WO2019095509A1 - 一种配向膜涂布机及涂布方法 - Google Patents

一种配向膜涂布机及涂布方法 Download PDF

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WO2019095509A1
WO2019095509A1 PCT/CN2017/118632 CN2017118632W WO2019095509A1 WO 2019095509 A1 WO2019095509 A1 WO 2019095509A1 CN 2017118632 W CN2017118632 W CN 2017118632W WO 2019095509 A1 WO2019095509 A1 WO 2019095509A1
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alignment film
machine
air knife
spray head
angle
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PCT/CN2017/118632
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English (en)
French (fr)
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李祥
谢忠憬
赵永超
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深圳市华星光电半导体显示技术有限公司
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Priority to US15/748,453 priority Critical patent/US10821467B2/en
Publication of WO2019095509A1 publication Critical patent/WO2019095509A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0291—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work the material being discharged on the work through discrete orifices as discrete droplets, beads or strips that coalesce on the work or are spread on the work so as to form a continuous coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
    • B05C11/06—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with a blast of gas or vapour
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • G02F1/133723—Polyimide, polyamide-imide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated

Definitions

  • the present invention relates to the field of screen display technologies, and in particular, to an alignment film coater and a coating method.
  • the existing TFT-LCD cell alignment film process is generally divided into an alignment film front cleaning, an alignment film coating, an alignment film prebaking, and an alignment film baking.
  • the alignment film coating is generally carried out by the ink jet coating method.
  • the coating principle is as shown in FIG. 1 : by using PI (polyimide) liquid to be ejected from the small hole of the coating head 2 ′.
  • the movement of the spray head 2' or the machine forms a high density PI droplet B', and finally the PI droplets are diffusion bonded to the alignment film on the substrate A'.
  • the current common methods include redesigning the reticle to reduce the slope and circumference of the hole, or improving the device, using small nozzles to spray small droplets to improve, but with the deepening of the via (eg There is another layer of PFA), a new and more complex TFT structure, and there is still a certain risk in using a single method to improve the twill Mura, so it is necessary to find a new and simple and economical way to improve the twill Mura.
  • the technical problem to be solved by the present invention is to provide an alignment film coater and a coating method for enhancing the diffusion ability of PI droplets and improving the twill Mura.
  • an alignment film coater comprising:
  • An air knife disposed above the machine table and located on a side of the spraying head, for moving the PI droplets on the substrate after the spraying head is sprayed on the substrate, and blowing a uniform impact on the PI droplets Air curtain.
  • the air knife forms a first angle with a horizontal plane of the machine, and the first angle is between 20° and 40°.
  • the projection of the air knife on the machine table forms a second angle with the long side or the short side of the machine table, and the second angle is 45°.
  • the air knives are two, symmetrically disposed above the machine table and located on one side of the spraying head.
  • the spraying head is disposed parallel to the short side of the machine.
  • the invention also provides an alignment film coating method, comprising:
  • An air knife is disposed above the machine table, the air knife being located at a side of the spray head;
  • the air knife is controlled to move along the machine and a uniform impact air curtain is blown to the PI droplets to diffuse the PI droplets to form an alignment film.
  • the air knife is arranged above the machine, which specifically includes:
  • the air knife is formed at a first angle with a horizontal plane of the machine, and the first angle is between 20° and 40°.
  • the air knife is arranged above the machine, which specifically includes:
  • the projection of the air knife on the machine table forms a second angle with the long side or the short side of the machine table, and the second angle is 45°.
  • the air knives are two, symmetrically disposed above the machine table and located on one side of the spraying head.
  • the spraying head is disposed parallel to the short side of the machine.
  • the beneficial effects of the embodiments of the present invention are: by adding an air knife in the alignment film coater, after the PI droplet is coated, the uniform impact air curtain blown by the air knife is used to increase the PI droplet diffusion power, so that it can Overcoming the resistance in the diffusion, entering into the via hole, avoiding the phenomenon that the PI droplet gathers around the via hole and causes the PI film around the via hole to be thick and thus causes the twill Mura phenomenon.
  • Fig. 1 is a schematic view showing the principle of a conventional alignment film coating method.
