WO2015129293A1 - 光音響顕微鏡装置 - Google Patents

光音響顕微鏡装置 Download PDF

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Publication number
WO2015129293A1
WO2015129293A1 PCT/JP2015/050292 JP2015050292W WO2015129293A1 WO 2015129293 A1 WO2015129293 A1 WO 2015129293A1 JP 2015050292 W JP2015050292 W JP 2015050292W WO 2015129293 A1 WO2015129293 A1 WO 2015129293A1
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Prior art keywords
photoacoustic
objective lens
unit
photoacoustic wave
sample
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English (en)
French (fr)
Japanese (ja)
Inventor
福島郁俊
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Olympus Corp
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Olympus Corp
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Priority to CN201580003425.0A priority Critical patent/CN105849550A/zh
Publication of WO2015129293A1 publication Critical patent/WO2015129293A1/ja
Priority to US15/248,341 priority patent/US10209226B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2418—Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0093—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy
    • A61B5/0095—Detecting, measuring or recording by applying one single type of energy and measuring its conversion into another type of energy by applying light and detecting acoustic waves, i.e. photoacoustic measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654—Imaging
    • G01N29/0681—Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors

Definitions

  • the present invention relates to a photoacoustic microscope apparatus.
  • a photoacoustic wave is a kind of elastic wave generated in a thermoelastic process which occurs when a substance is irradiated with light in the absorption wavelength range. Therefore, photoacoustic waves are attracting attention as a method for imaging absorption characteristics.
  • photoacoustic waves are a kind of ultrasonic waves and are characterized by being less susceptible to scattering compared to light, they are applied as an imaging means inside a living body.
  • a photoacoustic microscope that applies photoacoustic waves as a detection signal to imaging
  • pulse light matched to the absorption wavelength range of the observation object is used as excitation light
  • the excitation light is collected by an objective lens to collect the inside of the sample
  • a method of scanning with a spot and detecting a photoacoustic wave generated at each focused spot position by a transducer or the like is used.
  • a photoacoustic microscope when the sample is scanned with a focused spot, if an absorbing material is present at the focused spot position, a photoacoustic wave is generated. Therefore, absorption in the sample is detected by detecting the photoacoustic wave. Properties can be imaged.
  • FIG. 12 shows the photoacoustic microscope disclosed in Patent Document 1.
  • excitation light L from a laser pulse light source (not shown) is collected by a condenser lens 11, a pinhole 12, a vibrating mirror 13, an objective lens 14, a correction lens 15, an isosceles prism 16, a silicone oil layer 17, and a rhombus prism 18.
  • the light is collected to the inside of the sample S through the acoustic lens 19.
  • the photoacoustic wave U generated from the condensing position in the sample S due to the irradiation of the excitation light L is collected by the acoustic lens 19, is wave-front converted, is reflected in the rhombus prism 18, and is detected by the ultrasonic transducer 20. Be done.
  • the isosceles prism 16 and the rhombus prism 18 are coupled via the silicone oil layer 17.
  • the acoustic lens 19 has a diamond prism 18 so that the sound axis corresponding to the optical axis of the optical lens coincides with the optical axis of the objective lens 14 and the focal position of the acoustic lens 19 and the focal position of the objective lens 14 coincide. It is joined.
  • the ultrasonic transducer 20 is joined to the rhombic prism 18 so that the wavefront of the photoacoustic wave U from the focal point of the acoustic lens 19 is converted to a plane wave by the acoustic lens 19 and vertically incident on the detection surface of the ultrasonic transducer 20. It is done. Also, the specimen S is immersed in the liquid.
  • the excitation light L irradiated to the sample S is deflected by vibrating the vibrating mirror 13, and the sample S is scanned with the focused spot of the excitation light L.
  • the photoacoustic wave U generated by the focused spot which is emitted from the focal position of the acoustic lens 19 is subjected to wavefront conversion by the acoustic lens 19 and then the ultrasonic transducer It will incline and inject with respect to 20 detection surfaces.
