WO2016197692A1 - 阵列基板、其制备方法及显示装置 - Google Patents
阵列基板、其制备方法及显示装置 Download PDFInfo
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- WO2016197692A1 WO2016197692A1 PCT/CN2016/079035 CN2016079035W WO2016197692A1 WO 2016197692 A1 WO2016197692 A1 WO 2016197692A1 CN 2016079035 W CN2016079035 W CN 2016079035W WO 2016197692 A1 WO2016197692 A1 WO 2016197692A1
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/134309—Electrodes characterised by their geometrical arrangement
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
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- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136218—Shield electrodes
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/121—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode common or background
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
- G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
Definitions
- Embodiments of the present invention relate to an array substrate, a method of fabricating the same, and a display device.
- the instantaneous electromagnetic signal caused by the change of the voltage of the data line with time generally affects the stability of the pixel electrode and the common electrode voltage, that is, the electric field generated by the data line causes crosstalk to the pixel electrode and the common electrode, which affects The voltage difference between the pixel electrode and the common electrode, thereby affecting the display quality of the array substrate.
- Embodiments of the present invention provide an array substrate, a method for fabricating the same, and a display device, which can solve the problem that the common electrode is susceptible to crosstalk of the data line and the common electrode voltage is unstable, thereby affecting the image quality of the entire array substrate.
- an array substrate comprising: a substrate substrate; a plurality of gate lines and a plurality of data lines on the substrate substrate and defining a plurality of pixel regions; a pixel electrode and a common electrode, each located at each The pixel electrode and the common electrode are disposed in different layers; and a shielding electrode is formed on the substrate substrate at least corresponding to the data line, the shielding electrode and the common The electrode is disposed in a different layer and is electrically connected to the pixel electrode and the common electrode.
- a display device comprising the array substrate of any of the first aspects is provided.
- a third aspect provides a method for fabricating an array substrate, comprising: forming a first conductive layer pattern on a substrate, the first conductive layer pattern including a common electrode located in a pixel region; forming a first conductive layer a patterned insulating layer; a second conductive layer pattern is formed on the insulating layer, the second conductive layer pattern includes a pixel electrode and a shield electrode electrically connected to each other, the pixel electrode being located in the pixel region, The shielding electrode is formed at least on a region of the substrate substrate corresponding to the data line, and is electrically connected to the common electrode.
- 1 is a schematic cross-sectional structural view of an array substrate
- FIG. 2 is a schematic cross-sectional structural view of an array substrate according to an embodiment of the present invention.
- FIG. 3 is a schematic cross-sectional structural view of another array substrate according to an embodiment of the present invention.
- FIG. 4 is a top plan view of a portion of an array substrate according to an embodiment of the present invention.
- FIG. 5 is a flowchart of a method for preparing an array substrate according to an embodiment of the present invention.
- FIG. 6 is a flow chart of another method for fabricating an array substrate according to an embodiment of the present invention.
- the same layer setting means that at least two patterns are located on the same bearing surface.
- the heterogeneous setting means that the two patterns are on different bearing surfaces, and usually there are other layers spaced between the two patterns.
- the shield electrodes provided corresponding to the data line regions are used to shield the crosstalk of the data lines.
- the array substrate may include a base substrate 01, a data line 02 disposed on the base substrate 01, a thin film transistor 03, and a pixel electrode 04 connected to the drain electrode 03a of the thin film transistor 03, facing the pixel electrode 04.
- the common electrode 05 is provided, and the shield electrode 06 is provided corresponding to the data line 02.
- the shielding electrode 06 is disposed in the same layer as the common electrode 05, And electrically connected.
- the electric field formed by the data line affects the voltage of the shield electrode such that the voltage of the shield electrode is unstable
- the shield electrode since the shield electrode is electrically connected to the common electrode, the voltage of the common electrode is also As the shielding electrode changes together, the common electrode voltage of the entire array substrate is unstable, and thus the voltage difference between the pixel electrode and the common electrode changes, thereby affecting the image quality of the entire array substrate.
