WO2016045136A1 - 一种升降装置以及升降系统 - Google Patents
一种升降装置以及升降系统 Download PDFInfo
- Publication number
- WO2016045136A1 WO2016045136A1 PCT/CN2014/087771 CN2014087771W WO2016045136A1 WO 2016045136 A1 WO2016045136 A1 WO 2016045136A1 CN 2014087771 W CN2014087771 W CN 2014087771W WO 2016045136 A1 WO2016045136 A1 WO 2016045136A1
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- WO
- WIPO (PCT)
- Prior art keywords
- lifting
- electromagnetic control
- receiving base
- fixing nut
- guiding hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
Definitions
- the present invention relates to the field of manufacturing technology of liquid crystal display panels, and in particular, to a lifting device and a lifting system.
- TFT-LCD Thin Film Transistor-Liquid In the manufacturing industry of Crystal Display
- the raw material glass substrates are getting thinner and thinner, and the amount of Bending of the glass substrates in the manufacturing equipment is also increasing in the panel production, among which Bending The amount refers to the amount of sag of the glass substrate when the glass substrate is placed in the manufacturing apparatus.
- Bending The amount refers to the amount of sag of the glass substrate when the glass substrate is placed in the manufacturing apparatus.
- a photoresist coating unit Coater
- Soft Bake Soft baking unit
- Hard bake Hard bake
- lifting needle Lift
- the glass substrate is supported, and the lifting needle is raised and lowered in the guiding hole of the glass substrate receiving mechanism to apply a uniform photoresist to the glass substrate, and the photoresist is dried and baked.
- the inventors have found that due to prolonged production, the lifting needle undergoes a slight bending when supporting the glass substrate, and the lifting needle is easily bent. Friction occurs inside the guide hole of the glass substrate receiving mechanism, and cannot be lowered to the original position due to friction with the inside of the guide hole during the production process, resulting in poor product manufacturing process or risk of fragmentation.
- An object of the present invention is to provide a lifting device and a lifting system, which electromagnetically adsorbs when the lifting needle is lowered by the electromagnetic control device, so as to ensure that the lifting needle can be lowered to the original position, thereby reducing the problem of poor manufacturing process and the risk of fragmentation.
- a lifting device comprising:
- a receiving base is provided with a fixing nut, the lower end of the lifting pin is arranged in a bolt shape, and the receiving base is fixedly connected with the lower end of the lifting pin, so that when the receiving base is moved upward by an external force, The lifting needle moves upward in the guiding hole;
- An electromagnetic control device is connected to the receiving base through an electromagnetic control line, and the electromagnetic control device is configured to send an electromagnetic control signal to the receiving base through the electromagnetic control line, so that the lifting pin is in the electromagnetic control signal Moving downward in the guide hole under control;
- the receiving mechanism further includes a support member disposed on a periphery of the guiding hole, the supporting member is configured to fix the receiving mechanism under the substrate carrying platform by a fixing member, and the substrate carrying platform is used for carrying the glass substrate .
- the fixing nut has a limiting member disposed on a periphery of the fixing nut for limiting a maximum distance at which the lifting pin moves upward.
- the receiving base, the fixing nut and the limiting member are made of a metal material.
- the embodiment of the present invention further provides the following technical solutions:
- a lifting device comprising:
- a receiving base is fixedly connected to the lower end of the lifting needle, so that when the receiving base moves upward under the action of an external force, the lifting needle moves upward in the guiding hole;
- An electromagnetic control device is connected to the receiving base through an electromagnetic control line, and the electromagnetic control device is configured to send an electromagnetic control signal to the receiving base through the electromagnetic control line, so that the lifting pin is in the electromagnetic control signal Moving downward in the guide hole under control.
- the receiving mechanism further includes a support member disposed at a periphery of the guiding hole, wherein the supporting member is configured to fix the receiving mechanism under the substrate carrying platform by a fixing member, and the substrate carries The platform is used to carry a glass substrate.
- the receiving base is provided with a fixing nut, and the lower end of the lifting pin is provided in a bolt type.