  • FIG. 2 is a schematic view showing a manner in which a prior art alignment film coating method causes PI liquid to collect around a via hole.
  • FIG. 3 is a side view showing the structure of an alignment film coater according to an embodiment of the present invention.
  • FIG. 4 is a schematic top plan view of an alignment film coater according to an embodiment of the present invention.
  • Fig. 5 is a side view showing another structure of an alignment film coater according to an embodiment of the present invention.
  • FIG. 6 is a schematic flow chart of a method for coating an alignment film according to a second embodiment of the present invention.
  • an embodiment of the present invention provides an alignment film coating machine, including:
  • An air knife 3 disposed above the machine table 1 and located on one side of the spray head 2 for moving the PI liquid along the machine table after the spray head 2 sprays PI droplets on the substrate A A uniform impact air curtain is blown off.
  • the air knife is generally used in the industrial field to blow a large amount of water to remove water and dust.
  • the uniform impact air curtain blown by the air knife is used to increase the diffusion force of the PI droplet, so that It is able to overcome the resistance in diffusion, especially the color resistance and the resistance of the PFA via.
  • the air knife 3 is disposed above the machine table 1 of the alignment film coater and located on one side of the spray head 2, and if viewed in the moving direction, is located in front of or behind the spray head 2 (Fig. 3 As shown, if moving to the right, the air knife 3 is located behind the spray head 2, if moving to the left, the air knife 3 is located in front of the spray head 2), and the movement is controlled by the gantry at the same time as the spray head 2, and The spray head 2 moves along the machine table 1 together.
  • a1 is at 20°. Between 40°.
  • the PI droplets are simultaneously diffused toward the long side and the short side of the substrate A, so that the PI droplets are more easily crossed across the pixels.
  • the through hole is different from the short side of the machine head 1 in parallel with the spray head 2, and the projection of the air knife 3 on the machine table 1 forms an angle a2 with the long side or the short side of the machine 1.
  • a2 is 45. °.
  • the wind force of the air knife 3 is not limited as long as the blowing amount is not caused by the large amount of PI droplets to be aggregated in a certain direction to form PI mura.
  • two air knives can also be used to blow the PI droplets on the substrate A, and the blowing direction is reversed to ensure that the impact wind curtains between the two air knives do not interfere with each other.
  • the air knife of the embodiment is two.
  • the first air knife 31 and the second air knife 32 are symmetrically disposed above the machine table 1 and located on the side of the spray head 2.
  • the alignment film coater of this embodiment is mainly used in the manufacture of TFT-LCD cells.
  • Air knives are not limited to a particular type of air knives, as long as any air knives capable of producing a uniform impact air curtain can be integrated into the aligning film coater.
  • the second embodiment of the present invention provides an alignment film coating method, including:
  • An air knife is disposed above the machine table, the air knife being located at a side of the spray head;
  • the air knife is controlled to move along the machine and a uniform impact air curtain is blown to the PI droplets to diffuse the PI droplets to form an alignment film.
  • this embodiment adds a wind knife process after the PI droplet coating and PI pre-baking, and moves along the machine with the air knife and blows evenly to the PI droplets.
  • the impact of the air curtain causes the PI droplets to diffuse to form an alignment film to complete the alignment film coating.
  • the air knife is arranged above the machine, and the specifics include:
  • the air knife is formed at a first angle with a horizontal plane of the machine, and the first angle is between 20° and 40°.
  • the air knife is arranged above the machine, and the specifics include:
  • the projection of the air knife on the machine table forms a second angle with the long side or the short side of the machine table, and the second angle is 45°.
  • the air knives are two, symmetrically disposed above the machine table and located on one side of the spray head.
  • the spray head is disposed parallel to the short side of the machine table.
  • the beneficial effects of the embodiments of the present invention are: by adding an air knife in the alignment film coater, after the PI droplet is coated, the uniform impact air curtain blown by the air knife is used to increase the PI droplet diffusion.
  • the power allows it to overcome the resistance in the diffusion and enter the via hole to avoid the phenomenon of the twill Mura caused by the PI droplets gathering around the via hole and causing the PI film to be thick around the via hole.

Abstract

一种配向膜涂布机及涂布方法，配向膜涂布机包括：用于承载基板的机台（1）；用于喷涂PI液滴的喷涂头（2）；设置在所述机台（1）上方并位于所述喷涂头（2）一侧的风刀（3），用于在所述喷涂头（2）在基板上喷涂PI液滴之后，沿所述机台（1）移动并向PI液滴吹出均匀的冲击气幕。通过在配向膜涂布机中增设风刀，在PI液滴涂布之后，利用风刀吹出均匀的冲击气幕增加PI液滴扩散动力，避免PI液滴聚集在过孔周围导致过孔周围PI膜偏厚，从而引发的斜纹现象。

