WO2016054834A1 - 彩膜基板的制作方法、彩膜基板及液晶显示面板 - Google Patents

彩膜基板的制作方法、彩膜基板及液晶显示面板 Download PDF

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WO2016054834A1
WO2016054834A1 PCT/CN2014/088721 CN2014088721W WO2016054834A1 WO 2016054834 A1 WO2016054834 A1 WO 2016054834A1 CN 2014088721 W CN2014088721 W CN 2014088721W WO 2016054834 A1 WO2016054834 A1 WO 2016054834A1
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region
substrate
black matrix
color film
color
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PCT/CN2014/088721
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English (en)
French (fr)
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黄世帅
罗时勋
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深圳市华星光电技术有限公司
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Priority to US14/407,177 priority Critical patent/US9703155B2/en
Publication of WO2016054834A1 publication Critical patent/WO2016054834A1/zh

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133512Light shielding layers, e.g. black matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509Filters, e.g. light shielding masks
    • G02F1/133514Colour filters
    • G02F1/133516Methods for their manufacture, e.g. printing, electro-deposition or photolithography
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/13439Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136286Wiring, e.g. gate line, drain line

Definitions

  • the liquid crystal display panel includes an array substrate, a color filter substrate, and a liquid crystal layer disposed between the array substrate and the color filter substrate.
  • the array substrate includes a data line, a scan line, a pixel electrode (ie, a transparent electrode), a thin film field effect transistor, and an array substrate common electrode.
  • the color film substrate includes a black matrix, RGB (red, green, and blue) color resists, and a color film substrate common electrode (also a transparent electrode).
  • a storage capacitor is formed between the common electrode of the array substrate in the non-display area of the liquid crystal display panel and the pixel electrode, and a liquid crystal capacitor formed between the common electrode of the color filter substrate and the pixel electrode.
  • the voltage of the common electrode of the color filter substrate is easily received by the data signal on the data line and the scan signal on the scan line, and the resistance value of the common electrode of the color filter substrate is large, so the color film substrate is common.
  • the stability of the common voltage on the electrode is poor, resulting in instability of the deflection voltage of the liquid crystal molecules in the liquid crystal layer, resulting in a decrease in display quality of the liquid crystal display panel.
  • An object of the present invention is to provide a method for fabricating a color filter substrate capable of releasing a common voltage on a common electrode of a color filter substrate, a color filter substrate and a liquid crystal display panel, so as to solve the existing color film substrate and liquid crystal display panel.
  • the stability of the common voltage on the common electrode of the color filter substrate is poor, resulting in a technical problem that the deflection voltage of the liquid crystal molecules in the liquid crystal layer is unstable.
  • Embodiments of the present invention provide a method for fabricating a color filter substrate, including:
  • a transparent metal layer is deposited on the substrate to form a transparent electrode.
  • the step of removing the metal layer of the color film region and the black matrix layer of the via region further includes:
  • the transparent electrode is connected to the metal layer through the through hole.
  • the black matrix region surrounds the via region.
  • the through hole region of the substrate is disposed between the RGB color films of different colors.
  • the invention also provides a color film substrate comprising:
  • a metal layer disposed on the black matrix region of the substrate and the via region;
  • a transparent electrode disposed on the RGB color film, on the metal layer of the via region, and on the black matrix.
  • the through hole region of the substrate is disposed between the RGB color films of the same color.
  • a substrate including a color film region, a black matrix region, and a via region;
  • RGB color film disposed in the color film area of the substrate
  • a metal layer disposed on the black matrix region of the substrate and the via region;
  • the via area of the substrate is disposed between the RGB films of the same color.
  • the via area of the substrate is disposed between the RGB color films of different colors.
  • the method for fabricating the color filter substrate, the color filter substrate and the liquid crystal display panel of the present invention connect the transparent electrode on the color filter substrate to the metal layer through the through hole, so that the color film
  • the charge accumulated on the transparent electrode of the substrate (the common electrode of the color filter substrate) can be quickly released, so that the deflection voltage of the liquid crystal molecules of the liquid crystal layer is stabilized, the display quality of the liquid crystal display panel is improved, and the existing color film substrate and liquid crystal display are solved.
  • the stability of the common voltage on the common electrode of the color filter substrate of the panel is poor, resulting in a technical problem that the deflection voltage of the liquid crystal molecules in the liquid crystal layer is unstable.
  • FIG. 1 is a flow chart of a preferred embodiment of a method of fabricating a color filter substrate of the present invention
  • FIG. 3 is a schematic structural view of a first preferred embodiment of a color filter substrate of the present invention.
  • FIG. 4 is a schematic view showing the structure of a second preferred embodiment of the color filter substrate of the present invention.
  • FIG. 1 is a flow chart of a preferred embodiment of a method for fabricating a color filter substrate according to the present invention
  • FIG. 2A to FIG. A schematic structural view of a manufacturing flow of a preferred embodiment of the method for fabricating a color filter substrate of the present invention.
  • the method for fabricating the color filter substrate of the preferred embodiment includes:
  • Step S101 sequentially depositing a metal layer and a black matrix layer on the substrate; wherein the substrate comprises a color film region, a black matrix region, and a via region;
  • Step S102 patterning the black matrix layer using a halftone mask to completely remove the black matrix layer of the color film region, remove the black matrix layer portion of the via region, and retain all the black matrix layers of the black matrix region.
  • Step S104 applying an RGB color film layer on the color film area of the substrate to form an RG color film;
  • the invention also provides a color film substrate, as shown in FIG. 2G, the color film substrate comprises a substrate 21, an RGB color film 25, a metal layer 22, a black matrix 26 and a transparent electrode 26;
  • the substrate 21 comprises a color film area, a black matrix a region and a via region;
  • the RGB color film 25 is disposed on the color film region of the substrate 21;
  • the metal layer 22 is disposed on the black matrix region and the via region of the substrate 21;
  • the black matrix 26 is disposed on the metal layer 22 of the black matrix region;
  • the electrode 26 is disposed on the RGB color film 25, on the metal layer 22 of the via region, and on the black matrix 26, and the transparent electrode 26 is in contact with the metal layer 22 through the via hole 27.
  • FIG. 3 is a schematic structural view of a first preferred embodiment of the color filter substrate of the present invention.
  • One pixel 30 of the color filter substrate comprises three color film regions 31 (red color film R, green color film G, blue color film B, respectively), a black matrix region 32 and three through hole regions 33, and the substrate is passed.
  • the hole area 33 is disposed between RGB color films (color film areas) of different colors, so that the transparent electrodes of the through hole areas 33 can uniformly discharge the charges of the corresponding pixels.
  • the through-hole region of the substrate of the color filter substrate of the liquid crystal display panel of the present invention is disposed between RGB color films of different colors.

Abstract

一种彩膜基板的制作方法,其包括:在基板(21)上依次沉积金属层(22)以及黑色矩阵层(23);使用半色调掩膜(24)对黑色矩阵层(23)进行图形化处理;去除彩膜区域的金属层(22)以及通孔区域的黑色矩阵层(23);在基板(21)的彩膜区域涂布RGB彩膜层;以及在基板(21)上沉积透明金属层,以形成透明电极(26)。提高了液晶显示面板的显示品质。

Description

彩膜基板的制作方法、彩膜基板及液晶显示面板 技术领域
本发明涉及显示器领域,特别是涉及一种彩膜基板的制作方法、彩膜基板及液晶显示面板。
背景技术
液晶显示面板包括阵列基板、彩膜基板以及设置在阵列基板和彩膜基板之间的液晶层。
阵列基板包括数据线、扫描线、像素电极(即透明电极)、薄膜场效应晶体管以及阵列基板公共电极。彩膜基板包括黑色矩阵、RGB(红绿蓝)色阻以及彩膜基板公共电极(也为透明电极)。液晶显示面板的非显示区的阵列基板公共电极与像素电极之间形成了存储电容,彩膜基板公共电极与像素电极之间形成的液晶电容。
液晶显示面板正常显示时,彩膜基板公共电极的电压容易收到数据线上的数据信号以及扫描线上的扫描信号的影响,同时彩膜基板公共电极的电阻值较大,因此彩膜基板公共电极上的公共电压的稳定性较差,从而导致液晶层中的液晶分子的偏转电压不稳定,造成液晶显示面板的显示品质下降。
故,有必要提供一种彩膜基板的制作方法、彩膜基板及液晶显示面板,以解决现有技术所存在的问题。
技术问题
本发明的目的在于提供一种可以较好的释放彩膜基板公共电极上的公共电压的彩膜基板的制作方法、彩膜基板及液晶显示面板,以解决现有的彩膜基板及液晶显示面板的彩膜基板公共电极上的公共电压的稳定性较差,从而导致液晶层中的液晶分子的偏转电压不稳定的技术问题。
技术解决方案
本发明实施例提供一种彩膜基板的制作方法,其包括:
在基板上依次沉积金属层以及黑色矩阵层,其中所述基板包括彩膜区域、黑色矩阵区域以及通孔区域;
使用半色调掩膜对所述黑色矩阵层进行图形化处理,以将所述彩膜区域的所述黑色矩阵层全部去除、将所述通孔区域的所述黑色矩阵层部分去除以及将所述黑色矩阵区域的所述黑色矩阵层全部保留;
去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层,以形成黑色矩阵以及通孔;
在所述基板的所述彩膜区域涂布RGB彩膜层,以形成RGB彩膜;以及
在所述基板上沉积透明金属层,以形成透明电极。
在本发明所述的彩膜基板的制作方法中,所述去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层的步骤包括:
通过湿法刻蚀去除所述彩膜区域的所述金属层。
在本发明所述的彩膜基板的制作方法中,所述去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层的步骤还包括:
通过干法刻蚀去除所述通孔区域的所述黑色矩阵层,以形成所述黑色矩阵以及所述通孔。
在本发明所述的彩膜基板的制作方法中,所述透明电极通过所述通孔与所述金属层连接。
在本发明所述的彩膜基板的制作方法中,所述黑色矩阵区域包围所述通孔区域。
在本发明所述的彩膜基板的制作方法中,所述基板的所述通孔区域设置在相同颜色的所述RGB彩膜之间。
在本发明所述的彩膜基板的制作方法中,所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
本发明还提供一种彩膜基板,其包括:
基板,其包括彩膜区域、黑色矩阵区域以及通孔区域;
RGB彩膜,设置在所述基板的所述彩膜区域;
金属层,设置在所述基板的所述黑色矩阵区域以及所述通孔区域;
黑色矩阵,设置在所述黑色矩阵区域的所述金属层上;以及
透明电极,设置在所述RGB彩膜上、所述通孔区域的所述金属层上以及所述黑色矩阵上。
在本发明所述的彩膜基板中,所述黑色矩阵区域包围所述通孔区域。
在本发明所述的彩膜基板中,所述透明电极与通孔区域的所述金属层连接。
在本发明所述的彩膜基板中,所述基板的通孔区域设置在相同颜色的所述RGB彩膜之间。
在本发明所述的彩膜基板中,所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
本发明还提供一种液晶显示面板,其包括阵列基板、彩膜基板以及设置在所述阵列基板和所述彩膜基板之间的液晶层;
其中所述彩膜基板包括:
基板,其包括彩膜区域、黑色矩阵区域以及通孔区域;
RGB彩膜,设置在所述基板的所述彩膜区域;
金属层,设置在所述基板的所述黑色矩阵区域以及所述通孔区域;
黑色矩阵,设置在所述黑色矩阵区域的所述金属层上;以及
透明电极,设置在所述RGB彩膜上、所述通孔区域的所述金属层上以及所述黑色矩阵上。
在本发明所述的液晶显示面板中,所述黑色矩阵区域包围所述通孔区域。
在本发明所述的液晶显示面板中,所述透明电极与通孔区域的所述金属层连接。
在本发明所述的液晶显示面板中,所述基板的通孔区域设置在相同颜色的所述RGB膜之间。
在本发明所述的液晶显示面板中,所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
有益效果
相较于现有的彩膜基板及液晶显示面板,本发明的彩膜基板的制作方法、彩膜基板及液晶显示面板通过通孔将彩膜基板上的透明电极与金属层连接,使得彩膜基板的透明电极(彩膜基板公共电极)上积累的电荷可以快速释放,使得液晶层的液晶分子的偏转电压稳定,提高了液晶显示面板的显示品质;解决了现有的彩膜基板及液晶显示面板的彩膜基板公共电极上的公共电压的稳定性较差,从而导致液晶层中的液晶分子的偏转电压不稳定的技术问题。
附图说明
图1为本发明的彩膜基板的制作方法的优选实施例的流程图;
图2A至图2G为本发明的彩膜基板的制作方法的优选实施例的制作流程的结构示意图;
图3为本发明的彩膜基板的第一优选实施例的结构示意图;
图4为本发明的彩膜基板的第二优选实施例的结构示意图。
本发明的最佳实施方式
以下各实施例的说明是参考附加的图式,用以例示本发明可用以实施的特定实施例。本发明所提到的方向用语,例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等,仅是参考附加图式的方向。因此,使用的方向用语是用以说明及理解本发明,而非用以限制本发明。
在图中,结构相似的单元是以相同标号表示。
本发明提供一种彩膜基板的制作方法,请参照图1、图2A至图2G,图1为本发明的彩膜基板的制作方法的优选实施例的流程图,图2A至图2G为本发明的彩膜基板的制作方法的优选实施例的制作流程的结构示意图。本优选实施例的彩膜基板的制作方法包括:
步骤S101,在基板上依次沉积金属层以及黑色矩阵层;其中基板包括彩膜区域、黑色矩阵区域以及通孔区域;
步骤S102,使用半色调掩膜对黑色矩阵层进行图形化处理,以将彩膜区域的黑色矩阵层全部去除、将通孔区域的黑色矩阵层部分去除以及将黑色矩阵区域的黑色矩阵层全部保留;
步骤S103,去除彩膜区域的金属层以及通孔区域的黑色矩阵层,以形成黑色矩阵以及通孔;
步骤S104,在基板的彩膜区域涂布RGB彩膜层,以形成RG彩膜;
步骤S105,在基板上沉积透明金属层,以形成透明电极。
下面详细说明本优选实施例的彩膜基板的制作方法的各步骤的具体流程。
在步骤S101中,提供一基板21,如玻璃基板,在该基板上依次沉积金属层22以及黑色矩阵层23,该金属层22的材料可为锘、钼、铝、铜、钛、钽或钨等,具体如图2A所示。该基板21包括用于形成RGB彩膜25的彩膜区域、用于形成黑色矩阵26的黑色矩阵区域以及用于形成通孔27的通孔区域;为了便于黑色矩阵区域的上形成的透明电极26可以较好的释放电荷,优选将基板21的通孔区域设置在黑色矩阵区域内,即黑色矩阵区域包围通孔区域。随后转到步骤S102。
在步骤S102中,使用半色调掩膜24(HTM,half tone mask)对黑色矩阵层23进行图形化处理(即使用半色调掩膜24对黑色矩阵层23进行曝光、显影以及去光阻操作),其中基板21的彩膜区域对应半色调掩膜24的遮光区域241,基板21的黑色矩阵区域对应半色调掩膜24的全透光区域242,基板21的通孔区域对应半色调掩膜24的半透光区域243,具体请参见图2B。
去光阻操作后,基板21的彩膜区域对应的黑色矩阵层23全部去除,基板21的通孔区域的黑色矩阵层23部分去除,基板21的黑色矩阵区域的黑色矩阵层23全部保留;具体如图2C所示。随后转到步骤S103。
在步骤S103中,去除基板21的彩膜区域对应的金属层22以及基板21的通孔区域对应的黑色矩阵层23,以形成黑色矩阵26以及通孔27。具体可通过施法刻蚀去除基板21的彩膜区域的金属层22,如图2D所示,再通过干法刻蚀去除基板21的通孔区域的黑色矩阵层23,如图2E所示,这样可在金属层22上形成黑色矩阵26以及通孔27。随后转到步骤S104。
