WO2014017420A1 - 板状体の反り検査装置及びその反り検査方法 - Google Patents
板状体の反り検査装置及びその反り検査方法 Download PDFInfo
- Publication number
- WO2014017420A1 WO2014017420A1 PCT/JP2013/069743 JP2013069743W WO2014017420A1 WO 2014017420 A1 WO2014017420 A1 WO 2014017420A1 JP 2013069743 W JP2013069743 W JP 2013069743W WO 2014017420 A1 WO2014017420 A1 WO 2014017420A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plate
- waveform
- displacement
- upper limit
- ideal
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G13/00—Roller-ways
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/01—Conveyors composed of several types of conveyors
- B65G2812/016—Conveyors composed of several types of conveyors for conveying material by co-operating units in tandem
Definitions
- the present invention relates to a warpage inspection apparatus and warpage inspection method for a plate-like body, and more particularly to a technique for inspecting a surface shape displacement of a plate-like body held in a substantially horizontal posture.
- FPD flat glass displays
- touch panels such as liquid crystal displays, plasma displays, field emission displays (including surface emission displays), electroluminescence displays, and organic EL displays.
- the plate-shaped body represented by the tempered glass etc. which are obtained, the quality condition with respect to a surface shape displacement (warp) is severe.
- a member to be measured such as a glass substrate for FPD is placed on and held on a measurement stage (measurement base stone surface plate), and the surface shape of the member to be measured is displaced.
- a measurement stage measurement base stone surface plate
- the plate-like object conveyed on the roller conveyor is stopped at a predetermined position of the roller conveyor and held for a certain period of time, and is arranged below the plate-like object at the predetermined position.
- a configuration including a frame that can be moved up and down and a height measuring means such as a dial gauge that is disposed on the frame and measures the height positions of a plurality of points of a plate-like object.
- Patent Document 2 the technique disclosed in the above-mentioned Patent Document 2 is such that the surface shape of the plate-like object is not after the plate-like object being conveyed is stopped at a predetermined position and the dial gauge or the like is raised by the frame. Displacement cannot be measured. For this reason, a mechanism for raising the frame at a predetermined timing is required, which complicates the apparatus. Moreover, even if such a method is used, if it is attempted to measure all measured members such as glass plates after production in the same manner as described above, a wasteful time will be required for the measurement. This leads to a decrease in production efficiency.
- the present invention has been made in view of the above circumstances, and simplifies the apparatus necessary for measuring the surface shape displacement when performing warpage inspection of a plate-like body and shortens the time required for greatly improving production efficiency. It is a technical issue to improve it.
- An inspection apparatus for a plate-like body which was created to solve the above-mentioned problems, is a non-contact measuring apparatus that conveys a plate-like body in a substantially horizontal posture and a distance to the surface of the plate-like body.
- An upper limit waveform and a lower limit waveform are set in advance with reference to an ideal waveform with respect to the transport direction of the surface shape displacement of the plate-like body obtained according to the characteristics of the transport device, and measured with the displacement meter.
- the configuration is such that it is determined whether or not the actual waveform with respect to the transport direction of the surface shape displacement of the plate-like body during transport obtained based on the measured distance is within the upper limit waveform and the lower limit waveform. Characterized.
- substantially horizontal posture includes a posture that is inclined within, for example, 10 ° with respect to the horizontal plane, including a posture that is completely along the horizontal plane (the same applies hereinafter).
- the “waveform” is not limited to a waveform composed of continuous curves, but includes a waveform composed of a set of plotted points (hereinafter the same).
- the plate-like body is determined. There is no need to place it on the board or to lift the displacement meter by stopping the plate-like body during conveyance. This simplifies the device required for measuring the surface shape displacement of the plate-like body, shortens the time required for the measurement, eliminates time waste, and greatly improves production efficiency. Become.
- the upper limit waveform and the lower limit waveform used for the quality determination of the surface shape displacement of the plate-like body are set based on the ideal waveform of the surface shape displacement of the plate-like body obtained in accordance with the characteristics of the conveying device.
