WO2020045942A1 - Dispositif de transfert - Google Patents

Dispositif de transfert Download PDF

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Publication number
WO2020045942A1
WO2020045942A1 PCT/KR2019/010896 KR2019010896W WO2020045942A1 WO 2020045942 A1 WO2020045942 A1 WO 2020045942A1 KR 2019010896 W KR2019010896 W KR 2019010896W WO 2020045942 A1 WO2020045942 A1 WO 2020045942A1
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WO
WIPO (PCT)
Prior art keywords
carrier
magnet
chamber
roller
drive shaft
Prior art date
Application number
PCT/KR2019/010896
Other languages
English (en)
Korean (ko)
Inventor
전수환
Original Assignee
엘지전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지전자 주식회사 filed Critical 엘지전자 주식회사
Publication of WO2020045942A1 publication Critical patent/WO2020045942A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Definitions

  • the present invention relates to a conveying apparatus, and more particularly, to a conveying apparatus capable of reducing conveyance energy as a conveying apparatus for conveying a vertical carrier, even if the weight of the carrier to which the substrate is attached increases.
  • a conveying apparatus is an apparatus which conveys the carrier with a board
  • the magnetic force for carrier injury there are two methods using a permanent magnet and an electromagnet
  • the electromagnet is disadvantageous in terms of cost and management by analyzing the position of the carrier, which is disadvantageous in terms of cost and management, and implements a conveying device in the vacuum chamber There is a constraint.
  • the magnetic levitation device using permanent magnets can restrain the X, Y, Z degrees of freedom while the carrier is in a stable state.However, when the carrier is conveyed, the central axis between the permanent magnets is shifted and left and right repulsion forces may occur. In this case, there is a disadvantage that the permanent magnet alone cannot be restored.
  • the attraction force due to the different polarities of the permanent magnets has self-resilience, and no separate alignment is necessary.
  • conveyance is impossible and a forced restraint device is required.
  • the vertical conveying apparatus for conveying carriers standing up in the vertical direction is advantageous because the carriers are held vertically and conveyed with little deformation and particle set-up of the large-area substrate, but the center of gravity is low and the conductivity is high. There is a disadvantage in that the flow and vibration are large, and stable floating or conveying is difficult.
  • An object of the present invention is to provide a conveying apparatus capable of reducing conveying energy even if the weight of a carrier on which a substrate is attached increases as a conveying apparatus for conveying a vertical carrier.
  • Another object of the present invention is to provide a conveying apparatus capable of self-recovery due to magnetic levitation by an attractive force on an upper portion of a carrier.
  • Still another object of the present invention is to provide a conveying apparatus capable of non-contact conveying by a motor or a permanent magnet.
  • a conveying apparatus for conveying a vertical carrier located in the chamber, a carrier standing in the vertical direction, a carrier magnet attached to the upper portion of the carrier, and a carrier magnet
  • a chamber magnet having a different polarity than the carrier magnet, a rack magnet under the carrier, a pinion magnet disposed apart from the rack magnet, a first drive shaft to which the pinion magnet is attached, and a first drive shaft It includes a motor for rotating the motor, a first roller connected to the first drive shaft, and a second drive shaft disposed under the carrier and rotated by the rotation of the first roller.
  • the carrier is moved in the vertical direction by the rotation of the second drive shaft.
  • the first roller and the second drive shaft are spaced apart, and when the carrier descends in the vertical direction, the first roller and the second drive shaft contact each other.
  • the second roller is fixed to the chamber.
  • the cylindrical pinion magnet rotates by the rotation of the first drive shaft, and the rack magnet is moved in the horizontal direction in accordance with the rotation of the pinion magnet.
  • the carrier in the horizontal movement of the carrier, the carrier is moved in the horizontal direction by the attraction force between the pinion magnet and the rack magnet.
  • the cylindrical pinion magnet includes the N pole and the S pole formed in the diagonal direction.
