WO2016155069A1 - 多系统自动化协调工作的激光诱导空化强化的装置及方法 - Google Patents

多系统自动化协调工作的激光诱导空化强化的装置及方法 Download PDF

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WO2016155069A1
WO2016155069A1 PCT/CN2015/077904 CN2015077904W WO2016155069A1 WO 2016155069 A1 WO2016155069 A1 WO 2016155069A1 CN 2015077904 W CN2015077904 W CN 2015077904W WO 2016155069 A1 WO2016155069 A1 WO 2016155069A1
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Prior art keywords
laser
cavitation
computer
strengthening
lifting
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English (en)
French (fr)
Inventor
任旭东
左成亚
何浩
袁寿其
吴坤
王德顺
佟艳群
王杰
卢加兴
随赛
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Jiangsu University
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Jiangsu University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure
    • B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special environment or atmosphere, e.g. in an enclosure in vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D10/00—Modifying the physical properties by methods other than heat treatment or deformation
    • C21D10/005—Modifying the physical properties by methods other than heat treatment or deformation by laser shock processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/022—Liquids
    • G01N2291/0228—Aqueous liquids

Definitions

  • the invention relates to a device and a method for improving laser induced cavitation strengthening by multi-system automatic coordination work, which is suitable for inducing cavitation bubbles in water by using high energy density laser, and using cavitation bubbles to improve residual stress distribution on target surface.
  • the occasion of the surface modification method is suitable for inducing cavitation bubbles in water by using high energy density laser, and using cavitation bubbles to improve residual stress distribution on target surface.
  • the object of the present invention is to provide a device and method for laser-induced cavitation strengthening, which can more conveniently study the cavitation strengthening mechanism and provide equipment guarantee for its industrial promotion.
  • the technical solution adopted by the present invention is: a multi-system automatic coordination work to improve laser induced cavitation strengthening, comprising a laser cavitation device and a fixed table, wherein the fixed table is provided with a water tank, the water tank a spacer is disposed therein, and a temperature sensor is disposed on a wall of the water tank, and the temperature sensor is connected to a computer;
  • the fixing platform is located on the lifting device, the lifting device is located on the two-axis linkage platform, and the laser light emitted by the laser cavitation device passes through the sidewall of the water tank and is focused in the water tank; the laser cavitation device is connected to the computer
  • the lifting device and the two-axis linkage platform are connected to a computer through a CNC servo system.
  • an upper end of the fixing table is provided with a guiding rod, a movable plate is mounted on the guiding rod, and the movable plate is connected with the moving rod of the guiding rod, and the movable plate is connected with a piston rod of the cylinder, the cylinder Connected to the nitrogen bottle via a solenoid valve.
  • the lifting device comprises a lifting platform, the fixing platform is located on the lifting platform, and the lifting platform is connected to the CNC servo system through a shaft, a coupling and a servo motor in sequence.
  • the laser cavitation device comprises a laser controller, a YAG laser, a 45° full mirror, a beam expander and a focusing mirror, and the laser controller controls the YAG laser to emit laser light, and passes 45° full mirror and expands the beam.
  • the mirror and focusing mirror pass through the side wall of the sink and are shot into the sink for focusing.
  • an imaging system comprising an illumination flash, a high speed camera and a CCD, the illumination flash, the high speed camera and the CCD are all connected to a computer. Used to record the pulsation and collapse process of cavitation bubbles.
  • a hydrophone is further disposed above the water tank, and the hydrophone is connected to the computer.
  • the invention also provides a method for improving the laser induced cavitation strengthening device by multi-system automatic coordination work, comprising the following steps:
  • S1 wipes the surface of the target and the pad with absolute ethanol or acetone to remove the oil and ash layer on the surface to prevent interference to the experiment and affect the accuracy of the experiment; put the target and the pad together in the sink, and then put Into the fixed table, add appropriate amount of pure water to the sink to flood the target and the block;
  • the S2 computer controls the solenoid valve, and clamps and fixes the water tank by using a clamping system composed of a cylinder, a movable plate, a guide rod, a nitrogen bottle and a solenoid valve;
  • the S3 laser controller controls the YAG laser to emit laser light, and is injected into the water of the water tank through an energy density amplifying system composed of a 45° full mirror, a beam expander and a focusing mirror;
  • the S4 computer controls the CNC servo system to realize the lifting and lowering of the water tank through the lifting system consisting of the lifting platform, the coupling, the servo motor and the shaft; wherein the lifting platform is moved up and down by the rack and pinion mechanism, using the known gear teeth According to the number of revolutions of the servo motor, the lifting distance can be obtained, and the value is displayed on the computer screen to avoid the error caused by the manual reading.
