WO2022038682A1 - 光学装置および加工装置 - Google Patents

光学装置および加工装置 Download PDF

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Publication number
WO2022038682A1
WO2022038682A1 PCT/JP2020/031160 JP2020031160W WO2022038682A1 WO 2022038682 A1 WO2022038682 A1 WO 2022038682A1 JP 2020031160 W JP2020031160 W JP 2020031160W WO 2022038682 A1 WO2022038682 A1 WO 2022038682A1
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WO
WIPO (PCT)
Prior art keywords
optical
optical system
light
optical device
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2020/031160
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English (en)
French (fr)
Japanese (ja)
Inventor
博之 長坂
喜雄 川辺
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Nikon Corp
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Nikon Corp
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Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to CN202080103223.4A priority Critical patent/CN115916450A/zh
Priority to US18/021,576 priority patent/US20230341679A1/en
Priority to JP2022543847A priority patent/JPWO2022038682A1/ja
Priority to EP20950248.3A priority patent/EP4201577A4/en
Priority to PCT/JP2020/031160 priority patent/WO2022038682A1/ja
Publication of WO2022038682A1 publication Critical patent/WO2022038682A1/ja
Anticipated expiration legal-status Critical
Priority to JP2025034916A priority patent/JP2025081768A/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/02—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Definitions

  • the present invention relates to an optical device and a processing device.
  • Patent Document 1 In a processing device that irradiates a work piece such as a metal plate with light to process the work piece, the position of light incident on the work piece is closer to the light source than the focusing optical system that converges the laser light on the work piece. And a device including a beam positioning system for adjusting the incident angle has been proposed (Patent Document 1).
  • the optical device guides the light in the first region on the first surface to the second surface, and has the first optical system having the second surface as the pupil surface with respect to the first surface, and the above. It is arranged between the second surface and the third surface, and is provided on a second optical system having the second surface as a pupil surface with respect to the third surface and on a first optical path on the incident side of the first optical system.
  • a first reflective member having a first reflective surface provided so as to be swingable, and a second optical path between the first optical system and the second optical system, which is provided so as to be swingable.
  • a second reflective member having a second reflective surface is provided.
  • the light from the light source is incident and is intermediate between the first reflecting member having the first reflecting surface provided swingably and the light from the first reflecting member.
  • Objective optics in which light from the optical system, the intermediate optical system is incident, and the light from the second reflecting member having a second reflecting surface provided so as to be swingable and the light from the second reflecting member are focused on the work.
  • the work is provided with a system, and by swinging the first reflecting surface, the angle of light directed from the objective optical system toward the work with respect to the work is changed, and by swinging the second reflecting surface, the work.
  • the irradiation position of the light from the objective optical system to be irradiated to is changed.
  • the first reflecting member having the first reflecting surface provided so as to be swingable and the light from the first reflecting member are used.
  • the intermediate optical system includes an incident intermediate optical system and a second reflecting member having a second reflecting surface provided so that light from the intermediate optical system is incident and swingably provided.
  • the intermediate optical system is on the first surface.
  • the light in the first region of the above is guided to the second surface, the second surface is used as a pupil surface with respect to the first surface, and the objective optical system is arranged between the second surface and the third surface.
  • the second surface is the pupil surface with respect to the third surface.
  • the processing device includes the optical device according to the first or second aspect in which the light from the light source is incident on the processing device for processing the work with the light from the light source.
  • FIG. 6 is an enlarged view showing the vicinity of the second reflecting member in the optical device.
  • the term "pupil plane" refers to a plane that meets the following requirements A and B.
  • Requirement A The angle of emission of the light ray from the object surface is determined according to the position of the light ray passing through the surface. Alternatively, the angle of incidence of the light ray on the image plane is determined according to the position of the light ray passing through the surface.
  • Requirement B The position of the intersection of the light ray with the object surface is determined according to the angle of the light ray passing through the surface with respect to the optical axis. Alternatively, the position of the intersection of the light ray with the object surface is determined according to the angle of the light ray passing through the surface with respect to the optical axis.
  • optical conjugated means that one surface and the other surface are in an imaging relationship via an optical system.
  • imaging relationship refers to the resolution of an optical system in which light emitted from any one point in one region is centered on one point in another region via the optical system. It refers to the relationship of condensing light within a certain range.
  • the X, Y, and Z directions indicated by the arrows in the figures referred to below are orthogonal to each other, and the X, Y, and Z directions each indicate the same direction in each figure.
  • the directions indicated by the arrows are referred to as + X direction, + Y direction, and + Z direction, respectively.
  • the position in the X direction is referred to as the X position
  • the position in the Y direction is referred to as the Y position
  • the position in the Z direction is referred to as the Z position.
  • the XZ direction indicated by an arrow in some of the figures referred to below is an intermediate direction between the X direction and the Z direction described above, that is, orthogonal to the Y direction, and the X direction and the Z direction.
  • the directions are 45 ° away from each other.
  • the direction indicated by the arrow in the XZ direction is referred to as the + XZ direction.
  • FIG. 1 is a diagram schematically showing the configuration of the processing apparatus 1 of the first embodiment.
  • the processing apparatus 1 of the first embodiment includes the optical apparatus 2 of the first embodiment shown in FIG. 1 surrounded by a two-dot chain line.
  • the optical device 2 of the first embodiment is an optical device including a first optical system 11, a second optical system 12, a third optical system 13, a first reflective member 14, a second reflective member 16, and the like.
  • the processing device 1 of the first embodiment is a device that irradiates the surface (irradiated surface WS) of the work W, which is a work piece, with the light supplied from the light source 10 by the optical device 2.
  • the first optical system 11 can also be referred to as an intermediate optical system.
  • the second optical system 12 can also be referred to as an objective optical system.
  • the light supplied from the light source 10 such as a laser travels in the ⁇ Z direction along the optical path L0 as an example, and is introduced into a third optical system 13 including four lenses 13a to 13d and an orthopedic optical system 13e as an example. Will be done.
  • the light is converged by the third optical system 13, travels on the first incident optical path L1a substantially along the optical axis AX3 of the third optical system 13, and is focused on the first region A1 on the first surface P1a.
  • the third optical system 13 is a zoom optical system as an example, and by changing the position of the front group lens (lens 13a, 13b) and the rear group lens (lens 13c, 13d) in the Z direction (optical axis AX3 direction). , The focal length of the third optical system 11 as a whole changes.
