WO2013129251A1 - カプラ、電子部品、及び電子部品の製造方法 - Google Patents
カプラ、電子部品、及び電子部品の製造方法 Download PDFInfo
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- WO2013129251A1 WO2013129251A1 PCT/JP2013/054513 JP2013054513W WO2013129251A1 WO 2013129251 A1 WO2013129251 A1 WO 2013129251A1 JP 2013054513 W JP2013054513 W JP 2013054513W WO 2013129251 A1 WO2013129251 A1 WO 2013129251A1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
- H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
- H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/12—Coupling devices having more than two ports
- H01P5/16—Conjugate devices, i.e. devices having at least one port decoupled from one other port
- H01P5/18—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers
- H01P5/184—Conjugate devices, i.e. devices having at least one port decoupled from one other port consisting of two coupled guides, e.g. directional couplers the guides being strip lines or microstrips
- H01P5/185—Edge coupled lines
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/001—Manufacturing waveguides or transmission lines of the waveguide type
- H01P11/003—Manufacturing lines with conductors on a substrate, e.g. strip lines, slot lines
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03G—CONTROL OF AMPLIFICATION
- H03G1/00—Details of arrangements for controlling amplification
- H03G1/0005—Circuits characterised by the type of controlling devices operated by a controlling current or voltage signal
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03G—CONTROL OF AMPLIFICATION
- H03G3/00—Gain control in amplifiers or frequency changers
- H03G3/20—Automatic control
- H03G3/30—Automatic control in amplifiers having semiconductor devices
- H03G3/3036—Automatic control in amplifiers having semiconductor devices in high-frequency amplifiers or in frequency-changers
Definitions
- the present invention relates to a coupler, an electronic component, and an electronic component manufacturing method, and in particular, a coupler, an electronic component, and an electronic device that incorporate a resistance element manufactured by using a thin film process advantageous for miniaturization and thinning as an attenuator.
- the present invention relates to a part manufacturing method.
- Wireless communication equipment is composed of various high-frequency elements such as antennas, filters, RF switches, power amplifiers, couplers, and baluns.
- the coupler is also called a directional coupler (Directional coupler), and is used to pick up a part of the output of the power amplifier and feed it back to the input of the power amplifier. Feedback from the coupler makes it possible to keep the output gain of the power amplifier constant.
- Wireless communication devices using couplers include mobile communication devices such as mobile phones and portable terminals, wireless LAN devices, and the like, but these devices are remarkably miniaturized and are even smaller and thinner than couplers. It is eagerly desired.
- Patent Documents 1 and 2 disclose examples of couplers used in these devices.
- the coupler plays a role of reducing sensing error and wiring loss in the transmission / reception unit of the wireless communication device.
- Patent Document 3 discloses an example of this type of resistance element, although it is an example of a termination resistor instead of a coupler.
- a bridge portion made of a resistance film is provided in the middle of a sub line that is electromagnetically coupled to a main line through which a communication signal flows.
- a resistance film and a conductor film are sequentially formed on the entire surface of the substrate, and after these are sequentially patterned into the shape of the sub-line, the conductor film is removed only at the bridge portion of the resistance film. Is adopted. [0023] Paragraph 3 of Patent Document 3 discloses an example of such a manufacturing method, although it is an example of a termination resistor instead of a coupler.
- the termination resistor 1 described in FIGS. 1 and 2 is manufactured according to the manufacturing method described in the paragraph [0023]
- the resistive film pattern 40 is formed over the entire lower surface of the input electrode 20. It is reasonable to think that
- the resistance film remains immediately below the conductor film. In this state, when a current signal flows through the sub-line, a corresponding portion thereof flows through the resistance film (not the conductor film) even in a portion other than the bridge portion. Since the resistance signal is more attenuated in the resistance film than in the conductor film, the current signal flowing through the resistance film instead of the conductor film means that the attenuation amount of the current signal is increased.
- the current signal flows through the resistive film due to the so-called skin effect. Since the skin effect has frequency characteristics, the amount of attenuation described above varies depending on the frequency of the current signal. In recent mobile communication devices and wireless LAN devices, wideband signals are used. Therefore, if there is such a difference in attenuation due to frequency, circuit design becomes difficult. Therefore, it is required to suppress the skin effect as much as possible and reduce the difference in attenuation due to frequency.
- FIG. 5 of Patent Document 3 discloses an example in which a resistive film is not left directly under a conductor film, although it is an example of a terminating resistor instead of a coupler.
- the problems as described above are not limited to the coupler, but an electronic component having a wiring composed of a conductor film including a plurality of wiring patterns and a resistance film as an attenuator arranged between the plurality of wiring patterns. This is a common problem.
- one of the objects of the present invention is to provide a coupler, an electronic component, and an electronic component manufacturing method that can reduce the difference in attenuation due to frequency while suppressing the contact resistance between the conductor film and the resistive film.
- a coupler includes a substrate, input terminals and output terminals respectively provided on the substrate, and provided on the substrate, one end being the input terminal and the other end being the output.
- a main line connected to each of the terminals, and a sub-line that includes a conductor film and a resistance film respectively provided on the substrate and is electromagnetically coupled to the main line at a part of the conductor film;
- the film has first and second wiring patterns, and the resistance film has a first end disposed so as to fit between the first wiring pattern and the substrate, and the second A first resistive film pattern including a second end portion disposed so as to be fitted between the wiring pattern and the substrate, wherein the first and second end portions are at least an upper surface and a second end portion, respectively. It contacts the said conductor film at an end surface, It is characterized by the above-mentioned.
- the end surfaces of the first and second end portions are in contact with the conductor film, it can be said that at least a part of the lower surface of the conductor film is not covered with the resistive film. Therefore, it is possible to reduce the difference in attenuation due to the frequency compared to the conventional example in which the entire lower surface of the conductor film is covered with the resistance film. Further, since the conductor film and the resistance film are in contact with each other at least on the upper surface and the end surface of each of the first and second end portions, the contact resistance between the conductor film and the resistance film is suppressed as compared with the conventional example in which these contact only with the end surface. It becomes possible.
- the coupler further includes an insulating film formed so as to cover the resistance film, and the insulating film has first and second through holes exposing the first and second ends, respectively.
- the resistance film and the conductor film may be in contact with each other inside the first and second through holes. According to this, since the resistance film is covered with the insulating film in portions other than the first and second through holes, the resistance film can be prevented from being oxidized in the coupler manufacturing process. Accordingly, it is possible to suppress variation in resistance value of the resistance film due to the location in the substrate surface.
- the first resistive film pattern is configured such that the film thickness gradually decreases from a position in contact with an inner wall of each of the first and second through holes to a corresponding end surface. Also good. According to this, it becomes possible to further suppress the contact resistance between the conductor film and the resistance film.
- the first resistive film pattern is a linear pattern extending in the first direction
- the width of the first resistive film in the second direction orthogonal to the first direction is The width of each of the first and second through holes may be smaller than the width in the second direction. According to this, even if the positions where the first and second through holes are formed are slightly shifted, the first and second end portions can be appropriately exposed in the through holes.
- the electronic component according to the present invention includes a substrate and a wiring including a conductor film and a resistance film provided on the substrate, respectively, and the conductor film includes first and second wiring patterns,
- the resistance film is disposed so as to be fitted between the first end portion disposed so as to be fitted between the first wiring pattern and the substrate, and between the second wiring pattern and the substrate.
- a first resistive film pattern including a second end portion, wherein the first and second end portions are in contact with the conductor film at least on an upper surface and an end surface, respectively.
- a method of manufacturing an electronic component comprising: forming a resistive film having a first resistive film pattern including first and second ends; and forming the resistive film, Forming an insulating film covering the upper surface of the first resistive film pattern excluding the upper surface of the second end portion and exposing the first and second end portions; and after forming the insulating film Forming a conductor film having first and second wiring patterns covering the first and second ends, respectively, and forming a protective film having a contact hole with the conductor film exposed on the bottom surface And a step of forming a terminal in contact with the conductor film through the contact hole.
- the conductive film and the resistive film are in contact with each other on at least the upper surface and the end surface of each of the first and second ends. It becomes possible to manufacture parts.
- the resistance film is covered with the insulating film before the conductor film is formed, it is possible to suppress oxidation of the resistance film in the manufacturing process. Therefore, the resistance value of the resistance film can be prevented from varying depending on the location in the substrate surface.
- the step of forming the insulating film further includes a step of forming a second resist pattern that covers the first and second end portions, and an insulating film that covers the second resist pattern.
- the method may include a step of depositing a material and a step of removing the second resist pattern and the insulating film material formed on the upper surface of the second resist pattern. According to this, it is possible to form the first and second through holes in the insulating film that expose the first and second end portions, respectively.
- the electronic component manufacturing method may further include a step of removing part of the exposed first and second end portions by performing reverse sputtering after forming the insulating film.
- the first resistive film pattern can be configured such that the film thickness gradually decreases from the position in contact with the inner wall of each of the first and second through holes to the corresponding end surface.
- the step of forming the resistive film includes a step of forming a resistive film material, a step of forming a first resist pattern covering the resistive film material, and the first
- the method may include a step of etching the resistance film material using a resist pattern as a mask and a step of removing the first resist pattern.
- the step of forming the conductor film includes a step of forming a seed electrode film, a step of forming a third resist pattern covering the seed electrode film, and plating. Forming a conductive film material between the third resist patterns, removing the third resist pattern, and removing a portion of the seed electrode film not covered with the conductive film material It is good also as having.
- the present invention can also be configured as shown in the following first to fifth features.
