WO2014196285A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
WO2014196285A1
WO2014196285A1 PCT/JP2014/061773 JP2014061773W WO2014196285A1 WO 2014196285 A1 WO2014196285 A1 WO 2014196285A1 JP 2014061773 W JP2014061773 W JP 2014061773W WO 2014196285 A1 WO2014196285 A1 WO 2014196285A1
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WIPO (PCT)
Prior art keywords
mosfet
light
semiconductor device
band gap
semiconductor element
Prior art date
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PCT/JP2014/061773
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English (en)
French (fr)
Inventor
逸人 仲野
Original Assignee
富士電機株式会社
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Publication date
Application filed by 富士電機株式会社 filed Critical 富士電機株式会社
Priority to JP2015521341A priority Critical patent/JP6252585B2/ja
Publication of WO2014196285A1 publication Critical patent/WO2014196285A1/ja
Priority to US14/942,831 priority patent/US9773936B2/en

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Definitions

  • the present invention relates to a semiconductor device.
  • IPM Intelligent Power Module
  • a power semiconductor element Intelligent Power Module
  • a control circuit Intelligent Power Module
  • a drive circuit Intelligent Power Module
  • a protection circuit and the like are modularized.
  • a sense diode in which a diode is formed on a power semiconductor element.
  • a shunt resistor and a thermistor are provided in the power semiconductor module, the shunt resistor is used as a current sensor, and the thermistor is used as a temperature sensor.
  • the power semiconductor element operates, heat corresponding to the loss is generated.
  • the temperature of the power semiconductor element is detected by the above-described sensor technology, and the gate voltage or the like is controlled to protect the power semiconductor element.
  • the sense diode detects the temperature of the power semiconductor element based on the temperature dependence of the current characteristics of the sense diode. Since silicon, which is a conventional semiconductor element material, has a large temperature dependency of current, a sense diode made of silicon can easily detect temperature by a change in current. On the other hand, a wide band gap semiconductor element such as silicon carbide (silicon carbide; SiC), which is attracting attention as a next-generation semiconductor material, has a temperature dependency of current characteristics smaller than that of silicon. For this reason, when the sense diode is made of the same material as the wide band gap semiconductor element, sufficient accuracy cannot be expected. In addition, if the sense diode is manufactured from a silicon semiconductor by a process different from the manufacturing of the wide band gap semiconductor element, the manufacturing process is increased.
  • the shunt resistor and the thermistor are generally provided at a position different from the power semiconductor element on the insulating circuit board in the power semiconductor module. For this reason, when a shunt resistor and a thermistor are used, the external size of the power semiconductor module may increase. Further, since the shunt resistor and the thermistor are separated from the power semiconductor element, the reaction speed for temperature detection is not necessarily high. For this reason, it may not fully meet the required characteristics as a sensor used in a protection circuit or a control circuit.
  • the junction time of SiC GTO is based on the fact that the storage time TS as the turn-off characteristic time of SiC GTO (Gate Turn-Off thyristor), which is a semiconductor switching element, is highly temperature dependent.
  • TS the turn-off characteristic time of SiC GTO
  • MOSFET Metal Oxide Semiconductor Semiconductor Field Effect Transistor
  • the control IC should stop the MOSFET by examining the current-voltage characteristics of the SBD. Obtain the anode voltage corresponding to the set temperature. And there exists an apparatus which protects MOSFET from over temperature by the setting of this calculated
  • SBD diode
  • a resistance temperature detector is formed by using a part of a barrier metal formed on the bottom surface of a semiconductor element, and the resistance value of the resistance temperature detector changes depending on temperature.
  • Patent Document 3 There is an apparatus for detecting the temperature of a SiC semiconductor.
  • Patent Document 3 it is necessary to increase the length of the resistance temperature detector in order to obtain an output voltage of a specific magnitude, and there is a limit to the area where the resistance temperature detector is provided. It was.
  • an apparatus for measuring the temperature of a semiconductor substrate there is an apparatus for calculating and measuring the temperature of a semiconductor substrate based on an optical spectrum obtained by applying light from a light source to the semiconductor substrate, receiving scattered light from the semiconductor substrate, and performing spectroscopy (Patent).
  • this device is a temperature measurement device for a semiconductor substrate which is a material of the semiconductor device, and is not a device for measuring the temperature of the semiconductor device in operation.
  • JP 2007-93335 A International Publication 2012/086099 JP 2013-26563 A JP 2010-25756 A
  • An object of the present invention is to provide a semiconductor device having a sensor sufficiently satisfying required characteristics for protection and control of the semiconductor element in a semiconductor device having a wide band gap semiconductor element such as SiC.
  • the semiconductor device of the present invention includes a wide band gap semiconductor element and a light receiving element that receives light emitted when the wide band gap semiconductor element is energized.
  • the light receiving element that receives light emitted when the wide band gap semiconductor element is energized is provided, and the intensity of light emitted from the wide band gap semiconductor element is detected by the light receiving element.
  • a current value flowing through the wide band gap semiconductor element can be obtained by the intensity of the light. For this reason, the current flowing through the wide band gap semiconductor element, the temperature of the wide band gap semiconductor element, and the like can be detected with high reaction speed, and it is advantageous for miniaturization.
  • FIG. 1 is a schematic cross-sectional view of a semiconductor device according to an embodiment of the present invention.
  • FIG. 2 is a front view of a Schottky barrier diode as a power semiconductor chip.
