WO2018116688A1 - 希土類オキシフッ化物焼結体及びその製造方法 - Google Patents
希土類オキシフッ化物焼結体及びその製造方法 Download PDFInfo
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Definitions
- the present invention relates to a sintered body of rare earth oxyfluoride and a method for producing the same.
- Patent Document 1 proposes yttrium oxyfluoride.
- the yttrium oxyfluoride described in Patent Document 1 has higher corrosion resistance than the conventionally used quartz and YAG against a highly reactive halogen-based corrosive gas and its plasma.
- Patent Document 2 also proposes a sintered body of rare earth oxyfluoride.
- This sintered body is composed of yttrium oxyfluoride represented by YOF or Y 5 O 4 F 7 in the composition formula.
- This sintered body exhibits excellent corrosion resistance against halogen-based plasma, and is useful as a constituent material for semiconductor manufacturing apparatuses such as etching apparatuses.
- the constituent materials of semiconductor manufacturing equipment such as etching equipment are required to have high strength.
- sintered bodies of rare earth oxyfluorides generally have low strength, they may be cracked during processing, and are likely to cause chipping of processed surfaces and corners. Furthermore, due to this, it was not easy to process (mirror finish) to increase the dimensional accuracy or reduce the surface roughness of the sintered body of rare earth oxyfluoride. From this viewpoint, the sintered bodies of rare earth oxyfluorides described in Patent Documents 1 and 2 have insufficient strength and still have room for improvement.
- the object of the present invention is to further improve the sintered body of rare earth oxyfluoride.
- the strength of the sintered body of rare earth oxyfluoride is increased while maintaining the corrosion resistance.
- Ln represents a rare earth element
- Ca a rare earth oxyfluoride sintered body having LnOF as a main phase and LnOF not stabilized with Ca as a subphase is provided.
- the present invention also provides a method for producing the rare earth oxyfluoride sintered body,
- Ln represents a rare earth element
- a, b and c each independently represents a positive number
- the present invention provides a method for producing a rare earth oxyfluoride sintered body by firing the molded body.
- the present invention is a method for producing the rare earth oxyfluoride sintered body, Ln 2 O 3 (Ln represents a rare earth element), LnF 3 and CaF 2 were mixed to obtain a mixed powder, Molding the mixed powder to obtain a molded body, Having a step of firing the molded body,
- the amount of CaF 2 in the mixed powder is 1% by mass to 5.8% by mass with respect to 100% by mass of the total mass of Ln 2 O 3 , LnF 3 and CaF 2
- FIG. 1 is a schematic diagram for explaining an inflection point in a graph of a dimensional change accompanying a temperature change of a sintered body.
- FIGS. 2A and 2B are scanning electron microscope images of the sintered bodies taken for Example 2.
- FIG. FIG. 3 is a graph of dimensional change with temperature change measured for Example 2.
- the present invention will be described based on preferred embodiments thereof.
- a main phase and a subphase are observed in the cross-sectional structure thereof.
- Both the main phase and subphase are composed of rare earth oxyfluoride.
- This rare earth oxyfluoride is a compound composed of rare earth elements (Ln), oxygen (O), and fluorine (F).
- the “main phase” is a phase that occupies a region of 50% or more in area ratio when the cross-sectional structure of the sintered body is observed.
- the “subphase” refers to a phase that occupies a region of less than 50% in area ratio when the cross-sectional structure of the sintered body is observed.
- the rare earth element in the rare earth oxyfluoride constituting the main phase and the rare earth element in the rare earth oxyfluoride constituting the subphase are not necessarily the same kind, but are preferably the same kind from the viewpoint of ease of production. .
- the rare earth element (Ln) is selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Yb, Tm, and Lu. Is at least one element.
- Y yttrium
- Ln a O b F c preferably has an orthorhombic or tetragonal crystal structure, and what is identified as this crystal structure in X-ray diffraction is the category of Ln a O b F c . Are preferably included.
- LnOF stabilized with Ca has a cubic crystal structure and is identified as this crystal structure in X-ray diffraction. Is included. Both Ln a O b F c and Ca-stabilized LnOF are stabilized without causing phase transformation within a wide temperature range. These stable temperature ranges are generally 25 ° C. or more and 1500 ° C. or less.
- Ln a O b F c that is one aspect constituting the main phase
- Specific examples of Ln a O b F c include Y 5 O 4 F 7 (4Y 2 O 3 ⁇ 7YF 3 ) when Ln is Y, for example.
- Ln is La
- La 10 O 7 F 16 (7La 2 O 3 ⁇ 16LaF 3 ) is exemplified.
- NdO 0.67 F 1.66 (67YNd 2 O 3 .166NdF 3 ) may be mentioned.
- Ln is, for example, Eu, Eu 6 O 5 F 8 (5Eu 2 O 3 ⁇ 8EuF 3 ) is exemplified.
- Y 5 O 4 F 7, NdO 0.67 F 1.66 and Eu 6 O 5 F 8 preferably have an orthorhombic crystal form.
- La 10 O 7 F 16 preferably has a tetragonal crystal form.
- LnOF is stabilized by Ca when the cubic state of LnOF in a low-temperature phase of less than 550 ° C. is compared with pure LnOF.
- the crystal phase exists more stably and does not cause phase transformation around 550 ° C. (for example, 450 ° C. or more and 650 ° C. or less).
- LnOF stabilized by Ca has a cubic crystal phase even at 25 ° C. and has no other crystal phase as much as possible.
- LnOF stabilized by Ca preferably has a cubic crystal phase at 25 ° C. and does not have a rhombohedral crystal phase.
