WO2018194022A1 - ガラス板の製造方法および製造装置 - Google Patents

ガラス板の製造方法および製造装置 Download PDF

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Publication number
WO2018194022A1
WO2018194022A1 PCT/JP2018/015706 JP2018015706W WO2018194022A1 WO 2018194022 A1 WO2018194022 A1 WO 2018194022A1 JP 2018015706 W JP2018015706 W JP 2018015706W WO 2018194022 A1 WO2018194022 A1 WO 2018194022A1
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WO
WIPO (PCT)
Prior art keywords
glass plate
fixing portion
support
support stage
manufacturing
Prior art date
Application number
PCT/JP2018/015706
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
隼人 奥
茂 山木
久博 竹内
真史 山田
佑 太和田
Original Assignee
日本電気硝子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気硝子株式会社 filed Critical 日本電気硝子株式会社
Priority to JP2019513629A priority Critical patent/JP7046319B2/ja
Priority to CN201880019523.7A priority patent/CN110430971B/zh
Priority to KR1020197020010A priority patent/KR102475075B1/ko
Publication of WO2018194022A1 publication Critical patent/WO2018194022A1/ja

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/065—Steady rests
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
    • B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
    • B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
    • B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
    • B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a glass plate manufacturing method including a step of processing an end face of the glass plate, and a glass plate manufacturing apparatus for executing the method.
  • the glass plate is often cut in order to cut it into a product size. Since the end face of the glass plate formed along with the cutting contains a large number of defects such as microcracks, the end face of the cut glass plate is subjected to grinding, etc. for the purpose of removing these defects. It is customary to carry out the processing step.
  • Patent Document 1 discloses an example of a specific mode for executing the above-described steps.
  • precision surface plate In contrast, grinding is performed with a grindstone.
  • suction holes are formed on the mounting surface of the glass plate provided in the work table, and the glass plate is fixed to the work table by the suction holes adsorbing the glass plate.
  • suction holes are uniformly formed on the mounting surface so as to fix the entire glass plate to the work table, except for the portion protruding from the work table.
  • the present invention made in view of the above circumstances has a technical problem to suppress the deterioration of the quality of the glass plate and reduce the cost for processing when processing the end face of the glass plate.
  • the present invention devised to solve the above-mentioned problems is a glass plate including an end face processing step for processing the end face of the glass plate protruding from the support stage in a state where the glass plate is fixed on the support stage.
  • the manufacturing method is characterized in that the support stage is provided with a fixing portion that can fix the glass plate and a support portion that supports the glass plate with a plurality of elastic members.
  • a support stage can fix a glass plate by a fixing part. For this reason, this method can perform an end face processing process without a problem. From the above, according to this method, when processing the end face of the glass plate, it is possible to suppress the deterioration of the quality of the glass plate and reduce the cost for processing.
  • the support portion is preferably a brush support portion that supports the glass plate with a brush.
  • the support stage is provided with a fixed portion along the both end faces.
  • a first outer fixing portion and a second outer fixing portion extending are provided, the first outer fixing portion is disposed closer to one of both end surfaces than the support portion, and the second outer fixing portion is positioned at both ends of the support portion. It is preferable to arrange it close to the other surface.
  • the support portion extends along the direction in which both end surfaces extend.
  • the glass plate before processing is carried into the support stage using a transport belt capable of transporting the glass plate in a direction parallel to the both end surfaces.
  • the processed glass plate may be unloaded from the support stage. For this reason, if the support portion extends along the direction in which both end surfaces extend, the conveyance belt and the support portion extend in parallel, and it is ensured that the support portion obstructs the operation of the conveyance belt. Can be avoided.
  • the support stage with an inner fixing portion disposed between the first outer fixing portion and the second outer fixing portion as the fixing portion.
  • the fixing by the outer fixing portion can be assisted by the inner fixing portion, and the glass plate can be fixed more firmly.
  • the glass plate which is 1000 mm or more in length and 1000 mm or more in width
  • the processing precision of an end surface can be improved.
  • the support stage has a symmetric configuration with respect to an axis of symmetry extending in parallel with both end faces.
  • the above method preferably includes a positioning step of positioning the glass plate by moving it on the support stage before the end face processing step.
  • the support portion on the support stage by providing the support portion on the support stage, the following effects can be obtained at the time of performing the positioning step. That is, when the glass plate is moved on the support stage for positioning, the resistance applied to the glass plate can be suppressed, so that the glass plate can be easily moved as desired. As a result, positioning accuracy can be improved. In addition, when the glass plate is flexible, it is likely that it is difficult to move the glass plate on the support stage. Can be moved easily.
  • the fixing portion supplies a fluid between the suction hole that sucks and fixes the lower surface of the glass plate when the end face processing step is performed, and between the fixing portion and the lower surface of the glass plate when the positioning step is performed. It is preferable to have a supply port.
