CN104808446B - 一种涂布机 - Google Patents

一种涂布机 Download PDF

Info

Publication number
CN104808446B
CN104808446B CN201510230284.8A CN201510230284A CN104808446B CN 104808446 B CN104808446 B CN 104808446B CN 201510230284 A CN201510230284 A CN 201510230284A CN 104808446 B CN104808446 B CN 104808446B
Authority
CN
China
Prior art keywords
nozzles
nozzle
coating
moving member
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201510230284.8A
Other languages
English (en)
Other versions
CN104808446A (zh
Inventor
李坤
张磊
罗祝义
胡瑾
张畅
吴斌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
Original Assignee
BOE Technology Group Co Ltd
Hefei BOE Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOE Technology Group Co Ltd, Hefei BOE Optoelectronics Technology Co Ltd filed Critical BOE Technology Group Co Ltd
Priority to CN201510230284.8A priority Critical patent/CN104808446B/zh
Publication of CN104808446A publication Critical patent/CN104808446A/zh
Priority to US15/137,807 priority patent/US10207284B2/en
Application granted granted Critical
Publication of CN104808446B publication Critical patent/CN104808446B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B13/00Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
    • B05B13/02Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
    • B05B13/0278Arrangement or mounting of spray heads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • B05C5/0258Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C17/00Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces
    • B05C17/005Hand tools or apparatus using hand held tools, for applying liquids or other fluent materials to, for spreading applied liquids or other fluent materials on, or for partially removing applied liquids or other fluent materials from, surfaces for discharging material from a reservoir or container located in or on the hand tool through an outlet orifice by pressure without using surface contacting members like pads or brushes
    • B05C17/00503Details of the outlet element
    • B05C17/00506Means for connecting the outlet element to, or for disconnecting it from, the hand tool or its container
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B05C5/0275Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve
    • B05C5/0279Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated flow controlled, e.g. by a valve independently, e.g. individually, flow controlled

Abstract

本发明公开了一种涂布机,涉及机械设备技术领域,为解决现有技术中涂布机涂布的均一性低,喷嘴更换、维护不便,更换成本高的问题。该涂布机包括移动件、喷嘴和泵,所述喷嘴为多个,多个所述喷嘴沿所述移动件的长度方向依次设置,所述泵用于向多个所述喷嘴内泵入涂布剂,所述移动件可带动多个所述喷嘴移动,随着所述喷嘴的移动,所述喷嘴可将所述涂布剂涂布于基板上。本发明公开的一种涂布机用于将涂布剂涂布于基板上。