  • FIG. 3 is a front view of a MOSFET as a power semiconductor chip.
  • FIG. 4 is a schematic cross-sectional view of a MOSFET.
  • FIG. 5 is a circuit diagram of the MOSFET.
  • FIG. 6 is a photograph of a halftone image obtained by imaging the light emitted from the MOSFET and displaying it on the display.
  • FIG. 1 is a schematic cross-sectional view of a power semiconductor module as a semiconductor device 1 according to an embodiment of the present invention.
  • a power semiconductor chip 3 is bonded to an insulating circuit substrate 2 by solder 4.
  • a conductive layer 2b is selectively formed on one surface of the insulated substrate 2a, whereby a circuit pattern that is electrically connected to the semiconductor device 1 is formed.
  • Conductive layer 2c is formed on the other surface.
  • the power semiconductor chip 3 is made of a wide band gap semiconductor, and specifically made of, for example, silicon carbide (SiC) or gallium nitride (GaN).
  • the power semiconductor chip 3 includes an electrode on a surface facing the insulating circuit substrate 2, and the electrode is electrically connected to the conductive layer 2 b through the solder 4.
  • the power semiconductor chip 3 also has an electrode on the surface opposite to the surface facing the insulating circuit substrate 2, and the electrode is electrically connected to the conductive layer 2 and other elements via the bonding wire 5. is doing.
  • the bonding wire 5 is not essential and can be electrically connected by a pin or a flat plate made of a conductive material.
  • the semiconductor device 1 can include a control board having a circuit for protecting and controlling the power semiconductor chip 3, but is not shown in FIG. Further, in the semiconductor device 1, the power semiconductor chip 3 is accommodated in the case 6, and the case 6 can be filled with gel in order to increase the withstand voltage.
  • a light receiving element 7 is provided in the vicinity of the power semiconductor chip 3.
  • the light receiving element 7 is for receiving light emitted from the power semiconductor chip 3.
  • the intensity of this light has a linear relationship with the magnitude of the current supplied to the power semiconductor chip 3. Therefore, the semiconductor device 1 of the present embodiment detects the intensity of light emitted from the power semiconductor chip 3 by the light receiving element 7 provided in the vicinity of the power semiconductor chip 3.
  • the value of the current flowing through the power semiconductor chip can be obtained based on the detected light intensity.
  • the light receiving element 7 is not particularly limited as long as the light receiving element 7 can detect specific spectrum light due to the band gap of the material of the power semiconductor chip 3.
  • the Schottky barrier diode 13 shown in FIG. 2 as the power semiconductor chip 3 includes a first electrode 131 on a surface facing a DCB (Direct Copper Bonding) substrate as the insulating circuit substrate 2, for example.
  • a second electrode 132 is provided on the opposite side of the surface.
  • the Schottky barrier diode 13 when the Schottky barrier diode 13 is energized, light is emitted from the side surface of the Schottky barrier diode 13 as indicated by the arrow in the figure, and is not emitted from the surface where the electrodes 131 and 132 are provided. Therefore, the light receiving element 7 is disposed close to the side of the Schottky barrier diode 13.
  • the light receiving element 7 can be electrically connected to the conductive layer 2b of the insulated circuit board 2 and provided on the conductive layer 2b. Further, it may be provided such that it is electrically connected to a control board (not shown) provided above the insulating circuit board 2 and is suspended from the control board etc. so as to be positioned in a hollow space. Even if the Schottky barrier diode 13 is sealed with gel in the case 6, the light receiving element 7 receives light from the Schottky barrier diode 13 as long as the gel transmits light. can do.
  • an incident portion of an optical waveguide such as an optical fiber is disposed close to the side of the Schottky barrier diode 13, and light from the Schottky barrier diode 13 is transmitted to the light receiving element 7 provided at another location through the optical waveguide. It is also possible to guide.
  • the detection and control of the current value and temperature of the Schottky barrier diode 13 when the Schottky barrier diode 13 is energized using the light receiving element 7 will be described.
  • the magnitude of the current flowing through the Schottky barrier diode 13 and the intensity of light emitted from the Schottky barrier diode 13 have a linear relationship as described above. Therefore, the relationship between the intensity of light emitted from the Schottky barrier diode 13 and the magnitude of the current flowing through the Schottky barrier diode 13 is previously converted into data.
  • the control (protection) circuit including the light receiving element 7 can obtain the current value flowing through the Schottky barrier diode 13 during energization based on the intensity of light received from the light receiving element 7. .
  • the amount of heat generated by the Schottky barrier diode 13 can be calculated from the current value obtained above, the voltage applied between the electrodes of the Schottky barrier diode 13, and the cumulative energization time. Then, the temperature of the Schottky barrier diode 13 is detected based on the temperature characteristics of the Schottky barrier diode 13 determined in relation to the heat radiation capability of the insulating circuit board 2 and the heat conduction characteristics of the gel, and the amount of heat generated above. can do.
  • the light when the Schottky barrier diode 13 is energized is received, the intensity of the light is obtained, and the current value flowing through the Schottky barrier diode 13 is obtained based on the intensity of the light.
  • the temperature of the Schottky barrier diode 13 can be detected from this current value.
  • the sensor since the sensor is not formed on the semiconductor element unlike the sense diode, the current density of the semiconductor element is not sacrificed. Such temperature detection is more advantageous than using a thermistor or the like because the reaction rate is fast.
  • the light receiving element can be arranged in a hollow space, it is advantageous for downsizing the power semiconductor module.
