WO2016060137A1 - 積層構造体 - Google Patents
積層構造体 Download PDFInfo
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- WO2016060137A1 WO2016060137A1 PCT/JP2015/078964 JP2015078964W WO2016060137A1 WO 2016060137 A1 WO2016060137 A1 WO 2016060137A1 JP 2015078964 W JP2015078964 W JP 2015078964W WO 2016060137 A1 WO2016060137 A1 WO 2016060137A1
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- WIPO (PCT)
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- adhesive layer
- protective layer
- resin composition
- flexible printed
- laminated structure
- Prior art date
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
Definitions
- the present invention relates to a laminated structure, and more particularly to a laminated structure useful as an insulating film of a flexible printed wiring board, a dry film using the laminated structure, and a flexible printed wiring board.
- a cover based on polyimide with excellent mechanical properties such as heat resistance and flexibility is used for the bent part (bent part).
- a ray see, for example, Patent Documents 1 and 2
- a mounting process non-bent part is widely adopted as a mixed mounting process using a photosensitive resin composition that is excellent in electrical insulation and can be finely processed. Yes.
- a cover lay based on polyimide having excellent mechanical properties such as heat resistance and flexibility is unsuitable for fine wiring because it requires processing by die punching. Therefore, it is necessary to partially use an alkali developing type photosensitive resin composition (solder resist) that can be processed by photolithography in a chip mounting portion that requires fine wiring.
- solvent resist alkali developing type photosensitive resin composition
- JP-A-62-263692 Japanese Patent Laid-Open No. 63-110224
- an object of the present invention is to provide a structure that satisfies the required performance as an insulating film of a flexible printed wiring board and is suitable for a batch forming process of a bent portion and a mounting portion, and a cured product thereof.
- Another object of the present invention is to provide a flexible printed wiring board having a protective film such as a cover lay or a solder resist.
- the present invention provides an adhesive layer (A) comprising an alkali-developable resin composition and a protective layer (B) comprising a photosensitive resin composition formed on the adhesive layer (A).
- both the adhesive layer (A) and the protective layer (B) can be patterned by light irradiation.
- the laminated structure of the present invention can be suitably used for at least one of a bent portion and a non-bent portion of a flexible printed wiring board.
- a cover lay of a flexible printed wiring board, a solder resist It is useful to be used for at least one of the interlayer insulating materials.
- the dry film of the present invention is characterized in that at least one surface of the laminated structure of the present invention is supported or protected by a film.
- the layer of the laminated structure of the present invention is directly formed on the flexible printed wiring board, or the layer of the laminated structure is formed by the dry film of the present invention.
- the “pattern” means a patterned cured product, that is, an insulating film.
- the laminated structure which satisfies the performance required as an insulating film of a flexible printed wiring board, and is suitable also for the batch formation process of a bending part and a mounting part, a dry film using the same, and a flexible printed wiring board It became possible to realize.
- the laminated structure of the present invention has an adhesive layer (A) made of an alkali-developable resin composition and a protective layer (B) made of a photosensitive resin composition formed on the adhesive layer (A).
- the resin composition has alkali solubility.
- a resin composition having excellent heat resistance is used for the protective layer, it is difficult to impart solubility to the resin composition having excellent heat resistance. As a result, there is a problem that patterning becomes difficult.
- the present inventors have intensively studied paying attention to the film thickness of the protective layer and the adhesive layer and the development speed, and as a result, the ratio of the film thickness of the protective layer and the adhesive layer, and the protective layer and the adhesive layer.
- the inventors have found that the above-mentioned problems can be solved by setting the ratio of the developing speed within the above-mentioned range, and have completed the present invention.
- a protective layer using a resin composition having a slow development rate is laminated on an adhesive layer using a resin composition having a higher development rate than the resin composition of the protective layer. If the ratio of the speeds is within the above range, the development speed of the protective layer is slow and patterning by alkali development is difficult, and even if there is a residue, the development speed of the adhesive layer is high, and both are completely washed away. It has been found that the development speed of the entire laminated structure can be within a practical range.
- the ratio of the protective layer (B) having heat resistance in the layer thickness of the laminated structure is large, so that the developability is good and the heat resistance is sufficient. Can also be obtained.
- a / B 0.5 or more
- the ratio of the adhesive layer (A) having good developability is large, the heat resistance is good and patterning by alkali development is possible.
- a / b 100 or less, the solubility of the adhesive layer (A) in the alkaline aqueous solution is appropriate, and the pattern shape is stabilized, so that various characteristics such as plating resistance are also improved.
- development speed the time required for each layer of the protective layer and the adhesive layer to dissolve in the alkaline aqueous solution when developing the laminated structure was defined as the development time [second], and the thickness of each layer was the film thickness [ ⁇ m].
- development speed [ ⁇ m / second] film thickness [ ⁇ m] / development time [second]
- the composition of the photosensitive resin composition of the protective layer (B) is not particularly limited.
- a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin conventionally used as a solder resist composition ethylenic Photocurable thermosetting resin composition containing unsaturated bond compound, photopolymerization initiator and thermoreactive compound, photosensitive thermosetting resin containing carboxyl group-containing resin, photobase generator and thermoreactive compound A resin composition can be used.
