WO2015033992A1 - 電磁コイルの冷却構造、及び電磁アクチュエータ - Google Patents
電磁コイルの冷却構造、及び電磁アクチュエータ Download PDFInfo
- Publication number
- WO2015033992A1 WO2015033992A1 PCT/JP2014/073299 JP2014073299W WO2015033992A1 WO 2015033992 A1 WO2015033992 A1 WO 2015033992A1 JP 2014073299 W JP2014073299 W JP 2014073299W WO 2015033992 A1 WO2015033992 A1 WO 2015033992A1
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- WIPO (PCT)
- Prior art keywords
- electromagnetic coil
- space
- electromagnetic
- cooling member
- cooling
- Prior art date
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/08—Cooling; Ventilating
- H01F27/10—Liquid cooling
- H01F27/16—Water cooling
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F5/00—Coils
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F7/00—Magnets
- H01F7/06—Electromagnets; Actuators including electromagnets
- H01F7/08—Electromagnets; Actuators including electromagnets with armatures
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/04—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors
- H02K3/24—Windings characterised by the conductor shape, form or construction, e.g. with bar conductors with channels or ducts for cooling medium between the conductors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
- H02K9/227—Heat sinks
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
- H02K2201/18—Machines moving with multiple degrees of freedom
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
Definitions
- the present invention relates to a structure for cooling an electromagnetic coil used in an electromagnetic actuator or the like.
- the present invention has been made to solve these problems, and the main object of the present invention is to arbitrarily arrange a plurality of electromagnetic coils in parallel in a structure for cooling the end face in the axial direction of the electromagnetic coil. There is to do.
- the first means is a cooling structure for an electromagnetic coil, and is attached to an electromagnetic coil having a space extending in a predetermined axial direction formed therein, and an end surface of the electromagnetic coil in the predetermined axial direction, and a fluid flow therein.
- a space extending in the predetermined axial direction is formed inside the electromagnetic coil.
- a cooling member is attached to the end face of the electromagnetic coil in the predetermined axial direction, and a fluid flow path is formed inside the cooling member.
- an inlet pipe and an outlet pipe are respectively connected to the inlet and outlet of the flow path of the cooling member.
- the inlet pipe and the outlet pipe extend to the outside of the electromagnetic coil through the space. Therefore, using the space inside the electromagnetic coil, the inlet pipe and the outlet pipe can be connected to the inlet and outlet of the flow path of the cooling member, respectively, and the fluid can be circulated through the flow path. For this reason, a mutual piping does not interfere in a plurality of electromagnetic coils, and a plurality of electromagnetic coils can be arbitrarily arranged in parallel.
- the second means is a cooling structure for an electromagnetic coil, wherein a space extending in a predetermined axial direction is formed therein, a plurality of electromagnetic coils arranged in parallel with the predetermined axial direction, and the plurality of electromagnetic coils arranged
- a cooling member attached to an end face in the predetermined axial direction and having a fluid flow path formed therein, and the inside of the space of any one of the plurality of arranged electromagnetic coils, the cooling member
- An inlet pipe connected to the inlet of the flow path and extending to the outside of the electromagnetic coil through the space, and the flow path of the cooling member inside the space of any one of the plurality of arranged electromagnetic coils
- an outlet pipe connected to the outlet of the electromagnetic coil and extending to the outside of the electromagnetic coil through the space.
- a plurality of electromagnetic coils are arranged in parallel with the predetermined axial direction, and the cooling member is attached to the end surface of the plurality of arranged electromagnetic coils in the predetermined axial direction.
- An inlet pipe is connected to the inlet of the flow path of the cooling member in the space of any one of the plurality of electromagnetic coils, and the cooling member is inserted in the space of any electromagnetic coil.
- An outlet pipe is connected to the outlet of the flow path. Therefore, a plurality of electromagnetic coils can be cooled by flowing a fluid through the flow path of the cooling member.
- the inlet pipe and the outlet pipe are respectively connected to the inlet and the outlet inside the space of the common electromagnetic coil.
- the plurality of electromagnetic coils arranged in parallel with the predetermined axial direction have the same configuration as the first means, whereby the inlet piping and the outlet piping can be combined in one electromagnetic coil. .
- the fourth means is a cooling structure for the electromagnetic coil, wherein a space extending in a predetermined axial direction is formed inside, and the first electromagnetic coil and the second electromagnetic coil arranged so as to coincide with the predetermined axial direction, A first cooling member attached to an end surface opposite to the second electromagnetic coil among end surfaces of the first electromagnetic coil in the predetermined axial direction, and a fluid passage formed therein, and the first electromagnetic coil It is attached to the end surface on the second electromagnetic coil side of the end surface in the predetermined axial direction, and is attached to the end surface on the first electromagnetic coil side of the end surface in the predetermined axial direction of the second electromagnetic coil.
- a second cooling member in which a flow path is formed, and an inlet and an outlet of the flow path of the first cooling member inside the space of the first electromagnetic coil, respectively, and through the space of the first electromagnetic coil.
- a first inlet pipe and a first outlet pipe extends to the outside of the second electromagnetic coil through the space of the second electromagnetic coil.
- the space extending in the predetermined axial direction is formed inside, and the first electromagnetic coil and the second electromagnetic coil arranged with the predetermined axial direction being aligned are provided.
- a second cooling member attached between the first electromagnetic coil and the second electromagnetic coil is provided.
- a 2nd cooling member is penetrated, and a 1st inlet piping and a 1st outlet piping are made into the inlet and outlet of the flow path of a 1st cooling member.
- the several group of a 1st electromagnetic coil and a 2nd electromagnetic coil can be arbitrarily arrange
- the second electromagnetic coil is connected to the inlet and the outlet of the flow path of the second cooling member inside the space of the second electromagnetic coil, and the second electromagnetic coil is connected to the second electromagnetic coil through the space.
- a second inlet pipe and a second outlet pipe extending to the outside are provided.
