WO2016085277A1 - Appareil de transfert de substrat - Google Patents

Appareil de transfert de substrat Download PDF

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Publication number
WO2016085277A1
WO2016085277A1 PCT/KR2015/012799 KR2015012799W WO2016085277A1 WO 2016085277 A1 WO2016085277 A1 WO 2016085277A1 KR 2015012799 W KR2015012799 W KR 2015012799W WO 2016085277 A1 WO2016085277 A1 WO 2016085277A1
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WO
WIPO (PCT)
Prior art keywords
magnetic
tray
guide
transfer
magnet
Prior art date
Application number
PCT/KR2015/012799
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English (en)
Korean (ko)
Inventor
김정건
김선길
김남훈
김종대
고원일
소병호
손승경
이기태
이상호
천민호
한응용
Original Assignee
한국알박㈜
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020150131585A external-priority patent/KR20160063969A/ko
Application filed by 한국알박㈜ filed Critical 한국알박㈜
Priority to CN201580003423.1A priority Critical patent/CN105993068B/zh
Publication of WO2016085277A1 publication Critical patent/WO2016085277A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • the present invention relates to a substrate transfer apparatus, and more particularly, to a substrate transfer apparatus for transferring a tray on which a substrate is mounted in a non-contact manner.
  • a liquid crystal display device LCD
  • PDP plasma display panel device
  • FED field emission display device
  • ELD electroluminescence display device
  • a flat panel display device such as an ELD is manufactured by performing a plurality of processes on a substrate. That is, a deposition process, a photolithography process, and an etching process are repeated a plurality of times on the substrate, and a process such as cleaning, bonding, and cutting is performed to manufacture a flat panel display device.
  • the manufacturing process of such a flat panel display device is performed in a plurality of chambers in which an optimal environment is created.
  • an in-line method for placing a substrate on a tray and then moving the tray vertically or inclined to pass through a plurality of chambers is being considered.
  • the conveying apparatus for conveying the substrate may include a tray on which the substrate is seated, and a driving roller which contacts the lower portion of the tray and rotates by a motor to provide thrust to the tray. That is, in the conventional conveying apparatus, the drive roller provided in the lower side of the chamber contacts the lower part of the tray, and moves the tray by the rotational force of the drive roller.
  • a conveying device is shown in Korean Patent Laid-Open Publication No. 2003-0068292.
  • the present invention provides a substrate transfer apparatus capable of preventing the generation of particles by transferring in contact with the tray.
  • the present invention provides a substrate transfer apparatus capable of preventing the generation of particles by magnetically floating the tray.
  • a substrate transfer apparatus includes a tray on which a substrate is seated; A magnetic conveying unit provided below the tray and magnetically floating the tray and transferring the magnetic tray by magnetic force; And a guide unit which is in contact with the tray to guide the transfer of the tray.
  • a transport base further includes a contact area provided in contact with a lower side of the tray and an extension area extending downward from both sides of the contact area.
  • the magnetic conveying unit includes a magnetic floating portion provided in one region of the conveying base to magnetically float the tray, and a magnetic conveying portion provided below the magnetic floating portion to convey the magnetically floated tray in one direction by a magnetic force.
  • the magnetically levitated portion is in contact with the transfer base and includes first magnetic levitating means comprising at least one magnet, and at least one magnet spaced apart from the first magnetic levitating means and comprising the first magnetic levitating means and the attraction and repulsion force. At least one of which includes a second magnetic levitation means to act.
  • the magnetic conveying unit includes a rotating shaft, magnetic rotating means including a plurality of magnets provided to surround the rotating shaft, and magnetic conveying means spaced apart from the magnetic rotating means and including a plurality of magnets.
  • the apparatus further includes an accommodating means accommodating the magnetic rotating means therein and having a second magnetic levitating means contacted thereon.
  • a plurality of magnets of the magnetic conveying means are provided in at least one region of the extending region of the conveying base facing the magnetic rotating means.
  • the plurality of magnets of the magnetic rotation means are provided to alternately have different polarities to surround the rotating shaft at a predetermined angle, and the plurality of magnets of the magnetic conveyance means are alternately provided with different polarities and the magnets of the magnetic rotation means. Is provided at the same angle as.
  • the guide unit includes a first guide magnet coupled to an upper portion of the tray, and a second guide magnet provided on an upper wall of the chamber spaced apart from the first guide magnet by a predetermined distance, and the first and second guide magnets At least one of the repulsive force and the attractive force acts.
  • the guide unit further includes a transfer guide provided between the tray and the inner wall of the chamber.
  • the transfer guide is provided between the extension area and the inner wall of the chamber.
  • the apparatus further includes a space keeping means provided in at least one region between the magnetic transfer unit and the guide unit.
  • the space keeping means is provided in at least one of the area between the extension area and the magnetic levitation portion, and between the extension area and the transfer guide.
  • At least a portion of the transfer guide moves in a direction approaching and away from the tray.
  • the transfer guide provided in the traverse chamber is located at a first position close to the tray during the transfer of the tray, and is located at a second position away from the tray during the transfer of the tray.
  • a magnetic transfer unit is provided at the lower side of the tray on which the substrate is seated so as to magnetically float the tray and a guide unit is provided at the upper side of the tray and the side of the tray to guide the movement of the tray. do. Therefore, no friction is generated between the tray and the magnetic conveying unit so that no particles are generated, and thus, product defects due to the particles are not generated and failure of accessories such as a vacuum pump is not generated.
  • the transfer guide guiding the transfer of the tray may move in a direction closer to and farther from the tray. That is, the conveyance guide of the traverse chamber is disposed closely to the tray during the conveyance of the tray, and is disposed away from the tray to facilitate the positional movement of the tray during the conveyance of the tray. Therefore, the moving margin of the tray can be increased when the tray is moved in the traverse chamber.
