WO2015002690A1 - Methods and apparatuses for mitigating tin whisker growth on tin and tin-plated surfaces by doping tin with germanium - Google Patents

Methods and apparatuses for mitigating tin whisker growth on tin and tin-plated surfaces by doping tin with germanium Download PDF

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Publication number
WO2015002690A1
WO2015002690A1 PCT/US2014/035815 US2014035815W WO2015002690A1 WO 2015002690 A1 WO2015002690 A1 WO 2015002690A1 US 2014035815 W US2014035815 W US 2014035815W WO 2015002690 A1 WO2015002690 A1 WO 2015002690A1
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Prior art keywords
germanium
tin
amount
solution
containing compound
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Ceased
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PCT/US2014/035815
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English (en)
French (fr)
Inventor
Thomas A. Woodrow
Jean A. Nielsen
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Boeing Co
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Boeing Co
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Priority to EP14726494.9A priority Critical patent/EP3017091B1/en
Priority to CN201480037944.4A priority patent/CN105392927A/zh
Priority to JP2016523733A priority patent/JP6453321B2/ja
Priority to CN202010757612.0A priority patent/CN111876805B/zh
Publication of WO2015002690A1 publication Critical patent/WO2015002690A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/30Electroplating: Baths therefor from solutions of tin
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00Layered products comprising a layer of metal
    • B32B15/01Layered products comprising a layer of metal all layers being exclusively metallic
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/60Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of tin
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/54Electroplating of non-metallic surfaces
    • C25D5/56Electroplating of non-metallic surfaces of plastics
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/50Properties of the layers or laminate having particular mechanical properties
    • B32B2307/538Roughness
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12708Sn-base component
    • Y10T428/12715Next to Group IB metal-base component

Definitions

  • the present disclosure generally relates to the field of tin electroplating. More specifically, the present disclosure relates to methods for mitigating tin whisker formation on tin-plated films and tin-plated surfaces by doping the tin with germanium
  • the present disclosure relates to a method for mitigating tin whisker growth on a substrate surface.
  • a germanium-containing compound is dissolved to make a germanium-containing solution.
  • Water and a complexing agent are then added to the germanium-containing solution.
  • a water-soluble tin-containing compound is then added to the germanium-containing solution.
  • An optional surfactant/leveling agent may be added before or after the tin-containing compound is added to the germanium-containing solution.
  • Electrodes are immersed into the solution with the electrodes connected to an electrical power source capable of providing an electrical current. The power source is activated to provide the electrical current to the solution resulting in an amount of germanium and tin co-deposited onto the cathodic substrate surface.
  • the cathodic substrate surface comprises copper, a commonly used material for electronic components such as, for example, leads.
  • the germanium and tin are co-deposited onto the substrate surface to a thickness from about 1 to about 10 microns, with an amount of from about 0.5 to about 5 weight percent by weight germanium and 99.5 to about 95% be weight tin co-deposited on the substrate surface.
  • the germanium-containing compound is selected from the group including germanium dioxide, or other germanium-containing compound that can be solubilized into aqueous solutions, preferably alkaline solutions.
  • germanium dioxide is dissolved in a sodium hydroxide solution.
  • the germanium-containing compound is provided to the solution directly as a salt, such as germanium fluoroborate, or other water-soluble germanium salt, and combinations thereof.
  • the tin-containing compound is added to the solution as a water-soluble salt, preferably tin (II) sulfate.
  • the present disclosure further relates to a method for mitigating tin whisker growth on a substrate surface comprising the steps of, dissolving an amount of a germanium-containing compound in a basic solution, (preferably germanium dioxide dissolved in a sodium hydroxide solution), adding an amount of water, preferably deionized water, to the germanium-containing compound in solution, adding a complexing agent (preferably d,l-tartaric acid), optionally adding a surfactant/leveling agent, and dissolving an amount of tin-containing compound (preferably tin (II) sulfate) into the germanium-containing solution.
  • a germanium-containing compound in a basic solution, (preferably germanium dioxide dissolved in a sodium hydroxide solution)
  • a complexing agent preferably d,l-tartaric acid
  • surfactant/leveling agent optionally adding a surfactant/leveling agent
  • dissolving an amount of tin-containing compound preferably tin (II) sulf
  • a tin-containing anodic electrode is immersed into the germanium-containing and tin-containing solution and a cathodic substrate surface is immersed into the germanium-containing and tin-containing solution.
