CN102826316A - 一种玻璃基板的仓储系统以及玻璃基板仓储方法 - Google Patents
一种玻璃基板的仓储系统以及玻璃基板仓储方法 Download PDFInfo
- Publication number
- CN102826316A CN102826316A CN2012103169239A CN201210316923A CN102826316A CN 102826316 A CN102826316 A CN 102826316A CN 2012103169239 A CN2012103169239 A CN 2012103169239A CN 201210316923 A CN201210316923 A CN 201210316923A CN 102826316 A CN102826316 A CN 102826316A
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- CN
- China
- Prior art keywords
- glass substrate
- waggon
- glass
- warehousing system
- track
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/14—Wafer cassette transporting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (9)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210316923.9A CN102826316B (zh) | 2012-08-31 | 2012-08-31 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
PCT/CN2012/080903 WO2014032300A1 (zh) | 2012-08-31 | 2012-09-03 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
US13/634,880 US8992154B2 (en) | 2012-08-31 | 2012-09-03 | Storage system for glass substrate and method for storing glass substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210316923.9A CN102826316B (zh) | 2012-08-31 | 2012-08-31 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102826316A true CN102826316A (zh) | 2012-12-19 |
CN102826316B CN102826316B (zh) | 2015-06-17 |
Family
ID=47329669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210316923.9A Active CN102826316B (zh) | 2012-08-31 | 2012-08-31 | 一种玻璃基板的仓储系统以及玻璃基板仓储方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8992154B2 (zh) |
CN (1) | CN102826316B (zh) |
WO (1) | WO2014032300A1 (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103663166A (zh) * | 2013-12-11 | 2014-03-26 | 深圳市华星光电技术有限公司 | 自动化物料搬运系统及其天车系统 |
CN105964549A (zh) * | 2016-05-26 | 2016-09-28 | 杭州迅工科技有限公司 | 下漏式分拣平台 |
CN107323978A (zh) * | 2017-06-20 | 2017-11-07 | 东旭(昆山)显示材料有限公司 | 天车系统及其轨道装置和物料输送方法 |
CN108382782A (zh) * | 2018-01-09 | 2018-08-10 | 惠科股份有限公司 | 一种基板的仓储方法和仓储系统 |
CN110137120A (zh) * | 2018-02-02 | 2019-08-16 | 盟立自动化股份有限公司 | 自动化运送布局系统 |
CN110482220A (zh) * | 2019-07-26 | 2019-11-22 | 蚌埠凯盛工程技术有限公司 | 一种玻璃基板存储工艺、装置及应用 |
WO2020056926A1 (zh) * | 2018-09-18 | 2020-03-26 | 惠科股份有限公司 | 一种仓储管理方法和仓储系统 |
CN110980093A (zh) * | 2019-12-27 | 2020-04-10 | 广东智源机器人科技有限公司 | 仓储物流线调度系统和方法 |
CN112744586A (zh) * | 2020-12-23 | 2021-05-04 | 乐金显示光电科技(中国)有限公司 | 一种玻璃基板的搬运控制方法及控制系统 |
CN113329957A (zh) * | 2019-01-25 | 2021-08-31 | 村田机械株式会社 | 保管系统 |
US11288625B2 (en) | 2018-09-18 | 2022-03-29 | HKC Corporation Limited | Warehousing management method and warehousing system |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6915366B2 (ja) * | 2017-04-28 | 2021-08-04 | 村田機械株式会社 | 有軌道搬送車システム |
Citations (5)
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CN1506257A (zh) * | 2002-12-09 | 2004-06-23 | 村田机械株式会社 | 天车系统 |
CN1579899A (zh) * | 2003-08-04 | 2005-02-16 | 友达光电股份有限公司 | 自动化物料搬运系统及其仓储柜 |
CN1836990A (zh) * | 2005-07-22 | 2006-09-27 | 友达光电股份有限公司 | 供基板用的储存卡匣 |
CN101134528A (zh) * | 2006-09-01 | 2008-03-05 | 日本阿西斯特技术株式会社 | 传送物体存放系统 |
CN101665183A (zh) * | 2009-09-04 | 2010-03-10 | 友达光电股份有限公司 | 仓储系统 |
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US2277309A (en) * | 1939-10-12 | 1942-03-24 | Gen Motors Corp | Shuffle conveyer |
KR0167881B1 (ko) * | 1994-11-28 | 1999-02-01 | 김주용 | 웨이퍼 반송 시스템 및 그 제어방법 |
JPH1070055A (ja) * | 1996-08-28 | 1998-03-10 | Sony Corp | 半導体装置生産用クリーンルーム |
JPH10275017A (ja) * | 1997-03-31 | 1998-10-13 | Hitachi Ltd | 搬送制御方法および搬送装置 |
US6280134B1 (en) * | 1997-06-17 | 2001-08-28 | Applied Materials, Inc. | Apparatus and method for automated cassette handling |
US6604624B2 (en) * | 1998-09-22 | 2003-08-12 | Hirata Corporation | Work conveying system |
US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