- Ln rare earth element
- Y is taken as an example, but other rare earth elements may be considered in the same manner except that the detected peak angle is slightly shifted.
- the reflection peak intensity from the surface is 15 or less when the strongest peak intensity is 100, it can be said that cubic YOF is the main phase and is stabilized by Ca.
- the ratio of peak intensity here is measured as a ratio of peak height.
- the peak position and peak reflective surface index of LnOF by X-ray diffraction measurement are based on the description of the ICDD card.
- the Ca-stabilized LnOF is preferably a solid solution formed by dissolving Ca in LnOF.
- the “crystal grain” is the maximum unit of a single crystal having the same crystal orientation.
- the number of moles of Ca is preferably 1 mol or more and 40 mol or less with respect to 100 mol obtained by adding rare earth element (Ln) and Ca.
- Ln rare earth element
- the number of moles of Ca is excessively high, the amount of fluoride represented by CaF 2 that precipitates without dissolving in LnOF increases. Since CaF 2 has a higher thermal expansion coefficient than LnOF, it may cause cracks in the fired body.
- the volume change of LnOF at the time of heating can be prevented by setting the number of moles of Ca with respect to the number of moles of 100 added with rare earth elements (Ln) and Ca is preferably 40 moles or less.
- the ratio of the number of moles of Ca to the number of moles of 100 moles obtained by adding rare earth elements (Ln) and Ca is more preferably 1 mole or more and 35 moles or less, and more preferably 2 moles or more. It is particularly preferably 20 mol or less, and most preferably 3 mol or more and 10 mol or less.
- the number of moles of rare earth element (Ln) and the number of moles of Ca in LnOF are determined by quantitative analysis of Ca and Ln using analytical methods such as a fluorescent X-ray method, ICP-AES method, ICP-MS method, and atomic absorption method. It is possible to measure by performing.
- Unstabilized LnOF (Ln represents a rare earth element).
- Unstabilized LnOF (hereinafter also referred to as “unstabilized LnOF”) has a rhombohedral crystal structure.
- Unstabilized LnOF is a rare earth oxyfluoride having a rhombohedral crystal structure at room temperature (25 ° C.) and a cubic or tetragonal crystal structure at a high temperature exceeding 600 ° C.
- unstabilized LnOF exhibits a reversible phase transition between a cubic or tetragonal crystal that is a high-temperature stable phase and a rhombohedral crystal that is a low-temperature stable phase in a temperature range of 450 ° C. to 650 ° C. It has been.
- the sintered body of the present invention is not particularly limited in the position of the main phase and subphase as long as the main phase and subphase are observed in the cross-sectional structure. According to the sintered body of the present invention having such a configuration, the strength can be increased while maintaining the corrosion resistance due to the rare earth oxyfluoride.
- the sintered body of the present invention has a special structure in which unstabilized subphase crystal grains exist at the grain boundaries between stabilized main phase crystal grains.
- the sintered body of the present invention having such a special structure, it is possible to further increase the strength while further maintaining the corrosion resistance due to the rare earth oxyfluoride.
- the above-mentioned grain boundary structure in which unstabilized subphase crystal grains exist at the grain boundaries between stabilized main phase crystal grains can be determined by electron diffraction using a transmission electron microscope. Is possible.
- the main phase is composed of Ln a O b F c or Ca-stabilized LnOF
- the subphase is composed of non-stabilized LnOF.
- the X-ray diffraction measurement is performed at room temperature, specifically at 25 ° C.
- the X-ray diffraction measurement of the sintered body is a powder X-ray diffraction measurement.
- the X-ray diffraction measurement can be performed by the method described in Examples described later.
- the intensity of the X-ray diffraction peak of Ln a O b F c is, the non-stabilization that is a subphase with respect to the strongest peak intensity
- the intensity ratio of the X-ray diffraction peak of the (018) plane or (110) plane of LnOF is preferably 0.5% or more and 30% or less, more preferably 1% or more and 25% or less, and more preferably 3% It is most preferable that it is 20% or less.
- the ratio between the intensity of the X-ray diffraction peak of the main phase and the intensity of the X-ray diffraction peak of the subphase is within this range, it is possible to further increase the strength while maintaining the corrosion resistance due to the rare earth oxyfluoride. It becomes. Specifically, when the peak intensity ratio is 0.5% or more, the improvement of the intensity is sufficiently achieved. In addition, when the peak intensity ratio is 30% or less, the influence of the phase transition of LnOF, which is a secondary phase, is reduced, cracks are generated in the sintered body, and rapid dimensional changes are caused at high temperatures during use. It is effectively prevented from happening. In this case, it is only necessary that at least one of the intensities of the X-ray diffraction peak of the (018) plane or the (110) plane of the non-stabilized LnOF that is the subphase satisfies the intensity ratio.
- the main phase is, for example, La 10 O 7 F 16
- the main phase is, for example, NdO 0.67 F 1.66
- the main phase is, for example, Eu 6 O 5 F 8
- the above-described peak intensity ratio is the ratio of the peak intensity corresponding to either the (018) plane or the (110) plane of the unstabilized LnOF when the superimposed peak intensity is 100. It is defined as
- peak intensity refers to the height of a diffraction peak observed by X-ray diffraction measurement as measured by cps count. In the following description, “peak intensity” is used in the same meaning.
- the X-ray diffraction peak intensity of the (111) plane of the Ca-stabilized LnOF that is, the unstable phase that is a subphase with respect to the strongest peak intensity
- the ratio of the intensity of the X-ray diffraction peaks of the (009) plane or (107) plane of the oxidized LnOF is preferably 0.5% or more and 10% or less, more preferably 1% or more and 9% or less. Most preferably, the content is from 8% to 8%.
