WO2015174381A1 - 半導体検査用の耐熱性粘着シート、及び半導体検査方法 - Google Patents
半導体検査用の耐熱性粘着シート、及び半導体検査方法 Download PDFInfo
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- WO2015174381A1 WO2015174381A1 PCT/JP2015/063521 JP2015063521W WO2015174381A1 WO 2015174381 A1 WO2015174381 A1 WO 2015174381A1 JP 2015063521 W JP2015063521 W JP 2015063521W WO 2015174381 A1 WO2015174381 A1 WO 2015174381A1
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29199—Material of the matrix
- H01L2224/29294—Material of the matrix with a principal constituent of the material being a liquid not provided for in groups H01L2224/292 - H01L2224/29291
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29299—Base material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/832—Applying energy for connecting
- H01L2224/8322—Applying energy for connecting with energy being in the form of electromagnetic radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
Definitions
- the present invention relates to a heat-resistant adhesive sheet for semiconductor inspection and a semiconductor inspection method using the adhesive sheet.
- the adhesive sheet is pasted after the circuit is formed, then cutting into element pieces (dicing), washing, drying, stretching of the adhesive sheet (expanding), peeling of the element pieces from the adhesive sheet (pickup) ), Distributed to each process such as mounting.
- the pressure-sensitive adhesive sheet (dicing tape) used in these processes has sufficient adhesive force against the cut element chips (chips) from the dicing process to the drying process, but has no adhesive residue during the pick-up process. It is desired that the adhesive strength is reduced to a certain extent.
- the pressure-sensitive adhesive sheet there is one in which a pressure-sensitive adhesive layer that undergoes a polymerization and curing reaction with ultraviolet light or the like is applied on a base material that is transparent to active rays such as ultraviolet light and / or electron beams.
- a pressure-sensitive adhesive layer that undergoes a polymerization and curing reaction with ultraviolet light or the like is applied on a base material that is transparent to active rays such as ultraviolet light and / or electron beams.
- ultraviolet light or the like is irradiated to the pressure-sensitive adhesive layer, the pressure-sensitive adhesive layer is polymerized and cured to reduce the pressure-sensitive adhesive force, and then a cut chip is picked up.
- Patent Document 1 and Patent Document 2 disclose a compound having a photopolymerizable unsaturated double bond in its molecule (polyfunctional) that can be three-dimensionally reticulated on the substrate surface by, for example, actinic rays.
- An adhesive sheet coated with an adhesive containing an oligomer) is disclosed.
- the adhesive sheet is excessively adhered to the semiconductor chip, even if the adhesive layer is cured by irradiating ultraviolet rays or the like, the adhesive strength of the adhesive layer is not sufficiently reduced, and picking up becomes difficult or adhesive residue etc. It may cause defects.
- the present invention has been made in view of such circumstances, and provides an adhesive sheet that enables a semiconductor wafer to be inspected in a heated state.
- a pressure-sensitive adhesive sheet used in the step of inspecting performance while heating a semiconductor chip
- the pressure-sensitive adhesive sheet being a pressure-sensitive adhesive sheet provided with a pressure-sensitive adhesive layer on a base material.
- the heat shrinkage ratio when heated at 120 ° C. for 15 minutes is 1.0% to 5.0%
- the pressure-sensitive adhesive layer is composed of 100 parts by mass of a (meth) acrylate copolymer and a photopolymerizable compound. 5 to 200 parts by weight, polyfunctional isocyanate curing agent 0.5 to 20 parts by weight, photopolymerization initiator 0.1 to 20 parts by weight, and tackifying resin 0 to 2 parts by weight
- a heat-resistant adhesive sheet is provided.
- the present inventors can suppress deformation by imparting tension to the pressure-sensitive adhesive sheet after heating, and the softening of the pressure-sensitive adhesive layer by heating is The present inventors have found that the softening of the tackifying resin contained in the adhesive is a factor. Based on this knowledge, it becomes possible to inspect a semiconductor wafer in a heated state by using a pressure-sensitive adhesive sheet in which a pressure-sensitive adhesive layer having the above composition is provided on a substrate having a heat shrinkage rate in the above range. As a result, the present invention has been completed.
- the base material is a biaxially stretched film.
- the pressure-sensitive adhesive layer of the pressure-sensitive adhesive sheet contains a release agent.
- the release imparting agent is made of a silicone-based graft copolymer.
- the addition amount of the release imparting agent is 0.1 to 20 parts by mass with respect to 100 parts by mass of the (meth) acrylic acid ester copolymer.
- the polyfunctional isocyanate curing agent has three or more isocyanate groups.
- the temperature at which the photopolymerization initiator has a mass reduction rate of 10% when heated from 23 ° C. at a rate of temperature increase of 10 ° C./min is 250 ° C. or higher.
- An inspection step for inspecting the performance of the semiconductor chip while heating the stage to 100 to 150 ° C., an actinic ray irradiation step for irradiating the adhesive sheet with an actinic ray, and a pickup step for picking up the semiconductor chip from the adhesive sheet A semiconductor inspection method is provided, wherein the pressure-sensitive adhesive sheet is the pressure-sensitive adhesive sheet described above.
- a sticking step of attaching an adhesive sheet to a semiconductor wafer and a dicing step of dicing the semiconductor wafer into the semiconductor chip are further provided before the adsorption step.
- the present invention provides a pressure-sensitive adhesive sheet in which deformation of the pressure-sensitive adhesive sheet and softening of the pressure-sensitive adhesive layer do not easily occur due to heating, and the semiconductor wafer can be inspected in a heated state.
- the wafer inspection in the heated state has been performed after the semiconductor packaging process, but according to the present invention, the wafer inspection in the heated state can be performed before the packaging process. That is, according to the present invention, a defective chip in a heated state can be determined before the packaging process, so that the defective chip can be dispensed with, which leads to a reduction in packaging cost.
- Adhesive sheet (1) Base material (2) Photo-curable adhesive (2-1) Substantially free of tackifying resin. (2-2) (Meth) acrylic acid ester copolymer (2-3) Photopolymerizable compound (2-4) Multifunctional isocyanate curing agent (2-5) Photopolymerization initiator
- the pressure-sensitive adhesive sheet according to the present invention is formed by laminating a photocurable pressure-sensitive adhesive layer (hereinafter also simply referred to as “pressure-sensitive adhesive layer”) on a heat-shrinkable base material, and the pressure-sensitive adhesive layer is provided with a tackifier resin. It is characterized by not containing substantially.
