WO2019230195A1 - 搬送ハンド及び搬送ロボット - Google Patents

搬送ハンド及び搬送ロボット Download PDF

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Publication number
WO2019230195A1
WO2019230195A1 PCT/JP2019/015218 JP2019015218W WO2019230195A1 WO 2019230195 A1 WO2019230195 A1 WO 2019230195A1 JP 2019015218 W JP2019015218 W JP 2019015218W WO 2019230195 A1 WO2019230195 A1 WO 2019230195A1
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WO
WIPO (PCT)
Prior art keywords
hand
gripping
substrate
article
arm
Prior art date
Application number
PCT/JP2019/015218
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
健太郎 東
敬之 石崎
光信 岡
Original Assignee
川崎重工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 川崎重工業株式会社 filed Critical 川崎重工業株式会社
Priority to JP2020521758A priority Critical patent/JP6971398B2/ja
Priority to CN201980036180.XA priority patent/CN112203814B/zh
Publication of WO2019230195A1 publication Critical patent/WO2019230195A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a transport hand and a transport robot including the transport hand.
  • a robot has been used to transport a plate-like object such as a semiconductor substrate (hereinafter, “substrate” will be described as an example of a “plate-like object”) as a conveyance article.
  • substrate a semiconductor substrate
  • FIG. 1 a prior art related to this type of robot, for example, there is one in which positioning and transporting are performed by an operation of holding a workpiece from one hand to the other (see, for example, Patent Document 1).
  • Patent Document 2 there is a hand that grips a workpiece having a different size or shape (see, for example, Patent Document 2).
  • This hand includes a grip portion on a set of slide portions that approach or separate along a linear axis.
  • the gripping part includes a joint part for rotating a gripping claw provided at the tip part.
  • a substrate storage unit in which a plurality of substrates are stacked in an aligned state may be used.
  • the substrate storage section generally has a pair of support members that are spaced apart from each other, and a plurality of support grooves are formed on the support member at a constant pitch.
  • the semiconductor substrate is inserted into the support grooves formed in the pair of support members, so that the peripheral portion is supported by the support members.
  • the above prior art does not disclose any configuration of a hand for carrying the substrate in and out of the substrate storage unit as described above.
  • a configuration of a hand that loads or unloads a substrate by sliding along a support groove is not disclosed.
  • an object of the present invention is to provide a transport hand and a transport robot capable of transporting an article with slide movement.
  • a transport hand is a transport hand that grips and transports an article, the first grip portion gripping the article in a first direction, and the first direction.
  • a second gripping part that grips the article in a second direction different from the first gripping part, wherein the first gripping part operates to slide the gripped article, and the second gripping part is configured to move the first gripping part.
  • the article slid by the unit is gripped.
  • a transport robot includes a first arm including the first hand of the transport hand according to an aspect of the present invention, and a second hand of the transport hand according to an aspect of the present invention.
  • a second arm ; and a control device that controls the operation of the first arm and the operation of the second arm.
  • a transfer robot includes an arm including the transfer hand according to an aspect of the present invention, and a control device that controls operations of the arm and the transfer hand.
  • FIG. 1 is a perspective view showing a transfer robot according to the first embodiment.
  • FIG. 2 is a plan view showing the first hand according to the first embodiment.
  • FIG. 3 is a front view of the first hand shown in FIG.
  • FIG. 4 is a side view of the first hand shown in FIG. 5 is a cross-sectional view taken along line VV shown in FIG.
  • FIG. 6 is a plan view showing the second hand according to the first embodiment.
  • FIG. 7 is a side view of the second hand shown in FIG.
  • FIG. 8 is a side view taken along arrow VIII showing the operation of the fourth gripping portion shown in FIG.
  • FIG. 9 is a plan view showing a state before the substrate is transferred from the first substrate storage unit using the first hand shown in FIG. 2 and the second hand shown in FIG.
  • FIG. 9 is a plan view showing a state before the substrate is transferred from the first substrate storage unit using the first hand shown in FIG. 2 and the second hand shown in FIG.
  • FIG. 9 is a plan view showing
  • FIG. 10 is a plan view showing a state in which the substrate is pulled out from the state shown in FIG.
  • FIG. 11 is a plan view showing a state in which the substrate is pulled out to a predetermined position from the state shown in FIG. 12 is a cross-sectional view taken along arrow XII-XII shown in FIG.
  • FIG. 13 is a plan view showing a state in which the substrate is gripped from the width direction by the second hand shown in FIG.
  • FIG. 14 is a plan view showing the transfer robot in a state where the substrate is held by the second hand.
  • FIG. 15 is a plan view showing the operation of transporting the substrate to the test apparatus by the transport robot shown in FIG. FIG.
  • FIG. 16 is a plan view showing a state in which the substrate of the test apparatus is replaced by the transfer robot shown in FIG.
  • FIG. 17 is a plan view showing a state before the substrate removed from the test apparatus by the transport robot shown in FIG. 16 is stored in the second substrate storage unit.
  • FIG. 18 is a plan view showing a state in which the substrate shown in FIG. 17 is transferred to the second hand.
  • FIG. 19 is a plan view showing a state in which the orientation of the substrate is changed by the second hand shown in FIG. 20 is a side view taken along arrow XX shown in FIG.
  • FIG. 21 is a side view showing a state in which the substrate in the state shown in FIG. 19 is stored in the second substrate storage unit and a state in which the stored substrate is taken out.
  • FIG. 22 is a plan view showing a state before the substrate is pulled out by the second hand of the transfer robot, and the orientation of the substrate is changed and stored in the first substrate storage unit.
  • FIG. 23 is a plan view showing a state before the substrate is stored in the first substrate storage portion by the second hand shown in FIG.
  • FIG. 24 is a plan view showing a state in which the substrate is stored in the first substrate storage unit by the second hand shown in FIG.
  • FIG. 25 is a plan view of an example in which the position adjustment between the substrate contact portion and the third gripping portion of the first hand shown in FIG. 2 is possible.
  • FIG. 26 is a side view of FIG.
  • FIG. 27 is a perspective view showing the transfer robot according to the second embodiment.
  • FIG. 28 is a plan view showing the transfer robot according to the second embodiment.
  • FIG. 29 is a perspective view showing a transport hand according to the second embodiment.
  • FIG. 30 is a plan view showing a state where the transfer hand of the right arm is positioned with respect to the transfer target substrate in the first substrate storage unit.
  • FIG. 31 is a side view of FIG.
  • FIG. 32 is a plan view showing a state in which the substrate to be transferred in the first substrate storage unit is pushed out with respect to the transfer hand of the right arm.
  • FIG. 33 is a side view of FIG.
  • FIG. 34 is a plan view showing a state in which the first gripping portion of the transport hand of the right arm grips the extruded substrate.
  • FIG. 35 is a side view of FIG.
  • FIG. 36 is a side view showing a state of the first actuator of the first gripper in FIGS.
  • FIG. 37 is a plan view showing a state in which the first gripping portion of the right arm transport hand pulls the gripped substrate out of the first substrate storage portion.
  • FIG. 38 is a side view of FIG.
  • FIG. 39 is a side view showing a state of the second actuator of the first gripping part in FIGS. 37 and 38.
  • FIG. 40 is a side view showing a state in which the first holding unit in FIG. 39 releases the holding of the pulled-out substrate.
  • FIG. 41 is a plan view showing a state in which the second gripping portion of the transport hand of the right arm grips the drawn substrate.
  • FIG. 42 is a side view of FIG.
  • FIG. 43 is a side view showing the substrate mounting portion of the test apparatus according to the second embodiment.
  • FIG. 44 is a plan view showing a substrate mounting portion of the test apparatus according to the second embodiment.
  • FIG. 45 is a plan view showing a state of the second cylinder of the first grip portion when the substrate is placed on the substrate placement portion.
  • the transport hand is a transport hand that grips and transports an article, and a first grip portion that grips the article in a first direction and a second direction different from the first direction.
  • a second gripping part for gripping the article wherein the first gripping part is slid to move the gripped article, and the second gripping part is slid by the first gripping part. Grip the article.
  • the second gripper grips the article slid by the first gripper in a direction different from the gripping direction of the first gripper. Accordingly, the transport hand can grip and transport the article after sliding the article. Therefore, the transport hand can transport the article with the slide movement. In addition, since the second gripping part grips the article in a direction different from that of the first gripping part, the article can be easily and reliably gripped without being affected by the first gripping part.
  • the transport hand further includes a first hand and a second hand, and the first hand has a first attachment portion attached to the first arm and rotates within the first surface.