- the ratio between the intensity of the X-ray diffraction peak of the main phase and the intensity of the X-ray diffraction peak of the subphase is within this range, it is possible to further increase the strength while maintaining the corrosion resistance due to the rare earth oxyfluoride. It becomes. Specifically, when the peak intensity ratio is 0.5% or more, the improvement of the intensity is sufficiently achieved. Further, when the peak intensity ratio is 10% or less, the influence of the phase transition of LnOF, which is a secondary phase, is reduced, cracks are generated in the sintered body, and rapid dimensional changes at high temperatures during use. It is effectively prevented from happening. In this case, it is only necessary that at least one of the intensities of the X-ray diffraction peaks of the (009) plane or the (107) plane of the unstabilized LnOF that is the subphase satisfies the intensity ratio.
- the peak intensity ratio is defined as the ratio of the peak intensity of the (009) plane or the (107) plane of the unstabilized LnOF when the superimposed peak intensity is 100.
- the crystal grains of the main phase are larger than the crystal grains of the subphase.
- the main phase preferably has an average particle size of 1 ⁇ m to 200 ⁇ m, more preferably 2 ⁇ m to 100 ⁇ m, and even more preferably 3 ⁇ m to 50 ⁇ m.
- the subphase is preferably 0.1 ⁇ m or more and 5 ⁇ m or less, more preferably 0.2 ⁇ m or more and 4 ⁇ m or less, provided that the subphase is smaller than the average particle size of the main phase. More preferably, it is 0.3 ⁇ m or more and 3 ⁇ m or less. The method for measuring the average particle size of the main phase and the subphase will be described in detail in Examples described later.
- the reason why the sintered body of the present invention can achieve high strength is that it is based on the relative position and quantitative balance between the stabilized main phase and the unstabilized subphase.
- the inventors are thinking. That is, the main phase does not undergo phase transformation over a wide temperature range, whereas the subphase undergoes phase transformation, resulting in dimensional changes in the subphase.
- the present inventors consider that this balance contributes to the fact that the crystal grain size of the main phase is reduced in addition to the fact that the crystal is less likely to be distorted over a wide temperature range, and that high strength can be achieved. ing.
- phase transformation occurs with temperature change. Due to this phase transformation, in the sintered body of the present invention, an inflection point is observed in the dimensional change accompanying the temperature change for the whole. In contrast, for example, in a sintered body composed of a single phase of Ln a O b F c and a sintered body composed of a single phase of Ca-stabilized LnOF, the inflection is caused by a dimensional change accompanying a temperature change. No dots are observed.
- the temperature at which the inflection point due to the dimensional change accompanying the temperature change is observed is preferably 200 ° C. or higher and 800 ° C. or lower, more preferably 250 ° C. or higher and 700 ° C. or lower, More preferably, it is 300 degreeC or more and 650 degrees C or less.
- a sintered body in which an inflection point of dimensional change accompanying temperature change is observed within this temperature range has high strength while maintaining corrosion resistance due to rare earth oxyfluoride.
- a thermomechanical analysis method such as TMA is used to observe the inflection point of the dimensional change accompanying the temperature change. Specific measurement methods will be described in detail in Examples.
- Judgment is made as to whether or not an inflection point is observed in the measurement result of dimensional change accompanying temperature change.
- two bending points are recognized at 400 ° C. to 600 ° C.
- the TMA curve has an inflection point when the low temperature side of these two bending points is T1 and the high temperature side is T2, for example, the tangent line A of the TMA curve at a point 50 ° C. away from the low temperature side of T1.
- the tangent line B of the TMA curve located at the center of T1 and T2 has only one intersection other than on the TMA curve, and the tangent line A and the tangent line B do not have the same slope.
- the sintered body of the present invention has high strength while maintaining the corrosion resistance due to the rare earth oxyfluoride. Therefore, even if the sintered body of the present invention is subjected to precision processing such as cutting, for example, cracks and chips are hardly generated, and a product with high dimensional accuracy and small surface roughness can be easily manufactured.
- the three-point bending strength of the sintered body of the present invention is preferably 50 MPa or more and 300 MPa or less, more preferably 55 MPa or more and 280 MPa or less, and most preferably 70 MPa or more and 250 MPa or less. A method for measuring the three-point bending strength will be described in detail in Examples described later.
- the sintered body of the present invention can be processed with high accuracy.
- the three-point bending strength may exceed 300 MPa, but in that case, expensive raw materials are not used, or manufacturing is not performed by a low productivity sintering method such as HIP (Hot Isostatic Pressing). Therefore, it is reasonable to set the upper limit to 300 MPa from the viewpoint of industrial production.
- the sintered body of the present invention can have a surface roughness Ra (JIS B0601) of preferably 1 ⁇ m or less, more preferably 0.5 ⁇ m or less, and most preferably 0.1 ⁇ m or less. Is possible.
- a processing method for achieving such a small surface roughness for example, polishing using an abrasive or a grindstone can be mentioned.
- the sintered body of the present invention is dense unlike the sprayed film, it is possible to improve the blocking property of the halogen-based corrosive gas. Since the sprayed film has a structure in which particles constituting the sprayed material are melted by thermal spraying, the halogen-based corrosive gas may flow into minute gaps between the melted particles. . Compared to this, the sintered body of the present invention is dense and has excellent barrier properties against halogen-based corrosive gases. For this reason, when the sintered body of the present invention is used as, for example, a constituent member of a semiconductor device, the halogen-based corrosive gas can be prevented from flowing into the member, and the corrosion preventing effect is excellent. Examples of such a member that requires a high barrier property against the halogen-based corrosive gas include a vacuum chamber constituting member of an etching apparatus, an etching gas supply port, a focus ring, and a wafer holder.
