WO2020029482A1 - 一种石墨框矫正装置及其矫正方法 - Google Patents

一种石墨框矫正装置及其矫正方法 Download PDF

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WO2020029482A1
WO2020029482A1 PCT/CN2018/118251 CN2018118251W WO2020029482A1 WO 2020029482 A1 WO2020029482 A1 WO 2020029482A1 CN 2018118251 W CN2018118251 W CN 2018118251W WO 2020029482 A1 WO2020029482 A1 WO 2020029482A1
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correction
frame
wheel
rod
graphite
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PCT/CN2018/118251
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English (en)
French (fr)
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夏刚
徐林根
朱泓磊
黄闻祥
王亮
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通威太阳能（合肥）有限公司
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Publication of WO2020029482A1 publication Critical patent/WO2020029482A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles

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  • the invention relates to the technical field of graphite frames, in particular to a graphite frame correction device and a correction method thereof.
  • the production process of plate type anti-reflection coating equipment is: automatic loading-main equipment cavity-unloading automation, the graphite frame runs to the loading and unloading automation.
  • the loading platform will contact the graphite frame crystal bar.
  • the graphite frame is in the cavity Running back and forth in the body, when the graphite frame is deformed and loaded on the automatic loading platform, touching the graphite frame will cause the silicon wafer to jitter larger and cause the chip to fall off.
  • the rails are synchronized with the cavity. Wheel mismatches can cause misalignment in the cavity or stuttering of the graphite frame, which can lead to jamming.
  • the graphite frame is easily deformed under the action of high temperature baking in the cavity of the anti-reflection coating equipment and its own gravity.
  • the jitter is large, and it is easy to drop the wafer or jam the frame during operation. Therefore, it is necessary to provide a problem in order to reduce the abnormality generated in the cavity during the production process and the problem of automatic wafer dropping.
  • An object of the present invention is to provide a graphite frame correction device and a correction method thereof, so as to solve the problems raised in the background art described above.
  • the present invention provides the following technical solutions:
  • a graphite frame correction device includes a main frame, and a connection frame is fixed vertically on the main frame.
  • the connection frame is sequentially fixedly connected with a plurality of fixing rods, and a positioning block is fixed on one side of the fixing rods.
  • a side of the positioning block away from the fixed rod is provided with a correction wheel rod, and the correction wheel rod is fixed with a correction wheel.
  • Two ends of the correction wheel rod are fixedly connected with a traction rod, and the traction rod is connected to a piston-type cylinder.
  • the piston-type cylinder is fixedly connected to the main frame.
  • a limiting plate is provided between the fixing rod and the correction wheel rod, and the limiting plate is fixedly connected to the connection frame.
  • a wheel lever hole is opened on a side of the limiting plate near the correction wheel lever, and the wheel lever hole is movably connected with the correction wheel lever.
  • a support mechanism is fixedly connected below the main frame, the support mechanism includes a support plate and a bottom plate, the support plate is fixedly connected to the main frame, and the bottom plate is fixedly connected to the support plate through a link.
  • a graphite frame correction method includes the following steps:
  • the graphite frame is compressed and corrected by a correction wheel and a positioning block through a correction device and a correction method, which can well repair the modified graphite frame and increase the service life of the graphite frame, thereby reducing the debris rate and the process cavity. Isolation rate of defective products caused by falling pieces, and reducing the graphite frame jitter, solving the problem of the cooperation between the graphite frame and the equipment hardware, reducing the number of friction between the graphite frame and the silicon wafer, which is very practical and worthy of promotion.
