WO2022049980A1 - 焼成用セッター - Google Patents

焼成用セッター Download PDF

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Publication number
WO2022049980A1
WO2022049980A1 PCT/JP2021/029002 JP2021029002W WO2022049980A1 WO 2022049980 A1 WO2022049980 A1 WO 2022049980A1 JP 2021029002 W JP2021029002 W JP 2021029002W WO 2022049980 A1 WO2022049980 A1 WO 2022049980A1
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WO
WIPO (PCT)
Prior art keywords
coating
layer
coating layer
base material
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/029002
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
一輝 抜水
雅之 渡邊
浩明 二本松
好正 近藤
奈央 中山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
NGK Adrec Co Ltd
Original Assignee
NGK Insulators Ltd
NGK Adrec Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd, NGK Adrec Co Ltd filed Critical NGK Insulators Ltd
Priority to CN202180050286.2A priority Critical patent/CN115917235A/zh
Priority to KR1020237010446A priority patent/KR102864901B1/ko
Priority to JP2022546181A priority patent/JP7352747B2/ja
Publication of WO2022049980A1 publication Critical patent/WO2022049980A1/ja
Anticipated expiration legal-status Critical
Priority to JP2023109562A priority patent/JP7603751B2/ja
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/12—Travelling or movable supports or containers for the charge
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • C04B2235/9623—Ceramic setters properties

