CN103499852B - blue light filter film for visible light communication - Google Patents

blue light filter film for visible light communication Download PDF

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Publication number
CN103499852B
CN103499852B CN201310470036.1A CN201310470036A CN103499852B CN 103499852 B CN103499852 B CN 103499852B CN 201310470036 A CN201310470036 A CN 201310470036A CN 103499852 B CN103499852 B CN 103499852B
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film
blue light
visible
visible light
light communication
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CN103499852A (en
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王少伟
梁礼晔
陆卫
陈飞良
凌艳菁
冀若楠
刘星星
陈效双
俞立明
田硕
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Shanghai Institute of Technical Physics of CAS
Shanghai Broadband Technology and Application Engineering Research Center
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Shanghai Institute of Technical Physics of CAS
Shanghai Broadband Technology and Application Engineering Research Center
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Abstract

The invention discloses blue light filter film for visible light communication, its structure is: on substrate, be followed successively by broad passband interfere cut-off light filtering films, highly reflecting films and antireflective film, and it significantly reduces visible and background radiation and enters the noise that detector formed.Simultaneously, this project blue light filter membrane is precipitous, accurate through the border of ending with visible to blue light signals, when making to filter visible and near infrared interference to the full extent, to the loss reduction of blue light signals, considerably improve efficiency and the signal to noise ratio (S/N ratio) of visible light communication, highly beneficial to the development and apply in the fields such as visible light communication.

Description

Blue light filter film for visible light communication
Technical field
The present invention relates to optical lightscreening film, specifically refer to be applied to the blue light filter membrane that communication blue light signals can be filtered out from illumination and bias light in visible light communication.
Background technology
Visible light communication (visiblelightcommunication, VLC) is a kind of emerging light wireless communication technology grown up on White light LED technology.Compare with other light wireless communications with traditional radio communication, visible light communication have emissive power high, without electromagnetic interference (EMI), without advantages such as bandwidth restriction, economize energy, there is great development potentiality, caused extensive concern and the research of people.
Be usually used in the light source mainly blue-light led chip+yellow fluorescent powder excited white light (spectrum as shown in Figure 1) of visible light communication at present.Blue-ray LED excitated fluorescent powder is luminous, makes blue light be mixed to form white light with the fluorescence inspired.Based on the spectrum characteristic of this light source, wherein the blue light that sends of LED is for communication, and the visible ray of all the other wave bands is used for illumination, realizes illumination and communicating integral.
In visible light communication, except the blue wave band LED signal of communication, a large amount of intensity is also there is much larger than the illumination light of blue light signals and stray light in environment, these light enter in PIN pipe detector also can form optical response signal, cause and cannot distinguish blue light signals and noise, severe jamming visible light communication.It should be noted that usual PIN pipe detector significantly will be better than the blue light signal of communication of below 500nm to the response of more than 500nm wavelength light, non-communicating stray light forms noise strongly.If the noise of other wave band is not carried out filtering and suppressing, be what to be difficult to realize to effective detection of blue light signals and communication.In order to filter out noise, obtain simple blue light signals, need before all light enters detector, add a blue light filter membrane and filter, make except optical communication blue light can through except arrival detector, the parasitic light of its all band all filters.
In a word, require high as far as possible in blue wave band transmitance, then transmitance is low as far as possible to have the visible of response and near-infrared band at other detector, realizes the bandpass filtering of blue wave band, filter out the much noise outside blue light signals, realize visible illumination and communicating integral.
Existing procucts structure is typically employed in optical glass or coloured glass and plates that simple short-pass filter coating realizes, and mainly has the following disadvantages:
1) blue light signals wave band transmitance is not high enough, also has room for promotion;
2) be with outer cut-off only to accomplish visible waveband, still have the near-infrared band of comparatively strong response to have again very high permeability for detector, cause noise greatly and signal to noise ratio (S/N ratio) not high enough;
3) blue light is through the border with visible cut-off not accurately with precipitous, causes not being have too much visible ray noise to bleed, is exactly that too much blue light signals is filtered, thus lowers efficiency and signal to noise ratio (S/N ratio).
