CN107858666A - 一种真空镀膜用集成腔室 - Google Patents

一种真空镀膜用集成腔室 Download PDF

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CN107858666A
CN107858666A CN201711329989.0A CN201711329989A CN107858666A CN 107858666 A CN107858666 A CN 107858666A CN 201711329989 A CN201711329989 A CN 201711329989A CN 107858666 A CN107858666 A CN 107858666A
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chamber
vacuum coating
integrated
hermatic door
dividing plate
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么曼实
闫风
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Zishi Energy Co ltd
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Beijing Chong Yu Technology Co Ltd
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Priority to CN201711329989.0A priority Critical patent/CN107858666A/zh
Publication of CN107858666A publication Critical patent/CN107858666A/zh
Priority to PCT/CN2018/092241 priority patent/WO2019114234A1/zh
Priority to DE102018215023.0A priority patent/DE102018215023A1/de
Priority to US16/122,177 priority patent/US20190177832A1/en
Priority to KR1020180105948A priority patent/KR20190070840A/ko
Priority to JP2018167322A priority patent/JP2019104985A/ja
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Abstract

本发明涉及真空镀膜设备领域，公开了一种真空镀膜用集成腔室，包括由腔室顶板、四个腔室侧板和腔室底板组成的一体腔室，所述一体腔室内设有隔板，所述隔板将所述一体腔室分割成预热室和工艺室，所述隔板上设有供工件穿过的开口，所述预热室内设有用以封堵所述开口的密封门，所述密封门与所述隔板密封适配，所述密封门与第一驱动件连接，以驱动所述密封门的开闭。通过将预热室和工艺室集成一体腔室，提高了制造工艺性，装配与维修便捷；密封门结构简单重量小，便于装卸与维护，降低采购成本；摆动隔热板结构简单，占用空间小，减小工艺室的尺寸空间，降低了工艺气体的用量，方便控制压力，两端通过旋转轴连接固定，装卸与维护方便，运行可靠。

Description

一种真空镀膜用集成腔室
技术领域
本发明涉及真空镀膜设备领域，特别是涉及一种真空镀膜用集成腔室。
背景技术
