WO2014092056A1 - Plaque de face avant pour capteur tactile - Google Patents

Plaque de face avant pour capteur tactile Download PDF

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Publication number
WO2014092056A1
WO2014092056A1 PCT/JP2013/083000 JP2013083000W WO2014092056A1 WO 2014092056 A1 WO2014092056 A1 WO 2014092056A1 JP 2013083000 W JP2013083000 W JP 2013083000W WO 2014092056 A1 WO2014092056 A1 WO 2014092056A1
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WIPO (PCT)
Prior art keywords
insulating layer
layer
front plate
tactile sensor
meth
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PCT/JP2013/083000
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English (en)
Japanese (ja)
Inventor
健輔 藤井
藤原　晃男
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旭硝子株式会社
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Priority to JP2014552036A priority Critical patent/JP6356611B2/ja
Publication of WO2014092056A1 publication Critical patent/WO2014092056A1/fr

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/016—Input arrangements with force or tactile feedback as computer generated output to the user
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/045—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using resistive elements, e.g. a single continuous surface or two parallel surfaces put in contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/20—Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/206—Insulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties
    • B32B2307/412—Transparent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/724—Permeability to gases, adsorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/208—Touch screens

Definitions

  • the present invention relates to a front plate for a tactile sensor provided on the front surface of a touch panel display device equipped with a so-called tactile sensor that feeds back a tactile sensation to a user's fingertip.
  • a touch panel display device including a touch panel display that is operated by directly touching the touch panel with a finger or the like is used.
  • a touch panel display device used as an input device or an input / output device can freely configure an input screen by software. Therefore, the touch panel display device has flexibility that cannot be obtained by an input device configured using a mechanical switch. Since it can be compactly configured and has many advantages such as low frequency of mechanical failure, it is now widely used from operation panels of various relatively large machines to very small portable device input / output devices. It's being used.
  • the fingertip of the user operating the touch panel touches only a flat and smooth surface to be touched. Therefore, the click feeling felt by the fingertip when operating an input device configured using a mechanical switch. As described above, there is no feedback to the user by touch, which makes the operation feeling of the device unreliable.
  • a touch panel display device provided with a so-called tactile sensor that feeds back a tactile sensation to the fingertip of the user who operates it has been proposed (for example, see Patent Document 1).
  • a tactile sensation is generated by a user by vibrating the surface of the touch panel in contact with the fingertip of the user.
  • Non-Patent Document 1 discloses a touch panel in which a transparent electrode laminated on a glass substrate is covered with an insulating layer.
  • the voltage and frequency are controlled in a pattern that can reproduce the tactile sensation to be expressed, and the touch panel is touched from a control unit (not shown). It is configured to charge the front plate 101 by energizing a transparent electrode (not shown) of the main body 100 and accumulating charges induced on the front plate 101 side in the layer 103 formed on the transparent substrate 102. Yes.
  • the sensory receptor X such as a finger comes into contact with the surface of the front plate 101 in such a charged state, the sensory receptor can be used as a tactile sensation such as a concavo-convex sensation by the weak electrostatic force acting between the two via the insulating layer 104. It is configured to be detected by X.
  • a front plate provided in such a touch panel display device equipped with a so-called tactile sensor from the viewpoint of ensuring the visibility with respect to the image projected on the touch panel body, it is highly transmissive and reflective for light in the visible light range. While it is required that the rate is low, it does not interfere with the operation of the transparent electrode provided on the touch panel body, and accurately expresses the charged state based on the voltage and frequency sent from the control unit, so that the desired tactile sense can be reproduced with high reproducibility. What can be expressed is required, and it is required to precisely control the resistance value of the layer 103 for accumulating charges within a predetermined range.
  • the resistance value of the charge storage layer 103 is controlled within a predetermined range as described above, when the surface of the front plate 101 is rubbed with a fingertip, moisture or fingertips attached to the surface of the front plate 101 In some cases, sweat or the like that exudes from the inside of the front plate 101 penetrates into the front plate 101, and this moisture reaches the layer 103 to form a leak path in the insulating layer 104.
  • the high resistance layer 3 is electrically connected to the external atmosphere, so that the electrostatic force acting between the sensory receptor X such as a fingertip and the layer 103 (front plate 101) gradually becomes weak, and the user feels by touch. There was a problem where feedback could not be obtained.
  • the present invention has been made in order to solve the above-described problems, and an object of the present invention is to provide a front plate for a tactile sensor that has good sensor accuracy sensed by tactile sense and that suppresses a decrease in sensor accuracy due to long-term use. .
  • the front plate for a tactile sensor of the present invention is a front plate for a tactile sensor in which a high resistance layer and an insulating layer having electrical insulating properties are laminated in this order from the transparent substrate side on a transparent substrate,
  • the surface resistance value of the high resistance layer is 1 to 100 M ⁇ / ⁇ , and the layer constituting the space from the surface on the transparent substrate side of the insulating layer to the surface on the insulating layer side of the front plate for tactile sensors is formed.
  • the water vapor permeability measured by JIS K7129 B method at a temperature of 40 ° C. and a humidity of 100% RH is 0.01 to 1 g / m 2 ⁇ day.
  • the luminous transmittance of the touch sensor front plate is preferably 80% or more.
  • the insulating layer is preferably composed of two or more layers.
  • the insulating layer preferably contains an inorganic oxide as a main component.
  • the insulating layer is preferably a layer formed by curing an ultraviolet curable insulating layer forming composition or a thermosetting insulating layer forming composition.
  • the thickness of the insulating layer containing an inorganic oxide as a main component is preferably 0.05 to 5 ⁇ m. Further, the thickness of the insulating layer obtained by curing the ultraviolet curable insulating layer forming composition or the thermosetting insulating layer forming composition is preferably 1 to 50 ⁇ m.
  • the front plate for a touch sensor has a water repellent layer as the outermost layer on the insulating layer side. Moreover, it is preferable that a barrier layer is interposed between the transparent substrate and the high resistance layer. Further, the water contact angle on the surface on the insulating layer side of the front plate for the touch sensor is preferably 80 degrees or more.
  • a length of 1 ⁇ m is arranged in one central region of each surface on three surfaces parallel to the main surface of the insulating layer that partitions the insulating layer at equal intervals in the thickness direction. It is preferable that the total number (n) of cracks and crystal grain boundaries in the insulating layer intersecting with the straight line, measured using the straight lines, is 8 or less as an average of the three straight lines.
  • the front plate for a tactile sensor of the present invention in the front plate for a tactile sensor in which a high resistance layer and an insulating layer are laminated in this order from the transparent substrate side on the transparent substrate, the sensor accuracy sensed by the tactile sense It is possible to provide a front plate for a tactile sensor in which the decrease in sensor accuracy associated with long-term use is suppressed.
  • the schematic diagram which shows the state which the fingertip adjoined to the touchscreen surface provided with the front plate for touch sensors.
  • the scanning electron microscope image which expands and shows the cross section of the front plate for tactile sensors which concerns on Example 2.
  • FIG. The binarized image of the scanning electron microscope image shown in FIG. The scanning electron microscope image which expands and shows the cross section of the front plate for tactile sensors
  • FIG. 2 is a schematic cross-sectional view showing an example of a front plate for a touch sensor
  • FIG. 3 is a schematic cross-sectional view showing a state in which the front plate for a touch sensor is stacked above the touch panel body.
  • 4 to 7 are schematic sectional views showing other examples of the front plate for a tactile sensor according to the embodiment of the present invention.
  • a high resistance layer 3 and an insulating layer 4 are laminated on a transparent substrate 2 in this order from the transparent substrate 2 side.
  • the surface resistance value of the high resistance layer 3 is 1 to 100 M ⁇ / ⁇ , Based on the JIS K7129 B method of the layer constituting from the surface S1 on the transparent substrate 2 side of the insulating layer 4 to the surface on the insulating layer 4 side of the front plate 1 for tactile sensor, temperature 40 ° C., humidity 100% RH
  • the water vapor transmission rate measured at is from 0.01 to 1 g / m 2 ⁇ day.
  • the “surface on the insulating layer 4 side of the front plate 1 for tactile sensor” refers to the surface of the outermost layer on the insulating layer side of the front plate for tactile sensor.
  • the surface on the insulating layer 4 side of the front plate for the tactile sensor is a functional layer constituting the outermost layer, such as a water repellent layer. It becomes the surface S3 of the layer 7.
  • the “surface on the insulating layer 4 side of the front plate 1 for tactile sensor” means the surface opposite to the surface S4 on the transparent substrate 2 side of the front plate 1 for tactile sensor, that is, the side on which the touch panel is provided.
  • the surface opposite to the surface (see FIG. 3).
  • the surface on the insulating layer side of the front plate for a touch sensor may be referred to as “the surface of the front plate for a touch sensor”.
  • the surface of the front plate for a touch sensor is a surface that is touched by a sensory receptor X such as a fingertip of a user who performs panel operation.
  • the surface S2 opposite to the surface S1 on the transparent substrate 2 side of the insulating layer 4 is the surface of the front plate for a tactile sensor.
  • the layer constituting the surface from the surface S1 on the transparent substrate 2 side of the insulating layer 4 to the surface on the insulating layer 4 side of the front plate 1 for touch sensor is referred to as a cover layer as necessary.
  • the cover layer is a layer sandwiched between the surface S1 of the insulating layer 4 on the transparent substrate 2 side and the surface S2 on the opposite side of the insulating layer 4, That is, the insulating layer 4 itself.
  • the cover layer is composed of the insulating layer 4 and another layer laminated above. The whole thing.
  • the cover layer is formed from the surface S1 of the insulating layer 4 on the transparent substrate 2 side to the surface on the insulating layer 4 side of the front plate 1 for tactile sensor, that is, the water repellent layer 7.
  • This is a layer constituting the space up to the surface S3.
  • the cover layer is a layer composed of the insulating layer 4 and the water repellent layer 7.
  • the water vapor permeability of the cover layer measured at a temperature of 40 ° C. and a humidity of 100% RH is 0.01 to 1 g / m 2 ⁇ day based on JIS K7129 B method.
  • the water vapor transmission rate is a value measured at a temperature of 40 ° C. and a humidity of 100% RH based on the JIS K7129 B method.
  • the cover layer comprising the insulating layer, or the insulating layer and the water repellent layer formed on the surface opposite to the transparent substrate, which the front plate for a tactile sensor of the present invention has, the cover layer itself It is technically difficult to measure the water vapor permeability of each of them. Therefore, for example, the layer constituting the cover layer is formed on a substrate such as a PET film having a water vapor permeability sufficiently higher than the specified value of the cover layer, for example, a water vapor permeability of 20 g / m 2 / day or more.
  • the water vapor permeability corresponding to the measurement based on the JIS K7129 B method can be measured by adjusting the humidity from the formed layer side to the base material side.
  • the water vapor permeability of the cover layer exceeds 1 g / m 2 ⁇ day, for example, when the surface of the front plate 1 for a tactile sensor is rubbed with a fingertip, sweat that has entered inside from the surface of the front plate 1 for a tactile sensor Moisture such as water penetrates into the insulating layer 4 and easily reaches the high resistance layer 3. If a leak path is formed in the insulating layer 4 in this way, the high resistance layer 3 may be electrically connected to the external atmosphere. In this case, the electrostatic force acting between the sensory receptor X such as a fingertip and the surface of the front plate 1 that is brought close to the surface of the front plate 1 for the tactile sensor may weaken and the sensor accuracy may be reduced.
  • the water vapor permeability of the cover layer is further preferably 0.1 to 1 g / m 2 ⁇ day.
  • the transparent base 2, the high resistance layer 3 and the insulating layer 4 constituting the front plate 1 for the tactile sensor will be described.
  • the transparent substrate 2 can be used without particular limitation as long as it is smooth and can transmit light in the visible light region. Specifically, for example, colorless and transparent soda lime silicate glass, aluminosilicate glass (SiO 2 —Al 2 O 3 —Na 2 O glass), lithium aluminosilicate glass, quartz glass, alkali-free glass, and other various glasses
  • a transparent glass plate composed of a plastic film consisting of a single layer of a plastic material selected from polyethylene terephthalate, polycarbonate, triacetyl cellulose, polyethersulfone, polymethyl methacrylate, cycloolefin polymer, etc., or a plastic material selected from the above
  • a plastic film such as a laminated film obtained by laminating two or more layers can be used.
  • the transparent substrate 2 it is preferable to use a soda lime silicate glass plate from the viewpoint of adhesion with a layer directly provided on the surface of the high resistance layer 3. From the viewpoint of the strength of the transparent substrate 2 itself, it is preferable to use a tempered glass plate (for example, “Dragon Trail (registered trademark, manufactured by Asahi Glass Co., Ltd.)” or the like obtained by strengthening an aluminosilicate glass plate.
  • a tempered glass plate for example, “Dragon Trail (registered trademark, manufactured by Asahi Glass Co., Ltd.” or the like obtained by strengthening an aluminosilicate glass plate.
  • the transparent substrate 2 is required to have sufficient strength to withstand a certain amount of pressing force. From such a viewpoint, it is preferable to use as the transparent substrate 2 a tempered glass plate obtained by tempering an aluminosilicate glass plate, for example, a chemically strengthened glass plate.
  • a glass material constituting the aluminosilicate glass plate for example, a glass material having the following composition is used.
  • the composition expressed in terms of mol% in terms of oxide is as follows: SiO 2 50-50%, Al 2 O 3 1-20%, Na 2 O 6-20%, K 2 O 0-11%, MgO Material containing 0 to 15% of Ca, 0 to 6% of CaO and 0 to 5% of ZrO 2 .
  • a compressive stress layer is formed on the surface of the tempered glass plate obtained by strengthening the aluminosilicate glass plate, and the thickness of the compressive stress layer is preferably 10 ⁇ m or more, more preferably 30 ⁇ m or more. Further, the surface compressive stress in the compressive stress layer is preferably 200 MPa or more, and more preferably 550 MPa or more.
  • the strengthening treatment for the aluminosilicate glass plate chemical strengthening treatment is preferable.
  • a method for performing the chemical strengthening treatment typically, a method in which an aluminosilicate glass plate is immersed in KNO 3 molten salt, subjected to an ion exchange treatment, and then cooled to around room temperature.
  • the processing conditions such as the temperature and immersion time of the KNO 3 molten salt may be set so that the surface compressive stress and the thickness of the compressive stress layer have desired values.
  • the thickness of the transparent substrate 2 is not particularly limited, but when the transparent substrate 2 is composed of the glass substrate described above, it is preferably 0.1 to 2 mm, and more preferably 0.3 to 1 mm. When the thickness of the transparent substrate 2 is 2 mm or less, the pressing force against the surface of the touch sensor front plate 1 is easily transmitted to the lower panel body, and the operability is good. When the transparent substrate 2 is composed of the above-described plastic film, the thickness is preferably 50 to 500 ⁇ m, more preferably 50 to 200 ⁇ m.
  • the transparent substrate 2 may be composed of a single layer or may be composed of a plurality of layers.
  • the high resistance layer 3 is a layer having a surface resistance value of 1 to 100 M ⁇ / ⁇ .
  • the touch sensor front plate 1 is used by being laminated with a touch panel body 6 including a transparent electrode 6a. Lamination is performed such that the surface S4 on the transparent substrate 2 side of the front plate 1 for the tactile sensor faces the transparent electrode 6a of the touch panel body 6.
  • the high resistance layer 3 is induced on the touch sensor front plate 1 side by energizing the transparent electrode 6 a of the touch panel body 6. It functions as a layer for accumulating the accumulated charges.
  • the configuration of the high resistance layer 3 is not particularly limited as long as it has a surface resistance value in the above range.
  • a layer containing tin oxide and titanium oxide as main components and a layer containing niobium oxide and titanium oxide as main components can be suitably used.
  • the layer containing tin oxide and titanium oxide as a main component may contain a composite oxide of tin and titanium.
  • the layer containing niobium oxide and titanium oxide as main components may contain a composite oxide of niobium and titanium. Note that in this specification, the “layer containing a metal oxide as a main component” refers to a layer containing a metal oxide in a proportion of 50% or more.
  • the high-resistance layer 3 and the transparent electrode 6a are electrically operated when the transparent electrode 6a of the touch panel body 6 is energized, and the touch panel body 6 It is possible to prevent the operation from being hindered.
  • the surface resistance value of the high resistance layer 3 is 100 M ⁇ / ⁇ or less, the charged state based on the control voltage and the frequency is accurately expressed, and the desired tactile sensation is expressed in the sensory receptor X with high reproducibility. And excellent sensor accuracy by tactile sensation can be obtained.
  • the surface resistance value of the high resistance layer 3 is preferably 5 to 60 M ⁇ / ⁇ .
  • a layer containing tin oxide and titanium oxide as main components controls the surface resistance value within the above desired range while ensuring good luminous transmittance and low luminous reflectance. Since it is easy, it is used suitably.
  • the layer containing tin oxide and titanium oxide as main components, or the layer containing niobium oxide and titanium oxide as main components contains tin oxide and titanium oxide or niobium oxide and titanium oxide as main components, and serves as the high resistance layer 3.
  • Other elements such as Al, Si, Ga, and In may be included as long as the function is not impaired.
  • the high resistance layer 3 can be formed on the transparent substrate 2 made of a glass substrate, a plastic film, or the like by sputtering such as DC (direct current) sputtering, AC (alternating current) sputtering, or RF (high frequency) sputtering.
  • sputtering such as DC (direct current) sputtering, AC (alternating current) sputtering, or RF (high frequency) sputtering.
  • DC magnetron sputtering is preferably used because the process is stable and film formation on a large area is easy.
  • DC magnetron sputtering includes pulsed (applying voltage in the form of a pulse wave) DC magnetron sputtering. Pulsed DC magnetron sputtering is effective in preventing abnormal discharge.
  • the high resistance layer 3 includes two or more metal elements such as the above-described layer containing tin oxide and titanium oxide as a main component, and has the desired surface resistance value while having good light transmittance. It is suitable because it is easy to control within the range. For the formation of such a high resistance layer 3, so-called co-sputtering using a plurality of targets made of a single element can be used.
  • a target containing tin as a main component and a target containing titanium as a main component are preferably used.
  • a metal target mainly composed of tin a metal target composed solely of tin, or containing tin as a main component, and a known dopant such as a metal other than tin, for example, Al, Si, or the like, as long as the characteristics of the present invention are not impaired. Doped ones can be used.
  • a metal target having titanium as a main component a target made of only titanium or a material containing titanium as a main component and doped with a known dopant other than titanium within a range not impairing the characteristics of the present invention can be used.
  • a mixed gas of oxygen gas and inert gas a mixed gas of oxygen gas, nitrogen gas and inert gas, or the like can be used.
  • the inert gas include rare gases such as helium, neon, argon, krypton, and xenon.
  • argon is preferable from the viewpoint of economy and ease of discharge. These are used alone or in admixture of two or more.
  • N 2 nitrogen gas
  • N 2 O, NO, NO 2 , NH 3 or the like can be used as the sputtering gas as a gas containing nitrogen atoms.
  • the partial pressure of the gas containing oxygen gas, inert gas, and nitrogen atom in the sputtering gas, and the total pressure of the sputtering gas are not particularly limited, and may be any pressure at which glow discharge is stably performed.
  • the power density is preferably 0.9 to 4 W / cm 2 and more preferably 0.9 to 3 W / cm 2 .
  • the film formation time may be determined according to the film formation speed and the desired film thickness.
  • co-sputtering is performed by simultaneously discharging each target, and a film having a desired composition can be formed by controlling the power density applied to each target and the partial pressure of the sputtering gas.
  • the high resistance layer 3 is formed by using, for example, a physical vapor deposition method other than a sputtering method such as a vacuum vapor deposition method, an ion beam assisted vapor deposition method or an ion plate method, or a chemical vapor deposition method such as a plasma CVD method. It can. Since it is easy to obtain a uniform film thickness with a large area, a sputtering method is preferably used.
  • the high-resistance layer 3 When the high-resistance layer 3 is a layer containing tin oxide and titanium oxide as main components, the high-resistance layer 3 contains 1 to 30 atomic percent of Ti with respect to the total amount (100 atomic percent) of Sn and Ti. A layer containing 5 to 20 atom% is more preferable. In the case where the high resistance layer 3 is a layer containing niobium oxide and titanium oxide as main components, the high resistance layer 3 has a Ti content of 90 to 99 with respect to the total amount (100 atomic%) of Nb and Ti. A layer containing 0.9 atomic% is preferable, and a layer containing 95 to 99.9 atomic% is more preferable. By setting the atomic ratio in the high resistance layer 3 within the above range, the surface resistance value in the desired range can be easily obtained in the high resistance layer 3, and the layer can have an appropriate refractive index.
  • the thickness of the high resistance layer 3 is preferably 5 nm to 100 nm, more preferably 5 nm to 50 nm, and still more preferably 5 nm to 30 nm. By setting the thickness of the high resistance layer 3 to 5 nm or more, a sufficient charge holding function can be obtained. Further, by setting the thickness of the high resistance layer 3 to 100 nm or less, a better luminous transmittance can be obtained.
  • the “thickness” of each layer in the present specification is a thickness obtained by measuring with a stylus type surface roughness measuring machine.
  • the thickness of the high resistance layer 3 can be appropriately adjusted according to the film forming speed and the substantial film forming time when performing sputtering.
  • the refractive index of the high resistance layer 3 is preferably 1.8 to 2.5 from the viewpoint of obtaining excellent optical characteristics such as luminous transmittance and luminous reflectance.
  • “refractive index” refers to a refractive index measured using a light beam having a wavelength of 550 nm at 20 ° C. unless otherwise specified.
  • the insulating layer 4 is provided directly on the upper surface of the high resistance layer 3, that is, the surface opposite to the transparent substrate 2 side, or on the opposite side of the high resistance layer 3 from the transparent substrate 2 side via another layer.
  • the insulating layer 4 is based on the charge accumulated in the high resistance layer 3 on the sensory receptor X such as a fingertip that touches the surface S2 of the front plate 1 for tactile sensor. It has a role to prevent current from flowing directly.
  • the insulating layer 4 refers to a layer having a volume resistance value of 10 10 ⁇ ⁇ cm or more.
  • the volume resistance value is a value measured according to JIS C2318 (1975).
  • the cover layer is composed of only the insulating layer 4 in the front plate 1 for tactile sensor
  • the water vapor permeability is 0. 0.01 to 1 g / m 2 ⁇ day.
  • the cover layer is composed of the insulating layer 4 and other layers, and the water repellent layer 7 in FIGS. Does not have to achieve the water vapor transmission rate as the insulating layer 4 itself.
  • the insulating layer 4 can be used without any particular limitation as long as it is light transmissive and electrically insulative, that is, a layer having the above volume resistance value.
  • the cover layer when the cover layer is comprised only by the insulating layer 4 in the front plate 1 for touch sensors, it has the said water vapor permeability.
  • the insulating layer 4 has the above-described characteristics, for example, an insulating layer formed so as to satisfy the characteristics of the insulating layer 4 when the layer is formed of a cured body obtained by including an ultraviolet curable organic resin component or the like.
  • a cured product obtained by curing the composition (i) (hereinafter, this composition is also referred to as “(i) composition for forming an insulating layer”), a thermosetting organic resin component, or the like.
  • the composition for forming an insulating layer (ii) adjusted so as to satisfy the characteristics of the insulating layer 4 when the layer is formed with a cured product obtained hereinafter, this composition is also referred to as “(ii) composition for forming an insulating layer”). May be a layer made of a cured product obtained by curing with heat.
  • the composition for forming an insulating layer and (ii) the composition for forming an insulating layer may contain a volatile component such as an organic solvent that volatilizes when the layer is formed.
  • the component that actually forms the insulating layer other than the volatile component is referred to as solid content.
  • the solid content may contain a non-curable component in addition to the curable component. Therefore, (i) a composition for forming an insulating layer and (ii) a “cured product” obtained by curing the composition for forming an insulating layer is a curable product formed by curing only from a solid content contained in the composition.
  • the insulating layer 4 is preferably a layer containing an organic resin as a main component. That is, when the insulating layer 4 is made of a cured body as described above, the cured body preferably contains an organic resin as a main component.
  • a layer containing an organic resin as a main component refers to a layer containing an organic resin at a ratio of 95% or more.
  • the organic resin is preferably one or more selected from acrylic resins, epoxy resins, silicone resins and the like. Among these, acrylic resins are particularly preferable. Examples of the acrylic resin include acrylic resin, urethane acrylate resin, epoxy acrylate resin, polyester acrylate, and polyether acrylate.
  • the organic resin used for the insulating layer 4 may be a cured product of an ultraviolet curable component or a cured product of a thermosetting component.
  • the organic resin is preferably a cured product of an ultraviolet curable component. Therefore, as the ultraviolet curable component contained in (i) the insulating layer forming composition, a component that is cured to become an organic resin, particularly an acrylic resin, is preferable.
  • thermosetting component contained in the composition for forming an insulating layer may be a component that is cured to become an organic resin, and has a main skeleton formed by a siloxane bond by curing such as organosilane. It may be a component that gives a cured product.
  • the insulating layer 4 may be a layer mainly composed of an inorganic oxide as long as it has the above characteristics.
  • the “layer containing an inorganic oxide as a main component” refers to a layer containing an inorganic oxide at a ratio of 95% or more.
  • the inorganic oxide examples include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, and silicon nitride.
  • a physical vapor deposition method such as a sputtering method, a vacuum vapor deposition method, an ion beam assisted vapor deposition method or an ion plate method, or a chemical vapor deposition method such as a plasma CVD method is used. Law. Specific embodiments of the manufacturing method will be described later.
  • the insulating layer 4 may be composed of a single layer or may be a multilayer of two or more layers. Moreover, in the front plate 1 for touch sensors, from the viewpoint of obtaining excellent optical characteristics in terms of luminous transmittance, luminous reflectance, etc., the refractive index of the insulating layer 4 is any of the above cases. 1.3 to 1.8 is preferable.
  • a composition for forming an insulating layer (i) a composition for forming an insulating layer, (ii) components contained in the composition for forming an insulating layer, a method for forming the insulating layer 4 using the composition, and an insulating layer 4 containing an inorganic oxide as a main component
  • the forming method will be described.
  • the insulating layer forming composition an example is one containing a component that is cured to become an organic resin, in particular an acrylic resin, and (ii) the insulating layer forming composition is cured.
  • an example including a component that gives a cured product having a main skeleton by a siloxane bond will be described, the present invention is not limited to this.
  • composition for forming an insulating layer for example, the following ultraviolet curable polymerizable compound (A) (hereinafter referred to as “polymerizable compound (A)”), ultraviolet absorber (B) and light What contains a polymerization initiator (C) can be utilized.
  • A ultraviolet curable polymerizable compound
  • B ultraviolet absorber
  • C light What contains a polymerization initiator
  • the polymerizable compound (A) may be a monomer or a (co) oligomer or pre (co) polymer in which one or more of them are polymerized as long as they have ultraviolet curing properties. Good.
  • Polymerizable compound (A) At least a part of the polymerizable compound (A) is a polyfunctional polymerizable compound (a-1) having two or more acryloyl groups or methacryloyl groups in one molecule (hereinafter referred to as polymerizable compound (a-1)). .).
  • a (meth) acrylol group is used as a term meaning both polymerizable functional groups of an acryloyl group and a methacryloyl group. The same applies to terms such as (meth) acrylate and (meth) acrylic acid.
  • an acryloyl group is preferred because of its high polymerizability, particularly high polymerizability by ultraviolet rays. Accordingly, preferred compounds having the (meth) acryloyl group are compounds having an acryloyl group. Similarly, in (meth) acrylate, (meth) acrylic acid and the like, a compound having an acryloyl group is preferable.
  • the polymerizable functional group may be different from each other in one molecule of the compound having two or more (meth) acryloyl groups (that is, it may contain one or more acryloyl groups and one or more methacryloyl groups). Preferably) all polymerizable functional groups are acryloyl groups.
  • Examples of the polymerizable compound (A) other than the polymerizable compound (a-1) include a monofunctional polymerizable monomer having one (meth) acryloyl group in one molecule (hereinafter referred to as “polymerizable compound (a-)”. 2) ”) and a compound having one or more ultraviolet curable polymerizable functional groups other than (meth) acryloyl groups.
  • the UV-curable polymerizable functional group is a (meth) acryloyl group
  • the UV-curing property is sufficient and it is easy to obtain, so that a polymerizable compound other than the polymerizable compound (a-1) (A ) Is preferably a polymerizable compound (a-2).
  • the polymerizable compound (A) is preferably composed of at least one compound having a (meth) acryloyl group substantially including the polymerizable compound (a-1).
  • all the polymerizable compounds (A) including the polymerizable compound (a-1) are described as compounds having a (meth) acryloyl group, that is, an organic resin obtained by curing is an acrylic resin. To do.
  • the polymerizable compound (A) may be a compound having various functional groups and bonds in addition to the (meth) acryloyl group.
  • it may have a hydroxyl group, a carboxyl group, a halogen atom, a urethane bond, an ether bond, an ester bond, a thioether bond, an amide bond, or the like.
  • a (meth) acryloyl group-containing compound having a urethane bond hereinafter referred to as acrylic urethane
  • acrylic acid ester compound having no urethane bond are preferable.
  • the polymerizable compound (a-2) is usually a compound having no urethane bond, but the polymerizable compound (a-2) is not limited to a compound having no urethane bond.
  • the polymerizable compound (a-1) may or may not have a urethane bond.
  • the average number of (meth) acryloyl groups per molecule of the polymerizable compound (a-1) is not particularly limited, but is preferably 2 to 50, and more preferably 2 to 30.
  • Acrylic urethane is a reaction between a compound having a (meth) acryloyl group and a hydroxyl group and a compound having an isocyanate group, a compound having a (meth) acryloyl group and an isocyanate group and a (meth) acryloyl group and having two or more hydroxyl groups Or a compound having a (meth) acryloyl group and a hydroxyl group and a compound having two or more isocyanate groups (hereinafter referred to as “polyisocyanate”). And a reaction with a hydroxyl group-containing compound.
  • Two or more (meth) acryloyl groups, hydroxyl groups and isocyanate groups may be present in each molecule in each of the above-mentioned compounds which are raw materials for acrylic urethane.
  • a hydroxyl group may be present but an isocyanate group is preferably absent.
  • hydroxyl-containing compound a high molecular weight polyol, a hydroxyl-containing vinyl polymer, etc. are mentioned compared with a polyhydric alcohol or a polyhydric alcohol. These hydroxyl group-containing compounds may be used alone or in combination of two or more.
  • a preferred acrylic urethane as the polymerizable compound (a-1) is a reaction product of a hydroxyl group-containing (poly) pentaerythritol poly (meth) acrylate and a polyisocyanate.
  • the (poly) pentaerythritol in the above (poly) pentaerythritol poly (meth) acrylate means a pentaerythritol multimer such as pentaerythritol or dipentaerythritol, or a mixture containing them as a main component.
  • the degree is preferably about 1 to 4, particularly about 1.5 to 3.
  • the poly (meth) acrylate in the (poly) pentaerythritol poly (meth) acrylate is an ester having two or more (meth) acryloyl groups, and an average of about 3 to 6 (meth) acryloyl per molecule. Compounds having a group are preferred.
  • the (poly) pentaerythritol poly (meth) acrylate used for producing the acrylic urethane has an average of about 1 or more hydroxyl groups per molecule.
  • the average number of (meth) acryloyl groups per molecule in the acrylic urethane which is a reaction product of the hydroxyl group-containing (poly) pentaerythritol poly (meth) acrylate and polyisocyanate is 4 or more, particularly 8 to 20 preferable.
  • the polymerizable compound (a-1) containing no urethane bond is preferably a (meth) acrylate of a hydroxyl group-containing compound or a (meth) acrylic acid adduct of a polyepoxide.
  • the hydroxyl group-containing compound include polyhydric alcohols and high molecular weight polyols as described above.
  • Specific examples of the polymerizable compound (a-1) not containing a urethane bond include the following compounds.
  • 1,3-butanediol di (meth) acrylate ethylene glycol di (meth) acrylate, diethylene glycol di (meth) acrylate, glycerol tri (meth) acrylate, glycerol di (meth) acrylate, triglycerol di (meth) acrylate, Trimethylolpropane tri (meth) acrylate, ditrimethylolpropane tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythrito
  • (Meth) acrylate of polyhydric alcohol or polyhydric phenol having the following aromatic nucleus or triazine ring Bis (2- (meth) acryloyloxyethyl) bisphenol A, bis (2- (meth) acryloyloxyethyl) bisphenol S, bis (2- (meth) acryloyloxyethyl) bisphenol F, tris (2- (meth) acryloyl) Oxyethyl) isocyanurate, bisphenol A di (meth) acrylate.
  • EO represents ethylene oxide
  • PO represents propylene oxide
  • [] represents the molecular weight of the polyoxyalkylene polyol.
  • Carboxylic acid ester and phosphoric acid ester having the following (meth) acryloyl group.
  • the following compounds are similarly applied to the term “modification” in the alkenyl etherified product, carboxylic acid esterified product and the like of the above (meth) acrylates and compounds having an unreacted hydroxyl group.
  • a preferable example of the polymerizable compound (a-1) which is a polyester having no urethane bond and having two or more (meth) acryloyl groups is (poly) pentaerythritol poly (meth) acrylate as described above.
  • This (poly) pentaerythritol poly (meth) acrylate is a compound having an average of two or more (meth) acryloyl groups per molecule, and may or may not have a hydroxyl group.
  • the degree of multimerization of the (poly) pentaerythritol moiety is preferably about 1 to 4, and more preferably 1.5 to 3.
  • poly pentaerythritol poly (meth) acrylate is (poly) pentaerythritol poly (meth) acrylate in which substantially all hydroxyl groups of (poly) pentaerythritol are converted to (meth) acryloyloxy groups.
  • the monofunctional polymerizable monomer that is the polymerizable compound (a-2) may have a functional group such as a hydroxyl group or an epoxy group.
  • Preferred monofunctional compounds are (meth) acrylic acid esters, ie (meth) acrylates.
  • the monofunctional compound include the following compounds. Methyl (meth) acrylate, ethyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, lauryl (meth) acrylate, tridecyl (meth) Acrylate, cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, glycidyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, benzyl (meth) acrylate, 1,4- (Meth) acrylic acid adducts of butylene glycol mono (meth) acrylate, ethoxyethyl (meth) acrylate, and phenylglycid
  • polymerizable compounds (a-1) are compounds having 2 to 3 (meth) acryloyl groups, and the other one or more compounds are compounds having many (meth) acryloyl groups.
  • the former polymerizable compound (a-1) is preferably a compound having two (meth) acryloyl groups.
  • the total ratio of the polymerizable compound (a-1) in the polymerizable compound (A) is preferably 20 to 100% by mass, particularly preferably 50 to 100% by mass, and further preferably 70 to 100% by mass. When the ratio of the polymerizable compound (a-1) is within this range, the scratch resistance is sufficient.
  • the ratio of the polymerizable ultraviolet absorber (b-1) to 100 parts by mass of the polymerizable compound (A) in the composition for forming an insulating layer is preferably 0.1 parts by mass or more, and more preferably 1 part by mass or more. .
  • the upper limit is preferably 50 parts by mass, and more preferably 30 parts by mass.
  • the ultraviolet absorber (B) By using this polymerizable ultraviolet absorber (b-1), even if a relatively large amount of the ultraviolet absorber (B) is blended in the composition for forming an insulating layer (i), the ultraviolet absorber (B) The effect of not significantly reducing the bleeding or scratch resistance on the surface is exhibited.
  • polymerizable ultraviolet absorber (b-1) one or more selected from the following polymerizable benzophenone compounds and polymerizable benzotriazole compounds can be used.
  • An ultraviolet absorber other than the polymerizable ultraviolet absorber (b-1) can be used in combination as the ultraviolet absorber (B), but it is not preferable to use a large amount.
  • Examples of ultraviolet absorbers other than the polymerizable ultraviolet absorber (b-1) include non-polymerizable ultraviolet absorbers (hereinafter referred to as “ultraviolet absorber (b-2)”).
  • the proportion of the ultraviolet absorber other than the polymerizable ultraviolet absorber (b-1) in the ultraviolet absorber (B) is not particularly limited, but is 0 to 80% by mass, particularly 0 to 50% by mass in the total ultraviolet absorber (B). % Is preferred.
  • the content of the ultraviolet absorber other than the polymerizable ultraviolet absorber (b-1) in the insulating layer forming composition is preferably 20 parts by mass or less with respect to 100 parts by mass of the polymerizable compound (A). 10 parts by mass or less is more preferable.
  • the total content of the ultraviolet absorber (B) in the composition for forming an insulating layer is preferably 0.1 to 50 parts by mass, more preferably 1 to 100 parts by mass of the polymerizable compound (A). To 30 parts by mass. Although it varies depending on the thickness of the cured layer obtained, that is, the insulating layer, the weather resistance of the insulating layer itself is good when it is 0.1 parts by weight or more, and the total amount is 50 parts by weight or less. Even if it consists only of the polymerizable ultraviolet absorber (b-1), the curability of the coating film is good and the physical properties are excellent.
  • the polymerizable benzophenone compound is a compound having at least one organic group having a (meth) acryloyl group (hereinafter referred to as “(meth) acryloyl-containing group”) and at least one benzophenone skeleton.
  • the polymerizable benzophenone compound preferably has one or more hydroxyl groups on at least one of the two benzene rings of the benzophenone skeleton in addition to the (meth) acryloyl-containing group. This hydroxyl group may exist in the benzene ring to which the (meth) acryloyl-containing group is bonded, or may exist in another benzene ring. This hydroxyl group is preferably present at the 2-position of the benzophenone skeleton.
  • the polymerizable benzophenone compound there is usually one (meth) acryloyl-containing group.
  • two or more (meth) acryloyl-containing groups may be present, in which case they may be present only in one of the two benzene rings or may be present in both benzene rings.
  • the hydroxyl group is preferably present in the benzene ring in which the (meth) acryloyl-containing group is present.
  • one or more other substituents may be present on the two benzene rings.
  • the substituents include hydrocarbon groups such as alkyl groups, alkoxy groups, halogens. Atoms are preferred. The number of carbon atoms of the hydrocarbon group or alkoxy group is preferably 6 or less.
  • the (meth) acryloyl-containing group is preferably a (meth) acryloyloxy group or an organic group represented by the following formula (1).
  • R represents a hydrogen atom or a methyl group
  • X 1 represents an oxygen atom, —OCONH—, —OCH 2 CH (OH) — or a single bond
  • R 1 represents a divalent hydrocarbon group
  • X 2 represents an oxygen atom, —O — (— COCH 2 CH 2 O—) k — (k is an integer of 1 or more), —NH—, or CH (OH) CH 2 O—.
  • R is a hydrogen atom
  • X 1 is an oxygen atom or a single bond
  • R 1 is an alkylene group having 1 to 6 carbon atoms
  • X 2 is an oxygen atom.
  • Preferred (meth) acryloyl-containing groups are (meth) acryloyloxy groups, (meth) acryloyloxyalkyl groups, ((meth) acryloyloxy) alkoxy groups, and carbons other than the latter two (meth) acryloyloxy groups.
  • the number is preferably 2-4.
  • Preferred polymerizable benzophenone compounds are 2-hydroxybenzophenones having a (meth) acryloyl-containing group in the hydroxyphenyl group.
  • This compound is represented by the following formula (2).
  • A represents the (meth) acryloyl-containing group as described above
  • R 2 and R 3 represent substituents other than the (meth) acryloyl-containing group as described above.
  • Examples of specific polymerizable benzophenone compounds include the following compounds. 2-hydroxy-4- (meth) acryloyloxybenzophenone, 2-hydroxy-4- (2- (meth) acryloyloxyethoxy) benzophenone, 2-hydroxy-4- (2-acryloyloxypropoxy) benzophenone, 2,2 ′ -Dihydroxy-4- (meth) acryloyloxybenzophenone, 2,2'-dihydroxy-4- (2- (meth) acryloyloxyethoxy) benzophenone.
  • a compound having one or more (meth) acryloyl groups and one or more benzotriazole rings is preferable.
  • a benzotriazole compound having ultraviolet absorbing ability has a skeleton in which one benzene ring is bonded to the 2-position of the benzotriazole ring, that is, 2-phenylbenzotriazole, and further has a hydroxyl group at the 2-position of the phenyl group.
  • the (meth) acryloyl-containing group may be present in the 4 to 8 position of the benzotriazole ring, and is preferably present in the 3 to 6 position of the phenyl group.
  • Two or more (meth) acryloyl-containing groups may be present, and preferably one is present.
  • One or more substituents may be present at positions where the (meth) acryloyl-containing group at positions 4 to 8 of the benzotriazole ring and positions 3 to 6 of the phenyl group is not present.
  • the number of carbon atoms of the hydrocarbon group or alkoxy group is preferably 6 or less.
  • the (meth) acryloyl-containing group is preferably a (meth) acryloyloxy group or an organic group represented by the above formula (1). More preferable (meth) acryloyl-containing groups are the (meth) acryloyloxy group, (meth) acryloyloxyalkyl group, ((meth) acryloyloxy) alkoxy group, and the latter two (meth) acryloyl groups as described above.
  • the number of carbon atoms other than the oxy group is preferably 2-4.
  • Preferred polymerizable benzotriazole compounds are 2- (2-hydroxyphenyl) benzotriazoles having a (meth) acryloyl-containing group in the 2-hydroxyphenyl group.
  • This compound is represented by the following formula (3).
  • A represents the (meth) acryloyl-containing group as described above
  • R 4 and R 5 represent substituents other than the (meth) acryloyl-containing group as described above.
  • polymerizable benzotriazole compounds include the following compounds. 2- ⁇ 2-hydroxy-5-((meth) acryloyloxy) phenyl ⁇ benzotriazole, 2- ⁇ 2-hydroxy-3-methyl-5-((meth) acryloyloxy) phenyl ⁇ benzotriazole, 2- ⁇ 2 -Hydroxy-3-t-butyl-5-((meth) acryloyloxy) phenyl ⁇ benzotriazole, 2- ⁇ 2-hydroxy-5- (2- (meth) acryloyloxyethyl) phenyl ⁇ benzotriazole, 2- ⁇ 2-hydroxy-5- (3- (meth) acryloyloxypropyl) phenyl ⁇ benzotriazole, 2- ⁇ 2-hydroxy-3-tert-butyl-5- (2- (meth) acryloyloxyethyl) phenyl ⁇ benzotriazole .
  • UV absorber (b-2) a known or known ultraviolet absorber that is commercially available can be used.
  • UV absorbers include benzotriazole UV absorbers, benzophenone UV absorbers, salicylic acid UV absorbers, and phenyltriazine UV absorbers. Specific examples include the following compounds.
  • Photopolymerization initiator (C) As the photopolymerization initiator (C), aryl ketone photopolymerization initiators (for example, acetophenones, benzophenones, alkylaminobenzophenones, benzyls, benzoins, benzoin ethers, benzyldimethylketals, benzoylbenzoates, ⁇ -acyloxime esters), sulfur-containing photopolymerization initiators (eg, sulfides, thioxanthones, etc.), acylphosphine oxides (eg, acyl diarylphosphine oxides), and other photopolymerization initiators.
  • a photoinitiator may be used independently and may use 2 or more types together.
  • the photopolymerization initiator can also be used in combination with a photosensitizer such as amines.
  • Specific photopolymerization initiators include the following compounds.
  • the content of the photopolymerization initiator (C) in the composition for forming an insulating layer is preferably 0.1 to 20 parts by mass with respect to 100 parts by mass of the polymerizable compound (A).
  • composition for forming an insulating layer may contain an appropriate amount of a polymerization inhibitor such as hydroquinone monomethyl ether for the purpose of adjusting the degree of polymerization of the polymerizable component by ultraviolet irradiation.
  • a polymerization inhibitor such as hydroquinone monomethyl ether
  • a high molecular weight compound such as an acrylic (co) polymer, an antioxidant, a light stabilizer, a stabilizer such as a thermal polymerization inhibitor, a leveling agent, Defoamers, thickeners, anti-settling agents, pigment dispersants, antifogging agents and other surfactants, near infrared absorbers, and the like may be appropriately blended and used.
  • the adhesion of the insulating layer made of the resulting cured product can be increased, Leveling can be improved.
  • the content of a high molecular weight compound such as an acrylic (co) polymer is preferably 20 parts by mass or less with respect to 100 parts by mass of the monomer (A).
  • colloidal silica (D) is an ultrafine particle of silicic acid colloid dispersed in a dispersion medium composed of water, methanol or the like, and the average particle diameter of colloidal silica (D) is usually about 1 to 1000 nm, preferably The average particle size is 1 to 200 nm, particularly preferably the average particle size is 1 to 50 nm.
  • the colloidal silica (D) has a particle surface modified with a hydrolyzate of a hydrolyzable silane compound in order to improve dispersion stability, that is, a part or all of the silanol groups on the surface of the colloidal silica particle.
  • a hydrolyzate of a silane compound can be bound and retained by a condensation reaction, and the surface characteristics can be modified.
  • colloidal silica (D) When colloidal silica (D) is mix
  • blending colloidal silica (D) the compounded effect is exhibited by mix
  • the light stabilizer is preferably a hindered amine light stabilizer, particularly a hindered amine light stabilizer having a 2,2,6,6-tetramethylpiperidine residue.
  • the compounding quantity is 10 mass parts or less with respect to 100 mass parts of polymeric compounds (A), Especially 5 mass parts or less are preferable.
  • the fluorine-containing polymerizable monomer (e-1) represented by the following formula (4) is added to the composition for forming the insulating layer in a single amount of water repellency. You may mix
  • Examples of the fluorine-containing polymerizable monomer (e-1) represented by the above formula (4) include the following.
  • R 7 represents an alkylene group having 1 to 6 carbon atoms
  • R 8 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms
  • R 9 represents a single bond or an alkylene group having 1 to 4 carbon atoms.
  • X 3 is preferably an alkylene group having 2 to 4 carbon atoms in view of availability.
  • fluorine-containing polymerizable monomer (e-1) represented by the above formula (4) include perfluorohexylethyl (meth) acrylate and perfluorobutylethyl (meth) acrylate.
  • the monomer represented by the above formula (4) may be used alone or in combination of two or more.
  • R f is a perfluoroalkyl group having 4 to 6 carbon atoms
  • the fluorine-containing polymerizable monomer (e-1) has good compatibility with other components such as the polymerizable compound (A).
  • the coating film of the composition for forming an insulating layer is cured, the polymers do not aggregate. Therefore, the appearance of the insulating layer 4 as a cured body is good without being clouded, and the adhesion between the insulating layer 4 and its lower layer (for example, the high resistance layer 3) is increased.
  • R f is a perfluoroalkyl group having 4 or more carbon atoms, the water repellency of the insulating layer 4 is good.
  • R f is a perfluoroalkyl group having 6 or less carbon atoms
  • the insulating layer 4 which is a cured body does not become cloudy, and the insulating layer 4 and its lower layer (for example, the high resistance layer 3) ).
  • the insulating layer forming composition may be blended with an organic solvent for the purpose of improving the coating property of the coating film and the adhesion to the lower layer such as the high resistance layer 3.
  • the organic solvent is not particularly limited as long as there is no problem in the solubility of the polymerizable compound (A), the ultraviolet absorber (B), the photopolymerization initiator (C), and other additives, and satisfies the above performance. Anything is acceptable. Moreover, you may use individually and may use 2 or more types of organic solvents together.
  • the content of the organic solvent in the composition for forming an insulating layer is suitably 100 times or less, particularly 50 times or less, that of the polymerizable compound (A).
  • organic solvents examples include organic solvents such as lower alcohols, ketones, ethers, cellosolves and the like.
  • esters such as n-butyl acetate and diethylene glycol monoacetate, halogenated hydrocarbons, and hydrocarbons can be used.
  • the insulating layer 4 made of a cured body of the composition for forming an insulating layer is a surface of the laminate having the high resistance layer 3 on the transparent substrate 2 on the high resistance layer 3 side, for example, for the tactile sensor shown in FIG.
  • a composition for forming an insulating layer containing the above components is applied by spin coating, dip coating, flow coating, spray coating, bar coating. It can be formed by applying by a method such as gravure coating method, roll coating method, blade coating method, air knife coating method, etc., and curing by irradiation with ultraviolet rays.
  • the composition for insulating layer formation contains the organic solvent, after apply
  • the composition for forming an insulating layer (i) by applying a spin coating method, (i) on the surface of the laminate having the high resistance layer 3 on the transparent substrate 2 on the high resistance layer 3 side.
  • the stage on which the stacked body is placed and fixed is rotated at a predetermined number of rotations, so that (i) for forming the insulating layer is formed on the surface of the stacked body on the high resistance layer 3 side.
  • a uniform coating film of the composition can be formed.
  • the dropping amount of the composition for forming the insulating layer and the rotational speed of the stage are appropriately selected so that the insulating layer obtained after curing has a film thickness within the range of the present invention. It will be adjusted.
  • the dropping amount of the composition for forming an insulating layer (i) on the coated surface of the laminate having the high resistance layer 3 on the transparent substrate 2 is about 1 cm 3
  • the laminate It is preferable to rotate the stage on which is mounted at an initial rotational speed of about 200 to 2000 rpm for about 10 to 15 seconds, and then at a maximum rotational speed of about 2000 to 3000 rpm for about 0.1 to 1.0 seconds.
  • the organic solvent can be removed by holding the laminated body after the coating film is formed, for example, at a temperature range of 100 to 150 ° C. for about 10 minutes. preferable.
  • Examples of the ultraviolet light source used for ultraviolet irradiation include a xenon lamp, a low-pressure mercury lamp, a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a metal halide lamp, a carbon arc lamp, and a tungsten lamp.
  • the irradiation time and irradiation intensity of ultraviolet irradiation can be appropriately changed according to the conditions such as the type of the polymerizable compound (A), the type of the ultraviolet absorber (B), the type of the photopolymerization initiator (C), the film thickness, the ultraviolet light source and the like. .
  • the object is achieved by irradiation for about 1 to 60 seconds.
  • heat treatment can also be performed after irradiation with ultraviolet rays.
  • the irradiation time and irradiation intensity of ultraviolet irradiation are appropriately adjusted so that, for example, the energy integrated value of irradiation light is about 500 to 2000 mJ / cm 2 and the peak value of irradiation intensity is 100 to 500 mW / cm 2. Is preferred.
  • the insulating layer 4 is formed by applying and curing the above-described (i) insulating layer forming composition on the upper surface of the high resistance layer 3 containing, for example, a metal oxide as a main component, the high resistance
  • the upper surface of the high resistance layer 3 is subjected to a surface treatment (hereinafter also referred to as an adhesion treatment) for enhancing the adhesion with the resin component (i). It is preferable to apply an insulating layer forming composition.
  • the following silane coupling agents can be used.
  • a composition obtained by mixing the above silane coupling agent with an organic solvent such as lower alcohols, ketones, ethers, cellosolves, etc., is applied to the upper surface of the high resistance layer 3 by spin coating, dip coating, or flow coating.
  • the adhesion treatment can be performed by applying and drying by a method such as a coating method, a spray coating method, a bar coating method, a gravure coating method, a roll coating method, a blade coating method or an air knife coating method.
  • a laminate having the high resistance layer 3 is prepared on the transparent substrate 2, and the above-described layer is formed on the upper surface of the high resistance layer 3.
  • the stage on which the laminated body is placed and fixed is rotated at a predetermined number of rotations, so that the silane cup is placed on the upper surface of the high resistance layer 3 of the laminated body.
  • a thin film of a composition containing a ring agent can be formed and an adhesion treatment can be performed.
  • the rotation of the stage on which the stacked body is placed is the initial rotation. It is preferable that the number of rotations is 500 rpm to 1500 rpm for about 5 to 15 seconds, and then the maximum rotation number is 1500 rpm to 2500 rpm for a rotation time of 0.1 to 1.0 seconds.
  • the composition used for the adhesion treatment contains an organic solvent, it is preferable to remove the organic solvent by holding the laminate after the adhesion treatment at 100 to 150 ° C. for about 30 minutes.
  • the composition for forming an insulating layer is not particularly limited as long as it can obtain a cured product having optical transparency after heat curing.
  • colloidal silica (f-1) and the following formula (5) Those containing an aqueous / organic solvent dispersion (F) containing a solid component comprising a partial condensate (f-2) of an organoalkoxysilane represented by formula (2) can be suitably used.
  • the aqueous / organic solvent dispersion refers to an embodiment in which solid components are dispersed in an aqueous medium and / or an organic solvent.
  • organoalkoxysilane for example, one represented by the following formula (5) can be used.
  • R 10 is a monovalent hydrocarbon group having 1 to 6 carbon atoms
  • R 11 is a monovalent hydrocarbon group or hydrogen group having 1 to 6 carbon atoms
  • a is an integer of 0 to 2
  • R 10 and R 11 are preferably alkyl groups having 1 to 4 carbon atoms.
  • the organoalkoxysilane included within the scope of the above formula (5) is preferably methyltrimethoxysilane, methyltrihydroxysilane, or a mixture thereof, which can form a partial condensate (f-2). Is.
  • examples of the organoalkoxysilane included in the range of the formula (5) include tetraethoxysilane, ethyltriethoxysilane, diethyldiethoxysilane, tetramethoxysilane, methyltrimethoxysilane, and dimethyldimethoxysilane. Is mentioned.
  • aqueous / organic solvent dispersion (F) for example, those shown in US Pat. No. 3,986,997 of Clark can be used.
  • aqueous / organic solvent dispersion (F) in addition to those described above, for example, U.S. Pat. Nos. 3,986,997, 4,624,870, 4,680,232, and Those shown in US Pat. No. 4,914,143 can be used.
  • the aqueous / organic solvent dispersion (F) can be produced by adding a trialkoxysilane such as methyltrimethoxysilane to the aqueous / organic solvent dispersion of colloidal silica.
  • a trialkoxysilane such as methyltrimethoxysilane
  • examples of such an aqueous / organic solvent dispersion of colloidal silica include “Ludox HS” (manufactured by DuPont) and “Nalco” 1034A (manufactured by Nalco Chemical Co.).
  • OSCAL trade name, manufactured by Catalyst Kasei Kogyo Co., Ltd.
  • organosilica sol trade name, manufactured by Nissan Chemical Industries, Ltd.
  • aqueous / organic solvent dispersion of colloidal silica (f-1) for example, those disclosed in Ubersax US Pat. No. 4,177,315 can be used.
  • the organoalkoxysilane partial condensate (f-2) is preferably composed of a mixture of various organoalkoxysilane partial condensates.
  • the aqueous / organic solvent dispersion (F) itself (that is, the combination of colloidal silica (f-1) and organoalkoxysilane partial condensate (f-2)) usually has a solid content of about 10% to 50% by mass. %, Preferably about 15% to 25% by weight of the solid content.
  • the composition for forming an insulating layer generally contains an organoalkoxysilane or a colloidal as described above in order to improve the adhesion to the surface to be coated, for example, the surface of the high resistance layer 3 opposite to the transparent substrate 2 side. It is preferable to mix the adhesion promoter (G) with the aqueous / organic solvent dispersion (F) containing silica (f-1) and a sufficient amount of alcohol.
  • adhesion promoter (G) As the adhesion promoter (G), for example, (meth) acrylate esters described in US Pat. No. 5,411,807 can be used. Specifically, as the (meth) acrylate ester, for example, a commercially available Tone monomer from Union Carbide Coating Resins can be used as the adhesion promoter (G). .
  • caprolactone (meth) acrylate can be suitably used as the adhesion promoter (G).
  • (Meth) acrylate ester is usually used in an amount of about 1 to 20 parts by mass based on 100 parts by mass of resin solids.
  • the (meth) acrylate ester is preferably used in an amount of about 3 to 8 parts by mass based on 100 parts by mass of the resin solid content.
  • polyester polyol can be used as other than the above.
  • polyester polyol for example, a caprolactone-based polyester polyol described in US Pat. No. 5,349,002 can be used.
  • caprolactone-based polyester polyols are difunctional or trifunctional, and for example, those commercially available as Tone polyols from Union Carbide can be used.
  • Tone polyols for example, “Tone 0200 diol” (trade name, manufactured by Union Carbide), “Tone 0301 Triol” (trade name, manufactured by Union Carbide), “Tone 0310 Triol” (trade name, Union Carbide) Carbide Co.) can be used.
  • Tone polyol and various things from which said molecular weight, a hydroxy value, melting
  • polyester polyol other than the caprolactone-based polyester polyol urethane-modified polyester polyol or silicone-modified polyester polyol can be used.
  • the polyester polyol can be usually used in an amount of about 1 to 10 parts by mass based on 100 parts by mass of the resin solid content.
  • acrylic urethane can be used as other than the above.
  • acrylic urethane for example, those described in US Pat. No. 5,503,935 can be used.
  • Acrylic urethanes typically have a molecular weight in the range of about 400-1500 and generally have semi-solid or viscous properties and can be added directly to the silicone dispersion.
  • acrylic urethane examples include, for example, “Actylane CB-32” (trade name, manufactured by SNPE® Chimie (France)) and “Ebecryl 8804” (trade name, Radcure Specialties). (Radcure Specialties) 40sha (Louisville, Kent.), Etc., such as “M-407” (trade name, Echo Resins & Laboratory) etc. it can. “M-407” is an adduct of isophorone diisocyanate and 2-hydroxyethyl methacrylate and has a molecular weight of about 482.
  • Acrylic urethane can be used in an amount of about 1 to 15 parts by mass based on 100 parts by mass of resin solids.
  • an acrylic copolymer (g-1) having a reactive site or an interactive site and having a number average molecular weight of about 1000 to about 10,000 can be used as other than the above.
  • the acrylic copolymer (g-1) usually thermosetting
  • a preferred acrylic copolymer (g-1) has a hydroxyl group as a reactive site or interaction site, a hydroxy value in the range of about 30 to 160, an acid value of less than about 4, and about It has a number average molecular weight of 1000 to 10,000.
  • Examples of the acrylic copolymer (g-1) are those described in Mark et al., “Encyclopedia of Polymer Science and Engineering, Vol. 4 (published by John Wiley & Sons, 1986)”, pages 374-375. These can be synthesized by radical polymerization of various comonomers.
  • the acrylic copolymer (g-1) is K.K. J. et al. As described in “Organic Polymer Chemistry” (issued by Chapman Hall (London), 1973) by Saunders, a copolymer can have a combination of appropriate properties by using a plurality of types of monomers.
  • the acrylic copolymer (g-1) when a monomer such as acrylonitrile or methyl methacrylate is used, generally, the acrylic copolymer (g-1) is given hardness, and a single amount such as ethyl acrylate or 2-ethylhexyl acrylate. When the body is used, the acrylic copolymer (g-1) is given flexibility. Further, by using a monomer such as dimethylaminoethyl methacrylate or acrylic acid, a reactive site suitable for polymerization is usually provided.
  • the acrylic copolymer (g-1) as the adhesion promoter (G) may contain an amino group, a carboxyl group, an amide bond, an epoxy group, a hydroxyl group, or an acyloxy group.
  • acrylic copolymer (g-1) examples include, for example, an acrylic polyol “Joncry (trademark)” (trade name, manufactured by BASF), an acryloid acrylic resin (Rohm and Haas ( Rohm and Haas Company) can be used as an adhesion promoter (G).
  • the acrylic copolymer (g-1) is preferably a hydroxyalkyl acrylate copolymer because it has a reactive site or interaction site with silanol.
  • the acrylic copolymer (g-1) can be obtained, for example, by using the method described in the paper “Journal of Coating Technology, Vol. 59, No. 746 (March, 1987)” by Kamath et al. What was manufactured can be utilized as a suitable thing of an adhesion promoter (G).
  • the acrylic copolymer (g-1) can be used usually in an amount of about 1 to 15 parts by mass based on 100 parts by mass of the resin solid content.
  • aqueous / organic solvent dispersion (F) for example, alcohols having 1 to 4 carbon atoms such as methanol, ethanol, propanol, isopropanol, butanol; organic solvents such as glycol and glycol ethers such as propylene glycol methyl ether, and These mixtures can be suitably used.
  • the insulating layer forming composition comprises the aqueous / organic solvent dispersion (F) as described above
  • the insulating layer forming composition contains colloidal silica (f-1 ) In an amount of 10 to 50% by mass and a solid component comprising 10 to 70% by mass of a partial condensate of organoalkoxysilane represented by the formula (5) (f-2) 30 to 90% by mass
  • colloidal silica (f-1 ) In an amount of 10 to 50% by mass and a solid component comprising 10 to 70% by mass of a partial condensate of organoalkoxysilane represented by the formula (5) (f-2) 30 to 90% by mass
  • adhesion promoter (G) which consists of acrylic polyols with respect to 100 parts of solvent dispersion (F) is preferable.
  • the ultraviolet absorber (J) to be blended in the composition for forming an insulating layer those which react with organoalkoxysilane and hardly volatilize during the heat curing step are suitable.
  • the ultraviolet absorber (J) include 2-hydroxy-4- (3- (trimethoxysilyl) propoxy) benzophenone, (2-hydroxy-4- (3- (triethoxysilyl) propoxy) benzophenone, and their The ultraviolet absorber (J) can be blended at a concentration of 0.1 to 20% by mass with respect to (ii) the insulating layer forming composition.
  • the insulating layer forming composition contains a free radical initiator, a sterically hindered amine light stabilizer, an antioxidant, a dye, a fluidity improver, and other additives such as a leveling agent or a surface lubricant. You may mix
  • composition for forming an insulating layer contains a catalyst such as tetrabutylammonium carboxylate such as tetra-n-butylammonium acetate (TBAA) or tetra-n-butylammonium formate to shorten the curing time.
  • a catalyst such as tetrabutylammonium carboxylate such as tetra-n-butylammonium acetate (TBAA) or tetra-n-butylammonium formate to shorten the curing time.
  • a catalyst may be blended.
  • the insulating layer 4 made of a cured product of the composition for forming an insulating layer is a surface on the high resistance layer 3 side of a laminate having the high resistance layer 3 on the transparent substrate 2, for example, for the tactile sensor shown in FIG.
  • the above (ii) composition for forming an insulating layer containing the above components is applied by spin coating, dip coating, flow coating, spray coating, bar coating. After applying by a known arbitrary coating method such as a coating method, a gravure coating method, a roll coating method, a blade coating method, an air knife coating method, etc., and then heating at 100 to 150 ° C. for about 30 to 90 minutes, It can be formed by heating and curing using microwave energy.
  • the composition for forming an insulating layer by applying a spin coating method (ii), (ii) on the surface of the laminate having the high resistance layer 3 on the transparent substrate 2 on the high resistance layer 3 side.
  • the stage on which the stacked body is placed and fixed is rotated at a predetermined number of rotations, so that (ii) for forming an insulating layer is formed on the surface of the stacked body on the high resistance layer 3 side.
  • a uniform coating film of the composition can be formed.
  • the dropping amount of the composition for forming the insulating layer and the rotational speed of the stage are appropriately selected so that the insulating layer obtained after curing has a film thickness in the range of the present invention. It will be adjusted.
  • the rotation of the stage for mounting and fixing the laminate is, for example, (ii) the amount of the composition for forming an insulating layer dropped onto the application surface of the laminate having the high resistance layer 3 on the transparent substrate 2. Is about 1 cm 3 , it is preferable that the initial rotation speed is about 100 to 300 rpm for about 10 to 15 seconds, and then the maximum rotation speed is about 1500 to 2500 rpm and the rotation time is 0.1 to 1.0 seconds.
  • the formation speed of the insulating layer 4 can be increased, and the production efficiency of the front plate 1 for a tactile sensor can be improved. Can be increased.
  • the insulating layer 4 composed of a layer obtained by curing the above-mentioned (i) insulating layer forming composition or (ii) insulating layer forming composition may be a single layer or a composite of two or more layers. It may consist of layers.
  • the thickness is preferably 0.5 ⁇ m or more and 100 ⁇ m or less, more preferably 1 ⁇ m or more and 50 ⁇ m or less, and still more preferably It is 5 ⁇ m or more and 10 ⁇ m or less.
  • the thickness of the insulating layer 4 made of the cured body of the composition for forming the insulating layer 0.5 ⁇ m or more, moisture that has entered from the surface of the front plate 1 for the tactile sensor is less likely to reach the high resistance layer 3 and is insulated.
  • the formation of a leak path in the layer 4 can be suppressed. That is, since it becomes difficult to conduct
  • sufficient abrasion resistance and weather resistance can be obtained in the insulating layer 4 by setting the thickness of the insulating layer 4 made of the cured body of the composition for forming the insulating layer to 0.5 ⁇ m or more.
  • sufficient tactile sensor sensitivity can be obtained by setting the thickness of the insulating layer 4 made of the cured body of the composition for forming an insulating layer to 100 ⁇ m or less. At the same time, since the curing proceeds sufficiently even in the deep part of the insulating layer 4, it is possible to ensure excellent light transmission and obtain an appropriate bending strength in the front plate 1 for the tactile sensor.
  • the water vapor permeability of the cover layer is 0.01 to 1 g / m 2 ⁇ day. Therefore, when the cover layer is composed only of an insulating layer, the water vapor permeability of the insulating layer is set to 0.01 to 1 g / m 2 ⁇ day.
  • the insulating layer is a layer made of a cured product of the insulating layer forming composition described above, the water vapor permeability of the obtained insulating layer is adjusted by the composition and thickness of the insulating layer forming composition to be used.
  • the water vapor permeability of the layer is 0 0.01 to 1 g / m 2 ⁇ day.
  • the insulating layer made of the cured product of the composition for forming an insulating layer exceeds the upper limit of the water vapor permeability, for example, water vapor such as a water repellent layer described later on the side opposite to the transparent substrate side of the insulating layer.
  • the water vapor permeability of the insulating layer and the cover layer made of the layer is set to 0.01 to 1 g / m 2 ⁇ day.
  • the insulating layer 4 included in the front plate 1 for a touch sensor is not limited to a layer made of a cured body of the organic insulating layer forming composition described above.
  • the insulating layer 4 can be composed of a layer mainly composed of an inorganic oxide having electrical insulation, that is, the above-described volume resistance and light transmittance.
  • the insulating layer 4 composed of a layer mainly composed of an inorganic oxide may be a single layer, for example, like the insulating layer 4 in the front plate 1 for touch sensor shown in FIG. 2, or the front plate for touch sensor shown in FIG. As in the insulating layer 4 in FIG.
  • the front panel 1 for a tactile sensor shown in FIG. 4 includes a high resistance layer 3 and an insulating layer 4 stacked in that order on a transparent substrate 2, and the insulating layer 4 is stacked in order from the high resistance layer 3 side.
  • the structure includes an insulating layer 41 and a second insulating layer 42. Both the first insulating layer 41 and the second insulating layer 42 are layers mainly composed of an inorganic oxide.
  • the insulating layer of the front plate for a tactile sensor of the present invention is composed of a plurality of layers composed mainly of an inorganic oxide will be described with reference to the front plate 1 for a tactile sensor shown in FIG. However, it is not limited to this.
  • the first insulating layer 41 is not provided.
  • the second insulating layer 42 provided so as to cover has an advantage that the growth of microcracks and pinholes in the first insulating layer 41 can be suppressed.
  • the second insulating layer 42 is preferably formed thin. Without excessively increasing the thickness of the insulating layer 4 itself combined with the first insulating layer 41, an increase in water vapor permeability in the insulating layer 4 and the occurrence of a leak path associated therewith can be suppressed, and excellent insulating properties can be obtained. Because it is.
  • the surface of the first insulating layer 41 formed on the high resistance layer 3 is cleaned by, for example, ultrasonic cleaning to remove pinholes and the like. It is preferable to form the second insulating layer 42 on the first insulating layer 41.
  • the first insulating layer 41 and the second insulating layer in this manner, the growth of microcracks and pinholes in the insulating layer can be suppressed with high accuracy, the water vapor permeability is low, and the insulating property is further improved. It can be an excellent insulating layer.
  • the insulating layer 4 composed of a layer containing an inorganic oxide as a main component, for example, a layer containing a silicon oxide as a main component, a layer containing an aluminum oxide as a main component, or a tantalum oxide as a main component.
  • a layer mainly composed of titanium oxide, and a layer mainly composed of silicon nitride examples thereof include a layer, a layer mainly composed of titanium oxide, and a layer mainly composed of silicon nitride.
  • a layer mainly composed of an oxide of silicon is preferable because sufficient abrasion resistance and weather resistance can be obtained while ensuring good light transmittance and low reflectivity with respect to visible light. Used.
  • each layer may be a layer mainly composed of the same kind of inorganic oxide, or may be a layer mainly composed of different inorganic oxides.
  • a first insulating layer 41 containing an inorganic oxide as a main component is replaced with a second insulating layer 42 containing an inorganic oxide as a main component.
  • the growth of microcracks and pinholes generated in the first insulating layer 41 is hindered by different kinds of components laminated thereon.
  • the layer containing silicon oxide as a main component includes at least one layer selected from boron and phosphorus as an additive element other than silicon and containing a silicon oxide as a main component. Include layers.
  • the layer mainly composed of an oxide of aluminum and the layer mainly composed of an oxide of tantalum are similar to the layer mainly composed of an oxide of silicon, or a layer composed of only an oxide of aluminum or tantalum. It is not limited to the layer made of only the oxide, and may be a layer containing an oxide of aluminum or an oxide of tantalum as a main component and at least one selected from boron and phosphorus as an additive element.
  • the insulating layer 4 composed of a layer mainly composed of an inorganic oxide is formed in the same manner as the formation of the high-resistance layer 3 described above, such as DC (direct current) sputtering such as DC (direct current) magnetron sputtering, AC (alternating current) sputtering, RF.
  • DC (direct current) sputtering such as DC (direct current) magnetron sputtering, AC (alternating current) sputtering, RF.
  • sputtering such as (high frequency) sputtering, it can be formed on the surface of the laminate having the high resistance layer 3 on the transparent substrate 2 on the high resistance layer 3 side.
  • the insulating layer 4 is a layer mainly composed of silicon oxide
  • a target mainly composed of silicon is used as a target used for forming the insulating layer 4.
  • a target having silicon as a main component a target composed solely of silicon, or a dopant containing silicon as a main component and a known dopant such as boron or phosphorus other than silicon, as long as the characteristics of the present invention are not impaired. Things.
  • a target used for forming the insulating layer 4 is aluminum, respectively.
  • a target having a main component and a target having tantalum as a main component are used. These targets are not limited to those consisting only of aluminum or tantalum, but include aluminum or tantalum as a main component and, for example, known dopants such as boron and phosphorus within a range that does not impair the characteristics of the present invention. Doped ones can be used.
  • the insulating layer 4 composed of a layer containing an inorganic oxide as a main component can be formed by appropriately adjusting conditions such as the pressure of the sputtering gas and the film forming speed in the same manner as the sputtering in the high resistance layer 3 described above.
  • the insulating layer 4 composed of a layer containing an inorganic oxide as a main component is formed by sputtering, it may be carried out, for example, while performing a heat treatment in a temperature range of 100 to 300 ° C.
  • the film formation process by sputtering is performed while heating, it is preferable that the film formation is annealed to reduce microcracks and pinholes in the insulating layer 4.
  • the layer mainly composed of an inorganic oxide constituting the insulating layer is not limited to the sputtering method.
  • a physical vapor deposition method other than the sputtering method such as a vacuum deposition method, an ion beam assisted deposition method, or an ion plate method.
  • it can be formed using a chemical vapor deposition method such as a plasma CVD method.
  • the thickness is preferably 50 nm or more and 5 ⁇ m or less, more preferably 100 nm or more and 1 ⁇ m or less, and further preferably 100 nm. It is 500 nm or less.
  • the thickness of the insulating layer 4 containing an inorganic oxide as a main component is 50 nm or more because sufficient wear resistance and weather resistance can be obtained in the insulating layer 4.
  • the thickness of the insulating layer 4 containing an inorganic oxide as a main component is 5 ⁇ m or less, it has an appropriate bending strength and can secure a sufficient light transmittance. Furthermore, it is more preferable that the thickness of the insulating layer 4 containing an inorganic oxide as a main component is 1 ⁇ m or less, and by setting the thickness to 500 nm or less, the angle dependency of the reflection color can be reduced and the visibility is excellent. It is most preferable.
  • the thickness of the insulating layer 4 is 150 nm or more. 5 ⁇ m or less is preferable, and 200 nm or more and 3 ⁇ m or less is more preferable.
  • the insulating layer 4 mainly composed of an inorganic oxide is a multilayer of two or more layers, for example, in the case of the insulating layer 4 of the tactile sensor front plate 1 shown in FIG.
  • the total thickness is preferably from 50 nm to 5 ⁇ m, more preferably from 100 nm to 3 ⁇ m.
  • the thickness of the first insulating layer 41 is: The thickness is preferably 10 nm to 500 nm, more preferably 15 nm to 200 nm, and the thickness of the second insulating layer 42 is preferably 50 nm to 500 nm, more preferably 70 nm to 200 nm.
  • the cover layer is composed only of an insulating layer mainly composed of an inorganic oxide, as in the case of the insulating layer made of the cured body of the insulating layer forming composition
  • the water vapor permeability is 0.01 to 1 g / m 2 ⁇ day.
  • the water vapor permeability of the insulating layer can be set to 0.01 to 1 g / m 2 ⁇ day by adjusting the layer configuration and thickness.
  • the insulating layer mainly composed of the inorganic oxide exceeds the upper limit of the water vapor permeability, for example, the water vapor permeability of a water repellent layer, which will be described later, on the side opposite to the transparent substrate side of the insulating layer.
  • the water vapor permeability of a water repellent layer which will be described later
  • the insulating layer 4 in the front plate 1 for touch sensor has been described.
  • the insulating layer 4 does not contain a component imparting water repellency such as the above-mentioned fluorine-containing polymerizable monomer (e-1) or does not contain a sufficient amount of a component having water repellency.
  • the surface of the touch sensor front plate 1 is a surface S3 of the water repellent layer 7 opposite to the insulating layer 4 side.
  • the insulating layer 4 is a layer composed of an insulating material containing an inorganic oxide as a main component, more specifically, for example, the insulating layer 4 includes a silicon oxide as a main component. In the case of a layer, it is more preferable to form the water repellent layer 7 on the upper surface S2.
  • the electrostatic force acting between the high-resistance layer 3 and the sensory receptor X which is likely to occur when the moisture does not contact the surface S2 of the insulating layer 4 and thus the water-repellent layer 7 is not provided.
  • the shielding of the attractive force can be suppressed, and the function as a tactile sensor can be sufficiently obtained in the front plate 1 for tactile sensor.
  • the water repellent is not necessarily required.
  • the layer 7 may not be provided, for example, when the insulating layer 4 is a layer made of a cured product of the composition for forming an insulating layer (i), the composition contains the above-described fluorine-containing polymerizable monomer ( When a component imparting water repellency such as e-1) is not contained, the water repellent layer 7 may be formed on the upper surface S2 of the insulating layer 4.
  • the cover layer is a layer composed of an insulating layer 4 and a water repellent layer 7, and the water vapor permeability of this cover layer is 0.01 to 1 g / m 2 ⁇ day. .
  • the water vapor transmission rate of the cover layer By setting the water vapor transmission rate of the cover layer to 0.01 to 1 g / m 2 ⁇ day, even if the surface of the front plate 1 for tactile sensors is repeatedly rubbed with a fingertip, the surface of the front plate 1 for tactile sensors is moved from the surface to the inside. Moisture such as sweat that has entered can hardly reach the high resistance layer 3. That is, the formation of a leak path in the insulating layer 4 and the conduction between the high resistance layer 3 and the external atmosphere can be suppressed, and excellent tactile sensor sensitivity can be maintained for a long period of time.
  • the water repellent layer 7 can be formed of a layer made of a cured product of a water repellent layer forming composition containing a fluorine-containing compound or a silicon-containing compound (hereinafter referred to as a water repellent (H)).
  • a silane coupling agent etc. are mentioned as a fluorine-containing compound or silicon-containing compound which forms a water repellent (H).
  • silane coupling agents fluorine-containing silane coupling agents, silane coupling agents having amino groups, silane coupling agents having (meth) acryloyl groups, silane coupling agents having thiol groups, silane cups having isocyanate groups Examples thereof include a ring agent and a silane coupling agent having an oxiranyl group.
  • Commercial products such as FS-10 (manufactured by Shin-Etsu Chemical Co., Ltd.) can be used.
  • a fluorine-containing silane coupling agent is preferable from the viewpoint of water repellency and the like, and a silane coupling agent having a fluoroalkyl group is particularly preferable.
  • the fluoroalkyl group include a perfluoroalkyl group; a fluoroalkyl group containing a perfluoro (polyoxyalkylene) chain, and the like.
  • silane coupling agents having a fluoroalkyl group include AQUAPHOBE (registered trademark) CF manufactured by Gelest, Novec (registered trademark) EGC-1720 manufactured by MIM, and OPTOOL (registered trademark) DSX manufactured by Daikin. (Silane coupling agent having a perfluoro (polyoxyalkylene) chain) and the like.
  • silane coupling agent having an amino group include aminopropyltriethoxysilane, aminopropylmethyldiethoxysilane, aminoethyl-aminopropyltrimethoxysilane, aminoethyl-aminopropylmethyldimethoxysilane, and the like.
  • the water repellent layer 7 is an insulation of a laminate in which the water repellent layer-forming composition containing the above-described water repellent is laminated in the order of, for example, the transparent substrate 2, the high resistance layer 3, and the insulating layer 4 shown in FIG.
  • the application method include spin coating, dip coating, casting, slit coating, and spray coating.
  • the temperature for the heat treatment is preferably 20 to 150 ° C., and particularly preferably 70 to 140 ° C. from the viewpoint of productivity.
  • the humidity may be controlled during the heat treatment.
  • the water repellent layer 7 When the water repellent layer 7 is formed by vapor deposition of the water repellent layer forming composition, for example, after removing the solvent from the water repellent layer forming composition described above, it is heated to 250 to 300 ° C. in a vacuum state, In an atmosphere in which the water repellent (H) is in a gas phase state, for example, a laminated body in which the transparent substrate 2, the high resistance layer 3, and the insulating layer 4 shown in FIG. Then, gas molecules of the water repellent (H) are attached to the surface S2 of the insulating layer 4 on the side opposite to the high resistance layer 3 side, and the water repellent (H) is uniformly applied to the upper surface of the stacked body. A thin film can be formed.
  • the thickness of the water repellent layer 7 is preferably 2 nm or more and 20 nm or less.
  • the thickness of the water repellent layer 7 is 2 nm or more, it is preferable because diffusion and adhesion of moisture on the surface of the front plate 1 for tactile sensor can be suppressed and sufficient water repellency can be obtained.
  • the thickness of the water repellent layer 7 is 20 nm or less, the touch sensor front plate 1 as a whole has an appropriate bending strength and a sufficient light transmittance is preferable.
  • the front plate 1 for a tactile sensor is not limited to the configuration shown in FIGS. 2 to 5.
  • a configuration in which a barrier layer 8 is interposed between the transparent substrate 2 and the high resistance layer 3 is used. It is also preferable that
  • the barrier layer 8 By interposing the barrier layer 8 between the transparent substrate 2 and the high resistance layer 3, it is possible to suppress the components contained in the transparent substrate 2 from diffusing into the high resistance layer 3. That is, it is possible to suppress fluctuations in characteristics such as the surface resistance value of the high resistance layer 3 depending on the material and state of the base of the high resistance layer 3.
  • the transparent substrate 2 is a soda lime silicate glass plate
  • the barrier layer 8 by suppressing elution of alkali components such as sodium and potassium by the barrier layer 8, fluctuations in characteristics such as the surface resistance value of the high resistance layer 3 can be suppressed.
  • substrates 2, such as a glass substrate, has on the front plate 1 for touch sensors can be suppressed.
  • Examples of the barrier layer 8 include a layer mainly composed of silicon oxide and a layer mainly composed of a layer mainly composed of silicon oxide and indium oxide.
  • a layer containing a silicon oxide as a main component is preferable because good light transmittance is easily secured.
  • a layer containing nitrogen for example, a layer containing silicon oxynitride (SiON) can obtain excellent light transmittance and can be used as the front plate 1 for a tactile sensor. This is preferable because an effect of reducing the luminous reflectance can be obtained.
  • the barrier layer 8 is formed on the transparent substrate 2 by sputtering such as DC (direct current) sputtering such as DC (direct current) magnetron sputtering, AC (alternating current) sputtering, or RF (high frequency) sputtering, as in the formation of the high resistance layer 3 described above. Can be formed.
  • DC direct current
  • DC direct current
  • DC direct current
  • AC alternating current
  • RF high frequency
  • the barrier layer 8 is a layer mainly composed of silicon oxide
  • a target mainly composed of silicon is used as a target used for forming the barrier layer 8.
  • a target having silicon as a main component a target composed solely of silicon, or a dopant containing silicon as a main component and a known dopant such as boron or phosphorus other than silicon, as long as the characteristics of the present invention are not impaired. Things.
  • the barrier layer 8 can be formed by appropriately adjusting the conditions such as the pressure of the sputtering gas and the film forming speed in the same manner as the sputtering in the high resistance layer 3 described above.
  • the barrier layer 8 is formed of a silicon oxide as a main component and a layer containing nitrogen, for example, a layer containing silicon oxynitride (SiON), for example, oxygen gas and inert gas are used as sputtering gases.
  • a mixed gas obtained by mixing nitrogen gas or a gas containing nitrogen atoms such as N 2 O, NO, NO 2 , NH 3 can be used.
  • Such a barrier layer 8 made of an inorganic oxide such as silicon oxide is not limited to the sputtering method as described above, but other than the sputtering method such as a vacuum deposition method, an ion beam assisted deposition method, an ion plate method, etc.
  • the physical vapor deposition method, chemical vapor deposition method such as plasma CVD method, or the like can be used.
  • the thickness of the barrier layer 8 is preferably 100 nm or less, more preferably 50 nm or less, and further preferably 30 nm or less. By setting the thickness of the barrier layer 8 to 100 nm or less, the entire touch panel front plate 1 has an appropriate bending strength and sufficient light transmission.
  • the thickness of the barrier layer 8 is preferably 2 nm or more from the viewpoint of obtaining a barrier effect as a continuous film.
  • the refractive index of the barrier layer 8 is preferably 1.4 to 2.2 from the viewpoint of obtaining excellent luminous transmittance and luminous reflectance.
  • the luminous transmittance of the front plate 1 for tactile sensor is preferably 80% or more. Sufficient visibility is obtained by having a luminous transmittance of 80% or more.
  • the luminous transmittance in the front plate 1 for a touch sensor is more preferably 85% or more, and particularly preferably 90% or more.
  • the luminous reflectance on the surface of the touch sensor front plate 1 is preferably 14% or less, and more preferably 7% or less. Further, considering that the screen is easy to see even under external light, it is more preferably 2% or less, and particularly preferably 1% or less.
  • the luminous transmittance and luminous reflectance refer to luminous transmittance and luminous reflectance based on the stimulus value Y defined in JIS Z8701.
  • the static friction coefficient on the surface of the touch sensor front plate 1 is preferably 0.2 or less, and more preferably 0.15 or less.
  • the coefficient of dynamic friction on the surface of the front plate 1 for touch sensor is preferably 0.2 or less, and more preferably 0.15 or less.
  • the tactile sensor front plate 1 has an indentation elastic modulus of 2.5 GPa or more, more preferably 3.0 GPa or more, evaluated on the surface using a microhardness measurement test.
  • the indentation elastic modulus is 2.5 GPa or more, it is possible to obtain the tactile sensor front plate 1 having durability enough to withstand daily use.
  • the “micro hardness measurement test” is a test method for calculating the hardness from the penetration depth, whereby the indentation elastic modulus (GPa) corresponding to the indentation hardness can be measured.
  • This hardness serves as a guide indicating the “hardness” of the front plate 1 for a tactile sensor, that is, a mechanical strength such as scratch resistance.
  • the contact angle with water on the surface of the front plate 1 for touch sensor is preferably 80 degrees or more, and more preferably 90 degrees or more. When the contact angle is 80 degrees or more, it is possible to obtain the front plate 1 for a tactile sensor that is difficult to get a daily dirt.
  • the contact angle with respect to water is measured using a contact angle meter on the surface of the front plate 1 for the tactile sensor.
  • the tactile sensor front plate 1 there are few leak paths in the insulating layer 4. This is because a plurality of surfaces parallel to the main surface of the insulating layer 4 partitioning the insulating layer 4 in the thickness direction are located in the central region of each surface. In other words, the total number (n) of cracks and crystal grain boundaries in the insulating layer 4 intersecting with a straight line of a predetermined length arranged one by one is not more than a predetermined number as an average of the plurality of straight lines. Can do.
  • the length is arranged one by one in the central region of each surface on three surfaces parallel to the main surface of insulating layer 4 that partitions insulating layer 4 at equal intervals in the thickness direction. It is preferable that the total number (n) of cracks and crystal grain boundaries in the insulating layer 4 intersecting with the 1 ⁇ m straight line is 8 or less as an average of the three straight lines.
  • leakage path number (n) the total number of cracks and grain boundaries (n)
  • the average of the number of leak paths (n) in the three straight lines is also referred to as the average number of leak paths (n).
  • a straight line having a length of 1 ⁇ m used for measuring the number of leak paths (n) is referred to as a leak path measuring straight line.
  • the average number of leak paths (n) in the insulating layer 4 measured as described above is more preferably 3 or less.
  • the “main surface of the insulating layer 4” refers to the interface S1 of the insulating layer 4 with the high-resistance layer 3 and the surface S2 on the opposite side.
  • the surface S2 opposite to the high resistance layer 3 side of the insulating layer 4 may be the surface of the front plate 1 for the tactile sensor, and an interface with a layer formed on the insulating layer 4 such as the water repellent layer 7 or the like. Sometimes it becomes.
  • the central region of the surface is a region having the same center as the center of the surface and having an outer periphery similar to the shape of the outer periphery of the surface and an area approximately 50% of the surface area.
  • the number of leak paths (n) using the leak path measurement straight line is measured, for example, by a cross section orthogonal to the surface of the front plate for the tactile sensor, but with a straight line passing through the central region on the surface of the front plate for the tactile sensor. This can be done using a photograph taken by a scanning electron microscope (SEM) or the like of a cross section obtained by cutting the face plate in the thickness direction.
  • SEM scanning electron microscope
  • the straight line passing through the central region on the surface of the front plate for tactile sensors is preferably a straight line passing through the center of the surface.
  • FIG. 8 is a photograph of a cross section of the front plate for a tactile sensor in Example 2 manufactured so as to include the central region, and dotted lines indicate the two main surfaces of the insulating layer.
  • the two main surfaces are divided into four equal parts by three straight lines (solid lines) (L1, L2, L3) parallel to the main surface.
  • L1, L2, and L3 each have a length of 1 ⁇ m, and are used as leak path measurement straight lines.
  • FIG. 9 shows an example of a binary image of the SEM cross-sectional photograph shown in FIG.
  • FIG. 9 shows an example of a binary image of the SEM cross-sectional photograph shown in FIG.
  • Such a tactile sensor front plate 1 is provided on the front surface of the touch panel body 6 as shown in FIG. 3, for example, and is not shown in a voltage and frequency controlled to a pattern that can reproduce the tactile sensation to be expressed. So that the transparent electrode 6a of the touch panel body 6 is energized from the control unit and the charge induced on the tactile sensor front plate 1 side is accumulated in the high resistance layer 3 so that the tactile sensor front plate 1 is charged. It is configured.
  • the sensory receptor X such as a finger comes into contact with the surface of the front plate 1 for a tactile sensor in such a charged state, a weak electrostatic force acting between the two via the insulating layer 4 provides a tactile sensation such as unevenness. Sensory receptor X senses it.
  • a transparent electrode may be provided on the touch sensor front plate 1. That is, the transparent electrode may be disposed on the surface S4 on the opposite side of the tactile sensor front plate 1 where the high resistance layer 3 of the transparent substrate 2 is disposed.
  • the transparent electrode may be disposed on the surface S4 on the opposite side of the tactile sensor front plate 1 where the high resistance layer 3 of the transparent substrate 2 is disposed.
  • the material constituting the transparent electrode examples include tin-doped indium oxide (ITO), indium / gallium-doped zinc oxide (IGZO), and gallium-doped zinc oxide (GZO). Of these, ITO is preferable because of its good permeability, resistance stability and durability.
  • the thickness of the transparent electrode is preferably 50 to 500 nm, more preferably 100 to 300 nm. A thickness of 50 nm or more is preferable because a sufficient electric resistance value can be obtained and the stability of the electric resistance value can be secured. If it is 500 nm or less, since sufficient luminous transmittance can be ensured, it is preferable.
  • a transparent electrode When a transparent electrode is disposed on the front plate 1 for a tactile sensor, it can be formed by the following procedure. First, a film of a material to be a transparent electrode is formed on the surface of the transparent substrate 2 opposite to the surface on which the high resistance layer 3 is disposed by sputtering or vapor deposition. A desired transparent electrode can be formed by patterning the film into a desired shape by a photolithography method, a laser patterning method, or the like.
  • the surface resistance value of the high resistance layer 3 is 1 to 100 M ⁇ / ⁇ , and the high resistance layer 3 and the touch panel body 6 or the touch sensor are used in use.
  • the desired tactile sensation can be expressed with good reproducibility without producing an electrical action with the transparent electrode of the front plate 1 itself, and excellent tactile sensor sensitivity can be obtained.
  • the layer constituting the layer from the surface on the transparent substrate 2 side of the insulating layer 4 to the surface on the insulating layer 4 side of the front plate 1 for tactile sensor that is, the water vapor permeability of the cover layer is 0.01 to 1 g / m. Since it is 2 ⁇ day, excellent tactile sensor sensitivity can be maintained even during long-term use.
  • the embodiments of the front plate for a tactile sensor of the present invention have been described with reference to the examples shown in FIGS. 2 to 7, but the front plate for a tactile sensor of the present invention is not limited thereto. As long as it does not contradict the spirit of the present invention, the configuration can be changed as necessary.
  • Examples 1 to 9 are examples, and examples 10 to 16 are comparative examples.
  • composition (i-1) for forming insulating layer) Preparation of composition (i-1) for forming insulating layer)
  • a polymerizable benzotriazole ultraviolet absorber manufactured by Otsuka Chemical Co., Ltd., 2 g of trade name: R-UVA93
  • 1 g of light stabilizer manufactured by BASF, trade name: TINUVIN292
  • leveling agent trade name: BYK306, trade name: BYK306
  • BASF photopolymerization initiator
  • composition for forming insulating layer (i-2) Preparation of composition for forming insulating layer (i-2)
  • a polymerizable benzotriazole ultraviolet absorber manufactured by Otsuka Chemical Co., Ltd., 2 g of product name: R-UVA93
  • 1 g of light stabilizer manufactured by BASF, product name: TINUVIN292
  • leveling agent manufactured by BYK Chemie, product name: BYK306
  • BASF photopolymerization initiator
  • thermosetting insulating layer forming composition (ii-1) a thermosetting silicone hard coat agent (trade name: PHC587C, manufactured by Momentive) was used.
  • this silicone hard coat agent is referred to as “insulating layer forming composition (ii-1)”.
  • Example 1 A glass substrate Q1 (manufactured by Asahi Glass Co., Ltd., trade name: AS glass, length 100 mm ⁇ width 100 mm ⁇ thickness 1 mm) was placed in a vacuum chamber and evacuated until the pressure in the chamber reached 1 ⁇ 10 ⁇ 4 Pa. Then, the film-forming process was performed on the glass substrate Q1 by the magnetron sputtering method under the following conditions, and the barrier layer C1 and the high resistance layer A1 were sequentially formed.
  • a tin oxide target manufactured by AGC Ceramics Co., Ltd., trade name: GIT target
  • a titanium oxide target AGC ceramics
  • Co-sputtering was performed by a magnetron sputtering method at a pressure of 0.1 Pa using a company name, product name: TXO target) to form a high resistance layer A1 having a thickness of 20 nm on the barrier layer C1 of the glass substrate Q1.
  • the GIT target performs pulse sputtering under the conditions of a frequency of 20 kHz, a power density of 3.8 W / cm 2 and an inversion pulse width of 5 ⁇ sec, and the TXO target is a condition of a frequency of 20 kHz, power density of 4 W / cm 2 and inversion pulse width of 5 ⁇ sec. Then, pulse sputtering was performed.
  • a measuring device manufactured by Mitsubishi Chemical Analytech Co., Ltd., device name: Hiresta UP (MCP-HT450 type)
  • MCP-HT450 type the laminate obtained by laminating the glass substrate Q1, the barrier layer C1, and the high resistance layer A1 obtained in the above order.
  • the surface resistance value of the high resistance layer A1 was measured.
  • a probe was placed at the center of the surface of the high resistance layer A1 of the 10 cm ⁇ laminate and energized at 10V for 10 seconds, the surface resistance value was 48 M ⁇ / ⁇ .
  • an insulating layer was formed as follows. First, conditions of pressure 0.3 Pa, frequency 20 kHz, power density 3.8 W / cm 2 , and inversion pulse width 5 ⁇ sec using a Si target while introducing a mixed gas obtained by mixing 40 vol% oxygen gas into argon gas.
  • the layer ⁇ 1 made of silicon oxide with a thickness of 50 nm was formed on the surface of the glass substrate Q1.
  • the laminated body is taken out from the vacuum chamber and subjected to ultrasonic cleaning with pure water to remove deposits and dust on the surface of the laminated body, and then the washed laminated body is put into the vacuum chamber again, and the pressure in the chamber is increased.
  • the gas is exhausted until the pressure reaches 1 ⁇ 10 ⁇ 4 Pa, and a pressure of 0.3 Pa, a frequency of 20 kHz, and a power density of 3.3 are introduced using a Si target while introducing a mixed gas obtained by mixing 40% by volume of oxygen gas with argon gas.
  • Pulse sputtering was performed under the conditions of 8 W / cm 2 and an inversion pulse width of 5 ⁇ sec to form a silicon oxide layer ⁇ 2 having a thickness of 50 nm on the surface of the silicon oxide layer ⁇ 1.
  • an insulating layer B1 having a thickness of 100 nm made of a layer ⁇ 1 made of silicon oxide and a layer ⁇ 2 made of silicon oxide was formed on the high resistance layer A1.
  • a water repellent layer D1 was formed on the insulating layer B1 by the following method. First, after putting 75 g of OPTOOL (registered trademark) DSX (trade name: manufactured by Daikin) solution, which is a vapor deposition material, into a crucible as a heating container, the inside of the crucible is deaerated with a vacuum pump for 10 hours or more. Removal was performed.
  • OPTOOL registered trademark
  • DSX trade name: manufactured by Daikin
  • the crucible is heated in the vacuum chamber until the temperature in the crucible reaches 270 ° C., and further maintained for about 10 minutes until the temperature in the crucible is stabilized, and then the barrier layer C1, the high resistance layer A1, and the like are formed on the glass substrate Q1.
  • the laminated substrate on which the insulating layer B1 was sequentially formed was introduced into the vacuum chamber, and film formation was performed.
  • a water repellent layer D1 having a thickness of 10 nm was formed on the insulating layer B1.
  • the front panel 1 for a tactile sensor in which the barrier layer C1, the high resistance layer A1, the insulating layer B1, and the water repellent layer D1 were laminated on the glass substrate Q1 was obtained.
  • Example 2 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed.
  • pulse sputtering was performed by a magnetron sputtering method, and an insulating layer B2 made of silicon oxide and having a thickness of 1 ⁇ m was formed on the high resistance layer A1.
  • a 10 nm thick water repellent layer D1 is formed on the insulating layer B2 in the same manner as in Example 1, and the barrier layer C1, the high resistance layer A1, the insulating layer B2, and the water repellent layer D1 are formed on the glass substrate Q1.
  • a laminated front plate 2 for a tactile sensor was obtained.
  • Example 3 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed.
  • a 10 nm thick water repellent layer D1 is formed on the insulating layer B3 in the same manner as in Example 1, and the barrier layer C1, the high resistance layer A1, the insulating layer B3, and the water repellent layer D1 are formed on the glass substrate Q1.
  • a front plate 3 for a tactile sensor was obtained.
  • Example 4 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed.
  • Pulse sputtering was performed by a sputtering method to form a layer ⁇ 3 made of aluminum oxide having a thickness of 100 nm on the high resistance layer A1.
  • the pressure is 0.3 Pa
  • the frequency is 20 kHz
  • the power density is 3.8 W / cm 2
  • the inversion pulse width is 5 ⁇ sec.
  • the layer ⁇ 4 made of silicon oxide having a thickness of 100 nm was formed on the surface of the layer ⁇ 3 made of aluminum oxide.
  • an insulating layer B4 having a thickness of 200 nm composed of a layer ⁇ 3 made of aluminum oxide and a layer ⁇ 4 made of silicon oxide was formed on the high resistance layer A1.
  • a 10 nm thick water repellent layer D1 is formed on the insulating layer B4 in the same manner as in Example 1, and the barrier layer C1, the high resistance layer A1, the insulating layer B4, and the water repellent layer D1 are formed on the glass substrate Q1.
  • a front plate 4 for a tactile sensor was obtained.
  • Example 5 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed.
  • Example 4 After stacking the layer ⁇ 3 made of aluminum oxide on the high resistance layer A1, the operation of stacking the layer ⁇ 4 made of silicon oxide on the layer ⁇ 3 made of aluminum oxide is 5 Repeated times. In this way, an insulating layer B5 having a thickness of 1 ⁇ m was formed by laminating five layers obtained by laminating the layer ⁇ 4 made of silicon oxide on the layer ⁇ 3 made of aluminum oxide.
  • a 10 nm thick water repellent layer D1 was formed on the insulating layer B5 in the same manner as in Example 1 to obtain a front plate 5 for a tactile sensor.
  • Example 6 In Example 1, without formation of the barrier layer C1 on the glass substrate Q1, except that the power density of the pulsed sputtering in GIT target was changed from 3.8W / cm 2 to 3W / cm 2, similar to Example 1 Then, co-sputtering was performed on the glass substrate Q1 by a magnetron sputtering method to form a high resistance layer A2 having a thickness of 20 nm.
  • an adhesion treatment was performed on the high resistance layer A2 by the following method.
  • 3-methacryloxypropyltrimethoxysilane manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM503
  • KBM503 3-methacryloxypropyltrimethoxysilane
  • this diluted solution is dropped about 1 cm 3 on the surface of the high resistance layer A2.
  • the coating was performed with a spin coater while rotating at 1000 rpm for 10 seconds and then at 2000 rpm for 0.5 seconds. Then, it put into the thermostat and hold
  • an insulating layer B6 was formed by the following method. First, about 1 cm 3 of the composition for forming an insulating layer (i-1) obtained above is dropped on the adhesion-treated surface of the high-resistance layer A2 that has been subjected to the adhesion treatment, and the spin coater is used for 10 seconds at a rotation speed of 200 rpm. Then, it was rotated at 2000 rpm for 0.5 second to form a coating film. Then, it put into the thermostat and hold
  • the integrated value of UV irradiation is 1000 mJ / cm 2 , peak
  • the dried coating film is cured by performing UV irradiation while adjusting the conveyance speed and UV intensity so that the value becomes 375 mW / cm 2, and is made of a cured product of the insulating layer forming composition (i-1).
  • Insulating layer B6 was formed. The thickness of the insulating layer B6 was 10 ⁇ m. In this way, the front plate 6 for tactile sensors in which the high resistance layer A2 and the insulating layer B6 were laminated on the glass substrate Q1 was obtained.
  • Example 7 A glass substrate Q1 was prepared in the same manner as in Example 6 except that the insulating layer forming composition (i-2) was used instead of the insulating layer forming composition (i-1) as the insulating layer forming composition.
  • Example 8 A high resistance layer A2 was formed on the glass substrate Q1 in the same manner as in Example 6.
  • An insulating layer B8 was formed on the high resistance layer A2 as follows without performing an adhesion treatment. That is, about 1 cm 3 of the composition for forming an insulating layer (ii-1) was dropped on the high resistance layer A2, and the spin coater was rotated for 10 seconds at 200 rpm and then for 0.5 seconds at 2000 rpm, and then the temperature was kept constant. The composition was placed in a bath and held at 120 ° C. for 60 minutes to thermally cure the insulating layer forming composition (ii-1) to form an insulating layer B8. The thickness of the insulating layer B8 was 5 ⁇ m. In this way, a touch sensor front plate 8 in which the high resistance layer A2 and the insulating layer B8 were laminated on the glass substrate Q1 was obtained.
  • Example 9 In the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed. Next, a cured product of the insulating layer forming composition (i-1) is formed on the high resistance layer A1 in the same manner as in Example 6 (however, the coating amount of the composition is adjusted to adjust the film thickness). An insulating layer B6 made of was formed. The thickness of the insulating layer B6 was 8 ⁇ m. Thus, a touch sensor front plate 9 in which the barrier layer C1, the high resistance layer A1, and the insulating layer B6 were sequentially laminated on the glass substrate Q1 was obtained.
  • Example 10 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and a high resistance layer A1 having a thickness of 20 nm were formed.
  • an insulating layer B2 made of silicon oxide and having a thickness of 1 ⁇ m was formed on the high resistance layer A1.
  • Example 11 The glass substrate Q1 is put into a vacuum chamber and evacuated until the pressure in the chamber becomes 1 ⁇ 10 ⁇ 4 Pa. Then, a film forming process is performed on the glass substrate Q1 by the magnetron sputtering method under the following conditions, and the barrier layer C2 And high resistance layer A3 was formed in order.
  • the gas introduced into the vacuum chamber was changed from “a mixed gas in which 2% by volume of oxygen gas was mixed with argon gas” to “a mixed gas in which 5% by volume of oxygen gas was mixed with argon gas”.
  • co-sputtering was performed by the magnetron sputtering method.
  • a high resistance layer A3 having a thickness of 100 nm was formed on the barrier layer C2.
  • Example 2 After the insulating layer B2 made of silicon oxide and having a thickness of 90 nm was formed on the high resistance layer A3 in the same manner as in Example 2 (however, the sputtering time was adjusted for film thickness adjustment), A 10 nm thick water repellent layer D1 was formed on the insulating layer B2 in the same manner as in Example 1. In this way, a touch sensor front plate 11 in which the barrier layer C2, the high resistance layer A3, the insulating layer B2, and the water repellent layer D1 were sequentially laminated on the glass substrate Q1 was obtained.
  • Example 12 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed.
  • a 10 nm thick water-repellent layer D1 was formed on the insulating layer B3 in the same manner as in Example 1 to obtain a front panel 12 for a tactile sensor.
  • Example 13 On the glass substrate Q1, in the same manner as in Example 1, a barrier layer C1 having a thickness of 20 nm and then a high resistance layer A1 having a thickness of 20 nm were formed. Then, an insulating layer B1 having a thickness of 100 nm was formed on the high resistance layer A1 in the same manner as in Example 1 to obtain a touch sensor front plate 13. In addition, the water repellent layer was not formed in the front plate 13 for touch sensors.
  • Example 14 An example except that instead of the glass substrate Q1, a glass substrate Q2 (length 100 mm ⁇ width 100 mm ⁇ thickness 0.8 mm) obtained by chemically strengthening aluminosilicate glass was used, and the thickness of the insulating layer B2 was set to 100 nm.
  • the front plate 14 for a tactile sensor was obtained in the same manner as in FIG.
  • the composition of the glass material in the glass substrate Q2 is expressed in mol%, SiO 2 is 64.5%, Al 2 O 3 is 8%, Na 2 O is 12.5%, K 2 O is 4%, MgO 10.5%, CaO 0.1%, SrO 0.1%, BaO 0.1% and ZrO 2 0.5%.
  • the chemical strengthening treatment was performed by immersing a glass plate of aluminosilicate glass having the above composition in KNO 3 molten salt, performing an ion exchange treatment, and then cooling to near room temperature.
  • the resulting tempered glass had a surface compressive stress of 735 MPa and a compressive stress layer thickness of 51.2 ⁇ m.
  • the surface compressive stress and the thickness of the compressive stress layer were measured using a surface compressive stress meter FSM-6000 (manufactured by Orihara Seisakusho).
  • Example 15 On the glass substrate Q1, a barrier layer C1 having a thickness of 20 nm was formed in the same manner as in Example 1.
  • a high resistance layer A2 having a thickness of 20 nm was formed on the barrier layer C1 in the same manner as in Example 6.
  • stacked the barrier layer C1 and the high resistance layer A2 on the glass substrate Q1 by the magnetron sputtering method was obtained.
  • Example 16 On the glass substrate Q1, a barrier layer C1 having a thickness of 20 nm was formed in the same manner as in Example 1. Then, using a target (Sumitomo Metal Mining Co., Ltd., trade name: GIO target) in which 50% by mass of indium oxide is mixed with gallium oxide while introducing a mixed gas in which 2% by volume of oxygen gas is mixed with argon gas, Pulse sputtering was performed by a magnetron sputtering method under the conditions of pressure 0.1 Pa, frequency 20 kHz, power density 0.8 W / cm 2 , and inversion pulse width 5 ⁇ sec. As a result, a high resistance layer A4 having a thickness of 15 nm was formed on the surface of the barrier layer C1.
  • GIO target Suditomo Metal Mining Co., Ltd., trade name: GIO target
  • Pulse sputtering was performed by a magnetron sputtering method under the conditions of pressure 0.1 Pa, frequency 20 kHz,
  • Example 6 Next, on the high resistance layer A4, an adhesion treatment was performed in the same manner as in Example 6, and then an insulating layer B6 made of a cured product of the insulating layer forming composition (i-1) was formed. A front plate 16 was obtained.
  • Luminous reflectance The reflectance at the surface on the insulating layer side of the front plate for the tactile sensor is measured with a spectrophotometer (manufactured by Shimadzu Corporation, model: UV3150PC), and the luminous reflectance (specified in JIS Z8701) is determined from the reflectance. The stimulation value Y) of reflection was determined. In order to cancel back surface reflection of the front plate, the back surface of the glass substrate was painted black and measured.
  • indentation modulus The indentation elastic modulus (GPa) on the surface on the insulating layer side of the front plate for a tactile sensor was measured according to ISO14577 using a micro hardness tester (manufactured by Fischer Instruments, device name: Picodenter HM500). A Vickers indenter was used for the measurement.
  • each tactile sensor front plate 1-16 In front of each tactile sensor front plate 1-16, the surface on the glass substrate side (surface opposite to the surface on which the high resistance layer is formed on the glass substrate) is painted black to cancel back surface reflection.
  • the face plate was placed on a desk with the insulating layer side facing up. Further, a stand of daylight direct fluorescent lamp (manufactured by NEC Corporation, three-wavelength daylight white) was arranged at a height of 40 cm from the desk.
  • the surface (insulating layer surface) of the front plate for a tactile sensor was visually observed from various angles under the light irradiated by this fluorescent lamp, and the change in the color tone of the reflected light was evaluated according to the viewing angle.
  • the color tone of the front surface of the tactile sensor front plate is a single color (mainly blue, etc.) or when the visual angle is changed more than 10 degrees, the color tone of the tactile sensor front plate is visually observed from any angle.
  • “ ⁇ ” was assigned, and when the visual angle was changed within a range of 10 degrees or less, the change in the color tone of the surface of the front plate for the tactile sensor was assigned “X”.
  • the stage on which the tactile sensor front plate is placed is moved, and the surface of the tactile sensor front plate is slid five times at a sliding speed of 500 mm / min and a stroke of 20 mm.
  • the friction force was measured with a strain gauge at the base.
  • the average value of the friction coefficient computed from the measured value of friction force and the load applied to the indenter was made into the dynamic friction coefficient.
  • 0 to 4 are respectively “0: No feeling at all, or the tactile sensation sensed by the fingertip is too strong and the fingertip is in an excessively stimulated state, and an appropriate sensor sensitivity cannot be obtained”. It indicates that the condition was “1: feel faint but weak”, “2: feel”, “3: feel enough”.
  • the applied voltage (2 kV) for sensitivity evaluation was determined as follows.
  • the voltage applied from the conductive tape (tape with a polyethylene terephthalate film (thickness: 10 ⁇ m) attached to the copper foil) provided on the glass substrate side surface of the front plate for the tactile sensor is adjusted between 750 V and 100 kV. However, since the tactile sensation appeared at about 2 kV, the sensor sensitivity was evaluated based on this voltage value.
  • a PET film manufactured by Toyobo Co., Ltd., product name “A4100”, thickness 100 ⁇ m
  • the cover layer of each tactile sensor front plate of Examples 1 to 16 (Examples 1 to 5, 11)
  • Film stacks 1 to 16 were obtained in which layers having the same structure as those of layers 12 to 12 were formed of an insulating layer and a water repellent layer, and layers 6 to 10 and 13 to 16 were formed of an insulating layer.
  • the film laminates 1 to 16 were measured at a temperature of 40 ° C. and a humidity of 100% RH according to JIS K7129 B method using a water vapor transmission rate measuring device (manufactured by MOCON, product name “PERMATRAN-W 3 / 33MG”). The water vapor permeability was measured under an atmosphere. In addition, humidity control to the laminated film was performed in a direction in which water vapor permeated from the film formation surface side to the base material side.
  • the water vapor permeability of the PET film as a base material is generally 20 g / m 2 / day or more, which is an order of magnitude greater than the water vapor permeability of the film laminate.
  • the water vapor barrier property of the PET film is negligible.
  • the front plate is obtained by cutting the front plate in the thickness direction along a straight line passing through the central region on the surface of the tactile sensor front plate.
  • a cross-section sample was prepared so that the cross-section to be observed can be observed.
  • the cross-section of the obtained cross-sectional sample was observed with a scanning electron microscope (manufactured by Hitachi High-Tech, SEM SU8020).
  • FIG. 8 shows a SEM cross-sectional photograph of the tactile sensor front plate 2 in Example 2
  • FIG. 10 shows a SEM cross-sectional photograph (100,000 times magnification) of the tactile sensor front plate 10 in Example 10. 8 and 10, the white straight line shown at the lower right corner indicates a length of 100 nm.
  • insulating layer 8 and 10 both show the insulating layer as a center (as a guide, region A: glass substrate, region B: insulating layer, region C: cover layer surface (water repellent layer or coating formed on insulating layer surface) (Area), and the broken line indicates the position of the boundary of each area.) It is cracks or crystal grain boundaries that are confirmed as wrinkles in the insulating layer. Note that cracks are estimated to be larger in size than crystal grain boundaries, but are not particularly distinguished here. In Example 2 and Example 10, the boundary region between the region A and the region B corresponds to the barrier layer and the high resistance layer.
  • the number of cracks and grain boundaries per unit area in the cross section of the same insulating layer is estimated to be substantially constant even if the position in the insulating layer is slightly different.
  • the number of wrinkles was determined as follows.
  • FIG. 9 shows an image obtained by binarizing the SEM cross-sectional photograph shown in FIG.
  • a measurement method will be described by taking as an example the average number of leak paths (n) of the front plate 2 for a tactile sensor in Example 2 according to FIGS. 8 and 9.
  • Example 8 and Example 10 the same operation was performed using the binarized images, and the average number of leak paths (n) was obtained.
  • the gap between the two principal surfaces of the insulating layer is divided into four equal parts by three straight lines (solid lines) (L1, L2, L3) parallel to the principal surface to obtain a leakage path measurement straight line.
  • the positions of L1, L2, and L3 are respectively 3/4, 2/4, and 1/4 of the thickness of the entire insulating layer from the boundary between the insulating layer (region B) and the cover layer (region C). did.
  • FIGS. 8, 9, and 10 show the positions of L1, L2, and L3 in the cross sections of the tactile sensor front plates 2 and 10 of Examples 2 and 10, respectively.
  • L1, L2, and L3 each have a length of 1 ⁇ m.
  • FIG. 9 the number of wrinkles crossing a straight line L1 having a length of 1 ⁇ m provided at a depth of 3/4 of the thickness of the entire insulating layer from the main surface of the insulating layer on the surface side of the cover layer was measured. In FIG. 9, it was measured as seven as shown by the arrows.
  • the straight lines L2 and L3 provided at positions of 2/4 and 1/4 of the thickness of the entire insulating layer from the main surface of the insulating layer on the cover layer surface side are as described above. The same operation as that performed on the straight line L1 was repeated. In FIG. 9, as indicated by the arrows, there are nine in L2 and four in L3.
  • the average value of the number of wrinkles measured for these three straight lines L1, L2, and L3 was calculated.
  • This average value was defined as the number of cracks or crystal grain boundaries in the insulating layer, that is, the average number of leak paths (n).
  • the average number of leak paths (n) was measured for each of the touch sensor front plates 8 and 10 according to Examples 8 and 10. The results are shown in Table 2.
  • the high resistance layer has a surface resistance value of 1 to 100 M ⁇ / ⁇
  • the cover layer has a low water vapor of 0.01 to 1 g / m 2 ⁇ day. It has transmittance and good sensor sensitivity was obtained.
  • the section of the insulating layer of Example 8 since there are as few as 1.3 cracks and crystal grain boundaries intersecting with a straight line having a length of 1 ⁇ m parallel to the film surface of the insulating layer, there are cracks and crystals in the insulating layer. It is considered that there are few grain boundaries and water vapor transmission from the surface of the front plate 1 for touch sensor to the glass substrate Q1 is suppressed.
  • Example 10 the water vapor permeability of the cover layer exceeded 0.01 to 1 g / m 2 ⁇ day, and a tactile sensation sensed by the fingertip could not be obtained sufficiently, resulting in poor sensor accuracy. It was. Further, in the cross section of the insulating layer of Example 10, since there are as many as 13.3 cracks and crystal grain boundaries intersecting with a straight line having a length of 1 ⁇ m parallel to the film surface of the insulating layer, cracks and crystal grains are present in the insulating layer. It is considered that there are many fields and water vapor transmission from the surface of the front plate 1 for touch sensor to the glass substrate Q1 is hardly suppressed. Further, in Example 16, the surface resistance value was 0.7 ⁇ / ⁇ , and the tactile sensation sensed by the fingertip was excessively high, so that appropriate sensor sensitivity could not be obtained.
  • SYMBOLS 1 ... Front plate for touch sensors, 2,102 ... Transparent base

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • User Interface Of Digital Computer (AREA)
  • Laminated Bodies (AREA)
  • Position Input By Displaying (AREA)

Abstract

L'invention fournit une plaque de face avant pour capteur tactile dont la précision de capture par perception tactile est satisfaisante, et dans lequel une baisse de précision de capture par une mise en œuvre sur une longue durée, est empêchée. La plaque de face avant pour capteur tactile (1) est constituée par stratification dans l'ordre sur un corps de base (2), et depuis celui-ci, d'une couche de haute résistivité (3), et d'une couche d'isolation (4) possédant des propriétés d'isolation électrique. La valeur ohmique de surface de la couche de haute résistivité (3), est de 1 à 100MΩ au carré. Le taux de perméation de vapeur d'eau d'une couche configurée dans un espace depuis une face côté corps de base (2) de la couche d'isolation (4), jusqu'à la surface de la couche d'isolation (4) de la plaque de face avant pour capteur tactile (1), mesuré à une humidité de 100%RH, et une température de 40°C selon le procédé JISK7129B, est compris entre 0,01 et 1g/m2 par jour.
PCT/JP2013/083000 2012-12-10 2013-12-09 Plaque de face avant pour capteur tactile WO2014092056A1 (fr)

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JP2014552036A JP6356611B2 (ja) 2012-12-10 2013-12-09 触覚センサ用前面板

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JP2012-269384 2012-12-10
JP2012269384 2012-12-10

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005035261A (ja) * 2003-06-26 2005-02-10 Gunze Ltd 帯電防止シート及びタッチパネル
JP2006072694A (ja) * 2004-09-02 2006-03-16 Matsushita Electric Ind Co Ltd タッチパネル
JP2008146927A (ja) * 2006-12-07 2008-06-26 Nitto Denko Corp 透明導電性積層体及びタッチパネル
JP2009073090A (ja) * 2007-09-21 2009-04-09 Toppan Printing Co Ltd 機能性フィルム、機能性フィルムの製造方法、積層体、電子デバイス
WO2011058225A1 (fr) * 2009-11-12 2011-05-19 Senseg Oy Appareil de stimulation tactile comportant une section composite comprenant un matériau semi-conducteur
WO2011078231A1 (fr) * 2009-12-24 2011-06-30 日本写真印刷株式会社 Capteur tactile de type capacitif, dispositif électronique et procédé de fabrication d'un stratifié à film conducteur transparent

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Publication number Priority date Publication date Assignee Title
JP4177323B2 (ja) * 2004-11-30 2008-11-05 Ｔｄｋ株式会社 透明導電体
JP2008238669A (ja) * 2007-03-28 2008-10-09 Dainippon Printing Co Ltd パターン印刷シート
JP5838152B2 (ja) * 2010-03-04 2015-12-24 株式会社きもと 機能性積層板、タッチパネル用透明導電性積層板、およびこれを用いたタッチパネル
JP2011228243A (ja) * 2010-03-31 2011-11-10 Fujifilm Corp 導電性組成物、並びに、それを用いた透明導電体、タッチパネル及び太陽電池
JP5740890B2 (ja) * 2010-09-29 2015-07-01 凸版印刷株式会社 保護フィルムおよびタッチパネル表示装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005035261A (ja) * 2003-06-26 2005-02-10 Gunze Ltd 帯電防止シート及びタッチパネル
JP2006072694A (ja) * 2004-09-02 2006-03-16 Matsushita Electric Ind Co Ltd タッチパネル
JP2008146927A (ja) * 2006-12-07 2008-06-26 Nitto Denko Corp 透明導電性積層体及びタッチパネル
JP2009073090A (ja) * 2007-09-21 2009-04-09 Toppan Printing Co Ltd 機能性フィルム、機能性フィルムの製造方法、積層体、電子デバイス
WO2011058225A1 (fr) * 2009-11-12 2011-05-19 Senseg Oy Appareil de stimulation tactile comportant une section composite comprenant un matériau semi-conducteur
WO2011078231A1 (fr) * 2009-12-24 2011-06-30 日本写真印刷株式会社 Capteur tactile de type capacitif, dispositif électronique et procédé de fabrication d'un stratifié à film conducteur transparent

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TW201435653A (zh) 2014-09-16
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