WO2017000320A1 - 喷淋组件以及具有该喷淋组件的湿刻设备 - Google Patents

喷淋组件以及具有该喷淋组件的湿刻设备 Download PDF

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Publication number
WO2017000320A1
WO2017000320A1 PCT/CN2015/083503 CN2015083503W WO2017000320A1 WO 2017000320 A1 WO2017000320 A1 WO 2017000320A1 CN 2015083503 W CN2015083503 W CN 2015083503W WO 2017000320 A1 WO2017000320 A1 WO 2017000320A1
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WO
WIPO (PCT)
Prior art keywords
hole
nozzle
slider
shower
locking member
Prior art date
Application number
PCT/CN2015/083503
Other languages
English (en)
French (fr)
Inventor
李嘉
Original Assignee
深圳市华星光电技术有限公司
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Filing date
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US14/781,137 priority Critical patent/US9892940B2/en
Publication of WO2017000320A1 publication Critical patent/WO2017000320A1/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0278—Arrangement or mounting of spray heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
    • B05B15/65—Mounting arrangements for fluid connection of the spraying apparatus or its outlets to flow conduits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/60—Arrangements for mounting, supporting or holding spraying apparatus
    • B05B15/68—Arrangements for adjusting the position of spray heads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/14—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means with multiple outlet openings; with strainers in or outside the outlet opening
    • B05B1/20—Arrangements of several outlets along elongated bodies, e.g. perforated pipes or troughs, e.g. spray booms; Outlet elements therefor

Definitions

  • the invention relates to the technical field of semiconductor manufacturing processes, in particular to a shower assembly and a wet etching device having the same.
  • TFT-LCD Thin Film Transistor Liquid Crystal Display
  • wet etching process is widely used. With the continuous updating of various processes of liquid crystal panels, TFT array substrates have more types of metal wires. From aluminum processes to copper processes and silver processes, wet etching processes have an important impact on product performance and yield.
  • spray mode the etching solution is sprayed onto the surface of the object to be treated through the shower assembly, and the greater the pressure of the jet, the greater the etching rate.
  • the shower assembly 1 is a schematic view showing the structure of a conventional shower assembly applied to a wet etching apparatus.
  • the shower assembly 1 includes a spray pipe 1a and a plurality of nozzles 1b connected to the bottom of the spray pipe 1a.
  • the plurality of nozzles 1b are arranged at equal intervals, and the nozzle 1b and the spray pipe 1a are welded. The way to fix the connection.
  • the etching solution flows in from the shower pipe 1a, and is then ejected from the nozzle 1b onto the surface of the object to be treated.
  • 2 is an exemplary illustration of a wet engraving apparatus having a shower assembly as described above. As shown in FIG.
  • the wet etching apparatus includes a shower unit 2, and the spray unit 2 includes a plurality of spray assemblies 1 in which a plurality of spray tubes 1a are arranged in parallel and at equal intervals, and are connected to the spray tubes.
  • the nozzles 1b of 1a are distributed in an array.
  • the object to be treated 3 (for example, a glass substrate on which a metal thin film layer is deposited) is transferred from a direction perpendicular to or approximately perpendicular to the length of the shower pipe 1a (X direction) to the lower side of the shower unit 2, from the nozzle 1b to the object to be treated
  • the surface of the 3 is sprayed with an etching solution for etching.
  • the shower unit 2 composed thereof is also single and fixed, when local etching unevenness occurs in the etching process. Only all the shower components 1 in the equipment (including the spray pipe 1a and the nozzle 1b) can be replaced, resulting in an increase in production cost.
  • the present invention provides a shower assembly and a wet etching apparatus having the same, wherein the nozzle in the spray assembly is detachably connected with the spray pipe, and a partial engraving occurs in the etching process.
  • the eccentricity is uneven, the uniformity of the spray can be improved by adjusting the position of the nozzle, which improves the production efficiency and reduces the cost.
  • a spray assembly includes a spray pipe, a bottom of the spray pipe is provided with a plurality of first through holes, and each of the first through holes is equipped with a nozzle mechanism, wherein the nozzle mechanism includes a slider.
