WO2020031716A1 - コンバインドサイクル発電プラント - Google Patents
コンバインドサイクル発電プラント Download PDFInfo
- Publication number
- WO2020031716A1 WO2020031716A1 PCT/JP2019/029168 JP2019029168W WO2020031716A1 WO 2020031716 A1 WO2020031716 A1 WO 2020031716A1 JP 2019029168 W JP2019029168 W JP 2019029168W WO 2020031716 A1 WO2020031716 A1 WO 2020031716A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- steam
- pipe
- temperature
- valve
- vapor
- Prior art date
Links
- 238000011084 recovery Methods 0.000 claims abstract description 56
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 30
- 239000002918 waste heat Substances 0.000 abstract description 7
- 239000007789 gas Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 7
- 238000010248 power generation Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000010795 Steam Flooding Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01K—STEAM ENGINE PLANTS; STEAM ACCUMULATORS; ENGINE PLANTS NOT OTHERWISE PROVIDED FOR; ENGINES USING SPECIAL WORKING FLUIDS OR CYCLES
- F01K13/00—General layout or general methods of operation of complete plants
- F01K13/02—Controlling, e.g. stopping or starting
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01K—STEAM ENGINE PLANTS; STEAM ACCUMULATORS; ENGINE PLANTS NOT OTHERWISE PROVIDED FOR; ENGINES USING SPECIAL WORKING FLUIDS OR CYCLES
- F01K23/00—Plants characterised by more than one engine delivering power external to the plant, the engines being driven by different fluids
- F01K23/02—Plants characterised by more than one engine delivering power external to the plant, the engines being driven by different fluids the engine cycles being thermally coupled
- F01K23/06—Plants characterised by more than one engine delivering power external to the plant, the engines being driven by different fluids the engine cycles being thermally coupled combustion heat from one cycle heating the fluid in another cycle
- F01K23/10—Plants characterised by more than one engine delivering power external to the plant, the engines being driven by different fluids the engine cycles being thermally coupled combustion heat from one cycle heating the fluid in another cycle with exhaust fluid of one cycle heating the fluid in another cycle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01K—STEAM ENGINE PLANTS; STEAM ACCUMULATORS; ENGINE PLANTS NOT OTHERWISE PROVIDED FOR; ENGINES USING SPECIAL WORKING FLUIDS OR CYCLES
- F01K9/00—Plants characterised by condensers arranged or modified to co-operate with the engines
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02C—GAS-TURBINE PLANTS; AIR INTAKES FOR JET-PROPULSION PLANTS; CONTROLLING FUEL SUPPLY IN AIR-BREATHING JET-PROPULSION PLANTS
- F02C6/00—Plural gas-turbine plants; Combinations of gas-turbine plants with other apparatus; Adaptations of gas-turbine plants for special use
- F02C6/18—Plural gas-turbine plants; Combinations of gas-turbine plants with other apparatus; Adaptations of gas-turbine plants for special use using the waste heat of gas-turbine plants outside the plants themselves, e.g. gas-turbine power heat plants
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E20/00—Combustion technologies with mitigation potential
- Y02E20/16—Combined cycle power plant [CCPP], or combined cycle gas turbine [CCGT]
Definitions
- the present invention relates to a combined cycle power plant.
- the combined cycle power plant includes a gas turbine, a steam turbine, an exhaust heat recovery boiler, and the like, and employs a power generation system combining a gas turbine and a steam turbine.
- exhaust gas after working in a gas turbine is guided to an exhaust heat recovery boiler, and steam is generated using heat of the exhaust gas, and the steam drives the steam turbine.
- Some of the combined cycle power plants are referred to as multi-shaft combined cycle power plants in order to improve the power generation efficiency, and are provided with a plurality of combinations of a gas turbine and an exhaust heat recovery boiler (for example, And Patent Document 1).
- one exhaust heat recovery boiler may be activated while the other exhaust heat recovery boiler is operating.
- the other steam is bypassed and sent to the condenser until the pressure of the other steam becomes equal to the pressure of the one steam.
- the other steam has the same pressure as the one steam, the other steam is merged with the one steam.
- the present invention provides a combined cycle power generation that can suppress the occurrence of a difference in thermal expansion in the casing of a steam turbine when steam generated in a plurality of exhaust heat recovery boilers is combined and supplied to a steam turbine.
- the purpose is to provide a plant.
