WO2022011071A1 - Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same - Google Patents

Textured region of a substrate to reduce specular reflectance incorporating surface features with an elliptical perimeter or segments thereof, and method of making the same Download PDF

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Publication number
WO2022011071A1
WO2022011071A1 PCT/US2021/040773 US2021040773W WO2022011071A1 WO 2022011071 A1 WO2022011071 A1 WO 2022011071A1 US 2021040773 W US2021040773 W US 2021040773W WO 2022011071 A1 WO2022011071 A1 WO 2022011071A1
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WIPO (PCT)
Prior art keywords
surface features
substrate
ellipses
textured region
area
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Ceased
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PCT/US2021/040773
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French (fr)
Inventor
Jiangwei Feng
Corinne Elizabeth ISAAC
Karl William Koch Iii
Shenping Li
Wageesha Senaratne
William Allen Wood
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Corning Inc
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Corning Inc
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Publication of WO2022011071A1 publication Critical patent/WO2022011071A1/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/225Nitrides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3411Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials
    • C03C17/3429Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating
    • C03C17/3435Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of inorganic materials at least one of the coatings being a non-oxide coating comprising a nitride, oxynitride, boronitride or carbonitride
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • C23C14/042Coating on selected surface areas, e.g. using masks using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04Coating on selected surface areas, e.g. using masks
    • C23C16/042Coating on selected surface areas, e.g. using masks using masks
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/118Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4272Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having plural diffractive elements positioned sequentially along the optical path
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/02Diffusing elements; Afocal elements
    • G02B5/0205Diffusing elements; Afocal elements characterised by the diffusing properties
    • G02B5/021Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/02Diffusing elements; Afocal elements
    • G02B5/0205Diffusing elements; Afocal elements characterised by the diffusing properties
    • G02B5/021Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures
    • G02B5/0221Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures the surface having an irregular structure
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/02Diffusing elements; Afocal elements
    • G02B5/0268Diffusing elements; Afocal elements characterized by the fabrication or manufacturing method
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2204/00Glasses, glazes or enamels with special properties
    • C03C2204/08Glass having a rough surface
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/70Properties of coatings
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/152Deposition methods from the vapour phase by cvd
    • C03C2218/153Deposition methods from the vapour phase by cvd by plasma-enhanced cvd
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/10Deposition methods
    • C03C2218/15Deposition methods from the vapour phase
    • C03C2218/154Deposition methods from the vapour phase by sputtering
    • C03C2218/155Deposition methods from the vapour phase by sputtering by reactive sputtering
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00Methods for coating glass
    • C03C2218/30Aspects of methods for coating glass not covered above
    • C03C2218/34Masking
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
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    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101Nanooptics

Definitions

  • the surface features having such an elliptical or partially elliptical shape when randomly distributed and oriented, provide low specular reflection with minimal transmission haze and pixel power deviation and with minimal or unperceivable reflected color artifacts.
  • the surface features are randomly distributed and oriented, the surface features are specifically placed by design.
  • the textured region can be reproduced from substrate to substrate.
  • the method of the thirty ⁇ second aspect wherein the points randomly distributed within the area are separated by a minimum distance.
  • the method of any one of the thirtieth through thirty ⁇ third aspects further comprises: forming secondary surface features into one or more sections of the textured region, thereby increasing the surface roughness (R a ) of at the one or more sections to within a range of 5 nm to 100 nm.
  • FIG. 20A pertaining to Example 16, are white light interferometer graphs illustrating the topography of the elliptical surface features and the surrounding portion (top) and the secondary surface features (bottom) disposed at the elliptical surface features (left) and the surrounding portion (right); and [0081] FIG. 20B, pertaining to Example 16, are atomic force microscopy images of the secondary surface features disposed at an elliptical surface feature (left) and the surrounding portion (right), illustrating that the secondary surface features at the surrounding portion imparted a higher surface roughness (R a ) than the at the elliptical surface feature (because the surrounding portion was not previously etched and thus more sensitive to the etching that imparted the secondary surface features).
  • R a surface roughness
  • the lower mean elevation 44 provided by the one or more lower surfaces 41 differs from the higher mean elevation 42 provided by the one or more higher surfaces 40 by a distance 48 of 0.05 ⁇ m, 0.10 ⁇ m, 0.15 ⁇ m, 0.20 ⁇ m, 0.25 ⁇ m, 0.30 ⁇ m, 0.35 ⁇ m, 0.40 ⁇ m, 0.45 ⁇ m, 0.50 ⁇ m, 0.55 ⁇ m, 0.60 ⁇ m, 0.65 ⁇ m, 0.70 ⁇ m or within any range defined by any two of those values (e.g., 0.10 ⁇ m to 0.20 ⁇ m, 0.05 ⁇ m to 0.70 ⁇ m, 0.05 ⁇ m to 0.60 ⁇ m, and so on).
  • the larger surface features 26L and (ii) the smaller surface features 26S that project from the surrounding portion 32 provide the one or more higher surfaces 40 residing at the higher mean elevation 42.
  • the surrounding portion 32 and the smaller surface features 26S that are set into larger surface features 26L provide the one or more lower surfaces 41 residing at the lower mean elevation 44.
  • Such a configuration can be the result of a one step ⁇ etching process. A single etching step etches away the substrate 12 to form all of (i) the larger surface features 26L projecting from the surrounding portion 32, (ii) the smaller surface features 26S projecting from the surrounding portion 32, and (iii) the smaller surface features 26S set into the larger surface features 26L.
  • the larger surface features 26L provide at least a portion of the one or more lower surfaces 41 disposed at the lower mean elevation 44.
  • the larger surface features 26L are set into the surrounding portion 32.
  • the surrounding portion 32 provides the one or more intermediate surfaces 43b disposed at the intermediate mean elevation 45b.
  • some of the smaller surface features 26S project from the larger surface features 26L, and provide the one or more intermediate surfaces 43a disposed at the intermediate mean elevation 45a.
  • the remaining smaller surface features 26S, those that do not project from the from the larger surface features 26L, project from the surrounding portion 32, and provide the one or more higher surfaces 40 residing at the higher mean elevation 42.
  • the higher mean elevation 44 differs from the lower mean elevation 42, in these embodiments with the first portion 58 and the second portion 60, by the distance 48, which again is 0.05 ⁇ m, 0.10 ⁇ m, 0.15 ⁇ m, 0.20 ⁇ m, 0.25 ⁇ m, 0.30 ⁇ m, 0.35 ⁇ m, 0.40 ⁇ m, 0.45 ⁇ m, 0.50 ⁇ m, 0.55 ⁇ m, 0.60 ⁇ m, 0.65 ⁇ m, 0.70 ⁇ m or within any range defined by any two of those values (e.g., 0.10 ⁇ m to 0.20 ⁇ m, 0.05 ⁇ m to 0.70 ⁇ m, 0.05 ⁇ m to 0.60 ⁇ m, and so on).
  • the second portion 60 of the textured region 20 residing at the second elevation 64 is everything else that is not the first portion 58 of the textured region 20.
  • incorporation of relatively large surface features 28 that are spaced relatively far apart but with a fill ⁇ factor of about 50% can force intensity of reflected light to peak at about 0.3 degrees while maximizing interferometric suppression of specular reflection.
  • relatively small surface features 26 of two size ranges are utilized and the difference between the two size ranges is relatively small.
  • at least some of the larger elliptical perimeters 28L entirely encompass more than one of the smaller elliptical perimeters 28S.
  • the substrate 12 may further comprise at least one alkaline earth metal oxide such as, but not limited to, MgO or CaO.
  • the substrate 12 has a bulk composition that is substantially free of lithium; i.e., the glass comprises less than 1 mol % Li 2 O and, in other embodiments, less than 0.1 mol % Li 2 O and, in other embodiments, 0.01 mol % Li 2 O, and in still other embodiments, 0 mol % Li 2 O.
  • the etching mask 128 is either shaped to match the inside of the ellipses 104, or shaped to match the outside of the ellipses 104 generated at the step 102.
  • the black inside the ellipses 104 of the illustration at FIG. 12 pertaining to a step 130 represents the etching mask 128.
  • the white outside of the ellipses 104 is the primary surface 18 of the substrate 12. The opposite scenario would have existed if the lithography mask 112 was formed in the opposite manner.
  • the method 100 further includes contacting the substrate 12 with the etching mask 128 with an etchant 132.
  • the new area 220 is the combination of the first ellipses 204 and the second ellipses 210 within the same new area 220.
  • the new area 220 includes free portions 222 of the first ellipses 204 and the second ellipses 210 that do not overlap.
  • the free portions 222 would include any of the first ellipses 204 and the second ellipses 210 that do not overlap at all, and the portions of the first ellipses 204 and the second ellipses 210 that are not overlapped.
  • the new area 220 further includes overlapping portions 224 of the first ellipses 204 and the second ellipses 210.

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  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Laminated Bodies (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Electroluminescent Light Sources (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

A substrate for a display article includes: a primary surface; a textured region on at least a portion of the primary surface, the textured region comprising surface features that reflect a random distribution, each of the surface features comprising a perimeter that is parallel to a base-plane extending through a thickness of the substrate below the textured region, wherein the perimeter is elliptical. The textured region can further include (i) one or more higher surfaces residing at a higher mean elevation from the base-plane and (ii) one or more lower surfaces residing at a lower mean elevation from the base-plane that is closer to the base-plane than the higher mean elevation. The higher mean elevation can differ from the lower mean elevation by a distance within a range of 0.05 µm to 0.70 µm.

Description

TEXTURED REGION OF A SUBSTRATE TO REDUCE SPECULAR REFLECTANCE INCORPORATING  SURFACE FEATURES WITH AN ELLIPTICAL PERIMETER OR SEGMENTS THEREOF, AND METHOD  OF MAKING THE SAME  CLAIM OF PRIORITY  [0001] This patent application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent  Application  No.  63/049,843,  entitled  “DISPLAY  ARTICLES  WITH  DIFFRACTIVE,  ANTIGLARE  SURFACES AND METHODS OF MAKING THE SAME,”  filed July 9, 2020, the entire disclosure of  which is incorporated herein by reference.   CROSS‐REFERENCE TO RELATED APPLICATIONS  [0002] The present application relates to, but does not claim priority to, commonly owned and  assigned U.S. Patent Application Serial No. __________ (D31977), entitled “TEXTURED REGION  TO REDUCE SPECULAR REFLECTANCE  INCLUDING A LOW REFRACTIVE  INDEX SUBSTRATE WITH  HIGHER ELEVATED SURFACES AND LOWER ELEVATED SURFACES AND A HIGH REFRACTIVE INDEX  MATERIAL DISPOSED ON THE LOWER ELEVATED SURFACES” and filed on ______________; U.S.  Patent Application Serial No. __________  (D31038/32632), entitled  “ANTI‐GLARE  SUBSTRATE  FOR A DISPLAY ARTICLE  INCLUDING A TEXTURED REGION WITH PRIMARY SURFACE FEATURES  AND  SECONDARY  SURFACE  FEATURES  IMPARTING A  SURFACE ROUGHNESS  THAT  INCREASES  SURFACE  SCATTERING”  and  filed  on  ______________;  U.S.  Patent  Application  Serial  No.  __________  (D32647), entitled “DISPLAY ARTICLES WITH DIFFRACTIVE, ANTIGLARE SURFACES  AND THIN, DURABLE ANTIREFLECTION COATINGS” and  filed on __________; and U.S. Patent  Application  Serial No. __________  (D32623), entitled  “DISPLAY ARTICLES WITH DIFFRACTIVE,  ANTIGLARE  SURFACES  AND  THIN,  DURABLE  ANTIREFLECTION  COATINGS”  and  filed  on  __________.    The  entire  disclosures  of  each  of  the  foregoing  U.S.  patent  applications,  publications and patent documents are incorporated herein by reference.    FIELD OF INVENTION  [0003] The disclosure relates to a substrate for a display article where the substrate includes a  textured  region  that  reduces  specular  reflectance  by  incorporating  surface  features with  an  elliptical perimeter or segments thereof.  The disclosure also relates to a method of making the  same.    BACKGROUND  [0004] Substrates transparent to visible light are utilized to cover displays of display articles.  Such  display articles include smart phones, tablets, televisions, computer monitors, and the like.  The  displays  are  often  liquid  crystal  displays,  organic  light  emitting  diodes,  among  others.    The  substrate protects the display, while the transparency of the substrate allows the user of the  device to view the display.    [0005] The substrate reflecting ambient light, especially specular reflection, reduces the ability  of the user to view the display through the substrate.  Specular reflection in this context is the  mirror‐like reflection of ambient light off the substrate.  For example, the substrate may reflect  visible  light reflecting off or emitted by an object  in the environment around the device.   The  visible  light  reflecting  off  the  substrate  reduces  the  contrast  of  the  light  from  the  display  transmitting to the eyes of the user through the substrate.  At some viewing angles, instead of  seeing the visible light that the display emits, the user sees a specularly reflected image.  Thus,  attempts have been made to reduce specular reflection of visible ambient light off the substrate.  [0006] Attempts have been made to reduce specular reflection off the substrate by texturing the  reflecting surface of the substrate.  The resulting surface is sometimes referred to as an "antiglare  surface."   For examples, sandblasting and liquid etching the surface of the substrate can texture  the  surface, which generally  causes  the  surface  to  reflect ambient  light diffusely  rather  than  specularly.  Diffuse reflection generally means that the surface still reflects the same intensity of  ambient  light but  the  texture of  the reflecting surface scatters  the  light upon reflection.   The  more diffuse reflection interferes less with the ability of the user to see the visible light that the  display emits.  [0007] Such methods of texturing (i.e., sandblasting and liquid etching) generate features on the  surface with  imprecise  and  unrepeatable  geometry  (the  features  provide  the  texture).    The  geometry of the textured surface of one substrate formed via sandblasting or liquid etching can  never be exactly the same as the geometry of the textured surface of another substrate formed  via sandblasting or liquid etching.  Commonly, only a quantification of the surface roughness (i.e.,  Ra) of the textured surface of the substrate is a repeatable target of the texturing.    [0008] There are a variety of metrics by which the quality of the "antiglare" surface  is  judged.   Those metrics include (1) the distinctness‐of‐image, (2) pixel power deviation, (3) apparent Moiré  interference  fringes,  (4)  transmission haze, and  (5)  reflection  color artifacts.   Distinctness‐of‐ image, which more aptly might be referred to as distinctness‐of‐reflected‐image, is a measure of  how distinct an image reflecting off the surface appears.  The lower the distinctness‐of‐image,  the more the textured surface  is diffusely reflecting rather than specularly reflecting.   Surface  features can magnify various pixels of the display, which distorts the image that the user views.   Pixel power deviation, also referred to as "sparkle,"  is a quantification of such an effect.   The  lower  the  pixel  power  deviation  the  better.    Moiré  interference  fringes  are  large  scale  interference patterns, which,  if  visible, distort  the  image  that  the user  sees.   Preferably,  the  textured  surface  produces  no  apparent Moiré  interference  fringes.    Transmission  haze  is  a  measure of how much the textured surface is diffusing the visible light that the display emitted  upon transmitting through the substrate.  The greater the transmission haze, the less sharp the  display  appears  (i.e.,  lowered  apparent  resolution).    Reflection  color  artifacts  are  a  sort  of  chromatic aberration where the textured surface diffracts light upon reflection as a function of  wavelength ‐ meaning that the reflected light, although relatively diffuse, appears segmented by  color.  The less reflected color artifacts that the textured surface produces the better.  All of these  attributes are discussed in greater detail below.  [0009] Targeting  a  specific  surface  roughness  cannot  optimize  all  of  those  metrics  simultaneously.  A relatively high surface roughness that sandblasting or liquid etching produces  might adequately transform specular reflection into diffuse reflection.  However, the high surface  roughness  can  additionally  generate  high  transmission  haze  and  pixel  power  deviation.    A  relatively  low surface roughness, while decreasing transmission haze, might  fail to sufficiently  transform specular reflection  into diffuse reflection  ‐ defeating the "antiglare" purpose of the  texturing.  [0010] Accordingly, a new approach to providing a textured region of the substrate is needed ‐  one that causes the textured surface to reflect ambient  light sufficiently diffusely rather than  specularly  so  as  to  be  "antiglare"  (e.g.,  a  low  distinctness‐of‐image)  but  simultaneously  also  delivers low pixel power deviation, low transmission haze, and low reflection color artifacts.  SUMMARY  [0011] The present disclosure addresses  that need with a  textured  region of a substrate  that  incorporates randomly distributed and oriented elliptical surface features or segments thereof.   The  surface  features  having  such  an  elliptical  or  partially  elliptical  shape,  when  randomly  distributed and oriented, provide  low specular reflection with minimal  transmission haze and  pixel power deviation and with minimal or unperceivable reflected color artifacts.  Although the  surface  features  are  randomly  distributed  and  oriented,  the  surface  features  are  specifically  placed by design.  Thus, the textured region can be reproduced from substrate to substrate.    [0012] According to a first aspect of the present disclosure, a substrate for a display article, the  substrate comprising: (i) a primary surface; and (ii) a textured region on at least a portion of the  primary  surface,  the  textured  region  comprising  surface  features  that  reflect  a  random  distribution, each of the surface features comprising a perimeter that is parallel to a base‐plane  extending through a thickness of the substrate below the textured region, wherein the perimeter  is elliptical.  [0013] According to a second aspect of the present disclosure, the substrate of the first aspect,  wherein the textured region further comprises (i) one or more higher surfaces residing at a higher  mean elevation from the base‐plane and (ii) one or more lower surfaces residing at a lower mean  elevation from the base‐plane that is closer to the base‐plane than the higher mean elevation.  [0014] According to a third aspect of the present disclosure, the substrate of the second aspect,  wherein (a) the textured region further comprises a surrounding portion, into which the surface  features are set, or from which the surface features project; (b) the surrounding portion provides  either  (i)  the one or more higher surfaces or  (ii)  the one or more  lower surfaces; and  (c)  the  surface features provide the other of (i) the one or more higher surfaces and (ii) the one or more  lower surfaces, whichever the surrounding portion does not provide.  [0015] According to a fourth aspect of the present disclosure, the substrate of any one of the  second through third aspects, wherein the higher mean elevation differs from the lower mean  elevation by a distance within a range of 0.05 µm to 0.70 µm.  [0016] According to a fifth aspect of the present disclosure, the substrate of any one of the first  through fourth aspects, wherein (i) the perimeter of each of the surface features comprises a  longest dimension parallel to the base‐plane; and (ii) the longest dimensions of the perimeters  of the surface features are not all parallel to each other.  [0017] According to a sixth aspect of the present disclosure, the substrate of the  fifth aspect,  wherein the longest dimension of the perimeter of each of the surface features is within a range  of 5 µm to 150 µm.  [0018] According to a seventh aspect of the present disclosure, the substrate of any one of the  first through sixth aspects, wherein the surface features comprise a fill‐fraction that is within a  range of 40% to 60%.   [0019] According to an eighth aspect of the present disclosure, the substrate of the first aspect,  wherein (i) the surface features comprise  larger surface features and smaller surface features;  (ii) the perimeters of the larger surface features comprise a range of longest dimensions parallel  to the base‐plane; (iii) the perimeters of the smaller surface features comprise another range of  longest dimensions parallel to the base‐plane; and (iv) the  longest dimensions of the range of  longest dimensions of the larger surface features are longer than the longest dimensions of the  range of longest dimensions of the smaller surface features.  [0020] According to a ninth aspect of the present disclosure, the substrate of the eighth aspect,  wherein (i) the perimeters of the larger surface features totally surround the perimeters of some  of the smaller surface features; and (ii) the perimeters of some the smaller surface features reside  entirely outside of the perimeters.  [0021] According to a tenth aspect of the present disclosure, the substrate of the eighth aspect,  wherein the perimeter of at least one of the smaller surface features partially overlaps with the  perimeter of one of the larger surface features, such that (i) part of the perimeter of the smaller  surface features is inside the perimeter of the larger surface feature and (ii) part of the perimeter  of the smaller surface features is outside the perimeter of the larger surface feature.  [0022] According to an eleventh aspect of the present disclosure, the substrate of any one of the  eighth  through  tenth aspects, wherein  the  textured  region  further comprises  (i) one or more  higher surfaces residing at a higher mean elevation from the base‐plane, (ii) one or more lower  surfaces residing at a lower mean elevation from the base‐plane that is closer to the base‐plane  than  the higher mean elevation, and  (iii) a surrounding portion,  into which  the  larger surface  features are set, or from which the larger surface features project.  [0023] According  to a  twelfth aspect of  the present disclosure,  the  substrate of  the eleventh  aspect, wherein (i) the larger surface features project from the surrounding portion, some of the  smaller surface features project from the surrounding portion, and the remaining smaller surface  features, those that do not project from the surrounding portion, are set into the larger surface  features;  (ii)  the  larger  surface  features  and  smaller  surface  features  that  project  from  the  surrounding  portion  provide  the  one  or more  higher  surfaces  residing  at  the  higher mean  elevation; and the surrounding portion and the smaller surface features that are set into larger  surface features provide the one or more lower surfaces residing at the lower mean elevation.  [0024] According to a thirteenth aspect of the present disclosure, the substrate of the eleventh  aspect, wherein (i) the larger surface features are set into the surrounding portion, some of the  smaller surface features are set into the surrounding portion, and the remaining smaller surface  features,  those  that are not set  into  the surrounding portion, project  from  the  larger surface  features;  (ii) the  larger surface  features and the smaller surface  features that are set  into the  surrounding  portion  provide  the  one  or  more  lower  surfaces  residing  at  the  lower  mean  elevation; and (iii) the surrounding portion and the smaller surface features that project from the  larger  surface  features provide  the one or more higher  surfaces  residing at  the higher mean  elevation.  [0025] According to a fourteenth aspect of the present disclosure, the substrate of the eighth  aspect, wherein the textured region further comprises (i) one or more higher surfaces residing at  a higher mean elevation from the base‐plane, (ii) one or more lower surfaces residing at a lower  mean  elevation  from  the  base‐plane  that  is  closer  to  the  base‐plane  than  the  higher mean  elevation,  (iii) one or more  intermediate  surfaces  residing  at one or  two  intermediate mean  elevations  from  the  base‐plane, wherein  the  one  or  two  intermediate mean  elevations  are  disposed  between  the  higher  mean  elevation  and  the  lower  mean  elevation,  and  (iv)  a  surrounding portion,  into which  the  larger  surface  features are  set, or  from which  the  larger  surface features project.  [0026] According to a fifteenth aspect of the present disclosure, the substrate of the fourteenth  aspect, wherein the larger surface features provide at least a portion of the one or more higher  surfaces residing at the higher mean elevation.  [0027] According to a sixteenth aspect of the present disclosure, the substrate of the fourteenth  aspect, wherein the larger surface features provide at least a portion of the one or more lower  surfaces disposed at the lower mean elevation.  [0028] According to a seventeenth aspect of the present disclosure, the substrate of any one of  the first through sixteenth aspects, wherein the textured region further comprises one or more  sections comprising secondary surface features imparting a surface roughness (Ra) within a range  of 5 nm to 100 nm.  [0029] According to a eighteenth aspect of the present disclosure, the substrate of any one of  the  first  through seventeenth aspects, wherein  (i)  the  textured region exhibits a  transmission  haze within a range of 0.5%  to 5.0%;  (ii)  the  textured region exhibits a pixel power deviation  within a range of 1.0% to 3.0%; (iii) the textured region exhibits a distinctness‐of‐image within a  range of 5% to 70%; (iv) the textured region exhibits a specular reflectance within a range of 4  GU  to  40  GU;  and  (v)  the  textured  region  exhibits  corrected  color  shifts  ΔCx _corrected  and  ΔCy _corrected that are each respectively within a range of 0.03 to 0.6.  [0030] According to a nineteenth aspect of the present disclosure, the substrate of any one of  the first through eighteenth aspects, wherein the substrate comprises a glass or glass‐ceramic.  [0031] According to a twentieth aspect of the present disclosure, a substrate for a display article,  the substrate comprising: (a) a primary surface; (b) a base‐plane extending through the substrate  below the primary surface; and (c) a textured region at the primary surface, the textured region  comprising (i) one or more higher surfaces residing at a higher mean elevation from the base‐ plane, (ii) one or more lower surfaces residing at a lower mean elevation from the base‐plane,  (iii) a first portion providing either the one or more higher surfaces or the one or more  lower  surfaces, and (iv) a second portion providing the other of the one or more higher surfaces and  the one or more higher surfaces, whichever the first portion is not providing; wherein, elliptical  perimeters which lie in planes parallel to the base‐plane and reflect a random distribution, define  the  first  portion  except  for  overlapping  portions  of  the  elliptical  perimeters,  where  the  overlapping portions define in part the second portion.  [0032] According to a twenty‐first aspect of the present disclosure, the substrate of the twentieth  aspect, wherein in addition to the overlapping portions of the elliptical perimeters, the second  portion of the textured region further comprises any part of the textured region that is not the  first portion.  [0033] According to a twenty‐second aspect of the present disclosure, the substrate of any one  of  the  twentieth  through  twenty‐first  aspects, wherein  (i)  each  of  the  elliptical  perimeters  comprises a longest dimension parallel to the base‐plane; and (ii) the longest dimensions of the  elliptical perimeters are not all parallel with each other.  [0034] According to a twenty‐third aspect of the present disclosure, the substrate of any one of  the twentieth through twenty‐second aspects, wherein the higher mean elevation differs from  the second elevation by a distance within a range of 0.02 µm to 0.70 µm.  [0035] According to a twenty‐fourth aspect of the present disclosure, the substrate of any one of  the twentieth through twenty‐third aspects, wherein (a) the elliptical perimeters comprise larger  elliptical perimeters and smaller elliptical perimeters, which are smaller than the first elliptical  perimeters; and (b) the first portion of the textured region is bounded by (i) the smaller elliptical  perimeters that do not overlap or intersect with the larger elliptical perimeters, (ii) portions of  the smaller elliptical perimeters outside of the first elliptical perimeters that partially overlap with  the  larger elliptical perimeters, and (iii) portions of the  larger elliptical perimeters that do not  overlap with the smaller elliptical perimeters.  [0036] According to a twenty‐fifth aspect of the present disclosure, the substrate of the twenty‐ fourth aspect, wherein at least some of the larger elliptical perimeters entirely encompass more  than one of the smaller elliptical perimeters.  [0037] According to a twenty‐sixth aspect of the present disclosure, the substrate of any one of  the twenty‐fourth through twenty‐fifth aspects, wherein (i) a fill‐fraction of the larger elliptical  perimeters  is within  a  range  of  40%  to  60%;  and  (ii)  a  fill‐fraction  of  the  smaller  elliptical  perimeters is within a range of 10% to 30%.  [0038] According to a twenty‐seventh aspect of the present disclosure, the substrate of any one  of the twentieth through twenty‐sixth aspects, wherein the textured region further comprises  one or more sections comprising secondary surface features imparting a surface roughness (Ra)  within a range of 5 nm to 100 nm.  [0039] According to a twenty‐eighth aspect of the present disclosure, the substrate of any one  of  the  twentieth  through  twenty‐seventh  aspects, wherein  (i)  the  textured  region exhibits  a  transmission haze within a range of 0.3% to 8.0%; (ii) the textured region exhibits a pixel power  deviation within a range of 0.7% to 3.5%; (iii) the textured region exhibits a distinctness‐of‐image  within a range of 25% to 100%; (iv) the textured region exhibits a specular reflectance within a  range of 5 GU to 30 GU; and (v) the textured region exhibits corrected color shifts ΔCx _corrected  and ΔCy _corrected that are each respectively within a range of 0.00 to 0.50.  [0040] According to a twenty‐ninth aspect of the present disclosure, the substrate of any one of  the twentieth through twenty‐eighth aspects, wherein the substrate comprises a glass or glass‐ ceramic.  [0041] According to a thirtieth aspect of the present disclosure, a method of forming a textured  region  of  a  substrate  of  a  display  article,  the method  comprising:  (I)  generating  a  random  distribution of ellipses within an area; (II) preparing a  lithography mask comprising (a) an area  matching the area of the plane; (b) material throughout the matching area; and (c) voids through  the material, wherein  the  random  distribution  of  the  ellipses  define  either  (i)  the material  throughout the matching area or (ii) the voids through the material; (III) exposing a workpiece  comprising a substrate, a  lithography  ink disposed on the substrate, and the  lithography mask  disposed on the lithography ink, to a curing agent that transmits through the voids through the  material of the lithography mask to cure exposed portions of the lithography ink, wherein non‐ exposed portions of the lithography ink blocked from exposure to the curing agent are not cured  and removed along with the lithography mask, and the exposed portions of the lithography ink  remain on the substrate as an etching mask; and (IV) contacting the substrate with the etching  mask with an etchant, thus forming the textured region.  [0042] According to a thirty‐first aspect of the present disclosure, the method of the thirtieth  aspect further comprises: (I) generating a random distribution of second ellipses within a second  area; (II) preparing a second lithography mask comprising (a) a second area matching the area of  the second plane; (b) material throughout the matching second area; and (c) voids through the  material, wherein the random distribution of the second ellipses define either (i) the material  throughout  the matching  second  area or  (ii)  the  voids  through  the material;  (III)  exposing  a  second workpiece comprising the substrate, new lithography ink disposed on the textured region  of  the substrate, and  the second  lithography mask disposed on  the new  lithography  ink,  to a  curing agent that transmits through the voids through the material of the second  lithography  mask to cure exposed portions of the new lithography ink, wherein non‐exposed portions of the  new lithography ink blocked from exposure to the curing agent are not cured and removed along  with the second lithography mask, and the exposed portions of the new lithography ink remain  on the substrate as a second etching mask; and (IV) contacting the substrate with the second  etching mask with an etchant.  [0043] According to a thirty‐second aspect of the present disclosure, the method of any one of  the  thirtieth  through  thirty‐first  aspects, wherein  generating  the  random  distribution  of  the  ellipses comprises: (i) distributing points randomly within an area; (ii) triangulating the points so  that each point is made a vertex of a triangle thus forming a plurality of triangles, and none of  the triangles overlap; (iii) drawing an ellipse inside each triangle of the plurality of triangles; and  (iv) removing the points and the triangles so that only the ellipses that were drawn in the triangles  remain on the area.  [0044] According  to a  thirty‐third aspect of  the present disclosure,  the method of  the  thirty‐ second  aspect, wherein  the  points  randomly  distributed within  the  area  are  separated  by  a  minimum distance.  [0045] According to a thirty‐fourth aspect of the present disclosure, the method of any one of  the thirtieth through thirty‐third aspects further comprises: forming secondary surface features  into one or more sections of the textured region, thereby increasing the surface roughness (Ra)  of at the one or more sections to within a range of 5 nm to 100 nm.   [0046] According to a thirty‐fifth aspect of the present disclosure, a method of forming a textured  region  of  a  substrate  of  a  display  article,  the method  comprises:  (I)  generating  a  random  distribution of  first ellipses within a  first area;  (II) generating a random distribution of second  ellipses within a second area, wherein the first ellipses comprise longest dimensions that are on  average  longer than  longest dimensions of the second ellipses on average; (III) forming a new  area that superimposes the first ellipses of the first area and the second ellipses of the second  area, the new area comprising (a) free portions of the first ellipses and the second ellipses that  do not overlap; (b) overlapping portions of the first ellipses and the second ellipses; and (c) empty  portions where neither  the  first ellipses nor  the  second ellipses are present;  (IV) preparing a  lithography mask comprising (a) an area; (b) material within the area defined by either (i) the free  portions or (ii) a combination of the overlapping portions and the empty portions; and (c) voids  through the material defined by whichever of (i) the free portions and (ii) the combination of the  overlapping portions and  the empty portions do not define  the material within  the area;  (V)  exposing a workpiece comprising a substrate, a lithography ink disposed on the substrate, and  the lithography mask disposed on the lithography ink, to a curing agent that transmits through  the  voids  through  the  material  of  the  lithography  mask  to  cure  exposed  portions  of  the  lithography ink, wherein non‐exposed portions of the lithography ink blocked from exposure to  the curing agent are not cured and removed along with the lithography mask, and the exposed  portions of the lithography ink remain on the substrate as an etching mask; and (VI) contacting  the substrate with the etching mask with an etchant.  [0047] According to a thirty‐sixth aspect of the present disclosure, the method of the thirty‐fifth  aspect further comprises: before preparing the lithography mask, removing from the new area  any of the second ellipses that the first ellipses partially but not fully overlap.  [0048] According to a thirty‐seventh aspect of the present disclosure, the method of any one of  the thirty‐fifth through thirty‐sixth aspects, wherein generating the random distribution of the  first  ellipses  and  generating  the  random  distribution  of  the  second  ellipses  both  separately  comprise:  (i) distributing points  randomly within  an  area, each of  the points  separated by  a  minimum distance; (ii) triangulating the points so that each point is made a vertex of a triangle  thus forming a plurality of triangles, and none of the triangles overlap; (iii) drawing an ellipse  inside each triangle of the plurality of triangles; and removing the points and the triangles so that  only the ellipses that were drawn in the triangles remain on the area.  [0049] According to a thirty‐eighth aspect of the present disclosure, the method of the thirty‐ seventh aspect, wherein (i) the minimum distance separating each of the points of the area for  the random distribution of the first ellipses  is within a range of 80 µm to 130 µm; and (ii) the  minimum distance separating each of the points of the area for the random distribution of the  second ellipses is within a range of 15 µm to 40 µm.  [0050] According  to a  thirty‐ninth aspect of  the present disclosure,  the method of  the  thirty‐ seventh aspect, wherein (i) the minimum distance separating each of the points of the area for  the random distribution of the first ellipses is less than or equal 20 µm; (ii) the minimum distance  separating each of the points of the area for the random distribution of the second ellipses is less  than or equal 18 µm; and the minimum distance separating each of the points of the area for the  random distribution of the first ellipses differs from the minimum distance separating each of the  points of the plane for the random distribution of the second ellipses by a value within a range  of 1 µm to 3 µm.  [0051] According to a fortieth aspect of the present disclosure, the method of any one of the  thirty‐fifth through thirty‐ninth aspects further comprises: forming secondary surface features  into one or more sections of the textured region, thereby increasing the surface roughness (Ra)  of at the one or more sections to within a range of 5 nm to 100 nm.  BRIEF DESCRIPTION OF THE DRAWINGS  [0052] In the figures:  [0053] FIG. 1 is a perspective view of a display article, illustrating a substrate including a primary  surface with a textured region;  [0054] FIG. 2 is a magnified illustration of a portion of an embodiment of the textured region of  FIG. 1, illustrating elliptical surface features projecting from a surrounding portion;  [0055] FIG. 3 is an elevation view of a cross‐section taken through line III‐III of FIG. 2, illustrating  the elliptical surface features projecting from the surrounding portion, with the elliptical surface  features providing higher  surfaces  that  reside at a higher mean elevation  from a base‐plane  extending through the substrate below the textured region, and with the surrounding portion  providing a lower surface that resides at a lower mean elevation from the base‐plane;  [0056] FIG. 4 is a close‐up perspective view of area IV of FIG. 2, illustrating an elliptical surface  feature  projecting  from  the  surrounding  portion  and  providing  a  higher  surface,  which  is  relatively planar;  [0057] FIG. 5 is a close‐up view of area V of FIG. 2, illustrating the elliptical surface features having  a perimeter and a longest dimension, as well as the surface features being separated by a center‐ to‐center distance;  [0058] FIG. 6 is a magnified illustration of a portion of an embodiment of the textured region of  FIG.  1,  illustrating  larger  elliptical  surface  features projecting  from or  set  into  a  surrounding  portion and  smaller elliptical  surface  features projecting  from or  set  into  the  larger elliptical  surface features and projecting from or set into the surrounding portion;  [0059] FIG. 7  is a close‐up view of area VII of FIG. 6,  illustrating  the  smaller elliptical  surface  features having a shorter  longest dimension than the  longest dimension of the  larger elliptical  surface features;  [0060] FIGS. 8A‐8C are elevational views of a cross‐section of FIG. 6, illustrating several possible  variations  for  relative elevations of  the  larger elliptical  surface  features,  the  smaller elliptical  surface features, and the surrounding portion from the base‐plane, depending on whether a two‐ step or one‐step etching process was utilized to form the textured region;  [0061] FIGS. 9A and 9B are magnified illustrations of a portion of an embodiment of the textured  region of FIG. 1, illustrating a first portion at a first elevation from the base‐plane and a second  portion at a second elevation from the base‐plane, both incorporating elliptical surface features  or  segments  thereof,  a  consequence  of  superimposing  a  first  random  distribution  of  larger  ellipses and a second random distribution of smaller ellipses;  [0062] FIGS. 10A and 10B are like FIGS. 9A and 9B but are a consequence of superimposing larger  ellipses that are closer in size to the smaller ellipses than at FIGS. 9A and 9B;  [0063] FIGS. 10C and 10D are elevational views of a cross‐section taken through  line XC‐XC of  FIG. 10B, illustrating the first portion and the second portion residing at different elevations from  the base‐plane, either with the first portion projecting from the second portion (FIG. 10C) or with  the first portion set into the second portion (FIG. 10D);  [0064] FIG. 11 is a schematic diagram of a set‐up used to measure a color shift of ambient light  reflecting off the textured region of FIG. 1;  [0065] FIG. 12 is a schematic flow chart of a method of forming an embodiment of the textured  region of FIG. 1,  illustrating  steps of  randomly distributing ellipses within an area,  forming a  lithography mask that incorporates the design of the area as a positive or a negative, forming an  etching mask that incorporates the design of the area as a positive or negative on the substrate  by using the lithography mask to selectively cure lithography ink, and then etching the substrate  with the etching mask to form the textured region as either a positive or a negative of the area  with the randomly distributed ellipses;  [0066] FIG.  13  is  a  schematic  illustrating  an  example  generation of  a  random distribution of  ellipses,  where  points  are  randomly  generated  (such  as  by  using  a  Poisson  disk  random  distribution algorithm), the points are triangulated, and then Steiner inellipses are drawn within  the triangles, which are then later scaled down to a desired fill fraction;  [0067] FIG. 14  is a schematic flow chart of another method of forming an embodiment of the  textured region of FIG. 1, illustrating two different areas each including a random distribution of  ellipses superimposed into one area, with overlapping portions of the ellipses differentiated from  non‐overlapping portions;  [0068] FIGS. 15A‐15C, pertaining to a Comparative Example 1A, illustrate circular surface features  producing color‐separated reflected color artifacts;  [0069] FIGS. 16A‐16C, pertaining  to an Example 1B,  illustrate an embodiment of  the  textured  region of FIG. 1 incorporating elliptical surface features not producing color‐separated reflected  color artifacts;   [0070] FIGS. 17A and 17B, pertaining to an Example 2A and a Comparative Example 2B, illustrate  elliptical  surface  features  again  producing  less  reflected  color  artifacts  than  circular  color  features,  a  consequence  of  having  peak  intensity  of  reflected  light  at  close  to  0.3  degrees  scattering  angle  and  only  a minor  secondary  peak  at  3  degrees  scattering  angle where  the  scattered intensity is reduced;  [0071] FIG. 18A, pertaining to Examples 14A‐14O, is a graph that illustrates that the presence of  secondary surface features (to impart surface roughness) results in a lower pixel power deviation  compared to substrates that did not have the secondary surface features;  [0072] FIG. 18B, pertaining to Examples 14A‐14O, is a graph that illustrates that the presence of  secondary surface features results in a lower specular reflectance compared to substrates that  did not have the secondary surface features;  [0073] FIG. 18C, pertaining to Examples 14A‐14O, is a graph that illustrates that the presence of  secondary surface  features  resulted  in a higher distinctness‐of‐image compared  to substrates  that did not have the secondary surface features;  [0074] FIG. 18D, pertaining to Examples 14A‐14O, is a graph that illustrates that the presence of  secondary surface features resulted in a higher transmission haze compared to substrates that  did not have the secondary surface features;   [0075] FIG. 19A, pertaining  to Examples 15A‐15B, are atomic  force microscopy  images of  the  elliptical surface features and the surrounding portion (left) and the secondary surface features  (middle and  right),  for both when  the  secondary  surface  features were disposed only on  the  elliptical surface  features  (top) and when  the secondary surface  features were disposed over  both the elliptical surface features and the surrounding portion (bottom);  [0076] FIG. 19B, pertaining to Examples 15A‐15B,  is a graph  illustrating that  incorporating the  secondary  surface  features  over  the  entire  textured  region  resulted  in  a  lowed  pixel  power  deviation compared to substrates where the secondary surface features were incorporated only  on the elliptical surface features;  [0077] FIG. 19C, pertaining to Examples 15A‐15B,  is a graph  illustrating that  incorporating the  secondary surface features over the entire textured region resulted in a higher transmission haze  compared to substrates where the secondary surface  features were  incorporated only on the  elliptical surface features;  [0078] FIG. 19D, pertaining to Examples 15A‐15B,  is a graph  illustrating that  incorporating the  secondary surface features over the entire textured region did not substantially affect specular  reflectance compared  to substrates where  the secondary surface  features were  incorporated  only on the elliptical surface features;  [0079] FIG. 19E, pertaining to Examples 15A‐15B,  is a graph  illustrating that  incorporating the  secondary surface features over the entire textured region slightly affected specular reflectance  compared to substrates where the secondary surface  features were  incorporated only on the  elliptical surface features, and increasingly so as wavelength deviated from about 455 nm;  [0080] FIG. 20A, pertaining to Example 16, are white light interferometer graphs illustrating the  topography of the elliptical surface features and the surrounding portion (top) and the secondary  surface features (bottom) disposed at the elliptical surface features (left) and the surrounding  portion (right); and  [0081] FIG. 20B, pertaining to Example 16, are atomic force microscopy images of the secondary  surface features disposed at an elliptical surface feature (left) and the surrounding portion (right),  illustrating  that  the  secondary  surface  features at  the  surrounding portion  imparted a higher  surface roughness (Ra) than the at the elliptical surface feature (because the surrounding portion  was not previously etched and thus more sensitive to the etching that imparted the secondary  surface features).  DETAILED DESCRIPTION  [0082] Referring now to FIG. 1, a display article 10 includes a substrate 12.  In embodiments, the  display article 10 further includes a housing 14 to which the substrate 12 is coupled and a display  16 within the housing 14.   In such embodiments, the substrate 12 at  least partially covers the  display 16 such that light that the display 16 emits can transmit through the substrate 12.  [0083] The  substrate  12  includes  a  primary  surface  18,  a  textured  region  20  defined on  the  primary surface 18, and a thickness 22 that the primary surface 18 bounds in part.  The primary  surface 18 generally faces toward an external environment 24 surrounding the display article 10  and away  from  the display 16.   The display 16 emits  visible  light  that  transmits  through  the  thickness 22 of the substrate 12, out the primary surface 18, and into the external environment  24.    [0084] Referring  now  to  FIGS.  2‐5,  in  embodiments,  the  textured  region  20  includes  surface  features 26.  The surface features 26 are randomly distributed.  Each of the surface features 26  has  a perimeter  28.    The perimeter  28  is parallel  to  a base‐plane  30  extending  through  the  thickness 22 of the substrate 12 below the textured region 20.  The perimeter 28 is elliptical.  The  base‐plane 30 provides a conceptual reference and not a structural component.  [0085] The textured region 20 further includes a surrounding portion 32.  In embodiments, the  surface features 26 are set into the surrounding portion 32.  In those embodiments, the surface  features 26 are elliptical blind holes that extend down into the thickness 22 of the substrate 12  toward  the base‐plane 30.    In other embodiments,  the  surface  features 26 project  from  the  surrounding portion 32.  In those embodiments, the surface features 26 are elliptical pillars that  project from the surrounding portion 32 away from the base‐plane 30 and toward the external  environment 24.  The surrounding portion 32 forms a contiguous surface from which the surface  features 26 either project from or are set into.    [0086] As mentioned, the perimeter 28 of each of the surface features 26 is elliptical – that is,  the shape of the perimeter 28 is an ellipsis.  Each perimeter 28 thus has a longest dimension 34,  which is twice a longest axis from a center 36 of the ellipse.  In addition, each perimeter 28 has a  width 38, which is twice a shortest axis from the center 36 of the ellipse.  The incorporation of  the surface features 26 having the perimeter 28 that is elliptical has a meaningful effect on anti‐ glare performance.  Efforts leading to this disclosure also investigated surface features 26 having  a circular perimeter 28.  Substrates incorporating circular surface features as the textured region  tended  to  produce  observable  reflection  color  artifacts  upon  reflecting  ambient  light.   Comparative Example 1A below further elaborates that point.  The surface features 26 with the  perimeter 28 that is elliptical, or that incorporate elliptical segments, reflect light with reduced  color  artifacts,  as  well  as  provide  beneficial  transmission  haze,  pixel  power  deviation,  and  distinctiveness‐of‐image values.   [0087] As mentioned,  the  surface  features 26 are  randomly distributed.    In other words,  the  surface features 26 are aligned with each other and the surface features 26 are not arranged in  a pattern.  For example, the longest dimensions 34 of the surface features 26 are not all parallel  with each other  (i.e., not all aligned  to be extending  in  the same directions).    In addition, no  grouping of the surface features 26 is arranged geometrically the same as any other grouping of  the surface features 26.  [0088] The textured region 20 further includes (i) one or more higher surfaces 40 that reside at  a higher mean elevation 42 from the base‐plane 30 and (ii) one or more lower surfaces 41 that  reside at a  lower mean elevation 44 from the base‐plane 30.   The  lower mean elevation 44  is  closer to the base‐plane 30 than the higher mean elevation 42.  The one or more higher surfaces  40 all reside at  the same elevation within manufacturing  tolerances.   The one or more  lower  surfaces 41 all reside at the same elevation within manufacturing tolerances.   In embodiments,  the surface features 26 provide the one or more higher surfaces 40 and the surrounding portion  32 provides the one or more lower surfaces 41.  In such circumstances, the surface features 26  project from the surrounding portion 32.  In embodiments, the surface features 26 provide the  one or more lower surfaces 41 and the surrounding portion 32 provides the one or more higher  surfaces 42.  In such circumstances, the surface features 26 are set into the surrounding portion  32.    [0089] In embodiments, the longest dimension 34 of each surface feature 26 is 5 µm, 10 µm, 15  µm, 20 µm, 25 µm, 30 µm, 40 µm, 50 µm, 60 µm, 70 µm, 80 µm, 90 µm, 100 µm, 110 µm, 120  µm, 130 µm, 140 µm, 150 µm, or within any range bounded by any two of those values (e.g., 100  µm  to 110 µm, 15 µm  to 40 µm, 5 µm  to 15 µm, and  so on).    In embodiments,  the  longest  dimension 34 of each surface features 26, on average, is about 100 µm.  [0090] In embodiments, the surface features 26 have a fill‐fraction of the textured region 20 of  30%, 40%, 50%, 60%, 70%, or within any range defined by any two of those values (e.g., 40% to  60%, and so on).  The perimeter 28 of each surface feature 26 encompasses an area of a planar  cross‐section of the textured region 20 parallel to the base‐plane 30.  The sum of the areas of all  of the perimeters 28 of all of the surface features 26 divided by the total area of the planar cross‐ section of the textured region 20  is the “fill‐fraction” of the surface features 26.   It  is believed  that a fill‐fraction of about 50% suppresses specular reflection.  In other words, some the ambient  light reflects off the surface features 26, and some of the light reflects off the surrounding portion  32.  A fill‐fraction of about 50% provides maximum destructive interference between the ambient  light reflecting off the surface features 26 and the ambient light reflecting off the surrounding  portion 32.  [0091] In embodiments, a distance 46 separates the center 36 of one surface feature 26 from the  center 36 of the next nearest surface features 26.  This document may refer to the distance 46  as “the pitch” of  the surface  features 26.  In embodiments,  the average of  these distances 46  throughout the textured region 20 is 80 µm, 90 µm, 100 µm, 110 µm, 120 µm, 130 µm, 140 µm,  150 µm, or within any range bounded by any two of those values (e.g., 90 µm to 120 µm, 100 µm  to 130 µm, and so on).  It is believed that to cause the textured region 20 to reflect light where  the peak  intensity of  reflected  light  is at a  small angle  (such as about 0.3 degrees),  then  the  distance 46 separating the centers 36 of the surface features 26 should be within the range of  about 90 µm to 120 µm.  For example, considering the 550 nm wavelength portion of reflected  ambient  light, when  the distance 46  is 105 µm,  then  the  scattering angle providing  the peak  intensity of reflected  light (at 550 nm wavelength) ought to be 0.3 degrees (because pitch ≅ wavelength /sin (ϑ)) .    [0092] In embodiments, the lower mean elevation 44 provided by the one or more lower surfaces  41 differs from the higher mean elevation 42 provided by the one or more higher surfaces 40 by  a distance 48 of 0.05 µm, 0.10 µm, 0.15 µm, 0.20 µm, 0.25 µm, 0.30 µm, 0.35 µm, 0.40 µm, 0.45  µm, 0.50 µm, 0.55 µm, 0.60 µm, 0.65 µm, 0.70 µm or within any range defined by any two of  those values (e.g., 0.10 µm to 0.20 µm, 0.05 µm to 0.70 µm, 0.05 µm to 0.60 µm, and so on).   When the surface features 26 project from the surrounding portion 32, the difference 48  is a  height of the surface features 26 from the surrounding portion 32.  When the surface features  26 are set into the surrounding portion 32, the difference 48 is a depth of the surface features 26  from the surrounding portion 32.    [0093] Referring  now  to  FIGS.  6‐8C,  in  embodiments  of  the  textured  region  20,  the  surface  features 26 include or are separated into larger surface features 26L and smaller surface features  26S.  “Larger” and “smaller” here are relative terms meaning that the larger surface features 26L  are  larger  than  the  smaller  surface  features 26S.   Each  larger  surface  features 26L and each  smaller  surface  feature 26S have a perimeter 28L, 28S,  respectively, which  is elliptical.   Each  perimeter 28L, 28S has a longest dimension 34L, 34S, respectively.  The longest dimensions 34L  of  the  larger surface  features 26L  fall within a  range of  longest dimensions 34L.   The  longest  dimensions 34S of the larger surface features 26S fall within a range of longest dimensions 34S,  that are exclusive of the range of longest dimensions 34L of the larger surface features 26L.  The  longest dimensions 34L of the range of longest dimensions 34L of the larger surface features 26L  are longer than the longest dimensions 34S of the range of longest dimensions 34S of the smaller  surface features 26S.    [0094] As mentioned above, in an attempt to force the intensity of reflected light off the textured  region 20 to peak at about 0.3 degrees, the distance 46 between the centers 36 of the surface  features 26 ought to be about 105 µm.  As additionally mentioned above, to maximize specular  reflection suppression via destruction  interference,  the  fill‐fraction of  the surface  features 26  ought to be about 50%.  To accommodate both of those criteria, then the longest dimensions 34  of  the surface  features 26 ought  to be 100 µm.   However, surface  features 26 having such a  longest dimension 34 on  the 100 µm  scale have a  tendency  to generate  relatively high pixel  power deviation.  