  • the end face processing step when executed, the end face can be processed favorably by adsorbing and fixing the lower surface of the glass plate with the suction holes at the fixing portion.
  • the positioning process by supplying fluid from the supply port between the fixed part and the lower surface of the glass plate, resistance applied to the glass plate can be suppressed, so the glass plate is moved as desired. It becomes easy to let you.
  • the number of suction holes of the first outer fixing portion and the second outer fixing portion is larger than the number of suction holes of the inner fixing portion.
  • the inner fixing portion has a smaller influence on fixing in the vicinity of both end faces. If the above-mentioned composition is adopted, the neighborhood of the both end faces in a glass plate can be fixed firmly efficiently.
  • the suction holes are arranged along the direction in which both end faces extend.
  • the suction hole array and the supply port array in which the supply ports are arranged along the direction in which both end surfaces extend are disposed in the fixed portion, and the suction hole array in the suction hole array and the supply port array is disposed in the fixed portion. It is preferable to arrange it close to the end face close to.
  • the present invention created to solve the above-mentioned problems protrudes from a support stage that can be fixed in a state where the glass plate is supported from below and a support stage of the glass plate that is fixed on the support stage.
  • An apparatus for manufacturing a glass plate provided with an end face processing means for processing an end face, wherein the support stage has a fixing portion that can fix the glass plate and a support portion that supports the glass plate with a plurality of elastic members.
  • the support part is preferably a brush support part that supports the glass plate with a brush.
  • the present invention when processing the end face of the glass plate, it is possible to suppress the deterioration of the quality of the glass plate and to reduce the cost for processing.
  • a glass plate manufacturing apparatus 1 (hereinafter simply referred to as a manufacturing apparatus 1) includes a support stage 3 that can be fixed in a state where the glass plate 2 is supported from below, and a glass before processing the end surface 2a. To the support stage 3 and a plurality of transport belts 4 as transport means for transporting the plate 2 along the T1 direction to the support stage 3 and unloading the processed glass plate 2 from the support stage 3 along the T2 direction.
  • the manufacturing apparatus 1 is configured to perform grinding on both end faces 2a and 2a of the rectangular glass plate 2 extending in parallel with each other. Both end surfaces 2a and 2a of the glass plate 2 in a state of being fixed on the support stage 3 extend in parallel to the T1 direction and the T2 direction.
  • the T1 direction and the T2 direction are collectively referred to as a feeding direction.
  • the manufacturing apparatus 1 is configured to perform grinding on the both end faces 2a, 2a, but is not limited thereto.
  • the manufacturing apparatus 1 may be configured to perform polishing on both end faces 2a and 2a in addition to or instead of grinding.
  • you may be comprised so that it may process in order with respect to both end surfaces 2a and 2a with the some grindstone arrange
  • you may comprise so that it may process with respect to either one of the both end surfaces 2a and 2a.
  • the support stage 3 has a symmetric configuration with respect to a symmetry axis 8 extending parallel to the feed direction.
  • the support stage 3 is formed by arranging a plurality of long blocks along the feed direction in parallel. In the present embodiment, there are a total of twelve blocks. In the following description, each block will be referred to as a block A, a block B,..., A block K, and a block L in order.
  • Both the block A and the block L arranged at both ends of the block arrangement direction (a direction orthogonal to the feed direction and a direction parallel to the U direction, hereinafter simply referred to as an arrangement direction)
  • An outer fixing portion 9 (a first outer fixing portion 9 or a second outer fixing portion 9) that can fix a portion located above the glass plate 2 is installed.
  • fixed part 9 is extended along a feed direction (end surface 2a).
  • the length of the outer fixing portion 9 along the feed direction is slightly shorter than the length of the glass plate 2 along the feed direction, but is the same as the length of the glass plate 2 along the feed direction. Alternatively, it may be longer than the length along the feeding direction of the glass plate 2.
  • the blocks C, F, G, and J are provided with an inner fixing portion 10 that can fix a portion positioned above the glass plate 2.
  • an inner fixing portion 10 that can fix a portion positioned above the glass plate 2.
  • a brush support that supports a portion located above the glass plate 2 with a brush.
  • Part 11 is installed.
  • the outer fixing portion 9 is disposed closest to the end surface 2a.
  • fixed part 10 and the brush support part 11 are extended along a feed direction (end surface 2a).
  • the length along the feed direction of the inner fixing portion 10 and the brush support portion 11 is slightly shorter than the length along the feed direction of the glass plate 2, but the length along the feed direction of the glass plate 2. And may be longer than the length along the feeding direction of the glass plate 2.
  • only the brush support part 11 may be installed without installing the inner fixing part 10 between the blocks A and L.
  • Each of the outer fixing portion 9, the inner fixing portion 10, and the brush support portion 11 is divided into a plurality of (four in this embodiment) units along the feed direction in each block.
