WO2015006989A1 - Appareil de correction de position d'objet - Google Patents

Appareil de correction de position d'objet Download PDF

Info

Publication number
WO2015006989A1
WO2015006989A1 PCT/CN2013/079859 CN2013079859W WO2015006989A1 WO 2015006989 A1 WO2015006989 A1 WO 2015006989A1 CN 2013079859 W CN2013079859 W CN 2013079859W WO 2015006989 A1 WO2015006989 A1 WO 2015006989A1
Authority
WO
WIPO (PCT)
Prior art keywords
arm
correcting device
position correcting
bending
clamp
Prior art date
Application number
PCT/CN2013/079859
Other languages
English (en)
Chinese (zh)
Inventor
杨国坤
林昆贤
齐明虎
陈增宏
汪永强
舒志优
李晨阳子
杨卫兵
蒋运芍
Original Assignee
深圳市华星光电技术有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Publication of WO2015006989A1 publication Critical patent/WO2015006989A1/fr

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2225/00—Transporting hot glass sheets during their manufacture
    • C03B2225/02—Means for positioning, aligning or orientating the sheets during their travel, e.g. stops

Definitions

  • the invention relates to the field of object handling and storage, and in particular to an object position correcting device.
  • the position of the object may deviate from the predetermined position, so in order to make the object in automatic handling Or the position during storage is relatively fixed, and the position of the object needs to be corrected.
  • a conventional automated handling system requires that a cassette containing a liquid crystal panel or substrate be transported from a machine of the previous process to a device of the next process.
  • the positioning of the cassette tends to be biased, so the position correction of the cassette is required to prevent the cassette from being in the predetermined position, thereby making the card I have not been caught or fixed.
  • the conventional cassette position correcting device 100 is shown in FIG. 1.
  • the conventional cassette position correcting device 100 includes a cylinder 101, a support plate 102, and two contact members 103.
  • the cylinder 101 is connected to the support plate 102 for use.
  • the support plate 102 is moved in a straight line, and the two contact members 103 are disposed on the support plate 102 for contacting the cassette 200 and performing position correction on the cassette 200.
  • the two contact members 103 are provided. There is a certain distance between the intervals.
  • the conventional cassette position correcting device 100 operates in such a manner that before the cassette 200 is corrected, the two cassette position correcting devices 100 are set in a facing state and are located at the cassette positioning point. Nearby, the two contact members 103 of the cassette position correcting device 100 are aligned with an edge of the cassette 200, as shown in FIG. When the cassette 200 is corrected, the cylinder 101 is returned from the original extended state, that is, toward the center in the diagonal direction of the cassette 200. Finally, the two contact members 103 of the cassette position correcting device 100 are Two adjacent planes of one edge of the cassette 200 are in contact with each other, and the two contact members 103 sandwich the edge to correct the position of the cassette 200, as shown in FIG.
  • the position of the cassette 200 is deviated, or the position of the cassette 200 is caused by the mechanical positioning error. deviation.
  • the conventional cassette position correcting device 100 may be invalid, that is, the position of the cassette 200 cannot be corrected, and the cassette 200 is directly prevented from being abnormal. Unloading and loading, even unable to carry it properly, etc.
  • An object of the present invention is to provide an object position correcting device which can prevent occurrence of a situation in which a three-dimensional object cannot be corrected due to a large deviation of an initial position of a three-dimensional object.
  • An object position correcting device comprising: a support table; a translating member for translating according to a predetermined path, wherein the translating member is fixed to the support table; and a pincer member, wherein the pliers a member placed on the support table, the clamp member for correcting a position of the three-dimensional object; the clamp member comprising: a first clamp arm; a second clamp arm; and a first rotation axis Wherein the first clamping arm and the second clamping arm are disposed in a cross shape, and the intersection of the first clamping arm and the second clamping arm is movably connected by the first rotating shaft; A movable connecting portion is disposed on the support table, and the clamp member is connected to the movable connecting portion.
  • the pincer member further includes: a one-piece control member, wherein the tension control member and the first end of the first clamp arm and the second clamp arm a two-end movable connection, the tensioning control member is for controlling the tensioning of the first clamping arm and the second clamping arm; a second rotating shaft; and a third rotating shaft; wherein the tensioning The control member is movably coupled to the first end by the second rotating shaft, and the tensioning control member is movably coupled to the second end by the third rotating shaft.