  • An area of the slider is larger than an area of the first through hole, the slider is disposed in the shower tube and covers the first through hole; and a nozzle is connected to the slider Extending from the first through hole, the nozzle is in fluid communication with the spray pipe; the nozzle mechanism further includes a locking member connecting the slider to the spray pipe, when the lock The slider is fixedly coupled to the spray pipe when the tight member is locked; when the lock member is released, the slider is movable in a horizontal plane to adjust the nozzle at the first The position in the through hole.
  • a side of the slider facing the first through hole is provided with a card slot, and an edge of the first through hole is provided with a card point protruding toward the slider, and the card point is assembled on the In the card slot.
  • the slider is provided with a second through hole, and the nozzle is detachably connected to the second through hole.
  • the second through hole is a threaded hole
  • the nozzle has a first threaded portion adapted to the threaded hole, by fitting the first threaded portion to the threaded hole, so that the nozzle can be Removably connected to the second through hole.
  • the locking member is a thread locking member
  • the thread locking member comprises a bolt and a threaded through hole or a threaded blind hole disposed on the sliding block, and the bolt is assembled through the first through hole In the threaded through hole or the threaded blind hole, the width of the head of the bolt is larger than the width of the first through hole.
  • the locking member is a thread locking member
  • the thread locking member comprises a bolt and a nut
  • the slider is provided with a third through hole
  • the bolt sequentially passes through the third through hole and
  • the first through hole cooperates with the nut
  • the width of the nut is greater than the width of the first through hole
  • the number of the thread locking members is at least two, respectively located on opposite sides of the nozzle.
  • the plurality of first through holes are arranged at equal intervals on the bottom of the shower pipe.
  • the present invention also provides a wet etching apparatus including a shower unit, wherein the shower unit includes In the plurality of shower assemblies as described above, the plurality of spray tubes of the plurality of spray assemblies are arranged parallel to each other or nearly parallel to each other.
  • the nozzles of the odd number of spray assemblies are located closer to the first end of the first through hole, and the even number of sprays The nozzle in the shower assembly is located closer to the second end of the first through hole opposite the first end.
  • the spray assembly provided by the embodiment of the invention and the wet etching device having the spray assembly, wherein the nozzle in the spray assembly is detachably connected with the spray pipe, when local etching unevenness occurs in the etching process
  • the connection position of the nozzle By adjusting the connection position of the nozzle, the uniformity of the spray can be improved, the production efficiency is improved, and the cost is reduced.
  • FIG. 1 is a schematic view showing the structure of a conventional shower assembly applied to a wet etching apparatus.
  • FIG. 2 is an exemplary illustration of a wet engraving apparatus having a shower assembly as shown in FIG. 1.
  • FIG. 3 is a schematic structural view of a shower assembly according to an embodiment of the present invention.
  • FIG. 4 is a schematic view showing the connection structure of a nozzle mechanism and a spray pipe in the embodiment of the present invention.
  • Figure 5 is an exploded perspective view of the connection structure shown in Figure 4.
  • Figure 6 is a bottom plan view of the connection structure shown in Figure 4.
  • Fig. 7 is a schematic view showing the connection structure of a nozzle mechanism and a shower pipe in another embodiment.
  • Figure 8 is a bottom plan view of the connection structure shown in Figure 7.
  • Figure 9 is an exemplary illustration of a wet engraving apparatus having a shower assembly as shown in Figure 3.
  • FIG. 10 is an exemplary illustration of different assembly manners of a shower assembly provided by an embodiment of the present invention.
  • FIG 11 is an exemplary illustration of a wet engraving apparatus having a shower assembly as shown in Figure 10.
  • the spray assembly 1 includes a spray pipe 10, and a plurality of first through holes 11 are opened at the bottom of the spray pipe 10, each first A nozzle mechanism 12 is fitted in the through hole 11.
  • the nozzle mechanism 12 includes a slider 121 having an area larger than an area of the first through hole 11.
  • the slider 121 is disposed in the shower tube 10 and covers the On the first through hole 11.
  • a nozzle 122 is connected to the slider 121, and the nozzle 122 protrudes from the first through hole 11.
  • the nozzle 122 is in fluid communication with the shower pipe 1.
  • the nozzle mechanism 12 further includes a locking member 123 that connects the slider 121 to the shower tube 10, and when the locking member 123 is locked, the slider 121 is fixedly connected to the shower On the tube 10; when the locking member 123 is released, the slider 121 is movable in a horizontal plane to adjust the position of the nozzle 122 in the first through hole 11. Further, the plurality of first through holes 11 are arranged at equal intervals on the bottom of the shower pipe 10.