  • Each unit can be removed independently of the other units. By this removal, for example, each unit is replaced with a new unit in which the height position of the support surface 12 (see FIG. 2) that supports the lower surface 2b of the glass plate 2 and the length of the brush bristles are different. Is possible. Or the inner side fixing
  • each of the outer fixing portion 9 and the inner fixing portion 10 has a support surface 12 (glass plate 2 for supporting the lower surface 2b of the glass plate 2).
  • the support surface 12 is formed in a plane (horizontal plane) and is made of a material rich in elasticity (for example, rubber or the like).
  • the length Z of the support surface 12 along the feeding direction per unit is the same length.
  • the width W of the support surface 12 along the alignment direction is also the same width between the outer fixing portion 9 and the inner fixing portion 10.
  • both are located in the same height.
  • the width W of the outer fixing portion 9 and the inner fixing portion 10 can be, for example, 10 mm to 500 mm, and preferably 20 mm to 300 mm.
  • the length Z and the width W of the support surface 12 may be different between the outer fixing portion 9 and the inner fixing portion 10.
  • the support surface 12 in each of the outer fixing portion 9 and the inner fixing portion 10 adsorbs and fixes the lower surface 2b of the glass plate 2 when the end surface 2a is processed, and gas toward the lower surface 2b when the fixing after processing is released.
  • An adsorption hole 13 for injecting for example, air or the like
  • a supply port 14 for supplying a fluid for example, a liquid such as water is formed between the support surface 12 and the lower surface 2b of the glass plate 2 when the glass plate 2 is positioned.
  • the suction holes 13 and the supply ports 14 are arranged side by side along the feed direction.
  • the outer fixing portion 9 and the inner fixing portion 10 have only one suction hole row in which the suction holes 13 are arranged.
  • both the outer fixing portion 9 and the inner fixing portion 10 have only one supply port row in which the supply ports 14 are arranged.
  • the suction hole row is disposed closer to the end surface 2a out of the suction hole row and the supply port row.
  • a plurality of suction hole rows may be provided, or a plurality of supply port rows may be provided. In these cases, it is preferable that the suction hole row closest to the end surface 2a is disposed closer to the end surface 2a than the supply port row.
  • the number of the suction holes 13 is larger in the outer fixing portion 9 than in the inner fixing portion 10. Further, the number of supply ports 14 is the same between the outer fixing portion 9 and the inner fixing portion 10.
  • each bristle group 16 which a brush has comprises the elastic member.
  • the hair group 16 is a collection of many hairs.
  • the bristles 16 are arranged in three rows in the arrangement direction, and are arranged at intervals along the feeding direction.
  • the hair material is preferably nylon, rubber or the like.
  • the interval between the hair groups 16 along the arrangement direction is preferably in the range of 2 mm to 200 mm.
  • the distance between the hair groups 16 along the feeding direction is preferably in the range of 2 mm to 200 mm.
  • the hair group 16 may be arrange
  • each hair group 16 The hair ends included in each hair group 16 are positioned at the same height as the support surface 12 provided on the outer fixing portion 9 and the inner fixing portion 10.
  • the length of the hair is preferably in the range of 2 mm to 50 mm.
  • the hair diameter is preferably in the range of 0.02 mm to 5 mm.
  • a roller brush may be arranged instead of the above brush.
  • the top of the roller brush and the support surface 12 provided on the outer fixing portion 9 and the inner fixing portion 10 are positioned at the same height.
  • a plurality of (in this embodiment, five) conveyor belts 4 are wound around a drive pulley and a driven pulley (not shown), between blocks B and C, between blocks D and E, and between blocks F and G. , And extends between the blocks H and I and between the blocks J and K along the feed direction.
  • Each transport belt 4 can change the height position of the transport surface 4a by an elevator mechanism (not shown).
  • the plurality of conveyor belts 4 can sequentially perform the following operations (1) to (3) in a synchronized state.
  • the height position of the transport surface 4 a of each transport belt 4 is set to the support surface 12 of the outer fixing portion 9 and the inner fixing portion 10, and the brush.
  • the glass plate 2 is conveyed in the feed direction in a state where it is higher than the hair ends.
  • the height position of the transport surface 4a is gradually raised. And if the height position of the conveyance surface 4a becomes higher than the support surface 12 of the outer side fixing
  • Each of the two units includes a columnar tip portion 5a that abuts one of the two end faces 2a and 2a, and an actuator 5b for moving the tip portion 5a in the U direction.
  • the positioning pins 6 are arranged side by side along the feed direction. Each positioning pin 6 can stop the movement of the glass plate 2 along the U direction by coming into contact with the other of the both end faces 2a, 2a.
  • the pressing member 5 and the positioning pin 6 cooperate as follows. Initially, the front-end
  • the grindstone 7 is arranged for grinding one of the two end faces 2a and 2a and for grinding the other.
  • Each of the grindstones 7 and 7 moves in the T3 direction along a linear track by being guided by a guide (not shown) while rotating around an axis extending in the vertical direction.
  • the T3 direction of the present embodiment is opposite to the feed direction, but may be the same direction. In the present embodiment, both the grindstones 7 and 7 perform grinding while running in parallel with the glass plate 2 interposed therebetween.
  • the thickness of the glass plate 2 to be processed on both end faces 2a and 2a is not particularly limited, but in the present embodiment, a thickness that can provide flexibility (for example, 700 ⁇ m or less).