- An embodiment of the present invention provides an array substrate, as shown in FIG. 2, comprising a substrate substrate 01, a plurality of gate lines and data lines 02 on the substrate substrate and defining a pixel region, and further comprising: pixels located in the pixel region
- the electrode 04 and the common electrode 05, the pixel electrode 04 and the common electrode 05 are disposed in different layers; the shield electrode 06, the shield electrode 06 is formed at least on the area of the corresponding substrate 02 on the corresponding substrate 02, and the shield electrode 06 and the common electrode 05 are disposed in different layers. And electrically connected to the pixel electrode 04 and the common electrode 05.
- the structure of the array substrate is not limited thereto.
- the array substrate shown in FIG. 2 the array substrate may further include: a thin film transistor 03 and a gate insulating layer 07 disposed on the base substrate 01. And an insulating layer 08.
- the thin film transistor 03 includes a drain electrode 03a, a source electrode 03b, a gate electrode 03c, and an active layer 03d which are provided on the base substrate 01.
- the pixel electrode 04 is electrically connected to the drain electrode 03a through the via 09, the data line 02 is disposed in the same layer as the drain electrode 03a and the source electrode 03b, and is electrically connected to the source electrode 03b, and the common electrode 05 and the pixel electrode 04 are disposed opposite to each other.
- a gate line (not shown in FIG. 2) is disposed in the same layer as the gate 03c and is electrically connected.
- FIG. 2 the structure added in FIG. 2 is only for the purpose of more clearly describing the solution of the embodiment of the present invention, and is not limited by the scope of the claimed invention.
- the array substrate may be an array substrate in an advanced super-dimensional field switching (ADS) type display device; in the ADS array substrate, the common electrode and the pixel electrode are disposed on the same substrate And one of the electrodes is a flat electrode and the other electrode is a comb or a pinned electrode.
- ADS advanced super-dimensional field switching
- a pixel electrode and a common electrode disposed in different layers may be included, which means that the pixel electrode and the common electrode are located on different bearing surfaces.
- the common electrode 05 is located above the gate insulating layer 07, and the pixel electrode 04 is located above the insulating layer 08.
- the pixel electrode 04 and the common electrode 05 are electrically connected.
- the pixel electrode 04 and the common electrode 05 are separated by an insulating layer 08, and the insulating layer 08 may be made of an insulating material such as silicon oxide, silicon nitride or an organic material.
- the insulating layer 08 can be referred to as a passivation layer.
- the electrodes adjacent to the substrate in the pixel electrode 04 and the common electrode 05 are flat, and the electrodes away from the substrate are comb-shaped or electrodes with nips.
- the common electrode located near the substrate substrate and above the gate insulating layer is a flat electrode, and the pixel electrode located away from the substrate substrate and above the insulating layer is a comb electrode.
- the above non-electrical connection means that there is no electrical connection between at least two conductive patterns.
- the above-mentioned shielding electrode is formed at least on the corresponding substrate on the substrate substrate, and the area where the positive projection of the data line on the substrate substrate is located overlaps with the area where the projection electrode is projected on the substrate.
- the shield electrode formed in the region of the corresponding substrate on the substrate substrate is electrically connected to the common electrode, when the crosstalk of the data line to the shield electrode is such that the voltage of the shield electrode is unstable, The voltage of the common electrode does not change with the change of the voltage of the shield electrode. Therefore, the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and the common electrode can be easily interfered by the crosstalk of the data line to cause common The electrode voltage is unstable, which affects the image quality of the entire array substrate.
- the shield electrode and the common electrode are disposed in the same layer on the basis of the non-electrical connection between the shield electrode and the common electrode, the spacing between the common electrode and the shield electrode is ensured in order to ensure the aperture ratio.
- the common electrode and the shielding electrode are easily mis-contacted and electrically connected, so that the common electrode is easily interfered by the data line and the voltage is unstable, thereby affecting the image quality of the entire array substrate.
- the non-electrically connected shielding electrode and the common electrode are disposed in different layers, which can avoid the problem of easy mis-contact during the same layer setting, thereby ensuring the stability of the common voltage and ensuring the display quality of the array substrate.
