WO2020009242A1 - 半導体ダイのピックアップシステム - Google Patents
半導体ダイのピックアップシステム Download PDFInfo
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- WO2020009242A1 WO2020009242A1 PCT/JP2019/026908 JP2019026908W WO2020009242A1 WO 2020009242 A1 WO2020009242 A1 WO 2020009242A1 JP 2019026908 W JP2019026908 W JP 2019026908W WO 2020009242 A1 WO2020009242 A1 WO 2020009242A1
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- semiconductor die
- value
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- pickup
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 576
- 230000007246 mechanism Effects 0.000 claims abstract description 48
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
Definitions
- the present invention relates to a semiconductor die pickup system used for a bonding apparatus (bonding system).
- Semiconductor dies are manufactured by cutting a 6 inch or 8 inch wafer into a predetermined size. At the time of cutting, a dicing sheet is attached to the back surface so that the cut semiconductor dies do not fall apart, and the wafer is cut from the front side by a dicing saw or the like. At this time, the dicing sheet affixed to the back surface is slightly cut, but is not cut, and holds each semiconductor die. Each of the cut semiconductor dies is picked up one by one from the dicing sheet and sent to the next step such as die bonding.
- a dicing sheet As a method of picking up a semiconductor die from a dicing sheet, a dicing sheet is sucked on the surface of a disk-shaped suction piece, and the semiconductor die is sucked by a collet.
- a method has been proposed in which a semiconductor die is picked up from a dicing sheet by raising a collet and raising a collet (see, for example, FIGS. 9 to 23 of Patent Document 1).
- peeling the semiconductor die from the dicing sheet it is effective to first peel the peripheral portion of the semiconductor die and then peel the central portion of the semiconductor die.
- the push-up block is divided into three parts: one that pushes up the peripheral portion of the semiconductor die, one that pushes up the center of the semiconductor die, and one that pushes up the middle of the die.
- the three blocks are raised to a predetermined height.
- the middle and middle blocks are raised higher than the surrounding blocks, and finally the center block is raised higher than the middle block.
- the collet and the peripheral, intermediate, and center push-up blocks are set at a predetermined height higher than the surface of the ejector cap. After raising the collet, leave the collet at the same height, lower the surrounding push-up block, the middle push-up block, and then the push-up block to a position below the ejector cap surface, and peel the dicing sheet from the semiconductor die A method has been proposed (for example, see Patent Document 2).
- Patent Document 3 also discloses that the bending (bending) of a semiconductor die is detected (determined) by a change in the flow rate of suction air from a collet.
- semiconductor dies have become extremely thin, for example, some are about 20 ⁇ m.
- the thickness of the dicing sheet is about 100 ⁇ m, the thickness of the dicing sheet is four to five times the thickness of the semiconductor die. If such a thin semiconductor die is to be separated from the dicing sheet, the deformation of the semiconductor die following the deformation of the dicing sheet is more likely to occur.
- the semiconductor die when a semiconductor die is picked up from a dicing sheet, the semiconductor die may be damaged, and there is room for improvement.
- the peeling properties of the semiconductor dies from the dicing sheet may change.
- the peelability of the semiconductor die picked up at the beginning was good (the peelability was high), but the peelability of the semiconductor die picked up at the later side was worse than that (easy peeling). Degree is lower).
- the reverse is also possible.
- the semiconductor die will be damaged.
- the semiconductor die is not damaged, but the semiconductor die is originally picked up over a long period of time although the semiconductor die can be picked up in a shorter time. .
- the present invention appropriately suppresses damage to a semiconductor die when picking up a semiconductor die, and suppresses damage to the semiconductor die when continuously picking up a plurality of semiconductor dies, and increases the speed of pickup of the semiconductor die.
- the purpose is to make the balance with the optimization appropriate.
- the semiconductor die pick-up system of the present invention is a semiconductor die pick-up system for picking up a semiconductor die attached to a surface of a dicing sheet from a dicing sheet.
- a suction mechanism for sucking air from the front surface a flow sensor for detecting a suction air flow rate sucked by the suction mechanism, a stage including a suction surface for suctioning the back surface of the dicing sheet, and an opening provided on the suction surface of the stage.
- An opening pressure switching mechanism for switching an opening pressure between a first pressure close to a vacuum and a second pressure close to the atmospheric pressure, and setting means for setting a pickup parameter including the number of times the opening pressure is switched when a semiconductor die is picked up.
- Setting means when picking up a semiconductor die, a flow rate sensor. Obtains a flow rate change that is a time change of the suction air flow rate detected by the apparatus, calculates an evaluation value that evaluates the releasability of peeling the semiconductor die from the dicing sheet based on the flow rate change, and, based on the evaluation value, A pickup parameter for picking up another semiconductor die after picking up the die is changed.
- the setting means may change a time for keeping the opening pressure at the first pressure when picking up the other semiconductor die based on an evaluation value.
- the semiconductor die pickup system further includes a plurality of moving elements disposed in the opening and moving between a first position whose tip surface is higher than the suction surface and a second position lower than the first position.
- a plurality of moving elements disposed in the opening and moving between a first position whose tip surface is higher than the suction surface and a second position lower than the first position.
- each of the plurality of moving elements is sequentially moved from the first position to the second position at predetermined time intervals or at the same time by a combination of predetermined moving elements.
- the predetermined time for picking up the semiconductor die may be changed based on the evaluation value.
- the setting unit changes the number of moving elements to be moved from the first position to the second position at the same time as the pickup of the other semiconductor die based on an evaluation value. It may be.
- the opening pressure is switched between the first pressure and the second pressure and the dicing sheet sucked at the opening is peeled off from the semiconductor die.
- the flow rate change may be a time change of the suction air flow rate detected by the flow rate sensor at the time of initial peeling.
- the number of times of switching may be the number of times that the opening pressure at the time of initial peeling is switched between the first pressure and the second pressure.
- the setting means sets a waiting time from when the collet lands on the semiconductor die to when the other semiconductor die separates from the dicing sheet to start lifting the semiconductor die based on the evaluation value. May be changed.
- a storage unit that stores an expected flow rate change that is a time change of the suction air flow rate when the semiconductor die is picked up
- the setting means may determine the evaluation value based on a correlation value between the change in the flow rate when picking up the semiconductor die and the change in the expected flow rate.
- the semiconductor die further includes an inspection unit for inspecting a crack of the semiconductor die, and when the semiconductor die is picked up, the semiconductor die that has been subjected to the switching at least a predetermined number of times is subjected to the crack inspection. , May be.
- the setting means acquires the flow rate change of the semiconductor die constituting one or more wafers, obtains an evaluation value based on each flow rate change, and obtains a plurality of evaluation values.
- the pickup parameter for picking up the other semiconductor die may be changed based on the above.
- a table of parameter values of the pickup parameters associated with each of the plurality of level values a current level value that is the level value of the parameter value of the currently applied pickup parameter, and a storage unit for storing the parameter value of the pickup parameter from the table using the current level value as a key, picking up the semiconductor die by applying the parameter value of the pickup parameter, and setting means based on the evaluation value.
- the parameter value of the pickup parameter for picking up the other semiconductor die may be changed.
- the semiconductor die for which the evaluation value is calculated is a specific semiconductor die
- the setting means calculates the representative value which is a representative value of the evaluation values of one or more specific semiconductor dies.
- a die evaluation value is obtained, and when the representative die evaluation value is higher than the first predetermined value, when the other semiconductor die is picked up, the number of times of switching is smaller than the number of times of switching when a specific semiconductor die is picked up.
- the representative die evaluation value is lower than a second predetermined value which is a value lower than the first predetermined value, when picking up the other semiconductor die, when picking up a specific semiconductor die
- the number of times of switching may be increased as compared with the number of times of switching.
- the semiconductor die for which the evaluation value is calculated is a specific semiconductor die
- the setting means calculates the representative value which is a representative value of the evaluation values of one or more specific semiconductor dies.
- a die evaluation value is obtained, and when the representative die evaluation value is higher than the third predetermined value, when picking up the other semiconductor die, the opening pressure at the time of picking up a specific semiconductor die is held at the first pressure.
- the representative die evaluation value is lower than the fourth predetermined value, which is lower than the third predetermined value, when the representative die evaluation value is lower than the fourth predetermined value, the specific semiconductor
- the opening time when the die is picked up may be set to be longer than the time when the opening pressure is maintained at the first pressure.
- the semiconductor die for which the evaluation value is calculated is a specific semiconductor die
- the setting means calculates the representative value which is a representative value of the evaluation values of one or more specific semiconductor dies.
- a die evaluation value is obtained, and when the representative die evaluation value is higher than a fifth predetermined value, when the other semiconductor die is picked up, the predetermined semiconductor die is compared with the predetermined time when the specific semiconductor die is picked up.
- the time is shortened and the representative die evaluation value is lower than the sixth predetermined value which is a value lower than the fifth predetermined value, when picking up the other semiconductor die, the above-described time when the specific semiconductor die is picked up
- the predetermined time may be set longer than the predetermined time.
- the semiconductor die for which the evaluation value is calculated is a specific semiconductor die
- the setting means calculates the representative value which is a representative value of the evaluation values of one or more specific semiconductor dies.
- a die evaluation value is obtained, and when the representative die evaluation value is higher than a seventh predetermined value, the second semiconductor die is picked up from the first position at the same time as the specific semiconductor die is picked up when picking up the other semiconductor die.
- the representative die evaluation value is lower than the eighth predetermined value, which is lower than the seventh predetermined value, when picking up the other semiconductor die, at the same time when picking up a specific semiconductor die, the first die is moved from the first position.
- the number of moving elements may be smaller than the number of moving elements moved to the second position.
- the semiconductor die for which the evaluation value is calculated is a specific semiconductor die
- the setting means calculates the representative value which is a representative value of the evaluation values of one or more specific semiconductor dies.
- a die evaluation value is obtained, and when the representative die evaluation value is higher than the ninth predetermined value, when the other semiconductor die is picked up, the standby time is shorter than the standby time when a specific semiconductor die is picked up.
- the standby time may be set longer than the standby time.
- the semiconductor die for calculating the evaluation value is a specific semiconductor die
- the setting means compares each of the evaluation values of one or more specific semiconductor dies with an eleventh predetermined value. Then, the number of easily peelable detections, which is the number of evaluation values higher than the eleventh predetermined value, is determined, and each of the evaluation values of one or more specific semiconductor dies is determined with a twelfth predetermined value that is a value lower than the eleventh predetermined value. In comparison, the number of difficult-to-peel detections, which is the number of evaluation values lower than the twelfth predetermined value, is determined. The number of times of switching at the time of pickup may be changed.
- the semiconductor die for calculating the evaluation value is a specific semiconductor die
- the setting means compares each of the evaluation values of one or more specific semiconductor dies with an eleventh predetermined value. Then, the number of easily peelable detections, which is the number of evaluation values higher than the eleventh predetermined value, is determined, and each of the evaluation values of one or more specific semiconductor dies is determined with a twelfth predetermined value that is a value lower than the eleventh predetermined value. In comparison, the number of difficult-to-peel detections, which is the number of evaluation values lower than the twelfth predetermined value, is determined. The time during which the opening pressure at the time of pickup is maintained at the first pressure may be changed.