- the measurement of the surface shape displacement of the plate-like body and the quality determination are performed in consideration of the characteristics of the transport device. More specifically, while the plate-like body is being transported, the plate-like body is deformed due to the relationship between the components of the transport device and the weight of the plate-like body. In consideration of the deformation of the plate-like body, the ideal waveform of the surface shape displacement of the plate-like body and the upper limit waveform and the lower limit waveform are determined. Will be done. Therefore, the above-mentioned measurement and pass / fail judgment are performed in a state where the deformation of the plate-like body at the time of transport due to the characteristics of the transport device is substantially ignored, and it is possible to ensure their accuracy accurately. It becomes possible.
- the transport device is provided at least at both ends in a direction orthogonal to the transport direction of the plate-like body and feeds feeding means for feeding the plate-like body in the transport direction; It is preferable to include a fluid levitation means that is disposed between the means and levitates the plate-like object in a non-contact manner.
- the fluid levitation means floats the plate-like body, so that the plate-like body can be maintained in high quality without being scratched, and at the time of transportation. This makes it possible to perform measurement and pass / fail judgment with high accuracy because irregular deformation is less likely to occur in the plate-like body.
- the upper limit waveform and the lower limit waveform are set according to the characteristics of the feed imparting means and the fluid levitation means, as described above, the measurement of the surface shape displacement of the plate-like body and the quality determination thereof are performed. Exactly done.
- the ideal waveform is obtained by measuring the distance to the surface of the plate-like body with the displacement meter while carrying the plate-like body whose surface is an ideal plane or a plane conforming to the ideal plane. It is preferable to obtain.
- the ideal waveform can be obtained as a waveform that has been bent due to the characteristics of the transport device for a plate-like body whose surface is originally an ideal plane or a plane that conforms to it.
- the upper limit waveform and the lower limit waveform are extremely preferable waveforms for determining the quality of the plate-like body.
- the selection of a plate-like body in which the above surface is an ideal plane or a plane conforming thereto is carried out by placing the plate-like body on a precision surface plate or the like and measuring the flatness of the plate-like body with a dedicated sensor or the like. The measurement is carried out by finding a plate-like body having the best flatness (a plate-like body having no warp or having a very small warp that does not cause a problem).
- a plurality of the non-contact displacement gauges are arranged along a direction orthogonal to the conveying direction of the plate-like body, and the ideal waveforms are respectively created in advance corresponding to the positions of these displacement gauges, It is preferable that the upper limit waveform and the lower limit waveform are set in advance on the basis of these ideal waveforms.
- the upper limit waveform and the lower limit waveform with reference to the ideal waveform are preliminarily set for each of the displacement meters arranged along the direction orthogonal to the conveyance direction of the plate (the width direction of the plate). Since it is set, the surface shape displacement of the plate-like body is measured by each displacement meter at a plurality of locations in the width direction of the plate-like body. Thereby, the measurement of the surface shape displacement is performed over a wide area of the plate-like body, and the measurement accuracy is further increased.
- each of the displacement meters is stationaryly installed above the conveyance path of the plate-like body.
- the plate-like body when the actual waveform falls between the upper limit waveform and the lower limit waveform, the plate-like body is determined as a non-defective product, and at other times, the plate-like body is determined as a defective product. It is preferable.
- a plate-like body inspection method which was created to solve the above problems, measures a distance to a surface of the plate-like body, and a conveying device that conveys the plate-like body in a substantially horizontal posture.
- a non-contact displacement meter, and an ideal waveform with respect to the conveying direction of the surface shape displacement of the plate-like body according to the characteristics of the conveying device is created in advance, and an upper limit waveform and a lower limit waveform are preliminarily created based on the ideal waveform.
- the actual waveform with respect to the conveying direction of the surface shape displacement of the plate-like body during conveyance obtained based on the distance measured by the displacement meter is within the upper limit waveform and the lower limit waveform. It is characterized by determining.
- This method has substantially the same operational effects as this device because each component is substantially the same as the device according to the present invention described at the beginning.