- the sixth means is a cooling structure for the electromagnetic coil, wherein a space extending in a predetermined axial direction is formed inside, and a plurality of first electromagnetic coils arranged in parallel with the predetermined axial direction extend in the predetermined axial direction.
- a space is formed in the interior, and a plurality of second electromagnetic coils arranged so as to coincide with the first electromagnetic coil and the predetermined axial direction, and among the end surfaces in the predetermined axial direction of the plurality of first electromagnetic coils arranged,
- a first cooling member attached to an end surface opposite to the second electromagnetic coil and having a fluid flow path formed therein, and the second of the end surfaces in the predetermined axial direction of the plurality of arranged first electromagnetic coils.
- the configuration of the second means and the fourth means is provided, and the effects of both the second means and the fourth means can be achieved.
- the first inlet pipe and the first outlet pipe can be combined in one first electromagnetic coil.
- the second electromagnetic coil is connected to an inlet of the flow path of the second cooling member inside the space of any second electromagnetic coil among the plurality of second electromagnetic coils arranged, A second inlet pipe extending to the outside of the second electromagnetic coil through the space, and the second cooling member in the space of any one of the plurality of second electromagnetic coils.
- a second outlet pipe connected to the outlet of the flow path and extending to the outside of the second electromagnetic coil through the space of the second electromagnetic coil.
- the second inlet pipe and the second outlet pipe are respectively connected to the inlet and the outlet inside the space of the common second electromagnetic coil.
- the second inlet pipe and the second outlet pipe can be combined in one second electromagnetic coil.
- a relay pipe is connected to the outer periphery of the end of the pipe opposite to the cooling member via a first seal member, and the end of the relay pipe opposite to the cooling member is connected.
- the outer periphery of the part is supported via a second seal member.
- the relay pipe is connected to the outer periphery of the end of the pipe opposite to the cooling member via the first seal member. And the outer periphery of the edge part on the opposite side to a cooling member in a relay pipe is supported via the 2nd seal member.
- the force which acts on piping can be buffered by a 1st seal member, a relay pipe, and a 2nd seal member, and it can suppress that a load is applied to the connection part of a cooling member and piping.
- the first seal member and the second seal member allow a slight movement of the pipe and the relay pipe, an assembly error of the pipe and the relay pipe can be absorbed.
- the cooling member is made of alumina
- the pipe is made of titanium
- the pipe is connected to the cooling member through a metal layer formed by diffusion on the surface of the cooling member. Connected by silver solder.
- the titanium piping can be connected to the cooling member made of alumina by silver brazing through the metal layer formed by diffusion on the surface of the cooling member.
- the electromagnetic coil includes a conductor winding formed by a strip-shaped conductor wound around the predetermined axis a plurality of times, and the cooling member is arranged in the predetermined axis direction of the conductor winding. It is attached to the end face.
- the electromagnetic coil includes the conductor winding formed by the strip-shaped conductor wound around the predetermined axis a plurality of times.
- the cooling member is attached to the end surface of the predetermined axial direction of a conductor winding body. For this reason, the conductor winding body can transmit heat from the end face to the cooling member through the entire length in the axial direction, and the cooling efficiency of the conductor winding body can be improved.
- the thirteenth means is an electromagnetic actuator, and is characterized in that it has a cooling structure for any one of the first to twelfth means.
- the electromagnetic actuator can achieve the same effects as the above-described means.
- the fourteenth means includes a driven part that is disposed on the opposite side of the electromagnetic coil with respect to the cooling member and is driven two-dimensionally along the cooling member based on a magnetic flux generated in the electromagnetic coil.
- the electromagnetic actuator includes the driven portion that is disposed on the opposite side to the electromagnetic coil with respect to the cooling member and is driven two-dimensionally along the cooling member based on the magnetic flux generated in the electromagnetic coil. Yes.
- the inlet pipe and the outlet pipe for allowing the fluid to flow through the cooling member cannot be connected to any position on the side of the cooling member, and any of them on the side opposite to the electromagnetic coil with respect to the cooling member. It is not possible to connect to the position.
- the electromagnetic coil cooling structure in any one of the first to twelfth means is provided, even such an electromagnetic actuator can circulate a fluid through the cooling member.
- FIG. 4 is a sectional view taken along line 4-4 of FIG.
- FIG. 6 is a cross-sectional view taken along line 6-6 of FIG. Assembly drawing of cooling plate.
- the perspective view of the cooling plate before an upper board attachment Assembly drawing of constant temperature plate.
- the perspective view of the thermostat plate before an upper board attachment Sectional drawing which shows the connection structure of 1st inlet piping.
- This embodiment is embodied as an XY linear actuator used in a lithographic apparatus (stepper) or the like.
- FIG. 3 is a plan view of the coil unit 10 before the constant temperature plate 20 is attached.
- the first electromagnetic coil 30 includes a conductor wound body 31 formed of a strip-like (film-like) conductor wound around an axis Z (predetermined axis) a plurality of times. One end of the strip-shaped conductor is connected to the electrode pin 33, and the other end of the strip-shaped conductor is connected to the electrode pin 34.
- the conductor wound body 31 is formed in a long cylindrical shape (cylindrical shape).
- a space 32 extending in the direction of the axis Z is formed inside the conductor wound body 31 (first electromagnetic coil 30).
- the conductor wound body 31 is wound so that the strip-shaped conductors and the adhesive layer are alternately overlapped, and the strip-shaped conductors are bonded to each other by the adhesive layer.
- the adhesive layer is made of an electrically insulating material. In addition, it can also be set as the structure which does not adhere
- the first electromagnetic coils 30A, 30B, and 30C are arranged with the Z-axis direction parallel (parallel). Specifically, the first electromagnetic coils 30 ⁇ / b> A, 30 ⁇ / b> B, and 30 ⁇ / b> C are disposed adjacent to the direction in which the short side of the oval cross section extends (the left-right direction in FIG. 3).