The addition of the smaller surface features 26S mitigates that consequence  and generally results in a more acceptable, lower, pixel power deviation.  The incorporation of  the smaller surface features 26S can improve the pixel power deviation compared to if only the  larger surface features 26L were incorporated.    [0095] In embodiments, the perimeters 28L of the larger surface features 26L totally surround  the perimeters 28S of some of the smaller surface features 26S.  In embodiments, the perimeters  28S of some or all of the smaller surface features 26S reside entirely outside of the perimeters  28L of the larger surface features 26L.  In embodiments, the perimeter 28S of any given smaller  surface features 26S partially overlaps with the perimeter 28L of any given larger surface feature  28L,  such  that  (i) part of  the perimeter 28S of  the  smaller  surface  features 26S  is  inside  the  perimeter 28L of the larger surface feature 26L and (ii) part of the perimeter 28S of the smaller  surface  features 26S  is outside  the perimeter 28L of  the  larger  surface  feature 26L.   Further,  although  not  separately  illustrated,  the  smaller  surface  features  26S,  instead  of  having  the  perimeter 28S that is elliptical, have the perimeter 28S that can be circular.    [0096] As mentioned, in embodiments, the textured region includes the two elevations (see, e.g.,  FIG. 8C) – the higher mean elevation 42 and the lower mean elevation 44.  In embodiments, the  larger  surface  features 26L provide at  least a portion of  the one or more higher  surfaces 40  residing  at  the higher mean elevation 42.    For example,  in embodiments,  the  larger  surface  features 26L project from the surrounding portion 32, some of the smaller surface features 26S  project from the surrounding portion 32, and the remaining smaller surface features 26S, those  that do not project from the surrounding portion 32, are set into the larger surface features 26L.   In such embodiments, (i) the larger surface features 26L and (ii) the smaller surface features 26S  that project from the surrounding portion 32 provide the one or more higher surfaces 40 residing  at the higher mean elevation 42.  The surrounding portion 32 and the smaller surface features  26S  that are  set  into  larger  surface  features 26L provide  the one or more  lower  surfaces 41  residing at the lower mean elevation 44.   Such a configuration can be the result of a one step‐ etching process.  A single etching step etches away the substrate 12 to form all of (i) the larger  surface features 26L projecting from the surrounding portion 32, (ii) the smaller surface features  26S projecting from the surrounding portion 32, and (iii) the smaller surface features 26S set into  the larger surface features 26L.    [0097] In embodiments (not separately illustrated, but the inverse of FIG. 8C), the larger surface  features 26L provide at least a portion of the one or more lower surfaces 41 residing at the lower  mean elevation 44.  For example, in embodiments, the larger surface features 26L are set into  the surrounding portion 32, some of the smaller surface features 26S are set into the surrounding  portion  32,  and  the  remaining  smaller  surface  features  26S,  those  that  are  not  set  into  the  surrounding portion 32, project from the larger surface features 26L.  In such embodiments, (i)  the  larger  surface  features 26L and  (ii)  the  smaller  surface  features 26S  that are  set  into  the  surrounding portion 32 provide the one or more lower surfaces 41 residing at the lower mean  elevation 44.  The surrounding portion 32 and the smaller surface features 26S that project from  the larger surface features 26L provide the one or more higher surfaces 40 residing at the higher  mean elevation 42.   Such a configuration can be the result of a one step‐etching process.  [0098] In embodiments  (see FIGS. 8A and 8B), the textured region 20  further  includes one or  more  intermediate surfaces 43 (e.g., 43a, 43b) that reside at one or more  intermediate mean  elevations 45  (e.g., 45a, 45b)  from  the base‐plane 30.   The one or more  intermediate mean  elevations 45 (e.g., 45a, 45b) are between the higher mean elevation 42 and the  lower mean  elevation 44.  These embodiments of the textured region 20 thus have surfaces at three or four  distinct elevations from the base‐plane 30.  [0099] For example  (see FIG. 8A),  in embodiments,  the  larger surface  features 26L provide at  least a portion of the one or more higher surfaces 40 residing at the higher mean elevation 42.  In these embodiments, the larger surface features 26L project from the surrounding portion 32.    The surrounding portion 32 provides the one or more intermediate surfaces 43b that reside at  the intermediate elevation 45b.  In addition, some of the smaller surface features 26S are set into  the surrounding portion 32 and provide the one or more  lower surfaces 41 that reside at the  lower mean elevation 44.  The remaining smaller surface features 26S, those that are not set into  the surrounding portion 32, are set into the larger surface features 26L, and provide the one or  more  intermediate  surfaces  43a  residing  at  the  intermediate mean  elevation  45a.    Such  a  configuration can be the result of a two‐step etching process.  A first etching step etches away  the  substrate  12  to  form  the  surrounding  portion  32  and  the  larger  surface  features  26L  projecting therefrom.  A second etching step etches away the substrate 12 to form the smaller  surface features 26S set into the larger surface features 26L and the surrounding portion 32.    [0100] Note that, when the depth of substrate 12 removed during the second etching step  is  equal to the depth of substrate 12 that was removed during the first etching step, the textured  region 20 would only include three distinct elevations – the higher mean elevation 42, the lower  mean elevation 44, and a single intermediate mean elevation 45.  As applied to the example of  FIG. 8A, both the smaller surface features 26S set  into the  larger surface features 26L and the  surrounding portion 32 would provide the one or more intermediate surfaces 43 residing at the  single intermediate mean elevation 45.   [0101] As another example (see FIG. 8B), the larger surface features 26L provide at least a portion  of  the  one  or more  lower  surfaces  41  disposed  at  the  lower mean  elevation  44.    In  these  embodiments,  the  larger  surface  features  26L  are  set  into  the  surrounding portion  32.    The  surrounding portion 32 provides  the one or more  intermediate  surfaces 43b disposed at  the  intermediate mean elevation 45b.  In addition, some of the smaller surface features 26S project  from the  larger surface features 26L, and provide the one or more  intermediate surfaces 43a  disposed at the intermediate mean elevation 45a.  The remaining smaller surface features 26S,  those  that  do  not  project  from  the  from  the  larger  surface  features  26L,  project  from  the  surrounding portion 32, and provide the one or more higher surfaces 40 residing at the higher  mean elevation 42.  Again, the textured region 20 includes four distinct elevations 42, 45a, 45b,  and 44.  Such a configuration can be the result again of a two‐step etching process.  A first etching  step etches away the substrate 12 to form the larger surface features 26L set into the surrounding  portion 32.   A second etching step etches away  the substrate 12  to  form  the smaller surface  features 26S projecting  from  the  larger surface  features 26L and  the surrounding portion 32.   Note that, when the depth of substrate 12 removed during the second etching step is equal to  the depth of substrate 12 that was removed during the first etching step, the textured region 20  would only  include  three distinct elevations –  the higher mean elevation 42,  the  lower mean  elevation 44, and a single intermediate mean elevation 45.    [0102] In embodiments, in additional reference to FIGS. 9A‐10D, the textured region 20 includes  a first portion 58 and a second portion 60.  Either the first portion 58 or the second portion 60  provides the one or more higher surfaces 40 residing at the higher mean elevation 42.  The other  of the first portion 58 and the second portion 60 provides the one or more  lower surfaces 41  residing at the  lower mean elevation 44.   The textured region 20  in these embodiments thus  provide two distinct elevations 42, 44.   The first portion 58  is everything colored white  in the  examples of FIGS. 9A‐10B and the second portion 60 is everything colored black.  The opposite  scenario  is  just as valid – the first portion 58 could be everything that  is black and the second  portion 60 could be everything that is white.    [0103] As perhaps best  illustrated  in FIGS. 9B and 10B, elliptical perimeters 28 define the first  portion 58, except for overlapping portions 66 of the elliptical perimeters 28.  Two ellipses 28 in  a plane are said to overlap if their area intersection is non‐empty.  The overlapping portions 66  of  the elliptical perimeters 28 define,  in part,  the  second portion 60.   For example,  referring  specifically to FIG. 9B, elliptical perimeter 28A does not overlap any other elliptical perimeter 28.   Thus, everything that the elliptical perimeter 28A bounds is part of the first portion 58.  Moving  to perimeter 28B, perimeter 28B is entirely overlapped (i.e., surrounded) by perimeter 28C.  Thus,  everything  that  the  elliptical  perimeter  28B  bounds  is  part  of  the  second  portion  60.   Now  considering perimeter 28D, perimeter 28D only partially overlaps with perimeter 28C – part of  perimeter 28D is inside perimeter 28C and part of perimeter 28D is outside perimeter 28C.  The  part of perimeter 28D that is outside perimeter 28C is not an overlapping portion 66 and thus  forms part of the first portion 58.  However, the part of perimeter 28D that is inside perimeter  28C is an overlapping portion and thus forms part of the second portion 60.  Finally, looking at  perimeter 28C, perimeter 28C fully overlaps perimeter 28B, partially overlaps perimeter 28D, and  fully or partially overlaps several other perimeters.  Those portions of perimeter 28C, overlapping  other perimeters 28, form part of the second portion 60.  The remainder of perimeter 28C does  not overlap any other perimeter 28 and thus forms part of the first portion 58.    [0104] In  addition  to  the overlapping portions 66 of  the elliptical perimeters 28,  the  second  portion 60 of the textured region 20 further comprises any part of the textured region 20 that is  not the first portion 58.  More specifically, any parts 70 of the textured region 20 outside of any  of the elliptical perimeters 28 form part of the second portion 60.    [0105] Like  the embodiments previously discussed, each of  the elliptical perimeters 28 of  the  textured  region  20  is  randomly  distributed  and  randomly  oriented.    Each  of  the  elliptical  perimeters 28 comprises a  longest dimension 34.   The  longest dimensions 34 of  the elliptical  perimeters 28 are not all parallel to each other.  Thus, the longest dimensions 34 of the elliptical  perimeters 28 are not all commonly aligned.   The random distribution and orientation of  the  elliptical perimeters 28 and lack of pattern prevent or reduce the ability of the textured region  20 to generate Moiré interference fringes and other optical distortions upon reflecting ambient  light.  [0106] As mentioned, referring to FIGS. 10C and 10D, either the first portion 58 or the second  portion 60 provides the one or more higher surfaces 40 residing at the higher mean elevation 42,  while the other of the first portion 58 and the second portion 60 provides the one or more lower  surfaces 41 residing at the lower mean elevation 44.  In embodiments, such as illustrated at FIG.  10C, the first portion 58 provides the one or more higher surfaces 40 residing at the higher mean  elevation 42.  The second portion 60 provides the one or more lower surfaces 41 residing at the  lower mean  elevation  44.    Stated  another way,  in  these  embodiments,  the  first  portion  58  projects out toward the external environment 24 from the second portion 60.    [0107] In other embodiments, such as  illustrated at FIG. 10D, the first portion 58 provides the  one or more lower surfaces 41 residing at the lower mean elevation 42.  The second portion 60  provides the one or more higher surfaces 40 residing at the higher mean elevation 44.  Stated  another way,  in  these embodiments,  the second portion 60 projects out  toward  the external  environment 24 from the first portion 58.  [0108] The  higher  mean  elevation  44  differs  from  the  lower  mean  elevation  42,  in  these  embodiments with the first portion 58 and the second portion 60, by the distance 48, which again  is 0.05 µm, 0.10 µm, 0.15 µm, 0.20 µm, 0.25 µm, 0.30 µm, 0.35 µm, 0.40 µm, 0.45 µm, 0.50 µm,  0.55 µm, 0.60 µm, 0.65 µm, 0.70 µm or within any range defined by any two of those values (e.g.,  0.10 µm to 0.20 µm, 0.05 µm to 0.70 µm, 0.05 µm to 0.60 µm, and so on).  A one‐step etching  process can produce embodiments including the first portion 58 and the second portion 60 as  described.  [0109] In embodiments, the elliptical perimeters 28 are divided by size into two different subsets  – larger elliptical perimeters 28L and smaller elliptical perimeters 28S, which are smaller than the  larger elliptical perimeters 28L.  The larger elliptical perimeters 28L are larger than the smaller  elliptical  perimeters  28L  in  the  sense  that  the  longest  dimensions  34  of  the  larger  elliptical  perimeters 28L are part of a range of longest dimensions 34 that is longer than a range of longest  dimensions 34 of which the longest dimensions 34 of the smaller elliptical perimeters 28S are a  part.  For example, referring to FIG. 9B, the longest dimension 34 of perimeter 28C, belonging to  the larger elliptical perimeters 28L, is longer than the longest dimensions 34 of perimeters 28A,  28B, and 28D, which all belong to the smaller elliptical perimeters 28S.  The first portion 58 of  the textured region 20 having the first elevation 62 from the base‐plane 30 is bounded by (i) the  smaller  elliptical  perimeters  28S  that  do  not  overlap  or  intersect  with  the  larger  elliptical  perimeters 28L, (ii) portions of the smaller elliptical perimeters 28S outside of the first elliptical  perimeters 28S that partially overlap with the larger elliptical perimeters 28L, and (iii) portions of  the larger elliptical perimeters 28L that do not overlap with the smaller elliptical perimeters 28S.   The second portion 60 of the textured region 20 residing at the second elevation 64 is everything  else that is not the first portion 58 of the textured region 20.  [0110] As discussed above, incorporation of relatively large surface features 28 that are spaced  relatively far apart but with a fill‐factor of about 50% can force intensity of reflected light to peak  at  about  0.3  degrees  while  maximizing  interferometric  suppression  of  specular  reflection.   However, the same result can be achieved if relatively small surface features 26 of two size ranges  are utilized and the difference between the two size ranges is relatively small.    [0111] In embodiments, as  illustrated at FIGS. 9A and 9B, at  least some of the  larger elliptical  perimeters 28L entirely encompass more than one of the smaller elliptical perimeters 28S.  Note  that in some embodiments, such as that illustrated at FIG. 6, at least some of the larger elliptical  perimeters 28L encompass more than one of the smaller elliptical perimeters 28S but without  any of the larger elliptical perimeters 28S only partially overlapping any of the smaller elliptical  perimeters 28S.   The elimination of smaller elliptical perimeters 28S  that would only partially  overlap the larger elliptical perimeter s8L is thought to reduce large angle scattering of reflected  light.    Large  angle  scattering  can  increase  haze.    In  addition,  the  lithography  masks  that  incorporate the designs that permit etching of such a textured region 20 have a resolution limit  – too small a structure, such as where a small elliptical perimeter 28S only partially overlaps a  larger elliptical perimeter 28L, can cause aliasing if sampled with insufficient resolution.    [0112] In embodiments, a fill‐fraction of the larger elliptical perimeters 28L is within a range of  40% to 60%, while a fill‐fraction of the smaller elliptical perimeters 28S is within a range of 10%  to 30%.   The  textured  region 20 occupies an area 72.   The  fill‐fraction of  the  larger elliptical  perimeters 28L here is the percentage of the area 72 encompassed by all of the larger elliptical  perimeters 28L.  The fill‐fraction of the smaller elliptical perimeters 28S here is the percentage of  the  area  72  encompassed  by  all  of  smaller  elliptical  perimeters  28S.    The  smaller  elliptical  perimeters 28S having a lower fill‐fraction limits the impact of the smaller elliptical perimeters  28S on the scattering spectrum of the overall design of the textured region 20.    [0113] In embodiments (see, e.g., FIG. 3), the textured region 20 further includes one or more  sections 80 that have secondary surface features 82.  The secondary surface features 82 impart  a surface roughness to the one or more sections 80 of the textured region 20.   The  increased  surface roughness imparts surface scattering to the textured region 20, which generally lowers  pixel power deviation and distinctness of image.  The surface roughness imparted is 5 nm, 10 nm,  15 nm, 20 nm, 25 nm, 30 nm, 35 nm, 40 nm, 45 nm, 50 nm, 55 nm, 60 nm, 65 nm, 70 nm, 80 nm,  90 nm, or 100 nm or within any range bounded by any two of those values (e.g., 5 nm to 100 nm,  and so on).  As used herein, surface roughness (Ra) is measured with an atomic force microscope,  such as an atomic force microscope controlled by a NanoNavi control station distributed by Seiko  Instruments  Inc. (Chiba, Japan), with a scan size of 5 µm by 5 µm.   Surface roughness (Ra), as  opposed to other types of surface roughness values such as Rq, is the arithmetical mean of the  absolute values of the deviations from a mean line of the measured roughness profile.    [0114] In embodiments, the one or more sections 80 that include the secondary surface features  50 include the one or more higher surfaces 40, the one or more lower surfaces 41, and if present,  the  one  or more  intermediate  surfaces  43a,  43b.    In  embodiments,  the  secondary  surface  features 82 are disposed on  the  surface  features 26 but not  the  surrounding portion 32.    In  embodiments, the secondary surface features 82 are disposed on the surrounding portion 32 but  not the surface features 26.  In embodiments, the secondary surface features 82 are disposed on  both the surrounding portion 32 and the surface features 26.  In embodiments, the secondary  surface features 82 are disposed on the first portion 58 and not the second portion 60, or vise‐ versa.  In embodiments, the secondary surface features 82 are disposed on the first portion 58  and  the  second portion 60.    In embodiments,  the one or more  sections 80  that  includes  the  secondary  surface  features  82  is  coextensive with  the  textured  region  20 meaning  that  the  secondary surface features 82 are disposed throughout the entirety of the textured region 20.  In  embodiments,  the  surface  roughness  (Ra)  imparted by  the  second  surface  features 82 at  the  surface features 26 is less than the surface roughness at the surrounding portion 32.  [0115] In embodiments, the substrate 12 includes a glass substrate or a glass‐ceramic substrate.   In embodiments, the substrate 12 is a multi‐component glass composition having about 40 mol  % to 80 mol % silica and a balance of one or more other constituents, e.g., alumina, calcium oxide,  sodium oxide, boron oxide, etc.  