  • the temperature sensor feedbacks the water temperature during the impact to the computer in real time, and displays the value. On the computer screen;
  • S5 determines the effect of laser cavitation strengthening by cleaning the surface of the target and analyzing its residual stress distribution
  • S6 adjusts the lifting system, changes the water temperature, repeats the above operation until the optimal residual stress distribution of the laser cavitation strengthening is obtained, and determines the water temperature and the optimal strengthening distance ds under the optimal residual stress distribution;
  • the ds is the target strengthening surface and The distance between the focus points of the laser in the sink;
  • the method further comprises the steps of monitoring the laser cavitation process: connecting the imaging system composed of the high speed camera and the CCD to the computer, and placing the hydrophone into the water tank, the computer controlling the lighting flash switch, and receiving the hydrophone feedback in real time.
  • the acoustic signal and the signal of the imaging system through the analysis of the acoustic signal and the signal of the imaging system, provide data support for studying the laser temperature under the optimal residual stress distribution and the laser cavitation process under the optimal strengthening distance ds.
  • the invention has the advantages that: (1) the cylinder can be flexibly clamped and fixed for various sizes of the water tank, and has the easy changeability; (2) the lifting system with the rack and pinion mechanism realizes the numerical control and the accuracy, and avoids The use of five-axis linkage workbench, CNC console and other large and expensive machinery is convenient and quick, and reduces costs. (3) The above systems are connected with the computer to realize automation, which ensures the continuity of the experiment, accuracy and convenience. . (4) The strengthening method and device have the advantages of no pollution and high utilization rate compared with the conventional one, and can be used for industrial promotion.
  • Figure 1 is a front view of a multi-system automation coordination work to improve laser induced cavitation enhancement.
  • Figure 2 is a top view of a device for multi-system automation coordination to improve laser induced cavitation enhancement.
  • a multi-system automatic coordination work improves the apparatus for laser induced cavitation strengthening, including a laser cavitation device and a fixed stage 7, the laser cavitation device including a laser controller 20 and a YAG laser 21 , a 45° total mirror 22, a beam expander 23 and a focusing mirror 24, the laser controller 20 controls the YAG laser 21 to emit laser light, through the 45° full mirror 22, the beam expander 23 and the focusing mirror 24, and then through the sink The side wall of 6 is then injected into the sink 6 for focusing.
  • the fixed base 7 is provided with a water tank 6
  • the water tank 6 is provided with a spacer 10 .
  • the upper end of the fixed base 7 is provided with a guiding rod 5 , and the movable rod 3 is mounted on the guiding rod 5 , and the movable panel 3 is mounted on the guiding rod 5 .
  • the movable plate 3 is connected to a piston rod of a cylinder 2 which is connected to a nitrogen bottle 25 via a solenoid valve 26.
  • a temperature sensor 9 is disposed on the wall of the water tank 6, and the temperature sensor 9 is connected to the computer 19; a hydrophone 4 is further disposed above the water tank 6, and the hydrophone 4 is connected to the computer 19.
  • the sound wave information for monitoring the cavitation bubbles further includes an imaging system including an illumination flash 15, the high speed camera 16 and the CCD 17, the illumination flash 15, the high speed camera 16 and the CCD 17 are all connected to the computer 19 for recording The pulsation and collapse process of cavitation bubbles.
  • the fixing table 7 is located on a lifting device, and the lifting device comprises an lifting platform 1 on the lifting platform 1, and the lifting platform 1 passes through the shaft 14, the coupling 11 and the servo motor 12 in sequence.
  • the CNC servo system 18 is connected.