  • the first pass is made on the slider 121.
  • One side of the hole 11 is provided with a card slot 1211, and an edge of the first through hole 11 is provided with a card point 111 protruding toward the slider 121, and the card point 111 is fitted in the card slot 1211.
  • the width of the card slot 1211 in the lateral and longitudinal directions should be several times larger than the width of the card point 111.
  • the size of the movement range of the slider 121 can be realized according to the size of the adjustment slider 121, the first through hole 11, the card slot 1211, and the card point 111, and is not specifically limited herein.
  • the slider 121 is provided with a second through hole 1212 , and the nozzle 122 is detachably connected to the second through hole 1212 .
  • the second through hole 1212 is a threaded hole
  • the nozzle 122 has a first threaded portion 1221 adapted to the threaded hole, by fitting the first threaded portion 1221 to the threaded hole.
  • the nozzle 122 is detachably connected to the second through hole 1212, and a joint portion of the nozzle 122 and the second through hole 1212 can be added with a sealing structure such as a sealing ring to prevent the spray pipe.
  • the liquid in 10 oozes out.
  • the nozzle 122 can also be fixedly connected to the slider 121 by welding or integral molding to move with the sliding of the slider 121. This fixed connection can effectively prevent the spray pipe. The liquid in 10 oozes out.
  • FIG. 6 is the elevation of the connection structure between the sprayer structure and the spray pipe.
  • FIG. 4 is a cross-sectional view taken along line AA of the connecting structure shown in FIG. 6, and
  • FIG. 5 is an exploded perspective view of the connecting structure shown in FIG.
  • the locking member 123 is a threaded locking member 123a.
  • the threaded locking member 123a includes a bolt 1231 and a nut 1233.
  • the slider 121 is provided with a third through hole 1213.
  • the bolt 1231 is sequentially engaged with the nut 1233 through the third through hole 1213 and the first through hole 11.
  • the width of the nut 1233 is larger than the width of the first through hole 11.
  • the slider 121 can be moved; after the slider 121 is moved to the desired position, the bolt 1231 and the nut 1233 are tightened, and the slider 121 is fastened to the spray.
  • the number of the thread locking members 123a is two, which are respectively located on opposite sides of the nozzle 122. In other embodiments, more threaded locking members 123a may be provided.
  • Figure 8 is a bottom view of the connection structure of the sprayer structure and the spray pipe in the embodiment
  • Figure 7 Is a cross-sectional view along the line BB in the connecting structure shown in FIG. 8
  • the thread locking member 123a includes a bolt 1231 and a threaded through hole or a threaded blind hole 1232 provided in the slider 121 (as shown in FIG. 7). Displayed as a through hole, the bolt 1231 is fitted into the threaded through hole or the threaded blind hole 1232 through the first through hole 11 , and the width of the head 1234 of the bolt 1231 is larger than the first through hole The width of 11.
  • the wet etching apparatus includes at least one shower unit 400, the shower unit 400 including a plurality of shower assemblies 1 as provided above,
  • the plurality of shower tubes 10 of the plurality of shower assemblies 1 are arranged parallel to each other or nearly parallel to each other.
  • a plurality of nozzles 122 are arranged in an array.
  • the nozzles 122 in each of the shower assemblies 1 are located at the same position in the first through hole 11, and the plurality of nozzles 122 are distributed in a square array, which may cause The spray between the two rows of nozzles is not uniform enough.
  • the spray assembly 1 is divided into a first type of spray assembly 1c and a second type of spray assembly 1d.
  • first type of shower assembly 1c the position of the nozzle 122 in the first through hole 11 is closer to the first end 11a of the first through hole 11.
  • second type of shower assembly 1d the position of the nozzle 122 in the first through hole 11 is closer to the second end 11b of the first through hole 11.
  • the closer meaning is It is understood from the perspective of the relative relationship between the first type of shower assembly 1c and the second type of shower assembly 1d.
  • the first type of shower assembly 1c and the second type of shower assembly 1d differ only in the position in which the nozzles 122 are arranged differently. Applying the first type of shower assembly 1c and the second type of shower assembly 1d to the wet etching apparatus, as shown in FIG. 11, the first type of spray is alternately arranged in the shower unit 400 in the wet etching apparatus.