- the present invention it is possible to simplify the apparatus necessary for measuring the surface shape displacement and reduce the time required for the inspection of the warpage of the plate-like body, thereby greatly improving the production efficiency.
- the measurement of the surface shape displacement of the plate-like body and the quality determination are performed after taking into consideration the characteristics of the conveyance device, the deformation of the plate-like body during conveyance by the conveyance device is substantially ignored, and the above Measurement and pass / fail determination can be performed, and it is possible to appropriately ensure their accuracy.
- a plate-like warpage inspection apparatus (hereinafter simply referred to as an inspection apparatus) according to an embodiment of the present invention will be described with reference to the drawings.
- this embodiment demonstrates the inspection apparatus at the time of using the glass substrate for FPD, especially the glass substrate for liquid crystal displays as a plate-shaped object.
- FIG. 1 illustrates a schematic configuration of an inspection apparatus 1 according to an embodiment of the present invention.
- the inspection apparatus 1 includes a transport device 3 that transports the glass substrate 2 in the direction of arrow A, a space above the transport path of the glass substrate 2, and a transport direction A of the glass substrate 2. And a plurality of (four in the illustrated example) laser displacement meters 4 arranged along an orthogonal direction (hereinafter referred to as a width direction).
- Each of these laser displacement meters 4 measures the distance to the surface of the glass substrate 2 and is fixedly installed at a fixed position in the direction perpendicular to the surface of the glass substrate 2.
- the laser displacement meter 4 includes a diffusion method and a regular reflection method. However, considering that the glass substrate 2 is a transparent body, a regular reflection method laser displacement meter is preferably used. Instead of the laser displacement meter 4, a non-contact displacement meter (displacement sensor) using light or ultrasonic waves as a medium can be used.
- the glass substrate 2 to be inspected by the inspection apparatus 1 has a dimension in the transport direction A of 300 to 3500 mm, a dimension in the width direction of 300 to 3500 mm, and a plate thickness of 0.1 to 1.1 mm.
- the conveying device 3 includes a plurality of conveying rollers 5 as feed applying means for supporting both ends of the glass substrate 2 in the width direction from below and applying a feed to the glass substrate 2, and the conveying rollers 5 arranged in two rows. It is comprised from the air levitation
- the laser displacement meter 4 does not exist above the two rows of transport rollers 5.
- the reason for having such a configuration is that the conveyance roller 5 is slightly decentered so that the waveform of the glass substrate 2 in the conveyance direction A is not affected by the decentering.
- the air levitation unit 6 blows air upward from a large number of through holes (not shown) formed over the entire upper surface portion 6a of a metal or resin box.
- a blower having a HEPA filter or CDA is preferable.
- the fluid levitation means instead of the air levitation unit 6, it is also possible to use a type in which a liquid such as an inert gas or water is blown upward.
- the air levitation unit 6 a special type of correcting the surface of the glass substrate 2 to a flat surface by blowing air onto the surface of the glass substrate 2 and simultaneously applying a negative pressure to the surface of the glass substrate 2.
- this type is not used in the present invention. That is, in the present invention, the air levitation unit 6 is used that levitates the glass substrate 2 by blowing air without using negative pressure.
- FIG. 1 illustrates a state at the time when the laser displacement meter 4 starts measuring the distance to the surface of one glass substrate 2 among the glass substrates 2 sequentially conveyed from the upstream side.
- FIG. 2 illustrates a state in which the distance to the surface is continuously measured by the laser displacement meter 4 while the one glass substrate 2 is being conveyed.
- FIG. 3 illustrates the state at the time when the measurement by the laser displacement meter 4 is completed for the single glass substrate 2. And the glass substrate 2 conveyed sequentially from the upstream side is measured by the laser displacement meter 4 without stopping.
- the glass substrate 2 receives air pressure from the air levitation unit 6 while being fed by the conveying roller 5, so that the glass substrate 2 is deformed, but from the upstream side. All of the glass substrates 2 that are sequentially conveyed receive feed and air pressure under the same conditions.