- the fixing nut has a limiting member disposed on a periphery of the fixing nut for limiting a maximum distance at which the lifting pin moves upward.
- the receiving base and the fixing nut are made of metal.
- the embodiment of the present invention further provides the following technical solutions:
- a lifting system comprising a substrate carrying platform and at least one lifting device, the substrate carrying platform for carrying a glass substrate; the lifting device being fixed below the substrate carrying platform;
- the lifting device comprises:
- a receiving base is fixedly coupled to the lower end of the lifting needle, so that when the receiving base moves in the first direction under the action of an external force, the lifting needle moves upward in the guiding hole;
- An electromagnetic control device is connected to the receiving base through an electromagnetic control line, and the electromagnetic control device is configured to send an electromagnetic control signal to the receiving base through the electromagnetic control line, so that the lifting pin is in the electromagnetic control signal Moving downward in the guide hole under control.
- the receiving mechanism further includes a support member disposed at a periphery of the guiding hole, and the supporting member is configured to fix the receiving mechanism under the substrate carrying platform by a fixing member.
- the receiving base is provided with a fixing nut, and the lower end of the lifting needle is provided in a bolt type.
- the fixing nut has a limiting member disposed on a periphery of the fixing nut for limiting a maximum distance that the lifting needle moves in the first direction.
- the receiving base and the fixing nut are made of metal.
- the lifting device and the lifting system provided by the present invention transmit electromagnetic control signals when the lifting needle is lowered by the electromagnetic control device, that is, electromagnetic adsorption is performed on the lifting needle and the receiving base, and the descending manner of the lifting needle and the receiving base is gravity. And the magnetic traction is lowered, thereby ensuring that the lifting pin and the receiving base can be lowered to the original position, thereby reducing the problem of poor process brightness such as uneven brightness of the display and the occurrence of fragments.
- FIG. 1 is a schematic structural view of a lifting device according to an embodiment of the present invention.
- FIG. 2 is a schematic structural diagram of a lifting system according to an embodiment of the present invention.
- FIG. 1 is a schematic diagram of a structure of a lifting device according to an embodiment of the present invention; wherein the lifting device includes:
- a receiving mechanism 10 provided with a guiding hole 101;
- a receiving base 12 is fixedly coupled to the lower end of the lifting pin 11 such that when the receiving base 12 is moved upward by an external force, the lifting pin 11 moves upward in the guiding hole 101;
- An electromagnetic control device 13 is connected to the receiving base 12 via an electromagnetic control line, and the electromagnetic control device 13 is configured to send an electromagnetic control signal to the receiving base 12 through the electromagnetic control line, so that the lifting pin 11 is The electromagnetic control signal is moved downward in the guiding hole 101 under the control of the electromagnetic control signal.
- the upper half of the lifting needle 11 is thinner than the lower half, and is slightly bent due to a certain weight when the lifting needle 11 supports the glass substrate, and is carried out in the guiding hole 101.
- the lower half of the lift pin 11 may be rubbed against the inner side of the guide hole 101.
- the present invention connects an electromagnetic control device 13 to the receiving base 12, and the electromagnetic control device 13 sends an electromagnetic control signal to the receiving base 12, and the lifting pin 11 is under the control of the electromagnetic control signal.
- the inside of the guiding hole 101 moves downward, that is, the descending manner of the lifting needle 11 and the receiving base 12 is converted into gravity and magnetic traction by a physical gravity drop, and when the lifting needle 11 rises, electromagnetic control The signal is not transmitted, and is raised by an external force applied to the receiving base 12, and when the lifting needle 11 is lowered, it is driven by an electromagnetic control signal, and the base 12 is attracted by the magnetic force, and the lifting needle is lowered.
- the electromagnetic control device 13 can control the generation and transmission of the electromagnetic control signals through software, which will not be described herein.
- the lifting device transmits an electromagnetic control signal when the lifting needle 11 is lowered by the electromagnetic control device, that is, electromagnetic adsorption of the lifting needle 11 and the receiving base 12, and the lifting needle 11 and the receiving base 12 are lowered.