  • a possible first hand body, the first grip body provided on the first hand body and gripping an end of the article in the first direction, which is the thickness direction, and both sides of the first grip section And a third gripping part for gripping the article from both sides in the third direction, and the second hand comprises: A second hand main body having a second attachment part attached to the two arms and rotatable within the first surface; and provided in the second hand main body, the article in the second direction being a width direction. You may have the said 2nd holding part hold
  • the article can be positioned in the thickness direction by the first gripping unit in the state where the article is positioned with respect to the first hand body by bringing the contact part of the first hand into contact with the article. . Then, the article pulled out by the first grip portion can be gripped in the width direction by the second grip portion of the second hand. By these operations, the articles held and stored at the periphery can be appropriately pulled out and conveyed.
  • the second gripping part may be configured to grip the article gripped by the first gripping part of the first hand from both sides. According to the above configuration, the article can be reliably gripped by the second gripping portion.
  • the second gripping unit includes a support unit that supports the article that is gripped by the first gripping unit of the first hand and moves within the first surface from below. You may have. According to the above configuration, the article can be reliably moved without departing from the first surface.
  • the second hand grips the article in a fourth direction which is a thickness direction, and the posture of the article is in a second plane orthogonal to the first plane. You may further provide the 4th holding part to change. According to the above configuration, the posture of the article can be changed by the second hand.
  • the first hand body is formed in an L shape, and the abutting portion and the first gripping portion are provided on one of the L shapes, and the other of the L shapes.
  • the third gripping part may be provided on. According to the said structure, it is suppressed that a 1st holding part and a 3rd holding part interfere.
  • the first hand main body may be provided with the third gripping portion on the lower surface and a support portion for supporting the article from below on the upper surface. According to the above configuration, the first hand can process different articles on the lower surface and the upper surface of the first hand body.
  • the second hand body is formed in an L shape
  • the second grip portion is provided in one of the L shapes
  • the fourth grip portion is provided in the other of the L shapes. May be provided. According to the said structure, it is suppressed that a 2nd holding part and a 4th holding part interfere.
  • the contact portion may be configured to adjust an arrangement interval on both sides of the first gripping portion. According to the above configuration, the abutting portion can abut against articles of various sizes.
  • the second grip portion and the third grip portion may be configured to adjust a grip interval of the article.
  • the 2nd holding part and the 3rd holding part can be hold
  • a transfer robot includes the first arm including the first hand of the transfer hand according to an aspect of the present invention, and the second hand of the transfer hand according to an aspect of the present invention. And a control device for controlling the operation of the first arm and the operation of the second arm.
  • the operation of pulling out the article by controlling the operation of the first hand of the first arm and the operation of controlling the operation of the second hand of the second arm to grip and convey the article by one transport robot. Can be performed appropriately.
  • the operation of placing an article at a predetermined location from the storage unit or the like with one arm and the operation of holding another article from the predetermined location to the storage unit or the like with the other arm can be efficiently performed in parallel. it can.
  • the transport hand further includes a hand main body having the first grip portion and the second grip portion, and the first grip portion grips and slides the article in the first direction.
  • the first gripping member is movable
  • the second gripping portion has a second gripping member that grips the article in the second direction and is disposed opposite to the second gripping portion
  • the first gripping portion is The first gripping member that grips the article is slid to move the article between the second gripping members, and the second gripping portion moves the second gripping member in the second direction.
  • the article may be gripped by being moved. According to the above configuration, the article can be slid and moved by one hand body and then conveyed. Therefore, the structure of the transport hand can be made compact.
  • each of the second gripping members has a guide portion that extends in the sliding movement direction of the first gripping member and faces each other, and the guide portion is the first gripping member.
  • the article to be moved may be guided between the second gripping members. According to the above configuration, the article can be reliably and stably slid by the first gripping member.
  • the first grip portion may include a slide actuator that slides the first grip member. According to the above configuration, the first gripping member can be slid using the actuator.
  • the slide actuator may include a plurality of stages of cylinders. According to the said structure, a 1st holding member can be moved using a multistage slide movement. Therefore, the sliding movement of the first gripping member having various patterns becomes possible.
  • the second gripping section may include a gripping actuator that moves at least one of the second gripping members. According to the above configuration, the gripping operation of the second gripping member using the actuator can be performed.
  • the transport hand further includes an attachment portion that attaches the hand body to an attachment target, and a connection portion that connects the hand body and the attachment portion, and the connection portion corresponds to the attachment portion.
  • a floating mechanism that allows the hand body to swing may be included.
  • a transfer robot includes an arm including the transfer hand according to an aspect of the present invention, and a control device that controls operations of the arm and the transfer hand. According to the above configuration, it is possible to grip and convey an article after sliding the article using one arm.
  • the transfer robot includes a first arm and a second arm as the arm, each of the first arm and the second arm includes the transfer hand, and the control device includes the control device, The operations of the first arm and the second arm may be controlled. According to the above configuration, since the article can be conveyed by the first arm and the second arm, the conveyance efficiency is improved.
  • the first arm and the second arm may be configured to rotate on the same axis. According to the said structure, the interference of the 1st arm and the 2nd arm at the time of rotation can be suppressed, and each rotation range can be enlarged.
  • Embodiment 1 of the present invention will be described with reference to the drawings.
  • the substrate 100 that is a plate-like object will be described as an example of the article to be transported.
  • the transfer robot 1 that is a substrate transfer robot that transfers the substrate 100 stored in the first substrate storage unit 110 to the test apparatus 200 will be described as an example.
  • the width direction of the substrate 100 in the document of this specification and claims refers to the horizontal direction of the board surface orthogonal to the plate thickness direction of the substrate 100.
  • the thickness direction of the substrate 100 is an example of the first direction
  • the width direction of the substrate 100 is an example of the second direction.
  • a horizontal surface may be referred to as a “first surface” and a vertical surface as a “second surface”.
  • FIG. 1 is a perspective view showing a transfer robot 1 according to the first embodiment.
  • the transfer robot 1 according to Embodiment 1 has a first arm 3 (left arm) and a second arm 4 (right arm) that rotate in a horizontal plane about a first axis S1 provided in the vertical direction of the base 2. Is provided.
  • the first arm 3 and the second arm 4 have a first link 5, a second link 6, a third link 7 and a fourth link 8, respectively.
  • the first link 5 is rotatable in a horizontal plane around the first axis S1.
  • the second link 6 is rotatable in a horizontal plane around the second axis S2.
  • the third link 7 is rotatable in a vertical plane around the third axis S3.
  • the fourth link 8 can swing around the fourth axis S4.
  • the first arm 3 and the second arm 4 rotate on the same axis about the first axis S1, and can operate independently of each other.
  • the first link 5 of the first arm 3 and the first link 5 of the second arm 4 are arranged so as to be shifted in the direction of the first axis S1.
  • the operation of the first arm 3 and the second arm 4 is controlled by the control device 9.
  • the control device 9 includes a processor, a volatile memory, a nonvolatile memory, an I / O interface, and the like.
  • the control device 9 includes a receiving unit, a storage unit, a control unit, and an output unit as functional components.
  • the receiving unit and the output unit are realized by an I / O interface.
  • the storage unit is realized by a volatile memory and a nonvolatile memory.
  • the function of the control unit is realized by the processor using the volatile memory to calculate the coordinate positions of the tips of the links 5 to 8 based on the program stored in the nonvolatile memory.
  • the control unit outputs the operation amount to the drive unit of each link 5 to 8 based on the calculated tip coordinate position, and calculates each coordinate position based on the operation signal received from the drive unit of each link 5 to 8 To do.
  • the control device 9 also performs opening / closing control of each gripping portion 30, 40, 60, 70 described later and turning control of the turning portion 73.
  • the transfer robot 1 is provided with a transfer hand 10 including a first hand 20 and a second hand 50.
  • the first hand 20 is provided at the tip of the fourth link 8 of the first arm 3.
  • the first hand 20 is rotatable within a first surface in the horizontal direction around the fifth axis S5 of the fourth link 8 (axis in the same direction as the second hand 50).
  • the second hand 50 is provided at the tip of the fourth link 8 of the second arm 4.
  • the second hand 50 is rotatable in the horizontal first surface about the fifth axis S5 of the fourth link 8.
  • the first hand 20 and the second hand 50 are attached via a plate material provided at the tip of the fourth link 8.
  • a first substrate storage unit (storage unit) 110 that stores the substrate 100 in the horizontal direction and a second substrate storage unit that stores the substrate 100 in the vertical direction ( Storage section) 120.