  • the assembly 1c and the second type of shower assembly 1d are the first type of shower assembly 1c on odd rows and the second type shower assembly 1d on even rows.
  • a plurality of nozzles 122 are arranged in an array, with the longitudinal direction of the shower tube 10 as a row, perpendicular to the longitudinal direction of the shower tube 10, and the adjacent rows of nozzles 122 are interlaced. So that the nozzles 122 of adjacent rows (between the first type of shower assembly 1c and the second type of shower assembly 1d) are located on different columns, one row apart (two first type shower assemblies 1c and two second The nozzles 20 between the spray-like assemblies 1d are located on the same column.
  • the nozzles of adjacent rows are mutually staggered, which improves the uniformity of the spray and is advantageous for improving the quality of the etching process.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Weting (AREA)
  • Nozzles (AREA)

Abstract

一种喷淋组件（1），包括喷淋管（10），所述喷淋管的底部开设有多个第一通孔（11），每一第一通孔中装配有一喷嘴机构（12），其中，所述喷嘴机构包括一滑块（121），所述滑块的面积大于所述第一通孔的面积，所述滑块设置于所述喷淋管内并覆盖于所述第一通孔上；所述滑块上连接有一喷嘴（122），所述喷嘴从所述第一通孔中伸出；所述喷嘴机构还包括将所述滑块连接到所述喷淋管的锁紧件（123），当所述锁紧件松开时，所述滑块可在水平面内移动，以调整所述喷嘴在所述第一通孔中的位置。一种湿刻设备，包括喷淋单元（400），所述喷淋单元包括多个如上所述的喷淋组件（1），多个喷淋组件中的多个喷淋管相互平行地或近于相互平行地排列。所述喷淋组件以及具有该喷淋组件的湿刻设备中，喷淋组件中的喷嘴与喷淋管之间可拆卸地连接，当刻蚀工艺中出现局部刻蚀不均匀时，通过调整喷嘴的连接位置即可提高喷淋的均一性，提高了生产效率，降低了成本。

Description

喷淋组件以及具有该喷淋组件的湿刻设备 技术领域
本发明涉及半导体制作工艺技术领域，尤其是一种喷淋组件以及具有该喷淋组件的湿刻设备。
背景技术
在制造薄膜晶体管液晶显示器(Thin Film Transistor Liquid Crystal Display，TFT-LCD)的工艺过程中，湿刻工艺的应用十分广泛。随着液晶面板各种制程的不断更新换代，TFT阵列基板的金属线种类也更多，从铝制程到铜制程、银制程，湿刻工艺对产品的性能和良率有着重要的影响。湿刻设备的刻蚀方式主要有两种：浸泡模式和喷淋模式；浸泡模式刻蚀图形的过程容易控制，喷淋模式的刻蚀速率较快。喷淋模式中，刻蚀药液通过喷淋组件喷射到待处理物的表面上，喷射的压力越大，则刻蚀速率也越大。
