WO2015083467A1 - Dispositif de nettoyage - Google Patents

Dispositif de nettoyage Download PDF

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Publication number
WO2015083467A1
WO2015083467A1 PCT/JP2014/078861 JP2014078861W WO2015083467A1 WO 2015083467 A1 WO2015083467 A1 WO 2015083467A1 JP 2014078861 W JP2014078861 W JP 2014078861W WO 2015083467 A1 WO2015083467 A1 WO 2015083467A1
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WO
WIPO (PCT)
Prior art keywords
roller
cleaning
cleaned
rollers
cleaning device
Prior art date
Application number
PCT/JP2014/078861
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English (en)
Japanese (ja)
Inventor
松本　英樹
啓佑 笹島
Original Assignee
バンドー化学株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by バンドー化学株式会社 filed Critical バンドー化学株式会社
Priority to JP2015551428A priority Critical patent/JPWO2015083467A1/ja
Publication of WO2015083467A1 publication Critical patent/WO2015083467A1/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03C7/00—Separating solids from solids by electrostatic effect
    • B03C7/02—Separators
    • B03C7/08—Separators with material carriers in the form of belts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/34—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis parallel to the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/50—Cleaning by methods involving the use of tools involving cleaning of the cleaning members
    • B08B1/54—Cleaning by methods involving the use of tools involving cleaning of the cleaning members using mechanical tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B6/00—Cleaning by electrostatic means

Definitions

  • the present invention relates to a cleaning device that removes dust existing on the surface of a cleaning object using electrostatic force.
  • the cleaning object includes, for example, a film, a sheet, a glass substrate, a printed circuit board (PCB, PCBA, etc.). ), And a cleaning device suitable for a thin object such as a plastic plate.
  • Patent Documents 1 to 4 Regarding such a cleaning system, the applicant has applied for the inventions described in Patent Documents 1 to 4 below, for example. According to the cleaning systems described in Patent Documents 1 to 4, there is no need to periodically perform maintenance work for removing dust from the surface of the cleaning roller, and the dust adsorption operation by the cleaning roller can be stably performed over a long period of time. I was able to continue.
  • one cleaning roller charged negatively can be used on the surface of the object to be cleaned. It is possible to remove the positively charged dust adhering and remove the negatively charged dust with the other cleaning roller positively charged, and it is possible to widen the range of foreign matter that can be removed.
  • FIG. 7 is a side view schematically showing the layout of the main part of a conventional cleaning system in which two cleaning rollers are arranged on the upper and lower surfaces of the object to be cleaned.
  • the cleaning system 61 includes a cleaning unit 62 that removes dust adhering to the surface (upper surface and lower surface) of the material to be cleaned S by using electrostatic force, and a carry-in unit 63 that conveys the material to be cleaned S toward the cleaning unit 62. And an unloading section 64 for unloading the material to be cleaned S after being cleaned by the cleaning section 62.
  • the carry-in part 63 has a configuration in which a transport belt 63C is wound around a pair of rollers 63A and 63B, and the cleaning material S on the transport belt 63C is transported toward the cleaning unit 62. ing.
  • the carry-out unit 64 has a configuration in which a conveyance belt 64C is wound around a pair of rollers 64A and 64B so that the cleaning material S carried out from the cleaning unit 62 is conveyed in a direction away from the cleaning unit 62. It is configured.
  • a cleaning unit 62 is disposed between the carry-in unit 63 and the carry-out unit 64, and the cleaning unit 62 rotates with the cleaning rollers 71 ⁇ / b> A and 71 ⁇ / b> B rotating while the outer peripheral surface is in contact with the surface (upper surface) of the material to be cleaned S.
  • the cleaning rollers 71C and 71D rotate while the outer peripheral surface is in contact with the surface (lower surface) of the material to be cleaned S.
  • the cleaning unit 62 is configured to convey the material to be cleaned S toward the unloading unit 64 while sandwiching the material to be cleaned S between the cleaning rollers 71A and 71B and the cleaning rollers 71C and 71D.