  • the first substrate storage unit 110 is the supply side of the substrate 100
  • the second substrate storage unit 120 is the carry-out side of the substrate 100.
  • the first substrate storage section 110 is provided with a support member 112 that extends in the vertical direction to the left and right positions inside the casing 111 that is formed in a rectangular shape.
  • the support member 112 is provided with a plurality of support grooves 113 so as to hold the periphery of the substrate 100 in a horizontal state.
  • the first substrate storage unit 110 a plurality of substrates 100 can be stored in the support groove 113 in the horizontal direction.
  • the depth direction of the substrate 100 in the first substrate storage unit 110 is defined as the Y-axis direction
  • the width direction is defined as the X-axis direction.
  • the second substrate storage section 120 is provided with a support member 122 (only one is shown) that extends in the vertical direction to the left and right positions inside the casing 121 formed in a rectangular shape.
  • the support member 122 is provided with a plurality of partition grooves 123 at predetermined intervals so that the substrate 100 can be stored in the vertical direction.
  • a plurality of substrates 100 can be stored between the partition grooves 123 in the vertical direction.
  • a test apparatus 200 for the substrate 100 is provided on the other side of the base 2.
  • a test apparatus 200 for the substrate 100 is provided on the other side of the base 2.
  • the state shown in the figure shows a state in which the substrate 100 under test operation is placed on the substrate placement unit 201.
  • the substrate 100 stored in the horizontal direction inside the first substrate storage unit 110 is pulled out and transferred to the test apparatus 200, and the substrate 100 that has been tested by the test apparatus 200 is stored in the second substrate storage unit. 120 can be stored in the vertical direction.
  • FIG. 2 is a plan view showing the first hand 20 shown in FIG.
  • FIG. 3 is a front view of the first hand 20 shown in FIG.
  • FIG. 4 is a side view of the first hand 20 shown in FIG. 5 is a cross-sectional view taken along line VV shown in FIG.
  • the vertical direction of the first hand 20 is the vertical direction in the front view state shown in FIG.
  • the first hand 20 of the present embodiment has a first hand body 21 that is formed in an L shape in plan view.
  • One of the two linear portions forming the L-shape of the first hand body 21 is provided with a first attachment portion 22 attached to the fourth link 8 of the first arm 3 (circular portion in the figure). ).
  • the 1st attaching part 22 is attached to the 4th link 8, and is rotated centering on 5th axis
  • a first grip portion 30 provided so as to protrude in parallel with the other of the two linear portions forming the L-shape, and a substrate contact portion (contact portion) 35 is provided.
  • the first grip 30 is provided with a pair of first grip members 31 that can be opened and closed close to or away from each other in the vertical direction so as to grip the substrate 100 from the thickness direction.
  • a pair of first gripping members 31 an air chuck, an electromagnetic chuck, or the like can be used.
  • the first gripping member 31 is provided with a sensor 32 that detects the presence of the substrate 100 between the pair of first gripping members 31.
  • a photoelectric sensor also referred to as “beam sensor”
  • laser sensor a laser sensor
  • limit switch or the like
  • substrate contact portions 35 are provided that contact the end surface of the substrate 100 gripped by the first grip member 31.
  • the substrate contact portion 35 is provided at least at two locations within the width dimension of the substrate 100.
  • the substrate contact portion 35 is formed of, for example, a resin material, and is formed of a material that does not damage the substrate 100 even if it is brought into contact with the substrate 100.
  • the substrate abutting portion 35 is brought into contact with the substrate 100 and the sensor 32 detects that the substrate 100 is between the first grip members 31, as will be described later.
  • One holding member 31 is closed and the substrate 100 is held.
  • the substrate 100 is gripped in a state of being in contact with the substrate contact portion 35, and therefore, always at a constant distance H with respect to the center of the first attachment portion 22 of the first hand body 21. The substrate 100 can be properly held.
  • a third gripping portion 40 is provided on the lower surface of the other of the two linear portions forming the L-shaped shape of the first hand main body 21.
  • the third gripping portion 40 has a pair of third gripping members 41 that grip the substrate 100 from the width direction.
  • the third gripping member 41 is formed in an L shape.
  • the third gripping member 41 includes a protruding portion 41a protruding inward with respect to each of the third gripping member 41 in the lower portion. By projecting the lower part of the L-shaped third gripping member 41 inwardly, the third gripping member 41 can support the substrate 100 from below by the projecting portion 41a.
  • the third gripping member 41 can be formed of a resin material.
  • One third gripping member 41 (right side in FIG.
  • the width direction of the substrate 100 is an example of a third direction.
  • a support portion 38 having a predetermined length is provided on the upper surface of the first hand body 21 that faces the third grip portion 40.
  • the support portion 38 is formed of a resin material, and supports the substrate 100 from below when the substrate 100 is slid to be stored in the first substrate storage portion 110 or the like in a horizontal state to suppress bending.
  • the L-shaped first hand main body 21 is attached to the first hand 20.
  • the substrate contact portion 35 is brought into contact with the substrate 100 in parallel with the two sides of the substrate storage portion 110. Accordingly, the substrate 100 can be positioned in the Y-axis direction with respect to the first hand main body 21, and the substrate 100 can be gripped in an appropriate state and pulled out from the first substrate storage unit 110. Further, by rotating the first hand main body 21 by 90 degrees within the first surface, the posture can be changed so that the first grip portion 30 or the third grip portion 40 faces the one side of the substrate 100. Therefore, the first grip part 30 and the third grip part 40 can be properly used with simple control.
  • FIG. 6 is a plan view showing the second hand 50 shown in FIG.
  • FIG. 7 is a side view of the second hand 50 shown in FIG.
  • FIG. 8 is a side view taken along arrow VIII showing the operation of the fourth gripping portion 70 shown in FIG.
  • the second hand 50 of the present embodiment has a second hand body 51 that is formed in an L shape in plan view.
  • One of the two linear portions forming the L-shaped shape of the second hand main body 51 is provided with a second attachment portion 52 that is attached to the fourth link 8 of the second arm 4 (circular portion in the figure). ).
  • the second attachment portion 52 is attached to the fourth link 8 and rotated about the fifth axis S5 (FIG. 1).
  • a second grip 60 is provided on the lower surface of the other of the two linear portions forming the L-shape of the second hand body 51.
  • the second grip 60 has a pair of second grip members 61 that grip the substrate 100 from the width direction.
  • the second gripping member 61 is formed in an L shape.
  • the 2nd holding member 61 contains the protrusion part 61a which protrudes inward with respect to each in a lower part. By projecting the lower part of the L-shaped second gripping member 61 inward, the projecting part 61a serves as a support part that supports the substrate 100 from below.
  • the second grip member 61 can be formed of a resin material.
  • One second gripping member 61 (left side in FIG. 7) is advanced and retracted by the cylinder 62 toward the other second gripping member 61 (right side in FIG. 7).
  • the substrate 100 can be gripped from the width direction by moving the second gripping member 61 forward and backward with the cylinder 62.
  • a fourth gripping portion 70 that grips the substrate 100 from the thickness direction and changes the posture of the substrate 100 to a second surface orthogonal to the first surface.
  • the turning portion 73 rotates at an angle of 45 degrees with respect to the fixing portion 72 provided on the second hand main body 51, that is, within an inclined surface of 45 degrees with respect to the horizontal plane. Is configured to do.
  • the turning portion 73 is provided with a pair of fourth gripping members 71 that can be opened and closed close to or apart from each other.
  • a sensor 74 that detects the presence of the substrate 100 is provided between the pair of fourth gripping members 71.
  • An air chuck, an electromagnetic chuck, or the like can be used as the pair of fourth gripping members 71.
  • a rotary chuck can be used, for example.
  • substrate 100 is wide in the width direction (FIG. 6), and the surrounding edge part of the board
  • One of the fourth gripping members 71 is provided with a support member 75 that supports the center direction of the substrate 100 from below when the substrate 100 is gripped to suppress bending. According to the fourth gripping part 70, the posture of the substrate 100 gripped sideways by the fourth gripping member 71 can be changed in the vertical direction by turning the turning part 73 by 180 degrees with respect to the fixed part 72 ( Two-dot chain line).
  • the substrate 100 stored in the first substrate storage unit 110 is pulled out by the first hand 20, and the second gripping member 61 of the second gripping unit 60 has a width.
  • the substrate 100 can be appropriately transported in cooperation with the first hand 20.
  • the orientation of the second gripping portion 60 and the fourth gripping portion 70 with respect to the substrate 100 can be changed, and the second can be easily controlled.