  • the third lens barrel 18 that holds the lenses 13a to 13d of the third optical system 13 moves the front group lenses 13a and 13b and the rear group lenses 13c and 13d in the Z direction, respectively.
  • the focal length of the third optical system 13 changes while maintaining the state in which the first incident optical path L1a is focused on the first region A1 on the first surface P1a.
  • the diameter in the cross section of the optical path L0 of the light introduced into the third optical system 13 is constant regardless of the change in the focal length of the first optical system 13, it is accompanied by the change in the focal length of the third optical system 13.
  • the numerical aperture (NA) of the first incident optical path L1a focused on the first region A1 on the first surface P1a changes.
  • the diameter of the light focused on the first surface P1a that is, the diameter of the first region A1 changes.
  • the shaping optical system 13e included in the third optical system 13 will be described later.
  • a first reflecting member 14 having a first reflecting surface 15 is provided in the vicinity of the first region A1 on the first surface P1a of the first incident optical path L1a.
  • the first reflecting member 14 is arranged so that the first region A1 which is the condensing region of the optical path L1a and the first reflecting surface 15 substantially coincide with each other.
  • the orientation of the first reflecting surface 15 is set so as to be substantially parallel to the Y direction and the XZ direction, that is, the Y direction and the XZ direction both substantially coincide with the in-plane direction of the first reflecting surface 15.
  • the orientation of the first reflective surface 15 is held so as to be swingable with respect to the fixedly arranged first reflective member 14, that is, to be rotatable within a predetermined angle range.
  • the first reflecting surface 15 is centered on a rotation axis parallel to the Y direction and a rotation axis parallel to the XZ direction with respect to a reference angle position whose orientation is parallel to the Y direction and the XZ direction, respectively. It is held swingably within a range of about 10 °. Therefore, depending on the direction of the first reflecting surface 15, the incident light traveling in the ⁇ Z direction through the first incident optical path L1a is in a range of, for example, about 20 ° from the ⁇ X direction centered on the ⁇ X direction. It is reflected in the ⁇ Y direction and the ⁇ Z direction apart from each other.
  • the first reflective member 14 is, for example, a MEMS (Micro-Electro-Mechanical Systems) mirror member that can swing around two rotation axes as rotation centers.
  • the first reflective member 14 is a member that is fixedly installed.
  • a reflective element member that rotates in a predetermined angle range around two axes is provided on one surface of the first reflective element member 14, for example, by MEMS, and the surface of the reflective element member that faces the optical path is the surface of the first reflective element member 15.
  • the emitted light of the third optical system 13 is reflected according to the angle of the first reflecting surface 15 and is emitted to the first optical system 11.
  • the orientation of the reflective element member that is, the orientation of the first reflective surface 15, is set in a predetermined direction by applying a predetermined voltage from the outside or introducing a predetermined current.
  • a predetermined voltage or a predetermined current is applied to the first reflection member 14 as a control signal S2 from the control unit 30.
  • the directions of the two rotation axes that rotate the first reflecting surface 15 within a predetermined angle range are not limited to the above-mentioned directions parallel to the Y direction and the XZ direction, and are arbitrary as long as they intersect each other. It may be in the direction of.
  • the virtual image of the first surface P1a formed by being reflected by the first reflecting surface 15 is hereinafter referred to as a first virtual image surface P1b.
  • the first virtual image plane P1b is a plane optically equivalent to the first plane P1a.
  • the first reflecting surface 15 may be the surface of a metal plate having a high reflectance, and is formed by forming a metal film having a high reflectance or a dielectric multilayer film on the surface of a non-metal plate such as silicon. Is also good.
  • the light reflected by the first reflecting surface 15 passes through the first reflected optical path L1b and is incident on the first optical system 11.
  • the first incident optical path L1a and the first reflected optical path L1b are also collectively or individually referred to as the first optical path L1.
  • the first optical path L1 is an optical path on the incident side of the first optical system 11, that is, on the side closer to the light source 10 than the first optical system 11, and through which light from the light source 10 passes.
  • the first reflecting member 14 having the first reflecting surface 15 is arranged on the first optical path L1.
  • the first optical system 11 is an optical system including two lenses 11a and 11b as an example arranged along the optical axis AX1 of the first optical system 11.
  • the light emitted from the first optical system 11 is guided to the second surface P2a through the second incident optical path L2a.
  • the first surface P1a and the first virtual image surface P1b are object surfaces on which the first region A1 which is a condensing region is formed.
  • the first optical system 11 is an optical system in which the second surface P2a is a pupil surface with respect to the first surface P1a as an object surface and the first virtual image surface P1b.
  • a second reflecting member 16 having a second reflecting surface 17 is arranged in the vicinity of the second surface P2a.
  • the configuration of the second reflecting member 16 having the second reflecting surface 17 is the same as that of the first reflecting member 14 having the first reflecting surface 15 described above.
  • the virtual image of the second surface P2a formed by being reflected by the second reflecting surface 17 is hereinafter referred to as a second virtual image surface P2b.
  • the second virtual image plane P2b is an optically equivalent plane to the second plane P2a.
  • the orientation of the second reflecting surface 17 is set so as to be substantially parallel to the Y direction and the XZ direction, that is, the Y direction and the XZ direction are both substantially aligned with the in-plane direction of the second reflecting surface 17.
  • the orientation of the second reflecting surface 17 is held so as to be swingable with respect to the fixedly arranged second reflecting member 16, that is, to be rotatable within a predetermined angle range.
  • a predetermined voltage or a predetermined current that controls the orientation of the second reflecting surface 17 is applied to the second reflecting member 16 as a control signal S3 from the control unit 30.
  • the second reflecting surface 17 is centered on a rotation axis parallel to the Y direction and a rotation axis parallel to the XZ direction with respect to a reference angle position whose orientation is parallel to the Y direction and the XZ direction, respectively. It is held swingably within a range of about 10 °. Therefore, depending on the direction of the second reflecting surface 17, the incident light traveling in the ⁇ X direction through the second incident optical path L2a is in a range of, for example, about 20 ° from the ⁇ Z direction centered on the ⁇ Z direction. It is reflected in the ⁇ X direction and the ⁇ Y direction apart from each other.