- the glass substrate 2 which is the best product whose surface is an ideal plane or a plane conforming thereto is selected, and the distance to the surface is continuously measured by the laser displacement meter 4 while the glass substrate 2 is being conveyed. taking measurement. And by this measurement, the distance from the laser displacement meter 4 to the surface of the glass substrate 2 is continuously collected in the transport direction A of the glass substrate 2, and based on the collected data, the glass substrate shown in FIG. The ideal waveform X0 of the surface shape with respect to the transport direction A of 2 is obtained.
- the ideal waveform X0 is an ideal waveform with respect to the transport direction A of the surface shape displacement of the glass substrate 2 obtained according to the characteristics of the transport device 3 including the transport roller 5 and the air floating unit 6.
- the best selection of the glass substrate 2 is considered to be the best by placing glass substrates sequentially on a precision surface plate or the like and measuring the flatness of the surfaces of those glass substrates. The glass substrate having the surface characteristics to be obtained was found and selected as the best glass substrate.
- the upper limit waveform X1 and the lower limit waveform X2 are set by translating the ideal waveform X0 up and down. If the upper limit waveform X1 and the lower limit waveform X2 are within the range of both the waveforms X1 and X2 in the relationship with the ideal waveform X0, the glass substrate 2 has a degree that does not cause a problem in film formation or the like. And the surface shape displacement of the above and those found by repeated experiments.
- the vertical axis indicates the height when the position of the laser displacement meter 4 is zero, and the horizontal axis indicates the position in the transport direction A of the glass substrate 2.
- a plurality of upper limit waveforms X1 and lower limit waveforms X2 based on the ideal waveform X0 are set corresponding to the plurality of laser displacement meters 4, respectively.
- the glass substrates 2 sequentially conveyed from the upstream side by the conveying device 3 are displayed one by one. From the state shown in FIG. 1 to the state shown in FIG. 3 through the state shown in FIG. 2, the distance to the surface of the glass substrate 2 is continuously collected by the laser displacement meter 4.
- the glass substrate 2 is determined that the substrate 2 is a non-defective product.
- a plurality of upper limit waveforms X1 and lower limit waveforms X2 are set corresponding to the plurality of laser displacement meters 4, and a plurality of actual waveforms X3 are obtained in the same manner. Accordingly, when all the actual waveforms X3 are within the range between all the upper limit waveforms X1 and the lower limit waveforms X2 corresponding thereto, the glass substrate 2 is determined to be non-defective.
- the signal from the laser displacement meter 4 may be used.
- it may be acquired via a sequencer device or directly by a computer, but the data from the plurality of laser displacement meters 4 is delayed in time. In order to obtain them synchronously, it is preferable to go through a data recorder device.
- the feed applying unit is configured by the plurality of transport rollers 5.
- the feed applying unit may be configured by a transport belt or the like.
- the glass substrate for FPD (especially glass substrate for liquid crystal displays) 2 was made into the measuring object, plate-like bodies, such as a glass plate used for other uses, a tempered glass plate, etc. are measured. It may be a target.
