WO2017209061A1 - Pastille frittée de bn présentant une excellente résistance à la corrosion - Google Patents

Pastille frittée de bn présentant une excellente résistance à la corrosion Download PDF

Info

Publication number
WO2017209061A1
WO2017209061A1 PCT/JP2017/019938 JP2017019938W WO2017209061A1 WO 2017209061 A1 WO2017209061 A1 WO 2017209061A1 JP 2017019938 W JP2017019938 W JP 2017019938W WO 2017209061 A1 WO2017209061 A1 WO 2017209061A1
Authority
WO
WIPO (PCT)
Prior art keywords
mass
sintered body
boron nitride
alloy
less
Prior art date
Application number
PCT/JP2017/019938
Other languages
English (en)
Japanese (ja)
Inventor
剛春 永田
康人 伏井
阿部 俊之
脩平 野中
宏幸 塩月
西川 正人
Original Assignee
デンカ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by デンカ株式会社 filed Critical デンカ株式会社
Publication of WO2017209061A1 publication Critical patent/WO2017209061A1/fr

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C38/00Ferrous alloys, e.g. steel alloys
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B14/00Crucible or pot furnaces
    • F27B14/08Details peculiar to crucible or pot furnaces
    • F27B14/10Crucibles

Definitions

  • the present invention relates to a boron nitride sintered body suitable for an apparatus member and parts for producing a rare earth magnet material having excellent corrosion resistance against molten metal containing rare earth, and a method for producing the same.
  • a magnetic body made of an alloy containing a rare earth has strong magnetic properties, and is therefore widely used as a permanent magnet used in a motor.
  • melt spinning method single roll method
  • atomizing method a strip casting method, and the like as methods for producing a rare earth-containing magnetic material alloy.
  • a raw material of a predetermined alloy composition for example, Nd + Fe + B alloy
  • the molten alloy is injected from a ceramic nozzle and rotated with respect to the nozzle.
  • the alloy is rapidly cooled and solidified by being brought into contact with the outer peripheral surface and brought into contact with the outer peripheral surface to continuously form a ribbon-shaped ribbon alloy.
  • atomizing method or the strip casting method a molten alloy is sprayed or injected from a nozzle, and the alloy is rapidly cooled to be formed into a sheet shape, a thread shape, or a particle shape.
  • Rare earth elements are very easily oxidized, and when oxidized, the magnetic properties are degraded. For this reason, in the production of the alloy, most oxide-based materials are not suitable as materials for parts such as a melting crucible and a nozzle that come into contact with the alloy at a temperature at which the alloy melts.
  • oxide-based materials that oxidizes rare earth elements is used for the nozzle, it not only oxidizes the rare earth elements in the alloy, but also causes problems such as nozzle corrosion and wear and nozzle clogging due to the generated rare earth oxide. . For this reason, a boron nitride sintered body is generally used as the nozzle material.
  • Boron nitride is a chemically stable ceramic material with excellent heat resistance at high temperatures, but it is also a hardly sinterable material.
  • Boron oxide (B 2 O 3 ) is used as a sintering aid in sintering according to the prior art. It is common. On the other hand, since B 2 O 3 has a melting point of about 450 ° C., it is not suitable for use at a high temperature. When a boron nitride sintered body is used in a high-temperature environment of 1000 ° C.
  • the rare earth component reacts with B 2 O 3 to produce a rare earth oxide.
  • a high-purity type boron nitride not containing B 2 O 3 is used for the nozzle to be sprayed.
  • the high purity type boron nitride containing no B 2 O 3 has a low density and has many pores, so that there is a problem that the molten alloy penetrates into the pores and is easily melted. When boron nitride is melted, the nozzle life is shortened, which affects the productivity of the alloy.