  • FIG. 1 is a front view of a substrate transfer apparatus according to an embodiment of the present invention.
  • Figure 2 is a side view of the substrate transfer apparatus according to an embodiment of the present invention.
  • FIG 3 is a side view of a magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention.
  • FIG. 4 is a schematic diagram of a magnetic conveying part of the substrate conveying apparatus according to the first embodiment of the present invention.
  • FIG. 5 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the second embodiment of the present invention.
  • FIG. 6 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the third embodiment of the present invention.
  • FIG. 7 is a side view of the guide unit of the substrate transfer apparatus according to an embodiment of the present invention.
  • FIG 8 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fourth embodiment of the present invention.
  • FIG 9 is a side view of a magnetic transfer unit of the substrate transfer apparatus according to the fifth embodiment of the present invention.
  • FIGS. 10 and 11 are side views of a substrate transfer apparatus according to a sixth embodiment of the present invention.
  • FIG. 1 is a front view of a substrate transfer apparatus according to a first embodiment of the present invention
  • FIG. 2 is a side view of a substrate transfer apparatus according to a first embodiment of the present invention. That is, FIG. 1 is a front view and FIG. 2 is a side view from the direction in which a board
  • 3 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention
  • FIG. 4 is a schematic view of the magnetic transfer unit of the substrate transfer apparatus according to the first embodiment of the present invention.
  • a substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate, and is provided below the tray 100 to magnetically float the tray 100 and generate a magnetic force. It may include a magnetic transfer unit 200 for transferring the tray 100 by, and a guide unit 300 provided on the tray 100 to guide the transfer of the tray 100.
  • the tray 100 is provided in a rectangular frame shape with an empty inside to mount a substrate. That is, the tray 100 may be provided with four bars having a predetermined length spaced apart at predetermined intervals up, down, left, and right, and the edges of the bars contact each other to form a hollow rectangular frame shape. In addition, the tray 100 may be provided with a plurality of clamps for clamping the substrate so that the substrate can be attached and detached. In this case, the substrate may be fixed to the four edges of the tray 100 by a predetermined width and clamped by the clamp. The tray 100 is mounted on a substrate and transported in a vertical or inclined state.
  • a plurality of chambers are connected in one direction, and a predetermined process such as a thin film deposition process is performed on the substrate while the tray 100 on which the substrate is mounted moves inside the plurality of chambers.
  • the plurality of chambers in which the tray 100 moves include a loading chamber for seating a substrate on the tray 100, a plurality of deposition chambers for depositing a predetermined thin film on a substrate seated on the tray 100, and a tray 100. It may include a traverse chamber and the like to lift the position). That is, after the tray 100 seats the substrate in the loading chamber, the plurality of thin films may be deposited on the substrate while moving the plurality of deposition chambers, and the position may be moved to the loading chamber in the traverse chamber.
  • the loading chamber, the plurality of deposition chambers, and the traverse chamber may maintain a vacuum state.
  • the substrate may be various substrates for manufacturing a flat panel display including a liquid crystal display, for example, may be made of a material including glass, plastic, film, and the like.
  • a lower portion of the tray 100 is provided with a transfer base 110 in contact with a portion of the transfer unit 200.
  • the transfer base 110 may be provided in the entire area under the tray 100. That is, the transport base 110 may be provided to have the same length as the lower portion of the tray 100, and may be connected to the lower portion of the tray 100 to have a predetermined thickness downward.
  • the transfer base 110 is provided with a first area 111 having the same width as the width of the tray 100 and a width lower than the width of the tray 100, for example, provided below the first area 111.
  • the second region 112 may be provided to be 1/2 wider than the tray 110.
  • a portion of the transfer unit 200 may contact the second area 112.
  • the transfer base 110 may be provided in various shapes.
  • the magnetic conveying unit 200 magnetically floats the tray 100 to transfer the tray 100 while maintaining a non-contact state with the tray 100.
  • the magnetic conveying unit 200 is a magnetic levitation portion 210 to magnetically injure the tray 100, the magnetic levitation portion 210 and the attraction force or repulsive force acts by the magnetic levitation portion 210 It may include a magnetic transfer unit 220 for transferring the (100).
  • the magnetic levitation part 210 includes a first magnetic levitation means 211 provided in contact with the transfer base 110 and a second magnetic levitation means 212 spaced apart from the first magnetic levitation means 211. can do.
  • the second magnetic levitation means 212 may be provided between the tray 100 and the inner walls of the plurality of chambers in which the tray 100 is transferred.
  • the second magnetic levitating means 212 may be fixed to the inner walls of the plurality of chambers in which the tray 100 is transferred, and may be fixed to a predetermined height from the bottom of the chamber.
  • the tray 100 on which the substrate is seated may be transferred through a plurality of chambers connected in series, and the first magnetic levitating means 211 may include the second area 112 of the transport base 110 under the tray 100. Coupled to both sides and the second magnetic levitating means 212 is provided between the tray 100 and the chamber facing the first magnetic levitating means 211 may be coupled to the chamber inner wall or bottom surface. As shown in FIG. 3, the first magnetic levitation means 211 includes a first fixing member 211a fixed to both sides of the second area 112 of the transport base 110 and a first fixing member 211a.
  • At least one first magnet 211b provided in a predetermined region of the side surface and at least one second magnet 211c provided in a predetermined region of the lower surface of the first fixing member 211a may be included. That is, each of the first and second magnets 211b and 211c may be provided one by one, or at least one of the first and second magnets 211b and 211c may be provided in two or more. For example, one first magnet 211b may be provided and two or more second magnets 211c may be provided.
  • the first fixing member 211a may be provided in a substantially hexahedral shape having a predetermined height and width, the same length and the second as that of the second region 112 along the second region 112 of the transfer base 110.