  • the lifting device is located on the two-axis linkage platform 13, and the laser light emitted by the laser cavitation device passes through the side wall of the water tank 6 and is focused in the water tank 6; the laser cavitation device is connected to the computer 19, The lifting device and the two-axis linkage platform 13 are connected to the computer 19 via a CNC servo system 18.
  • the target 8 and the surface of the spacer 10 are first wiped with absolute ethanol or acetone; the target 8 and the spacer 10 are placed together in the appropriate position of the water tank 6, and then placed in the fixed table 7 to the sink.
  • the appropriate amount of pure water is used to submerge the target 8 and the block 10, and the current temperature of the temperature sensor 9 is feedbacked from the current and the water temperature during the impact process; the computer 19 adjusts the tightening system and the lifting system respectively; on the laser controller 20
  • the laser parameters including laser energy, output wavelength, spot diameter
  • control the YAG laser 21 to emit laser light to generate air bubbles after energy density amplification, analyze the experimental data, clean the surface of the target 8 and analyze its residual stress distribution
  • System change the water temperature, repeat the above operation until the optimal strengthening distance ds is obtained (the ds is the distance between the target 8 strengthening surface and the focus point of the laser in the water tank 6); keeping ds unchanged, the computer 19 controls two
  • the shaft linkage platform 13 reinforces the entire surface of

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Abstract

一种多系统自动化协调工作的激光诱导空化强化的装置及方法，该装置由多个系统组成，分别有夹紧系统、升降系统、成像系统、计算机控制系统、激光器系统、能量密度放大系统等。该激光诱导空化强化的装置包括激光空化装置和固定台（7），固定台内设有水槽（6），水槽内装有垫块（10），水槽的槽壁上设有温度传感器（9），温度传感器与计算机（19）连接；固定台（7）位于升降装置上，升降装置位于二轴联动平台（13）上，激光空化装置发出的激光穿过水槽（6）的侧壁后在水槽内聚焦；激光空化装置与计算机（19）连接，升降装置和二轴联动平台（13）通过ＣＮＣ伺服系统与计算机（19）连接。多个系统之间协调工作，利用激光诱导产生空化泡对材料进行强化，从而起到延长材料寿命的作用，使操作者能够快速而准确地获得相应的数据，快速高效对这类材料进行强化。