Description

一种配向膜涂布机及涂布方法
本申请要求于2017年11月15日提交中国专利局、申请号为201711129584.2、发明名称为“一种配向膜涂布机及涂布方法”的中国专利申请的优先权，上述专利的全部内容通过引用结合在本申请中。
技术领域
本发明涉及屏幕显示技术领域，尤其涉及一种配向膜涂布机及涂布方法。
背景技术
现有的TFT-LCD Cell配向膜工艺流程一般分为配向膜前清洗，配向膜涂布，配向膜预烘烤以及配向膜烘烤。而配向膜涂布如今一般采用喷墨式涂布(PI inkjet)方式，其涂布原理如图1所示：通过将PI(聚亚酰胺)液从喷涂头2＇的小孔喷出，利用喷涂头2＇或机台的移动形成高密度PI液滴B＇，最后PI液滴在基板A＇上扩散连接成配向膜。
随着TFT Via hole(过孔)越来越多以及Via hole越来越深(比如COA+PFA)，在PI涂布后很容易出现斜纹Mura。请参照图2所示，从光学显微镜下很明显地可以看到在TFT via hole周围区域颜色和其它区域不一致，经过研究发现当PI液扩散至较深的过孔时由于受到较大阻力，PI液扩散能量不足导致过孔内无PI液，PI液聚集在过孔周围导致过孔周围PI膜偏厚从而引发斜纹Mura。为了解决斜纹Mura，目前的常用方法有重新设计光罩，减小孔的坡度以及周长；或者改善设备，采用小喷头喷出小液滴等方法来改善，但是随着过孔的加深(比如再多一层PFA)，新的更复杂的TFT结构，采用单一方法来改善斜纹Mura仍具有一定风险，故有必要寻找一种新的且简单经济的方法来改善斜纹Mura。
发明内容
本发明所要解决的技术问题在于，提供一种配向膜涂布机及涂布方法，以增强PI液滴扩散能力，改善斜纹Mura。
为了解决上述技术问题，本发明提供一种配向膜涂布机，包括：
用于承载基板的机台；
用于喷涂PI液滴的喷涂头；
设置在所述机台上方并位于所述喷涂头一侧的风刀，用于在所述喷涂头在基板上喷涂PI液滴之后，沿所述机台移动并向PI液滴吹出均匀的冲击气幕。
其中，所述风刀与所述机台的水平面形成第一夹角，所述第一夹角在20°到40°之间。
其中，所述风刀在所述机台上的投影与所述机台的长边或短边形成第二夹角，所述第二夹角为45°。
其中，所述风刀为两个，对称设置在所述机台上方并位于所述喷涂头一侧。
其中，所述喷涂头平行于所述机台的短边设置。
本发明还提供一种配向膜涂布方法，包括：
在机台上方设置风刀，所述风刀位于所述喷涂头一侧；
利用喷涂头对承载在机台上的基板喷涂PI液滴；
控制风刀沿所述机台移动并向PI液滴吹出均匀的冲击气幕，使PI液滴扩散形成配向膜。
其中，在机台上方设置风刀，具体包括：
使所述风刀与所述机台的水平面形成第一夹角，所述第一夹角在20°到40°之间。
其中，在机台上方设置风刀，具体包括：
使所述风刀在所述机台上的投影与所述机台的长边或短边形成第二夹角，所述第二夹角为45°。
其中，所述风刀为两个，对称设置在所述机台上方并位于所述喷涂头一侧。
其中，所述喷涂头平行于所述机台的短边设置。
本发明实施例的有益效果在于：通过在配向膜涂布机中增设风刀，在PI液滴涂布之后，利用风刀吹出的均匀的冲击气幕来增加PI液滴扩散动力， 让其能够克服扩散中的阻力，进入到过孔内，避免PI液滴聚集在过孔周围导致过孔周围PI膜偏厚从而引发的斜纹Mura现象。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是现有配向膜涂布方式的原理示意图。
图2是现有配向膜涂布方式造成PI液聚集在过孔周围的示意图。
图3是本发明实施例一一种配向膜涂布机的侧视结构示意图。