  • rollers 72A and 72B that rotate while contacting the surfaces of the cleaning rollers 71A and 71B, and charge control rollers 73A that rotate while contacting the surfaces of the transfer rollers 72A and 72B
  • the roller 73A rotates in a direction opposite to the rotation direction of the transfer rollers 72A and 72B and scrapes dust adhering to the surfaces of the transfer rollers 72A and 72B, and contacts the brush rollers 74A and 74B and the brush rollers 74A and 74B.
  • rotating metal rollers 75A and 75B and dust scraping blades 76A and 76B disposed in the vicinity of the metal rollers 75A and 75B are provided.
  • An external power supply 77 is connected to the cores of the charge control rollers 73A and 73B, and charges for adsorbing dust adhering to the surface (upper surface) of the object to be cleaned S by electrostatic force are used as the cleaning rollers 71A and 71B.
  • the transfer rollers 72A and 72B can be applied.
  • External power supplies 78A and 78B are also connected to the metal rollers 75A and 75B, and a voltage is applied so as to generate a potential difference between the transfer rollers 72A and 72B.
  • suction ports 79A and 79B for air vacuum means for sucking dust are provided in the vicinity of the surfaces of the metal rollers 75A and 75B.
  • the lower side of the cleaning rollers 71C and 71D like the upper side, the transfer rollers 72C and 72D, the charging control rollers 73C and 73D, the brush rollers 74C and 74D, the metal rollers 75C and 75D, the blade 76C, 76D.
  • An external power supply 77 is connected to the cores of the charge control rollers 73C and 73D, and the cleaning rollers 71C and 71D use charges for adsorbing dust adhering to the surface (lower surface) of the object to be cleaned S by electrostatic force.
  • the transfer rollers 72C and 72D can be applied.
  • External power supplies 78C and 78D are also connected to the metal rollers 75C and 75D, and a voltage is applied so as to generate a potential difference between the transfer rollers 72C and 72D.
  • suction ports 79C and 79D of air vacuum means for sucking dust are provided.
  • the rotational force of the driving roller 81 is transmitted to the shaft portions of the cleaning rollers 71C and 71D via the driving belt 80, and the cleaning rollers 71C and 71D are rotationally driven.
  • the cleaning rollers 71C and 71D are disposed between the carry-in portion 63 and the cleaning roller 71C. Due to the configuration of the apparatus and the layout of the arrangement, there is inevitably a space between the cleaning roller 71D and the carry-out portion 64.
  • the object to be cleaned S is a thin object such as a film or sheet and has low rigidity
  • the object to be cleaned S falls into these spaces when the object to be cleaned S is carried in or out, and the object to be cleaned S
  • the lower cleaning rollers 71 ⁇ / b> C and 71 ⁇ / b> D may be caught, and the transportability of the cleaning target S may be deteriorated.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a compact cleaning device that can improve the transportability of the object to be cleaned.
  • a cleaning device (1) is a cleaning device that removes dust existing on the surface of a member to be cleaned using electrostatic force, and contacts the lower surface of the member to be cleaned.
  • the transport roller having an outer diameter smaller than the outer diameter of the cleaning roller is provided in front of and behind the cleaning roller, a space generated before and after the cleaning roller is provided in the transport. It is filled (narrowed) by a roller.
  • the object to be cleaned is a thin object with low rigidity, there is no possibility that the object to be cleaned falls into the space formed before and after the cleaning roller, and the object to be cleaned is carried in and out accurately. It is possible to improve transportability.
  • the cleaning device (2) according to the present invention is characterized in that, in the cleaning device (1), the upper peripheral surface of the transport roller and the upper peripheral surface of the cleaning roller are located on the same plane. Yes.
  • the cleaning device (2) since the upper peripheral surface of the transport roller and the upper peripheral surface of the cleaning roller are located on the same plane, the contact point between the transport roller and the object to be cleaned is determined.
  • the tangent line of the transport roller passing through and the tangent line of the cleaning roller passing through the contact point between the cleaning roller and the object to be cleaned are located on the same plane. Therefore, the object to be cleaned can be transported to the cleaning roller in a state in which the object to be cleaned is maintained in a horizontal state, the object to be cleaned can be transported more accurately, and stable cleaning performance is exhibited. can do.
  • the cleaning device (3) according to the present invention is configured such that, in the cleaning device (1) or (2), the transport roller is rotationally driven at the same peripheral speed as the cleaning roller. It is said.