在步骤S104中,由于基板21的彩膜区域对应的金属层22已经去除,因此可在基板的彩膜区域直接涂布RGB彩膜层,从而在基板21的彩膜区域上形成RGB彩膜25,如图2F所示。随后转到步骤S105。
在步骤S105中,在基板21的彩膜区域、黑色矩阵区域以及通孔区域上均沉积透明金属层,该透明金属层可由氧化锡铟(ITO,indium-tin-oxide)构成,这样即在基板的顶部形成了彩膜基板的透明电极26,如图2G所示,该透明电极26通过通孔27与金属层22连接。
这样即完成了本优选实施例的彩膜基板的制作过程。
本优选实施例的彩膜基板的制作方法通过通孔将彩膜基板上的透明电极与金属层连接,使得彩膜基板的透明电极上积累的电荷可以快速释放,使得液晶层的液晶分子的偏转电压稳定,提高了液晶显示面板的显示品质。
本发明还提供一种彩膜基板,如图2G所示,该彩膜基板包括基板21、RGB彩膜25、金属层22、黑色矩阵26以及透明电极26;基板21包括彩膜区域、黑色矩阵区域以及通孔区域;RGB彩膜25设置在基板21的彩膜区域;金属层22设置在基板21的黑色矩阵区域以及通孔区域;黑色矩阵26设置在黑色矩阵区域的金属层22上;透明电极26设置在RGB彩膜25上、通孔区域的金属层22上以及黑色矩阵26上,透明电极26通过通孔27与金属层22接触。
本优选实施例的彩膜基板的透明电极26通过通孔27与金属层22连接,使得彩膜基板的透明电极26上积累的电荷可以通过金属层22进行快速的释放,避免了彩膜基板的透明电极26上的公共电压的不稳定。
同时基板21的黑色矩阵区域优选包围基板21的通孔区域。请参照图3,图3为本发明的彩膜基板的第一优选实施例的结构示意图。该彩膜基板的一个像素30包括三个彩膜区域31(分别为红彩膜R、绿彩膜G、蓝彩膜B)、一个黑色矩阵区域32以及三个通孔区域33,基板的通孔区域33设置在不同颜色的RGB彩膜(彩膜区域)之间,这样通孔区域33的透明电极可以对相应像素的电荷进行均匀的释放。
请参照图4,图4为本发明的彩膜基板的第二优选实施例的结构示意图。该彩膜基板的一个像素40也包括三个彩膜区域41(分别为红彩膜R、绿彩膜G、蓝彩膜B)、一个黑色矩阵区域42以及三个通孔区域43,基板的通孔区域43设置在相同的RGB彩膜(彩膜区域)之间,这样通孔区域的透明电极同样可以对相应像素的电荷进行均匀的释放。
本优选实施例的彩膜基板通过通孔将彩膜基板上的透明电极与金属层连接,使得彩膜基板的透明电极上积累的电荷可以快速释放,使得液晶层的液晶分子的偏转电压稳定,提高了液晶显示面板的显示品质。
本发明还提供一种液晶显示面板,该液晶显示面板包括阵列基板、彩膜基板以及设置在阵列基板和彩膜基板之间的液晶层。该彩膜基板包括基板、RGB彩膜、金属层、黑色矩阵以及透明电极;基板包括彩膜区域、黑色矩阵区域以及通孔区域;RGB彩膜设置在基板的彩膜区域;金属层设置在基板的黑色矩阵区域以及通孔区域;黑色矩阵设置在黑色矩阵区域的金属层上;透明电极设置在RGB彩膜上、通孔区域的金属层上以及黑色矩阵上。
优选的,本发明的液晶显示面板的彩膜基板的基板的黑色矩阵区域包围彩膜基板的通孔区域。
优选的,本发明的液晶显示面板的彩膜基板的基板的通孔区域设置在不同颜色的RGB彩膜之间。
优选的,本发明的液晶显示面板的彩膜基板的基板的通孔区域设置在相同的RGB彩膜之间。
本发明的液晶显示面板的具体工作原理与上述的彩膜基板的优选实施例中的描述相同或像素,具体请参见上述彩膜基板的优选实施例的中的相关描述。
本发明的彩膜基板的制作方法、彩膜基板及液晶显示面板通过通孔将彩膜基板上的透明电极与金属层连接,使得彩膜基板的透明电极(彩膜基板公共电极)上积累的电荷可以快速释放,使得液晶层的液晶分子的偏转电压稳定,提高了液晶显示面板的显示品质;解决了现有的彩膜基板及液晶显示面板的彩膜基板公共电极上的公共电压的稳定性较差,从而导致液晶层中的液晶分子的偏转电压不稳定的技术问题。
综上所述,虽然本发明已以优选实施例揭露如上,但上述优选实施例并非用以限制本发明,本领域的普通技术人员,在不脱离本发明的精神和范围内,均可作各种更动与润饰,因此本发明的保护范围以权利要求界定的范围为准。