  • the tension control member is a bending lever
  • the bending lever includes: a first bending arm; and a second bending arm; wherein the first bending An arm is movably coupled to the second bending arm, the first bending arm is movably coupled to the first end by the second rotating shaft, and the second bending arm passes through the third rotating shaft The second end is movably connected.
  • An object position correcting device comprising: a support table; a translating member for translating according to a predetermined path, wherein the translating member is fixed to the support table; and a pincer member, wherein the pliers A member is placed on the support table, and the pinch member is used to correct the position of the three-dimensional object.
  • the clamp member includes: a first clamp arm; a second clamp arm; and a first rotation shaft; wherein the first clamp arm and the second clamp arm are disposed In a cross shape, the intersection of the first clamping arm and the second clamping arm is movably connected by the first rotating shaft.
  • the intersection is disposed away from the third end and the fourth end, and is adjacent to a portion near the first end and the second end.
  • the pincer member further includes: a one-piece control member, wherein the tension control member and the first end of the first clamp arm and the second clamp arm The two ends are movably connected, and the tensioning control member is for controlling the engagement of the first clamping arm and the second clamping arm.
  • the pincer member further includes: a second rotating shaft; and a third rotating shaft; wherein the tensioning control member passes the second rotating shaft and the first end
  • the movable connection is movably connected to the second end by the third rotating shaft.
  • the tension control member is a bending lever
  • the bending lever includes: a first bending arm; and a second bending arm; wherein the first bending An arm is movably coupled to the second bending arm, the first bending arm is movably coupled to the first end by the second rotating shaft, and the second bending arm passes through the third rotating shaft The second end is movably connected.
  • the bending lever further includes: a biasing arm, wherein the first bending arm and the second bending arm are movably connected to the force applying arm.
  • the tension control member is a telescopic rod
  • the telescopic rod has an elongated shape, and both ends of the telescopic rod respectively correspond to the first end of the first clamp arm
  • the second end of the second clamp arm is movably coupled.
  • the telescopic rod includes: two studs, wherein the studs are movably connected to the first end and the second end respectively; a screw, wherein the screw The post and the stud are nested together.
  • the first clamp arm further includes a third end, and the second clamp arm further includes a fourth end;
  • the clamp member further includes: a first movable contact member for The three-dimensional object is in active contact; and a second movable contact is for active contact with the three-dimensional object; wherein the first movable contact is disposed on the third end, the second movable contact Provided on the fourth end.
  • the first movable contact is a first pulley and the second movable contact is a second pulley.
  • the plane in which the first pulley and the second pulley are located is parallel to a horizontal plane.
  • the plane in which the first pulley and the second pulley are located and the horizontal mask have an angle of less than ninety degrees.
  • the support table is provided with a movable connecting portion, and the clamp member is connected to the movable connecting portion.
  • the movable connecting portion is a groove;
  • the pincer member further includes: a sliding member, wherein a part of the sliding member is fixed to the clamp member, and the other portion is disposed In the groove.
  • the pincer member further includes: a spring, wherein the spring is coupled to the first clip arm and the second clip arm, and the spring is used to make the first The clamp arm and the second clamp arm have an elastic or closed elasticity that is open.
  • the article position correcting device includes at least two of the pincer members; wherein, in the vertical direction, at least two of the pincer members are disposed together in a linear array.
  • the embodiment of the present invention utilizes the clamp member to positionally correct the three-dimensional object. Therefore, even if the initial position of the three-dimensional object has a large deviation, the three-dimensional object is still in the implementation of the present invention. In the receiving range of the object position correcting device of the example, the occurrence of a situation in which the stereoscopic object cannot be corrected is prevented.
