WO2013046854A1 - ブラスト加工装置及びブラスト加工方法 - Google Patents

ブラスト加工装置及びブラスト加工方法 Download PDF

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Publication number
WO2013046854A1
WO2013046854A1 PCT/JP2012/067558 JP2012067558W WO2013046854A1 WO 2013046854 A1 WO2013046854 A1 WO 2013046854A1 JP 2012067558 W JP2012067558 W JP 2012067558W WO 2013046854 A1 WO2013046854 A1 WO 2013046854A1
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Prior art keywords
slurry
blasting
liquid
stirring
tank
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PCT/JP2012/067558
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English (en)
French (fr)
Japanese (ja)
Inventor
幸徳 鈴木
一路 日比野
陽一郎 平塚
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新東工業株式会社
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Application filed by 新東工業株式会社 filed Critical 新東工業株式会社
Priority to JP2013535998A priority Critical patent/JP6020456B2/ja
Priority to KR1020137030232A priority patent/KR101882000B1/ko
Priority to CN201280026463.4A priority patent/CN103596728A/zh
Publication of WO2013046854A1 publication Critical patent/WO2013046854A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C7/00—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts
    • B24C7/0007—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier
    • B24C7/003—Equipment for feeding abrasive material; Controlling the flowability, constitution, or other physical characteristics of abrasive blasts the abrasive material being fed in a liquid carrier with means for preventing clogging of the equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C3/00—Abrasive blasting machines or devices; Plants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
    • B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material