- the combined cycle power plant of the present invention includes a first exhaust heat recovery boiler that recovers heat from exhaust gas to generate steam, a second exhaust heat recovery boiler that recovers heat from exhaust gas to generate steam, A steam turbine driven by steam, a condenser for condensing steam discharged from the steam turbine, a first steam pipe connecting the first exhaust heat recovery boiler and the steam turbine, and an upstream end Is connected to the second exhaust heat recovery boiler, a second steam pipe having a downstream end connected to the first steam pipe, a first steam valve provided in the first steam pipe, A second steam valve provided in the second steam pipe, and a branch point located upstream of the first steam valve in the first steam pipe, and a downstream end is connected to the condenser.
- a first bypass pipe connected to the first bypass pipe and the first bypass pipe;
- a second bypass pipe, a second bypass valve provided in the second bypass pipe, and a temperature of steam in the second steam pipe is determined from a temperature of steam in the first steam pipe. When the temperature is not within the allowable temperature range, the second steam valve is closed and the second bypass valve is opened, and the temperature of the steam in the second steam pipe is within the allowable temperature range.
- a control device that opens the second steam valve and closes the second bypass valve.
- the control device closes the second steam valve. And the second bypass valve is opened, so that when the temperature of the steam in the second steam pipe is not high yet, that is, when the temperature of the steam in the second steam pipe is the first steam pipe, When the temperature is lower than the temperature of the steam in the second steam, the steam in the second steam pipe is sent to the condenser. As a result, after the steam in the second steam pipe that has not been heated yet merges with the steam in the first steam pipe, the temperature of the steam after the merge does not fluctuate.
- the combined cycle power plant is provided in the first steam pipe at a position upstream of the branch point, and detects a temperature of steam in the first steam pipe,
- a second temperature sensor provided at a position on the upstream side of the branch point in the second steam pipe and detecting a temperature of steam in the second steam pipe;
- a merging temperature sensor provided downstream of the position and detecting a temperature of steam in the first steam pipe, wherein the controller detects the temperature detected by the first temperature sensor and the merging temperature.
- the apparatus is configured to determine the allowable temperature range based on the temperature detected by the temperature sensor.
- the temperature of the steam in the second steam pipe has warmed to a level that does not cause a difference in thermal expansion in the steam turbine, and the steam in the second steam pipe is converted to the first steam.
- the steam in the second steam pipe is converted to the first steam.
- a warm pipe can be performed without releasing the steam to the outside and losing the steam to the outside of the system.
- FIG. 5 is a flowchart illustrating a flow of processing of the control device according to the present embodiment.
- CCPP combined cycle power plant
- a combined cycle power plant 1 includes exhaust heat recovery boilers 11 and 21 connected to a gas turbine (not shown) for recovering heat from exhaust gas to generate steam, steam pipes 12 and 22, check valves 13 and 23, steam valves 14 and 24, steam turbine 40, condenser 41 for condensing steam discharged from steam turbine 40, bypass pipes 16 and 26, and bypass valve 17 , 27 and a control device 50.
- the control device 50 is, for example, a computer having a memory such as a ROM or a RAM and a CPU, and a program stored in the ROM is executed by the CPU.
- the steam pipe 12 connects the exhaust heat recovery boiler 11 and the steam turbine 40.
- the upstream end of the steam pipe 22 is connected to the exhaust heat recovery boiler 21, and the downstream end is connected to a downstream portion of the steam pipe 12. Thereby, the steam in the steam pipe 22 merges with the steam in the steam pipe 12.
- the steam valve 14 is provided in the steam pipe 12.
- the steam valve 14 opens and closes the steam pipe 12.
- the check valve 13 is provided on the steam pipe 12 on the upstream side of the steam valve 14.
- the check valve 13 allows the steam flow in the steam pipe 12 in the direction from the exhaust heat recovery boiler 11 side to the steam turbine 40 side, and prevents the steam flow in the direction opposite to the above direction.
- the steam valve 24 is provided in the steam pipe 22.
- the steam valve 24 opens and closes the steam pipe 22.
- the check valve 23 is provided on the steam pipe 22 on the upstream side of the steam valve 24. The check valve 23 allows the steam flow in the steam pipe 22 in the direction from the exhaust heat recovery boiler 21 toward the steam turbine 40, and prevents the steam flow in the direction opposite to the above direction.
- the bypass pipe 16 is branched from a branch point of the steam pipe 12 located on the upstream side of the check valve 13, and a downstream end thereof is connected to the condenser 41.
- the bypass valve 17 is provided in the bypass pipe 16 and adjusts the amount of steam flowing in the bypass pipe 16, whereby the pressure in the steam pipe 12 is controlled.