- the sintered body of the present invention preferably has a relative density (RD) of 70% or more, more preferably 80% or more, and 90% or more. More preferably, it is 95% or more. The higher the relative density, the better.
- RD relative density
- Such a sintered body having a high relative density can be obtained by adjusting temperature conditions, pressure conditions, and the like during firing when the sintered body of the present invention is manufactured.
- the relative density can be measured by Archimedes method based on JIS R1634. Specific measurement methods will be described in detail in Examples.
- the sintered body of the present invention may be substantially composed only of rare earth oxyfluoride, but may contain components other than rare earth oxyfluoride. That is, inevitable impurities may be contained in addition to oxyfluoride, and more specifically, the content of rare earth oxyfluoride is 98% by mass or more. Such inevitable impurities include, for example, by-products such as yttrium oxide produced when manufactured by the method described below.
- the content of the rare earth oxyfluoride in the sintered body of the present invention is preferably 50% by mass or more from the viewpoint of further increasing the plasma resistance effect of the present invention and improving the strength. From the viewpoint of further enhancing these effects, the amount of the rare earth oxyfluoride in the sintered body is more preferably 80% by mass or more, further preferably 90% by mass or more, and 98% by mass or more. Most preferred. The higher the content of the rare earth oxyfluoride in the sintered body, the better, but the upper limit is 100% by mass.
- examples of components other than the rare earth oxyfluoride include various sintering aids, binder resins, and carbon.
- the sintered body of the present invention includes aluminum oxides, yttrium oxides, aluminum yttrium composite oxides, and yttrium fluorides other than yttrium fluoride, which have been conventionally used as components of semiconductor manufacturing equipment.
- Various ceramic materials such as other rare earth element-containing compounds may be contained.
- production method 1 a suitable production method when the main phase is Y 5 O 4 F 7 will be described (hereinafter referred to as “production method 1”).
- raw materials in the production method 1 rare earth oxide (Y 2 O 3 ) and rare earth fluoride (YF 3 ) are used.
- Y 2 O 3 rare earth oxide
- YF 3 rare earth fluoride
- Y 2 O 3 : YF 3 when Y 2 O 3 : YF 3 is 48 or less: 52 or more, the strength is not sufficiently improved.
- Y 2 O 3 : YF 3 when Y 2 O 3 : YF 3 is 60 or more and 40 or less, the influence of phase transition of YOF which is a subphase is increased, and cracks are generated in the sintered body or at high temperature during use. This is not preferable because it causes a sudden dimensional change.
- Ln rare earth element
- LnF 3 the mixing ratio of Ln 2 O 3 and LnF 3 is expressed as Ln a O b F c (Ln represents a rare earth element.
- These powders may be mixed so as to obtain a mixed powder so that Ln 2 O 3 becomes larger than the ratio of the stoichiometric ratio generated by.
- the rare earth element is La
- the raw materials La 2 O 3 and LaF 3 are expressed by a mass ratio of La 2 O 3 : LaF 3 , and are preferably mixed at a ratio of 43:57 to 60:40.
- the raw materials Nd 2 O 3 and NdF 3 are expressed by a mass ratio of Nd 2 O 3 : NdF 3 and are preferably mixed at a ratio of 41:59 to 60:40.
- the rare earth element is Eu
- the raw materials Eu 2 O 3 and EuF 3 are mixed in a ratio of 52:48 to 60:40, preferably expressed as a mass ratio of Eu 2 O 3 : EuF 3 .
- the mixed powder thus obtained is subjected to a known molding method to form a molded body for sintering.
- a molding method for example, a uniaxial hydraulic press method using a mold, or a liquid medium such as water, a dispersing agent, a binder or the like is added to the mixed powder to form a slurry, and the slurry is applied to a plaster mold or the like.
- a casting method for casting may be used.
- content of a dispersing agent and a binder is 0.1 to 3 mass% with respect to the whole slurry, respectively.
- a desired molded product can be obtained by using any of these molding methods.
- a pressure shall be 2 Mpa or more and 100 Mpa or less.
- the firing temperature is preferably 1000 ° C. or higher and 1600 ° C. or lower from the viewpoint of obtaining a dense sintered body, more preferably 1100 ° C. or higher and 1500 ° C. or lower, and most preferably 1250 ° C. or higher and 1450 ° C. or lower. is there.
- the firing temperature is set to 1000 ° C. or higher, the reaction occurs sufficiently, and the main phase and subphase are successfully formed.
- a sufficiently dense sintered body can be obtained.
- the firing temperature is set to 1600 ° C.
- the firing time is preferably 1 hour to 24 hours, more preferably 2 hours to 18 hours, and most preferably 3 hours to 14 hours, provided that the firing temperature is within this range.
- the firing time is preferably 1 hour to 24 hours, more preferably 2 hours to 18 hours, and most preferably 3 hours to 14 hours, provided that the firing temperature is within this range.
- the firing time is set to 1 hour or longer, the reaction sufficiently occurs and the main phase and the subphase are successfully formed.
- a sufficiently dense sintered body can be obtained.
- a hot press method using a graphite mold can also be used.
- the firing temperature is as described above, and the pressure is preferably 2 MPa or more and 100 MPa or less.
- the firing atmosphere is preferably a vacuum.