Description

一种涂布机
技术领域
本发明涉及机械设备技术领域,尤其涉及一种涂布机。
背景技术
涂布机是薄膜场效应晶体管液晶显示器在涂布工艺中的关键设备,用于将涂布剂涂布于液晶显示器的玻璃基板上。
现有的涂布机包括移动件,喷嘴和泵,所述泵用于向所述喷嘴内泵入涂布剂,所述移动件可带动所述喷嘴移动,随着所述喷嘴的移动,所述喷嘴可将所述涂布剂涂布于基板上。
随着基板尺寸的增大,需要的喷嘴的长度也相应增长,喷嘴的长度过长会导致泵入喷嘴内的涂布剂分布不均匀,使涂布的均一性降低,另外,当喷嘴损坏或出现堵塞、划伤等异常情况时,喷嘴更换、维护不便,而且更换成本的较高。
发明内容
本发明的实施例提供一种涂布机,解决现有技术中涂布机涂布的均一性低,喷嘴更换、维护不便,更换成本高的问题。
为达到上述目的,本发明的实施例采用如下技术方案:
本发明实施例提供了一种涂布机,包括移动件、喷嘴和泵,所述喷嘴为多个,多个所述喷嘴沿所述移动件的长度方向依次设置,所述泵用于向多个所述喷嘴内泵入涂布剂,所述移动件可带动多个所述喷嘴移动,随着所述喷嘴的移动,所述喷嘴可将所述涂布剂涂布于基板上。
优选地,所述泵为多个,多个所述泵和多个所述喷嘴一一对应连通。
进一步地,还包括储料容器和分流阀,所述分流阀的入口和所述储料容器连通,所述分流阀的多个出口分别和多个所述泵的入口一一对应连通。
可选地,所述移动件上设有多个过孔,每个所述过孔内均设有一个螺栓,多个所述喷嘴上均设有螺纹孔,多个所述螺栓分别穿过相应的过孔和多个所述喷嘴上的螺纹孔配合连接。
优选地,所述过孔为长孔,所述长孔的长度方向平行于所述移动件的长度方向。
进一步地,多个所述长孔沿所述移动件的移动方向排列为两排,多个所述喷嘴上的螺纹孔与所述长孔一一对应,多个所述螺栓穿过两排所述长孔和多个喷嘴上相应的螺纹孔配合连接。
可选地,多个所述喷嘴与所述移动件长度方向平行的侧面均设有一个入口,每个所述入口均和所述泵的出口连通。
可选地,所述泵为PT泵。
可选地,所述喷嘴包括喷嘴头,所述喷嘴头的材料为超硬合金。
可选地,所述涂布剂为光刻胶。
本发明实施例提供的一种涂布机,由于多个喷嘴沿所述移动件的长度方向依次设置,所述泵用于向多个所述喷嘴内泵入涂布剂,从而缩短了喷嘴的长度,使泵入单个喷嘴内的涂布剂分布更均匀,进而提高了涂布的均一性;另外,当任意一个喷嘴损坏或出现堵塞、划伤等异常情况时,只需将相应的喷嘴进行更换或维护,由于单个喷嘴的长度较短,不仅使更换和维护更方便,还降低了更换成本。
附图说明
图1为本发明实施例涂布机的结构示意图;
图2为本发明实施例中移动件的俯视图;
图3为本发明实施例中移动件和喷嘴的爆炸图;
附图标记:
1-移动件; 11-过孔; 2-喷嘴;
21-螺纹孔; 22-入口; 23-喷嘴头;
3-泵; 4-储料容器; 5-分流阀;
6-螺栓; 7-基板。
具体实施方式
下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。
在本发明的描述中,需要说明的是,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。
在本发明的描述中,除非另有说明,“多个”的含义是两个或两个以上。
本发明实施例提供了一种涂布机,用于涂布涂布剂,如图1所示,包括移动件1、喷嘴2和泵3,喷嘴2为多个,多个喷嘴2沿移动件1的长度方向依次设置,泵3用于向多个喷嘴2内泵入涂布剂,移动件1可带动多个喷嘴2移动,随着喷嘴2的移动,喷嘴2可将所述涂布剂涂布于基板7上。