- the bypass pipe 26 is branched from a branch point located on the upstream side of the check valve 23 of the steam pipe 22, and the downstream end thereof is connected to the condenser 41.
- the bypass valve 27 is provided in the bypass pipe 26 and adjusts the amount of steam flowing in the bypass pipe 26, whereby the pressure in the steam pipe 22 is controlled.
- the steam pipe 12 is provided with a temperature sensor 18 and a pressure sensor 60 at a position on the upstream side of the branch point in order from the upstream side.
- the temperature sensor 18 detects the temperature of steam flowing on the upstream side of the branch point in the steam pipe 12 and transmits the detection result to the control device 50.
- the pressure sensor 60 detects the pressure on the upstream side of the branch point in the steam pipe 12 and transmits the detection result to the control device 50.
- the steam pipe 12 is provided with a temperature sensor 15 and a pressure sensor 62 at positions downstream of the connection position of the downstream end of the steam pipe 22 to the steam pipe 12 in order from the upstream side.
- the temperature sensor 15 detects the temperature of steam (combined steam) flowing downstream of the connection position in the steam pipe 12 and transmits the detection result to the control device 50.
- the pressure sensor 62 detects the pressure downstream of the connection position in the steam pipe 12 and transmits the detection result to the control device 50.
- the steam pipe 22 is provided with a temperature sensor 28 and a pressure sensor 61 at an upstream position of the branch point in order from the upstream side.
- the temperature sensor 28 detects the temperature of the steam flowing on the upstream side of the branch point in the steam pipe 22, and transmits the detection result to the control device 50.
- the pressure sensor 61 detects the pressure on the upstream side of the branch point in the steam pipe 22 and transmits the detection result to the control device 50.
- a compartment temperature sensor 45 for detecting the compartment temperature of the steam turbine 40 can be provided. In this case, the detection result of the vehicle interior temperature sensor 45 can be used when determining an allowable temperature range described later.
- the steam generated by the exhaust heat recovery boiler 11 is generated by the exhaust heat recovery boiler 21 at the downstream side of the steam pipe 12 via the check valve 13 and the steam valve 14 and is controlled by the check valve.
- the steam After joining with the steam flowing in the steam pipe 22 via the steam valve 23 and the steam valve 24, the steam is sent to the steam turbine 40.
- the steam sent to the steam turbine 40 is discharged after working in the steam turbine 40, and the discharged steam is condensed by the condenser 41 to be condensed.
- the combined cycle power plant 1 is provided with condensate pipes 43 and 44.
- the upstream end of the condenser pipe 43 is connected to the bottom of the condenser 41, and the downstream end is connected to the exhaust heat recovery boiler 21.
- a pump 42 is inserted in the condensate pipe 43.
- the condensing pipe 44 is branched from a branch point provided on the downstream side of the condensing pipe 43, and the downstream end thereof is connected to the exhaust heat recovery boiler 11.
- the water generated in the condenser 41 is sent to the exhaust heat recovery boiler 21 through the condenser pipe 43 under the control of the pump 42 by the control device 50, and is also discharged through the condenser pipes 43 and 44. 11 is sent. Then, the water sent to the exhaust heat recovery boilers 11 and 21 undergoes heat exchange by the exhaust heat recovery boilers 11 and 21 to become steam.
- the control device 50 adjusts the opening of the bypass valve 17 with the steam valve 14 closed so that the pressure in the steam pipe 12 becomes the set pressure.
- the steam in the steam pipe 12 is sent to the condenser 41 via the bypass pipe 16 until the pressure in the steam pipe 12 reaches the set pressure.
- the control device 50 closes the bypass valve 17 and opens the steam valve 14.
- the steam that has reached the set pressure is sent to the inlet valve of the steam turbine 40 via the steam pipe 12, and the warm pipe and the steam turbine are warmed up by a not-shown warm pipe valve, and then detected by the temperature sensor 15. If the set temperature falls within the allowable temperature range, it is sent to steam turbine 40.
- the control device 50 closes the steam valve 24 and sets the pressure detected by the pressure sensor 61 (the pressure of the steam generated by the exhaust heat recovery boiler 21). ) Is adjusted to the same pressure as the pressure detected by the pressure sensor 60 (the pressure of the steam generated by the exhaust heat recovery boiler 11).
- the steam from the exhaust heat recovery boiler 21 is sent to the condenser 41 until the pressure detected by the pressure sensor 61 is increased until it becomes equal to the pressure detected by the pressure sensor 60.