- the semiconductor die for calculating the evaluation value is a specific semiconductor die
- the setting means compares each of the evaluation values of one or more specific semiconductor dies with an eleventh predetermined value. Then, the number of easily peelable detections, which is the number of evaluation values higher than the eleventh predetermined value, is determined, and each of the evaluation values of one or more specific semiconductor dies is determined with a twelfth predetermined value that is a value lower than the eleventh predetermined value. In comparison, the number of difficult-to-peel detections, which is the number of evaluation values lower than the twelfth predetermined value, is determined.
- the predetermined time at the time of pickup may be changed.
- the semiconductor die for calculating the evaluation value is a specific semiconductor die
- the setting means compares each of the evaluation values of one or more specific semiconductor dies with an eleventh predetermined value. Then, the number of easily peelable detections, which is the number of evaluation values higher than the eleventh predetermined value, is determined, and each of the evaluation values of one or more specific semiconductor dies is determined with a twelfth predetermined value that is a value lower than the eleventh predetermined value. In comparison, the number of difficult-to-peel detections, which is the number of evaluation values lower than the twelfth predetermined value, is determined. The number of the moving elements at the time of pickup may be changed.
- the semiconductor die for calculating the evaluation value is a specific semiconductor die
- the setting means compares each of the evaluation values of one or more specific semiconductor dies with an eleventh predetermined value. Then, the number of easily peelable detections, which is the number of evaluation values higher than the eleventh predetermined value, is determined, and each of the evaluation values of one or more specific semiconductor dies is determined with a twelfth predetermined value that is a value lower than the eleventh predetermined value. In comparison, the number of difficult-to-peel detections, which is the number of evaluation values lower than the twelfth predetermined value, is determined. The standby time at the time of pickup may be changed.
- the present invention can accurately suppress damage to a semiconductor die when picking up a semiconductor die, and can suppress damage to the semiconductor die when picking up a plurality of semiconductor dies continuously, and can increase the speed of pickup of the semiconductor die. This has the effect of making it possible to make the balance with the optimization appropriate.
- FIG. 1 is a perspective view showing a stage of a semiconductor die pickup system according to an embodiment of the present invention. It is explanatory drawing which shows the wafer stuck on the dicing sheet. It is explanatory drawing which shows the semiconductor die stuck on the dicing sheet. It is explanatory drawing which shows the structure of a wafer holder. It is explanatory drawing which shows the structure of a wafer holder.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 4 is an explanatory diagram showing an operation at a predetermined level value of the semiconductor die pickup system in the embodiment of the present invention.
- FIG. 7 is a diagram showing a time change of the air leak amount of FIG.
- FIG. 4 is a diagram illustrating an example of a parameter table according to the embodiment of the present invention.
- FIG. 5 is a diagram showing a time change of the scalar. It is a figure which shows an example of the time change of the opening pressure, the expected flow rate change, and the actual flow rate change in the predetermined period of initial peeling in embodiment of this invention.
- 6 is a flowchart illustrating a flow of level transition control according to the embodiment of the present invention.
- FIG. 4 is a diagram illustrating an example of a threshold table according to the embodiment of the present invention.
- a semiconductor die pickup system 500 includes a wafer holder 10 that holds a dicing sheet 12 on which a semiconductor die 15 is adhered to a front surface 12a and moves in a horizontal direction.
- a drive unit 120, a collet drive unit 130 that drives the collet 18 in the vertical and horizontal directions, and a control unit 150 that controls the semiconductor die pickup system 500 are provided.
- the step surface forming mechanism 300 and the step surface forming mechanism driving section 400 are housed in the base portion 24 of the stage 20.
- the step surface forming mechanism 300 is located above the stage 20, and the step surface forming mechanism driving unit 400 is located below the stage 20.
- the step surface forming mechanism 300 includes a plurality of moving elements 30 that move in the vertical direction. The distal end surfaces of the plurality of moving elements 30 move downward as shown by the arrow a in FIG. 1 by the step surface forming mechanism driving unit 400. Details of the moving element 30 will be described later.
- the opening pressure switching mechanism 80 that switches the pressure of the opening 23 of the stage 20 includes a three-way valve 81 and a drive unit 82 that drives the three-way valve 81 to open and close.
- the three-way valve 81 has three ports. The first port is connected to the base portion 24 communicating with the opening 23 of the stage 20 by a pipe 83, the second port is connected to a vacuum device 140 by a pipe 84, and the third port The port is connected to a pipe 85 that is open to the atmosphere.
- Driving unit 82 the first port and the second port and blocks the third port communicates, the pressure in the opening 23 or the first pressure P 1 near vacuum, made to communicate with the first port and the third port blocking the second port, switching the pressure of the opening 23 by or to a second pressure P 2 close to atmospheric pressure, the pressure of the opening 23 between the first pressure P 1 and the second pressure P 2.
- the suction pressure switching mechanism 90 for switching the suction pressure of the suction surface 22 of the stage 20 includes a three-way valve 91 having three ports, and a driving unit 92 for opening and closing the three-way valve 91.
- the first port is connected to a suction hole 27 communicating with the groove 26 of the stage 20 via a pipe 93
- the second port is connected to a vacuum device 140 via a pipe 94
- the third port is connected to a pipe 95 open to the atmosphere. I have.
- the first port and the second port and blocks the third port communicates, groove 26, or the pressure of the suction surface 22 or the third pressure P 3 closer to the vacuum, the first port and the third port blocking the second port to communicate with each other, by or with the fourth pressure P 4 close grooves 26, or the pressure of the suction surface 22 to the atmospheric pressure, the grooves 26, or the pressure of the suction surface 22 third pressure switching between P 3 and the fourth pressure P 4.
- the suction mechanism 100 that sucks air from the surface 18a of the collet 18 includes a three-way valve 101 having three ports and a driving unit 102 that opens and closes the three-way valve 101, like the opening pressure switching mechanism 80.
- the port is connected to a suction hole 19 communicating with the surface 18a of the collet 18 by a pipe 103, the second port is connected to a vacuum device 140 by a pipe 104, and the third port is connected to a pipe 105 open to the atmosphere.
- the drive unit 102 communicates the first port with the second port to shut off the third port, sucks air from the surface 18a of the collet 18 to make the pressure on the surface 18a of the collet 18 close to a vacuum,
- the port is communicated with the third port to block the second port, and the pressure on the surface 18a of the collet 18 is set to a pressure close to the atmospheric pressure.
- a flow sensor 106 for detecting the flow rate of air (suction air flow rate) sucked into the vacuum device 140 from the surface 18a of the collet 18 is attached to the pipe 103 connecting the suction hole 19 of the collet 18 and the three-way valve 101. ing.
- the wafer holder horizontal driving unit 110, the stage vertical driving unit 120, and the collet driving unit 130 drive the wafer holder 10, the stage 20, and the collet 18 in the horizontal direction or the vertical direction, for example, by a motor and gears provided inside. Is what you do.
- the control unit 150 includes a CPU 151 that performs various arithmetic processes and control processes, a storage unit 152, and a device / sensor interface 153.
- the CPU 151, the storage unit 152, and the device / sensor interface 153 are connected by a data bus 154. Computer.
- a control program 155 and control data 156 are stored in the storage unit 152.
- the storage unit 152 includes a parameter table 159 (see FIG. 19) in which the level value when the semiconductor die 15 is picked up by the collet 18 and the parameter value of the peeling parameter are associated.
- a threshold table 160 see FIG.
- FIG. 30 is a functional block diagram of the control unit 150.
- the control unit 150 functions as the pickup control unit 600 (control unit) and the setting unit 602 by executing the control program 155.
- the opening pressure switching mechanism 80, the suction pressure switching mechanism 90, the driving units 82, 92, 102 of the three-way valves 81, 91, 101 of the suction mechanism 100, and the step surface forming mechanism driving unit 400 The wafer holder horizontal drive unit 110, stage vertical drive unit 120, collet drive unit 130, and vacuum device 140 are connected to the device / sensor interface 153, respectively, and are driven by instructions from the control unit 150. Further, the flow sensor 106 is connected to the device / sensor interface 153, and the detection signal is taken into the control unit 150 and processed.
- the stage 20 has a cylindrical shape, and a flat suction surface 22 is formed on the upper surface.
- a square opening 23 is provided at the center of the suction surface 22, and a moving element 30 is attached to the opening 23.
- a gap d is provided between the inner surface 23a of the opening 23 and the outer peripheral surface 33 of the moving element 30.
- a groove 26 is provided around the opening 23 so as to surround the opening 23.
- Each groove 26 is provided with a suction hole 27, and each suction hole 27 is connected to a suction pressure switching mechanism 90.
- the moving element 30 includes a columnar moving element 45 arranged in the center, two intermediate annular moving elements 40 and 41 arranged around the columnar moving element 45, and And a peripheral annular moving element 31 disposed at the periphery and disposed at the outermost periphery.
- the number of intermediate annular moving elements is two, but the number of intermediate annular moving elements may be one, or three or more. In the drawings after FIG. 6, the number of the intermediate annular moving elements 40 is one for the sake of simplicity. As shown in FIG.
- the columnar moving element 45, the intermediate annular mobile elements 40, each of the distal end surface 47,38b near annular mobile elements 31, 38a is first projected by the height H 0 from the suction surface 22 of the stage 20 It is located at one position and forms the same surface (a step surface with respect to the suction surface 22).
- the peripheral annular moving element 31, the intermediate annular moving element 40, and the columnar moving element 45 are sequentially moved from the first position to the second position lower than the first position at predetermined time intervals. Alternatively, it is simultaneously moved from the first position to the second position by a combination of predetermined moving elements.
- an adhesive dicing sheet 12 is attached to the back surface of the wafer 11, and the dicing sheet 12 is attached to a metal ring 13.
- the wafer 11 is handled while being attached to the metal ring 13 via the dicing sheet 12 in this manner.
- the wafer 11 is cut from the front side by a dicing saw or the like in a cutting step to be each semiconductor die 15. Cut gaps 14 formed during dicing are formed between the semiconductor dies 15. The depth of the cut gap 14 extends from the semiconductor die 15 to a part of the dicing sheet 12, but the dicing sheet 12 is not cut, and each semiconductor die 15 is held by the dicing sheet 12.
- the wafer holder 10 includes an annular expand ring 16 having a flange portion, and a ring retainer 17 for fixing the ring 13 on the flange of the expand ring 16.
- the ring presser 17 is driven by a ring press drive unit (not shown) in a direction to advance and retreat toward the flange of the expand ring 16.
- the inside diameter of the expanding ring 16 is larger than the diameter of the wafer on which the semiconductor die 15 is disposed, the expanding ring 16 has a predetermined thickness, and the flange is outside the expanding ring 16 and is separated from the dicing sheet 12.
- the outer periphery of the expanding ring 16 on the dicing sheet 12 side has a curved surface configuration so that the dicing sheet 12 can be stretched smoothly when the dicing sheet 12 is attached to the expanding ring 16. As shown in FIG. 5B, the dicing sheet 12 to which the semiconductor die 15 is attached is in a substantially planar state before being set on the expanding ring 16.
- the dicing sheet 12 when the dicing sheet 12 is set on the expanding ring 16, the dicing sheet 12 is extended along the curved surface above the expanding ring by a step difference between the upper surface of the expanding ring 16 and the flange surface. Is applied to the dicing sheet 12 fixed to the dicing sheet 12 from the center to the periphery. Further, since the dicing sheet 12 is extended by the pulling force, the gap 14 between the semiconductor dies 15 stuck on the dicing sheet 12 is widened.