- Warpage inspection device for plate-like body 2 Glass substrate (plate-like body) 3 Conveying device 4 Laser displacement meter (non-contact displacement meter) 5 Conveying roller (feeding means) 6 Air levitation unit (fluid levitation unit) X0 Ideal waveform X1 Upper limit waveform X2 Lower limit waveform X3 Actual waveform X4 Actual waveform
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Fluid Mechanics (AREA)
Abstract
Description
2 ガラス基板(板状体)
3 搬送装置
4 レーザー変位計(非接触式の変位計)
5 搬送ローラ(送り付与手段)
6 空気浮上ユニット(流体浮上ユニット)
X0 理想波形
X1 上限波形
X2 下限波形
X3 実波形
X4 実波形
Claims (7)
- 板状体を略水平姿勢で搬送する搬送装置と、該板状体の表面までの距離を測定する非接触式の変位計とを備え、前記搬送装置の特性に応じて求まる板状体の表面形状変位の搬送方向に対する理想波形を基準として上限波形及び下限波形を予め設定しておき、前記変位計で測定された距離に基づいて得られる搬送中における板状体の表面形状変位の搬送方向に対する実波形が、前記上限波形と下限波形との間に収まっているか否かを判定するように構成したことを特徴とする板状体の反り検査装置。
- 前記搬送装置は、板状体の搬送方向と直交する方向の少なくとも両端部に配設され且つ該板状体に搬送方向の送りを付与する送り付与手段と、これら送り付与手段の相互間に配設され且つ板状物を非接触で浮上させる流体浮上手段とを備えていることを特徴とする請求項1に記載の板状体の反り検査装置。
- 前記理想波形は、表面が理想平面もしくはこれに準じる平面をなす板状体を前記搬送装置により搬送しながら、前記変位計により該板状体の表面までの距離を測定して求めることを特徴とする請求項1または2に記載の板状体の反り検査装置。
- 前記非接触式の変位計が、前記板状体の搬送方向と直交する方向に複数配置され、これら変位計の位置に対応して前記理想波形がそれぞれ予め求められ、これら理想波形を基準としてそれぞれ前記上限波形及び下限波形が予め設定されることを特徴とする請求項1~3の何れかに記載の板状体の反り検査装置。
- 前記各変位計は、板状体の搬送経路の上方に定置設置されていることを特徴とする請求項1~4の何れかに記載の板状体の反り検査装置。
- 前記実波形が、前記上限波形と下限波形との間に収まっている時に、当該板状体を良品と判定し、それ以外の時に、当該板状体を不良品と判定することを特徴とする請求項1~5の何れかに記載の板状体の反り検査装置。
- 板状体を略水平姿勢で搬送する搬送装置と、該板状体の表面までの距離を測定する非接触式の変位計とを備え、前記搬送装置の特性に応じて求まる板状体の表面形状変位の搬送方向に対する理想波形を基準として上限波形及び下限波形を予め設定しておき、前記変位計で測定された距離に基づいて得られる搬送中における板状体の表面形状変位の搬送方向に対する実波形が、前記上限波形と下限波形との間に収まっているか否かを判定することを特徴とする板状体の反り検査方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020147018767A KR101989840B1 (ko) | 2012-07-24 | 2013-07-22 | 판상체의 휨 검사 장치 및 그 휨 검사 방법 |
US14/402,462 US9273953B2 (en) | 2012-07-24 | 2013-07-22 | Apparatus for inspecting warpage of sheet-like member and method for inspecting warpage of sheet-like member |
CN201380007022.4A CN104081154B (zh) | 2012-07-24 | 2013-07-22 | 板状体的翘曲检查装置及其翘曲检查方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012163734A JP5907429B2 (ja) | 2012-07-24 | 2012-07-24 | 板状体の反り検査装置及びその反り検査方法 |
JP2012-163734 | 2012-07-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2014017420A1 true WO2014017420A1 (ja) | 2014-01-30 |
Family
ID=49997232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2013/069743 WO2014017420A1 (ja) | 2012-07-24 | 2013-07-22 | 板状体の反り検査装置及びその反り検査方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9273953B2 (ja) |
JP (1) | JP5907429B2 (ja) |
KR (1) | KR101989840B1 (ja) |
CN (1) | CN104081154B (ja) |
TW (1) | TWI586958B (ja) |
WO (1) | WO2014017420A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107702678A (zh) * | 2017-11-27 | 2018-02-16 | 李宗炜 | 一种防弹玻璃弯曲度检测装置 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6410208B2 (ja) * | 2014-10-01 | 2018-10-24 | 日本電気硝子株式会社 | 形状測定装置 |
