ATE543104T1 - Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor - Google Patents

Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor

Info

Publication number
ATE543104T1
ATE543104T1 AT08392004T AT08392004T ATE543104T1 AT E543104 T1 ATE543104 T1 AT E543104T1 AT 08392004 T AT08392004 T AT 08392004T AT 08392004 T AT08392004 T AT 08392004T AT E543104 T1 ATE543104 T1 AT E543104T1
Authority
AT
Austria
Prior art keywords
magnetic tunnel
tunnel junction
magnetic field
multiple layer
magnetic
Prior art date
Application number
AT08392004T
Other languages
English (en)
Inventor
Yimin Guo
Po-Kang Wang
Original Assignee
Magic Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Magic Technologies Inc filed Critical Magic Technologies Inc
Application granted granted Critical
Publication of ATE543104T1 publication Critical patent/ATE543104T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/098Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
  • Thin Magnetic Films (AREA)
AT08392004T 2007-05-02 2008-04-29 Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor ATE543104T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/799,706 US7635974B2 (en) 2007-05-02 2007-05-02 Magnetic tunnel junction (MTJ) based magnetic field angle sensor

Publications (1)

Publication Number Publication Date
ATE543104T1 true ATE543104T1 (de) 2012-02-15

Family

ID=39939104

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08392004T ATE543104T1 (de) 2007-05-02 2008-04-29 Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor

Country Status (4)

Country Link
US (1) US7635974B2 (de)
EP (2) EP2458395B1 (de)
JP (2) JP5596906B2 (de)
AT (1) ATE543104T1 (de)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8792005B2 (en) * 2006-11-29 2014-07-29 Honeywell International Inc. Method and system for automatically determining the camera field of view in a camera network
US7483295B2 (en) * 2007-04-23 2009-01-27 Mag Ic Technologies, Inc. MTJ sensor including domain stable free layer
US8242776B2 (en) * 2008-03-26 2012-08-14 Everspin Technologies, Inc. Magnetic sensor design for suppression of barkhausen noise
US9554774B2 (en) 2008-12-08 2017-01-31 Acist Medical Systems, Inc. System and catheter for image guidance and methods thereof
US8257596B2 (en) * 2009-04-30 2012-09-04 Everspin Technologies, Inc. Two-axis magnetic field sensor with substantially orthogonal pinning directions
EP2264476B1 (de) * 2009-06-17 2012-02-15 Nxp B.V. Magnetfeldsensor
US8427144B2 (en) * 2009-07-28 2013-04-23 Tdk Corporation Magnetic sensor that includes magenetoresistive films and conductors that combine the magnetoresistive films
US9645204B2 (en) * 2010-09-17 2017-05-09 Industrial Technology Research Institute Magnetic field sensors and sensng circuits
US20120068698A1 (en) * 2010-09-17 2012-03-22 Industrial Technology Research Institute Structure of tmr and fabrication method of integrated 3-axis magnetic field sensor and sensing circuit
JP5131339B2 (ja) * 2010-11-17 2013-01-30 Tdk株式会社 回転磁界センサ
US8890266B2 (en) * 2011-01-31 2014-11-18 Everspin Technologies, Inc. Fabrication process and layout for magnetic sensor arrays
CN102226836A (zh) * 2011-04-06 2011-10-26 江苏多维科技有限公司 单一芯片桥式磁场传感器及其制备方法
CN202013413U (zh) 2011-04-06 2011-10-19 江苏多维科技有限公司 单一芯片桥式磁场传感器
CN102226835A (zh) * 2011-04-06 2011-10-26 江苏多维科技有限公司 单一芯片双轴磁场传感器及其制备方法
CN102426344B (zh) 2011-08-30 2013-08-21 江苏多维科技有限公司 三轴磁场传感器
US8947082B2 (en) * 2011-10-21 2015-02-03 University College Cork, National University Of Ireland Dual-axis anisotropic magnetoresistive sensors
US9250070B2 (en) 2011-11-16 2016-02-02 Keith Robert Wootten Rugged three-axis inclinometer
FR2983306B1 (fr) * 2011-11-25 2014-01-10 Commissariat Energie Atomique Capteur de champ magnetique
CN102565727B (zh) * 2012-02-20 2016-01-20 江苏多维科技有限公司 用于测量磁场的磁电阻传感器
TWI431301B (zh) * 2012-03-05 2014-03-21 Ind Tech Res Inst 應用穿隧式磁電阻器之磁場感測方法及磁場感測裝置
WO2013134410A1 (en) 2012-03-07 2013-09-12 Crocus Technology Inc. Magnetic logic units configured to measure magnetic field direction
CN102590768B (zh) 2012-03-14 2014-04-16 江苏多维科技有限公司 一种磁电阻磁场梯度传感器
TWI468715B (zh) 2012-10-22 2015-01-11 Ind Tech Res Inst 用於感測外部磁場之磁場感測器
US9754997B2 (en) * 2012-12-20 2017-09-05 Mark B. Johnson Magnetic tunnel junction based reconfigurable processing system and components
US9865650B2 (en) * 2012-12-20 2018-01-09 Mark B. Johnson Magnetic tunnel junction based logic circuits
US9244134B2 (en) * 2013-01-15 2016-01-26 Infineon Technologies Ag XMR-sensor and method for manufacturing the XMR-sensor
TWI513993B (zh) 2013-03-26 2015-12-21 Ind Tech Res Inst 三軸磁場感測器、製作磁場感測結構的方法與磁場感測電路
CN103412269B (zh) * 2013-07-30 2016-01-20 江苏多维科技有限公司 单芯片推挽桥式磁场传感器
US9713456B2 (en) 2013-12-30 2017-07-25 Acist Medical Systems, Inc. Position sensing in intravascular imaging
US9281168B2 (en) * 2014-06-06 2016-03-08 Everspin Technologies, Inc. Reducing switching variation in magnetoresistive devices
EP3040735A1 (de) 2014-07-17 2016-07-06 Crocus Technology Inc. Vorrichtung, system und verfahren zur erfassung von kommunikationssignalen mit magnetfeldmesselementen
US9689936B2 (en) * 2014-07-17 2017-06-27 Crocus Technology Inc. Apparatus and method for sensing a magnetic field using subarrays of magnetic sensing elements
EP3040999A1 (de) 2014-07-17 2016-07-06 Crocus Technology Inc. Vorrichtung und verfahren zum entwerfen magnetfeldsensorelementen-layout in sensoren
EP3040997A1 (de) 2014-07-17 2016-07-06 Crocus Technology Inc. Vorrichtung und verfahren zur messung eines magnetfelds mithilfe von anordnungen von magnetfeldmesselementen
US9720057B2 (en) 2014-07-17 2017-08-01 Crocus Technology Inc. Apparatus and method for sensing a magnetic field using subarrays of magnetic field sensing elements for high voltage applications
EP3023803B1 (de) * 2014-11-19 2020-03-18 Crocus Technology S.A. MLU-Messzelle zur Abtastung eines externen Magnetfeldes und magnetische Sensorvorrichtung mit der MLU-Zelle
CN107003364B (zh) * 2014-11-24 2019-08-20 森斯泰克有限责任公司 磁阻式惠斯通电桥和具有至少两个这种电桥的角度传感器
TWI633321B (zh) * 2015-03-30 2018-08-21 財團法人工業技術研究院 用於磁場感測之穿隧磁阻裝置
US9816838B2 (en) 2015-08-24 2017-11-14 Infineon Technologies Ag Magnetoresistive angle sensor with linear sensor elements
JP6943883B2 (ja) 2016-05-19 2021-10-06 アシスト・メディカル・システムズ,インコーポレイテッド 血管内プロセスにおける位置検知
US11406352B2 (en) 2016-05-19 2022-08-09 Acist Medical Systems, Inc. Position sensing in intravascular processes
EP3450926B1 (de) * 2016-06-02 2022-02-23 Koganei Corporation Positionserfassungsvorrichtung und aktuator
DE102016110968B4 (de) * 2016-06-15 2019-05-02 Sick Ag Sensor
DE102017121467A1 (de) * 2017-09-15 2019-03-21 Infineon Technologies Ag Magnetsensorbauelement und verfahren zum bestimmen einer rotationsgeschwindigkeit, einer rotationsrichtung und/oder eines rotationswinkels einer magnetischen komponente um eine rotationsachse
US11248971B2 (en) 2018-02-02 2022-02-15 Analog Devices International Unlimited Company Magnetic field torque and/or angle sensor
US11081153B2 (en) * 2018-06-29 2021-08-03 Taiwan Semiconductor Manufacturing Company, Ltd. Magnetic memory device with balancing synthetic anti-ferromagnetic layer
US10871529B2 (en) 2018-09-11 2020-12-22 Honeywell International Inc. Spintronic mechanical shock and vibration sensor device
US10802087B2 (en) 2018-09-11 2020-10-13 Honeywell International Inc. Spintronic accelerometer
US10876839B2 (en) 2018-09-11 2020-12-29 Honeywell International Inc. Spintronic gyroscopic sensor device
CN109633496A (zh) * 2018-12-27 2019-04-16 北京航空航天大学青岛研究院 单、双轴磁场传感器与其制备方法以及设备
US11346894B2 (en) * 2019-03-26 2022-05-31 Allegro Microsystems, Llc Current sensor for compensation of on-die temperature gradient
US11056535B2 (en) * 2019-05-29 2021-07-06 Globalfoundries U.S. Inc. Non-volatile memory element arrays in a wheatstone bridge arrangement
CN112051523B (zh) * 2019-06-05 2023-06-23 爱盛科技股份有限公司 磁场感测装置
US11598828B2 (en) * 2019-08-26 2023-03-07 Western Digital Technologies, Inc. Magnetic sensor array with different RA TMR film
US11199594B2 (en) * 2019-08-27 2021-12-14 Western Digital Technologies, Inc. TMR sensor with magnetic tunnel junctions with a free layer having an intrinsic anisotropy
EP4010661B1 (de) 2019-08-28 2023-10-18 Allegro MicroSystems, LLC Verringerung eines winkelfehlers in einem magnetfeldwinkelsensor
US11169227B2 (en) * 2019-08-28 2021-11-09 Western Digital Technologies, Inc. Dual free layer TMR magnetic field sensor
US11513175B2 (en) * 2020-02-11 2022-11-29 Globalfoundries Singapore Pte. Ltd. Tunnel magnetoresistance sensor devices and methods of forming the same
US11637482B2 (en) 2020-10-08 2023-04-25 Analog Devices International Unlimited Company Magnetic sensor system for motor control
US11460323B2 (en) 2021-02-05 2022-10-04 Analog Devices International Unlimited Company Magnetic field sensor package
US20230012505A1 (en) * 2021-07-19 2023-01-19 The University Court Of The University Of Glasgow Sensor readout circuit for a biomagnetism measurement system

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19510579C2 (de) 1995-03-23 1997-08-21 Inst Physikalische Hochtech Ev Drehwinkel- oder Drehzahlgeber
DE19521617C1 (de) * 1995-06-14 1997-03-13 Imo Inst Fuer Mikrostrukturtec Sensorchip zur Bestimmung eines Sinus- und eines Cosinuswertes sowie seine Verwendung zum Messen eines Winkels und einer Position
US5764567A (en) * 1996-11-27 1998-06-09 International Business Machines Corporation Magnetic tunnel junction device with nonferromagnetic interface layer for improved magnetic field response
JPH10269532A (ja) * 1997-03-25 1998-10-09 Nec Corp スピンバルブ型磁気抵抗効果ヘッド
EP0910802A2 (de) 1997-04-18 1999-04-28 Koninklijke Philips Electronics N.V. Magnetfeldfühler mit wheatstonebrücke
WO1998057188A1 (en) * 1997-06-13 1998-12-17 Koninklijke Philips Electronics N.V. Sensor comprising a wheatstone bridge
JP3263016B2 (ja) * 1997-10-20 2002-03-04 アルプス電気株式会社 スピンバルブ型薄膜素子
DE19810838C2 (de) * 1998-03-12 2002-04-18 Siemens Ag Sensoreinrichtung mit mindestens einem magnetoresistiven Sensor auf einer Substratschicht eines Sensorsubstrats
JP4033572B2 (ja) * 1999-01-25 2008-01-16 株式会社日立グローバルストレージテクノロジーズ 磁気センサ及びその製造方法
DE60037790T2 (de) * 1999-06-18 2009-01-08 Koninklijke Philips Electronics N.V. Magnetisches messsystem mit irreversibler charakteristik, sowie methode zur erzeugung, reparatur und verwendung eines solchen systems
US6633462B2 (en) * 2000-07-13 2003-10-14 Koninklijke Philips Electronics N.V. Magnetoresistive angle sensor having several sensing elements
US6992869B2 (en) * 2001-02-06 2006-01-31 Yamaha Corporation Magnetic resistance device
WO2002084680A1 (de) * 2001-04-12 2002-10-24 Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V. Verfahren zum festlegen von referenzmagnetisierungen in schichtsystemen
US6756782B2 (en) * 2001-06-01 2004-06-29 Koninklijke Philips Electronics N.V. Magnetic field measuring sensor having a shunt resistor and method of regulating the sensor
JP4084036B2 (ja) * 2001-12-04 2008-04-30 株式会社リコー 磁気センサ及びこの磁気センサを用いた方位検知システム
US6771472B1 (en) * 2001-12-07 2004-08-03 Seagate Technology Llc Structure to achieve thermally stable high sensitivity and linear range in bridge GMR sensor using SAF magnetic alignments
US6984978B2 (en) 2002-02-11 2006-01-10 Honeywell International Inc. Magnetic field sensor
JP4085859B2 (ja) * 2002-03-27 2008-05-14 ヤマハ株式会社 磁気センサおよびその製造方法
JP3626469B2 (ja) * 2002-04-19 2005-03-09 三菱電機株式会社 磁気抵抗センサ装置
JP2004045119A (ja) * 2002-07-10 2004-02-12 Tohoku Ricoh Co Ltd 磁気センサ、この磁気センサを用いた方位検知システム及び携帯通信端末
US7312609B2 (en) * 2002-07-26 2007-12-25 Robert Bosch Gmbh GMR sensor element and its use
US7054114B2 (en) * 2002-11-15 2006-05-30 Nve Corporation Two-axis magnetic field sensor
US7054119B2 (en) * 2003-06-18 2006-05-30 Hewlett-Packard Development Company, L.P. Coupled ferromagnetic systems having modified interfaces
US7151652B2 (en) * 2003-06-18 2006-12-19 Hewett-Packard Development Company, L.P. Top-pinned magnetoresistive device having adjusted interface property
JP2005069744A (ja) * 2003-08-21 2005-03-17 Hamamatsu Koden Kk 磁気検出素子
JP5093747B2 (ja) * 2004-11-16 2012-12-12 日本電気株式会社 磁気メモリ
JP2006269955A (ja) * 2005-03-25 2006-10-05 Mitsubishi Electric Corp 磁界検出装置
JP2007024598A (ja) * 2005-07-13 2007-02-01 Denso Corp 磁気センサ
JP4694332B2 (ja) * 2005-09-29 2011-06-08 ヒタチグローバルストレージテクノロジーズネザーランドビーブイ 磁気抵抗効果型磁気ヘッド及び複合型磁気ヘッド

Also Published As

Publication number Publication date
EP2040089A3 (de) 2010-08-04
JP5596906B2 (ja) 2014-09-24
JP2008277834A (ja) 2008-11-13
EP2458395A1 (de) 2012-05-30
EP2040089B1 (de) 2012-01-25
EP2040089A2 (de) 2009-03-25
EP2458395B1 (de) 2013-09-18
JP2014220507A (ja) 2014-11-20
JP5973498B2 (ja) 2016-08-23
US7635974B2 (en) 2009-12-22
US20080272771A1 (en) 2008-11-06

Similar Documents

Publication Publication Date Title
ATE543104T1 (de) Auf magnettunnelübergang (mtj) basierender magnetfeldwinkelsensor
EP2696210B1 (de) Zweiachsiger einzelchip-brücken-magnetfeldsensor
EP2667213B1 (de) Ein einzelpaket brückenmagnetfeldsensor
US9116198B2 (en) Planar three-axis magnetometer
CN102298124B (zh) 一种独立封装的桥式磁场角度传感器
CN1755387B (zh) 利用巨磁致电阻元件的磁传感器及其制造方法
EP2696211B1 (de) Einzelchipbrücken-magnetfeldsensor und herstellungsverfahren dafür
CN102809665B (zh) 一种磁电阻齿轮传感器
CN103592608B (zh) 一种用于高强度磁场的推挽桥式磁传感器
US20090059444A1 (en) Methods and structures for an integrated two-axis magnetic field sensor
CN202421483U (zh) 单一芯片推挽桥式磁场传感器
WO2007035786A3 (en) Magnetic devices having stabilized free ferromagnetic layer or multilayered free ferromagnetic layer
US9983275B2 (en) Method for measuring three-dimensional magnetic fields
JP2013506141A5 (de)
CN103946997A (zh) 具有双隧道势垒的磁器件及其制造方法
CN113574694B (zh) 磁阻元件及磁传感器
JP2008507854A5 (de)
Ferreira et al. 2-axis magnetometers based on full wheatstone bridges incorporating magnetic tunnel junctions connected in series
JP2011503540A5 (de)
EP2860543A1 (de) Magnetische Sensorzelle zur Messung dreidimensionaler Magnetfelder
CN203337808U (zh) 单芯片桥式磁场传感器
CN102721427A (zh) 一种薄膜磁阻传感器元件及薄膜磁阻电桥
CN203587786U (zh) 一种用于高强度磁场的推挽桥式磁传感器
CN105954692A (zh) 具有改善的灵敏度和线性度的磁传感器
JP6864623B2 (ja) 改良されたプログラム可能性及び感度を有するmluベースの磁気センサ