Claims (17)

  1. 一种彩膜基板的制作方法,其包括:
    在基板上依次沉积金属层以及黑色矩阵层,其中所述基板包括彩膜区域、黑色矩阵区域以及通孔区域;
    使用半色调掩膜对所述黑色矩阵层进行图形化处理,以将所述彩膜区域的所述黑色矩阵层全部去除、将所述通孔区域的所述黑色矩阵层部分去除以及将所述黑色矩阵区域的所述黑色矩阵层全部保留;
    去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层,以形成黑色矩阵以及通孔;
    在所述基板的所述彩膜区域涂布RGB彩膜层,以形成RGB彩膜;以及
    在所述基板上沉积透明金属层,以形成透明电极。
  2. 根据权利要求1所述的彩膜基板的制作方法,其中所述去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层的步骤包括:
    通过湿法刻蚀去除所述彩膜区域的所述金属层。
  3. 根据权利要求2所述的彩膜基板的制作方法,其中所述去除所述彩膜区域的所述金属层以及所述通孔区域的所述黑色矩阵层的步骤还包括:
    通过干法刻蚀去除所述通孔区域的所述黑色矩阵层,以形成所述黑色矩阵以及所述通孔。
  4. 根据权利要求3所述的彩膜基板的制作方法,其中所述透明电极通过所述通孔与所述金属层连接。
  5. 根据权利要求1所述的彩膜基板的制作方法,其中所述黑色矩阵区域包围所述通孔区域。
  6. 根据权利要求1所述的彩膜基板的制作方法,其中所述基板的所述通孔区域设置在相同颜色的所述RGB彩膜之间。
  7. 根据权利要求1所述的彩膜基板的制作方法,其中所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
  8. 一种彩膜基板,其包括:
    基板,其包括彩膜区域、黑色矩阵区域以及通孔区域;
    RGB彩膜,设置在所述基板的所述彩膜区域;
    金属层,设置在所述基板的所述黑色矩阵区域以及所述通孔区域;
    黑色矩阵,设置在所述黑色矩阵区域的所述金属层上;以及
    透明电极,设置在所述RGB彩膜上、所述通孔区域的所述金属层上以及所述黑色矩阵上。
  9. 根据权利要求8所述的彩膜基板,其中所述黑色矩阵区域包围所述通孔区域。
  10. 根据权利要求8所述的彩膜基板,其中所述透明电极与通孔区域的所述金属层连接。
  11. 根据权利要求8所述的彩膜基板,其中所述基板的通孔区域设置在相同颜色的所述RGB彩膜之间。
  12. 根据权利要求8所述的彩膜基板,其中所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
  13. 一种液晶显示面板,其包括阵列基板、彩膜基板以及设置在所述阵列基板和所述彩膜基板之间的液晶层;
    其中所述彩膜基板包括:
    基板,其包括彩膜区域、黑色矩阵区域以及通孔区域;
    RGB彩膜,设置在所述基板的所述彩膜区域;
    金属层,设置在所述基板的所述黑色矩阵区域以及所述通孔区域;
    黑色矩阵,设置在所述黑色矩阵区域的所述金属层上;以及
    透明电极,设置在所述RGB彩膜上、所述通孔区域的所述金属层上以及所述黑色矩阵上。
  14. 根据权利要求13所述的液晶显示面板,其中所述黑色矩阵区域包围所述通孔区域。
  15. 根据权利要求13所述的液晶显示面板,其中所述透明电极与通孔区域的所述金属层连接。
  16. 根据权利要求13所述的液晶显示面板,其中所述基板的通孔区域设置在相同颜色的所述RGB彩膜之间。
  17. 根据权利要求13所述的液晶显示面板,其中所述基板的所述通孔区域设置在不同颜色的所述RGB彩膜之间。
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