CN111474608A - Far infrared optical antireflection hard film for mould pressing aspheric lens - Google Patents

Far infrared optical antireflection hard film for mould pressing aspheric lens Download PDF

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CN111474608A
CN111474608A CN202010339975.2A CN202010339975A CN111474608A CN 111474608 A CN111474608 A CN 111474608A CN 202010339975 A CN202010339975 A CN 202010339975A CN 111474608 A CN111474608 A CN 111474608A
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parts
infrared optical
film
far infrared
hard film
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王涛
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LightPath Optical Instrumentation Zhenjiang Co Ltd
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LightPath Optical Instrumentation Zhenjiang Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11Anti-reflection coatings
    • G02B1/113Anti-reflection coatings using inorganic layer materials only
    • G02B1/115Multilayers
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0623Sulfides, selenides or tellurides
    • C23C14/0629Sulfides, selenides or tellurides of zinc, cadmium or mercury
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0694Halides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/083Oxides of refractory metals or yttrium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/10Glass or silica
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/18Metallic material, boron or silicon on other inorganic substrates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/26Vacuum evaporation by resistance or inductive heating of the source
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/28Vacuum evaporation by wave energy or particle radiation
    • C23C14/30Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14Protective coatings, e.g. hard coatings

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The invention relates to a far infrared optical antireflection hard film for a die pressing aspheric lens, which comprises the following components in parts by weight: 1-3 parts of yttrium oxide; 50-60 parts of ytterbium fluoride; 30-40 parts of zinc sulfide; 0.3-2 parts of silicon dioxide; 3-6 parts of germanium. The production process is characterized by comprising the following steps: s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method; s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance; and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens. The invention has high transmittance (8-14um), excellent adhesive force and can bear high-strength friction test.

Description

Far infrared optical antireflection hard film for mould pressing aspheric lens
Technical Field
The invention relates to the technical field of lenses, in particular to a far infrared optical antireflection hard film for a mould pressing aspheric lens.
Background
The infrared lens is mainly applied to monitoring lenses, temperature measurement products, night vision products and other products, is mainly used in a far infrared wavelength range, and is coated on the surface of the lens to obtain better performance. The main processing methods of the infrared lens comprise cold processing and die pressing, and the die pressing processing of the lens with smaller size by using chalcogenide glass has greater advantages. And because the optical surface which needs to be contacted with air has certain required friction resistance and moisture resistance according to the requirements of the use environment of part of infrared products, the outer layer of the common reflecting film is made of an infrared coating material, the material is soft, and the performance cannot be met, so that a hard film needs to be plated on the surface of the optical reflecting film to meet the performance requirement.
But chalcogenide glass has the characteristics of small hardness, low melting point and easy influence by environmental conditions, so that the chalcogenide glass has greater difficulty in realizing hard films and is easy to demould. And the conventional far infrared antireflection film cannot bear multiple friction resistance tests, and the general protective film can greatly reduce the optical transmittance.
Disclosure of Invention
The invention aims to provide a far infrared optical antireflection hard film for a die-pressing aspheric lens.
The invention realizes the purpose through the following technical scheme: a far infrared optical antireflection hard film for a die pressing aspheric lens comprises the following components in parts by weight:
1-3 parts of yttrium oxide;
50-60 parts of ytterbium fluoride;
30-40 parts of zinc sulfide;
0.3-2 parts of silicon dioxide;
3-6 parts of germanium.
Further, the component of the weight portion is 1 portion of yttrium oxide; 50 parts of ytterbium fluoride; 40 parts of zinc sulfide; 2 parts of silicon dioxide; and 6 parts of germanium.
Further, the component of the weight portion is 3 portions of yttrium oxide; 60 parts of ytterbium fluoride; 30 parts of zinc sulfide; 0.3 part of silicon dioxide; and 3 parts of germanium.
Further, 2 parts of yttrium oxide; 55 parts of ytterbium fluoride; 35 parts of zinc sulfide; 1 part of silicon dioxide; and 5 parts of germanium.
A production process of a far infrared optical antireflection hard film for a die-pressed aspheric lens comprises the following steps:
s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method;
s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance;
and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens.
Compared with the prior art, the far infrared optical antireflection hard film for the die pressing aspheric lens has the beneficial effects that: has high transmittance and excellent adhesive force and can bear high-strength friction test.
Detailed Description
The invention is further described with reference to specific examples.
Example 1
A far infrared optical antireflection hard film for a die pressing aspheric lens comprises the following components in parts by weight:
1 part of yttrium oxide;
50 parts of ytterbium fluoride;
40 parts of zinc sulfide;
2 parts of silicon dioxide;
and 6 parts of germanium.
A production process of a far infrared optical antireflection hard film for a die-pressed aspheric lens comprises the following steps: s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method; s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance; and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens.
Example 2
A far infrared optical antireflection hard film for a die pressing aspheric lens comprises the following components in parts by weight:
3 parts of yttrium oxide;
60 parts of ytterbium fluoride;
30 parts of zinc sulfide;
0.3 part of silicon dioxide;
and 3 parts of germanium.
A production process of a far infrared optical antireflection hard film for a die-pressed aspheric lens comprises the following steps: s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method; s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance; and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens.
Example 3
A far infrared optical antireflection hard film for a die pressing aspheric lens comprises the following components in parts by weight:
2 parts of yttrium oxide;
55 parts of ytterbium fluoride;
35 parts of zinc sulfide;
1 part of silicon dioxide;
and 5 parts of germanium.
A production process of a far infrared optical antireflection hard film for a die-pressed aspheric lens comprises the following steps: s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method; s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance; and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens.
Examples 1-3 of the invention have the following test properties:
Figure BDA0002468214220000031
Figure BDA0002468214220000041
the test results show that the high-transmittance high-adhesion-strength.
The foregoing examples are provided to facilitate an understanding of the principles of the invention and their core concepts, including the best mode, and also to enable any person skilled in the art to practice the invention, including making and using any devices or systems and performing any incorporated methods. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention. The scope of the invention is defined by the claims and may include other embodiments that occur to those skilled in the art. Such other embodiments are intended to be within the scope of the claims if they have structural elements that approximate the literal language of the claims, or if they include equivalent structural elements with insubstantial differences from the literal languages of the claims.