- the pressure-sensitive adhesive sheet according to the present invention does not deform even when heated. Further, the pressure-sensitive adhesive sheet according to the present invention does not excessively adhere to the semiconductor wafer because the pressure-sensitive adhesive layer is hardly or not softened due to the softening of the tackifying resin.
- the pressure-sensitive adhesive sheet according to the present invention it is possible to prevent the inspection time from being prolonged due to the deformation of the pressure-sensitive adhesive sheet and damage to the semiconductor chip. Furthermore, sufficient adhesive strength of the pressure-sensitive adhesive layer is reduced by irradiation with ultraviolet rays or the like, and pickup defects and adhesive residue can be prevented.
- the heat shrinkage rate when heated at 120 ° C. for 15 minutes is 1.0% to 5.0%, and is 1.5% to 4.0%. preferable.
- the thermal shrinkage rate is smaller than 1.0%, the shrinkage of the base material when heated is small, and the adhesive sheet may be deformed due to the thermal expansion of the base material.
- the thermal shrinkage rate is larger than 5.0%, the shrinkage of the base material when heated is too large, and the adhesive sheet may be peeled off from the ring frame or the base material may be broken.
- the heat shrinkage is a value obtained by the following equation.
- L 0 length of base material before heating (10 cm)
- L 1 Length of substrate after heating at 120 ° C. for 15 minutes and cooling to room temperature
- the substrate is preferably biaxially stretched. By being biaxially stretched, the substrate tends to shrink during heating. Examples of such a substrate include polyolefins such as polyethylene and polypropylene, polystyrene, and polyvinyl chloride.
- the formation method of a base material is not specifically limited, For example, the method of extending
- additives such as an antioxidant, an antistatic agent, a lubricant, an antiblocking agent, and a filler may be contained in these base materials.
- the base material may be a single layer or a multilayer film or sheet made of the above material, or may be a laminate of films made of different materials.
- the thickness of the substrate is 10 to 100 ⁇ m, preferably 20 to 80 ⁇ m.
- an antistatic treatment it is preferable to apply an antistatic treatment to the substrate.
- the antistatic treatment include a treatment for adding an antistatic agent to the substrate, a treatment for applying the antistatic agent to the substrate surface, and a treatment by corona discharge.
- a quaternary amine salt monomer can be used as the antistatic agent.
- the quaternary amine salt monomer include dimethylaminoethyl (meth) acrylate quaternary chloride, diethylaminoethyl (meth) acrylate quaternary chloride, methylethylaminoethyl (meth) acrylate quaternary chloride, p-dimethyl.
- examples include aminostyrene quaternary chloride and p-diethylaminostyrene quaternary chloride. Of these, dimethylaminoethyl methacrylate quaternary chloride is preferred.
- the photocurable pressure-sensitive adhesive forming the pressure-sensitive adhesive layer of the pressure-sensitive adhesive sheet according to the present invention comprises a (meth) acrylic acid ester copolymer, a photopolymerizable compound, a polyfunctional isocyanate curing agent, and light. A polymerization initiator and substantially free of tackifying resin.
- the tackifying resin that causes the softening of the pressure-sensitive adhesive layer by heating is a resin that has been conventionally blended to increase the tackiness of the acrylic adhesive, and is not particularly limited, but is a rosin resin, a terpene resin, Aliphatic petroleum resins, aromatic petroleum resins, hydrogenated petroleum resins, chroman indene resins, styrenic resins, xylene resins and mixtures of these resins.
- the pressure-sensitive adhesive preferably contains no tackifying resin, but may be included in the pressure-sensitive adhesive so long as it hardly causes softening of the pressure-sensitive adhesive layer during heating. Specifically, 2 parts by mass or less (preferably 0.5 parts by mass or less) may be contained with respect to 100 parts by mass of the (meth) acrylic acid ester copolymer. That is, “substantially free of tackifying resin” means that the amount of the tackifying resin blended is 0 to 2 parts by mass (preferably 0 to 0 with respect to 100 parts by mass of the (meth) acrylic acid ester copolymer). .5 parts by mass).
- the tackifier does not substantially contain a tackifier resin
- various additives such as a peel imparting agent, an anti-aging agent, a filler, an ultraviolet absorber, and a light stabilizer may be added.
- the amount of the release agent added is not particularly limited, but is preferably 0.1 to 20 parts by weight, more preferably 0.2 to 10 parts by weight, based on 100 parts by weight of the (meth) acrylate copolymer. More preferably, it is 5 to 5 parts by mass.
- a silicone-based graft polymer (or copolymer) can be used as the release imparting agent.
- (2-2) (Meth) acrylic acid ester copolymer The (meth) acrylic acid ester copolymer is a polymer of only a (meth) acrylic acid ester monomer, or a (meth) acrylic acid ester monomer. And a vinyl compound monomer.
- (meth) acrylate is a general term for acrylate and methacrylate.
- a compound containing (meth) such as (meth) acrylic acid is a general term for a compound having “meta” in the name and a compound not having “meta”.
- Examples of the (meth) acrylic acid ester monomer include butyl (meth) acrylate, 2-butyl (meth) acrylate, t-butyl (meth) acrylate, pentyl (meth) acrylate, octyl (meth) acrylate, 2- Ethylhexyl (meth) acrylate, nonyl (meth) acrylate, decyl (meth) acrylate, lauryl (meth) acrylate, methyl (meth) acrylate, ethyl (meth) acrylate, isopropyl (meth) acrylate, tridecyl (meth) acrylate, myristyl ( (Meth) acrylate, cetyl (meth) acrylate, stearyl (meth) acrylate, cyclohexyl (meth) acrylate, isobornyl (meth) acrylate, dicyclopentanyl (meth) acryl
- examples thereof include functional group-containing monomers having one or more functional group groups such as ester groups.
- Examples of the monomer having a carboxyl group include (meth) acrylic acid, crotonic acid, maleic acid, itaconic acid, fumaric acid, acrylamide N-glycolic acid and cinnamic acid.
- Examples of the monomer having an epoxy group include allyl glycidyl ether and (meth) acrylic acid glycidyl ether.