  • Figure 1 is an isometric view of a conventional click position correcting device
  • FIGS. 2 and 3 are schematic views showing the operation of the conventional cassette position correcting device
  • Figure 4 is a schematic view showing the failure of the conventional cassette position correcting device
  • Figure 5 is an isometric view of an object position correcting device according to an embodiment of the present invention.
  • FIG 6 and 7 are schematic views showing the operation of the object position correcting device according to the embodiment of the present invention.
  • FIG. 5 is an isometric view of an object position correcting device 500 according to an embodiment of the present invention.
  • the object position correcting device 500 of the embodiment of the present invention includes a support table 502, a translating member 501, and a pincer member.
  • the support table 502 is for placing the clamp member;
  • the translation member 501 is for translating according to a predetermined path, the translation member 501 is fixed with the support table 502;
  • the clamp member is used to correct the position of the three-dimensional object 200 (for example, a cassette).
  • the pinch member includes a first clamping arm 503, a second clamping arm 504 and a first rotating shaft 505.
  • the first clamp arm 503 has a first end 5031 and a third end 5032
  • the second clamp arm 504 has a second end 5041 and a fourth end 5042.
  • the first clamping arm 503 and the second clamping arm 504 are disposed in a cross shape, and the intersection of the first clamping arm 503 and the second clamping arm 504 is movably connected by the first rotating shaft 505.
  • the first clamping arm 503 and the second clamping arm 504 of the clamp member can be opened and closed by the first rotating shaft 505.
  • the manner in which the clamp member corrects the position of the three-dimensional object 200 is: first, the first clamp arm 503 and the second clamp arm 504 are in an open state, as shown in FIG.
  • the object position correcting device 500 of the embodiment of the present invention has a larger range for receiving the three-dimensional object 200; then, the object position correcting device 500 of the embodiment of the present invention approaches the three-dimensional object 200 through the translating member 501 until a predetermined distance from the three-dimensional object 200; finally, the first clamping arm 503 and the second clamping arm 504 are closed, such that the third end 5032 of the first clamping arm 503 and the second clamping arm The fourth end 5042 of the 504 is in contact with the three-dimensional object 200, thereby correcting the position of the three-dimensional object 200.
  • the three-dimensional object 200 is still in the receiving range of the object position correcting device 500 of the embodiment of the present invention, preventing the three-dimensional object 200 from being corrected. The emergence of the situation.
  • the intersection of the first clamping arm 503 and the second clamping arm 504 (the first rotating shaft 505) The location is located away from the third end 5032 and the fourth end 5042, adjacent to a portion near the first end 5031 and the second end 5041.
  • the clamp member further includes a single control. a piece 506, the tensioning control member 506 is movably coupled to the first end 5031 of the first clamping arm 503 and the second end 5041 of the second clamping arm 504, and the tensioning control member 506 is used to control the The first clamping arm 503 is in tension with the second clamping arm 504.
  • the clamp member further includes a second rotation shaft 5033 and a third rotation shaft (not shown), and the second rotation shaft 5033 is disposed at the first end 5031 of the first clamp arm 503.
  • the third rotating shaft is disposed at the second end 5041 of the second clamping arm 504.
  • the tensioning control member 506 is movably coupled to the first end 5031 by the second rotating shaft 5033, and the tensioning control member 506 is movably coupled to the second end 5041 by the third rotating shaft.
  • the tension control member 500 is a bending rod
  • the bending rod includes a first bending arm 5061, a second bending arm 5062, and a Force arm 5063.
  • the first bending arm 5061 and the second bending arm 5062 are movably connected to the urging arm 5063, that is, one end of the first bending arm 5061 and the second bending arm 5062 are
  • the other end of the first bending arm 5061 is movably connected to the first end 5031 through the second rotating shaft 5033, and the other end of the second bending arm 5062 is movably connected to the urging arm 5063.