  • the injection amount of the molten alloy increases, and the cooling rate and the thickness of the alloy ribbon, the thickness of the alloy yarn, or the size of the alloy particles become nonuniform. If the cooling rate of the alloy is different, the state of crystallite size, crystallinity, etc. of the alloy will be different, resulting in quality variations as a magnetic material. Further, even when the thickness of the alloy ribbon, the thickness of the alloy yarn, or the size of the alloy particles are different, the magnetic characteristics are different, leading to a deterioration in quality as a magnet.
  • the boron nitride content is 80.0% by mass or more, and calcium is converted to calcium oxide in an amount of 0.3% by mass to 12.0% by mass, and yttrium is converted to yttrium oxide.
  • a boron nitride sintered body comprising 1.0% by mass or more and 18.0% by mass or less as an amount can be provided.
  • the content of boron nitride in the sintered body is 80.0% by mass or more, and 0.6 mass% or more and 11.0 mass% or less when calcium is converted into calcium oxide. And 1.9 mass% or more and 17.0 mass% or less may be included as a yttrium oxide conversion amount. Further, the amount of boron oxide contained in the sintered body may be 0.3% by mass or less, or 0.1% by mass or less. In one embodiment, the relative density with respect to the true density of the sintered body may be 75% or more, the open porosity may be 7% or less, and the Shore hardness may be 13 or more.
  • boron nitride 0.3% by mass or more and 12.0% by mass or less of calcium oxide as a sintering aid, and a sintering aid as Mixing 1.0% by mass or more and 18.0% by mass or less of yttrium oxide to obtain a raw material mixture; And sintering the raw material mixture at a temperature in the range of 1600 ° C. or higher and 2050 ° C. or lower.
  • the amount of calcium oxide in the raw material mixture is 0.6% by mass or more and 11.0% by mass or less, and the amount of yttrium oxide is 1.9% by mass or more and 17.0% by mass. It may be the following.
  • the boron nitride sintered body of the present invention can be obtained by mixing calcium nitride powder and yttrium oxide powder as a sintering aid with boron nitride powder, molding and sintering.
  • Boron nitride is a hardly sinterable material, and B 2 O 3 is generally used as a sintering aid for sintering in the prior art.
  • B 2 O 3 is highly reactive with rare earths and is not preferred for use as a material for handling molten metals containing rare earths.
  • nitride ceramics such as silicon nitride and aluminum nitride
  • Al 2 O 3 , MgO, Y 2 O 3 and the like are common, but Al 2 O 3 and MgO are also reactive with rare earths. Is expensive. Therefore, as a result of investigating and examining oxide ceramics that can be used as sintering aids for nitride ceramics and have low reactivity with rare earth metals, the present inventors have found that the combination of calcium oxide and yttrium oxide is boron nitride. It has been found that it exhibits an extremely excellent effect in sintering.
  • “calcium oxide” refers to anhydrous calcium oxide.
  • the sintering aid In order to sinter the boron nitride molded body, the sintering aid needs to be in a liquid phase.
  • Calcium oxide and yttrium oxide are both high-melting point oxides, but if they are blended in appropriate amounts, they become complex oxides that have a lower melting point and can be made into a liquid phase even at temperatures of 2000 ° C. or lower.
  • the blending amount is preferably 0.3 to 12.0% by mass of calcium oxide and 1.0 to 18.0% by mass of yttrium oxide, more preferably oxidized based on the total mass of the raw material mixture.
  • Calcium is 0.6 to 11.0% by mass and yttrium oxide is 1.9 to 17.0% by mass.
  • the amount of calcium oxide and the amount of yttrium oxide in the sintered body are respectively equivalent amounts that can be calculated from the amounts of calcium element and yttrium element contained in the sintered body.
  • a range of values (such as those indicated by the symbol tilde “ ⁇ ”) has a meaning of “... Or more,..., Or less” including a lower limit value and an upper limit value unless otherwise specified.
