WO2017156876A1 - 基板搬送装置和基板加工系统 - Google Patents

基板搬送装置和基板加工系统 Download PDF

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Publication number
WO2017156876A1
WO2017156876A1 PCT/CN2016/083557 CN2016083557W WO2017156876A1 WO 2017156876 A1 WO2017156876 A1 WO 2017156876A1 CN 2016083557 W CN2016083557 W CN 2016083557W WO 2017156876 A1 WO2017156876 A1 WO 2017156876A1
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WIPO (PCT)
Prior art keywords
substrate
glass substrate
slide rail
bump
push block
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PCT/CN2016/083557
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English (en)
French (fr)
Inventor
陈磊
李冬
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深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US15/125,574 priority Critical patent/US10138066B2/en
Publication of WO2017156876A1 publication Critical patent/WO2017156876A1/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
    • B65G19/02—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors for articles, e.g. for containers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
    • B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2207/00—Indexing codes relating to constructional details, configuration and additional features of a handling device, e.g. Conveyors
    • B65G2207/14—Combination of conveyors

Definitions

  • the utility model relates to the field of conveying equipment, in particular to a substrate conveying device and a substrate processing system.
  • a belt is used for transporting a liquid crystal panel to a cutting portion.
  • a glass panel of the G8.5 generation uses up to six conveyor belts during transportation, but each conveyor belt and transmission shaft The degree of tightness between the two is different.
  • the synchronism of the six conveyor belts cannot be completely consistent, which may cause the glass substrate to flow during the conveying process and cause an abnormality.
  • the utility model provides a substrate conveying device, which can ensure the precision of glass conveyance and reduce the abnormality rate of the machine caused by the flow of the glass panel.
  • the utility model provides a substrate conveying device, which comprises a conveying belt, a transmission shaft and a driving motor.
  • the driving motor drives the conveying belt through the transmission shaft to operate to convey the glass substrate placed on the conveying belt.
  • the substrate carrying device further includes a slide rail and a push block, the slide rail being disposed between the transfer belts, the push block being disposed on the slide rail and movable in a conveying direction of the glass substrate, And the speed at which the push block moves matches the speed at which the conveyor belt operates to push the glass substrate to translate in the conveying direction of the glass substrate, thereby preventing the glass substrate from flowing.
  • the push block comprises a cylinder, a first bump and a second bump, the first bump and the a piston rod of the cylinder is connected, the second protrusion is disposed on the first protrusion, and the piston rod is capable of driving the first protrusion to move in a direction perpendicular to a plane of the glass substrate,
  • the first bump extends in a direction parallel to a plane of the glass substrate, and the second bump extends in a direction perpendicular to a plane of the glass substrate.
  • the slide rail extends in a conveying direction of the glass substrate.
  • the slide rail is fixedly connected between the conveyor belts, and the push block is movable along the slide rail in a conveying direction of the glass substrate.
  • the push block is fixedly connected to the slide rail, and the slide rail is movable in a conveying direction of the glass substrate.
  • the number of the pushing block and the sliding rail are two, and the two pushing blocks are respectively disposed on the two sliding rails and can be synchronously moved.
  • first bump and the second bump are integrally formed.
  • the present invention also provides a substrate processing system comprising the substrate transfer device according to any of the preceding claims.
  • the utility model pushes the glass substrate in the conveying direction by the pushing block disposed between the transmission belts, thereby correcting the orientation of the glass substrate, ensuring the precision of the glass panel transmission, and reducing the flow of the glass panel.
  • the resulting abnormality rate of the machine Compared with the prior art, the utility model pushes the glass substrate in the conveying direction by the pushing block disposed between the transmission belts, thereby correcting the orientation of the glass substrate, ensuring the precision of the glass panel transmission, and reducing the flow of the glass panel. The resulting abnormality rate of the machine.
  • FIG. 1 is a top plan view of a substrate transfer apparatus according to the present invention.
  • Fig. 3 is a structural schematic view of the push block and the slide rail when the cylinder is raised.
  • the substrate transfer apparatus 1 can push the glass substrate by the push block 102, it is possible to ensure that the glass substrate does not flow, thereby An exception was generated.
  • the push block 102 is fixedly coupled to the slide rail 103, and the slide rail 103 can be driven by the driving device to move in the conveying direction of the glass substrate to achieve the purpose of driving the push block 102 to move.
  • the piston rod 121 of the cylinder 1021 moves upward, thereby pushing the first bump 1022 and the second bump 1023 upward. Then, when the glass substrate continues to move forward by a distance, the second bump 1023 will support the lower surface of the glass substrate, and at this time, the first bump 1022 will abut against the side edge of the glass substrate to apply a force to the glass substrate. Therefore, the moving direction of the glass substrate can be corrected, and the glass substrate can be prevented from flowing and an abnormality is generated to affect the subsequent processing of the glass substrate.
  • first bumps 1022 and the second bumps 1023 are integrally formed for processing, and of course, the first bumps 1022 and the second bumps 1023 may also be separate components.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Control Of Conveyors (AREA)