  • the light reflected by the second reflecting surface 17 passes through the second reflected optical path L2b and is incident on the second optical system 12.
  • the second incident optical path L2a and the second reflected optical path L2b are also collectively or individually referred to as a second optical path L2.
  • the second optical path L2 is located between the first optical system 11 and the second optical system 12, and is an optical path through which the light from the light source 10 passes.
  • the second reflecting member 16 having the second reflecting surface 17 is arranged on the second optical path L2.
  • the second optical system 12 is an optical system including three lenses 12a to 12c as an example arranged along the optical axis AX2 of the second optical system 12.
  • the light emitted from the second optical system 11 is focused on the second region A2 on the third surface P3 through the third optical path L3.
  • the third surface P3 is optically conjugated with the first surface P1a as the above-mentioned object surface, and is an image plane with respect to the first surface P1a.
  • the first optical system 11 and the second optical system 12 form an image of the first region A1 on the first surface P1a in the second region A2 on the third surface P3.
  • the second optical system 12 is an optical system in which the second plane P2a and the second virtual image plane P2b are the pupil planes with respect to the third plane P3 as the image plane.
  • the first optical system 11 and the second optical system 12 are also held by the first lens barrel and the second lens barrel, respectively, in the same manner as the third optical system 13 described above is held by the third lens barrel 18.
  • the illustration of the first lens barrel and the second lens barrel is omitted.
  • the lens 12b is held in the second lens barrel so as to be movable in the optical axis AX2 direction via the focal position changing member 19.
  • the focal position changing member 19 By moving the lens 12b in the optical axis AX2 direction by the focal position changing member 19, the third surface P3 on which the second region A2 is formed is shifted in the direction along the optical axis AX2, and the first optical system 11 and the first optical system 11 and the first.
  • the focal position (position of the third surface P3) of the optical system including the two optical systems 12 can be adjusted.
  • the lens moved by the focal position changing member 19 is not limited to the lens 12b, and may be the lens 12a or the lens 12c. Further, the focal position changing member 19 may move a plurality of lenses included in the second optical system 12 or the entire second optical system 12. Alternatively, the focal position changing member 19 may move a part or all of the lenses or mirrors included in the first optical system 11.
  • the focal position changing member 19 is driven to drive the third surface P3.
  • the position of the three-sided P3 may be corrected.
  • the processing apparatus 1 has a sample table 20 that moves on the guide 21 in the X direction and the Y direction, and the sample table 20 is a surface of the work W, which is a work piece such as a metal plate, on the + Z side thereof. Place the irradiation surface WS so that it substantially coincides with the third surface P3.
  • the sample table 20 may be movable in the Z direction with respect to the guide 21. Further, the sample table 20 may be rotatable (tilt) within a predetermined angle range with the X direction and the Y direction as the rotation centers.
  • the position of the sample table 20 is measured by an optical encoder 23 as an example via the position of the scale plate 22 provided on the sample table 20, and is transmitted to the control unit 30 as a position signal S5.
  • the control unit 30 sends a control signal S4 to the sample table 20 based on the position signal S5 from the encoder 23 to control the sample table 20 to a predetermined position, and controls the light emission of the light source 10 by the control signal S1. Further, as described above, the control unit 30 sends the control signal S2 to the first reflection member 14, controls the direction of the first reflection surface 15, sends the control signal S2 to the second reflection member 16, and sends the control signal S2 to the second reflection surface. The orientation of 17 is controlled. Therefore, it can be said that the control unit 30 is included in the optical device 2.
  • FIG. 2A is a diagram showing a part of the optical device 2, and is a diagram schematically showing the functions of the first reflective member 14 and the second reflective member 16.
  • the first optical system 11, the second optical system 12, and the third optical system 13 are all simplified and represented by a single lens.
  • the traveling direction of the first reflected optical path L1b changes by twice the change in the angle of the first reflecting surface 15, and accordingly. Therefore, the incident angle of the third optical path L3 incident on the second region A2 on the third surface P3 changes.
  • the traveling direction of the first reflected light path L1b is ⁇ .
  • the direction deviates from the direction centered on the X direction in the + Z direction. Then, as shown in FIG. 2C, the main ray L3c of the third optical path L3 is incident on the third surface P3 from a direction inclined in the + X direction by an angle ⁇ from the normal line NL.
  • the traveling direction of the first reflected light path L1b is from the direction centered on the ⁇ X direction to the ⁇ Z direction. It will be in the wrong direction.
  • the main ray L3c of the third optical path L3 is incident on the third surface P3 from a direction inclined in the ⁇ X direction by an angle ⁇ from the normal line NL.
  • the traveling direction of the first reflected light path L1b is centered on the ⁇ X direction.
  • the direction deviates from the direction in the + Y direction (or ⁇ Y direction).
  • the main ray L3c of the third optical path L3 is incident on the third surface P3 from a direction inclined in the + Y direction ( ⁇ Y direction) with respect to the normal line NL.
  • the main ray L3c of the third optical path L3 is tilted by a predetermined angle from the normal NL with respect to the third surface P3. Can be incident.
  • the change in the direction (angle) of the first reflecting surface 15 is not limited to those having the + Y direction and the + XZ direction as the rotation axes, and may be any two directions as the rotation axes.
  • the control unit 30 changes the traveling direction of the third optical path L3 from the second optical system 12 toward the third surface P3 (the direction of incidence on the third surface P3) of the first reflecting surface 15. Control the orientation of.
  • the second reflecting surface 17 of the second reflecting member 16 is the pupil surface of the first optical system 11 with respect to the first surface P1a as an object surface, and the pupil surface of the second optical system 12 with respect to the third surface P3 as an object surface. It is also arranged in the vicinity of the second surface P2a and the second virtual image surface P2b. Specifically, it is provided on the second optical path L2 between the first optical system 11 and the second optical system 12.
  • the traveling direction of the second reflected optical path L2b changes by twice the change in the angle of the second reflecting surface 17.
  • the position of the second region A2 on the third surface P3, which is the image of the first region A1 changes. Even if the direction of the second reflecting surface 17 is changed, the change in the angle of incidence of the third optical path L3 on the third surface P3 is small.
  • the second region A2 is formed on the optical axis AX2 of the second optical system AX2.
  • the traveling direction of the second reflected light path L2b is ⁇ .
