WO2023178950A1 - 一种连续式ald镀膜设备的物料移动结构 - Google Patents

一种连续式ald镀膜设备的物料移动结构 Download PDF

Info

Publication number
WO2023178950A1
WO2023178950A1 PCT/CN2022/119529 CN2022119529W WO2023178950A1 WO 2023178950 A1 WO2023178950 A1 WO 2023178950A1 CN 2022119529 W CN2022119529 W CN 2022119529W WO 2023178950 A1 WO2023178950 A1 WO 2023178950A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
moving mechanism
cavity
moving
coating
Prior art date
Application number
PCT/CN2022/119529
Other languages
English (en)
French (fr)
Inventor
田玉峰
Original Assignee
厦门韫茂科技有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 厦门韫茂科技有限公司 filed Critical 厦门韫茂科技有限公司
Publication of WO2023178950A1 publication Critical patent/WO2023178950A1/zh

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
    • C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Definitions

  • the present invention relates to the technical field of atomic layer deposition, and specifically to a material movement structure of a continuous ALD coating equipment.
  • Atomic layer deposition is a method that can plate substances on the surface of a substrate in the form of a single atomic film layer by layer.
  • the chemical reaction of a new layer of atomic film is directly related to the previous layer. This way, only one layer of atoms is deposited in each reaction. Moreover, the deposited layer has extremely uniform thickness and excellent consistency.
  • the inside of the coating equipment will also be coated, or various impurities will be generated inside the coating equipment. Therefore, the inside of the coating equipment should be cleaned regularly to ensure the quality of the coating.
  • the existing coating equipment has a complex structure and it is not easy to clean the inside of the coating equipment.
  • the present invention provides a material moving structure of a continuous ALD coating equipment, aiming to improve the technical problem that it is not easy to clean the inside of the coating equipment.
  • the present invention provides a material moving structure of a continuous ALD coating equipment, which includes a box component and a driving component.
  • the box assembly includes a heating cavity, a connecting cavity and a cooling cavity that are connected in sequence.
  • the heating cavity is provided with a heating chamber.
  • the connection cavity is provided with a coating chamber for coating the workpiece.
  • the cooling cavity is provided with a cooling chamber. The heating chamber and the cooling chamber can be connected to the coating chamber respectively.
  • a drive assembly includes two drive members.
  • the two driving members are respectively arranged in the heating chamber and the cooling chamber.
  • the driving member arranged in the heating chamber is configured to move back and forth along a predetermined trajectory to move the workpiece outside the heating chamber into the heating chamber, and to move the workpiece inside the heating chamber into the coating chamber.
  • the driving member configured in the cooling chamber is configured to: be able to move back and forth along a predetermined trajectory to move the workpiece in the coating chamber into the cooling chamber, and to move the workpiece in the cooling chamber to outside the cooling chamber;
  • the box assembly also includes a first access door configured in the connection cavity.
  • the present invention can achieve the following technical effects:
  • the workpiece is moved by driving components provided in the heating chamber and the cooling chamber, which greatly simplifies the structure in the coating chamber and facilitates cleaning of the coating chamber, which has very good practical significance.
  • Figure 1 is an isometric view of the continuous ALD coating equipment
  • Figure 2 is a half-section view of the continuous ALD coating equipment
  • Figure 3 is an exploded view of the connection cavity
  • Figure 4 is an exploded view of the interior of the connection chamber
  • Figure 5 is an exploded view of the coating cavity
  • Figure 6 is an exploded view of the coating chamber (hiding the box);
  • Figure 7 is an isometric view of the cooling chamber
  • Figure 8 is a first exploded view of the driving member
  • Figure 9 is a second exploded view of the drive member
  • Figure 10 is an exploded view of the ratchet mechanism
  • Figure 11 is an exploded view of the tray assembly
  • Figure 12 is the first exploded view of the flap door
  • Figure 13 is a second exploded view of the flap door.
  • first and second are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Therefore, features defined as “first” and “second” may explicitly or implicitly include one or more of these features.
  • “plurality” means two or more than two, unless otherwise explicitly and specifically limited.
  • connection In the present invention, unless otherwise clearly stated and limited, the terms “installation”, “connection”, “connection”, “fixing” and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements.
  • connection connection
  • fixing and other terms should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. , or integrated; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two elements or an interaction between two elements.
  • the term “above” or “below” a first feature of a second feature may include direct contact between the first and second features, or may also include the first and second features. Not in direct contact but through additional characteristic contact between them.
  • the terms “above”, “above” and “above” a first feature on a second feature include the first feature being directly above and diagonally above the second feature, or simply mean that the first feature is higher in level than the second feature.
  • “Below”, “under” and “under” the first feature is the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature is less horizontally than the second feature.
  • embodiments of the present invention provide a material moving structure of a continuous ALD coating equipment, which includes a box component and a driving component.
  • the box assembly includes a heating cavity 12, a connecting cavity 5 and a cooling cavity 9 which are connected in sequence.
  • the heating chamber 12 is provided with a heating chamber 6 .
  • the connection cavity 5 is provided with a coating chamber 10 for coating workpieces.
  • the cooling chamber 9 is provided with a cooling chamber 3 .
  • the heating chamber 6 and the cooling chamber 3 can be connected to the coating chamber 10 respectively.
  • the drive assembly includes two drive members 32 .
  • the two drive members 32 are respectively arranged in the heating chamber 6 and the cooling chamber 3 .
  • the driving member 32 arranged in the heating chamber 6 is configured to move back and forth along a predetermined trajectory to move the workpiece outside the heating chamber 6 into the heating chamber 6 and to move the workpiece inside the heating chamber 6 Move to the coating chamber 10.
  • the driving member 32 arranged in the cooling chamber 3 is configured to move back and forth along a predetermined trajectory to move the workpiece in the coating chamber 10 into the cooling chamber 3 and to move the workpiece in the cooling chamber 3 Move outside cooling chamber 3.
  • the box assembly further includes a coating chamber 4 provided with the coating chamber 10 .
  • the connection cavity 5 is provided with a connection chamber 11 .
  • the coating chamber 4 is detachably installed in the connection chamber 11 .
  • the box assembly also includes a first access door 1 provided in the connection cavity 5 , a second access door provided in the heating cavity 12 and a third access door provided in the cooling cavity 9 .
  • the first access door 1 is used to access the coating chamber 4 .
  • the two driving members 32 are installed in the heating chamber 6 and the cooling chamber 3 respectively, so that there are only the guide rail member 8 and the flow equalizing plate 26 in the coating chamber 10. It is not only simple in structure and easy to clean, but also not easy to be damaged. It has Very good practical implications.
  • the precursor A and the precursor B react to form the desired coating.
  • a coating will also be formed on the surface of the components in the coating chamber 10. Therefore, if there is a transmission mechanism in the coating chamber 10, If so, it will be easily damaged and not easy to clean.
  • the carrier assembly 7 is moved between the five guide rail members 8 in sequence by moving left and right, thereby achieving heating, coating and cooling of the workpiece without a power mechanism in the coating chamber 10 Homework has very good practical significance.
  • the driving member 32 includes a first moving mechanism 34 capable of moving along a predetermined trajectory, a pawl mechanism 33 configured on the first moving mechanism 34, The transmission mechanism of the first moving mechanism 34, and the driving mechanism 37 coupled to the transmission mechanism.
  • the driving mechanism 37 can drive the first moving mechanism 34 to move forward or reverse along a predetermined trajectory through a transmission mechanism.
  • the pawl mechanism 33 is configured to: when the first moving mechanism 34 moves forward, it can contact the external object and avoid it; when the first moving mechanism 34 moves reversely, it can contact the external object and drive the external object to move forward.
  • the drive member 32 includes two pawl mechanisms 33 .
  • the two pawl mechanisms 33 are respectively arranged at both ends of the first moving mechanism 34 .
  • the pawl mechanism 33 includes a push plate 38 rotatably disposed on the first moving mechanism 34 , and an elastic member 39 engaged between the push plate 38 and the first moving mechanism 34 .
  • the push plate 38 is provided with a contact portion 55 for contacting the first moving mechanism 34 .
  • the contact portion 55 is used to limit the push plate 38 when the first moving mechanism 34 moves reversely.
  • the elastic member 39 is used to drive the push plate 38 to return to the escape position.
  • the driving mechanism 37 and the transmission mechanism drive the first moving mechanism 34 to move left and right, so that the tray assembly 7 is hooked into the heating chamber 6 from outside the heating cavity 12 through the pawl structure on the first moving mechanism 34, or It is pushed from the heating chamber 6 into the coating chamber 10 .
  • the pawl mechanism 33 with a purely mechanical structure is used to move the tray assembly 7, and can adapt to the vacuum high temperature environment in the heating chamber 6 without being easily damaged, which has very good practical significance. It can be understood that two pawl mechanisms 33 are respectively provided at both ends of the first moving mechanism 34, one is used for hooking, the other is used for pushing out, and the two push plates 38 are both used for exerting force in the same direction.
  • the driving member 32 further includes a second moving mechanism 35 , the second moving mechanism 35 is engaged with the transmission mechanism and is configured to be driven by the transmission mechanism to move along the transmission mechanism. Move forward or reverse along a predetermined trajectory.
  • the first moving mechanism 34 is configured to move relative to the second moving mechanism 35 toward the moving direction of the second moving mechanism 35 when the second moving mechanism 35 moves.
  • the drive member 32 also includes a base mechanism 36 .
  • the base mechanism 36 is configured in the heating chamber 6 or the cooling chamber 3 .
  • the second moving mechanism 35 is slidably disposed on the base mechanism 36 .
  • the first moving mechanism 34 is slidably disposed on the second moving mechanism 35 .
  • the second moving mechanism 35 can increase the elongation distance of the driving member 32 when moving left and right, so that the tray assembly 7 can be moved to the appropriate position with fewer hooks, which has very good practical significance.
  • the first moving mechanism 34 , the second moving mechanism 35 and the transmission mechanism can be integrated into a whole through the base mechanism 36 to facilitate the disassembly and assembly of the driving member 32 .
  • the transmission mechanism includes a first gear 53 and a first rack 52 configured on the base mechanism 36 , and a second gear 50 configured on the second moving mechanism 35 and the second rack 51, and the third rack 49 arranged on the first moving mechanism 34.
  • the first gear 53 is engaged with the second rack 51 and is transmission connected to the driving mechanism 37 for driving the second moving mechanism 35 to move relative to the base mechanism 36 .
  • the second gear 50 is meshed with the first rack 52 and the third rack 49 respectively, so as to move the first moving mechanism 34 toward the moving direction of the second moving mechanism 35 while the second moving mechanism 35 moves.
  • the first moving mechanism 34 includes a first bottom plate 40 and a plurality of first rollers 41 arranged on the first bottom plate 40 .
  • the base mechanism 36 includes a base support plate 46 and a plurality of second rollers 45 arranged on the base support plate 46 .
  • the second moving mechanism 35 includes a second bottom plate 44 and a roller mounting base 43 arranged on the second bottom plate 44 .
  • Guide grooves 42 for accommodating the first roller 41 and the second roller 45 are respectively provided on both sides of the roller mounting seat 43 .