  • the Schottky barrier diode 13 reaches the upper limit value of the operating temperature, the operation of the Schottky barrier diode 13 is stopped or the voltage applied to the Schottky barrier diode 13 is controlled, The Schottky barrier diode 13 can be protected.
  • the power semiconductor chip 3 is a MOSFET 23 made of SiC
  • a MOSFET 23 shown in FIG. 3 as the power semiconductor chip 3 includes a drain electrode 231 on the surface facing the insulating circuit substrate 2, and a source electrode 232 and a gate electrode 233 on the surface opposite to the drain electrode 231.
  • the MOSFET 23 shown in FIG. 3 is a vertical semiconductor element.
  • a schematic cross-sectional view of the MOSFET 23 is shown in FIG. 4, and a circuit diagram of the MOSFET 23 is shown in FIG.
  • a body diode 234 parasitsitic diode
  • the light receiving element 7 When a current flows through the body diode 234 of the MOSFET 23 made of SiC, light is emitted according to the SiC band gap. This light is received by the light receiving element 7.
  • the MOSFET 23 shown in FIG. 3 When the MOSFET 23 shown in FIG. 3 is energized, light is radiated from the side surface of the MOSFET 23 as indicated by an arrow in the figure. Therefore, the light receiving element 7 is disposed close to the side of the MOSFET 23.
  • the light receiving element 7 can be electrically connected to the conductive layer 2b of the insulated circuit board 2 and provided on the conductive layer 2b. Further, it may be provided such that it is electrically connected to a control board (not shown) provided above the insulating circuit board 2 and is suspended from the control board etc. so as to be positioned in a hollow space. Even if the MOSFET 23 is sealed with gel in the case 6, the light receiving element 7 can receive light from the MOSFET 23 as long as the gel transmits light. It is also possible to place the incident portion of an optical waveguide such as an optical fiber close to the side of the MOSFET 23 and guide the light from the MOSFET 23 to the light receiving element 7 provided at another location through this optical waveguide.
  • an optical waveguide such as an optical fiber
  • the detection and control of the current value and temperature of the MOSFET 23 when the MOSFET 23 using the light receiving element 7 is energized will be described.
  • the magnitude of the current flowing through the body diode 234 of the MOSFET 23 and the intensity of light emitted from the MOSFET 23 have a linear relationship.
  • FIGS. 6A to 6F show photographs of halftone images obtained by imaging the light emitted from the MOSFET 23 and displaying it on the display.
  • 6A to 6C are photographs in the case where the surroundings are shielded from light.
  • 6A shows the case where the current value flowing through the body diode 234 is 1A
  • FIG. 6B shows the case where the current value is 0.17A
  • FIG. 6C shows the case where the current value is 0A.
  • FIGS. 6D to 6F are photographs when the surroundings are not shielded from light.
  • 6D shows the case where the current value flowing through the body diode 234 is 8A
  • FIG. 6E shows the case where the current value is 4A
  • FIG. 6F shows the case where the current value is 1A.
  • FIG. 6A and FIG. 6F differ in the presence or absence of light shielding, and the current value flowing through the body diode 234 is the same. From FIG. 6, it can be seen that when the current value is 0 A (FIG. 6C), no light is emitted, and the larger the current value, the stronger the light is emitted.
  • the control (protection) circuit including the light receiving element 7 can obtain the value of the current flowing through the body diode 234 of the MOSFET 23 during energization based on the intensity of light received from the light receiving element 7. .
  • the heat generation amount of the MOSFET 23 can be calculated from the current value obtained above, the voltage applied between the electrodes of the body diode 234 of the MOSFET 23, and the energization integration time.
  • the temperature of the MOSFET 23 can be detected from the temperature characteristics of the MOSFET 23 determined in relation to the heat radiation capability of the insulating circuit board, the heat conduction characteristics of the gel, and the like, and the amount of heat generated above.
  • the detected signal is used as an alarm signal, so that the gate voltage of the MOSFET 23 can be immediately set to zero and the operation of the MOSFET 23 can be stopped.
  • the gate voltage is set to zero to stop the operation of the MOSFET 23 or to control the gate voltage to protect the MOSFET 23.
  • the control for lowering the gate voltage can be performed as follows, for example. Data on the relationship between the light intensities L1, L2, L3,... Ln in the light receiving element 7 and the currents I1, I2, I3,. Further, data of currents I1, I2, I3,... In flowing through the body diode 234 and the temperature characteristics of the MOSFET 23 are also stored in advance. During the operation of the MOSFET 23, the gate voltage is lowered when the light intensity from the light receiving element, the current flowing through the body diode 234 at that time, and the temperature of the MOSFET 23 determined by the integration time reaches, for example, 150.degree.
  • the temperature of the MOSFET 23 is calculated anew from the relationship between the current value flowing through the body diode 234 at the lowered gate voltage and the temperature characteristics of the MOSFET 23.
  • the gate voltage is controlled so that this temperature does not exceed 150 ° C.
  • the light when the MOSFET 23 is energized is received, the intensity of the light is obtained, the current value flowing through the body diode 234 of the MOSFET 23 is obtained based on the intensity of the light, and the temperature of the MOSFET 23 is determined from this current value. Can be detected. Since the sensor is not formed on the semiconductor element unlike the sense diode, the current density of the semiconductor element is not sacrificed. Such temperature detection is more advantageous than the thermistor because the reaction rate is fast. In addition, since the light receiving element can be arranged in a hollow space, it is advantageous for downsizing the power semiconductor module.