- the protective layer (B) is preferably made of a resin composition containing an alkali-soluble resin having an imide ring or an imide precursor skeleton excellent in heat resistance and toughness.
- the alkali-soluble resin having an imide ring or an imide precursor skeleton has an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring or an imide precursor skeleton.
- an alkali-soluble group such as a carboxyl group or an acid anhydride group
- an imide ring or an imide precursor skeleton for introducing the imide ring or the imide precursor skeleton into the alkali-soluble resin, a known and commonly used method can be used.
- a resin obtained by reacting a carboxylic anhydride component with one or both of an amine component and an isocyanate component can be used.
- the imidization may be performed by thermal imidization, chemical imidization, or a combination thereof.
- examples of the carboxylic acid anhydride component include tetracarboxylic acid anhydrides and tricarboxylic acid anhydrides, but are not limited to these acid anhydrides, and acid anhydrides that react with amino groups or isocyanate groups. Any compound having a physical group and a carboxyl group can be used, including derivatives thereof. These carboxylic anhydride components can be used alone or in combination.
- tetracarboxylic acid anhydride examples include pyromellitic dianhydride, 3,3 ′, 4,4′-benzophenone tetracarboxylic dianhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic acid dianhydride.
- tricarboxylic acid anhydride examples include trimellitic acid anhydride and nuclear hydrogenated trimellitic acid anhydride.
- amine component diamines such as aliphatic diamines and aromatic diamines, and polyvalent amines such as aliphatic polyether amines can be used, but are not limited to these amines. These amine components may be used alone or in combination.
- diamine examples include one diamine nucleus diamine such as p-phenylenediamine (PPD), 1,3-diaminobenzene, 2,4-toluenediamine, 2,5-toluenediamine, and 2,6-toluenediamine.
- PPD p-phenylenediamine
- 1,3-diaminobenzene 1,3-diaminobenzene
- 2,4-toluenediamine 2,4-toluenediamine
- 2,5-toluenediamine 2,6-toluenediamine
- Examples of the amine having a carboxyl group include 3,5-diaminobenzoic acid, 2,5-diaminobenzoic acid, diaminobenzoic acids such as 3,4-diaminobenzoic acid, and 3,5-bis (3-aminophenoxy) benzoic acid.
- Aminophenoxybenzoic acids such as 3,5-bis (4-aminophenoxy) benzoic acid, carboxybiphenyl compounds such as 3,3′-diamino-4,4′-dicarboxybiphenyl, 3,3′-diamino- Carboxydiphenylalkanes such as 4,4′-dicarboxydiphenylmethane, 3,3′-dicarboxy-4,4′-diaminodiphenylmethane, 2,2-bis [4-amino-3-carboxyphenyl] propane, 3, 3'-diamino-4,4'-dicarboxydiphenyl ether, 4,4'-diamino-3,3'-dicarbo Carboxydiphenyl ether compounds such as sidiphenyl ether, diphenyl sulphone compounds such as 3,3′-diamino-4,4′-dicarboxydiphenyl sulfone, 4,4′-di
- Diisocyanates such as aromatic diisocyanates and their isomers and multimers, aliphatic diisocyanates, alicyclic diisocyanates and their isomers, and other general-purpose diisocyanates can be used as the isocyanate component. It is not limited. These isocyanate components may be used alone or in combination.
- diisocyanate examples include aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenylsulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate.
- aromatic diisocyanates such as 4,4′-diphenylmethane diisocyanate, tolylene diisocyanate, naphthalene diisocyanate, xylylene diisocyanate, biphenyl diisocyanate, diphenylsulfone diisocyanate, diphenyl ether diisocyanate, and isomers, multimers, hexamethylene diisocyanate.
- Aliphatic diisocyanates such as isophorone diisocyanate
- the alkali-soluble resin having an imide ring or an imide precursor skeleton as described above may have an amide bond.
- This may be an amide bond obtained by reacting an isocyanate and a carboxylic acid, or may be due to other reactions.
- you may have the coupling
- a known and commonly used alkali-soluble polymer, oligomer, or monomer having one or both of a carboxyl group and an acid anhydride group for example, a resin obtained by reacting these known and commonly used alkali-soluble resins alone or in combination with the above carboxylic acid anhydride component with the above amines / isocyanates. There may be.
- an alkali-soluble resin having such an alkali-soluble group and an imide ring or imide precursor skeleton a known and commonly used organic solvent can be used.
- the organic solvent is not particularly limited as long as it is a solvent that does not react with the raw materials carboxylic acid anhydrides, amines, and isocyanates and that can dissolve these raw materials, and the structure is not particularly limited.
- aprotic solvents such as N, N-dimethylformamide, N, N-dimethylacetamide, N-methyl-2-pyrrolidone, dimethyl sulfoxide, and ⁇ -butyrolactone are preferred because of the high solubility of the raw materials.
