WO2018084100A1 - 無アルカリガラスおよびその製造方法 - Google Patents
無アルカリガラスおよびその製造方法 Download PDFInfo
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- WO2018084100A1 WO2018084100A1 PCT/JP2017/039038 JP2017039038W WO2018084100A1 WO 2018084100 A1 WO2018084100 A1 WO 2018084100A1 JP 2017039038 W JP2017039038 W JP 2017039038W WO 2018084100 A1 WO2018084100 A1 WO 2018084100A1
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/089—Glass compositions containing silica with 40% to 90% silica, by weight containing boron
- C03C3/091—Glass compositions containing silica with 40% to 90% silica, by weight containing boron containing aluminium
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/18—Stirring devices; Homogenisation
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/083—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
- C03C3/085—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal
- C03C3/087—Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound containing an oxide of a divalent metal containing calcium oxide, e.g. common sheet or container glass
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/10—Melting processes
Definitions
- the present invention relates to an alkali-free glass and a method for producing the same. More specifically, the present invention relates to an alkali-free glass suitable as a glass for a substrate of various displays such as a liquid crystal display and a method for producing the same.
- various display substrate glasses particularly those in which a thin film of metal or oxide is formed on the surface, have been required to have the following characteristics.
- buffered hydrofluoric acid hydrofluoric acid + ammonium fluoride; BHF
- BHF hydrofluoric acid + ammonium fluoride
- chemicals containing hydrochloric acid used for etching ITO and various acids used for etching metal electrodes Nitric acid, sulfuric acid, etc.
- resist stripper alkali No defects (bubbles, striae, inclusions, pits, scratches, etc.) inside and on the surface.
- the glass for the substrate of the display is particularly strictly required not to contain bubbles, that is, to prevent the generation of bubbles in the manufacturing process or to prevent the generated bubbles from remaining in the final product.
- SnO 2 , F, Cl, SO 3 and the like have been used as a fining agent added to a non-alkali glass material to remove bubbles.
- SnO 2 promotes bubble floating and bubble breakage on the melt surface by releasing O 2 at a high temperature such as 1500 ° C. or higher to grow the bubbles.
- F and Cl inflate bubbles under reduced pressure.
- SO 3 releases SO 2 and O 2 in a melting furnace to grow bubbles.
- Patent Document 1 uses a combination of any one or more of Sb 2 O 3 , SO 3 , Fe 2 O 3 and SnO 2 and any one or more of F and Cl as a fining agent for alkali-free glass. Is described. Patent Document 2 describes that when SnO 2 is used as a fining agent for alkali-free glass, it is preferable not to add an S (sulfur) component because an S (sulfur) component tends to remain as a foam. Patent Document 3 describes that when SnO 2 is used as a fining agent for alkali-free glass, if the amount of S (sulfur) input is large, bubbles are increased due to re-foaming.
- An embodiment of the present invention has an object to provide an alkali-free glass that contains sulfur and hardly generates stirring reboil and a method for producing the same.
- the present inventors have found a method for verifying the S 2- content during stirring during the production of glass, and have found conditions under which the stirring reboil is remarkably suppressed with respect to the SO 3 content and the S 2 -content. .
- the present invention includes the following aspects. [1]
- the temperature T 2 at which the strain point is 680 ° C. or more, the average coefficient of thermal expansion at 50 to 350 ° C. is 30 ⁇ 10 ⁇ 7 to 45 ⁇ 10 ⁇ 7 / ° C., and the glass viscosity is 10 2 dPa ⁇ s.
- the temperature T 4 at which the glass viscosity becomes 10 4 dPa ⁇ s is 1350 ° C.
- the Young's modulus is 80 GPa or more, and SiO 2 is 54 to 66% in terms of weight percent on the oxide basis.
- Al 2 O 3 10 to 25%
- B 2 O 3 0 to 5%
- SnO 2 0.05 to 1%
- MgO + CaO + SrO + BaO is 8 to 24%
- the total sulfur content in terms of SO 3 is 0.5 to 25 ppm by weight, and An alkali-free glass having an S 2- content of 3 ppm by weight or less measured after cooling from 1500 to 1800 ° C. to 600 ° C. or less within 1 minute.
- the strain point is 690 ° C. or higher, the average thermal expansion coefficient is 35 ⁇ 10 ⁇ 7 to 43 ⁇ 10 ⁇ 7 / ° C., the temperature T 2 is 1700 ° C. or lower, and is expressed in weight% based on oxide.
- SiO 2 57 to 63%, Al 2 O 3 : 18-22%, B 2 O 3 : 1-4%, MgO: 0-7%, CaO: 3-10%, SrO: 0-6%, BaO: 2 to 8%, and SnO 2 : 0.1 to 0.5%, MgO + CaO + SrO + BaO is 12 to 20%,
- the total sulfur content is 0.5 to 20 ppm by weight, and
- the glass composition in the step (1) is expressed in terms of% by weight based on oxide, SiO 2 : 57 to 63%, Al 2 O 3 : 18-22%, B 2 O 3 : 1-9%, MgO: 0-7%, CaO: 3-10%, SrO: 0-6%, BaO: 2 to 8%, and SnO 2 : 0.1 to 0.5%,
- an alkali-free glass suitable for a glass for a display substrate which contains a fining agent and suppresses stirring reboil, so that the bubble content is remarkably suppressed.
- the alkali-free glass according to the embodiment of the present invention has a total sulfur content of 0.5 to 25 ppm by mass in terms of SO 3 and is remelted to 600 ° C. or less within 1 minute from a state of 1500 to 1800 ° C.
- a characteristic constitution is that the S 2- content measured after cooling to 3 ppm or less is 3 mass ppm or less. The technical significance of this characteristic configuration will be described below.
- S can exist in a plurality of states with different oxidation numbers, it has been found that S 2 ⁇ having a low oxidation number forms a reboil bubble in the stirred reboil. Therefore, in order to suppress the stirring reboil, it is considered better to reduce the S 2 -content by lowering the S-Redox during stirring.
- the “total sulfur” content in the glass composition disclosed herein can be determined from the detected intensity of S-K ⁇ by performing standard X-ray fluorescence analysis, regardless of the form actually present. It is converted into the content as 3 .
- S-Redox (S- redox) is relative to the amount of total sulfur in terms of SO 3, means the percentage of conversion was S 2- content in SO 3.
- S 2- content can be determined as "S-Redox” and "S 2- content in terms of SO 3" from the product of "total sulfur content in terms of SO 3.”
- SnO 2 referred to as a fining agent in the above also acts as an oxidant, and therefore, the oxidation effect due to the addition of SnO 2 suppresses the generation of bubbles (S 2 ⁇ ) at the time of stirring, thereby causing the problem of stirring reboil. It can be improved.
- the present inventors When manufacturing glass products after melting the alkali-free glass containing SnO 2 and SO 3 to the temperature at which the molten liquid (molten glass) is stirred in the process of manufacturing the alkali-free glass, the present inventors In addition, when the glass is cooled by a specific quenching process different from the slow cooling process normally performed after forming the sheet glass, the rise of S-Redox accompanying the temperature drop can be suppressed, and the S-Redox or the like corresponding to the stirring during the production can be suppressed. It found that can reproduce the S 2- content more accurately. As a result, it has become possible to predict the extent of the increase in S-Redox accompanying the inclusion of SnO 2 .
- the present inventors have established conditions under which stirring reboil is remarkably suppressed with respect to alkali-free glass containing SnO 2 and SO 3 and SO 3 content and S 2- content in the production thereof.
- the headline and the present invention have been completed.
- non-alkali glass means glass that does not substantially contain an alkali metal oxide such as Na 2 O, K 2 O, Li 2 O or the like.
- substantially does not contain means that an alkali metal oxide is not contained unless it is inevitably contained as an impurity or the like.
- the alkali metal inevitably contained is at most about 0.1 mol%.
- SiO 2 is preferably 54% or more because the strain point does not sufficiently increase when the content is less than 54%, and the thermal expansion coefficient increases and the density increases. Is 55% or more, more preferably 56% or more, particularly preferably 57% or more, and most preferably 58% or more. Since SiO 2 is at 66 percent, the solubility decreases, the temperature T 4 which is a temperature T 2 and 10 4 dPa ⁇ s glass viscosity becomes 10 2 dPa ⁇ s is increased, the devitrification temperature increases, 66% or less. Preferably it is 65% or less, more preferably 64% or less, particularly preferably 63% or less, and most preferably 62% or less.
- Al 2 O 3 suppresses the phase separation of the glass, lowers the thermal expansion coefficient, and raises the strain point. However, if it is less than 10%, this effect does not appear, and other components that increase the expansion increase. In this case, the thermal expansion increases, so the content is 10% or more. It is preferably 12% or more, more preferably 14% or more, further preferably 15% or more, particularly preferably 16% or more, and most preferably 18% or more. If Al 2 O 3 exceeds 25%, the solubility of the glass may be deteriorated or the devitrification temperature may be increased. It is preferably 24% or less, more preferably 23% or less, particularly preferably 22% or less, and most preferably 21% or less.
- B 2 O 3 is not essential, but improves the melting reactivity of the glass, lowers the devitrification temperature, and improves the BHF resistance. If this content is less than 0.2%, this effect is not sufficiently exhibited, so 0.2% or more is preferable. 0.5% or more is more preferable, 1% or more is further preferable, and 1.5% or more is particularly preferable. B 2 O 3 is at most 10%, preferably 9% or less. Further, if it exceeds 5%, the strain point becomes low and the Young's modulus can be reduced, so 5% or less is more preferable. It is further preferably 4.5% or less, more preferably 4% or less, particularly preferably 3.5% or less, and most preferably 3% or less.
- MgO is not essential, it has the characteristics of increasing the Young's modulus while keeping the density low while keeping the density low in alkaline earth metals, so it can be included to improve solubility.
- the content of MgO is preferably 1% or more, more preferably 2% or more, and further preferably 3% or more. However, if the amount is too large, the devitrification temperature rises, so the content is made 10% or less.
- MgO is preferably 8.5% or less, more preferably 7% or less, and even more preferably 6% or less.
- CaO is not essential, but has the characteristics of increasing the Young's modulus while keeping the density low, and also improving the solubility without increasing the expansion in alkaline earth metals next to MgO. Therefore, it can contain. However, if the amount is too large, the devitrification temperature may increase, or a large amount of phosphorus, which is an impurity in limestone (CaCO 3 ), which is a CaO raw material, may be mixed. 12% or less is preferable and 10% or less is more preferable. In order to exhibit the above characteristics, CaO is preferably 3% or more.
- SrO is not essential, but can be contained in order to improve the solubility without increasing the devitrification temperature of the glass. However, if the amount is too large, the expansion coefficient may increase. 8% or less is preferable and 6% or less is more preferable.
- BaO is not essential, but can be contained to improve solubility. For example, 2% or more of BaO can be added. However, if the amount is too large, the expansion and density of the glass are excessively increased, so the content is made 10% or less. BaO is preferably 8% or less, more preferably 5% or less, and even more preferably 3% or less. More preferably, it does not substantially contain BaO. “Substantially not contained” means not containing any inevitable impurities.
- ZrO 2 may be incorporated up to 5% in order to lower the glass melting temperature or to promote crystal precipitation during firing. If it exceeds 5%, the glass may become unstable, or the relative dielectric constant ⁇ of the glass may increase.
- the ZrO 2 content is preferably 3% or less, more preferably 1% or less, still more preferably 0.5% or less, and ZrO 2 is not substantially contained. It is particularly preferred.
- MgO + CaO + SrO + BaO is preferably contained in a large amount for the purpose of reducing the photoelastic constant, it is more preferably at least 10%, further preferably at least 12%, particularly preferably at least 16%. If MgO + CaO + SrO + BaO is more than 24%, the average thermal expansion coefficient cannot be lowered and the strain point may be lowered. Preferably it is 22% or less, More preferably, it is 20% or less.
- the total amount of MgO, CaO, SrO and BaO satisfies the above, more preferably 12 to 24%, and the content of each component satisfies all of the following conditions:
- MgO / (MgO + CaO + SrO + BaO) is 0.10 or more, preferably 0.15 or more, more preferably 0.20 or more.
- CaO / (MgO + CaO + SrO + BaO) is 0.50 or less, preferably 0.45 or less, more preferably 0.40 or less.
- SrO / (MgO + CaO + SrO + BaO) is 0.70 or less, preferably 0.60 or less, more preferably 0.50 or less.
- BaO / (MgO + CaO + SrO + BaO) is 0.50 or less, preferably 0.45 or less, more preferably 0.40 or less.
- MgO / (MgO + CaO + SrO + BaO) is 0.25 or less, preferably 0.20 or less, more preferably 0.15 or less.
- CaO / (MgO + CaO + SrO + BaO) is 0.20 or more, preferably 0.30 or more, more preferably 0.40 or more.
- SrO / (MgO + CaO + SrO + BaO) is 0.50 or less, preferably 0.45 or less, more preferably 0.40 or less.
- BaO / (MgO + CaO + SrO + BaO) is 0.70 or less, preferably 0.50 or less, more preferably 0.40 or less.
- the alkali-free glass of the embodiment of the present invention is one of ZnO, Fe 2 O 3 , F, and Cl in order to improve its solubility, clarity, moldability, and the like.
- the total amount thereof is preferably 3% or less, more preferably 2% or less, still more preferably 1% or less, and particularly preferably 0.5% or less.
- the alkali-free glass of the embodiment of the present invention does not substantially contain P 2 O 5 in order not to deteriorate the characteristics of a thin film such as a metal or an oxide provided on the glass plate surface. Moreover, it is preferable that the alkali-free glass of the embodiment of the present invention does not substantially contain PbO, As 2 O 3 , and Sb 2 O 3 in order to facilitate recycling of the glass.
- the alkali-free glass of the embodiment of the present invention contains SnO 2 as a fining agent.
- the Sn content in the alkali-free glass of the embodiment of the present invention is 0.05% or more in terms of SnO 2 , preferably 0.1% or more, more preferably 0. .15% or more, more preferably 0.2% or more. If SnO 2 is contained excessively, the clarification effect is saturated, but the glass may be colored or devitrified, and the control of S-Redox may be difficult.
- the content of SnO 2 in the alkali-free glass of the embodiment of the present invention is 1% or less.
- the content of SnO 2 here is the amount of total tin converted to SnO 2 remaining in the glass melt.
- the alkali-free glass of the embodiment of the present invention can further contain SO 3 , and the content thereof is 25 ppm by mass or less.
- the SO 3 content referred to here is the amount of total sulfur obtained by converting S remaining in the glass into SO 3 , and may be referred to as the total sulfur content converted into SO 3 . If the SO 3 content exceeds 25 ppm by mass, it will be difficult to adjust the S 2 ⁇ content described later.
- the content of SO 3 in the alkali-free glass of the embodiment of the present invention is preferably 20 ppm by mass or less, more preferably 15 ppm by mass or less, further preferably 10 ppm by mass or less, and particularly preferably 9 ppm by mass. It is as follows.
- Alkali-free glass of the embodiment of the present invention it is possible to include an SO 3, can be actively utilized refining effect by SO 3 in addition to SnO 2.
- SO 3 content in the alkali free glass of the embodiment of the present invention is at least 0.5 ppm by weight, preferably at least 1 ppm by mass, more than two mass ppm More preferably, 3 mass ppm or more is more preferable, 5 mass ppm or more is more preferable, and 8 mass ppm or more is particularly preferable.
- An alkali-free glass is melted with a crucible or the like to obtain a melt of 1250 to 1670 ° C. (corresponding to the temperature at which the melt is stirred in the production of the alkali-free glass), and the melt is heated at 1500 to 1800 ° C.
- the value of S-Redox and S 2- content is measured after cooling from the molten state to the 600 ° C. or less within 1 minute, during stirring of the melt in the alkali-free glass production process S-Redox and S 2 - is intended to reflect the content, in this specification, these values of S-Redox and S 2- content of "stirring time equivalent".
- the alkali-free glass of the embodiment of the present invention has an S 2- content equivalent to that at the time of stirring of 3.0 mass ppm or less, preferably 2.5 mass ppm or less, more preferably 2.0 mass ppm. It is ppm or less, More preferably, it is 1.5 mass ppm or less.
- Cooling the molten liquid (molten glass) from 1500 to 1800 ° C. to 600 ° C. or less within 1 minute is usually achieved by allowing the molten liquid that has flowed out to cool (rapidly cool) in the atmosphere. For example, by pouring the above-mentioned molten liquid at 1500 to 1800 ° C. into a carbon mold at room temperature of ⁇ 40 mm so that the thickness of the glass is in the range of 10 to 20 mm, and allowing to cool in the atmosphere to make glass. Can be achieved.
- a more aggressive cooling operation may be performed using means known to those skilled in the art, but there is a possibility that the glass sample will break under an excessive cooling rate.
- the cooling rate so that the sample does not break.
- the temperature may be different between the surface and the inside of the sample, but in any case, the portion cooled to 600 ° C. or less within 1 minute can be used for the S 2 -content analysis.
- the step of rapidly cooling the sample melt as described above in order to measure the equivalent S 2- content during stirring is the cooling condition normally used after forming the sheet glass (ribbon) in the actual glass production process. Is different. This is because in the glass production process, in order to prevent distortion of the glass plate, generally, slow cooling, that is, slow cooling, in which the cooling rate is artificially slowed in the slow cooling furnace is performed. Because of this difference, the equivalent S-Redox and S 2- content of the alkali-free glass determined as described herein when stirring is the S-Redox and S 2 -content in the product state of the alkali-free glass. 2- The content is usually different.
- S-Redox in a product state is preferably 95% or less, more preferably 80% or less, further preferably 60% or less, and 50% or less. It is particularly preferred that
- the alkali-free glass of the embodiment of the present invention preferably has a strain point of 650 ° C. or higher, more preferably 680 ° C. or higher, and further preferably 690 ° C. or higher.
- the strain point is preferably 750 ° C. or lower, more preferably 740 ° C. or lower, and further preferably 730 ° C. or lower. If the strain point is too high, it is necessary to increase the temperature of the molding apparatus accordingly, and the life of the molding apparatus tends to be reduced.
- the alkali-free glass of the embodiment of the present invention has an average coefficient of thermal expansion at 50 to 350 ° C. of 45 ⁇ 10 ⁇ 7 / ° C. or less from the viewpoint of productivity and thermal shock resistance in the production of products such as displays. preferable. More preferably, it is 43 ⁇ 10 ⁇ 7 / ° C. or less, and further preferably 40 ⁇ 10 ⁇ 7 / ° C. or less.
- the average thermal expansion coefficient at 50 to 350 ° C. is preferably 30 ⁇ 10 ⁇ 7 / ° C. or more. More preferably, it is 33 ⁇ 10 ⁇ 7 / ° C. or more, and further preferably 35 ⁇ 10 ⁇ 7 / ° C. or more.
- a gate metal film such as copper and a gate insulating film such as silicon nitride may be sequentially laminated on an alkali-free glass, but the average thermal expansion coefficient is low. And the difference in expansion coefficient between the gate insulating film and the glass becomes too small. Therefore, the effect of canceling the glass warpage caused by the formation of the gate metal film by the gate insulating film is reduced. As a result, the warpage of the substrate becomes large, which may cause a problem in conveyance, and the pattern deviation at the time of exposure may increase.
- the alkali-free glass of the embodiment of the present invention preferably has a specific gravity of 2.7 g / cm 3 or less in order to reduce the weight of the product and increase the specific elastic modulus. More preferably, it is 2.65 g / cm 3 or less, and still more preferably 2.6 g / cm 3 or less.
- the plate thickness is preferably 0.7 mm or less.
- the temperature T 2 at which the glass viscosity is 10 2 dPa ⁇ s is preferably 1750 or less.
- T 2 is more preferably at most 1730 ° C., further preferably at most 1700 ° C., particularly preferably at most 1660 ° C. If T 2 is high, the solubility of glass is poor, may increase the burden on the manufacturing apparatus for requiring high temperatures.
- the temperature T 2.5 at which the glass viscosity becomes 10 2.5 dPa ⁇ s is preferably 1670 ° C. or lower.
- T 2.5 is more preferably 1630 ° C. or less, further preferably 1600 ° C.
- the temperature T 3 at which the glass viscosity is 10 3 dPa ⁇ s is preferably 1570 ° C. or lower.
- T 3 is more preferably 1530 ° C. or less, further preferably 1500 ° C. or less, and particularly preferably 1470 ° C. or less.
- the temperature T 3.5 at which the glass viscosity is 10 3.5 dPa ⁇ s is preferably 1480 ° C. or lower.
- T 3.5 is more preferably 1440 ° C. or less, further preferably 1410 ° C. or less, and particularly preferably 1380 ° C. or less.
- T 2.5 when T 3 and T 3.5 is high, may increase the burden on the stirring device for requiring high temperatures.
- the temperature T 4 at which the glass viscosity is 10 4 dPa ⁇ s is preferably 1370 ° C. or lower.
- T 4 is more preferably 1350 ° C. or less, further preferably 1320 ° C. or less, and particularly preferably 1300 ° C. or less.
- the Young's modulus of the alkali-free glass of the embodiment of the present invention is preferably 77 GPa or more, and more preferably 80 GPa or more.
- a high Young's modulus increases the specific elastic modulus and improves the fracture toughness of the glass. Therefore, it is suitable for various display substrate glasses and photomask substrate glasses that require a larger or thinner glass plate.
- the alkali-free glass of the embodiment of the present invention can be produced by appropriately combining production techniques known to those skilled in the art.
- the raw materials for each of the above components are prepared so as to have the predetermined composition, which is continuously charged into a melting furnace, heated to 1500 to 1800 ° C. and melted to obtain a molten glass, which has a viscosity.
- the glass ribbon is molded into a glass ribbon having a predetermined plate thickness by a molding apparatus, and the glass ribbon is gradually cooled and then cut and alkali-free glass plate Get.
- the molten glass Before forming, the molten glass may be subjected to a general defoaming process such as vacuum degassing.
- the melt may be stirred after the defoaming step.
- the molding is preferably performed by a float method or a fusion method.
- another aspect of the present invention provides a method for producing an alkali-free glass according to an embodiment of the present invention, which includes the step (1) of preparing a glass raw material so as to have a desired glass composition, It includes at least a step (2) of obtaining a molten glass by melting a glass raw material, a step (3) of stirring the molten glass, and a step (4) of forming the molten glass to obtain an alkali-free glass plate.
- Stirring step (3) may be performed from T 2.5 to T 3.5 .
- SiO 2 54 to 66% in terms of weight% based on oxide, Al 2 O 3 : 10 to 25%, B 2 O 3: 0 ⁇ 10 %, MgO: 0 to 10%, CaO: 0 to 15%, SrO: 0 to 10%, BaO: 0 to 10%, and SnO 2 : 0.05 to 1%, It is preferable to prepare the glass raw material so that MgO + CaO + SrO + BaO is 8 to 24% and the total sulfur content in terms of SO 3 is 1 to 25 ppm by weight.
- the glass raw material is prepared so that MgO + CaO + SrO + BaO is 12 to 20% and the total sulfur content is 2 to 20 ppm by weight.
- the S 2 ⁇ content (in the molten glass) at the time of stirring in the step (3) is 3 mass ppm or less.
- the S 2- content during stirring is preferably 2.5 ppm by mass or less, more preferably 2.0 ppm by mass or less, and further preferably 1.5 ppm by mass or less.
- “S 2- content at the time of stirring” is defined as the re-melting of the alkali-free glass produced through the production process, and the molten liquid is reduced from 1500 to 1800 ° C. to 600 ° C. or less within 1 minute. Expressed as S 2- content measured after cooling to.
- Cooling a molten liquid (molten glass) from 1500 to 1800 ° C. to 600 ° C. or less within 1 minute is usually achieved by allowing the molten liquid that has flowed out to cool in the atmosphere. Can be achieved by pouring the glass into a mold having a diameter of 40 mm so that the glass has a thickness in the range of 10 to 20 mm and allowing to cool in the atmosphere.
- a more aggressive cooling operation may be performed using means known to those skilled in the art, but there is a possibility that the glass sample will break under an excessive cooling rate. It is difficult to accurately measure the S 2- content of a high and broken glass sample. Therefore, it is preferable to keep the cooling rate so that the sample does not break.
- the temperature may be different between the surface and the inside of the sample, but in any case, the portion cooled to 600 ° C. or less within 1 minute can be used for the S 2 -content analysis.
- the total sulfur amount should be within the range defined by the present invention, and measures to prevent the increase of S-Redox, for example, increase the relative amount of oxidizing agent
- suppressing the introduction of a reducing agent such as coke not excessively increasing the melting temperature (for example, keeping it below 1700 ° C.), reducing the oxygen partial pressure, and the proportion of alkaline earth metal hydroxide in the raw material
- ⁇ -OH may be decreased by reducing the amount. It is within the ordinary skill of one of ordinary skill in the art to select these strategies as appropriate and verify the S 2- content upon stirring according to the disclosure herein.
- a plurality of alkali-free glasses containing SnO 2 and SO 3 were melted at a temperature of 1650 ° C. for 4 hours using a platinum crucible. After melting, the molten liquid is poured onto a carbon plate and slowly cooled at a cooling rate of 1 ° C./min, or allowed to cool in the atmosphere (rapid cooling. That is, the molten glass is heated from 1500 to 1800 ° C. within 600 minutes within 600 minutes. And cooled to room temperature to obtain a plate-like glass plate.
- a surface cooled in contact with a carbon plate was used. The analysis surface was mirror-polished, ultrasonically cleaned in ethanol, dried with a dryer, and packaged with aluminum foil to prevent surface contamination.
- the aluminum foil was removed immediately before S-Redox analysis by fluorescent X-ray.
- One alkali-free glass had S-Redox measured after slow cooling of over 85%, while S-Redox measured after quenching was about 15%.
- S-Redox measured after slow cooling was 65 to 97%, while S-Redox measured after quenching was 15 to 20%.
- S-Redox is remarkably high in the slowly cooled alkali-free glass, whereas S-Redox is kept low in the rapidly cooled alkali-free glass, and the quenching condition is accompanied by a temperature drop in the presence of SnO 2. It can be seen that the reduction of S was suppressed.
- the alkali-free glass having a composition not containing SnO 2 a remarkably high S-Redox was not observed as described above regardless of the cooling conditions.
- each alkali-free glass sample having the composition shown in Table 1 and having an S 2 -content (measured through remelting after production) equivalent to that during stirring was produced as shown in Table 1.
- Table 1 numerical values in parentheses are calculated values.
- the melt obtained by dissolving the raw material was stirred. That is, after manufacturing a glass sample, a platinum crucible having an inner diameter of 85 mm and a height of 140 mm was filled with a melt to a depth of 100 mm, a stirrer having a blade diameter of 45 mm and a blade height of 25 mm was immersed in the center of the crucible by 50 mm, and stirred at 30 rpm. The number of bubbles per volume was counted.
- the alkali-free glass according to the embodiment of the present invention is suitable as a high-quality glass for displays and the like that are strictly required not to contain bubbles.
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Abstract
Description
(1)アルカリ金属酸化物を含有しているとアルカリ金属イオンが薄膜中に拡散して膜特性を劣化させてしまうため、実質的にアルカリ金属イオンを含まないこと。
(2)薄膜形成工程で高温に晒される際にガラスの変形およびガラスの構造安定化に伴う収縮(熱収縮)を最小限に抑えるため、高い歪点を有すること。
(3)軽量化のために低比重であり、薄く平坦であること。
(4)半導体形成に用いられる各種薬品に対して充分な化学耐久性を有すること。特にSiOxやSiNxのエッチングのためのバッファードフッ酸(フッ酸+フッ化アンモニウム;BHF)、およびITOのエッチングに用いられる塩酸を含有する薬液、金属電極のエッチングに用いられる各種の酸(硝酸、硫酸等)、レジスト剥離液のアルカリに対して耐久性があること。
(5)内部および表面に欠点(泡、脈理、インクルージョン、ピット、キズ等)をもたないこと。
SnO2は、1500℃以上のような高温においてO2を放出して泡を成長させることにより、泡の浮上および融液表面での破泡を促進させる。FおよびClは減圧状態において泡をふくらませる。SO3は溶解窯においてSO2およびO2を放出して泡を成長させる。
本発明には、下記の態様が含まれる。
[1]
歪点が680℃以上であり、50~350℃での平均熱膨張係数が30×10-7~45×10-7/℃であり、ガラス粘度が102dPa・sとなる温度T2が1730℃以下であり、ガラス粘度が104dPa・sとなる温度T4が1350℃以下であり、ヤング率が80GPa以上であり、酸化物基準の重量%表示で
SiO2:54~66%、
Al2O3:10~25%、
B2O3:0~5%、
MgO:0~10%、
CaO:0~15%、
SrO:0~10%、
BaO:0~10%、及び
SnO2:0.05~1%を含有し、
MgO+CaO+SrO+BaOが8~24%であり、
SO3換算した全硫黄含有量が0.5~25重量ppmであり、かつ、
1500~1800℃で溶融した状態から1分間以内で600℃以下にまで冷却した後に測定されるS2-含有量が3重量ppm以下である、無アルカリガラス。
[2]
前記歪点が690℃以上であり、前記平均熱膨張係数が35×10-7~43×10-7/℃であり、前記温度T2が1700℃以下であり、酸化物基準の重量%表示で
SiO2:57~63%、
Al2O3:18~22%、
B2O3:1~4%、
MgO:0~7%、
CaO:3~10%、
SrO:0~6%、
BaO:2~8%、及び
SnO2:0.1~0.5%を含有し、
MgO+CaO+SrO+BaOが12~20%であり、
前記全硫黄含有量が0.5~20重量ppmであり、かつ、
前記S2-含有量が2.5重量ppm以下である、前記[1]に記載の無アルカリガラス。
[3]
酸化物基準の重量%表示で
SiO2:54~66%、
Al2O3:10~25%、
B2O3:0~10%、
MgO:0~10%、
CaO:0~15%、
SrO:0~10%、
BaO:0~10%、及び
SnO2:0.05~1%を含有し、
MgO+CaO+SrO+BaOが8~24%であり、かつ
SO3換算した全硫黄含有量が1~25重量ppmであるガラス組成となるようにガラス原料を調製する工程(1)、
前記ガラス原料を溶解して溶融ガラスを得る工程(2)、
前記溶融ガラスを撹拌する工程(3)、及び
前記溶融ガラスを成形して無アルカリガラスの板を得る工程(4)、をこの順で含み、
前記工程(3)における撹拌時の溶融ガラスのS2-含有量が3重量ppm以下である、無アルカリガラスの製造方法。
[4]
前記工程(1)におけるガラス組成が、酸化物基準の重量%表示で
SiO2:57~63%、
Al2O3:18~22%、
B2O3:1~9%、
MgO:0~7%、
CaO:3~10%、
SrO:0~6%、
BaO:2~8%、及び
SnO2:0.1~0.5%を含有し、
MgO+CaO+SrO+BaOが12~20%であり、かつ
前記全硫黄含有量が2~20重量ppmである、前記[3]に記載の無アルカリガラスの製造方法。
本明細書に開示されるガラス組成における「全硫黄(total sulfer)」含有量は、実際に存在する形態に関わらず、標準的な蛍光X線分析の実施により、S-Kαの検出強度からSO3としての含有量に換算される。用語「S-Redox(S-レドックス)」は、SO3に換算した全硫黄の量に対する、SO3に換算したS2-の含有量の割合を意味する。
一般に、ガラス中でのSの価数は-2または+6となることが知られており、S-Kαの蛍光X線スペクトルのケミカルシフトからSの平均価数およびS-Redoxを求めることができる。したがって、S2-含有量は「S-Redox」と「SO3に換算した全硫黄含有量」の積から「SO3に換算したS2-の含有量」として求めることができる。
SnO2⇒SnO+1/2O2
という反応式で表されるSn自身の還元とO2発生に伴って、
SO4 2-⇔S2-+2O2
というSに関する平衡が左側に傾くため、S2-の発生が抑制されるが、その後の降温過程において逆に
SnO+1/2O2⇒SnO2
となって、上記Sに関する平衡は右側に傾くこととなり、S2-の発生が促進される。その結果、出来上がった製品のS-Redoxを測定してもそれは撹拌時のS-Redoxとは異なることとなる。
SiO2が66%超では、溶解性が低下し、ガラス粘度が102dPa・sとなる温度T2や104dPa・sとなる温度T4が上昇し、失透温度が上昇するため、66%以下とする。好ましくは65%以下、より好ましくは64%以下、特に好ましくは63%以下、最も好ましくは62%以下である。
Al2O3が25%超ではガラスの溶解性が悪くなったり、失透温度を上昇させるおそれがあるため、25%以下とする。好ましくは24%以下、より好ましくは23%以下、特に好ましくは22%以下、最も好ましくは21%以下である。
MgO/(MgO+CaO+SrO+BaO)が0.10以上、好ましくは0.15以上、より好ましくは0.20以上。
CaO/(MgO+CaO+SrO+BaO)が0.50以下、好ましくは0.45以下、より好ましくは0.40以下。
SrO/(MgO+CaO+SrO+BaO)が0.70以下、好ましくは0.60以下、より好ましくは0.50以下。
BaO/(MgO+CaO+SrO+BaO)が0.50以下、好ましくは0.45以下、より好ましくは0.40以下。
MgO/(MgO+CaO+SrO+BaO)が0.25以下、好ましくは0.20以下、より好ましくは0.15以下。
CaO/(MgO+CaO+SrO+BaO)が0.20以上、好ましくは0.30以上、より好ましくは0.40以上。
SrO/(MgO+CaO+SrO+BaO)が0.50以下、好ましくは0.45以下、より好ましくは0.40以下。
BaO/(MgO+CaO+SrO+BaO)が0.70以下、好ましくは0.50以下、より好ましくは0.40以下。
本発明者らは、SnO2およびSO3を含有する無アルカリガラスにおいて、撹拌時相当のS2-含有量が3.0質量ppm以下となるようにSO3含有量および酸化・還元(レドックス)が調節されたものでは撹拌リボイルが顕著に抑えられることを見出した。
冷却の際、試料の表面と内部とでは温度が異なり得るが、いずれにせよ1分間以内で600℃以下にまで冷却した部分をS2-含有量分析に使用し得る。
S-Redox(%)=([S平均価数]-6)/(-8)×100
本発明の実施形態の無アルカリガラスにおいて、ガラス粘度が102.5dPa・sとなる温度T2.5は1670℃以下であることが好ましい。T2.5はより好ましくは1630℃以下であり、さらに好ましくは1600℃以下、特に好ましくは1570℃以下である。ガラス粘度が103dPa・sとなる温度T3は1570℃以下であることが好ましい。T3はより好ましくは1530℃以下であり、さらに好ましくは1500℃以下、特に好ましくは1470℃以下である。ガラス粘度が103.5dPa・sとなる温度T3.5は1480℃以下であることが好ましい。T3.5はより好ましくは1440℃以下であり、さらに好ましくは1410℃以下、特に好ましくは1380℃以下である。
T2.5、T3及びT3.5が高いと、高温を要するため撹拌装置への負担が高まり得る。
また、ガラス粘度が104dPa・sとなる温度T4は1370℃以下であることが好ましい。T4はより好ましくは1350℃以下、さらに好ましくは1320℃以下、特に好ましくは1300℃以下である。T4が高いと、フロート成形に用いられるフロートバスの筐体構造物やヒーターの寿命を極端に短くする恐れがある。
SiO2:54~66%、
Al2O3:10~25%、
B2O3:0~10%、
MgO:0~10%、
CaO:0~15%、
SrO:0~10%、
BaO:0~10%、及び
SnO2:0.05~1%を含有し、
MgO+CaO+SrO+BaOが8~24%であり、かつ
SO3換算した全硫黄含有量が1~25重量ppmとなるようにガラス原料を調製することが好ましい。
SiO2:57~63%、
Al2O3:18~22%、
B2O3:1~9%、
MgO:0~7%、
CaO:3~10%、
SrO:0~6%、
BaO:2~8%、及び
SnO2:0.1~0.5%を含有し、
MgO+CaO+SrO+BaOが12~20%であり、かつ
前記全硫黄含有量が2~20重量ppmとなるようにガラス原料を調製することがより好ましい。
本明細書において、「撹拌時のS2-含有量」は、製造工程を経て製造された無アルカリガラスを再溶融して、その溶融液を1500~1800℃から1分間以内で600℃以下にまで冷却した後に測定されるS2-含有量として表される。
溶融液(溶融ガラス)を1500~1800℃から1分間以内で600℃以下にまで冷却することは、通常は流し出した溶融液を大気中で放冷することによって達成され、例えば、その溶融液を直径40mmのモールド内に、ガラスの厚さが10~20mmの範囲となるように流し出し、大気中で放冷することによって達成し得る。単なる放冷以上の冷却速度を得るために、当業者に知られる手段を用いてより積極的な冷却操作を行ってもよいが、過剰な冷却速度の下ではガラス試料が割れてしまう可能性が高く、割れたガラス試料では正確なS2-含有量の測定が困難となる。従って、試料が割れない程度の冷却速度にとどめることが好ましい。冷却の際、試料の表面と内部とでは温度が異なり得るが、いずれにせよ1分間以内で600℃以下にまで冷却した部分をS2-含有量分析に使用し得る。
分析面を鏡面研磨し、エタノール中で超音波洗浄後、ドライヤーで乾燥させ、表面の汚染を防ぐためにアルミホイルで包装した。アルミホイルは蛍光X線によるS-Redox分析の直前に取り外した。
1つの無アルカリガラスは、徐冷後に測定されたS-Redoxが85%を超えていたのに対し、急冷後に測定されたS-Redoxは約15%であった。別の無アルカリガラスでは、徐冷後に測定されたS-Redoxが65~97%であったのに対し、急冷後に測定されたS-Redoxは15~20%であった。このように、徐冷した無アルカリガラスはS-Redoxが著しく高いのに対し、急冷した無アルカリガラスではS-Redoxが低く維持されており、急冷条件ではSnO2の存在下での降温に伴うSの還元が抑制されたことがわかる。なお、SnO2を含まない組成の無アルカリガラスにおいては、冷却の条件に関わらず上記のように著しく高いS-Redoxは観察されなかった。
(平均熱膨張係数)
JIS R3102(1995年)に規定されている方法に従い、示差熱膨張計(TMA)を用いて測定した。測定温度範囲は50~350℃で、単位を10-7/℃として表した。
(歪点)
JIS R3103-2(2001年)に規定されている方法に従い測定した。
(ガラス転移点Tg)
JIS R3103-3(2001年)に規定されている方法に従い、TMAを用いて測定した。
(比重)
JIS Z 8807(2012年)に規定されている方法に従い、泡を含まない約20gのガラス塊をアルキメデス法によって測定した。
(ヤング率)
JIS Z 2280(1993年)に規定されている方法に従い、厚さ0.5~10mmのガラスについて、超音波パルス法により測定した。
(T2~T4)
ASTM C 965-96(2012年)に規定されている方法に従い、回転粘度計を用いて粘度を測定した。
Claims (4)
- 歪点が680℃以上であり、50~350℃での平均熱膨張係数が30×10-7~45×10-7/℃であり、ガラス粘度が102dPa・sとなる温度T2が1730℃以下であり、ガラス粘度が104dPa・sとなる温度T4が1350℃以下であり、ヤング率が80GPa以上であり、酸化物基準の重量%表示で
SiO2:54~66%、
Al2O3:10~25%、
B2O3:0~5%、
MgO:0~10%、
CaO:0~15%、
SrO:0~10%、
BaO:0~10%、及び
SnO2:0.05~1%を含有し、
MgO+CaO+SrO+BaOが8~24%であり、
SO3換算した全硫黄含有量が0.5~25重量ppmであり、かつ、
1500~1800℃で溶融した状態から1分間以内で600℃以下にまで冷却した後に測定されるS2-含有量が3重量ppm以下である、無アルカリガラス。 - 前記歪点が690℃以上であり、前記平均熱膨張係数が35×10-7~43×10-7/℃であり、前記温度T2が1700℃以下であり、酸化物基準の重量%表示で
SiO2:57~63%、
Al2O3:18~22%、
B2O3:1~4%、
MgO:0~7%、
CaO:3~10%、
SrO:0~6%、
BaO:2~8%、及び
SnO2:0.1~0.5%を含有し、
MgO+CaO+SrO+BaOが12~20%であり、
前記全硫黄含有量が0.5~20重量ppmであり、かつ、
前記S2-含有量が2.5重量ppm以下である、請求項1に記載の無アルカリガラス。 - 酸化物基準の重量%表示で
SiO2:54~66%、
Al2O3:10~25%、
B2O3:0~10%、
MgO:0~10%、
CaO:0~15%、
SrO:0~10%、
BaO:0~10%、及び
SnO2:0.05~1%を含有し、
MgO+CaO+SrO+BaOが8~24%であり、かつ
SO3換算した全硫黄含有量が1~25重量ppmであるガラス組成となるようにガラス原料を調製する工程(1)、
前記ガラス原料を溶解して溶融ガラスを得る工程(2)、
前記溶融ガラスを撹拌する工程(3)、及び
前記溶融ガラスを成形して無アルカリガラスの板を得る工程(4)、をこの順で含み、
前記工程(3)における撹拌時の溶融ガラスのS2-含有量が3重量ppm以下である、無アルカリガラスの製造方法。 - 前記工程(1)におけるガラス組成が、酸化物基準の重量%表示で
SiO2:57~63%、
Al2O3:18~22%、
B2O3:1~9%、
MgO:0~7%、
CaO:3~10%、
SrO:0~6%、
BaO:2~8%、及び
SnO2:0.1~0.5%を含有し、
MgO+CaO+SrO+BaOが12~20%であり、かつ
前記全硫黄含有量が2~20重量ppmである、請求項3に記載の無アルカリガラスの製造方法。
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KR102479156B1 (ko) | 2022-12-19 |
CN109890771A (zh) | 2019-06-14 |
TW201829336A (zh) | 2018-08-16 |
JPWO2018084100A1 (ja) | 2019-09-19 |
KR20190077350A (ko) | 2019-07-03 |
TWI801358B (zh) | 2023-05-11 |
CN109890771B (zh) | 2022-03-22 |
US10730786B2 (en) | 2020-08-04 |
TWI828574B (zh) | 2024-01-01 |
US20190248697A1 (en) | 2019-08-15 |
TW202334048A (zh) | 2023-09-01 |
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