  • the first magnetic levitating means 211 may be coplanar with the transport base 110. That is, the width formed by the first fixing member 211a and the second region 112 therebetween may be the same as the width of the first region 111 or the tray 100 of the transport base 110. Of course, the width formed by the second region 112 and the first magnetic levitating means 211 on one side and the other side may be larger or smaller than the width of the transfer base 110 or the tray 100.
  • the first and second magnets 211b and 211c may be embedded in the first fixing member 211a to a predetermined depth.
  • the first and second magnets 211b and 211c are formed on the first fixing member 211a so that the surfaces of the first and second magnets 211b and 211c may be coplanar with the surfaces of the first fixing member 211a.
  • the first fixing member 211a may be made of a material such as metal, ceramic, or plastic that does not respond to magnetic force by the magnets.
  • the first fixing member 211a may be made of tungsten.
  • the second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 spaced apart from the first magnetic levitation means 211 by a predetermined interval.
  • the second magnetic levitation means 212 may be provided on the inner wall of the chamber and spaced apart from the first magnetic levitation means 211 so that the inner surface thereof may face the first magnetic levitation means 211.
  • the second magnetic levitating means 212 may include the second fixing member 212a facing the first plate 211a of the first magnetic levitating means 211 at a predetermined interval and the first magnetic levitating means 211.
  • Third and fourth magnets 212b and 212c which face the first magnet 211b and the second magnet 211c may be included.
  • the third and fourth magnets 212b and 212c may be provided one by one in correspondence with the number of the first and second magnets 211b and 211c, respectively, and at least one of the first and second magnets 211b and 211c. Any one may be provided in two or more. For example, when one first magnet 211b is provided and two or more second magnets 211c are provided, one third magnet 212b may be provided and two or more fourth magnets 212c may be provided. .
  • one side of the second fixing member 212a is connected to the inner wall of the chamber or the bottom surface of the chamber, and has one side formed in a “b” shape so as to be spaced apart from the first fixing member 211a having a rectangular cross section by a predetermined interval.
  • the other side may be provided in a " ⁇ " shape.
  • the first magnet 211b and the third magnet 212b have different polarities and, accordingly, an attractive force may act.
  • the second magnet 211c and the fourth magnet 212c have the same polarity with each other, and thus repulsive force may act.
  • the repulsive force acts between the second and fourth magnets 211c and 212c to magnetically float the tray 100, and the attraction force acts between the first and third magnets 211b and 212b, Up and down movement can be prevented.
  • the tray 100 may magnetically float and move upwards by the repulsive force between the second and fourth magnets 211c and 212c, and the attraction force is applied between the first and third magnets 211b and 212b. It can be suppressed.
  • the second fixing member 212a may be made of a material such as metal, ceramic, or plastic, which does not respond to magnetic force by the magnets.
  • the second fixing member 212a may be made of tungsten. have.
  • the first magnetic levitation means 211 may be provided in the entire area of the transfer base 110 in the longitudinal direction of the tray 100, that is, the traveling direction of the tray 100, the second magnetic levitation means 212 May be provided in the entire area where the tray 100 is moved. That is, since the tray 100 passes through the plurality of chambers, the second magnetic levitating means 212 may be provided on the inner walls of the plurality of chambers in an area facing the first magnetic levitating means 211. However, at least one of the first and second magnetic levitation means 211 and 212 may be provided in plural at a predetermined interval.
  • the second magnetic levitation means 212 may be provided in the entire area in the longitudinal direction, and a plurality of first magnetic levitation means 211 may be provided at predetermined intervals.
  • the first and second magnets 211b and 211c of the first magnetic levitating means 211 and the third and fourth magnets 212b and 212c of the second magnetic levitating means 212 extend in the entire area in the longitudinal direction. It may be provided, or may be provided in plurality a predetermined interval apart.
  • the first and second magnets 211b and 211c may be provided in the entire area, and the third and fourth magnets 212b and 212c may be provided at predetermined intervals.
  • a space maintaining means 213 may be provided between the first magnetic levitating means 211 and the second magnetic levitating means 212 to maintain the space therebetween. That is, since the attraction force acts on the first and third magnets 211b and 212b facing each other, the interval between the first and second magnetic levitation means 211 and 212 is narrowed while the tray 100 moves to magnetic levitation.
  • the first and third magnets 211b and 212b may be attached to each other, and the space keeping means 213 may be provided to maintain the space between the first and second magnetic levitating means 211 and 212.
  • the gap maintaining means 213 may be provided in the lower regions of the first and third magnets 211b and 212b.
  • the gap maintaining means 213 may be provided between the outer side surface of the first magnetic levitation means 211 and the inner side surface of the second magnetic levitation means 212.
  • the space keeping means 213 may be provided in the entire area in the longitudinal direction between the first and second magnetic levitating means 211 and 212, or may be provided in plural spaced predetermined intervals.
  • the magnetic conveying unit 220 is provided with magnetic rotating means 221 spaced apart from the lower side of the conveying base 110 by a predetermined distance, and magnetic conveying means provided below the conveying base 110 and spaced apart from the magnetic rotating means 221 by a predetermined distance. 222.
  • the magnetic rotation means 221 may be provided spaced apart from the lower side of the transfer base 110 by a predetermined interval.
  • the magnetic rotating means 221 may be provided with the same width as the width of the tray 100, or may be provided with a width larger or smaller than the width of the tray 100.
  • the magnetic rotation means 221 may include a rotation shaft 221a and a plurality of fifth magnets 221b formed on the surface of the rotation shaft 221a.
  • the rotating shaft 221a may be provided in a substantially circular bar shape and may rotate in one direction and the other direction by a rotation motor (not shown).
  • the plurality of fifth magnets 221b may be provided in a shape that surrounds the surface of the rotation shaft 221a at a predetermined angle, for example, in the form of a screw thread. That is, the plurality of fifth magnets 221b may be provided in plural so as to surround the rotation shaft 221a at an angle of 45 °, for example, as shown in FIG. 4. In this case, the plurality of magnets 221b may be alternately provided with S-poles and N-poles while wrapping at an angle of 45 °, for example.