- the alkali-soluble resin having an alkali-soluble group such as a carboxyl group or an acid anhydride group and an imide ring or an imide precursor skeleton as described above has an acid value of 20 to 200 mgKOH in order to correspond to the photolithography process. / G, more preferably 60 to 150 mgKOH / g.
- the acid value is 20 mgKOH / g or more, the solubility in alkali increases, the developability becomes good, and further, the degree of crosslinking with the thermosetting component after light irradiation becomes high, so that sufficient development contrast is obtained. be able to.
- the molecular weight of the alkali-soluble resin is preferably from 1,000 to 100,000, more preferably from 2,000 to 50,000 in view of developability and cured coating properties.
- the molecular weight is 1,000 or more, sufficient development resistance and cured properties can be obtained after exposure and PEB.
- the molecular weight is 100,000 or less, alkali solubility increases and developability improves.
- a resin composition containing an alkali-soluble resin having an imide ring or an imide precursor skeleton usually contains a photobase generator and a thermally reactive compound in addition to the alkali-soluble resin.
- a photoinitiator in addition to alkali-soluble resin, it contains the photoinitiator and the compound which has an ethylenically unsaturated bond.
- the photobase generator is one or more types that can function as a catalyst for the polymerization reaction of a thermoreactive compound described later by changing the molecular structure upon irradiation with light such as ultraviolet light or visible light, or by cleaving the molecule. It is a compound that produces a basic substance. Examples of basic substances include secondary amines and tertiary amines.
- photobase generators include ⁇ -aminoacetophenone compounds, oxime ester compounds, acyloxyimino groups, N-formylated aromatic amino groups, N-acylated aromatic amino groups, nitrobenzyl carbamate groups, alcoholoxybenzyls.
- examples thereof include compounds having a substituent such as a carbamate group.
- oxime ester compounds and ⁇ -aminoacetophenone compounds are preferred.
- the ⁇ -aminoacetophenone compound those having two or more nitrogen atoms are particularly preferable.
- the ⁇ -aminoacetophenone compound has a benzoin ether bond in the molecule, and when irradiated with light, cleavage occurs in the molecule to produce a basic substance (amine) that exhibits a curing catalytic action.
- ⁇ -aminoacetophenone compounds include (4-morpholinobenzoyl) -1-benzyl-1-dimethylaminopropane (Irgacure 369, trade name, manufactured by BASF Japan Ltd.) and 4- (methylthiobenzoyl) -1-methyl.
- -1-morpholinoethane (Irgacure 907, trade name, manufactured by BASF Japan Ltd.), 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl]-
- a commercially available compound such as 1-butanone (Irgacure 379, trade name, manufactured by BASF Japan Ltd.) or a solution thereof can be used.
- any compound that generates a basic substance by light irradiation can be used.
- examples of such oxime ester compounds include CGI-325, Irgacure OXE01, Irgacure OXE02 manufactured by BASF Japan, N-1919, and NCI-831 manufactured by Adeka.
- numerator described in the patent 4344400 gazette can also be used suitably.
- Such photobase generators may be used alone or in combination of two or more.
- the blending amount of the photobase generator in the resin composition is preferably 0.1 to 40 parts by mass, more preferably 0.1 to 30 parts by mass with respect to 100 parts by mass of the thermoreactive compound.
- the development resistance contrast of the light irradiated part / non-irradiated part can be favorably obtained.
- cured material characteristic improves.
- the heat-reactive compound is a resin having a functional group that can be cured by heat, and examples thereof include an epoxy resin and a polyfunctional oxetane compound.
- the epoxy resin is a resin having an epoxy group, and any known one can be used. Specific examples include a bifunctional epoxy resin having two epoxy groups in the molecule and a polyfunctional epoxy resin having many epoxy groups in the molecule. In addition, a hydrogenated bifunctional epoxy compound may be used.
- epoxy resin examples include bisphenol A type epoxy resin, brominated epoxy resin, novolac type epoxy resin, bisphenol F type epoxy resin, hydrogenated bisphenol A type epoxy resin, glycidylamine type epoxy resin, hydantoin type epoxy resin, and alicyclic type.
- Epoxy resin trihydroxyphenylmethane type epoxy resin, bixylenol type or biphenol type epoxy resin or mixtures thereof; bisphenol S type epoxy resin, bisphenol A novolak type epoxy resin, tetraphenylolethane type epoxy resin, heterocyclic epoxy resin , Diglycidyl phthalate resin, tetraglycidyl xylenoyl ethane resin, naphthalene group-containing epoxy resin, epoxy resin having dicyclopentadiene skeleton, glycidyl meta Acrylate copolymer epoxy resins, copolymerized epoxy resins of cyclohexylmaleimide and glycidyl methacrylate, and a CTBN modified epoxy resin.
- epoxy resins may be used alone or in combination of two or more.
- the amount of the heat-reactive compound is such that the equivalent ratio with the alkali-soluble resin (alkali-soluble group such as carboxyl group: heat-reactive group such as epoxy group) is 1: 0.1 to 1:10. It is preferable. By setting the mixing ratio in such a range, the development is good and a fine pattern can be easily formed.
- the equivalent ratio is more preferably 1: 0.2 to 1: 5.
