WO2014032300A1 - 一种玻璃基板的仓储系统以及玻璃基板仓储方法 - Google Patents

一种玻璃基板的仓储系统以及玻璃基板仓储方法 Download PDF

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Publication number
WO2014032300A1
WO2014032300A1 PCT/CN2012/080903 CN2012080903W WO2014032300A1 WO 2014032300 A1 WO2014032300 A1 WO 2014032300A1 CN 2012080903 W CN2012080903 W CN 2012080903W WO 2014032300 A1 WO2014032300 A1 WO 2014032300A1
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WIPO (PCT)
Prior art keywords
glass substrate
storage
track
transport vehicle
pick
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PCT/CN2012/080903
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English (en)
French (fr)
Inventor
陈增宏
吴俊豪
林昆贤
李贤德
汪永强
杨卫兵
齐明虎
郭振华
蒋运芍
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深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US13/634,880 priority Critical patent/US8992154B2/en
Publication of WO2014032300A1 publication Critical patent/WO2014032300A1/zh

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

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  • the invention relates to the field of automated material transportation, in particular to a storage system for a glass substrate and a storage method for a glass substrate.
  • the technical problem to be solved by the present invention is to provide a storage system for a glass substrate and a storage method for the glass substrate, which can improve the transportation efficiency of the glass substrate, increase the productivity of the liquid crystal display panel, and reduce the maintenance cost of the overhead rail.
  • the present invention provides a technical solution for providing a storage system for a glass substrate, comprising: a rail, a plurality of storage cabinets, and a transport vehicle.
  • the track includes at least two annular tracks interconnected, at least two tracks being unidirectional tracks, and bidirectionally connected at abutment.
  • the storage cabinet is placed near the track.
  • the transport vehicle is disposed on the track and is movable between each of the circular tracks and between the circular tracks to transport the glass substrate between the two storage bins.
  • the warehousing system further includes at least one glass substrate cassette for carrying the glass substrate, and the transport vehicle transports the glass substrate cassette between the two storage cabinets.
  • the storage cabinet comprises a pick-and-place unit, a transfer machine and a plurality of magazines, a plurality of magazines for storing the glass substrate cassettes, and a transfer machine for transporting the glass substrate cassettes between the magazine and the pick-and-place unit, The glass substrate cassette is further transported between the pick-and-place portion and the transport vehicle.
  • the pick-and-place portion is provided with a roller, and the glass substrate is transported by the roller between the pick-and-place portion and the transport vehicle.
  • a plurality of storage cabinets are disposed at intervals around the track.
  • the transport vehicle is a crane.
  • the transport vehicle selects the shortest path to transport the glass substrate according to the position of the two storage cabinets.
  • a storage system for a glass substrate comprising: a rail, a plurality of storage cabinets, and a transport vehicle.
  • the track includes at least two annular tracks that are interconnected.
  • the storage cabinet is placed near the track.
  • the transport vehicle is disposed on the track and is movable between each of the circular tracks and between the circular tracks to transport the glass substrate between the two storage bins.
  • the storage system further comprises at least one glass substrate cassette for carrying the glass substrate, and the transport vehicle transports the glass substrate cassette between the two storage cabinets.
  • the storage cabinet comprises a pick-and-place unit, a transfer machine and a plurality of magazines, a plurality of magazines for storing the glass substrate cassettes, and a transfer machine for transporting the glass substrate cassettes between the magazine and the pick-and-place unit, The glass substrate cassette is further transported between the pick-and-place portion and the transport vehicle.
  • the pick-and-place portion is provided with a roller, and the glass substrate is transported by the roller between the pick-and-place portion and the transport vehicle.
  • a plurality of storage cabinets are disposed at intervals around the track.
  • At least two tracks are unidirectional tracks and bidirectionally connected at abutment.
  • the transport vehicle is a crane.
  • the transport vehicle selects the shortest path to transport the glass substrate according to the position of the two storage cabinets.
  • another technical solution adopted by the present invention is to provide a storage method for a glass substrate, which comprises: selecting a shortest path on a track including at least two annular tracks connected to each other according to positions of two storage bins Moving the truck along the shortest path and transporting the glass substrate between the two bins.