图1是现有的一种应用于湿刻设备中的喷淋组件的结构示意图。如图1所示，该喷淋组件1包括一喷淋管1a以及连接于喷淋管1a底部的多个喷嘴1b，多个喷嘴1b呈等间距排列，喷嘴1b与喷淋管1a是通过焊接的方式固定连接。刻蚀药液从喷淋管1a中流入，然后从喷嘴1b喷射到待处理物的表面上。图2是具有如上所述喷淋组件的湿刻设备的示例性图示。如图2所示，该湿刻设备包括喷淋单元2，喷淋单元2中包含多个喷淋组件1，其中的多个喷淋管1a呈相互平行且等间距排列，连接于喷淋管1a的喷嘴1b呈阵列分布。待处理物3(例如沉积有金属薄膜层的玻璃基板)从垂直于或近似垂直于喷淋管1a长度的方向(X方向)被传送到该喷淋单元2下方，由喷嘴1b向待处理物3的表面喷射刻蚀药液进行刻蚀。
在如上结构的湿刻设备中，其中喷嘴1b与喷淋管1a是通过焊接的方式固定连接，其所组成的喷淋单元2也是单一和固定，当刻蚀工艺中出现局部刻蚀不均匀时，只能更换该设备中的所有喷淋组件1(包括喷淋管1a和喷嘴1b)，导致生产成本增加。
发明内容
有鉴于此，本发明提供了一种喷淋组件以及具有该喷淋组件的湿刻设备，其中喷淋组件中的喷嘴与喷淋管之间可拆卸地连接，当刻蚀工艺中出现局部刻蚀不均匀时，通过调整喷嘴的位置即可提高喷淋的均一性，提高了生产效率，降低了成本。
为了达到上述目的，本发明采用了如下技术方案：
一种喷淋组件，包括喷淋管，所述喷淋管的底部开设有多个第一通孔，每一第一通孔中装配有一喷嘴机构，其中，所述喷嘴机构包括一滑块，所述滑块的面积大于所述第一通孔的面积，所述滑块设置于所述喷淋管内并覆盖于所述第一通孔上；所述滑块上连接有一喷嘴，所述喷嘴从所述第一通孔中伸出，所述喷嘴与所述喷淋管流体连通；所述喷嘴机构还包括将所述滑块连接到所述喷淋管的锁紧件，当所述锁紧件锁紧时，所述滑块固定连接到所述喷淋管上；当所述锁紧件松开时，所述滑块可在水平面内移动，以调整所述喷嘴在所述第一通孔中的位置。
其中，所述滑块上朝向所述第一通孔的一侧设置有卡槽，所述第一通孔的边缘设置朝向所述滑块凸起的卡点，所述卡点装配于所述卡槽中。
其中，所述滑块上设置有第二通孔，所述喷嘴可拆卸地连接于所述第二通孔。
其中，所述第二通孔为螺纹孔，所述喷嘴具有与所述螺纹孔适配的第一螺纹部，通过将所述第一螺纹部装配于所述螺纹孔，以使所述喷嘴可拆卸地连接于所述第二通孔中。
其中，所述锁紧件为螺纹锁紧件，所述螺纹锁紧件包括螺栓以及设置于所述滑块上的螺纹通孔或螺纹盲孔，所述螺栓穿过所述第一通孔装配于所述螺纹通孔或螺纹盲孔中，所述螺栓的头部的宽度大于所述第一通孔的宽度。
其中，所述锁紧件为螺纹锁紧件，所述螺纹锁紧件包括一螺栓和一螺帽，所述滑块上设置有第三通孔，所述螺栓依次穿过第三通孔和第一通孔与所述螺帽配合，所述螺帽的宽度大于所述第一通孔的宽度。
其中，所述螺纹锁紧件的数量为至少两个，分别位于所述喷嘴的相对两侧。
其中，所述多个第一通孔等间距地排布于所述喷淋管的底部。
本发明还提供了一种湿刻设备，包括喷淋单元，其中，所述喷淋单元包括 多个如上所述的喷淋组件，多个喷淋组件中的多个喷淋管相互平行地或近于相互平行地排列。
其中，对于所述喷淋单元的多个喷淋组件中，按照喷淋组件的排列方向，第奇数个喷淋组件中的喷嘴位于更接近于第一通孔的第一端，第偶数个喷淋组件中的喷嘴位于更接近于第一通孔的与第一端相对的第二端。
有益效果：
本发明实施例提供的喷淋组件以及具有该喷淋组件的湿刻设备，其中喷淋组件中的喷嘴与喷淋管之间可拆卸地连接，当刻蚀工艺中出现局部刻蚀不均匀时，通过调整喷嘴的连接位置即可提高喷淋的均一性，提高了生产效率，降低了成本。
附图说明
图1是现有的一种应用于湿刻设备中的喷淋组件的结构示意图。
图2是具有如图1所示的喷淋组件的湿刻设备的示例性图示。
图3是本发明实施例提供的喷淋组件的结构示意图。
图4是本发明实施例中的喷嘴机构与喷淋管的连接结构示意图。
图5是如图4所示的连接结构的分解示意图。
图6是如图4所示的连接结构仰视图。
图7是另一实施例中的喷嘴机构与喷淋管的连接结构示意图。
图8是如图7所示的连接结构仰视图。
图9是具有如图3所示的喷淋组件的湿刻设备的示例性图示。