- photopolymerization initiator known photopolymerization initiators can be used.
- ⁇ -aminoacetophenone photopolymerization initiator acylphosphine oxide photopolymerization initiator
- benzoin compound acetophenone compound, anthraquinone compound, thioxanthone
- examples include compounds, ketal compounds, benzophenone compounds, tertiary amine compounds, and xanthone compounds.
- hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; ethylene glycol, methoxytetraethylene glycol, polyethylene glycol Mono- or diacrylates of glycols such as propylene glycol; polyhydric alcohols such as hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethyl isocyanurate, or ethylene oxide adducts or propylene oxide adducts thereof Polyacrylates such as; phenoxy acrylate, bisphenol A diacrylate, and ethyl of these phenols Acrylates such as oxide adducts or propylene oxide adducts and the like.
- the alkali-developable resin composition constituting the adhesive layer (A) is a composition containing a resin that contains one or more functional groups among phenolic hydroxyl groups, thiol groups, and carboxyl groups and that can be developed with an alkaline solution.
- Any photocurable resin composition or thermosetting resin composition can be used.
- Preferred examples include a resin composition containing a compound having two or more phenolic hydroxyl groups, a carboxyl group-containing resin, a compound having a phenolic hydroxyl group and a carboxyl group, and a compound having two or more thiol groups. Used.
- thermosetting resin composition containing the compound.
- a resin composition containing a carboxyl group-containing urethane resin, a resin having a carboxyl group, a photobase generator, and a thermosetting component can also be used.
- Such a resin composition is developed by adding a carboxyl group-containing urethane resin and a thermosetting component by heating after exposure using a base generated from a photobase generator as a catalyst, and removing an unexposed portion with an alkaline solution. Is possible.
- each material which comprises the resin composition used for an adhesive layer (A) a well-known and usual thing can be used, and what is used in the said protective layer (B) can be used similarly.
- a known and commonly used polymer resin may be blended for the purpose of improving the flexibility and dryness of the resulting cured product.
- polymer resins include cellulose-based, polyester-based, phenoxy resin-based polymers, polyvinyl acetal-based, polyvinyl butyral-based, polyamide-based, polyamide-imide-based binder polymers, block copolymers, and elastomers.
- This polymer resin may be used individually by 1 type, and may use 2 or more types together.
- the resin composition used in the adhesive layer (A) and the protective layer (B) should contain an inorganic filler in order to suppress curing shrinkage of the cured product and improve properties such as adhesion and hardness.
- an inorganic filler examples include barium sulfate, amorphous silica, fused silica, spherical silica, talc, clay, magnesium carbonate, calcium carbonate, aluminum oxide, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, Neuburg Sicilius Earth etc. are mentioned.
- an organic solvent should be used for preparing the resin composition and adjusting the viscosity for application to a substrate or carrier film.
- organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like.
- Such an organic solvent may be used individually by 1 type, and may be used as a 2 or more types of mixture.
- the resin composition used in the adhesive layer (A) and the protective layer (B) may further contain components such as a colorant, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber. it can.
- a colorant such as a colorant, a mercapto compound, an adhesion promoter, an antioxidant, and an ultraviolet absorber.
- those commonly used in the field of electronic materials can be used.
- thickeners such as fine silica, hydrotalcite, organic bentonite, montmorillonite, defoamers and leveling agents such as silicones, fluorines and polymers, silane coupling agents, rust inhibitors, etc.
- Such known and commonly used additives can be appropriately blended.
- the adhesive layer (A) is preferably thicker than the protective layer (B) from the viewpoint of followability to the copper circuit.
- the laminated structure of the present invention can be used for at least one of, preferably both of a bent portion and a non-bent portion of a flexible printed wiring board, whereby flexible printed wiring having sufficient durability against bending. A board can be obtained while improving cost and workability.
- the laminated structure of the present invention can be used for at least one of a cover lay of a flexible printed wiring board, a solder resist, and an interlayer insulating material.
- the layer of the laminated structure is formed directly or via a dry film, patterned by light irradiation, and the pattern is collectively formed by a developer to form an insulating film
- a flexible printed wiring board can be obtained.
- the conventional single layer solder resist layer has poor flexibility and other characteristics.
- a laminated structure composed of the adhesive layer (A) and the protective layer (B) is used.
- thermoreactive compound an adhesive layer (A) and a protective layer (B), a photobase generator and a thermoreactive compound are provided.
- the case where the resin composition contained is used will be described based on the process diagram shown in FIG. It includes a carboxyl group-containing resin or a carboxyl group-containing photosensitive resin, a compound having an ethylenically unsaturated bond, a photopolymerization initiator, and a heat-reactive compound that are conventionally used as a solder resist composition.
- a photocurable thermosetting resin composition the process similar to a soldering resist can be taken.
- a lamination process is a process of forming the lamination structure of the present invention on a substrate.
- a laminated structure composed of an adhesive layer 3 made of an alkali developing resin composition and a protective layer 4 is formed on a flexible printed wiring substrate 1 on which a copper circuit 2 is formed. Indicates the state.