- the present invention according to the first feature includes a substrate, a main line connected to an input terminal and an output terminal respectively provided on the substrate, and the substrate so as to be electromagnetically coupled to the main line.
- a wiring layer disposed above and a sub-line including a thin-film resistance pattern, wherein the width of the thin-film resistance pattern is narrower than the width of the wiring layer, and a side end portion and an upper surface portion of the thin-film resistance pattern
- a coupler in which an upper surface portion of the thin film resistor pattern is covered with a first insulating film except for a connection portion with the wiring layer.
- the thin film resistor pattern is not formed on the entire lower surface of the main line and the sub line, and has a structure in which only a part of the lower surface of the sub line is in contact with the wiring layer. Therefore, the effect of reducing the high frequency loss caused by the skin effect in the high frequency region can be obtained. Therefore, in the frequency characteristics of the attenuator of the resistor built-in coupler that is made into a small thin film, the change in attenuation in the high frequency region can be reduced.
- the heat dissipation effect is obtained in addition to the effect of preventing deterioration of the thin film resistor pattern due to oxidation. Since the resistance is improved, an effect of preventing the progress of the deterioration of the thin film resistance pattern due to the input of static electricity can be obtained.
- the first insulating film is formed on an upper surface portion and a side surface portion of the thin film resistor pattern excluding a connection portion with the wiring layer. It is a coupler.
- the coupler according to the second feature it is possible to prevent the thin film resistor pattern from being deteriorated due to the influence of oxidation or the like as compared with the structure in which the first insulating film covers only the upper surface portion of the thin film resistor pattern. Therefore, it is possible to reduce variations in the resistance value of the thin film resistor pattern.
- the first insulating film has a through hole in a region corresponding to a connection portion between the thin film resistor pattern and the wiring layer.
- the opening width of the through hole is a coupler larger than the width W of the thin film resistor pattern.
- the opening width of the through hole is larger than the width W of the thin film resistor pattern, the entire end portion of the thin film resistor pattern can be reliably exposed in the through hole. Therefore, it is possible to reduce variations in the resistance value of the thin film resistor pattern.
- the first insulating film is preferably formed so as to widely cover the entire lower surface of the main line and the sub-line except for the through-hole portion. By doing so, the first insulating film is in contact with another insulating film (a planarizing film covering the entire substrate surface or an insulating film formed thereon) formed under the thin film resistor pattern. Since the area increases, these adhesions are improved, and peeling of the first insulating film is suppressed.
- the present invention according to a fourth feature is the coupler according to the second or third feature, further comprising a second insulating film formed on a surface of the substrate, wherein the first and second insulating films are provided.
- couplers made of the same material as the substrate.
- the coupler according to the fourth feature it is possible to further improve the adhesion between the first insulating film and the second insulating film.
- an inorganic material having low reactivity with the thin film resistance pattern such as alumina or silicon nitride, as the constituent material of the first and second insulating films and the substrate, deterioration due to oxidation or the like of the thin film resistance pattern is suppressed. It is also possible to suppress variations in resistance value in the substrate surface.
- a substrate a wiring layer formed on the substrate, and at least one thin film resistance pattern connected to the wiring layer, wherein the width of the thin film resistance pattern is equal to that of the wiring layer. Narrower than the width, the side edge portion and the upper surface portion of the thin film resistor pattern are covered and connected with the wiring layer, and the upper surface portion of the thin film resistor pattern is covered with an insulating film except for the connection portion with the wiring layer. Electronic parts.
- the thin film resistor pattern is not formed on the entire lower surface of the main line and the sub line, and has a structure in which only a part of the lower surface of the sub line is in contact with the wiring layer. Therefore, the effect of reducing the high frequency loss caused by the skin effect in the high frequency region can be obtained. Therefore, it is possible to reduce the change in the attenuation amount in the high frequency region of the frequency characteristics.
- the upper surface of the thin film resistor pattern other than the connection portion with the wiring layer is covered with an insulating film, a heat dissipation effect is obtained in addition to the effect of preventing deterioration of the thin film resistor pattern due to oxidation, and ESD resistance is further improved. Therefore, an effect of preventing the progress of the deterioration of the thin film resistance pattern due to the input of static electricity can be obtained.
- the present invention it is possible to reduce the difference in attenuation due to the frequency as compared with the conventional example in which the entire lower surface of the conductor film is covered with the resistance film. Further, since the conductor film and the resistance film are in contact with each other at least on the upper surface and the end surface of each of the first and second end portions, the contact resistance between the conductor film and the resistance film is suppressed as compared with the conventional example in which these contact only with the end surface. It becomes possible.
- an electronic component is manufactured in which at least a part of the lower surface of the conductive film is not covered with the resistive film, and the conductive film and the resistive film are in contact with each other at least on the upper surface and the end surface of each of the first and second ends. It becomes possible.
- the resistance film is covered with the insulating film before the conductor film is formed, it is possible to suppress oxidation of the resistance film in the manufacturing process. Therefore, the resistance value of the resistance film can be prevented from varying depending on the location in the substrate surface.
- the variation in attenuation in the high frequency region is reduced, and the variation in resistance value during the formation of the resistive element is reduced. Can be reduced.
- the frequency characteristics of the electronic component having the structure of the present invention it is possible to reduce the change in attenuation in the high frequency region.
- FIG. 1 is an equivalent circuit diagram showing a configuration of a coupler according to a preferred embodiment of the present invention.
- 1 is a plan view of a coupler 1A according to a preferred first embodiment of the present invention.
- FIG. 3 is a vertical sectional view taken along line AA ′ shown in FIG. 2.
- FIG. 3 is an enlarged view of a region B shown in FIG. 2.
- FIG. 5 is a vertical sectional view taken along the line CC ′ shown in FIG.
- FIG. 3 is a vertical sectional view taken along the line DD ′ shown in FIG.
- FIG. 6 is a plan view of a coupler 1B according to a preferred second embodiment of the present invention.
- FIG. 8 is a vertical sectional view taken along the line AA ′ shown in FIG. 7.
- FIG. 8 is a vertical sectional view taken along the line DD ′ shown in FIG.
- FIG. 10 is a plan view of a coupler 1C according to a preferred third embodiment of the present invention.
- FIG. 11 is a vertical sectional view taken along line AA ′ shown in FIG. 10. It is an enlarged view of the area
- FIG. 13 is a vertical sectional view taken along the line CC ′ shown in FIG.
- FIG. 10 is a diagram showing steps S1 to S11 of a manufacturing process of a coupler 1C according to a preferred third embodiment of the present invention.
- FIG. 10 is a diagram showing steps S12 to S21 of a manufacturing process of a coupler 1C according to a preferred third embodiment of the present invention.
- FIG. 10 shows the change of the attenuation amount of the current signal passing through the ⁇ -type attenuator having the same circuit configuration as that of the ⁇ -type attenuator constituted by the thin film resistance patterns R11 to R13 shown in FIG. It is a figure shown about each of the case where it implement
- FIG. 1 is a plan view of a coupler 100 according to the background art of the present invention.
- FIG. 19 is a vertical cross-sectional view taken along line AA ′ shown in FIG. It is an enlarged view of the area
- FIG. 21 is a vertical sectional view taken along the line CC ′ shown in FIG. 20.
- FIG. 1 is an equivalent circuit diagram showing the configuration of the coupler 1 according to the present embodiment.
- the coupler 1 includes an input terminal T11, an output terminal T12, a coupling terminal T21, an isolation terminal T22, a first line L1, a second line L2, and a thin film resistance pattern (resistance film pattern) R11 to R13, R21 to R23 are provided.
- the first line L1 and the second line L2 are disposed so as to be electromagnetically coupled to each other.
- FIG. 1 shows a magnetic coupling M and capacitive couplings C1 and C2 as examples of the electromagnetic coupling.
- One end of the first line L1 is connected to the input terminal T11, and the other end is connected to the output terminal T12.
- One end of the second line L2 is connected to the coupling terminal T21 via the thin film resistor pattern R11, and the other end is connected to the isolation terminal T22 via the thin film resistor pattern R21.
- One end of the thin film resistor pattern R12 is connected between the second line L2 and the thin film resistor pattern R11, and the other end is connected to the ground terminal T23.
- One end of the thin film resistor pattern R13 is connected between the thin film resistor pattern R11 and the coupling terminal T21, and the other end is connected to the ground terminal T23.
- the thin film resistance patterns R11, R12, R13 constitute a ⁇ -type attenuator connected to the coupling terminal T21. Further, the thin film resistance patterns R21, R22, R23 constitute a ⁇ -type attenuator connected to the isolation terminal T22.
- a line provided between the input terminal T11 and the output terminal T12 is referred to as a “main line”, and a line provided between the coupling terminal T21 and the isolation terminal T22 (between the ground terminal T23). May be referred to as a “sub-line”.
- the lengths of the first line L1 and the second line L2 described above are determined according to the specifications of the coupler 1.
- the length of each of the first line L1 and the second line L2 is such that a 1/4 wavelength ( ⁇ / 4) resonator circuit is formed with respect to the target transmission signal (a signal passing through the first line L1). Is set.
- a signal to be picked up by the coupler 1 is input to the input terminal T11 and output from the output terminal T12.
- the main current IM flows through the first line L1.
- the induced current IL based on the magnetic coupling M flows through the second line L2 in one direction
- the displacement current IC based on the capacitive couplings C1 and C2 flows through the second line L2. Flows in both directions.
