WO2018025933A1 - 電気回路装置の放熱構造 - Google Patents
電気回路装置の放熱構造 Download PDFInfo
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- WO2018025933A1 WO2018025933A1 PCT/JP2017/028133 JP2017028133W WO2018025933A1 WO 2018025933 A1 WO2018025933 A1 WO 2018025933A1 JP 2017028133 W JP2017028133 W JP 2017028133W WO 2018025933 A1 WO2018025933 A1 WO 2018025933A1
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- heat dissipation
- heat
- electric circuit
- circuit device
- transfer member
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3733—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon having a heterogeneous or anisotropic structure, e.g. powder or fibres in a matrix, wire mesh, porous structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3731—Ceramic materials or glass
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3737—Organic materials with or without a thermoconductive filler
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
Definitions
- the present invention relates to a heat dissipation structure for an electric circuit device.
- power semiconductor elements typified by power MOSFETs, insulated gate bipolar transistors (hereinafter referred to as IGBTs), etc. are arranged on a ceramic substrate and connected, and then they are combined into a single package by a sealing material.
- an electric circuit device generally called a power module is known.
- Such an electric circuit device is for power control, for example, and has been widely used as an electric component used for controlling a vehicle propulsion motor, for example.
- power semiconductor elements handle large amounts of power, they are also typical heat generating elements. For this reason, various ideas have been devised for the heat dissipation structure of power modules (sometimes referred to as cooling structure, mounting structure, etc.).
- a relatively simple power module has a heat dissipation structure that releases heat from the back side of the power element.
- a cooling plate made of, for example, aluminum is disposed on a heat radiating plate provided on the back surface of a power module via heat radiating grease (also referred to as heat conductive grease) serving as a heat transfer member, such as silicone grease.
- heat radiating grease also referred to as heat conductive grease
- silicone grease serving as a heat transfer member
- Patent Document 2 discloses a heat dissipation structure in which a heat transfer member (insulating plate) and a cooler are installed, and in which they are compressed at an optimum pressure so as to be in sufficient thermal contact with the heat dissipation plate Yes.
- the heat transfer member interposed between the heat dissipation plate of the heat generating element and the cooler itself is required to have high thermal conductivity, but the heat transfer member simultaneously electrically insulates the heat sink and the cooler. It is also a member which has the structure to do.
- the thermal resistance value is 0.24 K / W or less as a measure for improving the heat dissipation characteristics of the heat dissipation structure.
- Patent Document 3 discloses an invention of a heat dissipation structure provided with a ridge-like layer in which carbon fibers and carbon fibers are arranged side by side.
- this heat dissipation structure has a new problem in terms of mass production due to the delicate structure of the layer of the rod-shaped body.
- ceramics have been preferably used conventionally from both sides of electrical insulation and thermal conductivity, but these are rigid, the surface is hard, and the adhesion to the contacted surface is inferior. If a ceramic heat transfer member is simply placed between the heat sink and the cooler, an air layer is formed at the interface even if pressure is applied to compress the two so that the interface is in close contact. Therefore, it is necessary to provide a heat dissipating grease layer at the interface to fill the air layer. That is, in the conventional heat dissipation structure, it is necessary to provide a heat dissipation grease layer on both the interface between the heat dissipation plate and the heat transfer member and the interface between the heat transfer member and the cooler.
- heat dissipating grease layer in the heat dissipating structure, local heat conductivity can be improved, but the heat dissipating grease itself is generally lower in heat conductivity than the heat transfer member, and it is necessary to provide two layers. Even if the thickness of the heat dissipating grease layer is made as thin as possible, there is still room for improving the thermal conductivity of the heat dissipating structure as a whole. In addition, a process of providing a heat dissipating grease layer has been required separately.
- JP 2003-168772 A Japanese Patent Laid-Open No. 2005-150420 JP 2010-192717 A
- This invention makes it a subject to provide the thermal radiation structure which can express the outstanding thermal radiation performance while being excellent in mass-productivity in view of said subject.
- the present invention can employ the following means (1) to (5).
- a heat dissipation structure for an electric circuit device wherein the heat dissipation plate exposed to the outside of the electric circuit device, a heat transfer member, and a cooler are arranged and included so as to form a laminated structure
- the heat transfer member is a ceramic resin composite in which a resin composition is impregnated with a sintered body in which ceramic primary particles form a three-dimensional integrated structure
- a heat dissipation structure for an electric circuit device wherein the heat transfer member is arranged to be in direct contact with and stacked on at least one of the heat dissipation plate and the cooler.