  • An electrical power source is provided to the anodic electrode and the cathodic substrate (acting as an electrode) comprising a cathodic substrate surface, and then activated to provide an electrical current to the electrodes, resulting in co-depositing an amount of germanium and tin onto the substrate surface.
  • the systems, methods and apparatuses of the present disclosure could also be used and incorporated into systems and methods using a three electrode system with the third electrode being used as a reference electrode.
  • the present disclosure relates to a method for making an electroplating bath comprising the steps of dissolving an amount of a germanium- containing compound in a basic solution (preferably germanium dioxide in an amount of sodium hydroxide solution), adding an amount of water (preferably deionized water) to the germanium-containing solution, adding an amount complexing agent (preferably d,l- tartaric acid) to the germanium-containing solution, optionally adding a
  • the present disclosure contemplates an electroplating bath made according to the above method.
  • the present disclosure relates to an electroplating bath comprising an amount of a germanium-containing compound in an aqueous solution (preferably germanium dioxide in an amount of sodium hydroxide solution), an amount of water added to the solution, an amount of complexing agent (preferably d,l-tartaric acid), an amount of optional surfactant/leveling agent, and an amount of tin-containing compound (preferably tin (II) sulfate). Still further, the present disclosure relates to a coating for mitigating tin whisker growth by co-depositing an amount of a germanium and tin onto a substrate surface.
  • the germanium and tin are electro-deposited onto a substrate surface, preferably to a thickness of from about 1 micron to about 10 microns.
  • the substrate surface comprises copper
  • the germanium is preferably co-deposited with the tin onto the substrate at a concentration of from about 0.5 to about 5 weight percent germanium, and more preferably, from about 1 to about 2 weight percent germanium.
  • the present disclosure contemplates the described coatings as usefully coating any object, including, but in no way limited to, electronic components where it is desirable to mitigate the formation of tin whiskers by replacing a pure tin-containing surface with a tin and germanium plating.
  • FIGs. 1 a and 1 b are flowcharts for processes of plating a coating comprising germanium and tin onto a substrate surface
  • FIG. 2 is a schematic representation of an electroplating bath for plating a germanium and tin coating onto a substrate surface
  • FIG. 3 is a flowchart for a process of plating a coating comprising pure tin onto a substrate surface
  • FIGs. 4 and 5 are micro-photographs of tin whiskers growing from a pure tin- plated substrate surface;
  • FIG. 6 is a micro-photograph of a surface coated with a plating comprising germanium and tin;
  • FIG. 7 is a schematic representation of an electronic component with leads oriented along the perimeter of the component body.
  • FIG. 8 is a further enlarged schematic representation of the leads shown in FIG.
  • the present disclosure relates to the development of electroplated tin films that are doped with germanium to suppress the growth of tin whiskers from the plated substrate surface, as otherwise commonly occurs with tin-plated substrates.
  • the addition to tin of amounts of germanium of from about 0.5 to about 5 weight percent germanium has now been shown to significantly suppress undesired tin whisker growth.
  • FIG. 1 a shows a flow chart for one preferred electroplating method variation 10a.
  • An amount of germanium-containing compound was dissolved in an aqueous solution 12a.
  • An amount of water was added 14a to the germanium-containing solution.
  • An amount of complexing agent was added 16a to the germanium solution.
  • an amount of surfactant/leveling agent 17a was added to the germanium solution.
  • An amount of water-soluble tin-containing compound was dissolved into solution and added to the germanium solution 18a. The tin and germanium solution was then used to electroplate a substrate surface 19a.
  • FIG. 1 b shows a flow chart for one preferred electroplating method variation 10b.
  • An amount of germanium-dioxide was dissolved in a sodium hydroxide solution 12b.
  • An amount of deionized water was added 14b to the germanium-containing solution.
  • An amount of d,l-tartaric acid was added 16b to the germanium solution.
  • an amount of surfactant/leveling agent 17b was added to the germanium solution.
  • An amount of tin (II) sulfate was added to the germanium solution 18b. The tin and germanium solution was then used to electroplate a substrate surface 19b.
  • an electroplating bath 20 comprises container 24 comprising a germanium- and tin-containing electrolyte solution 22 into which is suspended an anode 26 (e.g. a pure tin anode, a tin and germanium anode, etc.) and a cathode 28 (e.g. a copper or other metallic cathode, etc.).