- the current flowing through the second line L2 is the sum of the induced current IL and the displacement current IC, and as a result, a current having a direction that matches the direction in which the induced current IL flows (current toward the coupling terminal T21) flows. .
- a signal is input to the input terminal T11 of the coupler and output from the output terminal T12, a signal corresponding to a part of the signal is output from the coupling terminal T21.
- the coupler 1 is used, for example, for output monitoring of a power amplifier (PA).
- PA power amplifier
- the input terminal T11 of the coupler 1 is connected to the output terminal of the power amplifier
- the coupling terminal T21 of the coupler 1 is connected to the input terminal of the power amplifier via the AGC detection circuit.
- a signal corresponding to a part of the signal output from the power amplifier is supplied as a feedback signal from the coupling terminal T21 of the coupler 1 to the input terminal of the power amplifier via the AGC detection circuit.
- the output gain can be kept constant by performing the output control based on the feedback signal.
- the coupler 1 can be used for controlling an antenna tuner of a wireless communication device.
- the input terminal T11 of the coupler 1 is connected to the output terminal of the antenna, and the coupling terminal T21 of the coupler 1 is connected to the antenna switch.
- a signal corresponding to a part of the signal output from the antenna is supplied as a feedback signal from the coupling terminal T21 of the coupler 1 to the antenna switch.
- the output gain can be kept constant by performing output control based on the feedback signal. Since the coupler 1 includes the thin film resistance patterns R11 to R13 and R21 to R23 as attenuators, even when the signal output from the antenna is a broadband signal, it can operate with high stability against impedance fluctuation. .
- FIG. 2 is a plan view of the coupler 1A according to the first embodiment of the present invention.
- 3 is a vertical sectional view of the coupler 1A in the AA ′ portion of FIG. 2
- FIG. 4 is an enlarged view of a region B shown in FIG. 2
- FIG. 5 is a CC ′ portion of FIG.
- FIG. 6 is a vertical cross-sectional view of the coupler 1A taken along the line DD ′ of FIG.
- a planarizing film H0 and an insulating film H01 are laminated in this order on the entire surface of the substrate K1, and each configuration shown in FIG. 1 is formed on the upper surface. It has a structure.
- the substrate K1, the planarizing film H0, and the insulating film H01 may be collectively referred to as “substrate”. Each component described below is formed above the insulating film H01.
- the long side direction of the rectangular substrate K ⁇ b> 1 is referred to as the x direction
- the short side direction is referred to as the y direction.
- the input terminal T11 and the output terminal T12 are arranged at one corner and the other corner of one long side of the substrate K1, respectively.
- a ground terminal T13 is disposed between the input terminal T11 and the output terminal T12.
- the coupling terminal T21 and the isolation terminal T22 are disposed at one corner and the other corner of the other long side of the substrate K1, respectively.
- a ground terminal T23 is arranged between the coupling terminal T21 and the isolation terminal T22.
- the wiring pattern L11 constitutes the main line described above, and is arranged so as to connect the input terminal T11 and the output terminal T12 while curving toward the center of the substrate K1 in order to avoid the ground terminal T13.
- the wiring pattern L11 has a straight line portion extending in the x direction near the center of the substrate K1. This straight line portion constitutes the first line L1 shown in FIG.
- the wiring patterns L21 to L25 and the thin film resistor patterns R11 to R13, R21 to R23 constitute the sub-line described above.
- the wiring pattern L21 is formed from a straight line portion L21a provided in parallel to the straight line portion (first line L1) of the wiring pattern L11, and one end of the straight line portion L21a (an end portion near the coupling terminal T21).
- the first portion L21b that is curved toward the coupling terminal T21 and finally extends in the y direction, and the substrate is stretched in the middle while extending in the x direction from the tip of the first portion L21b toward the ground terminal T23.
- a second portion L21c that curves in the direction toward the outside of K1 and extends in the y direction, and from the other end of the straight portion L21a (the end portion near the isolation terminal T22) toward the isolation terminal T22
- a third portion L21d that is curved and eventually extends in the y direction, and a tip from the third portion L21d in the x direction toward the ground terminal T23 Enlargement while, and middle and a fourth portion L21e extending in final y-direction curved toward the outside of the substrate K1.
- the straight line portion L21a constitutes the second line L2 shown in FIG. 1, and is electromagnetically coupled to the straight line portion of the wiring pattern L11.
- the tips of the second and fourth portions L21c and L21e constitute both ends of the wiring pattern L21.
- the tip of the first portion L21b (the connection end with the second portion L21c) is electrically connected to the coupling terminal T21 via the thin film resistor pattern R11.
- the tip of the third portion L21d (the connection end with the fourth portion L21e) is electrically connected to the isolation terminal T22 via the thin film resistor pattern R21.
- the wiring pattern L22 is a linear pattern extending through the lower side of the ground terminal T23 in the x direction.
- One end of the wiring pattern L22 (the end near the coupling terminal T21) is electrically connected to the tip of the second portion L21c of the wiring pattern L21 via the resistance film R12.
- the other end of the wiring pattern L22 (the end near the isolation terminal T22) is electrically connected to the tip of the fourth portion L21e of the wiring pattern L21 via the resistance film R22.
- the wiring pattern L23 is a linear pattern extending under the ground terminal T23 in parallel with the wiring pattern L22 and extending closer to the edge of the substrate K1 than the wiring pattern L23.
- the length of the wiring pattern L22 is set to be slightly shorter than the wiring pattern L23.
- the wiring pattern L24 is a linear pattern arranged so that one end is connected to the coupling terminal T21 and the other end faces one end of the wiring pattern L23.
- the other end of the wiring pattern L24 and one end of the wiring pattern L23 are electrically connected via a thin film resistor pattern R13.
- the wiring pattern L25 is a linear pattern arranged so that one end is connected to the isolation terminal T22 and the other end faces the other end of the wiring pattern L23.
- the other end of the wiring pattern L25 and the other end of the wiring pattern L23 are electrically connected via a thin film resistor pattern R23.
- the planarizing film H0 and the insulating film H01 are laminated in this order on the entire surface of the substrate K1.
- the substrate K1 it is preferable to select and use one of various substrates such as an alumina substrate, a glass substrate, a ferrite substrate, and an aluminum nitride substrate.
- the planarization film H0 it is preferable to use an alumina film or a silica film.
- the planarizing film H0 is composed of an alumina film, an alumina film is formed on the surface of the substrate K1 by a sputtering method or the like, and then the surface of the alumina film is planarized by performing CMP (Chemical-Mechanical-Polishing).
- the planarizing film H0 that is an alumina film is obtained.
- the planarizing film H0 is composed of a silica film
- the insulating film H01 a silicon nitride film or an alumina film is preferably used. Note that the insulating film H01 is provided in order to keep the electrical conductivity of the surface at a sufficiently low value. When the electrical conductivity of the surface can be kept at a sufficiently low value by the planarizing film H0 alone, the insulating film H01 is It is unnecessary.
- the thin film resistance patterns R13 and R23 are constituted by a resistance film R1 formed on the surface of the insulating film H01.
- a resistance film R1 As the material of the resistance film R1, tantalum nitride, nickel chromium alloy, or the like is suitable.
- each of the wiring patterns L23 to L25 is constituted by a conductor film M1 formed on the surface of the insulating film H01.
- a material of the conductor film M1 Cu, Ag, Pd, Ag-Pd, Ni, Au, or the like can be suitably used.
- the connection structure between the thin-film resistance pattern R13 (first resistance film pattern) and the wiring patterns L23 and L24 (first and second wiring patterns) is described in detail. explain. In the following description, the thin film resistance pattern R13 and the wiring patterns L23 and L24 will be described. However, the connection between other thin film resistance patterns and other wiring patterns is realized by the same structure.
- the thin film resistor pattern R13 is connected to the wiring pattern L23 at one end R13a in the x direction (a portion having a length X1 from the one end face, the first end), and the other end in the x direction. It is configured to connect to the wiring pattern L24 at R13b (a portion having a length X2 from the other end surface; a second end portion).
- the wiring width W1 of the thin film resistor pattern R13 is set to a value smaller than the wiring width W2 of the wiring patterns L23 and L24.
- the one end R13a is disposed so as to fit between the wiring pattern L23 and the substrate (insulating film H01). Thereby, the upper surface, end surface (x-direction side surface), and both side surfaces in the width direction (y-direction both side surfaces) of the one end R13a are in contact with the wiring pattern L23.
- the other end R13b is disposed so as to fit between the wiring pattern L24 and the substrate (insulating film H01). Thereby, the upper surface, the end surface (side surface in the x direction), and both side surfaces in the width direction (both side surfaces in the y direction) of the one end R13b are in contact with the wiring pattern L24.
- the insulating film H1 is a film for preventing the resistance film R1 from being oxidized in the manufacturing process. Like the insulating film H01, it is preferable to use a silicon nitride film or an alumina film. In the present embodiment, as shown in FIG. 6, the insulating film H1 is not provided on the side surface in the width direction of each thin film resistance pattern (resistance film R1).
- the film thickness of the conductor film M1 is set to a value larger than the total value of the film thickness of the resistance film R1 and the film thickness of the insulating film H1. Therefore, as shown in FIG. 3, the upper surface of the insulating film H1 is positioned lower than the upper surface of the conductor film M1.
- a protective film I1 is formed on the insulating film H1 and the conductor film M1. As shown in FIG. 6, this protective film I1 also covers the side surface in the width direction of each thin film resistance pattern (resistance film R1).
