CN115916450A - 光学装置及加工装置 - Google Patents

光学装置及加工装置 Download PDF

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Publication number
CN115916450A
CN115916450A CN202080103223.4A CN202080103223A CN115916450A CN 115916450 A CN115916450 A CN 115916450A CN 202080103223 A CN202080103223 A CN 202080103223A CN 115916450 A CN115916450 A CN 115916450A
Authority
CN
China
Prior art keywords
optical system
optical
light
reflecting
reflecting surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080103223.4A
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English (en)
Chinese (zh)
Inventor
长坂博之
川辺喜雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN115916450A publication Critical patent/CN115916450A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012—Optical design, e.g. procedures, algorithms, optimisation routines
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B15/00—Optical objectives with means for varying the magnification
    • G02B15/02—Optical objectives with means for varying the magnification by changing, adding, or subtracting a part of the objective, e.g. convertible objective
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Lenses (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Processing (AREA)
CN202080103223.4A 2020-08-18 2020-08-18 光学装置及加工装置 Pending CN115916450A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2020/031160 WO2022038682A1 (ja) 2020-08-18 2020-08-18 光学装置および加工装置

Publications (1)

Publication Number Publication Date
CN115916450A true CN115916450A (zh) 2023-04-04

Family

ID=80350463

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080103223.4A Pending CN115916450A (zh) 2020-08-18 2020-08-18 光学装置及加工装置

Country Status (5)

Country Link
US (1) US20230341679A1 (https=)
EP (1) EP4201577A4 (https=)
JP (2) JPWO2022038682A1 (https=)
CN (1) CN115916450A (https=)
WO (1) WO2022038682A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230204829A1 (en) * 2021-12-27 2023-06-29 Tdk Taiwan Corp. Optical element driving mechanism

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004261822A (ja) * 2003-02-28 2004-09-24 Fine Device:Kk レーザ加工装置
CN102680213A (zh) * 2012-06-18 2012-09-19 合肥知常光电科技有限公司 大口径光学元件光学特性的快速检测方法及装置
CN103930749A (zh) * 2011-10-11 2014-07-16 科磊股份有限公司 配备有经调制照射源的光学计量工具
CN106102981A (zh) * 2014-03-12 2016-11-09 三菱电机株式会社 带照相机监视器的激光加工头装置
JP2019018233A (ja) * 2017-07-19 2019-02-07 株式会社アマダホールディングス レーザ加工機

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002067180A1 (en) * 2001-02-16 2002-08-29 Electro Scientific Industries, Inc. On-the-fly beam path error correction for memory link processing
US20120132629A1 (en) * 2010-11-30 2012-05-31 Electro Scientific Industries, Inc. Method and apparatus for reducing taper of laser scribes
DE102012218920A1 (de) * 2012-10-17 2014-04-17 Carl Zeiss Microscopy Gmbh Vorrichtung zur Beleuchtung einer Probe
JP6008702B2 (ja) * 2012-11-09 2016-10-19 キヤノン株式会社 補償光学装置、補償光学装置の制御方法および眼科装置
CN103317233B (zh) * 2013-06-07 2015-02-18 张立国 一种用于激光加工的光束运动轨迹控制装置
JP6283992B2 (ja) * 2013-10-31 2018-02-28 株式会社ニデック レーザ手術装置
DE102013222834A1 (de) * 2013-11-11 2015-05-13 Robert Bosch Gmbh Vorrichtung und Verfahren zur Führung eines Laserstrahls
WO2015108846A1 (en) * 2014-01-14 2015-07-23 Applied Scientific Instrumentation, Inc. Light sheet generator
DE102014108259A1 (de) * 2014-06-12 2015-12-17 Scanlab Ag Vorrichtung zur Lasermaterialbearbeitung
DE102014017002A1 (de) * 2014-11-12 2016-05-12 Carl Zeiss Ag Laser-Scanning-Mikroskop
DE102015109984A1 (de) 2015-06-22 2016-12-22 Scanlab Ag Scannerkopf mit integriertem Strahllagesensor sowie Justageanordnung zur Offline-Justage
DE102016214695B3 (de) * 2016-08-08 2017-10-19 Carl Zeiss Smt Gmbh Optisches System und Verfahren zur Korrektur von Maskenfehlern mit diesem System
CN109689278B (zh) * 2016-09-09 2021-01-12 三菱电机株式会社 激光加工装置及激光加工方法
JP2018140419A (ja) * 2017-02-28 2018-09-13 株式会社リコー 光加工装置及び光加工物の生産方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004261822A (ja) * 2003-02-28 2004-09-24 Fine Device:Kk レーザ加工装置
CN103930749A (zh) * 2011-10-11 2014-07-16 科磊股份有限公司 配备有经调制照射源的光学计量工具
CN102680213A (zh) * 2012-06-18 2012-09-19 合肥知常光电科技有限公司 大口径光学元件光学特性的快速检测方法及装置
CN106102981A (zh) * 2014-03-12 2016-11-09 三菱电机株式会社 带照相机监视器的激光加工头装置
JP2019018233A (ja) * 2017-07-19 2019-02-07 株式会社アマダホールディングス レーザ加工機

Also Published As

Publication number Publication date
WO2022038682A1 (ja) 2022-02-24
EP4201577A1 (en) 2023-06-28
JP2025081768A (ja) 2025-05-27
JPWO2022038682A1 (https=) 2022-02-24
US20230341679A1 (en) 2023-10-26
EP4201577A4 (en) 2024-05-29

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Effective date of abandoning: 20260320