Summary of the invention
The object of this invention is to provide a kind of blue light filter film for visible light communication, in order to obtain communication blue light signals as much as possible, curb a large amount of illuminations and ground unrest simultaneously, short-pass filter coating system, a series of high reflectivity film stack and antireflective film system combine by the present invention, wherein short-pass filter coating system in order to ensure the blue light signals near centre wavelength 456nm efficiently through; The combination of a series of high reflectivity film stack then can realize the Out-of-band rejection of the visible and near infrared region of 500nm ~ 1100nm, has a large amount of illumination of response and background radiation squelch to fall detector in this wavelength band, improves signal to noise ratio (S/N ratio) and the transfer rate of blue light communication; Antireflective film system is then on whole film system basis, reduces the reflection loss on surface, improves the receiving efficiency of blue light signals further.
Due to passband (420nm ~ 478nm) wider (~ 60nm), and required rejection zone quite wide (500nm ~ 1100nm), therefore the present invention obtains passband and rejection zone by the passband of long-pass film system and short-pass film system is overlapping.
Because the rejection zone width formed after long wave pass and short wave-pass filter simple superposition is often very limited, rejection zone width does not far reach designing requirement, and the transmissivity of rejection zone is still higher, ends not thorough.Therefore, also need expand the outer rejection zone of passband and optimize further.Allowing rejection zone end more thoroughly concrete grammar is the highly reflecting films system superposing more different-wavebands on required rejection zone, and wave band is covered to 1100nm from 500nm, and the cut-off degree of depth reaches less than 0.6%.
According to the concrete spectral characteristic of visible light communication LED, the long wave end cut-off limit fine adjustment that blue light stripes is led to blue light signals and visible fluorescence as shown in Figure 1 throw light between intersection (valley of white light LEDs transmission spectrum), make blue light signals through precipitous, accurate with the border of visible cut-off, while at utmost filtering visible interference, the loss reduction of blue light signals, both the impact of visible ray noise had effectively been contained, in turn ensure that efficiently passing through of blue light signals, thus farthest improve efficiency and signal to noise ratio (S/N ratio).
In the membrane stack of single λ/4, the larger then high reflectance zone of the refractive index difference of high and low refractive index material is wider.But optional material ranges is very limited in reality, significantly limit the refractive index difference of high and low refractive index storeroom, and therefore the high-reflection region width of single λ/4 membrane stack is very limited, also need the width expanding high-reflection region.The method for widening adopted in the present invention is: on a λ/4 high reverse--bias multilayer film, and superpose the λ/4 high reverse--bias multilayer film that another centre wavelength is different, namely the direct high reflectance zone by different-waveband splices, thus expands its high-reflection region.
But, the splicing of simple film system and combination can cause the interior different ripple that occurs rising and falling of passband to vibrate, and in passband, the transmitance in considerable part region is not high, and namely total blue light signals is not high through efficiency, affect light receiving efficiency, therefore must compress the amplitude of ripple in passband.The present invention adopts and adds plating matching layer in the both sides of the series of symmetrical film, makes refractive index gentle transition, and such equivalent refractive index can mate with substrate and incident medium simultaneously, thus reaches the object reducing ripple vibration in passband.
The superficial layer of blue light filter membrane or the substrate at the back side, because refractive index is all greater than air, all can have reflection to a certain degree, cause certain loss of signal when flashlight is incident.In order to reduce because reflecting the loss of signal caused as far as possible, need to introduce antireflective film to reduce reflection, improving the transmitance of signal and final receiving efficiency.
For individual layer antireflective film, its structure as shown in Figure 2, calculates reflectivity according to transfer matrix method
R = ( n 0 - n 1 2 / n 2 n 0 + n 1 2 / n 2 ) 2
Work as film refractive index time, reflectivity R=0 is optimal anti-reflection effect.But the refractive index n of membraneous material in reality 1be difficult to just in time meet above formula.In order to reach better anti-reflection effect, the present invention adopts multilayer antireflective film.
By this series of short-pass filter coating system, a series of high reflectivity film stack and the combination of antireflective film system, obtain the blue light filter membrane that visible light communication blue light signals wave band is high thoroughly, other explorer response wave bands all end.