- the constant temperature plate 20 is attached to the end surface 30e opposite to the second electromagnetic coil 50 among the end surfaces in the axis Z direction of the first electromagnetic coil 30.
- the constant temperature plate 20 (first cooling member) is formed in a rectangular plate shape by a nonmagnetic insulating material such as alumina.
- a cooling water (fluid) flow path is formed in the constant temperature plate 20.
- the cooling plate 40 is attached to the end surface 30f on the second electromagnetic coil 50 side of the end surface of the first electromagnetic coil 30 in the axis Z direction.
- the cooling plate 40 (second cooling member) is formed in a rectangular plate shape using a nonmagnetic insulating material such as alumina.
- the second electromagnetic coil 50 is attached to the surface opposite to the first electromagnetic coil 30. That is, the cooling plate 40 is attached to the end surface 50g on the first electromagnetic coil 30 side in the end surface of the second electromagnetic coil 50 in the axis Z direction (see FIG. 4).
- a cooling water (fluid) flow path is formed inside the cooling plate 40.
- the second electromagnetic coil 50 has the same configuration as the first electromagnetic coil 30.
- the 1st electromagnetic coil 30 and the 2nd electromagnetic coil 50 are arrange
- the first electromagnetic coil 30A and the second electromagnetic coil 50A are arranged with the axis Z direction aligned
- the first electromagnetic coil 30B and the second electromagnetic coil 50B are arranged with the axis Z direction aligned
- the first electromagnetic coil 30 ⁇ / b> C and the second electromagnetic coil 50 ⁇ / b> C are arranged with the axis Z direction aligned.
- FIG. 4 is a cross-sectional view taken along line 4-4 of FIG.
- the second electromagnetic coil 50 ⁇ / b> C (50) is attached to the support plate 60 via the insulating member 51.
- the support plate 60 is formed in a rectangular plate shape using a nonmagnetic insulating material such as alumina.
- the support plate 60 is formed with a spacer 60a protruding in the axis Z direction.
- the support plate 60 is attached to the main body 70.
- the main body 70 is formed in a rectangular plate shape from a metal such as stainless steel or aluminum.
- a cylindrical second inlet pipe 42 is connected to the inlet 41 of the flow path of the cooling plate 40 inside the space 52 of the second electromagnetic coil 50C (50).
- the second inlet pipe 42 extends to the outside of the second electromagnetic coil 50C through the space 52 of the second electromagnetic coil 50C.
- a cylindrical second outlet pipe 47 is connected to the outlet 46 of the flow path of the cooling plate 40 inside the space 52 of the second electromagnetic coil 50C (50).
- the second outlet pipe 47 extends to the outside of the second electromagnetic coil 50C through the space 52 of the second electromagnetic coil 50C. That is, the second inlet pipe 42 and the second outlet pipe 47 are connected to the inlet 41 and the outlet 46, respectively, in the space 52 of the common second electromagnetic coil 50C.
- relay pipes 44 and 49 are connected to the outer circumferences of the end portions 42 a and 47 a opposite to the cooling plate 40 through first seal members 43, respectively.
- the first seal member 43 is an O-ring formed of resin or the like.
- the relay pipes 44 and 49 are formed in a cylindrical shape from a metal such as stainless steel. For this reason, the pipes 42 and 47 and the relay pipes 44 and 49 are respectively sealed in the radial direction by the first seal member 43.
- the outer peripheries of the end portions 44 a and 49 a opposite to the cooling plate 40 are supported by the main body 70 via the second seal members 61, respectively.
- the second seal member 61 is an O-ring formed of resin or the like. Cooling water flow paths 72 and 73 are formed inside the main body 70. The cross sections of the flow paths 72 and 73 are circular.
- the relay pipe 44 is connected to the flow path 72, and the relay pipe 49 is connected to the flow path 73.
- the flow paths 72 and 73 and the relay pipes 44 and 49 are sealed in the radial direction by the second seal member 61, respectively.
- Wires 35 and 55 are connected to the electrode pins 34 and 53, respectively.
- the wires 35 and 55 extend to the outside of the main body 70 in the axis Z direction through the support plate 60 and the main body 70.
- the second electromagnetic coil 50C (50), the cooling plate 40, the second inlet pipe 42, the second outlet pipe 47, the relay pipes 44 and 49, and the flow paths 72 and 73 constitute the second electromagnetic coil 50C (50).
- a cooling structure is configured.
- FIG. 5 is a plan view of the coil unit 10
- FIG. 6 is a sectional view taken along line 6-6 of FIG.
- a cylindrical first inlet pipe 22 is connected to the inlet 21 of the flow path of the constant temperature plate 20 inside the space 32 of the first electromagnetic coil 30A (30).
- the first inlet pipe 22 penetrates the cooling plate 40 through the space 32 of the first electromagnetic coil 30A, and extends to the outside of the second electromagnetic coil 50A through the space 52 of the second electromagnetic coil 50A.
- a cylindrical first outlet pipe 27 is connected to the outlet 26 of the flow path of the constant temperature plate 20 inside the space 32 of the first electromagnetic coil 30A (30).
- the first outlet pipe 27 penetrates the cooling plate 40 through the space 32 of the first electromagnetic coil 30A, and extends to the outside of the second electromagnetic coil 50A through the space 52 of the second electromagnetic coil 50A. That is, the first inlet pipe 22 and the first outlet pipe 27 are respectively connected to the inlet 21 and the outlet 26 in the space 32 of the common first electromagnetic coil 30A.
- relay pipes 24 and 29 are connected to the outer circumferences of the end portions 22 a and 27 a opposite to the constant temperature plate 20 via first seal members 43, respectively.
- the relay pipes 24 and 29 are formed in a cylindrical shape from a metal such as stainless steel. For this reason, the pipes 22 and 27 and the relay pipes 24 and 29 are sealed in the radial direction by the first seal members 43, respectively.
- the outer peripheries of the end portions 24 a and 29 a opposite to the constant temperature plate 20 are supported by the main body 70 via the second seal members 61, respectively.