  • the second end 5041 is movably connected by the third rotating shaft. Controlling the distance between the first end 5031 and the second end 5041 by applying a thrust or pulling force to the force applying arm 5063 in a predetermined direction, thereby controlling the first clamping arm 503 and the second clamping
  • the arms 504 are opened and closed.
  • the tensioning control member 506 is a telescopic rod, the telescopic rod is elongated, and the two ends of the telescopic rod are respectively connected with the first end of the first clamping arm 503.
  • the second end 5041 of the second clamping arm 504 is movably coupled to the body of the second clamping arm 504, and the body portion of the telescopic rod is disposed to be telescopic.
  • the rod body of the telescopic rod is provided in two parts, one part is a stud with a thread on the outer surface of the column body, and the other part is a threaded screw tube inside the tube body, and the stud or the screw tube is set to be Rotating, the stud is sleeved with the solenoid, and the distance between the first end 5031 and the second end 5041 is controlled by twisting the stud or the screw, thereby realizing The opening and closing of the first clamp arm 503 and the second clamp arm 504 are controlled.
  • the rod body of the telescopic rod is disposed in three parts, wherein both parts are studs, and the third part is a screw or a nut, and the two studs respectively and the first end 5031 of the first clamping arm 503
  • the second end 5041 of the second clamping arm 504 is movably connected, and the nut or the nut is sleeved with the two studs, and the screw is controlled by screwing the nut or the nut.
  • the distance between an end 5031 and the second end 5041 thereby controlling the opening and closing of the first clamp arm 503 and the second clamp arm 504.
  • the pincer member further includes a first movable contact and a second movable contact.
  • the first movable contact and the second movable contact are both for moving contact with the three-dimensional object 200; the first movable contact is disposed on the third end 5032, the second movable contact A piece is disposed on the fourth end 5042.
  • the first movable contact is a first pulley 507
  • the second movable contact is a second pulley 508.
  • the first pulley 507 and the second pulley 508 are placed flat or inclined, that is, the plane in which the first pulley 507 and the second pulley 508 are located is parallel to the horizontal plane or has less than ninety degrees with the horizontal mask. Angle.
  • a fourth rotation axis of the first pulley 507 and a fifth rotation axis of the second pulley 508 are respectively fixed at a third end 5032 of the first clamp arm 503 and a fourth end of the second clamp arm 504 At the end 5042.
  • the article position correcting device 500 of the embodiment of the invention can guide the three-dimensional object 200 into its receiving range, and further, since it is in contact with the three-dimensional object 200 through the first pulley 507 and the second pulley 508,
  • the first clamp arm 503 and the second clamp arm 504 do not cause scratches or the like on the three-dimensional object 200.
  • the support base 502 is provided with a movable connecting portion, and the clamp member is connected to the movable connecting portion, and the movable connecting portion is A groove 5021.
  • the clamp member further includes a sliding member (not shown), the sliding member is disposed at a bottom of the clamp member, and a portion of the sliding member is fixed to the clamp member, for example, The slider is fixed to one end of the first rotating shaft 505, and the other portion is placed in the recess 5021.
  • the clamp member may be linearly moved along the groove 5021 by the sliding member, that is, the clamp member may be adjacent to the three-dimensional object 200 along the groove 5021 or away from the three-dimensional object 200. .
  • the pincer member further includes a spring 509 connected to the first clip arm 503 and the second clip arm 504, the spring 509 For making the first clamping arm 503 and the second clamping arm 504 have an elastic or closed elasticity, which is advantageous for keeping the first clamping arm 503 and the second clamping arm 504 outward Inertia (trend) that opens or closes inward.
  • the translating member is a cylinder 501 (the piston of the cylinder is not shown).
  • the object position correcting device 500 and the edge of the embodiment of the present invention there is only one contact point, which is disadvantageous in making the position of the three-dimensional object 200 more stable, that is, it is disadvantageous for the corrected three-dimensional object 200 to maintain the same position for a long time.
  • the object position correcting device 500 of the embodiment of the present invention has more contact points with the edge of the three-dimensional object 200, which is advantageous for making the three-dimensional object 200 stable (long time unchanged) ) is in the corrected position.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)

