WO2014170003A1 - Funkenverdampfen von metallischen, intermetallischen und keramischen targetmaterialien um al-cr-n beschichtungen herzustellen - Google Patents

Funkenverdampfen von metallischen, intermetallischen und keramischen targetmaterialien um al-cr-n beschichtungen herzustellen Download PDF

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Publication number
WO2014170003A1
WO2014170003A1 PCT/EP2014/000989 EP2014000989W WO2014170003A1 WO 2014170003 A1 WO2014170003 A1 WO 2014170003A1 EP 2014000989 W EP2014000989 W EP 2014000989W WO 2014170003 A1 WO2014170003 A1 WO 2014170003A1
Authority
WO
WIPO (PCT)
Prior art keywords
target
intermetallic
powder
compound
coatings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2014/000989
Other languages
German (de)
English (en)
French (fr)
Inventor
Corinna SABITZER
Joerg PAULITSCH
Peter Polcik
Paul Heinz MAYRHOFER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Priority to EP14718326.3A priority Critical patent/EP2986753B8/de
Priority to CN201480021672.9A priority patent/CN105164306A/zh
Priority to JP2016508033A priority patent/JP2016519218A/ja
Priority to KR1020157032710A priority patent/KR20150143783A/ko
Priority to US14/785,357 priority patent/US20160053364A1/en
Publication of WO2014170003A1 publication Critical patent/WO2014170003A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Definitions

  • the present invention relates to a coating method based on cathodic spark evaporation.
  • Cathodic sputtering is a well known process for depositing nitrides such as Al x Cr 1-x N layers at high deposition rates. With this method, dense and well adhering to the surface layers can be achieved. However, macroparticles (droplets) form during the coating, which are incorporated into the layers and impair the coating quality. Droplet formation occurs in particular when a target contains at least two metals which have very different melting points, as is the case with aluminum and chromium. The size and number of these droplets can be reduced by increasing the nitrogen flow.
  • the object of the present invention is to further reduce the number and size of the droplets.
  • the spark evaporation is operated by means of targets prepared by powder metallurgy in which the components are present as intermetallic compounds, ie for the target preparation, a powder was used which contains an intermetallic compound.
  • An example of such an intermetallic compound is Al 8 Cr 5 .
  • an Al-Cr-N layer can be obtained which essentially contains a composition of metallic proportions of 60 at% Al and 40 at% Cr. If, for example, a layer with a concentration ratio of 70 at% Al and 30 at% Cr is to be prepared, it is possible to resort to a target with the intermetallic compound Al 9 Cr 4 .
  • a powder metallurgically produced target can be used in the case of the powder of a intermetallic compound was mixed with the powder of another intermetallic compound.
  • the atomic concentration of the metallic constituents then depends on the mixing ratio of the two powders.
  • targets which contain the ceramic compounds AIN and CrN can also be used on targets which contain the ceramic compounds AIN and CrN.
  • a method for coating a substrate by means of cathodic spark evaporation wherein a powder metallurgy produced target is used as source of material for the spark evaporation, and wherein the powder used for the target preparation contains a first intermetallic compound and a second intermetallic compound.
  • a method for coating a substrate by means of cathodic spark evaporation wherein a powder metallurgically produced target is used as material source for the spark evaporation, and wherein the powder used for the target preparation contains a first ceramic compound, preferably AIN, and a second ceramic compound, preferably CrN, contains.
  • the powder used for the preparation of the target contains both an intermetallic compound and a ceramic compound.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Ceramic Products (AREA)
PCT/EP2014/000989 2013-04-18 2014-04-14 Funkenverdampfen von metallischen, intermetallischen und keramischen targetmaterialien um al-cr-n beschichtungen herzustellen Ceased WO2014170003A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP14718326.3A EP2986753B8 (de) 2013-04-18 2014-04-14 Funkenverdampfen von metallischen, intermetallischen und keramischen targetmaterialien um al-cr-n beschichtungen herzustellen
CN201480021672.9A CN105164306A (zh) 2013-04-18 2014-04-14 电弧蒸发金属靶材、金属间化合物靶材和陶瓷靶材以制造Al-Cr-N涂层
JP2016508033A JP2016519218A (ja) 2013-04-18 2014-04-14 Ａｌ−Ｃｒ−Ｎコーティングを生成するための金属、金属間化合物及びセラミックターゲット材料のアーク蒸着
KR1020157032710A KR20150143783A (ko) 2013-04-18 2014-04-14 Al­Cr­N 코팅을 제조하기 위한 금속, 금속간 및 세라믹 표적 재료들의 아크 증착
US14/785,357 US20160053364A1 (en) 2013-04-18 2014-04-14 ARC VAPORIZATION OF METALLIC, INTERMETALLIC, AND CERAMIC TARGET MATERIALS IN ORDER TO PRODUCE Al-Cr-N COATINGS

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013006633.6 2013-04-18
DE102013006633.6A DE102013006633A1 (de) 2013-04-18 2013-04-18 Funkenverdampfen von metallischen, intermetallischen und keramischen Targetmaterialien um Al-Cr-N Beschichtungen herzustellen

Publications (1)

Publication Number Publication Date
WO2014170003A1 true WO2014170003A1 (de) 2014-10-23

Family

ID=50513881

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2014/000989 Ceased WO2014170003A1 (de) 2013-04-18 2014-04-14 Funkenverdampfen von metallischen, intermetallischen und keramischen targetmaterialien um al-cr-n beschichtungen herzustellen

Country Status (8)

Country Link
US (1) US20160053364A1 (enExample)
EP (1) EP2986753B8 (enExample)
JP (1) JP2016519218A (enExample)
KR (1) KR20150143783A (enExample)
CN (1) CN105164306A (enExample)
AR (1) AR095879A1 (enExample)
DE (1) DE102013006633A1 (enExample)
WO (1) WO2014170003A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102877458B1 (ko) * 2023-03-09 2025-10-29 주식회사 이엠엘 다중 타겟을 이용한 코팅 방법 및 그에 따른 코팅재

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001226764A (ja) * 2000-02-10 2001-08-21 Shin Etsu Chem Co Ltd スパッタリングのターゲット材用焼結体、その製造方法、及びスパッタリング用ターゲット
CH693035A5 (de) * 1994-06-24 2003-01-31 Unaxis Balzers Ag Verfahren zur Herstellung eines Targets, nach dem Verfahren hergestelltes Target und Verwendung desselben.
JP2010236060A (ja) * 2009-03-31 2010-10-21 Hitachi Tool Engineering Ltd 窒化物分散Ｔｉ−Ａｌ系ターゲット及びその製造方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2275585A (en) * 1937-10-08 1942-03-10 Clad Metals Ind Inc Method of making composite metal
US3836451A (en) * 1968-12-26 1974-09-17 A Snaper Arc deposition apparatus
US3625848A (en) * 1968-12-26 1971-12-07 Alvin A Snaper Arc deposition process and apparatus
LU78204A1 (de) * 1977-09-29 1979-05-25 Bleichert Foerderanlagen Gmbh Einschienenfoerderanlage
US5342571A (en) * 1992-02-19 1994-08-30 Tosoh Smd, Inc. Method for producing sputtering target for deposition of titanium, aluminum and nitrogen coatings, sputtering target made thereby, and method of sputtering with said targets
JPH09249966A (ja) * 1996-03-13 1997-09-22 Mitsubishi Materials Corp 金属間化合物分散型焼結Ａｌ合金製スパッタリングターゲット
US20070189916A1 (en) * 2002-07-23 2007-08-16 Heraeus Incorporated Sputtering targets and methods for fabricating sputtering targets having multiple materials
US6759005B2 (en) * 2002-07-23 2004-07-06 Heraeus, Inc. Fabrication of B/C/N/O/Si doped sputtering targets
EP1627094B1 (de) * 2003-04-28 2018-10-24 Oerlikon Surface Solutions AG, Pfäffikon Werkstück mit alcr-haltiger hartstoffschicht
US7575039B2 (en) * 2003-10-15 2009-08-18 United Technologies Corporation Refractory metal core coatings
JP5192642B2 (ja) * 2005-11-11 2013-05-08 三菱重工業株式会社 表面被覆部材及びその製造方法ならびに工具及び工作装置
JP2008179853A (ja) * 2007-01-24 2008-08-07 Hitachi Tool Engineering Ltd ホウ化物含有ターゲット材
SE531749C2 (sv) * 2007-09-17 2009-07-28 Seco Tools Ab Metod att utfälla slitstarka skikt på hårdmetall med bågförångning och katod med Ti3SiC2 som huvudbeståndsdel
CN102124138A (zh) * 2008-08-17 2011-07-13 欧瑞康贸易股份公司(特吕巴赫) 适用于火花蒸发的靶的应用以及适于此应用的靶的制备方法
PL2166128T3 (pl) * 2008-09-19 2012-05-31 Oerlikon Trading Ag Sposób wytwarzania powłok z tlenków metali przez naparowywanie łukowe
EP2363509A1 (en) * 2010-02-28 2011-09-07 Oerlikon Trading AG, Trübbach Synthesis of metal oxides by reactive cathodic arc evaporation
DE102010042828A1 (de) * 2010-10-22 2012-04-26 Walter Ag Target für Lichtbogenverfahren

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH693035A5 (de) * 1994-06-24 2003-01-31 Unaxis Balzers Ag Verfahren zur Herstellung eines Targets, nach dem Verfahren hergestelltes Target und Verwendung desselben.
JP2001226764A (ja) * 2000-02-10 2001-08-21 Shin Etsu Chem Co Ltd スパッタリングのターゲット材用焼結体、その製造方法、及びスパッタリング用ターゲット
JP2010236060A (ja) * 2009-03-31 2010-10-21 Hitachi Tool Engineering Ltd 窒化物分散Ｔｉ−Ａｌ系ターゲット及びその製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
BRIAN GABBITAS ET AL: "Microstructural evolution during mechanical milling of Ti/Al powder mixture and production of intermetallic TiAl cathode target", JOURNAL OF MATERIALS SCIENCE, KLUWER ACADEMIC PUBLISHERS, BO, vol. 47, no. 3, 7 September 2011 (2011-09-07), pages 1234 - 1243, XP019993186, ISSN: 1573-4803, DOI: 10.1007/S10853-011-5886-9 *

Also Published As

Publication number Publication date
EP2986753B1 (de) 2019-03-20
US20160053364A1 (en) 2016-02-25
EP2986753A1 (de) 2016-02-24
CN105164306A (zh) 2015-12-16
KR20150143783A (ko) 2015-12-23
JP2016519218A (ja) 2016-06-30
DE102013006633A1 (de) 2014-10-23
EP2986753B8 (de) 2019-06-19
AR095879A1 (es) 2015-11-18

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