- Examples of the monomer having an amide group include (meth) acrylamide.
- Examples of the monomer having an amino group include N, N-dimethylaminoethyl (meth) acrylate.
- Examples of the monomer having a methylol group include N-methylolacrylamide.
- Photopolymerizable compound examples include trimethylolpropane triacrylate, tetramethylolmethane tetraacrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol monohydroxypentaacrylate, and dipenta.
- Erythritol hexaacrylate, 1,4-butylene glycol diacrylate, 1,6-hexanediol diacrylate, polyethylene glycol diacrylate, cyanuric acid triethyl acrylate, commercially available oligoester acrylate, and the like are used.
- a urethane acrylate oligomer can be used in addition to the acrylate compound.
- the urethane acrylate oligomer is obtained by reacting a (meth) acrylate having a hydroxy group with a terminal isocyanate urethane prepolymer obtained by reacting a polyol compound such as a polyester type or a polyether type with a polyvalent isocyanate compound.
- polyvalent isocyanate compound examples include 2,4-tolylene diisocyanate, 2,6-tolylene diisocyanate, 1,3-xylene diisocyanate, 1,4-xylene diisocyanate, diphenylmethane 4,4-diisocyanate, trimethylhexamethylene diisocyanate. Hexamethylene diisocyanate, isophorone diisocyanate, and the like are used.
- Examples of the (meth) acrylate having a hydroxy group include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, polyethylene glycol (meth) acrylate, pentaerythritol triacrylate, and glycidol di (meth). Acrylate, dipentaerythritol monohydroxypentaacrylate, etc. are used.
- a urethane acrylate oligomer having 4 or more vinyl groups is preferable because the adhesive is cured well after irradiation with ultraviolet rays or the like.
- the blending amount of the photopolymerizable compound is 5 to 200 parts by mass, more preferably 20 to 180 parts by mass, and further preferably 50 to 150 parts by mass with respect to 100 parts by mass of the (meth) acrylic acid ester copolymer.
- the blending amount of the photopolymerizable compound is reduced, the peelability of the pressure-sensitive adhesive sheet after irradiation with ultraviolet rays or the like is lowered, and the pick-up failure of the semiconductor chip tends to occur.
- the blending amount of the photopolymerizable compound is increased, pick-up failure is liable to occur due to the glue being picked up during dicing, and a minute adhesive residue due to a reaction residue is generated, which causes contamination.
- polyfunctional isocyanate curing agent has two or more isocyanate groups.
- aromatic polyisocyanates, aliphatic polyisocyanates, alicyclic polyisocyanates, and dimers thereof. Or trimers, adducts, etc. are used.
- Aromatic polyisocyanates include, for example, 1,3-phenylene diisocyanate, 4,4′-diphenyl diisocyanate, 1,4-phenylene diisocyanate, 4,4′-diphenylmethane diisocyanate, 2,4-tolylene diisocyanate, 2,6- Tolylene diisocyanate, 4,4'-toluidine diisocyanate, 2,4,6-triisocyanate toluene, 1,3,5-triisocyanate benzene, dianisidine diisocyanate, 4,4'-diphenyl ether diisocyanate, 4,4 ', 4 "-Triphenylmethane triisocyanate, ⁇ , ⁇ '-diisocyanate-1,3-dimethylbenzene, ⁇ , ⁇ '-diisocyanate-1,4-dimethylbenzene, ⁇ , ⁇ '-diisocyanate-1,4-diethylbenzene,
- aliphatic polyisocyanate examples include trimethylene diisocyanate, tetramethylene diisocyanate, hexamethylene diisocyanate, pentamethylene diisocyanate, 1,2-propylene diisocyanate, 2,3-butylene diisocyanate, 1,3-butylene diisocyanate, dodecamethylene diisocyanate and 2 4,4-trimethylhexamethylene diisocyanate.
- Examples of the alicyclic polyisocyanate include 3-isocyanate methyl-3,5,5-trimethylcyclohexyl isocyanate, 1,3-cyclopentane diisocyanate, 1,3-cyclohexane diisocyanate, 1,4-cyclohexane diisocyanate, methyl-2, There are 4-cyclohexane diisocyanate, methyl-2,6-cyclohexane diisocyanate, 4,4′-methylene bis (cyclohexyl isocyanate), 1,4-bis (isocyanate methyl) cyclohexane and 1,4-bis (isocyanate methyl) cyclohexane.
- dimer, trimer and adduct examples include diphenylmethane diisocyanate dimer, hexamethylene diisocyanate trimer, trimethylolpropane and tolylene diisocyanate adduct, trimethylolpropane and hexamethylene diisocyanate.
- adduct body examples include diphenylmethane diisocyanate dimer, hexamethylene diisocyanate trimer, trimethylolpropane and tolylene diisocyanate adduct, trimethylolpropane and hexamethylene diisocyanate.
- polyisocyanates those having three or more isocyanate groups are preferable, and in particular, a trimer of hexamethylene diisocyanate, an adduct of trimethylolpropane and tolylene diisocyanate, an adduct of trimethylolpropane and hexamethylene diisocyanate. Is preferred.
- the compounding ratio of the polyfunctional isocyanate curing agent is 0.5 to 20 parts by mass, preferably 1 to 10 parts by mass with respect to 100 parts by mass of the (meth) acrylic acid ester copolymer. If the polyfunctional isocyanate curing agent is 0.5 parts by mass or more, since the adhesive strength is not too strong, the occurrence of pickup failure can be suppressed. If a polyfunctional isocyanate hardening
- Photopolymerization initiator benzoin, benzoin alkyl ethers, acetophenones, anthraquinones, thioxanthones, ketals, benzophenones or xanthones are used.
- benzoin examples include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin propyl ether.
- acetophenones examples include benzoin alkyl ethers, acetophenone, 2,2-dimethoxy-2-acetophenone, 2,2-diethoxy-2-acetophenone, 1,1-dichloroacetophenone, and the like.
- Anthraquinones include 2-methylanthraquinone, 2-ethylanthraquinone, 2-tertiarybutylanthraquinone, 1-chloroanthraquinone and the like.
- Examples of thioxanthones include 2,4-dimethylthioxanthone, 2,4-diisopropylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone.