- the ease (peelability) of each semiconductor die 15 from the dicing sheet 12 includes the thickness of the semiconductor die 15, the thickness of the dicing sheet 12, the adhesiveness of the dicing sheet 12 to each semiconductor die 15, and the pickup of the semiconductor die. It changes depending on the environment (temperature, humidity, etc.) where the system 500 is placed. Further, when semiconductor chips 15 of the same kind are continuously picked up, the ease of peeling of each semiconductor die from the dicing sheet may change. Therefore, the semiconductor die pickup system 500 of the present embodiment can change the peeling operation (pickup operation) at the time of pickup for each semiconductor die 15.
- the parameter table 159 defines the parameter values of the peeling parameters (pickup parameters) associated with each of the plurality of level values.
- the parameter table 159 defines levels 1 from the shortest pickup time to level 8 the longest. The higher the ease with which the semiconductor die 15 is peeled from the dicing sheet 12 (the degree of ease of peeling), the more the level 1 or a level value close to the level 1 is set at the time of pickup, and the parameters of the respective peeling parameters defined by the level value A peeling operation (pickup operation) is performed using the value.
- This setting is performed by the control unit 150 functioning as setting means. Details of each peeling parameter will be described later.
- the pick-up operation of the semiconductor die will be described by taking as an example a case where level 4 of the parameter table 159 is set (selected).
- the control unit 150 functions as a pickup control unit by executing the control program 155 shown in FIG. 1 and controls the pickup operation of the semiconductor die 15.
- the controller 150 controls a peeling operation for peeling the semiconductor die 15 from the dicing sheet 12 as a part of the pickup operation.
- the control unit 150 causes the wafer holder horizontal driving unit 110 to move the wafer holder 10 in the horizontal direction to a position above the standby position of the stage 20.
- the controller 150 temporarily stops the horizontal movement of the wafer holder 10.
- the control unit 150 uses the stage vertical drive unit 120 to bring the tip surfaces 47, 38b, 38a of the moving elements 45, 40, 31 into close contact with the back surface 12b of the dicing sheet 12, and open the suction surface 22.
- the stage 20 is raised until a region slightly away from 23 comes into close contact with the back surface 12b of the dicing sheet 12.
- control unit 150 raises the stage 20. To stop. Then, the control unit 150 again controls the wafer holder horizontal driving unit 110 to immediately above the front end surface (step surface) of the moving element 30 where the semiconductor die 15 to be picked up slightly protrudes from the suction surface 22 of the stage 20. Adjust the horizontal position to come to.
- the size of the semiconductor die 15 is smaller than the opening 23 of the stage 20 and larger than the width or the depth of the moving element 30.
- the end is between the inner surface 23 a of the opening 23 of the stage 20 and the outer peripheral surface 33 of the moving element 30, that is, right above the gap d between the inner surface 23 a of the opening 23 and the outer peripheral surface 33 of the moving element 30.
- the pressure of the groove 26 or the suction surface 22 of the stage 20 is atmospheric pressure
- the pressure of the opening 23 is also atmospheric pressure.
- each tip surface 47,38b in an initial state each mobile element 45,40,31, 38a, so that a first position protruding by a height H 0 from the suction surface 22 of the stage 20, the distal end surface 47, 38b, the height of the back surface 12b of the dicing sheet 12 in contact with the 38a has a first position protruding by a height H 0 from the suction surface 22.
- the back surface 12b of the dicing sheet 12 slightly floats from the suction surface 22 at the periphery of the opening 23, and is in close contact with the suction surface 22 in a region away from the opening 23.
- the control unit 150 lowers the collet 18 on the semiconductor die 15 by the collet driving unit 130 shown in FIG. 1 to land the surface 18 a of the collet 18 on the semiconductor die 15.
- FIG. 18 shows the height of the collet 18, the position of the columnar moving element 45, the position of the intermediate annular moving element 40, the position of the peripheral annular moving element 31, and the opening 23 during the level 4 peeling operation (pickup operation).
- FIG. 6 is a diagram showing a change over time of the opening pressure of the collet and the air leak amount of the collet 18.
- the control unit 150 switches the three-way valve 101 to a direction in which the suction hole 19 of the collet 18 and the vacuum device 140 communicate with each other by the driving unit 102 of the suction mechanism 100.
- the suction hole 19 becomes a negative pressure, and air flows into the suction hole 19 from the surface 18a of the collet 18, so that the suction air flow rate detected by the flow rate sensor 106 as shown in FIG. (Air leak amount) increases from time t1 to time t2.
- the semiconductor die 15 is fixed by suction to the surface 18a, and air cannot flow from the surface 18a.
- the amount of air leak detected by the flow sensor 106 starts to decrease.
- the height of the front surface 18a of the collet 18 when the collet 18 lands on the semiconductor die 15 is the height of the tip surfaces 47, 38b, 38a of the moving elements 45, 40, 31 (adsorption).
- the height Hc is obtained by adding the thickness of the dicing sheet 12 and the thickness of the semiconductor die 15 to the height H 0 from the surface 22).
- control unit 150 switches the time t2 shown in FIG. 18, the third pressure P 3 closer to the vacuum suction pressure of the suction surface 22 (not shown) from the fourth pressure P 4 close to the atmospheric pressure of the stage 20 a command Is output.
- the drive unit 92 of the suction pressure switching mechanism 90 switches the three-way valve 91 to a direction that allows the suction hole 27 and the vacuum device 140 to communicate with each other. Then, as shown by the arrow 201 in FIG. 7, the air groove 26 is sucked out into the vacuum device 140 through the suction holes 27, the suction pressure becomes the third pressure P 3 near vacuum.
- each tip surface 47,38b of each mobile element 45,40,31, 38a is a first dicing sheet 12 since a position protruding by a height H 0 from the suction surface 22 of the stage 20, obliquely downward pulling force F 1 is applied.
- the tensile force F 1 and the pulling force F 2 to pull the dicing sheet 12 in the lateral direction can be decomposed into a tensile force F 3 for pulling the dicing sheet 12 in the downward direction.
- the shear stress ⁇ is generated between the surface 12a of the semiconductor die 15 and the dicing sheet 12. Due to the shear stress ⁇ , a gap occurs between the outer peripheral portion or the peripheral portion of the semiconductor die 15 and the surface 12a of the dicing sheet 12. This displacement triggers the separation between the dicing sheet 12 and the outer peripheral portion or the peripheral portion of the semiconductor die 15.
- Control unit 150 As shown in FIG. 18 (e), and outputs an instruction for switching the opening pressure at time t3 the second from the pressure P 2 is close to the atmospheric pressure in the first pressure P 1 near vacuum.
- the drive unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 in a direction that allows the opening 23 to communicate with the vacuum device 140.
- the air of the opening 23 is sucked into the vacuum apparatus 140, as shown in FIG. 18 (e), at time t4 the first pressure P 1 opening pressure close to vacuum Become.
- the dicing sheet 12 immediately above the gap d between the inner surface 23a of the opening 23 and the outer peripheral surface 33 of the moving element 30 is pulled downward. Further, the peripheral portion of the semiconductor die 15 located immediately above the gap d is pulled by the dicing sheet 12 and is bent and deformed downward as indicated by an arrow 204. Thereby, the peripheral portion of the semiconductor die 15 is separated from the surface 18a of the collet 18.
- time HT4 is a level 4 “first pressure holding time” defined in the parameter table 159 of FIG. HT4 is 130 ms in the example of FIG.
- the peripheral portion of the semiconductor die 15 causes the vacuum of the suction hole 19 of the collet 18 and the elasticity of the semiconductor die 15 to move the collet 18. It returns to the surface 18a.
- the amount of air leakage starts to decrease at time t4 in FIG. 18F, and continues to decrease.
- the control unit 150 As shown in FIG. 18 (e), outputs a command for switching to the time t5 the opening pressure from the first pressure P 1 closer to the vacuum in the second pressure P 2 close to atmospheric pressure.
- the driving unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 so that the piping 85 that opens to the atmosphere and the opening 23 communicate with each other.
- Time t1 to t6 in FIG. 18 is the initial peeling.
- the peeling property between the semiconductor die 15 and the dicing sheet 12 is poor (the peeling degree is low)
- the periphery of the semiconductor die 15 is pulled by the dicing sheet 12 as shown by an arrow 204 in FIG. It takes a lot of time for the peripheral portion of the semiconductor die 15 to return to the surface 18a of the collet 18 as indicated by the arrow 207.
- the time during which the opening pressure is maintained at the first pressure P 1 time from time t4 to time t5 in FIG. 18E) is long, or the opening pressure is reduced to the first pressure P close to vacuum. 1 by applying a large number of times peeling operation for switching between the second pressure P 2 close to atmospheric pressure (level values), encourage separation of the peripheral portion and the dicing sheet 12 of the semiconductor die 15.
- the peeling property between the semiconductor die 15 and the dicing sheet 12 is good (the peeling degree is high)
- the periphery of the semiconductor die 15 is pulled by the dicing sheet 12 as indicated by an arrow 204 in FIG. 9, the time required for the peripheral portion of the semiconductor die 15 to return to the surface 18a of the collet 18 is short.
- the speed of the pickup is increased by applying a peeling operation (level value) in which the number of times of switching is small. In the example of the level 4 of FIG.
- the peripheral portion of the semiconductor die 15 is pulled by the dicing sheet 12 until the peripheral portion of the semiconductor die 15 returns to the surface 18 a of the collet 18 in accordance with the degree of easy detachment of the semiconductor die 15.
- the actual flow rate change also changes. Therefore, as described later in detail, it is possible to determine the releasability (easiness of peeling) of the semiconductor die 15 from the dicing sheet 12 based on the actual flow rate change.
- Control unit 150 When the opening pressure at time t6 becomes the second pressure P 2 close to atmospheric pressure, as shown in FIG. 18 (d), near the annular mobile elements 31 the height of the distal end surface 38a first position (height from the suction surface 22 is the initial position of the H 0) and outputs a command to only lower second position the height H 1 from.
- the step surface forming mechanism driving unit 400 shown in FIG. 1 is driven to lower the peripheral annular moving element 31 as shown by the arrow 214 in FIG.
- Tip surface 38a of the peripheral annular mobile element 31 has a height from a first position (initial position) from the height H 1 by the lower, lower slightly than the suction surface 22 second position (attracting surface 22 (H 1 - H 0 ).
- control unit 150 holds the state from time t6 to time t7 as shown in FIG.
- the pressure of the opening 23 is in the second pressure P 2 close to atmospheric pressure, as shown in FIG. 11, the back surface 12b and a peripheral annular moving element of the dicing sheet 12 is located immediately above the gap d There is a gap between the tip 31 and the tip end surface 38a.
- Control unit 150 As shown in FIG. 18 (e), and outputs an instruction for switching the opening pressure at time t7 second from the pressure P 2 is close to the atmospheric pressure in the first pressure P 1 near vacuum.
- the drive unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 so that the opening 23 and the vacuum device 140 communicate with each other.
- the opening pressure is the first pressure P 1 near vacuum.
- the semiconductor die 15 in a region facing the distal end surface 38a is returned toward the surface 18a of the collet 18 as shown by an arrow 224 shown in FIG. 13 come.
- the air leakage amount starts to decrease around time t8 in FIG. 18F, and when the semiconductor die 15 is vacuum-adsorbed to the surface 18a of the collet 18 as shown in FIG. , Return to almost zero.