本发明实施例提供的一种涂布机,由于多个喷嘴2沿移动件1的长度方向依次设置,泵3用于向多个喷嘴2内泵入涂布剂,从而缩短了喷嘴2的长度,使泵入单个喷嘴2内的涂布剂分布更均匀,进而提高了涂布的均一性;另外,当任意一个喷嘴2损坏或出现堵塞、划伤等异常情况时,只需将相应的喷嘴2进行更换或维护,由于单个喷嘴2的长度较短,不仅使更换和维护更方便,还降低了更换成本。
在上述实施例的基础上,参照图1,泵3为多个,多个泵3和多个喷嘴2一一对应连通,即每个喷嘴2单独使用一个泵3来控制泵入的涂布剂的量,从而便于分别对各个喷嘴2内泵入的涂布剂的量进行调节,进一步提高了涂布的均一性。
为了使涂布机的结构更加紧凑,如图1所示,本实施例中的涂布机还包括储料容器4和分流阀5,分流阀5的入口和储料容器4连通,分流阀5的多个出口分别和多个泵3的入口一一对应连通,从储料容器4内流出的涂布剂通过一条管路流入分流阀5的入口,再分别通过分流阀5的多个出口流入相应的泵3,从而减少了多个泵3与储料容器4之间的连接管路,使涂布机的结构更加紧凑。
移动件1和喷嘴2可通过螺栓6连接,参照图2和图3,移动件1上设有多个过孔11,每个过孔11内均设有一个螺栓6,多个喷嘴2上均设有螺纹孔21,多个螺栓6分别穿过相应的过孔11和多个喷嘴2上的螺纹孔21配合连接,从而使移动件1和喷嘴2的连接更可靠,当喷嘴2损坏或出现堵塞、划伤等异常情况时也方便拆卸。
为了减少涂布剂的浪费,本发明实施例中过孔11为长孔,所述长孔的长度方向平行于移动件1的长度方向,由此,当基板7沿移动件1的移动方存在不需要涂布的区域时,可将螺栓6拧松后,使螺栓6带动喷嘴2沿长孔的长度方向平移,图2中箭头所示为螺栓6的移动方向,图3中箭头所示为喷嘴2的移动方向,从而使喷嘴2避开不需要涂布的区域,进而减少了涂布剂的浪费,降低了成本。
进一步的,为了提高喷嘴2和移动件1连接的稳定性,参照图2,多个所述长孔沿移动件1的移动方向排列为两排,多个喷嘴2上的螺纹孔21与长孔一一对应,多个螺栓6穿过两排长孔和多个喷嘴2上相应的螺纹孔21配合连接,从而提高了喷嘴2和移动件1连接的稳定性。
泵3的出口和多个喷嘴2的入口22均连通,通过多个入口22向相应的喷嘴2内泵入涂布剂,喷嘴2的入口22可设置于喷嘴2的顶面或与移动件1长度方向平行的侧面,当入口22设于喷嘴2的顶面时,由于喷嘴2沿移动件1移动方向的厚度较小,造成入口22的直径较小,导致涂布剂沿移动件1长度方向的泵入范围较小,涂布的均一性较低;参照图1和图3,当入口22设于与移动件1长度方向平行的侧面时,由于喷嘴2的高度较高,使得可设置的入口22的直径增大,从而增大了涂布剂沿移动件1长度方向的泵入范围,进一步提高了涂布的均一性,因此,本实施例中喷嘴2的入口22优选设置于与移动件1长度方向平行的侧面。
泵3为P(Pressure压力)T(Time时间)泵,PT泵可精确控制所输送的涂布剂的体积,提高泵入各个喷嘴内的涂布剂量的精确度,从而提高了涂布机涂布的均一性。
移动件1带动喷嘴2移动,将涂布剂涂布于基板7上,在涂布的过程中容易有异物将喷嘴2的喷嘴头23划伤,为避免上述问题,参照图3,本实施例中喷嘴2包括喷嘴头23,喷嘴头23的材料为超硬合金,例如,可以使用硬度为HRC 76.1的超硬合金,由此,可有效避免喷嘴头23被划伤,减少维修次数。
具体的,在液晶显示器彩膜和TFT涂布工艺中,所述涂布剂可以为光刻胶,光刻胶存储于储料容器4中,通过泵3分别泵入各个喷嘴2内,在移动件1的带动下,喷嘴2可将光刻胶涂布于液晶显示器的玻璃基板上。当然,所述涂布剂还可以为其他可用于涂布的材料,如发光材料、封框胶等等。
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到变化或替换,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以所述权利要求的保护范围为准。