  • a conveying apparatus for achieving the above object is a conveying apparatus for conveying a vertical carrier located in the chamber, a carrier standing in the vertical direction, a carrier magnet attached to the upper portion of the carrier, A chamber magnet having a different polarity than the carrier magnet and attached to the chamber, a first drive shaft rotated by a motor, a first roller connected to the first drive shaft, and disposed below the carrier, The rotation of the roller includes a second drive shaft that rotates.
  • a conveying apparatus is a conveying apparatus for conveying a vertical carrier located in a chamber, which is spaced apart from a carrier standing up in the vertical direction, a carrier magnet attached to an upper portion of the carrier, and a carrier magnet.
  • a chamber magnet having a polarity different from that of the carrier magnet, a rack magnet below the carrier, a pinion magnet disposed to be spaced apart from the rack magnet, a first drive shaft to which the pinion magnet is attached, a motor to rotate the first drive shaft;
  • the carrier is moved in the vertical direction by the rotation of the second drive shaft.
  • non-contact conveyance is enabled by a motor or a permanent magnet.
  • the carrier upon floating of the carrier in the vertical direction, the carrier is aligned by the attractive force between the carrier magnet and the chamber magnet. Thereby, non-contact conveyance is enabled by a motor or a permanent magnet.
  • the second roller is fixed to the chamber.
  • carrier position alignment is possible, and conveying particles can be reduced by minimizing flow.
  • the cylindrical pinion magnet rotates by the rotation of the first drive shaft, and the rack magnet is moved in the horizontal direction in accordance with the rotation of the pinion magnet.
  • non-contact conveyance is enabled by a motor or a permanent magnet.
  • the carrier in the horizontal movement of the carrier, the carrier is moved in the horizontal direction by the attraction force between the pinion magnet and the rack magnet.
  • non-contact conveyance is enabled by a motor or a permanent magnet.
  • the cylindrical pinion magnet includes the N pole and the S pole formed in the diagonal direction. Accordingly, stable precision driving force can be transmitted regardless of the position between the magnets.
  • the conveying apparatus is a conveying apparatus for conveying the vertical carrier located in the chamber, spaced apart from the carrier standing up in the vertical direction, the carrier magnet attached to the upper portion of the carrier, A chamber magnet attached to the chamber and having a different polarity than the carrier magnet, a first drive shaft rotated by a motor, a first roller connected to the first drive shaft, and disposed under the carrier, It includes a second drive shaft that rotates.
  • FIG. 1 is a front view of a conveying apparatus according to an embodiment of the present invention.
  • FIG. 2 is a side view of the conveying apparatus of FIG. 1.
  • FIG. 2 is a side view of the conveying apparatus of FIG. 1.
  • FIG. 3 is an enlarged view illustrating a portion of FIG. 2 enlarged.
  • FIGS. 4A to 7B are views referred to for description of the conveying apparatus of FIGS. 1 to 3.
  • module and “unit” for components used in the following description are merely given in consideration of ease of preparation of the present specification, and do not impart any particular meaning or role by themselves. Therefore, the “module” and “unit” may be used interchangeably.
  • FIG. 1 is a front view of a conveying apparatus according to an embodiment of the present invention
  • FIG. 2 is a side view of the conveying apparatus of FIG. 1
  • FIG. 3 is an enlarged view of an enlarged partial region ARa of FIG. 2.
  • the conveying apparatus 100 is a conveying apparatus 100 for conveying a carrier CARR located in a chamber CHAMBER.
  • the substrate SUB is attached to the carrier CARR, and the substrate at this time may be various substrates such as a display substrate and a semiconductor substrate.
  • the substrate may be an OLED substrate.
  • the substrate SUB requires various processes such as vapor deposition, and thus, the carrier CARR to which the substrate SUB is attached is required.
  • the present invention proposes a vertical transfer type conveying apparatus with less deformation and substrate settling of a substrate for floating and conveying a carrier.