- the region of the semiconductor die 15 facing the front end surface 38a is separated from the surface 12a of the dicing sheet 12. It should be noted that the region of the semiconductor die 15 facing the tip end surface 38a as shown by the arrow 217 in FIG. 12 is pulled from the dicing sheet 12 until it returns to the surface 18a of the collet 18 as shown by the arrow 224 in FIG.
- the time changes according to the releasability of the semiconductor die 15 and the dicing sheet 12.
- the control unit 150 becomes a time t9, the output a command to increase the opening pressure to the second pressure P 2 closer to the first pressure P 1 near vacuum to atmospheric pressure I do.
- the drive unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 so that the opening 23 communicates with the pipe 85 that is open to the atmosphere.
- the air flows into opening 23, the pressure of the opening 23 at time t10 is increased to the second pressure P 2 close to atmospheric pressure. This causes the dicing sheet 12 immediately above the gap d to be displaced upward away from the distal end surface 38a of the peripheral annular moving element 31, as shown by the arrow 223 in FIG.
- the control unit 150 a distal end face 38b of the intermediate annular mobile element 40 to the first position (height position of H 0 from the suction surface 22) by a height H 1 from the lower second position a moving command, the distal end surface 38a of the peripheral annular mobile elements 31 in the second position, lower by H 2 -H 0 from the first position (initial position) height H 2 as low as third position from the (suction surface 22 Command to move to the position).
- the step surface forming mechanism driving unit 400 shown in FIG. 1 is driven to lower the intermediate annular moving element 40 as shown by the arrow 227 in FIG. 14 and to move the peripheral annular moving element 31 as shown by the arrow 226. Lower it.
- the first position by a lower second position the height H 1 from (higher position by the height H 0 from the suction surface) (lower from the suction surface 22 by H 1 -H 0 position) Go to the tip face 38a of the peripheral annular mobile element 31 is moved to the first position (initial position) only from a height H 2 lower third position (lower by H 2 -H 0 from the suction surface 22 position).
- the end surfaces 38a, 38b, and 47 are step surfaces having a step difference with each other, and at the same time, are step surfaces with respect to the suction surface 22.
- control unit 150 holds the state from time t10 to time t11 as shown in FIG. Then, the control unit 150 outputs an instruction to switch the opening pressure at a time t11 in FIG. 18 (e) second from the pressure P 2 is close to the atmospheric pressure in the first pressure P 1 near vacuum.
- the drive unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 so that the opening 23 communicates with the vacuum device 140.
- the opening pressure is the first pressure P 1 near vacuum at time t12.
- the dicing sheet 12 has the distal end surface 38a of the peripheral annular moving element 31 descending to the third position and the intermediate annular moving element 40 descending to the second position. It is pulled toward the distal end surface 38b and displaced downward.
- the region of the semiconductor die 15 facing the tip surfaces 38a and 38b also bends downward and away from the surface 18a of the collet 18 as shown by an arrow 231 in FIG.
- an arrow 232 in FIG. 15 air flows into the suction hole 19 from between the surface 18 a of the collet 18 and the semiconductor die 15. The amount of air leaking into the suction hole 19 is detected by the flow sensor 106. As shown in FIG.
- the amount of air leak increases from time t11 when the opening pressure decreases to time t12. Then, in the vicinity of time t12 that the opening pressure reaches the first pressure P 1, the semiconductor die 15 in a region facing the distal end surface 38a, and 38b are towards the surface 18a of the collet 18 as shown by an arrow 244 shown in FIG. 16 Come back. As a result, the air leak amount starts to decrease around time t12 in FIG. 18F, and when the semiconductor die 15 is vacuum-adsorbed to the surface 18a of the collet 18 as shown in FIG. It becomes. The time required to return to the surface 18a of the collet 18 changes according to the releasability between the semiconductor die 15 and the dicing sheet 12.
- the control unit 150 outputs a command for switching to the time t13 the opening pressure from the first pressure P 1 closer to the vacuum in the second pressure P 2 close to atmospheric pressure.
- the drive unit 82 of the opening pressure switching mechanism 80 switches the three-way valve 81 so that the opening 23 communicates with the pipe 85 that is open to the atmosphere.
- the opening pressure is the second pressure P 2 closer to the atmosphere. In this state, although the semiconductor die 15 in the region corresponding to the tip end surface 47 of the columnar moving element 45 adheres to the dicing sheet 12 as shown in FIG. It is in a peeled state.
- the control unit 150 FIG. 18 at time t14, the columnar moving element 45 of the distal end surface 47 of the first position (attracting surface height from 22 the position of H 0) the height from H 1 by a lower second a command to move to a position, H 2 -H 0 the leading end surface 38b of the intermediate annular mobile element 40 from a first position (initial position) only from a height H 2 lower third position (suction surface 22 in the second position Command to move to a lower position).
- the step surface forming mechanism driving unit 400 shown in FIG. 1 is driven to lower the columnar moving element 45 as shown by the arrow 260 in FIG. 17 and to lower the intermediate annular moving element 40 as shown by the arrow 246. Let it.
- the distal end surface 47 of the columnar moving element 45 has a first position to move to a lower second position by the height H 1 from (position higher height H 0 from the suction surface), the distal end surface 38b of the intermediate annular mobile element 40, moves in the first position (initial position) only from a height H 2 lower third position.
- the semiconductor die 15 is in a state of being separated from the dicing sheet 12.
- the control unit 150 outputs a command to raise the collet 18 at time t15 in FIG.
- the collet driving section 130 shown in FIG. 1 drives the motor to raise the collet 18 as shown in FIG.
- the semiconductor die 15 is picked up while being attracted to the collet 18.
- the control unit 150 returns the tip surfaces 38a, 38b, 47 of the moving elements 31, 40, 45 to the first position at time t16, and the suction pressure switching mechanism 90 causes the stage 20 to be suctioned. switching the suction pressure of the surface 22 from the third pressure P 3 closer to the vacuum in the fourth pressure P 4 close to atmospheric pressure. This ends the pickup.
- the time t6 to t16 in FIG. 18 described above is the main peeling.
- this peeling sequentially from the outside of the mobile element 30 towards the inside of the moving element 30, the distal end surface is moved from the first position to the second position, the opening pressure first pressure P 1 and the second pressure P 2 By switching between the two, the region inside the peripheral portion of the semiconductor die 15 is separated from the surface 12a of the dicing sheet 12.
- the opening pressure has been switched between the first pressure P 1 and the second pressure P 2
- the moving element 30 may be sequentially moved.
- the above-described peeling operation in FIG. 18 was performed by applying the parameter values of the respective peeling parameters defined in level 4 of the parameter table 159 in FIG. Specifically, the following peel parameter values were applied.
- “Was FSN4 1.
- the “collet waiting time”, which is the time from when the collet 18 lands on the semiconductor die 15 to when the semiconductor die 15 starts to be lifted, is set to WT4 710 ms.
- One level value is selected (set) from the levels 1 to 8 of the parameter table 159 in accordance with the releasability of the semiconductor die 15 from the dicing sheet 12, and the parameter value of each release parameter specified in the level value is applied.
- a peeling operation can be performed. The higher the level value (slower level), the harder it is to peel off.
- each peeling parameter in the parameter table 159 has the following tendency according to the change in the level value. As shown in FIG. 19, the number of “switching times of the opening pressure at the time of initial peeling” increases from level 1 to level 8. However, this does not mean that the number of times of switching always increases every time the level value changes, and the number of times of switching may be the same for a plurality of adjacent level values. This also applies to other peeling parameters, and does not mean that the parameter value changes each time the level value changes, and the parameter value may be the same at a plurality of adjacent level values. The “number of times of switching of the opening pressure during the main peeling” is increased from level 1 to level 8.
- first pressure holding time is made longer from level 1 to level 8.
- “Descent time interval between moving elements” has a longer time interval from level 1 to level 8.
- the “collet standby time” increases the time from level 1 to level 8.
- the “pickup time” changes each time the level value changes, and increases from level 1 to level 8.
- the “pickup time” is similar to the “collet standby time”, but in addition to the collet standby time, the time required for the collet 18 to descend from a predetermined position and land on the semiconductor die 15, It includes the time from the start of lifting to the rising to a predetermined position.
- the peeling parameter can also be referred to as a “pickup parameter”.
- “Setting the pickup parameter” can be defined as setting the parameter value of the pickup parameter (peeling parameter). “Changing the pickup parameter” means changing the parameter value of the pickup parameter (peeling parameter). Can be defined as Further, the parameter table 159 in FIG. 19 can also be referred to as a “condition table”, and the parameter value of the peeling parameter can be referred to as a “pickup condition”. It should be noted that the specific parameter values shown in FIG. 19 are merely examples, and it is obvious that other parameter values may be used.
- Level 8 is a level value to be set for the semiconductor die 15 that is very difficult to peel.
- FIG. 20 shows the height of the collet 18, the position of the columnar moving element 45, the position of the intermediate annular moving element 40, the position of the peripheral annular moving element 31, the opening pressure of the opening 23, FIG.
- the “number of times of switching of the opening pressure at the time of initial peeling” is increased to four times (FSN8). Accordingly, even when the periphery of the semiconductor die 15 is difficult to peel from the dicing sheet 12, the periphery of the semiconductor die 15 can be sufficiently peeled from the dicing sheet 12. By switching the opening pressure many times, the dicing sheet 12 attached to the periphery of the semiconductor die 15 is shaken off, and it takes a long time, but the peeling can be surely performed. Further, in FIG. 20, the “holding time of the first pressure” (HT8) at the time of the initial peeling is set to 150 ms (see FIG. 19, and similarly, see FIG. .
- the “number of times of switching of the opening pressure at the time of the final peeling” is increased to four times (SSN8).
- SSN8 the “number of times of switching of the opening pressure at the time of the final peeling”
- the “first pressure holding time” (HT8) at the time of the main peeling is set to 150 ms to be longer. Accordingly, it is possible to promote that the region inside the periphery of the semiconductor die 15 is naturally peeled off from the dicing sheet 12.
- the “first pressure holding time” (HT8) is common between the initial peeling and the main peeling, but the “first pressure holding time” (HT8) is different for the initial peeling and the main peeling.
- the “first pressure holding time” may be defined in the parameter table 159. Further, as shown in FIG. 20, during the initial peeling, or by switching a plurality of times an opening pressure during the stripping, if the time for maintaining the first pressure P 1 there is a plurality, the plurality of "first Each of the "pressure holding times” may be defined in the parameter table 159, and their parameter values may be different from each other. For example, a plurality of “first pressure holding times” are arranged in the order applied in the peeling operation and defined in the parameter table 159.
- the “descent time interval between moving elements” is set to 450 ms to be longer. If the time from lowering the distal end surface 38a of the peripheral annular moving element 31 from the first position to the second position to lowering the distal end surface 38b of the intermediate annular moving element 40 from the first position to the second position is lengthened. In this way, it is possible to encourage the region of the semiconductor die 15 facing the distal end surface 38a of the peripheral annular moving element 31 to be spontaneously peeled off from the dicing sheet 12.
- the time from lowering the distal end surface 38b of the intermediate annular moving element 40 from the first position to the second position to lowering the distal end surface 47 of the columnar moving element 45 from the first position to the second position is longer. Then, the region of the semiconductor die 15 facing the distal end surface 38b of the intermediate annular moving element 40 can be encouraged to be naturally separated from the dicing sheet 12.
- the descent time interval between the peripheral annular moving element 31 and the intermediate annular moving element 40 may be different from the descent time interval between the intermediate annular moving element 40 and the columnar moving element 45. Is defined in the parameter table 159 for each descent time interval. As shown in FIG. 2, there are cases where the number of intermediate annular moving elements 40 and 41 is two or more.