- the shield electrode and the common electrode are electrically connected, in order to avoid light leakage, a voltage signal identical to the voltage of the common electrode is usually applied to the shield electrode.
- the shielding electrode and the pixel electrode may be disposed in the same layer.
- the meaning that the shielding electrode and the pixel electrode are disposed in the same layer means that the shielding electrode and the pixel electrode are located on the same bearing surface.
- the shield electrode 06 and the pixel electrode 04 Both are located above the insulating layer 08. Since the shield electrode 06 and the pixel electrode 04 which are disposed in the same layer and are both electrodes can be made of the same material, for example, a transparent conductive material such as Indium Tin Oxide (ITO), they can be fabricated together by the same patterning process.
- ITO Indium Tin Oxide
- different patterns may be obtained by one patterning of the same transparent conductive film layer, the different patterns including the shield electrode and the pixel electrode, thereby simplifying the structure of the array substrate and the process of preparing the process.
- the shielding electrode 06 and the pixel electrode 04 can also be disposed in the same layer and different materials, which are not limited herein.
- the spacing between the shielding electrode and the pixel electrode should not be too large, so that the shielding electrode and the pixel electrode may also be electrically connected due to false contact. Case.
- the voltage of the pixel electrode electrically connected to the shield electrode also changes with the change of the shield voltage, thereby affecting the image quality of the pixel unit.
- the shielding electrode is disposed in the same layer as the pixel electrode, and the shielding electrode is in the same layer as the common electrode.
- the setting is more to ensure the image quality of the array substrate, and thus is a more optimized structural design.
- the common electrode and the data line may be disposed in the same layer.
- the common electrode 05 and the data line 02 are both located on the gate insulating layer.
- the data line is usually made of a metal material such as Al (aluminum), Mo (molybdenum), Cr (chromium), Cu (copper), or Ti (titanium)
- the common electrode is usually made of ITO or the like, that is, a common electrode and a data line.
- the materials used are usually different and cannot be fabricated together in the same patterning process.
- the common electrode and the data line are disposed in the same layer to save the process of making the spacer insulating layer between the common electrode and the data line when the different layer is set.
- the structure of the array substrate and the process of preparing the process can be simplified.
- the arrangement of the insulating layer between the common electrode and the data line is reduced, the entire array substrate is thinner than the prior art, which is advantageous for thinning and thinning of the display device.
- the shielding electrode is disposed in the same layer as the pixel electrode, and the common electrode and the data line are disposed in the same layer to increase the spacing between the pixel electrode and the data line, and reduce the coupling capacitance between the pixel electrode and the data line, thereby reducing The effect of a small coupling capacitor on the pixel electrode voltage and display quality.
- the source and the drain may be disposed in the same layer as the data line and the common electrode.
- the width of the shield electrode may be greater than the width of the data line. That is, the area where the orthographic projection of the shielding electrode on the substrate substrate is located may be larger than the area where the orthographic projection of the data line on the substrate substrate is located, so that the shielding electrode can better shield the electric field formed by the data line, thereby reducing the data line. Crosstalk.
- the width of the shield electrode may also be equal to the width of the data line, or slightly smaller than the width of the data line, and only the shielding effect of the shield electrode on the electric field formed by the data line is slightly worse than the above case.
- the shield electrode may also be formed on a region of the corresponding substrate line on the substrate substrate, that is, an area where the orthographic projection of the gate line on the substrate substrate is located and an orthographic projection of the shield electrode on the substrate substrate.
- the regions have overlap; for example, the boundary of the orthographic projection of the gate lines on the substrate substrate is located inside the boundary of the orthographic projection of the shield electrodes on the substrate substrate, and of course there may be partial boundaries coincident.
- the area where the positive projection of the shield electrode on the base substrate is located may be larger than the area where the data line and the gate line as a whole are orthographically projected on the base substrate, that is, the data line and the gate line as a whole are on the substrate.
- the boundary of the orthographic projection on the substrate is located inside the boundary of the orthographic projection of the shield electrode on the substrate, or a partial boundary coincides, so that the data line and the electric field formed by the gate line can be simultaneously shielded from other wirings on the array substrate such as the common electrode. Crosstalk with the pixel electrode.