  • the direction deviates from the direction centered on the Z direction in the + X direction.
  • the second region A2 is formed at a position deviated from the optical axis AX2 of the second optical system AX2 by a predetermined distance XS in the + X direction.
  • the traveling direction of the second reflected light path L2b is from the direction centered on the ⁇ Z direction to the ⁇ X direction. It will be in the wrong direction.
  • the second region A2 is formed at a position deviated in the ⁇ X direction by a predetermined distance from the optical axis AX2 of the second optical system AX2.
  • the traveling direction of the second reflected light path L2b is a direction centered on the ⁇ Z direction.
  • the direction deviates from the ⁇ Y direction (or + Y direction).
  • the second region A2 is formed at a position deviated from the optical axis AX2 of the second optical system AX2 by a predetermined distance in the ⁇ Y direction (or + Y direction).
  • the second region A2 can be formed at an arbitrary position in the XY plane by changing the orientation of the second reflecting surface 17 by a predetermined angle.
  • the change in the direction (angle) of the second reflecting surface 17 is not limited to the one in which the + Y direction and the + XZ direction are the rotation axes, and may be the one in which any two directions are the rotation axes.
  • the direction (angle) of the first reflecting surface 17 is controlled by the control signal S3 from the control unit 30. Therefore, in other words, the control unit 30 directs the first reflecting surface 17 so as to change the position of the third optical path L3 reaching the third surface P3 from the second optical system 12, that is, the position of the second region R2. Control.
  • the orientation of the first reflecting surface 15 is set. Even if it is changed, the change in the position of the second region A2 on the third surface P3 can be suppressed to be small. Therefore, by changing the direction of the first reflecting surface 15, the incident angle of the third optical path L3 incident on the third surface P3 is changed without significantly changing the position of the second region A2 on the third surface P3. be able to.
  • the second reflecting surface 17 of the second reflecting member 16 is arranged near the pupil surface with respect to the first surface P1a and the third surface P3 as the object surface, the direction of the second reflecting surface 17 is changed.
  • the change in the incident angle of the third optical path L3 incident on the third surface P3 can be suppressed to a small value. Therefore, by changing the direction of the second reflecting surface 17, the position of the second region A2 on the third surface P3 is changed without significantly changing the incident angle of the third optical path L3 incident on the third surface P3. be able to.
  • FIG. 2 (c) A part of the work W is sublimated (or melted and vaporized) in the vicinity of the irradiated surface WS of the work W irradiated with the light from the light source 10 focused on the second region A2, and FIG. 2B is shown. And as shown in FIG. 2 (c), holes H0 and H1 are formed (processed).
  • the holes H0 and H1 become one-dimensional or 2
  • the holes H0 and H1 will be described as including the groove.
  • the edge itself is near the edge in the X direction or the Y direction in the hole H0.
  • a part of the third optical path L is shielded and the amount of light is reduced.
  • the energy of light is reduced, and the sublimation speed of the work W is slower in the vicinity of the edge of the hole H0 than in the vicinity of the center of the hole H0. Therefore, as shown in FIG. 2B as an example, the left edge E0L and the right edge E0R in the X direction have shapes that are not perpendicular to the irradiated surface WS.
  • the main ray L3c of the third optical path L3 is as shown in FIG. 2C.
  • the light is incident on the third surface P3 from a direction inclined by a predetermined angle, for example, in the + X direction from the normal line NL.
  • the left edge E1L of the hole H1 formed in the work W is irradiated with more light than in the case shown in FIG. 2B, so that the left edge E1L is applied to the irradiated surface WS.
  • the shape of the right edge E1R opposite to the left edge E1L is not perpendicular to the irradiated surface WS.
  • the left edge E1L of the hole H1 and the hole H1 are irradiated. Both the right edge E1R can be perpendicular to the irradiated surface WS.
  • the left edge E1L and the right edge E1R of the hole H1 are machined perpendicular to the irradiated surface WS.
  • a hole or groove having a can be formed on the work W.
  • the irradiation of the light to the work W for forming the hole or the groove may be one irradiation from a predetermined incident direction, or may be a plurality of irradiations from a plurality of different incident directions. It may be irradiation.
  • the control unit 30 sends a control signal S1 to the light source 10, a control signal S2 to the first reflection member 14, and a second reflection member to form a hole or groove having an arbitrary side shape at an arbitrary position of the work W.
  • the control signal S3 is sent to 16 and the control signal S4 is sent to the sample table 20 for control.
  • FIG. 3A is an enlarged view showing the vicinity of the first reflective member 14 in the optical device 2.
  • the lens 11a instead of the first optical system 11, only the lens 11a arranged closest to the first surface P1a among the optical members (lens, mirror, etc.) included in the first optical system 11 is used. Shows.
  • the surface of the lens 11a on the first surface P1a side is hereinafter referred to as a surface 11s.
  • the lens 11a is not limited to the lens and may be a mirror.
  • the lens 13d arranged closest to the first surface P1a among the optical members (lens, mirror, etc.) included in the third optical system 13 is shown.
  • the lens 13d is not limited to the lens and may be a mirror.
  • the first reflecting surface 15 is on the first optical path L1 reflected by the first reflecting surface 15, and is on the incident side of the first optical system 11, that is, a light source. It is arranged on the 10 (see FIG. 1) side. Further, the first reflecting surface 15 is arranged on the incident side of the first intermediate position IM1 which is an intermediate position along the optical axis AX1 of the first optical system 11 between the surface 11s and the first surface P1a.
  • the first reflecting surface 15 comes closer to the first surface P1a, which is an optically conjugate surface with the third surface P3. Therefore, the amount of movement of the second region A2 in the third surface P3, which occurs when the direction of the first reflecting surface 15 is changed, can be made smaller.
  • FIG. 3B is a view of the first reflecting surface 15 shown in FIG. 1 or FIG. 3A as viewed from the normal direction of the first reflecting surface 15.
  • FIG. 3B shows the first optical path L1 reflected by the first reflecting surface 15 in an overlapping manner.
  • the shape of the region occupied by the first optical path L1 has a semi-minor axis ⁇ in the Y direction and a semi-major axis in the XZ direction. It has an approximately elliptical shape with ⁇ .
  • the semi-major axis ⁇ is approximately ⁇ 2 times the semi-minor axis ⁇ .