Abstract

一种基板搬送装置（1），包括传送皮带（101）、传动轴和驱动马达，还包括滑轨（103）和推送块（102），所述滑轨（103）设置在所述传送皮带（101）之间，所述推送块（102）设置在所述滑轨（103）上并且能够在所述玻璃基板的传送方向上移动，所述推送块（102）移动的速度与所述传送皮带（101）运转的速度匹配，以推动所述玻璃基板在所述玻璃基板的传送方向上平移，从而防止所述玻璃基板流歪。所述基板搬送装置（1）能够确保玻璃传送的精度，降低玻璃面板流歪而产生的机台异常发生率。

Description

基板搬送装置和基板加工系统
本申请要求于2016年3月17日提交中国专利局、申请号为201620214168.7、实用新型名称为“基板搬送装置和基板加工系统”的中国专利申请的优先权，上述在先申请的内容以引入的方式并入本文本中。
技术领域
本实用新型涉及搬送设备领域，尤其涉及一种基板搬送装置和基板加工系统。
背景技术
现有技术中，液晶面板搬送至切割部的过程中会使用皮带进行传送，例如，G8.5代的玻璃面板在搬送的过程中最多使用6条传送皮带，但是由于每条传送皮带与传动轴之间的松紧程度不同，在实际生产过程中，6条传送皮带的同步性无法做到完全一致，从而会导致玻璃基板在传送过程中发生流歪现象，产生异常。
实用新型内容
本实用新型提供一种基板搬送装置，能够确保玻璃传送的精度，降低玻璃面板流歪而产生的机台异常发生率。
本实用新型提供一种基板搬送装置，包括传送皮带、传动轴和驱动马达，所述驱动马达通过所述传动轴驱动所述传送皮带进行运转，以传送置于所述传送皮带上的玻璃基板，所述基板搬送装置还包括滑轨和推送块，所述滑轨设置在所述传送皮带之间，所述推送块设置在所述滑轨上并且能够在所述玻璃基板的传送方向上移动，并且所述推送块移动的速度与所述传送皮带运转的速度匹配，以推动所述玻璃基板在所述玻璃基板的传送方向上平移，从而防止所述玻璃基板流歪。
其中，所述推送块包括气缸、第一凸块和第二凸块，所述第一凸块与所述 气缸的活塞杆相连，所述第二凸块设置在所述第一凸块上，所述活塞杆能够带动所述第一凸块在垂直于所述玻璃基板的平面的方向上移动，所述第一凸块沿着平行于所述玻璃基板的平面的方向延伸，而所述第二凸块沿着垂直于所述玻璃基板的平面的方向延伸。
其中，所述滑轨沿着所述玻璃基板的传送方向上延伸。
其中，所述滑轨固定连接在所述传送皮带之间，所述推送块能够沿着所述滑轨在所述玻璃基板的传送方向上移动。
其中，所述推送块与所述滑轨固定连接，所述滑轨能够在所述玻璃基板的传送方向上移动。
其中，所述推送块和所述滑轨的数量均为两个，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动。
其中，所述第一凸块和所述第二凸块一体成型。
本实用新型还提供一种基板加工系统，包括如前述任一项所述的基板搬送装置。
相较于现有技术，本实用新型通过设置在传动皮带之间的推送块推动玻璃基板在传送方向进行移动，从而可以矫正玻璃基板的方位，以确保玻璃面板传送的精度，降低玻璃面板流歪而产生的机台异常发生率。
附图说明
为了更清楚地说明本实用新型实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本实用新型的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是根据本实用新型的基板搬送装置的俯视示意图；