Its concrete structure of the present invention is: be followed successively by broad passband on the substrate 1 and interfere cut-off light filtering films 2, highly reflecting films 3 and antireflective film 4;
The film structure of described broad passband interference cut-off light filtering films 2 is:
(0.5LH0.5L) sor (0.5HL0.5H) s
Wherein: H represents the high refractive index layer of λ/4 thickness, L represents the low-index film of λ/4 thickness, and λ is the multiplicity that the centre wavelength 456nm of film system, S represent membrane stack, and S chooses 8-15; Numeral before H, L is the scale-up factor of this thicknesses of layers;
The film structure of described highly reflecting films 3 is:
[(HL)1.2(HL)1.4(HL)1.6(HL)1.8(HL)2.0(HL)2.2(HL)]
Centre wavelength gets 500nm;
The film structure of described antireflective film 4 is (centre wavelength 456nm):
M2HL；
Wherein mixolimnion M is the Si of optical thickness λ/4 xal yn zthin layer, λ is the centre wavelength 456nm of film system;
Described high refractive index film layer material adopts Ta 2o 5, ALO xn y, Bi 2o 3, BiF 3, CeF 3, CeO2, CsBr, CsI, Cr 2o 3, C (adamas), Dy 2o 3, Eu 2o 3, Gd 2o 3, HfO 2, Ho 2o 3, In 2o 3, La 2o 3, MgO, Nb 2o 5, Nd 2o 3, NdF 3, PbCl 2, PbF 2, Pr 6o 11, Sc 2o 3, Sb 2o 3, SnO 2, Si 3n 4, Sm 2o 3, TiO 2, Y 2o 3, ZnO, ZnS, ZrO 2, (ZrO 2+ TiO 2), (Pr 6o 11+ TiO 2), (La 2o 3+ TiO 2) or (Pr 6o 11+ Al 2o 3);
Described low-index film adopts SiO 2, ALO xn y, AlF3, BiF 3, BaF 2, CaF 2, CeF 3, CeO 2, CsBr, CsI, Dy 2o 3, Eu 2o 3, Gd 2o 3, HfO 2, Ho 2o 3, In 2o 3, LiF, LaF 3, La 2o 3, MgF 2, MgO, NaF, Na 3alF 6, Nd 2o 3, NdF 3, PbF 2, Pr 6o 11, Sc 2o 3, SrF 2, SmF 3, Sm 2o 3, TiO 2, Ta 2o 5, ThF 4, YbF 3, Y 2o 3or (Pr 6o 11+ Al 2o 3);
After have employed technique scheme, compared with original structure, the present invention has following beneficial effect (as shown in Figure 3):
1) blue light signals wave band transmitance is significantly increased compared with original, at the blue light signals wave band mean transmissivity of 420nm ~ 478nm up to 97%;
2) be with outer cut-off to accomplish detector has the whole near-infrared band of response always, significantly broadening Out-of-band rejection, the outer cut-off of band is very thorough, the near infrared jammr band transmitance extremely low (≤0.5%) that explorer response is stronger, and traditional structure still has higher transmitance at infrared band, noise significantly declines compared with traditional structure, and signal to noise ratio (S/N ratio) significantly improves;
3) blue light signals is through precipitous, accurate with the border of visible cut-off, make while at utmost filtering visible interference, the loss reduction of blue light signals, both the impact of visible ray noise had effectively been contained, in turn ensure that efficiently passing through of blue light signals, thus farthest improve efficiency and signal to noise ratio (S/N ratio).
Accompanying drawing explanation
Figure 1 shows that the luminescent spectrum of conventional visible light communication white light LEDs.
Figure 2 shows that individual layer antireflective film structure, the refractive index of membraneous material is n 1, n 0and n 2be respectively the refractive index of incident medium and substrate.
Figure 3 shows that the transmittance curve of blue light filter membrane (K9S1S2) of the present invention and traditional structure (K9S1).
Figure 4 shows that visible light communication white light LEDs spectrum (dotted line) and the blue light filter membrane transmission spectrum (solid line) prepared by this patent.