- the intermediate annular moving element 40 on the outer peripheral side and the intermediate annular moving element 40 on the inner peripheral side are used. It descends toward the moving element 41 in order.
- the number of the intermediate annular moving elements 40 and 41 is two or more, even if the descent time interval between the intermediate annular moving element 40 and another intermediate annular moving element 41 is specified in the parameter table 159, Good.
- the time from when the pickup operation is started (time t1 in FIG. 20) to when the peripheral annular moving element 31 (moving element 30 to be lowered first) is lowered from the first position to the second position is a parameter. It may be defined in the table 159.
- the “collet standby time” (WT8) is set to 1590 ms to be longer.
- the “pickup time” (PT8) is 1700 ms, which is longer.
- Level 1 is a level value to be set for the semiconductor die 15 which is very easily peeled.
- FIG. 21 shows the height of the collet 18, the position of the columnar moving element 45, the position of the intermediate annular moving element 40, the position of the peripheral annular moving element 31, the opening pressure of the opening 23, FIG.
- the “first pressure holding time” (HT1) at the time of initial peeling is set to 100 ms, which is shortened.
- the semiconductor die 15 is easily separated from the dicing sheet 12
- the periphery of the semiconductor die 15 is sufficiently separated from the dicing sheet 12 even if the “first pressure holding time” is shortened.
- the time required for the peeling operation can be shortened.
- the “number of times of switching of the opening pressure during the final peeling” is reduced to one (SSN1).
- SSN1 the “number of times of switching of the opening pressure at the time of the final peeling”
- the area inside the periphery of the semiconductor die 15 is sufficiently peeled from the dicing sheet 12.
- the tip surfaces 38a, 38b, and 47 of the three moving elements 30 are simultaneously lowered from the first position to the second position or lower. Therefore, the “number of moving elements to be simultaneously lowered” has increased to three (DN1).
- the semiconductor die 15 is easily peeled off from the dicing sheet 12, even if the plurality of moving elements 30 are lowered at the same time, a region inside the periphery of the semiconductor die 15 is immediately peeled off from the dicing sheet 12.
- the “number of moving elements to be simultaneously lowered” is two.
- two separation parameters of “the number of moving elements to be lowered at the same time” and “descent time interval between moving elements” are defined.
- a descent time interval with the moving element 41 can be defined. In this case, in order to simultaneously lower the plurality of moving elements 30, one or more of these lowering time intervals are set to zero.
- the “collet standby time” (WT1) is set to 460 ms, which is shortened.
- the “pickup time” (PT1) is 570 ms, which is short.
- the parameter value of each peeling parameter is made different according to the level value, that is, the peeling operation (pickup operation) is made different.
- the peeling operation pickup operation
- the level value close to level 8 to the semiconductor die 15 that is difficult to peel
- the peeling operation damage to the semiconductor die 15 at the time of pickup and mistakes in pickup can be suppressed.
- the plurality of level values can be said to be values indicating the length of time required for pickup.
- the releasability of the semiconductor die 15 from the dicing sheet 12 can be detected from the time change (actual flow rate change) of the suction air flow rate of the collet 18 detected by the flow rate sensor 106.
- FIG. 22 is a diagram showing a time change between the opening pressure at the time of the initial peeling and the air leak amount (suction air flow rate) of the collet 18 detected by the flow rate sensor 106, and the meaning of each timing of t1, t2, t3, and t4. Has the same meaning as those timings shown in FIG.
- the solid line 157 in the air leak amount graph of FIG. 22 is an expected flow rate change 157 which is a time change of the air leak amount when the semiconductor die 15 is separated from the dicing sheet 12 in a good state (when the degree of separation is very high).
- the expected flow rate change 157 is stored in the storage unit 152 in advance.
- the expected flow rate change 157 stored in the storage unit 152 is a set of a large number of suction air flow rates acquired in a predetermined sampling cycle, and is a suction rate corresponding to a large number of discrete times t.
- the air flow rate can be.
- the one-dot chain line 158a and the two-dot chain line 158b in the graph of the air leak amount in FIG. 22 are examples of the actual flow rate change 158 which is the time change of the air leak amount detected when the semiconductor die 15 is actually picked up from the dicing sheet 12. It is.
- the actual flow rate change 158 is stored in the storage unit 152 each time a specific semiconductor die 15 is picked up.
- the actual flow rate change 158 stored in the storage unit 152 may be in a form that can be compared with the expected flow rate change 157.
- the actual flow rate change 158 And a set of suction air flow rates associated with a number of discrete times t.
- the actual flow rate change can be simply referred to as “flow rate change”.
- the actual flow rate change can be referred to as “actual flow rate information”
- the expected flow rate change can be referred to as “expected flow rate information”.
- the time t3 when the opening pressure begins to change toward the first pressure P 1 near vacuum the periphery of the semiconductor die 15 is the surface 18a of the collet 18 (See FIG. 8), but immediately the periphery of the semiconductor die 15 returns to the surface 18a of the collet 18 (see FIG. 9). Therefore, like the expected flow rate change 157 in FIG. 22, the air leak amount starts to increase at time t3, but immediately starts to decrease (turns to decrease at time tr_exp). In the expected flow rate change 157, the increasing air leak amount is also small.
- the peeling property from the dicing sheet 12 of the semiconductor die 15 is bad (is low peeling easiness)
- opening the pressure at time t3 begins to change toward the first pressure P 1 near vacuum
- semiconductor The periphery of the die 15 is separated from the surface 18a of the collet 18 and after a certain period of time, the periphery of the semiconductor die 15 returns to the surface 18a of the collet 18. Therefore, like the actual flow rate change 158a in FIG. 22, the air leak amount starts increasing at time t3, continues to increase, and then starts decreasing at time tr_rel later than time tr_exp. In the actual flow rate change 158a, the amount of air leak that increases is large.
- the actual flow rate change 158 is compared with the expected flow rate change 157, and it is determined that the more the actual flow rate change 158 is similar to the expected flow rate change 157, the better the peelability (the higher the ease of peeling). Alternatively, it is determined that the stronger the correlation between the actual flow rate change 158 and the expected flow rate change 157 is, the better the peelability is (the higher the ease of peeling is). In the present embodiment, the actual flow rate change 158 and the expected flow rate change 157 are compared, and their correlation values are obtained.
- the correlation value is a value of 0 to 1.0, and is set to 1.0 when the actual flow rate change 158 and the expected flow rate change 157 are completely coincident. to decide.
- the value range of the correlation value is 0 to 1.0, but it goes without saying that other values may be used.
- the period in which the actual flow rate change 158 and the expected flow rate change 157 are compared is, for example, a part of the initial separation period from time t1 (time at which air is started to be sucked from the surface 18a of the collet 18) to time tc_end in FIG. and (first time the opening pressure predetermined time has elapsed from the time t4 that has reached the first pressure P 1).
- a period to be compared may be a period of which is part time t3 (time opening pressure starts to change toward the first pressure P 1) ⁇ tc_end period initial peel.
- the period to be compared may be another period, but is preferably a period in which the peeling operation is not changed even if the above-described level value is changed.
- a value other than the correlation between the actual flow rate change 158 and the expected flow rate change 157 may be obtained as the releasability of the semiconductor die 15 from the dicing sheet 12. For example, it may be determined that the smaller the difference between the value of the expected flow rate change 157 at the time tc_end in FIG. 22 and the value of the actual flow rate change 158 at the same time is, the better the peelability (the higher the ease of peeling). Also, for example, the smaller the difference between the time tr_exp at which the air leak flow rate at the expected flow rate change 157 changes from increasing to decreasing and the time tr_rel at which the air leak flow rate at the actual flow rate change 158 changes from increasing to decreasing.
- the peeling degree is high. Further, for example, the difference between the maximum value of the air leak flow rate of the expected flow rate change 157 detected after time t3 in FIG. 22 and the maximum value of the air leak flow rate of the actual flow rate change 158 detected after the same time is small. It may be determined that the higher the degree of ease of peeling, the higher the degree.
- the releasability of the semiconductor die 15 from the dicing sheet 12 without using the expected flow rate change 157. For example, it may be determined that the smaller the value of the actual flow rate change 158 at the time tc_end in FIG. 22, the better the peelability (the higher the ease of peeling).
- the above-described correlation value obtained based on the actual flow rate change 158 or an index value indicating the releasability of the semiconductor die 15 from the dicing sheet 12 instead of the correlation value may be referred to as an “evaluation value”.
- the semiconductor die pickup system 500 obtains the actual flow rate change 158 when picking up one or more specific semiconductor dies 15, and calculates the obtained one or more actual flow rate changes 158. Based on each of them, the above-mentioned correlation value of each of the specific semiconductor dies 15 is determined, and based on one or a plurality of correlation values, after picking up the specific semiconductor die 15 and picking up another semiconductor die 15 Change the level value applied to.
- the releasability of the semiconductor die 15 from the dicing sheet 12 may change.
- the semiconductor die 15 can be stably picked up without damaging the semiconductor die 15 even if the peeling property changes poorly (the peeling degree is low).
- the peeling property changes the peeling degree is high
- the pickup can be performed in a shorter time.
- the type of the semiconductor die 15 and the type of the dicing sheet 12 are changed, and the optimum level value for the pickup may not be known.
- pickup is performed by applying level 8 (see FIG. 19) of the parameter table 159 in which pickup can be performed most stably, and the level value is gradually set based on the correlation value of the specific semiconductor die 15.
- level 1 highest speed.
- an optimal level value is searched for, and an optimal pickup with a balance between stability and high speed can be realized.
- FIG. 23 is a flowchart illustrating the flow of the level transition control according to the present embodiment.
- all the semiconductor dies 15 are treated as specific semiconductor dies 15, and there is an opportunity to change the level value every time the semiconductor dies 15 of one or more wafers are picked up.
- the transition of the level value is a transition from the level value (current level value) applied to the current pickup to the next next level value (see FIG. 25) and a transition of the level value of the transition destination (FIG. 26). See).
- FIG. 25 the level value applied to the current pickup to the next next level value
- FIG. 26 a transition of the level value of the transition destination
- the control unit 150 sets a level value (current level 161) to be applied when picking up for the first time, and stores it in the storage unit 152.
- the current level value 161 is set to level 4 of the parameter table 159 in FIG. Note that this setting and each step of the flow in FIG. 23 are performed by the control unit 150 functioning as setting means. However, the control of the pickup operation of the semiconductor die 15 is performed by the control unit 150 functioning as pickup control means.
- the control unit 150 initializes a variable n to 0.
- the variable n is a variable for counting the number of picked-up wafers. Then, in S102, the wafer is exchanged to prepare for picking up a semiconductor die 15 of a new wafer.
- the flow rate sensor 106 detects the suction air flow rate of the collet 18, and the suction air flow rate is input to the control unit 150.
- the control unit 150 (setting unit) acquires the actual flow rate change 158 which is a time change of the suctioned air flow rate, and stores it in the storage unit 152 (S1041).
- control unit 150 calculates a correlation value (evaluation value) between actual flow rate change 158 and expected flow rate change 157 previously stored in storage unit 152, and stores the correlation value in storage unit 152. I do. Then, in S108, the control unit 150 checks whether the pickup of all the semiconductor dies 15 of one wafer is completed. If the pickup of all the semiconductor dies 15 of one wafer is not completed (S108: No), the pickup of the semiconductor dies 15 in S104, the acquisition of the actual flow rate change 158 in S1041, and the calculation of the correlation value in S106 are repeated. Do. If the pickup of all the semiconductor dies 15 of one wafer is completed (S108: Yes), the process proceeds to S110.