  • the short radius ⁇ and the semi-major axis ⁇ are both assumed to be 1 / e 2 half width (Gaussian half width) as an example.
  • the light supplied from the light source 10 is a powerful light that evaporates the work W (see FIG. 1)
  • the first optical path L1 excessively converges on the first reflecting surface 15
  • the light causes the light.
  • the first reflective surface 15 may be damaged or deteriorated. Therefore, the short radius ⁇ and the long radius ⁇ may be kept at a predetermined value or more, and excessive convergence of the first optical path L1 may be avoided at the first reflecting surface 15.
  • the distance from the first surface P1a along the first optical path L1 to the first reflecting surface 15 is the distance.
  • d it is preferable that the condition of 2 ⁇ > d, that is, 2 ⁇ / d> 1 is satisfied.
  • the distance d is the distance D1a from the first surface P1a to the first reflection surface 15 on the optical axis AX3 of the third optical system 13 and the first optical system 11 shown in FIG. 3A. It corresponds to the distance D1b from the first virtual image plane P1b to the first reflection plane 15 on the optical axis AX1.
  • the first region R1 on the first surface P1a is closer to the light source 10 than the first reflection surface 15, but the first region R1 is the first reflection. It may be on the side of the first optical system 11 with respect to the surface 15.
  • the distance d1a (d) is not only the distance on the optical axis AX3 on the light source 10 side of the first reflecting surface 15, but also on the optical axis AX1 on the first optical system 11 side of the first reflecting surface 15. It may be the distance of.
  • the first reflecting surface 15 is made large. It becomes difficult to reduce the rotational movement speed of the first reflecting surface 15 and to set the orientation of the first reflecting surface with high accuracy. Therefore, in order to avoid excessive enlargement of the first reflecting surface 15, it is preferable that the distance d (D1a, D1b) and the short radius ⁇ satisfy the condition of 333> 2 ⁇ / d> 1.
  • the distance c may be 40 mm or more and 500 mm or less.
  • the distance c is a length based on the distance D3 along the first reflected optical path L1b from the surface 11s to the first reflecting surface 15 and the above-mentioned distance D1a, and the first region R1 is from the first reflecting surface 15.
  • c D3 + D1a
  • c D3-D1a.
  • the distance c is less than 40 mm, the above-mentioned first reflecting surface 15 may be damaged or deteriorated.
  • the optical path length is too long and may be affected by air fluctuations, which may cause the position of the second region R2 to fluctuate (become unstable) on the third surface P3. be.
  • FIG. 4 is an enlarged view showing the vicinity of the second reflective member 16 in the optical device 2.
  • the optical member (lens 11b) arranged closest to the second surface P2a among the optical members (lens, mirror, etc.) included in the first optical system 11 Is shown.
  • the surface of the lens 11b on the second surface P2a side is hereinafter referred to as a surface 11t.
  • the lens 11b is not limited to the lens, and may be a mirror.
  • the optical member (lens, mirror, etc.) included in the second optical system 12 instead of the second optical system 12, the optical member (lens 12a) arranged closest to the second surface P2a. ) Only.
  • the surface of the lens 12a on the second surface P2a side is hereinafter referred to as a surface 12s.
  • the lens 12a is not limited to the lens and may be a mirror.
  • the distance D2a is the distance from the second surface P2a on the optical axis AX1 of the first optical system 11 to the second reflecting surface 17, and the distance D2b is the second virtual image plane on the optical axis AX2 of the second optical system 12. It is the distance from P2b to the second reflecting surface 17.
  • the second reflecting surface 17 is on the second optical path L2 reflected by the second reflecting surface 17, and is between the first optical system 11 and the second optical system 12. It is provided. Further, the second reflecting surface 17 is arranged on the second surface P2a side of the second intermediate position IM2, which is an intermediate position between the surface 11t and the second surface P2a along the optical axis AX1 of the first optical system 11. Has been done. The second reflective surface 17 is arranged on the second surface P2a side of the third intermediate position IM3, which is an intermediate position between the surface 12s and the second surface P2a along the optical axis AX2 of the second optical system 12. Has been done.
  • the second reflecting surface 17 of the second reflecting member 16 is on the second surface P2a side of the second intermediate position IM2 along the second optical path L2, and , Is arranged on the second surface P2a side of the third intermediate position IM3.
  • the second reflecting surface 15 comes closer to the second surface P2a, which is the pupil surface of the third surface P3. Therefore, it is possible to further reduce the fluctuation of the incident angle of the third optical path L3 to the third surface P3, which occurs when the direction of the second reflecting surface 17 is changed.
  • the combined optical system of the first optical system 11 and the second optical system 12 may have a reduction magnification. That is, even if the first optical system 11 and the second optical system 12 reduce the first region R1 on the first surface P1a and form an image on the second region R2 on the third surface P3. good.
  • the combined optical system of the first optical system 11 and the second optical system 12 is a reduced system, it is convenient for increasing the short radius ⁇ and the long radius ⁇ of the first optical path L1 on the first reflecting surface 15, and the first It is possible to prevent damage or deterioration of the reflective surface 15.
  • ⁇ which is an absolute value of the magnification (horizontal magnification) of the combined optical system of the first optical system 11 and the second optical system 12, may be 0.1 times or more and 1 time or less.
  • the above-mentioned magnification value may be positive or negative. If the absolute value ⁇ of the magnification is less than 0.1 times, the size of the first reflecting surface 15 becomes large, and high accuracy is required for the angular position of the first reflecting surface 15, making it difficult to control the angular position. Etc. will occur.
  • the combined optical system of the third optical system 13 and the first optical system 11 may have a magnifying power. That is, the third optical system 13 and the first optical system 11 expand the diameter of the second optical path L2 in the second surface P2a with respect to the diameter of the optical path L0 of the light incident on the third optical system 13. There may be.
  • the short radius and the semi-major axis of the second optical path L2 in the second reflecting surface 17 can be increased, and damage or deterioration of the first reflecting surface 17 can be prevented.
  • the numerical aperture (NA) of the third optical path L3 that collects light on the third surface P3 via the second optical system 12 can be increased, and a fine hole or groove is formed on the work W (see FIG. 1). Can be (processed).
  • the absolute value of the magnification (horizontal magnification) of the combined optical system of the first optical system 11 and the third optical system 13 may be 1 times or more and 20 times or less.