图4是本发明实施例一一种配向膜涂布机的俯视结构示意图。
图5是本发明实施例一一种配向膜涂布机的另一侧视结构示意图。
图6是本发明实施例二一种配向膜涂布方法的流程示意图。
具体实施方式
以下各实施例的说明是参考附图，用以示例本发明可以用以实施的特定实施例。
请参照图3所示，本发明实施例一提供一种配向膜涂布机，包括：
用于承载基板A的机台1；
用于喷涂PI液滴的喷涂头2；
设置在所述机台1上方并位于所述喷涂头2一侧的风刀3，用于在所述喷涂头2在基板A上喷涂PI液滴之后，沿所述机台移动并向PI液滴吹出均匀的冲击气幕。
需要说明的是，风刀一般在工业领域中用来大量吹气以除水、除尘，而本发明实施例中，则是利用其吹出的均匀的冲击气幕来增加PI液滴扩散动力，让其能够克服扩散中的阻力，特别是遇到色阻以及PFA过孔的阻力。
本实施例中，风刀3设置在配向膜涂布机的机台1上方，并位于喷涂头2的一侧，如果以移动方向看，则是位于喷涂头2的前方或后方(以图3所示，如果向右移动，风刀3则位于喷涂头2的后方，如果向左移动，风刀3则位于喷涂头2的前方)，其移动和喷涂头2一样受龙门同时控制，可以和 喷涂头2一起沿机台1移动。
为了让PI液滴在风刀3吹出的冲击气幕作用下更加容易扩散，风刀3与机台1的水平面应具有一定角度，如图3所示的a1，本实施例中a1在20°到40°之间。
同样地，如图4所示，为了使风刀3可以向横向和纵向两个方向吹，从而让PI液滴向基板A的长边与短边同时扩散，这样PI液滴更加容易跨过像素过孔，因此与喷涂头2平行于机台1的短边不同，风刀3在机台1上的投影与机台1的长边或短边形成夹角a2，本实施例中a2为45°。
本实施例对风刀3的风力不做任何限制，只要吹气量不因偏大而引发PI液滴向某一个方向聚集形成PI mura即可。
本实施例还可采用两个风刀对基板A上的PI液滴进行吹风，吹风方向相反且保证两个风刀之间的冲击风幕互不干扰。请参照图5所示，本实施例的风刀为两个，第一风刀31和第二风刀32，对称设置在机台1上方并位于喷涂头2一侧。
本实施例的配向膜涂布机主要应用于TFT-LCD Cell制造中。风刀并不局限于某种特定类型的风刀，只要能够产生出均匀冲击风幕的任何风刀均可用来集成在配向膜涂布机上。
请再参照图6所示，相应于本发明实施例一，本发明实施例二提供一种配向膜涂布方法，包括：
在机台上方设置风刀，所述风刀位于所述喷涂头一侧；
利用喷涂头对承载在机台上的基板喷涂PI液滴；
控制风刀沿所述机台移动并向PI液滴吹出均匀的冲击气幕，使PI液滴扩散形成配向膜。
与现有的配向膜涂布方法相比，本实施例是在PI液滴涂布之后、PI预烘烤之前新增一道风刀制程，利用风刀沿机台移动并向PI液滴吹出均匀的冲击气幕，使PI液滴扩散形成配向膜，完成配向膜涂布。
进一步地，在机台上方设置风刀，具体包括：
使所述风刀与所述机台的水平面形成第一夹角，所述第一夹角在20°到40°之间。
进一步地，在机台上方设置风刀，具体包括：
使所述风刀在所述机台上的投影与所述机台的长边或短边形成第二夹角，所述第二夹角为45°。
进一步地，所述风刀为两个，对称设置在所述机台上方并位于所述喷涂头一侧。
进一步地，所述喷涂头平行于所述机台的短边设置。
通过上述说明可知，本发明实施例的有益效果在于：通过在配向膜涂布机中增设风刀，在PI液滴涂布之后，利用风刀吹出的均匀的冲击气幕来增加PI液滴扩散动力，让其能够克服扩散中的阻力，进入到过孔内，避免PI液滴聚集在过孔周围导致过孔周围PI膜偏厚从而引发的斜纹Mura现象。
以上所揭露的仅为本发明较佳实施例而已，当然不能以此来限定本发明之权利范围，因此依本发明权利要求所作的等同变化，仍属本发明所涵盖的范围。