图2是气缸下降时推送块和滑轨的结构示意图；
图3是气缸上升时推送块和滑轨的结构示意图。
具体实施方式
下面将结合本实用新型实施例中的附图，对本实用新型实施例中的技术方 案进行清楚、完整地描述，显然，所描述的实施例仅仅是本实用新型一部分实施例，而不是全部的实施例。基于本实用新型中的实施例，本领域普通技术人员在没有作出创造性劳动前提下所获得的所有其他实施例，都属于本实用新型保护的范围。
参照图1，示出根据本实用新型的基板搬送装置1的俯视示意图，该基板搬送装置1包括传送皮带101、传动轴(未示出)、驱动马达(未示出)、推送块102和滑轨103，该驱动马达通过传动轴驱动传送皮带101进行运转，以传送置于传送皮带101上的玻璃基板(未示出)，滑轨103设置在传送皮带101之间并且沿着图1中的箭头所表示的玻璃基板的传送方向上延伸。推送块102设置在滑轨101上并且能够在玻璃基板的传送方向上移动，其中推送块102移动的速度与传送皮带101运转的速度匹配，以推动玻璃基板在玻璃基板的传送方向上平移，从而防止玻璃基板流歪。如图1所示，为示例目的，传送带101的数量设置为六条。而推送块102和滑轨103的数量优选为两个，并且该两个推送块102设置为靠近边缘位置的传动带101，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动，从而同时抵靠玻璃基板的侧边缘的两端以推动玻璃基板进行移动。相对于现有技术，即使传动带101的同步性无法完全一致，但是由于根据本实用新型的基板搬送装置1能够利用推送块102来推动玻璃基板进行移动，还是可以确保玻璃基板不会流歪，从而产生异常。
在根据本实用新型的一个实施例中，滑轨103固定连接在传动皮带101之间，推送块102利用驱动装置的驱动能够沿着滑轨103在玻璃基板的传送方向上移动。
在另一个实施例中，推送块102与滑轨103固定连接，滑轨103能够在驱动装置的驱动下从而在玻璃基板的传送方向上移动，以达到带动推送块102移动的目的。
参照图2，推送块102包括气缸1021、第一凸块1022和第二凸块1023，第一凸块1022与气缸1021的活塞杆121相连，第二凸块1023设置在第一凸块1022上，第一凸块1022沿着平行于玻璃基板的平面的方向延伸，而第二凸块1023沿着垂直于玻璃基板的平面的方向延伸。在图2中，气缸101的活塞杆1021处于下降阶段，从而可以对玻璃基板的运动作出避让动作。
参照图3，当玻璃基板传动至邻近推送块102的位置时，气缸1021的活塞杆121会向上运动，从而推动第一凸块1022和第二凸块1023向上运动。然后当玻璃基板继续向前运动一段距离时，第二凸块1023会托住玻璃基板的下表面，而此时第一凸块1022会抵靠玻璃基板的侧边缘从而对玻璃基板施加作用力，因而可以校正玻璃基板的运动方向，防止玻璃基板流弯，产生异常，以影响玻璃基板的后续加工。
优选地，第一凸块1022和第二凸块1023一体成型，以便于加工，当然，第一凸块1022和第二凸块1023也可以是独立的部件。
以上所揭露的仅为本实用新型较佳实施例而已，当然不能以此来限定本实用新型之权利范围，本领域普通技术人员可以理解实现上述实施例的全部或部分流程，并依本实用新型权利要求所作的等同变化，仍属于实用新型所涵盖的范围。

Claims (16)