  • the conveying energy can be reduced, and in the case of non-contact, the magnetic levitation and the self conveying method are used.
  • the conveying apparatus 100 includes a carrier CARR standing up in the vertical direction (y-axis direction), a carrier magnet CAFMGT attached to an upper portion of the carrier CARR, and a carrier.
  • the first drive shaft RDS which is spaced apart from the magnet CAFMGT and attached to the chamber CHAMBER, is rotated by a chamber magnet CBFMGT having a different polarity than the carrier magnet CAFMGT, and rotated by the motor MTR.
  • the first roller KRROL connected to the driving shaft RDS and the second driving shaft UDS may be disposed below the carrier CARR and rotated by the rotation of the first roller KRROL.
  • the carrier CARR is driven by an attraction force corresponding to the weight of the carrier CARR between the carrier magnet CAFMGT on the carrier CARR to be conveyed and the chamber magnet CBFMGT on the fixed chamber CHAMBER.
  • the motor MTR or the permanent magnet rises or falls in the vertical direction (y-axis direction). Accordingly, non-contact conveyance is possible by the motor MTR or the permanent magnet, and as the conveying apparatus 100 which conveys the vertical carrier CARR, even if the weight of the carrier CARR to which the substrate SUB is attached increases, conveyance energy is increased. Can be reduced.
  • the carrier (CARR) can be moved in the vertical direction (y-axis direction).
  • non-contact conveyance is enabled by the motor MTR or a permanent magnet.
  • the cylindrical pinion magnet PNMGT rotates by the rotation of the first drive shaft RDS, and the rack magnet RAMGT moves in the horizontal direction (x-axis direction) as the pinion magnet PNMGT rotates. Is moved. Thereby, non-contact conveyance is enabled by the motor MTR or a permanent magnet.
  • the carrier CARR floats in the vertical direction (y-axis direction)
  • the carrier CARR is aligned by the attraction force between the carrier magnet CAFMGT and the chamber magnet CBFMGT.
  • non-contact conveyance is enabled by the motor MTR or a permanent magnet.
  • the first roller KRROL and the second drive shaft UDS are spaced apart, and when the carrier CARR descends in the vertical direction (y-axis direction), The first roller KRROL and the second driving shaft UDS may contact each other.
  • the chamber CHAMBER and the carrier magnet CAFMGT are arranged in a line without a gap so that there is no difference in floating force for each position of the carrier CARR in the chamber CHAMBER.
  • the conveying apparatus 100 the rack magnet (RAMGT) under the carrier (CARR), the pinion magnet (PNMGT) and spaced apart from the rack magnet (RAMGT), pinion magnet (PNMGT) ) Is attached to the first drive shaft (RDS), the motor (MTR) for rotating the first drive shaft (RDS), the first roller (KRROL) connected to the first drive shaft (RDS), the lower part of the carrier (CARR)
  • the second driving shaft (UDS) is disposed in the, by the rotation of the first roller (KRROL) may further include.
  • the carrier CARR when the carrier CARR is moved in the horizontal direction (x-axis direction), the carrier CARR is moved in the horizontal direction (x-axis direction) by the attraction force between the pinion magnet PNMGT and the rack magnet RAMGT. Thereby, non-contact conveyance is enabled by the motor MTR or a permanent magnet.
  • the first drive shaft RDS and the first roller KRROL rotate together with the rotation of the motor MTR.
  • non-contact conveyance is enabled by the motor MTR or a permanent magnet.
  • the conveying apparatus 100 which concerns on the Example of this invention may further be equipped with the 2nd roller LOROL for fixing the position of the carrier CARR in the vertical direction (y-axis direction).
  • the phenomenon of sticking between the magnets due to the floating attraction force can restrain the lower part of the carrier CARR fixed to the chamber CHAMBER to determine the Y-direction (injury direction) carrier CARR position.