- Cooling water flow paths 76 and 77 are formed inside the main body 70.
- the cross sections of the flow paths 76 and 77 are circular.
- the relay pipe 24 is connected to the flow path 76, and the relay pipe 29 is connected to the flow path 77.
- the flow paths 76 and 77 and the relay pipes 24 and 29 are sealed in the radial direction by the second seal member 61, respectively.
- Wires 35 and 55 are connected to the electrode pins 34 and 53, respectively.
- the wires 35 and 55 extend to the outside of the main body 70 in the axis Z direction through the support plate 60 and the main body 70.
- a cooling structure is configured.
- FIG. 7 is an assembly drawing of the cooling plate 40
- FIG. 8 is a perspective view of the cooling plate 40 before the upper plate is attached.
- the cooling plate 40 includes an upper plate 40a, an intermediate plate 40b, and a lower plate 40c.
- the upper plate 40a, the middle plate 40b, and the lower plate 40c are formed in a rectangular plate shape having the same dimensional shape.
- the upper plate 40a, the middle plate 40b, and the lower plate 40c are formed with through holes 40d into which the spacers 60a of the support plate 60 can be inserted.
- Through holes 40e into which the pipes 22 and 27 can be inserted are respectively formed in the upper plate 40a, the middle plate 40b, and the lower plate 40c.
- the through hole 40e is formed at a position corresponding to the space 52 of the second electromagnetic coil 50A.
- FIG. 9 is an assembly view of the constant temperature plate 20
- FIG. 10 is a perspective view of the constant temperature plate 20 before the upper plate is attached.
- the constant temperature plate 20 includes an upper plate 20a, an intermediate plate 20b, and a lower plate 20c.
- the upper plate 20a, the middle plate 20b, and the lower plate 20c are formed in a rectangular plate shape having the same dimensional shape.
- the meandering plate 20b is provided with a meandering through hole 20f that defines the flow path 20g of the constant temperature plate 20. Then, the upper plate 20a and the lower plate 20c are integrated with the middle plate 20b interposed therebetween, whereby the flow path 20g of the thermostatic plate 20 is formed.
- the lower plate 20c is formed with the inlet 21 and the outlet 26 of the flow path 20g. The inlet 21 and the outlet 26 are formed at positions corresponding to the space 32 of the first electromagnetic coil 30A.
- FIG. 11 is a cross-sectional view showing the connection structure of the first inlet pipe 22.
- the pipes 22, 27, 42 and 47 are all made of titanium and have the same connection structure.
- the connection structure of the first inlet pipe 22 will be described as an example.
- a metal layer 23 in which a metal material is diffused is formed around the inlet 21 of the flow path 20g.
- the metal layer 23 is made of silver, copper, and titanium.
- a flange 22 b is formed at the end 22 a of the first inlet pipe 22.
- the metal layer 23 and the first inlet pipe 22 are connected by a silver braze 25 with the flange 22 b of the first inlet pipe 22 abutting against the metal layer 23.
- the first inlet pipe 22 is connected to the constant temperature plate 20 by the silver solder 25 through the metal layer 23.
- FIG. 12 is a schematic diagram showing the XY linear actuator 11.
- the XY linear actuator 11 electromagnettic actuator
- the XY linear actuator 11 includes a plurality of coil units 10 arranged two-dimensionally.
- the plurality of coil units 10 are arranged so that the directions of the coil units 10 adjacent to each other are different by 90 °.
- the constant temperature plate 20 of the coil unit 10 is omitted.
- the XY linear actuator 11 includes a table 12 disposed on the side opposite to the electromagnetic coils 30 and 50 with respect to the constant temperature plate 20.
- the table 12 (driven portion) is formed in a rectangular plate shape, and a magnet is incorporated therein.
- a substrate W is attached on the table 12.
- the table 12 is driven two-dimensionally along the constant temperature plate 20 based on the magnetic flux generated in the electromagnetic coils 30 and 50.
- the first inlet pipe 22 and the first outlet pipe 27 are connected to the inlet 21 and the outlet 26 of the flow path 20g of the constant temperature plate 20, respectively.
- the first inlet pipe 22 and the first outlet pipe 27 extend to the outside of the first electromagnetic coil 30 ⁇ / b> A through the space 32. Therefore, using the space 32 inside the first electromagnetic coil 30A, the first inlet pipe 22 and the first outlet pipe 27 are connected to the inlet 21 and the outlet 26 of the flow path 20g of the constant temperature plate 20, respectively, and the flow path 20g.
- the cooling water can be circulated in the tank. For this reason, mutual piping does not interfere in the plurality of first electromagnetic coils 30, and the plurality of first electromagnetic coils 30 can be arbitrarily arranged in parallel.
- the plurality of first electromagnetic coils 30 are arranged with the axis Z direction in parallel, and the constant temperature plate 20 is attached to the end surface 30e in the axis Z direction of the plurality of first electromagnetic coils 30 arranged. And among the 1st electromagnetic coils 30 arrange
- the first inlet pipe 22 and the first outlet pipe 27 are connected to the inlet 21 and the outlet 26 in the space 32 of the common first electromagnetic coil 30A, respectively. For this reason, in the 1st electromagnetic coil 30 arranged in multiple numbers by making the axis Z direction parallel, the 1st inlet piping 22 and the 1st outlet piping 27 can be put together in one 1st electromagnetic coil 30A.
- Spaces 32 and 52 extending in the axis Z direction are formed inside, and are provided with a first electromagnetic coil 30 and a second electromagnetic coil 50 arranged so as to coincide with the axis Z direction.
- a cooling plate 40 attached between the first electromagnetic coil 30 and the second electromagnetic coil 50 is provided. Then, by using the spaces 32 and 52 inside the first electromagnetic coil 30 and the second electromagnetic coil 50, the cooling plate 40 is penetrated, and the first inlet pipe is connected to the inlet 21 and the outlet 26 of the flow path 20g of the thermostatic plate 20. 22 and the first outlet pipe 27 can be connected to each other.