Definitions

  • Patent Document 1 discloses a setter for firing in which a coating layer is provided on the surface of a base material.
  • the coating layer is provided to suppress the reaction between the object to be fired and the base material.
  • two or more coating layers made of different materials are provided on the surface of the base material.
  • two or more spray coating layers or a sprayed layer is provided on the surface of the spray coating layer to form a coating layer.
  • a coating layer having a thickness of 50 to 1000 ⁇ m is provided on the surface of the base material.
  • the firing setter disclosed in the present specification comprises a ceramic substrate and a coating layer having a coating thickness of 1 ⁇ m or more and 20 ⁇ m or less and a surface roughness Ra of 1 ⁇ m or less, which covers the surface of the substrate. You may be prepared.
  • the present specification also discloses a method for manufacturing a firing setter having a ceramic base material and a coating layer that covers the surface of the substrate and has a coating thickness of 1 ⁇ m or more and 20 ⁇ m or less.
  • the manufacturing method may include a step of printing a coating film layer forming paste on the surface of the base material to produce a molded product having a coating film layer forming coating film on the surface of the base material.
  • the perspective view of the firing setter of 1st Example is shown.
  • the enlarged view of the surface of the firing setter of 1st Example is shown.
  • the enlarged view of the cross section of the firing setter of 1st Example is shown.
  • the enlarged view of the surface of the firing setter of 2nd Example is shown.
  • the enlarged view of the cross section of the firing setter of 2nd Example is shown.
  • the enlarged view of the surface of the firing setter of 3rd Example is shown.
  • a summary of experimental examples is shown.
  • the firing setter disclosed in the present specification includes a base material and a coating layer covering the surface of the base material.
  • the firing setter disclosed in the present specification is not particularly limited, but is suitably used in a manufacturing process (firing step) of an electronic component made of ceramics (ceramic capacitor or the like). Examples of the shape of the firing setter include polygons such as triangles, quadrangles, pentagons, and hexagons.
  • the base material is plate-shaped and ceramic. Examples of the material of the base material include SiC, alumina, and mullite. In particular, the SiC material has good thermal conductivity, and the in-plane temperature of the surface of the coating layer (the surface on which the object to be fired is placed) tends to be uniform.
  • SiC quality is a SiC-SiC quality.
  • the “Si—SiC quality” means a material containing SiC particles as a main component and metallic Si between the SiC particles.
  • the thickness of the base material may be, for example, 0.1 to 5 mm.
  • the base material in the firing setter is a portion covered by the coating layer, and when the cross section of the firing setter is observed, the portion (base material, coating layer) constituting the firing setter. It means the thickest part of it.
  • the coating layer is provided on the surface of the base material and covers the surface of the base material.
  • the coating layer may have a coating thickness (thickness of the surface of the base material) of 1 ⁇ m or more and 20 ⁇ m or less.
  • the coating layer may be a single layer or may have a multi-layer structure in which a plurality of layers are laminated.
  • the coating layer has a multi-layer structure, the material of each layer can be changed, and deterioration of the coating layer due to a difference in thermal expansion rate can be suppressed, for example.
  • the coating layer has a multi-layer structure, the total thickness of the plurality of layers may be 1 ⁇ m or more and 20 ⁇ m or less as described above.
  • the total thickness of the coating layer is 1 ⁇ m or more, it is possible to suppress the contact between the base material and the object to be fired, and it is possible to prevent the base material and the object to be fired from reacting with each other. Further, when the total thickness of the coating layer is 20 ⁇ m or less, the heat capacity of the coating layer is reduced, and it is possible to prevent the surface temperature of the coating layer (the temperature of the portion in contact with the object to be fired) from deviating from the substrate temperature. .. In other words, if the total thickness of the coating layer is 20 ⁇ m or less, a firing setter having good temperature followability can be realized.
  • the coating thickness is 1 ⁇ m or more and 20 ⁇ m or less
  • the thermal conductivity is lowered due to the oxide film layer having a lower thermal conductivity than the SiC. It is possible to suppress the effect well.
  • the thickness (total thickness) of the coating layer For the thickness (total thickness) of the coating layer, an SEM image of the cross section (cross section near the surface) of the firing setter is obtained using a scanning microscope (SEM), and the film thickness of the coating layer in the cross section SEM image is set at 5 points. It can be obtained by measuring and calculating the average of the measured values.
  • the total thickness of the coating layer may be 2 ⁇ m or more, 4 ⁇ m or more, 6 ⁇ m or more, 8 ⁇ m or more, 10 ⁇ m or more, or 12 ⁇ m. It may be the above.