  • the above magnification may be positive or negative.
  • the magnification of the combined optical system of the first optical system 11 and the third optical system 13 exceeds 20 times, the diameter of the second optical path L2 on the second surface P2a becomes excessively large, and the light becomes the second optical system. It cannot pass through 12, and there is a risk of light loss.
  • the third optical system 13 includes the shaping optical system 13e.
  • the shaping optical system 13e acts on the light passing through the optical path L0 to change the intensity distribution of the light focused on the first surface P1a.
  • the shaping optical system 13e includes a phase type diffraction grating, and the optical path L0 passing through the shaping optical system 13e is divided into a plurality of optical paths having slightly different traveling directions.
  • a plurality of first region R1s which are light collecting regions, are formed on the first surface P1a.
  • the plurality of condensing regions are not limited to those separated from each other, and a plurality of condensing regions may be partially superposed on each other.
  • the orthopedic optical system 13e may be a light-shielding mask provided in the vicinity of the first surface P1a.
  • the intensity distribution of the light focused on the first surface P1a can be made to follow the shape of the transmittance distribution of the transmissive portion of the light-shielding mask.
  • the orthopedic optical system 13e may be provided so as to be removable or replaceable with respect to the third optical system 13 by an exchange mechanism (not shown). Alternatively, the third optical system 13 does not have to have the shaping optical system 13e.
  • the third optical system 13 is assumed to be a zoom optical system in FIG. 1, the third optical system 13 does not necessarily have to be a zoom optical system, and is an optical system having a fixed focal length. Is also good.
  • the numerical aperture of the light (optical path L1) focused on the first surface P1a by the third optical system 13 is referred to as a “first numerical aperture”.
  • the absolute value of the image magnification (horizontal magnification) from the first surface P1a to the third surface by the first optical system 11 and the second optical system 12 is defined as ⁇ .
  • the numerical aperture of the first is, for example, 1 ⁇ 2 or less of the numerical aperture of the first optical system 11 on the first surface P1a side, and the numerical aperture of the second optical system 12 on the third surface P3 side. It is ⁇ / 2 or less.
  • the position of the optical path in the first optical system 11 and the second optical system 12 is efficiently determined according to the change of the direction (angle) of the first reflecting surface 15. You can move well. As a result, the angle of incidence of the third optical path L3 on the third surface P3 can be efficiently changed.
  • the numerical aperture of the first opening does not satisfy the above condition, when the direction (angle) of the first reflecting surface 15 is greatly changed, a part of the light reflected by the first reflecting surface 15 is the first optical. It becomes impossible to pass through the system 11 or the second optical system 12. As a result, the amount of light that reaches the third surface P3 is reduced.
  • the number of lenses constituting the first optical system 11, the second optical system 12, and the third optical system 13 is not limited to the number described above, and the number of lenses may be arbitrary. good.
  • at least one of the first optical system 11, the second optical system 12, and the third optical system 13 may include a reflective optical member such as a mirror or a prism.
  • the third optical system 13 does not have to be an optical system including a lens, a mirror, or the like, and may be, for example, a light guide member such as an optical fiber.
  • the above-mentioned first region R1 is formed in the vicinity of the injection end of the light guide member.
  • the optical device 2 does not have to include the third optical system 13.
  • the focal length of the second optical system 12 may be changeable.
  • the second optical system 12 may be the same zoom optical system as the third optical system 13 described above.
  • the second optical system 12 may be configured such that a part or all thereof can be exchanged and the focal length is changed by the exchange.
  • the control unit 30 may change the control of the orientations of the first reflecting surface 15 and the second reflecting surface 17 based on the information regarding the focal length of the second optical system 12.
  • the optical device 2 does not have to have the second optical system 12 as an example.
  • the optical device 2 that does not include the second optical system 12 and various second optical systems 12 having different focal lengths or numerical apertures may be manufactured and sold separately.
  • the user may use the optical device 2 not including the second optical system 12 in combination with the second optical system 12 having desired performance.
  • FIG. 5 is a diagram schematically showing the configuration of the optical device 2a of the second embodiment.
  • the region surrounded by the alternate long and short dash line in FIG. 5 represents the configuration of the optical device 2a. Since most of the configurations of the optical device 2a of the second embodiment are common to the optical device 2 of the first embodiment described above, the same reference numerals are given to the common configurations, and the description thereof will be omitted as appropriate.
  • the configurations of the first optical system 11, the second optical system 12, and the third optical system 13 are the same as those of the optical device 2 of the first embodiment or a modification thereof described above. be.
  • the optical device 2a of the second embodiment also has a configuration of the control unit 30 and the control signals S2 to S3, but in FIG. 5, the illustration of these configurations is omitted in order to avoid complication of the drawings. is doing.
  • two first reflective members 14a and 14b are provided along the first optical path L1 between the third optical system 13 and the first optical system 11.
  • two second reflective members 16a and 16b are provided along the second optical path L2 between the first optical system 11 and the second optical system 12.
  • the portion of the first optical path L1 between the two first reflective members 14a and 14b is referred to as the first intermediate optical path L1c
  • the portion of the second optical path L2 between the two second reflective members 16a and 16b Is called the second intermediate optical path L2c.
  • the first reflective member 14a and 14b both have the same configuration as the first reflective member 14 in the first embodiment described above, and the first reflective member 14a has a first reflective surface 15a and the first reflective member 14b. Has a first reflective surface 15b.
  • the orientation of the first reflecting surface 15a is held swingably with respect to the first reflecting member 14a.
  • the orientation of the first reflecting surface 15b is held swingably with respect to the first reflecting member 14b.
  • the orientation (angle) of the first reflecting surface 15a and the first reflecting surface 15b is controlled by a control signal (not shown) from the control unit 30 (see FIG. 1).
  • Both the first reflecting surfaces 15a and 15b may be reflecting surfaces that can swing within a predetermined angle range with the two rotation axes as rotation centers, as in the case of the first reflecting surface 15 in the first embodiment described above. ..
  • the first reflecting surface 15a is a reflecting surface capable of swinging in a predetermined angle range with the Y direction as one rotation center
  • the first reflecting surface 15b is a direction intersecting the Y direction such as the XZ direction. It may be a reflective surface that can swing within a predetermined angle range with the above as one rotation center.
  • the structure of the first reflecting members 14a and 14b can be simplified. Further, the rotation speed of the first reflecting surfaces 15a and 15b can be increased.
  • each of the two first reflective members 14a and 14b is placed along the first optical path L1 on the third optical system 13 side of the first surface P1a and on the first surface P1a. It may be arranged on the 11th side of the first optical system. That is, the two first reflective members 14a and 14b may be arranged in front of and behind the first surface P1a, respectively.
  • the distance D1c from the first surface P1a which is an optically conjugate surface to the third surface P3, to the first reflecting surface 15a of the first reflecting member 14a, and the first of the first reflecting member 14b. Both the distance D1d to the reflecting surface 15b can be kept short. Therefore, the amount of movement of the second region A2 in the third surface P3, which occurs when the directions of the first reflecting surfaces 15a and 15b are changed, can be made smaller.
  • both the first reflecting members 14a and 14b are placed on the third optical system 13 side of the first surface P1a.
  • it may be arranged on the side of the first optical system 11.
  • the movement of the second region A2 with respect to the work W due to the change in the orientation of the first reflecting surfaces 15a and 15b may be corrected by moving the sample table 20 and moving the work W.
  • the second reflective member 16a and 16b in the second embodiment have the same configuration as the second reflective member 16 in the first embodiment described above, and the second reflective member 16a has a second reflective surface 17a.
  • the second reflecting member 16b has a second reflecting surface 17b.
  • the orientation of the second reflecting surface 17a is held swingably with respect to the second reflecting member 16a.
  • the orientation of the second reflecting surface 17b is held swingably with respect to the second reflecting member 16b.
  • the orientation (angle) of the second reflecting surface 17a and the second reflecting surface 17b is controlled by a control signal (not shown) from the control unit 30 (see FIG. 1).
  • Both the second reflecting surfaces 17a and 17b may be reflecting surfaces that can swing within a predetermined angle range with the two rotation axes as the rotation centers, similarly to the second reflecting surface 17 in the second embodiment described above. ..
  • the second reflecting surface 17a is a reflecting surface capable of swinging in a predetermined angle range with the Y direction as one rotation center
  • the second reflecting surface 17b is a direction intersecting the Y direction such as the XZ direction. It may be a reflective surface that can swing within a predetermined angle range with the above as one rotation center.
  • the structure of the second reflecting members 16a and 16b can be simplified. Further, the rotation speed of the second reflecting surfaces 17a and 17b can be increased.
  • the two second reflective members 16a and 16b are respectively placed on the first optical system 11 side and the second surface P2a along the second optical path L2 with respect to the second surface P2a. It may be arranged on the 12th side of the second optical system. That is, the two second reflective members 16a and 16b may be arranged in front of and behind the second surface P2a, respectively.
  • both the second reflecting members 16a and 16b are combined with the second surface P2a. It may be arranged on the 11th side of the first optical system or the 12th side of the second optical system. In this case, the change in the angle of incidence of the work W of the third optical path L3 on the irradiated surface WS due to the change in the orientation of the second reflecting surfaces 17a and 17b may be corrected by tilting the sample table 20.
  • optical device 2a of the second embodiment described above the same modifications as those of various modifications of the optical device 2 of the first embodiment described above may be applied. Further, the processing device 1 of the first embodiment described above may be provided with the optical device 2a of the second embodiment described above in place of the optical device 2.
  • processing apparatus 1a of the third embodiment will be described with reference to FIG. Since most of the configurations of the processing apparatus 1a of the third embodiment are common to the processing apparatus 1 of the first embodiment described above, the same reference numerals are given to the common configurations, and the description thereof will be omitted as appropriate.
  • FIG. 6 is a diagram schematically showing the configuration of the processing apparatus 1a of the third embodiment.
  • the optical device 2 shown by the two-dot chain line in FIG. 6 is the same as the optical device 2 shown in FIG. However, in FIG. 6, the configuration is shown in a simplified manner.
  • the processing apparatus 1a of the third embodiment also has a configuration of the encoder 23, the control signals S1 to S4, and the position signal S5 (all of which see FIG. 1), but in FIG. 6, in order to avoid complication of the drawing. Illustration of these configurations is omitted.
  • the measurement light is incident on the optical device 2 in order to irradiate the work W with the measurement light, and the measurement light is incident on the work W from the work W. Further includes a measuring device 40 that receives the measured light of the above through the optical device 2. As shown in FIG. 6, as an example, a branch element 41 such as a dichroic prism is arranged between the light source 10 that supplies light for processing the work W and the third optical system 13 of the optical device 2.
  • the processed light which is the light emitted from the light source 10, passes through the optical path L0A and is incident on the branch element 41. Then, the processing light passes through the branch element 41, enters the optical device 2 through the optical path L0 in the same manner as the processing device 1 of the first embodiment described above, and irradiates the work W.
  • the measured light which is the light emitted from the measuring device 40, enters the branch element 41 through the optical path L0B.
  • the measurement light is light having a wavelength different from that of the processed light.
  • the measurement light is reflected by the branch element 41 and is incident on the optical device 2 through the optical path L0.
  • the optical device 2 irradiates the work W with the measurement light through an optical path substantially the same as the processing light.
  • the measurement light is reflected by the work W, passes through the optical device 2 in the order of the second optical system 12, the first optical system 11, the third optical system 13, and the like, and returns to the branch element 41.
  • it is reflected by the branch element 41 reaches the measuring device 40 via the optical path L0B, and receives light by the measuring device 40.
  • an interferometer may be used as the measuring device 40. Thereby, for example, the distance between the processing apparatus 1a and the work W based on the position of the second optical system may be measured. Further, as the measuring device 40, an interferometer having a two-dimensional resolution in the in-plane direction orthogonal to the optical path L0B of the measured light may be used. Thereby, the three-dimensional shape of the work W may be measured. Alternatively, as the measuring device 40, an image pickup device having a two-dimensional resolution may be used, or for example, an image pickup device having a Nipkou disk (Nipkou filter) and having a three-dimensional resolution may be used.
  • Nipkou disk Nipkou filter
  • the measuring device 40 transmits information about the measurement result regarding the work W to the control unit 30 as the measurement signal S6.