- the thermostatic plate 20 And cooling water can be distribute
- the relay pipe 24 is connected to the outer periphery of the end 22 a opposite to the constant temperature plate 20 via the first seal member 43.
- the outer periphery of the end 24 a opposite to the constant temperature plate 20 in the relay pipe 24 is supported by the main body 70 via the second seal member 61. Therefore, the force acting on the first inlet pipe 22 can be buffered by the first seal member 43, the relay pipe 24, and the second seal member 61, and the connection portion between the constant temperature plate 20 and the first inlet pipe 22. It can suppress that a load is applied.
- first seal member 43 and the second seal member 61 allow a slight movement of the first inlet pipe 22 and the relay pipe 24, the assembly error of the first inlet pipe 22 and the relay pipe 24 is absorbed. You can also. In addition, the same effect can be produced in the first outlet pipe 27, the second inlet pipe 42, and the second outlet pipe 47.
- the constant temperature plate 20 is made of alumina
- the first inlet pipe 22 (first outlet pipe 27) is made of titanium. Since alumina and titanium are nonmagnetic materials, the constant temperature plate 20 and the first inlet pipe 22 (first outlet pipe 27) can be prevented from affecting the magnetic flux generated in the electromagnetic coil. Then, the first inlet pipe 22 (first outlet pipe 27) made of titanium is connected to the constant temperature plate 20 made of alumina by the silver solder 25 through the metal layer 23 formed by diffusion on the surface of the constant temperature plate 20. Can do. In addition, the same effect can be show
- the constant temperature plate 20 can suppress a change in the temperature of the space above the constant temperature plate 20 in the XY linear actuator 11, that is, the temperature of the processing chamber (for example, exposure space) in the lithography apparatus.
- the constant temperature plate 20 and the first electromagnetic coil 30 may be arranged apart from each other in the Z direction, and an air layer may be interposed between the two as a heat insulating layer.
- an insulating member that insulates heat may be disposed between the constant temperature plate 20 and the first electromagnetic coil 30.
- the thickness of the adhesive that bonds the constant temperature plate 20 and the first electromagnetic coil 30 is set to be larger than the thickness of the adhesive that bonds the cooling plate 40, the first electromagnetic coil 30, and the second electromagnetic coil 50.
- the heat of the electromagnetic coil may be difficult to be transmitted to the constant temperature plate 20.
- any of the above configurations by independently adjusting the temperature and flow rate of the cooling water (refrigerant) flowing in the cooling plate 40 and the temperature and flow rate of the cooling water (refrigerant) flowing in the constant temperature plate 20, It is possible to efficiently take the heat of the first electromagnetic coil 30 and the second electromagnetic coil 50 by the cooling plate 40 and suppress the temperature change of the processing chamber in the lithographic apparatus by the constant temperature plate 20.
- the XY linear actuator 11 is disposed on the opposite side to the first electromagnetic coil 30 and the second electromagnetic coil 50 with respect to the constant temperature plate 20, and is controlled based on the magnetic flux generated in the first electromagnetic coil 30 and the second electromagnetic coil 50.
- a table 12 driven two-dimensionally along the plate 20 is provided. Therefore, the first inlet pipe 22 (second inlet pipe 42) and the first outlet pipe 27 (second outlet pipe 47) for circulating cooling water through the constant temperature plate 20 (cooling plate 40) are connected to the constant temperature plate 20 ( It cannot be connected to any position on the side of the cooling plate 40).
- first inlet coil 22 (second inlet pipe 42) and the first outlet pipe 27 (second outlet pipe 47) are connected to the constant temperature plate 20 (cooling plate 40) by the first electromagnetic coil 30 and the second electromagnetic coil. It cannot be connected to any position on the side opposite to 50. In this respect, since the cooling structure of the first electromagnetic coil 30 and the second electromagnetic coil 50 is provided, even with such an XY linear actuator 11, the cooling water can be circulated through the constant temperature plate 20 (cooling plate 40).
- the cross-sectional shape of the first electromagnetic coil 30 and the second electromagnetic coil 50 is not limited to an oval shape, but can be changed to a circular shape or a polygonal shape. That is, the shapes of the first electromagnetic coil 30 and the second electromagnetic coil 50 are not limited to the long cylindrical shape, but can be changed to a cylindrical shape or a polygonal cylindrical shape.
- the shape of the flow path 20g of the constant temperature plate 20 and the flow path 20g of the cooling plate 40 can be arbitrarily changed according to the heat generation characteristics of the first electromagnetic coil 30 and the second electromagnetic coil 50. Further, the shapes of the constant temperature plate 20 and the cooling plate 40 can be arbitrarily changed according to the heat generation characteristics of the first electromagnetic coil 30 and the second electromagnetic coil 50.
- the first inlet pipe 22 and the first outlet pipe 27 can be connected to the inlet and outlet of the flow path 20g of the thermostatic plate 20 in the space 32 of the separate first electromagnetic coil 30, respectively. In that case, what is necessary is just to change the position of the inlet_port
- the second inlet pipe 42 and the second outlet pipe 47 can be connected to the inlet and outlet of the flow path 40g of the cooling plate 40 in the space 52 of the different second electromagnetic coil 50, respectively. In that case, what is necessary is just to change the position of the inlet_port
- Only one of the first electromagnetic coil 30 and the second electromagnetic coil 50 may be provided. In that case, the configuration corresponding to the omitted electromagnetic coil may be omitted.
- the constant temperature plate 20 and the cooling plate 40 can be formed of not only alumina but also other ceramics.
- the first inlet pipe 22, the first outlet pipe 27, the second inlet pipe 42, and the second outlet pipe 47 are not limited to titanium but can be formed of other metals.
- the conductor wound body 31 is not limited to a strip-like (film-like) conductor, and can also be constituted by a round wire having a circular cross section, a square wire having a rectangular cross section, or the like.