- the method is gravity and magnetic traction drop, so that the lifting needle and the receiving base can be lowered to the original position (the lifting needle 11 is at the origin position as shown in FIG. 1), and the problem of poor process brightness and uneven manufacturing process and the occurrence of fragments are reduced. .
- the receiving mechanism 10 further includes a support member 102 disposed on the periphery of the guiding hole 101, and the supporting member 102 is configured to fix the receiving mechanism 10 under the substrate carrying platform 100 through a fixing member.
- the substrate carrying platform 100 is used to carry a glass substrate (not shown).
- a plurality of through holes are disposed on the substrate carrying platform 100, wherein the through holes correspond to the guiding holes 101 of the receiving mechanism 10 disposed under the substrate carrying platform 100, wherein the substrate
- the upper surface of the carrying platform 100 carries the glass substrate.
- the receiving base 12 is provided with a fixing nut 121 , and the lower end of the lifting needle 11 is arranged in a bolt shape. That is, the receiving base 12 and the lifting pin 11 are fixed by the cooperation of the nut and the bolt.
- the fixing nut 121 further has a limiting member 122 disposed on the periphery of the fixing nut 121 for limiting the maximum distance that the lifting needle 11 moves upward.
- the receiving base 12, the fixing nut 121 and the limiting member 122 are made of metal.
- the lifting device performs electromagnetic adsorption when the lifting needle 11 is lowered by the electromagnetic control device 13, that is, the descending manner of the lifting needle 11 and the receiving base 12 is gravity and magnetic force.
- the traction is lowered, and even if the lifting needle 11 is subjected to a certain weight and slightly bent while supporting the glass, the lifting needle 11 and the receiving base 12 are lowered to the original position (the lifting needle 11 is at the origin as shown in FIG. 1). Position), reducing the problem of poor process (such as uneven brightness of the display, The phenomenon of causing various traces) and the occurrence of fragments.
- an embodiment of the present invention further provides a system including the lifting device.
- the meaning of the noun is the same as that in the above lifting device, and the specific implementation details can be referred to the description in the embodiment of the lifting device.
- FIG. 2 is a schematic structural diagram of a lifting system 200 according to the present invention.
- the lifting system 200 includes a substrate carrying platform 201 and at least one lifting device 202.
- the substrate carrying platform 201 is configured to carry a glass substrate.
- the lifting device 202 is fixed to the bottom of the substrate carrying platform 201.
- the lifting device 202 is provided with the lifting device provided in the above embodiment. Referring to FIG. 1 together, the lifting device 202 includes:
- a receiving mechanism 10 provided with a guiding hole 101;
- a receiving base 12 is fixedly coupled to the lower end of the lifting pin 11 such that when the receiving base 12 is moved upward by an external force, the lifting pin 11 moves upward in the guiding hole 101;
- An electromagnetic control device 13 is connected to the receiving base 12 via an electromagnetic control line, and the electromagnetic control device 13 is configured to send an electromagnetic control signal to the receiving base 12 through the electromagnetic control line, so that the lifting pin 11 is The electromagnetic control signal is moved downward in the guiding hole 101 under the control of the electromagnetic control signal.
- the upper half of the lifting needle 11 is thinner than the lower half, and is slightly bent due to a certain weight when the lifting needle 11 supports the glass substrate, and is carried out in the guiding hole 101.
- the lower half of the lift pin 11 may be rubbed against the inner side of the guide hole 101.
- the present invention connects an electromagnetic control device 13 to the receiving base 12, and the electromagnetic control device 13 sends an electromagnetic control signal to the receiving base 12, and the lifting pin 11 is under the control of the electromagnetic control signal.
- the inside of the guiding hole 101 moves downward, that is, the descending manner of the lifting needle 11 and the receiving base 12 is converted into gravity and magnetic traction by a physical gravity drop, and when the lifting needle 11 rises, electromagnetic control The signal is not transmitted, and is raised by an external force applied to the receiving base 12, and when the lifting needle 11 is lowered, it is driven by an electromagnetic control signal, and the base 12 is attracted by the magnetic force, and the lifting needle is lowered.