  • the force received by the second roller can be offset by the weight of the carrier (CARR) due to its own weight by receiving only the force other than the carrier (CARR) weight to the floating force.
  • CARR carrier
  • CARR carrier
  • the distance between the carrier magnet CAFMGT and the chamber magnet CBFMGT can be fixed by the second roller LOROL when the carrier CARR floats in the vertical direction (y-axis direction). Accordingly, on the other hand, by the second roller LOROL, the carrier CARR position alignment is possible, and the transport particles can be reduced by minimizing the flow.
  • the conveying apparatus 100 may include a plurality of pinion magnets PNMGT and a plurality of second rollers LOROL corresponding thereto, as shown in FIG. 1.
  • the plurality of pinion magnets PNMGT can be used to carry out the horizontal direction (x-axis direction), and even if some of the plurality of pinion magnets PNMGT fail, the remaining pinion magnets PNMGT are used. , Stable conveyance is possible.
  • the second roller LOROL is fixed to the chamber CHAMBER.
  • the second roller LOLOL alignment of the carrier CARR is possible, and transportation particles can be reduced by minimizing the flow.
  • the floating force decreases, the carrier flows in the x-axis direction, and the positioning of the carrier may not occur, and a collision may occur.
  • conveying pitching (for example, up and down fluctuations) may occur in the discontinuous section, which is a position where the floating magnet between the vacuum chambers (CHAMBER) cannot exist.
  • the floating magnets are arranged at a predetermined interval, but conveying pitching (for example, up and down fluctuations) may occur depending on the presence or absence of the floating magnet when carrying the carrier CARR.
  • the magnetic force is weak due to the attraction force between the magnet and the magnetic body
  • the magnetic body may be generated corrosion-resistant particles in the vacuum chamber (CHAMBER).
  • the vertical chamber CHAMBER floats under the carrier CARR, the relatively long distance CARR may be vulnerable to flow or vibration.
  • CARR attraction type magnetic levitation device
  • CHAMBER vacuum chamber
  • the conveying apparatus 100 as a magnetic levitation method, when the injury, the carrier magnet (CAFMGT) and the chamber magnet (CBFMGT) arranged in a different polarity to rise by the attraction between the magnets to generate the carrier particles Can be minimized.
  • CAFMGT carrier magnet
  • CBFMGT chamber magnet
  • the magnet is attached to the upper portion of the chamber (CHAMBER) without gaps, it is possible to maintain a constant floating force, such as no change in the floating force for each position of the carrier (CARR) in the chamber (CHAMBER).
  • the second roller LOROL is restrained under the carrier CARR, and when the carrier CARR is conveyed, the second roller LOROL rotates according to the carrier CARR conveying speed to lower the frictional resistance, thereby generating particles. Can be minimized.
  • the force received by the second roller LOROL is the weight of the carrier CARR due to its own weight as the weight of the carrier CARR is subtracted from the floating attraction force.
  • the conveying apparatus 100 since the self-recovery can be performed by the carrier (ARRR) upper manpower magnetic levitation device and the lower conveying device, it is possible to align the position without a separate device and the carrier (CARR) conduction Prevention is possible.
  • ARRR carrier
  • CARR carrier conduction Prevention
  • the conveying apparatus 100 applies the first roller KRROL to the pinion magnet PNMGT shaft so that the carrier CARR lower drive shaft UDS is a roller when the carrier CARR falls. It comes in contact with (KRROL) to enable friction drive.
  • the friction drive between the drive shaft (UDS) and the roller (KRROL) is the most widely used method in the vacuum chamber (CHAMBER), it is possible to quickly respond in the event of an abnormality in the magnetic levitation device, do not stop the production of the substrate, etc. And mass production is possible without changing conditions.