  • the total thickness of the coating layer may be 18 ⁇ m or less, 16 ⁇ m or less, 14 ⁇ m or less, 12 ⁇ m or less, or 10 ⁇ m or less.
  • the surface roughness Ra of the coating layer may be 1 ⁇ m or less.
  • the surface roughness Ra is 1 ⁇ m or less, even if the thickness of the coating layer is thin, the coating unevenness on the surface of the substrate can be suppressed.
  • Such a thin film having a small surface roughness can be produced by using a printing technique such as screen printing. Specifically, for the coating layer, a raw material particle for forming the coating layer is mixed with an organic solvent to prepare a coating layer forming paste, and the coating layer forming paste is printed on the surface of the base material to form a molded product ( It can be produced by producing an intermediate molded product) and then firing the molded product.
  • the degree of freedom in the raw material size is increased. Therefore, in the printing method, it is possible to use a fine-grained raw material that is difficult to use by spraying, thermal spraying, or the like.
  • a coating layer By forming a coating layer using a fine-grained raw material, it is possible to form a coating layer having a small surface roughness with a thin film.
  • the surface roughness Ra of the coating layer may be 0.5 ⁇ m or less, or may be 0.2 ⁇ m or less.
  • the lower limit of the surface roughness Ra is not particularly limited, but may be 0.05 ⁇ m or more.
  • the surface roughness Ra of the coating layer can be measured by a stylus contact method.
  • the thickness variation (in the case of a multi-layer structure, the total thickness variation) of the coating layer may be 40% or less of the coating thickness and ⁇ 3 ⁇ m of the coating thickness.
  • the coating thickness of the coating layer is 1 ⁇ m
  • the condition of “40% or less of the coating thickness” is substantially applied, and the thickness of the coating layer may be 1 ⁇ 0.4 ⁇ m.
  • the coating thickness of the coating layer is 20 ⁇ m
  • the condition of “ ⁇ 3 ⁇ m of the coating thickness” is substantially applied, and the thickness of the coating layer may be 20 ⁇ 3 ⁇ m.
  • the thickness variation of the coating layer 10 coating layers are randomly selected, an SEM image of the cross section (cross section near the surface) is acquired, the maximum coating thickness and the minimum coating thickness are measured for each image, and in each image. It can be obtained by calculating the ratio of the maximum coating thickness and the minimum coating thickness to the coating thickness.
  • the coating layer may cover the entire surface of the base material without gaps, or may cover the surface of the base material with a part of the surface of the base material exposed.
  • the film layer may include a plurality of film pieces covering the surface of the substrate, and a gap may be provided between the film pieces.
  • the gap between the coating pieces may be 5 ⁇ m or more and 50 ⁇ m or less.
  • the gap between the coating pieces may be 10 ⁇ m or more, 15 ⁇ m or more, 20 ⁇ m or more, 25 ⁇ m or more, 30 ⁇ m or more, and 35 ⁇ m or more. , 40 ⁇ m or more.
  • the gap between the coating pieces may be 45 ⁇ m or less, 40 ⁇ m or less, 35 ⁇ m or less, 30 ⁇ m or less, 25 ⁇ m or less, and 20 ⁇ m or less. It may be 15 ⁇ m or less.
  • For the gaps between the coating pieces select a plurality of SEM observation samples (samples for observing a cross section near the surface) from a range of 250 ⁇ m ⁇ 200 ⁇ m and acquire an SEM image of the cross section (cross section near the surface). Then, it can be obtained by selecting and measuring 10 gaps from the obtained image and calculating the average of the measured values.
  • a coating film layer having a gap between the coating pieces on the surface of the base material By using the above-mentioned printing method, it is possible to form a coating film layer having a gap between the coating pieces on the surface of the base material. Further, by using the printing method, a film piece having an arbitrary shape can be formed on the surface of the base material, and a film piece having a geometric pattern can be formed.
  • the shape of the coating film piece is not particularly limited, but may be circular or polygonal (triangle, quadrangle, pentagon, hexagon, etc.).
  • a film piece can be formed at an arbitrary position on the surface of the substrate. However, from the viewpoint of uniformly heating the object to be fired, it is preferable that the film pieces regularly appear on the surface of the base material. For example, the film pieces may be formed at equal intervals on the surface of the substrate to make the gaps between the film pieces uniform.
  • the coating layer may have a multi-layer structure in which a plurality of layers are laminated.
  • a film piece (second film piece) may be further provided on the surface of the film piece (first film piece) provided on the surface of the base material.
  • the distance between the first coating pieces (the size of the gap) and the distance between the second coating pieces may be different.
  • the distance between the second coating pieces may be larger than the distance between the first coating pieces.
  • the contact area between the coating film layer (second coating film layer) and the object to be fired can be reduced while suppressing the movement of the base material component to the coating film layer (coating piece).