  • the transport roller is configured to be rotationally driven at the same peripheral speed as the cleaning roller, the object to be cleaned is a thin, low-rigid sheet or film. Even if it is a thing, the to-be-cleaned body can be conveyed before and after the cleaning roller without causing the slack to the to-be-cleaned body, and the effect of improving the transportability of the to-be-cleaned body can be enhanced. it can.
  • the cleaning device (4) according to the present invention is configured such that, in any one of the cleaning devices (1) to (3), the transport roller is rotationally driven along with the rotational driving of the cleaning roller. It is characterized by being.
  • the cleaning device (4) since the transport roller is configured to be rotationally driven along with the rotational drive of the cleaning roller, when changing the transport speed and transport direction of the object to be cleaned, It is only necessary to control the rotational speed and direction of the cleaning roller. In other words, it is not necessary to individually control the driving of the transport roller, and the peripheral speeds of the cleaning roller and the transport roller can be easily synchronized. In addition, the apparatus can be made compact.
  • the cleaning device (5) according to the present invention is characterized in that, in any of the cleaning devices (1) to (4), the transport roller is made of a metal material.
  • the cleaning device (5) since the conveying roller is made of a metal material, the bending of the conveying roller can be reduced and the conveying accuracy can be improved. Further, even if the outer diameter of the conveying roller is reduced, the rigidity of the roller can be exhibited and the apparatus can be made compact.
  • the cleaning device (6) includes a brush body that contacts the cleaning roller and removes dust present on the surface of the cleaning roller in any of the cleaning devices (1) to (5).
  • a metal roller that contacts the brush body and receives dust from the brush body, a blade body that removes dust adhering to the metal roller, the cleaning roller, the brush body, and the metal roller. And a charge imparting mechanism.
  • the cleaning device (6) since the brush body is in contact with the cleaning roller, it is possible to remove dust existing on the surface of the cleaning roller with the brush body.
  • the dust removal efficiency can be increased and the cleanliness of the surface of the cleaning roller can be increased as compared with a conventional apparatus in which a transfer roller is provided between the brush body. Further, foreign matter scraped off by the brush body is attracted to the metal roller by electrostatic force, and dust adsorbed on the metal roller is scraped off from the metal roller by the blade body.
  • the foreign matter adsorption removal operation by the can be continued stably, and the structure can be made compact.
  • FIG. 4 is a sectional view taken along the line IV-IV in FIG. 2. It is the side view which showed typically the layout of the principal part at the time of arranging the cleaning apparatus concerning embodiment twice. It is the side view which showed typically the layout of the principal part which comprises the cleaning apparatus which concerns on another embodiment. It is the side view which showed typically the layout of the principal part which comprises the conventional cleaning system.
  • FIG. 1 is a side view schematically showing a layout of a main part constituting the cleaning device according to the embodiment.
  • the cleaning device 1 is disposed between the carry-in part 63 and the carry-out part 64.
  • the cleaning device 1 moves relative to the cleaning object S while rotating the surface of the cleaning object S in contact with the surface S1 of the cleaning object S (the lower surface in this case) S1, and the lower surface S1 of the cleaning object S.
  • the dust adhering to the top (for example, minute dust such as a conductor or a dielectric) is removed using the electrostatic force applied to the cleaning roller 2.
  • the cleaning device 1 includes a cleaning roller 2 that is brought into contact with the lower surface S1 of the object to be cleaned S, and conveyance rollers 3A and 3B that are disposed in front of and behind the cleaning roller 2, and is further in contact with the cleaning roller 2 to be cleaned.
  • a brush roller 4 that removes dust on the surface
  • a metal roller 5 that rotates while contacting the brush roller 4 to receive dust from the brush roller 4
  • a blade 6 that removes dust attached to the metal roller 5.
  • the cleaning roller 2, the brush roller 4, and the metal roller 5 are rotatably supported by left and right side plate portions 11 and 12 (see FIGS. 2 and 3), respectively, and the transport rollers 3A and 3B are respectively attached to the left and right mounting plates 13A. , 13B, 14A, 14B (see FIGS. 2 and 3) are rotatably supported. Further, the cleaning device 1 is provided with a charge applying mechanism (not shown) for applying charges to the cleaning roller 2, the brush roller 4 and the metal roller 5.