现有镀膜设备的预热室和工艺室一般都是独立制造的，通过整体的插板阀连接起来进行工件传输和真空密封，进行各自独立的工艺。这种结构的需要用带壳体的插板阀与两个腔体分别进行真空密封，然后用插板阀的阀芯进行两个腔室之间的隔断和真空密封，缺点是预热室、插板阀、工艺室进行装配时先要将插板阀(一般很重)与一个腔室装配并进行相关真空检测，合格后与另外一个腔室进行装配并进行真空检测。装配的工作量和难度都很大，进行后期维护插板阀与腔室之间的密封圈时更是需要将腔体移动才能进行，然后用吊车或其它吊具进行作业，非常繁重。一般情况下设备固定后尽量不要再进行移动，以便保证设备的结构参数的稳定。
现有的插板阀后面的隔热挡板采用的都是位于上下直线运动的结构，需要左右两个支撑杆安装腔室内部的隔热挡板，焊接波纹管密封，两个导向杆，可以使用气动、电动、手动均进行驱动，或者类似的结构。这些隔热挡板结构一般都安装于工艺室的底部，插板阀的后面。结构都是有尺寸的，整个组件需要占据100mm左右的长度方向空间，然后才能安装工艺室下部组件的底板，包括螺栓的空间和密封圈的空间也需要有80～90mm左右的长度方向空间，总体上就需要有大约180～190mm的空间为该组件所用。结构相对来说较为复杂，需要比较高的制造精度进行保证，两个波纹管的上下端均需要进行真空密封。
发明内容
(一)要解决的技术问题
本发明的目的是提供一种真空镀膜用集成腔室，以解决现有镀膜设备装配与维护困难，且隔热挡板结构复杂，占用空间大的问题。
(二)技术方案
为了解决上述技术问题，本发明提供一种真空镀膜用集成腔室，包括由腔室顶板、四个腔室侧板和腔室底板组成的一体腔室，所述一体腔室内设有隔板，所述隔板将所述一体腔室分割成预热室和工艺室，所述隔板上设有供工件穿过的开口，所述预热室内设有用以封堵所述开口的密封门，所述密封门与所述隔板密封适配，所述密封门与第一驱动件连接，以驱动所述密封门的开闭。
其中，所述工艺室内设有至少一个摆动隔热板，所述摆动隔热板的端侧设有转轴，所述转轴的一端与支座可旋转连接，所述支座安装在所述隔板或所述一体腔室的腔室壁上，所述转轴的另一端与第二驱动件连接，所述第二驱动件驱动所述摆动隔热板的开闭以配合所述密封门的动作。
其中，所述第一驱动件为升降气缸，所述升降气缸的驱动轴穿过所述腔室顶板与所述密封门连接，所述升降气缸的驱动轴与所述腔室顶板密封连接。
其中，所述第二驱动件为摆动气缸，所述摆动气缸通过密封轴承与所述摆动隔热板的转轴连接，驱动所述摆动隔热板的开闭，所述密封轴承与所述一体腔室的腔室壁密封连接。
其中，所述工艺室内设有至少一个固定隔热板，所述固定隔热板的两端分别与腔室侧板连接固定，所述固定隔热板上设有供所述工件穿过的传输开口。
其中，所述隔板的周侧与所述一体腔室的内壁焊接固定。
其中，所述腔室顶板设有分别与所述预热室和所述工艺室适配的上开口，所述预热室和所述工艺室的上开口分别覆盖有预热室上盖板和工艺室上盖板，所述腔室底板设有与所述工艺室适配的下开口，所述下开口的外侧覆盖有工艺室下盖板。
其中，所述腔室顶板为整体法兰，所述预热室上盖板和所述工艺室上盖板与所述腔室顶板之间均设有密封件，所述工艺室下盖板与所述腔室底板之间设有密封件。
其中，所述隔板与所述一体腔室的腔室壁均设有水冷通孔。
其中，所述密封门与所述隔板之间设有密封件。
其中，所述集成腔室采用耐高温不锈钢材质。
(三)有益效果
本发明提供的一种真空镀膜用集成腔室，通过将预热室和工艺室集成一体腔室，提高了制造工艺性，装配与维修便捷；密封门结构简单重量小，便于装卸与维护，降低采购成本；摆动隔热板结构简单，占用空间小，减小工艺室的尺寸空间，降低了工艺气体的用量，方便控制压力，两端通过旋转轴连接固定，装卸与维护方便，运行可靠。
附图说明
图1为本发明实施例的纵截面示意图；
图2为图1沿A-A向的剖视图。
图中，1：密封门；2：摆动隔热板；3：固定隔热板；4：工件；5：工艺室下盖板；6：工艺室上盖板；7：预热室上盖板；8：第一驱动件；9：密封轴承；10：第二驱动件；11：隔板；12：腔室顶板；13：腔室侧板；14：腔室底板；15：第一旋转轴；16：支座；O：摆动隔板打开状态；S：摆动隔板关闭状态。
具体实施方式
下面结合附图和实施例，对本发明的具体实施方式作进一步详细描述。以下实例用于说明本发明，但不用来限制本发明的范围。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。