- the resin composition constituting the adhesive layer 3 and the protective layer 4 is sequentially applied on the substrate and dried, whereby the adhesive layer 3 and the protective layer 4 are formed. It can be formed directly or by a method of sequentially laminating a resin composition constituting the adhesive layer 3 and the protective layer 4 in the form of a dry film on a substrate. Moreover, you may form by the method of laminating the laminated structure made into the dry film form of 2 layer structure on a base material. In this case, at least one surface of the laminated structure can be supported or protected by a film. As a film to be used, a plastic film that can be peeled off from the laminated structure can be used. The thickness of the film is not particularly limited, but is generally appropriately selected within the range of 10 to 150 ⁇ m. From the viewpoint of the coating film strength, the interface between the layers may be familiar.
- the method for applying the resin composition to the substrate may be a known method such as a blade coater, a lip coater, a comma coater, or a film coater.
- the drying method is a method using a hot-air circulation type drying furnace, an IR furnace, a hot plate, a convection oven, or the like equipped with a heat source of a heating method using steam, and the hot air in the dryer is brought into countercurrent contact, and from a nozzle
- a known method such as a method of spraying on the support may be used.
- the substrate is a flexible printed wiring substrate in which a circuit is formed in advance.
- a further layer may be provided between the adhesive layer 3 and the protective layer 4 in order to obtain another effect.
- the light irradiation step is a step of activating the photobase generator contained in the resin composition by light irradiation in a negative pattern to cure the light irradiation portion.
- the mask 5 is disposed on the protective layer 4 and light irradiation is performed in a negative pattern, thereby activating the photobase generator contained in the resin composition and curing the light irradiation portion. .
- the base generated in the light irradiation part destabilizes the photobase generator, and a basic substance (hereinafter sometimes abbreviated as “base”) is generated from the photobase generator.
- the generated base destabilizes the base, and further base is generated.
- the addition reaction proceeds while the base acts as a catalyst for the addition reaction between the alkali-developable resin and the thermoreactive compound. Heat cure. Since the curing of the resin composition in this case is, for example, an epoxy ring-opening reaction by a thermal reaction, distortion and curing shrinkage can be suppressed as compared with the case of proceeding by a photoreaction.
- the light irradiator used for light irradiation includes a direct drawing device (for example, a laser direct imaging device that directly draws an image with a laser using CAD data from a computer), a light irradiator equipped with a metal halide lamp, and an (ultra) high pressure mercury lamp.
- a direct drawing device for example, a laser direct imaging device that directly draws an image with a laser using CAD data from a computer
- a light irradiator equipped with a metal halide lamp and an (ultra) high pressure mercury lamp.
- the patterned light irradiation mask is a negative mask.
- the active energy ray it is preferable to use laser light or scattered light having a maximum wavelength in the range of 350 to 410 nm.
- the photobase generator can be activated efficiently.
- the type of laser may be either a gas laser or a solid laser.
- the amount of light irradiation varies depending on the film thickness and the like, but can be generally in the range of 100 to 1500 mJ / cm 2 , preferably 300 to 1500 mJ / cm 2 .
- a heating process hardens a light irradiation part by heating, and can make it harden to a deep part with the base which generate
- This heating step is a step of curing the light irradiation portion by heating the adhesive layer 3 and the protective layer 4 after the light irradiation step, and is a so-called PEB (POST EXPOSURE BAKE) step.
- PEB POST EXPOSURE BAKE
- the heating step is preferably performed at a temperature lower than the heat generation start temperature or the heat generation peak temperature of the unirradiated resin composition and higher than the heat generation start temperature or the heat generation peak temperature of the light irradiated resin composition. .
- the heating step is preferably performed at a temperature lower than the heat generation start temperature or the heat generation peak temperature of the unirradiated resin composition and higher than the heat generation start temperature or the heat generation peak temperature of the light irradiated resin composition.
- the heating temperature at this time is a temperature at which the light irradiated portion of the resin composition is thermally cured, but the unirradiated portion is not thermally cured.
- the heating temperature is, for example, 80 to 140 ° C. By setting the heating temperature to 80 ° C. or higher, the light irradiation part can be sufficiently cured. On the other hand, by setting the heating temperature to 140 ° C. or lower, only the light irradiation part can be selectively cured.
- the heating time is, for example, 10 to 100 minutes.
- the heating method is the same as the drying method. In the unirradiated portion, no base is generated from the photobase generator, so that thermosetting is suppressed.
- the development step In the development step, a non-irradiated portion is removed by alkali development to form a negative pattern layer.
- the development step in FIG. 1 shows a step of developing the adhesive layer 3 and the protective layer 4 with an alkaline aqueous solution to remove unirradiated portions and form a negative pattern layer.
- a developing method a known method such as a dipping method, a shower method, a spray method, or a brush method can be used. Developers include potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines such as ethanolamine, and alkalis such as tetramethylammonium hydroxide aqueous solution (TMAH).
- TMAH tetramethylammonium hydroxide aqueous solution
- An aqueous solution or a mixed solution thereof can be used.