- the protective film I1 is for protecting each component to be covered, and is made of an inorganic insulator such as silicon nitride, aluminum oxide, or silicon dioxide, or an organic insulator such as polyimide or epoxy resin.
- a contact hole CH is provided at a position corresponding to each terminal.
- the conductor film M1 is exposed on the bottom surface of the contact hole CH.
- a conductor film M2 is embedded in the contact hole CH, and the conductor film M2 is in contact with the conductor film M1 on the lower surface.
- the specific constituent material of the conductor film M2 may be the same as that of the conductor film M1.
- the conductor film M2 is formed up to a position higher than the upper end of the contact hole CH, and is configured such that the planar extension of the portion higher than the upper end of the contact hole CH is larger than the cross-sectional area of the contact hole CH. .
- the surface of the portion of the conductor film M2 that protrudes outside the contact hole CH is covered with the plating film M3.
- Ni / Au plating or Ni / Sn plating can be suitably used as the plating film M3.
- the conductor film M2 and the plating film M3 constitute a coupling terminal T21, an isolation terminal T22, and a ground terminal T23.
- the wiring pattern L11 (main line) is connected to the input terminal T11 and the output terminal T12, and is disposed opposite to the second line L2 in the same plane. As a result, the wiring pattern L11 becomes a part that is electromagnetically coupled to the second line L2.
- the second line L2 is connected to the coupling terminal T21, the isolation terminal T22, and the ground terminal T23 through the thin film resistor patterns R11 to R13 and R21 to R23.
- a planarizing film H0 and an insulating film H01 are formed on the substrate K1.
- the insulating film H01 is not necessary when sufficient insulation can be obtained.
- the thin film resistance patterns R13 and R23 are formed on the insulating film H01. Further, the insulating film H1 is formed so as to cover only the portions other than the connection portions of the thin film resistance patterns R13 and R23 with the conductor film M1 (wiring layer), and on the thin film resistance patterns R13 and R23 not covered with the insulating film H1.
- the conductor film M1 is formed.
- a protective film I1 is formed on the conductor film M1 and the insulating film H1.
- the terminals T21, T22, T23 are formed by a laminate of the conductor film M1 and the conductor film M2 (terminal).
- a plating film M3 is formed on the surfaces of the terminals T21, T22, T23.
- the width W1 of the thin film resistor pattern R13 is narrower than the width W2 of the conductor film M1, and the thin film resistor pattern R13 is a region having lengths X1 and X2 on the left and right side edges and the upper surface. (End portions R13a, R13b) are covered and connected by the conductor film M1. Only the upper layer portion of the thin film resistor pattern R13 excluding the connection portion is covered with the insulating film H1.
- FIG. 18 is a plan view of the coupler 100 according to the background art of the present invention.
- 19 is a vertical sectional view of the coupler 100 in the AA ′ portion of FIG. 18,
- FIG. 20 is an enlarged view of a region B shown in FIG. 18, and
- FIG. 21 is a CC ′ portion of FIG.
- the coupler 100 is characterized in that the entire lower surface of the conductor film M1 is covered with the resistance film R1, and that the insulating film H1 is not provided.
- the coupler 1A according to the first embodiment differs from the coupler 1A according to the first embodiment in that the wiring width of each thin film resistor pattern is equal to the wiring width of each wiring pattern.
- the wiring pattern L11 (main line) is connected to the input terminal T11 and the output terminal T12, and is disposed opposite to the second line L2 in the same plane.
- the wiring pattern L11 becomes a part that is electromagnetically coupled to the second line L2.
- the second line L2 is connected to the coupling terminal T21, the isolation terminal T22, and the ground terminal T23 through the thin film resistor patterns R11 to R13 and R21 to R23.
- the thin film resistor patterns R11 to R13, R21 to R23 function as attenuators.
- the resistance film R1 in the coupler 100 is integrally formed over the entire lower surface of the wiring pattern L11 (main line) and the wiring patterns L21 to L25 (part of the sub lines).
- the thin film resistor patterns R11 to R13 and R21 to R23 in the coupler 100 are part of the resistor film R1.
- the planarizing film H0 and the insulating film H01 are formed on the entire surface of the substrate K1.
- the resistance film R1 is formed on the insulating film H01, and a conductor film M1 (wiring layer) is formed on the insulating film H01.
- a protective film I1 is formed on the conductor film M1.
- the terminals T21, T22, T23 are formed by a laminate of the conductor film M1 and the conductor film M2.
- a plating film M3 is formed on the surfaces of the terminals T21, T22, T23.
- the effect produced by the coupler 1A according to the present embodiment will be described.
- the coupler 1A since there is a portion that is not covered with the resistance film R1 on the lower surface of the conductor film M1, compared with the coupler 100 in which the entire lower surface of the conductor film M1 is covered with the resistance film R1, the skin effect is caused. It is possible to suppress the influence caused by the current flowing through the resistance film R1. Therefore, the amount of attenuation of the current signal in the coupler 1 ⁇ / b> A is smaller than the difference in frequency compared to the amount of attenuation of the current signal in the coupler 100.
- the resistance film R1 exists on the entire lower surface of the conductor film M1, and is in contact with the entire lower surface of the conductor film M1, so that the current flowing through the conductor film M1 particularly in the high frequency region. A part of the flow also flows to the underlying resistance film R1 due to the skin effect. This causes a high frequency loss.
- the resistance film R1 and the conductor film M1 are completely separated by the insulating film H1 except for the connection portion between each thin film resistance pattern and the conductor film M1, and thus insulated from each other. Therefore, the high frequency loss as described above can be suppressed.
- the end portions of the respective thin-film resistance patterns are in contact with the conductor film M1 on the upper surface, the end surface, and the side surfaces in the width direction, so that a conventional example in which these contact only at the end surface (for example, FIG. Compared with 5), the contact resistance between the conductor film M1 and the resistance film R1 can be suppressed.
- the coupler 1A unlike the coupler 100, since the upper surface of each thin film resistance pattern is covered with the insulating film H1, deterioration due to oxidation of the resistance film R1 in the manufacturing process can be prevented. Therefore, it is possible to reduce the variation of the resistance value of the resistance film R1 depending on the location in the substrate surface.
- the formation of the insulating film H01 and the insulating film H1 with a silicon nitride film or an alumina film also contributes to the oxidation prevention of the resistance film R1. That is, since an inorganic material such as a silicon nitride film or an alumina film has low reactivity with the resistance film R1, the oxidation of the resistance film R1 can be achieved by forming the insulating film H01 and the insulating film H1 with a silicon nitride film or an alumina film. Is suppressed.
- the insulating film H1 also has a heat dissipation effect and an ESD resistance improvement effect.
- improvement in ESD resistance means that an effect of preventing the deterioration of the resistance film R1 from proceeding due to input of static electricity can be obtained. Therefore, from this point, it can be said that according to the coupler 1A, the variation of the resistance value of the resistance film R1 depending on the location in the substrate surface can be reduced.
- the wiring width of the resistance film R1 (thin film resistance pattern) is set to a value smaller than the wiring width of the conductor film M1 (wiring pattern). Even if there is a slight shift in the width direction, the contact area between the resistance film R1 and the conductor film M1 can be maintained at a constant value.
- FIG. 7 is a plan view of a coupler 1B according to the second embodiment of the present invention.
- 8 is a vertical sectional view of the coupler 1B in the AA ′ portion of FIG. 7
- FIG. 9 is a vertical sectional view of the coupler 1B in the DD ′ portion of FIG.
- the insulating film H1 covers not only the upper surface of the resistance film R1, but also the side surface in the width direction (the direction perpendicular to the direction in which the end surfaces of the corresponding two wiring patterns face each other), and
- the insulating film H1 differs from the coupler 1A according to the first embodiment in that the insulating film H1 extends between the conductor film M1 and the resistance film R1. Since the points other than these are the same as those of the coupler 1A according to the first embodiment, the following description will focus on the differences.
- the insulating film H1 covers only the upper surface of the resistance film R1 and does not cover the side surfaces (side surfaces in the width direction), whereas in the coupler 1B, the insulating film H1 is the resistance film. It is understood that not only the upper surface of R1 but also the side surfaces (side surfaces in the width direction) are covered. Thus, in this embodiment, since the insulating film H1 covers not only the upper surface of the resistance film R1 but also the side surfaces in the width direction, deterioration due to oxidation of the resistance film R1 in the manufacturing process can be prevented more reliably.
- the insulating film H1 is also extended between the conductor film M1 and the resistance film R1.
- the upper surface of the end portion of each thin film resistor pattern (the portion in contact with the conductor film M1) is not covered with the insulating film H1. Need to design. This is because if the upper surface and the entire side surface in the width direction of the thin film resistor pattern are covered with the insulating film H1, it is impossible to suppress the contact resistance between the conductor film M1 and the resistor film R1.
- the coupler 1B according to the present embodiment has a structure in which the insulating film H1 is provided on the side surface in addition to the upper surface of each thin film resistor pattern except for the connection portion between each thin film resistor pattern and the conductor film M1. Therefore, in addition to the effect exhibited by the coupler 1A according to the first embodiment, the resistance film R1 can be more reliably prevented from being oxidized immediately after the formation of the insulating film H1. . As a result, it is possible to reduce the variation of the resistance value of the resistance film R1 depending on the location in the substrate surface.
- FIG. 10 is a plan view of a coupler 1C according to the third embodiment of the present invention.
- 11 is a vertical sectional view of the coupler 1C in the AA ′ portion of FIG. 10
- FIG. 12 is an enlarged view of the region B shown in FIG. 10
- FIG. 13 is a CC ′ portion of FIG. It is a vertical sectional view of the coupler 1C in FIG.