  • the magnetic conveying means 222 may be provided below the conveying base 110.
  • the magnetic conveying means 222 may be provided below the second area 112 of the conveying base 110 between the magnetic levitation portion 210.
  • the magnetic transfer means 222 may be provided with a magnet of different polarity is repeated. That is, as shown in FIG. 4, the magnetic conveying means 222 includes a third fixing member 222a fixed below the second region 112 of the conveying base 110 and one surface of the third fixing member 222a.
  • the plurality of sixth magnets 222b may be provided in the plurality, and the plurality of sixth magnets 222b may be alternately provided with different polarities, that is, S poles and N poles.
  • the plurality of sixth magnets 222b of the magnetic conveying means 222 may be provided to have the same angle as that of the plurality of fifth magnets 221b of the magnetic rotating means 221, for example, an angle of 45 °. . Accordingly, the polarity of the magnetic rotating means 221 and the polarity of the magnetic conveying means 222 have different polarities or the same polarity, and accordingly the attraction or repulsive force acts to rotate the magnetic rotating means 221. As a result, the magnetic conveying means 222 is moved in one direction. That is, the rotational movement of the magnetic rotating means 221 is converted into a linear movement by the magnetic conveying means 222 to move the magnetically levitated tray 100.
  • the guide unit 300 may include a first guide magnet 310 coupled to an upper portion of the tray 100, a second guide magnet 320 spaced apart from the first guide magnet 310 by a predetermined interval and provided on an upper wall of the chamber. It may include.
  • the first and second guide magnets 310 and 320 may have the same polarity so that the repulsive force acts on each other, and may have different polarities so that the attractive force acts on each other.
  • the first and second guide magnets 310 and 320 may be provided in various shapes.
  • the first and second guide magnets 310 and 320 may be provided in a linear shape facing each other.
  • the first guide magnet 310 is provided in a circular rod shape
  • the second guide magnet 320 has a cross section bent in a ' ⁇ ' shape, for example so as to surround the first guide magnet 310 from above.
  • the second guide magnet 320 may be provided to surround the first guide magnet 310 at predetermined intervals. Therefore, the upper end of the tray 100 acts to push or pull the first guide magnet 310 by the second guide magnet 320 at both sides of the first guide magnet 310 acts as tray 100 Is guided so that it does not fall while being transported.
  • the magnets of the present invention may use an electromagnet in which the core and the coil are combined, use a permanent magnet, or use a combination of the electromagnet and the permanent magnet.
  • the substrate transfer apparatus is provided with a magnetic transfer unit 200 that magnetically floats and transfers the tray 100 under the tray 100 on which the substrate is seated, and the tray 100.
  • the magnetic conveying unit 200 is a magnetic levitation portion 210 for magnetically floating the tray 100, and a magnetic transfer portion 220 for moving the magnetically levitated tray 100 by converting the rotational movement into a linear movement by the magnetic force ). Therefore, the substrate transfer apparatus according to an embodiment of the present invention magnetically floats the tray 100 by the magnetic levitation part 210, and then rotates the magnetic rotation part 220 in one direction so that the magnetic levitated tray 100 is rotated. It moves in one direction. In one embodiment of the present invention, no friction is generated between the tray 100 and the magnetic transfer unit 200 so that no particles are generated. Therefore, product defects are not generated by the particles and failure of accessories such as a vacuum pump does not occur.
  • the substrate transfer apparatus according to the present invention may be implemented in various ways to magnetically float the tray 100 in the lower portion of the tray 100, and to transfer the tray 100 using a magnetic force. That is, the structure of the lower portion of the tray 100 can be variously changed.
  • FIGS. 5 and 6 Another example of this invention is shown in FIGS. 5 and 6.
  • FIG. 5 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the second embodiment of the present invention.
  • the second embodiment of the present invention will be described.
  • the substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate and a lower portion of the tray 100 to transfer the tray 100 by magnetic levitation. It may include a magnetic transfer unit 200 and a guide unit 300 provided on the tray 100 to guide the transfer of the tray 100.
  • a tray 100 for mounting and transferring a substrate and a lower portion of the tray 100 to transfer the tray 100 by magnetic levitation. It may include a magnetic transfer unit 200 and a guide unit 300 provided on the tray 100 to guide the transfer of the tray 100.
  • the same configuration as the first embodiment of the present invention will be omitted or simplified.
  • the conveyance base 110 is provided below the tray 100, and the conveyance base 110 is provided below the first region 111 and the first region 111 that is the same as the width of the tray 100. It may include a second region 112 narrower than the 111 and a third region 113 provided below the second region 112 and provided to surround the magnetic rotation means 222.
  • the third region 113 includes an extension portion extending downward from the second region 112, a horizontal portion 113a provided horizontally under the extension portion, and a vertical portion extending downward from both sides of the horizontal portion 113a. (113b, 113c).
  • the horizontal portion 113a is provided wider than the width of the magnetic rotating means 221, and the vertical portions 113b, 113c are provided higher than the height of the magnetic rotating means 221. Therefore, the horizontal portion 113a and the vertical portions 113b and 113c on both sides thereof are provided to surround the upper and side portions of the magnetic rotating means 221.
  • the magnetic conveying unit 200 may include a magnetic levitating part 210 that magnetically injures the tray 100, and a magnetic levitating part that is magnetically levitated by the magnetic levitating part 210 so that the magnetic levitating part 210 and a manpower or repulsive force act. It may include a magnetic transfer unit 220 for transferring the 100.
  • the magnetic levitation section 210 is a first magnetic levitation means 211 provided in the second area 112 of the transfer base 110 and the second magnetic levitation means provided apart from the first magnetic levitation means 211. 212, a gap maintaining means 213 for maintaining a gap between the first and second magnetic levitation means 211, 212, and a support means 214 for supporting the second magnetic levitation means 212.