  • the invention has the beneficial effects that the invention is different from the prior art, and the invention shortens the travel distance of the transport vehicle by providing at least two annular tracks connected to each other, can improve the transport efficiency of the glass substrate, and improve the productivity of the liquid crystal display panel. Reduce the maintenance cost of the crown rail.
  • FIG. 1 is a schematic structural view of a preferred embodiment of a storage system for a glass substrate of the present invention
  • Figure 2 is a schematic structural view of the storage cabinet of Figure 1;
  • Figure 3 is a schematic view showing the shortest path of the transport vehicle of the storage system of the glass substrate of the present invention.
  • FIG. 4 is a flow chart showing an embodiment of a method of storing a glass substrate of the present invention.
  • FIG. 1 is a schematic structural view of a preferred embodiment of a storage system for a glass substrate of the present invention
  • FIG. 2 is a schematic structural view of the storage cabinet of FIG.
  • the storage system 1 of the glass substrate includes an annular rail 10, a glass substrate cassette 12, a storage cabinet 11, and a transport cart 13.
  • the number of the circular rails 10 is preferably two. In other embodiments, the number of the circular rails 10 may be three or more. Both annular tracks 10 are preferably unidirectional tracks and the two endless tracks 10 are connected to each other. Preferably, the two-way connection is made at the abutment of the two annular tracks 10 to form a two-way traveling track, and the two annular tracks 10 can also pass between them, that is, as shown in FIG. 1, the portions of the two circular tracks 10 also form a relative. Larger circular track.
  • the glass substrate cassette 12 is used to carry a glass substrate.
  • the number of the glass substrate cassettes 12 is one. In other embodiments, the number of the glass substrate cassettes 12 may be two or more.
  • the storage cabinets 11 are preferably spaced apart from the periphery of the two annular 10 rails. In other embodiments, the storage cabinets 11 may also be disposed adjacent the inner rings of the annular rails 10.
  • the storage cabinet 11 includes a plurality of magazines 110, a transfer machine 111, and a pick-and-place unit 112.
  • the magazine 110 is used to store the glass substrate cassette 12, and the transfer machine 111 is used to transport the glass substrate cassette 12 between the magazine 110 and the pick-and-place unit 112.
  • the pick-and-place portion 112 is provided with a plurality of rollers 113, and the glass substrate cassette 12 is transported between the pick-and-place portion 112 and the transport cart 13 via the rollers 113.
  • the glass substrate cassette 12 can also be transported between the pick and place portion 112 and the transport cart 13 by other means.
  • the pick-and-place portion 112 is disposed adjacent to the annular rail 10 to facilitate transport of the glass substrate cassette 12 between the pick-and-place portion 112 and the transport cart 13.
  • the transport cart 13 is preferably a crane. As shown in FIG. 1, the transport cart 13 is disposed on two circular rails 10 and is movable between two annular rails 10 and between two annular rails 10 to transport a glass substrate card between the two storage cabinets 11. ⁇ 12. The transport carriage 13 can travel in the direction of the arrow on the two circular tracks 10.
  • the transport cart 13 transports the glass substrate on the shortest path on the two circular rails 10 according to the positions of the two storage cabinets 11.
  • the shortest path selection of the transport truck 13 is achieved by the system software control of the transport vehicle 13.
  • FIG. 3 is a schematic diagram of the shortest path of the transport vehicle of the storage system of the glass substrate of the present invention.
  • the paths available for the transport vehicle are: path 31 and path 32.
  • the system software of the cart 13 controls the transport vehicle to take the shortest path, path 32.
  • FIG. 4 there is shown a flow chart of an embodiment of a method of storing a glass substrate of the present invention.
  • the storage method of the glass substrate disclosed in this embodiment includes the following steps:
  • Step 21 Select the shortest path on the track including the two annular tracks 10 connected to each other according to the positions of the two storage bins.
  • Step 22 Move the transport vehicle along the shortest path and transport the glass substrate between the two storage cabinets.
  • step 21 and 22 when the two storage cabinets are respectively on both sides of the circular rail, the system software of the transport vehicle controls the shortest path of the transport vehicle.
  • the present invention can improve the transportation efficiency of the glass substrate, improve the production capacity of the liquid crystal display panel, and reduce the maintenance cost of the overhead rail by providing at least two annular tracks connected to each other, thereby shortening the travel distance of the transport vehicle. .