  • the Schottky barrier diode 13 made of SiC and the MOSFET 23 made of SiC are combined.
  • the light receiving element 7 is disposed close to at least one of the power semiconductor chips selected from the Schottky barrier diode 13 and the MOSFET 23, preferably on both sides of the power semiconductor chips, and these power semiconductor modules. The current value and temperature of the semiconductor chip can be detected.
  • the semiconductor device of this invention is not limited to description of embodiment and drawing, Many are in the range which does not deviate from the meaning of this invention. Can be modified.
  • the case of the SiC semiconductor has been described, but the present invention can be similarly applied to the case where the power semiconductor chip 3 is a GaN semiconductor.

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Abstract

　ＳｉＣ等のワイドバンドギャップ半導体素子を有する半導体装置において、当該半導体素子の保護や制御のための要求特性に十分に応えるセンサを備える半導体装置を提供する。　半導体装置１は、基板２上に搭載されたワイドバンドギャップ半導体素子３と、該ワイドバンドギャップ半導体素子３が通電されたときの発光を受光する受光素子７とを備える。

Description

半導体装置
　本発明は、半導体装置に関する。
　ＩＰＭ（Intelligent Power Module）は、一般に、パワー半導体素子と、制御回路や駆動回路や保護回路等とをモジュール化した半導体装置である。従来のＩＰＭのセンサ技術として、パワー半導体素子上にダイオードを形成したセンスダイオードがある。また、別のセンサ技術として、パワー半導体モジュール内にシャント抵抗及びサーミスタを設け、シャント抵抗を電流センサとして、サーミスタを温度センサとして用いることがある。パワー半導体素子が動作することにより、その損失に応じた熱が発生する。この熱によりパワー半導体素子が故障しないように、上記のセンサ技術によりパワー半導体素子の温度を検出し、ゲート電圧等の制御を行ってパワー半導体素子を保護している。
　センスダイオードは、そのセンスダイオードの電流特性の温度依存性に基づいてパワー半導体素子の温度を検出している。従来からの半導体素子材料であるシリコンは、電流の温度依存性が大きいことから、シリコンよりなるセンスダイオードは、電流変化により温度を検出するのが容易である。一方、次世代半導体材料として注目されている炭化珪素（シリコンカーバイド；ＳｉＣ）等のワイドバンドギャップ半導体素子は、シリコンに比べて電流特性の温度依存性が小さい。このため、センスダイオードを、このワイドバンドギャップ半導体素子と同じ材料によって作製した場合には、十分な精度が期待できない。また、ワイドバンドギャップ半導体素子の作製とは別工程によってシリコン半導体によりセンスダイオードを作製したのでは、製造工程の増大を招く。
　シャント抵抗及びサーミスタは、一般にパワー半導体モジュール内の絶縁回路基板上に、パワー半導体素子とは別の位置で設けられている。そのため、シャント抵抗及びサーミスタを用いた場合、パワー半導体モジュールの外形サイズが大きくなる要因となり得た。また、シャント抵抗及びサーミスタがパワー半導体素子から離れているため、温度検出のための反応速度が必ずしも速くない。このため、保護回路や制御回路に用いられるセンサとしての要求特性に十分に応えるものではない場合があった。
　また、半導体装置の温度測定方法に関し、半導体スイッチング素子であるＳｉＣ　ＧＴＯ（Gate Turn-Off thyristor）のターンオフ特性時間としての蓄積時間ＴＳが、温度依存性が大きいことを利用して、ＳｉＣ　ＧＴＯの接合温度を求める方法がある（特許文献１）。しかし、この方法はＧＴＯについてであって、ＭＯＳＦＥＴ（Metal Oxide Semiconductor Field Effect Transistor）等の他の半導体素子の温度測定には適用が困難であった。
　また、炭化珪素半導体素子の温度を測定するためのダイオード（ＳＢＤ；ショットキーバリアダイオード）を備えた炭化珪素半導体装置に関し、ＳＢＤの電流－電圧特性を調べることにより、制御ＩＣがＭＯＳＦＥＴを停止させるべき設定温度に対応するアノード電圧を求める。そして、この求めたアノード電圧の設定により、ＭＯＳＦＥＴを過温度から保護する装置がある（特許文献２）。しかし、この装置はＳＢＤを有しない半導体装置には適用できなかった。
　またＳｉＣ半導体装置に関し、半導体素子の底面に形成したバリアメタルの一部を用いて測温抵抗体を形成し、この測温抵抗体の抵抗値が温度に依存して変化することを利用して、ＳｉＣ半導体の温度を検出する装置がある（特許文献３）。しかし、測温抵抗体による測温では、特定の大きさの出力電圧を得るためには、測温抵抗体の長さを長くする必要があり、測温抵抗体が設けられる領域に制限があった。