  • the first magnetic levitating means 211 is provided in the first fixing member 211a fixed to the side surfaces and the lower surface of the second region 112 of the transfer base 110 and in a predetermined region of the side surface of the first fixing member 211a. At least one first magnet 211b and at least one second magnet 211c provided in a predetermined region of the lower surface of the first fixing member 211a may be included.
  • One side of the first fixing member 211a may be provided in a “b” shape and the other side may be provided in a “ ⁇ ” shape. In this case, the first fixing member 211a may protrude from the first region 111 of the transport base 110.
  • each of the first and second magnets 211b and 211c may be provided one by one, or at least one of the first and second magnets 211b and 211c may be provided in two or more.
  • one first magnet 211b may be provided and two or more second magnets 211c may be provided.
  • the second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 spaced apart from the first magnetic levitation means 211 by a predetermined interval.
  • the second magnetic levitating means 212 includes a second fixing member 212a facing the first fixing member 211a of the first magnetic levitating means 211 at a predetermined interval, and the first magnetic levitating means 211.
  • the first and second magnets 211b and 212c facing the first magnet 211b and the second magnet 211c may be included.
  • the third and fourth magnets 212b and 212c may be provided one by one in correspondence with the number of the first and second magnets 211b and 211c, respectively, and at least one of the first and second magnets 211b and 211c. Any one may be provided in two or more.
  • one first magnet 211b when one first magnet 211b is provided and two or more second magnets 211c are provided, one third magnet 212b may be provided and two or more fourth magnets 212c may be provided.
  • one side of the second fixing member 212a may be provided in a “b” shape and the other side may be provided in a “ ⁇ ” shape so as to be spaced apart from the first fixing member 211a by a predetermined interval.
  • the support means 214 may be provided below the second magnetic levitation means 212 to support the second magnetic levitation means 212. In other words, the support means 214 is provided between the horizontal portion of the second magnetic levitation means 212 and the bottom of the chamber to support the horizontal portion of the second magnetic levitation means 212.
  • the supporting means 214 can support the second magnetic levitation means 212 more stably by supporting the horizontal portion of the second magnetic levitation means 212. That is, the second magnetic levitation means 212 can be implemented more stably by fixing the vertical portion of the second magnetic levitation means 212 from the inner wall of the chamber and the horizontal portion supported by the support means 214.
  • a portion of the transfer base 110 and the magnetic transfer unit 220 may be provided inside the support means 214. That is, the third region 113 of the transfer base 100 may be provided inside the support means 214, and the magnetic transfer unit 220 may be provided inside the third region 220.
  • the magnetic conveying part 220 may include a magnetic rotating means 221 and a magnetic conveying means 222 spaced apart from the magnetic rotating means 221 by a predetermined distance.
  • the magnetic rotating means 221 may be formed of the conveying base 110. The inner portion is spaced apart from the horizontal portion 113a and the vertical portions 113b and 113c by a predetermined interval, and the magnetic conveying means 222 is provided in at least one region of the horizontal portion 113a and the vertical portions 113b and 113c. Can be.
  • the magnetic rotating means 221 includes a rotating shaft 221a and a plurality of fifth magnets 221b provided to surround the surface of the rotating shaft 221a at a predetermined angle, as in the exemplary embodiment of the present invention.
  • the magnetic conveying means 222 may be provided in the vertical portions 113b and 113c. That is, the magnetic conveying means 222 may be provided on both sides of the magnetic rotating means 221. Of course, the magnetic conveying means 222 may be provided in the horizontal region 113a, or may be provided in both the horizontal portion 113a and the vertical portions 113b and 113c.
  • the magnetic conveying means 222 may be provided with a predetermined fixing member and the polarity of the S pole and the N pole may be alternately provided on the fixing member. In this case, the magnetic conveying means 222 may be provided to have the same angle as the fifth magnets 221b of the magnetic rotating means 221, for example, an angle of 45 °.
  • the magnetic conveying means 222 is rotated according to the rotation of the magnetic rotating means 221. It moves in one direction. That is, the rotational movement of the magnetic rotating means 221 is converted into a linear movement by the magnetic conveying means 222 to move the magnetically levitated tray 100.
  • FIG. 6 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the third embodiment of the present invention.
  • a substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate, and a tray 100 disposed below the tray 100 to transfer the tray 100 by magnetic levitation. It may include a magnetic transfer unit 200 and a guide unit 300 provided on the tray 100 to guide the transfer of the tray 100.
  • the third embodiment of the present invention is different from the structure of the magnetic levitating unit 210 of the second embodiment of the present invention described with reference to FIG. 5, and the other embodiment of the present invention based on this.
  • An example is as follows.
  • the magnetic levitating part 210 of the magnetic conveying unit 200 is spaced apart from the first magnetic levitating means 211 and the first magnetic levitating means 211 provided in the second area 112 of the conveying base 110. Supporting the second magnetic levitation means 212, the interval maintaining means 213 for maintaining the gap between the first and second magnetic levitation means 211, 212, and the second magnetic levitation means 212 And supporting means 214.
  • the first magnetic levitation means 211 is fixed to the side and bottom of the second area 112 of the transfer base 110, the first side may be provided in the "b" shape and the other side may be provided in the " ⁇ " shape
  • the first magnet 211b may be provided on the upper surface of the first fixing member 211a spaced apart from the side surface of the first region 111 of the transfer base 110.
  • the second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 spaced apart from the first magnetic levitation means 211.
  • the second magnetic levitating means 212 includes a second fixing member 212a facing the first fixing member 211a of the first magnetic levitating means 211 at a predetermined interval, and the first magnetic levitating means 211.
  • the first and second magnets 211b and 212c facing the first magnet 211b and the second magnet 211c may be included.