- the embodiment of the present invention provides an array substrate. Since the shield electrode formed in at least the corresponding data line on the substrate substrate is electrically connected to the common electrode, the crosstalk of the data line to the shield electrode makes the shield electrode When the voltage is unstable, the voltage of the common electrode does not change with the change of the voltage of the shield electrode. Therefore, the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and the common electrode can be easily affected by the data line.
- the crosstalk causes the common electrode voltage to be unstable, thereby affecting the image quality of the entire array substrate.
- An embodiment of the present invention provides an array substrate, as shown in FIG. 3, comprising a substrate substrate 01, a plurality of gate lines and data lines 02 on the substrate substrate and defining pixel regions, and further comprising: pixels located in the pixel region
- the electrode 04 and the common electrode 05, the pixel electrode 04 and the common electrode 05 are disposed in different layers; the shield electrode 06, the shield electrode 06 is formed at least on the area of the corresponding substrate 02 on the corresponding substrate 02, and the shield electrode 06 and the common electrode 05 are disposed in different layers. And electrically connected to the pixel electrode 04 and the common electrode 05.
- the structure of the array substrate is not limited thereto.
- the array substrate shown in FIG. 3 the array substrate can also be The thin film transistor 03, the gate insulating layer 07, and the insulating layer 08 are disposed on the base substrate 01.
- the thin film transistor 03 includes a drain electrode 03a, a source electrode 03b, a gate electrode 03c, and a photo substrate 01.
- the source layer 03d is electrically connected to the drain electrode 03a
- the data line 02 is disposed in the same layer as the drain electrode 03a and the source electrode 03b, and is electrically connected to the source electrode 03b
- the common electrode 05 and the pixel electrode 04 are disposed opposite to each other.
- a gate line (not shown in FIG. 3) is disposed in the same layer as the gate 03c and is electrically connected.
- FIG. 3 the structure added in FIG. 3 is only for the purpose of more clearly describing the solution of the embodiment of the present invention, and is not limited by the scope of the claimed invention.
- the shielding electrode and the pixel electrode may be disposed in the same layer.
- the array substrate provided by the embodiment of the present invention may further include a common electrode line (not shown in FIG. 3 ), the common electrode is disposed in the same layer as the common electrode line, and the common electrode line is electrically connected to the common electrode.
- the common electrode and the common electrode line are disposed in the same layer, and the common electrode and the common electrode line are located on the same bearing surface.
- the common electrode and the common electrode line may be located on the base substrate, and the lining The base substrate is in direct contact.
- the common electrode needs to be supplied with a voltage required for normal operation through the common electrode line, and thus the common electrode must be electrically connected to the common electrode line.
- the common electrode and the common electrode line need not be connected through the via hole, thereby saving the process flow for making the via hole and simplifying the process.
- the structure of the array substrate by arranging the common electrode and the common electrode line in the same layer, the common electrode and the common electrode line need not be connected through the via hole, thereby saving the process flow for making the via hole and simplifying the process.
- the common electrode and the common electrode line are disposed in the same layer, for example, since the common electrode is usually made of a material such as ITO, the common electrode line is usually Al (aluminum), Mo (molybdenum), Cr (chromium), or Cu (copper). Metal materials such as Ti (titanium), that is, the materials used for the common electrode and the common electrode line are usually different, and are usually not fabricated together in the same patterning process.
- the common electrode and the data line are designed in the same layer, and the common electrode and the common electrode line are disposed in the same layer to simplify the structure and process preparation process of the array, and the display device is light and thin.
- the common electrode and the common electrode line disposed in the same layer may be connected by a metal line, such that the metal line is disposed in the same layer as the common electrode and the common electrode line.
- the metal lines can be made of the same material as the common electrode lines and fabricated together with the common electrode lines.
- the common electrode and the common electrode disposed in the same layer may also be connected in other manners.
- the metal wire connection is only an example.
- array substrates also have large-sized and small-sized array substrates corresponding to large-sized display products (such as televisions) and small-sized display products (such as mobile phones).