- the degree of vacuum expressed as an absolute pressure, is preferably 500 Pa or less, more preferably 200 Pa or less, and most preferably 100 Pa or less. In this way, the desired sintered body of rare earth oxyfluoride is obtained.
- production method 2 a preferred production method in the case where the main phase is Ca-stabilized LnOF will be described below in the case where Ln (rare earth element) is Y (hereinafter referred to as “production method 2”). The same applies to the case where Ln is another element.
- CaF 2 calcium fluoride
- CaF 2 in addition to the rare earth oxide (Y 2 O 3 ) and the rare earth fluoride (YF 3 ) used in the production method 1 described above as raw materials for producing the target sintered body.
- the ratio of the rare earth oxide, rare earth fluoride and calcium fluoride used in Production Method 2 is preferably as follows.
- the amount of calcium fluoride is 1% by mass or more and 5.8% by mass or less with respect to 100% by mass of the total mass of rare earth oxide (Y 2 O 3 ), rare earth fluoride (YF 3 ) and calcium fluoride. Is preferably 2% by mass or more and 5.5% by mass or less, and more preferably 3% by mass or more and 5.2% by mass or less.
- Mass distribution of the rare earth oxide (Y 2 O 3) and rare earth fluoride (YF 3), compared mass obtained by subtracting the calcium mass fluoride from the entire mass may be set such that the molar ratio of YOF.
- the molded body obtained using the mixed powder thus obtained is fired to obtain a desired sintered body.
- the details of the molding and firing conditions are the same as in Production Method 1.
- the sintered body obtained in this manner can be used for constituent members of a semiconductor manufacturing apparatus such as a vacuum chamber of a dry etching apparatus and a sample table, chuck, focus ring, etching gas supply port in the chamber.
- a semiconductor manufacturing apparatus such as a vacuum chamber of a dry etching apparatus and a sample table, chuck, focus ring, etching gas supply port in the chamber.
- the sintered compact of this invention can be used for the use of the various structural members of a plasma processing apparatus and a chemical plant besides the structural member of a semiconductor manufacturing apparatus.
- Example 1 Y 2 O 3 powder and YF 3 powder were mixed at a ratio of 49% and 51%, respectively, to obtain a mixed powder.
- This mixed powder was put into a mold and hydraulically pressed. This hydraulic press was performed by uniaxial pressing at a pressure of 65 MPa for 0.5 minutes to obtain a molded body. The obtained molded body was fired at 1400 ° C. for 4 hours in a vacuum to obtain a sintered body.
- Y 2 O 3 powder and YF 3 powder were mixed at a ratio of 51% and 49%, respectively, to obtain a mixed powder.
- This mixed powder, water, dispersant and binder were mixed to obtain a mixed slurry.
- the concentration of the mixed powder in the mixed slurry was 20% of water with respect to 100% of the mixed powder, the concentration of the dispersant was 1%, and the concentration of the binder was 1%.
- a polycarboxylic acid-based dispersant was used as the dispersant.
- An acrylic emulsion binder was used as the binder.
- This slurry was put into a gypsum mold and cast. The obtained molded body was fired at 1400 ° C. for 4 hours in a vacuum to obtain a sintered body.
- Example 3 Y 2 O 3 powder and YF 3 powder were mixed at a ratio of 52% and 48%, respectively, to obtain a mixed powder.
- This mixed powder was put into a graphite mold and hot pressed. Hot pressing was performed by simultaneously firing at 1300 ° C. for 1 hour while applying a pressure of 20 MPa. This obtained the sintered compact.
- Example 4 Y 2 O 3 powder and YF 3 powder were mixed at a ratio of 53% and 47%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- Example 5 Y 2 O 3 powder, YF 3 powder and CaF 2 powder were mixed at a ratio of 58%, 37% and 5%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- Example 6 Y 2 O 3 powder, YF 3 powder and CaF 2 powder were mixed at a ratio of 59%, 38% and 3%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- Example 7 La 2 O 3 powder and LaF 3 powder were mixed at a ratio of 47% and 53%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- Example 8 Nd 2 O 3 powder and NdF 3 powder were mixed at a ratio of 45% and 55%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- Example 9 Eu 2 O 3 powder and EuF 3 powder were mixed at a ratio of 56% and 44%, respectively, to obtain a mixed powder. Except for this, a sintered body was obtained in the same manner as in Example 1.
- the main phase and subphase are identified by X-ray diffraction measurement (hereinafter also referred to as XRD measurement) and the peak intensity ratio is measured by the method described below. did.
- XRD measurement X-ray diffraction measurement
- three-point bending strength, relative density and surface roughness were measured.
- the temperature of the inflection point of the dimensional change accompanying the temperature change was measured.
- the average particle diameter of the main phase and subphase crystal grains was measured. The results are shown in Table 1.
- photographed about Example 2 is shown in FIG. Further, FIG. 3 shows a graph of dimensional change by TMA measurement for Example 2.
- ⁇ XRD measurement> Part of the sintered body was pulverized using a mortar and pestle to obtain a powder, and XRD measurement was performed on this powder.
- apparatus name: MiniFlex600, manufacturer: Rigaku was used as a measuring instrument.
- ⁇ 3-point bending strength> The sintered body was cut, and one surface was mirror-polished to produce a strip-shaped test piece having a thickness of 1.5 to 3.0 mm, a width of about 4 mm, and a length of about 35 mm. This was placed on a SiC jig, and a three-point bending test was performed with a universal material testing machine (1185 type, manufactured by INSTRON). The distance between fulcrums was 30 mm, the crosshead speed was 0.5 mm / min, and the number of test pieces was 5. Based on JIS R1601, bending strength ⁇ f [MPa] was calculated using the following formula.