  • the second fixing member 212a is spaced apart from the first fixing member 211a by a predetermined interval and is provided in a “c” shape so as to face the upper surface of the first fixing member 211a and the other side is provided in a “co” shape.
  • the second fixing member 212a may have a short upper side and a longer lower side, and may be spaced apart from the first fixing member 211a at the same interval in all regions.
  • the first magnet 211b and the third magnet 221b may have different polarities and accordingly, an attraction force may act, and the second magnet 211c and the fourth magnet 212c have the same polarity with each other and accordingly Repulsive forces can work.
  • magnets may be further provided on the side of the first fixing member 211a and the side of the second fixing member 212a facing the magnet.
  • FIG. 7 is a side view of the guide unit 300 according to an embodiment of the present invention.
  • the guide unit 300 may include a first plate 311 coupled to an upper portion of the tray 100, and a first guide magnet provided on the first plate 311. 310, a second plate 321 fixed to the upper wall of the chamber, a second guide magnet 320 provided on the second plate 321 spaced apart from the first guide magnet 310 by a predetermined interval, A predetermined distance from the side plate 330 extending from the side surface of the second plate 321, the third guide magnet 340 provided on the side surface of the first plate 311, and the third guide magnet 340.
  • the fourth guide magnet 350 Spaced between the fourth guide magnet 350 disposed on the side plate 330 and spaced between the side plate 330 and the guide magnets 310, 320, 340, and 350 provided in a predetermined region of the side plate 330. It may include a second interval maintaining means 360 for maintaining a.
  • the third and fourth guide magnets 340 and 350 may be provided between the second plate 321 above the second guide magnet 320 and the side plate 330 facing the first guide magnet 320. 311) may be provided in two regions between the side plate 330 facing the second plate 330 and the side plate 330 facing the second plate 321.
  • the first and second guide magnets 310 and 320 may have the same polarity so that the repulsive force acts on each other, and may have different polarities so that the attractive force acts on each other.
  • the third and fourth guide magnets 340 and 350 may have the same polarity so that the repulsive force acts on each other. Therefore, the upper end of the tray 100 is guided so that the tray 100 does not fall down due to the attraction or repulsive force of the first and second guide magnets 310 and 320 and the repulsive force of the third and fourth guide magnets 340 and 350. Can be transferred.
  • the vertical transfer of the tray 100 is more smoothly compared to the case of using the first and second guide magnets 310 and 320. can do.
  • the second gap maintaining means 360 is further provided, the swing width of the tray 100 can be kept constant, thereby making the vertical transfer of the tray 100 smoother.
  • a transport guide for guiding the transport of the tray 100 may be further provided below the tray 100.
  • the transfer guide may be provided spaced apart from the tray 100 with the tray 100 interposed therebetween.
  • the transfer guide may be provided between the tray 100 and the chamber inner wall. That is, two transfer guides may be provided between the side of the chamber and the tray 100 so as to be spaced apart from the tray 100 by a predetermined interval.
  • the transfer guide may be provided outside the magnetic levitation portion 210 of FIGS. 3, 5, and 6. That is, the transfer guide may be provided between the second magnetic levitation means 212 of the magnetic levitation portion 210 and the chamber inner wall.
  • the second magnetic levitation means 212 can be fixed from the bottom surface of the chamber.
  • the substrate transfer apparatus having such a transfer guide will be described with reference to FIGS. 8 and 9 as follows.
  • FIG 8 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fourth embodiment of the present invention.
  • a substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate, and a tray 100 disposed below the tray 100 to transfer the tray 100 by magnetic levitation. It may include a magnetic transfer unit 200 and a guide unit 300 for guiding the tray 100.
  • the guide unit 300 may be provided at an upper side and a lower side of the tray 100.
  • the upper side of the tray 100 may be provided with the configuration illustrated in FIG. 7, and at the lower side of the tray 100.
  • a transfer guide 370 may be provided to guide the transfer of 100.
  • the fourth embodiment of the present invention to simplify the description or the same configuration as the first to third embodiments.
  • the tray 100 is provided with a transport base 110 on the lower side, the transport base 110 is provided on the first region 111 and the side of the first region 111 that is the same as the width of the tray 100 It may include an extension area 114 provided to surround the rotation means 221. That is, the extension region 114 may extend downward from the side surface of the first region 111.
  • the extension region 114 may be provided at intervals wider than the width of the magnetic rotation means 221 so as to be spaced apart from the magnetic rotation means 221 by a predetermined interval.
  • the extension region 114 may be provided in a plate shape having a predetermined width and length.
  • the interval maintaining means 213 may be provided in the predetermined region inside the extension region 114.
  • the gap maintaining means 213 is provided between them to maintain the gap between the first and second magnetic levitating means 211 and 212.
  • the fourth embodiment of the present invention extends the extension region 114 between the extension region 114 and the magnetic conveyance unit 220 to maintain a distance between the extension region 114 and the magnetic conveyance conveyance unit 220 connected to the tray 100.
  • the gap maintaining means 213 may be provided inside the.
  • the interval maintaining means 213 may be provided in one region of the magnetic conveying part 220. That is, the gap maintaining means 213 may be fixed to a predetermined region of the extension region 114 or the magnetic conveyance unit 220 between the extension region 114 and the magnetic conveyance unit 220.
  • at least one seventh magnet 115 may be provided in at least one region, that is, the outer region of the extension region 114.
  • the magnetic conveying unit 200 may include a magnetic levitating part 210 that magnetically injures the tray 100, and a magnetic levitating part that is magnetically levitated by the magnetic levitating part 210 so that the magnetic levitating part 210 and a manpower or repulsive force act. It may include a magnetic transfer unit 220 for transferring the 100.
  • the magnetic levitation unit 210 is a first magnetic levitation means 211 is fixed to the first region 111 of the transfer base 110, and the second magnetic levitation spaced apart from the first magnetic levitation means 211 Floating means 212 may be included.