  • the ultrasonic transducer 20 is set to have the highest detection sensitivity when the plane wave is vertically incident. Therefore, when attempting to widen the scanning range of the sample S by the vibrating mirror 13, the maximum inclination of the photoacoustic wave U incident on the ultrasonic transducer 20 becomes large, and the detection accuracy is lowered. In addition, a member for separating the excitation light L irradiated to the sample S and the photoacoustic wave U returned from the sample S is required. For this reason, it becomes difficult to secure sufficient working distance. Furthermore, the numerical aperture (NA) of the excitation light L on the irradiation side for irradiating the sample S is reduced.
  • NA numerical aperture
  • the present invention has been made in view of such a point of view, and it is possible to secure a working distance of a sufficient length, and to scan a large area unit over a wide scanning range to improve the detection accuracy. Intended to be provided.
  • the photoacoustic microscope apparatus of the present invention is A light source that generates excitation light that generates a photoacoustic wave; An objective lens for condensing excitation light on a sample; A scanning unit that moves a focusing position of excitation light on a sample; A photoacoustic wave detection unit having a sensor unit that detects the generated photoacoustic wave; An image configuration unit that configures an image based on data from the photoacoustic wave detection unit;
  • the sensor unit is characterized in that the angle of the range in which the photoacoustic wave incident on the sensor unit can be received is larger than the angle ⁇ corresponding to the numerical aperture NA on the illumination side of the objective lens.
  • 1.333 is the refractive index of water, and ⁇ is the maximum angle with respect to the optical axis of the light flux in the medium (water) between the objective lens and the sample.
  • the angle corresponding to the numerical aperture means the angle of this ⁇ .
  • the angle ⁇ in the range where the photoacoustic wave incident on the sensor unit can be received is an incident direction in which the detection sensitivity of the photoacoustic signal is the highest detection sensitivity and an incident direction in which the detection sensitivity is the half. It means the angle made with it.
  • the present invention has the effect of being able to provide a photoacoustic microscope apparatus capable of securing a sufficient working distance and scanning in large area units over a wide scanning range to improve detection accuracy.
  • (A) is a figure which shows the structure of a photoacoustic wave detection part.
  • (B) is a figure which shows the structure of the edge part of a fiber sensor.
  • (C) is a figure which shows distribution of the directivity of a fiber sensor.
  • (A) is a figure which shows a photoacoustic wave signal.
  • (B) is a figure which shows a two-dimensional mapping.
  • (C) is a figure which shows the information of the depth direction of a sample.
  • (D) is a figure which shows a three-dimensional photoacoustic wave image. It is a figure which shows the structure of the photoacoustic microscope apparatus which concerns on the modification of 1st Embodiment.
  • (A) is a figure which shows the photoacoustic wave signal detected by the fiber sensor.
  • (B) is a figure which shows the photoacoustic wave signal detected by the other fiber sensor.
  • (C) is a figure which shows the photoacoustic wave signal detected by the other fiber sensor.
  • (A) is a figure which shows the photoacoustic microscope apparatus of 2nd Embodiment.
  • (B) is a figure explaining a detector holding part.
  • (A) is a figure which shows the photoacoustic microscope apparatus of 3rd Embodiment.
  • FIG. (B) is a figure explaining a detector holding part.
  • A) is a figure which shows schematic structure of a photoacoustic detection part.
  • B) is a figure which shows the tip structure of the fiber sensor 211.
  • FIG. (A) is a figure which shows the structure which looked at the detector holding part from the optical axis direction of the objective lens.
  • B), (c), (d) is a figure which shows the photoacoustic wave signal which each different fiber sensor detected. It is a figure explaining the composition of the conventional photoacoustic microscope.
  • the photoacoustic microscope apparatus 100 of the present embodiment is A pulse light source 101 for generating excitation light for generating a photoacoustic wave; An objective lens 103 for condensing excitation light on the sample S; A galvano mirror 102 which is a scanning unit for moving the focusing position of the excitation light on the sample; A photoacoustic wave detection unit 202 having a sensor unit 201 that detects the generated photoacoustic wave; And an image configuration unit 251 configured to configure an image based on the data from the photoacoustic detection output unit 202,
  • the sensor unit 201 is characterized in that the angle of the range in which the photoacoustic wave incident on the sensor unit 201 can be received is larger than the angle corresponding to the numerical aperture on the illumination side of the objective lens 103.
  • the objective lens 103 is a liquid immersion lens in which the space between the tip of the objective lens 103 and the sample S is filled with a liquid, for example, water W.
  • the light flux from the pulse laser 101 which is a pulse light source, is reflected by the galvano mirror 102. Then, it enters an objective lens 103 for condensing the excitation light L on the sample S at a predetermined angle.
  • the light beam incident on the objective lens 103 is condensed on the sample S via the water W.
  • the photoacoustic wave is generated inside the sample S.
  • the photoacoustic wave signal (acoustic signal) propagates the sample S and the water W.
  • the photoacoustic wave Lr propagated in the water W reaches the fiber sensor 201 included in the photoacoustic wave detection unit 202.
  • FIGS. 2A and 2B respectively show states when the galvano mirror 102 is shaken.
  • the galvano mirror 102 bends the optical path of the excitation light L from the pulse light source 101 by 45 degrees. Then, the parallel excitation light L enters the objective lens 103 substantially perpendicularly. The objective lens 103 condenses the incident excitation light L at the focal position.
  • the photoacoustic wave SN is generated at the focused spot position P0 in the sample S.
  • the photoacoustic wave SN propagates in the sample S and further in the water W and travels.
  • the photoacoustic wave Lr which is a part of the photoacoustic wave SN propagated in the water W, reaches the tip of the fiber sensor 201.
  • FIG. 2B shows a state in which the galvano mirror 102 is vibrated (tilted) in the direction of the arrow in the drawing as compared to the state shown in FIG.
  • the galvano mirror 102 is vibrated, for example, the excitation light L from the pulse light source 101 is bent parallel at a predetermined angle by the galvano mirror 102 as parallel light.
  • the parallel excitation light L obliquely enters the objective lens 103.
  • the objective lens 103 condenses the obliquely incident excitation light L at the condensing spot position P1.
  • the focused spot position P1 (FIG. 2 (b)) is a position different from the focused spot position P0 (FIG. 2 (a)).
  • the galvano mirror 102 can perform two-dimensional scanning in the sample S along the first scanning direction and the second scanning direction by the focused spot of the excitation light L.
  • the region of the sample S which can be scanned by the excitation light L is defined as the radius of the scan range as Xr (that is, the radius of the largest region to be observed).
  • the position of the focused spot can be moved in the depth direction of the sample S.
  • the objective lens 103 may be appropriately selected and mounted with different focal lengths.
  • the photoacoustic wave detection unit 202 is an interferometer that calculates the detected photoacoustic wave Lr. The detailed configuration of the photoacoustic wave detection unit 202 will be described later.
  • an image configuration unit 251 is connected to the control unit 250.
  • the control unit 250 is obtained from the photoacoustic detection unit 202 in synchronization with the drive of the galvano mirror 102 by the control unit 250, that is, in synchronization with the irradiation timing of the excitation light L at the time of two-dimensional scanning of the sample S in a plane.
  • the correspondence between the irradiation position of the excitation light L and the output signal is converted to data based on the output signal.
  • the control unit 250 may associate the irradiation position of the excitation light L with the acquired signal intensity, and may associate the irradiation position of the excitation light L with the acquired output waveform.
  • the image configuration unit 251 when imaging the data of the scanning surface of the sample S, it is imaged by the image configuration unit 251, for example, stored in the storage unit 252, and displayed on a monitor (not shown).
  • the image configuration unit 251 may be incorporated in the control unit 250.