In some implementations, the bulk composition of the substrate  12  is  selected  from  the  group  consisting  of  aluminosilicate  glass,  a  borosilicate  glass,  and  a  phosphosilicate glass.    In other  implementations,  the bulk composition of  the substrate 12  is  selected from the group consisting of aluminosilicate glass, a borosilicate glass, a phosphosilicate  glass, a soda lime glass, an alkali aluminosilicate glass, and an alkali aluminoborosilicate glass.  In  further implementations, the substrate 12 is a glass‐based substrate, including, but not limited  to, glass‐ceramic materials that comprise a glass component at about 90% or greater by weight  and a ceramic component.  In other implementations of the display article 10, the substrate 12  can  be  a  polymer  material,  with  durability  and  mechanical  properties  suitable  for  the  development and retention of the textured region 20.    [0116] In  embodiments,  the  substrate  12  has  a  bulk  composition  that  comprises  an  alkali  aluminosilicate  glass  that  comprises  alumina,  at  least  one  alkali  metal  and,  in  some  embodiments, greater than 50 mol % SiO2, in other embodiments, at least 58 mol % SiO2, and in  still other embodiments, at least 60 mol % SiO2, wherein the ratio (Al2O3 (mol%) + B2O3 (mol%))  / ∑ alkali metal modifiers (mol%) > 1, where the modifiers are alkali metal oxides.  This glass, in  particular embodiments, comprises, consists essentially of, or consists of: about 58 mol %  to  about 72 mol % SiO2; about 9 mol % to about 17 mol % Al2O3; about 2 mol % to about 12 mol %  B2O3; about 8 mol % to about 16 mol % Na2O; and 0 mol % to about 4 mol % K2O, wherein the  ratio (Al2O3 (mol%) + B2O3 (mol%)) / ∑ alkali metal modifiers (mol%) > 1, where the modifiers are  alkali metal oxides.  [0117] In  embodiments,  the  substrate  12  has  a  bulk  composition  that  comprises  an  alkali  aluminosilicate glass comprising, consisting essentially of, or consisting of: about 61 mol % to  about 75 mol % SiO2; about 7 mol % to about 15 mol % Al2O3; 0 mol % to about 12 mol % B2O3;  about 9 mol % to about 21 mol % Na2O; 0 mol % to about 4 mol % K2O; 0 mol % to about 7 mol  % MgO; and 0 mol % to about 3 mol % CaO.  [0118] In  embodiments,  the  substrate  12  has  a  bulk  composition  that  comprises  an  alkali  aluminosilicate glass comprising, consisting essentially of, or consisting of: about 60 mol % to  about 70 mol % SiO2; about 6 mol % to about 14 mol % Al2O3; 0 mol % to about 15 mol % B2O3; 0  mol % to about 15 mol % Li2O; 0 mol % to about 20 mol % Na2O; 0 mol % to about 10 mol % K2O;  0 mol % to about 8 mol % MgO; 0 mol % to about 10 mol % CaO; 0 mol % to about 5 mol % ZrO2;  0 mol % to about 1 mol % SnO2; 0 mol % to about 1 mol % CeO2; less than about 50 ppm As2O3;  and  less  than about 50 ppm Sb2O3; wherein 12 mol %≦Li2O+Na2O+K2O≦20 mol % and 0 mol  %≦MgO+Ca≦10 mol %.  [0119] In  embodiments,  the  substrate  12  has  a  bulk  composition  that  comprises  an  alkali  aluminosilicate glass comprising, consisting essentially of, or consisting of: about 64 mol % to  about 68 mol % SiO2; about 12 mol % to about 16 mol % Na2O; about 8 mol % to about 12 mol %  Al2O3; 0 mol % to about 3 mol % B2O3; about 2 mol % to about 5 mol % K2O; about 4 mol % to  about 6 mol % MgO; and 0 mol % to about 5 mol % CaO, wherein: 66 mol %≦SiO2+B2O3+CaO≦69  mol  %;  Na2O+K2O+B2O3+MgO+CaO+SrO>10  mol  %;  5  mol  %≦MgO+CaO+SrO≦8  mol  %;  (Na2O+B2O3)—Al2O3≦2 mol %; 2 mol %≦Na2O—Al2O3≦6 mol %; and 4 mol %≦(Na2O+K2O)— Al2O3≦10 mol %.  [0120] In embodiments, the substrate 12 has a bulk composition that comprises SiO2, Al2O3, P2O5,  and at least one alkali metal oxide (R2O), wherein 0.75>[(P2O(mol %)+R2O (mol %))/M2O(mol  %)]≦1.2, where M2O3═Al2O+B2O3.    In embodiments,  [(P2O(mol %)+R2O  (mol %))/M2O(mol  %)]=1 and, in embodiments, the glass does not include B2Oand M2O3═Al2O3.  The substrate 12  comprises, in embodiments: about 40 to about 70 mol % SiO2; 0 to about 28 mol % B2O3; about  0 to about 28 mol % Al2O3; about 1 to about 14 mol % P2O5; and about 12 to about 16 mol % R2O.   In some embodiments, the glass substrate comprises: about 40  to about 64 mol % SiO2; 0  to  about 8 mol % B2O3; about 16 to about 28 mol % Al2O3; about 2 to about 12 mol % P2O5; and  about 12 to about 16 mol % R2O.  The substrate 12 may further comprise at least one alkaline  earth metal oxide such as, but not limited to, MgO or CaO.  [0121] In some embodiments, the substrate 12 has a bulk composition that is substantially free  of lithium; i.e., the glass comprises less than 1 mol % Li2O and, in other embodiments, less than  0.1 mol % Li2O and, in other embodiments, 0.01 mol % Li2O, and in still other embodiments, 0  mol % Li2O.  In some embodiments, such glasses are free of at least one of arsenic, antimony, and  barium; i.e., the glass comprises less than 1 mol % and, in other embodiments, less than 0.1 mol  %, and in still other embodiments, 0 mol % of As2O3, Sb2O3, and/or BaO.  [0122] In  embodiments,  the  substrate  12  has  a  bulk  composition  that  comprises,  consists  essentially of or  consists of a  glass  composition,  such as Corning® Eagle XG® glass, Corning®  Gorilla® glass, Corning® Gorilla® Glass 2, Corning® Gorilla® Glass 3, Corning® Gorilla® Glass 4, or  Corning® Gorilla® Glass 5.  [0123] In  embodiments,  the  substrate  12  has  an  ion‐exchangeable  glass  composition  that  is  strengthened by either chemical or thermal means that are known in the art.  In embodiments,  the substrate 12 is chemically strengthened by ion exchange.  In that process, metal ions at or  near the primary surface 18 of the substrate 12 are exchanged for larger metal ions having the  same valence as the metal  ions  in the substrate 12.   The exchange  is generally carried out by  contacting the substrate 12 with an ion exchange medium, such as, for example, a molten salt  bath that contains the  larger metal  ions.   The metal  ions are typically monovalent metal  ions,  such as, for example, alkali metal ions.  In one non‐limiting example, chemical strengthening of a  substrate  12  that  contains  sodium  ions  by  ion  exchange  is  accomplished  by  immersing  the  substrate 12  in an  ion exchange bath comprising a molten potassium salt, such as potassium  nitrate  (KNO3) or the  like.    In one particular embodiment, the  ions  in the surface  layer of the  substrate 12 contiguous with the primary surface 18 and the larger ions are monovalent alkali  metal  cations,  such  as  Li+ (when  present  in  the  glass),  Na+,  K+,  Rb+,  and  Cs+.    Alternatively,  monovalent cations in the surface layer of the substrate 12 may be replaced with monovalent  cations other than alkali metal cations, such as Ag+ or the like.    [0124] In such embodiments, the replacement of small metal ions by larger metal ions in the ion  exchange process creates a compressive stress region in the substrate 12 that extends from the  primary surface 18 to a depth  (referred to as the “depth of  layer”) that  is under compressive  stress.  This compressive stress of the substrate 12 is balanced by a tensile stress (also referred  to  as  “central  tension”) within  the  interior  of  the  substrate  12.    In  some  embodiments,  the  primary surface 18 of the substrate 12 described herein, when strengthened by  ion exchange,  has a compressive stress of at least 350 MPa, and the region under compressive stress extends  to a depth, i.e., depth of layer, of at least 15 μm below the primary surface 18 into the thickness  22.    [0125] Ion exchange processes are typically carried out by immersing the substrate 12 in a molten  salt bath containing the larger ions to be exchanged with the smaller ions in the glass.  It will be  appreciated by those skilled in the art that parameters for the ion exchange process, including,  but  not  limited  to,  bath  composition  and  temperature,  immersion  time,  the  number  of  immersions of the glass in a salt bath (or baths), use of multiple salt baths, additional steps such  as annealing, washing, and the like, are generally determined by the composition of the glass and  the desired depth of  layer and compressive stress of the glass as a result of the strengthening  operation.  By way of example, ion exchange of alkali metal‐containing glasses may be achieved  by immersion in at least one molten bath containing a salt, such as, but not limited to, nitrates,  sulfates, and chlorides, of the larger alkali metal ion.  The temperature of the molten salt bath  typically is in a range from about 380°C up to about 450°C, while immersion times range from  about 15 minutes up to about 16 hours.  However, temperatures and immersion times different  from those described above may also be used.  Such ion exchange treatments, when employed  with a substrate 12 having an alkali aluminosilicate glass composition, result  in a compressive  stress region having a depth (depth of layer) ranging from about 10 μm up to at least 50 μm, with  a compressive stress ranging from about 200 MPa up to about 800 MPa, and a central tension of  less than about 100 MPa.  [0126] As the etching processes that can be employed to create the textured region 20 of the  substrate  12  can  remove  alkali metal  ions  from  the  substrate  12  that would  otherwise  be  replaced by a  larger alkali metal  ion during an  ion exchange process, a preference exists  for  developing  the  compressive  stress  region  in  the  display  article  10  after  the  formation  and  development of the textured region 20.  [0127] In embodiments,  the display  article 10 exhibits  a pixel power deviation  (“PPD”).   The  details of a measurement system and  image processing calculation used to obtain PPD values  described  in  U.S.  Patent  No.  9,411,180  entitled  “Apparatus  and  Method  for  Determining  Sparkle,” and the salient portions of which are related to PPD measurements are incorporated  by  reference herein  in  their entirety.   Further, unless otherwise noted,  the SMS‐1000 system  (Display‐Messtechnik & Systeme GmbH & Co. KG) is employed to generate and evaluate the PPD  measurements of  this disclosure.   The PPD measurement system  includes: a pixelated source  comprising a plurality of pixels (e.g., a Lenovo Z50 140 ppi laptop), wherein each of the plurality  of pixels has referenced indices i and j; and an imaging system optically disposed along an optical  path originating from the pixelated source.   The  imaging system comprises: an  imaging device  disposed  along  the  optical  path  and  having  a  pixelated  sensitive  area  comprising  a  second  plurality of pixels, wherein each of the second plurality of pixels is referenced with indices m and  n; and a diaphragm disposed on the optical path between the pixelated source and the imaging  device, wherein the diaphragm has an adjustable collection angle for an image originating in the  pixelated source.  The image processing calculation includes: acquiring a pixelated image of the  transparent sample, the pixelated image comprising a plurality of pixels; determining boundaries  between adjacent pixels in the pixelated image; integrating within the boundaries to obtain an  integrated  energy  for  each  source  pixel  in  the  pixelated  image;  and  calculating  a  standard  deviation of the integrated energy for each source pixel, wherein the standard deviation is the  power per pixel dispersion.  As used herein, all PPD values, attributes and limits are calculated  and evaluated with a test set‐up employing a display device having a pixel density of 140 pixels  per inch (PPI).  In embodiments, the display article 10 exhibits a PPD of 0.8%, 0.9%, 1.0%, 1.1%,  1.2%, 1.3%, 1.4%, 1.5%, 1.6%, 1.7%, 1.8%, 1.9%, 2.0%, 2.25%, 2.5%, 2.75%, 3.0%, 3.25%, 3.5%,  3.75%, 4.0%, 4.25%, 4.5%, 4.75%, 5.0%, 5.25%, 5.5%, 5.75%, 6.0%, or within any range bounded  by any  two of  those values  (e.g., 0.8%  to 2.0%, 0.9%  to 2.25%, 2.0%  to 6.0%, and so on).    In  embodiments, the display article 10 exhibits a PPD of less than 2.0%.  [0128] In  embodiments,  the  substrate  12  exhibits  a  distinctness‐of‐image  (“DOI”).    As  used  herein, “DOI” is equal to 100*(RS‐ R0.3˚)/RS, where RS is the first surface specular reflectance flux  measured from incident light (at 20˚ from normal) directed onto the textured region 20, and R0.3  is the reflectance flux measured from the same incident light at 0.3˚ from the specular reflectance  flux, RS. The sample  is optically coupled to flat black glass with  index‐matching oil on the back  side  to  eliminate  second‐surface  reflections.  Unless  otherwise  noted,  the  DOI  values  and  measurements reported in this disclosure are obtained according to the ASTM D5767‐18, entitled  “Standard Test Method for Instrumental Measurement of Distinctness‐of‐Image (DOI) Gloss of  Coated Surfaces using a Rhopoint IQ Gloss Haze & DOI Meter” (Rhopoint Instruments Ltd.).  In  embodiments, the substrate 12 exhibits a distinctness‐of‐image (“DOI”) of 15%, 20%, 25%, 30%,  35%, 40%, 45%, 50%, 55%, 60%, 65%, 70%, 75%, 80%, 85%, 90%, 95%, 96%, or within any range  bounded by any two of those values (e.g., 20% to 40%, 10% to 96%, 35% to 60%, and so on).  [0129] In embodiments, the substrate 12 exhibits a transmission haze.  As used herein, the term  “transmission haze” refers to the percentage of transmitted light scattered outside an angular  cone of about ±2.5° in accordance with ASTM D1003, entitled “Standard Test Method for Haze  and Luminous Transmittance of Transparent Plastics,” the contents of which are incorporated by  reference herein in their entirety.  Note that although the title of ASTM D1003 refers to plastics,  the standard has been applied to substrates comprising a glass material as well.  For an optically  smooth surface, transmission haze is generally close to zero.  In embodiments, the substrate 12  exhibits a transmission haze of 0.3%, 0.4%, 0.5%, 0.6%, 0.7%, 0.8%, 0.9%. 1.0%, 1.5%, 2%, 3%,  4%, 5%, 6%, 7%, 8%, 9%, 10%, 12.5%, 15%, or within any range bounded by any two of those  values (e.g., 0.3% to 15%, 0.9% to 1.0%, and so on).  [0130] As used herein, “corrected color  shift”  is a measure of  the amount of  reflection color  artifacts that the substrate 12 generates while reflecting ambient light from the textured region  20.  Referring now to FIG. 11, to determine the corrected color shift, the substrate 12 with the  textured region 20 to be tested is placed over the display 16, with oil 74 disposed between the  substrate 12 and the display 16 to suppress the light reflections of the surface of the substrate  12  facing  the display 16 and  the  surface of  the display 16.   The oil 74 has a  refractive  index  matching a refractive index of the substrate 12.  Room lights 76 emit light as they normally would.   A white light source 78 illuminates the substrate 12.  The textured region 20 of the substrate 12  faces toward the white light source 78.  Since the reflection color artifacts of the substrate 12 are  much more easily observed and are more accurately measured when the display 16 is turned off,  the display 16 is switched‐off when color separation measurements are conducted.  The textured  region 20 reflects a portion of the  light that the white  light source 78 emits as a scatted  light  pattern.  A color CCD camera 80 captures an image of the scattered light pattern.  The image is  then digitally processed, and chromaticity coefficients (Cx and  Cy ) along a selected straight line  through the locations with maximum  Cx  (or  Cy ) and minimum  Cx  (or  Cy ) are calculated.  Here,  chromaticity coefficients  Cx  and  Cy  are defined as  Cx = PR / (PR +PG +PB ) and  Cy = PG / (PR+ PG + PB)  respectively, in which PR, P G , and PB are the powers (or intensities) of red, green, and  blue  light, respectively, at a  location of the scattered  light pattern detected by the color CCD  camera 80.  Chromaticity  is an objective specification of the quality of a color regardless of  its  luminance.  The color shifts along the selected line, Δ Cx and Δ Cy , are calculated as the difference  between  the maximum  Cx   and  the minimum  Cx   for  Δ Cx ,  and  the  difference  between  the  maximum  Cy  and the minimum  Cy  for Δ Cy .  The color shifts Δ Cx and Δ Cy  are then corrected to  account for the fact that the visibility of color change that human eyes see is relative to not only  the  color  shifts  (Δ Cx and Δ Cy ) but  also  an  angle  separation 82 between  the  locations of  the  maximum  and minimum  Cx   (for Δ Cx )  and  the maximum  and minimum  Cy   (for Δ Cy ).   These  corrected colors shifts are defined as 
Figure imgf000036_0001
The  dθr  is reference angle separation arbitrarily set at  dθr = 0.84degrees .  This reference angle  is  chosen  from  the angle between  two adjacent measurement points of 455 point  color and  luminance measurement of a 300x110mm display viewed at 500mm distance.  The  dθx  and  dθy   are the angle separations in degree between the locations of maximum and minimum for  Cx and  Cy  respectively.   When the corrected color shifts Δ Cx _corrected and Δ Cy _corrected are each  less  than 0.3, it is assumed that human eyes cannot perceive any reflection color artifacts that the  substrate  12  is producing.    In  embodiments,  the  substrate  12  exhibits  corrected  color  shifts  Δ Cx _corrected and Δ Cy _corrected of 0.00, 0.01, 0.05, 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, or within any range  bounded by any two of those values (0.01 to 0.3, 0.05 to 1.0, and so on).  In embodiments, the  substrate 12 exhibits corrected color shifts Δ Cx _corrected and Δ Cy _corrected of less than 0.3, less  than 0.2, less than 0.1, or even 0.0.  [0131]  In embodiments, the substrate 12 exhibits a specular reflectance of 5%, 10%, 15%, 20%,  25%, 30%, 35%, 40, 45%, 50%, 55%, 60%, or 65%, or within any range bounded by any two of  those values (e.g., 5% to 65%, 5% to 30%, and so on).  In embodiments, the substrate 12 exhibits  a  specular  reflectance  that  is  less  than 30%,  less  than 25%,  less  than 20%, or  less  than 10%.   Specular reflectance here, noted as “c‐Rspec”  in the Examples that follow, refers to the value  obtained using a Rhopoint IQ goniophotometer, and are reported in gloss units (GU).  100 gloss  units is defined to be the specular reflection intensity from a highly polished piece of flat black  glass with refractive  index 1.567.   The values are  indicative of how much specular reflection  is  measured when the sample  is optically coupled with oil to a black glass of matching  index to  remove second‐surface reflections.    [0132] Referring now to FIG. 12, a method 100 of forming the textured region 20 of the substrate  12 of the display article 10 is herein described.  At a step 102, the method 100 includes generating  a random distribution of ellipses 104 within an area 106 of a plane 108.  [0133] At a step 110, the method 100 further includes preparing a lithography mask 112.  The  designof thelithographymask112matchestherandomdistributionofellipses104generated at  the step 102.  The lithography mask 112 has an area 114.  The area 114 matches the area 112 of  the plane 108 within which the ellipses 104 were randomly distributed.  The lithography mask  112 includes material 116 throughout the area 114.  The lithography mask 112 further includes  voids 118 through the material 116.  The random distribution of the ellipses 104 generated at the  step 102 define either (a) the material 116 throughout the area 114 or (b) the voids 118 through  the material 116.    In  the  illustration at FIG. 12,  the black portions outside of  the ellipses 104  represents the material 116 of the lithography mask 112, while the white portions inside of the  ellipses  104  are  the  voids  118  through  the material  116  of  the  lithography mask  112.    The  lithography mask 112  can be prepared  to have  the opposite  relationship –  the  inside of  the  ellipses 104 (e.g., the white in FIG. 12) can represent the material 116 of the lithography mask  112, while outside of  the ellipses 104  (e.g.,  the black  in FIG. 12) can  represent  the voids 118  through the material 116 of the lithography mask 112.  [0134] A workpiece 120 is prepared that incorporates the lithography mask 112.  The workpiece  120 includes the substrate 12, lithography ink 122 on the primary surface 18 of the substrate 12  at which the textured region 20 is desired to be formed, and the lithography mask 112 over the  lithography ink 122.     [0135] At a step 124, the method 100 further includes exposing the workpiece 120 to a curing  agent 126.  The curing agent 126 can cure the lithography ink 122.  The curing agent 126 can be  ultraviolet light, among other things.  The lithography mask 112 allows for selective curing of the  lithography ink 122.  The curing agent 126 transmits through the voids 118 in the material 116 of  the  lithography mask 112 to cure exposed portions of the  lithography  ink 122.   However, the  material 116 of the lithography mask 112 blocks non‐exposed portions of the lithography ink 122  from exposure to the curing agent 126.  Thus, the non‐exposed portions of the lithography ink  122 are not cured.  After curing, the lithography mask 112 and the non‐exposed portions of the  lithography ink 122 are removed from the substrate 12.  The exposed portions of the lithography  ink 122 remain on the substrate 12 in cured formed as an etching mask 128.    [0136] The random distribution of ellipses 104 generated at the step 102 defined the material  116 and the voids 118 through the material of the lithography mask 112, and thus, the etching  mask 128 on the substrate 12.  In other words, the etching mask 128 is either shaped to match  the inside of the ellipses 104, or shaped to match the outside of the ellipses 104 generated at the  step 102.  The black inside the ellipses 104 of the illustration at FIG. 12 pertaining to a step 130  represents the etching mask 128.  The white outside of the ellipses 104 is the primary surface 18  of the substrate 12.  The opposite scenario would have existed if the lithography mask 112 was  formed in the opposite manner.    [0137] At the step 130, the method 100 further  includes contacting the substrate 12 with the  etching mask 128 with an etchant 132.  The etchant 132 selectively etches the etching mask 128  because the etching mask 128 allows the etchant 132 to contact some portions of the primary  surface 18 of the substrate 12 and prevents the etchant 132 from contacting other portions of  the primary surface 18 of the substrate 12.   Depending on how the  lithography mask 112 was  formed, the etching mask 128 either (i) allows the etchant 132 to etch into the substrate 12 inside  the  ellipses  104  in  accordance with  the  random  generation  thereof  from  the  step  102  and  prevents the etchant 132 from etching  into the substrate 12 outside of the ellipses 104, or (ii)  prevents the etchant 132 from etching into the substrate 12 inside the ellipses 104 in accordance  with the random generation thereof from the step 102 and allows the etchant 132 to etch into  the substrate 12 outside of the ellipses 104.  Thereafter, the etching mask 128 is removed.  The  substrate  12  now  has  the  textured  region  20  on  the  primary  surface  18  thereof, with  the  topography of the textured region 20 matching the random distribution of ellipses 104 generated  at the step 102.  [0138] In embodiments, the method 100 further comprises repeating the steps 102, 110, 124,  130 so that the substrate 12 with the textured region 20 is etched again.  To elaborate, a random  distribution of second ellipses 104  (different  than  the random distribution of  the ellipses 104  from the initial step 102) is generated within an area 106 of a second plane 108.  These second  ellipses 104 can have a range of longest dimensions 34 that are different (e.g., smaller) than a  range of longest dimensions 34 of the ellipses 104 previously generated.  A second lithography  mask 112 is then prepared that incorporates the second ellipses 104 either as the material 116  or the voids 118 through the material 116.  A second workpiece 120 is prepared that includes the  substrate 12, new lithography ink 122 disposed on the textured region 20 of the substrate 12,  and  the second  lithography mask 112 disposed on  the new  lithography  ink 122.   The second  workpiece 120 is then exposed to a curing agent 126.  The curing agent 126 transmits through  the voids 118  through  the material 116 of  the second  lithography mask 112  to cure exposed  portions of the new lithography ink 122.  The material 116 of the second lithography mask 112  blocks non‐exposed portions of the new lithography ink 122 from exposure to the curing agent  126.   Thus,  the non‐exposed portions of  the new  lithography  ink 122 are not  cured and are  removed  along  with  the  second  lithography mask  112.    The  exposed  portions  of  the  new  lithography ink 122 remain on the substrate 12 as a second etching mask 128.  The substrate 12  with the second etching mask 128 is then contacted with an etchant 132.  Such two‐step etching  processes can form the textured region 20 with three or four elevations 50‐56 from the base‐ plane 30 as explained in connection with FIGS. 8A‐8C.  [0139] In embodiments, referring to FIG. 13, the step 102 of generating the random distribution  of the ellipses 104 includes first distributing points 134 randomly within the area 106 of the plane  108.  Each of the points 134 so randomly distributed is separated by a minimum distance 136.   The points 134 can be randomly distributed pursuant to a random distribution algorithm, such  as a Poisson disk distribution algorithm.  Other algorithms such as maxi‐min are possible as well.   However,  some distribution algorithms  such as maxi‐min  tend  to arrange  the points 134  too  hexagonally, which causes the resulting ellipses 104 to be very similar to one another in terms of  major and minor axis lengths and eccentricities. This can lead to color artifacts. The Poisson disk  distribution algorithm enforces the minimum distance 136 between the distributed points 134  but does not produce highly hexagonal arrangements.    [0140] More specifically, Poisson disk sampling inserts a first point 134 into the area 106.  Then  the algorithm  inserts a second point 134 within the area 106, placing the center at a random  point within  the area 106.    If  the placement of  the  second point 134  satisfies  the minimum  distance 136  from  the  first point 134,  then  the second point 134 stays  in  the area 106.   The  algorithm then repeats this process until no more such points 134 can be placed within the area  106 that satisfies the minimum distance 136.   The result  is a random distribution, but specific  placement, of the points 134.    [0141] The  maxi‐min  spacing  algorithm  is  so  named  because  it  attempts  to  maximize  the  minimum  nearest‐neighbor  distance  136  of  a  point  134  distribution.  Because  it  proceeds  iteratively, moving each point 134 to another place where it is further from any neighbors, the  algorithm usually does not achieve a perfect hexagonal lattice. It produces a random distribution  with a relatively high degree of mean hexagonality, often exceeding 90%.  [0142] After the points 134 are randomly distributed within the area 106 of the plane 108, the  points 134 are triangulated.  By triangulating the points 134, each point 134 is made a vertex of  a triangle 138.  A plurality of triangles 138 are thus formed, none of which overlap.  For example,  the points 134 can be triangulated via a Delaunay triangulation.  Other triangulation methods are  possible.   Some of those would  likely produce a  larger range of  longest dimensions 34 for the  surface features 26.    [0143] After the points 134 have been triangulated, an ellipse 104 is drawn inside each triangle  138  of the plurality of triangles 138, resulting in a plurality of triangles 138 in the area 106 of the  plane 108.  For example, each ellipse 104 can be a Steiner inellipse.  An inellipse is an ellipse 104  that  touches  the  three sides of  the  triangle 138  in which  the ellipse 104  is drawn.   A Steiner  inellipse is an ellipse 104 that touches the triangle 138 at the midpoint of the sides of the triangle  138 and provides the maximum area for the ellipse 104 (a Steiner  inellipse occupies  ^√3/9 or  about 60.46% of the area of the triangle 138, regardless of the triangle dimensions).  The center  of  Steiner  inellipse  is  the  centroid  (i.e.,  the  point where  the  three medians  of  the  triangle  coincide) of the triangle 138 within which it is drawn.  [0144] After the plurality of ellipses 104 have been drawn, the points 134 and the triangles 138  are removed from the area 106 of the plane 108.  Only the ellipses 104 that were drawn in the  triangles 138 remain on the area 106 of the plane 108.  In embodiments, the sizes of the ellipses  104 are scaled down so that the fill‐fraction of the ellipses 104 in the area 106 of the plane 108  is within a range of 45% to 55%.  The fill‐fraction here is the percentage of the area 106 of the  plane 108 that the ellipses 104 occupy.  As mentioned, if Steiner inellipses are drawn, then the  fill‐factor of the ellipses 104 before scaling down is about 60.46%.  In embodiments, the sizes of  the ellipses 104 are scaled down so that the fill‐fraction of the ellipses 104 in the area 106 of the  plane 108 is 50%.  Each ellipse 104 has a longest dimension 140, and to scale down the ellipses  104, the longest dimension 140 of each of the ellipses 104 can be decreased by a percentage that  is identical, with the centers of the ellipses 104 remaining in the same position.  [0145] Referring now to FIG. 14, another method 200 of forming the textured region 20 of the  substrate 12 of the display article 10 is herein disclosed.  At a step 202, the method 200 includes  generating a random distribution of first ellipses 204 within a first area 206.  Similarly, at a step  208, the method 200 further  includes generating a random distribution of second ellipses 210  within a second area 212.  Longest dimensions 214 of first ellipses 204 are longer than longest  dimensions 216 of the second ellipses 210.  [0146] The steps 202, 208 thus are generally the same as the step 102 of the method 100 and  can be executed in the same manner.  In other words, and referring back to FIG. 13, the steps  202,  208  of  generating  the  random  distribution  of  the  first  ellipses  204  and  generating  the  random distribution of the second ellipses 210 both separately include (i) distributing points 134  randomly within an area 106 of a 108, each of the points 134 separated by a minimum distance  136; (ii) triangulating the points 134 so that each point is made a vertices of a triangle 138 thus  forming a plurality of triangles 138, and none of the triangles 138 overlap; (iii) drawing an ellipse  104 inside each triangle 138 of the plurality of triangles 138; and removing the points 134 and  the triangles 138 so that only the ellipses 104 that were drawn in the triangles 138 remain on the  area 106 of the plane 108.    [0147] With  the  method  200,  there  is  the  further  caveat  that  the  minimum  distance  136  separating each of the points 134 of the plane 108 for the random distribution of the first ellipses  204 is greater than the minimum distance 136 separating each of the points 134 of the plane 108  for the random distribution of the second ellipses 210.  The longer minimum distance 136 for the  points 134 from which the first ellipses 204 are generated results in the longest dimensions 140  of the first ellipses 204 being longer than the longest dimensions 140 of the second ellipses 210.   In embodiments, the minimum distance separating each of the points 134 of the plane 108 for  the random distribution of the first ellipses 204 is 15 µm, 16 µm, 17 µm, 18 µm, 19 µm, 20 µm,  30 µm, 40 µm, 50 µm, 60 µm, 70 µm, 80 µm, 90 µm, 100 µm, 110 µm, 120 µm, 130 µm, 140 µm,  or within a range bounded by any two of those values (e.g., 100 µm to 120 µm, 80 µm to 130 µm,  and so on).  In embodiments, the minimum distance 136 separating each of the points 134 of the  plane 108 for the random distribution of the second ellipses 210 is within 13 µm, 14 µm, 15 µm,  16 µm, 17 µm, 18 µm, 19 µm, 20 µm, 25 µm, 30 µm, 35 µm, 40 µm, or within any range bounded  by any two of those values (e.g., 20 µm to 30 µm, 15 µm to 40 µm and so on).    [0148] In embodiments,  the minimum distance 136  separating each of  the points 134 of  the  plane 108 for the random distribution of the first ellipses 204 is less than or equal 20 µm.  In these  embodiments, the minimum distance 136 separating each of the points 134 of the plane 108 for  the random distribution of the second ellipses 210 is less than or equal 18 µm.  The minimum  distance 136 separating each of the points 134 of the plane 108 for the random distribution of  the first ellipses 204 differs from the minimum distance 136 separating each of the points 134 of  the plane 108 for the random distribution of the second ellipses 210 by a value within a range of  1 µm to 3 µm.  [0149] At a step 218, the method 200 further includes forming a new area 220 that superimposes  the first ellipses 204 of the first area 206 and the second ellipses 210 of the second area 212.  The  new area 220 is the combination of the first ellipses 204 and the second ellipses 210 within the  same new area 220.  The new area 220 includes free portions 222 of the first ellipses 204 and the  second ellipses 210 that do not overlap.   The free portions 222 would  include any of the first  ellipses 204 and the second ellipses 210 that do not overlap at all, and the portions of the first  ellipses 204 and  the second ellipses 210  that are not overlapped.   The new area 220  further  includes overlapping portions 224 of  the  first ellipses 204  and  the  second ellipses 210.   The  overlapping portions 224 are where the first ellipses 204 and the second ellipses 210 occupy the  same space of the new area 220.  Finally, the new area 220 further includes empty portions 226  where neither the first ellipses 204 nor the second ellipses 210 are present.  The empty portions  226 are outside of the first ellipses 204 and outside of the second ellipses 210.   [0150] In embodiments, the method 200 further includes removing from the new area 220 any  of the second ellipses 210 that the first ellipses 204 partially but not fully overlap.  Such a new  area 220 would appear like FIG. 6, where all of the smaller ellipses are either fully inside the larger  ellipses or fully outside of the larger ellipses.  None of the smaller ellipses are partially inside and  partially outside of the larger ellipses.  Those smaller ellipses are removed in these embodiments.    [0151] At a step 228, the method 200 further includes preparing a lithography mask 112.  The  lithography mask 112  includes an area 114, material 116 within  the area 114, and voids 118  through the material 116.  The material 116 within the area 114 is defined by (i.e., matches) the  either (i) the free portions 222 of the first ellipses 204 and the second ellipses 210 that do not  overlap or (ii) a combination of the overlapping portions 224 and the empty portions 226.  The  voids 118 through the material 116 are defined by (i.e., match) whichever of (i) and (ii) from the  previous sentence does not define the material 116 within the 114.  The lithography mask 112 is  then  incorporated  into  a workpiece  120  that  includes  the  substrate  12,  lithography  ink  122  disposed on the substrate 12, and the lithography mask 112 disposed on the lithography ink 122.    [0152] At a step 230, the method 200 further includes exposing the workpiece 120 to a curing  agent  126.    The  curing  agent  126,  such  as ultraviolet  light,  transmits  through  the  voids  118  through the material 116 of the lithography mask 112 to cure exposed portions of the lithography  ink 122.    The material 116 of  the  lithography mask 112 blocks non‐exposed portions of  the  lithography ink 122 from exposure to the curing agent 126 and thus the non‐exposed portions  are not cured.   The non‐exposed portions are removed  from  the substrate 12 along with  the  lithography mask 112.  The exposed portions of the lithography ink 122 remain on the substrate  12 as an etching mask 128.    [0153] At  a  step 232,  the method 200  further  includes  contacting  the  substrate 12 with  the  etching mask 128 with an etchant 132.  The etchant 132 selectively etches the etching mask 128.   Depending on how the lithographic mask 112 was formed, the etching mask 128 could allow the  etchant 132 to etch into the substrate 12 the free portions 222 of the first ellipses 204 and the  second ellipses 210  that do not overlap, and prevent  the etchant 132  from etching  into  the  substrate  12  the  combination  of  the  overlapping  portions  224  and  the  empty  portions  226.   Alternatively, the etching mask 128 could allow the etchant 132 to etch into the substrate 12 the  combination  of  the  overlapping  portions  224  and  the  empty  portions  226,  and  prevent  the  etchant 132 from etching into the substrate 12 the free portions 222 of the first ellipses 204 and  the second ellipses 210 that do not overlap.  In any event, after the etching step 232, the etching  mask 128 is removed.  The substrate 12 has the textured region 20 on the primary surface 18.  [0154]    In  embodiments,  the  method  100  and  method  200  each  include,  after  the  aforementioned etching steps have been performed, forming the secondary surface features 82  into  the one or more  sections 80 of  the  textured  region 20.   This  step  increases  the  surface  roughness  (Ra)  at  the  one  or more  sections  34  to within  the  range  of  5  nm  to  100  nm.    In  embodiments, the step of forming the secondary surface features 82 into one or more sections  80 of the textured region 20 comprises contacting the one or more sections 80 of the textured  region 20 of the substrate 12 with another etchant.  This etchant is different than the etchant  132.    In  embodiments,  this  etchant  includes  acetic  acid  and  ammonium  fluoride.    In  embodiments, the etchant includes (in wt%): 85 to 98 acetic acid, 0.5 to 7.5 ammonium fluoride,  and 0 to 11 water.  The water can be deionized water.  In embodiments, the etchant contacts the  one  or more  sections  80  for  a  time  period within  a  range  of  15  seconds  to  5 minutes.  In  embodiments,  the etchant contacts  the one or more sections 80 while  the etching mask 128  remains on the substrate 12.  After the period of time has concluded the substrate 12 is rinsed  with deionized water and dried.   The etching steps 130, 232 and the etching step to form the  secondary surface features 82 can be conducted at room temperature.  [0155] EXAMPLES  [0156] Comparative Example 1A and Example 1B –  For Comparative Example 1A, a one‐step  etching process was utilized to generate a textured region of a substrate with surface features  having  a  circular  rather  than  elliptical  perimeter.    The  surface  features were  still  randomly  distributed but had a constant diameter and the perimeters were circular.  This is illustrated at  FIG. 15A.  The textured surface was illuminated.  An image of the reflected light from the textured  region was captured.   The  image  is produced at FIG. 15B.   The  intensity of  the  light  that  the  textured  surface  reflected as a  function of  scattering angle was measured by using  the TSW  CASITM Scatterometer made by the Scatter Works Inc (for light having a wavelength of 550 nm).   A graph of the measurements is reproduced at FIG. 15C.    [0157] As the image of FIG. 15B reveals, surface features having a circular perimeter, although  randomly  distributed,  generate  color  artifacts when  reflecting  light.    Color  labels  have  been  added to the FIG. 15B,  in case the graph  is reproduced  in black and white.   The reader should  understand that the reflected light resembles circular rainbows that repeat moving outward from  the center.  