  • the first magnetic levitating means 211 is a first fixing member 211a fixed to the lower surface of the first region 111 of the transfer base 110 and at least one provided in a predetermined region of the lower surface of the first fixing member 211a. It may include a first magnet (211b) of. An upper side of the first fixing member 211a may be coupled to a lower side of the first region 111 and the bottom surface thereof may be horizontal. In this case, the width of the first fixing member 211a may be wider than the width of the first region 111.
  • the extension region 114 which is in contact with the side surface of the first fixing member 211a and extends downward, is formed in the first region 111. It can be provided wider than the width of.
  • at least one first magnet 211b below the first fixing member 211a may be provided.
  • three first magnets 211b may be provided at equal intervals.
  • the second magnetic levitation means 212 may be provided to face the first magnetic levitation means 211 spaced apart from the first magnetic levitation means 211 by a predetermined interval.
  • the second magnetic levitating means 212 includes a second fixing member 212a facing the first fixing member 211a of the first magnetic levitating means 211 at a predetermined interval, and the first magnetic levitating means 211. It may include at least one third magnet (212b) facing at least one first magnet (211b) of.
  • the second fixing member 212a may be provided in the same shape as the first fixing member 211a to be spaced apart from the first fixing member 211a by a predetermined interval.
  • the first and second fixing members 211a and 212a may have a rectangular cross-sectional shape. In this case, the second fixing member 212a of the second magnetic levitating means 212 may be fixed to one region of the magnetic conveying means 220.
  • the magnetic conveying part 220 includes a magnetic rotating means 221, a magnetic conveying means 222 spaced apart from the magnetic rotating means 221 by a predetermined interval, and a receiving means 223 accommodating the magnetic rotating means 221 inside. It may include. Receiving means 223 may receive the magnetic rotating means 221 therein and the lower side may be fixed to the chamber bottom surface. In this case, the accommodating means 223 may be provided in an empty shape such that the magnetic rotating means 221 is accommodated therein and rotatable. In addition, the receiving means 223 may be provided such that at least part of the magnetic conveying means 222 is exposed from the side. In addition, a second magnetic levitation means 212 may be provided on the upper surface of the accommodation means 223.
  • the magnetic conveying means 222 may include at least one magnet and may be provided in the extension region 114 facing the magnetic rotating means 221. That is, the extension region 114 is provided on the outer side of the accommodating means 223 spaced apart from the accommodating means 223 by a predetermined distance, and the magnetic rotation means 221 accommodated in the accommodating means 223 is provided on the inner side of the elongated region 114. Magnetic conveying means 222 including at least one magnet may be provided to face.
  • a transfer guide 370 may be provided between the magnetic transfer unit 200 and the chamber. That is, the guide unit 300 may guide the transfer of the tray 100 from the upper side and the lower side of the tray 100, and the magnetic transfer unit 200 at the side of the magnetic transfer unit 200 below the tray 100.
  • the transfer guide 370 may be provided to guide the transfer of.
  • the transfer guide 370 is provided between the magnetic transfer unit 200 and the chamber inner surface and may have a predetermined width and height.
  • the transfer guide 370 may be provided with at least one magnet in a predetermined region of the inner side. That is, the transfer guide 370 includes a vertical plate 371 provided in the height direction between the magnetic transfer unit 200 and the chamber, and at least one eighth magnet 372 provided in a predetermined region of the vertical plate 371.
  • the vertical plate 371 may be provided at, for example, the height of the first magnetic levitating means 211. That is, the vertical plate 371 may be provided at a height up to an interface between the first region 111 of the transfer base 110 and the first fixing member 211a of the first magnetic levitating means 211.
  • at least one eighth magnet 372 is provided on the vertical plate 371, and the eighth magnet 372 may be provided to face the seventh magnet 115 provided in the extension region 114.
  • the seventh magnet 115 of the extension region 114 and the eighth magnet 372 of the vertical plate 371 may have different polarities or the same polarity, and thus attraction or repulsive force may be applied.
  • the transfer guide 370 in the deposition chamber may be fixed, and the transfer guide 370 in the traverse chamber may move in a direction away from and close to the tray 100.
  • the transfer guide in the traverse chamber can be moved in a non-contact manner using a magnetic levitation. That is, the transfer guide 370 of the traverse chamber may use the same principle as the magnetic transfer unit described with reference to FIG. 4.
  • a magnetic rotation means may be provided below the vertical plate 371, spaced apart from the vertical plate 371, and provided with a rotating shaft (not shown) and a plurality of magnets (not shown) on the surface of the rotating shaft.
  • Magnets having different polarities may be provided at predetermined intervals on the lower surface of the vertical plate 371 to be spaced apart from the rotating means. Accordingly, the polarity of the magnetic rotating means below the vertical plate 371 and the polarity of the magnetic conveying means above each other have the same polarity or have the same polarity.
  • the magnetic conveying means moves in one direction or the other direction according to the rotation. That is, the rotational movement of the magnetic rotating means is converted into linear movement by the magnetic conveying means to move the magnetically levitated vertical plate 371.
  • FIG. 9 is a side view of the magnetic transfer unit of the substrate transfer apparatus according to the fifth embodiment of the present invention.
  • a substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate, and a tray 100 disposed below the tray 100 to transfer the tray 100 by magnetic levitation. It may include a magnetic transfer unit 200 and a guide unit 300 for guiding the tray 100.
  • the guide unit 300 may be provided at an upper side and a lower side of the tray 100.
  • the upper side of the tray 100 may be provided with the configuration illustrated in FIG. 7, and at the lower side of the tray 100.
  • a transfer guide 370 may be provided to guide the transfer of 100.
  • the fifth embodiment of the present invention differs from the fourth embodiment of the present invention described with reference to FIG. 8 in the formation position of the space keeping means 213.