  • Zs ⁇ tan ( ⁇ + ⁇ )> Xr + d (1)
  • NA is the numerical aperture of the objective lens 103 (for high magnification)
  • ⁇ (mm) is the real field of view (2 times Xr)
  • Xr (mm) is the radius of the largest area to be observed
  • WD (mm) is the working distance of the objective lens 103
  • Zs (mm) is the distance between the tip of the fiber sensor 201 and the focusing position of the objective lens 103
  • ⁇ (degrees) is an angle range of light flux which can be incident on the tip of the fiber sensor 201
  • d (mm) is the distance in the observation plane (in the xy plane) perpendicular to the optical axis AXob of the objective lens 103 and the optical axis AXob of the fiber sensor 201
  • ⁇ (degrees) is the angle between the central axis AXfb of the fiber sensor 201 and the optical
  • the distance Zs in the direction along the optical axis of the objective lens between the focusing position of the objective lens 103 and the fiber sensor 201 is shorter than the distance from the tip of the objective lens 103 to the focusing position, ie, the working distance WD. Is desirable.
  • FIG. 4A shows the configuration of the acoustic detection output unit 202.
  • the light from the laser diode 203 enters from the port PA of the optical circulator 204, travels straight through, passes through, and exits from the port PB.
  • the light emitted from the port PB is input to one terminal of the fiber sensor 201.
  • FIG. 4B shows the configuration of the end of the fiber sensor 201.
  • a thin film 201 a is formed at an end of the fiber sensor 201.
  • the thin film 201a has a reference surface 201b for reference photoacoustic waves and an object side surface 201c on the sample side.
  • the silicon photodetector 217 receives the light from the port PC. In the silicon photodetector 217, an intensity signal in which two light beams interfere is obtained.
  • the thin film 201a is formed at the end of the fiber sensor 201 on the sample S side.
  • the tip of the fiber sensor 201 is immersed in water W.
  • the light beam reflected on the reference surface 201b of the thin film 201a returns to the optical circulator 204 as reference light.
  • the film thickness of the thin film 201a changes.
  • the light beam reflected by the thin film 201 b and the light beam reflected by the thin film 201 c return along the same path and reach the optical circulator 204. Therefore, the interference changes the light intensity, and an acoustic signal is obtained as the light intensity signal.
  • the acoustic intensity signal (light flux) incident from the port PB of the optical circulator 204 is then incident on the silicon photodetector 217.
  • the image configuration unit 251 configures an image based on intensity information of light due to interference. The image construction procedure will be described later.
  • FIG. 4C shows the relationship between the angle of the fiber sensor 201 and the sensitivity.
  • the luminous flux incident along the central axis AXfb (see, for example, FIGS. 2A and 2B) of the directivity of the fiber sensor 201 is at 0 degrees.
  • the sensitivity is shown normalized to 1 as the maximum sensitivity.
  • FIG. 5A shows the photoacoustic wave signal obtained by the photoacoustic wave detection unit 202.
  • the horizontal axis of FIG. 5A indicates time T, and the vertical axis indicates signal intensity I.
  • the photoacoustic wave signal is a time-series signal.
  • the maximum value Amax of the amplitude of the signal be the magnitude of the photoacoustic wave signal from the focusing point. Further, the position information of the focusing point of the objective lens 103 is obtained from the deflection angle of the galvano mirror 102.
  • the image configuration unit 251 can perform two-dimensional mapping as shown in FIG. 5B from the position information and the size of the acoustic signal.
  • FIG. 5 (b) shows the result of mapping of specific intensity information in the sample S according to the xy position of the scan and imaging.
  • the objective lens drive unit 104 moves the objective lens 103 in the z direction along the optical axis AXob by the objective lens drive unit 104 (FIG. 1).
  • FIG. 5C information in the depth z direction of the sample S can be obtained.
  • the image configuration unit 251 calculates the objective lens 103 based on the information in the depth z direction. Then, the above-described photoacoustic wave detection is performed inside the sample S.
  • the position of the objective lens 103 is changed to acquire an image again. Thereby, a plurality of images in the z direction can be obtained. Thereby, a three-dimensional photoacoustic wave image of the sample S is configured.