Figure 5 shows that film structure of the present invention.
Embodiment
For the LED light spectrum shown in Fig. 1, specific design index is as follows:
1) at the blue wave band of 420nm ~ 478nm, mean transmissivity >=90%, guarantee visible light communication blue light signals near centre wavelength 456nm all through and be detected device and collect.
2) at other visible rays of 500nm ~ 1100nm and near-infrared band, mean transmissivity≤1%, the fluorescence excited by LED and sunshine all filter out at other visible and near infrared parasitic lights interior, prevent from entering detector formation noise.
Low, high index of refraction layer material L and H selects membraneous material SiO respectively 2and Ta (n=1.46) 2o 5(n=2.16), designed basic structure of interfering cut-off filtering is λ/4 assembly of thin films, and its structure is or wherein, H represents the physical thickness λ/4n of high refractive index layer h, L represents the physical thickness λ/4n of low-index film l, the cycle that behalf membrane stack repeats or number of times.
3) according to the concrete spectral characteristic of visible light communication LED, the long wave end cut-off limit fine adjustment that blue light stripes is led to blue light signals and visible fluorescence as shown in Figure 1 throw light between the intersection (valley of white light LEDs transmission spectrum, the present embodiment is 487nm), make blue light signals through precipitous with the border of visible cut-off, accurately, while at utmost filtering visible interference, the loss reduction of blue light signals, both the impact of visible ray noise had effectively been contained, in turn ensure that efficiently passing through of blue light signals, thus farthest improve efficiency and signal to noise ratio (S/N ratio).
The preparation method of the present embodiment filter coating system can adopt: physical vapour deposition (PVD), chemical vapor deposition, thermal evaporation, electron beam evaporation, sputtering or ion plating, and the present invention is for magnetron sputtering, and concrete implementation step is as follows:
First with Ta 2o 5for target, be coated with one deck Ta on the glass substrate 2o 5film, thickness 26.4nm, sputtering power is 1kW, Ar airshed is 50sccm; Then with SiO 2target is at Ta 2o 5film is coated with the SiO of 78nm 2film, sputtering power is 1kW, Ar airshed is 50sccm, then at SiO 2film is coated with one deck Ta 2o 5film, thickness 53nm; With this structure for the cycle plates 10 cycles film system.
Secondly, in order to increase the cut-off degree of depth and rejection zone width, also needing the highly reflecting films adding different-waveband, therefore plating with (HL) unit again, the multilayer film pair that optical thickness increases gradually.By controlling sputtering time, SiO 2film up increases successively from 85.6nm, allows Ta 2o 5film also up increases successively in proportion from 57.9nm, the Ta of a film centering 2o 5film and SiO 2the optical thickness of film is equal.Plate 7 cycles is increased to Ta always 2o 5thin film physics thickness is 127nm, SiO 2the physical thickness of film is 188nm, widens to 1100nm from 500nm by high reverse--bias region.
Finally antireflective film on plated surface, antireflective film is three layers of antireflecting film of (λ/4-λ/2-λ/4) structure.Therefore first control sputtering power is 1kW, Ar airshed is 50sccm; Simultaneously with Al and Si for target, be that the ratio of reacting gas in 1:1 sputters one deck mixolimnion (n=1.8) on the film plated with nitrogen, mixolimnion thickness is 63nm, then with Ta 2o 5for target plates the Ta of 105nm 2o 5film, finally at Ta 2o 5film is coated with the SiO of 78nm 2film, namely antireflective film completes.
Through above step Design and optimization be coated with, finally can be formed white light LEDs communication needed for blue light bandpass filters, result is as shown in Figure 4.Upper as can be seen from figure, the band of blue light filter membrane leads to the blue light signals part (taking 456nm as the blue light signals peak of peak value) that wave band covers whole white light LEDs, and the strong white light interference of more than the 500nm that blue-light excited fluorescent powder is formed all is filtered out by blue light filter membrane 500nm ~ 1100nm cut-off region, blue light stripes lead to long wave end cut-off limit just in time throw light on blue light signals and visible fluorescence between intersection 487nm overlap, farthest blue light signals is filtered out from a large amount of noise light, finally only have blue signal luminous energy to get at and reach on light-receiving detector, reach and improve the efficiency of visible light communication and the object of signal to noise ratio (S/N ratio).