Description

多系统自动化协调工作的激光诱导空化强化的装置及方法 技术领域
本发明涉及一种多系统自动化协调工作提高激光诱导空化强化的装置及方法，适用于利用高能量密度的激光在水中诱导产生空化泡，利用空化泡改善靶材表面的残余应力分布的表面改性方法的场合。
背景技术
在高功率激光辐射下，当激光的能量密度超过液体的击穿阈值，液体介质会被“光击穿”，在击穿区域产生高温高压的等离子体。等离子体膨胀，形成以超音速传播的冲击波。同时伴随着空化气泡的产生，即激光空化泡。激光空化泡是研究空泡现象的有力工具，有助于开展水下冲击强化、水下打孔、空化空蚀特性等研究。
早在1753年欧拉(Euler)就注意到当水管中某处的压强降低至蒸汽压甚至负值时，水与管壁分离，并在该处形成一个真空空间，通常人们将这种现象称为空化。随后，人们发现在液体流动和液力机械中，即从液体流动到水泵、水轮机或船舶螺旋桨都可能发生空化现象。空化现象是高速运动的液体所特有的物理现象，它的初生与发展取决于很多复杂的因素，一方面对水利机械、液体流动特性等有着严重的影响，如侵蚀破坏液力机械的叶片，在血液流动中损坏内脏等；另一方面合理利用空化现象也能对生产、生活产生帮助，如减少水污染，提高眼科手术的疗效及水中激光打孔的效率等。因此，几十年来，空化现象以及对于如何合理利用空化现象来为社会的生产、生活服务一直是科研工作者研究的热点问题之一。
在翻阅相关文献后，发现各种空化装置中对水槽不具备易换性和夹固性，不能实现计算机控制系统与各系统自动化，不利于实验的连续性、精确性和有效性。鉴于此不足，本人提出了上文所述装置。
发明内容
本发明的目的是提供一种激光诱导空化强化的装置及方法，可以更方便地研究空化强化机制，为其工业推广提供设备保障。
为实现上述目的，本发明采取的技术方案为：一种多系统自动化协调工作提高激光诱导空化强化的装置，包括激光空化装置和固定台，所述固定台内设有水槽，所述水槽内装有垫块，所述水槽的槽壁上设有温度传感器，所述温度传感器与计算机连接；所述 固定台位于升降装置上，所述升降装置位于二轴联动平台上，所述激光空化装置发出的激光穿过所述水槽的侧壁后在水槽内聚焦；所述激光空化装置与计算机连接，所述升降装置和所述二轴联动平台通过CNC伺服系统与计算机连接。
进一步的，所述固定台上端设有导向杆，所述导向杆上安装有活动板，所述活动板与所述导向杆移动副连接，所述活动板与气缸的活塞杆连接，所述气缸通过电磁阀与氮气瓶连接。
进一步的，所述升降装置包括升降台，所述固定台位于所述升降台上，所述升降台依次通过轴、联轴器和伺服电机与所述CNC伺服系统连接。
进一步的，所述激光空化装置包括激光控制器，YAG激光器，45°全反镜，扩束镜和聚焦镜，所述激光器控制器控制YAG激光器发射激光，通过45°全反镜、扩束镜和聚焦镜后穿过水槽的侧壁后射入水槽中聚焦。
进一步的，还包括一个成像系统，所述成像系统包括照明闪光灯，高速摄像机和CCD，所述照明闪光灯、所述高速摄像机和所述CCD均与计算机连接。用于记录空化泡的脉动及溃灭过程。
进一步的，所述水槽的上方还装有水听器，所述水听器与所述计算机连接。
本发明还提供一种多系统自动化协调工作提高激光诱导空化强化的装置的使用方法，包括如下步骤：
S1用无水乙醇或丙酮对靶材和垫块表面进行擦拭，除去其表面的油污和灰层，防止对实验造成干扰，影响实验精度；将靶材和垫块一起放入水槽中，再放入固定台中，向水槽中加适量纯净水将靶材和垫块淹没；
S2计算机控制电磁阀，利用气缸，活动板、导向杆、氮气瓶和电磁阀组成的夹紧系统对水槽进行夹紧固定；
S3激光器控制器控制YAG激光器发射激光，通过45°全反镜、扩束镜和聚焦镜组成的能量密度放大系统射入水槽的水中；
S4计算机控制CNC伺服系统，通过升降台、联轴器、伺服电机和轴组成的升降系统实现对水槽的升降；其中，升降台是通过齿轮齿条机构实现上下运动的，利用已知的齿轮齿条传动比，根据伺服电机的转数可得出升降距离，将数值显示在计算机屏幕上，避免人工读数带来的误差；同时温度传感器向计算机实时反馈当冲击过程中的水温，并将数值显示在计算机屏幕上；
S5通过清洗靶材表面，分析其残余应力分布，来确定激光空化强化的效果；
S6调节升降系统，改变水温，重复上述操作，直至得到激光空化强化的最优残余应力分布，确定最优残余应力分布下的水温及最佳强化距离ds；所述ds为靶材强化表面与激光在水槽中聚焦点之间的距离；