- the coupler 1C according to the present embodiment is different from the coupler 1B according to the second embodiment in that the insulating film H1 covers the lower surface of the conductor film M1 widely. Since the other points are the same as those of the coupler 1B according to the second embodiment, a detailed description will be given focusing on the differences.
- the insulating film H1 forms an insulating film material on the entire surface after forming each thin film resistance pattern, and this insulating film It is formed by providing a plurality of through holes in the material.
- the plurality of through holes are the through holes H111, H112, H121, H122, H131, H132, H211, H212, H221, H222, H231, and H232 shown in FIG. It is formed at a position to expose the end portion in contact with the film M1.
- the end of each thin film resistor pattern and the corresponding wiring pattern are in contact with each other inside these through holes.
- the present embodiment is exemplified by using through holes H132 and H131 (first and second through holes) corresponding to both ends of the thin film resistor pattern R13 (first resistor film pattern).
- the structure of the insulating film H1 will be described in detail. Although not mentioned below, the structure of the insulating film H1 relating to other through holes is the same.
- the through holes H132 and H131 respectively include one end R13a (first end) and the other end R13b (second end) in the x direction of the thin film resistor pattern R13. Configured to be exposed.
- a conductor film M1 constituting the wiring patterns L23 and L24 is formed as in the first and second embodiments.
- the conductor film M1 constituting the wiring pattern L23 is also formed inside the through hole H132, and therefore is in contact with one end R13a of the thin film resistor pattern R13 in the through hole H132.
- the conductor film M1 constituting the wiring pattern L24 is also formed inside the through hole H131, and is therefore in contact with the other end R13b of the thin film resistor pattern R13 in the through hole H131.
- the sizes and positions of the through holes H132 and H131 are set so that the upper surfaces of the one end R13a and the other end R13b are exposed to some extent.
- the width in the y direction (width in the width direction of the thin film resistance pattern R13) W4 of each of the through holes H132 and H131 is wider than the wiring width W3 of the thin film resistance pattern R13 and narrower than the wiring width W2 of the wiring patterns L23 and L24. Configured to be. Thereby, each edge part of thin film resistance pattern R13 is contacting the corresponding conductor film M1 by the upper surface, an end surface, and each side surface of the width direction.
- the coupler 1C according to the present embodiment also has an attenuation amount due to frequency compared to the coupler 100 (FIGS. 14 to 17) in which the entire lower surface of the conductor film M1 is covered with the resistive film R1. It becomes possible to reduce the difference.
- the end portion of the resistance film R1 thin film resistance pattern
- the conductor film M1 since the end portion of the resistance film R1 (thin film resistance pattern) is in contact with the conductor film M1 on the top surface, the end surface, and each side surface in the width direction, the conductor film M1 and It becomes possible to suppress the contact resistance of the resistance film R1.
- the coupler 1C it is possible to prevent the resistance film R1 from being oxidized immediately after the formation of the insulating film H1, as in the second embodiment. Therefore, it is possible to reduce the variation in the resistance value of the resistance film R1 within the substrate surface.
- the resistance film R1 is in contact with the entire lower surface of the conductor film M1, whereas in the coupler 1C according to the present embodiment, the opening width W4 of the through hole is larger than the width W3 of the resistance film R1 (thin film resistance pattern). Therefore, the width W3 of the resistance film R1, which is one of the factors that greatly determine the resistance value, can be limited only between the start point and the end point of each thin film resistance pattern. Therefore, according to the coupler 1C, it is possible to reduce variations in the resistance value of the contact resistance between the conductor film M1 and the resistance film R1 within the substrate surface.
- the coupler 1C since the insulating film H1 is formed using a thin film insulating film, the distance between the start point and the end point of the thin film resistor pattern, which is one of the elements that greatly determine the resistance value.
- the patterning accuracy of this distance is improved as compared with the case where the insulating film H1 is formed of a thick film insulating film. Therefore, variation in the resistance value of the resistance film R1 within the substrate surface can be reduced as compared with the case where the resistance film R1 is formed of a thick film insulating film. Furthermore, it is possible to reduce the occurrence of high-frequency loss due to the DC resistance component and parasitic inductance in each through hole.
- the insulating film H1 is widely formed under the conductor film M1, the contact area between the insulating film H1 covering the thin film resistance pattern and the insulating film H01 formed under the resistance film R1 increases. . Therefore, the adhesion between them is better than that of the coupler 1B according to the second embodiment, and the peeling of the insulating film H1 is suppressed.
- step S1 an alumina film is formed on the substrate K1 by sputtering (step S1). Then, the alumina film is flattened by CMP to form a flattened film H0 (step S2). Thereafter, an inorganic film such as alumina or silicon nitride is formed on the entire surface (step S3). Thereby, the insulating film H01 is formed.
- a resistance film R1 (thin film resistance pattern) is formed (steps S4 to S6). Specifically, first, a resistance film material that is a material of the resistance film R1 is formed on the entire surface by sputtering (step S4). Next, a photoresist is applied to the entire surface so as to cover the resistance film material, and is formed into a resist pattern (first resist pattern) in the shape of the resistance film R1 (thin film resistance pattern) by photolithography (step S5).
- step S6 the resistive film R1 (thin film resistor) Pattern) is formed.
- step S7 the photoresist is stripped (removed) (step S7).
- an insulating film H1 is formed (Steps S8 to S10). Specifically, first, a photoresist is applied, and the photoresist is left by photolithography only at a place (corresponding to the through hole portion) where the insulating film H1 is not formed (step S8).
- the resist pattern thus formed (second resist pattern) is a pattern that covers only the end portion of each thin film resistance pattern.
- an insulating film material alumina, silicon nitride, or the like
- the photoresist is peeled off to thereby form the resist pattern and the resist pattern.
- the insulating film material formed on the upper surface is removed (step S10).
- step S10 corresponds to so-called “lift-off”. Therefore, the photoresist formed in step S8 is preferably a so-called bilayer resist so that the photoresist and the insulating film material can be reliably removed in step S10.
- step S11 the entire surface is etched by reverse sputtering.
- the main purpose of this reverse sputtering is to increase the roughness of the upper surfaces of the resistance film R1 and the insulating film H1, and by performing this reverse sputtering, the resistance film R1 and the insulating film H1 formed in the steps so far, Adhesiveness with the conductor film M1 formed in the step can be improved.
- a conductor film M1 (wiring pattern) is formed (steps S12 to S15). Specifically, first, a seed electrode film (for example, a laminated film of chromium and copper or a laminated film of titanium and copper) is formed on the entire surface (step S12). Next, a photoresist is applied to the entire surface so as to cover the seed electrode film, and the photoresist is left only in a place where the conductor film M1 (wiring pattern) is not formed by photolithography (step S13). As a result, a resist pattern (third resist pattern) covering the seed electrode film is formed, and further plating with a conductive material (for example, copper) is performed (step S14).
- a seed electrode film for example, a laminated film of chromium and copper or a laminated film of titanium and copper
- a photoresist is applied to the entire surface so as to cover the seed electrode film, and the photoresist is left only in a place where the conductor film M1 (wiring
- the plated conductor thus formed is formed only between the resist patterns, and is not formed on the upper surface of the resist pattern.
- the resist pattern is removed by removing the photoresist (step S14).
- the conductor film M1 (wiring pattern) having the planar shape shown in FIG. 10 is formed.
- the exposed seed electrode film (the portion not covered with the conductive material) is removed by etching (step S15).
- the protective film I1 is formed (step S16).
- the protective film I1 made of polyimide may be formed by applying photosensitive polyimide to the entire surface and forming contact holes CH in the formation regions of the terminals T11 to T13 and T21 to T23 by photolithography. .
- terminals T11 to T13 and T21 to T23 are formed (steps S17 to S21).
- the conductor film M2 is formed by the same method as that for the conductor film M1 (steps S17 to S20).
- a plating film M3 is formed on the surface of the conductor film M2 by depositing Ni / Au by plating (step S21).
- steps S11 to T13 and T21 to T23 are formed, and all the steps are completed.
- the coupler 1C shown in FIGS. 10 to 13 can be manufactured.
- the resistance film R1 is covered with the insulating film H1 before the conductor film M1 is formed, oxidation of the resistance film R1 in the manufacturing process can be suppressed. Therefore, it is possible to prevent the resistance value of the resistance film R1 from varying depending on the location in the substrate surface.
- the coupler 1B concerning 2nd Embodiment. That is, the difference between the coupler 1C and the coupler 1B is only whether or not the insulating film H1 widely covers the lower surface of the conductor film M1 as described above. Therefore, in step S8, the portion where the photoresist is left is widened.
- the above manufacturing process can be used for manufacturing the coupler 1B.
- step S11 of the manufacturing process described above reverse sputtering is performed for the purpose of increasing the roughness of the upper surfaces of the resistance film R1 and the insulating film H1, but the film thickness at each end of the resistance film R1 corresponds. You may make it perform reverse sputtering to the grade which becomes thin gradually from the position which contacts the inner wall of a through hole to an end surface. This will be described in detail below.
- FIGS. 16A to 16E are views showing a state in the vicinity of one end R13a of the thin film resistor pattern R13 in the processes from step S8 to step S15.
- FIG. 16A shows step S8,
- FIG. 16B shows step S9
- FIG. 16C shows step S10
- FIG. 16D shows step S11
- FIG. 16E shows steps S12 to S15. Respectively. However, illustration of the seed electrode film is omitted in FIG.