  • anode 26 e.g. a pure tin anode, a tin and germanium anode, etc.
  • a cathode 28 e.g. a copper or other metallic cathode, etc.
  • Tin (II) sulfate 99.6%, Alfa Aesar
  • the electrolyte solution was then used to electroplate substrate surfaces.
  • germanium is co-deposited with tin onto a substrate surface in the electroplating solution in a preferred amount of from about 0.5 to about 5 weight percent germanium, more preferably, from about 1 to about 2 weight percent germanium.
  • Plating was conducted using 30 ml of the GeO 2 /Sn electrolyte solution described immediately above at 18°C in a 50 ml beaker with stirring. (See FIG. 2, stirring not shown.).
  • the anode was constructed from tin sheet (99.998%, Aldrich) and had a surface area of approximately 2 cm 2 .
  • Two coupons were plated at a time. The two coupons were used as the cathode by connecting both of them together using an alligator clip. The two coupons had a total surface area of 2 cm 2 .
  • Plating was conducted at 0.995 volts and 14 milliamps for 8 minutes to yield a light gray matte plated film on the coupons.
  • the tin anode was cleaned using 500 grit SiC paper before each set of samples was plated.
  • the first and seventh germanium-doped tin films were analyzed by inductively coupled plasma (ICP) spectroscopy.
  • ICP inductively coupled plasma
  • the tin and germanium plated films were completely dissolved off the coupons using a mixture of 8 ml of 1 :1 nitric acid and 4 mis of concentrated hydrochloric acid in a small beaker. This solution was then transferred to a 100 ml volumetric flask, diluted to volume with deionized water, and analyzed to confirm the presence of the elements of interest (Ge and Sn) in the plating by using an ICP spectrometer. The surface roughness of the plating was measured using a KLA-Tencor Alpha-Step 200 profilometer. The average surface roughness (Ra) and the maximum trough to peak roughness (TIR) were also measured (see Table 1 ).
  • FIG. 3 is a flowchart showing the method 30 for electroplating the pure tin-coated samples for use as comparative control samples. This was achieved using the method developed by Yun Zhang (described in U .S. Patent No. 5,750,017).
  • Triton X-100 (Dow Chemical) in an amount of 0.1259 g was dissolved in 80 ml of deionized water 32.
  • Phenolphthalein solution 0.5%) (Aldrich) in an amount of 2.00 g was added drop wise while stirring 36.
  • Tin methanesulfonate solution 50%) (Aldrich) in an amount of 10 ml was added to the solution while stirring 38.
  • Plating was conducted using 30 ml of the above electrolyte solution held at 50°C in a 50 ml glass beaker while stirring 39.
  • the anode was constructed from 99.998% tin sheet (Aldrich). Plating was performed at 0.045 V and 10.9 milliamps for 8 minutes to yield a gray satin plating. Immediately after plating, the test specimens were put into a 50°C/50% relative humidity chamber in an effort to accelerate tin whisker formation and growth.
  • Specimens plated with pure tin were also put into the test chamber for use as a control. At approximately 6 months, 12 months and 18 months, the test specimens were examined using a scanning electron microscope (SEM).
  • SEM scanning electron microscope
  • the pure tin plated films had numerous nodules and whiskers growing from the surface. See FIG. 4 (3500x magnification after 12,000 hours of aging) and FIG. 5 (300x magnification after 12,000 hours of aging).
  • the germanium-doped tin plated films had zero whiskers develop across the 1 mm 2 area evaluated over the same 6 month, 12 month and 18 month evaluation periods. See FIG. 6 (1000x magnification after 12,000 hours of aging).
  • Preferred surfactants are non- ionic surfactants that act as leveling agents to help obtain a substantially uniform coating when plating onto a substrate.
  • Preferred surfactants include Triton X-100, Igepal CA-630, Nonidet P-40, Conco Nl, Dowfax 9N, Igepal CO, Makon, Neutronyx 600 series, Nonipol NO, Plytergent B, Renex 600 series, Solar NO, Sterox, Serfonic N, T- DET-N, Tergitol NP, Triton N, etc., with Triton X-100 being particularly preferred.
  • the d,l-tartaric acid serves to complex the germanium ions and probably the tin ions in solution.