S7保持最佳强化距离ds和水温不变，计算机控制二轴联动平台对靶材整个待强化表面进行强化。
进一步的，还包括对激光空化过程进行监控的步骤：将高速摄像机及CCD组成的成像系统与计算机相连，并将水听器放入水槽，计算机控制照明闪光灯开关，并实时接收水听器反馈的声波信号与成像系统的信号；通过对声波信号和成像系统的信号进行分析，为研究最优残余应力分布下的水温及最佳强化距离ds下的激光空化过程提供数据支撑。
本发明的优点在于：(1)利用气缸可对多种大小的水槽进行灵活装夹固定，具备易换性；(2)带有齿轮齿条机构的升降系统实现了数控性和精确性，避免了使用五轴联动工作台、数控操作台等大型昂贵的机械，既方便快捷又减少成本；(3)将上述各系统与计算机相连实现了自动化，保证了实验的连续性，准确性和方便快捷。(4)该强化方法和装置相对于传统具有无污染，利用率高等优点，可用于工业推广。
附图说明
图1为多系统自动化协调工作提高激光诱导空化强化的装置主视图。
图2为多系统自动化协调工作提高激光诱导空化强化的装置俯视图。
图中，1、升降台，2、气缸，3、活动板，4、水听器，5、导向杆，6、水槽，7、固定台，8、靶材，9、温度传感器，10、垫块，11、联轴器，12、伺服电机，13、二轴联动平台，14、轴，15、照明闪关灯，16、高速摄像机，17、CCD，18、CNC伺服系统，19、计算机，20、激光控制器，21、YAG激光器，22、45°全反镜，23、扩束镜，24、聚焦镜，25、氮气瓶，26、电磁阀。
具体实施方式
如图1和图2所示，一种多系统自动化协调工作提高激光诱导空化强化的装置，包括激光空化装置和固定台7，所述激光空化装置包括激光控制器20，YAG激光器21，45°全反镜22，扩束镜23和聚焦镜24，所述激光器控制器20控制YAG激光器21发射激光，通过45°全反镜22、扩束镜23和聚焦镜24后穿过水槽6的侧壁后射入水槽6中聚焦。所述固定台7内设有水槽6，所述水槽6内装有垫块10，所述固定台7上端设有导向杆5，所述导向杆5上安装有活动板3，所述活动板3与所述导向杆5移动副连接，所 述活动板3与气缸2的活塞杆连接，所述气缸2通过电磁阀26与氮气瓶25连接。所述水槽6的槽壁上设有温度传感器9，所述温度传感器9与计算机19连接；所述水槽6的上方还装有水听器4，所述水听器4与所述计算机19连接，用于监控空化泡的声波信息，还包括一个成像系统，所述成像系统包括照明闪光灯15，高速摄像机16和CCD17、照明闪光灯15、高速摄像机16和CCD17均与计算机19连接，用于记录空化泡的脉动及溃灭过程。所述固定台7位于升降装置上，升降装置包括升降台1，所述固定台7位于所述升降台1上，所述升降台1依次通过轴14、联轴器11和伺服电机12与所述CNC伺服系统18连接。所述升降装置位于二轴联动平台13上，所述激光空化装置发出的激光穿过所述水槽6的侧壁后在水槽6内聚焦；所述激光空化装置与计算机19连接，所述升降装置和所述二轴联动平台13通过CNC伺服系统18与计算机19连接。
操作时，先用无水乙醇或丙酮对靶材8和垫块10表面进行擦拭；将靶材8和垫块10一起放入水槽6的适当位置后，再放入固定台7中，向水槽中加适量纯净水将靶材8和垫块10淹没，从计算机上看到温度传感器9实时反馈的当前以及冲击过程中的水温；计算机19分别调节加紧系统和升降系统；在激光器控制器20上设置好激光参数后(包括激光能量、输出波长、光斑直径)，控制YAG激光器21发射激光经能量密度放大后产生空泡，分析实验数据，清洗靶材8表面，分析其残余应力分布；调节升降系统，改变水温，重复上述操作，直至得出最佳强化距离ds(所述ds为靶材8强化表面与激光在水槽6中聚焦点之间的距离)；保持ds不变，计算机19控制二轴联动平台13对靶材8整个表面进行强化。同时为了更深入的研究激光空化在最佳环境下的空化过程，水听器和成像系统工作及时将信号反馈到计算机19，便于科研人员对空化过程进行更详细的观察和研究。
最后应当说明的是，以上内容仅用以说明本发明的技术方案，而非对本发明保护范围的限制，本领域的普通技术人员对本发明的技术方案进行的简单修改或者等同替换，均不脱离本发明技术方案的实质和范围。

Claims (8)

  1. 一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，包括激光空化装置和固定台(7)，所述固定台(7)内设有水槽(6)，所述水槽(6)内装有垫块(10)，所述水槽(6)的槽壁上设有温度传感器(9)，所述温度传感器(9)与计算机(19)连接；所述固定台(7)位于升降装置上，所述升降装置位于二轴联动平台(13)上，所述激光空化装置发出的激光穿过所述水槽(6)的侧壁后在水槽(6)内聚焦；所述激光空化装置与计算机(19)连接，所述升降装置和所述二轴联动平台(13)通过CNC伺服系统(18)与计算机(19)连接。