  • the second gear 50 drives the third rack 49 to move, so that the second moving mechanism 35 and the first moving mechanism 34 move simultaneously. Move in the same direction to achieve longer extension distance and extension speed to ensure efficient moving of the tray assembly 7.
  • a roller mounting base 43 is provided on the second moving mechanism 35, and rollers are installed on the first moving mechanism 34 and the base mechanism 36, so that the first moving mechanism 34 can be slidably installed on the second moving mechanism 35.
  • the second moving mechanism 35 is slidably installed on the base mechanism 36, thereby enabling the driving member 32 to have a longer elongation distance.
  • both the first moving mechanism 34 and the second moving mechanism 35 can be slidably disposed on the base mechanism 36. This solution also falls within the protection scope of the present invention.
  • the driving mechanism 37 includes a motor 48 and a magnetic fluid vacuum seal transmission device 47 .
  • the motor 48 is drivingly connected to the input end of the magnetic fluid vacuum sealing transmission device 47 .
  • the transmission mechanism also includes a first gear 53 for driving the second moving mechanism 35 to move, and at least one transmission gear 54 that is transmission connected to the first gear 53 and the output end of the magnetic fluid vacuum sealing transmission device 47 .
  • the first gear 53 and at least one transmission gear 54 are arranged in the vertical direction.
  • two transmission gears 54 are provided. Through the vertically arranged first gear 53 and the two transmission gears 54, the power of the driving mechanism 37 can be transmitted from the bottom of the driven cavity to the second gear located inside the cavity.
  • the rack 51 is driven and adopts multi-stage gear transmission, which can maintain a long life in a high-temperature vacuum environment, which has very good practical significance.
  • the box assembly also includes a carrier tray assembly 7 for carrying workpieces and five guide rail members 8 for supporting the carrier tray assembly 7.
  • the five guide rail members 8 are respectively arranged in the heating chamber 6 , the coating chamber 10 , the cooling chamber 3 , and are located outside the heating chamber 12 and the cooling chamber 9 .
  • the carrier assembly 7 is configured to move between the five guide rail members 8 driven by the drive assembly, thereby passing through the heating cavity 12 , the connection cavity 5 and the cooling cavity 9 in sequence.
  • the top of the tray assembly 7 is provided with a placement slot for placing the workpiece, and the bottom is provided with a drive slot 57 for the pawl mechanism 33 to be embedded.
  • the tray assembly 7 is also provided with tray rollers 56 that can slide on the guide rail member 8 .
  • the guide rail member 8 is provided with limiting grooves 31 at intervals for limiting the plate carrier rollers 56 .
  • rollers can greatly reduce the friction of the tray assembly 7 during movement and greatly reduce the power required by the material moving device.
  • the form of a chute 14 can be used to coordinate the movement.
  • the utility model does not limit this. It is understood that the friction force of the rollers is small, and shallow limiting grooves 31 are provided on the guide rails, which can effectively prevent the tray assembly 7 from sliding randomly on the guide rail member 8 after the tray assembly 7 moves to a predetermined position.
  • the material moving structure further includes a sealing component.
  • the sealing assembly includes six insert doors 2 arranged in the box assembly.
  • the first plug-in door 2 and the second plug-in door 2 are used to communicate with the coating chamber 10 and the connection chamber 11 respectively.
  • the third sliding door 2 is used to communicate with the heating chamber 6 and the connecting chamber 11 .
  • the fourth insert door 2 is used to communicate between the connecting chamber 11 and the cooling chamber 3 .
  • the fifth insert door 2 is used to communicate with the outside of the heating chamber 6 and the heating chamber 12 .
  • the sixth insert door 2 is used to communicate with the outside of the cooling chamber 3 and the cooling chamber 9 .
  • the six plug-in doors 2 are all arranged along the vertical direction, so that a U-shaped structure is formed between the first and second plug-in doors 2 and the connection chamber 11.
  • a U-shaped structure is formed between the panel door 2 and the fifth panel door 2 and the heating cavity 12, and a U-shaped structure is formed between the fourth panel door 2 and the sixth panel door 2 and the cooling chamber 3. .
  • the six insert doors 2 can not only isolate the heating chamber 6, the connecting chamber 11, the coating chamber 10 and the cooling chamber 3 from each other and operate independently. It can also greatly shorten the length of the entire coating setup, which not only shortens the moving distance of the workpiece during the entire production process, simplifies the internal structure of the coating equipment, but also reduces the floor space.
  • the first plug-in door 2 and the second plug-in door 2 are configured in the connection cavity 5 and can be separated from the coating cavity 4 when the door is opened, thereby reducing the number of parts on the coating cavity 4 and simplifying coating.
  • the structure of the cavity 4 facilitates the disassembly and assembly of the coating cavity 4.
  • the third sliding door 2 and the fifth sliding door 2 are arranged in the heating cavity 12 .
  • the fourth insert door 2 and the fourth insert door 2 are arranged in the cooling cavity 9 .
  • the heating cavity 12, the connecting cavity 5 and the cooling cavity 9 are independent of each other. They are assembled together to form a coating equipment, which greatly facilitates the production of coating equipment.
  • the first flap door 2 and the third flap door 2 are parallel. This allows the heated workpiece in the heating chamber 6 to directly enter the coating chamber 10 through the first plug-in door 2 and the third plug-in door 2 .
  • the second flap door 2 and the fourth flap door 2 are parallel.
  • the workpieces with good coating in the coating chamber 10 can directly pass through the second plug-in door 2 and the fourth plug-in door 2 and enter the cooling chamber 3.
  • the first plug-in door 2 and the second plug-in door 2 are parallel, so that the heating cavity 12, the connecting cavity 5 and the cooling cavity 9 are connected in sequence along a straight line. This allows the workpiece to move along a straight line throughout the entire coating equipment, greatly simplifying the structure of the drive component and the movement path of the workpiece.
  • fifth and sixth plug-in doors 2 and 2 can use other types of plug-in doors 2 , and the second and third plug-in doors 2 and 2 can also be installed in the connection cavity. 5, the present invention does not specifically limit this.
  • the insert door 2 includes a driving plate 60 that can move up and down on the cavity, a connecting piece 66 hinged to the driving plate 60, and a connecting piece 66 hinged to the driving plate 60.
  • the sealing plate 65 , and the telescopic driving member 58 coupled to the driving plate 60 .
  • the telescopic driving member 58 can drive the driving plate 60 to move downward to the bottom of the sealing plate 65 to contact an external object.
  • the telescopic driving member 58 can also drive the driving plate 60 to continue to move downward, thereby rotating the connecting member 66 and driving the sealing plate 65 to move laterally to seal the side opening against the cavity.
  • the driving plate 60 and the connecting piece 66 are hinged to the A-axis.
  • the sealing plate 65 and the connecting piece 66 are hinged to the B-axis.
  • the A-axis and B-axis are located on the C plane.
  • the sliding door 2 is configured such that when the driving plate 60 moves up and down, the angle D between the plane where the driving plate 60 is located and the plane C is always less than 90 degrees.
  • a connecting rod structure is formed between the driving plate 60 , the sealing plate 65 and the connecting piece 66 .
  • the telescopic driving member 58 drives the driving plate 60 to move up and down, and at the same time, the connecting member 66 drives the sealing plate 65 to move up and down.
  • the telescopic driving member 58 drives the driving plate 60 to move downward
  • the bottom of the sealing plate 65 first contacts the bottom surface of the chamber, and then the telescopic driving member 58 continues to drive the driving plate 60 to move downward.
  • the sealing plate 65 no longer continues to move downward.
  • the downward movement becomes horizontal movement under the action of the connecting piece 66 until it abuts the side of the chamber, thereby sealing the opening of the chamber.
  • the sealing plate 65 drives the connecting member 66 to rotate under the action of gravity, thereby moving horizontally away from the side of the chamber and close to the driving plate 60.
  • the sealing plate 65 abuts against the driving When the plate 60 is driven, it no longer runs horizontally but moves upward with the driving plate 60, thereby completely opening the opening of the chamber.
  • the included angle D is always less than 90 degrees, when the door is closed, part of the downward driving force of the cylinder is always converted into the driving force for horizontally driving the sealing plate 65 to fit on the cavity, which can ensure the sealing effect well. Even if the sealing plate 65 or the sealing ring between the sealing plate 65 and the chamber side wall is worn, the sealing effect will not be affected, which has very good practical significance.
  • the telescopic driving member 58 is a cylinder
  • the first and second plug-in doors 2 and 2 are installed in the connection chamber 11
  • the third plug-in door 2 is installed in the heating chamber 6
  • the fourth plug-in door 2 is installed in the heating chamber 6. 2 are installed in the cooling chamber 3 and are in a vacuum environment.
  • the output shaft of the telescopic driving member 58 is sleeved with a bellows 19.
  • the sliding door 2 further includes a roller mechanism 63 and a limiting block 59 .
  • the roller mechanism 63 is arranged in the box at a position below the sealing plate 65 to limit the limit position of the sealing plate 65 when moving downward and reduce the friction force when the sealing plate 65 moves laterally.
  • the limiting block 59 is configured on the driving plate 60 or the cavity to limit the baseline position of the driving plate 60 when it moves upward.
  • the sliding door 2 further includes a sliding support plate 62 arranged at the lower end of the sealing plate 65 . The sliding support plate 62 is used to abut the roller mechanism 63 .
  • the limiting block 59 can be installed in a position where the driving plate 60 faces upward, or can be arranged on the cavity at a position where the driving plate 60 will reach when it moves upward, so that when the driving plate 60 moves to the highest point, the limiting block 59 will limit the driving plate.
  • the roller mechanism 63 includes a base and a plurality of rollers arranged on the base.
  • the sliding support plate 62 is installed on the bottom surface of the sealing plate 65 to abut the rollers, so that when the sealing plate 65 moves horizontally, the rollers replace the sliding, thereby reducing the resistance encountered by the sealing plate 65 when it moves horizontally.
  • the sliding panel door 2 further includes a rolling member 67 disposed on the side of the driving plate 60 .
  • the rolling element 67 is located on the A-axis for sliding up and down along the slide groove 14 on the cavity.
  • the cavity is provided with chute 14 on both sides of the opening.
  • the sliding door 2 is provided with a rotating shaft on the side of the driving plate 60 .
  • the connecting piece 66 and the rolling piece 67 are in turn on the rotating shaft, and the rolling piece 67 is a bearing for sliding up and down on the chute 14 of the cavity.
  • the sealing plate 65 is provided with a hinge 64 extending towards the drive plate 60 .
  • the hinge portion 64 is used to contact the driving plate 60 when the sealing plate 65 is close to the driving plate 60 .
  • the connecting piece 66 is hinged to the hinge portion 64 .
  • the driving plate 60 is provided with a limiting portion 61 extending toward the sealing plate 65 .
  • the limiting portion 61 is used to contact the sealing plate 65 when the sealing plate 65 is close to the driving plate 60 .
  • the telescopic driving member 58 is engaged with the limiting portion 61 .
  • the hinge part 64 and the limiting part 61 are set to the same height, so that when the sealing plate 65 approaches the driving plate 60 , the limiting part 61 and the hinge part 64 abut, thereby reducing the gap between the sealing plate 65 and the driving plate 60 contact area to avoid making loud noises.
  • Arranging the output shaft of the telescopic driving member 58 between the driving plate 60 and the sealing plate 65 can greatly reduce the thickness of the sliding door 2, thereby reducing the length of the entire coating equipment and the distance that the workpiece needs to move during the coating process. It has very good practical significance.
  • a connection chamber 11 connecting the heating chamber 6 and the cooling chamber 3 is provided inside the connection cavity 5 .
  • the coating chamber 4 is installed in the connection chamber 11, and the openings on both sides face the heating chamber 6 and the cooling chamber 3 respectively.
  • the workpiece heated in the heating chamber 6 can directly enter the coating chamber 10 in the connecting chamber 11 after being moved out of the heating chamber 6; and the workpiece coated in the coating chamber 10 can be moved out of the coating chamber
  • the chamber 10 can directly enter the cooling chamber 3 connected to the connecting chamber 11 .
  • the heating chamber 6 and the cooling chamber 3 can be vacuum connected to the coating chamber 10 through the connecting chamber 11, thereby improving the cleanliness of the coating process.
  • a coating chamber 4 is detachably installed inside the connection cavity 5 to facilitate cleaning of the coating chamber 10 .
  • the coating equipment in the prior art often only has one chamber, and the product needs to be put into the chamber, and then taken out in three steps of heating, coating and cooling to complete the coating operation.
  • the continuous ALD coating equipment of the present invention not only performs the three steps of heating, coating and cooling in different chambers through the sequentially connected heating chamber 12, connecting chamber 5 and cooling chamber 9, so that the coating chamber 10 is always in coating operation, which greatly improves the production efficiency of coating.
  • the heating chamber 6 and the cooling chamber 3 can be connected to the coating chamber 10 in a vacuum respectively, so that the coating chamber 10 will not come into contact with the air, avoid the entry of impurities, and greatly improve the cleanliness during the coating process. , improve the quality of the product.
  • the top of the coating chamber 4 is provided with a feeding hole 21 connected to the coating chamber 10.
  • the box assembly also includes a bellows 19 coupled to the connecting cavity 5, a connecting plate 20 coupled to the bellows 19, a feed pipe 17 coupled to the connecting plate 20, and a connection between the connecting plate 20 and the connecting cavity 5.
  • the connecting plate 20 is provided with a connecting through hole 30 communicating with the bellows 19 .
  • the feeding pipe 17 is sealingly connected to the connecting through hole 30 and extends through the bellows 19 to the outside of the connecting cavity 5 .
  • the first telescopic pressing member 18 is used to abut the connecting plate 20 on the coating cavity 4 so that the connecting through hole 30 is sealingly connected to the feeding hole 21 .
  • the upper surface of the coating chamber 4 is connected to the feeding pipe 17 through a quick-release structure; specifically, the connection chamber 11 is always in a vacuum state. Therefore, it is necessary to use the corrugated tube 19 to wrap the feeding pipe 17 to prevent the feeding pipe 17 from rupture.
  • multiple feeding pipes 17 are joined to a connecting plate 20.
  • the connecting plate 20 When installing the feeding pipes 17 in the coating chamber 4, it is only necessary to seal and press the connecting plate 20 on the coating chamber 4.
  • multiple sealing tubes can be sealed and connected to multiple feeding holes 21 at the same time, thereby realizing rapid disassembly and assembly of multiple feeding tubes 17 at the same time, which greatly facilitates the pick-up and placement of the coating chamber 4.
  • the numbers of the connecting through holes 30 , the corrugated tubes 19 and the feeding tubes 17 correspond to each other, and are all at least two.
  • at least one feeding pipe 17 is used for the first precursor to pass.
  • At least one feed pipe 17 is used for the passage of the second precursor.
  • the number of feeding pipes 17 is two, which are used to transport precursor A and precursor B respectively.
  • digital pressure sensors, vacuum gauges, thermocouples and other measuring equipment can also be provided on the connecting plate 20 to measure the coating chamber.
  • the environmental parameters inside the chamber 10 are not specifically limited by the present invention.
  • the top of the coating chamber 4 is provided with a sealing surface 22 for joining the connecting plate 20 , and an output port is provided on the sealing surface 22 and communicates with the coating chamber 10 .
  • the sealing surface 22 is arranged along the direction in which the coating chamber 4 enters and exits the first access door 1 .
  • the box assembly also includes at least two carrying members 24 respectively arranged on both sides of the sealing surface 22 . External equipment can act on the carrier 24 to pick up and place the coating chamber 4 from the connection chamber 11 .
  • the carrying member 24 is in the shape of a rectangular ring and is used to cooperate with external equipment such as a forklift to pick up and place the coating chamber 4 from the connection chamber 11 .
  • the sealing surface 22 is arranged between the carriers 24 so that when the coating chamber 4 enters and exits the connection chamber 11, components such as the connecting plate 20 will not interfere with the carriers 24, making it easier to pick up and place the coating chamber 4. .
  • a feed chute 29 connected to the feed hole 21 is provided on the top of the coating chamber 10 .
  • the box assembly also includes a baffle 27 for covering the feed chute 29 , and a flow equalizing plate 26 disposed on the top of the coating chamber 10 .
  • the baffle 27 is provided with a plurality of discharging through holes 28 .
  • the flow equalizing plate 26 is distributed with a plurality of equalizing flow holes 25 .
  • the coating cavity 4 consists of a cavity body and a cavity top cover; the sealing surface 22 and the feeding hole 21 are both provided on the cavity top cover.
  • the top cover of the cavity is provided with two feeding holes 21 and two feeding troughs 29 that communicate with the two feeding holes 21 respectively.
  • the feed chute 29 is a chevron-shaped groove composed of a transverse groove and several vertical grooves connected to the transverse groove at intervals, thereby covering the entire top cover of the cavity, so that the precursor passes through the feeding hole 21 It can be distributed on the entire top cover of the cavity through the feed chute 29.
  • the material moving device also includes a vacuum component (not shown); the vacuum component is coupled to the box component to evacuate, so that the heating chamber 6 and The cooling chamber 3 can be connected to the coating chamber 10 in a vacuum.
  • the vacuum components are respectively connected to the heating chamber 6, the cooling chamber 3, the connecting chamber 11, and the coating chamber 10 for evacuation, so that the heating chamber 6 and the cooling chamber 3 can pass through the connecting chamber.
  • 11 is connected to the coating chamber 10 in a vacuum.
  • a discharge hole 23 connected to the coating chamber 10 is provided at the bottom of the coating chamber 4 .
  • the bottom of the connection cavity 5 is provided with a first connection hole 15 communicating with the connection cavity 11 .
  • the coating cavity 4 is located above the first connection hole 15 so that the discharge hole 23 is sealingly connected to the first connection hole 15 .
  • the vacuum component is connected to the first connection hole 15 and used to evacuate the coating chamber 10 .
  • the box assembly also includes a second telescopic tightening member 13 that can be engaged between the coating cavity 4 and the connection cavity 5 .
  • the second telescopic pressing member 13 is configured to abut the coating chamber 4 against the bottom of the connection chamber 11 .
  • the top of the coating chamber 4 is fed with materials and the bottom is discharged.
  • the discharge hole 23 and the first connection hole 15 are respectively arranged at the bottom of the coating cavity 4 and the connection cavity 5.
  • the sealed connection can be completed on the bottom surface of the connection chamber 11.
  • the structure is simple, the disassembly and assembly are convenient, and it has very good practical significance.
  • the vacuum assembly includes a discharge pipe connected to the first connection hole 15, a first vacuum baffle 27 valve configured on the discharge pipe, and a valve connected in parallel to the discharge pipe. Two second vacuum baffle 27 valves of the discharge pipe, and two vacuum pumps respectively connected to the two second vacuum baffle 27 valves.
  • Precursor A and Precursor B would react in the vacuum pump, causing damage to the vacuum pump and requiring frequent maintenance. Even if a filter device is installed in front of the vacuum pump to filter out one of the precursors, the filter device will affect the flow rate of the fluid in the discharge pipe, greatly reducing the vacuuming speed, and the filter device also needs to be replaced frequently to ensure the filtration effect.
  • the embodiment of the present invention extracts the precursor A and the precursor B in the coating chamber 10 through two vacuum valves respectively through the discharge pipe, thereby avoiding the reaction of the precursor A and the precursor B in the vacuum pump. It greatly extends the service life of the vacuum structure, which has very good practical significance.
  • the connecting chamber 11 , the heating chamber 6 and the cooling chamber 3 are connected through pipelines with a small vacuum pump for evacuation, so that the heating chamber 6 , the connecting chamber 11 , the coating chamber 10 and the cooling chamber 3 are They are all operated independently under vacuum to ensure the cleanliness of the coating process.
  • the first telescopic tightening member 18 and the second telescopic tightening member 13 have the same structure. They both include a stud with a clamping position in the middle, and screws threadedly connected to both ends of the stud. The two push rods rotate the push rods and studs to extend the telescopic tightening member, thereby connecting the connecting plate 20 to the top of the coating chamber 4 and the coating chamber 4 to the bottom of the connection chamber 11 .
  • the box assembly further includes a positioning member 16 disposed at the bottom of the connection chamber 11 .
  • the positioning member 16 is configured to limit the position of the coating chamber 10 within the connection chamber 11 .
  • the positioning member 16 includes a plurality of positioning blocks arranged at the bottom of the connection chamber 11 .
  • a limiting space for accommodating the coating cavity 4 is formed between the plurality of positioning blocks.
  • the positioning block is provided with a guide slope facing the limiting space.
  • the positioning member 16 includes 8 positioning blocks, which are respectively arranged at the four corners of the coating cavity 4. Moreover, the height of the positioning blocks disposed toward the cooling chamber 3 and the heating chamber 6 is lower than that of the positioning blocks disposed toward the access door.
  • the box assembly also includes a heating structure of the coating chamber 10 and the heating chamber 6; specifically, a plurality of heating tubes are provided on the top of the heating chamber 6 to heat the heating chamber 6.
  • a heating plate is installed on the side of the coating chamber 4; a heating plate is also installed on the first plug-in door 2 and the second plug-in door 2; a plurality of heating tubes and thermocouples are provided in the heating plate to The coating chamber 10 is heated.
  • the heating tubes and thermocouples on the heating plate are connected using quick-plug interfaces to facilitate the disassembly and assembly of the coating chamber 4 .
  • the driving member in the heating chamber extends out of the heating chamber and hooks the tray assembly; the guide rail member outside the heating chamber can place the tray assembly, and the tray assembly can place the workpiece;
  • the driving member in the heating chamber retracts the heating chamber and hooks the tray assembly into the heating chamber;
  • the first plug-in door and the third plug-in door are opened to connect the heating chamber to the coating chamber in a vacuum;
  • the driving member in the heating chamber extends into the coating chamber and pushes the carrier assembly into the coating chamber;
  • the driving mechanism in the heating chamber retracts the heating chamber and closes the first plug-in door and the third plug-in door,
  • the driving mechanism in the cooling chamber extends into the coating chamber and hooks the carrier assembly
  • the driving mechanism in the cooling chamber retracts the cooling chamber and hooks the tray assembly into the cooling chamber;
  • the driving mechanism in the cooling chamber extends out of the cooling chamber and simultaneously pushes the tray assembly in the cooling chamber out of the cooling chamber; wherein, a guide rail member is provided outside the cooling chamber for placing the tray assembly;
  • the drive mechanism in the cooling chamber retracts the cooling chamber, then closes the sixth flap door and evacuates the cooling chamber.
  • the heating chamber is in a vacuum state the rest of the time.
  • the cooling chamber is in a vacuum state the rest of the time except when the sixth flap door is open.
  • the connection chamber and coating chamber are always in a vacuum state during the entire process and are not in direct contact with the external environment.
  • the heating chamber and the cooling chamber can be heated all the time, or can be heated after the sliding door is closed. The present invention does not limit this, nor does it limit their order.