  • the glass plate 2 formed in (1) is the object of processing.
  • the glass plate 2 whose both end faces 2a, 2a are not processed (unprocessed) is carried into the support stage 3 by a plurality of conveyor belts 4.
  • the glass plate 2 carried into the support stage 3 is supported by the outer fixing part 9, the inner fixing part 10, and the brush support part 11. At this time, the glass plate 2 is not fixed to the support stage 3. Then, as a positioning step, the glass plate 2 is positioned on the support stage 3 by both the pressing member 5 and the positioning pins 6. When this positioning step is executed, fluid is supplied from the supply port 14 in each of the outer fixing portion 9 and the inner fixing portion 10.
  • the supply of fluid from the supply port 14 is stopped in each of the outer fixing portion 9 and the inner fixing portion 10.
  • the supply of fluid from the supply port 14 may be continued.
  • the glass plate 2 is fixed on the support stage 3 by adsorbing and fixing the lower surface 2 b of the glass plate 2 through the adsorption holes 13. And as an end surface processing process, it grinds with respect to the both end surfaces 2a and 2a of the glass plate 2 with both the grindstones 7 and 7.
  • gas is injected from the suction holes 13 to release the suction, and the fixation of the glass plate 2 to the support stage 3 is released (release step).
  • the glass plate 2 after both end faces 2a, 2a are processed (processed) is unloaded from the support stage 3 by a plurality of conveyor belts 4.
  • glass powder or grinding stone waste is between the brush tips and the lower surface 2 b of the glass plate 2. Even if it is pinched, since the hair of the brush has elasticity, the hair of the brush bends. For this reason, it can suppress that the lower surface 2b of the glass plate 2 is damaged with glass powder or grindstone scraps. Therefore, it can suppress that the quality of the glass plate 2 falls due to glass powder or grinding stone scrap. Furthermore, since the mechanism for fixing the glass plate 2 does not exist in the brush support part 11, the operating cost of the mechanism for fixing becomes unnecessary, and high accuracy is required for the installation of the brush. Therefore, the cost for processing the end face 2a can be reduced.
  • the outer fixing portion 9 and the inner fixing portion 10 extend along the end surface 2a of the glass plate 2, and the brush support portion 11 is arranged along the direction in which the end surface 2a of the glass plate 2 extends.
  • Other configurations may be adopted. For example, you may employ
  • the occupation ratio of the brush support portion 11 is preferably 5% or more, and more preferably 20% or more.
  • the occupation area of the brush support portion 11 is preferably 90% or less, and more preferably 70% or less.
  • the occupation ratio of the brush support part 11 means that the area of the brush support part 11 (the area of the block on which the brush support part 11 is arranged) is the total area of the brush support part 11, the outer fixing part 9 and the inner fixing part 10. This is the ratio of the total area of all blocks.
  • the brush support portion 11 that supports the glass plate 2 with a plurality of elastic members is used as a support portion that supports the glass plate 2, and each bristle group 16 included in the brush constitutes an elastic member.
  • the present invention is not limited.
  • the elastic member of the support portion may be constituted by the rod-like member 17 shown in FIG. 3, the coil spring-like member 18 shown in FIG. 4, or the plate-like member 19 shown in FIGS. 5a and 5b. Good.
  • FIGS. 3 to 5b show only a part of the glass plate 2 and the elastic members 17 to 19 of the support portion, and the other components are not shown.
  • the lower ends in the vertical direction (longitudinal direction) of both the members 17 and 18 are fixed to the flat plate 15 (not shown in FIGS. 3 and 4), and the upper ends are It contacts the glass plate 2.
  • Each of the members 17 and 18 can be deformed by expanding and contracting in the vertical direction according to the force applied to itself.
  • a material of the rod-shaped member 17 for example, sponge, rubber, urethane, silicone, NC nylon, or the like can be employed.
  • the material of the coil spring-like member 18 for example, sponge, rubber, urethane, silicone or the like can be adopted.
  • the main surface front and back surfaces
  • the lower end surface of the plate-shaped member 19 is a flat plate 15 (not shown in FIGS. 5a and 5b).
  • the upper end surface (tip) is in contact with the glass plate 2.
  • the main surface of the plate-like member 19 may be parallel to the alignment direction as shown in FIG. 5a, or may be parallel to the feed direction as shown in FIG. 5b.
  • the main surface of the plate-like member 19 may be inclined with respect to both the feeding direction and the arrangement direction.
  • a plurality of the plate-like members 19 are arranged along the thickness direction.
  • Each plate-like member 19 can be deformed so that its upper end surface (tip) is displaced in the thickness direction as shown by a double-ended arrow in FIG.
  • a material of the plate-like member 19 for example, sponge, rubber, urethane, silicone or the like can be adopted.
  • the glass has a elasticity between the tip (upper end) of the member and the lower surface 2 b of the glass plate 2 because the members have elasticity. Even if powder or grinding stone waste is caught, the member is deformed accordingly. Therefore, it can suppress that the quality of the glass plate 2 falls due to glass powder or grinding stone scrap.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
PCT/JP2018/015706 2017-04-20 2018-04-16 ガラス板の製造方法および製造装置 WO2018194022A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2019513629A JP7046319B2 (ja) 2017-04-20 2018-04-16 ガラス板の製造方法および製造装置
CN201880019523.7A CN110430971B (zh) 2017-04-20 2018-04-16 玻璃板的制造方法及制造装置
KR1020197020010A KR102475075B1 (ko) 2017-04-20 2018-04-16 유리판의 제조 방법 및 제조 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017083590 2017-04-20
JP2017-083590 2017-04-20