The circular perimeter of the surface features causes the circular color rings.  [0158] The graph of FIG. 15C also illustrates that aspect.  The graph is for the specific wavelength  of 550 nm, which appears greenish yellow.  Intensity of the reflected light at this wavelength is  shown to peak several times as a function of scattering angle.  The scattering angle at which peak  intensity occurs  is additionally a function of wavelength.   Thus, the scattering angles at which  intensity peaks occur for the wavelength of 550 nm will be different than the scattering angles at  which intensity peaks occur for other wavelengths.  The wavelength dependency increases as the  scattering angle increases as well.  This accounts for the color splitting being more obvious in the  image of FIG. 15B moving away from the center of the  image.   Scattering angle  increases as a  function of increasing position away from the center of the image.  [0159] For Example 1B, a one‐step etching process was utilized to generate a textured region of  a substrate with surface features having an elliptical rather than a circular perimeter.  The surface  features were randomly distributed.   This  is  illustrated at FIG. 16A.   The textured surface was  illuminated.  An image of the reflected light from the textured region was captured.  The image  is produced at FIG. 16B.  The intensity of the light that the textured surface reflected as a function  of scattering angle was measured  (for  light having a wavelength of 550 nm).   A graph of  the  measurements is reproduced at FIG. 16C.    [0160] As the image of FIG. 16B reveals, the elliptical surface features of Example 1A generate  much  less  color  artifacts  upon  reflecting  ambient  light  than  the  circular  surface  features  of  Example 1B.  The image of FIG. 16B lacks any noticeable color‐separated rings.   [0161] As the graph of FIG. 16C reveals, the major peak of reflected  light  intensity occurs at a  lower scattering angle (i.e., closer to the center of image of FIG. 16B) than compared to FIG. 15C,  and the peak  is narrower than the peak  in FIG. 15C.   Further, the graph of FIG. 16C  lacks the  second and third peaks as the scattering angle increases.  Thus, the elliptical surface features of  Example 1B do not generate the same color‐separated rings moving outward from the center of  the reflection as the circular surface features of Comparative Example 1A do.  When the various  wavelengths of visible light all produce an intensity peak at approximately the same scattering  angle, the reflected light is white (the combination of all the wavelengths) and does not appear  separated by color.    [0162] Example 2A and Comparative Example 2B – For Example 2A, and in reference to FIGS. 10A,  10B, 17A, and 17B,  first  random distribution of points  in a  first area was generated having a  minimum point‐to‐point distance of 13 µm.  The points were triangulated and ellipses drawn and  scaled down according to the process discussed above.  A second random distribution of points  in a second area was generated, but this time having a minimum point‐to‐point distance of 15  µm.  The points were again triangulated and ellipses drawn and scaled down.  The two areas were  superimposed into one area.  Using a computer model, the superimposed area was assumed to  be a textured region with two elevations.  The first elevation, illustrated in white, is where the  superimposed ellipses do not overlap.   The second elevation,  illustrated  in black,  is where no  ellipses are present and where the superimposed ellipses overlap.    [0163] The intensity of light (having the 550 nm wavelength) reflecting off the textured region as  a  function of the angle at which the  light  is scattered was modeled.   A graph of the modeled  results is reproduced at FIG. 17A.  The peak intensity was at 0.3 degrees, which is desirable to  tightly pack the peak intensities of reflected wavelengths to avoid color separation.  The graph  additional shows a peak in intensity at about 3.5 degrees.  The further away from center (i.e., the  higher the number of degrees) these secondary peak intensities occur, the less visible the color  separation is.  In this instance, at higher saturations, the color separation might be visible.  That  aspect is illustrated in the computer‐modeled images reproduced at FIG. 17B (top), which shows  predicted reflection from the textured region as a function of saturation.  [0164] For Comparative Example 2B, the same process was used with the same parameters but,  instead of ellipses, circles were utilized.  Computer‐modeled images of predicted reflection from  the  textured  region as a  function of  saturation are  reproduced at FIG. 17B  (bottom).   As  the  computer‐modeled  images  show,  the  surface  features  generated  from  overlapping  circular  segments reflected light having easily distinguishable color bands even at 0% saturation.     The  color artifacts that the surface features generated from overlapping elliptical segments were not  noticeable at saturations lower than 15%, and even at saturations of 15% and 20%, color banding  is not readily evident.  [0165] Examples 3‐5 – Examples 3‐5 are each a summary of samples where the textured region  most resembles that of FIG 2.  The random but specific distribution of the surface features with  an elliptical perimeter began with a random distribution of points having a minimum point‐to‐ point  distance  of  110  µm  for  Example  3,  25  µm  for  Example  4,  and  10  µm  for  Example  5.   Triangulation was performed and ellipses drawn and scaled so that the ellipses had a fill‐fraction  of 50%.  A one‐step etching process produced surface features with an elliptical perimeter at one  elevation  and  a  surrounding  portion  at  another  elevation  from  a  base‐plane.    The  one‐step  etching process removed, depending on the sample, 0.11 µm to 0.16 µm of the thickness of the  substrate for Example 3, 0.12 µm to 0.17 µm for Example 4, and 0.08 µm to 0.17 µm for Example  5.  Various anti‐glare performance metrics were measured for all samples.  More specifically, the  transmission haze (“haze”), the pixel‐power deviation (“PPD”), the distinctiveness‐of‐image (“c‐ DOI”),  specular  reflectance  (“c‐Rspec”), and corrected color  shifts  ΔCx_corrected   and  ΔCy_corrected  were measured and recorded.  The results are set forth in Table 1 below.  “Min Rspec(λ)” and  “max Rspec(λ)” in the tables below refer to far field first surface specular reflectance spectra as  measured with a camera with a 2 degree aperture illuminating the sample at a 6 degree angle of  incidence.  These values are different from the optically coupled Rspec (peak gloss) measurement  made with a Rhopoint goniometer (“GU” means Gloss Units). The minimum and maximum are  over the visible wavelength range, 400 – 700 nm.   
Figure imgf000047_0001
 
Figure imgf000047_0002
  As mentioned  above,  Example  3 with  the  larger  surface  features  produced  little measured  reflected  color  artifacts  and  low  transmission haze but had  generated  a  relatively high pixel  power deviation.  The smaller surface features generated less pixel power deviation but at the  expense of increased haze and reflected color artifacts.  [0166] Examples 6‐9 – These examples are each a summary of samples where the textured region  most  resembles  that  of  FIG  6,  with  larger  surface  features  having  an  elliptical  perimeter  introduced  in a first etching step and then smaller surface features added  in a second etching  step.  The larger surface features for each example began with a random distribution of points  having a minimum point‐to‐point distance of 110 µm.  Triangulation was performed and ellipses  drawn and scaled so that the ellipses had a fill‐fraction of 50.   The first etching step removed,  depending on the sample, 0.26 µm to 0.28 µm of the thickness of the substrate for Example 6,  0.13 µm to 0.21 µm for Example 7, 0.13 µm to 0.19 µm for Example 8, and 0.13 µm to 0.17 µm  for Example 9.  For Example 6, smaller surface features having an elliptical perimeter and a fill‐ fraction of 50%, generated from random distribution algorithm using a minimum point‐to‐point  distance of 25 µm, were added to the textured region in a second etching step.  For Example 7,  smaller  surface  features  having  a  circular  perimeter,  generated  from  random  distribution  algorithm using a minimum center‐to‐center distance of 15 µm to 25 µm, were added to the  textured region in a second etching step.  For Example 8, smaller surface features having a circular  perimeter,  generated  from  random distribution  algorithm using  a minimum  center‐to‐center  distance of 20 µm to 25 µm, were added to the textured region in a second etching step.  For  Example 9, secondary surface features to impart surface roughness (Ra) within a range of 5 nm  to  100  nm  were  added  to  the  textured  region  in  an  etching  step.    The  same  anti‐glare  performance metrics were measured  for all  samples, and  the  results are  set  forth  in Table 2  below.   
Figure imgf000048_0001
 
Figure imgf000048_0002
Figure imgf000049_0001
  The incorporation of the smaller surfaces generally resulted in very low reflected color artifacts  values.  Examples 8 and 9 in particular had measured reflected color artifact values of under 0.3,  imperceptible by human eyes.  [0167] Examples 10‐13 – These examples are each a summary of samples where the textured  region most  resembles  that  of  FIG  9A, where  a  first  area  of  larger  elliptical  perimeters was  superimposed with a second area of smaller elliptical perimeters.   Then a single etching step  produced  a  textured  region  with  a  first  elevation  including  the  non‐overlapping  elliptical  segments and a second elevation including the overlapping elliptical segments and areas outside  of any elliptical perimeter.  For Examples 11 and 12, the smaller elliptical perimeters that only  partially overlapped the larger elliptical perimeters were removed from the design.  [0168] The  larger elliptical perimeters  for each example began with a  random distribution of  points having a minimum point‐to‐point distance of 105 µm, except for Example 13, where the  minimum point‐to‐point distance was 15 µm.  Triangulation was performed and ellipses drawn  and scaled so that the ellipses had a fill‐fraction of 50.   The minimum point‐to‐point distances  utilized to generate the smaller elliptical perimeters of Examples 10‐12 were 25 µm and 13 µm  for Example 13.  Triangulation was performed and ellipses drawn and scaled so that the ellipses  had fill‐fractions of 20 for Examples 10‐12 and 50 Example 13.    [0169] A single etching step formed the textured region, removing, depending on the sample,  0.12 µm to 0.17 µm of the thickness of the substrate for Example 10, 0.06 µm to 0.20 µm for  Example 11, 0.16 µm for Example 12, and 0.14 µm to 0.16 µm for Example 13.  With Example 12,  secondary surface features to impart surface roughness (Ra) within a range of 5 nm to 100 nm  were added to the textured region in an etching step.  The same anti‐glare performance metrics  were measured for all samples, and the results are set forth in Table 3 below. 
Figure imgf000049_0002
Figure imgf000050_0001
 
Figure imgf000050_0002
  Example 10 generated very good results,  including acceptable haze values, a  low pixel power  deviation,  very  low  specular  reflectance,  and  reflected  color  artifacts  well  under  0.3  and  considered to be imperceptible.    [0170] Examples 14A‐14O – For Examples 14A‐14O, a spacing distribution algorithm was utilized  to randomly but specifically place points within an area.  Each of the points were to be separated  by a minimum distance of 105 µm.  The points were then triangulated, an inellipse drawn in each  triangle, and then the points and triangles were removed.  The longest dimension of the ellipses  now remaining in the area were scaled down so that the ellipses occupied 50 percent of the area.   The placement of the ellipses was then transferred to a lithography mask.  The lithography mask  was used to form an etching mask on the primary surface of a glass substrate.  Each substrate  was then etched with the etching mask on the substrate.  The etchant utilized had a composition  of 0.15wt% hydrofluoric acid and 1wt% nitric acid.  The etchant contacted the primary surface  with the etching mask for a period of time set forth  in Table 4  immediately below that varied  among the samples.  The etchant formed surface features having an elliptical perimeter set into  a surrounding portion.  The depth of the surface features varied, and the depth for each sample  is set forth below.   
Figure imgf000051_0001
  [0171] After removal of the etching mask, the samples of 14M‐14O were then subjected to a  second etching  step  to  form  secondary  surface  features at  the primary  surface.   The  second  etching  step  used  an  etchant with  a  composition  of  92 wt%  acetic  acid,  2 wt%  ammonium  fluoride, and 6 wt% water (deionized).  The etchant contacted the substrate for a time period of  120 seconds.  The secondary surface features so formed imparted a surface roughness (Ra) of ~  28nm to the textured region at the primary surface.    [0172] The pixel power deviation, distinctness‐of‐image, specular  reflection, and  transmission  haze were measured for the sample of each of Examples 14A‐14O.  The measured results are set  forth in the graphs of FIGS. 18A‐18D, which plot the measured value as a function of the depth  of  the  surface  features with  the  elliptical  perimeter.   Analysis  of  the  graphs  reveal  that  the  secondary surface features to impart surface roughness of Examples 14M‐14O resulted in a lower  pixel power deviation and specular reflectance compared to when no such secondary surface  features were included in Examples 14A‐14L.  However, the secondary surface features to impart  surface  roughness  of  Examples  14M‐14O  resulted  in  a  higher  distinctness‐of‐image  and  transmission  haze  compared  to when  no  such  secondary  surface  features were  included  in  Examples 14A‐14L. In general, the introducing of the secondary surface features to the surface  features can be either  increase or decrease the distinctness‐of‐image, which depends   on the  design of the surface features.   [0173] Example 15A‐15C –Examples 15A and 15B are two different sets of samples, each with  surface features having an elliptical perimeter, just as in Examples 14A‐14O.  The difference was  that for the samples of Example 15A, the etching mask used while forming the surface features  was  kept  on  the  substrate while  the  another  etching  step was  performed  to  generate  the  secondary surface features.   For the samples of Example 15B, the etching mask was removed  before the etching step was performed to generate the secondary surface features.  Thus, in the  samples of Example 15A, the secondary surface features and the added surface roughness were  formed only on  surfaces provided by  the elliptical  surface  features  and not  the  surrounding  portion.  In contrast, with the samples of Example 15B, the secondary surface features and the  added  surface  roughness  were  formed  on  the  entire  textured  region  including  both  the  surrounding portion and the surfaces provided by the elliptical surface features.    [0174] A scanning electron microscope captured images of a sample from both Example 15A and  Example 15B.  The images are reproduced at FIG. 19A.  The images on the left show the surface  features with the elliptical perimeters set into the surrounding portion.  The images in the middle  show the secondary surface features.   The  images on the right show the etching depth of the  secondary surface features.     [0175] The pixel power deviation, transparency haze, and specular reflectance of samples from  both Examples 15A and 15B were measured.  A Rhopoint instrument was utilized to determine  specular  reflectance.   The graphs  reproduced at FIGS. 19B‐19D  set  forth  the measured data.   Analysis of  the graphs  reveal  that  the  samples of Example 15B, where  the etching mask was  removed before the second etching step to  impart secondary surface features throughout the  entire textured region, resulted  in a  lower pixel power deviation but higher transmission haze  compared to the samples of Example 15A, where the etching mask was maintained during the  second etching step and thus the secondary surface features were imparted only to the surfaces  provided by the elliptical surface features.    [0176] The  Rhopoint  instrument  utilized  to measure  specular  reflectance  did  not measure  a  difference between the samples of Examples 15A and 15B.  However, the device could measure  differences in specular reflectance when a 6 degree angle of incidence for the light to be reflected  and a 2 degree aperture to measure the specular reflectance.  The graph reproduced at FIG. 19E  shows the measured data for samples of Examples 15A and 15B, as well as for a sample (Example  15C) where only the elliptical surface features were present and did not include the secondary  surface features to impart surface roughness.  Analysis of the graph of FIG. 19E reveals that the  presence  of  the  secondary  surface  features  in  Examples  15A  and  15B  reduced  specular  reflectance compared to when the secondary surface features were absent in Example 15C.  The  difference in specular reflectance between Examples 15A and 15B is wavelength dependent.    [0177] Example 16 – For Example 16, a sample was prepared similar to the samples Examples  14M‐14O, where surface features with an elliptical perimeter are set into a surrounding portion  in a first etching step forming textured region, and then secondary surface features are etched  throughout the entire textured region to increase surface roughness.  The sample so prepared  was then analyzed with a white light interferometer to measure the three dimensional profile of  the textured region.  FIG. 20A illustrates the three dimensional profile that was measured.  The  top  half  illustrates  relative  elevation  differences  between  elliptical  surface  features  and  the  surrounding  portion.    The  bottom  half  illustrates  the  topography  of  the  secondary  surface  features, with the topography of the secondary surface features added to the surfaces that the  elliptical surface features are provided illustrated at the left, and the topography of the secondary  surface features added to the surrounding portion illustrated at the right.  The three dimensional  profile of  the secondary  features within  the elliptical surface  features  is measurably different  than the three dimensional profile of the secondary features at the surrounding portion – with  the surrounding portion showing deeper secondary features.    [0178] An atomic force microscope was utilized to image and determine the surface roughness  (Ra)  imparted by the secondary surface  features at both  (i) a surface provided by an elliptical  surface feature and (ii) at the surrounding portion.  The images are reproduced at FIG. 20B.  The  image on the  left  is of the secondary surface features at the surface provided by the elliptical  surface feature, and shows a surface roughness (Ra) of 15.3 nm.  The image on the right is of the  secondary surface features at the surrounding portion, and shows a surface roughness (Ra) of  33.5 nm.  The image on the right and the higher surface roughness (Ra) value at the surrounding  portion matches  the  topography  data  illustrated  at  FIG.  20A.    The  surrounding  portion was  covered by the etching mask during the formation of the elliptical surface features and thus had  not been contacted with an etchant, unlike the elliptical surface features which were created by  the first etching step.  Thus, it is believed that the surrounding portion, previously untouched by  an  etchant, was more  sensitive  to  the  second  etching  step  to  impart  the  secondary  surface  features.     