图10是本发明实施例提供的喷淋组件的不同组装方式的示例性图示。
图11是具有如图10所示的喷淋组件的湿刻设备的示例性图示。
具体实施方式
下面将结合附图以及具体实施例，对本发明实施例中的技术方案进行详细地描述，显然，所描述的实施例仅仅是本发明一部分实例，而不是全部实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动的前提下 所获得的所有其他实施例，都属于本发明保护范围。
本实施例首先提供了一种喷淋组件，参阅附图3，该喷淋组件1包括喷淋管10，所述喷淋管10的底部开设有多个第一通孔11，每一第一通孔11中装配有一喷嘴机构12。其中，所述喷嘴机构12包括一滑块121，所述滑块121的面积大于所述第一通孔11的面积，所述滑块121设置于所述喷淋管10内并覆盖于所述第一通孔11上。所述滑块121上连接有一喷嘴122，所述喷嘴122从所述第一通孔11中伸出，所述喷嘴122与所述喷淋管1流体连通。所述喷嘴机构12还包括将所述滑块121连接到所述喷淋管10的锁紧件123，当所述锁紧件123锁紧时，所述滑块121固定连接到所述喷淋管10上；当所述锁紧件123松开时，所述滑块121可在水平面内移动，以调整所述喷嘴122在所述第一通孔11中的位置。进一步地，所述多个第一通孔11等间距地排布于所述喷淋管10的底部。
具体地，参阅图4，为了防止滑块121在水平面内移动的范围过大(有可能未完全覆盖第一通孔11导致药液泄漏)，在所述滑块121上朝向所述第一通孔11的一侧设置有卡槽1211，所述第一通孔11的边缘设置朝向所述滑块121凸起的卡点111，所述卡点111装配于所述卡槽1211中。设置卡点111和卡槽1211后，滑块121在水平面内的移动受到卡点111阻挡，滑块121的边缘不可移入到第一通孔11中。为了使滑块121能够具有较大的移动范围，卡槽1211在横向和纵向上的宽度应数倍大于卡点111的宽度。
值得说明的是,滑块121的移动范围的大小,可以根据调整滑块121、第一通孔11、卡槽1211以及卡点111的尺寸来实现，在此不作具体限定。
具体地，参阅图4和图5，所述滑块121上设置有第二通孔1212，所述喷嘴122可拆卸地连接于所述第二通孔1212。本实施例中，所述第二通孔1212为螺纹孔，所述喷嘴122具有与所述螺纹孔适配的第一螺纹部1221，通过将所述第一螺纹部1221装配于所述螺纹孔，以使所述喷嘴122可拆卸地连接于所述第二通孔1212中，且所述喷嘴122与所述第二通孔1212的连接部位可以增加密封圈等密封结构，以防止喷淋管10内的液体渗出。
可以理解的是，所述喷嘴122还可以通过焊接或一体成型等其他方式与滑块121固定连接，以随着滑块121的滑动而移动，这种固定连接的方式更能有效防止喷淋管10内的液体渗出。
具体地，参阅图4至图6，其中，图6是喷机结构与喷淋管的连接结构的仰 视图，图4是如图6所示的连接结构中沿AA线的剖面图，图5是如图4所示的连接结构的分解示意图。本实施例中，所述锁紧件123为螺纹锁紧件123a，所述螺纹锁紧件123a包括一螺栓1231和一螺帽1233，所述滑块121上设置有第三通孔1213，所述螺栓1231依次穿过第三通孔1213和第一通孔11与所述螺帽1233配合，如图6所示，所述螺帽1233的宽度大于所述第一通孔11的宽度。松开所述螺栓1231和螺帽1233时，滑块121可移动；在将滑块121移动至所需要的位置之后，拧紧所述螺栓1231和螺帽1233，将滑块121紧固连接到喷淋管10的底部上。更具体地，本实施例中，所述螺纹锁紧件123a的数量为2个，分别位于所述喷嘴122的相对两侧。在另外的实施例中，也可以设置有更多个的螺纹锁紧件123a。
关于螺纹锁紧件123a，在另外的一些实施例中也可以是这样设置，参阅图7和图8，图8是该实施例中喷机结构与喷淋管的连接结构的仰视图，图7是如图8所示的连接结构中沿BB线的剖面图，所述螺纹锁紧件123a包括螺栓1231以及设置于所述滑块121上的螺纹通孔或螺纹盲孔1232(如图7中显示为通孔)，所述螺栓1231穿过所述第一通孔11装配于所述螺纹通孔或螺纹盲孔1232中，所述螺栓1231的头部1234的宽度大于所述第一通孔11的宽度。
将如上所提供的喷淋组件1应用于湿刻设备中，参阅附图9，该湿刻设备至少包括一喷淋单元400，所述喷淋单元400包括多个如前述提供喷淋组件1，多个喷淋组件1中的多个喷淋管10相互平行地或近于相互平行地排列。如图9所示的，所述喷淋单元400中，多个喷嘴122呈阵列分布。
如上提供的湿刻设备中，其中喷淋组件中的喷嘴与喷淋管之间可拆卸地连接，当刻蚀工艺中出现局部刻蚀不均匀时或者喷淋单元中的某部分喷嘴损坏时，只需要更换局部的喷嘴即可。
进一步地，在如图9所示的喷淋单元400，每一个喷淋组件1中的喷嘴122均位于第一通孔11中相同的位置，多个喷嘴122呈方形阵列分布，这样可能会使两列喷嘴之间的喷淋不够均匀。
为了提高喷淋的均一性，参阅附图10和图11，在另外一个优选的实施例中，将喷淋组件1分为第一类喷淋组件1c和第二类喷淋组件1d。具体地，如图10所示的，第一类喷淋组件1c中，喷嘴122位于第一通孔11中的位置更接近于第一通孔11的第一端11a。而第二类喷淋组件1d中，喷嘴122位于第一通孔11中的位置更接近于第一通孔11的第二端11b。在此，其中的更接近的含义是 从第一类喷淋组件1c和第二类喷淋组件1d相对比的角度来理解。第一类喷淋组件1c和第二类喷淋组件1d差别仅在于其中喷嘴122排布的位置有所不同。将第一类喷淋组件1c和第二类喷淋组件1d应用于湿刻设备中，如图11所示的，该湿刻设备中的喷淋单元400中，交错地排列第一类喷淋组件1c和第二类喷淋组件1d，例如，本实施例中，奇数行上为第一类喷淋组件1c，偶数行上为第二类喷淋组件1d。最终得到的喷淋单元400中，多个喷嘴122呈阵列分布，以喷淋管10的长度方向为行，以垂直于喷淋管10的长度方向为列，相邻行的喷嘴122相互交错，以使相邻行(第一类喷淋组件1c和第二类喷淋组件1d之间)的喷嘴122位于不同的列上，间隔一行(两个第一类喷淋组件1c以及两个第二类喷淋组件1d之间)的喷嘴20位于相同的列上。
如上提供的喷淋单元中，相邻行的喷嘴相互交错，提高了喷淋的均一性，有利于提高刻蚀工艺的品质。
需要说明的是，在本文中，诸如第一和第二等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来，而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且，术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含，从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素，而且还包括没有明确列出的其他要素，或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下，由语句“包括一个……”限定的要素，并不排除在包括所述要素的过程、方法、物品或者设备中还存在另外的相同要素。
显然，本发明的保护范围并不局限于上诉的具体实施方式，本领域的技术人员可以对发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包含这些改动和变型在内。

Claims (19)

  1. 一种喷淋组件，包括喷淋管，其中，所述喷淋管的底部开设有多个第一通孔，每一第一通孔中装配有一喷嘴机构，其中，
    所述喷嘴机构包括一滑块，所述滑块的面积大于所述第一通孔的面积，所述滑块设置于所述喷淋管内并覆盖于所述第一通孔上；所述滑块上连接有一喷嘴，所述喷嘴从所述第一通孔中伸出，所述喷嘴与所述喷淋管流体连通；
    所述喷嘴机构还包括将所述滑块连接到所述喷淋管的锁紧件，当所述锁紧件锁紧时，所述滑块固定连接到所述喷淋管上；当所述锁紧件松开时，所述滑块可在水平面内移动，以调整所述喷嘴在所述第一通孔中的位置。