  • two metals with different electromotive potentials cannot be practically plated at the same time. This limitation is usually overcome by chemically complexing one or both metals, which effectively brings their electromotive potentials closer together and allows them both to be plated/deposited at the same time.
  • Other complexing agents that may work for the tin and germanium system include without limitation, citric acid, succinic acid, aspartic acid, EDTA, mannitol, or any organic compound with carboxylic acid groups, or other groups capable of complexing metal ions in solution, etc.
  • germanium-doped tin coatings affected through the processes set forth in this disclosure are understood to be deposited onto a substrate of choice to a preferred thickness of from about 1 to about 50 microns, and more preferably to a thickness of from about 1 to about 10 microns, with a preferred germanium concentration of from about 0.5 to about 5% by weight, and more preferably from about 1 to about 2 weight percent. It is understood that the germanium may be present in concentrations in excess of 5%. However, the tin whisker mitigation observed during 18 months of observation was achieved with germanium concentrations of only about 1 %. It is believed that excessive germanium concentrations could impact the economic feasibility of the disclosed methods and coatings, perhaps without offering enhanced performance relative to tin whisker mitigation. In addition, the germanium concentration must not interfere with the physical and chemical performance of the tin relative to, for example, soldering of the coated component, etc.
  • FIG. 7 shows an enlarged schematic view of a representative electronic component having tin-plated leads.
  • component 70 has tin-plated copper leads 72 about the periphery and extending from the body of component 70.
  • FIG. 8 is a further enlargement of a cross-sectional view of a tin-plated copper lead 72 showing the copper 74 coated by a tin electroplate 76. It is understood that the electroplated coatings of the present disclosure will find utility relative to any and all electronic components and parts comprising copper or other metals where a tin coating would be required to make parts solderable, for example.
  • a method for mitigating tin whisker growth on a substrate surface comprising the steps of: preparing a solution comprising an amount of a germanium- containing compound and a water soluble tin-containing compound and a complexing agent; immersing an anodic electrode into the solution, immersing a cathodic substrate into the solution, said cathodic substrate comprising a cathodic substrate surface;
  • Clause 2 The method of Clause 1 , wherein the germanium and tin are co- deposited onto the substrate surface to a thickness of from about 1 to about 10 microns.
  • Clause 3 The method of Clause 1 or 2, wherein the germanium and tin are co- deposited onto the substrate surface at a concentration of from about 0.5 to about 5% by weight germanium.
  • germanium dioxide solubilized in a sodium hydroxide solution.
  • Clause 7 The method of Clause 1 wherein the tin-containing compound is added to the solution as a water soluble tin salt.
  • Clause 8 The method of Clause 1 , wherein the tin-containing compound is tin (II) sulfate.
  • a method for mitigating tin whisker growth on a substrate surface comprising the steps of: dissolving an amount of germanium dioxide in a sodium hydroxide-containing solution to produce a germanium-containing solution; adding an amount of water to the germanium-containing solution; adding an amount of d,l-tartaric acid to the germanium-containing solution; dissolving an amount of tin (II) sulfate in the germanium-containing solution to produce a tin-and-germanium-containing solution; immersing a tin-containing anodic electrode into the tin-and-germanium-containing solution; immersing a cathodic substrate into the tin-and-germanium-containing solution, said cathodic substrate comprising a cathodic substrate surface; connecting an electrical power source to the anodic electrode and the cathodic substrate; activating the electrical power source to provide an electrical current to the anodic electrode and the cathodic substrate; and co-depositing an amount of
  • Clause 10 The method of Clause 9, further comprising the step of: adding an amount of a surfactant/leveling agent to the germanium-containing solution.
  • a method for making an electroplating bath comprising the steps of: dissolving an amount of a germanium-containing compound to make a germanium- containing solution; adding an amount of water to the germanium-containing solution; adding an amount of complexing agent to the germanium-containing solution; and dissolving an amount of water-soluble tin-containing compound into the germanium- containing solution.
  • germanium-containing compound is selected from the group consisting of: germanium-containing compounds soluble in a basic solution, water soluble germanium salts, and combinations thereof.
  • Clause 13 The method of Clause 1 1 , wherein the germanium-containing compound is germanium dioxide solubilized in a sodium hydroxide solution.
  • Clause 14 The method of Clause 1 1 , wherein the complexing agent is d,l-tartaric acid.
  • Clause 15 The method of Clause 1 1 , further comprising the step of adding an amount of surfactant/leveling agent to the germanium-containing solution.
  • Clause 16 The method of Clause 1 1 , wherein the tin-containing compound comprises tin (II) sulfate.
  • An electroplating bath comprising: an amount of a germanium- containing compound in an aqueous solution; an amount of water; an amount of a complexing agent; and an amount of water-soluble tin-containing compound.
  • Clause 19 The electroplating bath of Clause 18, wherein the germanium- containing compound is germanium dioxide solubilized in a basic solution.
  • Clause 20 The electroplating bath of Clause 18, wherein the complexing agent is d,l-tartaric acid.
  • Clause 21 The electroplating bath of Clause 18, wherein the tin-containing compound is tin (II) sulfate.
  • Clause 22 The electroplating bath of any of Clause 18-21 , further comprising an amount of surfactant/leveling agent.
  • An electroplated coating for mitigating tin whisker growth on a substrate surface comprising: a co-deposited amount of from about 0.5 to about 5 weight percent germanium and a co-deposited amount of from about 95 to about 99.5 weight percent tin.
  • Clause 24 The coating of Clause 23, wherein the germanium and tin are co- deposited onto the substrate surface to a thickness of from about 1 to about 10 microns.
  • Clause 25 An electronic component comprising the coating of Clauses 23 or 24.
  • Clause 26 An object comprising the coating of Clauses 23 or 24.
  • Clause 27 An aircraft comprising the object of Clause 26.
  • tin and germanium platings on objects including electronic components such as, for example, quad flat packs, plastic dual in-line packages (PDIPs), small-outline integrated circuits (SOICs), relays, etc., or as a plating for traces on printed circuit boards, etc. It is further contemplated that such electronic parts plated with the tin and germanium coatings of the present disclosure will find utility in any electronics systems used, for example, in any aircraft, spacecraft, terrestrial or non-terrestrial vehicles, as well as stationary structures and objects.
  • a non-exhaustive list of contemplated vehicles include manned and unmanned aircraft, spacecraft, satellites, terrestrial, non-terrestrial and surface and sub-surface water-borne vehicles, etc.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Electroplating Methods And Accessories (AREA)
PCT/US2014/035815 2013-07-05 2014-04-29 Methods and apparatuses for mitigating tin whisker growth on tin and tin-plated surfaces by doping tin with germanium Ceased WO2015002690A1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP14726494.9A EP3017091B1 (en) 2013-07-05 2014-04-29 Methods for mitigating tin whisker growth on tin and tin-plated surfaces by doping tin with germanium
CN201480037944.4A CN105392927A (zh) 2013-07-05 2014-04-29 通过将锡与锗掺杂减轻锡和镀锡表面上的锡须生长的方法和装置
JP2016523733A JP6453321B2 (ja) 2013-07-05 2014-04-29 スズをゲルマニウムでドープすることによりスズ表面及びスズめっき表面上でのスズウィスカの成長を軽減するための方法及び装置
CN202010757612.0A CN111876805B (zh) 2013-07-05 2014-04-29 通过将锡与锗掺杂减轻锡和镀锡表面上的锡须生长的方法和装置

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US13/935,768 US10633754B2 (en) 2013-07-05 2013-07-05 Methods and apparatuses for mitigating tin whisker growth on tin and tin-plated surfaces by doping tin with germanium
US13/935,768 2013-07-05

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JP6912845B2 (ja) * 2018-08-28 2021-08-04 学校法人 工学院大学 金属膜形成用組成物の製造方法、金属膜の製造方法、金属膜、金属膜積層体及び金属膜形成用組成物の製造装置
CN109158712B (zh) * 2018-09-27 2024-04-23 格林美(武汉)城市矿产循环产业园开发有限公司 一种双轴调节螺纹环镀修复装置
CN114561633B (zh) * 2022-02-23 2023-11-14 吉安宏达秋科技有限公司 镀锡液及其制备方法和用于印制线路板的镀锡方法

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EP3017091B1 (en) 2021-01-27
US20150010774A1 (en) 2015-01-08
JP6453321B2 (ja) 2019-01-16
JP2016529395A (ja) 2016-09-23
US10633754B2 (en) 2020-04-28
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US20200216972A1 (en) 2020-07-09
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