- This second light irradiation step is a step of irradiating ultraviolet rays as desired to activate the photobase generator remaining without being activated in the pattern layer of the light irradiation step to generate a base.
- the wavelength of ultraviolet rays and the light irradiation amount (exposure amount) in the second light irradiation step may be the same as or different from those in the light irradiation step.
- the light irradiation amount (exposure amount) is, for example, 150 to 2000 mJ / cm 2 .
- thermosetting process After the development process, it is preferable to further include a thermosetting (post-cure) thermosetting process.
- This thermosetting step is a step of performing thermosetting (post-cure) as necessary in order to sufficiently thermoset the pattern layer.
- thermosetting process After performing both a 2nd light irradiation process and a thermosetting process after a image development process, it is preferable to perform a thermosetting process after a 2nd light irradiation process.
- the pattern layer is sufficiently heat-cured by the light irradiation step or the base generated from the photobase generator in the light irradiation step and the second light irradiation step. Since the unirradiated part has already been removed at the time of the thermosetting process, the thermosetting process can be performed at a temperature equal to or higher than the curing reaction start temperature of the unirradiated resin composition. Thereby, a pattern layer can fully be thermosetted.
- the heating temperature is, for example, 150 ° C. or higher.
- ⁇ Formation of adhesive layer (A)> A flexible printed wiring substrate on which a circuit having a copper thickness of 18 ⁇ m was formed was prepared, and pretreatment was performed using CB-801Y manufactured by MEC. Then, the resin composition for each adhesive layer was apply
- the film thickness was measured using a micrometer MDC-25MX manufactured by Mitutoyo Corporation.
- the obtained cured coating film was plated at 80 to 90 ° C. under the conditions of nickel 5 ⁇ m and gold 0.05 ⁇ m using commercially available electroless nickel plating bath and electroless gold plating bath. In the plated evaluation base material, the presence or absence of plating penetration was visually evaluated. ⁇ : No penetration x: A penetration is confirmed between the substrate and the coating film.
- Comparative Example 1 is composed only of a protective layer of a resin composition having an imide ring, so that the heat resistance is good, but the developability is inferior, and development using ordinary sodium carbonate is impossible. It turns out that.
- the adhesive layer was thin, and the ratio of the thickness of the adhesive layer to the protective layer deviated from the range of the present invention. Therefore, although the heat resistance was good, the developability was also poor.
- Comparative Example 3 the ratio of the film thickness of the adhesive layer and the protective layer was also out of the range of the present invention, so that the developability was good but the heat resistance was poor.