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

一种玻璃基板的仓储系统以及玻璃基板的仓储方法，其包括：轨道（10）、多个仓储柜（11）以及输送车（13），轨道（10）包括相互连接的至少两个环形轨道（10），仓储柜（11）设置于轨道（10）的附近，输送车（13）设置于轨道（10）上，并可在各环形轨道（10）上以及环形轨道（10）之间移动，以在两个仓储柜（11）之间运送玻璃基板。该玻璃基板的仓储系统以及玻璃基板的仓储方法能够提高玻璃基板的输送效率，提高液晶显示面板的产能，降低天车轨道的维护成本。

Description

一种玻璃基板的仓储系统以及玻璃基板仓储方法
【技术领域】
本发明涉及自动化物料输送领域，特别是涉及一种玻璃基板的仓储系统以及玻璃基板仓储方法。
【背景技术】
在液晶面板制造行业中，玻璃基板存储于各个仓储柜（Stocker）中。目前，液晶显示面板制造需经多道制程且需要大批量生产，所以需要的仓储柜的数量较多，仓储柜与仓储柜之间的搬运量较大。仓储柜与仓储柜之间的通常通过天车（Overhead Shuttle，OHS）来搬运玻璃基板，并且不相邻的仓储柜之间的搬运也较频繁。现有的天车轨道大多为单环形轨道，搬运效率较低，特别是在不相邻的仓储柜搬运时，由于天车只能单方向行驶，天车在轨道上运行路线往往比较长，影响玻璃基板的输送效率，并且会限制液晶显示面板的产能。
因此，需要提供一种玻璃基板的仓储系统以及玻璃基板的仓储方法，以解决上述问题。
【发明内容】
本发明主要解决的技术问题是提供一种玻璃基板的仓储系统以及玻璃基板仓储方法，能够提高玻璃基板的输送效率，提高液晶显示面板的产能，降低天车轨道的维护成本。
为解决上述问题本发明提供的一个技术方案是：提供一种玻璃基板的仓储系统，其包括：轨道、多个仓储柜以及输送车。轨道包括相互连接的至少两个环形轨道，至少两个轨道为单向轨道，且在邻接处进行双向连接。仓储柜设置于轨道的附近。输送车设置于轨道上，并可在各环形轨道上以及环形轨道之间移动，以在两个仓储柜之间运送玻璃基板。仓储系统进一步包括至少一用于承载玻璃基板的玻璃基板卡匣，输送车在两个仓储柜之间运送玻璃基板卡匣。
其中，仓储柜包括取放部、移载机以及多个库格，多个库格用于储存玻璃基板卡匣，移载机用于在库格与取放部之间运送玻璃基板卡匣，玻璃基板卡匣进一步在取放部与输送车之间进行运送。
其中，取放部设有滚轮，玻璃基板卡匣经滚轮在取放部与输送车之间进行运送。
其中，多个仓储柜间隔设置于轨道的外围。
其中，输送车为天车。
其中，输送车根据两个仓储柜的位置在轨道上选择最短路径运送玻璃基板。
为解决上述问题本发明提供的另一个技术方案是：提供一种玻璃基板的仓储系统，其包括：轨道、多个仓储柜以及输送车。轨道包括相互连接的至少两个环形轨道。仓储柜设置于轨道的附近。输送车设置于轨道上，并可在各环形轨道上以及环形轨道之间移动，以在两个仓储柜之间运送玻璃基板。
其中，仓储系统进一步包括至少一用于承载玻璃基板的玻璃基板卡匣，输送车在两个仓储柜之间运送玻璃基板卡匣。
其中，仓储柜包括取放部、移载机以及多个库格，多个库格用于储存玻璃基板卡匣，移载机用于在库格与取放部之间运送玻璃基板卡匣，玻璃基板卡匣进一步在取放部与输送车之间进行运送。
其中，取放部设有滚轮，玻璃基板卡匣经滚轮在取放部与输送车之间进行运送。
其中，多个仓储柜间隔设置于轨道的外围。
其中，至少两个轨道为单向轨道，且在邻接处进行双向连接。
其中，输送车为天车。
其中，输送车根据两个仓储柜的位置在轨道上选择最短路径运送玻璃基板。