- the control device 50 needs to increase the temperature of the steam from the exhaust heat recovery boiler 21 even if the pressure detected by the pressure sensor 61 reaches a pressure equivalent to the pressure detected by the pressure sensor 60.
- the steam from the exhaust heat recovery boiler 21 is prevented from being combined with the steam from the exhaust heat recovery boiler 11 by opening the steam valve 24. That is, the controller 50 is configured to monitor not only the pressure of the steam but also the temperature. This will be described below.
- the control device 50 acquires the temperatures detected by the temperature sensors 18, 28, 15, 45. Then, the control device 50 detects the temperature detected by the temperature sensor 28 (the temperature of the steam in the steam pipe 22) by the temperature sensor 18 (the temperature of the steam in the steam pipe 12) and the temperature sensor 15 to detect the temperature. If the temperature is not within the allowable temperature range determined based on the detected temperature (the temperature of the combined steam) and the temperature detected by the temperature sensor 45 (the temperature of the cabin of the steam turbine 40), the steam valve 24 is closed. While maintaining, the bypass valve 27 is maintained in the open state. Thus, it is possible to prevent the steam in the steam pipe 22 that has not yet been heated from joining the steam in the steam pipe 12.
- the allowable temperature range defines a range of a temperature at which the temperature of the steam in the steam pipe 22 should be based on the temperature of the steam in the steam pipe 12, the temperature of the combined steam, and the temperature of the cabin of the steam turbine 40. Things.
- the control device 50 opens the steam valve 24 and closes the bypass valve 27. Thereby, the steam from the exhaust heat recovery boiler 21 joins the steam from the exhaust heat recovery boiler 11, and the combined steam is sent to the steam turbine 40. Thus, the operation of connecting the exhaust heat recovery boiler 21 with the exhaust heat recovery boiler 11 is completed.
- the control device 50 acquires each temperature from the temperature sensors 18, 28, 15, and 45 (step S1). Next, the control device 50 determines whether or not the temperature detected by the temperature sensor 28 is within the above-described allowable temperature range (step S2). If the temperature detected by the temperature sensor 28 is not within the allowable temperature range (NO in step S2), the steam valve 24 is kept closed and the bypass valve 27 is kept open (step S3). Thereafter, the control device 50 monitors the pressure. On the other hand, when the temperature detected by temperature sensor 28 is within the allowable temperature range (YES in step S2), control device 50 opens steam valve 24 and closes bypass valve 27 (step S4). ), And then monitor the pressure.
- the temperature of the steam in the steam pipe 22 is the temperature of the steam in the steam pipe 12, the temperature of the combined steam, and the temperature of the cabin of the steam turbine 40. If the temperature is not within the allowable temperature range determined on the basis of the above, the steam valve 24 is closed and the bypass valve 27 is opened by the control device 50, so that the temperature of the steam in the steam pipe 22 is not yet high. At that time, that is, when the temperature of the steam in the steam pipe 22 is lower than the temperature of the steam in the steam pipe 12, the steam in the steam pipe 22 is sent to the condenser 41.
- the temperature of the steam after the merge does not fluctuate. Therefore, it is possible to prevent or suppress the occurrence of a difference in thermal expansion in the cabin of the steam turbine 40 due to a change in the steam temperature after the merging. Further, when a temperature reducer (desuperheater) is provided on the upstream side of the steam pipe 22 and a failure occurs in the temperature reducer, when the exhaust heat recovery boiler 21 is operated, It is possible to prevent the steam in the pipe 22 from joining the steam in the steam pipe 12.
- a temperature reducer desuperheater
- the steam valve 24 is kept closed and the bypass valve 27 is kept open.
- the present invention is not limited to this.
- the steam valve 24 is kept closed and The bypass valve 27 may be configured to be kept open.
- one exhaust heat recovery boiler 21 is provided as the second exhaust heat recovery boiler.
- the present invention is not limited to this, and two or more other exhaust heat recovery boilers are provided. May be provided to perform these connecting operations.
- the steam valves 14 and 24 employ the on-off valves that can open and close the steam pipes 12 and 22.
- the present invention is not limited to this.
- a flow control valve for controlling the amount of steam may be employed.
- downstream end of the steam pipe 22 is directly connected to a portion of the steam pipe 12 downstream of the steam valve 14, but the present invention is not limited to this, and the steam pipe 22 may be connected via a steam header.
