JPWO2022038682A5 - - Google Patents

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Publication number
JPWO2022038682A5
JPWO2022038682A5 JP2022543847A JP2022543847A JPWO2022038682A5 JP WO2022038682 A5 JPWO2022038682 A5 JP WO2022038682A5 JP 2022543847 A JP2022543847 A JP 2022543847A JP 2022543847 A JP2022543847 A JP 2022543847A JP WO2022038682 A5 JPWO2022038682 A5 JP WO2022038682A5
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JP
Japan
Prior art keywords
optical
optical system
light
optical device
reflecting
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Pending
Application number
JP2022543847A
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English (en)
Japanese (ja)
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JPWO2022038682A1 (https=
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Priority claimed from PCT/JP2020/031160 external-priority patent/WO2022038682A1/ja
Publication of JPWO2022038682A1 publication Critical patent/JPWO2022038682A1/ja
Publication of JPWO2022038682A5 publication Critical patent/JPWO2022038682A5/ja
Priority to JP2025034916A priority Critical patent/JP2025081768A/ja
Pending legal-status Critical Current

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JP2022543847A 2020-08-18 2020-08-18 Pending JPWO2022038682A1 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2025034916A JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/031160 WO2022038682A1 (ja) 2020-08-18 2020-08-18 光学装置および加工装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025034916A Division JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Publications (2)

Publication Number Publication Date
JPWO2022038682A1 JPWO2022038682A1 (https=) 2022-02-24
JPWO2022038682A5 true JPWO2022038682A5 (https=) 2023-05-17

Family

ID=80350463

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022543847A Pending JPWO2022038682A1 (https=) 2020-08-18 2020-08-18
JP2025034916A Pending JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025034916A Pending JP2025081768A (ja) 2020-08-18 2025-03-05 光学装置および加工装置

Country Status (5)

Country Link
US (1) US20230341679A1 (https=)
EP (1) EP4201577A4 (https=)
JP (2) JPWO2022038682A1 (https=)
CN (1) CN115916450A (https=)
WO (1) WO2022038682A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230204829A1 (en) * 2021-12-27 2023-06-29 Tdk Taiwan Corp. Optical element driving mechanism

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002067180A1 (en) * 2001-02-16 2002-08-29 Electro Scientific Industries, Inc. On-the-fly beam path error correction for memory link processing
JP2004261822A (ja) * 2003-02-28 2004-09-24 Fine Device:Kk レーザ加工装置
US20120132629A1 (en) * 2010-11-30 2012-05-31 Electro Scientific Industries, Inc. Method and apparatus for reducing taper of laser scribes
US9400246B2 (en) * 2011-10-11 2016-07-26 Kla-Tencor Corporation Optical metrology tool equipped with modulated illumination sources
CN102680213B (zh) * 2012-06-18 2015-03-25 合肥知常光电科技有限公司 大口径光学元件光学特性的快速检测方法及装置
DE102012218920A1 (de) * 2012-10-17 2014-04-17 Carl Zeiss Microscopy Gmbh Vorrichtung zur Beleuchtung einer Probe
JP6008702B2 (ja) * 2012-11-09 2016-10-19 キヤノン株式会社 補償光学装置、補償光学装置の制御方法および眼科装置
CN103317233B (zh) * 2013-06-07 2015-02-18 张立国 一种用于激光加工的光束运动轨迹控制装置
JP6283992B2 (ja) * 2013-10-31 2018-02-28 株式会社ニデック レーザ手術装置
DE102013222834A1 (de) * 2013-11-11 2015-05-13 Robert Bosch Gmbh Vorrichtung und Verfahren zur Führung eines Laserstrahls
WO2015108846A1 (en) * 2014-01-14 2015-07-23 Applied Scientific Instrumentation, Inc. Light sheet generator
US10166631B2 (en) * 2014-03-12 2019-01-01 Mitsubishi Electronic Corporation Laser processing head apparatus with camera monitor
DE102014108259A1 (de) * 2014-06-12 2015-12-17 Scanlab Ag Vorrichtung zur Lasermaterialbearbeitung
DE102014017002A1 (de) * 2014-11-12 2016-05-12 Carl Zeiss Ag Laser-Scanning-Mikroskop
DE102015109984A1 (de) 2015-06-22 2016-12-22 Scanlab Ag Scannerkopf mit integriertem Strahllagesensor sowie Justageanordnung zur Offline-Justage
DE102016214695B3 (de) * 2016-08-08 2017-10-19 Carl Zeiss Smt Gmbh Optisches System und Verfahren zur Korrektur von Maskenfehlern mit diesem System
CN109689278B (zh) * 2016-09-09 2021-01-12 三菱电机株式会社 激光加工装置及激光加工方法
JP2018140419A (ja) * 2017-02-28 2018-09-13 株式会社リコー 光加工装置及び光加工物の生産方法
JP6861117B2 (ja) * 2017-07-19 2021-04-21 株式会社アマダ レーザ加工機

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