- the photoresist formed in step S8 is a bilayer resist made of photoresists RG1 and RG2.
- the upper photoresist RG2 has a larger area than the lower photoresist RG1, so the photoresist remaining in the through-hole portion in step S8 is a mushroom-like resist as shown in FIG. It becomes a pattern.
- an insulating film material to be the insulating film H1 is formed in a state where such a mushroom-like resist pattern is formed (step S9), the film thickness of the portion formed on the resistance film R1 is as shown in FIG. As shown in (b), it gradually becomes thinner as it approaches the photoresist RG1. This is because the path of atoms flying from the sputtering target is blocked by the photoresist RG2.
- step S10 when the photoresists RG1 and RG2 are peeled off in step S9 (step S10), as shown in FIG. 16C, a through hole H132 is formed.
- the inner wall of the through hole H132 has a funnel shape that gradually widens upward.
- One end R13a of the thin film resistor pattern R13 is exposed at the bottom surface of the through hole H132.
- step S11 reverse sputtering is performed for a long time exceeding the degree of increasing the roughness of the upper surfaces of the resistance film R1 and the insulating film H1 (step S11).
- step S11 reverse sputtering is performed for a long time exceeding the degree of increasing the roughness of the upper surfaces of the resistance film R1 and the insulating film H1 (step S11).
- step S11 the shape of the thin film resistor pattern R13 at one end R13a extends from the position (illustrated position R13a1) in contact with the inner wall of the through hole H132 to the end face (illustrated position R13a2).
- the shape becomes gradually thinner. In short, it is tapered, but this is an effect due to the inner wall of the through hole H132 being funnel-shaped as described above.
- FIG. 16E a conductor film M1 is formed (steps S12 to S15).
- the inner wall of the through hole H132 has a funnel shape
- reverse sputtering is performed for a long time exceeding the degree of increasing the roughness of the upper surfaces of the resistance film R1 and the insulating film H1.
- the end portion of the resistance film R1 can be processed into a taper shape. In this way, the contact resistance between the conductor film M1 and the resistance film R1 can be further suppressed.
- FIG. 17 shows changes in the amount of attenuation of a current signal passing through a ⁇ -type attenuator having the same circuit configuration as the ⁇ -type attenuator configured by the thin film resistance patterns R11 to R13 shown in FIG. It is a figure shown about each of the case (Example Ex1) implement
- the vertical axis represents frequency (GHz), and the vertical axis represents attenuation (dB).
- Example Ex1 Specific materials and manufacturing methods of the ⁇ -type attenuator according to Example Ex1 and Comparative Example Ex0 are as follows. That is, for Example Ex1, first, a ferrite substrate was used as the substrate K1, and alumina was formed as the planarizing film H0 by sputtering. The surface of the planarization film H0 was planarized by CMP. As the resistance film R1, a 50 ⁇ / sq nickel chromium alloy was formed by sputtering. Patterning of the resistance film R1 was performed by producing a resist pattern by photolithography and removing the resistance film R1 other than the portion covered with the resist pattern by ion milling.
- a resist pattern was prepared by a photolithography method, an alumina film as an insulating film H1 was formed, and a through hole was formed by a lift-off method.
- the conductor film M1 copper was formed by plating.
- the protective film I1 was formed by patterning photosensitive polyimide by a photolithography method.
- the conductor film M2 copper was formed by plating, and a Ni / Au alloy was formed on the surface thereof by plating.
- a ferrite substrate was used as the substrate K1, and alumina was formed as the planarizing film H0 by a sputtering method.
- the surface of the planarization film H0 was planarized by CMP.
- As the resistance film R1 a 50 ⁇ / sq nickel chromium alloy was formed by sputtering.
- the conductor film M1 copper was formed by plating.
- the protective film I1 was formed by patterning photosensitive polyimide by a photolithography method.
- As the terminal M2 copper was formed by plating, and a Ni / Au alloy was formed on the surface by plating.
- the attenuation amount was 18.68 dB in both the example Ex1 and the comparative example Ex0 (point m3 in FIG. 17).
- the attenuation in the comparative example Ex0 is 17.39 dB (point m1 in FIG. 17)
- the attenuation in the example Ex1 is 17.56 dB (FIG. 17 points m2). That is, the difference in attenuation between 1.025 GHz and 10.0 GHz, which was 1.29 dB in Comparative Example Ex0, remains at 1.12 dB in Example Ex1, and depends on the frequency compared to Comparative Example Ex0. It is understood that the difference in attenuation is reduced.
- the present invention is not limited to the above-described embodiments, and various modifications can be made without changing the gist thereof.
- the coupler of the present invention can be applied to other electronic components such as thin film capacitors and filters other than the coupler.
- various modifications can be made without departing from the scope of the present invention.
- the insulating film H1, the insulating film H01, and the substrate K1 may be made of the same material. By carrying out like this, it becomes possible to improve the adhesiveness between these.
- Patent Document 3 the resistive film formed when the resistive element is formed in the entire area immediately below the conductor forming the main line and the sub line other than the part functioning as the resistive element remains. It becomes a structure.
- current tends to flow on the conductor surface due to the skin effect, so that a loss due to the resistance film occurs in the structure in which the resistance film remains on the entire surface immediately below the conductor forming the main line and the sub line of the coupler.
- the change in attenuation in the function of the attenuator becomes larger as the frequency range is increased.
- the resistor built-in coupler having the above structure, there is a problem in that the resistance value varies greatly within the surface of the production substrate, and the high frequency characteristics of the attenuator are different.
- one of the objects of the present invention is to reduce the variation in the high-frequency characteristics of the attenuator in a coupler having an attenuator using a resistance element.
- first line L1 includes a first line L1, a second line L2 electromagnetically coupled to the first line, and a ⁇ -type attenuator, and resistors R11, R12, and R13 are isolated on the coupling terminal T21 side.
- R21, R22, and R23 are provided on the connection terminal T22 side.
- one end of the first line L1 is connected to the input terminal T11, and the other end of the first line L1 is connected to the output terminal T12.
- One end of the second line L2 is connected to the coupling terminal T21 via the resistor R11, and the other end of the second line L2 is connected to the isolation terminal T22 via the resistor R21.
- One ends of the resistors R12, R13, R22, and R23 are connected to the ground terminal T23.
- the lengths of the lines L1 and L2 described above vary depending on the specifications of the coupler 1, and can be set to be, for example, a 1/4 wavelength ( ⁇ / 4) resonator circuit of a transmission signal to be processed.
- the signal is input to the input terminal T11 and output from the output terminal T12.
- the main current IM flows through the first line L1.
- the induced current IL based on the magnetic coupling M flows in one direction in the second line L2
- the displacement current IC based on the capacitive couplings C1 and C2 flows in the second line L2. It flows toward both sides.
- the current finally flowing through the second line L2 is the sum of the induced current IL based on the magnetic coupling M and the displacement current IC based on the capacitive couplings C1 and C2, and as a result, coincides with the direction of the induced current due to magnetic coupling.
- Current flows toward the coupling terminal T21.
- the above coupler 1 is used, for example, for output monitoring of a power amplifier (PA).
- PA power amplifier
- the input terminal T11 of the coupler 1 is connected to the output terminal of the power amplifier
- the coupling terminal T21 of the coupler 1 is connected to the input terminal of the power amplifier via the AGC detection circuit.
- the coupler 1 is used for the purpose of controlling an antenna tuner of a wireless communication device, for example.
- the input terminal T11 of the coupler 1 is connected to the output terminal of the antenna, and the coupling terminal T21 of the coupler 1 is connected to the antenna switch.
- the resistors R11, R12, R13, R21, R22, and R23 are provided as attenuators, so that stability against impedance fluctuation can be maintained.
- the coupler 1A (FIGS. 2 to 6) which is the first embodiment of the coupler 1 will be described.
- the main line L11 is connected to the terminal T11 and the terminal T12, and is disposed so as to face the sub line L21 in the same plane, and becomes a part for electromagnetic coupling.
- the sub line L21 is connected to the coupling terminal T21, the isolation terminal T22, and the ground terminal T23 through the thin film resistor patterns R11, R12, R13, R21, R22, and R23.
- a planarizing film H0 and an insulating film H01 are formed on the substrate K1.
- the insulating film H01 is not necessary when sufficient insulation can be obtained.
- Thin film resistance patterns R13 and R23 are formed on H01, and the insulating film H1 is formed so as to cover only the portions other than the connection portions of the thin film resistance patterns R13 and R23 with the conductor film M1 (wiring layer), and is covered with the insulating film H1.
- a conductor film M1 is formed on the thin film resistor patterns R13 and R23 that are not formed.
- a protective layer I1 is formed on the conductor film M1 and the insulating film H1.
- Terminals T21, T22, and T23 are formed of a laminated body of conductor film M1 and terminal M2.
- a plating film M3 is formed on the surfaces of the terminals T21, T22, and T23.
- the width W1 of the thin film resistor pattern R13 is narrower than the width W2 of the conductor film M1, and the thin film resistor pattern R13 is a conductor film in the region of the lengths X1 and X2 of the left and right side end portions and the upper surface portion. Covered by M1 and connected. Only the upper layer portion of the thin film resistor pattern R13 excluding the connection portion is covered with the insulating film H1.
- a substrate such as alumina, glass, ferrite, or aluminum nitride
- alumina may be formed by sputtering or the like and planarized by CMP, or by using spin-on glass (SOG), planarization may be obtained without performing CMP.
- the insulating film H01 for example, a silicon nitride film, an alumina film, or the like is preferable.