Claims (9)

1.一种涂布机,用于涂布涂布剂,其特征在于,包括移动件、喷嘴和泵,所述喷嘴为多个,多个所述喷嘴沿所述移动件的长度方向依次设置,所述泵用于向多个所述喷嘴内泵入涂布剂,所述移动件可带动多个所述喷嘴移动,随着多个所述喷嘴的移动,多个所述喷嘴可同时将所述涂布剂涂布于基板上,从而缩短喷嘴长度使单个喷嘴内的涂布剂分布均匀,进而提高涂布均一性或者在喷嘴损坏等方便更换或维修;
所述移动件上设有多个过孔,每个所述过孔内均设有一个螺栓,多个所述喷嘴上均设有螺纹孔,多个所述螺栓分别穿过相应的过孔和多个所述喷嘴上的螺纹孔配合连接。
2.根据权利要求1所述的涂布机,其特征在于,所述泵为多个,多个所述泵和多个所述喷嘴一一对应连通。
3.根据权利要求2所述的涂布机,其特征在于,还包括储料容器和分流阀,所述分流阀的入口和所述储料容器连通,所述分流阀的多个出口分别和多个所述泵的入口一一对应连通。
4.根据权利要求1所述的涂布机,其特征在于,所述过孔为长孔,所述长孔的长度方向平行于所述移动件的长度方向。
5.根据权利要求4所述的涂布机,其特征在于,多个所述长孔沿所述移动件的移动方向排列为两排,多个所述喷嘴上的螺纹孔与所述长孔一一对应,多个所述螺栓穿过两排所述长孔和多个喷嘴上相应的螺纹孔配合连接。
6.根据权利要求1所述的涂布机,其特征在于,多个所述喷嘴与所述移动件长度方向平行的侧面均设有一个入口,每个所述入口均和所述泵的出口连通。
7.根据权利要求1~6中任一项所述的涂布机,其特征在于,所述泵为PT泵。
8.根据权利要求1~6中任一项所述的涂布机,其特征在于,所述喷嘴包括喷嘴头,所述喷嘴头的材料为超硬合金。
9.根据权利要求1所述的涂布机,其特征在于,所述涂布剂为光刻胶。
CN201510230284.8A 2015-05-07 2015-05-07 一种涂布机 Active CN104808446B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201510230284.8A CN104808446B (zh) 2015-05-07 2015-05-07 一种涂布机
US15/137,807 US10207284B2 (en) 2015-05-07 2016-04-25 Coating machine for applying coating agent

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510230284.8A CN104808446B (zh) 2015-05-07 2015-05-07 一种涂布机

Publications (2)

Publication Number Publication Date
CN104808446A CN104808446A (zh) 2015-07-29
CN104808446B true CN104808446B (zh) 2021-02-02

Family

ID=53693398

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510230284.8A Active CN104808446B (zh) 2015-05-07 2015-05-07 一种涂布机

Country Status (2)

Country Link
US (1) US10207284B2 (zh)
CN (1) CN104808446B (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10537913B2 (en) * 2013-04-29 2020-01-21 Hewlett-Packard Development Company, L.P. Selective slot coating
US20160256889A1 (en) * 2015-03-06 2016-09-08 Nordson Corporation Variable output dispensing applicator and associated methods of dispensing
CN105057143A (zh) * 2015-08-19 2015-11-18 苏州市宏业灯具设备有限公司 Led路灯灯杆主体的抛光液喷涂装置
CN109551607A (zh) * 2019-01-21 2019-04-02 齐鲁工业大学 一种升降杆式水泥制品3d打印设备
CN114192302B (zh) * 2021-12-15 2023-04-18 安徽宏飞钓具有限公司 一种仿生鱼饵用加工设备及其加工方法