  2. 根据权利要求1所述的一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，所述固定台(7)上端设有导向杆(5)，所述导向杆(5)上安装有活动板(3)，所述活动板(3)与所述导向杆(5)移动副连接，所述活动板(3)与气缸(2)的活塞杆连接，所述气缸(2)通过电磁阀(26)与氮气瓶(25)连接。
  3. 根据权利要求2所述的一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，所述升降装置包括升降台(1)，所述固定台(7)位于所述升降台(1)上，所述升降台(1)依次通过轴(14)、联轴器(11)和伺服电机(12)与所述CNC伺服系统(18)连接。
  4. 根据权利要求1或2或3所述的一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，所述激光空化装置包括激光控制器(20)，YAG激光器(21)，45°全反镜(22)，扩束镜(23)和聚焦镜(24)，所述激光器控制器(20)控制YAG激光器(21)发射激光，通过45°全反镜(22)、扩束镜(23)和聚焦镜(24)后穿过水槽(6)的侧壁后射入水槽(6)中聚焦。
  5. 根据权利要求4所述的一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，还包括一个成像系统，所述成像系统包括照明闪光灯(15)，高速摄像机(16)和CCD(17)，所述照明闪光灯(15)、所述高速摄像机(16)和所述CCD(17)均与计算机(19)连接。
  6. 根据权利要求5所述的一种多系统自动化协调工作提高激光诱导空化强化的装置，其特征在于，所述水槽(6)的上方还装有水听器(4)，所述水听器(4)与所述计算机(19)连接。
  7. 一种多系统自动化协调工作提高激光诱导空化强化的装置的使用方法，包括如下步骤：
    S1用无水乙醇或丙酮对靶材(8)和垫块(10)表面进行擦拭，除去其表面的油污和灰层，防止对实验造成干扰，影响实验精度；将靶材(8)和垫块(10)一起放入水槽(6)中，再放入固定台(7)中，向水槽中加适量纯净水将靶材(8)和垫块(10)淹没；
    S2计算机(19)控制电磁阀(26)，利用气缸(2)，活动板(3)、导向杆(5)、氮气瓶(25)和电磁阀(26)组成的夹紧系统对水槽(6)进行夹紧固定；
    S3激光器控制器(20)控制YAG激光器(21)发射激光，通过45°全反镜(22)、扩束镜(23)和聚焦镜(24)组成的能量密度放大系统射入水槽的水中；
    S4计算机(19)控制CNC伺服系统(18)，通过升降台(1)、联轴器(11)、伺服电机(12)和轴(14)组成的升降系统实现对水槽的升降；其中，升降台(1)是通过齿轮齿条机构实现上下运动的，利用已知的齿轮齿条传动比，根据伺服电机(12)的转数可得出升降距离，将数值显示在计算机屏幕上，避免人工读数带来的误差；同时温度传感器(9)向计算机(19)实时反馈当冲击过程中的水温，并将数值显示在计算机屏幕上；
    S5通过清洗靶材(8)表面，分析其残余应力分布，来确定激光空化强化的效果；
    S6调节升降系统，改变水温，重复上述操作，直至得到激光空化强化的最优残余应力分布，确定最优残余应力分布下的水温及最佳强化距离ds；所述ds为靶材(8)强化表面与激光在水槽(6)中聚焦点之间的距离；
    S7保持最佳强化距离ds和水温不变，计算机(19)控制二轴联动平台(13)对靶材(8)整个待强化表面进行强化。
  8. 根据权利要求7所述的一种多系统自动化协调工作提高激光诱导空化强化的装置的使用方法，其特征在于，还包括对激光空化过程进行监控的步骤：将高速摄像机(16)及CCD(17)组成的成像系统与计算机(19)相连，并将水听器(4)放入水槽(6)，计算机(19)控制照明闪光灯(15)开关，并实时接收水听器反馈的声波信号与成像系统的信号；通过对声波信号和成像系统的信号进行分析，为研究最优残余应力分布下的水温及最佳强化距离ds下的激光空化过程提供数据支撑。
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