- the electromagnetic control device 13 can control the generation and transmission of the electromagnetic control signals through software, which will not be described herein.
- the receiving mechanism 10 further includes a support member 102 disposed on the periphery of the guiding hole 101, and the supporting member 102 is configured to fix the receiving mechanism 10 under the substrate carrying platform 100 through a fixing member.
- the substrate carrying platform 100 is used to carry a glass substrate (not shown).
- a plurality of through holes are disposed on the substrate carrying platform 100, wherein the through holes correspond to the guiding holes 101 of the receiving mechanism 10 disposed under the substrate carrying platform 100, wherein the substrate
- the upper surface of the carrying platform 100 carries the glass substrate.
- the receiving base 12 is provided with a fixing nut 121 , and the lower end of the lifting needle 11 is arranged in a bolt shape. That is, the receiving base 12 and the lifting pin 11 are fixed by the cooperation of the nut and the bolt.
- the fixing nut 121 further has a limiting member 122 disposed on the periphery of the fixing nut 121 for limiting the maximum distance that the lifting needle 11 moves upward.
- the receiving base 12, the fixing nut 121 and the limiting member 122 are made of metal.
- the lifting system 200 provided by the embodiment of the present invention includes a plurality of lifting devices, and electromagnetic adsorption is performed by the electromagnetic control device 13 when the lifting needle 11 is lowered, that is, the lifting needle 11 and the receiving base 12 are
- the descending manner is gravity and magnetic traction, even if the lifting pin 11 bears a certain weight and is slightly bent when supporting the glass, and the lifting pin 11 and the receiving base 12 are lowered to the original position (as shown in FIG. 1).
- the lifting pin 11 is at the origin position), which reduces the problem of poor process (such as uneven brightness of the display). The phenomenon of causing various traces) and the occurrence of fragments.