  • B 2 O 3 Boron nitride as a raw material contains oxygen as an impurity and often exists as B 2 O 3 . Since B 2 O 3 reacts with rare earths, it is preferable to have as little as possible. When the amount of B 2 O 3 is small, a complex oxide is formed and stabilized with calcium oxide and yttrium oxide, so that the reaction with the rare earth in the molten alloy is suppressed. However, if B 2 O 3 is present in excess, the reactivity with the rare earth becomes strong. For this reason, the amount of B 2 O 3 in the sintered body is preferably 0.3% by mass or less, more preferably 0.2% by mass or less, still more preferably 0.1% by mass or less, and still more preferably substantially present. do not do. Here, “substantially non-existent” means that the amount is below the lower limit of detection except for the amount inevitably mixed in the production process (this is expressed as “0.0 mass%”). Sometimes).
  • the boron nitride sintered body of the present invention has a hexagonal crystal form, and the shape of the particles is scaly. Boron nitride is difficult to sinter and is porous due to the flake-like particle shape.
  • the relative density of high-purity boron nitride with no conventional sintering aid added or B 2 O 3 removed after sintering is usually about 60 to less than 85%, and the open porosity is usually 10% or more. It is.
  • High purity boron nitride has low reactivity with rare earth elements, but the penetration of molten metal into the pores promotes peeling and dropping of boron nitride particles from the surface of the sintered body, which is one of the causes of erosion. .
  • the relative density (that is, relative density to the true density) of the obtained sintered body is 75% or more. It is possible to achieve 80% or more, and it is possible to realize an open porosity of 7% or less, preferably 5% or less, and more preferably 3% or less.
  • the relative density can be in the range of 75% to 95% and the open porosity can be in the range of 5% or less. That is, according to the embodiment of the present invention, the penetration of the molten metal into the sintered body can be reduced, and the melt resistance can be improved.
  • the boron nitride sintered body according to the embodiment of the present invention is preferably sintered by using a sintering aid containing a combination of yttrium oxide and calcium oxide, so that the Shore hardness is preferably 13 or more, more preferably 14 The above can be realized.
  • the Shore hardness of the high-purity type boron nitride sintered body according to the prior art is about 11 to 12, and the sintered body according to the embodiment of the present invention has excellent wear resistance as a material (material). It is understood. This is because the wear resistance of a material generally has a correlation with the hardness, and the higher the hardness, the better the wear resistance.
  • the boron nitride sintered body according to the embodiment of the present invention is hardly subject to erosion / penetration by a rare earth even when touched with a molten metal containing a rare earth, and has excellent durability.
  • the boron nitride sintered compact which concerns on embodiment of this invention can be conveniently used as an apparatus member used for manufacture of the alloy containing a rare earth, for example.
  • it can be suitably used as an apparatus member (for example, a nozzle, a nozzle support member, a crucible, etc.) for producing an alloy that can be used for magnetic materials such as neodymium and samarium.
  • the boron nitride sintered body can also be used as a nozzle material when an alloy powder containing a rare earth (for example, an alloy powder containing neodymium or samarium) is produced by a melt spinning method or the like. is there.
  • a rare earth for example, an alloy powder containing neodymium or samarium
  • the diameter of the discharge hole is generally about 0.5 to 2 mm or the width of the discharge slit is about 0.2 to 1 mm. Since the molten metal continuously passes through the inside, there is a problem that the discharge port or the slit of the nozzle is worn by friction with the molten metal and gradually spreads.