- control unit 150 adds 1 to the variable n (increment the variable n). Then, in S112, control unit 150 checks whether variable n is greater than or equal to constant Y.
- the constant Y is an integer of 1 or more, and defines the number of wafers.
- control unit 150 checks whether the number of picked-up wafers (variable n) has reached the number of wafers indicated by constant Y. If S112 is No, the process returns to S102 and repeats S102 to S110. If S112 is Yes, the process proceeds to S114.
- the control unit 150 determines a representative correlation value (representative value) as a representative value of the correlation values (evaluation values) of the plurality of semiconductor dies 15 (specific semiconductor dies 15) obtained by repeatedly executing S106. Die evaluation value).
- the representative correlation value is, for example, an average value or a central value of a plurality of correlation values, but is not limited thereto, and may be any representative value obtained by using a known statistical process.
- FIG. 24 is an example of the threshold table 160.
- the threshold table 160 is stored in the storage unit 152 in advance.
- the threshold value table 160 is a table in which threshold values TH1 and TH2 are defined for each level value, and defines a range of the degree of ease of peeling (correlation value) of the semiconductor die 15 assumed by each level value. For example, level 4, which is the current level value, should be used when the ease of separation (correlation value) of the semiconductor die 15 from the dicing sheet 12 is between 0.81 (threshold value TH1) and 0.85 (threshold value TH2). This indicates that the value is a level value.
- Level 1 for which the threshold value TH2 is not defined is a level value to be used when the ease of peeling (correlation value) is 0.96 (threshold value TH1) or more.
- the level 8 in which the threshold value TH1 is not defined is a level value to be used when the peeling degree (correlation value) is equal to or less than 0.65 (threshold value TH2). I have.
- the representative correlation value is smaller than the threshold value TH1 of the level 4 (current level value 161) as described above, the actual ease of peeling of the semiconductor die 15 is lower than the ease of peeling assumed at the level 4; By making transition to a low-speed level value, pickup is performed in which damage to the semiconductor die 15 and pickup errors are suppressed.
- the representative correlation value is larger than the threshold value TH2 of the level 4 (current level value 161) as described above, the actual ease of peeling of the semiconductor die 15 is higher than the assumed ease of peeling at the level 4, so that By making the transition to a high-speed level value, the pickup time of the semiconductor die 15 is shortened.
- the representative correlation value is compared with each of the threshold values TH1 and TH2 of one level value (current level value of level 4) of the threshold value table 160, and 1 is determined in S120.
- the level value was increased (changed to a low-speed level), or one level value was decreased (changed to a high-speed level) in S122, or the level value was maintained.
- the representative correlation value is compared with each of the threshold values TH1 and TH2 of the plurality of level values in the threshold value table 160, and the level value is immediately increased by two or more levels in S120, or the level value is increased in S122.
- the opening pressure of the opening 23 provided on the suction surface 22 of the stage 20 is switched between the first pressure close to vacuum and the second pressure close to atmospheric pressure.
- the semiconductor die pickup system 500 described above uses the time of the suction air flow rate of the collet 18 when picking up a specific semiconductor die 15 (each semiconductor die 15 of one or a plurality of wafers in the flow of FIG. 23).
- Change actual flow rate change 158 is acquired.
- the level value applied when picking up another semiconductor die 15 after picking up a specific semiconductor die 15 is changed. That is, the peeling operation (parameter value (pickup parameter) of each peeling parameter) applied when picking up another semiconductor die 15 is changed.
- the peeling operation (pickup operation) is performed according to the change in the peelability. Be changed.
- the peeling property is changed poorly (the peeling degree is low)
- the peeling operation is changed to a peeling action that further promotes the peeling, so that damage to the semiconductor die 15 and a pick-up mistake can be accurately suppressed.
- the peeling property changes the peeling degree is high
- the operation is changed to a shorter peeling operation, so that the pickup time can be reduced. As described above, it is possible to properly balance the suppression of damage to the semiconductor die 15 and the pickup error and the speedup of the pickup of the semiconductor die 15.
- the semiconductor die pickup system 500 described above is overwhelmingly advantageous compared to a case where the peeling operation of the semiconductor die 15 that is currently being picked up is changed in real time while checking the suction air flow rate of the collet 18. .
- the semiconductor die pickup system 500 of the above-described embodiment detects the suction air flow rate at the time of the pickup, which is used for the subsequent pickup of the semiconductor die 15, and is not used for the current pickup operation. Has no effect. That is, the above-mentioned (2) and (3) do not occur during the pickup operation, and the operation does not proceed forward unless the determination is completed. Therefore, the pick-up operation can be very fast.
- a plurality of CPUs 151 are provided in the control unit 150, one CPU 151 controls the pickup operation, and another CPU 151 simultaneously (in the background) changes the actual flow rate. Acquisition of 158, calculation of the correlation value from the actual flow rate change 158, and acquisition of the subsequent semiconductor die level value from the correlation value can further increase the speed.
- the semiconductor die pickup system 500 described above does not change the peeling operation during the pickup operation, it is possible to grasp what kind of peeling operation is applied to each semiconductor die 15 and the pickup is performed. Very easy. This grasp is very important. For example, if the number of switching of the opening pressure, which is one of the peeling parameters, is increased, the semiconductor die 15 is sufficiently peeled from the dicing sheet 12 even when the peeling is difficult, thereby suppressing the occurrence of damage to the semiconductor die 15 and a pickup error. it can.
- the semiconductor die 15 may be bent and deformed many times, and the damage to the semiconductor die 15 may be increased.
- the semiconductor die pickup system 500 described above can perform this quality control very easily.
- the advantage of the semiconductor die pickup system 500 of the present embodiment over the case of changing the peeling operation in real time has been described.
- the peeling operation of the semiconductor die 15 that is currently being picked up may be changed in real time while checking the suction air flow rate of the collet 18.
- the peeling operation at the time of the actual peeling may be changed based on the actual flow rate change 158 acquired at the time of the initial peeling.
- Level value for each type of peeling parameter ⁇ Level value for each type of peeling parameter>
- level values commonly used for a plurality of types of peeling parameters are prepared.
- parameter tables 159a and 159b may be prepared for each type of peeling parameter, and a level value may be prepared for each type of peeling parameter.
- the levels A-1 to A-8 of the "number of times of opening pressure switching at the time of initial peeling" are defined, and in the parameter table 159b of FIG.
- Levels B-1 to B-8 of "the number of times of pressure switching" are defined.
- the threshold table 160 shown in FIG. 24 is also prepared for each type of peeling parameter, and thresholds TH1 and TH2 corresponding to the level values of each peeling parameter are defined.
- a threshold table defining each of the threshold values TH1 and TH2 as shown in FIG. 24 is prepared in association with each of the levels A-1 to A-8 in FIG. 27A, and the levels B-1 to B- in FIG. 27B are prepared.
- another threshold value table that defines each of the threshold values TH1 and TH2 as shown in FIG. 24 is prepared.
- Separate threshold tables are similarly prepared for other peel parameters.
- the current level value is stored in the storage unit 152 for each type of peeling parameter.
- parameter values are read from each parameter table for each type of peeling parameter using the current level value for each type of peeling parameter as a key, and the semiconductor die 15 is picked up.
- the current level value any one of A-1 to A-8
- the "number of times of opening pressure switching at the time of initial peeling” is used as a key
- the "number of times of opening pressure switching at the time of initial peeling” is used as a key.
- the “number of times of opening pressure switching at the time of main peeling” is used. From the parameter table 159b (FIG. 27B) corresponding to the current level value, the semiconductor die 15 is picked up.
- S116, S118, S120, and S122 are executed for each type of peeling parameter using a threshold table prepared for each type of peeling parameter and the current level value for each type of peeling parameter.
- the current level value for each parameter type is changed individually.
- the current level value (the level value of any of A-1 to A-8) for the "number of times of opening pressure switching during initial peeling" and the “number of times of opening pressure switching during initial peeling”
- the current level value is changed to another level value (A-1 to A-8). To any level value).
- steps S116 and S118 the current level value (the level value of any of B-1 to B-8) for the "number of times of opening pressure switching at the time of main peeling" and the “number of times of opening pressure switching at the time of main peeling"
- the threshold values TH1 and TH2 are read from the threshold table using the current level value as a key, and each of the read threshold values TH1 and TH2 is compared with the representative correlation value.
- steps S120 and S122 the current level value (the level value of any of B-1 to B-8) for the "number of times of opening pressure switching at the time of main peeling" is changed to another level (B-1 to B-8). To any level value). The same applies to other peeling parameters.
- the current level value is managed for each type of peeling parameter, and transition to a low-speed level or a high-speed level is performed for each type of peeling parameter.
- the semiconductor die 15 can be picked up by a combination of the parameter values of the peel parameters.
- FIGS. 28 and 29 are flowcharts showing the flow of level transition control in another embodiment. Also in this embodiment, all the semiconductor dies 15 are the specific semiconductor dies 15, and there is an opportunity to change the level value every time the semiconductor dies 15 of one or more wafers are picked up. Hereinafter, a specific description will be given.
- the control unit 150 stores in the storage unit 152 a level value (current level value 161) to be applied when picking up for the first time.
- the current level value 161 is set to level 4 of the parameter table 159 in FIG. Note that this setting and each step of the flow in FIGS. 28 and 29 are performed by the control unit 150 functioning as setting means.
- the control of the pickup operation of the semiconductor die 15 is performed by the control unit 150 functioning as pickup control means.
- the control unit 150 initializes variables n1 and n2 to 0.
- Variables n1 and n2 are variables for counting the number of wafers.
- the wafer is exchanged to prepare for pickup of the semiconductor die 15 of a new wafer.
- control unit 150 initializes variables m1 and m2 to 0.
- the variable m1 is a variable that counts the number of semiconductor dies 15 that have been detected as difficult to peel in one wafer (the number of hard-to-peel detections), and the variable m2 is the semiconductor die that has been detected as easy to peel in one wafer. It is a variable for counting the number of 15 (the number of easily peelable detections).
- the flow rate sensor 106 detects the suction air flow rate of the collet 18, and the suction air flow rate is input to the control unit 150.
- the control unit 150 (setting means) acquires the actual flow rate change 158 which is a time change of the suction air flow rate, and stores it in the storage unit 152 (S2061).
- control unit 150 calculates a correlation value (evaluation value) between actual flow rate change 158 and expected flow rate change 157 stored in storage unit 152 in advance, and stores the correlation value in storage unit 152. I do.
- control unit 150 checks whether the correlation value calculated in S208 is lower than threshold value TH1 (twelfth predetermined value).
- the control unit 150 checks whether the correlation value calculated in S208 is higher than a threshold value TH2 (an eleventh predetermined value).
- control unit 150 confirms whether pickup of all the semiconductor dies 15 of one wafer has been completed. If pickup of all the semiconductor dies 15 of one wafer is not completed (S218: No), S206 to S216 are repeated, and if completed (S218: Yes), the process proceeds to S220 in FIG.
- control unit 150 checks whether the variable m1 (the number of difficulties in peeling detection) is larger than the constant Q.