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Abstract
一种升降装置以及升降系统,包括承接机构(10),设置有导向孔(101);升降针(11),贯穿于导向孔(101)内;与升降针(11)连接的承接底座(12),当其向上移动时,升降针(11)在导向孔(101)内向上移动;电磁控制装置(13),用于向承接底座(12)发送电磁控制信号,使得升降针(11)在导向孔(101)内向下移动;通过在升降针(11)下降时进行电磁吸附,减少制程不良的问题以及破片风险。
Description
本发明涉及液晶显示面板制造技术领域,特别涉及一种升降装置以及升降系统。
在TFT-LCD(薄膜晶体管液晶显示器,Thin Film Transistor- Liquid
Crystal Display)制造行业当中,随着玻璃基板的面积越来越大,在进行面板制作过程中对玻璃的成膜效果要求也不断提高。
同时,在自动化集成设备流水线生产当中,由于市场对面板要求量变大,原材料玻璃基板越来越薄,随之在面板生产当中玻璃基板在制造设备内的Bending量也就越来越大,其中Bending量是指玻璃基板放在制造设备内时玻璃基板的下垂量。在Photo工艺过程当中包括光刻胶涂布单元(Coater),软烘烤单元(Soft
bake),硬烘烤单元(Hard bake)使用升降针(Lift
pin)支撑玻璃基板,升降针在玻璃基板承接机构的导向孔内进行上升和下降,以对玻璃基板涂布均匀光刻胶,且对光刻胶进行干燥、烘烤。
可是在实践中,发明人发现由于长时间生产,升降针在支撑玻璃基板时承受一定重量而发生轻微弯曲,而升降针弯曲容易与
玻璃基板承接机构的导向孔内侧发生摩擦,在生产过程中因为与导向孔内侧摩擦而无法下降至原点位置,而造成产品制程不良或发生破片风险。
本发明的目的在于提供一种升降装置以及升降系统,通过电磁控制装置在升降针下降时进行电磁吸附,以保证升降针能下降到原点位置,减少制程不良的问题以及破片风险。
一种升降装置,其中包括:
一承接机构,设置有导向孔;
一升降针,贯穿于所述导向孔内;
一承接底座,设置有固定螺母,所述升降针的下端呈螺栓型设置,所述承接底座与所述升降针的下端连接固定,使得当所述承接底座在外力作用下向上移动时,所述升降针在所述导向孔内向上移动;
一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动;
所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方,所述基板承载平台用于承载玻璃基板。
在上述升降装置中,所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针向上移动的最大距离进行限制。
在上述升降装置中,所述承接底座、所述固定螺母以及所述限位部件均为金属材质。
为解决上述问题,本发明实施例还提供技术方案如下:
一种升降装置,其中包括:
一承接机构,设置有导向孔;
一升降针,贯穿于所述导向孔内;
一承接底座,与所述升降针的下端连接固定,使得当所述承接底座在外力作用下向上移动时,所述升降针在所述导向孔内向上移动;
一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动。
在上述升降装置中,所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方,所述基板承载平台用于承载玻璃基板。
在上述升降装置中,所述承接底座设置有固定螺母,所述升降针的下端呈螺栓型设置。
在上述升降装置中,所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针向上移动的最大距离进行限制。
在上述升降装置中,所述承接底座和所述固定螺母均为金属材质。
为解决上述问题,本发明实施例还提供技术方案如下:
一种升降系统,其中包括基板承载平台和至少一个升降装置,所述基板承载平台,用于承载玻璃基板;所述升降装置,固定于所述基板承载平台的下方;
其中,所述升降装置包括:
一承接机构,设置有导向孔;
一升降针,贯穿于所述导向孔内;
一承接底座,与所述升降针的下端连接固定,使得当所述承接底座在外力作用下沿第一方向移动时,所述升降针在所述导向孔内向上移动;
一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动。
在上述升降系统中,所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方。
在上述升降系统中,所述承接底座设置有固定螺母,所述升降针的下端呈螺栓型设置。
在上述升降系统中,所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针沿第一方向运动的最大距离进行限制。
在上述升降系统中,所述承接底座和所述固定螺母均为金属材质。
相对现有技术,本发明提供的升降装置以及升降系统,通过电磁控制装置在升降针下降时发送电磁控制信号,即对升降针以及承接底座进行电磁吸附,升降针以及承接底座的下降方式为重力和磁力牵引下降,从而保证升降针以及承接底座可下降至原点位置,减少显示器亮度不均匀等制程不良的问题以及破片的发生。
图1为本发明实施例提供的一种升降装置的结构示意图;
图2为本发明实施例提供的一种升降系统的结构示意图。
请参照图式,其中相同的组件符号代表相同的组件,本发明的原理是以实施在一适当的运算环境中来举例说明。以下的说明是基于所例示的本发明具体实施例,其不应被视为限制本发明未在此详述的其它具体实施例。
请参考图1,图1为本发明实施例提供的一种升降装置的结构的示意图;其中所述升降装置包括:
一承接机构10,设置有导向孔101;
一升降针11,贯穿于所述导向孔101内;
一承接底座12,与所述升降针11的下端连接固定,使得当所述承接底座12在外力作用下向上移动时,所述升降针11在所述导向孔101内向上移动;
一电磁控制装置13,通过电磁控制线与所述承接底座12连接,所述电磁控制装置13用于通过所述电磁控制线向所述承接底座12发送电磁控制信号,使得所述升降针11在所述电磁控制信号控制下在所述导向孔101内向下移动。
可如图1所示,所述升降针11的上半部分比下半部分要细,由于在所述升降针11支撑玻璃基板时承受一定重量而发生轻微弯曲,在所述导向孔101内进行升降移动时,所述升降针11的下半部分会与导向孔101内侧产生摩擦。
本发明通过在所述承接底座12连接一电磁控制装置13,所述电磁控制装置13向所述承接底座12发送电磁控制信号,所述升降针11在所述电磁控制信号的控制下在所述导向孔101内向下移动,也就是说,所述升降针11以及所述承接底座12的下降方式由物理上的重力下降转换为重力和磁力牵引下降,当所述升降针11上升时,电磁控制信号不发送,利用施加于所述承接底座12的外力进行上升,当所述升降针11下降时,通过电磁控制信号进行驱动,利用磁力吸附承接底座12,并带动所述升降针下降,其中,电磁控制装置13可以通过软件来控制电磁控制信号的产生和发送,此处不作赘述。
由上述可知,本发明实施例提供的升降装置,通过电磁控制装置在升降针11下降时发送电磁控制信号,即对升降针11以及承接底座12进行电磁吸附,升降针11以及承接底座12的下降方式为重力和磁力牵引下降,从而保证升降针以及承接底座可下降至原点位置(如图1所示所述升降针11处于原点位置),减少显示器亮度不均匀等制程不良的问题以及破片的发生。
进一步的,所述承接机构10还包括有设置于所述导向孔101外围的支撑件102,所述支撑件102用于通过固定件将所述承接机构10固定于基板承载平台100的下方,所述基板承载平台100用于承载玻璃基板(图中未标示)。
可以理解的是,所述基板承载平台100上设置了多个通孔,其中,该通孔与设置于所述基板承载平台100下方的承接机构10的导向孔101相对应,其中,所述基板承载平台100的上方承载玻璃基板,当多个所述升降针11同时上升或下降时,会穿过所述通孔,带动上方的玻璃基板进行上升和下降。
如图1所示,更进一步的,所述承接底座12设置有固定螺母121,所述升降针11的下端呈螺栓型设置。也就是说,所述承接底座12与所述升降针11通过螺母和螺栓的相配合的方式进行固定。
优选的,所述固定螺母121上还可以具有设置于所述固定螺母121外围的限位部件122,用于对所述升降针11向上移动的最大距离进行限制。优选的,本实施例中,所述承接底座12、所述固定螺母121以及所述限位部件122均为金属材质。
由上述可知,本发明实施例提供的升降装置,通过电磁控制装置13在升降针11下降时进行电磁吸附,也就是说,所述升降针11以及所述承接底座12的下降方式为重力和磁力牵引下降,即使所述升降针11在支撑到玻璃时承受一定重量而发生轻微弯曲,也保证升降针11以及所述承接底座12下降至原点位置(如图1所示所述升降针11处于原点位置),减少出现制程不良的问题(如显示器亮度不均匀,
造成各种痕迹的现象)和破片的发生。
为便于更好的实施本发明实施例提供的升降装置,本发明实施例还提供一种包含所述升降装置的系统。其中名词的含义与上述升降装置中相同,具体实现细节可以参考升降装置实施例中的说明。
请参考图2,图2为本发明提供的升降系统200的结构示意图,所述升降系统200包括基板承载平台201和至少一个升降装置202,所述基板承载平台201用于承载玻璃基板,所述升降装置202,固定于所述基板承载平台201的下方;其中,所述升降装置202采用上述实施例提供的升降装置,可一并参考图1,所述升降装置202包括:
一承接机构10,设置有导向孔101;
一升降针11,贯穿于所述导向孔101内;
一承接底座12,与所述升降针11的下端连接固定,使得当所述承接底座12在外力作用下向上移动时,所述升降针11在所述导向孔101内向上移动;
一电磁控制装置13,通过电磁控制线与所述承接底座12连接,所述电磁控制装置13用于通过所述电磁控制线向所述承接底座12发送电磁控制信号,使得所述升降针11在所述电磁控制信号控制下在所述导向孔101内向下移动。