  • the range of directivity in which the fiber sensor 201 can detect and acquire the photoacoustic wave signal is 50% of the most sensitive state (0 degree in FIG. 4C).
  • the range up to the position of sensitivity (45 degrees in FIG. 4C) is a detectable range.
  • the conventional prism and the acoustic lens are unnecessary.
  • the distance (WD) to the sample S can be increased, so that brighter and deeper portions of the sample S can be observed.
  • the wide directional fiber sensor 201 can expand the range in which the sample S can be observed.
  • the excitation light L including the objective lens 14 instead of the scanning by the oscillating mirror 13 so that the photoacoustic wave U from the sample S always enters perpendicularly to the ultrasonic transducer 20. It is assumed that the detection system of the photoacoustic wave U including the incident system and the acoustic lens 19 and the sample stage on which the sample S is placed are relatively moved. However, in this case, scanning takes time.
  • the movement of the objective lens and the sample stage is unnecessary when scanning. This has the effect of enabling high-speed scanning.
  • FIG. 6 shows the configuration of a photoacoustic microscope apparatus according to a modification of the first embodiment.
  • the focal point (focused spot) position P0 of the objective lens 103 is configured to detect a photoacoustic wave signal from a different position.
  • the control unit and the storage unit are not shown.
  • FIG. 7A shows the photoacoustic wave signal detected by the fiber sensor 201.
  • the thin film at the tip of the fiber sensor 201 observes the displacement of the water W from the photoacoustic wave signal from the sample S detected only by the fiber sensor 201, not only the photoacoustic wave Lr from the sample S but also air The external vibration due to the disturbance of the lens or the movement of the sample S also affects.
  • FIG. 7B shows the photoacoustic wave signal detected by the fiber sensor 201 '.
  • the fiber sensor 201 ′ is a signal from an area other than the sample S.
  • the fiber sensor 201 'needs to acquire an acoustic signal from other than the sample S.
  • the highest directivity be disposed so as to face the direction opposite to the sample S.
  • the fiber sensor (sensor unit) of the photoacoustic detection output unit 202 includes a plurality of, for example, three sensor groups 301a, 301b, and 301c,
  • the plurality of sensor groups 301a, 301b, and 301c receive the photoacoustic wave Lr from the range of the sample S which can be scanned by the galvano mirror 102 which is a scanning unit, from a desired range to any range from the entire range. It is desirable to be able to do it. This makes it possible to observe photoacoustic waves from the range of the sample in a wide range of any range from the desired range to all the ranges.
  • the image configuration unit 251 can detect the position of the signal generation source in the sample S based on the information (photoacoustic wave signal) from the plurality of sensor groups 301a, 301b, and 301c. Thereby, the position of the signal generation source can be detected more accurately based on a plurality of pieces of information (photoacoustic wave signal) as compared with the conventional case.
  • the peripheral portion of the objective lens 103 further includes a detector holding unit 302 for holding the sensor groups 301a, 301b, and 301d constituting the sensor unit.
  • FIG. 8B shows the configuration in which the detector holding unit 302 is viewed from the optical axis direction of the objective lens 103.
  • the degree of freedom in arranging the sensor group is improved with a simple configuration.
  • the working distance can be extended, and the observation region in the xy plane can also be extended.
  • three fiber sensors 301a, 301b, and 301c for detecting photoacoustic signals are discretely provided at positions of 120 degrees in the cylindrical detector holding unit 302.
  • one fiber sensor can combine information from a plurality of fiber sensors to generate an image of a photoacoustic wave signal.
  • the image construction unit 251 constructs an image based on the information on the condensing position of the objective lens 103 by the galvano mirror 102 and the information detected from any one of the corresponding fiber sensors 301a, 301b, and 301c.
  • the fiber sensor is used as a sensor that performs noise removal as described in the above-mentioned modification. be able to.
  • FIG. 9A shows the configuration of this embodiment.
  • the same parts as those in the first embodiment and the second embodiment are denoted by the same reference numerals, and redundant description will be omitted. Also, the control unit and the storage unit are not shown.