- the constant Q is an integer of 0 or more. If S220 is Yes, in S224, the control unit 150 initializes a variable n2 to 0. Then, in S226, control unit 150 adds 1 to variable n1 (increments variable n1). Thus, the variable n1 counts the number of wafers satisfying the condition of S220. Then, in S228, control unit 150 checks whether variable n1 is larger than constant Y1.
- the constant Y1 is an integer of 0 or more.
- control unit 150 checks whether variable m2 (the number of easily peelable detections) is greater than constant P.
- the constant P is an integer of 0 or more. If S222 is Yes, in S232, the control unit 150 initializes the variable n1 to 0. Then, in S234, the control unit 150 adds 1 to the variable n2 (increments the variable n2). Thus, the variable n2 counts the number of wafers satisfying the condition of S222. Then, in S236, control unit 150 checks whether variable n2 is larger than constant Y2.
- the constant Y2 is an integer of 0 or more.
- damage to the semiconductor die 15 when the semiconductor die 15 is picked up can be accurately suppressed, and when the semiconductor die 15 is continuously picked up, the semiconductor die 15 The balance between the suppression of damage and the speeding up of the pickup of the semiconductor die 15 can be made appropriate.
- the actual flow rate change 158 is obtained for all the semiconductor dies 15. That is, all of the semiconductor dies 15 were set as specific semiconductor dies 15. However, the semiconductor die 15 (specific semiconductor die 15) that acquires the actual flow rate change 158 may not be all the semiconductor die 15. For example, one or a plurality of semiconductor dies 15 in one wafer may be a specific semiconductor die 15.
- each time the semiconductor die 15 of one or more wafers is picked up an opportunity to change the level value is given.
- an opportunity to change the level value may be given each time one semiconductor die 15 is picked up or each time a plurality of semiconductor dies 15 are picked up. For example, when a large number of semiconductor dies 15 are sequentially picked up, the greater the change in the releasability of the semiconductor dies 15 (or the expected change), the more frequently the opportunity to change the level value is given.
- pickup is performed by applying a new level value from the semiconductor die 15 immediately after picking up the specific semiconductor die 15 (the semiconductor die 15 that has acquired the actual flow rate change 158).
- a predetermined number of semiconductor dies 15 may be picked up, and thereafter, the semiconductor die 15 may be picked up by applying a new level value.
- pickup of another semiconductor die 15 after picking up a specific semiconductor die 15 means only “pickup of the semiconductor die 15 immediately after picking up a specific semiconductor die 15”. Instead, the pickup of the semiconductor die 15 after the pickup of the predetermined number of semiconductor dies 15 as described above is also included.
- the semiconductor die 15 picked up by increasing the number of switching of the opening pressure may be more damaged than the other semiconductor die 15. Therefore, the semiconductor die 15 that has been subjected to switching of the opening pressure a predetermined number of times or more when the semiconductor die 15 is picked up may be subjected to crack inspection or the like.
- the collet 18 conveys the semiconductor die 15 that has performed the switching of the opening pressure at least a predetermined number of times to another place (an inspection module, an inspection unit that performs a crack inspection, etc.) other than the other semiconductor dies 15, and The semiconductor die 15 is inspected for cracks or bending using an inspection module or the like.
- the period in which the expected flow rate change 157 and the actual flow rate change 158 for obtaining the correlation value (evaluation value) are compared is the predetermined period in the initial peeling.
- the period in which the expected flow rate change 157 and the actual flow rate change 158 are compared is the entire period of the initial peeling, the entire period of the main peeling, or a predetermined period in the main peeling, or a combination of the initial peeling and the main peeling.
- the expected flow rate change 157 is stored in the storage unit 152 in advance only during a period that is compared with the actual flow rate change 158.
- the correlation value between the actual flow rate change and the expected flow rate change was obtained as an index for grasping the detachability of the semiconductor die 15.
- the correlation value takes a value of 0 to 1.0, and indicates that the larger the value is, the easier the semiconductor die 15 is to be peeled off from the dicing sheet 12, which can be said to be the degree of ease of peeling.
- a value obtained by subtracting the correlation value from 1.0 (1.0-correlation value) takes a value of 0 to 1.0, and indicates that the larger the value, the more difficult it is for the semiconductor die 15 to separate from the dicing sheet 12. It can be said that it is the degree of difficulty in peeling.
- the degree of difficulty of separation can be used instead of the correlation value (degree of ease of separation).
- the threshold value table 160 of FIG. 24 (the lower the threshold value, the larger the threshold value TH1, the lower the threshold value) on the assumption that the correlation value (easiness of peeling) and the value range of the correlation value (0 to 1.0) are assumed. Table in which TH2 is set) was used. However, the threshold table 160 (the lower the threshold value, the smaller the threshold values TH1 and TH2 are set) based on the peeling difficulty (1.0-correlation value) and the range of the peeling difficulty (0 to 1.0). Table). The ease of peeling or the difficulty of peeling can also be referred to as the degree of peeling.
- the release operation described above during the initial peeling and during the stripping and retaining the suction pressure of the suction face 22 of the stage 20 to the third pressure P 3 near vacuum.
- the peeling parameters “the number of times of changing the suction pressure”, which is the number of times the suction pressure of the suction surface 22 of the stage 20 is switched between the third pressure P 3 and the fourth pressure P 4 , is added.
- the “number of times the suction pressure is switched” may be increased to promote the separation of the semiconductor die 15 from the dicing sheet 12.
- the semiconductor die pickup system 500 can also be called a semiconductor die pickup device.
- the semiconductor die pickup system 500 can be a part of a bonding apparatus (bonder, bonding system) or a die bonding apparatus (die bonder, die bonding system), and can also be referred to by their names.
- the first predetermined value, third predetermined value, fifth predetermined value, seventh predetermined value, and ninth predetermined value described in “Means for Solving the Problems” are represented by S118 in the flow of FIG. This corresponds to the threshold value TH2 to be compared with the correlation value (representative die evaluation value).
- the second predetermined value, the fourth predetermined value, the sixth predetermined value, the eighth predetermined value, and the tenth predetermined value described in “Means for solving the problem” are determined in S116 of the flow of FIG. This corresponds to a threshold value TH1 to be compared with the representative correlation value (representative die evaluation value).
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Abstract
Description
代表ダイ評価値が第7所定値より低い値である第8所定値より低い場合には、上記他の半導体ダイをピックアップする際に、特定の半導体ダイをピックアップした際の同時に上記第1位置から上記第2位置に移動させた移動要素の数に比べて、当該移動要素の数を少なくする、としてもよい。
以下、図面を参照しながら本発明の実施形態の半導体ダイのピックアップシステムについて説明する。図1に示す様に、本実施形態の半導体ダイのピックアップシステム500は、半導体ダイ15が表面12aに貼り付けられたダイシングシート12を保持し、水平方向に移動するウェーハホルダ10と、ウェーハホルダ10の下面に配置され、ダイシングシート12の裏面12bを吸着する吸着面22を含むステージ20と、ステージ20の吸着面22に設けられた開口23の中に配置される複数の移動要素30と、吸着面22に対する段差面を形成する段差面形成機構300と、段差面形成機構300を駆動する段差面形成機構駆動部400と、半導体ダイ15をピックアップするコレット18と、ステージ20の開口23の圧力を切換える開口圧力切換機構80と、ステージ20の吸着面22の吸着圧力を切換える吸着圧力切換機構90と、コレット18の表面18aから空気を吸引する吸引機構100と、真空装置140と、ウェーハホルダ10を水平方向に駆動するウェーハホルダ水平方向駆動部110と、ステージ20を上下方向に駆動するステージ上下方向駆動部120と、コレット18を上下左右方向に駆動するコレット駆動部130と、半導体ダイのピックアップシステム500の制御を行う制御部150と、を備えている。
ここで、半導体ダイ15が貼り付けられたダイシングシート12をウェーハホルダ10にセットする工程について説明する。