可如图1所示,所述升降针11的上半部分比下半部分要细,由于在所述升降针11支撑玻璃基板时承受一定重量而发生轻微弯曲,在所述导向孔101内进行升降移动时,所述升降针11的下半部分会与导向孔101内侧产生摩擦。
本发明通过在所述承接底座12连接一电磁控制装置13,所述电磁控制装置13向所述承接底座12发送电磁控制信号,所述升降针11在所述电磁控制信号的控制下在所述导向孔101内向下移动,也就是说,所述升降针11以及所述承接底座12的下降方式由物理上的重力下降转换为重力和磁力牵引下降,当所述升降针11上升时,电磁控制信号不发送,利用施加于所述承接底座12的外力进行上升,当所述升降针11下降时,通过电磁控制信号进行驱动,利用磁力吸附承接底座12,并带动所述升降针下降,其中,电磁控制装置13可以通过软件来控制电磁控制信号的产生和发送,此处不作赘述。
进一步的,所述承接机构10还包括有设置于所述导向孔101外围的支撑件102,所述支撑件102用于通过固定件将所述承接机构10固定于基板承载平台100的下方,所述基板承载平台100用于承载玻璃基板(图中未标示)。
可以理解的是,所述基板承载平台100上设置了多个通孔,其中,该通孔与设置于所述基板承载平台100下方的承接机构10的导向孔101相对应,其中,所述基板承载平台100的上方承载玻璃基板,当多个所述升降针11同时上升或下降时,会穿过所述通孔,带动上方的玻璃基板进行上升和下降。
如图1所示,更进一步的,所述承接底座12设置有固定螺母121,所述升降针11的下端呈螺栓型设置。也就是说,所述承接底座12与所述升降针11通过螺母和螺栓的相配合的方式进行固定。
优选的,所述固定螺母121上还可以具有设置于所述固定螺母121外围的限位部件122,用于对所述升降针11向上移动的最大距离进行限制。优选的,本实施例中,所述承接底座12、所述固定螺母121以及所述限位部件122均为金属材质。
由上述可知,本发明实施例提供的升降系统200,包括多个升降装置,通过电磁控制装置13在升降针11下降时进行电磁吸附,也就是说,所述升降针11以及所述承接底座12的下降方式为重力和磁力牵引下降,即使所述升降针11在支撑到玻璃时承受一定重量而发生轻微弯曲,也保证升降针11以及所述承接底座12下降至原点位置(如图1所示所述升降针11处于原点位置),减少出现制程不良的问题(如显示器亮度不均匀,
造成各种痕迹的现象)和破片的发生。
在上述实施例中,对各个实施例的描述都各有侧重,某个实施例中没有详述的部分,可以参见上文相关的详细描述,此处不再赘述。
本领域技术人员将认识到,本文所使用的词语“优选的”意指用作实例、示例或例证。奉文描述为“优选的”任意方面或设计不必被解释为比其他方面或设计更有利。相反,词语“优选的”的使用旨在以具体方式提出概念。如本申请中所使用的术语“或”旨在意指包含的“或”而非排除的“或”。即,除非另外指定或从上下文中清楚,“X使用101或102”意指自然包括排列的任意一个。即,如果X使用101;X使用102;或X使用101和102二者,则“X使用101或102”在前述任一示例中得到满足。
而且,尽管已经相对于一个或多个实现方式示出并描述了本公开,但是本领域技术人员基于对本说明书和附图的阅读和理解将会想到等价变型和修改。本公开包括所有这样的修改和变型,并且仅由所附权利要求的范围限制。特别地关于由上述组件(例如元件、资源等)执行的各种功能,用于描述这样的组件的术语旨在对应于执行所述组件的指定功能(例如其在功能上是等价的)的任意组件(除非另外指示),即使在结构上与执行本文所示的本公开的示范性实现方式中的功能的公开结构不等同。此外,尽管本公开的特定特征已经相对于若干实现方式中的仅一个被公开,但是这种特征可以与如可以对给定或特定应用而言是期望和有利的其他实现方式的一个或多个其他特征组合。而且,就术语“包括”、“具有”、“含有”或其变形被用在具体实施方式或权利要求中而言,这样的术语旨在以与术语“包含”相似的方式包括。
综上所述,虽然本发明已以优选实施例揭露如上,但上述优选实施例并非用以限制本发明,本领域的普通技术人员,在不脱离本发明的精神和范围内,均可作各种更动与润饰,因此本发明的保护范围以权利要求界定的范围为准。
Claims (13)
- 一种升降装置,其中包括:一承接机构,设置有导向孔;一升降针,贯穿于所述导向孔内;一承接底座,设置有固定螺母,所述升降针的下端呈螺栓型设置,所述承接底座与所述升降针的下端连接固定,使得当所述承接底座在外力作用下向上移动时,所述升降针在所述导向孔内向上移动;一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动;所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方,所述基板承载平台用于承载玻璃基板。
- 根据权利要求1所述的升降装置,其中所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针向上移动的最大距离进行限制。