- the resistance of the large-sized array substrate is large, and connecting the common electrode in the array substrate to the common electrode line through the via hole cannot ensure the stability of the common electrode voltage, and the common electrode is usually through the metal line and the common The electrode wires are connected to ensure the stability of the common electrode voltage, and thus the large-sized array substrate is generally constructed as shown in FIG.
- the common electrode, the common electrode line, the gate line and the gate may be disposed in the same layer.
- the common electrode and the data line are arranged in the same layer, which simplifies the structure of the array and the process of preparing the process, and is advantageous for thinning and thinning of the display device.
- the metal line when a metal line is included in the array substrate, the metal line may be disposed in the same layer as the common electrode, the common electrode line, the gate line, and the gate.
- a partial structure top view of an array substrate provided by an embodiment of the present invention is used to indicate the relative positions of the gate electrode 03c, the gate line 10, the common electrode line 11, the metal line 12, and the common electrode 05.
- the gate electrode 03c and the common electrode 05 in Figs. 2 and 3 are obtained by cross-sectional view in Fig. 4A-A.
- other structures such as pixel electrodes are not shown in FIG.
- the embodiment of the present invention provides an array substrate. Since the shield electrode formed in at least the corresponding data line on the substrate substrate is electrically connected to the common electrode, the crosstalk of the data line to the shield electrode makes the shield electrode When the voltage is unstable, the voltage of the common electrode does not change with the change of the voltage of the shield electrode. Therefore, the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and the common electrode can be easily affected by the data line.
- the crosstalk causes the common electrode voltage to be unstable, thereby affecting the image quality of the entire array substrate.
- the embodiment of the invention further provides a display device, which comprises the array substrate provided in the first embodiment and the second embodiment.
- the display device may be a display device such as a liquid crystal display, an electronic paper, an Organic Light-Emitting Diode (OLED) display, or any display-enabled product such as a television, a digital camera, a mobile phone, a tablet computer, or the like including the display device.
- a display device such as a liquid crystal display, an electronic paper, an Organic Light-Emitting Diode (OLED) display, or any display-enabled product such as a television, a digital camera, a mobile phone, a tablet computer, or the like including the display device.
- OLED Organic Light-Emitting Diode
- the shield electrode formed in the region of the substrate substrate corresponding to the data line is electrically connected to the common electrode, when the crosstalk of the data line to the shield electrode is such that the voltage of the shield electrode is unstable, The voltage of the common electrode does not change with the change of the voltage of the shield electrode. Therefore, the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and the common electrode can be easily interfered by the crosstalk of the data line to cause common The electrode voltage is unstable, which affects the image quality of the entire array substrate.
- the embodiment of the invention provides a method for preparing an array substrate in the first embodiment.
- the main steps may include:
- first conductive layer pattern on the base substrate, the first conductive layer pattern including a common electrode located in the pixel region.
- the base substrate may be made of Corning, Asahi Glass, quartz glass or the like.
- the first conductive layer pattern is generally formed by a patterning process, and the so-called patterning process may include a process of film formation, exposure, development, and the like, and may of course further include etching, stripping, and the like.
- the patterning process is not limited thereto, as long as the process of forming the first conductive layer pattern on the substrate substrate is within the protection scope of the embodiment of the present invention.
- the first conductive layer pattern may further include a data line, a source, and a drain disposed in the same layer as the common electrode.
- the common electrode is usually a transparent material
- the data line, the source and the drain are usually the same metal material.
- the first conductive layer includes a transparent conductive film and a metal thin film formed in sequence.
- the first conductive layer comprises a transparent conductive film and a metal thin film formed in sequence.
- a photoresist is formed on the first conductive layer, and the first conductive layer is exposed, developed, etched or the like by using a halftone or gray scale mask to obtain a first conductive layer pattern.
- the data line, the source and the drain formed by this process may comprise two layers, one being a transparent conductive pattern close to the base substrate and the other being a metal pattern on the transparent conductive pattern.
- the transparent conductive film can
- the metal film may be Al, Mo, Cr, Cu, Ti or the like.