次に、半導体ダイ15のピックアップ動作について説明する。各半導体ダイ15のダイシングシート12からの剥離し易さ(剥離性)は、半導体ダイ15の厚さ、ダイシングシート12の厚さ、各半導体ダイ15に対するダイシングシート12の粘着性、半導体ダイのピックアップシステム500の置かれた環境(気温、湿度等)などによって変化する。また、同種の半導体ダイ15を継続してピックアップしている際に、各半導体ダイのダイシングシートからの剥離し易さが変化する場合もある。そこで、本実施形態の半導体ダイのピックアップシステム500は、半導体ダイ15ごとに、ピックアップの際の剥離動作(ピックアップ動作)を変更できるようになっている。記憶部152には、図19に示すパラメータテーブル159が格納されており、パラメータテーブル159には、複数のレベル値のそれぞれに対応付けた剥離パラメータ(ピックアップパラメータ)のパラメータ値が規定されている。パラメータテーブル159には、ピックアップ時間が最も短いレベル1から、最も長いレベル8までが規定されている。半導体ダイ15のダイシングシート12からの剥離し易さ(剥離容易度)が高いほどレベル1又はレベル1に近いレベル値がピックアップの際に設定され、そのレベル値に規定された各剥離パラメータのパラメータ値を用いて剥離動作(ピックアップ動作)が行われる。なお、この設定は、制御部150が設定手段として機能して行う。各剥離パラメータの詳細については、後で説明する。以下では、パラメータテーブル159のレベル4が設定(選択)された場合を例に挙げて、半導体ダイのピックアップ動作を説明する。
ここで、図19のパラメータテーブル159についてさらに詳しく説明する。半導体ダイ15のダイシングシート12からの剥離性に応じて、パラメータテーブル159のレベル1~8から1つのレベル値を選択(設定)し、そのレベル値に規定された各剥離パラメータのパラメータ値を適用して剥離動作を行うことができる。剥離し難いほど、より高いレベル値(低速レベル)を選択する。
次に、半導体ダイ15のダイシングシート12からの剥離性の検出方法について説明する。半導体ダイ15のダイシングシート12からの剥離性は、流量センサ106が検出するコレット18の吸引空気流量の時間変化(実流量変化)から検出することができる。
)~時刻tc_end(最初に開口圧力が第1圧力P1に達した時刻t4から所定時間経過した時刻)とする。または、比較する期間は、初期剥離の期間の一部である時刻t3(開口圧力が第1圧力P1に向かって変化し始めた時刻)~tc_endの期間であってもよい。また、対比する期間は、その他の期間であってもよいが、上記したレベル値を変更しても剥離動作が変更されない期間である方が好ましい。このようにすれば、期待流量変化157を1パターンだけ記憶部152に格納しておけばよく、レベル値毎の期待流量変化157のパターンを記憶部152に格納しておく必要がない。
次に、ピックアップの際に適用するレベル値(パラメータテーブル159のレベル値)の遷移について説明する。以降説明するように、半導体ダイのピックアップシステム500は、1つ又は複数の特定の半導体ダイ15をピックアップする際に実流量変化158を取得し、取得された1つ又は複数の実流量変化158のそれぞれに基づいて、特定の半導体ダイ15のそれぞれの上記した相関値を求め、1つ又は複数の相関値に基づいて、特定の半導体ダイ15をピックアップした後の他の半導体ダイ15のピックアップの際に適用するレベル値を変更する。
次に、以上説明した半導体ダイのピックアップシステム500の作用効果について説明する。以上説明した半導体ダイのピックアップシステム500によれば、ステージ20の吸着面22に設けられた開口23の開口圧力を真空に近い第1圧力と大気圧に近い第2圧力との間で切換えることを含む半導体ダイ15の剥離動作を適用することにより、ピックアップの際の半導体ダイ15の損傷や、ピックアップミスを的確に抑制することができる。
次に、剥離パラメータの種類ごとにレベル値を設ける場合について説明する。以上説明した図19のパラメータテーブル159は、複数種類の剥離パラメータに共通して使われるレベル値が用意されていた。しかし、図27A,図27Bに示すように、剥離パラメータの種類ごとにパラメータテーブル159a,159bが用意され、剥離パラメータの種類ごとにレベル値が用意されてもよい。図27Aのパラメータテーブル159aには、「初期剥離時の開口圧力の切換回数」のレベルA-1~A-8が規定されており、図27Bのパラメータテーブル159bには、「本剥離時の開口圧力の切換回数」のレベルB-1~B-8が規定されている。なお、図示されていないが、他の剥離パラメータについても、個別に同様のパラメータテーブルを用意する。そして、図24に示した閾値テーブル160についても、剥離パラメータの種類ごとに用意し、各剥離パラメータのレベル値に対応した閾値TH1,TH2を規定しておく。例えば、図27AのレベルA-1~A-8の各々に対応づけて、図24のような閾値TH1,TH2の各々を規定した閾値テーブルを用意し、図27BのレベルB-1~B-8の各々に対応づけて、図24のような閾値TH1,TH2の各々を規定した別の閾値テーブルを用意しておく。他の剥離パラメータについても、同様に、別々の閾値テーブルを用意しておく。また、剥離パラメータの種類ごとに、現在レベル値を記憶部152に格納しておく。
次に、他の実施形態のレベル遷移制御について説明する。図28,29は、他の実施形態におけるレベル遷移制御の流れを示すフローチャートである。この実施形態でも、全ての半導体ダイ15が特定の半導体ダイ15とされ、1枚または複数枚のウェーハの半導体ダイ15をピックアップする毎にレベル値を遷移させる機会がある。以下、具体的に説明する。
以上説明した各実施形態では、全ての半導体ダイ15について実流量変化158を取得した。すなわち、全ての半導体ダイ15を特定の半導体ダイ15とした。しかし、実流量変化158を取得する半導体ダイ15(特定の半導体ダイ15)は、全ての半導体ダイ15でなくてもよい。例えば、1枚のウェーハの中の1個又は複数個の半導体ダイ15を、特定の半導体ダイ15としてもよい。
なお、「課題を解決するための手段」に記載されている第1所定値,第3所定値,第5所定値,第7所定値,第9所定値は、図23のフローのS118で代表相関値(代表ダイ評価値)と比較される閾値TH2に対応している。同様に、「課題を解決するための手段」に記載されている第2所定値,第4所定値,第6所定値,第8所定値,第10所定値は、図23のフローのS116で代表相関値(代表ダイ評価値)と比較される閾値TH1に対応している。
Claims (21)
- ダイシングシートの表面に貼り付けられた半導体ダイを前記ダイシングシートからピックアップする半導体ダイのピックアップシステムであって、
半導体ダイを吸着するコレットと、
前記コレットに接続され、前記コレットの表面から空気を吸引する吸引機構と、
前記吸引機構が吸引する吸引空気流量を検出する流量センサと、
前記ダイシングシートの裏面を吸着する吸着面を含むステージと、
前記ステージの前記吸着面に設けられた開口の開口圧力を真空に近い第1圧力と大気圧に近い第2圧力との間で切換える開口圧力切換機構と、
半導体ダイをピックアップする際に前記開口圧力の切換回数を含むピックアップパラメータを設定する設定手段と、
を備え、
前記設定手段は、
半導体ダイをピックアップする際に、前記流量センサが検出する前記吸引空気流量の時間変化である流量変化を取得し、前記流量変化に基づいて、半導体ダイを前記ダイシングシートから剥離する剥離性を評価した評価値を算出し、
前記評価値に基づいて、前記半導体ダイをピックアップした後の他の半導体ダイをピックアップする際の前記ピックアップパラメータを変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1に記載の半導体ダイのピックアップシステムであって、
前記設定手段は、
前記他の半導体ダイをピックアップする際の前記開口圧力を前記第1圧力に保持する時間を前記評価値に基づいて変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
前記開口の中に配置され、先端面が前記吸着面より高い第1位置と前記第1位置より低い第2位置との間で移動する複数の移動要素をさらに備え、
半導体ダイをピックアップする際に、複数の前記移動要素のそれぞれを所定時間の間隔で順に、又は、所定の前記移動要素の組合せで同時に前記第1位置から前記第2位置に移動させ、
前記設定手段は、
前記他の半導体ダイのピックアップの際の前記所定時間を前記評価値に基づいて変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項3に記載の半導体ダイのピックアップシステムであって、
前記設定手段は、
前記他の半導体ダイのピックアップの際の同時に前記第1位置から前記第2位置に移動させる前記移動要素の数を前記評価値に基づいて変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項3に記載の半導体ダイのピックアップシステムであって、
半導体ダイをピックアップする際に、前記開口圧力を前記第1圧力と前記第2圧力との間で切換えて前記開口で吸引された前記ダイシングシートを半導体ダイから剥離させる初期剥離を行い、
前記流量変化は、前記初期剥離の際の前記流量センサが検出する前記吸引空気流量の時間変化である、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項5に記載の半導体ダイのピックアップシステムであって、
前記切換回数は、前記初期剥離の際の前記開口圧力を前記第1圧力と前記第2圧力との間で切換える回数である、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
前記設定手段は、
前記他の半導体ダイを前記ダイシングシートから剥離する際の前記コレットが半導体ダイに着地してからその持ち上げを開始するまでの待機時間を前記評価値に基づいて変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
半導体ダイが良好に前記ダイシングシートからピックアップされた場合における、当該半導体ダイのピックアップの際の前記吸引空気流量の時間変化である期待流量変化を記憶する記憶部を、備え、
前記設定手段は、
前記評価値を、半導体ダイをピックアップする際の前記流量変化と前記期待流量変化との間の相関値に基づいて求める、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
半導体ダイのクラック検査を行う検査部をさらに備え、
半導体ダイをピックアップする際に前記切換えを予め定めた回数以上行った半導体ダイを、クラック検査の対象とする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
前記設定手段は、
1枚又は複数枚のウェーハを構成する半導体ダイの前記流量変化を取得し、それぞれの前記流量変化に基づいて前記評価値を求め、
複数の前記評価値に基づいて、前記他の半導体ダイをピックアップする際の前記ピックアップパラメータを変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
複数のレベル値のそれぞれに対応付けられた前記ピックアップパラメータのパラメータ値のテーブルと、
現在適用している前記ピックアップパラメータのパラメータ値のレベル値である現在レベル値と、を記憶する記憶部を、備え、
前記現在レベル値をキーとして前記テーブルから前記ピックアップパラメータのパラメータ値を読み出し、当該ピックアップパラメータのパラメータ値を適用して半導体ダイをピックアップし、
前記設定手段は、
前記評価値に基づいて、前記現在レベル値を他のレベル値に遷移させることで、前記他の半導体ダイをピックアップする際の前記ピックアップパラメータのパラメータ値を変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値から、それらの代表値である代表ダイ評価値を求め、
前記代表ダイ評価値が第1所定値より高い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記切換回数に比べて、前記切換回数を少なくし、
前記代表ダイ評価値が前記第1所定値より低い値である第2所定値より低い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記切換回数に比べて、前記切換回数を多くする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項2に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値から、それらの代表値である代表ダイ評価値を求め、
前記代表ダイ評価値が第3所定値より高い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記開口圧力を前記第1圧力に保持した時間に比べて、当該時間を短くし、
前記代表ダイ評価値が前記第3所定値より低い値である第4所定値より低い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記開口圧力を前記第1圧力に保持した時間に比べて、当該時間を長くする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項3に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値から、それらの代表値である代表ダイ評価値を求め、
前記代表ダイ評価値が第5所定値より高い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記所定時間に比べて、前記所定時間を短くし、
前記代表ダイ評価値が前記第5所定値より低い値である第6所定値より低い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記所定時間に比べて、前記所定時間を長くする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項4に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値から、それらの代表値である代表ダイ評価値を求め、
前記代表ダイ評価値が第7所定値より高い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の同時に前記第1位置から前記第2位置に移動させた前記移動要素の数に比べて、当該移動要素の数を多くし、
前記代表ダイ評価値が前記第7所定値より低い値である第8所定値より低い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の同時に前記第1位置から前記第2位置に移動させた前記移動要素の数に比べて、当該移動要素の数を少なくする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項7に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値から、それらの代表値である代表ダイ評価値を求め、
前記代表ダイ評価値が第9所定値より高い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記待機時間に比べて、前記待機時間を短くし、
前記代表ダイ評価値が前記第9所定値より低い値である第10所定値より低い場合には、前記他の半導体ダイをピックアップする際に、前記特定の半導体ダイをピックアップした際の前記待機時間に比べて、前記待機時間を長くする、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項1又は2に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを第11所定値と比較し、前記第11所定値より高い前記評価値の数である剥離容易検出数を求め、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを前記第11所定値より低い値である第12所定値と比較し、前記第12所定値より低い前記評価値の数である剥離困難検出数を求め、
前記剥離容易検出数と前記剥離困難検出数に基づいて、前記特定の半導体ダイをピックアップした後の前記他の半導体ダイのピックアップの際の前記切換回数を変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項2に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを第11所定値と比較し、前記第11所定値より高い前記評価値の数である剥離容易検出数を求め、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを前記第11所定値より低い値である第12所定値と比較し、前記第12所定値より低い前記評価値の数である剥離困難検出数を求め、
前記剥離容易検出数と前記剥離困難検出数に基づいて、前記特定の半導体ダイをピックアップした後の前記他の半導体ダイのピックアップの際の前記開口圧力を前記第1圧力に保持する時間を変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項3に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを第11所定値と比較し、前記第11所定値より高い前記評価値の数である剥離容易検出数を求め、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを前記第11所定値より低い値である第12所定値と比較し、前記第12所定値より低い前記評価値の数である剥離困難検出数を求め、
前記剥離容易検出数と前記剥離困難検出数に基づいて、前記特定の半導体ダイをピックアップした後の前記他の半導体ダイのピックアップの際の前記所定時間を変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項4に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを第11所定値と比較し、前記第11所定値より高い前記評価値の数である剥離容易検出数を求め、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを前記第11所定値より低い値である第12所定値と比較し、前記第12所定値より低い前記評価値の数である剥離困難検出数を求め、
前記剥離容易検出数と前記剥離困難検出数に基づいて、前記特定の半導体ダイをピックアップした後の前記他の半導体ダイのピックアップの際の前記移動要素の数を変更する、
ことを特徴とする半導体ダイのピックアップシステム。 - 請求項7に記載の半導体ダイのピックアップシステムであって、
前記評価値を算出する半導体ダイは特定の半導体ダイであり、
前記設定手段は、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを第11所定値と比較し、前記第11所定値より高い前記評価値の数である剥離容易検出数を求め、
1つ又は複数の前記特定の半導体ダイの前記評価値のそれぞれを前記第11所定値より低い値である第12所定値と比較し、前記第12所定値より低い前記評価値の数である剥離困難検出数を求め、
前記剥離容易検出数と前記剥離困難検出数に基づいて、前記特定の半導体ダイをピックアップした後の前記他の半導体ダイのピックアップの際の前記待機時間を変更する、
ことを特徴とする半導体ダイのピックアップシステム。
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