Definitions

  • the present invention relates to a blasting apparatus and a blasting method for performing a blasting process by spraying a slurry in which an injection material (abrasive) is dispersed in a liquid toward a workpiece together with a high-pressure gas.
  • Blasting is conventionally used for deburring, scale removal, surface roughness adjustment, thin film layer removal, fine processing such as etching, and the like.
  • dry blasting is generally used in which an injection material such as fine particles and shots is jetted onto a workpiece from a blasting nozzle together with a high-pressure gas such as compressed air.
  • wet blasting is also known, in which a slurry in which an injection material such as fine particles and shot is dispersed in a liquid such as water is jetted from a blasting nozzle to a workpiece together with a high-pressure gas such as compressed air.
  • Wet blasting has the advantages of less spraying of dust and dust generated by blasting and less sticking of spraying to the surface of the workpiece after processing compared to dry blasting. From the viewpoint of the working environment, it is predicted that the opportunity for adopting wet blasting will increase.
  • the concentration of the slurry sent to the blasting nozzle be constant regardless of the processing time.
  • the propellant generally has a higher specific gravity than the liquid, the propellant in the slurry settles and accumulates at the bottom of the slurry tank. As a result, the concentration of the slurry sent to the blasting nozzle decreases as the processing time elapses.
  • JP-A 63-156660 has proposed a system for stirring in a slurry tank.
  • the propellant can quickly wear out the slurry pump, leading to failure.
  • Another factor that decreases the concentration of the slurry sent to the blasting nozzle as the machining time elapses is wear of the spray material due to blasting.
  • the injection material that has collided with the workpiece is cracked or chipped by the impact, and a part of the material has a shape and size that are not suitable for blasting. Since such a spray material is generally removed by a classifier such as a liquid cyclone, the slurry concentration in the slurry tank is lowered, and the concentration of the slurry sent to the blasting nozzle is lowered.
  • the concentration of the slurry sent to the blasting nozzle can be stabilized by periodically replenishing with a new injection material.
  • the burden on the worker increases or equipment for input is required.
  • the blasting process is provided with a mechanism capable of performing stable processing without changing the concentration of the slurry sent from the slurry tank to the blasting nozzle over time.
  • An apparatus and a blasting method are provided.
  • the blasting apparatus and the blasting process refer to a wet blasting apparatus and a wet blasting process unless otherwise specified.
  • a first invention is a blasting nozzle for injecting a slurry in which a propellant is dispersed in a liquid together with a high-pressure gas onto a workpiece, and is disposed below the blasting nozzle for storing the slurry.
  • a liquid storage tank for storing a stirring liquid for dispersing the spray material deposited on the bottom of the slurry tank, wherein the slurry tank has a slurry stirring mechanism.
  • the slurry agitating mechanism is disposed in the slurry suction tube having a cylindrical lower end opened at the lower end and at least the lower end immersed in the slurry, and the tip is immersed in the slurry.
  • An agitation liquid introduction pipe, and the slurry suction pipe is connected to the blasting nozzle via a slurry pump, and the agitation liquid introduction pipe is connected to the liquid storage tank via a liquid feed pump. It is connected, characterized by injecting the liquid to be mixed towards the injection material deposited on the bottom of the slurry tank. By spraying the stirring liquid toward the spray material deposited on the bottom of the slurry tank, the spray material can be lifted and dispersed. Stable blasting can be performed by sending this to the blasting nozzle. Further, when circulating the slurry as in the known art to disperse the injection material, a flow rate control mechanism (valve or the like) for controlling the flow rate is required in the path (Japanese Patent Laid-Open No.
  • a second invention is the blasting apparatus according to the first invention, characterized in that the upper end of the slurry suction pipe is closed and the stirring liquid introduction pipe passes through the upper end. Thereby, a slurry stirring mechanism having a simple structure can be provided.
  • a third invention is the blasting apparatus according to the first or second invention, wherein the blasting apparatus removes particles unsuitable for blasting from the slurry together with the liquid, and is removed by the sorting mechanism. And a separation mechanism for separating the liquid from the liquid, and the stirring liquid uses the liquid separated by the separation mechanism.
  • the liquid separated by the separation mechanism is originally a slurry liquid. By using this as the stirring liquid, the amount of liquid in the slurry is not greatly changed by stirring. Thereby, the trouble of adjusting the amount of slurry liquid with the lapse of the blasting time can be greatly reduced.
  • a fourth invention is a blasting method using the blasting apparatus according to the first or second invention, and a step of injecting slurry together with a high-pressure gas from the blasting nozzle toward a workpiece; A step of flowing the slurry sprayed from the blasting nozzle into the slurry tank, and spraying the stirring liquid from the lower end of the stirring liquid introduction pipe toward the spray material deposited on the bottom of the slurry tank. A dispersion step of dispersing the spray material in the vicinity of a lower end portion of the slurry suction pipe, and a slurry in which the spray material is dispersed by the dispersion step is sucked from the lower end portion of the slurry suction pipe through the slurry pump.