- Examples of ketals include acetophenone dimethyl ketal, benzyl dimethyl ketal, benzyl diphenyl sulfide, tetramethyl thiuram monosulfide, azobisisobutyronitrile, dibenzyl, diacetyl, ⁇ -chloranthraquinone, and the like.
- the photopolymerization initiator preferably has a temperature of 250 ° C. or higher when the temperature is increased from 23 ° C. to 500 ° C. at a rate of temperature increase of 10 ° C./min and the mass reduction rate becomes 10%.
- the pressure-sensitive adhesive sheet affixed to the wafer or the like is heated at 100 to 150 ° C. in the heating process described later, if the photopolymerization initiator volatilizes or deteriorates, the curing of the pressure-sensitive adhesive layer in the light irradiation process, which is a subsequent process, is not achieved. This is sufficient, and a sufficient decrease in adhesive strength cannot be obtained, causing a pickup failure in the subsequent pickup process. For this reason, it is preferable to use a photopolymerization initiator which has the above properties and hardly volatilizes or deteriorates due to heating.
- Examples of the photopolymerization initiator having a temperature of 250 ° C. or higher include ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime).
- ethanone 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime) in which the above temperature is 270 ° C. or more in particular BASF Japan, product name IRGACURE OXE02), 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide (BASF Japan, product name LUCIRIN TPO), and 2-hydroxy-1- ⁇ 4- [4- (2-Hydroxy-2-methyl-propionyl) -benzyl] -phenyl ⁇ -2-methyl-propan-1-one (manufactured by BASF Japan, product name IRGACURE127) is preferred.
- the blending amount of the photopolymerization initiator is 0.1 to 20 parts by weight, more preferably 0.2 to 10 parts by weight, and more preferably 0.5 to 5 parts by weight with respect to 100 parts by weight of the (meth) acrylic acid ester polymer. Part is more preferred. If the blending amount is too small, the peelability of the pressure-sensitive adhesive sheet after irradiation is lowered, and the pick-up failure of the semiconductor chip is likely to occur. On the other hand, if the amount is too large, the photopolymerization initiator bleeds out to the pressure-sensitive adhesive surface, causing contamination.
- photopolymerization accelerators may be used alone or in combination of two or more as required.
- group, a tertiary amine, etc. can be used for a photoinitiator.
- the tertiary amine include triethylamine, tetraethylpentamine, dimethylamino ether and the like.
- the thickness of the pressure-sensitive adhesive layer is preferably 3 ⁇ m to 100 ⁇ m, particularly preferably 5 ⁇ m to 20 ⁇ m. If the pressure-sensitive adhesive layer is too thick, the pressure-sensitive adhesive strength becomes too high and the pick-up property is lowered. On the other hand, if the pressure-sensitive adhesive layer is too thin, the pressure-sensitive adhesive force becomes too low, chip retention during dicing is lowered, and peeling may occur between the ring frame and the sheet.
- an adhesive sheet is affixed on a semiconductor wafer and a ring frame.
- the semiconductor wafer may be a conventional general-purpose wafer such as a silicon wafer and a gallium nitride wafer, a silicon carbide wafer, or a sapphire wafer.
- the “semiconductor wafer” includes a semiconductor substrate such as a resin-sealed package substrate, an LED substrate, or a glass substrate.
- the semiconductor wafer is diced into semiconductor chips.
- the “semiconductor chip” includes a semiconductor component such as a MEMS (Micro Electro Mechanical Systems), a transistor, a diode, or an LED.
- Adsorption process In the adsorption process, with the semiconductor chip attached to the adhesive sheet, the adhesive sheet is placed on the stage at 100 to 150 ° C. so as to be in contact with the stage and fixed by adsorption. This adsorption process may be performed by directly adsorbing the adhesive sheet used in the dicing process to the stage without removing the semiconductor chip obtained in the dicing process from the adhesive sheet. After removing from the pressure-sensitive adhesive sheet, the semiconductor chip may be attached to another pressure-sensitive adhesive sheet, and this pressure-sensitive adhesive sheet may be adsorbed on the stage.
- the performance of the semiconductor chip is inspected while heating the stage to 100 to 150 ° C. after the adsorption step in order to test the circuit formed on the semiconductor chip.
- the heating time is, for example, 15 minutes to 5 hours.
- the base material contracts when heated, and the pressure-sensitive adhesive sheet fixed to the ring frame is stretched, so that the pressure-sensitive adhesive sheet is not bent and deformed. Further, since the pressure-sensitive adhesive layer is hardly or not softened due to the softening of the tackifying resin, it is not excessively adhered to the semiconductor wafer. Therefore, in the inspection method according to the present invention, it is possible to prevent the inspection process from being prolonged and the chip from being damaged due to the deformation of the pressure-sensitive adhesive sheet. A sufficient decrease in the adhesive strength of the pressure-sensitive adhesive layer can be obtained, and pick-up failure and adhesive residue can be prevented.
- Actinic ray irradiation process In a light irradiation process, actinic rays, such as an ultraviolet-ray, are irradiated to a photocurable adhesive layer from the base material side.
- actinic rays such as an ultraviolet-ray
- a photocurable adhesive layer As the ultraviolet light source, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a metal halide lamp, a black light, or the like can be used.
- the light-sensitive adhesive layer is three-dimensionally reticulated and cured by light irradiation, and the adhesive strength of the pressure-sensitive adhesive layer is reduced.
- the pressure-sensitive adhesive sheet according to the present invention does not excessively adhere to the wafer or the like even when heated, a sufficient reduction in adhesive strength can be obtained by irradiation with actinic rays.
- a pick-up process a semiconductor chip is peeled from the adhesive layer of an adhesive sheet.
- the pressure-sensitive adhesive sheet according to the present invention a sufficient decrease in the adhesive strength is obtained by irradiation with ultraviolet rays or the like, so that peeling between the chip or component and the pressure-sensitive adhesive layer becomes easy, and good pick-up properties are obtained. And no defects such as glue residue occur.
- the pick-up method include a method of transferring a semiconductor chip to another pressure-sensitive adhesive sheet, a method of squeeging and peeling from the back side of the pressure-sensitive adhesive sheet, and a method of pushing up with a needle pin or the like.
- the picked-up chip or component is mounted on the lead frame via a die attach paste.