  • FIG. 1 is a schematic front view of a structure when a correction device corrects a graphite frame according to the present invention
  • FIG. 2 is a schematic left side view of the structure when the correction device of the present invention corrects a graphite frame
  • FIG. 3 is a schematic plan view of the structure when the correction device of the present invention corrects a graphite frame
  • FIG. 4 is a schematic front view of the structure of five sets of correction wheels of the correction device of the present invention when the graphite frame is corrected
  • FIG. 5 is a schematic front view of the structure of the graphite frame of the present invention when it is just inserted into 5 sets of correction wheel correction devices;
  • FIG. 6 is an enlarged view of the structure of the area A of the present invention.
  • FIG. 7 is a schematic structural diagram of a connection between a corrective wheel rod and a piston-type cylinder of the present invention.
  • FIG. 8 is a schematic front view of the structure of the correction device of the present invention when no correction wheel is installed;
  • FIG. 9 is a schematic left side view of the structure of the correction device of the present invention without a correction wheel;
  • FIG. 10 is a schematic plan view of the structure when the correction device of the present invention is not equipped with a correction wheel.
  • the present invention provides a technical solution:
  • a graphite frame correcting device includes a main frame 1, and a main frame 1 is vertically fixed with a connection frame 2.
  • the main frame 1 is symmetrically provided with two pieces.
  • the connection frame 2 is vertically disposed and fixedly connects two main frames 1 together.
  • the frame 2 is fixedly connected with a plurality of fixing rods 3 in sequence. As shown in FIG. 4 of the description, five fixing rods 3 are fixed to the connecting frame 2 at a vertical interval.
  • a positioning block 4 is fixed on one side of the fixing rod 3, and the positioning block 4 is horizontal. Is fixed on the fixing rod 3.
  • a correction wheel rod 5 is provided on the side of the positioning block 4 away from the fixed rod 3.
  • a correction wheel 6 is fixed on the correction wheel rod 5.
  • the correction wheel rod 5 and the correction wheel 6 are both disposed between the two fixed rods 3.
  • the correction wheel rod 5 Tow rod 7 is fixedly connected at both ends.
  • the tow rod 7 is horizontally arranged to achieve horizontal movement, thereby driving the correction wheel rod 5 to move and correct the graphite frame 100.
  • the tow rod 7 is connected to the piston cylinder 8.
  • the piston-type cylinder 8 is fixedly connected to the main frame 1.
  • the piston-type cylinder 8 uses the SMC piston cylinder MUB32-40DZ of Yueqing Shenwei Pneumatic Co., Ltd., which is convenient to control and can well drive the tow rod 7 for linear motion.
  • a limiting plate 9 is provided between the fixing rod 3 and the correcting wheel rod 5, the limiting plate 9 is arranged on the upper and lower sides, and the limiting plate 9 is fixedly connected to the connection frame 2 for inserting and inserting between the two fixing rods 3.
  • the graphite frame 100 is used to limit the position.
  • the limit plate 9 is provided with a wheel lever hole 91 on the side close to the correction wheel lever 5.
  • the wheel lever hole 91 is movably connected to the correction wheel lever 5. The setting of the wheel lever hole 91 makes the correction wheel lever 5 It can not be blocked by the limiting plate 9 during the linear movement, and the graphite frame 100 can be squeezed and corrected better.
  • a support mechanism is fixedly connected below the main frame 1.
  • the support mechanism includes a support plate 10 and a bottom plate 12.
  • the support plate 10 is fixedly connected to the main frame 1.
  • the bottom plate 12 is fixedly connected to the support plate 10 through a link 11. Through the setting of the support mechanism, The main frame 1 can be supported for convenient use.
  • the method of rectifying a graphite frame includes the following steps:

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  • Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

一种石墨框矫正装置，包括主框架（1），主框架（1）上垂直固定有连接框架（2），连接框架（2）依次固定连接有若干固定杆（3），固定杆（3）一侧固定有定位块（4）；定位块（4）远离固定杆（3）一侧设置有矫正轮杆（5），矫正轮杆（5）上固定有矫正轮（6），矫正轮杆（5）两端均固定连接有牵引杆（7），牵引杆（7）连接于活塞式气缸（8）上，且活塞式气缸（8）固定连接于主框架（1）上。以及一种石墨框矫正方法，包括以下步骤：S1、放板；S2、矫正；S3、取板。

Description

一种石墨框矫正装置及其矫正方法 技术领域
本发明涉及石墨框技术领域，具体为一种石墨框矫正装置及其矫正方法。
背景技术
板式减反射设镀膜设备生产过程为：自动化上料-主设备腔体-下料自动化，石墨框运行到上下料自动化中装料平台会跟石墨框晶条接触，进入腔体后石墨框在腔体内来回跑动，石墨框变形后往自动化装料平台上料时，触碰到石墨框后会导致硅片抖动变大，产生掉片；石墨框变形进入腔体内后由于导轨条与腔体内同步轮不匹配出现腔内跑偏或石墨框卡顿等现象，导致卡框，而且石墨框在减反射设镀膜设备腔体内的高温烘烤和自身重力的作用下容易造成变型，使石墨框在腔体内运载硅片时抖动较大，容易出现掉片或者运行过程中卡框，所以需要提供一种为了减少生产过程中腔内产生的异常及自动化处掉片的问题。
发明内容
本发明的目的在于提供一种石墨框矫正装置及其矫正方法，以解决上述背景技术中提出的问题。
为实现上述目的，本发明提供如下技术方案：
一种石墨框矫正装置，包括主框架，所述主框架上垂直固定有连接框架，所述连接框架依次固定连接有若干固定杆，所述固定杆一侧固定有定位块；
所述定位块远离固定杆一侧设置有矫正轮杆，所述矫正轮杆上固定有矫正轮，所述矫正轮杆两端均固定连接有牵引杆，所述牵引杆连接于活塞式气缸上，且活塞式气缸固定连接于主框架上。
优选的，所述固定杆与矫正轮杆之间设置有限位板，所述限位板固定连接于连接框架上。
优选的，所述限位板靠近矫正轮杆一侧开设有轮杆孔，所述轮杆孔与矫正轮杆活动连接。
优选的，所述主框架下方固定连接有支撑机构，所述支撑机构包括支撑板和底板，所述支撑板与主框架固定连接，底板通过连杆固定连接于支撑板上。
一种石墨框矫正方法，包括以下步骤：
S1、放板：将石墨框插设于矫正轮与定位块之间，并保持竖直状态；
S2、矫正：启动活塞式气缸，调整活塞式气缸的气路压力，带动矫正轮挤压石墨框朝向定位块运动，通过矫正轮和定位块将石墨框夹持住；
S3、取板：关闭活塞式气缸，使得矫正轮复位，从矫正轮和定位块之间将石墨框取出。
与现有技术相比，本发明的有益效果是：
本发明通过矫正装置并配合着矫正的方法，通过矫正轮和定位块对石墨框进行挤压矫正，可以很好的修复变型石墨框，增加石墨框的使用寿命，从而降低碎片率和因工艺腔掉片造成的不良品隔离率，以及降低石墨框抖动，解决石墨框与设备硬件配合，降低石墨框与硅片摩擦次数，实用性很强，非常值得推广。
附图说明
图1为本发明的矫正装置矫正石墨框时的结构主视示意图；
图2为本发明的矫正装置矫正石墨框时的结构左视示意图；
图3为本发明的矫正装置矫正石墨框时的结构俯视示意图；
图4为本发明的矫正装置5组矫正轮矫正石墨框时的结构主视示意图
图5为本发明的石墨框刚插入5组矫正轮矫正装置时的结构主视示意图；
图6为本发明的A区结构示放大意图；
图7为本发明的矫正轮杆与活塞式气缸连接结构示意图；
图8为本发明的矫正装置未安装矫正轮时结构主视示意图；
图9为本发明的矫正装置未安装矫正轮时结构左视示意图；
图10为本发明的矫正装置未安装矫正轮时结构俯视示意图。
图中：1主框架、2连接框架、3固定杆、4定位块、5矫正轮杆、6矫正轮、7牵引杆、8活塞式气缸、9限位板、91轮杆孔、10支撑板、11连杆、12底板、100石墨框。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。
请参阅图1-10，本发明提供一种技术方案：
一种石墨框矫正装置，包括主框架1，主框架1上垂直固定有连接框架2，主框架1对称设置有两块，连接框架2垂直设置的将两块主框架1固定连接在一起，连接框架2依次固定连接有若干固定杆3，如说明书附图4所示，5根固定杆3竖直的间隔固定在连接框架2上，固定杆3一侧固定有定位块4，定位块4水平的固定在固定杆3上。
定位块4远离固定杆3一侧设置有矫正轮杆5，矫正轮杆5上固定有矫正轮6，矫正轮杆5和矫正轮6均设置于两根固定杆3之间，矫正轮杆5两端均固定连接有牵引杆7，牵引杆7水平设置，可以实现水平方向的移动，从而带动矫正轮杆5进行移动，对石墨框100进行矫正，牵引杆7连接于活塞式气缸8上，且活塞式气缸8固定连接于主框架1上，活塞式气缸8选用乐清市神威气动有限公司的SMC活塞气缸MUB32-40DZ，方便控制，而且可以很好的 带动牵引杆7进行直线运动。
固定杆3与矫正轮杆5之间设置有限位板9，限位板9设置在上下两侧，限位板9固定连接于连接框架2上，用来对插入进入两根固定杆3之间的石墨框100进行限位，限位板9靠近矫正轮杆5一侧开设有轮杆孔91，轮杆孔91与矫正轮杆5活动连接，轮杆孔91的设置，使得矫正轮杆5可以在直线移动的过程中，不会被限位板9挡住，更好的对石墨框100进行挤压矫正。
主框架1下方固定连接有支撑机构，支撑机构包括支撑板10和底板12，支撑板10与主框架1固定连接，底板12通过连杆11固定连接于支撑板10上，通过支撑机构的设置，可以对主框架1进行支撑，方便使用。
石墨框的矫正方法，包括以下步骤：
S1、放板：将石墨框100插设于矫正轮6与定位块4之间，并保持竖直状态；
S2、矫正：启动活塞式气缸8，调整活塞式气缸8的气路压力，带动矫正轮6挤压石墨框100朝向定位块4运动，通过矫正轮6和定位块4将石墨框100夹持住；
S3、取板：关闭活塞式气缸8，使得矫正轮6复位，从矫正轮6和定位块4之间将石墨框100取出。
尽管已经示出和描述了本发明的实施例，对于本领域的普通技术人员而言，可以理解在不脱离本发明的原理和精神的情况下可以对这些实施例进行多种变化、修改、替换和变型，本发明的范围由所附权利要求及其等同物限定。