Abstract

L'invention concerne un appareil de correction de position d'objet (500), comprenant : une table de support (502) ; un élément de translation (501) permettant une translation le long d'un chemin préétabli, l'élément de translation (501) étant fixé à la table de support (502) ; et un élément en forme de pince agencé sur la table de support (502), permettant de corriger la position d'un objet tridimensionnel. L'appareil de correction de position d'objet (500) est capable d'empêcher l'apparition du cas où un objet tridimensionnel ne peut pas être corrigé en raison d'un écart relativement important de la position d'origine de l'objet tridimensionnel.
PCT/CN2013/079859 2013-07-19 2013-07-23 Appareil de correction de position d'objet WO2015006989A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310305614.6A CN103350886B (zh) 2013-07-19 2013-07-19 物件位置校正装置
CN201310305614.6 2013-07-19

Publications (1)

Publication Number Publication Date
WO2015006989A1 true WO2015006989A1 (fr) 2015-01-22

Family

ID=49307336

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN2013/079859 WO2015006989A1 (fr) 2013-07-19 2013-07-23 Appareil de correction de position d'objet

Country Status (2)

Country Link
CN (1) CN103350886B (fr)
WO (1) WO2015006989A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019081317A1 (fr) * 2017-10-27 2019-05-02 Saint-Gobain Glass France Moyen d'immobilisation d'une vitre

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104444323A (zh) * 2014-11-26 2015-03-25 山东同力达智能机械有限公司 曲柄式对中夹紧装置
CN104891083B (zh) * 2015-05-19 2017-07-21 深圳市华星光电技术有限公司 一种用于自动化仓库的货架
CN105129406A (zh) * 2015-07-16 2015-12-09 佛山市普拉迪数控科技有限公司 一种生产线上的自动定位机构
CN105129381B (zh) * 2015-09-17 2017-05-10 安徽工程大学 一种小型输送线缓存模块的运输工装固定装置
CN107892175B (zh) * 2017-12-22 2023-08-01 深圳市德胜医疗设备有限公司 血袋软管快速装夹转移装置
CN109703971A (zh) * 2019-02-19 2019-05-03 中国矿业大学 一种复合地板输送走向自动校正装置
CN112340470A (zh) * 2019-08-07 2021-02-09 腾升科技股份有限公司 直立单元体的整列机
CN110562680B (zh) * 2019-08-12 2020-12-18 华晓精密工业(苏州)有限公司 一种校正机构及具有其的泊靠定位装置
CN112133661B (zh) * 2020-09-18 2024-03-26 北京北方华创微电子装备有限公司 晶圆位置校正装置及半导体工艺设备
CN113703377B (zh) * 2021-10-28 2022-02-18 北京惠朗时代科技有限公司 一种校正系统

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311079A1 (de) * 1983-03-26 1984-09-27 Feldpausch GmbH & Co KG, 5880 Lüdenscheid Werkstueckordnungsvorrichtung
CN2318006Y (zh) * 1998-04-09 1999-05-12 孙竹平 一种卷筒机用机械手
CN1739923A (zh) * 2005-09-23 2006-03-01 清华大学 超高真空化学气相淀积外延系统的张合式取放片机械手
CN2844117Y (zh) * 2005-07-28 2006-12-06 彩虹集团电子股份有限公司 显像管玻壳用取锥器
JP2007054914A (ja) * 2005-08-24 2007-03-08 Mitsui High Tec Inc ハンドリング治具
CN201692033U (zh) * 2010-04-30 2011-01-05 浙江大学 一种颞颌关节脱位牵引复位器
CN102059543A (zh) * 2009-11-13 2011-05-18 上海龙能自动化设备有限公司 一种安全带锁头按钮的弹簧片装配机

