WO2014098091A1 - 軟質金属に対する耐凝着性に優れた硬質皮膜 - Google Patents
軟質金属に対する耐凝着性に優れた硬質皮膜 Download PDFInfo
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- WO2014098091A1 WO2014098091A1 PCT/JP2013/083787 JP2013083787W WO2014098091A1 WO 2014098091 A1 WO2014098091 A1 WO 2014098091A1 JP 2013083787 W JP2013083787 W JP 2013083787W WO 2014098091 A1 WO2014098091 A1 WO 2014098091A1
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D37/00—Tools as parts of machines covered by this subclass
- B21D37/01—Selection of materials
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/58007—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/58007—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides
- C04B35/58014—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on refractory metal nitrides based on titanium nitrides, e.g. TiAlON
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D22/00—Shaping without cutting, by stamping, spinning, or deep-drawing
- B21D22/02—Stamping using rigid devices or tools
- B21D22/022—Stamping using rigid devices or tools by heating the blank or stamping associated with heat treatment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
Definitions
- the present invention relates to a hard film having excellent adhesion resistance to soft metals.
- Hot press also called “die quench” is a technique in which a steel plate (blank) is heated to an austenite temperature (usually 800 to 900 ° C.), rapidly cooled with a water-cooled mold, and simultaneously formed into a desired part shape. is there. Since the process from heating to pressing of the steel sheet is performed in the air from a cost standpoint, the surface of the steel sheet is mainly composed of Al or Zn for the purpose of suppressing scale formation due to oxidation of the steel sheet. Plated steel sheets with layers formed are often used. However, when the plated steel sheet is used, particularly when a zinc (Zn) plated steel sheet is used, the Zn adheres to the press mold as the number of shots increases. It leads to a change and causes problems in the product shape and the surface quality of the formed steel sheet.
- a ceramic film such as TiN is formed as a coating film on the surface of the mold for hot pressing.
- the adhesion resistance to the soft metal is sufficient.
- the present invention has been made paying attention to the above-mentioned circumstances, and the object thereof is a hard film that hardly adheres to the soft metal, and a hard film-coated member on which the hard film is formed. Is to realize.
- the hard coating of the present invention is coated on the surface of a jig (particularly a mold) as a hard coating covering member will be described as an example.
- the present invention is not limited to this and will be described later.
- the case where it is applied to a sliding member or the like as a hard film covering member is also included.
- the hard coating excellent in adhesion resistance to soft metals of the present invention that has solved the above-mentioned problems has a surface arithmetic average roughness (Ra) of 0.05 ⁇ m or less, and the surface is scanned with scanning electrons. It is characterized in that the number of pinholes having an equivalent circle diameter of 1 ⁇ m or more is 5 or less on average when a 45 ⁇ 65 ⁇ m field of view is observed with a microscope at a magnification of at least 5 and 2000 times.
- the hard coating is selected from the group consisting of a metal element containing two or more elements selected from the group consisting of Ti, Al, Cr and Si, and the group consisting of C, N and O. It is comprised from 1 or more types of nonmetallic elements.
- the metal element is composed of Ti, Cr, and Al, and the ratio (atomic ratio) in all metal elements is Ti: 0.10 to 0.40, Cr: 0.10 to 0.40, and Al: Hard film satisfying 0.40 or more and 0.70 or less;
- the metal element is composed of Ti, Cr, Al and Si, and the ratio (atomic ratio) to the total metal elements is Ti: 0.10 And a hard film satisfying 0.40 or less, Cr: 0.10 or more and 0.40 or less, Al: 0.40 or more and 0.70 or less, and Si: 0.010 or more and 0.10 or less.
- a part of the metal element is selected from the group consisting of Group 4 element, Group 5 element, Group 6 element, Y, and B in the periodic table, with an upper limit of 20 atomic% in the ratio of all metal elements One or more elements may be substituted.
- the hard coating is preferably formed by a filtered arc ion plating method or an unbalanced magnetron sputtering method.
- the present invention also includes a hard film coating member (particularly a hot press mold) characterized in that the surface of the hard film is coated.
- the hot press mold is a hot work piece made of at least one soft metal selected from the group consisting of Zn, Sn, Al and Mg. Used for forming (particularly hot forming of galvanized steel sheet).
- the hard coating of the present invention is excellent in adhesion resistance to a soft metal such as Zn (hereinafter, simply referred to as “adhesion resistance”). Therefore, if the hard film of the present invention is formed on the surface of a mold / tool used for plastic processing, cutting, or cutting, for example (hereinafter collectively referred to as “tool”), Adhesion of the soft metal to the surface of the tool is suppressed when the surface comes into contact with the workpiece composed of the soft metal. As a result, the tool can be used repeatedly stably over a long period of time.
- a soft metal such as Zn
- FIG. 1 is a scanning electron microscope (Scanning Electron Microscope, SEM) observation photograph of an example having nine pinholes.
- FIG. 2 is an SEM observation photograph of an example having four pinholes.
- FIG. 3 is an SEM observation photograph of an example in which the number of pinholes is one.
- the hard film on the surface of the tool which is in direct contact with the soft metal, is first suppressed in roughness as described in (1) above, that is, arithmetic mean roughness (hereinafter referred to as “Ra” or “surface roughness”). It is necessary to be suppressed to 0.05 ⁇ m or less. This is because, when the surface of the hard coating is rough, adhesion of soft metal occurs starting from the protrusions of the roughness.
- the Ra is preferably 0.02 ⁇ m or less, more preferably 0.01 ⁇ m or less.
- the Ra is measured by the method described in Examples described later.
- the soft metal adhesion is not only caused by the surface roughness, but also originates from pinholes often observed in the film of the vapor phase coating.
- the mechanism at the time of processing, soft metal is pushed into the pinhole and adhesion occurs.
- the probability that the soft metal is pushed into the pinhole depends on the size of the pinhole. If the pinhole has a diameter of about 1 ⁇ m or more, the soft metal can be pushed in.
- the equivalent circle diameter is 1 ⁇ m or more.
- the number of the pinholes is 5 or less in the average value of the observed at least 5 visual fields (hereinafter, this average value may be simply referred to as “the number of pinholes”), adhesion hardly occurs. It revealed that.
- the number of pinholes is more preferably 3 or less, and most preferably 1 or less.
- FIGS. 1 to 3 The observation example (SEM observation photograph) is shown in FIGS. 1 to 3 (in the photograph, a pinhole having a circle-equivalent diameter of 1 ⁇ m or more is circled).
- FIG. 1 shows an example in which the number of pinholes of 1 ⁇ m or more is nine
- FIG. 2 shows an example in which the number of pinholes is four
- FIG. 3 shows an example in which the number of pinholes is one.
- the material constituting the hard coating must be a material that does not react with the contacting soft metal to form a compound. Further, in hot pressing, it is assumed that the mold comes into contact with a heated steel plate, and in other processing processes (such as hot forging of Al), a temperature increase due to sliding heat generation is assumed. Therefore, it is preferable that the material constituting the hard coating also has oxidation resistance and wear resistance.
- the material is specifically selected from a metal element including two or more elements selected from the group consisting of Ti, Al, Cr and Si, and a group consisting of C, N and O. Compounds composed of one or more non-metallic elements are preferred.
- TiAl, AlCr, TiCrAl, or TiCrAlSi is more preferable.
- the ratio (atomic ratio) of each metal element in the total metal elements is Ti: 0.10 to 0.40, Cr: 0.10 to 0.40, Al: 0.00. It is preferable to be within the range of 40 or more and 0.70 or less.
- the ratio (atomic ratio) of each metal element in all metal elements is Ti: 0.10 to 0.40, Cr: 0.10 to 0.40, Al: It is preferable to be within the range of 0.40 or more and 0.70 or less and Si: 0.010 or more and 0.10 or less.
- TiAlN, AlCrN, TiCrAlN, and TiCrAlSiN are particularly preferable from the viewpoints of wear resistance and oxidation resistance.
- the hard coating of the present invention has an upper limit of 20 atom% (atomic ratio of 0.20) in which a part of the metal element occupies the total metal elements, and Group 4 elements and Group 5 elements in the periodic table.
- Group 6 elements, Y, and B may be substituted with one or more elements selected from the group consisting of Y and B (hereinafter sometimes referred to as “X group elements”).
- X group elements the X group element amount can be set to, for example, 1 atomic% or more. The adhesion resistance is not reduced by the substitution.
- Ta, Nb, W, Y, and B are more preferable, and Y and B are more preferable.
- a filtered arc ion plating method or a sputtering method is preferred among the gas phase coating methods.
- the sputtering method (and more particularly, the unbalanced magnetron sputtering (UBMS) method) does not generate particles that are the starting point of pinholes in principle, so a hard coating with better adhesion resistance. It is useful for the formation of General conditions may be adopted as the film forming conditions when the film is formed by the above methods.
- a target composed of the metal element (and the X group element as necessary) of the hard coating is used, and as an atmospheric gas, nitrogen gas, hydrocarbon gas such as methane, oxygen gas, Ar
- nitrogen gas, hydrocarbon gas such as methane, oxygen gas, Ar The formation of the hard film of the present invention using gas or the like can be mentioned.
- film formation conditions for example, substrate temperature: 300 to 700 ° C., bias voltage: ⁇ 30 to ⁇ 70 V (the minus indication of the bias voltage indicates the substrate with respect to the ground potential) Means a negative potential, the same applies hereinafter), and the total gas pressure is 1 to 5 Pa.
- film formation conditions include, for example, a substrate temperature: 300 to 700 ° C., input power: 3 kW (when the target diameter is 6 inches), and total gas pressure: 0.6 Pa, for example.
- Ra arithmetic average roughness
- the method for polishing the hard film include projection polishing, electrolytic polishing, buff polishing, and the like. Furthermore, since the Ra of the hard film is affected by the surface properties of the base material, it is recommended to polish the surface of the base material before the hard film is formed until the Ra becomes 0.05 ⁇ m or less. Examples of the polishing method for the substrate surface include electrolytic polishing, buff polishing, and chemical polishing.
- the hard coating of the present invention with controlled surface properties has excellent adhesion resistance to soft metals. Therefore, the hard coating of the present invention is coated on the surface of a tool used for processing (particularly hot working) of a workpiece having at least a surface made of a soft metal (Zn or the like). Adhesiveness is fully exhibited.
- the soft metal include pure metals and alloys made of one or more elements selected from the group consisting of Zn, Sn, Al, and Mg.
- a metal plate for example, a steel plate on which one or more plating layers selected from the group consisting of Zn, Sn, Al, and Mg are formed as the above-mentioned “work material whose surface is composed of a soft metal (Zn or the like)” ), Pure Al, Al-based alloy, pure Sn, Sn-based alloy, pure Zn, Zn-based alloy, Mg-based alloy and the like.
- the galvanized steel sheet including galvanized steel sheet (GI), galvannealed steel sheet (GA), and electrogalvanized steel sheet (EG)
- GI galvanized steel sheet
- GA galvannealed steel sheet
- EG electrogalvanized steel sheet
- Al metal forging Al die casting, Zn die casting, Mg die casting and the like can be mentioned.
- die including die, punch, pad, etc.
- press molding especially hot press
- extrusion molding etc.
- jig tool chip, drill, end mill, etc.
- Cutting members, punches, etc. sliding members in automobile parts and machine parts, and the like.
- the hard film covering member of the present invention (especially a mold for hot pressing) is only required to be coated with at least a portion in contact with a soft metal with the hard film of the present invention, and in particular for coating a non-contact portion with a soft metal. It doesn't matter.
- the hard coating of the present invention is particularly suitable for coating on a mold (hot press mold) used in a hot press using a galvanized steel sheet as a workpiece, which is particularly likely to cause adhesion.
- the film thickness of the hard coating of the present invention is preferably 0.5 ⁇ m or more. This is because if the film thickness is less than 0.5 ⁇ m, the coating is not sufficient and the substrate may be exposed.
- the film thickness is more preferably 1 ⁇ m or more.
- the film thickness of the hard film is preferably 10 ⁇ m or less.
- the film thickness is more preferably 5 ⁇ m or less.
- the hard film covering member only needs to have the outermost surface made of the hard film of the present invention, and between the hard film of the outermost surface and the base material, a hard film other than that defined in the present invention, CrN, An intermediate layer such as TiN may be formed.
- Example 1 In Example 1, the effects of the presence or absence of a hard coating, the surface roughness, and the number of pinholes on the amount of soft metal adhesion were confirmed.
- the coating film shown in Table 1 is arc ion plating method (Arc Ion Placing, indicated as “AIP” in the table), and filtered arc ion plating method (described as “Filter AIP” in the table). ) Or an unbalanced magnetron sputtering method (indicated as “UBMS” in the table), about 3 ⁇ m was formed on the surface of each substrate.
- the film formation conditions of the arc ion plating method were a substrate temperature: 400 ° C., a total gas pressure: 4 Pa, and a bias voltage: ⁇ 70 V.
- the film forming conditions of the filtered arc ion plating method were as follows: substrate temperature: 400 ° C., total gas pressure: 4 Pa, bias voltage: ⁇ 70V.
- the film formation conditions of the unbalanced magnetron sputtering method (UBMS method) were as follows: substrate temperature: 400 ° C., total gas pressure: 0.6 Pa, input power: 3 kW (target diameter 6 inches).
- a TiCrAlSi target having the composition shown in Table 1 was used as a target, and the atmosphere gas was pure nitrogen gas in the AIP method and the filter AIP method.
- the atmosphere gas was pure nitrogen gas in the AIP method and the filter AIP method.
- a sample in which no coating film was formed was also prepared (No. 1 in Table 1).
- Ra of each sample was measured using a stylus type surface roughness meter (DekTak6M).
- the scanning length is 1 mm
- the number of measurement points in the horizontal direction is 3900
- Ra is calculated from a roughness curve obtained by removing waviness from the measured surface curve.
- the calculation of Ra was measured at any five locations on the surface of the coating film, and the average value was adopted.
- the average value (Ra) is 0.05 micrometer or less was set as the pass.
- No. 1 is an example in which a coating film is not formed, and Ra in Table 1 is obtained by measuring the surface roughness of the substrate for reference.
- the surface of the coating film was observed with a scanning electron microscope (Hitachi accelerating voltage 20 kV, magnification 2000 ⁇ , field size 45 ⁇ 65 ⁇ m), and pinholes with a circle equivalent diameter of 1 ⁇ m or more were counted. This measurement was performed in 5 fields arbitrarily selected for each sample, and the average value of the number of pinholes was calculated.
- the Zn adhesion state (adhesion amount) was divided into 5 stages as shown in the following evaluation criteria, and 3 or less was evaluated as being excellent in adhesion resistance.
- evaluation criteria The ratio (%) of the area where Zn was adhered to the contact surface of the mold with the plate material was determined and evaluated in the following 0 to 5 levels. 5: Over 60% 4: Over 30% 60% or less 3: Over 20% 30% or less 2: Over 10% 20% or less 1: Over 5% 10% or less 0: 5% or less
- Table 1 shows the following. No. In No. 1, since there was no coating film on the mold surface, the adhesion amount of the soft metal was remarkably increased. No. In No. 2, a coating film was formed, but Ra was considerably large and the number of pinholes was excessive, so that the amount of soft metal adhered was remarkably increased.
- No. No. 3 has a coating film formed, but Ra is outside the upper limit prescribed in the present invention and the number of pinholes is excessive, so that the amount of soft metal adhesion is no. Although it was not about 2, it increased.
- Example 2 In Example 2, coating films having various component compositions were formed, and the adhesion resistance to soft metals was evaluated.
- coating films having various component compositions shown in Table 2 were formed by the film forming method shown in Table 2, and then polished to obtain Ra samples shown in Table 2.
- a target composed of a metal element (and also an X group element) of the coating film shown in Table 2 was used.
- pure nitrogen gas was used as the atmospheric gas.
- hydrocarbon gas is used in addition to nitrogen gas as the atmospheric gas.
- nitrogen gas, hydrocarbon gas, and oxygen gas were used as the atmospheric gas.
- No. In No. 9 a mixed gas of Ar gas and nitrogen gas was used.
- the sample preparation conditions including other film formation conditions are the same as those in Example 1.
- Table 2 shows the following. Any of the coating films of Nos. 1 to 14 satisfies the Ra and the number of pinholes defined in the present invention, and the amount of adhesion is suppressed.
- the metal element in the component of the hard coating preferably contains two or more elements selected from the group consisting of Ti, Al, Cr and Si. This shows that the amount of adhesion can be sufficiently suppressed.
- Nos. 10 to 14 are examples in which a part of two or more metal elements selected from the group consisting of Ti, Al, Cr and Si in the hard coating is replaced with an X group element. It can be seen that even when these films are coated, the amount of adhesion is suppressed.
Abstract
Description
(a)前記金属元素がTi、CrおよびAlからなり、全金属元素に占める割合(原子比)が、Ti:0.10以上0.40以下、Cr:0.10以上0.40以下、およびAl:0.40以上0.70以下を満たす硬質皮膜;や(b)前記金属元素がTi、Cr、AlおよびSiからなり、全金属元素に占める割合(原子比)が、Ti:0.10以上0.40以下、Cr:0.10以上0.40以下、Al:0.40以上0.70以下、およびSi:0.010以上0.10以下を満たす硬質皮膜;が挙げられる。
(1)表面の算術平均粗さ(Ra)が0.05μm以下
(2)走査型電子顕微鏡で45×65μmの視野を少なくとも5視野、2000倍で観察したときに、円相当直径が1μm以上のピンホールの数が平均で5個以下
表面性状が上記要件を満たす硬質皮膜を得るには、次の方法で硬質皮膜を製造することが推奨される。
実施例1では、硬質皮膜の有無、表面粗さ、ピンホール数が、軟質金属の凝着量に及ぼす影響を確認した。
各サンプルのRaは、触針式の表面粗さ計(DekTak6M)を使用して測定した。本発明では、走査長さを1mmとし、水平方向の測定点数を3900点とし、測定した表面曲線からうねりを除去した粗さ曲線からRaを算出した。このRaの算出を、コーティング膜の表面の任意の5箇所で測定し、その平均値を採用した。そしてその平均値(Ra)が0.05μm以下の場合を合格とした。尚、表1のNo.1は、コーティング膜を形成していない例であり、表1中のRaは、基材の表面粗さを参考までに測定したものである。
走査型電子顕微鏡(日立製 加速電圧20kV、倍率2000倍、視野サイズ45×65μm)でコーティング膜の表面の観察を行い、円相当直径が1μm以上のピンホールをカウントした。この測定を、各試料につき任意に選択した5視野で行い、ピンホール数の平均値を算出した。
軟質金属の代表としてZnを選択し、板材(ブランク)として合金化溶融亜鉛めっき(GA)鋼板(亜鉛めっき鋼板)を用意した。そして、上記コーティング膜があり・なしの曲げ金型を用い、加熱した上記亜鉛めっき鋼板の曲げ加工を下記成形条件で行って、加工後の金型表面におけるZn凝着状況を調査した。
(成形条件)
板材(ブランク):合金化溶融亜鉛めっき(GA)鋼板
(引張強度590MPa、板厚1.4mm)
金型材料:JIS規格の合金工具鋼鋼材であるSKD61材+表1に示す各種コーティング膜
押しつけ荷重:1t
加熱温度:760℃
(評価基準)
金型の前記板材との接触面において、Znが凝着している面積の割合(%)を求め、次の0~5段階で評価した。
5:60%超
4:30%超60%以下
3:20%超30%以下
2:10%超20%以下
1:5%超10%以下
0:5%以下
実施例2では、種々の成分組成のコーティング膜を形成して、軟質金属に対する耐凝着性を評価した。
Claims (10)
- 表面の算術平均粗さ(Ra)が0.05μm以下であり、かつ該表面を、走査型電子顕微鏡で45×65μmの視野を少なくとも5視野、2000倍で観察したときに、円相当直径が1μm以上のピンホールの数が平均で5個以下であることを特徴とする軟質金属に対する耐凝着性に優れた硬質皮膜。
- Ti、Cr、AlおよびSiよりなる群から選択される2種以上の元素を含む金属元素と、C、NおよびOよりなる群から選択される1種以上の非金属元素とから構成される請求項1に記載の硬質皮膜。
- 前記金属元素がTi、CrおよびAlからなり、全金属元素に占める割合(原子比)が、
Ti:0.10以上0.40以下、
Cr:0.10以上0.40以下、および
Al:0.40以上0.70以下
を満たす請求項2に記載の硬質皮膜。 - 前記金属元素がTi、Cr、AlおよびSiからなり、全金属元素に占める割合(原子比)が、
Ti:0.10以上0.40以下、
Cr:0.10以上0.40以下、
Al:0.40以上0.70以下、および
Si:0.010以上0.10以下
を満たす請求項2に記載の硬質皮膜。 - 前記金属元素の一部が、全金属元素に占める割合で20原子%を上限として、周期表の第4族元素、第5族元素、第6族元素、Y、およびBよりなる群から選択される1種以上の元素で置換されている請求項2に記載の硬質皮膜。
- フィルタードアークイオンプレーティング法またはアンバランスドマグネトロンスパッタリング法で形成されたものである請求項1に記載の硬質皮膜。
- 請求項1~6のいずれかに記載の硬質皮膜が表面に被覆されていることを特徴とする硬質皮膜被覆部材。
- 請求項1~6のいずれかに記載の硬質皮膜が表面に被覆されていることを特徴とするホットプレス用金型。
- 少なくとも表面がZn、Sn、AlおよびMgよりなる群から選択される1種以上の軟質金属で構成された被加工材の、熱間成形に用いられる請求項8に記載のホットプレス用金型。
- 亜鉛めっき鋼板の熱間成形に用いられる請求項8に記載のホットプレス用金型。
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EP13864307.7A EP2937439A4 (en) | 2012-12-21 | 2013-12-17 | HARD COATING FILM WITH EXCELLENT RESISTANCE TO SOFT METAL |
CA2891886A CA2891886C (en) | 2012-12-21 | 2013-12-17 | Hard coating having excellent adhesion resistance to soft metal |
US14/443,243 US9751809B2 (en) | 2012-12-21 | 2013-12-17 | Hard coating having excellent adhesion resistance to soft metal |
CN201380066875.5A CN104854255A (zh) | 2012-12-21 | 2013-12-17 | 相对于软金属的耐附着性优异的硬质覆膜 |
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JP2012279768A JP2014122400A (ja) | 2012-12-21 | 2012-12-21 | 軟質金属に対する耐凝着性に優れた硬質皮膜 |
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JP (1) | JP2014122400A (ja) |
KR (1) | KR20150084066A (ja) |
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JPWO2017094440A1 (ja) * | 2015-12-02 | 2018-04-12 | 三菱日立ツール株式会社 | 硬質皮膜、硬質皮膜被覆部材及びその製造方法、及び硬質皮膜の製造に用いるターゲット及びその製造方法 |
JP6878999B2 (ja) * | 2017-03-28 | 2021-06-02 | 日本製鉄株式会社 | 打抜き加工用金型及びそれを用いた打抜き加工方法 |
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EP0846784B1 (en) | 1996-12-04 | 2004-09-08 | Sumitomo Electric Industries, Ltd. | Coated tool and method of manufacturing the same |
JP4253169B2 (ja) * | 2002-09-09 | 2009-04-08 | 株式会社神戸製鋼所 | 耐摩耗性に優れた硬質皮膜とその製造方法、および切削工具並びに硬質皮膜形成用ターゲット |
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EP2937439A4 (en) | 2016-07-20 |
US20150336851A1 (en) | 2015-11-26 |
CA2891886A1 (en) | 2014-06-26 |
JP2014122400A (ja) | 2014-07-03 |
CA2891886C (en) | 2019-01-22 |
EP2937439A1 (en) | 2015-10-28 |
CN104854255A (zh) | 2015-08-19 |
KR20150084066A (ko) | 2015-07-21 |
US9751809B2 (en) | 2017-09-05 |
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