- 根据权利要求1所述的升降装置,其中所述承接底座、所述固定螺母以及所述限位部件均为金属材质。
- 一种升降装置,其中包括:一承接机构,设置有导向孔;一升降针,贯穿于所述导向孔内;一承接底座,与所述升降针的下端连接固定,使得当所述承接底座在外力作用下向上移动时,所述升降针在所述导向孔内向上移动;一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动。
- 根据权利要求4所述的升降装置,其中所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方,所述基板承载平台用于承载玻璃基板。
- 根据权利要求4所述的升降装置,其中所述承接底座设置有固定螺母,所述升降针的下端呈螺栓型设置。
- 根据权利要求6所述的升降装置,其中所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针向上移动的最大距离进行限制。
- 根据权利要求6所述的升降装置,其中所述承接底座、所述固定螺母以及所述限位部件均为金属材质。
- 一种升降系统,其中包括基板承载平台和至少一个升降装置;所述基板承载平台,用于承载玻璃基板;所述升降装置,固定于所述基板承载平台的下方;其中,所述升降装置包括:一承接机构,设置有导向孔;一升降针,贯穿于所述导向孔内;一承接底座,与所述升降针的下端连接固定,使得当所述承接底座在外力作用下沿第一方向移动时,所述升降针在所述导向孔内向上移动;一电磁控制装置,通过电磁控制线与所述承接底座连接,所述电磁控制装置用于通过所述电磁控制线向所述承接底座发送电磁控制信号,使得所述升降针在所述电磁控制信号控制下在所述导向孔内向下移动。
- 根据权利要求9所述的升降系统,其中所述承接机构还包括有设置于所述导向孔外围的支撑件,所述支撑件用于通过固定件将所述承接机构固定于基板承载平台的下方。
- 根据权利要求9所述的升降系统,其中所述承接底座设置有固定螺母,所述升降针的下端呈螺栓型设置。
- 根据权利要求11所述的升降系统,其中所述固定螺母上具有设置于所述固定螺母外围的限位部件,用于对所述升降针沿第一方向运动的最大距离进行限制。
- 根据权利要求11所述的升降系统,其中所述承接底座、所述固定螺母以及所述限位部件均为金属材质。
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| KR100980448B1 (ko) * | 2008-06-30 | 2010-09-07 | 엘아이지에이디피 주식회사 | 평판표시소자 제조장치의 리프트 핀 모듈 |
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| JP2010251769A (ja) * | 2010-05-24 | 2010-11-04 | Olympus Corp | 基板保持装置及び基板の保持方法 |
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2014
- 2014-09-23 CN CN201410488332.9A patent/CN104238158B/zh not_active Expired - Fee Related
- 2014-09-29 WO PCT/CN2014/087771 patent/WO2016045136A1/zh not_active Ceased
- 2014-09-29 US US14/408,848 patent/US9594269B2/en not_active Expired - Fee Related
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| US20020008864A1 (en) * | 2000-03-13 | 2002-01-24 | Nikon Corporation | Substrate holding apparatus and exposure apparatus including substrate holding apparatus |
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Also Published As
| Publication number | Publication date |
|---|---|
| US9594269B2 (en) | 2017-03-14 |
| CN104238158B (zh) | 2017-02-08 |
| US20160274385A1 (en) | 2016-09-22 |
| CN104238158A (zh) | 2014-12-24 |
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