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4502127B2 (ja) * 2005-04-01 2010-07-14 株式会社ダイフク カセット保管及び被処理板の処理設備
CN101112933B (zh) * 2006-07-26 2011-06-08 富士迈半导体精密工业（上海）有限公司 卡匣转向传送装置
WO2010134492A1 (fr) * 2009-05-20 2010-11-25 シャープ株式会社 Cassette
JP5501688B2 (ja) * 2009-07-30 2014-05-28 東京エレクトロン株式会社 基板位置合わせ機構、それを用いた真空予備室および基板処理システム
CN102126612B (zh) * 2011-01-18 2013-05-22 东莞宏威数码机械有限公司 位置校正装置
CN202186729U (zh) * 2011-08-02 2012-04-11 珠海华尚汽车玻璃工业有限公司 一种玻璃上片定位装置
CN102386120A (zh) * 2011-09-07 2012-03-21 友达光电股份有限公司 一种卡匣校正机构

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3311079A1 (de) * 1983-03-26 1984-09-27 Feldpausch GmbH & Co KG, 5880 Lüdenscheid Werkstueckordnungsvorrichtung
CN2318006Y (zh) * 1998-04-09 1999-05-12 孙竹平 一种卷筒机用机械手
CN2844117Y (zh) * 2005-07-28 2006-12-06 彩虹集团电子股份有限公司 显像管玻壳用取锥器
JP2007054914A (ja) * 2005-08-24 2007-03-08 Mitsui High Tec Inc ハンドリング治具
CN1739923A (zh) * 2005-09-23 2006-03-01 清华大学 超高真空化学气相淀积外延系统的张合式取放片机械手
CN102059543A (zh) * 2009-11-13 2011-05-18 上海龙能自动化设备有限公司 一种安全带锁头按钮的弹簧片装配机
CN201692033U (zh) * 2010-04-30 2011-01-05 浙江大学 一种颞颌关节脱位牵引复位器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019081317A1 (fr) * 2017-10-27 2019-05-02 Saint-Gobain Glass France Moyen d'immobilisation d'une vitre

Also Published As

Publication number Publication date
CN103350886B (zh) 2015-06-17
CN103350886A (zh) 2013-10-16

Similar Documents

Publication Publication Date Title
WO2015006989A1 (fr) Appareil de correction de position d'objet
CN104108605B (zh) 一种玻璃基板的取放装置
CN205231191U (zh) 一种柔性的电池夹爪
US8505991B2 (en) Conveying device and vacuum apparatus
CN105563474B (zh) 夹爪机构
US8702142B2 (en) Apparatus and method for handling a substrate
US20120288347A1 (en) Conveying device and vacuum apparatus
TW201119913A (en) Position-deviation prevention device, substrate holder including this, substrate conveying device, and substrate conveying method
US20170084472A1 (en) Manipulator
US20200079071A1 (en) Polarizer attachment device and polarizer pre-alignment device
WO1996042108A1 (fr) Dispositif de transport de substrat
WO2014043907A1 (fr) Appareil de support et dispositif de stockage de cassette de substrat en verre
KR20200125397A (ko) 얼라인먼트 장치, 성막 장치, 얼라인먼트 방법, 성막 방법 및 전자 디바이스의 제조 방법
US20170106391A1 (en) Clamping apparatus and method of manufacturing a mask using the same
JP2002018753A (ja) ウエハーハンドリングロボットのティーチング装置および方法
KR20200049314A (ko) 흡착 및 얼라인먼트 방법, 흡착 시스템, 성막 방법, 성막 장치 및 전자 디바이스의 제조 방법
CN104609183A (zh) 一种搬送装置及移动系统
KR20200017790A (ko) 웨이퍼 정렬 장치 및 방법
KR101395570B1 (ko) 기판공급장치
CN209953103U (zh) 基板处理设备及上料机台
CN208614821U (zh) 夹持机构及具有其的机器人
JP3135359U (ja) ハンドリング装置
US20200180144A1 (en) Measuring apparatus and substrate measuring method
CN112249685B (zh) 进行基板快速交互搬送的机构及其搬送方法
KR20180119272A (ko) 반도체패키지용 자재정렬장치

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 13889609

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 13889609

Country of ref document: EP

Kind code of ref document: A1