- the die attach paste is heated, and the chip or component and the lead frame are heat bonded. Thereafter, the chip or component mounted on the lead frame is molded with resin.
- a photocurable pressure-sensitive adhesive was prepared according to the formulation shown in “Table 1”. The photocurable pressure-sensitive adhesive was applied onto a polyethylene terephthalate separator film, and coated so that the thickness of the pressure-sensitive adhesive layer after drying was 10 ⁇ m. This pressure-sensitive adhesive layer was laminated on a substrate and aged at 40 ° C. for 7 days to obtain a pressure-sensitive adhesive sheet. A biaxially stretched polypropylene film (manufactured by Oji F-Tex, FC-201) having a thickness of 30 ⁇ m was used as the substrate (K-1).
- K-1 Biaxially stretched polypropylene (FC-201 manufactured by Oji F-Tex, thickness: 30 ⁇ m); heat shrinkage rate at 120 ° C. of 2.0%.
- K-2 Biaxially stretched polypropylene (E-201F manufactured by Oji F-tex Co., Ltd., thickness: 40 ⁇ m); thermal shrinkage rate at 120 ° C. of 1.5%.
- K-3 Biaxially stretched polypropylene (Toyobo Pyrene Film—OT P2111, thickness: 30 ⁇ m); heat shrinkage rate at 120 ° C. of 3.3%.
- K-4 Biaxially stretched polypropylene (synthetic product, thickness: 30 ⁇ m); heat shrinkage rate at 120 ° C. of 1.1%.
- K-5 Biaxially oriented polypropylene (synthetic product, thickness: 30 ⁇ m); heat shrinkage rate at 120 ° C. of 4.8%.
- A-1 Acrylic rubber AR53L manufactured by Nippon Zeon Co., Ltd .; a copolymer of 54% ethyl acrylate, 19% butyl acrylate and 24% methoxyethyl acrylate, obtained by emulsion polymerization.
- A-2 SK dyne 1496 manufactured by Soken Chemical Co .; a copolymer of 96% 2-ethylhexyl acrylate and 4% 2-hydroxyethyl acrylate, obtained by solution polymerization.
- B-1 UN-905 manufactured by Negami Kogyo Co., Ltd .: A trimer of isophorone diisocyanate is reacted with an acrylate containing dipetaerythritol pentaacrylate as a main component, and has 15 vinyl groups.
- B-2 Shin-Nakamura Chemical Co., Ltd. A-TMPT; trimethylolpropane triacrylate, having 3 vinyl groups.
- C-1 Coronate L-45E manufactured by Nippon Polyurethane; Trimethylolpropane adduct of 2,4-tolylene diisocyanate.
- C-2 Trimethylene diisocyanate [photopolymerization initiator]
- D-1 IRGACURE127 manufactured by BASF Japan; 2-hydroxy-1- ⁇ 4- [4- (2-hydroxy-2-methyl-propionyl) -benzyl] -phenyl ⁇ -2-methyl-propan-1-one, Temperature 275 ° C. when mass reduction rate is 10%.
- D-2 IRGACURE OXE02 manufactured by BASF Japan; ethanone, 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime), mass decreased The temperature is 320 ° C. when the rate is 10%.
- D-3 LUSFIRIN TPO manufactured by BASF Japan; 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, temperature 270 ° C. when mass reduction rate is 10%.
- D-4 IRGACURE 651 manufactured by BASF Japan; benzyl dimethyl ketal, temperature 185 ° C. when mass reduction rate is 10%.
- Tackifying resin F-1: YS Polyster S145 manufactured by Yasuhara Chemical; terpene phenol tackifying resin, softening point 145 ° C.
- the obtained adhesive sheet was bonded to a ring frame and a silicon wafer having a diameter of 8 inches and a thickness of 0.1 mm on which a dummy circuit pattern was formed.
- the silicon wafer was placed on a hot plate so that the surface opposite to the surface to which the adhesive sheet was applied was in contact, heated at 120 ° C. for 1 hour, and then subjected to dicing, light irradiation, and pick-up processes.
- the conditions for the dicing process were as follows.
- Dicing machine DAD341 manufactured by DISCO Dicing blade: NBC-ZH205O-27HEEE made by DISCO Dicing blade shape: outer diameter 55.56 mm, blade width 35 ⁇ m, inner diameter 19.05 mm
- Dicing blade rotation speed 40,000 rpm
- Dicing blade feed rate 50 mm / sec.
- Dicing size 10 mm square cut depth: 15 ⁇ m
- Cutting water temperature 25 ° C
- Cutting water volume 1.0 l / min
- UV irradiation 150 mJ / cm 2 with a high-pressure mercury lamp
- the conditions for the pick-up process were as follows. After sticking a transfer adhesive sheet (adhesive force to a silicon wafer: 6.25 N / 25 mm) on the diced wafer, the transfer adhesive sheet is peeled off to transfer the chip.
- a transfer adhesive sheet adheresive force to a silicon wafer: 6.25 N / 25 mm
- Chip Retention The chip retention was evaluated according to the following criteria based on the remaining ratio of the semiconductor chips held on the adhesive sheet after the dicing step. ⁇ (Excellent): Chip skipping is less than 5% ⁇ (Good): Chip skipping is 5% or more and less than 10% ⁇ (Not possible): Chip skipping is 10% or more
- Table 1 shows the types of base materials, (meth) acrylic acid ester copolymers and photopolymerizable compounds, polyfunctional isocyanate curing agents, photopolymerization initiators, and silicone-based graft copolymers.
- a pressure-sensitive adhesive sheet was produced and evaluated in the same manner as in Example 1 except that the change was made. The results are shown in the table.
- the pressure-sensitive adhesive sheet according to the present invention does not deform even when heated, and does not excessively adhere to the semiconductor wafer, so that the adhesive strength of the pressure-sensitive adhesive layer is sufficiently reduced by irradiation with ultraviolet rays or the like. And good pick-up properties can be obtained. Therefore, since the pressure-sensitive adhesive sheet according to the present invention can be used for performance inspection while heating the semiconductor chip in the manufacturing process of the semiconductor device, it is possible to know the abnormality of the chip in a high temperature state before the packaging process. Can lead to a reduction in packaging costs.