  • the rack magnets are arranged evenly under the L-shaped carrier (CARR), a plurality of drive shafts (RDS, UDS) are arranged on the lower side of the chamber (CHAMBER), the drive shaft (RDS) perpendicular to the travel direction
  • the pinion magnet PNMGT to rotate the pinion magnet PNMGT
  • the rotational movement of the drive shaft RDS can be transferred to the carrier CARR by linear movement, and at this time, the attraction force between the permanent magnets PNMGT and RAMGT.
  • Non-contact conveyance is possible by using only.
  • FIGS. 4A to 7B are views referred to for description of the conveying apparatus of FIGS. 1 to 3.
  • FIG. 4A is a diagram showing the rise of the carrier CARR in the vertical direction (y-axis direction).
  • the carrier CARR floats upward due to the attraction force between the carrier magnet CAFMGT and the chamber magnet CBFMGT. Thereby, non-contact conveyance is possible by permanent magnets CAFMGT and CBFMGT.
  • FIG. 4B is a diagram showing the descending of the carrier CARR in the vertical direction (y-axis direction).
  • the carrier CARR is lowered downward by the attraction force between the carrier magnet CAFMGT and the chamber magnet CBFMGT or by the rotation of the motor MTR. Thereby, non-contact conveyance is possible by the motor MTR or the permanent magnets CAFMGT, CBFMGT.
  • FIG. 5 is a view for explaining the operation of the rack magnet (RAMGT) and pinion magnet (PNMGT) arranged to be spaced apart from each other.
  • the pinion magnet PNMGT is a cylindrical magnet and may be disposed below the rack magnet RAMGT.
  • the N pole and the S pole may be alternately arranged, and the rack magnet RAMGT may also be alternately arranged with the N pole and the S pole.
  • the rack magnet RAMGT moves in the horizontal direction (x-axis direction) by the rotation of the pinion magnet PNMGT, and as a result, the carrier CARR standing up in the vertical direction (y-axis direction) becomes the horizontal direction ( x-axis direction).
  • FIG. 6 is a diagram illustrating an arrangement of N and S poles in the pinion magnet PNMGT of FIG. 5.
  • the cylindrical pinion magnet PNMGT includes an N pole and an S pole that are alternately formed in an oblique direction axisa. Accordingly, stable precision driving force can be transmitted regardless of the position between the magnets.
  • the N pole and the S pole are alternately arranged on the basis of the diagonal direction axisa, which is between the horizontal direction (x axis direction) and the vertical direction (y axis direction).
  • the pinion magnet According to the structure of the pinion magnet (PNMGT), it is magnetized in an oblique line, it is possible to transmit a stable precision drive force without affecting the position between the rack magnet (RAMGT) and the pinion magnet (PNMGT).
  • FIG. 7A is a diagram illustrating a flow phenomenon of a carrier
  • FIG. 7B is a diagram illustrating a conduction phenomenon of a carrier.
  • CAFMGT carrier magnet
  • CBFMGT chamber magnet
  • a magnet may be disposed on the chamber CHAMBER so as to be attached without a gap. According to this, since there is no change in the floating force for each position of the carrier (CARR) in the chamber (CHAMBER), it can be aligned while reducing the flow phenomenon or conduction phenomenon as shown in the figure.
  • the 2nd roller LOROL for positioning of the carrier CARR is used.
  • the second roller LOROL Since the second roller LOROL is fixed to the chamber CHAMBER and rotates, the second roller LOROL can restrain the lower portion of the carrier CARR, and as a result, the flow phenomenon or the conduction phenomenon as shown in the drawing is reduced, Can be aligned.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Non-Mechanical Conveyors (AREA)

Abstract

La présente invention concerne un dispositif de transfert. Selon un mode de réalisation de la présente invention, un dispositif de transfert destiné à transférer un support vertical positionné dans une chambre comprend : un support vertical orienté dans la direction verticale ; un aimant de support fixé à la partie supérieure du support ; un aimant de chambre fixé à la chambre et espacé de l'aimant de support, l'aimant de chambre ayant une polarité différente de celle de l'aimant de support ; un aimant de crémaillère situé sur la partie inférieure du support ; un aimant de pignon disposé de façon à être espacé de l'aimant de crémaillère ; un premier arbre d'entraînement sur lequel l'aimant de pignon est fixé ; un moteur destiné à faire tourner le premier arbre d'entraînement ; un premier rouleau relié au premier arbre d'entraînement ; et un second arbre d'entraînement disposé sur la partie inférieure du support et mis en rotation par la rotation du premier rouleau. Le dispositif de transfert comprend un processeur destiné à commander la vitesse à laquelle des cartouches de filament sont fournies, sur la base d'informations. Par conséquent, le dispositif de transfert destiné à transférer un support vertical peut réduire l'énergie de transfert même en cas d'augmentation du poids du support sur lequel est fixé un substrat.