如图1和图2所示，本发明实施例提供一种真空镀膜用集成腔室，包括由腔室顶板12、四个腔室侧板13和腔室底板14组成的一体腔室，一体腔室内设有隔板11，隔板11将一体腔室分割成预热室和工艺室，隔板11上设有供工件4穿过的开口，预热室内设有用以封堵所述开口的密封门1，密封门1与隔板11密封适配，密封门1与第一驱动件8连接，以驱动密封门1的开闭。
进一步的，一体腔室由腔室顶板12、四个腔室侧板13和腔室底板14焊接组成，一体腔室内侧各板件连接处采用连续焊接方式实现密封连接，一体腔室外侧各板件连接处采用点焊方式实现连接固定，保证整体的结构强度。
其中，一体腔室内通过隔板11隔断成预热室和工艺室，隔板11的周侧与一体腔室的内壁焊接固定，隔板11在工艺室侧与一体腔室的内壁采用连续焊接方式固定，保证工艺室的密封性，隔板11在预热室侧与一体腔室的内壁采用点焊方式固定，加强隔板11的固定强度，隔板11与一体腔室的腔室壁均设有的水冷通孔，用以对集成腔室散热降温。
进一步的，腔室顶板12具体为整体法兰，腔室顶板12设有与预热室适配的上开口，上开口覆盖有预热室上盖板7，腔室顶板12还设有于工艺室适配的上开口，上开口覆盖有工艺室上盖板6，工艺室下方的腔室底板14设有下开口，下开口的外侧覆盖有工艺室下盖板5，方便拆装与维护。
其中，预热室上盖板7和工艺室上盖板6与腔室顶板12之间均设有密封件，工艺室下盖板5与腔室底板14之间设有密封件，密封件优选为O型密封圈保证预热室和工艺室的密封性，提高集成腔室的安全性。
进一步的，隔板11上设有开口，开口的尺寸大于工件4的尺寸，用以使工件4平稳穿过，预热室内设有用以封堵开口的密封门1，密封门1与隔板11之间设有密封件，优选O型密封圈，以实现密封门1与隔板11的密封，防止预热室和工艺室通过开口进行气体交换，影响镀膜效果。
其中，腔室顶板12设有与第一驱动件8的驱动轴适配的安装孔，第一驱动件8优选升降气缸，升降气缸的驱动轴穿过安装孔并与密封门连接，驱动密封门1上升或下降，升降气缸的驱动轴通过法兰密封安装在腔室顶板12的上安装孔处，保证预热室的密封性。
进一步的，工艺室内设有至少一个摆动隔热板2，根据实际工艺室内温度的高低情况选取摆动隔热板2的个数，用以保护密封门1，防止密封门1与隔板11之间的O型密封圈圈受到来自工艺室的热辐射，从而延长O型密封圈的使用寿命，保证集预热室和工艺室的密封性。
其中，摆动隔热板2的端侧设有转轴，转轴的一端与支座16可旋转连接，支座16安装在隔板11上或一体腔室的腔室壁上，转轴的另一端与第二驱动件10连接；或者，另一种实施方式，摆动隔热板2的一端通过螺钉固定连接第一旋转轴15，第一旋转轴15通过支座16可旋转式安装在隔板11上，摆动隔热板2另一端通过螺钉固定连接第二旋转轴，第二转轴与第二驱动件10的驱动端连接，均实现第二驱动件10驱动摆动隔热板2的开闭以配合密封门1的动作，装卸和维护方便，且占用空间小。
进一步的，第二驱动件10优选摆动气缸，其驱动端设有密封轴承9，密封轴承9优选磁流体轴承，实现摆动气缸驱动摆动隔热板2开启或关闭，腔室侧板13设有与磁流体轴承适配的装配孔，便于拆装和维护，同时，实现摆动气缸与腔室侧板13的密封安装，并通过法兰实现摆动气缸的密封装配，第一旋转轴15与第二旋转轴位于同一水平线上，保证摆动隔热板2完全遮挡住开口。应当理解，在本发明的其他实施例中，摆动气缸的驱动端与腔室侧板13的密封形式不限于磁流体轴承密封；摆动隔热板的运动形式不只沿着工件4移动方向上下摆动，有些情况下，也可以垂直于工件4移动方向左右摆动，或者类似于密封门1的升降运动形式。
其中，根据实际需要，可在工艺室内安装有至少一个与隔板11平行的固定隔热板3，用以辅助摆动隔热板2，固定隔热板3的两端分别与腔室侧板13连接固定，可采用螺钉或焊接固定，固定隔热板3上设有与工件4尺寸适配的传输开口，固定隔热板3的高度取决于工艺和与其它零部件的相对位置需要。