  • a suction step for feeding to the blasting nozzle By injecting the agitation liquid introduced from the agitation liquid introduction pipe toward the propellant deposited on the bottom of the slurry tank, and raising the propellant accumulated on the bottom of the slurry tank, near the lower end of the slurry suction pipe In the slurry, the spray material is evenly dispersed.
  • the injection pressure so that the concentration of the slurry near the lower end is always constant and spraying the stirring liquid continuously or intermittently, the concentration of the slurry sent to the blasting nozzle is always constant, Stable blasting can be performed.
  • an excessive amount of the injection material is put into the slurry tank, settled and deposited on the bottom of the slurry tank, and only a part of the deposited injection material is raised, so that the injection material is blasted during the blasting process.
  • the slurry concentration in the vicinity of the suction pipe can be kept constant over a long period of time without being additionally supplied.
  • a fifth invention is the blasting method according to the fourth invention, wherein the concentration of the slurry in the vicinity of the lower end of the slurry suction pipe is adjusted by adjusting the jetting force of the stirring liquid. And Since the amount of the spray material that rises in accordance with the jetting force of the stirring liquid changes, the concentration of the slurry sent to the blasting nozzle can be adjusted by adjusting the jetting force of the stirring liquid. That is, by adjusting the jetting power (jetting pressure or jetting quantity or jetting speed) of the stirring liquid, the blasting capability can be adjusted, and stable blasting can be performed as described above.
  • the classification apparatus of this invention is not limited to the form as described in embodiment, It can change suitably as needed.
  • the left-right and up-down direction as described in this embodiment points out the direction in a figure unless there is particular notice.
  • FIG. 1 the structure of the blasting apparatus 20 of this invention is shown.
  • a slurry tank 22 for storing the slurry S is disposed below the blasting chamber 21 in which the blasting nozzle 23 is disposed.
  • the slurry S is composed of a liquid (in this embodiment, water) and a propellant, and the propellant is dispersed in the liquid.
  • the slurry S in the slurry tank 22 is sucked by the slurry pump P2 and sent to the blasting nozzle 23.
  • the spray material settles and accumulates at the bottom of the slurry tank 22. Therefore, a slurry agitating mechanism 10 having a function of dispersing the deposited propellant and sucking the slurry S in which the propellant is dispersed is disposed in the slurry tank 22, and is supplied to the blasting nozzle 23 via the slurry pump P2. Connected.
  • the slurry agitating mechanism 10 includes a cylindrical suction pipe 11 having an upper end closed by a top plate and an open lower end (cylindrical in this embodiment), and an inner diameter of the slurry suction pipe 11.
  • a stirring liquid introduction pipe 12 having a small cylindrical shape (in this embodiment, a cylindrical shape) having both ends opened.
  • a cylindrical slurry suction member 13 is connected to the upper portion of the side wall of the slurry suction tube 11, and a space is formed between the inside of the slurry suction tube 11 and the inside of the slurry suction member 13. Yes.
  • the stirring liquid introduction pipe 12 passes through the top plate of the slurry suction pipe 11 and one end thereof is disposed inside the slurry suction pipe 11.
  • the position of the lower end portion of the end face in the drawing is not particularly limited as long as it is disposed inside the slurry suction tube 11, but in this embodiment, it is substantially the same as the lower end portion of the slurry suction tube 11 and crosses the slurry suction tube 11. It arrange
  • the slurry stirring mechanism 10 is disposed in the vicinity of the bottom of the slurry tank 22 with the lower end directed toward the bottom of the slurry tank 22.
  • a liquid feed pump P3 is connected to the upper end portion of the stirring liquid introduction pipe 12 via a hose, and further connected to a liquid storage tank via a hose.
  • the stirring liquid L is stored, and the stirring liquid L is sent to the slurry stirring mechanism 10 and sprayed toward the injection material P deposited on the bottom of the slurry tank 22 to thereby inject the injection material P. Can be raised.
  • the jetting material P that has precipitated is adjusted by adjusting the jetting force of the stirring liquid, that is, the jetting pressure or jetting amount or jetting speed of the stirring liquid L. Only a part of can be raised.
  • the slurry S in which the spray material P is uniformly dispersed is sent to the blasting nozzle 23 via the suction member 13, the hose, and the slurry pump P2.
  • the injection material P is uniformly dispersed in the vicinity of the lower end portion of the slurry agitating mechanism 10, that is, in the vicinity of the lower end portion of the slurry suction pipe 11.
  • the slurry suction member 13 is connected to a slurry pump P2 via a hose, and further connected to a blasting nozzle 23 via a hose.
  • the slurry S in which the spray material P is dispersed by the stirring liquid L is sucked from the lower end portion of the slurry suction pipe 11 by the suction force of the slurry pump P2, and sent to the blasting nozzle 23.
  • the slurry S sent to the blasting nozzle 23 is mixed with a high-pressure gas (compressed air in this embodiment) sent from an external high-pressure gas generation source C, and is mixed with the workpiece W as a solid-gas-liquid three-phase flow. It is injected towards.
  • the propellant has a low sedimentation property
  • the sedimentation property is too large, it is difficult to rise with only the jetting force of the stirring liquid L, or there is a possibility that the suction by the slurry pump P2 may be hindered.
  • the propellant is preferably selected from the range of an average particle diameter of 50 to 1000 ⁇ m (desirably 100 to 500 ⁇ m) and a specific gravity of 1.2 to 9.0 (desirably 2.5 to 8.0).
  • the material of the injection material is not particularly limited, and it is processed from the injection material generally used in blasting, such as ferrous or non-ferrous shots, grids, cut wires, pulverized products, ceramics, resins, plants, etc. It can be appropriately selected according to the purpose.
  • the lower end portion of the slurry agitating mechanism 10 is preferably disposed while the injection material P is settled and accumulated.
  • the ratio (h 1 / h 2 : hereinafter referred to as “height ratio”) of the distance h 2 from the bottom of the slurry tank 22 at the height h 1 where the propellant P is deposited to the lower end of the slurry stirring mechanism 10 is: It is preferable to select from 1.0 to 5.0 (preferably 1.1 to 3.0). If the height ratio is too small, the injection force of the stirring liquid L is dispersed in the surrounding slurry S and is not sufficiently transmitted to the injection material P, so that the dispersion of the injection material P is hindered.
  • the injection material P in the vicinity of the lower end of the slurry agitating mechanism 10 is solidified (consolidated) between the injection materials P due to the weight of the injection material P itself, so that the injection material P is raised only by the injection force of the stirring liquid L. It becomes difficult to make it.
  • Ratio of the flow velocity v 1 of the stirring liquid L injected from the stirring liquid introduction tube 12 to the flow velocity v 2 of the slurry S sucked from the slurry suction tube 11 (v 1 / v 2 : hereinafter referred to as “flow rate ratio”) Is preferably selected from the range of 1.0 to 10.0 (preferably 1.5 to 4.0).
  • the ratio of the flow rate q 1 of the stirring liquid L injected from the stirring liquid introduction pipe 12 to the flow rate q 2 of the slurry S sucked from the slurry suction pipe 11 (q 1 / q 2 : hereinafter referred to as “flow ratio”) Is selected from the range of 0.1 to 1.0 (preferably 0.3 to 0.9), and the pressure p 1 of the stirring liquid L injected from the stirring liquid introduction pipe 12 and the slurry suction pipe 11 are selected.
  • the ratio of the slurry S to be sucked to the pressure p 2 (p 1 / p 2 : hereinafter referred to as “pressure ratio”) is 1.0 to 5.0 (preferably 1.0 to 2.0). It is preferable to select from a range.
  • the slurry S in which the spray material P is uniformly dispersed in the vicinity of the lower end of the slurry suction pipe 11 is sucked by appropriately selecting the flow rate v 2 or flow rate q 2 of the slurry S according to the flow rate v 1 of the stirring liquid L. . If the flow rate v 2 or flow rate q 2 of the slurry S sucked from the slurry suction pipe 11 is too large with respect to the flow rate V 1 or flow rate q 1 of the stirring liquid L, dispersion of the injection material P by the stirring liquid L is inhibited, If it is too small, the spray material P starts to settle before it is sucked, and the concentration of the slurry S decreases. That is, by setting the flow rate ratio or flow rate ratio within the above range, the slurry S can be sucked in a stable state without changing the concentration of the slurry S.
  • the slurry stirring mechanism 10 of this embodiment can lift only a part of the injection material P deposited on the bottom. Therefore, the slurry S having a constant concentration can be sent to the blasting nozzle 23 regardless of the blasting time, so that stable blasting can be performed. Moreover, it is not necessary to replenish the injection material P during operation by supplying sufficient injection material P to the slurry tank 22 in accordance with the operation time of the blast processing apparatus 20.
  • sucked by adjusting the injection force of the stirring liquid L can be adjusted.
  • concentration of the slurry S to be sucked can be increased, and by decreasing the injection force, the concentration of the slurry S to be sucked can be decreased.
  • the processing capability of blast processing is increased. Therefore, the processing capability of blasting can be adjusted by adjusting the jetting force of the stirring liquid L.
  • the processing capacity can be adjusted by raising only a part of the injection material P deposited on the bottom of the slurry tank 22, the concentration of the slurry S that satisfies the required processing capacity is adjusted and the concentration is adjusted. It can be sent to the blasting nozzle 23 in a constant manner.
  • the slurry S sprayed from the blasting nozzle 23 collides with the workpiece W and is then returned to the slurry tank 22. At this time, the spray material in which cracks and chips are generated by colliding with the workpiece W, the cutting powder of the workpiece W generated by blasting, and the like are also sent to the slurry tank 22. Normally, blasting is used many times by circulating an injection material. Among the above-mentioned injection materials in which cracks and chips are generated, there are injection materials having a size that is not suitable for blasting.
  • the sorting mechanism 24 sorts the reusable spray material and other particles.
  • the selected reusable spray material is returned to the slurry tank 22.
  • the non-reusable spray material, the cutting powder of the workpiece, and the like are sent to the separation mechanism 25 together with the liquid, and are separated into solid matter (sludge) D and liquid by the separation mechanism 25.
  • the sludge D is stored in the sludge tank 27.
  • the separated liquid is sent to the liquid storage tank 26 and used as the stirring liquid L.
  • the separation mechanism 25 can be appropriately selected from known methods such as sieving, centrifugal separation, thickener, filter press, magnetic sorting, and the like.
  • the liquid discharged from the sorting mechanism 24 as the stirring liquid L, there is no significant difference in the amount of liquid in the entire path, and the liquid is transferred to the slurry tank 22 while the blasting apparatus 20 is in operation. There is no need to refill and adjust the amount of liquid.