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明提供了一种连续式ALD镀膜设备的物料移动结构，涉及原子层沉积技术领域。其中，这种物料移动结构包含箱体组件和驱动组件。箱体组件包括依次连接的加热腔体、连接腔体和冷却腔体。驱动组件包括两个驱动构件。两个驱动构件分别配置于加热腔体和冷却腔体。配置于加热腔体的驱动构件被构造为：能够沿着预定轨迹来回移动，以将加热腔室外的工件移动至加热腔室内，以及用以将加热腔室内的工件移动至镀膜腔室内。配置于冷却腔体的驱动构件被构造为：能够沿着预定轨迹来回移动，以将镀膜腔室内的工件移动至冷却腔室内，以及用以将冷却腔室内的工件移动到冷却腔室外；所述箱体组件还包括配置于所述连接腔体的第一检修门。简化镀膜腔体的结构便于清洗。

Description

一种连续式ALD镀膜设备的物料移动结构 技术领域
本发明涉及原子层沉积技术领域，具体而言，涉及一种连续式ALD镀膜设备的物料移动结构。
背景技术
原子层沉积(Atomic layer deposition)是一种可以将物质以单原子膜形式一层一层的镀在基底表面的方法。在原子层沉积过程中，新一层原子膜的化学反应是直接与之前一层相关联的，这种方式使每次反应只沉积一层原子。并且，沉积层具有极均匀的厚度和优异的一致性。
可以理解的是，在原子层沉积镀膜的过程中，同样会对镀膜设备的内部进行镀膜，或者在镀膜设备内部生成各种杂质。因此，定期对镀膜设备的内部进行清洗，从而保证镀膜的质量。但是现有镀膜设备结构复杂，不容易对镀膜设备的内部进行清洗。
有鉴于此，申请人在研究了现有的技术后特提出本申请。
发明内容
本发明提供了一种连续式ALD镀膜设备的物料移动结构，旨在改善不容易对镀膜设备的内部进行清洗的技术问题。
为解决上述技术问题，本发明提供了一种连续式ALD镀膜设备的物料移动结构，其包含箱体组件和驱动组件。
箱体组件，包括依次连接的加热腔体、连接腔体和冷却腔体。加热腔体设置有加热腔室。连接腔体内设置有用以给工件镀膜的镀膜腔室。冷却腔体设置有冷却腔室。加热腔室和冷却腔室分别能够连通于镀膜腔室。
驱动组件，包括两个驱动构件。两个驱动构件分别配置于加热腔室和冷 却腔室。配置于加热腔室的驱动构件被构造为：能够沿着预定轨迹来回移动，以将加热腔室外的工件移动至加热腔室内，以及用以将加热腔室内的工件移动至镀膜腔室内。配置于冷却腔室的驱动构件被构造为：能够沿着预定轨迹来回移动，以将镀膜腔室内的工件移动至冷却腔室内，以及用以将冷却腔室内的工件移动到冷却腔室外；
所述箱体组件还包括配置于所述连接腔体的第一检修门。
通过采用上述技术方案，本发明可以取得以下技术效果：
通过设置在加热腔室和冷却腔室的驱动构件来移动工件，大大简化镀膜腔室内的结构，便于对镀膜腔室进行清洗，具有很好的实际意义。
附图说明
为了更清楚地说明本发明实施方式的技术方案，下面将对实施方式中所需要使用的附图作简单地介绍，应当理解，以下附图仅示出了本发明的某些实施例，因此不应被看作是对范围的限定，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他相关的附图。
图1是连续式ALD镀膜设备的轴测图；
图2是连续式ALD镀膜设备的半剖图；
图3是连接腔体的爆炸图；
图4是连接腔室内部的爆炸图；
图5是镀膜腔体的爆炸图；
图6是镀膜腔体的爆炸图(隐藏箱体)；
图7是冷却腔室的轴测图；
图8是驱动构件的第一爆炸图；
图9是驱动构件的第二爆炸图；
图10是棘轮机构的爆炸图；
图11是载盘组件的爆炸图；
图12是插板门的第一爆炸图；
图13是插板门的第二爆炸图。
具体实施方式
为使本发明实施方式的目的、技术方案和优点更加清楚，下面将结合本发明实施方式中的附图，对本发明实施方式中的技术方案进行清楚、完整地描述，显然，所描述的实施方式是本发明一部分实施方式，而不是全部的实施方式。基于本发明中的实施方式，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施方式，都属于本发明保护的范围。因此，以下对在附图中提供的本发明的实施方式的详细描述并非旨在限制要求保护的本发明的范围，而是仅仅表示本发明的选定实施方式。基于本发明中的实施方式，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施方式，都属于本发明保护的范围。
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的设备或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
此外，术语“第一”、“第二”仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中，“多个”的含义是两个或两个以上，除非另有明确具体的限定。
在本发明中，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或成一体；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言，可以根据具体情况理解上述 术语在本发明中的具体含义。
在本发明中，除非另有明确的规定和限定，第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触，也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且，第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方，或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方，或仅仅表示第一特征水平高度小于第二特征。
下面结合附图与具体实施方式对本发明作进一步详细描述：
由图1至图13所示，本发明实施例提供了连续式ALD镀膜设备的物料移动结构，其包含箱体组件和驱动组件。
箱体组件包括依次连接的加热腔体12、连接腔体5和冷却腔体9。加热腔体12设置有加热腔室6。连接腔体5内设置有用以给工件镀膜的镀膜腔室10。冷却腔体9设置有冷却腔室3。加热腔室6和冷却腔室3分别能够连通于镀膜腔室10。
驱动组件包括两个驱动构件32。两个驱动构件32分别配置于加热腔室6和冷却腔室3。配置于加热腔室6的驱动构件32被构造为：能够沿着预定轨迹来回移动，以将加热腔室6外的工件移动至加热腔室6内，以及用以将加热腔室6内的工件移动至镀膜腔室10内。配置于冷却腔室3的驱动构件32被构造为：能够沿着预定轨迹来回移动，以将镀膜腔室10内的工件移动至冷却腔室3内，以及用以将冷却腔室3内的工件移动到冷却腔室3外。
优选的，箱体组件还包括设置有所述镀膜腔室10的镀膜腔体4。连接腔体5设置有连接腔室11。镀膜腔体4可拆卸的安装在连接腔室11内。所述箱体组件还包括设置于所述连接腔体5的第一检修门1、设置于所述加热腔体12的第二检修门和设置于所述冷却腔体9的第三检修门。第一检修门1用以取放镀膜腔体4。
具体的，将两个驱动构件32分别安装在加热腔室6和冷却腔室3内，使得镀膜腔室10内只有导轨构件8和均流板26，不仅结构简单便于清洗，而且不易损坏，具有很好的实际意义。
可以理解的，在镀膜腔室10中前驱体A和前驱体B发生反应形成所要的镀膜，同时也会在镀膜腔室10内的零部件表面形成镀膜，因此镀膜腔室10内如果有传动机构的话，那么就很容易损坏，而且也不便于清洗。在本发明中，通过左右活动的方式，将载盘组件7依次在五个导轨构件8之间移动，从而实现在镀膜腔室10内没有动力机构的情况下，对工件进行加热、镀膜和冷却作业，具有很好的实际意义。
如图8和图9所示，在一个可选的实施例中，驱动构件32包括能够沿着预定轨迹活动的第一移动机构34、配置于第一移动机构34的棘爪机构33、接合于第一移动机构34的传动机构，以及接合于传动机构的驱动机构37。驱动机构37能够通过传动机构驱动第一移动机构34沿着预定轨迹正向移动或反向移动。棘爪机构33构造为：当第一移动机构34正向移动时能够抵接于外部物体并进行避让，当第一移动机构34反向移动时能够抵接于外部物体并带动外部物体正向移动。优选地，驱动构件32包括两个棘爪机构33。两个棘爪机构33分别配置于第一移动机构34的两端。棘爪机构33包括可转动的配置于第一移动机构34的推板38，以及接合于推板38和第一移动机构34之间弹性件39。推板38设置有用以抵接于第一移动机构34的抵接部55。抵接部55用以在第一移动机构34反向移动时限位推板38。弹性件39用以驱使推板38自避让位置进行复位。
具体地，驱动机构37和传动机构带动第一移动机构34左右活动，从而通过第一移动机构34上的棘爪结构将载盘组件7从加热腔体12外勾入加热腔室6内，或者从加热腔室6内推入镀膜腔室10内。纯机械结构的棘爪机构33来实现载盘组件7的移动，能够适应加热腔室6内的真空高温环境而不容易损坏，具有很好的实际意义。可以理解的是，两个棘爪机构33分别设置在第一移动机构34的两端，一个用于勾取，另一个用于推出，两个推板38均 用于向同一个方向施力。
如图8和图9所示，在一个可选的实施例中，驱动构件32还包括第二移动机构35，第二移动机构35接合于传动机构，且构造为能够受传动机构的驱动以沿着预定轨迹正向移动或反向移动。第一移动机构34构造为：在第二移动机构35移动时，能够朝向第二移动机构35的移动方向，相对第二移动机构35移动。优选地，驱动构件32还包括底座机构36。底座机构36用以配置于加热腔室6或冷却腔室3。第二移动机构35可滑动的配置于底座机构36。第一移动机构34可滑动的配置于第二移动机构35。
具体地，通过第二移动机构35能够增加驱动构件32左右移动时伸长的距离，从而采用更少的勾取次数将载盘组件7移动到合适的位置，具有很好的实际意义。通过底座机构36能够将第一移动机构34、第二移动机构35和传动机构整合成一个整体，以便于驱动构件32的拆装作业。