CN104475353B (zh) * | 2014-12-22 | 2017-03-15 | 广东正业科技股份有限公司 | 一种板材翘曲度检测机及其检测方法 |
TWI585367B (zh) * | 2015-05-15 | 2017-06-01 | Mas Automation Corp | The method of detecting the level height between the parallel plates and the device |
CN105783794B (zh) * | 2016-03-22 | 2019-03-15 | 阳谷祥光铜业有限公司 | 一种平面检测方法及设备 |
CN106248043B (zh) * | 2016-08-26 | 2019-06-25 | 山东狮王陶瓷有限公司 | 一种对瓷砖坯平整度进行自动检测的方法及设备 |
IT201600089698A1 (it) * | 2016-09-05 | 2018-03-05 | Paola Ferrari | Macchina di controllo automatica. |
CN106403840A (zh) * | 2016-09-09 | 2017-02-15 | 蚌埠中建材信息显示材料有限公司 | 一种超薄浮法玻璃弯曲度检测方法 |
CN108195303A (zh) * | 2017-03-10 | 2018-06-22 | 重庆铂汉塑胶有限公司 | 一种变形度测量装置及方法 |
CN108050950A (zh) * | 2017-12-22 | 2018-05-18 | 合肥工业大学 | 用于气浮传输的玻璃基板变形检测装置 |
CN108375354A (zh) * | 2018-01-12 | 2018-08-07 | 嵊州市东浩电子科技有限公司 | 一种导光板翘曲缺陷检测的方法及设备 |
KR102182632B1 (ko) * | 2019-06-10 | 2020-11-24 | 주식회사 크레셈 | 반도체 기판 검사장치 |
US11187526B2 (en) * | 2020-02-26 | 2021-11-30 | Core Flow Ltd. | System and method of measuring warpage of a workpiece on a noncontact support platform |
JP7412678B2 (ja) * | 2020-03-16 | 2024-01-15 | 日本電気硝子株式会社 | ガラス板測定装置、ガラス板測定方法及びガラス板製造方法 |
TWI731760B (zh) * | 2020-07-28 | 2021-06-21 | 亞亞科技股份有限公司 | 電路板翹曲檢測裝置 |
CN112705481B (zh) * | 2020-12-18 | 2022-10-04 | 佛山维尚家具制造有限公司 | 一种用于检测板件翘曲变形的方法及实现该方法的设备 |
CN114812452A (zh) * | 2022-06-14 | 2022-07-29 | 芜湖东旭光电科技有限公司 | 玻璃基板检测系统、方法、装置、电子设备及存储介质 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008070324A (ja) * | 2006-09-15 | 2008-03-27 | Asahi Glass Co Ltd | 板状体の反り検出装置及びその方法 |
JP2008275432A (ja) * | 2007-04-27 | 2008-11-13 | Daio Paper Corp | シートロールの形状検査装置及び検査方法 |
JP2008286541A (ja) * | 2007-05-15 | 2008-11-27 | Japan Automat Mach Co Ltd | 電線端末部の芯線検査装置および検査方法 |
JP2011237243A (ja) * | 2010-05-10 | 2011-11-24 | Ihi Corp | 反り量測定装置、該反り量測定装置を有する浮上搬送コンベア、及び反り量測定方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11271049A (ja) * | 1998-03-19 | 1999-10-05 | Ricoh Co Ltd | 形状測定装置 |
FI111754B (fi) * | 2000-08-25 | 2003-09-15 | Outokumpu Oy | Tapa mitata kuljetinhihnalla olevan ja lämpökäsiteltävän materiaalipatjan pinnankorkeutta |
JP4605948B2 (ja) | 2001-07-16 | 2011-01-05 | 大日本印刷株式会社 | 反り測定装置及びそれを用いた焼成装置 |
US7683890B2 (en) * | 2005-04-28 | 2010-03-23 | 3M Innovative Properties Company | Touch location determination using bending mode sensors and multiple detection techniques |
JP4694272B2 (ja) * | 2005-06-07 | 2011-06-08 | アンリツ株式会社 | 印刷はんだ検査装置及び印刷はんだ検査方法 |
JP5343314B2 (ja) | 2006-12-05 | 2013-11-13 | 日本電気硝子株式会社 | 表面形状測定装置 |
CN102166677B (zh) * | 2011-04-29 | 2013-01-09 | 刘雨兰 | 一种线切割机床运丝系统的动态精度检测仪 |
-
2012
- 2012-07-24 JP JP2012163734A patent/JP5907429B2/ja active Active