  • a coating film layer in which the distance between the first coating pieces and the distance between the second coating pieces are different can be easily produced by using the printing method.
  • the third, fourth, ..., Nth film pieces may be further provided on the surface of the second film piece.
  • the material of the coating layer can be appropriately selected depending on the type of the base material and the material to be fired.
  • the material of the coating layer (coating piece) is ZrO 2 / Y 2 O 3 (Y 2 O 3 stabilized ZrO 2 ), ZrO 2 / CaO (CaO stabilized ZrO 2 ), Y 2 O 3 , Al 2 . It may be O 3 , MgO, mulite, etc., or a mixture of these materials.
  • the first coating film layer (coating piece) is mullite
  • the second coating film layer (coating piece) is ZrO 2 / Y 2 O 3 , and so on.
  • the materials may be different.
  • the porosity of the coating layer may be 5% or more and 50% or less. When the porosity is 5% or more, it is possible to prevent the gas generated from the object to be fired during firing from passing through the coating layer and the gas from staying between the object to be fired and the coating layer. When the porosity is 50% or less, the strength of the coating layer is maintained and the durability of the firing setter is improved.
  • the porosity of the coating layer may be 10% or more, 15% or more, 20% or more, 25% or more, 30% or more, 35% or more. May be.
  • the porosity of the coating layer may be 45% or less, 40% or less, 35% or less, 30% or less, 25% or less, 20. It may be% or less, and may be 15% or less.
  • the porosity of the coating layer can be measured according to JIS R2205-1992.
  • the firing setter 10 will be described with reference to FIGS. 1 to 3.
  • the firing setter 10 has a flat plate shape and includes a SiC-based base material 2 and a coating layer 4 provided on the surface of the base material 2.
  • the coating layer 4 has a two-layer structure, and includes an intermediate layer 6 provided on the surface of the base material 2 and a surface layer 8 provided on the surface of the intermediate layer 6. Details of the intermediate layer 6 and the surface layer 8 will be described later.
  • the intermediate layer 6 covers the entire surface of the base material 2.
  • the material of the intermediate layer 6 is mullite.
  • the intermediate layer 6 is formed on the surface of the base material 2 by a printing method, and has a thickness T6 of about 1 ⁇ m.
  • a surface layer 8 is provided on the surface of the intermediate layer 6.
  • the material of the surface layer 8 is itria.
  • the surface layer 8 is composed of a plurality of film pieces 8a.
  • the film piece 8a is a quadrangle, and the gap G8 between the film pieces 8a is about 10 ⁇ m.
  • the surface layer 8 (coating piece 8a) is formed on the surface of the intermediate layer 6 by a printing method, and the thickness T8 is about 1 ⁇ m. Further, the surface roughness Ra of the surface of the coating layer 4 (the surface of the surface layer 8) is suppressed to 1 ⁇ m or less.
  • the firing setter 10 has the coating layer 4 (intermediate layer 6, surface layer 8) formed by a printing method, the coating layer 4 having a thin thickness and a small surface roughness Ra can be easily realized.
  • the thickness of the coating layer 4 By reducing the thickness of the coating layer 4, the heat capacity of the coating layer 4 is reduced, temperature variation in the plane of the firing setter 10 is suppressed during firing, and the temperature followability of the firing setter 10 is improved.
  • the surface layer 8 has a plurality of film pieces 8a and a gap is provided between the film pieces 8a, the force caused by the difference in thermal expansion rate between the base material 2 and the film layer 4 is exerted. The application to the coating film layer 4 is suppressed, and the damage to the coating film layer 4 is suppressed.
  • the coating layer 4 has a three-layer structure, and is provided on the intermediate layer 6 provided on the surface of the base material 2, the surface layer 8 provided on the surface of the intermediate layer, and the surface of the surface layer 8.
  • the outermost layer 9 is provided.
  • the material of the intermediate layer 6 is mullite, and the material of the surface layer 8 and the outermost layer 9 is itria.
  • the outermost layer 9 is composed of a plurality of coating pieces 9a.
  • the film piece 9a is a quadrangle, and one film piece 9a is provided on the surface of one film piece 8a.
  • the size of the film piece 9a is smaller than the size of the film piece 8a. Therefore, the gap G9 between the coating pieces 9a is larger than the gap G8 between the coating pieces 8a. Specifically, the gap G9 is about 20 ⁇ m.
  • the thickness of the outermost layer 9 (coating piece 9a) is about 1 ⁇ m.
  • the firing setter 10a can reduce the contact area between the object to be fired 20 and the coating layer 4 as compared with the firing setter 10.
  • the gas generated from the object to be fired during firing is suppressed from staying around the object to be fired 20, and the object to be fired has uneven firing. It can be suppressed from occurring.
  • the coating layer 4 has a two-layer structure.
  • the coating layer 4 includes an intermediate layer 6 that covers the entire surface of the base material (see FIG. 1), and a surface layer 8 provided on the surface of the intermediate layer 6.