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Publication Number Publication Date
WO2018194022A1 true WO2018194022A1 (ja) 2018-10-25

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JP (1) JP7046319B2 (ko)
KR (1) KR102475075B1 (ko)
CN (1) CN110430971B (ko)
TW (1) TWI762620B (ko)
WO (1) WO2018194022A1 (ko)

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CN114559366A (zh) * 2022-02-22 2022-05-31 郑州旭飞光电科技有限公司 平板显示玻璃研磨加工前的精确定位装置

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JP2008273687A (ja) * 2007-04-27 2008-11-13 Dainippon Printing Co Ltd 平板状基材の搬送装置
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WO2017007782A1 (en) * 2015-07-08 2017-01-12 Corning Incorporated Glass substrate support apparatuses and methods of providing flexible glass substrate support

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TW200614412A (en) * 2004-09-27 2006-05-01 Olympus Corp Macroscopic inspection apparatus and macroscopic inspection method
JP5397840B2 (ja) 2011-10-21 2014-01-22 日本電気硝子株式会社 ガラス基板の位置決め装置、位置決め方法、端面研削装置及び端面研削方法
CN203062552U (zh) * 2012-10-30 2013-07-17 技高工业股份有限公司 吸附载台

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Publication number Priority date Publication date Assignee Title
JP2002144180A (ja) * 2000-11-09 2002-05-21 Nippon Electric Glass Co Ltd ガラス板の吸着保持装置及び吸着保持方法
JP2006247768A (ja) * 2005-03-09 2006-09-21 Nippon Electric Glass Co Ltd ガラス基板の製造方法及びその装置
JP2007038369A (ja) * 2005-08-05 2007-02-15 Central Glass Co Ltd ガラス板端面加工装置
JP2008273687A (ja) * 2007-04-27 2008-11-13 Dainippon Printing Co Ltd 平板状基材の搬送装置
WO2013125303A1 (ja) * 2012-02-20 2013-08-29 日本電気硝子株式会社 ガラス板の搬送装置及びその搬送方法
JP2016182647A (ja) * 2015-03-26 2016-10-20 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス基板の製造方法
WO2017007782A1 (en) * 2015-07-08 2017-01-12 Corning Incorporated Glass substrate support apparatuses and methods of providing flexible glass substrate support

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