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Engine Equipment That Uses Special Cycles (AREA)
- Control Of Turbines (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020217005228A KR102512440B1 (ko) | 2018-08-08 | 2019-07-25 | 컴바인드 사이클 발전 플랜트 |
CN201980052536.9A CN112534122B (zh) | 2018-08-08 | 2019-07-25 | 联合循环发电设备 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018149383A JP7137398B2 (ja) | 2018-08-08 | 2018-08-08 | コンバインドサイクル発電プラント |
JP2018-149383 | 2018-08-08 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2020031716A1 true WO2020031716A1 (ja) | 2020-02-13 |
Family
ID=69414105
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2019/029168 WO2020031716A1 (ja) | 2018-08-08 | 2019-07-25 | コンバインドサイクル発電プラント |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP7137398B2 (zh) |
KR (1) | KR102512440B1 (zh) |
CN (1) | CN112534122B (zh) |
TW (1) | TWI703263B (zh) |
WO (1) | WO2020031716A1 (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5114555A (ja) * | 1974-07-29 | 1976-02-05 | Hitachi Ltd | Jokitaabingasutaabinkonbaindopurantono seigyohoho oyobi seigyosochi |
JPS5134348A (ja) * | 1974-09-17 | 1976-03-24 | Hitachi Ltd | Fukugosaikurupuranto no untenyunitsutosukirikaehoshiki |
JPS5171441A (ja) * | 1974-12-18 | 1976-06-21 | Hitachi Ltd | Fukugosaikurupurantonontenhoshiki |
JPH0658104A (ja) * | 1992-08-07 | 1994-03-01 | Hitachi Ltd | 多軸複合サイクル発電プラント |
JP2014125892A (ja) * | 2012-12-25 | 2014-07-07 | Hitachi Ltd | 蒸気タービンプラント |
JP2015124710A (ja) * | 2013-12-26 | 2015-07-06 | 株式会社東芝 | 制御装置、及び起動方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS604533B2 (ja) | 1979-12-28 | 1985-02-05 | 関西電力株式会社 | ブツシング |
JP4481586B2 (ja) | 2003-04-24 | 2010-06-16 | 株式会社東芝 | コンバインドサイクル発電プラントおよびその起動方法 |
JP2005146876A (ja) | 2003-11-11 | 2005-06-09 | Toshiba Corp | コンバインドサイクル発電プラントおよびその起動方法 |
JP5134348B2 (ja) * | 2007-12-04 | 2013-01-30 | 帝人ファイバー株式会社 | 表面がフラットなストレッチ性織物およびスポーツ衣料 |
EP2299068A1 (de) * | 2009-09-22 | 2011-03-23 | Siemens Aktiengesellschaft | Kraftwerksanlage mit Überlast-Regelventil |
JP6375585B2 (ja) * | 2014-03-31 | 2018-08-22 | 三菱日立パワーシステムズ株式会社 | コンバインドサイクルプラント、その制御方法、及びその制御装置 |
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2018
- 2018-08-08 JP JP2018149383A patent/JP7137398B2/ja active Active
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2019
- 2019-07-25 CN CN201980052536.9A patent/CN112534122B/zh active Active
- 2019-07-25 KR KR1020217005228A patent/KR102512440B1/ko active IP Right Grant
- 2019-07-25 WO PCT/JP2019/029168 patent/WO2020031716A1/ja active Application Filing
- 2019-08-07 TW TW108128110A patent/TWI703263B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5114555A (ja) * | 1974-07-29 | 1976-02-05 | Hitachi Ltd | Jokitaabingasutaabinkonbaindopurantono seigyohoho oyobi seigyosochi |
JPS5134348A (ja) * | 1974-09-17 | 1976-03-24 | Hitachi Ltd | Fukugosaikurupuranto no untenyunitsutosukirikaehoshiki |
JPS5171441A (ja) * | 1974-12-18 | 1976-06-21 | Hitachi Ltd | Fukugosaikurupurantonontenhoshiki |
JPH0658104A (ja) * | 1992-08-07 | 1994-03-01 | Hitachi Ltd | 多軸複合サイクル発電プラント |
JP2014125892A (ja) * | 2012-12-25 | 2014-07-07 | Hitachi Ltd | 蒸気タービンプラント |
JP2015124710A (ja) * | 2013-12-26 | 2015-07-06 | 株式会社東芝 | 制御装置、及び起動方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI703263B (zh) | 2020-09-01 |
JP2020023943A (ja) | 2020-02-13 |
KR102512440B1 (ko) | 2023-03-21 |
CN112534122A (zh) | 2021-03-19 |
KR20210031976A (ko) | 2021-03-23 |
TW202007846A (zh) | 2020-02-16 |
CN112534122B (zh) | 2023-09-15 |
JP7137398B2 (ja) | 2022-09-14 |
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