Claims

CLAIM(S)  What is claimed is:  1. A substrate for a display article, the substrate comprising:  a primary surface; and  a  textured  region  on  at  least  a  portion  of  the  primary  surface,  the  textured  region  comprising  surface  features  that  reflect  a  random  distribution,  each  of  the  surface  features  comprising a perimeter  that  is parallel  to a base‐plane extending  through a  thickness of  the  substrate below the textured region, wherein the perimeter is elliptical.    2. The substrate of claim 1, wherein  the textured region further comprises (i) one or more higher surfaces residing at a higher  mean elevation from the base‐plane and (ii) one or more lower surfaces residing at a lower mean  elevation from the base‐plane that is closer to the base‐plane than the higher mean elevation.      3. The substrate of claim 2, wherein  the  textured  region  further  comprises  a  surrounding  portion,  into which  the  surface  features are set, or from which the surface features project;   the surrounding portion provides either (i) the one or more higher surfaces or (ii) the one  or more lower surfaces; and  the surface features provide the other of (i) the one or more higher surfaces and (ii) the  one or more lower surfaces, whichever the surrounding portion does not provide.    4. The substrate of any one of claims 2‐3, wherein  the higher mean elevation differs from the lower mean elevation by a distance within a  range of 0.05 µm to 0.70 µm.     5. The substrate of any one of claims 1‐4, wherein  the perimeter of each of the surface features comprises a longest dimension parallel to  the base‐plane; and  the  longest dimensions of the perimeters of the surface features are not all parallel to  each other.     6. The substrate of claim 5, wherein  the longest dimension of the perimeter of each of the surface features is within a range  of 5 µm to 150 µm.      7. The substrate of any one of claims 1‐6, wherein  the surface features comprise a fill‐fraction that is within a range of 40% to 60%.     8. The substrate of claim 1, wherein  the surface features comprise larger surface features and smaller surface features;  the perimeters of  the  larger  surface  features  comprise a  range of  longest dimensions  parallel to the base‐plane;   the  perimeters  of  the  smaller  surface  features  comprise  another  range  of  longest  dimensions parallel to the base‐plane; and  the longest dimensions of the range of longest dimensions of the larger surface features  are longer than the longest dimensions of the range of longest dimensions of the smaller surface  features.    9. The substrate of claim 8, wherein  the perimeters of the larger surface features totally surround the perimeters of some of  the smaller surface features; and  the  perimeters  of  some  the  smaller  surface  features  reside  entirely  outside  of  the  perimeters.      10. The substrate of claim 8, wherein  the perimeter of at least one of the smaller surface features partially overlaps with the  perimeter of one of the larger surface features, such that (i) part of the perimeter of the smaller  surface features is inside the perimeter of the larger surface feature and (ii) part of the perimeter  of the smaller surface features is outside the perimeter of the larger surface feature.    11. The substrate of any one of claims 8‐10, wherein  the textured region further comprises (i) one or more higher surfaces residing at a higher  mean elevation from the base‐plane, (ii) one or more  lower surfaces residing at a lower mean  elevation from the base‐plane that is closer to the base‐plane than the higher mean elevation,  and (iii) a surrounding portion, into which the larger surface features are set, or from which the  larger surface features project.    12. The substrate of claim 11, wherein  the  larger surface  features project  from  the surrounding portion, some of  the smaller  surface  features  project  from  the  surrounding  portion,  and  the  remaining  smaller  surface  features, those that do not project from the surrounding portion, are set into the larger surface  features;   the larger surface features and smaller surface features that project from the surrounding  portion provide the one or more higher surfaces residing at the higher mean elevation; and  the surrounding portion and the smaller surface features that are set into larger surface  features provide the one or more lower surfaces residing at the lower mean elevation.    13. The substrate of claim 11, wherein  the  larger  surface  features  are  set  into  the  surrounding portion,  some of  the  smaller  surface features are set into the surrounding portion, and the remaining smaller surface features,  those that are not set into the surrounding portion, project from the larger surface features;  the  larger  surface  features  and  the  smaller  surface  features  that  are  set  into  the  surrounding  portion  provide  the  one  or  more  lower  surfaces  residing  at  the  lower  mean  elevation; and  the  surrounding portion and  the  smaller  surface  features  that project  from  the  larger  surface features provide the one or more higher surfaces residing at the higher mean elevation.    14. The substrate of claim 8, wherein  the textured region further comprises (i) one or more higher surfaces residing at a higher  mean elevation from the base‐plane, (ii) one or more  lower surfaces residing at a lower mean  elevation from the base‐plane that is closer to the base‐plane than the higher mean elevation,  (iii) one or more intermediate surfaces residing at one or two intermediate mean elevations from  the base‐plane, wherein the one or two intermediate mean elevations are disposed between the  higher mean elevation and the lower mean elevation, and (iv) a surrounding portion, into which  the larger surface features are set, or from which the larger surface features project.    15. The substrate of claim 14, wherein  the larger surface features provide at least a portion of the one or more higher surfaces  residing at the higher mean elevation.    16. The substrate of claim 14, wherein  the larger surface features provide at least a portion of the one or more lower surfaces  disposed at the lower mean elevation.    17. The substrate of any one of claims 1‐16, wherein  the textured region further comprises one or more sections comprising secondary surface  features imparting a surface roughness (Ra) within a range of 5 nm to 100 nm.    18. The substrate of any one of claims 1‐17, wherein  the textured region exhibits a transmission haze within a range of 0.5% to 5.0%;  the textured region exhibits a pixel power deviation within a range of 1.0% to 3.0%;  the textured region exhibits a distinctness‐of‐image within a range of 5% to 70%;   the textured region exhibits a specular reflectance within a range of 4 GU to 40 GU; and  the textured region exhibits corrected color shifts  Δ Cx _corrected and Δ Cy _corrected that are  each respectively within a range of 0.03 to 0.6.      19. The substrate of any one of claims 1‐18, wherein  the substrate comprises a glass or glass‐ceramic.    20. A substrate for a display article, the substrate comprising:  a primary surface;  a base‐plane extending through the substrate below the primary surface; and  a textured region at the primary surface, the textured region comprising (i) one or more  higher surfaces residing at a higher mean elevation from the base‐plane, (ii) one or more lower  surfaces residing at a  lower mean elevation from the base‐plane, (iii) a first portion providing  either  the one or more higher surfaces or  the one or more  lower surfaces, and  (iv) a second  portion providing  the other of  the one or more higher  surfaces and  the one or more higher  surfaces, whichever the first portion is not providing;  wherein, elliptical perimeters which lie in planes parallel to the base‐plane and reflect a  random distribution, define  the  first portion except  for overlapping portions of  the elliptical  perimeters, where the overlapping portions define in part the second portion.    21. The substrate of claim 20, wherein  in addition to the overlapping portions of the elliptical perimeters, the second portion of  the textured region further comprises any part of the textured region that is not the first portion.    22. The substrate of any one of claims 20‐21, wherein  each of the elliptical perimeters comprises a longest dimension parallel to the base‐plane;  and  the longest dimensions of the elliptical perimeters are not all parallel with each other.    23. The substrate of any one of claims 20‐22, wherein  the higher mean elevation differs from the second elevation by a distance within a range  of 0.02 µm to 0.70 µm.    24. The substrate of any one of claims 20‐23, wherein  the  elliptical  perimeters  comprise  larger  elliptical  perimeters  and  smaller  elliptical  perimeters, which are smaller than the first elliptical perimeters; and  the first portion of the textured region is bounded by (i) the smaller elliptical perimeters  that do not overlap or intersect with the larger elliptical perimeters, (ii) portions of the smaller  elliptical perimeters outside of the first elliptical perimeters that partially overlap with the larger  elliptical perimeters, and (iii) portions of the larger elliptical perimeters that do not overlap with  the smaller elliptical perimeters.    25. The substrate of claim 24, wherein  at least some of the larger elliptical perimeters entirely encompass more than one of the  smaller elliptical perimeters.    26. The substrate of any one of claims 24‐25, wherein  a fill‐fraction of the larger elliptical perimeters is within a range of 40% to 60%; and  a fill‐fraction of the smaller elliptical perimeters is within a range of 10% to 30%.      27. The substrate of any one of claims 20‐26, wherein  the textured region further comprises one or more sections comprising secondary surface  features imparting a surface roughness (Ra) within a range of 5 nm to 100 nm.    28. The substrate of any one of claims 20‐27, wherein  the textured region exhibits a transmission haze within a range of 0.3% to 8.0%;  the textured region exhibits a pixel power deviation within a range of 0.7% to 3.5%;  the textured region exhibits a distinctness‐of‐image within a range of 25% to 100%;   the textured region exhibits a specular reflectance within a range of 5 GU to 30 GU; and  the textured region exhibits corrected color shifts Δ Cx _corrected and Δ Cy _corrected that are  each respectively within a range of 0.00 to 0.50.      29. The substrate of any one of claims 20‐28, wherein  the substrate comprises a glass or glass‐ceramic.    30. A method of  forming a textured region of a substrate of a display article,  the method  comprising:  generating a random distribution of ellipses within an area;  preparing a lithography mask comprising (a) an area matching the area of the plane; (b)  material throughout the matching area; and (c) voids through the material, wherein the random  distribution of the ellipses define either (i) the material throughout the matching area or (ii) the  voids through the material;  exposing a workpiece comprising a substrate, a lithography ink disposed on the substrate,  and  the  lithography mask  disposed  on  the  lithography  ink,  to  a  curing  agent  that  transmits  through the voids through the material of the lithography mask to cure exposed portions of the  lithography ink, wherein non‐exposed portions of the lithography ink blocked from exposure to  the curing agent are not cured and removed along with the lithography mask, and the exposed  portions of the lithography ink remain on the substrate as an etching mask; and   contacting the substrate with the etching mask with an etchant, thus forming the textured  region.    31. The method of claim 30 further comprising:  generating a random distribution of second ellipses within a second area;  preparing a second lithography mask comprising (a) a second area matching the area of  the second plane; (b) material throughout the matching second area; and (c) voids through the  material, wherein the random distribution of the second ellipses define either (i) the material  throughout the matching second area or (ii) the voids through the material;  exposing a second workpiece comprising the substrate, new lithography ink disposed on  the  textured  region of  the  substrate, and  the  second  lithography mask disposed on  the new  lithography ink, to a curing agent that transmits through the voids through the material of the  second  lithography mask  to  cure exposed portions of  the new  lithography  ink, wherein non‐ exposed portions of the new lithography ink blocked from exposure to the curing agent are not  cured and removed along with the second  lithography mask, and the exposed portions of the  new lithography ink remain on the substrate as a second etching mask; and   contacting the substrate with the second etching mask with an etchant.    32. The method of any one of claims 30‐31, wherein  generating the random distribution of the ellipses comprises:  distributing points randomly within an area;  triangulating  the points  so  that each point  is made a  vertex of a  triangle  thus  forming a plurality of triangles, and none of the triangles overlap;  drawing an ellipse inside each triangle of the plurality of triangles; and  removing the points and the triangles so that only the ellipses that were drawn in  the triangles remain on the area.    33. The method of claim 32, wherein  the points randomly distributed within the area are separated by a minimum distance.    34. The method of any one of claims 30‐33 further comprising:  forming  secondary  surface  features  into one or more  sections of  the  textured  region,  thereby increasing the surface roughness (Ra) of at the one or more sections to within a range of  5 nm to 100 nm.    35. A method of  forming a textured region of a substrate of a display article,  the method  comprising:  generating a random distribution of first ellipses within a first area;  generating a random distribution of second ellipses within a second area, wherein the  first ellipses comprise longest dimensions that are on average longer than longest dimensions of  the second ellipses on average;  forming a new area that superimposes the first ellipses of the first area and the second  ellipses of the second area, the new area comprising (a) free portions of the first ellipses and the  second ellipses that do not overlap; (b) overlapping portions of the first ellipses and the second  ellipses;  and  (c)  empty  portions where  neither  the  first  ellipses  nor  the  second  ellipses  are  present;  preparing a lithography mask comprising (a) an area; (b) material within the area defined  by either (i) the free portions or (ii) a combination of the overlapping portions and the empty  portions; and (c) voids through the material defined by whichever of (i) the free portions and (ii)  the combination of the overlapping portions and the empty portions do not define the material  within the area;  exposing a workpiece comprising a substrate, a lithography ink disposed on the substrate,  and  the  lithography mask  disposed  on  the  lithography  ink,  to  a  curing  agent  that  transmits  through the voids through the material of the lithography mask to cure exposed portions of the  lithography ink, wherein non‐exposed portions of the lithography ink blocked from exposure to  the curing agent are not cured and removed along with the lithography mask, and the exposed  portions of the lithography ink remain on the substrate as an etching mask; and   contacting the substrate with the etching mask with an etchant.    36. The method of claim 35 further comprising:  before preparing the lithography mask, removing from the new area any of the second  ellipses that the first ellipses partially but not fully overlap.    37. The method of any one of claims 35‐37, wherein  generating  the  random  distribution  of  the  first  ellipses  and  generating  the  random  distribution of the second ellipses both separately comprise:  distributing points  randomly within an area, each of  the points separated by a  minimum distance;  triangulating  the points  so  that each point  is made a  vertex of a  triangle  thus  forming a plurality of triangles, and none of the triangles overlap;  drawing an ellipse inside each triangle of the plurality of triangles; and  removing the points and the triangles so that only the ellipses that were drawn in  the triangles remain on the area.    38. The method of claim 37, wherein  the  minimum  distance  separating  each  of  the  points  of  the  area  for  the  random  distribution of the first ellipses is within a range of 80 µm to 130 µm; and  the  minimum  distance  separating  each  of  the  points  of  the  area  for  the  random  distribution of the second ellipses is within a range of 15 µm to 40 µm.    39. The method of claim 37, wherein  the  minimum  distance  separating  each  of  the  points  of  the  area  for  the  random  distribution of the first ellipses is less than or equal 20 µm;  the  minimum  distance  separating  each  of  the  points  of  the  area  for  the  random  distribution of the second ellipses is less than or equal 18 µm; and  the  minimum  distance  separating  each  of  the  points  of  the  area  for  the  random  distribution of the first ellipses differs from the minimum distance separating each of the points  of the plane for the random distribution of the second ellipses by a value within a range of 1 µm  to 3 µm.    40. The method of any one of claims 35‐39 further comprising:  forming  secondary  surface  features  into one or more  sections of  the  textured  region,  thereby increasing the surface roughness (Ra) of at the one or more sections to within a range of  5 nm to 100 nm.             
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