- the thin film resistance pattern R13 for example, tantalum nitride, nickel chrome alloy, or the like is suitable. For example, Cu, Ag, Pd, Ag—Pd, Ni, Au, etc.
- the conductor film M1 and the terminal M2 can be used for the conductor film M1 and the terminal M2, and they are formed by a method such as sputtering, vapor deposition, printing, photolithography.
- the plating film M3 for example, Ni / Au plating or Ni / Sn plating is used.
- the protective layer I1 for example, not only an inorganic insulator such as silicon nitride, aluminum oxide, or silicon dioxide, but also an organic insulator such as polyimide or epoxy resin can be used.
- the insulating film H1 excludes the connection portions between the thin film resistance patterns R11 to R13, R21 to R23 and the conductor film M1.
- the thin film resistor patterns R11 to R13 and R21 to R23 are different from the coupler 1A shown in FIG.
- the insulating film H1 is only on the thin film resistance patterns R22 and R23, whereas in the coupler 1B, the insulating film H1 is the upper surface of the thin film resistance patterns R22 and R23. Not only has the structure covering the side.
- a coupler 1C (FIGS. 10 to 13), which is the third embodiment of the coupler 1, has an insulating film H1 on the conductor film M1 at the connection start and end points of the thin film resistor patterns R11 to R13 and R21 to R23.
- the through holes H111, H112, H121, H122, H131, H132, H211, H212, H221, H222, H231, and H232 formed through use of the through holes H111, H112, H121, H122, H131, H132, H211, H212, H221, H222, H231, and H232 are different from the coupler 1B shown in FIG. .
- the insulating film H1 of the coupler 1C is also disposed on the thin film resistor patterns R13 and R23 and below the other conductor film M1 to connect the thin film resistor patterns R13 and R23 to the conductor film M1.
- Through holes H131, H132, H231, and H232 are formed in a region corresponding to the portion.
- the width of the thin film resistor pattern R13 is W3, and the through holes H131 and H132 formed by the insulating film H1 at the connection portion between the thin film resistor pattern R13 and the conductor film M1 are formed on the thin film resistor pattern R13.
- the opening width is larger than the width W3.
- the insulating film H01 and the insulating film H1 may be formed of the same material as the substrate surface.
- the couplers 1B and 1C configured as described above will be referred to as a fourth embodiment.
- the present embodiment (first to fourth embodiments) has the following effects.
- the thin film resistor pattern R1 exists on the entire lower surface of the conductor film M1, and is in contact with the entire lower surface of the conductor film M1, so that the high frequency In the region, the current flowing through the conductor film M1 also flows intensively to the thin film resistance pattern R1 below the conductor film M1 due to the skin effect, causing a high frequency loss.
- the thin film resistance patterns R11 to R13, R21 to R23 and the conductor film M1 are formed of the thin film resistance pattern.
- the insulating film H1 has an effect of preventing the progress of the deterioration of the thin film resistance pattern due to the heat dissipation effect and the improvement of the ESD resistance in addition to protecting the deterioration of the thin film resistance pattern such as oxidation.
- the coupler 100 (FIGS. 18 to 21) according to the background art of the present invention has a structure in which the thin film resistor pattern is in contact with the entire lower surface of the conductor film M1, whereas the second embodiment of the present invention.
- the coupler 1B according to FIG. 7 has an insulating film on the side surfaces in addition to the upper surfaces of the thin film resistor patterns R11 to R13 and R21 to R23 excluding the connection portion between the thin film resistor pattern and the conductor film M1.
- H1 has a certain structure.
- the thin film resistor patterns R11 to R13 and R21 to R23 can more easily prevent the influence of oxidation or the like immediately after the formation of the insulating film H1 than in the first embodiment, and the variation of the resistance value of the thin film resistor pattern can be reduced. Can be small.
- the coupler 100 (FIGS. 18 to 21) according to the background art of the present invention has a structure in which a thin film resistance pattern is in contact with the entire lower surface of the conductor film M1, whereas the third embodiment of the present invention.
- the coupler 1C according to FIG. 13 has a structure in which the opening widths of H222, H231, and H232 are formed large. Therefore, the width W3 of the thin film resistor patterns R11 to R13 and R21 to R23, which is one of the factors that greatly determine the resistance value, is limited to only between the start and end points of the thin film resistor patterns R11 to R13 and R21 to R23. Therefore, variations in resistance values of the thin film resistor patterns R11 to R13 and R21 to R23 can be reduced.
- the insulating film H1 is formed by using a thin film insulating film, the distance between the start and end through-holes of the thin film resistor patterns R11 to R13 and R21 to R23, which is one of the factors that greatly determine the resistance value.
- the patterning accuracy of the thin film resistor patterns R11 to R13 and R21 to R23 can be reduced in the substrate surface as compared with the thick film insulating film. Furthermore, it is possible to reduce the occurrence of high-frequency loss of DC resistance components and parasitic inductance in the through holes H111, H112, H121, H122, H131, H132, H211, H212, H221, H222, H231, and H232.
- the insulating film H1 is also formed below the main line L11 and the sub line L12, the insulating film H1 covering the thin film resistor patterns R11 to R13 and R21 to R23 and the insulating film formed below the thin film resistor pattern Since the contact area with H01 is increased, the adhesion is improved as compared with the coupler 1B according to the second embodiment, and the insulating film H1 can be prevented from peeling off.
- the coupler 100 (FIGS. 18 to 21) according to the background art of the present invention has a structure in which a thin film resistor pattern is in contact with the entire lower surface of the conductor film M1, whereas the fourth embodiment of the present invention.
- the insulating film H01 and the insulating film H1 are formed of the same material as that of the substrate surface, so that the adhesion between the insulating film H01, the insulating film H1, and the substrate surface does not have a thin film resistance pattern. It can be the same level as when.
- the insulating film H01 and the insulating film H1 are formed of an inorganic material having a low reactivity with the thin film resistance pattern such as alumina or silicon nitride, thereby suppressing the influence of oxidation of the thin film resistance pattern and the resistance value variation within the substrate surface. Can be kept small.
- ferrite is used for the substrate K1
- alumina is formed as the planarizing film H0 by sputtering, and planarized by CMP.
- the thin-film resistance pattern was formed by forming a pattern of 50 ⁇ / sq nickel chromium alloy by sputtering and then by photolithography, and removing the portions other than the pattern by ion milling. After producing a pattern by the photolithography method, an alumina film is formed as the insulating film H1, a through hole is formed by the lift-off method, and the conductor film M1 and the thin film resistance patterns R13 and R23 are connected.
- the conductor film M1 As the conductor film M1, a pattern was produced by photolithography, and copper was formed by plating.
- the protective layer I1 was formed by patterning photosensitive polyimide by photolithography.
- a pattern was produced by photolithography, copper was formed by plating, and a Ni / Au alloy was formed on the surface by plating.
- ferrite was used for the substrate K1, alumina was formed as the flattening film H0 by sputtering, and flattened by CMP.
- the thin film resistance pattern R1 was formed by sputtering a nickel chrome alloy of 50 ⁇ / sq by sputtering, forming a pattern by photolithography as the conductor film M1, and forming copper by plating.
- the protective layer I1 was formed by patterning photosensitive polyimide by photolithography.
- a pattern was produced by photolithography, copper was formed by plating, and a Ni / Au alloy was formed on the surface by plating.
- FIG. 17 shows the frequency characteristics of the attenuator for the structures of the coupler 1C and the coupler 100 produced as described above.
- An ideal attenuator does not have frequency characteristics but exhibits a certain amount of attenuation.
- Comparative Example Ex0 it changed to 17.39 dB at 10 GHz, and there was a problem in use.
- Example Ex1 it was 17.56 dB at 10 GHz, which was an improvement of about 0.2 dB.
- the frequency characteristics of the attenuator can be improved as compared with the conventional product, and the size and thickness can be reduced. Since it is possible to reduce the size and thickness while maintaining the required characteristics of the coupler, in particular, it is widely used in wireless communication devices, devices, modules, and systems that are required to be reduced in size, as well as equipment including them, and also in their manufacture. It is possible to apply.