　更に、半導体基板の温度を計測する装置として、光源から光を半導体基板に当て、半導体基板からの散乱光を受光、分光した光スペクトルに基づいて半導体基板の温度を演算計測する装置がある（特許文献４）。しかし、この装置は、半導体装置の材料である半導体基板の温度計測装置であって、動作している半導体装置の温度を測定する装置ではなかった。
特開２００７－９３３３５号公報 国際公開２０１２／０８６０９９号公報 特開２０１３－２６５６３号公報 特開２０１０－２５７５６号公報
　本発明は、ＳｉＣ等のワイドバンドギャップ半導体素子を有する半導体装置において、当該半導体素子の保護や制御のための要求特性に十分に応えるセンサを備える半導体装置を提供することを目的とする。
　本発明の半導体装置は、ワイドバンドギャップ半導体素子と、該ワイドバンドギャップ半導体素子が通電されたときの発光を受光する受光素子と、を備えることを特徴とする。
　本発明の半導体装置によれば、ワイドバンドギャップ半導体素子が通電されたときの発光を受光する受光素子を備え、この受光素子によりワイドバンドギャップ半導体素子から発光される光の強度を検出する。そして、その光の強度によりワイドバンドギャップ半導体素子に流れる電流値を得ることができる。このため、ワイドバンドギャップ半導体素子に流れる電流や、ワイドバンドギャップ半導体素子の温度等を、反応速度よく検出でき、また、小型化にも有利である。
図１は、本発明の一実施形態の半導体装置の模式的な断面図である。 図２は、パワー半導体チップとしてのショットキーバリアダイオードの正面図である。 図３は、パワー半導体チップとしてのＭＯＳＦＥＴの正面図である。 図４は、ＭＯＳＦＥＴの模式的な断面図である。 図５は、ＭＯＳＦＥＴの回路図である。 図６は、ＭＯＳＦＥＴから放射される光を撮像し、ディスプレー上に表示した中間調画像の写真である。
　以下、本発明の半導体装置の実施形態について、図面を参照しつつ具体的に説明する。
　図１は、本発明の一実施形態の半導体装置１としてのパワー半導体モジュールの模式的な断面図である。図１の半導体装置１は、絶縁回路基板２上にパワー半導体チップ３がはんだ４により接合されている。絶縁回路基板２は、絶縁基板２ａの一方の面に、導電層２ｂが選択的に形成され、これにより半導体装置１と電気的に接続する回路パターンが形成されている。他方の面に導電層２ｃが形成されてなる。
　パワー半導体チップ３は、ワイドバンドギャップ半導体よりなり、具体的には例えばシリコンカーバイド（ＳｉＣ）又はガリウムナイトライド（ＧａＮ）よりなる。パワー半導体チップ３は、絶縁回路基板２と対向する面に電極を備え、その電極がはんだ４を介して導電層２ｂと電気的に接続している。また、パワー半導体チップ３は、絶縁回路基板２と対向する面とは反対側の面にも電極を備え、その電極がボンディングワイヤ５を介して導電層２や他の素子等と電気的に接続している。もっともボンディングワイヤ５は必須ではなく、導電材料よりなるピンや平板などによって電気的に接続することもできる。
　半導体装置１は、パワー半導体チップ３を保護、制御するための回路を有する制御基板等を有することができるが、図１では図示を省略している。また、半導体装置１は、パワー半導体チップ３がケース６内に収容され、このケース６内は、耐電圧を高めるために、ゲルによって充填され得る。
　ケース６内において、パワー半導体チップ３の近傍に、受光素子７が設けられている。この受光素子７は、パワー半導体チップ３から発光される光を受光するためのものである。
　ＳｉＣやＧａＮのようなバンドギャップがＳｉよりも大きい、ワイドバンドギャップ半導体を用いたパワー半導体チップ３は、バンドギャップが大きいことにより、通電時には、バンドギャップに応じた光を発光する。この光の強度は、パワー半導体チップ３に通電される電流の大きさと線形の関係にある。そこで、本実施形態の半導体装置１は、パワー半導体チップ３の近傍に設けられた受光素子７により、パワー半導体チップ３から発光される光の強度を検出している。そして、検出された光の強度によりパワー半導体チップに流れる電流値を得ることができるようにしている。なお、この受光素子７は、パワー半導体チップ３の材料のバンドギャップによる特定のスペクトル光を検出することができる受光素子であれば、特に限定されない。
　図２を用いて、パワー半導体チップ３がＳｉＣよりなるショットキーバリアダイオード１３である例について説明する。パワー半導体チップ３としての図２に示したショットキーバリアダイオード１３は、絶縁回路基板２としての例えばＤＣＢ（Direct Copper Bonding）基板に対向する面に第１の電極１３１を備え、第１の電極１３１とは反対側の面に第２の電極１３２を備えている。この例では、ショットキーバリアダイオード１３に通電した場合に、光は、図中矢印で示すようにショットキーバリアダイオード１３の側面から放射され、電極１３１、１３２のある面からは放射されない。したがって、受光素子７は、ショットキーバリアダイオード１３の側方に近接配置される。
　受光素子７は、絶縁回路基板２の導電層２ｂと電気的に接続して、導電層２ｂ上に設けることができる。また、絶縁回路基板２よりも上方に設けられた、図示しない制御基板等と電気的に接続して、この制御基板等から吊り下げされて中空に位置するように設けられてもよい。なお、ショットキーバリアダイオード１３がケース６内でゲルにより封止された場合であっても、このゲルが光を透過させるものであれば、受光素子７はショットキーバリアダイオード１３からの光を受光することができる。また、光ファイバなどの光導波路の入射部をショットキーバリアダイオード１３の側方に近接配置させ、この光導波路を通じてショットキーバリアダイオード１３からの光を、別の場所に設けられた受光素子７に案内することも可能である。
　受光素子７を用いたショットキーバリアダイオード１３の通電時における、当該ショットキーバリアダイオード１３の電流値や温度の検出及び制御について説明する。
　ショットキーバリアダイオード１３に流れる電流の大きさと、ショットキーバリアダイオード１３から放射される光の強度とは、前述したように線形の関係にある。そこで、あらかじめショットキーバリアダイオード１３から放射される光の強度と、ショットキーバリアダイオード１３に流れる電流の大きさとの関係をデータ化しておく。このデータを参照することにより、受光素子７を含む制御（保護）回路は、受光素子７から受光した光の強度によって、通電時のショットキーバリアダイオード１３に流れている電流値を得ることができる。