  • the surface layer 8 is composed of a plurality of circular coating pieces 8a.
  • the gap (shortest distance) G8 between the coating pieces 8a is about 10 ⁇ m. That is, the firing setter 10b is different from the firing setter 10 in the shape of the film piece 8a constituting the surface layer 8.
  • the firing setter in which the shapes of the surface layer 8 and the outermost layer 9 are quadrangular (first and second embodiments) and circular (third embodiment) is exemplified, but the surface layer 8 (outermost layer 9) is illustrated.
  • the shape may be a polygon such as a triangle, a pentagon, or a hexagon.
  • the surface layer 8 (outermost layer 9) may cover the entire surface of the intermediate layer 6. That is, the surface layer 8 (outermost layer 9) does not have to be formed by the coating film pieces.
  • the outermost layer 9 may be further provided on the surface of the surface layer 8 as in the firing setter 10a of the second embodiment.
  • the shape of the film piece 8a of the surface layer 8 and the shape of the film piece 9a of the outermost layer 9 may be different. Further, three or more surface layers may be provided on the surface of the intermediate layer 6.
  • the intermediate layer 6 may be omitted.
  • the surface layer 8 (the outermost layer 9) may cover the entire surface of the base material 2 or may be formed by a plurality of film pieces.
  • Firing setters 10 (Samples 1 to 4) having different morphologies of the coating layer 4 were prepared, and the in-plane temperature variation during temperature rise and fall of the firing setter 10 was evaluated.
  • FIG. 7 shows the characteristics of each sample. First, a method for producing Samples 1 to 4 will be described.
  • mullite particles having a particle size (D50) of 0.5 ⁇ m and an organic solvent were mixed to prepare a mullite paste (paste for forming a film layer).
  • a mullite paste was printed on the entire surface of a 150 mm ⁇ 150 mm ⁇ 1 mm SiC substrate with a thickness of 1 ⁇ m and fired at 1300 ° C. for 2 hours to prepare a mullite layer (intermediate layer) on the surface of the SiC substrate. ..
  • itria particles having a particle size (D50) of 0.5 ⁇ m and an organic solvent were mixed to prepare an itria paste.
  • the itria paste was printed on the surface of the mullite layer to a thickness of 1 ⁇ m and fired at 1350 ° C. for 2 hours to prepare an itria layer (surface layer) on the surface of the mullite layer.
  • Sample 1 having a coating layer of 2 ⁇ m (mullite layer 1 ⁇ m, ytria layer 1 ⁇ m) on the surface of the SiC substrate was obtained.
  • the ytria layer was not printed on the entire surface of the mullite layer, but a plurality of quadrangular film pieces were printed so that the gap between the adjacent film pieces was 10 ⁇ m.
  • the surface roughness of the obtained sample was 0.5 ⁇ m.
  • Sample 2 was prepared using the same raw materials and manufacturing method as Sample 1 except that the thickness of the mullite layer was 5 ⁇ m and the thickness of the yttrium layer was 5 ⁇ m. The surface roughness of sample 2 was 0.2 ⁇ m.
  • mullite particles having a particle size (D50) of 70 ⁇ m were sprayed on the entire surface of the SiC substrate to prepare a mullite layer having a particle size of 50 ⁇ m on the surface of the SiC substrate.
  • yttrium particles having a particle size (D50) of 20 ⁇ m were sprayed on the entire surface of the mullite layer to prepare an yttrium layer (surface layer) having a particle size of 50 ⁇ m on the surface of the mullite layer.
  • the surface roughness of the obtained sample was 5 ⁇ m.
  • the powdere particles used for preparing the sample 1 were sprayed on the entire surface of the SiC substrate in the same manner as in the sample 3, and then used for preparing the sample 1 (sample 2).
  • Itria particles were prepared by spraying on the entire surface of the Murite layer.
  • particles mullite particles, yttrium particles
  • the particles used in Sample 1 and Sample 2 have a small particle size (D50) of 0.5 ⁇ m, and since the particles are too light, they are repelled from the coated surface (the surface of the SiC substrate), so that the SiC substrate is used. It is presumed that the particles could not be sufficiently attached to the surface of the.
  • sample 4 did not have a stable coating layer. Therefore, the heating / cooling tests were performed on the samples 1 to 3 to evaluate the in-plane temperature variation during the temperature rise / fall of the firing setter 10.
  • each sample is placed in a heating furnace, the temperature inside the furnace is raised from room temperature to 1200 ° C at 600 ° C / min, and both ends of the baking setter 10 when the temperature inside the furnace is 1200 ° C. The temperature difference was measured. Further, the temperature inside the furnace was lowered from 1200 ° C. to room temperature at 600 ° C./min, and the temperature difference between both ends of the firing setter 10 when the temperature inside the furnace reached room temperature was measured. The results are shown in FIG.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2021/029002 2020-09-07 2021-08-04 焼成用セッター Ceased WO2022049980A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN202180050286.2A CN115917235A (zh) 2020-09-07 2021-08-04 烧成用承烧板
KR1020237010446A KR102864901B1 (ko) 2020-09-07 2021-08-04 소성용 세터
JP2022546181A JP7352747B2 (ja) 2020-09-07 2021-08-04 焼成用セッター
JP2023109562A JP7603751B2 (ja) 2020-09-07 2023-07-03 焼成用セッター