  • the gripper 60 and the fourth gripper 70 can be used properly.
  • the orientation of the substrate 100 transported on the first surface can be changed to a second surface orthogonal to the fourth grip part 70.
  • the orientation of the substrate 100 transported on the first surface can be changed to a second surface orthogonal to the fourth grip part 70.
  • FIG. 10 is a plan view showing a state in which the substrate 100 is gripped to be pulled out from the state shown in FIG.
  • FIG. 11 is a plan view showing a state in which the substrate 100 is pulled out to a predetermined position from the state shown in FIG. 12 is a cross-sectional view taken along arrow XII-XII shown in FIG.
  • FIG. 13 is a plan view showing a state in which the substrate 100 is gripped from the width direction by the second hand 50 shown in FIG.
  • the second grip 50 is arranged at a predetermined position of the first substrate storage unit 110 by the second hand 50.
  • the substrate 100 pulled out from the first substrate storage unit 110 is supported by the inwardly protruding portion 61a of the second gripping member 61 provided in the second gripping portion 60, and can slide on the protruding portion 61a. It is a position that can be done.
  • the first holding unit 30 of the first hand 20 is disposed at a predetermined position of the first substrate storage unit 110.
  • the predetermined position is a position below the second hand 50 where the substrate 100 pulled out from the first substrate storage unit 110 by the first grip unit 30 can be gripped.
  • the predetermined position can be brought into contact with the substrate 100 that is drawn out from the first substrate storage unit 110 because the substrate contact portion 35 is located within the width dimension of the substrate 100 and located between the second gripping members 61. Position.
  • the first hand 20 is advanced toward the substrate 100.
  • the substrate contact portion 35 contacts the substrate 100 in a state where the substrate 100 is positioned between the pair of first gripping members 31.
  • the orientation and position of the substrate 100 with respect to the first hand body 21 can be determined.
  • the substrate 100 is detected by the sensor 32 provided on the first gripping member 31.
  • the first gripping member 31 is closed and the substrate 100 is gripped from the thickness direction.
  • the substrate 100 is pulled out from the first substrate storage unit 110 by the first hand 20 that holds the substrate 100 with the first holding unit 30.
  • the substrate 100 is pulled out to the holding position by the second holding member 61.
  • the substrate 100 is pulled out while sliding in a state where both side portions are supported from below by the projecting portions 61a projecting inwardly of the second gripping member 61 of the second hand 50.
  • the substrate 100 is pulled out from the first substrate storage unit 110 by a predetermined amount (for example, an amount at which the central portion of the substrate 100 is the position of the second gripping member 61), 31 is opened, the second gripping member 61 is closed, and the substrate 100 is gripped from both sides in the width direction.
  • a predetermined amount for example, an amount at which the central portion of the substrate 100 is the position of the second gripping member 61
  • the second gripping member 61 is closed, and the substrate 100 is gripped from both sides in the width direction.
  • FIG. 14 is a plan view showing the transfer robot 1 in a state where the substrate 100 is held by the second hand 50.
  • FIG. 15 is a plan view showing an operation of transporting the substrate 100 to the test apparatus 200 by the transport robot 1 shown in FIG.
  • FIG. 16 is a plan view showing a state in which the substrate 100 of the test apparatus 200 is replaced by the transfer robot 1 shown in FIG.
  • FIG. 17 is a plan view showing a state before the substrate 100 removed from the test apparatus 200 by the transfer robot 1 shown in FIG. 16 is stored in the second substrate storage unit 120.
  • the transfer robot 1 that has pulled out the substrate 100 from the first substrate storage unit 110 with the second hand 50 connects the first arm 3 and the second arm 4 of the test apparatus 200 as shown in FIG. 15. Turn in the direction. Then, the other substrate 100 (the substrate 100 that has been tested) disposed in the test apparatus 200 is gripped by the third gripping portion 40 of the first hand 20. Thereafter, as shown in FIG. 16, the substrate 100 held by the third holding unit 40 of the first hand 20 is retracted from the test apparatus 200. Then, the substrate 100 held by the second holding unit 60 of the second hand 50 is disposed on the substrate mounting unit 201 of the test apparatus 200.
  • the first arm 3 and the second arm 4 are directed toward the second substrate storage unit 120.
  • the second hand 50 is withdrawn from the test apparatus 200 and the test operation of the new substrate 100 is started by the test apparatus 200.
  • the substrate 100 held by the third holding unit 40 of the first hand 20 can be stored in the second substrate storage unit 120 in cooperation with the second hand 50.
  • FIG. 18 is a plan view showing a state where the substrate 100 shown in FIG.
  • FIG. 19 is a plan view showing a state in which the orientation of the substrate 100 is changed by the second hand 50 shown in FIG. 20 is a side view taken along arrow XX shown in FIG.
  • FIG. 21 is a side view showing a state in which the substrate 100 in the state shown in FIG. 19 is stored in the second substrate storage unit 120 and a state in which the stored substrate 100 is taken out.
  • the peripheral edge of the substrate 100 (FIG. 17) held by the third holding unit 40 of the first hand 20 is the fourth of the fourth holding unit 70 provided in the second hand 50. It is gripped by the gripping member 71. Thereafter, the holding of the substrate 100 by the third holding member 41 of the third holding unit 40 is released. Then, as shown in FIG. 19, the turning portion 73 (FIG. 8) of the fourth gripping portion 70 is turned 180 degrees, and the orientation of the substrate 100 is changed from the first plane to the second plane. As a result, as shown in FIG. 20, the substrate 100 is in a state of hanging downward from the second hand main body 51.
  • the substrate 100 is transported to a predetermined position in the second substrate storage unit 120 by the second hand 50, and is inserted into a predetermined storage space and stored as shown in FIG.
  • the substrate 100 stored in the second substrate storage unit 120 is in a state where the upper portion protrudes from the second substrate storage unit 120.
  • the holding of the substrate 100 by the fourth holding member 71 of the fourth holding unit 70 is released.
  • the horizontal substrate 100 removed from the test apparatus 200 can be stored in the second substrate storage unit 120 in a vertical state.
  • the substrate 100 stored in the second substrate storage unit 120 in a vertical state can be taken out.
  • FIG. 22 is a plan view showing a state before the substrate 100 is pulled out by the second hand 50 of the transfer robot 1 and the orientation of the substrate 100 is changed and stored in the first substrate storage unit 110.
  • FIG. 23 is a plan view showing a state before the substrate 100 is stored in the first substrate storage unit 110 by the second hand 50 shown in FIG.
  • FIG. 24 is a plan view showing a state in which the substrate 100 is stored in the first substrate storage unit 110 by the second hand 50 shown in FIG.
  • the upper portion of the substrate 100 is held by the fourth holding member 71 of the fourth holding portion 70 provided in the second hand 50 and the substrate 100 is taken out from the second substrate storage portion 120 upward. Thereafter, as shown in FIG. 22, the turning portion 73 of the fourth gripping portion 70 is turned 180 degrees to bring the substrate 100 into a horizontal state. Further, the first hand 20 is disposed in front of the first substrate storage unit 110. And the support part 38 provided in the 1st hand main body 21 is arrange
  • gripped by the 4th holding part 70 of the 2nd hand 50 is mounted on the support part 38 of the 1st hand 20.
  • the second hand 50 is moved toward the first substrate storage unit 110, and the substrate 100 is stored in the first substrate storage unit 110 while sliding on the support unit 38.
  • the holding of the substrate 100 by the fourth holding member 71 of the fourth holding unit 70 is released.
  • the substrate 100 stored in the second substrate storage unit 120 in the vertical direction can be stored in the first substrate storage unit 110 in the horizontal direction. it can.
  • FIG. 25 is a plan view of an example in which the position of the substrate contact portion 35 and the third gripping portion 40 of the first hand 20 shown in FIG. 2 can be adjusted.
  • FIG. 26 is a side view of FIG.
  • the substrate contact portion 35 can be configured such that the arrangement interval of the substrate contact portions 35 on both sides of the first grip portion 30 can be adjusted. According to this configuration, even if the size of the substrate 100 is changed, the arrangement interval of the substrate contact portions 35 can be appropriately adjusted according to the size of the substrate 100.
  • the third gripping unit 40 (the same applies to the second gripping unit 60) can also be configured such that the gripping interval in the width direction can be adjusted according to the size of the substrate 100.
  • the substrate 100 stored in a horizontal state is positioned by the first hand 20, and the substrate 100 taken out by the first hand 20 is removed from the second hand 50. Can be supported horizontally from below and taken out horizontally. Thereby, it becomes possible to appropriately convey an article such as the substrate 100 to a predetermined position such as the test apparatus 200 with a compact configuration.