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Abstract
Description
・半導体ウエハのダイシング
・性能検査(常温)
・パッケージング
・性能検査(高温および常温)
上記の工程では、高温状態で異常があるチップは、パッケージング後の性能検査まで判別することができない。そのため、高温状態で異常があるチップも全てパッケージングしなければならず、パッケージングコストの増大につながっていた。
この知見に基づき、上記範囲の熱収縮率を有する基材上に上記組成の粘着剤層が設けられた粘着シートを用いることによって、半導体ウエハを加温した状態で検査することが可能になることを見出し、本発明の完成に到った。
好ましくは、前記基材が、二軸延伸されたフィルムであることを特徴とする。
好ましくは、前記粘着シートの粘着剤層が、剥離付与剤を含む。
好ましくは、前記剥離付与剤は、シリコーン系グラフト共重合体からなる。
好ましくは、前記剥離付与剤の添加量は、(メタ)アクリル酸エステル共重合体100質量部に対して0.1~20質量部である。
好ましくは、前記多官能イソシアネート硬化剤が、イソシアネート基を3個以上有する。
好ましくは、前記光重合開始剤が、23℃から10℃/分の昇温速度で昇温したときの質量減少率10%となる温度が250℃以上である。
好ましくは、前記吸着工程の前に、粘着シートを半導体ウエハに貼り付ける貼付工程と、前記半導体ウエハをダイシングして前記半導体チップにするダイシング工程をさらに備える。
(1)基材
(2)光硬化型粘着剤
(2-1)粘着付与樹脂を実質的に含まない。
(2-2)(メタ)アクリル酸エステル共重合体
(2-3)光重合性化合物
(2-4)多官能イソシアネート硬化剤
(2-5)光重合開始剤
(1)貼付工程
(2)ダイシング工程
(3)吸着工程
(4)検査工程
(5)活性光線照射工程
(6)ピックアップ工程
本発明に係る粘着シートは、熱収縮性のある基材に光硬化型粘着剤層(以下、単に「粘着剤層」とも称する)を積層してなり、粘着剤層に粘着付与樹脂を実質的に含まないことを特徴とする。本発明に係る粘着シートは、加温された場合にも変形することがない。また、本発明に係る粘着シートは、粘着付与樹脂の軟化に起因した粘着剤層の軟化がほとんど又は全く生じないため、半導体ウエハに過度に密着することがない。従って、本発明に係る粘着シートでは、粘着シートの変形による検査時間の長期化や半導体チップの破損などを防止できる。更に、紫外線等の照射により粘着剤層の十分な接着力の低下が得られ、ピックアップ不良や糊残りを防止できる。
基材の材料としては、120℃で15分加熱したときの熱収縮率が1.0%~5.0%であり、1.5%~4.0%であることが好ましい。熱収縮率が1.0%より小さいと、加温した時の基材の収縮が小さく、基材の熱膨張などによって粘着シートが変形するおそれがある。また、熱収縮率が5.0%より大きいと、加温した時の基材の収縮が大きすぎて、リングフレームから粘着シートが剥がれたり、基材が破断したりするおそれがある。ここで熱収縮率とは以下の式で求める値である。
(L0-L1)/L0×100 (%)
L0:加熱前の基材の長さ(10cm)
L1:120℃で15分加熱し、室温まで冷却した後の基材の長さ
また、基材は二軸延伸されていることが好ましい。二軸延伸されていることで、加熱時に基材が収縮しやすくなる。このような基材としては、ポリエチレンやポリプロピレンなどのポリオレフィン、ポリスチレン、ポリ塩化ビニルなどが挙げられる。基材の形成方法は特に限定されないが、例えば、Tダイから押出した樹脂を延伸してシート状に成形するする方法が挙げられる。また、性能を損なわない範囲であれば、これらの基材に酸化防止剤や帯電防止剤、滑剤、ブロッキング防止剤、充填剤などの添加剤が含まれていてもよい。
本発明に係る粘着シートの粘着剤層を形成する光硬化型粘着剤は、(メタ)アクリル酸エステル共重合体と光重合性化合物と多官能イソシアネート硬化剤と光重合開始剤とを含み、粘着付与樹脂を実質的に含まない。
加熱による粘着剤層の軟化の原因となる粘着付与樹脂は、アクリル系接着剤の粘着性を高めるために従来配合されている樹脂であって、特に限定されないが、ロジン系樹脂、テルペン系樹脂、脂肪族石油樹脂、芳香族石油樹脂、水添石油樹脂、クロマン・インデン樹脂、スチレン系樹脂、キシレン樹脂およびこれらの樹脂の混合物が挙げられる。
(メタ)アクリル酸エステル共重合体は、(メタ)アクリル酸エステル単量体のみの重合体、又は、(メタ)アクリル酸エステル単量体とビニル化合物単量体との共重合体である。なお、(メタ)アクリレートとはアクリレートおよびメタアクリレートの総称である。(メタ)アクリル酸等の(メタ)を含む化合物等も同様に、名称中に「メタ」を有する化合物と「メタ」を有さない化合物の総称である。
エポキシ基を有する単量体としては、例えば、アリルグリシジルエーテルおよび(メタ)アクリル酸グリシジルエーテルがある。
アミド基を有する単量体としては、例えば、(メタ)アクリルアミドがある。
アミノ基を有する単量体としては、例えば、N,N-ジメチルアミノエチル(メタ)アクリレートがある。
メチロール基を有する単量体としては、例えば、N-メチロールアクリルアミドがある。
光重合性化合物としては、例えば、トリメチロールプロパントリアクリレート、テトラメチロールメタンテトラアクリレート、ペンタエリスリトールトリアクリレート、ペンタエリスリトールテトラアクリレート、ジペンタエリスリトールモノヒドロキシペンタアクリレート、ジペンタエリスリトールヘキサアクリレート、1,4-ブチレングリコールジアクリレート、1,6-ヘキサンジオールジアクリレート、ポリエチレングリコールジアクリレート、シアヌル酸トリエチルアクリレート、市販のオリゴエステルアクリレートなどが用いられる。
多官能イソシアネート硬化剤は、イソシアネート基を2個以上有するものであり、例えば芳香族ポリイソシアネート、脂肪族ポリイソシアネート、脂環族ポリイソシアネート、これらの二量体や三量体、アダクト体などが用いられる。