  • the boron nitride sintered body according to the embodiment of the present invention has low reactivity to molten rare earth and low meltability (that is, high corrosion resistance), and therefore, a molten metal containing rare earth. It can also be suitably used as a crucible for preparing the.
  • the boron nitride powder is oxidized to 80.0% by mass or more, preferably 80.0 to 98.7% by mass, more preferably 80.0 to 97.5% by mass.
  • Calcium powder is 0.3 to 12.0 mass%, preferably 0.6 to 11.0 mass%
  • yttrium oxide powder is 1.0 mass% or more and 18.0 mass%, preferably 1.9 to 17. What added 0 mass% can be mixed and it can be set as raw material powder (raw material mixture).
  • the raw material powder is molded and sintered at a temperature in the range of 1600 to 2050 ° C. to obtain the boron nitride sintered body.
  • the sintered body according to the embodiment of the present invention can be produced in an inert atmosphere such as a nitrogen atmosphere.
  • the boron nitride sintered body preferably has one or more of the following characteristics, more preferably a combination of two or more, and all combinations It is even more preferred to have (1)
  • the B 2 O 3 content in the sintered body is 0.3% by mass or less, more preferably 0.1% by mass or less, and still more preferably substantially absent.
  • the relative density with respect to the true density of the sintered body is 75% or more, more preferably 80% or more.
  • the open porosity of the sintered body is 7% or less, more preferably 5% or less, and still more preferably 3% or less.
  • the Shore hardness of the sintered body is 13 or more, more preferably 14 or more.
  • Examples 1 to 7 Boron nitride powder (Denka Co., Ltd., oxygen content 1.0 wt%, average particle size 20 ⁇ m), anhydrous calcium oxide powder (Kishida Chemical Co., average particle size 30 ⁇ m), yttrium oxide powder (manufactured by Anan Kasei Co., Ltd., The average particle size is 4.5 ⁇ m) in the proportions shown in Table 1, filled in a cylindrical resin pot with an internal volume of 10 L together with ⁇ 10 mm silicon nitride media, mixed for 2 hours in a ball mill, and blended as shown in Table 1. A mixed powder of boron nitride was obtained.
  • This mixed powder was filled in a graphite die having an inner diameter of 140 mm and subjected to hot press sintering at a temperature of 2000 ° C. and a pressure of 20 MPa to obtain a boron nitride sintered body.
  • the oxygen content of boron nitride powder was measured using an O / N simultaneous analyzer (EMGA-620W / C) manufactured by Horiba.
  • the average particle size of boron nitride powder, calcium oxide powder, and yttrium oxide powder was measured by adding 60 mg of a measurement sample to 200 cc of pure water mixed with 2 ml of a 20 wt% aqueous solution of sodium hexametaphosphate, and ultrasonic homogenizer (manufactured by Nippon Seiki Seisakusho). , Trade name "US-300”) for 3 minutes, and then measured with Microtrac (trade name "MT3300EXII", manufactured by Nikkiso Co., Ltd.) Pure water was used as the solvent for the microtrack circulator, and the measurement sample was adjusted to an appropriate concentration.
  • the relative density and open porosity of the boron nitride sintered body are determined by Archimedes method in accordance with JIS R 1634: 1998 after grinding the outer periphery of about 3 mm to remove graphite adhering to the surface and expose a clean surface. Measured and calculated. The results are shown in Table 1.
  • the Shore hardness of the boron nitride sintered body was measured in accordance with JIS Z 2246: 2000 using a D-type manufactured by Shimadzu Corporation by cutting out a test piece of 40 mm length ⁇ 30 mm width ⁇ 10 mm thickness from the sintered body. The measurement results are shown in Table 1.
  • a test piece having a length of 50 mm, a width of 50 mm, and a thickness of about 3 mm was cut out from the boron nitride sintered body and finely pulverized with a silicon nitride mortar to obtain a powder.