  • the first arm 3 provided with the first hand 20 and the second arm 4 provided with the second hand 50 are provided in one base 2. Therefore, the substrate 100 can be appropriately transferred in a small installation space.
  • FIG. 27 is a perspective view showing a transfer robot 1A according to the second embodiment.
  • FIG. 28 is a plan view showing a transfer robot 1A according to the second embodiment.
  • the transfer robot 1 ⁇ / b> A includes a first arm 3, a second arm 4, and a control device 9.
  • the first arm 3 and the second arm 4 rotate in a horizontal plane around the first axis S1, that is, rotate coaxially.
  • the transfer robot 1 ⁇ / b> A includes a transfer hand 10 ⁇ / b> A in each of the first arm 3 and the second arm 4.
  • the transport hand 10A is provided at the tip of the fourth link 8 of each of the first arm 3 and the second arm 4 so as to be rotatable within a first surface in the horizontal direction around the fifth axis S5 (see FIG. 1). It has been.
  • the test apparatus 200 is arranged in front of the base 2 of the transfer robot 1A. Furthermore, the first substrate storage portions 110 ⁇ / b> A and 110 ⁇ / b> B are arranged on both sides of the test apparatus 200.
  • the first substrate storage portions 110A and 110B have one or more receiving portions that are configured by horizontal bars extending in the horizontal direction, and store the substrate 100 in a horizontal state on the receiving portions.
  • substrate storage parts store the board
  • the third substrate storage unit 130 is disposed between the test apparatus 200 and the first substrate storage unit 110B and receives the substrate 100 that has failed the test.
  • the third substrate storage unit 130 may have any configuration as long as it can accommodate the substrate 100.
  • the first substrate storage unit 110A includes an extrusion cylinder 110Aa on the back.
  • the extrusion cylinder 110Aa pushes the stored substrate 100 toward the transport robot 1A.
  • the extrusion cylinder 110Aa may extrude one substrate 100 or may extrude a plurality of substrates 100 together.
  • a moving device 110Ab that moves the extrusion cylinder 110Aa up and down may be provided.
  • the extrusion cylinder 110Aa and the moving device 110Ab are controlled by the control device 9.
  • the control device 9 controls the operations of the extrusion cylinder 110Aa and the moving device 110Ab by linking with the operations of the first arm 3, the second arm 4, and the transport hand 10A.
  • the transfer hand 10A can independently pull out and hold the substrate 100 stored in the first substrate storage unit 110A in a horizontal state. Furthermore, the transport hand 10A alone can insert and place the gripped substrate 100 in the first substrate storage portion 110B in a horizontal state. Further, the transport hand 10A alone can place the gripped substrate 100 in the test apparatus 200 and the third substrate storage unit 130.
  • FIG. 29 is a perspective view showing a transport hand 10A according to the second embodiment.
  • the transport hand 10A includes a hand main body 11A, an attachment portion 12A, and a connection portion 13A.
  • the hand main body 11A includes a base 11Aa, a first grip portion 30A, and a second grip portion 60A.
  • the base 11Aa is a member that extends from the fourth link 8 (see FIG. 28) of the arm 3 or 4 in the longitudinal direction D1a of the transport hand 10A.
  • the direction D1b is opposite to the direction D1a.
  • the second grip 60A is disposed at the tip of the base 11Aa
  • the first grip 30A is disposed at a position closer to the base of the base 11Aa, that is, the fourth link 8, than the second grip 60A.
  • the attachment portion 12A attaches the hand main body 11A to the fourth link 8 to be attached. Specifically, the attachment portion 12A attaches the connection portion 13A to the fourth link 8 so as to be rotatable about the fifth axis S5.
  • the attachment portion 12 ⁇ / b> A may include an actuator (not shown), and the connection portion 13 ⁇ / b> A may be rotated with respect to the fourth link 8 by the actuator being controlled by the control device 9.
  • the connecting part 13A connects the hand main body 11A and the attaching part 12A.
  • 13 A of connection parts have 1st connection member 13Aa connected to the attachment part 12, and extended in the direction D1a, and 2nd connection member 13Ab which connects the front-end
  • the attachment portion 12A is disposed in the direction D2a with respect to the first connection member 13Aa, and the second connection member 13Ab is disposed in the direction D2b.
  • the directions D2a and D2b are opposite to each other, are directions that intersect the directions D1a and D1b, and are orthogonal to each other in the present embodiment.
  • the base 11Aa is located in the direction D2b that is lower than the second connection member 13Ab and hangs down from the second connection member 13Ab.
  • the second connecting member 13Ab includes a floating mechanism.
  • the floating mechanism includes a spring, a damper, and a buffer member (not shown) such as a pneumatic or hydraulic cylinder, and connects the first connecting member 13Aa and the base 11Aa via the buffer member.
  • the floating mechanism includes a restraining device (not shown) that restrains the operation of the buffer member.
  • the restraining device is turned on or off by applying a current or the like, thereby performing a restraining operation or a restraining release operation.
  • the operation of the stopping device is controlled by the control device 9.
  • the floating mechanism in the ON state enables the base 11Aa to swing relative to the first connecting member 13Aa in the direction perpendicular to the direction D2b, and the floating mechanism in the OFF state makes the swing impossible. To do. Since the floating mechanism as described above is a known technique, a detailed description thereof is omitted.
  • the first grip 30A includes a pair of first grip members 31Aa and 31Ab, a first actuator 32A, and a second actuator 33A.
  • the first holding members 31Aa and 31Ab are attached to the first actuator 32A, the first actuator 32A is attached to the second actuator 33A, and the second actuator 33A is attached to the base 11Aa.
  • the second actuator 33A is fixed to the base 11Aa on the side opposite to the second connection member 13Ab.
  • the second actuator 33A can expand and contract in the directions D1a and D1b, and the first actuator 32A can be slid in the directions D1a and D1b together with the first gripping members 31Aa and 31Ab.
  • the second actuator 33A is a pneumatic cylinder, a hydraulic cylinder, an electric linear actuator, or the like, but is not limited thereto, and may be configured to slide the first actuator 32A in directions D1a and D1b. That's fine.
  • the second actuator 33A may be an apparatus that includes an electric motor and a conversion mechanism that converts the rotational motion of the electric motor into linear motion.
  • the second actuator 33A is an example of a slide actuator.
  • the second actuator 33A is a multi-stage cylinder, and specifically includes a first cylinder 33Aa and a second cylinder 33Ab.
  • the first cylinder 33Aa is fixedly attached to the base 11Aa, and has a cylinder rod 33Aaa that extends in the direction D1a and contracts in the direction D1b.
  • the second cylinder 33Ab has a cylinder rod 33Aba that is fixedly attached to the tip of the cylinder rod 33Aaa, extends in the direction D1a, and contracts in the direction D1b.
  • the second cylinder 33Ab is located closer to the direction D1a, that is, closer to the second gripping portion 60A than the first cylinder 33Aa.
  • the operations of the cylinders 33Aa and 33Ab are controlled by the control device 9.
  • the operation modes of the cylinders 33Aa and 33Ab may be the same or different.
  • the first actuator 32A is fixedly attached to the tip of the cylinder rod 33Aba of the second cylinder 33Ab.
  • the first holding members 31Aa and 31Ab are attached to the first actuator 32A on the direction D1a side opposite to the cylinder rod 33Aba.
  • the first gripping member 31Aa is located in the direction D2a with respect to the first gripping member 31Ab and faces the first gripping member 31Ab.
  • the first gripping members 31Aa and 31Ab are movable so as to perform an opening / closing operation close to or away from each other in the directions D2a and D2b, and can grip the substrate 100 in the thickness direction.
  • the first actuator 32A operates at least one of the first grip members 31Aa and 31Ab in the directions D2a and D2b.
  • the first actuator 32A is an air chuck, an electromagnetic chuck, or the like, but is not limited to this, and any structure may be used as long as at least one of the first gripping members 31Aa and 31Ab is moved in the directions D2a and D2b.
  • the operation of the first actuator 32A is controlled by the control device 9.
  • a sensor 34A that detects that the substrate 100 has may be provided between the first gripping member 31Aa, the first gripping member 31Ab, or the first gripping members 31Aa and 31Ab.
  • the sensor 34 ⁇ / b> A outputs a detection signal to the control device 9.
  • the first gripping portion 30A as described above includes first gripping members 31Aa and 31Ab that grip the substrate 100 in directions D2a and D2b, which are examples of the first direction, and are slidable in the directions D1a and D1b.