- Comparative Example 4 Although the film thickness ratio is within the scope of the present invention, the development speed of the adhesive layer and the protective layer is the same, and the ratio of the development speed of both is out of the scope of the present invention. The developability was inferior. In Comparative Example 5, since the ratio of the development speed is out of the range of the present invention, the developability is good, but the heat resistance is poor.
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Abstract
Description
なお、本発明において「パターン」とは、パターン状の硬化物、すなわち、絶縁膜を意味する。
(積層構造体)
本発明の積層構造体は、アルカリ現像性樹脂組成物からなる接着層(A)と、該接着層(A)上に形成される感光性樹脂組成物からなる保護層(B)と、を有し、前記接着層(A)と前記保護層(B)の膜厚の比率がA/B=0.5~50となり、前記接着層(A)の現像速度(a)と前記保護層(B)の現像速度(b)の比率がa/b=1.1~100である。
現像速度の比率a/b=1.1以上の場合は、現像が困難である保護層(B)に対して接着層(A)の現像速度が相対的に速くなるため、アルカリ現像によるパターニングが可能となる。また、a/b=100以下の場合は、接着層(A)のアルカリ水溶液への溶解性が適当であり、パターン形状が安定するため、めっき耐性などの諸特性も良好となる。
現像速度[μm/秒]=膜厚[μm]/現像時間[秒]
保護層(B)の感光性樹脂組成物の組成は特に制限されるべきものではなく、例えば、従来からソルダーレジスト組成物として使用される、カルボキシル基含有樹脂またはカルボキシル基含有感光性樹脂、エチレン性不飽和結合を有する化合物、光重合開始剤および熱反応性化合物を含む光硬化性熱硬化性樹脂組成物や、カルボキシル基含有樹脂、光塩基発生剤および熱反応性化合物を含む感光性熱硬化性樹脂組成物を使用することができる。
接着層(A)を構成するアルカリ現像性樹脂組成物としては、フェノール性水酸基、チオール基およびカルボキシル基のうち1種以上の官能基を含有し、アルカリ溶液で現像可能な樹脂を含む組成物であればよく、光硬化性樹脂組成物でも熱硬化性樹脂組成物でも用いることができる。好ましくは、フェノール性水酸基を2個以上有する化合物、カルボキシル基含有樹脂、フェノール性水酸基およびカルボキシル基を有する化合物、チオール基を2個以上有する化合物を含む樹脂組成物が挙げられ、公知慣用のものが用いられる。
本発明においては、フレキシブルプリント配線基材上に、上記積層構造体の層を直接またはドライフィルムを介して形成し、光照射によりパターニングして、現像液によりパターンを一括して形成して絶縁膜を形成することで、フレキシブルプリント配線板を得ることができる。従来のソルダーレジスト層の単層では屈曲性などの特性が悪かったが、本発明によれば、接着層(A)と保護層(B)とからなる積層構造体とし、保護層と接着層の膜厚の比率、および保護層と接着層の現像速度の比率を夫々前記範囲内とすることにより、アルカリ現像性と、耐熱性および屈曲性などの機械的特性とを良好に両立させることが可能となった。
積層工程は、基材上に、本発明の積層構造体を形成する工程である。図1中の積層工程は、銅回路2が形成されたフレキシブルプリント配線基材1上に、アルカリ現像型樹脂組成物からなる接着層3と、保護層4とからなる積層構造体が形成されている状態を示す。
光照射工程は、ネガ型のパターン状に、光照射にて樹脂組成物中に含まれる光塩基発生剤を活性化して、光照射部を硬化する工程である。この光照射工程では、保護層4上にマスク5を配置し、ネガ型のパターン状に光照射することにより、樹脂組成物に含まれる光塩基発生剤を活性化して、光照射部を硬化する。
加熱工程は、加熱により光照射部を硬化するものであり、光照射工程で発生した塩基により、深部まで硬化させることができる。この加熱工程は、光照射工程の後、接着層3および保護層4を加熱することにより、光照射部を硬化する工程であり、いわゆるPEB(POST EXPOSURE BAKE)工程と言われる工程である。これにより、光照射工程で発生した塩基にて各層を深部まで十分に硬化して、硬化特性に優れたパターン層を得ることができる。
現像工程は、アルカリ現像により、未照射部を除去して、ネガ型のパターン層を形成するものである。図1中の現像工程は、接着層3および保護層4をアルカリ性水溶液によって現像することにより、未照射部が除去され、ネガ型のパターン層を形成する工程を示す。現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等公知の方法によることができる。また、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、エタノールアミンなどのアミン類、水酸化テトラメチルアンモニウム水溶液(TMAH)等のアルカリ水溶液またはこれらの混合液を用いることができる。
現像工程の後には、第2光照射工程を含むことが好ましい。この第2光照射工程は、光照射工程のパターン層内で活性化せずに残った光塩基発生剤を活性化して、塩基を発生させるために、所望に応じて紫外線を照射する工程である。第2光照射工程における紫外線の波長および光照射量(露光量)は、上記光照射工程と同じであってもよく、異なっていてもよい。光照射量(露光量)は、例えば、150~2000mJ/cm2である。
現像工程の後には、さらに、熱硬化(ポストキュア)熱硬化工程を含むことが好ましい。この熱硬化工程は、パターン層を十分に熱硬化させるために、必要に応じて熱硬化(ポストキュア)を行う工程である。現像工程の後に、第2光照射工程と熱硬化工程とをともに行う場合、熱硬化工程は、第2光照射工程の後に行うことが好ましい。
(合成例1)
<イミド環を有するアルカリ溶解性樹脂の合成>