光重合開始剤には、ベンゾイン、ベンゾインアルキルエーテル類、アセトフェノン類、アントラキノン類、チオキサントン類、ケタール類、ベンゾフェノン類またはキサントン類などが用いられる。
アセトフェノン類としては、例えばベンゾインアルキルエーテル類、アセトフェノン、2,2-ジメトキシ-2-アセトフェノン、2,2―ジエトキシ-2-アセトフェノン、1,1-ジクロロアセトフェノンなどがある。
アントラキノン類としては、2-メチルアントラキノン、2-エチルアントラキノン、2-ターシャリブチルアントラキノン、1-クロロアントラキノンなどがある。
チオキサントン類としては、例えば2,4-ジメチルチオキサントン、2,4-ジイソプロピルチオキサントン、2-クロロチオキサントン、2,4-ジイソプロピルチオキサントンなどがある。
ケタール類としては、例えばアセトフェノンジメチルケータル、ベンジルジメチルケタール、ベンジルジフェニルサルファイド、テトラメチルチウラムモノサルファイド、アゾビスイソブチロニトリル、ジベンジル、ジアセチル、β-クロールアンスラキノンなどがある。
以下、本発明に係る半導体検査方法の具体的な工程を順に説明する。以下に示す半導体検査方法は、半導体装置の製造工程の一部である。
まず、貼付工程において、粘着シートを半導体ウエハとリングフレームに貼り付ける。半導体ウエハは、シリコンウエハおよびガリウムナイトライドウエハ、炭化ケイ素ウエハ、サファイアウエハなどの従来汎用のウエハであってよい。本願明細書において、「半導体ウエハ」は、樹脂封子されたパッケージ基板やLED基板、ガラス基板などの半導体基板を含む。
ダイシング工程では、半導体ウエハをダイシングして半導体チップにする。本願明細書において、「半導体チップ」は、MEMS(Micro Electro Mechanical Systems)やトランジスタ、ダイオード、LEDなどの半導体部品を含む。
吸着工程では、半導体チップが粘着シートに貼り付けられた状態で、100~150℃のステージ上に前記粘着シートが前記ステージに接するように載せて吸着固定する。この吸着工程は、ダイシング工程で得られた半導体チップを粘着シートから取り外さずに、ダイシング工程で用いた粘着シートをそのままステージに吸着させることによって行ってもよく、ダイシング工程で得られた半導体チップを粘着シートから取り外した後に、半導体チップを別の粘着シートに貼り付け、この粘着シートをステージに吸着させることによって行ってもよい。
検査工程では、半導体チップに形成された回路の試験を行うために、吸着工程後に、前記ステージを100~150℃に加熱しながら前記半導体チップの性能を検査する。加温時間は、例えば15分~5時間である。
光照射工程では、基材側から光硬化型粘着剤層に紫外線等の活性光線を照射する。紫外線の光源としては、低圧水銀灯、高圧水銀灯、超高圧水銀灯、メタルハライドランプ、ブラックライト等を用いることができる。
ピックアップ工程では、粘着シートの粘着剤層から半導体チップを剥離する。この際、本発明に係る粘着シートでは紫外線等の照射により十分な接着力の低下が得られているため、チップ又は部品と粘着剤層との間の剥離が容易となり、良好なピックアップ性が得られ、糊残りなどの不良が生じることもない。ピックアップの方法としては、別の粘着シートに半導体チップを転写する方法や、粘着シートの裏側からスキージして剥離する方法、あるいはニードルピン等で突き上げる方法が挙げられる。また、必要に応じて、ピックアップ工程の前にエキスパンド工程を設けても良い。エキスパンド工程では、粘着シートを引き伸ばして半導体チップ同士の間隔を広げ、ピックアップしやすくさせる。
「表1」に示す配合に従って光硬化型粘着剤を調製した。光硬化型粘着剤をポリエチレンテレフタレート製のセパレーターフィルム上に塗布し、乾燥後の粘着層の厚みが10μmとなるように塗工した。この粘着層を基材に積層し、40℃で7日間熟成し、粘着シートを得た。基材(K-1)には、厚さ30μmの二軸延伸ポリプロピレンフィルム(王子エフテックス社製、FC-201)を用いた。
K-1:二軸延伸ポリプロピレン(王子エフテックス社製FC-201、厚さ:30μm);120℃の熱収縮率2.0%。
K-2:二軸延伸ポリプロピレン(王子エフテックス社製E-201F、厚さ:40μm);120℃の熱収縮率1.5%。
K-3:二軸延伸ポリプロピレン(東洋紡社製パイレンフィルム-OT P2111、厚さ:30μm);120℃の熱収縮率3.3%。
K-4:二軸延伸ポリプロピレン(合成品、厚さ:30μm);120℃の熱収縮率1.1%。
K-5:二軸延伸ポリプロピレン(合成品、厚さ:30μm);120℃の熱収縮率4.8%。
〔(メタ)アクリル酸エステル共重合体〕
A-1:日本ゼオン社製アクリルゴムAR53L;エチルアクリレート54%、ブチルアクリレート19%、メトキシエチルアクリレート24%の共重合体、乳化重合により得られる。
A-2:綜研化学社製SKダイン1496;2-エチルヘキシルアクリレート96%、2-ヒドロキシエチルアクリレート4%の共重合体、溶液重合により得られる。
〔光重合性化合物〕
B-1:根上工業社製UN-905;イソホロンジイソシアネートの三量体にジペタエリスリトールペンタアクリレートを主成分とするアクリレートを反応させたものであり、ビニル基の数が15個。
B-2:新中村化学社製A-TMPT;トリメチロールプロパントリアクリレート、ビニル基の数が3個。
〔多官能イソシアネート硬化剤〕
C-1:日本ポリウレタン社製コロネートL-45E;2,4-トリレンジイソシアネートのトリメチロールプロパンアダクト体。
C-2:トリメチレンジイソシアネート
〔光重合開始剤〕
D-1:BASFジャパン社製IRGACURE127;2-ヒドロキシ-1-{4-[4-(2-ヒドロキシ-2-メチル-プロピオニル)-ベンジル]-フェニル}-2-メチル-プロパン-1-オン、質量減少率が10%の際の温度275℃。