- the cooling structure of the first electromagnetic coil 30 and the second electromagnetic coil 50 is not limited to the XY linear actuator 11, and electromagnetic waves in which spaces 32 and 52 are formed inside the first electromagnetic coil 30 and the second electromagnetic coil 50. Any actuator can be applied. Further, the present invention can be applied not only to a lithographic apparatus but also to an apparatus including such an electromagnetic actuator.
- SYMBOLS 10 Coil unit, 11 ... XY linear actuator (electromagnetic actuator), 12 ... Table (driven part), 20 ... Constant temperature plate (1st cooling member), 20g ... Flow path, 21 ... Inlet, 22 ... 1st inlet piping 22a ... end, 23 ... metal layer, 24 ... relay pipe, 24a ... end, 25 ... silver brazing, 26 ... outlet, 27 ... first outlet pipe, 27a ... end, 29 ... relay pipe, 29a ... end 30 ... first electromagnetic coil, 30e ... end face, 30f ... end face, 31 ... conductor winding, 32 ... space, 40 ... cooling plate (second cooling member), 40g ... flow path, 41 ...
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- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Motor Or Generator Cooling System (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Transformer Cooling (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
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Abstract
Description
Claims (14)
- 所定軸線方向に延びる空間が内部に形成された電磁コイルと、
前記電磁コイルの前記所定軸線方向の端面に取り付けられ、内部に流体の流路が形成された冷却部材と、
前記空間の内部において前記冷却部材の前記流路の入口及び出口にそれぞれ接続され、前記空間を通じて前記電磁コイルの外部まで延びた入口配管及び出口配管と、
を備えることを特徴とする電磁コイルの冷却構造。 - 所定軸線方向に延びる空間が内部に形成され、前記所定軸線方向を並列にして複数配置された電磁コイルと、
前記複数配置された電磁コイルの前記所定軸線方向の端面に取り付けられ、内部に流体の流路が形成された冷却部材と、
前記複数配置された電磁コイルのうちいずれかの電磁コイルの前記空間の内部において前記冷却部材の前記流路の入口に接続され、前記空間を通じて前記電磁コイルの外部まで延びた入口配管と、
前記複数配置された電磁コイルのうちいずれかの電磁コイルの前記空間の内部において前記冷却部材の前記流路の出口に接続され、前記空間を通じて前記電磁コイルの外部まで延びた出口配管と、
を備えることを特徴とする電磁コイルの冷却構造。 - 前記入口配管及び前記出口配管は、共通の前記電磁コイルの前記空間の内部において前記入口及び前記出口にそれぞれ接続されている請求項2に記載の電磁コイルの冷却構造。
- 所定軸線方向に延びる空間が内部に形成され、前記所定軸線方向を一致させて配置された第1電磁コイル及び第2電磁コイルと、
前記第1電磁コイルの前記所定軸線方向の端面のうち前記第2電磁コイルと反対側の端面に取り付けられ、内部に流体の流路が形成された第1冷却部材と、
前記第1電磁コイルの前記所定軸線方向の端面のうち前記第2電磁コイル側の端面に取り付けられ、且つ前記第2電磁コイルの前記所定軸線方向の端面のうち前記第1電磁コイル側の端面に取り付けられ、内部に流体の流路が形成された第2冷却部材と、
前記第1電磁コイルの前記空間の内部において前記第1冷却部材の前記流路の入口及び出口にそれぞれ接続され、前記第1電磁コイルの前記空間を通じて前記第2冷却部材を貫通し、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第1入口配管及び第1出口配管と、
を備えることを特徴とする電磁コイルの冷却構造。 - 前記第2電磁コイルの前記空間の内部において前記第2冷却部材の前記流路の入口及び出口にそれぞれ接続され、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第2入口配管及び第2出口配管を備える請求項4に記載の電磁コイルの冷却構造。
- 所定軸線方向に延びる空間が内部に形成され、前記所定軸線方向を並列にして複数配置された第1電磁コイルと、
所定軸線方向に延びる空間が内部に形成され、前記第1電磁コイルと前記所定軸線方向を一致させて複数配置された第2電磁コイルと、
前記複数配置された第1電磁コイルの前記所定軸線方向の端面のうち前記第2電磁コイルと反対側の端面に取り付けられ、内部に流体の流路が形成された第1冷却部材と、
前記複数配置された第1電磁コイルの前記所定軸線方向の端面のうち前記第2電磁コイル側の端面に取り付けられ、且つ前記複数配置された第2電磁コイルの前記所定軸線方向の端面のうち前記第1電磁コイル側の端面に取り付けられ、内部に流体の流路が形成された第2冷却部材と、
前記複数配置された第1電磁コイルのうちいずれかの第1電磁コイルの前記空間の内部において前記第1冷却部材の前記流路の入口に接続され、前記第1電磁コイルの前記空間を通じて前記第2冷却部材を貫通し、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第1入口配管と、
前記複数配置された第1電磁コイルのうちいずれかの第1電磁コイルの前記空間の内部において前記第1冷却部材の前記流路の出口に接続され、前記第1電磁コイルの前記空間を通じて前記第2冷却部材を貫通し、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第1出口配管と、
を備えることを特徴とする電磁コイルの冷却構造。 - 前記第1入口配管及び前記第1出口配管は、共通の前記第1電磁コイルの前記空間の内部において前記入口及び前記出口にそれぞれ接続されている請求項6に記載の電磁コイルの冷却構造。
- 前記複数配置された第2電磁コイルのうちいずれかの第2電磁コイルの前記空間の内部において前記第2冷却部材の前記流路の入口に接続され、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第2入口配管と、
前記複数配置された第2電磁コイルのうちいずれかの第2電磁コイルの前記空間の内部において前記第2冷却部材の前記流路の出口に接続され、前記第2電磁コイルの前記空間を通じて前記第2電磁コイルの外部まで延びた第2出口配管と、
を備える請求項6又は7に記載の電磁コイルの冷却構造。 - 前記第2入口配管及び前記第2出口配管は、共通の前記第2電磁コイルの前記空間の内部において前記入口及び前記出口にそれぞれ接続されている請求項8に記載の電磁コイルの冷却構造。
- 前記配管において前記冷却部材と反対側の端部の外周には、第1シール部材を介して中継管が接続されており、
前記中継管において前記冷却部材と反対側の端部の外周は、第2シール部材を介して支持されている請求項1~9のいずれか1項に記載の電磁コイルの冷却構造。 - 前記冷却部材はアルミナにより形成されており、
前記配管はチタンにより形成されており、
前記冷却部材の表面に拡散形成された金属層を介して、前記冷却部材に前記配管が銀ろうにより接続されている請求項1~10のいずれか1項に記載の電磁コイルの冷却構造。 - 前記電磁コイルは、前記所定軸線の周りに複数回巻かれた帯状の導体により形成された導体巻体を備え、
前記冷却部材は、前記導体巻体の前記所定軸線方向の端面に取り付けられている請求項1~11のいずれか1項に記載の電磁コイルの冷却構造。 - 請求項1~12のいずれか1項に記載の電磁コイルの冷却構造を備えることを特徴とする電磁アクチュエータ。
- 前記冷却部材に対して前記電磁コイルと反対側に配置され、前記電磁コイルに発生する磁束に基づいて前記冷却部材に沿って二次元に駆動される被駆動部を備える請求項13に記載の電磁アクチュエータ。
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US15/061,857 US10043609B2 (en) | 2013-09-04 | 2016-03-04 | Cooling structure for electromagnetic coil, and electromagnetic actuator |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019505819A (ja) * | 2016-02-26 | 2019-02-28 | エフ.ホフマン−ラ ロシュ アーゲーF. Hoffmann−La Roche Aktiengesellschaft | 実験用試料分配システムのための輸送装置ユニット |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6352791B2 (ja) | 2014-12-11 | 2018-07-04 | Ckd株式会社 | コイル用シート、コイル、及びコイルの製造方法 |
JP6247629B2 (ja) | 2014-12-11 | 2017-12-13 | Ckd株式会社 | コイル用シートの製造方法、及びコイルの製造方法 |
JP2022500991A (ja) * | 2018-09-19 | 2022-01-04 | ハイパーループ テクノロジーズ インコーポレーテッドHyperloop Technologies, Inc. | 単極線形同期機 |
KR102379538B1 (ko) * | 2020-07-07 | 2022-03-28 | 재단법인 한국마이크로의료로봇연구원 | 마이크로 로봇 이동제어를 위한 베드 통합형 전자기장 장치 및 이를 이용한 마이크로 로봇 구동 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61125006U (ja) * | 1985-01-25 | 1986-08-06 | ||
JPH0422181B2 (ja) | 1984-08-13 | 1992-04-15 | Toshiba Silicone | |
JP4022181B2 (ja) * | 2002-06-12 | 2007-12-12 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフ装置 |
Family Cites Families (44)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56147413A (en) | 1980-04-18 | 1981-11-16 | Hitachi Ltd | Resin molded coil |
CN85201396U (zh) | 1985-04-06 | 1986-01-22 | 浙江瑞安永久机电研究所 | 液冷线圈电磁阀 |
US4746425A (en) | 1986-08-27 | 1988-05-24 | Ray E. Stickler | Cooling system for electromagnetic water treating device |
JPS63220734A (ja) | 1987-03-09 | 1988-09-14 | Sony Chem Corp | フラツトコイル |
JPH0682056B2 (ja) | 1987-07-13 | 1994-10-19 | 株式会社日立製作所 | 流量計用抵抗素子 |
JPH01100901A (ja) | 1987-10-14 | 1989-04-19 | Hitachi Ltd | セラミツクス系超電導電磁石及びその製造法 |
US4864262A (en) | 1988-08-12 | 1989-09-05 | Westinghouse Electric Corp. | Undervoltage trip device |
US4848262A (en) | 1988-08-25 | 1989-07-18 | The United States Of America As Represented By The Secretary Of The Navy | Pressure sensitive release device |
JP2780380B2 (ja) | 1989-09-26 | 1998-07-30 | 東レ株式会社 | 複合金属積層シートおよびその使用方法 |
US5008549A (en) | 1990-04-10 | 1991-04-16 | Orchid One Corporation | High performance, vacuum compatible electromagnetic lens coil |
JPH05315178A (ja) | 1992-05-13 | 1993-11-26 | Sankyo Seiki Mfg Co Ltd | 薄型コイルの製造法 |
JPH06325630A (ja) | 1993-05-17 | 1994-11-25 | Hitachi Ltd | 酸化物超電導線材及び超電導装置 |
US5525583A (en) | 1994-01-24 | 1996-06-11 | American Superconductor Corporation | Superconducting magnetic coil |
JPH07330905A (ja) | 1994-06-10 | 1995-12-19 | Shin Etsu Chem Co Ltd | 低分子シロキサンを極く少量しか含まないオルガノポリシロキサンオイルの製造方法 |
TW348256B (en) | 1996-05-15 | 1998-12-21 | Taiyo Yuden Kk | Coil type electronic parts and its manufacturing method |
US6144280A (en) | 1996-11-29 | 2000-11-07 | Taiyo Yuden Co., Ltd. | Wire wound electronic component and method of manufacturing the same |
JP3638404B2 (ja) | 1997-06-03 | 2005-04-13 | 信越化学工業株式会社 | フレキシブル印刷配線用基板 |
JPH1187871A (ja) | 1997-09-08 | 1999-03-30 | Alps Electric Co Ltd | 回路基板と薄型電源装置 |
JP2000232016A (ja) | 1999-02-10 | 2000-08-22 | Nissin Kohki Co Ltd | 磁気印加装置及びその製造方法 |
JP2001305750A (ja) | 2000-04-18 | 2001-11-02 | Toray Eng Co Ltd | ポリイミドフィルムのエッチング方法 |
US6331810B1 (en) | 2000-09-01 | 2001-12-18 | Hyung Jung | Magnetic lifting apparatus |
JP2002367834A (ja) | 2001-06-06 | 2002-12-20 | Matsushita Electric Ind Co Ltd | 乾式絶縁電磁コイル |
JP3978656B2 (ja) | 2001-11-01 | 2007-09-19 | 荒川化学工業株式会社 | 金属箔積層体および両面金属箔積層体 |
US7325974B2 (en) | 2001-09-18 | 2008-02-05 | Nsk Ltd. | Pulley rotation support apparatus |
WO2003037620A1 (fr) | 2001-11-01 | 2003-05-08 | Arakawa Chemical Industries, Ltd. | Produits multicouche a base de polyimide-metal et produit multicouche a base de polyamideimide-metal |
JP2004342755A (ja) | 2003-05-14 | 2004-12-02 | Shinko Electric Ind Co Ltd | 平面コイルの製造方法 |
US6972655B2 (en) | 2003-08-04 | 2005-12-06 | Lockheed Martin Corporation | Construction for cooled solenoid |
JP4088837B2 (ja) | 2003-12-17 | 2008-05-21 | 荒川化学工業株式会社 | 接着剤組成物、接着剤硬化物、接着シート及び積層体 |
KR100684985B1 (ko) | 2004-07-30 | 2007-02-20 | 한국화학연구원 | 자가조형성 퍼머제 |
JP2006216650A (ja) | 2005-02-02 | 2006-08-17 | Sumida Corporation | 磁性素子および磁性素子の製造方法 |
CN101310430A (zh) | 2005-11-18 | 2008-11-19 | 皇家飞利浦电子股份有限公司 | 具有带状线圈的线性可变磁阻致动器 |
DE102006033174A1 (de) | 2006-07-18 | 2008-01-31 | Robert Bosch Gmbh | Spulenanordnung mit einem Spulenträger eines elektromagnetischen Antriebs |
KR20080064217A (ko) | 2007-01-04 | 2008-07-09 | 송길봉 | 솔레노이드 |
EP2352221B1 (en) * | 2008-10-23 | 2018-05-23 | Sodick Co., Ltd. | Linear motor coil assembly comprising cooling device |
KR101114995B1 (ko) | 2010-04-16 | 2012-03-06 | 제룡전기 주식회사 | 열배출수단을 이용한 콤팩트 변압기 |
US20120062866A1 (en) * | 2010-09-03 | 2012-03-15 | Nikon Corporation | Microchannel-cooled coils of electromagnetic actuators exhibiting reduced eddy-current drag |
JP2012204440A (ja) | 2011-03-24 | 2012-10-22 | Nitto Denko Corp | 無線電力伝送用磁気素子及びその製造方法 |
JP2013012645A (ja) | 2011-06-30 | 2013-01-17 | Fujikura Ltd | 酸化物超電導コイル及び超電導機器 |
US20130069449A1 (en) * | 2011-09-15 | 2013-03-21 | Nikon Corporation | Modular coil arrays for planar and linear motors |
US20130069478A1 (en) | 2011-09-20 | 2013-03-21 | Colin Hamer | Electrical machine with winding conductor having ceramic insulation |
JP2013161939A (ja) | 2012-02-03 | 2013-08-19 | Ibiden Co Ltd | シート材、シート材の製造方法、インダクタ部品、配線板及び磁性材料 |
JP2013229211A (ja) | 2012-04-26 | 2013-11-07 | Panasonic Corp | プラズマ処理装置及び方法 |
ES2523424B1 (es) * | 2013-05-22 | 2015-11-02 | Acciona Windpower, S.A. | Estator de generador eléctrico rotativo, generador eléctrico rotativo que comprende dicho estator y turbina eólica que incorpora dicho generador eléctrico rotativo |
JP5998110B2 (ja) | 2013-08-02 | 2016-09-28 | Ckd株式会社 | 電磁コイル、電磁コイルの製造方法、及び電磁アクチュエータ |
-
2013
- 2013-09-04 JP JP2013182810A patent/JP6360288B2/ja active Active
-
2014
- 2014-09-04 EP EP14843006.9A patent/EP3041006B1/en active Active
- 2014-09-04 CN CN201480049039.0A patent/CN105659339A/zh active Pending
- 2014-09-04 KR KR1020167008203A patent/KR20160050050A/ko not_active Application Discontinuation
- 2014-09-04 WO PCT/JP2014/073299 patent/WO2015033992A1/ja active Application Filing
-
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- 2016-03-04 US US15/061,857 patent/US10043609B2/en active Active
- 2016-09-05 HK HK16110521.9A patent/HK1222471A1/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0422181B2 (ja) | 1984-08-13 | 1992-04-15 | Toshiba Silicone | |
JPS61125006U (ja) * | 1985-01-25 | 1986-08-06 | ||
JP4022181B2 (ja) * | 2002-06-12 | 2007-12-12 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフ装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP3041006A4 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019505819A (ja) * | 2016-02-26 | 2019-02-28 | エフ.ホフマン−ラ ロシュ アーゲーF. Hoffmann−La Roche Aktiengesellschaft | 実験用試料分配システムのための輸送装置ユニット |
US10578632B2 (en) | 2016-02-26 | 2020-03-03 | Roche Diagnostics Operations, Inc. | Transport device unit for a laboratory sample distribution system |
US10948508B2 (en) | 2016-02-26 | 2021-03-16 | Roche Diagnostics Operations, Inc. | Transport device unit for a laboratory sample distribution system |
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JP6360288B2 (ja) | 2018-07-18 |
EP3041006B1 (en) | 2019-01-30 |
EP3041006A4 (en) | 2017-05-17 |
US20160189845A1 (en) | 2016-06-30 |
US10043609B2 (en) | 2018-08-07 |
KR20160050050A (ko) | 2016-05-10 |
JP2015050405A (ja) | 2015-03-16 |
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