  • a certain amount of this powder was put into a dry weight (W0) container and dried at 150 ° C. for 18 hours or more. After drying, the container and powder were cooled to room temperature in a desiccator whose humidity was controlled, and the weight (W1) was measured immediately. Thereafter, methyl alcohol was added to the powder in the container, and B 2 O 3 was eluted in methyl alcohol.
  • B 2 O 3 eluted by warm air drying was volatilized and removed together with methyl alcohol.
  • the container containing the powder was again transferred into a desiccator, cooled to room temperature, and the weight (W2) was measured. Based on each measured weight (W0, W1, W2), the amount of B 2 O 3 was calculated by the following formula. The calculation results of the B 2 O 3 amount are shown in Table 1.
  • the remaining part of the boron nitride sintered body obtained by hot press sintering was pulverized with a silicon nitride mortar, and the contained components were measured by XRF.
  • the boron nitride sintered body obtained by sintering under the conditions described in Table 1 had amounts of B, Ca, and Y metal elements substantially equal to the amounts shown in Table 1. Other metal elements were not confirmed in the sintered body. The results are shown in Table 1.
  • the above sintered body was processed to obtain a crucible having an outer diameter of 50 mm, an inner diameter of 30 mm, a height of 50 mm, and a depth of 40 mm.
  • this crucible 60 g of an Nd alloy piece having a composition ratio of 21.5 wt% Nd-76.5 wt% Fe-1.0 wt% B-1.0 wt% Dy was placed and heated to 1350 ° C. in a nitrogen atmosphere in a vacuum atmosphere furnace. The Nd alloy was melted and held for 1 hour and then cooled. After cooling, it was cut to observe the interface between the hardened alloy and the crucible. The distribution state of Nd and Fe elements on the alloy side, the ceramic side, and the interface was observed with a scanning electron microscope SEM and EDS.
  • Comparative Examples 1 to 3 In Comparative Examples 1 to 3, similar to Examples 1 to 7, hot press sintering was performed at the compounding ratio of Comparative Examples 1 to 3 shown in Table 1.
  • Comparative Example 3 is obtained by adding B 2 O 3 powder to a sintering aid. The open porosity, Shore hardness, and the amount of B 2 O 3 were measured in the same manner as in the above examples, and a corrosion resistance test with an Nd alloy was performed. The results are shown in Table 1.
  • Comparative Example 1 shown in Table 1 had a smaller amount of auxiliary agent than Examples 1 to 7, while Comparative Example 2 had a larger amount of auxiliary agent than Examples 1 to 7, and both had increased open porosity.
  • Comparative Example 3 the amount of B 2 O 3 in the sintered body was large, an Nd component layer was formed at the interface between the crucible and the alloy layer, and the alloy structure became non-uniform.
  • FIG. 1 An SEM image of a cross section of the sintered body of Example 3 is shown in FIG. 1, and an EDS image is shown in FIG. It can be seen that the alloy structure is uniform and there is no alloy penetration into the ceramic side.
  • the light-colored portion (the gray portion in the color SEM image and the green portion in the color EDS image) at the top of FIGS. 1 and 2 is an alloy layer.
  • the lower dark color portion (the black portion in the color SEM image / EDS image) is the ceramic layer.
  • the SEM image of the cross section of the sintered body of Comparative Example 3 is shown in FIG. 3, and the EDS image is shown in FIG. It can also be seen that the alloy structure is non-uniform and the alloy permeates into the ceramic side. Further, it is understood that a layer of Nd component is formed at the interface. 3 and 4 is an alloy layer (the light-colored portion in the color SEM image and the blue-green portion in the color EDS image). The lower dark color portion (the black portion in the color SEM image / EDS image) is the ceramic layer.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)