- the ceramic resin composite has an average major axis of 3 to 60 ⁇ m and a boron nitride primary particle having an aspect ratio of 5 to 30 having a three-dimensional monolithic structure and a ceramic sintered body of 35 to 70% by volume
- the heat dissipation structure for an electric circuit device according to (1) is preferably a ceramic resin composite impregnated with 65 to 30% by volume of a resin composition.
- the heat transfer member preferably has a heat dissipation structure for an electric circuit device according to (1) or (2), wherein the heat transfer member has a flat plate shape with a thickness of 0.05 mm to 1.0 mm.
- the electric circuit device includes at least two or more heat radiating plates facing each other with a heating element therebetween and each having an exposed surface to the outside, according to any one of (1) to (3)
- the heat dissipation structure of the electric circuit device is preferable.
- a ceramic resin composite having high thermal conductivity can be disposed and used as the heat transfer member between the heat dissipation plate of the heat generating element and the cooler. For this reason, it is possible to provide a heat dissipation structure for an electric circuit device that has extremely high thermal conductivity and is excellent in mass productivity of the heat dissipation member, and as a result, the electric circuit device is thermally protected. Also, an electric circuit device that contributes to maintaining the electrical performance can be provided.
- the numerical range includes the upper limit value and the lower limit value thereof.
- the heat dissipation structure of the electric circuit device has a configuration in which a cooler is disposed in contact with a heat dissipation plate exposed to the outside of the electric circuit device via a heat transfer member, and The heat transfer member is disposed so as to be in direct contact with and laminated on at least one of the heat radiating plate and the cooler.
- the heat transfer member is a heat transfer member including at least a ceramic resin composite in which a resin composition is impregnated with a sintered body in which ceramic primary particles form a three-dimensional integrated structure.
- the electric circuit device referred to in this specification is an electric circuit device that includes a heat generating element and a heat radiating plate that is disposed near or in contact with the heat generating element and has an exposed surface to the outside. Normally, the entire electric circuit device is covered with a sealing material except for the connection terminal to the outside and the exposed surface of the heat sink.
- a power module is a typical example of an electric circuit device, but the electric circuit device referred to in this specification is not a term that specifically refers to only an electric circuit device called a power module, and includes an element that generates heat. It is a concept which comprehensively shows an integrated apparatus including a heat sink having an exposed surface to the outside.
- the heating element included in the electric circuit device as used in the present specification is an element that generates heat to a greater or lesser extent when it is used by passing a current. Therefore, in the present invention, the type of the heat generating element is not limited and may be either an active element or a passive element. Examples of the heat generating element closely related to the present invention include a power MOSFET, an IGBT, a thyristor, a SiC device, and the like. A power semiconductor element mainly used for power-related control such as drive control and power conversion of motors and lighting devices can be given.
- the heat radiating plate as used in the present specification is disposed in the vicinity of or in contact with the heating element in the electric circuit device, and has an exposed surface to the outside in order to release the heat of the heating element, for example, a copper alloy or an aluminum alloy It is a plate having good thermal conductivity and electrical conductivity made of metal such as. Depending on the type of electric circuit device, it may also function as an electrode.
- the shape of the heat sink, the number of heat sinks included in one electric circuit device, and the plurality of heat sinks are not limited in their positional relationship, but in a typical embodiment
- the electric circuit device has a form close to a flat plate, and the heat radiating plate can be arranged on one side or both upper and lower sides.
- a heat transfer member according to an embodiment of the present invention is a composite in which a ceramic sintered body in which ceramic primary particles form a three-dimensional integral structure is impregnated with a resin composition (hereinafter referred to as a ceramic resin composite). It is. Unless the characteristics of the heat dissipation structure according to the embodiment of the present invention are impaired, the ceramic resin composite includes a heat dissipation grease layer, an interface between the ceramic resin composite and the exposed surface of the heat dissipation plate, or the ceramic resin composite. You may provide in any one of the interfaces of a body and a cooler.
- the ceramic resin composite is a sintered body (hereinafter referred to as a ceramic primary particle sintered body) in which at least one kind of ceramic primary particles selected from boron nitride, aluminum nitride, and silicon nitride has a three-dimensional continuous structure.
- a ceramic primary particle sintered body in which at least one kind of ceramic primary particles selected from boron nitride, aluminum nitride, and silicon nitride has a three-dimensional continuous structure.
- the ceramic primary particles are boron nitride, it is called a boron nitride primary particle sintered body, when it is aluminum nitride, it is called an aluminum nitride primary particle sintered body, and when it is silicon nitride, it is nitrided.
- Preferred is a silicon primary particle sintered body).
- the ceramic resin composite has a three-dimensional integrated structure of boron nitride primary particles having an average major axis of 3 to 60 ⁇ m and an aspect ratio of 5 to 30. 65 to 30% by volume, preferably 60 to 35% by volume of the resin composition (preferably thermosetting resin composition) with respect to 35 to 70% by volume, preferably 40 to 65% by volume of the sintered ceramic body.
- % Is preferably a ceramic resin composite. If the amount of the ceramic sintered body of the ceramic resin composite is smaller than 35% by volume, the ratio of the resin composition having a relatively low thermal conductivity is relatively increased. descend.
- thermosetting resin composition penetrates into the irregularities on the surface of the heat sink when the heat transfer member is bonded to the heat sink or cooler by heating and pressing. It can be difficult and the tensile shear bond strength and thermal conductivity can be reduced.
- a sintering aid such as calcium carbonate, sodium carbonate, boric acid or the like is added to the powder of the primary particles of boron nitride.
- a sintering aid such as calcium carbonate, sodium carbonate, boric acid or the like is added to the powder of the primary particles of boron nitride.
- the sintering furnace used for the above-mentioned sintering is a batch type furnace such as a muffle furnace, a tubular furnace, an atmospheric furnace, a continuous type such as a rotary kiln, a screw conveyor furnace, a tunnel furnace, a belt furnace, a pusher furnace, and a vertical continuous furnace. Furnace. These are properly used according to the purpose. For example, a batch type furnace is used when small quantities of many types of boron nitride sintered bodies are manufactured, and a continuous type furnace is used when large quantities of a certain type are produced.
- the amount of the resin composition contained in the ceramic resin composite is preferably in the range of 30 to 65% by volume of the heat transfer member, and more preferably in the range of 35 to 60% by volume.
- the amount of the resin composition contained in the ceramic resin composite can be calculated from the weight measurement before and after the composite of ceramic and resin and the specific gravity value.
- the said resin composition is a thermosetting resin composition.
- thermosetting resin composition examples include a combination of one or both of a substance having an epoxy group and a substance having a cyanate group, and a substance having a hydroxyl group and a substance having a maleimide group. Preferably there is. Among these, a combination of a substance having a cyanate group and a substance having a maleimide group is more preferable.
- Substances having an epoxy group include bisphenol A type epoxy resins, bisphenol F type epoxy resins, polyfunctional epoxy resins (cresol borac epoxy resins, dicyclopentadiene type epoxy resins, etc.), phenol novolac type epoxy resins, cyclic
- the epoxy resin include aliphatic epoxy resins, glycidyl ester type epoxy resins, and glycidyl amine type epoxy resins.
- substances having a cyanate group examples include 2,2′-bis (4-cyanatophenyl) propane, bis (4-cyanato-3,5-dimethylphenyl) methane, and 2,2′-bis (4-cyanatophenyl).
- cyanate resins such as hexafluoropropane, 1,1′-bis (4-cyanatophenyl) ethane, and 1,3-bis (2- (4-cyanatophenyl) isopropyl) benzene.
- Examples of the substance having a hydroxyl group include phenols such as phenol novolac resin and 4,4 ′-(dimethylmethylene) bis [2- (2-propenyl) phenol].
- Examples of the substance having a maleimide group include 4,4′-diphenylmethane bismaleimide, m-phenylene bismaleimide, bisphenol A diphenyl ether bismaleimide, 3,3′-dimethyl-5,5′-diethyl-4,4′-diphenylmethane bis Maleimide, 4-methyl-1,3-phenylenebismaleimide, 1,6′-bismaleimide- (2,2,4-trimethyl) hexane, 4,4′-diphenyl ether bismaleimide, 4,4′-diphenylsulfone bis Maleimide, 1,3-bis (3-maleimidophenoxy) benzene, 1,3-bis (4-maleimidophenoxy) benzene, bis- (3-ethyl-5-methyl-4
- the ceramic resin composite appropriately includes a silane coupling agent for improving the adhesion between the ceramic and the resin composition, an improvement in wettability and leveling properties, and a reduction in viscosity to reduce defects during impregnation and curing.
- An antifoaming agent, a surface conditioner, and a wetting and dispersing agent for reducing the generation can be contained.
- a curing accelerator may be added in order to control the curing rate and the heat generation start temperature.
- Curing accelerators include imidazoles such as 2-ethyl-4-methylimidazole and 2-phenylimidazole, organophosphorus compounds such as triphenylphosphine and tetraphenylphosphonium tetra-p-tolylborate, acetylacetone copper (II), zinc (II) Metal catalysts such as acetylacetonate can be mentioned.
- the ceramic resin composite is a composite of the ceramic and the resin composition.
- the ceramic composite is formed by impregnating a ceramic primary particle sintered body with a resin composition.
- impregnation of the ceramic primary particle sintered body with the resin composition can be performed, for example, by performing vacuum impregnation and / or pressure impregnation at 1 to 300 MPa (G).
- the pressure during vacuum impregnation is preferably 1000 Pa (abs) or less, and more preferably 100 Pa (abs) or less.
- the thermosetting resin composition can be semi-cured (B-staged), which is a preferable method.
- the heating method for semi-curing can be performed by infrared heating, hot air circulation, oil heating method, hot plate heating method, or a combination thereof.
- Semi-curing may be carried out as it is using the heating function of the impregnation device after impregnating the thermosetting resin composition, or after taking out from the impregnation device, a known device such as a hot air circulating conveyor furnace may be used. May be used separately.
- the heat dissipation grease layer is provided at the interface between the ceramic resin composite and the exposed surface of the heat sink, Or you may provide in either one of the interfaces of the said ceramic resin composite body and a cooler.
- a silicone resin filled with a heat conductive filler and having a heat conductivity of about 1 to 5 W / (m ⁇ K) is preferably used.
- a ceramic resin composite It can be used in the form of being applied to the surface of The thickness when applied is preferably 20 to 100 ⁇ m.
- the ceramic resin composite By applying the heat-dissipating grease to the heat transfer member, the ceramic resin composite can be more closely attached to the heat sink or the cooler, so that the heat transfer performance of the heat dissipation structure may be improved.
- one heat dissipation plate when there are two heat dissipation plates, one heat dissipation plate has one heat dissipation grease layer, and the other heat dissipation plate does not include the heat dissipation grease layer. it can.
- the heat dissipation structure may not include a heat dissipation grease layer.
- the thickness of the heat transfer member can be appropriately changed in accordance with the required electrical and thermal characteristics of the heat dissipation structure of the electric circuit device.
- the heat transfer member can be processed into a sheet with a predetermined thickness using, for example, a multi-wire saw (“MWS-32N” manufactured by Takatori Co., Ltd.). It is also possible to form a thin sheet of 35 mm.
- the cooler is generally preferably a metal, for example, molded aluminum is preferably used.
- the cooler preferably has a surface suitable for being placed in contact with the heat transfer member, but there is no particular limitation on the other shapes and internal structure, and a liquid-cooled type in which the coolant flows inside. There is no particular limitation on the structure or the air-cooled structure having cooling fins.
- a heat transfer member is disposed in contact with the exposed surface of the heat dissipation plate provided in the electric circuit device, and further, the heat transfer without contacting the heat dissipation plate directly.
- a cooler is disposed in contact with the member.
- the electric circuit device may include at least two heat radiating plates facing each other with the heating element interposed therebetween. In this case, it is generally preferable that the heat sinks face each other in parallel. Therefore, in the heat dissipation structure of the electric circuit device of the present invention, a heat dissipation structure in which a cooler is mounted on both surfaces of the electric circuit device via heat transfer members, respectively, to form a laminated structure is preferably employed.
- the electric circuit device and the heat transfer member are sandwiched and tightened firmly to compress the load in a direction perpendicular to the laminated surface (that is, the pressure in the compression direction). ) Is also preferably employed. Further, it is more preferable to apply a compressive load over the entire laminated surface in view of heat conduction efficiency.
- the method of applying the compressive load is not particularly limited. For example, as shown in FIG. 1, for example, holes are formed in the cooler and a fastening member using a bolt, a nut, or the like is attached, and the coolers facing each other are connected. A heat dissipating structure in which a compressive load is applied so as to attract with screws can be preferably employed.
- ⁇ Electric circuit device> As an electric circuit device, a double-sided cooling type power module having a flat rectangular heat sink of 35 mm in length and 21 mm in width on both the upper surface and the lower surface was prepared. In addition, the emitted-heat amount of the said power module is 310W. This is an electric circuit device A.
- Heat transfer member As a heat transfer member, a ceramic resin composite in which a resin composition was impregnated with a ceramic sintered body in which sheet-like boron nitride primary particles had a three-dimensional integrated structure was prepared. This is referred to as a heat transfer member B.
- the heat conductivity of the heat transfer member B was 80 W / (m ⁇ K).
- the ceramic resin composite is a boron nitride sintered body resin composite in which a boron nitride sintered body obtained by three-dimensionally sintering boron nitride powder is impregnated with a thermosetting resin composition.
- the boron nitride sintered body comprises boron nitride having an average major axis of 18 ⁇ m and an aspect ratio of 12, boron nitride having an average major axis of 6 ⁇ m and an aspect ratio of 15, boric acid, and calcium carbonate, 64.2: 34.
- this boron nitride sintered body was 1.51. Further, the boron nitride sintered body was cut into a sheet of 45 mm length ⁇ 35 mm width ⁇ thickness 0.32 mm, and the temperature was 145 ° C. using a vacuum heating impregnation apparatus (G-555AT-R, manufactured by Kyoshin Engineering Co., Ltd.).
- thermosetting resin composition ie, bisphenol F type epoxy resin (JER807, Mitsubishi Chemical) Made by the company, specific gravity 1.2) 12.1% by mass, 72% by mass of novolak-type cyanate resin (PT-30, Lonza, specific gravity 1.2), phenol novolac resin (TD-2131, manufactured by DIC, In a resin composition in which 7.9% by mass of specific gravity 1.2) and 8% by mass of bis- (3-ethyl-5-methyl-4-maleimidophenyl) methane (specific gravity 1.3) were mixed, 10 Min Immersion treatment was performed.
- the boron nitride sintered body impregnated with the thermosetting resin composition is further placed in a pressure and warming impregnation apparatus (HP-4030AA-H45, manufactured by Kyoshin Engineering Co., Ltd.), temperature 145 ° C., pressure A sheet-like ceramic resin composite that is held at a pressure of 3.5 MPa for 120 minutes and then heated at 160 ° C. under atmospheric pressure for 120 minutes to semi-cure the thermosetting resin composition, That is, a composite of a boron nitride sintered body and a resin composition (hereinafter also referred to as a boron nitride resin composite sheet) was obtained.
- a pressure and warming impregnation apparatus HP-4030AA-H45, manufactured by Kyoshin Engineering Co., Ltd.
- this ceramic resin composite was not substantially different from that of the original boron nitride sintered body.
- the volume ratio of the boron nitride sintered body and the resin composition in the ceramic resin composite was calculated by weight measurement before and after the ceramic and resin were composited and the specific gravity was 52:48.
- Heat dissipation grease As the heat dissipating grease, a heat dissipating grease (G-765, manufactured by Shin-Etsu Chemical Co., Ltd.) exhibiting a thermal conductivity of 2 W / (m ⁇ K) was prepared. This is heat radiation grease C.
- a flat plate-shaped aluminum water-cooled cooler having a thermal conductivity of 200 W / (m ⁇ K) and a surface in contact with the heat transfer member of 50 mm ⁇ 30 mm and a thickness of 5 mm was prepared. This is the cooler D.
- the center line of the heat transfer member B and the center line of the cooler D are matched, and the 45 mm side of the heat transfer member B and the 50 mm side of the cooler are parallel from both the upper and lower sides,
- Two coolers were stacked to form the heat dissipation structure of the example. Tightening members with bolts and nuts were attached to the four corners of the two coolers, respectively, and adjusted so that a pressure in the compression direction of 10 MPa was applied uniformly over the entire laminated surface.
- the thermal resistance which is the heat dissipation characteristic of the heat dissipation structure of Example 1, was evaluated by the following method.
- the thermal resistance is the thermal resistance (° C./W) of the path from the heat sink to the cooler.
- the heat generation amount of the electric circuit device A is set to 310 W
- the inlet temperature of the cooling water sent to the cooler is set to 65 ° C.
- the flow rate of the cooling water is set to 5 (l / min)
- the thermoelectric power is applied to the outer surface of the radiator plate and the outer surface of the cooler. A pair was inserted and the temperature was measured.
- thermal resistance (° C./W) (heat sink temperature (° C.) ⁇ Cooler temperature (° C.)) ⁇ 310 (W).
- Table 2 below shows the stacking order from the first stage of the heat dissipation structure of Example 1 and the tightening pressure and thermal resistance value. Further, the dielectric breakdown strength was measured by JISC2110, and the value is also shown in Table 2.
- Example 2 The heat radiation structure of Example 2 is the same as that of Example 1 except that a 20 ⁇ m thick heat radiation grease C layer is provided at the interface between the heat radiation plate on both the upper and lower surfaces of electric circuit device A and heat transfer member B.
- the heat resistance was measured in the same manner as in Example 1. The results are shown in Table 2.
- the heat dissipation grease C layer was formed using a screen printer.
- Example 3 A heat dissipation structure of Example 3 was manufactured by the same configuration and manufacturing procedure as Example 1 except that a heat dissipation grease C layer having a thickness of 20 ⁇ m was provided at the interface between the heat transfer member B and the cooler D.
- the thermal resistance of Example 3 was also measured in the same manner as in Example 1, and the results are shown in Table 2.
- a heat-dissipating grease C layer having a thickness of 20 ⁇ m is provided at the interface between the heat radiation plate on both the upper and lower surfaces of the electric circuit device A and the heat transfer member B, and a heat-dissipating grease C layer having a thickness of 20 ⁇ m is provided at the two interfaces of the heat transfer member B and the cooler D.
- the heat dissipation structure of Comparative Example 1 was fabricated with the same configuration as that of Example 1 except that each was provided, and the thermal resistance was measured in the same manner as in Example 1. The results are also shown in Table 2.
- Comparative Example 2 A heat dissipation structure having the same structure as Comparative Example 1 was produced except that the heat transfer member was a dense silicon nitride sintered body, and the heat dissipation structure of Comparative Example 2 was obtained.
- Comparative Example 2 is an example of a heat dissipation structure having a typical configuration of the prior art.
- the silicon nitride sintered body was cut from a commercially available product (SN-90, manufactured by Maruwa) so as to have the same dimensions as the heat transfer member B.
- the structure and heat resistance value of the heat dissipation structure of Comparative Example 2 are also shown in Table 2.
- the heat dissipation structure of the present invention has a lower thermal resistance than the heat dissipation structure of the prior art having two layers of heat dissipation grease C per side. It was shown that it has an excellent heat dissipation structure.
- the heat dissipation structure of the electric circuit device of the present invention can be used for general industrial and in-vehicle power modules.
- Heating elements power semiconductor elements, etc.
- Sealing material 3 Heat sink (1 to 3 are integrated to form an electric circuit device) 4 Ceramic resin composite 5 Cooler 6 Fastening member
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Abstract
Description
前記伝熱部材が、セラミックス一次粒子が3次元的に一体構造をなしている焼結体に樹脂組成物が含浸しているセラミックス樹脂複合体であり、
前記伝熱部材が、前記放熱板および前記冷却器のうちの少なくとも一方と直接接触して積層するように配置される
ことを特徴とする電気回路装置の放熱構造。
本明細書でいう電気回路装置は、発熱素子と、前記発熱素子の近傍にまたは接して配置されかつ外部への露出面を有する放熱板とを備えている電気回路装置である。通常は外部への接続端子や前記放熱板の露出面を除き、封止材で電気回路装置の全体が覆われている。電気回路装置としてはパワーモジュールが代表的な例であるが、本明細書でいう電気回路装置は、特にパワーモジュールと呼ばれる電気回路装置のみを指している用語ではなく、発熱する素子を内部に含み、外部への露出面を有する放熱板を含む一体の装置を包括的に示す概念である。
本明細書でいう電気回路装置に含まれる発熱素子とは、電流を流して使用する際に多かれ少なかれ熱を発生する素子である。そのため、本発明では発熱素子の種類を限定するものではなく能動素子であれ受動素子のいずれでも良いが、本発明と関係が深い発熱素子としては、例えば、パワーMOSFET、IGBT、サイリスタやSiCデバイス等の、主にモーターや照明装置の駆動制御や電力変換など、電力関係の制御等に用いられるパワー半導体素子を挙げることができる。
本明細書でいう放熱板とは、前記電気回路装置において、発熱素子の近傍にまたは接して配置され、発熱素子の熱を逃がすために、外部への露出面を有する、例えば銅合金もしくはアルミ合金等の金属でできた熱伝導性及び電気伝導性の良い板である。電気回路装置の種類によっては電極としての機能を兼ねていることもある。本発明では、放熱板の形状や、ひとつの電気回路装置に含まれる放熱板の数や、放熱板が複数ある場合、それらの位置関係を限定するものではないが、典型的な実施形態においては、電気回路装置は、平板に近い形態をしており、放熱板はその片面または上下両面に配置されているようにできる。
本発明の実施形態に係る伝熱部材は、セラミックス一次粒子が3次元的に一体構造をなしているセラミックス焼結体に、樹脂組成物が含浸している複合体(以下セラミックス樹脂複合体という)である。前記セラミックス樹脂複合体には、本発明の実施形態に係る放熱構造の特性を損なわない限り、放熱グリース層を、前記セラミックス樹脂複合体と前記放熱板の露出面との界面、または前記セラミックス樹脂複合体と冷却器との界面のうちのいずれか一方に設けても良い。
冷却器は、一般に金属が好ましく、例えば成形したアルミニウムが好ましく用いられる。冷却器は、伝熱部材に接して配置するのに適した面を有することが好ましいが、その他の形状や内部構造については特に限定はなく、冷却液が内部に流れるようにした液冷式の構造であっても、冷却フィンを有する空冷式の構造であっても、特に制限はない。
電気回路装置として、縦35mm×横21mmの平板長方形の放熱板を上面/下面の両面に有する、両面冷却型パワーモジュールを準備した。なお、前記パワーモジュールの発熱量は310Wである。これを電気回路装置Aとする。
伝熱部材として、シート状の窒化ホウ素一次粒子が3次元的に一体構造をなしているセラミックス焼結体に樹脂組成物を含浸させたセラミックス樹脂複合体を準備した。これを伝熱部材Bとする。伝熱部材Bの熱伝導率は80W/(m・K)であった。
前記セラミックス樹脂複合体は、窒化ホウ素粉末を3次元的に焼結させた窒化ホウ素焼結体に、熱硬化性樹脂組成物を含浸させた窒化ホウ素焼結体の樹脂複合体である。前記窒化ホウ素焼結体は、平均長径が18μm、アスペクト比が12の窒化ホウ素と、平均長径が6μm、アスペクト比が15の窒化ホウ素と、ホウ酸と、炭酸カルシウムとを、64.2:34.0:1.2:0.6の質量比で合わせ、これをエタノール、窒化ケイ素製ボ-ルミルを用いて湿式法で2時間混合後、乾燥、解砕して得た混合粉末を、金型に充填し、5MPaの圧力でブロック状にプレス成形し、得られたブロック状成形体を、さらにCIP(冷間等方圧加圧法)装置(ADW800、神戸製鋼所社製)により75MPa(G)の間で加圧処理を行った後、バッチ式高周波炉(FTH-300-1H、富士電波工業社製)にて2000℃で10時間、窒素流量10L/minの条件で焼結させて得たものである。この窒化ホウ素焼結体の比重は1.51であった。さらに、前記窒化ホウ素焼結体を縦45mm×横35mm×厚0.32mmのシート状に切り出し、真空加温含浸装置(G-555AT-R、協真エンジニアリング社製)を用いて、温度145℃、圧力15Pa(abs)の真空中で、各々10分間脱気した後、引き続き同装置内で前記の加温真空下で、熱硬化性樹脂組成物、即ちビスフェノールF型エポキシ樹脂(JER807、三菱化学社製、比重1.2)12.1質量%と、ノボラック型シアネート樹脂(PT-30、ロンザ社製、比重1.2)72質量%と、フェノールノボラック樹脂(TD-2131、DIC社製、比重1.2)7.9質量%と、ビス-(3-エチル-5-メチル-4-マレイミドフェニル)メタン(比重1.3)8質量%とを混合させた樹脂組成物中に、10分間浸漬処理した。次いで、熱硬化性樹脂組成物を含浸させた窒化ホウ素焼結体を、さらに、加圧加温含浸装置(HP-4030AA-H45、協真エンジニアリング社製)内に設置し、温度145℃、圧力3.5MPaの加圧状態で120分間保持し、その後、大気圧下、160℃で、120分間の条件で加熱し、熱硬化性樹脂組成物を半硬化させたシート状のセラミックス樹脂複合体、即ち窒化ホウ素焼結体と樹脂組成物の複合体(以下、窒化ホウ素樹脂複合体シートとも表記する)を得た。このセラミックス樹脂複合体の大きさは元になった窒化ホウ素焼結体のそれと実質的に変わらなかった。またセラミックス樹脂複合体中の窒化ホウ素焼結体と樹脂組成物との体積比を、セラミックスと樹脂の複合化前後の重量測定及び比重によって算出したところ、52:48であった。