  • the first actuator 32A causes the first holding members 31Aa and 31Ab to perform a holding operation, and the second actuator 33A slides the first holding members 31Aa and 31Ab together with the first actuator 32A.
  • the second grip 60A includes a pair of second grip members 61Aa and 61Ab, a support member 62A, and third actuators 63Aa and 63Ab.
  • the support member 62A supports the second gripping members 61Aa and 61Ab so as to be movable in the directions D3a and D3b in a state of facing each other in the directions D3a and D3b.
  • the directions D3a and D3b are opposite to each other, and are different from the directions D2a and D2b.
  • the directions D3a and D3b are perpendicular to the directions D1a and D1b and the directions D2a and D2b. However, they may intersect diagonally.
  • the directions D3a and D3b are an example of the second direction.
  • the support member 62A is fixedly attached to the base 11Aa and extends in both directions D3a and D3b from the base 11Aa on both sides.
  • the two rod-like support members 62A are arranged away from each other in the direction D1a and extend in parallel to each other.
  • the support member 62A supports both the second gripping members 61Aa and 61Ab so as to be movable.
  • one of the second gripping members 61Aa and 61Ab may be fixedly supported and the other supported.
  • the second gripping members 61Aa and 61Ab are plate-like members and are arranged on opposite sides in the directions D3b and D3a with the base 11Aa interposed therebetween.
  • the two support members 62A penetrate through the second gripping members 61Aa and 61Ab.
  • the second gripping members 61Aa and 61Ab are respectively movable in the directions D3a and D3b along the support member 62A.
  • the two spaced apart support members 62A prevent the second gripping members 61Aa and 61Ab from rotating about the support member 62A.
  • the third actuators 63Aa and 63Ab are connected to the second gripping members 61Aa and 61Ab, respectively, and are fixed to the two support members 62A.
  • Each of the third actuators 63Aa and 63Ab has a fixing member 63Ba fixed to the two support members 62A and an actuator body 63Bb fixed to the fixing member 63Ba.
  • the fixing member 63Ba of the third actuator 63Aa is disposed between the second gripping member 61Aa and the base 11Aa, and the actuator body 63Bb is disposed between the fixing member 63Ba and the second gripping member 61Aa, and the second gripping It is connected to the member 61Aa.
  • the fixing member 63Ba of the third actuator 63Ab is disposed between the second gripping member 61Ab and the base 11Aa, and the actuator body 63Bb is disposed between the fixing member 63Ba and the second gripping member 61Ab, and the second gripping. It is connected to the member 61Ab.
  • the third actuators 63Aa and 63Ab are examples of gripping actuators.
  • Actuator body 63Bb can be expanded and contracted in directions D3a and D3b, and moves second gripping member 61Aa or 61Ab in directions D3a and D3b.
  • the actuator body 63Bb is a pneumatic cylinder, a hydraulic cylinder, an electric linear actuator, or the like, but is not limited thereto, and is configured to move the second gripping member 61Aa or 61Ab in the directions D3a and D3b. I just need it.
  • the actuator body 63Bb may be an apparatus that includes an electric motor and a conversion mechanism that converts the rotational motion of the electric motor into linear motion.
  • the conversion mechanism may be a ball screw mechanism.
  • the thread groove formed in the support member 62A and the thread groove of the nut disposed in the second gripping member 61Aa or 61Ab are screwed together via a ball, and the actuator body 63Bb rotates the support member 62A or the nut. By doing so, the second gripping member 61Aa or 61Ab may move.
  • the operation of the actuator body 63Bb is controlled by the control device 9.
  • the third actuator 63Aa can move the second gripping member 61Aa in the directions D3a and D3b, and the third actuator 63Ab can move the second gripping member 61Ab in the directions D3a and D3b.
  • the second gripping members 61Aa and 61Ab can grip the substrate 100 therebetween.
  • the second gripping members 61Aa and 61Ab have notches 64Aa and 64Ab, respectively.
  • the notches 64Aa and 64Ab are located between the two support members 62A in the vicinity of the center in the direction D1a of the second gripping members 61Aa and 61Ab, respectively.
  • the notch 64Aa forms a groove having a U-shaped cross section that is recessed in the direction D3a and extends in the directions D2a and D2b.
  • the notch 64Ab forms a groove having a U-shaped cross section that is recessed in the direction D3b and extends in the directions D2a and D2b.
  • the second gripping members 61Aa and 61Ab have guide portions 65Aa and 65Ab, respectively.
  • the guide portions 65Aa and 65Ab extend in the slide movement directions D1a and D1b of the first holding members 31Aa and 31Ab and face each other.
  • the guide portions 65Aa and 65Ab guide the movement of the substrate 100 in the directions D1a and D1b between the second gripping members 61Aa and 61Ab, and position the substrate 100 gripped by the second gripping members 61Aa and 61Ab.
  • Each of the guide portions 65Aa and 65Ab has grooves 65Ba and 65Bb with which the peripheral edge of the substrate 100 is engaged.
  • the guide portions 65Aa and 65Ab and the grooves 65Ba and 65Bb extend in the direction D1a.
  • the guide portion 65Aa protrudes from the second gripping member 61Aa in the direction D3a, and the groove 65Ba forms a U-shaped cross-sectional groove that is recessed in the direction D3b.
  • the guide portion 65Ab protrudes from the second gripping member 61Ab in the direction D3b, and the groove 65Bb forms a groove having a U-shaped cross section that is recessed in the direction D3a.
  • the guide portions 65Aa and 65Ab are not provided in the notches 64Aa and 64Ab, respectively, and are divided.
  • the grooves 65Ba and 65Bb are opposed to each other in the directions D3a and D3b and are substantially parallel to each other.
  • the grooves 65Ba and 65Bb have shapes and dimensions that allow the periphery of the substrate 100 to be fitted, hold the substrate 100 in the directions D2a and D2b, and the directions D3a and D3b, and slide the substrate 100 in the directions D1a and D1b. Allow.
  • the cross-sectional shapes of the guide portions 65Aa and 65Ab as described above are U-shaped in the horizontal direction, but are not limited to this, and may be, for example, an L-shape opened upward.
  • the second gripping members 61Aa and 61Ab move in the directions D3a and D3b and fit the periphery of the substrate 100 in the grooves 65Ba and 65Bb, thereby holding the substrate 100 in a predetermined position and gripping from both sides.
  • the second holding members 61Aa and 61Ab allow the substrate 100 to slide in the directions D1a and D1b by loosely fitting the periphery of the substrate 100 in the grooves 65Ba and 65Bb.
  • the transfer robot 1A tests the substrate 100 as described below under the control of the control device 9.
  • the control device 9 controls the right arm 4 of the transfer robot 1A to move the transfer hand 10A of the arm 4 to a predetermined position with respect to the transfer target substrate 100 stored in the first substrate storage unit 110A.
  • the control device 9 causes the extrusion cylinder 110Aa to press the substrate 100 to be transported, thereby pushing the substrate 100 between the second gripping members 61Aa and 61Ab of the transport hand 10A.
  • control device 9 causes the transfer hand 10A to pull the pushed substrate 100 between the second holding members 61Aa and 61Ab in the horizontal direction and hold it.
  • control device 9 places the gripped substrate 100 on the substrate placement portion 201 of the test apparatus 200 on the arm 4 and its transport hand 10A.
  • the control device 9 acquires a test result from the test device 200 after the test of the substrate 100 is completed. After acquiring the test result, the control device 9 controls the left arm 3 of the transfer robot 1A and the transfer hand 10A so that the substrate 100 of the substrate platform 201 is held by the transfer hand 10A. When the test result is unacceptable, the control device 9 causes the arm 3 and the transfer hand 10 ⁇ / b> A to place the grasped substrate 100 in the third substrate storage unit 130. When the test result is acceptable, the control device 9 causes the arm 3 and the transport hand 10A to move the gripped substrate 100 in front of the first substrate storage unit 110B.
  • control device 9 causes the transport hand 10A to slide the gripped substrate 100 in the horizontal direction and insert it into the first substrate storage unit 110, and then releases the grip. Thereby, the board
  • the transfer robot 1A transfers the substrate 100 from the first substrate storage unit 110A to the test apparatus 200 using only the right arm 4 and stores the third substrate from the test apparatus 200 using only the left arm 3.
  • the substrate 100 is transferred to the unit 130 or the first substrate storage unit 110B.
  • the transfer robot 1A can perform transfer operations by the arms 3 and 4 in parallel.