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE629589A (zh) * 1962-03-14
US3954345A (en) * 1975-02-27 1976-05-04 Morris Max O Self-locking dowell pin
US5029553A (en) * 1981-12-11 1991-07-09 Trion, Inc. Apparatus for providing a uniform coating on a continuous horizontally moving metal strip
GB2142257B (en) * 1983-07-02 1986-11-26 Gen Motors Overseas Adhesive application apparatus
US4772487A (en) * 1986-10-01 1988-09-20 Olympus Optical Company Limited Method and apparatus of forming solid phase reagent in micro-module
US4938994A (en) * 1987-11-23 1990-07-03 Epicor Technology, Inc. Method and apparatus for patch coating printed circuit boards
US5074244A (en) * 1990-01-23 1991-12-24 Metriguard Inc. Spray marking nozzle
US5622747A (en) * 1991-09-18 1997-04-22 National Semiconductor Corporation Method for dispensing a layer of photoresist on a wafer without spinning the wafer
US5468295A (en) * 1993-12-17 1995-11-21 Flame-Spray Industries, Inc. Apparatus and method for thermal spray coating interior surfaces
US5718763A (en) * 1994-04-04 1998-02-17 Tokyo Electron Limited Resist processing apparatus for a rectangular substrate
TW294821B (zh) * 1994-09-09 1997-01-01 Tokyo Electron Co Ltd
JPH08293452A (ja) * 1995-04-25 1996-11-05 Mitsubishi Electric Corp レジスト塗布装置
JP3397962B2 (ja) * 1995-05-18 2003-04-21 松下電器産業株式会社 ノズル
JP3227642B2 (ja) * 1995-10-13 2001-11-12 東京エレクトロン株式会社 塗布装置
US5858466A (en) * 1996-06-24 1999-01-12 Taiwan Semiconductor Manufacturing Company, Ltd. Photoresist supply system with air venting
JP3364155B2 (ja) * 1998-06-05 2003-01-08 東京エレクトロン株式会社 塗布膜形成装置及びその方法
US6376013B1 (en) * 1999-10-06 2002-04-23 Advanced Micro Devices, Inc. Multiple nozzles for dispensing resist
KR100444149B1 (ko) * 2000-07-22 2004-08-09 주식회사 아이피에스 Ald 박막증착설비용 클리닝방법
US6652912B2 (en) * 2001-08-10 2003-11-25 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for spraying a viscous material on a wafer
KR100582202B1 (ko) * 2003-10-13 2006-05-23 엘지.필립스 엘시디 주식회사 박막트랜지스터 어레이 기판의 제조장치 및 방법
KR101025103B1 (ko) * 2004-03-30 2011-03-25 엘지디스플레이 주식회사 슬릿노즐을 구비하는 포토레지스트 도포장치
TW200632576A (en) * 2004-12-02 2006-09-16 Nikon Corp Exposure apparatus, exposure method and manufacturing method of device
US7288469B2 (en) * 2004-12-03 2007-10-30 Eastman Kodak Company Methods and apparatuses for forming an article
KR101138787B1 (ko) * 2005-08-24 2012-04-25 이시이 효키 가부시키가이샤 잉크젯 헤드, 그 토출 이상 검출 방법, 및 막 형성 방법
JP4830523B2 (ja) * 2006-02-08 2011-12-07 東京エレクトロン株式会社 塗布、現像装置、塗布、現像方法及びその方法を実施するためのコンピュータプログラム。
US8168250B2 (en) * 2007-02-22 2012-05-01 Seiko Epson Corporation Ejection rate measurement method, ejection rate adjustment method, liquid ejection method, method of manufacturing color filter, method of manufacturing liquid crystal display device, and method of manufacturing electro-optic device
US9573159B2 (en) * 2009-08-31 2017-02-21 Illinois Tool Works, Inc. Metering system for simultaneously dispensing two different adhesives from a single metering device or applicator onto a common substrate
US9718081B2 (en) * 2009-08-31 2017-08-01 Illinois Tool Works Inc. Metering system for simultaneously dispensing two different adhesives from a single metering device or applicator onto a common substrate
JP5719546B2 (ja) * 2009-09-08 2015-05-20 東京応化工業株式会社 塗布装置及び塗布方法
CN102221784B (zh) * 2010-04-19 2013-07-24 北京京东方光电科技有限公司 胶涂覆设备及胶涂覆方法
CN201915143U (zh) * 2010-12-21 2011-08-03 中芯国际集成电路制造(上海)有限公司 用于化学气相沉积设备的喷头
JP5600624B2 (ja) * 2011-03-22 2014-10-01 東京エレクトロン株式会社 塗布膜形成装置及び塗布膜形成方法
TWI511794B (zh) * 2011-08-05 2015-12-11 Sumitomo Heavy Industries A film pattern forming apparatus, a film pattern forming method, and a device adjusting method
CN202166827U (zh) * 2011-08-10 2012-03-14 京东方科技集团股份有限公司 一种涂布设备
CN103019048B (zh) * 2012-12-20 2014-06-04 清华大学深圳研究生院 一种显影喷嘴
CN104057708B (zh) * 2013-03-20 2016-02-03 北大方正集团有限公司 一种喷头无缝拼接机构和该机构的调节方法
CN103246165B (zh) * 2013-04-25 2015-03-25 深圳市华星光电技术有限公司 一种光阻涂布装置及其涂布方法
US20140322449A1 (en) 2013-04-25 2014-10-30 Shenzhen China Star Optoelectronics Technology Co., Ltd. Photoresist Coating Device and Coating Method Thereof
US10537913B2 (en) * 2013-04-29 2020-01-21 Hewlett-Packard Development Company, L.P. Selective slot coating
CN103439825A (zh) * 2013-09-05 2013-12-11 深圳市华星光电技术有限公司 膜层铺设装置及使用该装置的膜层铺设方法
JP6362710B2 (ja) * 2014-05-15 2018-07-25 東京エレクトロン株式会社 フォトレジスト分注システムにおける増加した再循環及び濾過のための方法及び装置
US10232399B2 (en) * 2014-10-22 2019-03-19 Lg Chem, Ltd. Slot coater having fluid control unit
US20160256889A1 (en) * 2015-03-06 2016-09-08 Nordson Corporation Variable output dispensing applicator and associated methods of dispensing
CN104888996B (zh) * 2015-06-29 2017-08-11 深圳市华星光电技术有限公司 喷淋组件以及具有该喷淋组件的湿刻设备
US10081022B2 (en) * 2015-09-15 2018-09-25 Illinois Tool Works Inc. Die mounted contact applicator

