JPWO2022038682A1 - - Google Patents

Info

Publication number
JPWO2022038682A1
JPWO2022038682A1 JP2022543847A JP2022543847A JPWO2022038682A1 JP WO2022038682 A1 JPWO2022038682 A1 JP WO2022038682A1 JP 2022543847 A JP2022543847 A JP 2022543847A JP 2022543847 A JP2022543847 A JP 2022543847A JP WO2022038682 A1 JPWO2022038682 A1 JP WO2022038682A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022543847A
Other languages
Japanese (ja)
Other versions
JPWO2022038682A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2022038682A1 publication Critical patent/JPWO2022038682A1/ja
Publication of JPWO2022038682A5 publication Critical patent/JPWO2022038682A5/ja
Priority to JP2025034916A priority Critical patent/JP2025081768A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/02—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
JP2022543847A 2020-08-18 2020-08-18 Pending JPWO2022038682A1 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025034916A JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/031160 WO2022038682A1 (ja) 2020-08-18 2020-08-18 光学装置および加工装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025034916A Division JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Publications (2)

Publication Number Publication Date
JPWO2022038682A1 true JPWO2022038682A1 (https=) 2022-02-24
JPWO2022038682A5 JPWO2022038682A5 (https=) 2023-05-17

Family

ID=80350463

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022543847A Pending JPWO2022038682A1 (https=) 2020-08-18 2020-08-18
JP2025034916A Pending JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025034916A Pending JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Country Status (5)

Country Link
US (1) US20230341679A1 (https=)
EP (1) EP4201577A4 (https=)
JP (2) JPWO2022038682A1 (https=)
CN (1) CN115916450A (https=)
WO (1) WO2022038682A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230204829A1 (en) * 2021-12-27 2023-06-29 Tdk Taiwan Corp. Optical element driving mechanism

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004261822A (ja) * 2003-02-28 2004-09-24 Fine Device:Kk レーザ加工装置
JP2011098394A (ja) * 2001-02-16 2011-05-19 Electro Scientific Industries Inc メモリリンク処理用の走査ビーム経路の誤差の補正
JP2015084963A (ja) * 2013-10-31 2015-05-07 株式会社ニデック レーザ手術装置
WO2015137179A1 (ja) * 2014-03-12 2015-09-17 三菱電機株式会社 カメラモニタ付レーザ加工ヘッド装置
WO2018047823A1 (ja) * 2016-09-09 2018-03-15 三菱電機株式会社 レーザ加工装置
JP2018140419A (ja) * 2017-02-28 2018-09-13 株式会社リコー 光加工装置及び光加工物の生産方法
JP2019018233A (ja) * 2017-07-19 2019-02-07 株式会社アマダホールディングス レーザ加工機

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120132629A1 (en) * 2010-11-30 2012-05-31 Electro Scientific Industries, Inc. Method and apparatus for reducing taper of laser scribes
US9400246B2 (en) * 2011-10-11 2016-07-26 Kla-Tencor Corporation Optical metrology tool equipped with modulated illumination sources
CN102680213B (zh) * 2012-06-18 2015-03-25 合肥知常光电科技有限公司 大口径光学元件光学特性的快速检测方法及装置
DE102012218920A1 (de) * 2012-10-17 2014-04-17 Carl Zeiss Microscopy Gmbh Vorrichtung zur Beleuchtung einer Probe
JP6008702B2 (ja) * 2012-11-09 2016-10-19 キヤノン株式会社 補償光学装置、補償光学装置の制御方法および眼科装置
CN103317233B (zh) * 2013-06-07 2015-02-18 张立国 一种用于激光加工的光束运动轨迹控制装置
DE102013222834A1 (de) * 2013-11-11 2015-05-13 Robert Bosch Gmbh Vorrichtung und Verfahren zur Führung eines Laserstrahls
WO2015108846A1 (en) * 2014-01-14 2015-07-23 Applied Scientific Instrumentation, Inc. Light sheet generator
DE102014108259A1 (de) * 2014-06-12 2015-12-17 Scanlab Ag Vorrichtung zur Lasermaterialbearbeitung
DE102014017002A1 (de) * 2014-11-12 2016-05-12 Carl Zeiss Ag Laser-Scanning-Mikroskop
DE102015109984A1 (de) 2015-06-22 2016-12-22 Scanlab Ag Scannerkopf mit integriertem Strahllagesensor sowie Justageanordnung zur Offline-Justage
DE102016214695B3 (de) * 2016-08-08 2017-10-19 Carl Zeiss Smt Gmbh Optisches System und Verfahren zur Korrektur von Maskenfehlern mit diesem System

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011098394A (ja) * 2001-02-16 2011-05-19 Electro Scientific Industries Inc メモリリンク処理用の走査ビーム経路の誤差の補正
JP2004261822A (ja) * 2003-02-28 2004-09-24 Fine Device:Kk レーザ加工装置
JP2015084963A (ja) * 2013-10-31 2015-05-07 株式会社ニデック レーザ手術装置
WO2015137179A1 (ja) * 2014-03-12 2015-09-17 三菱電機株式会社 カメラモニタ付レーザ加工ヘッド装置
WO2018047823A1 (ja) * 2016-09-09 2018-03-15 三菱電機株式会社 レーザ加工装置
JP2018140419A (ja) * 2017-02-28 2018-09-13 株式会社リコー 光加工装置及び光加工物の生産方法
JP2019018233A (ja) * 2017-07-19 2019-02-07 株式会社アマダホールディングス レーザ加工機

Also Published As

Publication number Publication date
WO2022038682A1 (ja) 2022-02-24
EP4201577A1 (en) 2023-06-28
JP2025081768A (ja) 2025-05-27
US20230341679A1 (en) 2023-10-26
CN115916450A (zh) 2023-04-04
EP4201577A4 (en) 2024-05-29

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