- the second step and the step 101 may be performed by using two mask patterning processes, and may include: (1) forming a transparent conductive film on the substrate; and then obtaining a common electrode by a glue coating, a mask exposure, a development, and an etching process. The pattern retains an unremoved photoresist on the pattern of the common electrode. (2) Forming a metal thin film on the base substrate on which the common electrode is formed, and obtaining a pattern of the data line, the source, and the drain by a glue coating, a mask exposure, a development, and an etching process.
- the pattern of the data line, the source and the drain, and the photoresist on the pattern of the common electrode are stripped by a lift-off process to obtain a common electrode, a data line, a source, and a drain including the same layer.
- a conductive layer pattern is
- the photoresist on the pattern of the common electrode in the step (1) is not removed, the photoresist can protect the common electrode from being not in the step (2). Etching.
- the mask used may be a normal mask (ie, a mask including only a light-transmitting, opaque region).
- a normal mask ie, a mask including only a light-transmitting, opaque region.
- the third step and the step 101 may be performed by using two mask patterning processes, and may include: (1) forming a metal thin film on the substrate; and then obtaining a data line and a source by a glue coating, a mask exposure, a development, and an etching process. The pattern of the poles and the drains, the unremoved photoresist remains on the pattern of the data lines, the source and the drain. (2) A transparent conductive film is formed on the base substrate on which the patterns of the data lines, the source and the drain are formed, and a pattern of the common electrode is obtained by a glue coating, a mask exposure, a development, and an etching process.
- the pattern of the common electrode and the photoresist on the pattern of the data line, the source and the drain are peeled off by a lift-off process, thereby obtaining a pattern of the common electrode, the data line, the source, and the drain including the same layer.
- the first conductive layer pattern is
- step (2) when the step (2) is performed, since the photoresist on the data line, the source and the drain in the step (1) is not removed, the photoresist can protect the data line and the source.
- the pole and drain are not etched in step (2).
- the formed first conductive layer pattern includes the common electrode, the data line, the source and the drain provided in the same layer, it is possible to save the need for setting the common electrode and the data line, the source and the drain.
- the insulating layer simplifies the structure of the array substrate and the process of preparing the process, and is advantageous for thinning and thinning of the display device.
- the insulating layer here may be an insulating material such as silicon oxide, silicon nitride or an organic material.
- the second conductive layer pattern includes a pixel electrode and a shield electrode electrically connected to each other, the pixel electrode is located in the pixel region, and the shield electrode is formed on at least the corresponding data line on the base substrate The area is electrically connected to the common electrode.
- the formed second conductive layer pattern includes pixel electrodes and shield electrodes that are electrically connected to each other, that is, the pixel electrodes are disposed in the same layer as the shield electrodes, and thus can be simplified compared with the pixel electrodes and the shield electrodes.
- the insulating layer in step 102 may be the insulating layer 08 in FIG. 2, and the drain electrode 03a is connected to the pixel electrode 04 through the via 09 on the insulating layer 08.
- the width of the shield electrode may be greater than the width of the data line, so that the crosstalk of the data line signal can be better shielded.
- the shield electrode may also be formed on a region of the substrate substrate corresponding to the gate line to facilitate crosstalk of the shielded gate line signal.
- the common electrode in the first conductive layer pattern and the shield electrode in the second conductive layer pattern are electrically connected, and thus the data line is shielded from the electrode.
- the crosstalk causes the voltage of the shield electrode to be unstable, the voltage of the common electrode does not change with the change of the voltage of the shield electrode, and thus the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and can solve the common problem.
- the electrodes are susceptible to crosstalk of the data lines, causing the common electrode voltage to be unstable, thereby affecting the image quality of the entire array substrate.
- the embodiment of the invention provides a method for preparing an array substrate in the second embodiment.
- the main steps may include:
- first conductive layer pattern on the base substrate, the first conductive layer pattern including a common electrode located in the pixel region.
- the first conductive layer pattern may further include a common electrode line disposed in the same layer as the common electrode, and/or a gate line, a gate, and/or a common electrode and a common electrode line.
- the common electrode is usually a transparent conductive material, and the common electrode line, the gate line, the gate, and the metal line are usually the same metal material.