如图8和图9所示，在一个可选的实施例中，传动机构包括配置于底座机构36的第一齿轮53和第一齿条52、配置于第二移动机构35的第二齿轮50和第二齿条51，以及配置于第一移动机构34的第三齿条49。第一齿轮53接合于第二齿条51，且传动连接于驱动机构37，用以驱动第二移动机构35相对底座机构36移动。第二齿轮50分别啮合于第一齿条52和第三齿条49，用以在第二移动机构35移动的同时，能够朝向第二移动机构35的移动方向，移动第一移动机构34。优选地，第一移动机构34包括第一底板40和配置于第一底板40的多个第一滚轮41。底座机构36包括底座支撑板46，以及配置于底座支撑板46的多个第二滚轮45。第二移动机构35包括第二底板44和配置于第二底板44的滚轮安装座43。滚轮安装座43的两侧分别设置有容纳第一滚轮41和第二滚轮45的导槽42。
具体的，通过齿轮齿条的传动结构实现第一齿轮53驱动第二齿条51移动的同时，第二齿轮50驱动第三齿条49移动，使得第二移动机构35和第一移动机构34同时朝向同一个方向移动，以实现更长的伸出距离和伸出速度，保证高效的移动载盘组件7。
在本发明中，在第二移动机构35上设置滚轮安装座43，在第一移动机构34和底座机构36上安装滚轮，从而实现第一移动机构34可滑动的安装在第二移动机构35，第二移动机构35可滑动的安装在底座机构36上，从而实现了驱动构件32能够具有更长的伸长距离。作为本发明的一个等同替换方案，可以将第一移动机构34和第二移动机构35均可滑动的配置于底座机构36上，该方案亦是属于本发明的保护范围的。
如图8和图9所示，在一个可选的实施例中，驱动机构37包括电机48和磁流体真空密封传动装置47。电机48传动连接于磁流体真空密封传动装置47的输入端。传动机构还包括用以驱动第二移动机构35移动的第一齿轮53，以及传动连接于第一齿轮53和磁流体真空密封传动装置47输出端的至少一个传动齿轮54。第一齿轮53和至少一个传动齿轮54沿着竖直方向排布。
具体地，传动齿轮54设置为两个，通过竖向排布的第一齿轮53和两个传动齿轮54，可以使得驱动机构37的动力，从动腔体底部传递至位于腔体内部的第二齿条51以进行驱动，采用多级齿轮传动，能够在高温真空的环境下保持较长的寿命，具有很好的实际意义。
在其它实施例中，可以通过皮带链条等结构传动，均属于本实施例的等同技术方案，属于本发明的保护范围。
如图2、7和11所示，在一个可选的实施例中，箱体组件还包括用以承载工件的载盘组件7和用以支撑载盘组件7的五个导轨构件8。五个导轨构件8分别配置于加热腔室6、镀膜腔室10、冷却腔室3，以及位于加热腔体12外和冷却腔体9外。载盘组件7构造为：能够在驱动组件的驱动下在五个导轨构件8之间移动，从而依次穿过加热腔体12、连接腔体5和冷却腔体9。优选地，载盘组件7的顶部设置有用以放置工件的放置槽，底部设置有用以供棘爪机构33嵌入的驱动槽57。载盘组件7还设置有能够在导轨构件8上滑动的载盘滚轮56。导轨构件8间隔设置有用以限位载盘滚轮56的限位槽31。
具体的，采用滚轮的行驶能够大大降低载盘组件7在移动过程中的摩擦 力，大大降低了物料移动装置所需要的动力。在其它实施例中，可以采用滑槽14的形式，配合活动。本实用新型对此不作限定。可以理解的滚轮的摩擦力较小，在导轨上设置有较浅的限位槽31，能够有效的避免载盘组件7移动到预定位置后载盘组件7在导轨构件8上乱滑动。
如图2和图3所示，在一个可选的实施例中，物料移动结构还包括密封组件。密封组件，包括配置于箱体组件的六个插板门2。第一个插板门2和第二个插板门2分别用以连通镀膜腔室10和连接腔室11。第三个插板门2用以连通加热腔室6和连接腔室11。第四个插板门2用以连通连接腔室11和冷却腔室3。第五个插板门2用以连通加热腔室6和加热腔体12的外部。第六个插板门2用以连通冷却腔室3和冷却腔体9的外部。优选的，六个插板门2均沿着竖直方向设置，以使第一个插板门2和第二个插板门2和连接腔室11之间形成U形结构、第三个插板门2和第五个插板门2和加热腔体12之间形成U形结构，以及第四个插板门2和第六个插板门2和冷却腔室3之间形成U形结构。
具体的，六个插板门2不仅能够将加热腔室6、连接腔室11、镀膜腔室10和冷却腔室3之间相互隔离，独立作业。并且还能够大大的缩短整个镀膜设置的长度，不仅缩短工件在整个生产过程中的移动距离，简化镀膜设备的内部结构，而且还能够减小占地面积。
优选地，第一个插板门2和第二个插板门2配置于连接腔体5，且能够在开门时和镀膜腔体4分离，从而减少镀膜腔体4上的零部件，简化镀膜腔体4的结构，以便于镀膜腔体4的拆装。第三个插板门2和第五个插板门2配置于加热腔体12。第四个插板门2和第四个插板门2配置于冷却腔体9。具体的，加热腔体12、连接腔体5和冷却腔体9三个腔体之间相互独立，将其组装在一起形成镀膜设备，大大方便了镀膜设备的生产。
优选的，第一个插板门2和第三个插板门2平行。使得加热腔室6中加热好的工件能够直接穿过第一个插板门2和第三个插板门2进入到镀膜腔室10中。第二个插板门2和第四个插板门2平行。使得镀膜腔室10中镀膜好 的工件能够直接穿过第二个插板门2和第四个插板门2进入到冷却腔室3中。第一个插板门2和第二个插板门2平行，以使加热腔体12、连接腔体5和冷却腔体9沿着直线依次连接。使得工件在整个镀膜设备中沿着直线移动，大大简化了驱动组件的结构，以及工件的移动路径。
可以理解的是，第五插板门2和第六插板门2可以采用其它类型的插板门2，第二个插板门2和第三个插板门2也可以安装在连接腔体5上，本发明对此不作具体限定。
如图12和图13所示，在一个可选的实施例中，插板门2包括能够在腔体上上下活动的驱动板60、铰接于驱动板60的连接件66、铰接于连接件66的密封板65，以及接合于驱动板60的伸缩驱动件58。伸缩驱动件58能够驱使驱动板60向下移动至密封板65的下方抵接于外部物体。伸缩驱动件58还能够驱使驱动板60继续向下移动，从而让连接件66旋转并驱动密封板65横向移动至侧面密封抵接于腔体的开口。其中，驱动板60和连接件66铰接于A轴。密封板65和连接件66铰接于B轴。A轴和B轴位于C平面。插板门2构造为：当驱动板60上下活动时，驱动板60所在的平面和C平面之间的夹角D始终小于90度。
具体的，驱动板60、密封板65和连接件66之间形成连杆结构。伸缩驱动件58带动驱动板60上下活动，同时通过连接件66带动密封板65上下活动。当伸缩驱动件58带动驱动板60向下活动时，密封板65的底部优先抵接到腔室的底面，然后伸缩驱动件58继续带动驱动板60向下活动，此时密封板65不在继续向下活动而是在连接件66的作用下变成水平活动，直至抵接在腔室的侧面，从而密封腔室的开口。当伸缩驱动件58带动驱动板60向下活动时，密封板65在重力作用下驱使连接件66旋转，从而水平活动，以远离腔室侧面而靠近驱动板60，当密封板65抵接于驱动板60时，不再水平运行而是随着驱动板60向上运动，从而完全打开腔室的开口。
因为夹角D始终小于90度，因此在关门状态下，气缸向下的驱动力，始终有一部分转化为水平驱动密封板65贴合在腔体上的驱动力，能够很好的保 证密封效果，即使密封板65或者密封板65和腔室侧壁之间的密封圈发生磨损也不会影响密封效果，具有很好的实际意义。
优选的，伸缩驱动件58为气缸，第一插板门2和第二插板门2安装在连接腔室11内，第三插板门2安装在加热腔室6内，第四插板门2安装在冷却腔室3内，均处于真空环境，为了避免气缸漏气，因此伸缩驱动件58的输出轴采用波纹管19套置。
如图12和图13所示，在一个可选的实施例中，插板门2还包括滚轮机构63和限位块59。滚轮机构63用以配置于箱体中位于密封板65下方的位置，能够限制密封板65向下活动时的极限位置，以及减小密封板65横向移动时的摩擦力。限位块59用以配置于驱动板60或腔体上，用以限制驱动板60向上活动时的基线位置。插板门2还包括配置于密封板65的下端的滑动支撑板62。滑动支撑板62用以抵接滚轮机构63。
具体的，限位块59可以安装在驱动板60朝上的位置，或者配置于腔体上驱动板60向上运动时会到达的位置，从而在驱动板60移动到最高点时，限位驱动板60。滚轮机构63包括一个底座和配置在底座上的多个滚轮。滑动支撑板62安装在密封板65底面，用以抵接滚轮，从而在密封板65水平移动的时候，以滚代滑，减小密封板65水平运动时所受到的阻力。
如图12和图13所示，在一个可选的实施例中，插板门2还包括配置于驱动板60侧面的滚动件67。滚动件67位于A轴，用以沿着腔体上的滑槽14上下滑动。具体的，腔体在开口的两侧设置有滑槽14。插板门2在驱动板60的侧面设置有转轴。连接件66和滚动件67依次在转轴上，滚动件67为轴承，用以在腔体的滑槽14上上下滑动。
优选地，密封板65设置有朝向驱动板60延伸的铰接部64。铰接部64用以在密封板65靠近驱动板60时，抵接于驱动板60。连接件66铰接于铰接部64。驱动板60设置有朝向密封板65延伸的限位部61。限位部61用以在密封板65靠近驱动板60时，抵接于密封板65。伸缩驱动件58接合于限位部61。
将铰接部64和限位部61设置为相同的高度，以在密封板65靠近驱动板60时，通过限位部61和铰接部64进行抵接，减小密封板65和驱动板60之间的接触面积，避免发出较大的响声，
将伸缩驱动件58的输出轴设置在驱动板60和密封板65之间能够大大减小插板门2的厚度，从而减小真个镀膜设备的长度和工件在镀膜过程所需要移动的距离，具有很好的实际意义。
如图1至图3所示，连接腔体5内部设置有连通加热腔室6和冷却腔室3的连接腔室11。镀膜腔体4安装在连接腔室11内，且两侧开口分别正对着加热腔室6和冷却腔室3。使得加热腔室6内加热好的工件，在移出加热腔室6后，能够直接进入到连接腔室11内的镀膜腔室10内；以及镀膜腔室10镀好膜的工件，在移出镀膜腔室10后能够直接进入到连接腔室11连通的冷却腔室3中。并且，通过连接腔室11能够让加热腔室6和冷却腔室3真空连接到镀膜腔室10，从而提高镀膜过程的洁净度。
可以理解的，在镀膜过程中会在镀膜腔室10内产生反应物，需要定期对镀膜腔室10进行清洗，从而进一步的保证镀膜的质量。在本实施例中，通过在连接腔体5内部可拆卸的安装一个镀膜腔体4，从而方便对镀膜腔室10进行清洗。
需要说明的是，在先技术中的镀膜设备往往只有一个腔室，需要经过将产品放入腔室中，然后升温、镀膜和冷却三个步骤后取出，以完成镀膜作业。本发明的连续式ALD镀膜设备不仅通过依次连接的加热腔体12、连接腔体5和冷却腔体9，将加热、镀膜和冷却三个步骤分别在不同的腔体内部进行，使得镀膜腔室10始终处于镀膜作业，大大提高了镀膜的生产效率。而且通过真空组件，使得加热腔室6和冷却腔室3能够分别和镀膜腔室10真空连接，使得镀膜腔室10不会接触到空气，避免杂质的进入，大大提高了镀膜过程中的洁净度，提高了产品的质量。
如图3至图6所示，在一个可选的实施例中，镀膜腔体4的顶部设置有 连通镀膜腔室10的输料孔21。箱体组件还包括接合于连接腔体5的波纹管19、接合于波纹管19的连接板20、接合于连接板20的输料管17，以及能够接合于连接板20和连接腔体5之间的第一伸缩顶紧构件18。连接板20设置有连通波纹管19的连接通孔30。输料管17密封连接于连接通孔30，且穿过波纹管19延伸至连接腔体5外。第一伸缩顶紧构件18用以将连接板20抵接在镀膜腔体4上，从而让连接通孔30密封连接于输料孔21。
优选地，镀膜腔体4的上面通过快拆结构，来连接输料管17；具体的，连接腔室11内始终处于真空状态。因此，因此需要采用波纹管19来包裹住输料管17，避免输料管17发生破裂。
在本实施例中，将多个输料管17接合在一个连接板20上，在将输料管17安装在镀膜腔体4时，只需要将连接板20密封压合在镀膜腔体4的顶部，就能够实现同时将多个密封管分别密封连接在多个输料孔21上，从而实现快速的同时拆装多个输料管17，大大方便了镀膜腔体4的取放。
在本实施例中，连接通孔30、波纹管19和输料管17的数量一一对应，且均为至少两个。其中，至少一个输料管17用以供第一种前驱体通过。至少一个输料管17用以供第二种前驱体通过。具体的，输料管17的数量为两根，分别用以输送前驱体A和前驱体B，但是在连接板20上还可以设置数字压力传感器和真空计、热电偶等测量设备来测量镀膜腔室10内部的环境参数，本发明对此不作具体限定。
如图3至图6所示，在一个可选的实施例中，镀膜腔体4的顶部设置有用以接合连接板20的密封面22，以及设置于密封面22且连通镀膜腔室10的输料孔21。密封面22沿着镀膜腔体4进出第一检修门1的方向设置。箱体组件还包括分别配置于密封面22两侧的至少两个搬运件24。外部设备能够作用于搬运件24，从而从连接腔室11中取放镀膜腔体4。
具体的，搬运件24为矩形环状，用以和叉车等外部设备配合，从而从连接腔室11内取放镀膜腔体4。将密封面22设置在搬运件24之间，使得镀膜腔体4在进出连接腔室11的时候，连接板20等部件不会和搬运件24发生干 涉，从而更方便的取放镀膜腔体4。
如图5和图6所示，在一个可选的实施例中，镀膜腔室10的顶部设置有连通输料孔21的供料槽29。箱体组件还包括用以罩住供料槽29的挡板27，以及配置于镀膜腔室10顶部的均流板26。挡板27上设置有多个出料通孔28。均流板26分布有多个均流通孔25。
具体的，镀膜腔体4有腔主体和腔顶盖组成；密封面22和输料孔21均设置在腔顶盖上。腔顶盖上设置有两个输料孔21和分别连通两个输料孔21的两个供料槽29。供料槽29为一条横向槽和间隔设置的数条连通于横向槽的竖向槽组成的山字型的凹槽，从而布满整个腔顶盖，使得前驱体在穿过输料孔21后能够通过供料槽29分布在整个腔顶盖上。
在腔顶盖上还层叠设置有两层网状的均流板26，自连通供料槽29的出料通孔28流出的前驱体，流向均流板26，通过两层的均流板26不仅能够让前驱体在镀膜腔室10内分布更加均匀，而且还能够大大将其前驱体的流速。而不会出现前驱体聚集且流速过快而造成反应不充分的问题，具有很好的实际意义。
如图3和4所示，在一个可选的实施例中，物料移动装置还包含真空组件(图未示)；真空组件接合于箱体组件，用以抽真空，从而使得加热腔室6和冷却腔室3能够真空连接于镀膜腔室10。具体的，真空组件分别连通于加热腔室6、冷却腔室3、连接腔室11，以及镀膜腔室10，用以抽真空，从而使得加热腔室6和冷却腔室3能够通过连接腔室11真空连接于镀膜腔室10。
优选的，镀膜腔体4的底部设置有连通镀膜腔室10的排料孔23。连接腔体5的底部设置有连通连接腔室11的第一连接孔15。镀膜腔体4位于第一连接孔15的上方，以使排料孔23密封连接于第一连接孔15。真空组件接合于第一连接孔15，用以对镀膜腔室10进行抽真空。箱体组件还包括能够接合于镀膜腔体4和连接腔体5之间的第二伸缩顶紧构件13。第二伸缩顶紧构件13构造为：用以将镀膜腔体4抵接于连接腔室11的底部。
具体的，镀膜腔体4顶部进料，底部排料。将排料孔23和第一连接孔 15分别设置在镀膜腔体4和连接腔体5的底部，在密封连接排料孔23和第一连接孔15的时候，只需要将镀膜腔体4放置在连接腔室11的底面上就能够完成密封连接，结构简单，拆装方便，具有很好的实际意义。
优选的，连接腔体5的底部只设置一个第一连接孔15，真空组件包括接合于第一连接孔15的排料管、配置于排料管的第一真空挡板27阀、并联连通于所述排料管的两个第二真空挡板27阀，以及分别接合于两个第二真空挡板27阀的两个真空泵。
具体的，发明人通过大量研究发现，前驱体A和前驱体B会在真空泵中发生反应从而导致真空泵损坏，需要频繁维修。即使在真空泵前方安装过滤装置，将其中一种前驱体过滤掉，但是过滤装置会影响排料管道中流体的流速，大大降低抽真空速度，并且过滤装置也需要频繁更换以保证过滤效果。
有鉴于此，本实用新型实施例通过两个真空阀分别通过排料管抽取镀膜腔室10内的前驱体A和前驱体B，从而避免了前驱体A和前驱体B在真空泵中发生反应，大大延长了真空结构的使用寿命，具有很好的实际意义。
优选的，连接腔室11、加热腔室6和冷却腔室3分别通过管道连通有一个小真空泵进行抽真空，使得加热腔室6、连接腔室11、镀膜腔室10和冷却腔室3内均保持在真空状态下独立进行作业，从而保证镀膜过程的洁净度。
在本实施例中，第一伸缩顶紧构件18和第二伸缩顶紧构件13的结构相同，均包括一根中间设置有夹持位的螺柱，以及分别螺纹连接于所述螺柱两端的两根顶杆，通过旋转顶杆和螺柱，使得伸缩顶紧构件伸长，从而将连接板20顶接在镀膜腔体4顶部，以及将镀膜腔体4顶接在连接腔室11底部。
如图3所示，在一个可选的实施例中，箱体组件还包括配置于连接腔室11底部的定位构件16。定位构件16构造为：能够限位镀膜腔室10在连接腔室11内的位置。具体的，定位构件16包括配置于连接腔室11底部的多个定位块。多个定位块之间形成有容纳镀膜腔体4的限位空间。定位块设置有朝向限位空间的导向斜面。
在本实施例中，定位构件16包括8个定位块，分别设置在镀膜腔体4的 四角处。并且，朝向冷却腔室3和加热腔室6方向设置的定位块的高度低于朝向检修门方向设置的定位块。
优选的，箱体组件还包括镀膜腔室10和加热腔室6的加热结构；具体的，在加热腔室6的顶部设置有多根加热管，以对加热腔室6进行加热。在镀膜腔体4的侧面安装有加热板；在第一个插板门2和第二个插板门2上也安装有加热板；在加热板中设置有多根加热管和热电偶，以对镀膜腔室10进行加热。在本实施例中，加热板上的加热管和热电偶采用快插接口连接线路，以方便镀膜腔体4的拆装。
采用本发明的连续式ALD镀膜设备进行生产的生产方法：
打开第五个插板门，使加热腔室连通外界；
加热腔室内的驱动构件伸出加热腔室，勾住载盘组件；其中，加热腔体外的导轨构件能够放置载盘组件，载盘组件能够放置工件；
加热腔室内的驱动构件缩回加热腔室，并将载盘组件勾入加热腔室；
关闭第五个插板门，并对加热腔室抽真空，以及对加热腔室进行加热；
对对冷却腔体、连接腔室和镀膜腔室抽真空，并加热连接腔室，使其处于工艺温度；
当工件加热到第一预定温度后，打开第一个插板门和第三个插板门，使加热腔室真空连通至镀膜腔室；
加热腔室内的驱动构件伸入镀膜腔室，并将载盘组件推入镀膜腔室；
加热腔室内的驱动机构缩回加热腔室，并关闭第一个插板门和第三个插板门，
往镀膜腔室内通入前驱体A，同时打开第一个第二真空挡板阀和第一个真空泵，以抽取镀膜腔室内的前驱体A，使工件表面留下一层前驱体A；
停止往镀膜腔室内通入前驱体A，并在镀膜腔室内的前驱体A抽干净后，关闭第一个第二真空挡板阀和第一个真空泵；
往镀膜腔室内通入前驱体B，同时打开第二个第二真空挡板阀和第二个真空泵抽取镀膜腔室内的前驱体B，使前驱体B和工件表面的前驱体A发生 反应，从而在工件表面形成镀膜；
停止往镀膜腔室内通入前驱体B，并在镀膜腔室内的前驱体B抽干净后，关闭第二个第二真空挡板阀和第二个真空泵；
打开第二个插板门和第四个插板门，使冷却腔室和镀膜腔室真空连接；
冷却腔室内的驱动机构伸入镀膜腔室内，勾住载盘组件；
冷却腔室内的驱动机构缩回冷却腔室，并将载盘组件勾入冷却腔室；
当工件降温到第二预定温度后，停止对冷却腔室抽真空，并打开第六个插板门，使冷却腔室连通外界；
冷却腔室内的驱动机构伸出冷却腔室，同时将冷却腔室内的载盘组件推出冷却腔体外；其中，冷却腔室外设置有用以放置载盘组件的导轨构件；
冷却腔室内的驱动机构缩回冷却腔室，然后关闭第六个插板门，并对冷却腔室抽真空。
需要说明的是，以上步骤不分先后顺序，例如：加热腔室除了第五个插板门打开时，其余时间都处于真空状态。冷却腔室除了第六个插板门打开时，其余时间都处于真空状态。连接腔室和镀膜腔室在在整个过程中始终处于真空状态，不与外界环境直接接触。并且，加热腔室和冷却腔室可以始终进行加热，也可以等插板门关闭后再进行加热，本发明对此亦不作限定，更不对其先后顺序进行限定。
以上所述仅为本发明的优选实施方式而已，并不用于限制本发明，对于本领域的技术人员来说，本发明可以有各种更改和变化。凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (10)