进一步的，需要将工件4从预热室输送至工艺室时，升降气缸8驱动密封门1上升，露出隔板11上的开口，此时，摆动隔热板关闭状态S，摆动气缸10驱动摆动隔热板2旋转，并处于摆动隔板打开状态O，使工件平稳传输至工艺室，摆动气缸10驱动摆动隔板2恢复关闭状态，升降气缸8驱动密封门1下降，使密封门1与隔板11继续保持密封。
其中，密封门1、摆动隔热板2、固定隔热板3、工艺室下盖板5、工艺室上盖板6、预热室上盖板7、隔板11、腔室顶板12、腔室侧板13、第一旋转轴15、第二旋转轴和支座16均采用耐高温不锈钢材质。
本发明提供的一种真空镀膜用集成腔室，通过将预热室和工艺室集成一体腔室，提高了制造工艺性，装配与维修便捷；密封门结构简单重量小，便于装卸与维护，降低采购成本；摆动隔热板结构简单，占用空间小，减小工艺室的尺寸空间，降低了工艺气体的用量，方便控制压力，两端通过旋转轴连接固定，装卸与维护方便，运行可靠。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，例如密封门的开启方式可以设置为沿偏置的转轴旋转开启；密封门的驱动方式可以是电动或手动；摆动隔热板可以叠加设置多层，中间用垫片隔开。总之，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (11)

1.一种真空镀膜用集成腔室，其特征在于，包括由腔室顶板、四个腔室侧板和腔室底板组成的一体腔室，所述一体腔室内设有隔板，所述隔板将所述一体腔室分割成预热室和工艺室，所述隔板上设有供工件穿过的开口，所述预热室内设有用以封堵所述开口的密封门，所述密封门与所述隔板密封适配，所述密封门与第一驱动件连接，以驱动所述密封门的开闭。
2.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述工艺室内设有至少一个摆动隔热板，所述摆动隔热板的端侧设有转轴，所述转轴的一端与支座可旋转连接，所述支座安装在所述隔板或所述一体腔室的腔室壁上，所述转轴的另一端与第二驱动件连接，所述第二驱动件驱动所述摆动隔热板的开闭以配合所述密封门的动作。
3.如权利要求2所述的真空镀膜用集成腔室，其特征在于，所述第一驱动件为升降气缸，所述升降气缸的驱动轴穿过所述腔室顶板与所述密封门连接，所述升降气缸的驱动轴与所述腔室顶板密封连接。
4.如权利要求2所述的真空镀膜用集成腔室，其特征在于，所述第二驱动件为摆动气缸，所述摆动气缸通过密封轴承与所述摆动隔热板的转轴连接，驱动所述摆动隔热板的开闭，所述密封轴承与所述一体腔室的腔室壁密封连接。
5.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述工艺室内设有至少一个固定隔热板，所述固定隔热板的两端分别与腔室侧板连接固定，所述固定隔热板上设有供所述工件穿过的传输开口。
6.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述隔板的周侧与所述一体腔室的内壁焊接固定。
7.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述腔室顶板设有分别与所述预热室和所述工艺室适配的上开口，所述预热室和所述工艺室的上开口分别覆盖有预热室上盖板和工艺室上盖板，所述腔室底板设有与所述工艺室适配的下开口，所述下开口的外侧覆盖有工艺室下盖板。
8.如权利要求7所述的真空镀膜用集成腔室，其特征在于，所述腔室顶板为整体法兰，所述预热室上盖板和所述工艺室上盖板与所述腔室顶板之间均设有密封件，所述工艺室下盖板与所述腔室底板之间设有密封件。
9.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述隔板与所述一体腔室的腔室壁均设有水冷通孔。
10.如权利要求1所述的真空镀膜用集成腔室，其特征在于，所述密封门与所述隔板之间设有密封件。
11.如权利要求1-10任一项所述的真空镀膜用集成腔室，其特征在于，所述集成腔室采用耐高温不锈钢材质。
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