- ⁇ f (3 ⁇ P f ⁇ L) / (2 ⁇ w ⁇ t 2 ) [MPa]
- Pf is a load [N] when the test piece is broken
- L is a span distance [mm]
- w is a width [mm] of the test piece
- t is a thickness [mm] of the test piece.
- ⁇ Relative density> The sintered body was put into distilled water and held under reduced pressure by a diaphragm type vacuum pump for 1 hour, and then the weight in water W 2 [g] was measured. Excess water was removed with a compress and the water saturation weight W 3 [g] was measured. Then, after sufficiently drying the dryer to put sintered body was measured and the dry weight W 1 [g].
- ⁇ Surface roughness> The surface of the sintered body was mirror-finished with a No. 2000 grindstone.
- the surface roughness Ra of the processed surface was measured based on JIS B 0601: 2013.
- ⁇ Temperature inflection point due to TMA measurement> Conforms to JIS R 1618: 2002.
- a DTG-60H manufactured by Shimadzu Corporation was used as a measuring device.
- the temperature was raised from 25 ° C. to 1000 ° C. at a rate of temperature rise / fall at a rate of 5 ° C./min.
- the dimension in the length direction of the test piece during that time was measured, and the dimensional difference from the dimension before the test was determined.
- the load was 5.0 mN.
- the temperature at which the dimension associated with the temperature change discontinuously with respect to the temperature and indicates an inflection point was measured.
- ⁇ Average grain size of main phase and secondary phase crystal grains> The mirror-polished sintered body was held at 1200 ° C. for 1 hour in an Ar atmosphere to perform thermal etching. The sintered body after the thermal etching was observed with a scanning electron microscope (SEM), and a plurality of photographs were taken at a magnification capable of measuring the crystal grain size of the main phase and the subphase. The crystal grain sizes of the main phase and the subphase existing in the photographed field of view were approximated with circles, and an average value of 200 was taken as an average particle size. At this time, particles existing at the crystal grain boundaries of the main phase were used as subphases.
- SEM scanning electron microscope
- Table 1 shows “E: good”, “G: good” or “P: bad” in order from the one with the least amount of consumption of the sintered body, that is, the one with excellent plasma corrosion resistance.
- the sintered body obtained in each example has a three-point bending strength higher than that of the sintered body of Comparative Example 1 made of only Y 5 O 4 F 7 and plasma corrosion resistance. It can be seen that it is excellent.
- the crystal phase of Comparative Example 1 is Y 5 O 4 F 7 as in each of the examples. Therefore, it is considered that the plasma corrosion resistance is superior to conventional general materials.
- the surface roughness of Comparative Example 1 is rough compared to each Example, corrosion is promoted due to the large surface area in contact with the plasma, and it is burned as particles. It is considered that the amount of consumption of the sintered body obtained in Comparative Example 1 has increased because it is easily scattered from the bonded body.