- the first conductive layer pattern includes a common layer set
- the electrode, the common electrode line, the gate line, the gate, and the metal line the step 201 can be implemented by using any one of the following solutions:
- the first conductive layer includes a transparent conductive film and a metal thin film formed in sequence.
- the first conductive layer comprises a transparent conductive film and a metal thin film formed in sequence.
- a photoresist is formed on the first conductive layer, and the first conductive layer is exposed, developed, etched or the like by using a halftone or gray scale mask to obtain a first conductive layer pattern.
- the common electrode lines, the gate lines, the gate electrodes and the metal lines formed by the process comprise two layers, one layer is a transparent conductive pattern close to the base substrate, and the other layer is located on the transparent conductive pattern.
- the transparent conductive film may be a material such as ITO, and the metal film may be a material such as Al, Mo, Cr, Cu, or Ti.
- the second step and the step 201 may be performed by using two mask patterning processes, and may include: (1) forming a transparent conductive film on the substrate; and then obtaining a common electrode by a glue coating, a mask exposure, a development, and an etching process. The pattern retains an unremoved photoresist on the pattern of the common electrode. (2) A metal thin film is formed on the base substrate on which the common electrode is formed, and patterns of the common electrode lines, the gate lines, the gate electrodes, and the metal lines are obtained by a glue coating, a mask exposure, a development, and an etching process.
- the common electrode line, the gate line, the gate, the pattern of the metal line, and the photoresist on the pattern of the common electrode are stripped by a lift-off process, thereby obtaining a common electrode, a common electrode line, and a gate line including the same layer. a first conductive layer pattern of the gate and the metal line.
- the photoresist on the pattern of the common electrode in the step (1) is not removed, the photoresist can protect the common electrode from being not in the step (2). Etching.
- the mask used may be a normal mask (ie, a mask including only a light-transmitting, opaque region).
- a normal mask ie, a mask including only a light-transmitting, opaque region.
- the third step and the step 201 may be performed by using two mask patterning processes, and may include: (1) forming a metal thin film on the base substrate; and then obtaining a common electrode line by applying a glue, mask exposure, development, and etching process, A pattern of gate lines, gate lines, and metal lines, on which the unremoved photoresist remains on the pattern of the common electrode lines, the gate lines, the gate electrodes, and the metal lines. (2) A transparent conductive film is formed on the base substrate on which the patterns of the common electrode lines, the gate lines, the gate electrodes, and the metal lines are formed, and the pattern of the common electrode is obtained by a glue coating, a mask exposure, development, and an etching process. After that, it will be passed through the stripping process.
- the photoresist of the common electrode line, the gate line, the gate electrode and the metal line in the step (1) is not removed, the photoresist can be protected.
- the common electrode line, the gate line, the gate, and the metal line are not etched in the step (2).
- the formed first conductive layer pattern includes a common electrode and a common electrode line disposed in the same layer, and/or a gate line, a gate, and/or a metal line for connecting the common electrode and the common electrode line.
- the common electrode and the common electrode line are disposed in the same layer, so that the common electrode and the common electrode line disposed in the same layer do not need to be connected through the via hole, thereby simplifying the structure of the array substrate; and the common electrode and the common electrode line, and/ Or a gate line, a gate, and/or a metal line for connecting the common electrode and the common electrode line in the same layer, which can save the insulating layer required for the different layer arrangement, further simplify the structure and process flow, and facilitate display
- the device is light and thin.
- the first insulator layer herein can be mainly used to insulate the first conductive layer pattern from other conductive patterns, and an insulating material such as silicon oxide, silicon nitride or organic material can be used.
- the data lines, the source and the drain of the same layer in the third conductive layer pattern may be the same material, and thus may be completed by the same patterning process.
- the second insulator layer herein can be mainly used to insulate the third conductive layer pattern from the second conductive layer pattern, and an insulating material such as silicon oxide, silicon nitride or organic material can be used.
- the second conductive layer pattern includes a pixel electrode and a shield electrode electrically connected to each other, the pixel electrode is located in the pixel region, and the shield electrode is formed on the substrate substrate at least The area of the data line and is electrically connected to the common electrode.