放熱グリースとしては、熱伝導率2W/(m・K)を示す放熱グリース(G-765、信越化学工業社製)を準備した。これを放熱グリースCとする。
冷却器としては熱伝導率200W/(m・K)の、伝熱部材に接する面が50mm×30mmであり、厚み5mmである平板状の、アルミニウム製の水冷式冷却器を準備した。これを冷却器Dとする。
準備した電気回路装置Aと窒化ホウ素樹脂複合体シートである伝熱部材Bとの両中心線を一致させ、かつ放熱板の長さ35mmの辺と、伝熱部材Bの45mmの辺とが平行になるように、前記電気回路装置Aの上下両面の放熱板に接して、伝熱部材Bを積層させてから、プレス機圧力10MPa、温度200℃で24時間かけて接着した。さらにその外側に、伝熱部材Bの中心線と冷却器Dの中心線を一致させ、かつ伝熱部材Bの45mmの辺と冷却器の50mmの辺とが平行になるように上下両面から、2個の冷却器を積層させ、実施例の放熱構造とした。2個の冷却器の四隅には、それぞれボルトとナットによる締め付け部材を取り付け、積層面全体にわたって均一に10MPaの圧縮方向の圧力がかかるように調整した。
実施例1の放熱構造の放熱特性である熱抵抗を以下の方法で評価した。熱抵抗は放熱板と冷却器にいたる経路の熱抵抗(℃/W)である。電気回路装置Aの発熱量を310W、冷却器に送る冷却水の入口温度を65℃、冷却水流量を5(l/分)に設定し、放熱板の外側表面と冷却器の外側表面に熱電対を挿入し、温度を測定した。さらに熱抵抗(℃/W)=(放熱板の温度(℃)-冷却器の温度(℃))÷310(W)の式を用いて放熱構造全体の熱抵抗を算出した。実施例1の放熱構造の1段目からの積層順やその締め付け圧力と熱抵抗値は下記表2に示した。また絶縁破壊強さをJISC2110で測定し、その値も表2に示した。
電気回路装置Aの上下両面の放熱板と伝熱部材Bの界面に、厚み20μmの放熱グリースC層を設けた以外は、実施例1と同じ構成、作製手順により、実施例2の放熱構造を作製し、その熱抵抗を実施例1と同様に測定した。この結果は、表2に示した。なお放熱グリースC層はスクリーン印刷機を用いて形成させた。
伝熱部材Bと冷却器Dの2箇所の界面に、厚み20μmの放熱グリースC層を設けた以外は、実施例1と同じ構成、作製手順により、実施例3の放熱構造を作製した。実施例3の熱抵抗も実施例1と同様に測定し、結果を表2に示した。
電気回路装置Aの上下両面の放熱板と伝熱部材Bの界面に、厚み20μmの放熱グリースC層を、伝熱部材Bと冷却器Dの2箇所の界面に、厚み20μmの放熱グリースC層をそれぞれ設けた以外は、実施例1と同じ構成として、比較例1の放熱構造を作製し、その熱抵抗を実施例1と同様に測定した。この結果も表2に示した。
伝熱部材を緻密な窒化ケイ素焼結体とした以外は、比較例1と同じ構造の放熱構造を作製し、比較例2の放熱構造とした。比較例2は従来技術の典型的な構成を持つ放熱構造の例である。なお、前記窒化ケイ素焼結体は、市販の製品(SN-90、マルワ社製)から伝熱部材Bと同寸法になるように切り出したものを使用した。比較例2の放熱構造の構成と熱抵抗値も表2に示した。
2 封止材
3 放熱板
(1~3が一体となり電気回路装置を形成している)
4 セラミックス樹脂複合体
5 冷却器
6 締め付け部材
Claims (5)
- 電気回路装置の外部へ露出する放熱板と、伝熱部材と、冷却器とが積層構造をなすように配置されて含まれる、電気回路装置の放熱構造であって、
前記伝熱部材が、セラミックス一次粒子が3次元的に一体構造をなしている焼結体に樹脂組成物が含浸しているセラミックス樹脂複合体であり、
前記伝熱部材が、前記放熱板および前記冷却器のうちの少なくとも一方と直接接触して積層するように配置される
ことを特徴とする、電気回路装置の放熱構造。 - セラミックス樹脂複合体が、平均長径が3~60μm、アスペクト比が5~30である窒化ホウ素一次粒子が3次元的に一体構造をなしているセラミックス焼結体35~70体積%に、樹脂組成物65~30体積%を含浸している、セラミックス樹脂複合体である、請求項1記載の電気回路装置の放熱構造。
- 伝熱部材が、厚さ0.05mm以上1.0mm以下の平板状である、請求項1または2記載の電気回路装置の放熱構造。
- 電気回路装置が、発熱素子を挟んで向かい合い、それぞれが外部への露出面を有する、少なくとも2枚以上の放熱板を備えている、請求項1~3のいずれか一項記載の電気回路装置の放熱構造。
- 積層構造の積層面に対して垂直な方向に、圧縮方向の圧力をかけている、請求項1~4のいずれか一項記載の電気回路装置の放熱構造。
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