  1. 一种连续式ALD镀膜设备的物料移动结构，其特征在于，包含：
    箱体组件，包括依次连接的加热腔体(12)、连接腔体(5)和冷却腔体(9)；所述加热腔体(12)设置有加热腔室(6)；所述连接腔体(5)内设置有用以给工件镀膜的镀膜腔室(10)；所述冷却腔体(9)设置有冷却腔室(3)；所述加热腔室(6)和所述冷却腔室(3)分别能够连通于所述镀膜腔室(10)；
    驱动组件，包括两个驱动构件(32)；两个所述驱动构件(32)分别配置于所述加热腔室(6)和所述冷却腔室(3)；配置于所述加热腔室(6)的驱动构件(32)被构造为：能够沿着预定轨迹来回移动，以将所述加热腔室(6)外的工件移动至所述加热腔室(6)内，以及用以将所述加热腔室(6)内的工件移动至所述镀膜腔室(10)内；配置于所述冷却腔室(3)的驱动构件(32)被构造为：能够沿着预定轨迹来回移动，以将所述镀膜腔室(10)内的工件移动至所述冷却腔室(3)内，以及用以将所述冷却腔室(3)内的工件移动到所述冷却腔室(3)外；
    所述箱体组件还包括配置于所述连接腔体(5)的第一检修门(1)。
  2. 根据权利要求1所述的物料移动结构,其特征在于,所述驱动构件(32)包括能够沿着预定轨迹活动的第一移动机构(34)、配置于所述第一移动机构(34)的棘爪机构(33)、接合于所述第一移动机构(34)的传动机构，以及接合于所述传动机构的驱动机构(37)；所述驱动机构(37)能够通过所述传动机构驱动所述第一移动机构(34)沿着预定轨迹正向移动或反向移动；所述棘爪机构(33)构造为：当所述第一移动机构(34)正向移动时能够抵接于外部物体并进行避让，当所述第一移动机构(34)反向移动时能够抵接于外部物体并带动外部物体正向移动。
  3. 根据权利要求2所述的物料移动结构,其特征在于,所述驱动构件(32)还包括第二移动机构(35)，所述第二移动机构(35)接合于所述传动机构，且构造为能够受所述传动机构的驱动以沿着预定轨迹正向移动或反向移动；所 述第一移动机构(34)构造为：在所述第二移动机构(35)移动时，能够朝向所述第二移动机构(35)的移动方向，相对所述第二移动机构(35)移动。
  4. 根据权利要求3所述的物料移动结构,其特征在于,所述驱动构件(32)还包括底座机构(36)；所述底座机构(36)用以配置于所述加热腔室(6)或所述冷却腔室(3)；所述第二移动机构(35)可滑动的配置于所述底座机构(36)；所述第一移动机构(34)可滑动的配置于所述第二移动机构(35)。
  5. 根据权利要求4所述的物料移动结构,其特征在于,所述传动机构包括配置于所述底座机构(36)的第一齿轮(53)和第一齿条(52)、配置于所述第二移动机构(35)的第二齿轮(50)和第二齿条(51)，以及配置于所述第一移动机构(34)的第三齿条(49)；所述第一齿轮(53)接合于所述第二齿条(51)，且传动连接于所述驱动机构(37)，用以驱动所述第二移动机构(35)相对所述底座机构(36)移动；所述第二齿轮(50)分别啮合于所述第一齿条(52)和所述第三齿条(49)，用以在所述第二移动机构(35)移动的同时，能够朝向所述第二移动机构(35)的移动方向，移动所述第一移动机构(34)。
  6. 根据权利要求3所述的物料移动结构,其特征在于,所述驱动机构(37)包括电机(48)和磁流体真空密封传动装置(47)；所述电机(48)传动连接于所述磁流体真空密封传动装置(47)的输入端；
    所述传动机构还包括用以驱动所述第二移动机构(35)移动的第一齿轮(53)，以及传动连接于所述第一齿轮(53)和所述磁流体真空密封传动装置(47)输出端的至少一个传动齿轮(54)；所述第一齿轮(53)和所述至少一个传动齿轮(54)沿着竖直方向排布。
  7. 根据权利要求4所述的物料移动结构,其特征在于,所述第一移动机构(34)包括第一底板(40)和配置于所述第一底板(40)的多个第一滚轮(41)；所述底座机构(36)包括底座支撑板(46)，以及配置于所述底座支撑板(46)的多个第二滚轮(45)；所述第二移动机构(35)包括第二底板(44)和配置于所述第 二底板(44)的滚轮安装座(43)；所述滚轮安装座(43)的两侧分别设置有容纳所述第一滚轮(41)和所述第二滚轮(45)的导槽(42)。
  8. 根据权利要求2所述的物料移动结构,其特征在于,所述驱动构件(32)包括两个所述棘爪机构(33)；两个所述棘爪机构(33)分别配置于所述第一移动机构(34)的两端；
    所述棘爪机构(33)包括可转动的配置于所述第一移动机构(34)的推板(38)，以及接合于所述推板(38)和所述第一移动机构(34)之间弹性件(39)；所述推板(38)设置有用以抵接于所述第一移动机构(34)的抵接部(55)；所述抵接部(55)用以在所述第一移动机构(34)反向移动时限位所述推板(38)；所述弹性件(39)用以驱使所述推板(38)自避让位置进行复位。
  9. 根据权利要求2至8任意一项所述的物料移动结构,其特征在于,所述箱体组件还包括用以承载工件的载盘组件(7)和用以支撑所述载盘组件(7)的五个导轨构件(8)；五个导轨构件(8)分别配置于所述加热腔室(6)、所述镀膜腔室(10)、所述冷却腔室(3)，以及位于所述加热腔体(12)外和所述冷却腔体(9)外；所述载盘组件(7)构造为：能够在所述驱动组件的驱动下在五个所述导轨构件(8)之间移动，从而依次穿过所述加热腔体(12)、所述连接腔体(5)和所述冷却腔体(9)。
  10. 根据权利要求9所述的物料移动结构,其特征在于,所述载盘组件(7)的底部设置有用以供所述棘爪机构(33)嵌入的驱动槽(57)；所述载盘组件(7)设置有能够在所述导轨构件(8)上滑动的载盘滚轮(56)；所述导轨构件(8)间隔设置有用以限位所述载盘滚轮(56)的限位槽(31)。
PCT/CN2022/119529 2022-03-25 2022-09-19 一种连续式ald镀膜设备的物料移动结构 WO2023178950A1 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN202210298218.4A CN114657538B (zh) 2022-03-25 2022-03-25 一种连续式ald镀膜设备的腔体结构
CN202210298218.4 2022-03-25