- a rare earth oxyfluoride sintered body having higher corrosion resistance than the conventional one while having corrosion resistance suitable as a constituent material of a semiconductor manufacturing apparatus such as an etching apparatus.
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Abstract
Description
Ln2O3とLnF3との混合比率を、LnaObFc(Lnは希土類元素を表す。a、b及びcはそれぞれ独立に正数を表し、且つa=b=cでない。)が生成する量論比の比率よりも、Ln2O3が多くなるようにこれらの粉を混合して混合粉を得、
前記混合粉を成形して成形体を得、
前記成形体を焼成する、希土類オキシフッ化物焼結体の製造方法を提供するものである。
Ln2O3(Lnは希土類元素を表す。)とLnF3とCaF2とを混合して混合粉を得、
前記混合粉を成形して成形体を得、
前記成形体を焼成する工程を有し、
前記混合粉におけるCaF2の量を、Ln2O3とLnF3とCaF2との全体質量100質量%に対し、1質量%以上5.8質量%以下とし、
前記混合粉におけるLn2O3とLnF3との質量配分を、前記全体質量からCaF2の質量を引いた質量に対し、LnOFの量論比となるように設定する、希土類オキシフッ化物焼結体の製造方法を提供するものである。
例えば、希土類元素がLaの場合、La10O7F16の量論比であるLa2O3:LaF3=42:58の量論比よりも、La2O3を若干多く添加する。この観点から、原料であるLa2O3及びLaF3を、La2O3:LaF3の質量比で表して、好ましくは43:57~60:40の割合で混合する。
また、希土類元素がNdの場合、NdO0.67F1.66の量論比であるNd2O3:NdF3=40:60の量論比よりも、Nd2O3を若干多く添加する。この観点から、原料であるNd2O3及びNdF3を、Nd2O3:NdF3の質量比で表して、好ましくは41:59~60:40の割合で混合する。
また、希土類元素がEuの場合、Eu6O5F8の量論比であるEu2O3:EuF3=51:49の量論比よりも、Eu2O3を若干多く添加する。この観点から、原料であるEu2O3及びEuF3を、Eu2O3:EuF3の質量比で表して、好ましくは52:48~60:40の割合で混合する。
これらのいずれの成形法を用いても、所望の成形体を得ることができる。なおこの成形工程に油圧プレスを用いる場合には、圧力は2MPa以上100MPa以下とすることが好ましい。
この焼成工程では黒鉛型を用いたホットプレス法を用いることもできる。この場合、焼成温度は上記とするとともに、圧力は2MPa以上100MPa以下とすることが好ましい。
Y2O3粉末及びYF3粉末をそれぞれ49%及び51%の割合で混合し、混合粉末を得た。この混合粉末を金型に入れて油圧プレスした。この油圧プレスは65MPaの圧力で0.5分間一軸加圧することにより行い、成形体を得た。得られた成形体を真空中にて、1400℃で4時間焼成し、焼結体を得た。
Y2O3粉末及びYF3粉末をそれぞれ51%及び49%の割合で混合し、混合粉末を得た。この混合粉末と水と分散剤とバインダを混合し、混合スラリーを得た。この混合スラリー中における混合粉末の濃度は、混合粉末を100%に対し、水20%であり、分散剤の濃度は1%、バインダの濃度は1%とした。分散剤として、ポリカルボン酸系の分散剤を用いた。バインダとして、アクリルエマルジョン系のバインダを用いた。このスラリーを石膏型に入れ、鋳込み成形を行った。得られた成形体を真空中にて、1400℃で4時間焼成し焼結体を得た。
Y2O3粉末及びYF3粉末をそれぞれ52%及び48%の割合で混合し、混合粉末を得た。この混合粉末を黒鉛型に入れてホットプレスした。ホットプレスは20MPaの圧力を加えつつ同時に1300℃、1時間焼成することにより行った。これにより焼結体を得た。
Y2O3粉末及びYF3粉末をそれぞれ53%及び47%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
Y2O3粉末、YF3粉末及びCaF2粉末をそれぞれ58%、37%及び5%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
Y2O3粉末、YF3粉末及びCaF2粉末をそれぞれ59%、38%及び3%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
La2O3粉末及びLaF3粉末をそれぞれ47%及び53%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
Nd2O3粉末及びNdF3粉末をそれぞれ45%及び55%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
Eu2O3粉末及びEuF3粉末をそれぞれ56%及び44%の割合で混合し、混合粉末を得た。これ以外は実施例1と同様にして焼結体を得た。
Y2O3粉末及びYF3粉末をそれぞれ47%及び53%の割合で混合し、混合粉末を得た。この割合はY5O4F7が生成する化学量論比に相当する。これ以外は実施例1と同様にして焼結体を得た。
実施例、比較例で得られた焼結体について、以下に述べる方法で、X線回折測定(以下、XRD測定ともいう。)によって主相及び副相の同定を行うとともに、ピーク強度比を測定した。また、3点曲げ強度、相対密度及び表面粗さを測定した。更に、温度変化に伴う寸法変化の変曲点の温度を測定した。更に、主相及び副相の結晶粒の平均粒径を測定した。それらの結果を表1に示す。また、実施例2について撮影された焼結体の走査型電子顕微鏡像を図2に示す。更に実施例2についてTMA測定による寸法変化のグラフを図3に示す。
焼結体の一部を、乳鉢と乳棒を用いて粉砕して粉末を得、この粉末について、XRD測定を行った。測定機器としては、装置名:MiniFlex600、メーカー:リガクを用いた。
測定条件は、ターゲットCu、線源CuKα1線、管電圧40kV、管電流15mA、走査速度20°/min、走査範囲2θ=3°以上90°以下とした。
実施例1ないし4及び比較例1に関しては、主相であるY5O4F7の(151)面と、副相である非安定化YOF(菱面体晶)の(006)面(ともに2θ=28.2°付近)が重っているピークの強度を100としたときの、副相である非安定化YOF(菱面体晶)の(018)面又は(110)面(2θ=47.4°、47.9°付近)のピーク強度比を求めた。