  • the slurry suction pipe 11 in the present embodiment uses a cylinder having the same cross section continuously from the ceiling surface toward the bottom, but may have a shape in which the area of the cross section increases toward the bottom.
  • the injection material P dispersed by the stirring liquid L can be efficiently sucked.
  • the height position of the bottom of the stirring liquid introduction pipe 12 is substantially the same as the height position of the bottom of the slurry suction pipe 11, but is higher than the height position of the bottom of the slurry suction pipe 11. You may arrange. By changing the height position of the stirring liquid introduction pipe 12, the concentration of the slurry S to be sucked can be finely adjusted.
  • a concentration meter is arranged in the middle of the path from the slurry pump P2 to the blasting nozzle 23, and the flow velocity v 1 , the flow rate q 1 , the pressure p 1 , and the slurry suction pipe of the stirring liquid L based on the measurement result by the concentration meter
  • the flow rate v 2 , the flow rate q 2 , and the pressure p 2 of the slurry S sucked from 11 may be controlled to adjust the concentration of the slurry S sent to the blasting nozzle 23.
  • the slurry tank 22 is replenished with the reduced amount of liquid. In this case, they may be replenished continuously or collectively at regular intervals. In the latter case, the flow rate v 1 , the flow rate q 1 , the pressure p 1 , and the flow rate v 2 , the flow rate q 2 , and the pressure p 2 of the slurry S sucked from the slurry suction pipe 11 are controlled, You may adjust the density
  • a T-shaped branch pipe is arranged in the path from the pump P2 to the blasting nozzle 23, and a valve is connected to one end so that the slurry immediately before the blasting nozzle 23 can be collected. .
  • An iron grid (GH-3 [manufactured by Shinto Kogyo Co., Ltd.]: average particle size: 300 ⁇ m, specific gravity: 7.7) is used as the propellant, and it is put into the slurry tank 22 together with water so that it becomes 50% by volume of the entire slurry. did.
  • the pump P1 was operated to remove particles unsuitable for blasting from the slurry S, and the pump P3 was operated to inject the stirring liquid L from the stirring liquid introduction pipe 12. Further, the pump P2 and the high pressure gas generation source C were operated, and the slurry S was sent to the blasting nozzle 23 and injected from the injection port of the blasting nozzle 23 toward the iron plate material.
  • the injection pressure of the slurry S was 0.4 MPa.
  • the stirring liquid introduction pipe 12 was arranged and operated under the conditions shown in Table 1. After injection of the slurry S, the valve was opened after 5 minutes and 4 hours to collect the slurry S. The concentration of the collected slurry was measured by measuring the amount of solid content in the slurry by a loss on drying method by heating at 105 ° C. and dividing by volume. By dividing the slurry concentration (A) after 4 hours by the slurry concentration (B) after 5 minutes, the rate of change in concentration over time ((1-B / A) ⁇ 100) was calculated and evaluated. In the evaluation, the density change rate was evaluated as ⁇ when less than 1%, ⁇ when 1.0% or more and less than 5.0%, and ⁇ when 5.0% or more.
  • the concentration of the slurry S sent to the blasting nozzle 23 can be adjusted by changing the height ratio, flow rate ratio, flow rate ratio, and pressure ratio.
  • concentration 4 hours after an injection with respect to 5 minutes after an injection became (double-circle) evaluation and (circle) evaluation in any conditions. This means that there is little change in the injection amount of the injection material even when the injection time has elapsed in blasting, suggesting that stable blasting can be performed.
  • Examples 1 to 8 are evaluated as ⁇ , and it is suggested that the change in the injection amount of the injection material is extremely small even after the injection time has elapsed, and thus it can be suitably applied to fine processing such as etching. .
  • a urea resin shot (UG-5 [manufactured by Shinto Kogyo Co., Ltd.]: average particle diameter 400 ⁇ m, specific gravity 1.3), glass beads (GB-C [manufactured by Shinto Kogyo Co., Ltd.]: average particle diameter 350 ⁇ m, Specific gravity 2.5), alumina (AF60 [manufactured by Shinto Kogyo Co., Ltd.]: average particle size 250 ⁇ m, specific gravity 4.0), iron grid A (GH-3: average particle size 300 ⁇ m, specific gravity 7.7), iron grid B (GH-14 [manufactured by Shinto Kogyo Co., Ltd.]: average particle size 1,400 ⁇ m, specific gravity 7.7), white alumina (WA # 600 [manufactured by Shinto Kogyo Co., Ltd.]: average particle size 25 ⁇ m, specific gravity 4.
  • Example 1 the results of deburring of aluminum die cast product is described as a second embodiment.
  • carbonized_material shot was a satin finish.
  • the iron grid B and the carbide shot have high processing ability, but depending on the processing purpose and material, the processing capacity becomes excessive. From this, it was suggested that it is necessary to appropriately select the injection material in accordance with the material and properties of the workpiece and the processing purpose.
  • the slurry stirring mechanism of the present invention By using the slurry stirring mechanism of the present invention, it is possible to provide a blasting apparatus and a blasting method capable of performing stable blasting and easily adjusting the processing capability.
  • the processing that requires a relatively large change in the amount of propellant (for example, deburring), and the processing that requires management of the amount of propellant (for example, etching) A wide range of blasting can be performed.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mixers Of The Rotary Stirring Type (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2012/067558 2011-09-26 2012-07-10 ブラスト加工装置及びブラスト加工方法 WO2013046854A1 (ja)