为解决上述技术问题，本发明采用的又一个技术方案是：提供一种玻璃基板的仓储方法其包括：根据两个仓储柜的位置在包括相互连接的至少两个环形轨道的轨道上选择最短路径；沿最短路径移动输送车，两个仓储柜之间运送玻璃基板。
本发明的有益效果是：区别于现有技术的情况，本发明通过设置相互连接的至少两个环形轨道，缩短输送车的行驶路程，能够提高玻璃基板的输送效率，提高液晶显示面板的产能，降低天车轨道的维护成本。
【附图说明】
图1是本发明的玻璃基板的仓储系统的优选实施例的结构示意图；
图2是图1中仓储柜的结构示意图；
图3是本发明的玻璃基板的仓储系统的输送车最短路径的示意图；
图4是本发明的玻璃基板的仓储方法的实施例的流程图。
【具体实施方式】
参阅图1和图2，图1是本发明的玻璃基板的仓储系统的优选实施例的结构示意图，图2是图1中仓储柜的结构示意图。在本实施例中，玻璃基板的仓储系统1包括：环形轨道10、玻璃基板卡匣12、仓储柜11以及输送车13。
在本实施例中，环形轨道10的数量优选为两个，在其他实施例中，环形轨道10的数量也可以是三个或者三个以上。两个环形轨道10均优选为单向轨道且两个环形轨道10相互连接。优选的，在两个环形轨道10的邻接处进行双向连接，形成双向通行的轨道，并且两环形轨道10之间也可以通行，即如图1所示，两环形轨道10的部分还形成一个相对较大的环形的轨道。
玻璃基板卡匣12用于承载玻璃基板。在本实施例中，玻璃基板卡匣12的数量为一个，在其他实施例中，玻璃基板卡匣12的数量也可以是两个或者两个以上。
仓储柜11优选为间隔设置于两个环形10轨道外围，在其他实施例中，仓储柜11也可以设置于环形轨道10内环附近。仓储柜11包括多个库格110、移载机111以及取放部112。库格110用于储存玻璃基板卡匣12，移载机111用于在库格110与取放部112之间运送玻璃基板卡匣12。取放部112设有多个滚轮113，玻璃基板卡匣12经滚轮113在取放部112与输送车13之间进行运送。在其他实施例中，玻璃基板卡匣12也可通过其他方式在在取放部112与输送车13之间进行运送。取放部112靠近环形轨道10设置，以便于玻璃基板卡匣12在取放部112与输送车13之间运送。
在本实施例中，输送车13优选为天车。如图1所示，输送车13设置于两个环形轨道10上，并可在两个环形轨道10上以及两个环形轨道10之间移动，以在两个仓储柜11之间运送玻璃基板卡匣12。输送车13可在两环形轨道10上按箭头方向行驶。
其中，输送车13根据两个仓储柜11的位置在两个环形轨道10上选最短路径运送玻璃基板。输送车13的最短路径选择由输送车13的系统软体控制来实现。
具体的，请参阅图3，图3是本发明的玻璃基板的仓储系统的输送车最短路径的示意图。当输送车13需要在同一环形轨道10的相对两侧的仓储柜11之间运输玻璃基板卡匣12时，可供输送车选择的路径有：路径31和路径32。输送车13的系统软体会控制输送车走最短路径，即路径32。
参阅图4，图4是本发明的玻璃基板的仓储方法的实施例的流程图。本实施例所揭示的玻璃基板的仓储方法包括以下步骤：
步骤21：根据两个仓储柜的位置在包括相互连接的两个环形轨道10的轨道上选择最短路径。
步骤22：沿最短路径移动输送车，两个仓储柜之间运送玻璃基板。
在步骤21和步骤22中，当两个仓储柜分别在环形轨道两侧时，输送车的系统软体会控制输送车走最短路径。
区别于现有技术，本发明通过设置相互连接的至少两个环形轨道，能够通过缩短输送车的行驶路程，从而能够提高玻璃基板的输送效率，提高液晶显示面板的产能，降低天车轨道维护成本。
以上所述仅为本发明的实施方式，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接运用在其他相关的技术领域，均同理包括在本发明的专利保护范围内。