  1. 一种基板搬送装置，包括传送皮带、传动轴和驱动马达，所述驱动马达通过所述传动轴驱动所述传送皮带进行运转，以传送置于所述传送皮带上的玻璃基板，其中，所述基板搬送装置还包括滑轨和推送块，所述滑轨设置在所述传送皮带之间，所述推送块设置在所述滑轨上并且能够在所述玻璃基板的传送方向上移动，所述推送块移动的速度与所述传送皮带运转的速度匹配，以推动所述玻璃基板在所述玻璃基板的传送方向上平移，从而防止所述玻璃基板流歪。
  2. 如权利要求1所述的基板搬送装置，其中，所述推送块包括气缸、第一凸块和第二凸块，所述第一凸块与所述气缸的活塞杆相连，所述活塞杆能够带动所述第一凸块在垂直于所述玻璃基板的平面的方向上移动，所述第二凸块设置在所述第一凸块上，所述第一凸块沿着平行于所述玻璃基板的平面的方向延伸，而所述第二凸块沿着垂直于所述玻璃基板的平面的方向延伸。
  3. 如权利要求2所述的基板搬送装置，其中，所述滑轨沿着所述玻璃基板的传送方向上延伸。
  4. 如权利要求3所述的基板搬送装置，其中，所述滑轨固定连接在所述传送皮带之间，所述推送块能够沿着所述滑轨在所述玻璃基板的传送方向上移动。
  5. 如权利要求3所述的基板搬送装置，其中，所述推送块与所述滑轨固定连接，所述滑轨能够在所述玻璃基板的传送方向上移动。
  6. 如权利要求4所述的基板搬送装置，其中，所述推送块和所述滑轨的数量均为两个，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动。
  7. 如权利要求6所述的基板搬送装置，其中，所述推送块和所述滑轨的数量均为两个，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动。
  8. 如权利要求7所述的基板搬送装置，其中，所述第一凸块和所述第二凸块一体成型。
  9. 一种基板加工系统，包括基板搬送装置，所述基板搬送装置包括传送皮带、传动轴和驱动马达，所述驱动马达通过所述传动轴驱动所述传送皮带进行运转，以传送置于所述传送皮带上的玻璃基板，其中，所述基板搬送装置还包括滑轨和推送块，所述滑轨设置在所述传送皮带之间，所述推送块设置在所述滑轨上并且能够在所述玻璃基板的传送方向上移动，所述推送块移动的速度与所述传送皮带运转的速度匹配，以推动所述玻璃基板在所述玻璃基板的传送方向上平移，从而防止所述玻璃基板流歪。
  10. 如权利要求9所述的基板加工系统，其中，所述推送块包括气缸、第一凸块和第二凸块，所述第一凸块与所述气缸的活塞杆相连，所述活塞杆能够带动所述第一凸块在垂直于所述玻璃基板的平面的方向上移动，所述第二凸块设置在所述第一凸块上，所述第一凸块沿着平行于所述玻璃基板的平面的方向延伸，而所述第二凸块沿着垂直于所述玻璃基板的平面的方向延伸。
  11. 如权利要求10所述的基板加工系统，其中，所述滑轨沿着所述玻璃基板的传送方向上延伸。
  12. 如权利要求11所述的基板加工系统，其中，所述滑轨固定连接在所述传送皮带之间，所述推送块能够沿着所述滑轨在所述玻璃基板的传送方向上移动。
  13. 如权利要求11所述的基板加工系统，其中，所述推送块与所述滑轨固定连接，所述滑轨能够在所述玻璃基板的传送方向上移动。
  14. 如权利要求13所述的基板加工系统，其中，所述推送块和所述滑轨的数量均为两个，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动。
  15. 如权利要求14所述的基板加工系统，其中，所述推送块和所述滑轨的数量均为两个，两个所述推送块分别设置在两条所述滑轨上并且能够同步移动。
  16. 如权利要求15所述的基板加工系统，其中，所述第一凸块和所述第二凸块一体成型。
PCT/CN2016/083557 2016-03-17 2016-05-26 基板搬送装置和基板加工系统 WO2017156876A1 (zh)

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