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JP2013535998A JP6020456B2 (ja) 2011-09-26 2012-07-10 ブラスト加工装置及びブラスト加工方法
KR1020137030232A KR101882000B1 (ko) 2011-09-26 2012-07-10 블라스트 가공 장치 및 블라스트 가공 방법
CN201280026463.4A CN103596728A (zh) 2011-09-26 2012-07-10 喷丸加工装置以及喷丸加工方法

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JP2011-208613 2011-09-26
JP2011208613 2011-09-26

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Cited By (4)

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Publication number Priority date Publication date Assignee Title
JP2017030117A (ja) * 2015-08-04 2017-02-09 マツダ株式会社 固体粒噴射装置
JP2019157740A (ja) * 2018-03-12 2019-09-19 日本特殊陶業株式会社 エンジン構成部品
JP2020127980A (ja) * 2019-02-08 2020-08-27 新東工業株式会社 研磨加工装置、研磨加工システム及び研磨加工方法
KR20210120993A (ko) 2019-02-01 2021-10-07 신토고교 가부시키가이샤 슬러리 공급 장치, 습식 블라스트 가공 장치 및 슬러리 공급 방법

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JP2006206406A (ja) * 2005-01-31 2006-08-10 Clean Venture 21:Kk 半導体粒子の製造方法および製造装置
JP2007083365A (ja) * 2005-09-22 2007-04-05 Towa Corp 切断装置
JP2008229795A (ja) * 2007-03-22 2008-10-02 Towa Corp 加工装置及び加工方法

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JP4169239B2 (ja) * 2000-10-05 2008-10-22 株式会社スギノマシン 液中表面加工装置および加工方法
JP4549812B2 (ja) * 2004-11-02 2010-09-22 株式会社ディスコ 高圧液噴射式切断装置

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JPS63156660A (ja) * 1986-12-17 1988-06-29 Hitachi Plant Eng & Constr Co Ltd 湿式プラスト洗浄装置
JP2004245393A (ja) * 2003-02-17 2004-09-02 Calsonic Kansei Corp 二重管用継手及びその製造方法
JP2006206406A (ja) * 2005-01-31 2006-08-10 Clean Venture 21:Kk 半導体粒子の製造方法および製造装置
JP2007083365A (ja) * 2005-09-22 2007-04-05 Towa Corp 切断装置
JP2008229795A (ja) * 2007-03-22 2008-10-02 Towa Corp 加工装置及び加工方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017030117A (ja) * 2015-08-04 2017-02-09 マツダ株式会社 固体粒噴射装置
JP2019157740A (ja) * 2018-03-12 2019-09-19 日本特殊陶業株式会社 エンジン構成部品
KR20210120993A (ko) 2019-02-01 2021-10-07 신토고교 가부시키가이샤 슬러리 공급 장치, 습식 블라스트 가공 장치 및 슬러리 공급 방법
JP2020127980A (ja) * 2019-02-08 2020-08-27 新東工業株式会社 研磨加工装置、研磨加工システム及び研磨加工方法
JP7146173B2 (ja) 2019-02-08 2022-10-04 新東工業株式会社 研磨加工装置、研磨加工システム及び研磨加工方法

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KR20140066667A (ko) 2014-06-02
CN103596728A (zh) 2014-02-19
JPWO2013046854A1 (ja) 2015-03-26
JP6020456B2 (ja) 2016-11-02
KR101882000B1 (ko) 2018-07-25

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