Claims (5)

1. A far infrared optical antireflection hard film for a die pressing aspheric lens is characterized by comprising the following components in parts by weight:
1-3 parts of yttrium oxide;
50-60 parts of ytterbium fluoride;
30-40 parts of zinc sulfide;
0.3-2 parts of silicon dioxide;
3-6 parts of germanium.
2. The far infrared optical antireflection hard film for a mold pressing aspherical lens as defined in claim 1, wherein: the component of the weight portion is 1 portion of yttrium oxide; 50 parts of ytterbium fluoride; 40 parts of zinc sulfide; 2 parts of silicon dioxide; and 6 parts of germanium.
3. The far infrared optical antireflection hard film for a mold pressing aspherical lens as defined in claim 1, wherein: the component of the weight portion is 3 portions of yttrium oxide; 60 parts of ytterbium fluoride; 30 parts of zinc sulfide; 0.3 part of silicon dioxide; and 3 parts of germanium.
4. The far infrared optical antireflection hard film for a mold pressing aspherical lens as defined in claim 1, wherein: 2 parts of yttrium oxide; 55 parts of ytterbium fluoride; 35 parts of zinc sulfide; 1 part of silicon dioxide; and 5 parts of germanium.
5. A production process of a far infrared optical antireflection hard film for a die-pressing aspheric lens is characterized by comprising the following steps of:
s1, coating the film by an infrared optical coating machine by adopting a vacuum evaporation method;
s2, completing film preparation through a layered film coating method and a film coating mode of alternately using an electron gun and vapor barrier, and simultaneously using an ion source for assistance;
and S3, combining the materials of the layers to obtain the far infrared optical antireflection hard film for the die pressing aspheric lens.
CN202010339975.2A 2020-04-26 2020-04-26 Far infrared optical antireflection hard film for mould pressing aspheric lens Pending CN111474608A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112592165A (en) * 2020-12-14 2021-04-02 苏州晶生新材料有限公司 Novel optical coating material with antifogging property and preparation method thereof
CN114153011A (en) * 2022-01-20 2022-03-08 光皓光学(江苏)有限公司 Near ultraviolet and visible light broadband-reducing antireflection film for mould pressing aspheric lens
EP4119528A1 (en) * 2021-07-15 2023-01-18 Safran Electronics & Defense Optical component resistant to rainfall erosion

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1661820A (en) * 2004-02-26 2005-08-31 元砷光电科技股份有限公司 Light emitting diode
CN103499852A (en) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 Blue light filter film for visible light communication
CN204389718U (en) * 2015-01-27 2015-06-10 孟繁有 The superhard waterproof antireflective film of a kind of 420nm-700nm wave band
CN108766629A (en) * 2018-05-29 2018-11-06 成都莫比斯科技有限公司 A method of improving flexible transparent conductive film adherence
CN108802864A (en) * 2018-06-07 2018-11-13 云南北方驰宏光电有限公司 A kind of silicon base high-efficiency anti-reflection film being applicable in 3.7-4.8 mu m wavebands

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1661820A (en) * 2004-02-26 2005-08-31 元砷光电科技股份有限公司 Light emitting diode
CN103499852A (en) * 2013-10-10 2014-01-08 中国科学院上海技术物理研究所 Blue light filter film for visible light communication
CN204389718U (en) * 2015-01-27 2015-06-10 孟繁有 The superhard waterproof antireflective film of a kind of 420nm-700nm wave band
CN108766629A (en) * 2018-05-29 2018-11-06 成都莫比斯科技有限公司 A method of improving flexible transparent conductive film adherence
CN108802864A (en) * 2018-06-07 2018-11-13 云南北方驰宏光电有限公司 A kind of silicon base high-efficiency anti-reflection film being applicable in 3.7-4.8 mu m wavebands

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112592165A (en) * 2020-12-14 2021-04-02 苏州晶生新材料有限公司 Novel optical coating material with antifogging property and preparation method thereof
EP4119528A1 (en) * 2021-07-15 2023-01-18 Safran Electronics & Defense Optical component resistant to rainfall erosion
CN114153011A (en) * 2022-01-20 2022-03-08 光皓光学(江苏)有限公司 Near ultraviolet and visible light broadband-reducing antireflection film for mould pressing aspheric lens

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Application publication date: 20200731