  • the present embodiment is configured to be able to detect a signal from an area that can be observed by scanning even with one fiber sensor among the plurality of fiber sensor groups 401a, 401b and 401c, as compared with the second embodiment. There is.
  • FIG. 9B shows a configuration in which the detector holding unit 302 is viewed from the optical axis direction of the objective lens 103. Based on the plurality of signals from the fiber sensor groups 401a, 401b, and 401c, it is configured to be able to detect the position information of the condensing spot of the objective lens 103 and the photoacoustic wave signal with higher accuracy.
  • the photoacoustic detection unit 202 also observes the amount of change of the thin film 201a of the fiber sensor 201 by the heterodyne interferometry shown in FIGS. 10 (a) and 10 (b).
  • FIG. 10A shows an outline of the photoacoustic detection unit 202.
  • the beam splitter 212 splits the light from the laser diode 211 into transmitting object light and reflecting reference light. Then, the reference frequency shifter 215 and the observation frequency shifter 216 are used.
  • the light beam transmitted through the beam splitter 212 is transmitted through the observation frequency shifter 213 and the optical circulator 214. Then, it enters the fiber sensor 201.
  • a thin film 201a is formed on the sample S side.
  • the reflectance of the surface 201c on the side of the sample S is larger than the reflectance of the surface 201b on the opposite side to the sample S.
  • the light beam having passed through the reference frequency shifter 215 is incident on the silicon photodetector 217 through a reference light path having an optical path length substantially the same as the reciprocation optical path length of the fiber.
  • the amount of light detected by the silicon photo detector 217 is a signal of resonance corresponding to the two light frequencies of the reference light and the observation light.
  • the image construction unit 251 analyzes this resonance signal. Thereby, the change in the film thickness of the end of the fiber sensor 201 can be detected with higher accuracy. As a result, the photoacoustic wave signal from the sample S can be detected with high accuracy.
  • FIG. 11A shows a configuration in which the detector holding unit 402 is viewed from the optical axis direction of the objective lens 103.
  • FIG. 11A For example, three fiber sensor groups 401a, 401b, and 401c are used.
  • the X marks SP in FIG. 11A indicate the focusing position of the objective lens 102 located at a certain depth from the surface of the sample S.
  • the central axes of the three fiber sensor groups 401a, 401b, and 401c and the optical axis AXob of the objective lens 103 form a predetermined angle.
  • the depth z direction (sound source position) to the observation object can be calculated.
  • the position of the depth z of the object to be observed can be obtained with high accuracy based on the depth z positions of the sound sources obtained from the three fiber sensor groups 401a, 401b, and 401c.
  • FIG. 11B shows the photoacoustic wave signal detected by the fiber sensor 401a.
  • FIG. 11C shows the photoacoustic wave signal detected by the fiber sensor 401 b.
  • FIG. 11D shows the photoacoustic wave signal detected by the fiber sensor 401 c.
  • the excitation light L having an absorption wavelength of hemoglobin is emitted.
  • the observation target is not limited to blood vessels, and can be applied to imaging of endogenous substances such as melanin.
  • the excitation light L may be light in the absorption wavelength range of the target substance.
  • excitation light L uses the light of the absorption wavelength region of the target phosphor in the case of a phosphor, and the light of the resonance wavelength region of the target metal nanoparticle in the case of metal nanoparticles, respectively. Good.
  • control unit 250 controls the light emission timing of the pulse light source 101.
  • the objective lens 103 one having a different focal length is appropriately selected and mounted.
  • a galvano mirror is used to shake the excitation light.
  • the configuration is not limited to this as long as the beam can be deflected.
  • the photoacoustic microscope apparatus is useful for an apparatus capable of securing a sufficient working distance and scanning in large area units over a wide scanning range to improve detection accuracy. is there.
  • Photoacoustic Microscope Device 101 Pulsed Light Source (Pulse Laser) 102 Galvano mirror 103 Objective lens 201 Fiber sensor (sensor section) 202 photoacoustic wave detection unit 250 control unit 251 image configuration unit 252 storage unit

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