  • FIG. 30 and 31 are a plan view and a side view, respectively, showing a state where the transfer hand 10A of the right arm 4 is positioned with respect to the transfer target substrate 100 of the first substrate storage section 110A.
  • the second gripping member 61Ab is omitted.
  • 32 and 33 are a plan view and a side view, respectively, showing a state in which the substrate 100 to be transferred in the first substrate storage section 110A is pushed out with respect to the transfer hand 10A of the right arm 4.
  • the second gripping member 61Ab is omitted.
  • FIGS. 34 and 35 are a plan view and a side view showing a state in which the first holding unit 30A of the transfer hand 10A of the right arm 4 holds the extruded substrate 100, respectively.
  • the second gripping member 61Ab is omitted.
  • FIG. 36 is a plan view showing a state of the first actuator 32A of the first gripping portion 30A in FIGS.
  • FIG. 37 and 38 are a plan view and a side view, respectively, showing a state in which the first holding unit 30A of the transfer hand 10A of the right arm 4 pulls out the held substrate 100 from the first substrate storage unit 110A.
  • the second gripping member 61Ab is omitted.
  • FIG. 39 is a side view showing a state of the second actuator 33A of the first gripping portion 30A in FIGS.
  • FIG. 40 is a side view showing a state in which the first holding unit 30A in FIG. 39 releases the holding of the pulled out substrate 100.
  • FIG. 39 is a side view showing a state of the second actuator 33A of the first gripping portion 30A in FIGS.
  • FIG. 40 is a side view showing a state in which the first holding unit 30A in FIG. 39 releases the holding of the pulled out substrate 100.
  • 41 and 42 are a plan view and a side view showing a state in which the second gripper 60A of the transport hand 10A of the right arm 4 grips the pulled out substrate 100, respectively.
  • the second gripping member 61Ab is omitted.
  • the control device 9 operates the right arm 4 of the transfer robot 1 ⁇ / b> A to move the transfer hand 10 ⁇ / b> A of the arm 4 to the transfer target substrate of the first substrate storage unit 110 ⁇ / b> A. 100 to a predetermined position.
  • the predetermined position is such that the grooves 65Ba and 65Bb of the guide portions 65Aa and 65Ab of the second holding members 61Aa and 61Ab of the transfer hand 10A and the substrate 100 to be transferred are in the horizontal direction, that is, the sliding direction of the first holding members 31Aa and 31Ab.
  • the second gripping members 61 ⁇ / b> Aa and 61 ⁇ / b> Ab are close to the substrate 100.
  • the substrate 100 is placed on a receiving portion 110Ac that is provided in the first substrate storage portion 110A and is configured by a horizontal bar or the like.
  • a receiving portion 110Ac two substrates 100 are arranged in a row in the Y-axis direction, which is the horizontal direction.
  • the X-axis direction, the Y-axis direction, and the Z-axis direction are defined with respect to the first substrate storage unit 110A. Specifically, it is the extending direction of the extrusion cylinder 110Aa, the horizontal direction is the Y-axis negative direction, and the opposite direction of the Y-axis negative direction is the Y-axis positive direction. Furthermore, the vertically upward direction is the Z-axis positive direction, and the vertically downward direction is the Z-axis negative direction. In addition, one horizontal direction perpendicular to the Y-axis direction and the Z-axis direction is defined as the X-axis positive direction, and the opposite direction of the X-axis positive direction is defined as the X-axis negative direction.
  • the control device 9 controls the posture of the transport hand 10A as follows. Specifically, in this posture, the direction D3a of the transport hand 10A is substantially parallel to the X axis positive direction, and the direction D3b is substantially parallel to the X axis negative direction.
  • the direction D1a is substantially parallel to the Y axis positive direction, and the direction D1b is substantially parallel to the Y axis negative direction.
  • the direction D2a is substantially parallel to the positive direction of the Z axis, and the direction D2b is substantially parallel to the negative direction of the Z axis.
  • the control device 9 causes the extrusion cylinder 110Aa to press the substrate 100 to be transported, thereby pushing out the substrate 100 in the Y-axis negative direction by a predetermined amount.
  • the control device 9 presses the extrusion cylinder 110Aa until the end of the substrate 100 reaches the reference plane PY that is the reference position in the Y-axis direction.
  • the reference plane PY is a plane parallel to the XZ plane.
  • the control device 9 Based on the detection signal of a sensor (not shown) that detects the substrate 100 arranged on the second gripping member 61Aa or 61Ab, the control device 9 reaches the reference plane PY based on the stroke amount of the extrusion cylinder 110Aa. You may judge.
  • the sensor may be the same sensor as the sensor 34A or a camera or the like.
  • the control device 9 may detect the position of the substrate 100 by processing and analyzing an image captured by the camera. Accordingly, a part of the substrate 100 is located between the second gripping members 61Aa and 61Ab in a state where the periphery is fitted in the groove 65Ba or 65Bb of the guide portion 65Aa or 65Ab.
  • the second gripping member 61Aa is a reference gripping member, and the periphery of the substrate 100 is fitted in the groove 65Ba and adjacent to the second gripping member 61Aa.
  • the control device 9 extends the second actuator 33 ⁇ / b> A of the first gripping portion 30 ⁇ / b> A to fit the periphery of the substrate 100 between the first gripping members 31 ⁇ / b> Aa and 31 ⁇ / b> Ab. .
  • the control device 9 extends the cylinders 33Aa and 33Ab.
  • the control device 9 extends the second cylinder 33Ab to the maximum extent, and extends the first cylinder 33Aa until the peripheral edge of the substrate 100 enters between the first gripping members 31Aa and 31Ab.
  • the control device 9 may detect the position of the substrate 100 with respect to the first gripping members 31Aa and 31Ab based on the stroke amount of the cylinders 33Aa and 33Ab or the detection signal of the sensor 34A.
  • control device 9 operates the first actuator 32A to cause the first gripping members 31Aa and 31Ab to perform the closing operation and grip the substrate 100.
  • the first gripping member 31Aa is positioned in the positive Z-axis direction above the first gripping member 31Ab, and the control device 9 moves only the first gripping member 31Aa toward the first gripping member 31Ab.
  • the first holding member 31Ab that does not move can hold the vertical position of the substrate 100 regardless of whether or not it is held.
  • the control device 9 contracts the first cylinder 33Aa to slide the substrate 100 in the direction D1b while being guided by the guide portion 65Aa.
  • the control device 9 contracts only the first cylinder 33Aa while maintaining the extended state of the second cylinder 33Ab.
  • substantially the entire substrate 100 is pulled out from the receiving portion 110Ac and positioned between the second gripping members 61Aa and 61Ab.
  • the end of the substrate 100 is the receiving portion 110Ac. It may be on the top.
  • the control device 9 Based on the stroke amount of the first cylinder 33Aa or a detection signal of a sensor (not shown) that detects the substrate 100 disposed on the second gripping member 61Aa or 61Ab, the control device 9 performs the direction in the direction D1b of the substrate 100. The position may be detected.
  • the control device 9 releases the grip of the substrate 100 by moving the first grip member 31Aa in the direction D2a so as to be separated from the first grip member 31Ab. At this time, since the substrate 100 is supported from below by the stationary first gripping member 31Ab, the position in the vertical direction can be maintained.
  • the control device 9 contracts the third actuator 63Ab of the second gripping member 61Ab so that the second gripping member 61Ab moves toward the substrate 100 and the second gripping member 61Aa. Move in direction D3b.
  • the control device 9 moves the second gripping member 61Ab until the peripheral edge in the direction D3b of the substrate 100 contacts the groove 65Ba of the guide portion 65Aa and the peripheral edge in the direction D3a of the substrate 100 fits and contacts the groove 65Bb of the guide portion 65Ab.
  • the second gripping members 61Aa and 61Ab grip the peripheral edges on both sides of the substrate 100.
  • the substrate 100 is positioned on the reference plane PX that is a reference position with respect to the second gripping member 61Aa in the direction D3a.
  • the reference plane PX is a plane parallel to the YZ plane.
  • the control device 9 contracts only the third actuator 63Ab while maintaining the extended state of the cylinders 33Aa and 33Ab in the state of FIG.
  • the control device 9 detects the position of the substrate 100 with respect to the second gripping member 61Ab, the stroke amount of the third actuator 63Ab, or a detection signal of a sensor (not shown) that detects the substrate 100 disposed on the second gripping member 61Ab. May be detected based on
  • the transport hand 10A can position and grip the substrate 100 drawn from the first substrate storage section 110A at a predetermined position in the transport hand 10A.