Also Published As

Publication number Publication date
CN104808446A (zh) 2015-07-29
US20160325295A1 (en) 2016-11-10
US10207284B2 (en) 2019-02-19

Similar Documents

Publication Publication Date Title
CN104808446B (zh) 一种涂布机
US11607706B2 (en) Adhesive dispensing system with convertible nozzle assemblies
TWI673110B (zh) 塗佈裝置、塗佈方法、及顯示器用構件之製造方法
EP2095878A8 (en) Shower head and nozzles for the same
WO2008125981A3 (en) A painting apparatus
JP2005313170A5 (zh)
WO2013165684A3 (en) Cartridge sprayer system
JP6361658B2 (ja) 塗布装置及び塗布装置の制御方法
WO2019099304A8 (en) Digital fluidic cartridge with inlet gap height larger than outlet gap height
WO2008157242A3 (en) Apparatus and methods to dispense fluid from a bank of containers and to refill same
JP2014131794A (ja) 塗布ヘッド及び液滴塗布装置
EP2283931A3 (en) Liquid dispenser having individualized process air control
KR20140147540A (ko) 수지 도포 장치, 그 방법 및 이를 이용한 수지층 형성방법
WO2012083207A3 (en) Apparatus for the intermittent application of a liquid to pasty medium onto an application surface
WO2017044770A8 (en) High speed intermittent barrier nozzle
EP2123363A1 (fr) Système d'alimentation pour équipements rotatifs d'application de produits& xA;
CN104785413A (zh) 金属面复合板涂胶装置
US10288050B2 (en) Liquid crystal pump and method for ejecting liquid crystal using the same
CN101204696B (zh) 涂布方法
WO2008084783A1 (ja) 静電塗装装置
CN104475296A (zh) 可逆卧式辊涂装置
CN104624430B (zh) 防止残留液体滴落的装置
WO2019091184A1 (zh) 陶瓷喷墨打印机墨路和打印机
CN215940450U (zh) 一种带有出胶功能的涂布刮刀
CN104181732A (zh) 液晶滴下装置

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
EXSB Decision made by sipo to initiate substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant