WO2014041684A1 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- WO2014041684A1 WO2014041684A1 PCT/JP2012/073666 JP2012073666W WO2014041684A1 WO 2014041684 A1 WO2014041684 A1 WO 2014041684A1 JP 2012073666 W JP2012073666 W JP 2012073666W WO 2014041684 A1 WO2014041684 A1 WO 2014041684A1
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Abstract
Description
本願において、実施の態様の記載は、必要に応じて、便宜上複数のセクション等に分けて記載するが、特にそうでない旨明示した場合を除き、これらは相互に独立別個のものではなく、記載の前後を問わず、単一の例の各部分、一方が他方の一部詳細または一部または全部の変形例等である。また、原則として、同様の部分は繰り返しの説明を省略する。また、実施の態様における各構成要素は、特にそうでない旨明示した場合、理論的にその数に限定される場合および文脈から明らかにそうでない場合を除き、必須のものではない。
本実施の形態では、複数の半導体チップを積層した半導体装置の例として、演算処理回路が形成された半導体チップ上にメモリ回路が形成された複数の半導体チップを積層した実施態様を取り上げて説明する。図1は本実施の形態の半導体装置の斜視図、図2は、図1に示す半導体装置の下面図である。また、図3は、図1に示す封止体を取り除いた状態で配線基板上の半導体装置の内部構造を示す透視平面図である。また、図4は図1のA-A線に沿った断面図である。なお、図1~図4では、見易さのため、端子数を少なくして示しているが、端子(ボンディングリード2f、ランド2g、半田ボール5)の数は、図1~図4に示す態様には限定されない。また、図3では、ロジックチップLCとメモリチップMC4の平面視における位置関係や平面サイズの違いを見易くするため、ロジックチップLCの輪郭を、点線により示している。
まず、本実施の形態の半導体装置1の概要構成について、図1~図4を用いて説明する。本実施の形態の半導体装置1は、配線基板2、配線基板2上に搭載された複数の半導体チップ3(図4参照)および複数の半導体チップ3を封止する封止体(樹脂体)4を備える。
次に、図3および図4に示すロジックチップLCおよびメモリチップMC1、MC2、MC3、MC4の詳細および各半導体チップ3の電気的な接続方法について説明する。図5は図4に示すA部の拡大断面図である。また、図6は、図4に示すメモリチップの表面側を示す平面図、図7は、図6に示すメモリチップの裏面側の一例を示す平面図である。また、図8は、図4に示すロジックチップの表面側を示す平面図、図9は、図8に示すロジックチップの裏面側の一例を示す平面図である。また、図10は図4のB部の拡大断面図である。なお、図5~図9では、見易さのため、電極数を少なくして示しているが、電極(表面電極3ap、裏面電極3bp、貫通電極3tsv)の数は、図5~図9に示す態様には限定されない。また、図7では、メモリチップMC1、MC2、MC3の裏面図を示すが、裏面電極3bpが形成されないメモリチップMC4(図4参照)の裏面の構造は、図3に示されているので、図示は省略する。
次に、図1~図10を用いて説明した半導体装置1の製造工程について説明する。半導体装置1は、図11に示すフローに沿って製造される。図11は、図1~図10を用いて説明した半導体装置の製造工程の概要を示す説明図である。各工程の詳細については、図12~図42を用いて、以下に説明する。
まず、図11に示す基板準備工程では、図12~図15に示す配線基板20を準備する。図12は、図11に示す基板準備工程で準備する配線基板の全体構造を示す平面図、図13は図12に示すデバイス領域1個分の拡大平面図である。また、図14は図13のA-A線に沿った拡大断面図である。また、図15は、図13の反対側の面を示す拡大平面図である。なお、図12~図15では、見易さのため、端子数を少なくして示しているが、端子(ボンディングリード2f、ランド2g)の数は、図12~図15に示す態様には限定されない。
次に、図11に示す第1接着材配置工程では、図16および図17に示すように、配線基板20の上面2aのチップ搭載領域2p1上に接着材NCL1を配置する。図16は図13に示すチップ搭載領域に接着材を配置した状態を示す拡大平面図、図17は図16のA-A線に沿った拡大断面図である。なお、図16ではチップ搭載領域2p1およびチップ搭載領域2p2の位置を示すため、チップ搭載領域2p1、2p2の輪郭をそれぞれ2点鎖線で示すが、チップ搭載領域2p1、2p2は、それぞれ、ロジックチップLCおよび積層体MCSを搭載する予定領域なので、実際に視認可能な境界線が存在する必要はない。なお、以下、チップ搭載領域2p1、2p2を図示する場合には、同様に実際に視認可能な境界線が存在する必要はない。
また、図11に示す第1チップ準備工程では、図8および図9に示すロジックチップLCを準備する。図18は、図7に示す貫通電極を備えた半導体チップの製造工程の概要を模式的に示す説明図である。また、図19は図18に続く半導体チップの製造工程の概要を模式的に示す説明図である。なお、図18および図19では、貫通電極3tsvおよび貫通電極3tsvと電気的に接続される裏面電極3pの製造方法を中心に説明し、貫通電極3tsv以外の各種回路の形成工程については図示および説明を省略する。また、図18および図19に示す半導体チップの製造方法は、図4に示すロジックチップLCの他、メモリチップMC1、MC2、MC3の製造方法にも適用することができる。
次に、図11に示す第1チップ搭載工程では、図20や図21に示すように、ロジックチップLCを配線基板2上に搭載する。図20は図16に示す配線基板のチップ搭載領域上にロジックチップLCを搭載した状態を示す拡大平面図である。また、図21は、図20のA-A線に沿った拡大断面図である。また、図22~図24は、図11に示す第1チップ搭載工程の詳細なフローを示す説明図である。図22は、チップ搭載領域上に半導体チップを載せた状態を模式的に示す説明図である。図23は、図22に示す搬送治具を取り外し、加熱治具を半導体チップの裏面側に押し当てた状態を示す説明図である。また、図24は、半導体チップを加熱し、配線基板と電気的に接続した状態を示す説明図である。
次に、図11に示す第2接着材配置工程では、図25に示すように、ロジックチップLC(半導体チップ3)の裏面3b上およびロジックチップLCから露出する接着材NCL1の上面(表面)NCL1a上に、接着材NCL2を配置する。図25は図20に示す半導体チップの裏面およびその周囲に接着材を配置した状態を示す拡大平面図、図26は図25のA-A線に沿った拡大断面図である。
また、図11に示す第2チップ準備工程では、図4に示すメモリチップMC1、MC2、MC3、MC4を準備する。本実施の形態に対する変形例としては、ロジックチップLC上にメモリチップMC1、MC2、MC3、MC4を順次積層することができる。しかし、本実施の形態では、メモリチップMC1、MC2、MC3、MC4を予め積層して、図28に示す積層体(メモリチップ積層体、半導体チップ積層体)MCSを形成する実施態様について説明する。以下で説明するように、メモリチップMC1、MC2、MC3、MC4の積層体MCSを形成する場合、例えば、図11に示す第2チップ準備工程以外の工程とは別の場所で、他の工程とは独立して行うことができる。例えば、積層体MCSは、購入部品として準備することも可能である。このため、図11に示す組立工程を簡略化し、全体として製造効率を向上させることができる点で有利である。
次に、図11に示す第2チップ搭載工程では、図29や図30に示すように、ロジックチップLC上に、複数のメモリチップMC1、MC2、MC3、MC4の積層体MCSを搭載する。図29は図25に示すロジックチップの裏面上にメモリチップの積層体を搭載した状態を示す拡大平面図である。また、図30は、図29のA-A線に沿った拡大断面図である。
次に、図11に示す封止工程では、図35に示すように、配線基板20の上面2a、ロジックチップLCおよび複数のメモリチップMC1、MC2、MC3、MC4の積層体MCSを樹脂で封止して、封止体4を形成する。図35は図30に示す配線基板上に封止体を形成し、積層された複数の半導体チップを封止した状態を示す拡大断面図である。また、図36は、図35に示す封止体の全体構造を示す平面図である。
次に、図11に示すボールマウント工程では、図41に示すように、配線基板20の下面2bに形成された複数のランド2gに、外部端子になる複数の半田ボール5を接合する。図41は、図35に示す配線基板の複数のランド上に半田ボールを接合した状態を示す拡大断面図である。
次に、図11に示す個片化工程では、図42に示すように、配線基板20をデバイス領域20a毎に分割する。図42は図41に示す多数個取りの配線基板を個片化した状態を示す断面図である。本工程では、図31に示すように、ダイシングライン(ダイシング領域)20cに沿って配線基板20および封止体4を切断し、個片化された複数の半導体装置1(図4参照)を取得する。切断方法は特に限定されないが、図42に示す例では、ダイシングブレード(回転刃)45を用いてテープ材(ダイシングテープ)46に接着固定された配線基板20および封止体4を、配線基板20の下面2b側から切削加工して切断する実施態様を示している。ただし、本実施の形態で説明する技術は、複数のデバイス領域20aを備えた、多数個取り基板である配線基板20を用いる場合に限って適用させるものではない。例えば、半導体装置1個分に相当する配線基板2(図4参照)の上に複数の半導体チップ3を積層した半導体装置に適用することができる。この場合、個片化工程は省略することができる。
以上、本発明者によってなされた発明を実施の形態に基づき具体的に説明したが、本発明は上記実施の形態に限定されるものではなく、その要旨を逸脱しない範囲で種々変更可能であることはいうまでもない。
例えば、上記実施の形態では、半導体装置の信頼性の観点からの課題として、第2チップ搭載工程では、平面サイズの大きい積層体MCSが突起電極7を基点として傾くことにより、突起電極7と裏面電極3bpの位置がずれる懸念があることを説明した。また、封止工程では、積層体MCSと配線基板20の隙間に気泡VDが形成される懸念があることを説明した。また、封止工程では、積層体MCSと配線基板20の隙間に、粒径が大きい(例えば積層体MCSと配線基板20の離間距離よりも大きい)フィラー粒子FLが挟まると、積層体MCSが損傷する懸念があることを説明した。上記課題は、半導体装置の信頼性に関連するという点で共通し、ロジックチップLC用のチップ搭載領域2p1よりも広い範囲に、接着材NCLを配置するという点で対策の主要部は共通するが、各課題を解決するための最小限の構成は、厳密には相違する。図43および図44は、上記実施の形態で説明した半導体装置1に対する変形例の概要を示す要部断面図である。
次に、封止工程で説明した、積層体MCSと配線基板20の隙間に気泡VDが形成される懸念、あるいは、積層体MCSと配線基板20の隙間に、粒径が大きいフィラー粒子FLが挟まる懸念を解消する構造としては、図44に示す半導体装置51が考えられる。半導体装置51は、接着材NCL1の配置範囲がチップ搭載領域2p1とほぼ同じ平面サイズになっている点で図4に示す半導体装置1とは異なる。
また、上記した第2チップ搭載工程において、積層体MCSが傾くことで接着材NCL1の周縁部と積層体MCSの表面3aが接触して、積層体MCSに形成されたメモリ回路にストレスが印加されることを抑制する観点からは、図47および図48に示す半導体装置53のような構成が好ましい。図47は、図4に示す半導体装置に対する他の変形例の概要を示す要部断面図である。また、図48は、図47のA部の拡大断面図である。
また、半導体装置50、51、52、および半導体装置53は、図4に示す半田ボール5が接合されず、複数のランド2gが外部端子として露出する、所謂LGA型の半導体装置になっている。この場合、上記実施の形態で説明したボールボンディング工程を省略できる。
また、半導体装置50、51、52、および半導体装置53は、例えば、半導体装置1個分に相当する配線基板2の上に複数の半導体チップ3を積層して製造することができる。この場合、上記実施の形態で説明した個片化工程を省略することができる。
また例えば、上記実施の形態では、複数のメモリチップMC1、MC2、MC3、MC4が積層された積層体MCSをロジックチップLCの裏面3b上に搭載する実施態様について説明したが、上段に積層される半導体チップ3の数は限定されず、例えば1枚でも良い。また、ロジックチップLCの裏面3b上に複数の半導体チップ3を積層する場合でも、図11に示す第2接着材配置工程~第2チップ搭載工程までの手順を繰り返し行うことで、例えば図59に示す半導体装置55のように、接着材NCL1、NCL2、NCL3、NCL4、NCL5を介して複数の半導体チップ3を順次積層することができる。半導体装置55の場合、各半導体チップ3を順次積層するので、組立工程に要する時間は長くなるが、図4に示す封止体6を用いずに、複数の半導体チップ3をフリップチップ接続方式で積層することができる。
また例えば、上記実施の形態および変形例では、チップ搭載領域2p2と同じ範囲、あるいは、チップ搭載領域2p2よりも狭い範囲に接着材NCL1を配置する実施態様について説明した。しかし、変形例として、チップ搭載領域2p2よりも広い範囲に接着材NCL1を配置することもできる。換言すれば、接着材NCL1の平面サイズを、積層体MCSの平面サイズよりも大きくすることができる。この場合、第2チップ搭載工程において、接着材NCL2を積層体MCSの側面3cに接着させることができるので、フィレットが形成され易い。この結果、積層体MCSと接着材NCL2の接着強度を向上させることができる。
さらに、上記実施の形態で説明した技術思想の要旨を逸脱しない範囲内において、変形例同士を組み合わせて適用することができる。
第1表面、上記第1表面に形成された複数の第1表面電極、上記第1表面とは反対側の第1裏面、第1裏面に形成された複数の第1裏面電極、および上記第1表面および上記第1裏面のうちの一方から他方に向かって貫通するようにそれぞれ形成され、かつ、上記複数の第1表面電極と上記複数の第1裏面電極をそれぞれ電気的に接続する複数の貫通電極、を有し、上記第1表面が上記配線基板の上記第1面と対向するように、第1接着材を介して上記配線基板の上記第1面に搭載される第1半導体チップと、
第2表面、上記第2表面に形成された複数の第2表面電極、上記複数の第2表面電極とそれぞれ電気的に接続された複数の突起電極、および上記第2表面とは反対側の第2裏面を有し、上記第2半導体チップの上記第2表面が上記第1半導体チップの上記第1裏面と対向するように、第2接着材を介して上記第1半導体チップ上に搭載される第2半導体チップと、
を有し、
上記複数の第1表面電極と上記複数のボンディングリードは電気的に接続され、
上記複数の第2表面電極と上記複数の第1裏面電極は、上記複数の突起電極を介して電気的に接続され、
上記第2半導体チップの平面サイズは、上記第1半導体チップの平面サイズよりも大きく、
上記第2半導体チップは、上記第1チップ搭載部を含み、かつ、上記第1チップ搭載部よりも平面サイズが大きい第2チップ搭載部上に搭載され、
上記第1接着材の周縁部は、上記第1チップ搭載部の周縁部よりも上記第2チップ搭載部の周縁部に近い位置に配置される半導体装置。
Claims (17)
- 以下の工程を含む半導体装置の製造方法:
(a)第1面、前記第1面に形成された複数のボンディングリード、前記第1面とは反対側の第2面、および前記第2面に形成され、かつ、前記複数のボンディングリードとそれぞれ電気的に接続された複数のランドを有する配線基板を準備する工程;
(b)前記配線基板の前記第1面に第1接着材を配置する工程;
(c)前記(b)工程の後、第1表面、前記第1表面に形成された複数の第1表面電極、前記第1表面とは反対側の第1裏面、第1裏面に形成された複数の第1裏面電極、および前記第1表面および前記第1裏面のうちの一方から他方に向かって貫通するようにそれぞれ形成され、かつ、前記複数の第1表面電極と前記複数の第1裏面電極をそれぞれ電気的に接続する複数の貫通電極、を有する第1半導体チップを、前記第1半導体チップの前記第1表面が前記配線基板の前記第1面と対向するように、前記第1接着材を介して前記配線基板の前記第1面に搭載し、前記複数のボンディングリードと前記複数の第1表面電極を電気的に接続する工程;
(d)前記(c)工程の後、前記第1半導体チップの前記第1裏面上および前記第1半導体チップから露出する前記第1接着材の表面上に、第2接着材を配置する工程;
(e)前記(d)工程の後、第2表面、前記第2表面に形成された複数の第2表面電極、および前記第2表面とは反対側の第2裏面を有する第2半導体チップを、前記第2半導体チップの前記第2表面が前記第1半導体チップの前記第1裏面と対向するように、前記第2接着材を介して前記第1半導体チップ上に搭載し、前記複数の第1裏面電極と前記複数の第2表面電極を電気的に接続する工程;
(f)前記(e)工程の後、前記配線基板の前記第1面、前記第1半導体チップおよび前記第2半導体チップを樹脂で封止する工程;
ここで、
前記第2半導体チップの平面サイズは、前記第1半導体チップの平面サイズよりも大きく、
前記(e)工程の後、かつ、前記(f)工程の前では、前記第2半導体チップのうちの前記第1半導体チップと重ならない部分と前記配線基板の前記第1面の間は、前記第1および第2接着材で塞がれている。 - 請求項1において、
前記(f)工程では、前記配線基板を成形金型内に配置して、前記成形金型内に樹脂を供給することで、前記配線基板の前記第1面、前記第1半導体チップおよび前記第2半導体チップを封止し、前記成形金型により前記樹脂を成形する半導体装置の製造方法。 - 請求項2において、
前記(c)工程で搭載される前記第1半導体チップの厚さは、前記(e)工程で搭載される前記第2半導体チップの厚さよりも薄い半導体装置の製造方法。 - 請求項1において、
前記(e)工程では、前記第1半導体チップが搭載される第1チップ搭載部よりも平面サイズが大きい第2チップ搭載部上に前記第2半導体チップが搭載され、
前記(b)工程では、前記第1接着材の周縁部が、前記第1チップ搭載部の周縁部よりも前記第2チップ搭載部の周縁部に近い位置に配置される半導体装置の製造方法。 - 請求項1において、
前記(f)工程で、前記配線基板の前記第1面、前記第1半導体チップおよび前記第2半導体チップを封止する前記樹脂には、複数のフィラー粒子が含まれる半導体装置の製造方法。 - 請求項5において、
前記複数のフィラー粒子には、前記第2半導体チップと前記配線基板の前記第1面の離間距離よりも大きい粒径のフィラー粒子が含まれる半導体装置の製造方法。 - 請求項1において、
前記(e)工程では、前記第2半導体チップが、前記第1半導体チップ上に複数積層され、
複数の前記第2半導体チップ間は、前記封止体とは異なる封止体により封止されている半導体装置の製造方法。 - 請求項7において、
前記(f)工程で、前記配線基板の前記第1面、前記第1半導体チップを封止する前記樹脂は、複数の前記第2半導体チップの間を封止する前記封止体よりも粘度が高い半導体装置の製造方法。 - 請求項1において、
前記配線基板の前記第1面の第1チップ搭載部に配置される前記第1接着材は、フィルム状の接着材である半導体装置の製造方法。 - 請求項1において、
前記(d)工程では、ペースト状の前記第2接着材を前記第1半導体チップの前記第1裏面上および前記第1半導体チップから露出する前記第1接着材の表面上に向かって塗布することにより前記第2接着材を配置する半導体装置の製造方法。 - 請求項1において、
前記(c)工程では、前記第1半導体チップの側面のうち、前記第1半導体チップの前記表面側の半分以上が前記第1接着材により覆われる半導体装置の製造方法。 - 以下の工程を含む半導体装置の製造方法:
(a)第1面、前記第1面に形成された複数のボンディングリード、前記第1面とは反対側の第2面、および前記第2面に形成され、かつ、前記複数のボンディングリードとそれぞれ電気的に接続された複数のランドを有する配線基板を準備する工程;
(b)前記配線基板の前記第1面に第1接着材を配置する工程;
(c)前記(b)工程の後、第1表面、前記第1表面に形成された複数の第1表面電極、前記第1表面側に形成され、かつ前記複数の第1表面電極のそれぞれと電気的に接続された複数の第1回路、前記第1表面とは反対側の第1裏面、第1裏面に形成された複数の第1裏面電極、および前記第1表面および前記第1裏面のうちの一方から他方に向かって貫通するようにそれぞれ形成され、かつ、前記複数の第1表面電極と前記複数の第1裏面電極をそれぞれ電気的に接続する複数の貫通電極、を有する第1半導体チップを、前記第1半導体チップの前記第1表面が前記配線基板の前記第1面と対向するように、前記第1接着材を介して前記配線基板の前記第1面に搭載し、前記複数のボンディングリードと前記複数の第1表面電極を電気的に接続する工程;
(d)前記(c)工程の後、前記第1半導体チップの前記第1裏面上および前記第1半導体チップから露出する前記第1接着材の表面上に、第2接着材を配置する工程;
(e)前記(d)工程の後、第2表面、前記第2表面に形成された複数の第2表面電極、前記第2表面側に形成され、かつ前記複数の第2表面電極のそれぞれと電気的に接続された複数の第2回路、および前記第2表面とは反対側の第2裏面を有する第2半導体チップを、前記第2半導体チップの前記第2表面が前記第1半導体チップの前記第1裏面と対向するように、前記第2接着材を介して前記第1半導体チップ上に搭載し、前記複数の第1裏面電極と前記複数の第2表面電極を電気的に接続する工程;
(f)前記(e)工程の後、前記配線基板の前記第1面、前記第1半導体チップおよび前記第2半導体チップを樹脂で封止する工程;
ここで、
前記複数の第2回路には、前記第1半導体チップとの間で、前記第1半導体チップと前記第2チップの間に設けられた複数の第1突起電極を介して通信するデータを記憶する記憶回路が含まれ、
前記複数の第1回路には、前記第1半導体チップと前記第2チップの間に設けられた複数の第2突起電極を介して前記第2半導体チップの前記記憶回路の動作を制御する制御回路が含まれ、
前記第2半導体チップの平面サイズは、前記第1半導体チップの平面サイズよりも大きく、
前記(e)工程の後、かつ、前記(f)工程の前では、前記第2半導体チップのうちの前記第1半導体チップと重ならない部分と前記配線基板の前記第1面の間は、前記第1および第2接着材で塞がれている。 - 以下の工程を含む半導体装置の製造方法:
(a)第1面、前記第1面に形成された複数のボンディングリード、前記第1面とは反対側の第2面、および前記第2面に形成され、かつ、前記複数のボンディングリードとそれぞれ電気的に接続された複数のランドを有する配線基板を準備する工程;
(b)前記配線基板の前記第1面の第1チップ搭載部に第1接着材を配置する工程;
(c)前記(b)工程の後、第1表面、前記第1表面に形成された複数の第1表面電極、前記第1表面とは反対側の第1裏面、第1裏面に形成された複数の第1裏面電極、および前記第1表面および前記第1裏面のうちの一方から他方に向かって貫通するようにそれぞれ形成され、かつ、前記複数の第1表面電極と前記複数の第1裏面電極をそれぞれ電気的に接続する複数の貫通電極、を有する第1半導体チップを、前記第1半導体チップの前記第1表面が前記配線基板の前記第1面と対向するように、前記配線基板の前記第1チップ搭載部に搭載し、前記複数のボンディングリードと前記複数の第1表面電極を電気的に接続する工程;
(d)前記(c)工程の後、前記第1半導体チップの前記第1裏面上に、第2接着材を配置する工程;
(e)前記(d)工程の後、第2表面、前記第2表面に形成された複数の第2表面電極、前記複数の第2表面電極とそれぞれ電気的に接続された複数の突起電極、および前記第2表面とは反対側の第2裏面を有する第2半導体チップを、前記第2半導体チップの前記第2表面が前記第1半導体チップの前記第1裏面と対向するように、前記第2接着材を介して前記第1半導体チップ上に搭載し、前記複数の第1裏面電極と前記複数の第2表面電極を電気的に接続する工程;
ここで、
前記第2半導体チップの平面サイズは、前記第1半導体チップの平面サイズよりも大きく、
前記(e)工程では、前記第1チップ搭載部を含み、かつ、前記第1チップ搭載部よりも平面サイズが大きい第2チップ搭載部上に前記第2半導体チップが搭載され、