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Abstract
Description
(第1の実施の形態)
(第2の実施の形態)
(第3の実施の形態)
CH コンタクトホール
H0 平坦化膜
H01 絶縁膜
H1 絶縁膜
H111,H112,H121,H122,H131,H132,H211,H212,H221,H222,H231,H232 スルーホール
I1 保護膜
K1 基板
L1 第1線路
L11,L21~L25 配線パターン
L2 第2線路
M1,M2 導体膜
M3 メッキ膜
R1 抵抗膜
R11~R13,R21~R23 抵抗(薄膜抵抗パターン)
RG1,RG2 フォトレジスト
T11 入力端子
T12 出力端子
T13,T23 グランド端子
T21 カップリング端子
T22 アイソレーション端子
Claims (10)
- 基板と、
それぞれ前記基板上に設けられた入力端子及び出力端子と、
前記基板上に設けられ、一端が前記入力端子に、他端が前記出力端子にそれぞれ接続された主線路と、
それぞれ前記基板上に設けられた導体膜及び抵抗膜を含み、前記導体膜の一部で前記主線路と電磁気的に結合する副線路とを備え、
前記導体膜は、第1及び第2の配線パターンを有し、
前記抵抗膜は、前記第1の配線パターンと前記基板との間に嵌入するように配置された第1の端部と、前記第2の配線パターンと前記基板との間に嵌入するように配置された第2の端部とを含む第1の抵抗膜パターンを有し、
前記第1及び第2の端部はそれぞれ、少なくとも上面及び端面で前記導体膜に接触する
ことを特徴とするカプラ。 - 前記抵抗膜を覆うように形成された絶縁膜をさらに備え、
前記絶縁膜は、それぞれ前記第1及び第2の端部を露出させる第1及び第2のスルーホールを有し、
前記抵抗膜と前記導体膜とは、前記第1及び第2のスルーホールの内部で互いに接触する
ことを特徴とする請求項1に記載のカプラ。 - 前記第1の抵抗膜パターンは、前記第1及び第2のスルーホールそれぞれの内壁と接触する位置から、対応する端面にかけて、徐々に膜厚が薄くなるよう構成される
ことを特徴とする請求項2に記載のカプラ。 - 前記第1の抵抗膜パターンは第1の方向に延伸する直線状のパターンであり、
前記第1の抵抗膜の前記第1の方向と直交する第2の方向の幅は、前記第1及び第2のスルーホールそれぞれの前記第2の方向の幅より小さい
ことを特徴とする請求項2に記載のカプラ。 - 基板と、
それぞれ前記基板上に設けられた導体膜及び抵抗膜を含む配線とを備え、
前記導体膜は、第1及び第2の配線パターンを有し、
前記抵抗膜は、前記第1の配線パターンと前記基板との間に嵌入するように配置された第1の端部と、前記第2の配線パターンと前記基板との間に嵌入するように配置された第2の端部とを含む第1の抵抗膜パターンを有し、
前記第1及び第2の端部はそれぞれ、少なくとも上面及び端面で前記導体膜に接触する
ことを特徴とする電子部品。 - 第1及び第2の端部を含む第1の抵抗膜パターンを有する抵抗膜を形成する工程と、
前記抵抗膜を形成した後、前記第1及び第2の端部の上面を除く前記第1の抵抗膜パターンの上面を覆い、かつ、前記第1及び第2の端部を露出させる絶縁膜を形成する工程と、
前記絶縁膜を形成した後、それぞれ前記第1及び第2の端部を覆う第1及び第2の配線パターンを有する導体膜を形成する工程と、
底面に前記導体膜が露出したコンタクトホールを有する保護膜を成膜する工程と、
前記コンタクトホールを介して前記導体膜と接触する端子を形成する工程と
を備えることを特徴とする電子部品の製造方法。 - 前記絶縁膜を形成する工程は、
前記第1及び第2の端部を覆う第2のレジストパターンを形成する工程と、
前記第2のレジストパターンを覆う絶縁膜材料を成膜する工程と、
前記第2のレジストパターン及び該第2のレジストパターンの上面に形成された前記絶縁膜材料を除去する工程とを有する
ことを特徴とする請求項6に記載の電子部品の製造方法。 - 前記絶縁膜を形成した後に逆スパッタを行うことにより、露出した前記第1及び第2の端部の一部分を除去する工程
をさらに備えることを特徴とする請求項7に記載の電子部品の製造方法。 - 前記抵抗膜を形成する工程は、
抵抗膜材料を成膜する工程と、
前記抵抗膜材料を覆う第1のレジストパターンを形成する工程と、
前記第1のレジストパターンをマスクとして前記抵抗膜材料をエッチングする工程と、
前記第1のレジストパターンを除去する工程とを有する
ことを特徴とする請求項6に記載の電子部品の製造方法。 - 前記導体膜を形成する工程は、
シード電極膜を成膜する工程と、
前記シード電極膜を覆う第3のレジストパターンを形成する工程と、
メッキにより、前記第3のレジストパターンの間に導体膜材料を成膜する工程と、
前記第3のレジストパターンを除去する工程と、
前記シード電極膜のうち前記導体膜材料に覆われていない部分を除去する工程とを有する
ことを特徴とする請求項6に記載の電子部品の製造方法。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110061337A (zh) * | 2019-05-06 | 2019-07-26 | 云南大学 | 基于封装型集成基片间隙波导的定向耦合器 |
JP2022525314A (ja) * | 2019-03-13 | 2022-05-12 | キョーセラ・エイブイエックス・コンポーネンツ・コーポレーション | 広帯域性能を有するコンパクトな薄膜表面実装可能結合器 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6230248B2 (ja) * | 2013-03-29 | 2017-11-15 | 三菱電機株式会社 | 方向性結合器 |
KR101686989B1 (ko) | 2014-08-07 | 2016-12-19 | 주식회사 모다이노칩 | 파워 인덕터 |
KR101662208B1 (ko) | 2014-09-11 | 2016-10-06 | 주식회사 모다이노칩 | 파워 인덕터 및 그 제조 방법 |
US10826152B2 (en) | 2017-08-29 | 2020-11-03 | Analog Devices, Inc. | Broadband radio frequency coupler |
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CN114792876B (zh) * | 2021-01-25 | 2024-04-02 | 南京以太通信技术有限公司 | 介质滤波器的制作方法及其电极制作方法 |
CN113922029A (zh) * | 2021-10-09 | 2022-01-11 | 苏州市新诚氏通讯电子股份有限公司 | 一种基于铁氧体的薄膜微波衰减片 |
CN113904079A (zh) * | 2021-10-09 | 2022-01-07 | 苏州市新诚氏通讯电子股份有限公司 | 一种基于铁氧体的薄膜微波耦合片负载 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01158763A (ja) * | 1987-12-15 | 1989-06-21 | Fujitsu Ltd | 終端抵抗内蔵集積回路 |
JPH01179353A (ja) * | 1987-12-30 | 1989-07-17 | Nec Corp | 混成集積回路の製造方法 |
JP2004014834A (ja) * | 2002-06-07 | 2004-01-15 | Mitsubishi Electric Corp | 印刷抵抗付きマイクロ波回路 |
JP2009044303A (ja) * | 2007-08-07 | 2009-02-26 | Panasonic Corp | アッテネータ複合カプラ |
JP2010003934A (ja) * | 2008-06-20 | 2010-01-07 | Fujitsu Ltd | キャパシタの製造方法、構造体、及びキャパシタ |
JP2012023661A (ja) * | 2010-07-16 | 2012-02-02 | Hitachi Maxell Energy Ltd | 平面アンテナ及びその製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6342681B1 (en) * | 1997-10-15 | 2002-01-29 | Avx Corporation | Surface mount coupler device |
JP2001036310A (ja) * | 1999-07-23 | 2001-02-09 | Nec Corp | 180度移相器 |
JP4817023B2 (ja) | 2008-12-16 | 2011-11-16 | Tdk株式会社 | 終端抵抗体 |
US7961064B2 (en) * | 2009-01-30 | 2011-06-14 | Tdk Corporation | Directional coupler including impedance matching and impedance transforming attenuator |
JP5472718B2 (ja) | 2009-11-30 | 2014-04-16 | Tdk株式会社 | カプラ |
US8525614B2 (en) * | 2009-11-30 | 2013-09-03 | Tdk Corporation | Coupler |
JP5472717B2 (ja) | 2009-11-30 | 2014-04-16 | Tdk株式会社 | カプラ |
WO2011102187A1 (ja) * | 2010-02-19 | 2011-08-25 | 株式会社村田製作所 | 方向性結合器 |
-
2013
- 2013-02-22 US US14/372,013 patent/US9263786B2/en active Active
- 2013-02-22 CN CN201380011244.3A patent/CN104145367B/zh active Active
- 2013-02-22 JP JP2014502175A patent/JP6015742B2/ja active Active
- 2013-02-22 WO PCT/JP2013/054513 patent/WO2013129251A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01158763A (ja) * | 1987-12-15 | 1989-06-21 | Fujitsu Ltd | 終端抵抗内蔵集積回路 |
JPH01179353A (ja) * | 1987-12-30 | 1989-07-17 | Nec Corp | 混成集積回路の製造方法 |
JP2004014834A (ja) * | 2002-06-07 | 2004-01-15 | Mitsubishi Electric Corp | 印刷抵抗付きマイクロ波回路 |
JP2009044303A (ja) * | 2007-08-07 | 2009-02-26 | Panasonic Corp | アッテネータ複合カプラ |
JP2010003934A (ja) * | 2008-06-20 | 2010-01-07 | Fujitsu Ltd | キャパシタの製造方法、構造体、及びキャパシタ |
JP2012023661A (ja) * | 2010-07-16 | 2012-02-02 | Hitachi Maxell Energy Ltd | 平面アンテナ及びその製造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022525314A (ja) * | 2019-03-13 | 2022-05-12 | キョーセラ・エイブイエックス・コンポーネンツ・コーポレーション | 広帯域性能を有するコンパクトな薄膜表面実装可能結合器 |
JP7425084B2 (ja) | 2019-03-13 | 2024-01-30 | キョーセラ・エイブイエックス・コンポーネンツ・コーポレーション | 広帯域性能を有するコンパクトな薄膜表面実装可能結合器 |
CN110061337A (zh) * | 2019-05-06 | 2019-07-26 | 云南大学 | 基于封装型集成基片间隙波导的定向耦合器 |
CN110061337B (zh) * | 2019-05-06 | 2023-10-27 | 云南大学 | 基于封装型集成基片间隙波导的定向耦合器 |
Also Published As
Publication number | Publication date |
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JPWO2013129251A1 (ja) | 2015-07-30 |
US20140375395A1 (en) | 2014-12-25 |
CN104145367A (zh) | 2014-11-12 |
CN104145367B (zh) | 2016-08-24 |
US9263786B2 (en) | 2016-02-16 |
JP6015742B2 (ja) | 2016-10-26 |
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