Claims (5)

1. a blue light filter film for visible light communication, its structure is: on substrate (1), be followed successively by broad passband interfere cut-off light filtering films (2), highly reflecting films (3) and antireflective film (4), it is characterized in that:
The film structure of described broad passband interference cut-off light filtering films (2) is:
(0.5LH0.5L) S
Wherein: H represents the high refractive index layer of λ/4 optical thickness, L represents the low-index film of λ/4 optical thickness, and λ is the multiplicity that the centre wavelength 456nm of film system, S represent membrane stack, and S chooses 8-15; Numeral before H, L is the scale-up factor of this thicknesses of layers;
The film structure of described highly reflecting films (3) is:
[(HL)1.2(HL)1.4(HL)1.6(HL)1.8(HL)2.0(HL)2.2(HL)]
Wherein central wavelength lambda gets 500nm;
The film structure of described antireflective film (4) is:
M2HL
Wherein mixolimnion M is the Si of λ/4 optical thickness xal yn zthin layer, λ is the centre wavelength 456nm of film system;
This film ties up to the blue wave band of 420nm ~ 478nm, and mean transmissivity is greater than 97%, at other visible rays of 500nm ~ 1000nm and near-infrared band, mean transmissivity is less than 1%, and cut-off limit is accurate, precipitous, achieve the bandpass filtering of blue wave band, be suitable for visible light communication application.
2. a kind of blue light filter film for visible light communication according to claim 1, is characterized in that: described high refractive index layer adopts Ta 2o 5, AlO xn y, Bi 2o 3, BiF 3, CeF 3, CeO 2, CsBr, CsI, Cr 2o 3, adamas, Dy 2o 3, Eu 2o 3, Gd 2o 3, HfO 2, Ho 2o 3, In 2o 3, La 2o 3, MgO, Nb 2o 5, Nd 2o 3, NdF 3, PbCl 2, PbF 2, Pr 6o 11, Sc 2o 3, Sb 2o 3, SnO 2, Si 3n 4, Sm 2o 3, TiO 2, Y 2o 3, ZnO, ZnS, ZrO 2, ZrO 2+ TiO 2, Pr 6o 11+ TiO 2, La 2o 3+ TiO 2, or Pr 6o 11+ Al 2o 3.
3. a kind of blue light filter film for visible light communication according to claim 1, is characterized in that: described low-index film adopts SiO 2, AlO xn y, AlF 3, BiF 3, BaF 2, CaF 2, CeF 3, CeO 2, CsBr, CsI, Dy 2o 3, Eu 2o 3, Gd 2o 3, HfO 2, Ho 2o 3, In 2o 3, LiF, LaF 3, La 2o 3, MgF 2, MgO, NaF, Na 3alF 6, Nd 2o 3, NdF 3, PbF 2, Pr 6o 11, Sc 2o 3, SrF 2, SmF 3, Sm 2o 3, TiO 2, Ta 2o 5, ThF 4, YbF 3, Y 2o 3, or Pr 6o 11+ Al 2o 3.
4. a kind of blue light filter film for visible light communication according to claim 1, it is characterized in that: in antireflective film (4), the plated film of mixolimnion M is using nitrogen as reacting gas, carry out reactive sputtering according to the Si of film system feature setting different proportion and metal A l simultaneously, work as Si, when Al ratio is 1:1, the refractive index of made mixolimnion M is 1.8; Or adopt by Si, Al, N of presetting tri-kinds of Elements Atom than the Si sintered xal yn zpottery directly carries out sputtering or evaporating obtaining the mixed membranous layer of refractive index between 1.5 and 2.1 for target.
5. a kind of blue light filter film for visible light communication according to claim 1, is characterized in that: the preparation method of described blue light filter film for visible light communication adopts thermal evaporation, electron beam evaporation, magnetron sputtering or plasma sputtering plated film.
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