Publications (1)

Publication Number Publication Date
WO2023178950A1 true WO2023178950A1 (zh) 2023-09-28

Family

ID=82030653

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/CN2022/119529 WO2023178950A1 (zh) 2022-03-25 2022-09-19 一种连续式ald镀膜设备的物料移动结构
PCT/CN2022/119527 WO2023178949A1 (zh) 2022-03-25 2022-09-19 一种连续式ald镀膜设备的腔体结构

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/CN2022/119527 WO2023178949A1 (zh) 2022-03-25 2022-09-19 一种连续式ald镀膜设备的腔体结构

Country Status (2)

Country Link
CN (1) CN114657538B (zh)
WO (2) WO2023178950A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114657538B (zh) * 2022-03-25 2024-02-02 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5683561A (en) * 1991-04-04 1997-11-04 Conner Peripherals, Inc. Apparatus and method for high throughput sputtering
CN102644062A (zh) * 2012-03-30 2012-08-22 北京七星华创电子股份有限公司 一种在线原子层沉积装置和沉积方法
CN108517504A (zh) * 2018-06-29 2018-09-11 肇庆市科润真空设备有限公司 多膜层连续镀膜设备及方法
CN114540797A (zh) * 2022-03-25 2022-05-27 厦门韫茂科技有限公司 一种连续式ald镀膜设备的物料移动结构
CN114657538A (zh) * 2022-03-25 2022-06-24 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构
CN114657537A (zh) * 2022-03-25 2022-06-24 厦门韫茂科技有限公司 一种连续式ald镀膜设备
CN216947192U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种ald镀膜设备及其物料移动装置
CN216947195U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构
CN216947193U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备的物料移动结构
CN216947191U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6220973A (ja) * 1985-07-19 1987-01-29 Hitachi Ltd 真空バルブ
JPH0669140A (ja) * 1992-08-20 1994-03-11 Hitachi Ltd Ｃｖｄ装置
JPH11330199A (ja) * 1998-05-18 1999-11-30 Sony Corp 真空プロセス装置
CN101736317A (zh) * 2008-11-05 2010-06-16 财团法人工业技术研究院 原子层沉积设备
JP2010159463A (ja) * 2009-01-08 2010-07-22 Nippon Seisan Gijutsu Kenkyusho:Kk インライン式プラズマｃｖｄ法及びその装置
CN101463471B (zh) * 2009-01-12 2011-05-04 浙江嘉远格隆能源股份有限公司 一种连续化薄膜真空沉积方法及装置
CN102009823B (zh) * 2010-12-02 2012-05-23 江苏百胜机械制造有限公司 实现工件在同一平面多个工作平台上循环移动的机械装置
CN102560426B (zh) * 2012-02-16 2014-05-21 肇庆市腾胜真空技术工程有限公司 自动循环等离子气相沉积系统
CN103801693B (zh) * 2012-11-08 2016-01-06 沈阳中北通磁科技股份有限公司 稀土永磁合金柔性烧结工艺方法
JP6651792B2 (ja) * 2015-10-30 2020-02-19 株式会社Ihi 連続搭載設備
CN106011790A (zh) * 2016-06-07 2016-10-12 上海纳米技术及应用国家工程研究中心有限公司 一种ald腔体门盖
CN107858666A (zh) * 2017-12-13 2018-03-30 北京创昱科技有限公司 一种真空镀膜用集成腔室
CN207845777U (zh) * 2018-01-15 2018-09-11 米春初 一种硅太阳能电池背钝化双层膜工艺制程镀膜设备
CN109874309A (zh) * 2018-04-24 2019-06-11 君泰创新（北京）科技有限公司 双面镀膜设备及其载板处理单元
CN209943556U (zh) * 2018-12-18 2020-01-14 广东生波尔光电技术有限公司 插板阀
CN209511158U (zh) * 2018-12-27 2019-10-18 苏州方昇光电股份有限公司 真空腔体密封用门阀及应用该门阀的真空腔体
CN209260200U (zh) * 2018-12-28 2019-08-16 云南北方奥雷德光电科技股份有限公司 一种横流式原子层沉积腔室
CN109625738A (zh) * 2018-12-31 2019-04-16 广州富港万嘉智能科技有限公司 罐装物料自动出料装置
CN110195216A (zh) * 2019-07-15 2019-09-03 浙江祺跃科技有限公司 一种原子层沉积设备
CN110656318B (zh) * 2019-10-24 2020-07-10 华中科技大学 一种模块化密封式空间隔离原子层沉积薄膜设备
CN112359346A (zh) * 2020-12-03 2021-02-12 无锡市邑晶半导体科技有限公司 一种ald加热组件
CN112899657A (zh) * 2021-01-20 2021-06-04 无锡市邑晶半导体科技有限公司 一种ald加工设备以及加工方法
CN215709469U (zh) * 2021-08-05 2022-02-01 武汉尚田工业科技有限公司 一种分体式轮毂制备用轮辋输送装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5683561A (en) * 1991-04-04 1997-11-04 Conner Peripherals, Inc. Apparatus and method for high throughput sputtering
CN102644062A (zh) * 2012-03-30 2012-08-22 北京七星华创电子股份有限公司 一种在线原子层沉积装置和沉积方法
CN108517504A (zh) * 2018-06-29 2018-09-11 肇庆市科润真空设备有限公司 多膜层连续镀膜设备及方法
CN114540797A (zh) * 2022-03-25 2022-05-27 厦门韫茂科技有限公司 一种连续式ald镀膜设备的物料移动结构
CN114657538A (zh) * 2022-03-25 2022-06-24 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构
CN114657537A (zh) * 2022-03-25 2022-06-24 厦门韫茂科技有限公司 一种连续式ald镀膜设备
CN216947192U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种ald镀膜设备及其物料移动装置
CN216947195U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备的腔体结构
CN216947193U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备的物料移动结构
CN216947191U (zh) * 2022-03-25 2022-07-12 厦门韫茂科技有限公司 一种连续式ald镀膜设备

Also Published As

Publication number Publication date
CN114657538B (zh) 2024-02-02
WO2023178949A1 (zh) 2023-09-28
CN114657538A (zh) 2022-06-24

Similar Documents

Publication Publication Date Title
WO2023178948A1 (zh) 一种连续式ald镀膜设备
CN114540797B (zh) 一种连续式ald镀膜设备的物料移动结构
CN216947193U (zh) 一种连续式ald镀膜设备的物料移动结构
WO2023178950A1 (zh) 一种连续式ald镀膜设备的物料移动结构
CN216947191U (zh) 一种连续式ald镀膜设备
JP6359567B2 (ja) 空間分離原子層堆積のための装置およびプロセス閉じ込め
US20110265725A1 (en) Film deposition device and substrate processing device
FI118342B (fi) Laite ohutkalvojen valmistamiseksi
TWI785279B (zh) 前管道設備前端模組、側儲存倉、及其操作方法
CN104233226A (zh) 一种原子层沉积设备
CN102414824A (zh) Ald系统和方法
KR101301471B1 (ko) 챔버타입의 원자층 고속 증착장치
JP2007161579A (ja) カーボンナノチューブの合成装置及び方法
CN216947195U (zh) 一种连续式ald镀膜设备的腔体结构
WO2019023011A1 (en) SUBLIMATOR APPARATUS FOR SOLID COMPOSITIONS, SYSTEMS AND METHODS OF USING THE SAME
JP5159743B2 (ja) Ｃｖｄ装置
WO2023138224A1 (zh) 外延反应设备
TWI683027B (zh) 沉積奈米碳管之裝置
CN113943919B (zh) 一种碲化镉发电玻璃ar膜镀膜机及镀制方法
CN212335295U (zh) 高效原子沉积层镀膜设备自动上下料系统
CN109075109B (zh) 全区域逆流热交换基板支撑件
CN210620934U (zh) 一种原子层沉积设备
FI129501B (en) Gas distribution unit in connection with the ALD reactor
KR20220144686A (ko) 트윈챔버형 롤투롤 그래핀 필름 제조장치
CN219409894U (zh) 一种用于微通道反应器的原子层沉积设备

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 22933002

Country of ref document: EP

Kind code of ref document: A1