　また、上記で得られた電流値と、ショットキーバリアダイオード１３の電極間に加えられる電圧と、通電の積算時間とにより、ショットキーバリアダイオード１３の発熱量を計算できる。そして、絶縁回路基板２の放熱能やゲルの熱伝導特性等も関係して定まるショットキーバリアダイオード１３の温度特性と、上記で得られた発熱量とにより、ショットキーバリアダイオード１３の温度を検出することができる。
　このように本発明では、ショットキーバリアダイオード１３の通電時の光を受光し、その光の強度を求め、この光の強度に基づいてこのショットキーバリアダイオード１３に流れる電流値が得られる。そして、この電流値からショットキーバリアダイオード１３の温度を検出することができる。本発明では、センスダイオードのように半導体素子上にセンサを形成しないことから、半導体素子の電流密度を犠牲にすることがない。また、かかる温度の検出は、反応速度が速いのでサーミスタなどを用いるよりも有利である。また、受光素子は中空に配置することができるので、パワー半導体モジュールの小型化に有利である。
　さらに、ショットキーバリアダイオード１３が、動作温度の上限値に達した場合には、ショットキーバリアダイオード１３の動作を止めるか、又はショットキーバリアダイオード１３に加える電圧を下げる等の制御を行って、ショットキーバリアダイオード１３を保護することができる。
　図３を用いて、パワー半導体チップ３がＳｉＣよりなるＭＯＳＦＥＴ２３である場合について説明する。パワー半導体チップ３として図３に示したＭＯＳＦＥＴ２３は、絶縁回路基板２に対向する面にドレイン電極２３１を備え、ドレイン電極２３１とは反対側の面にソース電極２３２及びゲート電極２３３とを備えている。つまり、図３に示したＭＯＳＦＥＴ２３は、縦型の半導体素子である。ＭＯＳＦＥＴ２３の模式的な断面図を図４に示し、ＭＯＳＦＥＴ２３の回路図を図５に示す。ＭＯＳＦＥＴ２３は、ソース電極２３２とドレイン電極２３１との間に必然的にボディダイオード２３４（寄生ダイオード）が形成されている。
　ＳｉＣよりなるＭＯＳＦＥＴ２３のボディダイオード２３４に電流が流れるときは、ＳｉＣのバンドギャップに応じて発光する。この光を受光素子７で受光する。
　図３に示したＭＯＳＦＥＴ２３に通電した場合に、光は、図中矢印で示すようにＭＯＳＦＥＴ２３の側面から放射される。そこで、受光素子７は、ＭＯＳＦＥＴ２３の側方に近接配置される。
　受光素子７は、絶縁回路基板２の導電層２ｂと電気的に接続して、導電層２ｂ上に設けることができる。また、絶縁回路基板２よりも上方に設けられた、図示しない制御基板等と電気的に接続して、この制御基板等から吊り下げされて中空に位置するように設けられてもよい。なお、ＭＯＳＦＥＴ２３がケース６内でゲルにより封止された場合であっても、このゲルが光を透過させるものであれば、受光素子７はＭＯＳＦＥＴ２３からの光を受光することができる。また、光ファイバなどの光導波路の入射部をＭＯＳＦＥＴ２３の側方に近接配置させ、この光導波路を通じてＭＯＳＦＥＴ２３からの光を、別の場所に設けられた受光素子７に案内することも可能である。
　受光素子７を用いたＭＯＳＦＥＴ２３の通電時における当該ＭＯＳＦＥＴ２３の電流値や温度の検出及び制御について説明する。
　ＭＯＳＦＥＴ２３のボディダイオード２３４に流れる電流の大きさと、ＭＯＳＦＥＴ２３から放射される光の強度とは、線形の関係にある。
　図６（ａ）～（ｆ）にＭＯＳＦＥＴ２３から放射される光を撮像し、ディスプレー上に表示した中間調画像の写真を示す。なお、図６（ａ）～（ｃ）は周囲を遮光している場合の写真である。そして、図６（ａ）はボディダイオード２３４に流れる電流値が１Ａの場合、図６（ｂ）は電流値が０．１７Ａの場合、図６（ｃ）は電流値が０Ａの場合を示している。図６（ｄ）～（ｆ）は周囲を遮光していない場合の写真である。そして、図６（ｄ）はボディダイオード２３４に流れる電流値が８Ａの場合、図６（ｅ）は電流値が４Ａの場合、図６（ｆ）は電流値が１Ａの場合を示している。図６（ａ）と図６（ｆ）とは、遮光の有無の相違であって、ボディダイオード２３４に流れる電流値は同じである。図６から電流値が０Ａの場合（図６（ｃ））は発光しておらず、電流値が大きいほど強く発光していることが分かる。
　そこで、あらかじめＭＯＳＦＥＴ２３から放射される光の強度と、ＭＯＳＦＥＴ２３のボディダイオード２３４に流れる電流の大きさとの関係をデータ化しておく。このデータを参照することにより、受光素子７を含む制御（保護）回路は、受光素子７から受光した光の強度によって、通電時のＭＯＳＦＥＴ２３のボディダイオード２３４に流れている電流値を得ることができる。
　また、上記で得られた電流値と、ＭＯＳＦＥＴ２３のボディダイオード２３４の電極間の加えられる電圧と、通電の積算時間とにより、ＭＯＳＦＥＴ２３の発熱量が計算できる。そして、絶縁回路基板の放熱能やゲルの熱伝導特性等も関係して定まるＭＯＳＦＥＴ２３の温度特性と、上記で得られた発熱量とにより、ＭＯＳＦＥＴ２３の温度を検出することができる。
　なお、ＭＯＳＦＥＴ２３のボディダイオード２３４に電流が流れていることは好ましくない場合がある。そこで、受光素子７により光を検出したら、検出したことをアラーム信号とすることにより、直ちにＭＯＳＦＥＴ２３のゲート電圧をゼロにしてＭＯＳＦＥＴ２３の動作を停止させる制御を行うことができる。
　また、ＭＯＳＦＥＴ２３が、動作温度の上限値（例えば１５０℃）に達した場合には、ゲート電圧をゼロにしてＭＯＳＦＥＴ２３の動作を止めるか、又はゲート電圧を下げる等の制御を行って、ＭＯＳＦＥＴ２３を保護することもできる。
　ゲート電圧を下げる制御は、例えば、次のように行うこともできる。受光素子７における光強度Ｌ１、Ｌ２、Ｌ３、……Ｌｎと、ボディダイオード２３４に流れる電流Ｉ１、Ｉ２、Ｉ３、……Ｉｎとの関係についてデータをあらかじめ取っておく。また、ボディダイオード２３４に流れる電流Ｉ１、Ｉ２、Ｉ３、……Ｉｎと、ＭＯＳＦＥＴ２３の温度特性とのデータもあらかじめ取っておく。ＭＯＳＦＥＴ２３の動作中に、受光素子からの光強度とそのときのボディダイオード２３４に流れる電流と、積算時間により求められるＭＯＳＦＥＴ２３の温度が例えば１５０℃に達したときには、ゲート電圧を下げる。そして、下げたゲート電圧におけるボディダイオード２３４に流れる電流値とＭＯＳＦＥＴ２３の温度特性との関係から、改めてＭＯＳＦＥＴ２３の温度を算出する。この温度が１５０℃を超えないようにゲート電圧を制御する。
　このように、ＭＯＳＦＥＴ２３の通電時の光を受光し、その光の強度を求め、この光の強度に基づいてこのＭＯＳＦＥＴ２３のボディダイオード２３４に流れる電流値を得て、この電流値からＭＯＳＦＥＴ２３の温度を検出することができる。センスダイオードのように半導体素子上にセンサを形成しないことから、半導体素子の電流密度を犠牲にすることがない。また、かかる温度の検出は、反応速度が速いのでサーミスタよりも有利である。また、受光素子は中空に配置することができるので、パワー半導体モジュールの小型化に有利である。
　上述したＳｉＣよりなるショットキーバリアダイオード１３とＳｉＣよりなるＭＯＳＦＥＴ２３とを組み合わせてなるパワー半導体モジュールがある。このようなパワー半導体モジュールにおいては、ショットキーバリアダイオード１３及びＭＯＳＦＥＴ２３から選ばれる少なくとも一方のパワー半導体チップ、好ましくは両方のパワー半導体チップの側方に、受光素子７を近接配置して、これらのパワー半導体チップの電流値や温度を検出することができる。
　以上、図面を用いて本発明の半導体装置の実施形態について説明したが、本発明の半導体装置は、実施形態及び図面の記載に限定されるものではなく、本発明の趣旨を逸脱しない範囲で幾多の変形が可能である。例えば実施形態においてはＳｉＣ半導体の場合について述べたが、パワー半導体チップ３がＧａＮ半導体の場合についても同様に適用することができる。
　１　　半導体装置
　２　　絶縁回路基板
　３　　パワー半導体チップ
　４　　はんだ
　５　　ボンディングワイヤ
　６　　ケース
　７　　受光素子
　１３　　ショットキーバリアダイオード
　２３　　ＭＯＳＦＥＴ

Claims (6)

  1. 　ワイドバンドギャップ半導体素子と、
    　該ワイドバンドギャップ半導体素子が通電されたときの発光を受光する受光素子と、
    を備える半導体装置。
  2. 　前記ワイドバンドギャップ半導体素子が、シリコンカーバイド又はガリウムナイトライドよりなる請求項１記載の半導体装置。
  3. 　前記ワイドバンドギャップ半導体素子が、ＭＯＳＦＥＴ又はショットキーバリアダイオードを含む請求項２記載の半導体装置。
  4. 　前記受光素子が、前記ワイドバンドギャップ半導体素子の側方に近接配置された請求項１記載の半導体装置。
  5. 　前記受光素子が、前記ワイドバンドギャップ半導体素子の側方に入射部が近接配置された光導波路を通じて発光を受光する請求項１記載の半導体装置。
  6. 　前記受光素子により前記ワイドバンドギャップ半導体素子から発光される光の強度を検出し、該光の強度により該ワイドバンドギャップ半導体素子に流れる電流値を得る請求項１記載の半導体装置。
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016192504A (ja) * 2015-03-31 2016-11-10 新電元工業株式会社 電子装置
CN106354046A (zh) * 2016-11-18 2017-01-25 广州视源电子科技股份有限公司 智能功率模块的控制方法和装置
WO2017078058A1 (ja) * 2015-11-06 2017-05-11 株式会社日立製作所 電力変換装置
JP2020525797A (ja) * 2017-06-28 2020-08-27 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ 発光によりパワーエレクトロニクス部品の冷却路の熱劣化を測定するためのデバイス

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6299441B2 (ja) * 2014-06-02 2018-03-28 株式会社デンソー 半導体装置
JP6699737B2 (ja) * 2016-09-09 2020-05-27 三菱電機株式会社 半導体装置
DE102017209833A1 (de) * 2017-06-12 2018-12-13 Robert Bosch Gmbh Vorrichtung zur Umformung elektrischer Energie und Verfahren zur Bestimmung eines durch ein elektronisches Bauelement fließenden Stroms
DE102017210863A1 (de) * 2017-06-28 2019-01-03 Robert Bosch Gmbh Totzeitregelung mit aktiver Rückkopplung durch Lumineszenz
DE102017212856A1 (de) * 2017-07-26 2019-01-31 Robert Bosch Gmbh Vorrichtung zur Umformung elektrischer Energie und Verfahren zur Bestimmung der Temperatur eines Halbleiterbauelements durch Lumineszenz

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002325427A (ja) * 2001-04-25 2002-11-08 Kansai Electric Power Co Inc:The パワー半導体素子回路及びこれを用いたインバータ装置
WO2005013361A1 (ja) * 2003-07-30 2005-02-10 The Kansai Electric Power Co., Inc. 高耐熱半導体装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989934A (en) * 1987-11-13 1991-02-05 Kopin Corporation Monolithic integrated transceiver of III-V devices on silicon
JPH0644116Y2 (ja) * 1988-07-05 1994-11-14 三洋電機株式会社 炭化ケイ素発光ダイオード装置
JP2767965B2 (ja) * 1990-03-12 1998-06-25 三菱電機株式会社 電力変換装置及びインバータ装置
US5488468A (en) * 1991-12-26 1996-01-30 Sharp Kabushiki Kaisha Optical distance measuring apparatus having semiconductor position sensitive photodetector
JPH07135731A (ja) * 1993-11-09 1995-05-23 Fuji Electric Co Ltd 半導体素子の過熱保護装置
JP3147141B2 (ja) * 1995-08-30 2001-03-19 株式会社日立製作所 光アセンブリ
JP3194353B2 (ja) * 1996-07-26 2001-07-30 トヨタ自動車株式会社 半導体モジュールの温度検出装置
US6340826B1 (en) * 1998-03-30 2002-01-22 Agisilaos Iliadis Infra-red light emitting Si-MOSFET
US6278138B1 (en) * 1998-08-28 2001-08-21 Sony Corporation Silicon-based functional matrix substrate and optical integrated oxide device
US7544970B2 (en) 2003-08-22 2009-06-09 The Kansai Electric Power Co., Inc. Semiconductor device and method of producing the same, and power conversion apparatus incorporating this semiconductor device
WO2006104063A1 (ja) * 2005-03-28 2006-10-05 Tokyo Institute Of Technology 窒化物系深紫外発光素子およびその製造方法
JP4153513B2 (ja) 2005-09-28 2008-09-24 関西電力株式会社 半導体装置の温度測定方法および半導体装置の温度測定装置
JP2007288992A (ja) * 2006-03-20 2007-11-01 Hitachi Ltd 半導体回路
JP5241177B2 (ja) 2007-09-05 2013-07-17 株式会社オクテック 半導体装置及び半導体装置の製造方法
JP2010025756A (ja) 2008-07-18 2010-02-04 Fuji Electric Systems Co Ltd 温度計測装置及び温度分布計測システム
WO2012086099A1 (ja) 2010-12-21 2012-06-28 三菱電機株式会社 炭化珪素半導体装置およびその製造方法
JP5677222B2 (ja) 2011-07-25 2015-02-25 三菱電機株式会社 炭化珪素半導体装置
US9012826B2 (en) * 2012-01-03 2015-04-21 Avago Technologies General Ip (Singapore) Pte. Ltd. Optocoupler with multiple photodetectors and improved feedback control of LED

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002325427A (ja) * 2001-04-25 2002-11-08 Kansai Electric Power Co Inc:The パワー半導体素子回路及びこれを用いたインバータ装置
WO2005013361A1 (ja) * 2003-07-30 2005-02-10 The Kansai Electric Power Co., Inc. 高耐熱半導体装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016192504A (ja) * 2015-03-31 2016-11-10 新電元工業株式会社 電子装置
WO2017078058A1 (ja) * 2015-11-06 2017-05-11 株式会社日立製作所 電力変換装置
CN106354046A (zh) * 2016-11-18 2017-01-25 广州视源电子科技股份有限公司 智能功率模块的控制方法和装置
JP2020525797A (ja) * 2017-06-28 2020-08-27 ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツングＲｏｂｅｒｔ Ｂｏｓｃｈ Ｇｍｂｈ 発光によりパワーエレクトロニクス部品の冷却路の熱劣化を測定するためのデバイス
US11269005B2 (en) 2017-06-28 2022-03-08 Robert Bosch Gmbh Device for measuring a thermal degradation of the cooling path of power electronic components using luminescence

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