  • the substrate transfer apparatus according to the fifth embodiment of the present invention has the same configuration as the substrate transfer apparatus according to the fourth embodiment of the present invention, and the space keeping means 213 includes the transfer guide 370 and the extended area ( 114) is provided between.
  • the gap maintaining means 213 may be provided in an extension region 114 between the transfer guide 370 and the extension region 114 or a predetermined region of the transfer guide 370. For example, it may be provided under the magnet 115 of the extension region 114.
  • the gap maintaining means 213 is provided between the substrate transfer unit 200 and the transfer guide 370 so that the substrate transfer unit 200 may be transferred inside the transfer guide 370 even when the substrate transfer unit 200 is shaken.
  • the gap maintaining means 213 may be provided between the extension region 114 and the magnetic conveyance unit 220 as well as between the transfer guide 370 and the extension region 114. That is, at least two space keeping means 213 may be provided in at least two areas.
  • the transfer guide 370 may move in one direction and the other direction opposite thereto.
  • the transfer guide in the deposition chamber may be fixed and the transfer guide in the traverse chamber may move. That is, the transfer guide provided in the traverse chamber guides the transfer of the tray 100 by maintaining the first interval with the tray 100 when the tray 100 is moved from the deposition chamber, and the transfer of the tray 100 is terminated. In the case of conveying toward the loading chamber, it moves toward the inner wall of the chamber to maintain a second gap wider than the first gap with the tray 100. Since the transfer guide is moved in the traverse chamber, the movement margin of the tray 100 may be increased when the tray 100 is moved. In other words, the tray 100 is free from the influence of the magnetic force, it is possible to smooth traverse, that is lane change (lane change).
  • the substrate transfer apparatus to which the transfer guide 370 moves will now be described with reference to FIGS. 10 and 11.
  • a substrate transfer apparatus includes a tray 100 for mounting and transferring a substrate, and a tray 100 provided below the tray 100 by magnetic levitation. It may include a guide unit 300 including a magnetic transfer unit 200 for transferring the transfer guide 370 is provided on the lower side of the tray 100 to guide the transfer of the tray 100.
  • the transfer guide 370 may move in one direction and another direction opposite to each other, and may move in a direction approaching the tray 100 and a direction away from it. This movable transfer guide 370 may be provided at least in the traverse chamber.
  • the transfer guide 370 may include a vertical plate 371a and a horizontal plate 371b, and a vertical plate 371a may be provided above the horizontal plate 371b. That is, the vertical plate 371a may be provided vertically upward from a predetermined region of the horizontal plate 371b. In addition, the vertical plate 371a may be provided with at least one eighth magnet 372 to face the seventh magnet 115 provided in the extension region 114 of the tray 100.
  • the horizontal plate 371b is provided below the vertical plate 371a and may be provided horizontally.
  • the moving part 395 may be provided below the horizontal plate 371b.
  • the moving unit 395 is provided to surround at least a portion of the lower portion of the guide rail 390 and may move in one direction and another direction that face each other along the guide rail 390. As the moving unit 395 moves, the transfer guide 370 positioned on the upper side thereof moves.
  • the support part 380 is provided below the guide rail 390.
  • the support part 380 supports the guide rail 390 and the transfer guide 370 thereon.
  • a driving means (not shown) for driving the moving part 395 may be provided in the support part 380.
  • the driving means includes a cylinder, a motor, and the like, and moves the moving part 395 in one direction close to the tray 100 as shown in FIG. 10 and in another direction away from the tray 100 as shown in FIG. 11. Will be moved.
  • the transfer guide 371 is located at a first position close to the tray 100 when the tray 100 is transferred from the deposition chamber.
  • the moving unit 395 is driven by the driving means when the lane change, that is, traversed, and the conveyance guide 371 moves in a direction away from the tray 100 so as to move the tray 100. Is located at the location. After the transfer guide 371 is moved, the tray 100 is lifted up, traversed and conveyed toward the loading chamber, and then the transfer guide 371 is moved back to the first position.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un appareil de transfert de substrat comprenant : un plateau sur lequel un substrat est chargé ; une unité de transfert magnétique prévue au niveau d'un côté inférieur du plateau, qui provoque la lévitation magnétique du plateau, et le transfert du plateau au moyen d'une force magnétique ; une unité de guidage pour guider le transfert du plateau sans réaliser de contact avec le plateau ; et un moyen d'entretien d'intervalle prévu au niveau d'au moins une région entre l'unité de transfert magnétique et l'unité de guidage.
PCT/KR2015/012799 2014-11-27 2015-11-26 Appareil de transfert de substrat WO2016085277A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201580003423.1A CN105993068B (zh) 2014-11-27 2015-11-26 基板转移装置

Applications Claiming Priority (4)

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KR1020140167325 2014-11-27
KR10-2014-0167325 2014-11-27
KR10-2015-0131585 2015-09-17
KR1020150131585A KR20160063969A (ko) 2014-11-27 2015-09-17 기판 이송 장치

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WO2016085277A1 true WO2016085277A1 (fr) 2016-06-02

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WO2019019313A1 (fr) * 2017-07-24 2019-01-31 武汉华星光电半导体显示技术有限公司 Dispositif de transmission, et système et procédé d'implantation ionique de substrat

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EP3466638B1 (fr) 2016-05-24 2023-01-11 Sumitomo Heavy Industries, Ltd. Machine de moulage par injection
JP7346020B2 (ja) * 2018-11-15 2023-09-19 株式会社アルバック 磁気浮上搬送装置
JP7326125B2 (ja) * 2019-11-18 2023-08-15 株式会社アルバック 搬送装置、および、真空処理装置
WO2021104622A1 (fr) * 2019-11-27 2021-06-03 Applied Materials, Inc. Système de lévitation magnétique, système de traitement et procédé de transport de support

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