-
2013
- 2013-07-22 CN CN201380007022.4A patent/CN104081154B/zh active Active
- 2013-07-22 WO PCT/JP2013/069743 patent/WO2014017420A1/ja active Application Filing
- 2013-07-22 US US14/402,462 patent/US9273953B2/en active Active
- 2013-07-22 KR KR1020147018767A patent/KR101989840B1/ko active IP Right Grant
- 2013-07-23 TW TW102126180A patent/TWI586958B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008070324A (ja) * | 2006-09-15 | 2008-03-27 | Asahi Glass Co Ltd | 板状体の反り検出装置及びその方法 |
JP2008275432A (ja) * | 2007-04-27 | 2008-11-13 | Daio Paper Corp | シートロールの形状検査装置及び検査方法 |
JP2008286541A (ja) * | 2007-05-15 | 2008-11-27 | Japan Automat Mach Co Ltd | 電線端末部の芯線検査装置および検査方法 |
JP2011237243A (ja) * | 2010-05-10 | 2011-11-24 | Ihi Corp | 反り量測定装置、該反り量測定装置を有する浮上搬送コンベア、及び反り量測定方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107702678A (zh) * | 2017-11-27 | 2018-02-16 | 李宗炜 | 一种防弹玻璃弯曲度检测装置 |
Also Published As
Publication number | Publication date |
---|---|
JP5907429B2 (ja) | 2016-04-26 |
US9273953B2 (en) | 2016-03-01 |
JP2014025710A (ja) | 2014-02-06 |
TWI586958B (zh) | 2017-06-11 |
KR20150032654A (ko) | 2015-03-27 |
CN104081154A (zh) | 2014-10-01 |
KR101989840B1 (ko) | 2019-06-17 |
US20150085300A1 (en) | 2015-03-26 |
TW201409018A (zh) | 2014-03-01 |
CN104081154B (zh) | 2016-12-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5907429B2 (ja) | 板状体の反り検査装置及びその反り検査方法 | |
US8042360B2 (en) | Glass handling and processing system | |
JP5265099B2 (ja) | 基板検査装置 | |
TWI602763B (zh) | Transfer apparatus of a glass substrate, and the manufacturing method of a glass substrate | |
JP2012073036A (ja) | ガラス基板欠陥検査装置及びガラス基板欠陥検査方法 | |
JP2012094770A (ja) | 検査装置および基板の位置決め方法 | |
KR102605917B1 (ko) | 스크라이빙 장치 | |
CN104979256B (zh) | 一种基板传送装置 | |
TWI635058B (zh) | Scribing device | |
CN204155034U (zh) | 气浮平台以及自动光学检查设备 | |
JP6410208B2 (ja) | 形状測定装置 | |
JP5181298B2 (ja) | 金属材料の欠陥検査装置 | |
JP5349770B2 (ja) | 塗布装置及び塗布方法 | |
JP2010066242A (ja) | 基板検査装置、及び、基板検査方法 | |
JP5387156B2 (ja) | 基板搬送装置及び基板検査装置 | |
JP2008093698A (ja) | ブランク枚数検出装置 | |
KR20160052192A (ko) | 기판 이송 장치 및 이를 포함하는 기판 검사 장치 | |
JP2014135453A (ja) | 基板支持装置およびそれを用いたプリント基板検査装置 | |
JP5683333B2 (ja) | 基板検査装置及び方法 | |
JP7211872B2 (ja) | 表面検査装置および表面欠陥判定方法 | |
JP2024068387A (ja) | ガラス板の製造方法 | |
JP2003075103A (ja) | セッターの反り検査方法 | |
JP5773158B2 (ja) | 薄板状ワーク保管装置 | |
CN114476681A (zh) | 一种物料输送系统、物料输送方法及存储介质 | |
JP2009128338A (ja) | ワイヤの撓み検出方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 13823758 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 20147018767 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14402462 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 13823758 Country of ref document: EP Kind code of ref document: A1 |