前記(b)工程では、前記第1接着材の周縁部が、前記第1チップ搭載部の周縁部よりも前記第2チップ搭載部の周縁部に近い位置に配置される半導体装置の製造方法。 - 請求項13において、
前記(c)工程では、前記第1半導体チップの側面のうち、前記第1半導体チップの前記表面側の半分以上が前記第1接着材により覆われる半導体装置の製造方法。 - 請求項13において、
前記(b)工程では、前記第1接着材の周縁部は、前記第1チップ搭載部の周縁部と前記第2チップ搭載部の周縁部の間に配置される半導体装置の製造方法。 - 請求項13において、
前記(c)工程の後、かつ、前記(d)工程の前に、前記第1接着材を硬化させる工程が含まれる半導体装置の製造方法。 - 請求項13において、
前記(b)工程では、前記第1接着材は、前記第2チップ搭載部全体を覆うように配置される半導体装置の製造方法。
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- 2012-09-14 JP JP2014535326A patent/JP5870198B2/ja not_active Expired - Fee Related
- 2012-09-14 WO PCT/JP2012/073666 patent/WO2014041684A1/ja active Application Filing
- 2012-09-14 KR KR1020147033140A patent/KR101894125B1/ko active IP Right Grant
- 2012-09-14 EP EP12884473.5A patent/EP2897166A4/en not_active Withdrawn
- 2012-09-14 CN CN201280073539.9A patent/CN104321866B/zh not_active Expired - Fee Related
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US20160307780A1 (en) * | 2014-08-29 | 2016-10-20 | Freescale Semiconductor, Inc. | Structure and method to minimize warpage of packaged semiconductor devices |
US9978614B2 (en) * | 2014-08-29 | 2018-05-22 | Nxp Usa, Inc. | Structure and method to minimize warpage of packaged semiconductor devices |
JP2016119455A (ja) * | 2014-12-18 | 2016-06-30 | インテル・コーポレーション | 低コストなパッケージの反りの解決法 |
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Also Published As
Publication number | Publication date |
---|---|
JPWO2014041684A1 (ja) | 2016-08-12 |
KR20150056501A (ko) | 2015-05-26 |
EP2897166A4 (en) | 2016-06-29 |
CN104321866A (zh) | 2015-01-28 |
CN104321866B (zh) | 2018-03-02 |
KR101894125B1 (ko) | 2018-08-31 |
EP2897166A1 (en) | 2015-07-22 |
TWI596721B (zh) | 2017-08-21 |
US20150236003A1 (en) | 2015-08-20 |
JP5870198B2 (ja) | 2016-02-24 |
TW201411792A (zh) | 2014-03-16 |
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