  2. 根据权利要求1所述的喷淋组件，其中，所述滑块上朝向所述第一通孔的一侧设置有卡槽，所述第一通孔的边缘设置朝向所述滑块凸起的卡点，所述卡点装配于所述卡槽中。
  3. 根据权利要求1所述的喷淋组件，其中，所述滑块上设置有第二通孔，所述喷嘴可拆卸地连接于所述第二通孔。
  4. 根据权利要求3所述的喷淋组件，其中，所述第二通孔为螺纹孔，所述喷嘴具有与所述螺纹孔适配的第一螺纹部，通过将所述第一螺纹部装配于所述螺纹孔，以使所述喷嘴可拆卸地连接于所述第二通孔中。
  5. 根据权利要求1所述的喷淋组件，其中，所述锁紧件为螺纹锁紧件，所述螺纹锁紧件包括螺栓以及设置于所述滑块上的螺纹通孔或螺纹盲孔，所述螺栓穿过所述第一通孔装配于所述螺纹通孔或螺纹盲孔中，所述螺栓的头部的宽度大于所述第一通孔的宽度。
  6. 根据权利要求5所述的喷淋组件，其中，所述螺纹锁紧件的数量为至少两个，分别位于所述喷嘴的相对两侧。
  7. 根据权利要求1所述的喷淋组件，其中，所述锁紧件为螺纹锁紧件，所述螺纹锁紧件包括一螺栓和一螺帽，所述滑块上设置有第三通孔，所述螺栓依次穿过第三通孔和第一通孔与所述螺帽配合，所述螺帽的宽度大于所述第一通孔的宽度。
  8. 根据权利要求7所述的喷淋组件，其中，所述螺纹锁紧件的数量为至少 两个，分别位于所述喷嘴的相对两侧。
  9. 根据权利要求1所述的喷淋组件，其中，所述多个第一通孔等间距地排布于所述喷淋管的底部。
  10. 一种湿刻设备，包括喷淋单元，其中，所述喷淋单元包括多个喷淋组件，所述喷淋组件包括喷淋管，所述喷淋管的底部开设有多个第一通孔，每一第一通孔中装配有一喷嘴机构，其中，
    所述喷嘴机构包括一滑块，所述滑块的面积大于所述第一通孔的面积，所述滑块设置于所述喷淋管内并覆盖于所述第一通孔上；所述滑块上连接有一喷嘴，所述喷嘴从所述第一通孔中伸出，所述喷嘴与所述喷淋管流体连通；
    所述喷嘴机构还包括将所述滑块连接到所述喷淋管的锁紧件，当所述锁紧件锁紧时，所述滑块固定连接到所述喷淋管上；当所述锁紧件松开时，所述滑块可在水平面内移动，以调整所述喷嘴在所述第一通孔中的位置；
    其中，多个喷淋组件中的多个喷淋管相互平行地或近于相互平行地排列。
  11. 根据权利要求10所述的湿刻设备，其中，所述滑块上朝向所述第一通孔的一侧设置有卡槽，所述第一通孔的边缘设置朝向所述滑块凸起的卡点，所述卡点装配于所述卡槽中。
  12. 根据权利要求10所述的湿刻设备，其中，所述滑块上设置有第二通孔，所述喷嘴可拆卸地连接于所述第二通孔。
  13. 根据权利要求12所述的湿刻设备，其中，所述第二通孔为螺纹孔，所述喷嘴具有与所述螺纹孔适配的第一螺纹部，通过将所述第一螺纹部装配于所述螺纹孔，以使所述喷嘴可拆卸地连接于所述第二通孔中。
  14. 根据权利要求10所述的湿刻设备，其中，所述锁紧件为螺纹锁紧件，所述螺纹锁紧件包括螺栓以及设置于所述滑块上的螺纹通孔或螺纹盲孔，所述螺栓穿过所述第一通孔装配于所述螺纹通孔或螺纹盲孔中，所述螺栓的头部的宽度大于所述第一通孔的宽度。
  15. 根据权利要求14所述的湿刻设备，其中，所述螺纹锁紧件的数量为至少两个，分别位于所述喷嘴的相对两侧。
  16. 根据权利要求10所述的湿刻设备，其中，所述锁紧件为螺纹锁紧件， 所述螺纹锁紧件包括一螺栓和一螺帽，所述滑块上设置有第三通孔，所述螺栓依次穿过第三通孔和第一通孔与所述螺帽配合，所述螺帽的宽度大于所述第一通孔的宽度。
  17. 根据权利要求16所述的湿刻设备，其中，所述螺纹锁紧件的数量为至少两个，分别位于所述喷嘴的相对两侧。
  18. 根据权利要求10所述的湿刻设备，其中，所述多个第一通孔等间距地排布于所述喷淋管的底部。
  19. 根据权利要求10所述的湿刻设备，其特征在于，对于所述喷淋单元的多个喷淋组件中，按照喷淋组件的排列方向，第奇数个喷淋组件中的喷嘴位于更接近于第一通孔的第一端，第偶数个喷淋组件中的喷嘴位于更接近于第一通孔的与第一端相对的第二端。
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