Abstract

La présente invention a pour objet une pastille frittée de nitrure de bore présentant une excellente résistance à la corrosion par rapport à du métal fondu contenant des terres rares. L'invention concerne une pastille frittée de nitrure de bore caractérisée en ce qu'elle présente une teneur en nitrure de bore supérieure ou égale à 80,0 % en masse, et contenant de 0,3 à 12,0 % en masse de calcium en termes d'oxyde de calcium et de 1,0 à 18,0 % en masse d'yttrium en termes d'oxyde d'yttrium.
PCT/JP2017/019938 2016-05-31 2017-05-29 Pastille frittée de bn présentant une excellente résistance à la corrosion WO2017209061A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-109405 2016-05-31
JP2016109405A JP2019131410A (ja) 2016-05-31 2016-05-31 耐食性に優れたbn焼結体

Publications (1)

Publication Number Publication Date
WO2017209061A1 true WO2017209061A1 (fr) 2017-12-07

Family

ID=60477833

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2017/019938 WO2017209061A1 (fr) 2016-05-31 2017-05-29 Pastille frittée de bn présentant une excellente résistance à la corrosion

Country Status (3)

Country Link
JP (1) JP2019131410A (fr)
TW (1) TWI737739B (fr)
WO (1) WO2017209061A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7349921B2 (ja) * 2020-01-24 2023-09-25 デンカ株式会社 六方晶窒化ホウ素焼結体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05310476A (ja) * 1992-05-08 1993-11-22 Shin Etsu Chem Co Ltd 窒化アルミニウム焼成用窒化ホウ素セッター
JP2007506864A (ja) * 2003-09-24 2007-03-22 ゼネラル・エレクトリック・カンパニイ 金属蒸発用容器及びその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645612B2 (en) * 2001-08-07 2003-11-11 Saint-Gobain Ceramics & Plastics, Inc. High solids hBN slurry, hBN paste, spherical hBN powder, and methods of making and using them
US7524560B2 (en) * 2005-08-19 2009-04-28 Momentive Performance Materials Inc. Enhanced boron nitride composition and compositions made therewith
JP5310476B2 (ja) 2009-10-20 2013-10-09 日本精工株式会社 車両用駆動装置
JP6464461B2 (ja) * 2014-02-12 2019-02-06 デンカ株式会社 窒化ホウ素微粒子およびその製造方法
CN105399426A (zh) * 2015-11-16 2016-03-16 长兴鑫宇耐火材料有限公司 一种氮化硼陶瓷的制备方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05310476A (ja) * 1992-05-08 1993-11-22 Shin Etsu Chem Co Ltd 窒化アルミニウム焼成用窒化ホウ素セッター
JP2007506864A (ja) * 2003-09-24 2007-03-22 ゼネラル・エレクトリック・カンパニイ 金属蒸発用容器及びその製造方法

Also Published As

Publication number Publication date
TW201803834A (zh) 2018-02-01
JP2019131410A (ja) 2019-08-08
TWI737739B (zh) 2021-09-01

Similar Documents

Publication Publication Date Title
JP5477282B2 (ja) R−t−b系焼結磁石およびその製造方法
JP4997431B2 (ja) 高熱伝導窒化ケイ素基板の製造方法
JP4869070B2 (ja) 高熱伝導性窒化ケイ素焼結体及び窒化ケイ素構造部材
US20090121197A1 (en) Sintered Material, Sinterable Powder Mixture, Method for Producing Said Material and Use Thereof
JP5439385B2 (ja) R−t−b系希土類永久磁石の製造方法およびモーター
JP5836522B2 (ja) 窒化ケイ素基板の製造方法
KR101794410B1 (ko) 고 열전도도 질화규소 소결체 및 이의 제조 방법
US20090105062A1 (en) Sintered Wear-Resistant Boride Material, Sinterable Powder Mixture, for Producing Said Material, Method for Producing the Material and Use Thereof
WO2012053486A1 (fr) Électrode pour usinage par électro-érosion
JP5046221B2 (ja) 高い信頼性を持つ高熱伝導窒化ケイ素セラミックスの製造方法
KR960016070B1 (ko) 질화알루미늄 소결체 및 그 제조방법
CN109704797A (zh) 一种短切碳纤维增强Cf/SiC复合材料的制备方法
WO2017209061A1 (fr) Pastille frittée de bn présentant une excellente résistance à la corrosion
EP2703349B1 (fr) Corps fritté de borure de lanthane et son procédé de production
JP5434583B2 (ja) 金属ホウ化物焼結体の製造方法
US7319079B2 (en) Container for evaporation of metal and method to manufacture thereof
JP6720053B2 (ja) 窒化ケイ素焼結体の製造方法
WO2013171324A1 (fr) Céramiques de nitrure de silicium à résistance à l'usure améliorée et leur procédé de production
WO2017209063A1 (fr) Buse de nitrure de bore et creuset de nitrure de bore destinés à la production d'alliage de néodyme, et procédé de production d'alliage de néodyme à l'aide d'une buse ou d'un creuset
JP6725325B2 (ja) ネオジム合金製造用の窒化ホウ素ノズルおよび当該ノズルを用いたネオジム合金の製造方法
JPH08134563A (ja) 焼結部材及びその製造方法
JP4122550B2 (ja) SiC焼結体の製造法
JP2017214246A (ja) ネオジム合金製造用の窒化ホウ素坩堝および当該坩堝を用いたネオジム合金の製造方法
JP5393840B2 (ja) アルミナ質焼結体および配線基板
KR20070017468A (ko) 금속의 증발을 위한 용기 및 그의 제조 방법

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 17806616

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 17806616

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP