WO2012136158A3 - 单片双轴桥式磁场传感器 - Google Patents
单片双轴桥式磁场传感器 Download PDFInfo
- Publication number
- WO2012136158A3 WO2012136158A3 PCT/CN2012/075956 CN2012075956W WO2012136158A3 WO 2012136158 A3 WO2012136158 A3 WO 2012136158A3 CN 2012075956 W CN2012075956 W CN 2012075956W WO 2012136158 A3 WO2012136158 A3 WO 2012136158A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- magnetic field
- sensor
- bridge
- axis
- field sensor
- Prior art date
Links
- 238000000034 method Methods 0.000 abstract 2
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000696 magnetic material Substances 0.000 abstract 1
- 230000005415 magnetization Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP12767837.3A EP2696210B1 (en) | 2011-04-06 | 2012-05-23 | Single-chip two-axis bridge-type magnetic field sensor |
JP2014502982A JP6193212B2 (ja) | 2011-04-06 | 2012-05-23 | シングルチップ2軸ブリッジ型磁界センサ |
US14/110,106 US9575143B2 (en) | 2011-04-06 | 2012-05-23 | Single-chip two-axis magnetic field sensor |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110084594.5A CN102226835A (zh) | 2011-04-06 | 2011-04-06 | 单一芯片双轴磁场传感器及其制备方法 |
CN201110084594.5 | 2011-04-06 | ||
CN201110315913.9 | 2011-10-18 | ||
CN201110315913.9A CN102435963B (zh) | 2011-04-06 | 2011-10-18 | 单片双轴桥式磁场传感器 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012136158A2 WO2012136158A2 (zh) | 2012-10-11 |
WO2012136158A3 true WO2012136158A3 (zh) | 2012-11-29 |
Family
ID=44807819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2012/075956 WO2012136158A2 (zh) | 2011-04-06 | 2012-05-23 | 单片双轴桥式磁场传感器 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9575143B2 (zh) |
EP (1) | EP2696210B1 (zh) |
JP (1) | JP6193212B2 (zh) |
CN (1) | CN102226835A (zh) |
WO (1) | WO2012136158A2 (zh) |
Families Citing this family (49)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102226835A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片双轴磁场传感器及其制备方法 |
CN102226836A (zh) | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器及其制备方法 |
CN202013413U (zh) * | 2011-04-06 | 2011-10-19 | 江苏多维科技有限公司 | 单一芯片桥式磁场传感器 |
CN102621504B (zh) * | 2011-04-21 | 2013-09-04 | 江苏多维科技有限公司 | 单片参考全桥磁场传感器 |
CN102565727B (zh) * | 2012-02-20 | 2016-01-20 | 江苏多维科技有限公司 | 用于测量磁场的磁电阻传感器 |
CN102590768B (zh) * | 2012-03-14 | 2014-04-16 | 江苏多维科技有限公司 | 一种磁电阻磁场梯度传感器 |
US9411024B2 (en) | 2012-04-20 | 2016-08-09 | Infineon Technologies Ag | Magnetic field sensor having XMR elements in a full bridge circuit having diagonal elements sharing a same shape anisotropy |
CN102809665B (zh) | 2012-06-04 | 2016-08-03 | 江苏多维科技有限公司 | 一种磁电阻齿轮传感器 |
CN103076577B (zh) * | 2012-08-03 | 2016-12-21 | 陈磊 | 一种检测磁场和加速度的磁阻传感器芯片 |
CN103076578B (zh) * | 2013-02-01 | 2017-03-29 | 上海华虹宏力半导体制造有限公司 | 各向异性磁阻结构磁场强度检测装置 |
CN203133257U (zh) * | 2013-03-18 | 2013-08-14 | 江苏多维科技有限公司 | 用于验钞机磁头的tmr半桥磁场梯度传感器芯片 |
CN104104376B (zh) * | 2013-04-01 | 2018-01-02 | 江苏多维科技有限公司 | 推挽式芯片翻转半桥磁阻开关 |
CN103592608B (zh) | 2013-10-21 | 2015-12-23 | 江苏多维科技有限公司 | 一种用于高强度磁场的推挽桥式磁传感器 |
JP2015133377A (ja) * | 2014-01-10 | 2015-07-23 | Tdk株式会社 | 磁気検出素子および回転検出装置 |
BR112016016957A2 (pt) | 2014-01-28 | 2018-05-08 | Crocus Tech Inc | circuitos analógicos incorporando unidades lógicas magnéticas |
EP3100312A1 (en) | 2014-01-28 | 2016-12-07 | Crocus Technology Inc. | Mlu configured as analog circuit building blocks |
CN103954920B (zh) * | 2014-04-17 | 2016-09-14 | 江苏多维科技有限公司 | 一种单芯片三轴线性磁传感器及其制备方法 |
US10317480B2 (en) * | 2014-10-15 | 2019-06-11 | Infineon Technologies Ag | Magneto resistive device |
JP6352195B2 (ja) * | 2015-01-14 | 2018-07-04 | Tdk株式会社 | 磁気センサ |
CN104677266B (zh) * | 2015-01-20 | 2017-11-10 | 江苏多维科技有限公司 | 强磁场误差校准的磁电阻角度传感器及其校准方法 |
CN104596605B (zh) * | 2015-02-04 | 2019-04-26 | 江苏多维科技有限公司 | 一种磁自动化流量记录器 |
JP2016186476A (ja) * | 2015-03-27 | 2016-10-27 | Tdk株式会社 | 磁気センサ及び磁気式エンコーダ |
TWI633321B (zh) | 2015-03-30 | 2018-08-21 | 財團法人工業技術研究院 | 用於磁場感測之穿隧磁阻裝置 |
CN105044631B (zh) * | 2015-08-28 | 2018-08-07 | 江苏多维科技有限公司 | 一种半翻转两轴线性磁电阻传感器 |
CN105136349B (zh) * | 2015-09-01 | 2017-10-13 | 宁波希磁电子科技有限公司 | 一种磁性压力传感器 |
US9739842B2 (en) | 2016-01-26 | 2017-08-22 | Nxp Usa, Inc. | Magnetic field sensor with skewed sense magnetization of sense layer |
US9841469B2 (en) | 2016-01-26 | 2017-12-12 | Nxp Usa, Inc. | Magnetic field sensor with multiple sense layer magnetization orientations |
US9897667B2 (en) | 2016-01-26 | 2018-02-20 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
JP6747836B2 (ja) * | 2016-03-23 | 2020-08-26 | アルプスアルパイン株式会社 | 磁気センサおよびその製造方法 |
US10545196B2 (en) * | 2016-03-24 | 2020-01-28 | Nxp Usa, Inc. | Multiple axis magnetic sensor |
US10145907B2 (en) | 2016-04-07 | 2018-12-04 | Nxp Usa, Inc. | Magnetic field sensor with permanent magnet biasing |
US9933496B2 (en) | 2016-04-21 | 2018-04-03 | Nxp Usa, Inc. | Magnetic field sensor with multiple axis sense capability |
WO2017212752A1 (ja) * | 2016-06-06 | 2017-12-14 | 株式会社村田製作所 | 磁気センサ、電流センサ、および磁気センサの製造方法 |
CN108983125A (zh) * | 2017-06-01 | 2018-12-11 | 深迪半导体(上海)有限公司 | 一种磁阻传感器 |
US10794968B2 (en) * | 2017-08-24 | 2020-10-06 | Everspin Technologies, Inc. | Magnetic field sensor and method of manufacture |
JP6597820B2 (ja) * | 2018-03-12 | 2019-10-30 | Tdk株式会社 | 磁気センサおよび位置検出装置 |
CN108267632A (zh) * | 2018-04-13 | 2018-07-10 | 贵州雅光电子科技股份有限公司 | 一种基于线圈偏置的amr线性传感器及其设计方法 |
CN108717169B (zh) * | 2018-06-22 | 2020-10-09 | 钱正洪 | 一种二维磁场传感器 |
CN109342978B (zh) * | 2018-11-06 | 2021-03-30 | 中国石油天然气集团有限公司 | 大地电磁各向异性采集系统、方法及设备 |
CN109471051B (zh) * | 2018-12-24 | 2023-12-12 | 珠海多创科技有限公司 | 一种tmr全桥磁传感器及其制备方法 |
CN109633496A (zh) * | 2018-12-27 | 2019-04-16 | 北京航空航天大学青岛研究院 | 单、双轴磁场传感器与其制备方法以及设备 |
CN109883456B (zh) | 2019-04-02 | 2024-06-28 | 江苏多维科技有限公司 | 一种磁电阻惯性传感器芯片 |
US11428758B2 (en) | 2019-08-27 | 2022-08-30 | Western Digital Technologies, Inc. | High sensitivity TMR magnetic sensor |
CN111044953A (zh) * | 2020-01-06 | 2020-04-21 | 珠海多创科技有限公司 | 单一芯片全桥tmr磁场传感器 |
CN112363097B (zh) * | 2020-11-02 | 2021-09-21 | 珠海多创科技有限公司 | 磁电阻传感器芯片 |
CN113466759B (zh) * | 2021-06-30 | 2023-06-13 | 山东大学 | 单、双轴磁阻磁场传感器和制作方法 |
CN113866690B (zh) * | 2021-12-01 | 2022-10-11 | 北京芯可鉴科技有限公司 | 三轴隧穿磁电阻传感器及其制备方法、使用方法 |
CN114609559B (zh) * | 2022-02-22 | 2023-06-02 | 电子科技大学 | 一种三轴霍尔角度传感器 |
CN116930833B (zh) * | 2023-09-18 | 2024-01-12 | 江苏多维科技有限公司 | 磁传感器及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102208530A (zh) * | 2011-03-03 | 2011-10-05 | 江苏多维科技有限公司 | 单一芯片磁性传感器及其激光加热辅助退火装置与方法 |
CN102226835A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片双轴磁场传感器及其制备方法 |
CN102385043A (zh) * | 2011-08-30 | 2012-03-21 | 江苏多维科技有限公司 | Mtj三轴磁场传感器及其封装方法 |
CN102426344A (zh) * | 2011-08-30 | 2012-04-25 | 江苏多维科技有限公司 | 三轴磁场传感器 |
CN102435963A (zh) * | 2011-04-06 | 2012-05-02 | 江苏多维科技有限公司 | 单片双轴桥式磁场传感器 |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05281319A (ja) * | 1992-04-02 | 1993-10-29 | Fujitsu Ltd | 磁気センサ |
DE4335826A1 (de) * | 1993-10-20 | 1995-04-27 | Siemens Ag | Meßvorrichtung mit magnetoresistiven Sensoreinrichtungen in einer Brückenschaltung |
US6822443B1 (en) * | 2000-09-11 | 2004-11-23 | Albany Instruments, Inc. | Sensors and probes for mapping electromagnetic fields |
JPH11354860A (ja) * | 1998-06-10 | 1999-12-24 | Read Rite Smi Kk | スピンバルブ磁気変換素子及び磁気ヘッド |
US6252796B1 (en) * | 1998-08-14 | 2001-06-26 | U.S. Philips Corporation | Device comprising a first and a second ferromagnetic layer separated by a non-magnetic spacer layer |
DE10009944A1 (de) * | 2000-03-02 | 2001-09-13 | Forschungszentrum Juelich Gmbh | Anordnung zum Messen eines Magnetfeldes und Verfahren zum Herstellen einer Anordnung zum Messen eines Magnetfeldes |
JP3596600B2 (ja) * | 2000-06-02 | 2004-12-02 | ヤマハ株式会社 | 磁気センサ及び同磁気センサの製造方法 |
JP2002071775A (ja) * | 2000-08-31 | 2002-03-12 | Yamaha Corp | 磁気センサ |
JP3498737B2 (ja) * | 2001-01-24 | 2004-02-16 | ヤマハ株式会社 | 磁気センサの製造方法 |
US6946834B2 (en) * | 2001-06-01 | 2005-09-20 | Koninklijke Philips Electronics N.V. | Method of orienting an axis of magnetization of a first magnetic element with respect to a second magnetic element, semimanufacture for obtaining a sensor, sensor for measuring a magnetic field |
US6756782B2 (en) * | 2001-06-01 | 2004-06-29 | Koninklijke Philips Electronics N.V. | Magnetic field measuring sensor having a shunt resistor and method of regulating the sensor |
JP2003215222A (ja) * | 2002-01-23 | 2003-07-30 | Denso Corp | 磁気抵抗効果素子センサ |
JP4016857B2 (ja) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | 磁気センサ及びその製造方法 |
JP3835447B2 (ja) * | 2002-10-23 | 2006-10-18 | ヤマハ株式会社 | 磁気センサ、同磁気センサの製造方法及び同製造方法に適したマグネットアレイ |
CN101308200A (zh) | 2002-11-29 | 2008-11-19 | 雅马哈株式会社 | 磁传感器及补偿磁传感器的温度相关特性的方法 |
JP4557134B2 (ja) * | 2004-03-12 | 2010-10-06 | ヤマハ株式会社 | 磁気センサの製造方法、同磁気センサの製造方法に使用されるマグネットアレイ及び同マグネットアレイの製造方法 |
US7075818B2 (en) * | 2004-08-23 | 2006-07-11 | Maglabs, Inc. | Magnetic random access memory with stacked memory layers having access lines for writing and reading |
JP4329745B2 (ja) * | 2005-08-29 | 2009-09-09 | ヤマハ株式会社 | 巨大磁気抵抗効果素子を用いた磁気センサ及び同磁気センサの製造方法 |
JP2006098320A (ja) | 2004-09-30 | 2006-04-13 | Matsushita Electric Ind Co Ltd | 磁気式姿勢検知センサおよびこれを用いた電子機器 |
WO2006070305A1 (en) * | 2004-12-28 | 2006-07-06 | Koninklijke Philips Electronics N.V. | Bridge type sensor with tunable characteristic |
JP4668818B2 (ja) * | 2006-03-13 | 2011-04-13 | アルプス電気株式会社 | 磁気センサ |
JP2008134181A (ja) * | 2006-11-29 | 2008-06-12 | Alps Electric Co Ltd | 磁気検出装置及びその製造方法 |
US7635974B2 (en) * | 2007-05-02 | 2009-12-22 | Magic Technologies, Inc. | Magnetic tunnel junction (MTJ) based magnetic field angle sensor |
EP2003462B1 (en) | 2007-06-13 | 2010-03-17 | Ricoh Company, Ltd. | Magnetic sensor and production method thereof |
JP5157611B2 (ja) | 2007-06-13 | 2013-03-06 | 株式会社リコー | 磁気センサ及びその製造方法 |
JP5066579B2 (ja) * | 2007-12-28 | 2012-11-07 | アルプス電気株式会社 | 磁気センサ及び磁気センサモジュール |
US7965077B2 (en) * | 2008-05-08 | 2011-06-21 | Everspin Technologies, Inc. | Two-axis magnetic field sensor with multiple pinning directions |
JP5174911B2 (ja) * | 2008-07-22 | 2013-04-03 | アルプス電気株式会社 | 磁気センサ及び磁気センサモジュール |
JP2010112881A (ja) * | 2008-11-07 | 2010-05-20 | Hitachi Metals Ltd | 磁気エンコーダ |
DE112010000848B4 (de) * | 2009-02-17 | 2018-04-05 | Allegro Microsystems, Llc | Schaltungen und Verfahren zum Erzeugen eines Selbsttests eines Magnetfeldsensors |
US7999337B2 (en) * | 2009-07-13 | 2011-08-16 | Seagate Technology Llc | Static magnetic field assisted resistive sense element |
JP5353536B2 (ja) * | 2009-07-31 | 2013-11-27 | 大同特殊鋼株式会社 | 磁気センサ信号処理プログラム及び磁気センサモジュール |
US8390283B2 (en) * | 2009-09-25 | 2013-03-05 | Everspin Technologies, Inc. | Three axis magnetic field sensor |
WO2011111648A1 (ja) * | 2010-03-12 | 2011-09-15 | アルプス電気株式会社 | 磁気センサ及びそれを用いた磁気平衡式電流センサ |
US8648401B2 (en) * | 2010-09-17 | 2014-02-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Domain wall assisted spin torque transfer magnetresistive random access memory structure |
US9304151B2 (en) * | 2010-10-14 | 2016-04-05 | Hydra-Electric Company | Bridge sensor compensation and isolated output |
CN102129053B (zh) | 2011-01-20 | 2012-10-10 | 清华大学 | 一种基于巨磁电阻效应的测量磁场方向和强度的传感器 |
US8901924B2 (en) * | 2011-02-21 | 2014-12-02 | Everspin Technologies, Inc. | Apparatus and method for sequentially resetting elements of a magnetic sensor array |
CN102298124B (zh) * | 2011-03-03 | 2013-10-02 | 江苏多维科技有限公司 | 一种独立封装的桥式磁场角度传感器 |
-
2011
- 2011-04-06 CN CN201110084594.5A patent/CN102226835A/zh active Pending
-
2012
- 2012-05-23 WO PCT/CN2012/075956 patent/WO2012136158A2/zh active Application Filing
- 2012-05-23 JP JP2014502982A patent/JP6193212B2/ja active Active
- 2012-05-23 US US14/110,106 patent/US9575143B2/en active Active
- 2012-05-23 EP EP12767837.3A patent/EP2696210B1/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102208530A (zh) * | 2011-03-03 | 2011-10-05 | 江苏多维科技有限公司 | 单一芯片磁性传感器及其激光加热辅助退火装置与方法 |
CN102226835A (zh) * | 2011-04-06 | 2011-10-26 | 江苏多维科技有限公司 | 单一芯片双轴磁场传感器及其制备方法 |
CN102435963A (zh) * | 2011-04-06 | 2012-05-02 | 江苏多维科技有限公司 | 单片双轴桥式磁场传感器 |
CN102385043A (zh) * | 2011-08-30 | 2012-03-21 | 江苏多维科技有限公司 | Mtj三轴磁场传感器及其封装方法 |
CN102426344A (zh) * | 2011-08-30 | 2012-04-25 | 江苏多维科技有限公司 | 三轴磁场传感器 |
Also Published As
Publication number | Publication date |
---|---|
EP2696210A4 (en) | 2015-06-10 |
US20140035573A1 (en) | 2014-02-06 |
JP6193212B2 (ja) | 2017-09-06 |
EP2696210B1 (en) | 2018-07-25 |
CN102226835A (zh) | 2011-10-26 |
EP2696210A2 (en) | 2014-02-12 |
JP2014515470A (ja) | 2014-06-30 |
WO2012136158A2 (zh) | 2012-10-11 |
US9575143B2 (en) | 2017-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2012136158A3 (zh) | 单片双轴桥式磁场传感器 | |
WO2013009461A3 (en) | Absolute angular position sensor using two magnetoresistive sensors | |
ATE543104T1 (de) | Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor | |
CN102298124B (zh) | 一种独立封装的桥式磁场角度传感器 | |
WO2008094813A3 (en) | Magnetic speed, direction, and/or movement extent sensor | |
WO2008128857A3 (de) | Vorrichtung zur erfassung der drehzahl eines rotierbaren teils | |
CN202013413U (zh) | 单一芯片桥式磁场传感器 | |
TW200626922A (en) | Magnetic sensor using giant magnetoresistive elements and method for manufacturing the same | |
JP2013506141A5 (zh) | ||
JP2012013705A5 (zh) | ||
WO2008114615A1 (ja) | 磁気抵抗効果素子を用いた位置検知装置 | |
WO2006124252A3 (en) | Integrated magnetic flux concentrator | |
JP2016525216A5 (zh) | ||
WO2007117392A3 (en) | On-plug magnetic tunnel junction devices based on spin torque transfer switching | |
EP2256463A4 (en) | ANGLE SENSOR, ANGLE SENSOR MANUFACTURING METHOD, AND ANGLE DETECTOR EQUIPMENT USING THE ANGLE SENSOR | |
ATE552488T1 (de) | Gmr-biosensor mit erhöhter empfindlichkeit | |
WO2014099280A3 (en) | Circuits and methods for processing signals generated by a circular vertical hall (cvh) sensing element in the presence of a multi-pole magnet | |
WO2013036345A3 (en) | Magnetic field sensing element combining a circular vertical hall magnetic field sensing element with a planar hall element | |
WO2013170070A3 (en) | Spin transistors employing a piezoelectric layer and related memory, memory systems, and methods of manufacturing thereof | |
CN102226836A (zh) | 单一芯片桥式磁场传感器及其制备方法 | |
WO2011156031A3 (en) | Method and system for providing inverted dual magnetic tunneling junction elements | |
TW200703732A (en) | Magnetic sensor and manufacturing method therefor | |
WO2010005688A3 (en) | Amr array magnetic design for improved sensor flexibility and improved air gap performance | |
WO2012115924A3 (en) | Apparatus and method for sequentially resetting elements of a magnetic sensor array | |
WO2011149274A3 (ko) | 자기적으로 연결되고 수직 자기 이방성을 갖도록 하는 비정질 버퍼층을 가지는 자기 터널 접합 소자 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12767837 Country of ref document: EP Kind code of ref document: A2 |
|
ENP | Entry into the national phase |
Ref document number: 2014502982 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14110106 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012767837 Country of ref document: EP |