D-2:BASFジャパン社製IRGACURE OXE02;エタノン,1-[9-エチル-6-(2-メチルベンゾイル)-9H-カルバゾール-3-イル]-,1-(O-アセチルオキシム)、質量減少率が10%の際の温度320℃。
D-3:BASFジャパン社製LUCIRIN TPO;2,4,6-トリメチルベンゾイル-ジフェニル-フォスフィンオキサイド、質量減少率が10%の際の温度270℃。
D-4:BASFジャパン社製IRGACURE651;ベンジルジメチルケタール、質量減少率が10%の際の温度185℃。
〔シリコーン系グラフト共重合体〕
E-1:綜研化学社製UTMM-LS2;シリコーン分子鎖の末端に(メタ)アクリロイル基を有するシリコーン系オリゴマ系単位、及びメチルメタアクリレート等からなるアクリルビニル単位を重合してなるシリコーン系グラフト共重合体。
〔粘着付与樹脂〕
F-1:ヤスハラケミカル製YSポリスターS145;テルペンフェノール系粘着付与樹脂、軟化点145℃。
ダイシング装置:DISCO社製DAD341
ダイシングブレード:DISCO社製NBC-ZH205O-27HEEE
ダイシングブレード形状:外径55.56mm、刃幅35μm、内径19.05mm
ダイシングブレード回転数:40,000rpm
ダイシングブレード送り速度:50mm/秒
ダイシングサイズ:10mm角
粘着シートへの切り込み量:15μm
切削水温度:25℃
切削水量:1.0リットル/分
紫外線照射:高圧水銀灯で照射量150mJ/cm2
ダイシングしたウエハの上に、転写用粘着シート(シリコンウエハへの粘着力:6.25N/25mm)を貼付したのち、転写用粘着シートを剥離してチップを転写。
(1)粘着シートの変形
120℃で1時間加温した後の粘着シートを観察し、以下の基準により評価した。
◎(優) :加温後も粘着シートに"たわみ"や"剥がれ"が発生しない。
○(良) :加温によって粘着シートに"たわみ"や"剥がれ"がわずかに発生する。
×(不可):加温によって粘着シートに"たわみ"や"剥がれ"が発生する。
(1)チップ保持性
チップ保持性は、ダイシング工程後において、半導体チップが粘着シートに保持されている半導体チップの残存率に基づき、以下の基準により評価した。
◎(優) :チップ飛びが5%未満
○(良) :チップ飛びが5%以上10%未満
×(不可):チップ飛びが10%以上
ピックアップ性は、ピックアップ工程において、転写用粘着シートを用いて半導体チップを転写させ、転写成功率(ピックアップ成功率)に基づき、以下の基準により評価した。
◎(優) :チップのピックアップ成功率が95%以上
○(良) :チップのピックアップ成功率が80%以上95%未満
×(不可):チップのピックアップ成功率が80%未満
基材の材料、(メタ)アクリル酸エステル共重合体および光重合性化合物、多官能イソシアネート硬化剤、光重合開始剤、シリコーン系グラフト共重合体の種類あるいは添加有無を「表1」に示すように変更した以外は実施例1と同様にして粘着シートを製造し、評価を行った。結果を表に示す。
基材として、以下の基材を用いた以外は実施例1と同様にして粘着シートを製造し、評価を行った。結果を表2に示す。
K-6:ポリエチレンテレフタレート(ユニチカ社製エンブレットPET、厚さ:25μm);120℃の熱収縮率0.5%
K-7:環状オレフィンコポリマー(グンゼ社製Fフィルム、厚さ:100μm);120℃の熱収縮率0.1%
K-8:二軸延伸ポリプロピレン(合成品、厚さ:30μm);120℃の熱収縮率6.0%
シリコーン系グラフト共重合体を添加せず、粘着付与樹脂を添加した以外は実施例1と同様にして粘着シートを製造し、評価を行った。結果を表に示す。
Claims (9)
- 半導体チップを加熱しながら性能検査する工程で使用される粘着シートであって、該粘着シートは基材の上に粘着剤層が設けられた粘着シートであり、該基材が、120℃で15分加熱した時の熱収縮率が1.0%~5.0%であり、該粘着剤層が、
(メタ)アクリル酸エステル共重合体100質量部と
光重合性化合物5~200質量部と
多官能イソシアネート硬化剤0.5~20質量部と
光重合開始剤0.1~20質量部と
粘着付与樹脂0~2質量部を含む
ことを特徴とする、半導体検査用の耐熱性粘着シート。 - 前記基材が、二軸延伸されたフィルムであることを特徴とする、請求項1に記載の半導体検査用の耐熱性粘着シート。
- 前記粘着シートの粘着剤層が、剥離付与剤を含む、請求項1又は請求項2に記載の半導体検査用の耐熱性粘着シート。
- 前記剥離付与剤は、シリコーン系グラフト共重合体からなる請求項3に記載の半導体検査用の耐熱性粘着シート。
- 前記剥離付与剤の添加量は、(メタ)アクリル酸エステル共重合体100質量部に対して0.1~20質量部である、請求項3又は請求項4に記載の半導体検査用の耐熱性粘着シート。
- 前記多官能イソシアネート硬化剤が、イソシアネート基を3個以上有する、請求項1乃至請求項5のいずれかの一項に記載の半導体検査用の耐熱性粘着シート。
- 前記光重合開始剤が、23℃から10℃/分の昇温速度で昇温したときの質量減少率10%となる温度が250℃以上である、請求項1乃至請求項6のいずれか一項に記載の半導体検査用の耐熱性粘着シート。
- 半導体チップが粘着シートに貼り付けられた状態で、100~150℃のステージ上に前記粘着シートが前記ステージに接するように載せて吸着固定する吸着工程と、
前記ステージを100~150℃に加熱しながら前記半導体チップの性能を検査する検査工程と、
前記粘着シートに活性光線を照射する活性光線照射工程と、
前記粘着シートから前記半導体チップをピックアップするピックアップ工程
を含み、
前記粘着シートは、請求項1~請求項7のいずれか一項に記載の粘着シートである、半導体検査方法。 - 前記吸着工程の前に、粘着シートを半導体ウエハに貼り付ける貼付工程と、
前記半導体ウエハをダイシングして前記半導体チップにするダイシング工程をさらに備える、請求項8に記載の半導体検査方法。
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