実施例5及び6に関しては、主相であるCa安定化YOF(立方晶)の(111)面と、副相である非安定化YOF(菱面体晶)の(012)面(ともに2θ=28.8°付近)が重なるピーク強度を100としたときの、副相である非安定化YOF(菱面体晶)の(009)面又は(107)面(2θ=43.1°、43.4°付近)のピーク強度比を求めた。
焼結体を切断し、片面を鏡面研磨することにより、厚さ1.5~3.0mm、幅約4mm、長さ約35mmの短冊形の試験片を作製した。これをSiC製治具に置き、万能材料試験機(1185型、INSTRON製)で3点曲げ試験を行った。支点間距離30mm、クロスヘッドスピード0.5mm/minとし、試験片本数は5本とした。JIS R1601に基づき、以下の式を用いて曲げ強度σf[MPa]を算出した。σf=(3×Pf×L)/(2×w×t2)[MPa]
式中、Pfは試験片が破断したときの荷重[N]、Lはスパン距離[mm]、wは試験片の幅[mm]、tは試験片の厚さ[mm]である。
焼結体を蒸留水に入れ、ダイアフラム型真空ポンプによる減圧下で1時間保持した後、水中重量W2[g]を測定した。また、余分な水分を湿布で取り除き、飽水重量W3[g]を測定した。その後、乾燥器に入れて焼結体を十分に乾燥させた後、乾燥重量W1[g]を測定した。以下の式により、かさ密度ρb[g/cm3]を算出した。
ρb=W1/(W3-W2)×ρ1(g/cm3)[g/cm3]
式中、ρ1 [g/cm3]は蒸留水の密度である。得られたかさ密度ρbと、理論密度ρc[g/cm3]を用いて、相対密度(RD)[%]を以下の式により算出する。
RD=ρb/ρc×100[%]
焼結体の表面を2000番の砥石で鏡面加工を行った。その加工面について、JIS B 0601:2013に基づいて、表面粗さRaの測定を行った。
JIS R 1618:2002に準拠した。測定装置として株式会社島津製作所のDTG-60Hを用いた。大気中で25℃から1000℃まで昇降温速度5℃/分で昇降温し、その間のテストピースの長さ方向における寸法を測定し、試験前の寸法との寸法差を求めた。荷重は5.0mNとした。温度変化に伴う寸法が、温度に対して不連続に変化し、変曲点を示すときの温度を測定した。
鏡面研磨した焼結体を、Ar雰囲気中で、1200℃で1時間保持し、サーマルエッチングを行った。サーマルエッチング後の焼結体を走査型電子顕微鏡(SEM)で観察し、主相及び副相の結晶粒径が測定できる倍率で複数枚の写真撮影をした。撮影された視野に存在する主相及び副相の結晶粒径を円で近似して測定し、200個の平均値をとって、平均粒径とした。このとき、主相の結晶粒界に存在する粒子を副相とした。
前述の表面粗さを測定したサンプルを、フッ素系腐食性ガス及び塩素系腐食性ガスの中にてプラズマを5時間曝露した後、プラズマに曝露する前後の重量変化及び表面粗さの変化から、焼結体の消耗量を評価した。焼結体の消耗量が少なかった、すなわちプラズマ耐食性に優れているものから順に、「E:良」、「G:可」又は「P:不可」として表1に示した。
Claims (16)
- LnaObFc(Lnは希土類元素を表す。a、b及びcはそれぞれ独立に正数を表し、且つa=b=cでない。)、又はCaで安定化されているLnOFを主相とし、Caで安定化されていないLnOFを副相とする、希土類オキシフッ化物焼結体。
- LnaObFc(Lnは希土類元素を表す。a、b及びcはそれぞれ独立に正数を表し、且つa=b=cでない。)のX線回折ピークの最強ピーク強度に対する、安定化されていないLnOFの(018)面又は(110)面のX線回折ピークの強度の比が0.5%以上30%以下である請求項1に記載の希土類オキシフッ化物焼結体。
- Caで安定化されているLnOF(Lnは希土類元素を表す。)のX線回折ピークの最強ピーク強度に対する、安定化されていないLnOFの(009)面又は(107)面のX線回折ピークの強度の比が0.5%以上10%以下である請求項1に記載の希土類オキシフッ化物焼結体。
- LnaObFc(Lnは希土類元素を表す。a、b及びcはそれぞれ独立に正数を表し、且つa=b=cでない。)、又はCaで安定化されているLnOFを主相とする結晶粒の粒界に、安定化されていないLnOFの副相が存在している、請求項2又は3に記載の希土類オキシフッ化物焼結体。
- 3点曲げ強度が50MPa以上300MPa以下である請求項1ないし4のいずれか一項に記載の希土類オキシフッ化物焼結体。
- 表面粗さRa(JIS B0601)の値が1μm以下である請求項1ないし5のいずれか一項に記載の希土類オキシフッ化物焼結体。
- 温度変化に伴う寸法変化の変曲点が、200℃以上800℃以下の温度範囲に観察される請求項1ないし6のいずれか一項に記載の希土類オキシフッ化物焼結体。
- 主相の平均粒径が1μm以上200μm以下であり、副相の平均粒径が0.1μm以上5μm以下であり、主相の平均粒径が副相よりも大きい請求項1ないし7のいずれか一項に記載の希土類オキシフッ化物焼結体。
- LnaObFcがY5O4F7である請求項1ないし8のいずれか一項に記載の希土類オキシフッ化物焼結体。
- LnaObFcがLa10O7F16である請求項1ないし8のいずれか一項に記載の希土類オキシフッ化物焼結体。
- LnaObFcがNdO0.67F1.66である請求項1ないし8のいずれか一項に記載の希土類オキシフッ化物焼結体。
- LnaObFcがEu6O5F8である請求項1ないし8のいずれか一項に記載の希土類オキシフッ化物焼結体。
- Caで安定化されているLnOFが、25℃において立方晶の結晶相を有している請求項1ないし12のいずれか一項に記載の希土類オキシフッ化物焼結体。
- Caで安定化されているLnOFがYOFであり、
粉末X線回折測定において、2θ=28.8°付近に観察される立方晶YOFの(111)面からの反射ピークが最強ピークであり、最強ピーク強度を100としたとき、2θ=28.4°付近に観察される菱面体晶YOFの(006)面からの反射ピーク強度が15以下である請求項13に記載の希土類オキシフッ化物焼結体。 - 請求項1に記載の希土類オキシフッ化物焼結体の製造方法であって、
Ln2O3とLnF3との混合比率を、LnaObFc(Lnは希土類元素を表す。a、b及びcはそれぞれ独立に正数を表し、且つa=b=cでない。)が生成する量論比の比率よりも、Ln2O3が多くなるようにこれらの粉を混合して混合粉を得、
前記混合粉を成形して成形体を得、
前記成形体を焼成する、希土類オキシフッ化物焼結体の製造方法。 - 請求項1に記載の希土類オキシフッ化物焼結体の製造方法であって、
Ln2O3(Lnは希土類元素を表す。)とLnF3とCaF2とを混合して混合粉を得、
前記混合粉を成形して成形体を得、
前記成形体を焼成する工程を有し、
前記混合粉におけるCaF2の量を、Ln2O3とLnF3とCaF2との全体質量100質量%に対し、1質量%以上5.8質量%以下とし、
前記混合粉におけるLn2O3とLnF3との質量配分を、前記全体質量からCaF2の質量を引いた質量に対し、LnOFの量論比となるように設定する、希土類オキシフッ化物焼結体の製造方法。
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