  • the control device 9 maintains the floating mechanism of the second connection member 13Ab in the OFF state, that is, the fixed state, during the operation of pulling out the substrate 100 from the first substrate storage unit 110A.
  • FIG. 43 and 44 are a side view and a plan view, respectively, showing the substrate platform 201 of the test apparatus 200 according to the second embodiment.
  • FIG. 45 is a plan view showing a state of the second cylinder 33Ab of the first gripper 30A when the substrate 100 is placed on the substrate platform 201.
  • a placement area 201a which is a predetermined area on which the substrate 100 is placed, is defined on the upper surface of the substrate placement portion 201.
  • the placement area 201 a is rectangular like the substrate 100, and the shape and dimensions of the placement area 201 a correspond to the shape and dimensions of the substrate 100.
  • four guides 202 are provided on the four peripheral edges of the placement region 201a on the upper surface of the substrate placement unit 201, respectively. Each guide 202 extends upward from the upper surface of the substrate platform 201.
  • Each guide 202 includes a positioning portion 202a that extends perpendicularly from the upper surface of the substrate placement portion 201, and an introduction portion 202b that bends from the positioning portion 202a and extends outward from the placement region 201a.
  • the four guides 202 position the substrate 100 with respect to the placement region 201a by receiving the substrate 100 lowered from above through the tapered introduction portion 202b and then guiding it by the positioning portion 202a.
  • the transfer robot 1A places the substrate 100 held by the transfer hand 10A of the right arm 4 on the placement area 201a of the substrate placement unit 201 as described below.
  • the control device 9 moves the transport hand 10 ⁇ / b> A above the substrate platform 201. Specifically, the control device 9 moves the transport hand 10A so that the substrate 100 held by the transport hand 10A is positioned above the placement area 201a. Further, the control device 9 lowers the transport hand 10A. At this time, the control device 9 sets the floating mechanism of the second connecting member 13Ab to the ON state, that is, the swinging state. Thus, the transport hand 10A lowers the substrate 100 while allowing the second gripping members 61Aa and 61Ab to swing.
  • the substrate 100 gripped by the second gripping members 61Aa and 61Ab is lowered to the inside of the positioning portion 202a through the inside of the introduction portion 202b of the guide 202.
  • the substrate 100 is guided by the introduction portion 202b by the swinging of the second gripping members 61Aa and 61Ab, and inside the positioning portion 202a. It reaches. Therefore, interference between the substrate 100 and the guide 202 is suppressed, and the substrate 100 can be smoothly lowered.
  • the two opposing guides 202 are positioned between the second gripping members 61Aa and 61Ab, and the other two opposing guides 202 are positions where the second gripping members 61Aa and 61Ab are lowered.
  • the latter guide 202 enters inside the notches 64Aa and 64Ab of the descending second gripping members 61Aa and 61Ab and does not interfere with the second gripping members 61Aa and 61Ab.
  • the notches 64Aa and 64Ab may be used to position the second gripping members 61Aa and 61Ab with respect to the guide 202.
  • the control device 9 contracts the second cylinder 33Ab and retracts the first holding members 31Aa and 31Ab from the guide 202. Accordingly, the first gripping members 31Aa and 31Ab hold the substrate 100 when the transport hand 10A is moved, and interference between the first gripping members 31Aa and 31Ab and the guide 202 is prevented when the substrate 100 is placed on the guide 202. It is.
  • the control device 9 causes the third actuators 63Aa and / or 63Ab to extend, 2
  • the holding of the substrate 100 by the holding members 61Aa and 61Ab is released. Thereby, the board
  • the transfer robot 1A uses the left arm 3 and its transfer hand 10A to transfer the substrate 100 placed in the placement area 201a to the first substrate storage unit 110B or the third substrate storage unit.
  • the operation in which the transport hand 10A grips the substrate 100 in the placement area 201a is an operation performed in the reverse order.
  • the control device 9 may set the floating mechanism of the second connecting member 13Ab to an ON state or an OFF state.
  • control device 9 moves the left arm 3 to move the transfer hand 10A of the arm 3 to a predetermined position with respect to the first substrate storage unit 110B.
  • the predetermined position the substrate 100 held by the transport hand 10A and the receiving portion of the first substrate storage unit 110B into which the substrate 100 is inserted are aligned in the horizontal direction, and the second holding members 61Aa and 61Ab are the first substrate.
  • the position is close to the storage unit 110B.
  • control device 9 extends the second actuator 33A of the first gripping portion 30 to grip the peripheral end portion of the substrate 100 gripped by the second gripping members 61Aa and 61Ab by the first gripping members 31Aa and 31Ab.
  • control device 9 extends the third actuator 63Aa and / or 63Ab of the second gripper 60 to release the grip of the substrate 100 by the second gripping members 61Aa and 61Ab.
  • the control device 9 extends the second actuator 33A, and slides the substrate 100 held by the first holding members 31Aa and 31Ab onto a predetermined receiving portion of the first substrate storage portion 110B.
  • the control device 9 slides the substrate 100 by a predetermined amount, and then opens the first grip members 31Aa and 31Ab to release the grip of the substrate 100.
  • substrate 100 is arrange
  • the control device 9 contracts the second actuator 33A and retracts the first gripping members 31Aa and 31Ab to a predetermined position.
  • the substrate 100 stored in a horizontal state is used by the one hand main body 11A including the first gripping portion 30A and the second gripping portion 60A using the first gripping portion 30A. Then, the substrate 100 can be gripped and transported using the second gripping portion 60A. Thereby, it becomes possible to appropriately convey the article such as the substrate 100 to a predetermined position such as the test apparatus 200 with a compact configuration.
  • the transfer robot 1A according to the second embodiment is a single robot provided with the arms 3 and 4 including the transfer hand 10A on one base 2. Therefore, the substrate 100 can be appropriately and efficiently transferred in a small installation space.
  • one transport robot 1 is provided with the first hand 20 and the second hand 50, but the first hand 20 and the second hand 50 are different articulated robots, etc. Can also be prepared.
  • the first hand main body 21 of the first hand 20 is formed in an L shape
  • the second hand main body 51 of the second hand 50 is formed in an L shape.
  • the shapes of the first hand main body 21 and the second hand main body 51 are not limited to the L shape.
  • the substrate contact portion 35 in the first embodiment described above is configured to contact the periphery of the substrate 100, but a sensor may be provided to detect the substrate 100.
  • the transfer robot 1A includes the two arms 3 and 4.
  • the transfer robot 1A may include only one arm or may include three or more arms.
  • the two arms 3 and 4 may be provided in different robots.
  • both the transfer hands 10A of the arms 3 and 4 are provided with the floating mechanism in the second connection member 13Ab.
  • the present invention is not limited to this.
  • the transfer hand 10A of the left arm 3 that does not perform the operation of mounting the substrate 100 on the substrate mounting portion 201 of the test apparatus 200 may not include the floating mechanism in the second connecting member 13Ab.
  • the second actuator 33A of the first gripping portion 30A includes the two-stage cylinder, but is not limited thereto.
  • the second actuator 33A may include a one-stage cylinder or may include three or more stages of cylinders. By providing a plurality of stages of cylinders, the stroke amount of the second actuator 33A can be adjusted to a plurality of stages simply by extending or contracting each cylinder.
  • the third actuators 63Aa and 63Ab of the second gripper 60A may also include a plurality of stages of cylinders.
  • both the second gripping members 61Aa and 61Ab of the second gripping portion 60A are configured to be moved by the third actuators 63Aa and 63Ab.
  • the present invention is not limited to this. One of them may be fixed.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
PCT/JP2019/015218 2018-05-31 2019-04-05 搬送ハンド及び搬送ロボット WO2019230195A1 (ja)

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JP2020521758A JP6971398B2 (ja) 2018-05-31 2019-04-05 搬送ハンド及び搬送ロボット
CN201980036180.XA CN112203814B (zh) 2018-05-31 2019-04-05 输送手及输送机器人

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JP2003034428A (ja) * 2001-07-18 2003-02-07 Canon Inc 基板搬送装置および姿勢変換装置
JP2013086241A (ja) * 2011-10-21 2013-05-13 Ihi Corp チャック装置およびチャック方法
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JP6971398B2 (ja) 2021-11-24
JPWO2019230195A1 (ja) 2021-06-03
CN112203814B (zh) 2023-09-05
TWI700163B (zh) 2020-08-01
TW202003172A (zh) 2020-01-16
CN112203814A (zh) 2021-01-08
JP7144582B2 (ja) 2022-09-29

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