07-30 2021-11-17 中外炉工業株式会社 縁部平坦化デバイスおよび該デバイスを含む塗工乾燥システム

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JP7220968B2 (ja) 2023-02-13
TW202344788A (zh) 2023-11-16

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