- the common electrode and the shielding electrode disposed in the same layer in the second conductive layer pattern may be the same material, and thus may be completed by the same patterning process.
- the structure of the array substrate obtained by the preparation method provided by the embodiment of the present invention can be seen in FIG. 3 , wherein the first insulating layer can be the gate insulating layer 07 in FIG. 3 , The second insulator layer may be the insulating layer 08 of FIG. 2, and the pixel electrode is connected to the drain electrode 03a through the via 09 on the second insulator layer.
- the first insulating layer can be the gate insulating layer 07 in FIG. 3
- the second insulator layer may be the insulating layer 08 of FIG. 2
- the pixel electrode is connected to the drain electrode 03a through the via 09 on the second insulator layer.
- the common electrode in the first conductive layer pattern and the shield electrode in the second conductive layer pattern are electrically connected, and thus the data line is shielded from the electrode.
- the crosstalk causes the voltage of the shield electrode to be unstable, the voltage of the common electrode does not change with the change of the voltage of the shield electrode, and thus the common electrode electrically connected to the shield electrode varies with the voltage of the shield electrode, and can solve the common problem.
- the electrodes are susceptible to crosstalk of the data lines, causing the common electrode voltage to be unstable, thereby affecting the image quality of the entire array substrate.
Abstract
Description
Claims (14)
- 一种阵列基板,包括:衬底基板;多条栅线和多条数据线,位于所述衬底基板上且界定多个像素区域;像素电极和公共电极,位于每个所述像素区域内且所述像素电极和所述公共电极异层设置;以及屏蔽电极,形成在所述衬底基板上至少对应于所述数据线的区域中,所述屏蔽电极与所述公共电极异层设置,且与所述像素电极、所述公共电极无电性连接。
- 根据权利要求1所述的阵列基板,其中所述屏蔽电极与所述像素电极同层设置。
- 根据权利要求2所述的阵列基板,其中所述公共电极与所述数据线同层设置。
- 根据权利要求2所述的阵列基板,还包括:公共电极线,所述公共电极与所述公共电极线同层设置,且所述公共电极线与所述公共电极电性连接。
- 根据权利要求4所述的阵列基板,其中所述公共电极线与所述公共电极电性连接包括:所述公共电极线与所述公共电极通过金属线电性连接。
- 根据权利要求4或5所述的阵列基板,其中所述公共电极、所述公共电极线、所述栅线与栅极同层设置。
- 根据权利要求1所述的阵列基板,其中所述屏蔽电极的宽度大于所述数据线的宽度。
- 根据权利要求1所述的阵列基板,其中所述屏蔽电极还形成于所述衬底基板上对应所述栅线的区域。
- 根据权利要求1所述的阵列基板,其中所述屏蔽电极的宽度等于或小于所述数据线的宽度。
- 一种显示装置,包括权利要求1-9中任一项所述的阵列基板。
- 一种阵列基板的制备方法,包括:在衬底基板上形成第一导电层图案,所述第一导电层图案包括位于像素 区域的公共电极;形成覆盖所述第一导电层图案的绝缘层;在所述绝缘层上形成第二导电层图案,所述第二导电层图案包括相互无电性连接的像素电极和屏蔽电极,所述像素电极位于所述像素区域内,所述屏蔽电极至少形成于所述衬底基板上对应数据线的区域,且与所述公共电极无电性连接。
- 根据权利要求11所述的制备方法,其中所述第一导电层图案还包括与所述公共电极同层设置的数据线、源极和漏极。
- 根据权利要求11所述的制备方法,其中所述第一导电层图案还包括与所述公共电极同层设置的公共电极线,和/或栅线、栅极,和/或用以连接所述公共电极和所述公共电极线的金属线。
- 根据权利要求13所述的制备方法,其中所述形成覆盖所述第一导电层图案的绝缘层包括:依次形成覆盖所述第一导电层图案的第一绝缘子层和第二绝缘子层;在形成所述第一绝缘子层之后,在形成所述第二绝缘子层之前,所述方法还包括:在所述第一绝缘子层上形成第三导电层图案,所述第三导电层图案包括数据线、源极和漏极。
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