Claims (10)

  1. 一种配向膜涂布机，其中，包括：
    用于承载基板的机台；
    用于喷涂PI液滴的喷涂头；
    设置在所述机台上方并位于所述喷涂头一侧的风刀，用于在所述喷涂头在基板上喷涂PI液滴之后，沿所述机台移动并向PI液滴吹出均匀的冲击气幕。
  2. 根据权利要求1所述的配向膜涂布机，其中，所述风刀与所述机台的水平面形成第一夹角，所述第一夹角在20°到40°之间。
  3. 根据权利要求1所述的配向膜涂布机，其中，所述风刀在所述机台上的投影与所述机台的长边或短边形成第二夹角，所述第二夹角为45°。
  4. 根据权利要求1所述的配向膜涂布机，其中，所述风刀为两个，对称设置在所述机台上方并位于所述喷涂头一侧。
  5. 根据权利要求1所述的配向膜涂布机，其中，所述喷涂头平行于所述机台的短边设置。
  6. 一种配向膜涂布方法，包括：
    在机台上方设置风刀，所述风刀位于所述喷涂头一侧；
    利用喷涂头对承载在机台上的基板喷涂PI液滴；
    控制风刀沿所述机台移动并向PI液滴吹出均匀的冲击气幕，使PI液滴扩散形成配向膜。
  7. 根据权利要求6所述的配向膜涂布方法，其中，在机台上方设置风刀，具体包括：
    使所述风刀与所述机台的水平面形成第一夹角，所述第一夹角在20°到40°之间。
  8. 根据权利要求6所述的配向膜涂布方法，其中，在机台上方设置风刀，具体包括：
    使所述风刀在所述机台上的投影与所述机台的长边或短边形成第二夹角，所述第二夹角为45°。
  9. 根据权利要求6所述的配向膜涂布方法，其中，所述风刀为两个，对 称设置在所述机台上方并位于所述喷涂头一侧。
  10. 根据权利要求6所述的配向膜涂布方法，其中，所述喷涂头平行于所述机台的短边设置。
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Publication number Priority date Publication date Assignee Title
JP6917329B2 (ja) * 2018-03-22 2021-08-11 東レエンジニアリング株式会社 塗布装置
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CN109465148A (zh) * 2018-12-28 2019-03-15 东莞金太阳研磨股份有限公司 用于精密抛光材料的涂胶植砂设备
CN110517828B (zh) * 2019-08-13 2021-09-03 深圳市善柔科技有限公司 银纳米线薄膜的制备方法
CN111007677B (zh) * 2019-12-05 2022-04-26 Tcl华星光电技术有限公司 彩膜基板及其制备方法、显示面板
CN111842044A (zh) * 2020-07-16 2020-10-30 中国电子科技集团公司第十八研究所 一种热气流刮涂制备钙钛矿薄膜的装置和方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010012544A1 (en) * 1997-06-17 2001-08-09 Kabushiki Kaisha Toshiba Method for producing liquid crystal display and method for cleaning substrate
CN103552377A (zh) * 2013-11-01 2014-02-05 京东方科技集团股份有限公司 喷墨印刷装置及涂覆配向膜的方法
CN103728779A (zh) * 2013-12-30 2014-04-16 深圳市华星光电技术有限公司 配向膜涂布方法及装置
CN104722458A (zh) * 2015-04-09 2015-06-24 武汉华星光电技术有限公司 用于基板的配向液涂布的装置和方法
CN105116626A (zh) * 2015-09-29 2015-12-02 深圳市华星光电技术有限公司 一种配向膜涂布装置及其涂布方法
CN105607349A (zh) * 2016-03-14 2016-05-25 深圳市华星光电技术有限公司 Pi液涂布方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004145092A (ja) * 2002-10-25 2004-05-20 Seiko Epson Corp デバイスとその製造方法及びそのデバイスを備えた電子機器
JP4731259B2 (ja) * 2005-09-16 2011-07-20 富士フイルム株式会社 Ｔｆｔ駆動素子を有する液晶セル用基板の製造方法および液晶セル用基板、ならびに液晶表示装置
US7867562B2 (en) * 2007-03-09 2011-01-11 Certainteed Corporation Method of controlling coating edge thickness in a web process
CN101290435A (zh) * 2007-04-20 2008-10-22 群康科技(深圳)有限公司 配向装置和配向方法
CN202166827U (zh) * 2011-08-10 2012-03-14 京东方科技集团股份有限公司 一种涂布设备
CN103995397B (zh) * 2014-05-19 2017-04-05 京东方科技集团股份有限公司 喷涂装置及取向液涂覆方法
US10658199B2 (en) * 2016-08-23 2020-05-19 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor device and method
CN206039080U (zh) * 2016-09-12 2017-03-22 昆山龙腾光电有限公司 一种风干设备

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010012544A1 (en) * 1997-06-17 2001-08-09 Kabushiki Kaisha Toshiba Method for producing liquid crystal display and method for cleaning substrate
CN103552377A (zh) * 2013-11-01 2014-02-05 京东方科技集团股份有限公司 喷墨印刷装置及涂覆配向膜的方法
CN103728779A (zh) * 2013-12-30 2014-04-16 深圳市华星光电技术有限公司 配向膜涂布方法及装置
CN104722458A (zh) * 2015-04-09 2015-06-24 武汉华星光电技术有限公司 用于基板的配向液涂布的装置和方法
CN105116626A (zh) * 2015-09-29 2015-12-02 深圳市华星光电技术有限公司 一种配向膜涂布装置及其涂布方法
CN105607349A (zh) * 2016-03-14 2016-05-25 深圳市华星光电技术有限公司 Pi液涂布方法

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