  • the control unit 30 sends the above-mentioned control signals S1 to S4 based on the measurement signal S6 from the measurement device 40, the position signal S5 from the encoder 23, and the like to the light source 10, the first reflection member 14, and the second reflection member 16, respectively. And send to the sample table 20. Thereby, the work W can be processed more appropriately based on the measurement result regarding the work W.
  • the processing device 1a of the third embodiment is not limited to the optical device 2 of the first embodiment, but may include the optical device 2a of the second embodiment or the optical device of a modification thereof described above. Further, the processing devices 1 and 1a of the above-described embodiments can be applied not only to the processing devices for the purpose of processing the work W but also to the light irradiation device that irradiates the object to be irradiated with light.
  • the optical devices 2 and 2a of the first embodiment, the second embodiment and the modified examples described above refer the light of the first region R1 on the first surface P1a to the second surface P2a.
  • the first optical system 11 having the second surface P2a as the pupil surface with respect to the first surface P1a is arranged between the second surface P2a and the third surface P3, and the second surface P2a is the third surface P3. It is provided with a second optical system 12 which serves as a pupil surface for the light.
  • a first reflective member 14 having a first reflective surface 15 provided on the first optical path L1 on the incident side (light source 10 side) of the first optical system 11 and provided swingably, and a first optical system. It is provided with a second reflective member 16 provided on the second optical path L2 between the 11 and the second optical system 12 and having a second reflective surface 17 provided swingably.
  • the orientation of the first reflecting surface 15 and the second reflecting surface 17 is mainly controlled for the position of the second region A2 for the second reflecting surface 17, and the second reflecting surface 15 is mainly used for controlling the position of the second region A2. It is possible to control the angle of incidence of the third optical path L3 on the region A2 in a substantially separate manner. Therefore, it becomes easy to control the orientation of the first reflecting surface 15 and the second reflecting surface 17, and the control speed is improved.
  • the first reflecting surface 15 is an optical member (lens 11a) and a first optical member (lens 11a) arranged along the first optical path L1 closest to the first surface P1a among the optical members included in the first optical system 11. It may be arranged on the incident side (light source 10 side) from the first intermediate position IM1 which is an intermediate position with the surface P1a. In this configuration, the deviation of the position of the second region A2 when the direction of the first reflecting surface 15 is changed can be suppressed to be smaller.
  • the second reflecting surface 17 is an optical member (lens 11b) and a second optical member (lens 11b) arranged along the second optical path L2 closest to the second surface P2a among the optical members included in the first optical system 11.
  • the change in the incident angle of the third optical path L3 incident on the second region R2 when the direction of the second reflecting surface 17 is changed can be suppressed to be smaller.
  • the optical devices 2 and 2a of the first embodiment, the second embodiment and the modified examples described above are provided so as to be swingable with the light from the light source 10 incident therein.
  • the light from the first reflecting member 14 having one reflecting surface 15, the intermediate optical system (first optical system 11) to which the light from the first reflecting member 14 is incident, and the intermediate optical system (first optical system 11) A second reflective member 16 having a second reflective surface 17 that is incidentally and swingably provided, and an objective optical system (second optical system 12) that collects light from the second reflective member 16 onto the work W. It is equipped with.
  • the angle of the light directed from the objective optical system (second optical system 12) toward the work W with respect to the work W is changed, and by swinging the second reflecting surface 17.
  • the irradiation position of the light from the objective optical system (second optical system 12) irradiated to the work W is changed.
  • the angle of the light toward the work W can be changed depending on the direction of the first reflecting surface 15, and the irradiation position of the light emitted to the work W can be changed depending on the direction of the second reflecting surface 17.
  • the optical devices 2 and 2a of the first embodiment, the second embodiment and the modified examples described above transmit the light from the light source 10 to the objective optical system (second optical system 12) from yet another viewpoint.
  • the first reflecting member 14 having the first reflecting surface 15 provided swingably, and the intermediate optical system (first optical system) on which the light from the first reflecting member 14 is incident.
  • a second reflecting member 16 having a second reflecting surface 17 that is swingably provided to which light from the intermediate optical system (first optical system 11) is incident.
  • the intermediate optical system guides the light of the first region R1 on the first surface P1a to the second surface P2a, and uses the second surface P2a as the pupil surface with respect to the first surface P1a as an objective.
  • the optical system (second optical system 12) is arranged between the second surface P2a and the third surface P3, and the second surface P2a is a pupil surface with respect to the third surface P3.
  • the orientation of the first reflecting surface 15 and the second reflecting surface 17 is mainly controlled for the position of the second region A2 for the second reflecting surface 17, and the second reflecting surface 15 is mainly used for controlling the position of the second region A2. It is possible to control the angle of incidence of the third optical path L3 on the region A2 in a substantially separate manner. Therefore, it becomes easy to control the orientation of the first reflecting surface 15 and the second reflecting surface 17, and the control speed is improved.
  • the light from the light source 10 is incident on the processing device for processing the work W with the light from the light source 10.
  • the optical devices 2 and 2a according to any one of (1) to (6) are provided. As a result, it becomes easy to control the orientation of the first reflecting surface 15 and the second reflecting surface 17, and it is possible to realize a processing apparatus in which the control speed of the first reflecting surface 15 and the second reflecting surface 17 is improved.
  • the present invention is not limited to the above contents. Other aspects considered within the scope of the technical idea of the present invention are also included within the scope of the present invention.
  • the present embodiment may be a combination of all or part of the above-described embodiments.
  • 1,1a Processing device
  • 2,2a Optical device
  • 10 Light source
  • 11 First optical system
  • 12 Second optical system
  • 13 Third optical system
  • P1a, P1b First surface
  • P2a, P2b 2nd surface
  • P3 3rd surface
  • 14 1st reflecting member
  • 15 1st reflecting surface
  • 16 2nd reflecting member
  • 17 2nd reflecting surface
  • 19 Focus position changing member
  • 20 Sample stand
  • 21 Guide
  • 30 Control unit
  • W Work
  • WS Irradiated surface

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  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
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JP2022543847A JPWO2022038682A1 (https=) 2020-08-18 2020-08-18
EP20950248.3A EP4201577A4 (en) 2020-08-18 2020-08-18 Optical device and processing device
PCT/JP2020/031160 WO2022038682A1 (ja) 2020-08-18 2020-08-18 光学装置および加工装置
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