  • the cleaning roller 2 is capable of charging the surface with a charge (plus or minus charge) that adsorbs dust adhering on the lower surface S1 of the object to be cleaned S by using electrostatic force.
  • the dust is adsorbed by the electrostatic force by using the charging property.
  • the transport rollers 3A and 3B are rollers for transporting the object to be cleaned S, and are made of a metal material such as iron or stainless steel.
  • the outer diameters of the conveying rollers 3A and 3B are set to be smaller than the outer diameter of the cleaning roller 2, and from the viewpoint of making the apparatus compact and filling (narrowing) the space before and after the cleaning roller 2 as much as possible.
  • 3B is preferably set to be equal to or smaller than the radius of the cleaning roller 2.
  • the horizontal axis distance W1 between the cleaning roller 2 and the transport roller 3A is smaller than the total value of the radius R1 of the cleaning roller 2 and the radius r1 of the transport roller 3A (W1 ⁇ R1 + r1).
  • the conveying roller 3 ⁇ / b> A is disposed in the vicinity of the cleaning roller 2.
  • the axial distance W2 between the cleaning roller 2 and the conveyance roller 3B in the horizontal direction is smaller than the total value of the radius R1 of the cleaning roller 2 and the radius r2 of the conveyance roller 3B (W2 ⁇ R1 + r2).
  • a conveyance roller 3 ⁇ / b> B is disposed in the vicinity of the cleaning roller 2.
  • transport rollers 3A and 3B and the cleaning roller 2 are disposed so that the upper peripheral surfaces of the transport rollers 3A and 3B and the upper peripheral surface of the cleaning roller 2 are located on the same plane.
  • the tangent line of the transport rollers 3A and 3B passing through the contact point between the transport rollers 3A and 3B and the cleaning object S and the tangent line of the cleaning roller 2 passing through the contact point between the cleaning roller 2 and the cleaning object S are obtained.
  • Conveying rollers 3A and 3B and a cleaning roller 2 are disposed so as to be located on the same plane.
  • the transport rollers 3A and 3B are made of a metal material. Therefore, even if the outer diameters of the transport rollers 3A and 3B are small, the rigidity can be exhibited, the bending of the transport rollers 3A and 3B can be reduced, and the apparatus can be made compact.
  • pulleys 7A and 7B are disposed on the rotating shafts at both ends of the cleaning roller 2
  • pulleys 8A and 8B are disposed on the rotating shafts at both ends of the conveying roller 3A.
  • Pulleys 9A and 9B are disposed on the rotation shafts at both ends of the roller 3B.
  • the round belt 10A is wound around the pulleys 7A, 8A, and 9A on one end side, and the round belt 10B is wound around the pulleys 7B, 8B, and 9B on the other end side.
  • the pulleys 7 ⁇ / b> A and 7 ⁇ / b> B are configured such that their pitch circle diameters coincide with the outer diameter of the cleaning roller 2.
  • the pulleys 8A and 8B are configured such that the pitch circle diameter thereof matches the outer diameter of the conveyance roller 3A
  • the pulleys 9A and 9B are configured such that the pitch circle diameter thereof matches the outer diameter of the conveyance roller 3B. ing.
  • the transport rollers 3A and 3B are driven to rotate following the rotational drive of the cleaning roller 2. That is, the transport rollers 3A and 3B are configured to be rotationally driven in the same direction at the same peripheral speed as the cleaning roller 2.
  • a brush roller 4 that rotates in opposite directions while contacting the surface of the cleaning roller 2 and removes dust on the surface of the cleaning roller 2 is provided obliquely below the cleaning roller 2.
  • the brush roller 4 is configured to be applied with a potential having the same sign as the charge to be charged on the surface of the cleaning roller 2 at the time of cleaning so as to generate a potential difference with the cleaning roller 2.
  • the brush roller 4 has a synthetic resin brush part (hair part) 4b on a cored bar 4a.
  • the shape outside the cross section of the brush portion 4b is not particularly limited, and for example, a circular shape, an elliptical shape, a polygonal shape, a wave curve shape, or a shape formed by combining a curve and a straight line. Etc. may be employed.
  • a metal roller 5 that rotates while contacting the brush roller 4 in a rotating direction is disposed obliquely below the brush roller 4.
  • the metal roller 5 is also configured to be applied with a potential having the same sign as the charge to be charged on the surface of the cleaning roller 2 during cleaning so that a predetermined potential difference is generated between the metal roller 5 and the cleaning roller 2.
  • the metal roller 5 removes dust from the brush roller 4.
  • the blade 6 is formed of, for example, an elastic body made of synthetic resin (for example, thermosetting urethane resin).
  • FIG. 2 is a perspective view of the cleaning device 1 according to the embodiment as viewed from the front upper side
  • FIG. 3 is a perspective view of the cleaning device 1 as viewed from the upper rear side
  • 4 is a cross-sectional view taken along the line IV-IV in FIG. In FIG. 4, hatching of the member cross section is omitted in order to make the drawing easy to see.
  • the cleaning device 1 is unitized as an integrated structure, and includes a cleaning roller 2 and conveying rollers 3A and 3B disposed at the top of the unit, a brush roller 4, a metal roller 5 and a blade 6 disposed inside the unit. It has.
  • the cleaning device 1 includes left and right side plate portions 11 and 12 on which the cleaning roller 2, the brush roller 4 and the metal roller 5 are rotatably supported, and left and right mounting plates 13A on which the transport roller 3A is rotatably supported. 13B, left and right mounting plates 14A and 14B on which the transport roller 3B is rotatably supported, and connecting members 15 and 16 to which the side plate portions 11 and 12 are connected to each other.
  • the mounting plates 13A and 14A are fixed to the side plate portion 11, and the mounting plates 13B and 14B are fixed to the side plate portion 12.
  • the side plate portions 11 and 12 are made of an insulating material (for example, made of resin such as polyacetal), and the side plate portions 11 and 12 are provided with rotating shafts of the cleaning roller 2, the brush roller 4, and the metal roller 5, respectively. Mounting holes (both not shown) for mounting are respectively formed at predetermined positions.
  • Bearings (not shown) into which the rotation shafts of the cleaning roller 2, the brush roller 4 and the metal roller 5 are inserted are respectively incorporated in these mounting holes, and electrode portions (not shown) are provided on outer ring portions of these bearings (not shown). Is incorporated in a state where it can be energized by electrical contact. An energization connector for energizing these electrode portions is provided, and a predetermined voltage is applied from the outside.
  • a charge applying mechanism is configured including the bearing and the electrode portion incorporated in each of the mounting holes.
  • a roller driving gear 17A and an idle gear 18 formed of an insulating material such as an insulating resin are mounted on the end of the rotating shaft of the cleaning roller 2 inserted into the side plate portion 11, and the roller driving gear.
  • a gear (not shown) to which a rotational force of a cleaning roller driving motor (not shown) is transmitted is meshed with 17A.
  • a metal roller gear 19A formed of an insulating material such as an insulating resin is attached to the end of the rotating shaft of the metal roller 5 inserted into the side plate portion 11.
  • the metal roller gear 19 ⁇ / b> A meshes with the idle gear 18, and the metal roller 5 is driven to rotate as the cleaning roller 2 rotates.
  • a roller driving gear 17B formed of an insulating material such as an insulating resin is attached to the end of the rotating shaft of the cleaning roller 2 inserted into the side plate portion 12, and the roller A gear (not shown) to which the rotational force of a cleaning roller driving motor (not shown) is transmitted can be engaged with the driving gear 17B.
  • a metal roller gear 19B formed of an insulating material such as an insulating resin is attached to the end of the rotating shaft of the metal roller 5 inserted into the side plate portion 12, and the rotating shaft of the brush roller 4
  • a brush roller gear 20 formed of an insulating material such as an insulating resin is attached to the end.
  • the brush roller gear 20 is meshed with the metal roller gear 19 ⁇ / b> B, and the brush roller 4 is driven to rotate as the metal roller 5 rotates.
  • the cleaning roller 2 includes a cored bar (core bar) 2a, a cylindrical inner layer part 2b that covers the cored bar 2, and a thin-film cylindrical outer layer part 2c that covers the inner layer part 2b. It is configured to include.
  • the inner layer portion 2b is made of a conductive elastic member (for example, polyester urethane containing carbon (conductive material)), and the outer layer portion 2c is made of a material such as urethane resin, acrylic mixed urethane or fluorine mixed urethane. Can be used to charge the charges adsorbing dust adhering to the surface of the object S to be cleaned by static electricity.
  • the thickness of the outer layer portion 2c is preferably 2 ⁇ m to 500 ⁇ m, more preferably 5 ⁇ m to 50 ⁇ m from the viewpoint of charging characteristics and the like.
  • the blade 6 is fixed to the blade mounting portion 21.
  • a foreign matter collecting part (not shown) for collecting dust separated by the blade 6 is attached to the lower side of the blade 6.
  • the cleaning target S conveyed from the carry-in unit 63 falls into the space between the carry-in unit 63 and the cleaning device 1 by the conveyance roller 3B of the cleaning device 1. Instead, it is conveyed to the cleaning roller 2 with high accuracy.
  • the object to be cleaned S that has passed over the cleaning roller 2 is accurately transported to the unloading section 64 without falling into the space between the cleaning apparatus 1 and the unloading section 64 by the transport roller 3A of the cleaning apparatus 1. Become.
  • the conveyance rollers 3A and 3B having an outer diameter smaller than the outer diameter of the cleaning roller 2 are disposed in front of and behind the cleaning roller 2, so Is filled (narrowed) by the small-diameter conveying rollers 3A and 3B.
  • the small-diameter conveying rollers 3A and 3B it is possible to accurately carry in and carry out the cleaning target S before and after the cleaning roller 2 and improve the transportability of the cleaning target S.
  • the object to be cleaned S is a thin object with low rigidity.
  • the conveyance can be performed with high accuracy.
  • the conveyance rollers 3A and 3B are made to be the cleaning rollers by the power transmission mechanism including the pulleys 7A and 7B, the pulleys 8A and 8B, the pulleys 9A and 9B, and the round belts 10A and 10B.
  • 2 is configured to be driven to rotate at the same peripheral speed as that of No. 2, even if the object to be cleaned S is a thin or low-rigid sheet or film, the object to be cleaned before and after the cleaning roller 2 is used.
  • the object to be cleaned S can be transported without causing slack or misalignment of the body S, and the effect of improving the transportability of the object to be cleaned S can be enhanced.
  • the cleaning device 1 since the transport rollers 3A and 3B are configured to be rotationally driven along with the rotational drive of the cleaning roller 2, when the transport speed and transport direction of the cleaning object S are changed, It is only necessary to control the rotational speed and direction of the cleaning roller 2. Therefore, it is not necessary to individually control the driving of the conveying rollers 3A and 3B, the peripheral speeds of the cleaning roller 2 and the conveying rollers 3A and 3B can be easily synchronized, and the apparatus can be made compact. .
  • the brush roller 4 is brought into contact with the cleaning roller 2, so that dust existing on the surface of the cleaning roller 2 can be efficiently removed by the brush roller 4.
  • the dust removal efficiency can be increased as compared with the conventional apparatus (see FIG. 7) provided with the transfer roller, and the reduction of the dust removal efficiency can be suppressed, and the cleanliness of the surface of the cleaning roller 2 is increased. You can also.
  • the cleaning device 1 the foreign matter adhering to the surface of the cleaning roller 2 by the electrostatic force is scraped by the brush roller 4, and the foreign matter scraped by the brush roller 4 is attracted to the metal roller 5 by the electrostatic force.
  • the dust adsorbed on the metal roller 5 is scraped off from the metal roller 5 by the blade 6. Therefore, the foreign matter adsorption removal operation by the cleaning roller 2 can be continued stably, and the cost of the apparatus can be reduced and the structure can be made compact by adopting a structure that does not use a conventionally used transfer roller. .
  • FIG. 5 is a side view schematically showing a layout when two cleaning devices according to the embodiment are arranged. Note that components having the same functions as those of the cleaning device 1 shown in FIG.
  • two cleaning devices 1A and 1B are arranged between the carry-in portion 63 and the carry-out portion 64.
  • the cleaning roller 2A and the cleaning roller 2A Charging control is performed so that the sign of the charge charged on the outer peripheral surface of 2B is reversed.
  • the negatively charged cleaning roller 2A removes the positively charged dust adhering to the lower surface S1 of the material S to be cleaned, and the positively charged cleaning roller 2B removes the negatively charged dust. And the range of dust that can be removed can be expanded.
  • the conveyance roller 3A of the cleaning device 1A and the conveyance roller 3B of the cleaning device 1B are located between the cleaning rollers 2A and 2B, the space between the cleaning rollers 2A and 2B is filled with the adjacent conveyance rollers 3A and 3B. Can be narrowed. Therefore, even if the material to be cleaned S is a thin object with low rigidity such as a sheet or a film, the material to be cleaned S does not fall between the cleaning rollers 2A and 2B, and the cleaning device 1A is transferred to the cleaning device 1B. It becomes possible to improve the transportability of the cleaning object S.
  • pulleys 7A and 7B, pulleys 8A and 8B, and pulleys 9A and 9B are used as means for synchronizing the peripheral speeds of the cleaning roller 2 and the transport rollers 3A and 3B.
  • gears (gears) and rollers are applied instead of the pulleys 7A and 7B, the pulleys 8A and 8B, and the pulleys 9A and 9B. be able to.
  • an idle gear is provided between a gear (or roller) 30 attached to the rotating shaft of the cleaning roller 2 and a gear (or roller) 31A attached to the rotating shaft of the conveying roller 3A.
  • an idle roller 32A is interposed, and an idle gear (or idle roller) 32B is provided between the gear (or roller) 30 and a gear (or roller) 31B attached to the rotation shaft of the transport roller 3B. Is configured to be installed.
  • the gear 30 is configured such that its pitch circle diameter matches the outer diameter of the cleaning roller 2.
  • the gears 31A and 31B are configured such that their pitch circle diameters match the outer diameters of the transport rollers 3A and 3B, respectively, and the pitch circle diameters of gears (not shown) on the other end side of the transport rollers 3A and 3B. Is also configured to match the outer diameter of the transport rollers 3A, 3B.
  • the transport rollers 3A and 3B are driven to rotate following the rotational drive of the cleaning roller 2. That is, the transport rollers 3A and 3B can be rotationally driven in the same direction at the same peripheral speed as the cleaning roller 2.
  • the cleaning device 1 or the cleaning devices 1A and 1B are disposed below the cleaning target S, and the lower surface S1 of the cleaning target S is cleaned.
  • the cleaning devices 1A and 1B are disposed on the lower side S1 of the object to be cleaned S, the cleaning device 1, the cleaning devices 1A and 1B or another cleaning device are disposed on the upper side, and the upper and lower surfaces of the object to be cleaned S are simultaneously disposed. It is also possible to have a system configuration for cleaning.

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  • Cleaning In General (AREA)

Abstract

L'objet de la présente invention est de proposer un dispositif de nettoyage capable d'améliorer les propriétés en matière de transport d'un corps devant être nettoyé. Ledit dispositif de nettoyage (1) enlève la poussière présente à la surface d'un corps devant être nettoyé (S) sous l'effet d'une force électrostatique et comporte : un rouleau de nettoyage (2) qui est mis en contact avec la surface inférieure (S1) du corps devant être nettoyé (S) ; et des rouleaux de transport (3A, 3B) qui sont installés près de l'avant et de l'arrière du rouleau de nettoyage (2). Les diamètres extérieurs des rouleaux de transport (3A, 3B) sont plus petits que le diamètre extérieur du rouleau de nettoyage (2). En conséquence, l'espace situé à l'avant et à l'arrière du rouleau de nettoyage (2) est rendu plus étroit et il est donc possible d'améliorer les propriétés en matière de transport du corps devant être nettoyé (S).