Claims (5)

  1. 一种石墨框矫正装置，包括主框架(1)，其特征在于：所述主框架(1)上垂直固定有连接框架(2)，所述连接框架(2)依次固定连接有若干固定杆(3)，所述固定杆(3)一侧固定有定位块(4)；
    所述定位块(4)远离固定杆(3)一侧设置有矫正轮杆(5)，所述矫正轮杆(5)上固定有矫正轮(6)，所述矫正轮杆(5)两端均固定连接有牵引杆(7)，所述牵引杆(7)连接于活塞式气缸(8)上，且活塞式气缸(8)固定连接于主框架(1)上。
  2. 根据权利要求1所述的一种石墨框矫正装置，其特征在于：所述固定杆(3)与矫正轮杆(5)之间设置有限位板(9)，所述限位板(9)固定连接于连接框架(2)上。
  3. 根据权利要求2所述的一种石墨框矫正装置，其特征在于：所述限位板(9)靠近矫正轮杆(5)一侧开设有轮杆孔(91)，所述轮杆孔(91)与矫正轮杆(5)活动连接。
  4. 根据权利要求1所述的一种石墨框矫正装置，其特征在于：所述主框架(1)下方固定连接有支撑机构，所述支撑机构包括支撑板(10)和底板(12)，所述支撑板(10)与主框架(1)固定连接，底板(12)通过连杆(11)固定连接于支撑板(10)上。
  5. 一种石墨框矫正方法，使用权利要求1所述的石墨框矫正装置，其特征在于，包括以下步骤：
    S1、放板：将石墨框(100)插设于矫正轮(6)与定位块(4)之间，并保持竖直状态；
    S2、矫正：启动活塞式气缸(8)，调整活塞式气缸(8)的气路压力，带动矫正轮(6)挤压石墨框(100)朝向定位块(4)运动，通过矫正轮(6)和定位块(4)将石墨框(100)夹持住；
    S3、取板：关闭活塞式气缸(8)，使得矫正轮(6)复位，从矫正轮(6)和定位块(4)之间将石墨框(100)取出。
PCT/CN2018/118251 2018-08-06 2018-11-29 一种石墨框矫正装置及其矫正方法 WO2020029482A1 (zh)

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