JP4268303B2 (ja) * | 2000-02-01 | 2009-05-27 | キヤノンアネルバ株式会社 | インライン型基板処理装置 |
EP1202325A1 (en) * | 2000-10-25 | 2002-05-02 | Semiconductor300 GmbH & Co KG | Arrangement for transporting a semiconductor wafer carrier |
KR100350719B1 (ko) * | 2000-11-30 | 2002-08-29 | 삼성전자 주식회사 | 반도체 제조에 사용되는 이송 장치 |
US20020102149A1 (en) * | 2001-01-26 | 2002-08-01 | Tekcel, Inc. | Random access storage and retrieval system for microplates, microplate transport and micorplate conveyor |
US6990721B2 (en) * | 2003-03-21 | 2006-01-31 | Brooks Automation, Inc. | Growth model automated material handling system |
TWI220672B (en) * | 2003-07-16 | 2004-09-01 | Au Optronics Corp | Automatic material transporting system and its storage cabinet |
JP2006051886A (ja) * | 2004-08-12 | 2006-02-23 | Murata Mach Ltd | 天井走行車システム |
CN100392841C (zh) * | 2004-08-12 | 2008-06-04 | 友达光电股份有限公司 | 自动化物料搬运系统 |
FI126245B (fi) * | 2005-03-09 | 2016-08-31 | Konecranes Finland Oy | Menetelmä paletittoman tavarakollin sijoittamiseksi ja luovuttamiseksi varastohyllystä ja kollien logistiikan hallitsemiseksi sekä laitteisto menetelmän toteuttamiseksi |
JP5088468B2 (ja) * | 2007-03-09 | 2012-12-05 | 村田機械株式会社 | 懸垂式搬送台車を用いた搬送システム |
JP5212165B2 (ja) * | 2009-02-20 | 2013-06-19 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5477651B2 (ja) * | 2010-08-04 | 2014-04-23 | 株式会社ダイフク | 物品搬送設備 |
JP5741034B2 (ja) * | 2011-02-09 | 2015-07-01 | 村田機械株式会社 | 有軌道台車システム |
-
2012
- 2012-08-31 CN CN201210316923.9A patent/CN102826316B/zh active Active
- 2012-09-03 WO PCT/CN2012/080903 patent/WO2014032300A1/zh active Application Filing
- 2012-09-03 US US13/634,880 patent/US8992154B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1506257A (zh) * | 2002-12-09 | 2004-06-23 | 村田机械株式会社 | 天车系统 |
CN1579899A (zh) * | 2003-08-04 | 2005-02-16 | 友达光电股份有限公司 | 自动化物料搬运系统及其仓储柜 |
CN1836990A (zh) * | 2005-07-22 | 2006-09-27 | 友达光电股份有限公司 | 供基板用的储存卡匣 |
CN101134528A (zh) * | 2006-09-01 | 2008-03-05 | 日本阿西斯特技术株式会社 | 传送物体存放系统 |
CN101665183A (zh) * | 2009-09-04 | 2010-03-10 | 友达光电股份有限公司 | 仓储系统 |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103663166A (zh) * | 2013-12-11 | 2014-03-26 | 深圳市华星光电技术有限公司 | 自动化物料搬运系统及其天车系统 |
CN105964549A (zh) * | 2016-05-26 | 2016-09-28 | 杭州迅工科技有限公司 | 下漏式分拣平台 |
CN105964549B (zh) * | 2016-05-26 | 2019-01-11 | 杭州迅工科技有限公司 | 下漏式分拣平台 |
CN107323978A (zh) * | 2017-06-20 | 2017-11-07 | 东旭(昆山)显示材料有限公司 | 天车系统及其轨道装置和物料输送方法 |
CN108382782A (zh) * | 2018-01-09 | 2018-08-10 | 惠科股份有限公司 | 一种基板的仓储方法和仓储系统 |
CN110137120A (zh) * | 2018-02-02 | 2019-08-16 | 盟立自动化股份有限公司 | 自动化运送布局系统 |
WO2020056926A1 (zh) * | 2018-09-18 | 2020-03-26 | 惠科股份有限公司 | 一种仓储管理方法和仓储系统 |
US11288625B2 (en) | 2018-09-18 | 2022-03-29 | HKC Corporation Limited | Warehousing management method and warehousing system |
CN113329957A (zh) * | 2019-01-25 | 2021-08-31 | 村田机械株式会社 | 保管系统 |
CN110482220A (zh) * | 2019-07-26 | 2019-11-22 | 蚌埠凯盛工程技术有限公司 | 一种玻璃基板存储工艺、装置及应用 |
CN110980093B (zh) * | 2019-12-27 | 2021-07-27 | 广东智源机器人科技有限公司 | 仓储物流线调度系统和方法 |
CN110980093A (zh) * | 2019-12-27 | 2020-04-10 | 广东智源机器人科技有限公司 | 仓储物流线调度系统和方法 |
CN112744586A (zh) * | 2020-12-23 | 2021-05-04 | 乐金显示光电科技(中国)有限公司 | 一种玻璃基板的搬运控制方法及控制系统 |
Also Published As
Publication number | Publication date |
---|---|
US20140064887A1 (en) | 2014-03-06 |
US8992154B2 (en) | 2015-03-31 |
WO2014032300A1 (zh) | 2014-03-06 |
CN102826316B (zh) | 2015-06-17 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Storage system of glass substrate and storage method of glass substrate Effective date of registration: 20190426 Granted publication date: 20150617 Pledgee: Bank of Beijing Limited by Share Ltd Shenzhen branch Pledgor: Shenzhen Huaxing Optoelectronic Technology Co., Ltd. Registration number: 2019440020032 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20150617 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right |