PCT/KR2019/010896 2018-08-27 2019-08-27 Dispositif de transfert WO2020045942A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2018-0100135 2018-08-27
KR1020180100135A KR102090645B1 (ko) 2018-08-27 2018-08-27 반송 장치

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Publication Number Publication Date
WO2020045942A1 true WO2020045942A1 (fr) 2020-03-05

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WO (1) WO2020045942A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022073588A1 (fr) * 2020-10-06 2022-04-14 Applied Materials, Inc. Système de transport de support, support associé, appareil de traitement sous vide et procédé de transport de support dans une chambre sous vide
CN114641435A (zh) * 2020-05-13 2022-06-17 应用材料公司 辊子运输系统载体、辊子运输系统和真空处理装置
CN114981471A (zh) * 2020-05-13 2022-08-30 应用材料公司 载体运输系统、用于基板的载体、真空处理设备和载体在真空腔室中运输载体的方法
CN115158964A (zh) * 2022-08-03 2022-10-11 中国电子科技集团公司第二十四研究所 一种密封环境内动力传输的装置及其使用方法

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JP2005289556A (ja) * 2004-03-31 2005-10-20 Anelva Corp 基板搬送装置
JP2007091463A (ja) * 2005-08-30 2007-04-12 Daifuku Co Ltd 物品搬送設備
KR20080104479A (ko) * 2007-05-28 2008-12-03 엘지디스플레이 주식회사 기판 이송 장치
KR20120016837A (ko) * 2010-08-17 2012-02-27 (주)가온솔루션 마그네트를 이용한 이송시스템의 비접촉 레일의 평탄도 제어 및 구동력 전달 장치
KR101271112B1 (ko) * 2011-02-01 2013-06-04 (주)이루자 진공 처리 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005289556A (ja) * 2004-03-31 2005-10-20 Anelva Corp 基板搬送装置
JP2007091463A (ja) * 2005-08-30 2007-04-12 Daifuku Co Ltd 物品搬送設備
KR20080104479A (ko) * 2007-05-28 2008-12-03 엘지디스플레이 주식회사 기판 이송 장치
KR20120016837A (ko) * 2010-08-17 2012-02-27 (주)가온솔루션 마그네트를 이용한 이송시스템의 비접촉 레일의 평탄도 제어 및 구동력 전달 장치
KR101271112B1 (ko) * 2011-02-01 2013-06-04 (주)이루자 진공 처리 장치

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114641435A (zh) * 2020-05-13 2022-06-17 应用材料公司 辊子运输系统载体、辊子运输系统和真空处理装置
CN114981471A (zh) * 2020-05-13 2022-08-30 应用材料公司 载体运输系统、用于基板的载体、真空处理设备和载体在真空腔室中运输载体的方法
WO2022073588A1 (fr) * 2020-10-06 2022-04-14 Applied Materials, Inc. Système de transport de support, support associé, appareil de traitement sous vide et procédé de transport de support dans une chambre sous vide
CN115158964A (zh) * 2022-08-03 2022-10-11 中国电子科技集团公司第二十四研究所 一种密封环境内动力传输的装置及其使用方法

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