PCT/JP2014/078861 2013-12-03 2014-10-30 Dispositif de nettoyage WO2015083467A1 (fr)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105170598A (zh) * 2015-08-28 2015-12-23 北大方正集团有限公司 一种辅助pcb板的清洗模具及该清洗模具的制备方法
CN105728365A (zh) * 2016-04-15 2016-07-06 杭州金竺机械有限公司 中药材磨皮机
CN106660358A (zh) * 2014-07-04 2017-05-10 日立造船株式会社 静电丝网印刷装置
CN106946002A (zh) * 2017-03-21 2017-07-14 何伟 一种木材搬运装置
US10081839B2 (en) 2005-07-29 2018-09-25 Natera, Inc System and method for cleaning noisy genetic data and determining chromosome copy number
EP3590656A4 (fr) * 2017-03-01 2020-11-25 Fuentes Hernández, Fernando Outil de nettoyage de molettes de machines de fermeture de contenants ou boîtes
CN112376253A (zh) * 2020-11-09 2021-02-19 简浩 一种解决纺织品上绒毛与灰尘吸附的装置
WO2021097870A1 (fr) * 2019-11-22 2021-05-27 苏州昊云电子科技有限公司 Plateforme expérimentale de développement de produit électronique
CN113879770A (zh) * 2021-11-05 2022-01-04 武汉新方正塑业股份有限公司 一种具有吸附功能的吸塑盒生产线用传送带

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CN111250578B (zh) * 2020-01-15 2021-10-29 浙江强伟五金有限公司 一种窗帘杆成型压瓦机
CN114792944B (zh) * 2022-05-25 2024-10-15 淮南常力达电气有限公司 一种具有自清洁功能的防倾倒充电馈电电池一体柜

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646015U (fr) * 1979-09-13 1981-04-24
JPS6475085A (en) * 1987-09-17 1989-03-20 Taiyo Kogyo Co Ltd Dust removal apparatus for plastic film
JP2001096240A (ja) * 1999-09-30 2001-04-10 Minolta Co Ltd シートクリーニング装置
JP2008168188A (ja) * 2007-01-10 2008-07-24 Mitsuma Giken Kk クリーニング装置
WO2010109755A1 (fr) * 2009-03-23 2010-09-30 バンドー化学株式会社 Système de nettoyage

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010207687A (ja) * 2009-03-09 2010-09-24 Nagaoka Seisakusho:Kk 基板搬送装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5646015U (fr) * 1979-09-13 1981-04-24
JPS6475085A (en) * 1987-09-17 1989-03-20 Taiyo Kogyo Co Ltd Dust removal apparatus for plastic film
JP2001096240A (ja) * 1999-09-30 2001-04-10 Minolta Co Ltd シートクリーニング装置
JP2008168188A (ja) * 2007-01-10 2008-07-24 Mitsuma Giken Kk クリーニング装置
WO2010109755A1 (fr) * 2009-03-23 2010-09-30 バンドー化学株式会社 Système de nettoyage

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10081839B2 (en) 2005-07-29 2018-09-25 Natera, Inc System and method for cleaning noisy genetic data and determining chromosome copy number
CN106660358A (zh) * 2014-07-04 2017-05-10 日立造船株式会社 静电丝网印刷装置
CN106660358B (zh) * 2014-07-04 2019-03-01 日立造船株式会社 静电丝网印刷装置
CN105170598A (zh) * 2015-08-28 2015-12-23 北大方正集团有限公司 一种辅助pcb板的清洗模具及该清洗模具的制备方法
CN105728365A (zh) * 2016-04-15 2016-07-06 杭州金竺机械有限公司 中药材磨皮机
CN105728365B (zh) * 2016-04-15 2019-01-18 杭州金竺机械有限公司 中药材磨皮机
EP3590656A4 (fr) * 2017-03-01 2020-11-25 Fuentes Hernández, Fernando Outil de nettoyage de molettes de machines de fermeture de contenants ou boîtes
CN106946002A (zh) * 2017-03-21 2017-07-14 何伟 一种木材搬运装置
WO2021097870A1 (fr) * 2019-11-22 2021-05-27 苏州昊云电子科技有限公司 Plateforme expérimentale de développement de produit électronique
CN112376253A (zh) * 2020-11-09 2021-02-19 简浩 一种解决纺织品上绒毛与灰尘吸附的装置
CN113879770A (zh) * 2021-11-05 2022-01-04 武汉新方正塑业股份有限公司 一种具有吸附功能的吸塑盒生产线用传送带

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