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JP2020-150061 2020-09-07
JP2020150061 2020-09-07

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WO2022049980A1 true WO2022049980A1 (ja) 2022-03-10

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KR (1) KR102864901B1 (https=)
CN (1) CN115917235A (https=)
TW (1) TW202214546A (https=)
WO (1) WO2022049980A1 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7203296B1 (ja) * 2022-03-28 2023-01-12 日本碍子株式会社 焼成用セッター
WO2023188454A1 (ja) * 2022-03-28 2023-10-05 日本碍子株式会社 焼成用セッター
WO2025181276A1 (fr) 2024-02-29 2025-09-04 Saint-Gobain Centre De Recherches Et D'etudes Europeen Support poreux avec revêtement céramique de porosité contrôlée

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115917235A (zh) * 2020-09-07 2023-04-04 日本碍子株式会社 烧成用承烧板

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000109370A (ja) * 1998-10-02 2000-04-18 Kikusui Chemical Industries Co Ltd パターン付焼成治具の製造方法
JP2005255491A (ja) * 2004-03-12 2005-09-22 Kyocera Corp 焼成用部材およびそれを用いた焼結体の製造方法
JP2011046562A (ja) * 2009-08-27 2011-03-10 Nec Tokin Corp セラミックグリーンシート焼成用セッター
JP2018138498A (ja) * 2017-02-24 2018-09-06 住友電気工業株式会社 焼結用の敷板及び焼結用の敷板の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3812715B2 (ja) * 2000-11-01 2006-08-23 東芝セラミックス株式会社 焼成用容器の再生方法
JP2005008483A (ja) 2003-06-19 2005-01-13 Shin Etsu Chem Co Ltd 被覆部材及びその製造方法
JP4952953B2 (ja) * 2008-09-26 2012-06-13 信越化学工業株式会社 超硬材料又はサーメット材料焼結用セッターの製造方法
JP6876635B2 (ja) * 2018-01-10 2021-05-26 日本碍子株式会社 焼成用セッター
JP6811196B2 (ja) 2018-01-10 2021-01-13 日本碍子株式会社 焼成用セッター
CN115917235A (zh) 2020-09-07 2023-04-04 日本碍子株式会社 烧成用承烧板

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000109370A (ja) * 1998-10-02 2000-04-18 Kikusui Chemical Industries Co Ltd パターン付焼成治具の製造方法
JP2005255491A (ja) * 2004-03-12 2005-09-22 Kyocera Corp 焼成用部材およびそれを用いた焼結体の製造方法
JP2011046562A (ja) * 2009-08-27 2011-03-10 Nec Tokin Corp セラミックグリーンシート焼成用セッター
JP2018138498A (ja) * 2017-02-24 2018-09-06 住友電気工業株式会社 焼結用の敷板及び焼結用の敷板の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7203296B1 (ja) * 2022-03-28 2023-01-12 日本碍子株式会社 焼成用セッター
WO2023188454A1 (ja) * 2022-03-28 2023-10-05 日本碍子株式会社 焼成用セッター
CN118510739A (zh) * 2022-03-28 2024-08-16 日本碍子株式会社 烧成用承烧板
WO2025181276A1 (fr) 2024-02-29 2025-09-04 Saint-Gobain Centre De Recherches Et D'etudes Europeen Support poreux avec revêtement céramique de porosité contrôlée
FR3159808A1 (fr) 2024-02-29 2025-09-05 Saint-Gobain Centre De Recherches Et D'etudes Europeen support poreux avec revêtement céramique de porosité contrôlée

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