Claims (15)

  1. 一种玻璃基板的仓储系统，其中，所述仓储系统包括：
    轨道，所述轨道包括相互连接的至少两个环形轨道，所述至少两个轨道为单向轨道，且在邻接处进行双向连接；
    多个仓储柜，所述仓储柜设置于所述轨道的附近；
    输送车，所述输送车设置于所述轨道上，并可在各所述环形轨道上以及所述环形轨道之间移动，以在两个所述仓储柜之间运送所述玻璃基板，其中，所述仓储系统包括至少一用于承载所述玻璃基板的玻璃基板卡匣，所述输送车在所述两个仓储柜之间运送所述玻璃基板卡匣。
  2. 根据权利要求1所述的仓储系统，所述仓储柜包括取放部、移载机以及多个库格，所述多个库格用于储存所述玻璃基板卡匣，所述移载机用于在所述库格与所述取放部之间运送所述玻璃基板卡匣，所述玻璃基板卡匣进一步在所述取放部与所述输送车之间进行运送。
  3. 根据权利要求2所述的仓储系统，其中，所述取放部设有滚轮，所述玻璃基板卡匣经所述滚轮在所述取放部与所述输送车之间进行运送。
  4. 根据权利要求1所述的仓储系统，其中，所述所述多个仓储柜间隔设置于所述轨道的外围。
  5. 根据权利要求1所述的仓储系统，其中，所述输送车为天车。
  6. 根据权利要求1所述的仓储系统，其中，所述输送车根据所述两个仓储柜的位置在所述轨道上选择最短路径运送所述玻璃基板。
  7. 一种玻璃基板的仓储系统，其中，所述仓储系统包括：
    轨道，所述轨道包括相互连接的至少两个环形轨道；
    多个仓储柜，所述仓储柜设置于所述轨道的附近；
    输送车，所述输送车设置于所述轨道上，并可在各所述环形轨道上以及所述环形轨道之间移动，以在两个所述仓储柜之间运送所述玻璃基板。
  8. 根据权利要求7所述的仓储系统，其中，所述仓储系统进一步包括至少一用于承载所述玻璃基板的玻璃基板卡匣，所述输送车在所述两个仓储柜之间运送所述玻璃基板卡匣。
  9. 根据权利要求8所述的仓储系统，所述仓储柜包括取放部、移载机以及多个库格，所述多个库格用于储存所述玻璃基板卡匣，所述移载机用于在所述库格与所述取放部之间运送所述玻璃基板卡匣，所述玻璃基板卡匣进一步在所述取放部与所述输送车之间进行运送。
  10. 根据权利要求9所述的仓储系统，其中，所述取放部设有滚轮，所述玻璃基板卡匣经所述滚轮在所述取放部与所述输送车之间进行运送。
  11. 根据权利要求7所述的仓储系统，其中，所述多个仓储柜间隔设置于所述轨道的外围。
  12. 根据权利要求7所述的仓储系统，其中，所述至少两个轨道为单向轨道，且在邻接处进行双向连接。
  13. 根据权利要求7所述的仓储系统，其中，所述输送车为天车。
  14. 根据权利要求7所述的仓储系统，其中，所述输送车根据所述两个仓储柜的位置在所述轨道上选择最短路径运送所述玻璃基板。
  15. 一种玻璃基板的仓储方法，其中，包括：
    根据两个仓储柜的位置在包括相互连接的至少两个环形轨道的轨道上选择最短路径；
    沿所述最短路径移动输送车，所述两个仓储柜之间运送所述玻璃基板。
PCT/CN2012/080903 2012-08-31 2012-09-03 一种玻璃基板的仓储系统以及玻璃基板仓储方法 WO2014032300A1 (zh)

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