撹拌機、窒素導入管、分留環および冷却環を取り付けたセパラブル3つ口フラスコに、3,5-ジアミノ安息香酸を12.5g、2,2’-ビス[4-(4-アミノフェノキシ)フェニル]プロパンを8.2g、NMPを30g、γ-ブチロラクトンを30g、4,4’-オキシジフタル酸無水物を27.9g、トリメリット酸無水物を3.8g加え、窒素雰囲気下、室温、100rpmで4時間撹拌した。次いで、トルエンを20g加え、シリコン浴温度180℃、150rpmでトルエンおよび水を留去しながら4時間撹拌して、イミド環含有アルカリ溶解性樹脂溶液を得た。その後、固形分が30質量%となるようにγ-ブチロラクトンを添加した。得られた樹脂溶液は、固形分酸価86mgKOH/g、Mw10000であった。
<カルボキシル基含有ウレタン樹脂の合成>
撹拌装置、温度計およびコンデンサーを備えた反応容器に、1,5-ペンタンジオールと1,6-ヘキサンジオールとから誘導されるポリカーボネートジオール(旭化成ケミカルズ(株)製、T5650J、数平均分子量800)を2400g(3モル)、ジメチロールプロピオン酸を603g(4.5モル)、および、モノヒドロキシル化合物として2-ヒドロキシエチルアクリレートを238g(2.6モル)投入した。次いで、ポリイソシアネートとしてイソホロンジイソシアネート1887g(8.5モル)を投入し、撹拌しながら60℃まで加熱して停止し、反応容器内の温度が低下し始めた時点で再度加熱して80℃で撹拌を続け、赤外線吸収スペクトルでイソシアネート基の吸収スペクトル(2280cm-1)が消失したことを確認して、反応を終了した。その後、固形分が50質量%となるようにカルビトールアセテートを添加した。得られたカルボキシル基含有ウレタン樹脂の固形分の酸価は、50mgKOH/gであった。
下記表1および表2に記載の配合に従って、実施例および比較例に記載の材料をそれぞれ配合し、攪拌機にて予備混合した後、3本ロールミルにて混練し、接着層および保護層を構成する樹脂組成物を調製した。表中の値は、特に断りが無い限り、質量部である。
銅厚18μmの回路が形成されたフレキシブルプリント配線基材を用意し、メック社製のCB-801Yを使用して、前処理を行った。その後、前処理を行ったフレキシブルプリント配線基材に、各接着層用の樹脂組成物を、乾燥後の膜厚が下記表1および表2に示す膜厚となるように塗布した。その後、熱風循環式乾燥炉にて80℃/30分にて乾燥し、樹脂組成物からなる接着層(A)を形成した。なお、比較例1については、接着層を形成しなかった。
上記接着層(A)上に、各保護層用の樹脂組成物を、乾燥後の膜厚が下記表1および表2に示す膜厚となるように塗布した。その後、熱風循環式乾燥炉にて80℃/30分にて乾燥し、樹脂組成物からなる保護層(B)を形成した。
接着層(A)および保護層(B)の膜厚の合計は全て20μmとした。
膜厚は、ミツトヨ社製マイクロメーターMDC-25MXを用いて測定した。
銅厚18μmの回路が形成されたフレキシブルプリント配線基材上に各樹脂組成物を塗布し、熱風循環式乾燥炉にて80℃/30分乾燥した。その後、30℃・1質量%の炭酸ナトリウム水溶液中に基材を浸漬し、塗膜が溶解するまでの時間を測定した。現像速度は塗膜が溶解するまでの時間を現像時間[秒]、膜厚を膜厚[μm]とした場合、下記式で表される。
現像速度[μm/秒]=膜厚[μm]/現像時間[秒]
上記で得られた積層構造体を備える基材に対し、ORC社製のHMW680GW(メタルハライドランプ、散乱光)にて、露光量500mJ/cm2で、ネガ型のパターン状に光照射した。次いで、90℃で60分間加熱処理を行った。その後、30℃・1質量%の炭酸ナトリウム水溶液中に基材を浸漬して3分間現像を行い、アルカリ現像性の可否を評価した。評価は目視で行い、以下の基準で評価した。
○:残渣なく現像可
×:現像残渣有り
○: 全く変化が認められないもの
×: 膨れ、剥がれがあるもの
○: しみ込みの無いもの
×: 基材と塗膜との間にしみ込みが確認されるもの
※1:合成例1の樹脂
※2:合成例2の樹脂
※3:カルボキシル基含有ノボラック樹脂(酸価104mgKOH/g,Bis A/フェノールノボラック樹脂)
※4:エトキシ化ビスフェノールAジメタクリレート(新中村化学工業(株)製)
※5:ジシクロペンタジエン型エポキシ樹脂(DIC(株)製)
※6:ビスフェノールA型エポキシ樹脂(分子量400)(三菱化学(株)製)
※7:オキシム型光塩基発生剤(BASFジャパン社製)
※8:2-(ジメチルアミノ)-2-[(4-メチルフェニル)メチル]-1-[4-(4-モルホリニル)フェニル]-1-ブタノン(BASFジャパン社製)
※9:ビスフェノールF型酸変性エポキシアクリレート(日本化薬(株)製)
※10:硫酸バリウム(堺化学(株)製)
2 銅回路
3 接着層
4 保護層
5 マスク
Claims (6)
- アルカリ現像性樹脂組成物からなる接着層(A)と、該接着層(A)上に形成される感光性樹脂組成物からなる保護層(B)と、を有し、前記接着層(A)と前記保護層(B)の膜厚の比率がA/B=0.5~50となり、前記接着層(A)の現像速度(a)と前記保護層(B)の現像速度(b)の比率がa/b=1.1~100であることを特徴とする積層構造体。
- 前記接着層(A)と前記保護層(B)とが、いずれも光照射によりパターニング可能である請求項1記載の積層構造体。
- フレキシブルプリント配線板の屈曲部および非屈曲部のうち少なくともいずれか一方に用いられる請求項1記載の積層構造体。
- フレキシブルプリント配線板のカバーレイ、ソルダーレジストおよび層間絶縁材料のうち少なくともいずれか1つの用途に用いられる請求項1記載の積層構造体。
- 請求項1~4のうちいずれか一項記載の積層構造体の少なくとも片面が、フィルムで支持または保護されてなることを特徴とするドライフィルム。
- フレキシブルプリント配線基板上に、請求項1~4のうちいずれか一項記載の積層構造体の層を直接形成するか、または、請求項5記載のドライフィルムにて積層構造体の層を形成し、光照射によりパターニングして、現像液によりパターンを一括して形成してなる絶縁膜を備えることを特徴とするフレキシブルプリント配線板。
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KR20170069260A (ko) | 2017-06-20 |
JP6374521B2 (ja) | 2018-08-15 |
JPWO2016060137A1 (ja) | 2017-06-08 |
CN106796400A (zh) | 2017-05-31 |
TW201625078A (zh) | 2016-07-01 |
TWI685281B (zh) | 2020-02-11 |
KR101959648B1 (ko) | 2019-03-18 |
CN106796400B (zh) | 2020-11-03 |
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